Sample carrier device

Abstract

The invention relates to the technical field of scanning transmission electron microscopes, and provides a sample carrier device which comprises a sample supporting table, a sample slide glass and a sample box. The sample supporting table is provided with a plurality of mounting stations which are uniformly distributed at intervals; the sample slides are arranged on the mounting stations in a one-to-one correspondence manner, and each sample slide is provided with a bearing station for bearing a sample and a fixing assembly for fixing the sample; the sample box is arranged outside the sample supporting table in a wrapping manner; the plurality of sample slides can be sequentially or simultaneously taken out from the mounting station; each sample slide is correspondingly provided with a marking area, and the marking area is used for marking and identifying sample information in each sample slide. According to the sample carrier device, various samples are creatively marked, borne and uniformly contained through the sample slides in a one-to-one correspondence mode, storage, transportation and classification are facilitated, and meanwhile the bearing diversity of the sample carrier device and the uniformity, high efficiency and accuracy of the inspection operation process can be greatly improved.

Description

Technical Field

[0001] The present disclosure relates to the technical field of scanning transmission electron microscopes, and in particular to a sample carrier device. Background Art

[0002] Scanning transmission electron microscopy (STEM) is a widely used microscope with nanometer-level characterization capabilities, often used in the fields of biology, semiconductors, and materials science. The sample carrier device is an important component used to carry samples in STEM observations and meet special observation needs. How to overcome the problem of small space for the sample carrier device, how to make the sample carrier mechanism more powerful, simpler to process, with a larger loading capacity and more accurate control are the general design directions of the sample carrier device.

[0003] In the prior art, the sample carrier device of STEM mainly adopts a sample rod with a single carrying function. However, this rod-shaped sample carrier device has a complex structure, is not easy to process and assemble, and is not convenient for quickly identifying the type of samples and storing them in a classified manner. In addition, the space between the detection area and the pole shoe in the sample carrier is small, and there is a high risk of damaging important components such as the pole shoe during loading and unloading of samples.

[0004] In view of this, there is an urgent need on the market for a sample carrier device of a new structure to solve the problems of the rod-type sample carrier device in the existing scanning transmission electron microscope, such as complex structure, difficulty in processing and assembly, inconvenience in sample classification and storage, and collision and damage during loading and unloading of samples. Summary of the invention

[0005] The disclosed embodiment provides a sample carrier device to solve the problems of the rod-type sample carrier device in the existing scanning transmission electron microscope, such as complex structure, difficulty in processing and assembly, and inconvenience in sample classification, storage, loading and unloading.

[0006] The sample carrier device provided in the embodiment of the present disclosure includes a sample support table, a sample slide and a sample box;

[0007] The sample support table is provided with a plurality of installation stations evenly spaced apart;

[0008] The sample slides are arranged in one-to-one correspondence at the installation stations, and each of the sample slides is provided with a carrying station for carrying the sample and a fixing component for fixing the sample;

[0009] The sample box is wrapped and arranged outside the sample support platform;

[0010] Wherein, a plurality of said sample slides can be taken out from said installation station sequentially or simultaneously;

[0011] Each of the sample slides is also provided with a corresponding marking area, and the marking area is used to mark and identify the sample information in each of the sample slides.

[0012] In one embodiment, the marking area in the sample slide includes one or more of a barcode, a QR code, an image code or a digital code.

[0013] In one possible implementation, the fixing assembly in the sample slide includes an elastic pressing sheet and a supporting block;

[0014] One end of the elastic pressing sheet is fixedly connected to the sample carrier, and the other end extends to form a pressure cover portion located above the carrying station;

[0015] The supporting block is vertically supported and arranged below the pressing cover portion, and can reciprocate along its own extending direction to change the actual supporting height of the pressing cover portion.

[0016] In one possible implementation manner, the elastic pressing sheet in the fixing assembly is also provided with a corresponding avoidance hollow portion in the pressing cover portion;

[0017] The avoidance hollow portion corresponds to the center of the carrying station, so that the pressing portion presses on both sides of the carrying station.

[0018] In one possible implementation manner, a deformation slit conductively connected to the carrying station is provided on one side of the sample carrier;

[0019] The deformable seam can increase in corresponding elastic deformation when the sample is placed on the carrying station.

[0020] In one possible implementation manner, a concave slot is correspondingly provided in a side of the sample carrier opposite to the deformation slit;

[0021] The recessed slot is used for a mechanical gripper to clamp and move the sample carrier.

[0022] In one possible implementation manner, the sample support is further provided with a plurality of inlets and outlets;

[0023] The plurality of sample carriers can be placed in the installation station through the inlet and outlet in a one-to-one correspondence, or can be taken out from the installation station through the inlet and outlet in a one-to-one correspondence.

[0024] Along the injection direction of the sample carrier, the inlet and outlet are configured as a constriction with a gradually decreasing aperture.

[0025] In one possible implementation manner, along the injection direction of the sample carrier, a blocking platform for blocking and limiting the position of the sample carrier is further provided at the end of the inlet and outlet.

[0026] In one possible implementation manner, a detection hole is further provided in the box body of the sample box;

[0027] The detection holes are used for the detector to detect the corresponding placement status of the plurality of sample carriers in the containing space of the sample box.

[0028] In one embodiment, one side of the sample box is further provided with an opening and closing door;

[0029] When the opening and closing door is in an open state, it can be connected to the containing space to form a passage for the sample support table to enter and exit.

[0030] Compared with the prior art, the technical solution provided by the embodiments of the present disclosure has the following advantages:

[0031] The sample carrier device provided in the embodiment of the present disclosure innovatively marks and carries a variety of samples one by one through sample slides, and all the sample slides are installed in a corresponding manner through multiple installation stations in a sample support, so that a whole set of multiple types of samples can be uniformly contained, which is convenient for storage, transportation and classification. At the same time, it can also greatly improve the carrying diversity of the sample carrier device, the uniformity, efficiency and accuracy of the inspection operation process, thereby helping to improve the detection efficiency of the electron microscope equipment.

[0032] In addition, the electronic device provided by the embodiment of the present disclosure includes the above-mentioned scroll screen device, which can achieve the same beneficial effects and will not be repeated here.

[0033] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The above and other objects, features and advantages of the exemplary embodiments of the present disclosure will become readily understood by reading the detailed description below with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present disclosure are shown in an exemplary and non-limiting manner, in which:

[0035] In the drawings, the same or corresponding reference numerals represent the same or corresponding parts.

[0036] Figure 1 A structural diagram of a sample carrier device provided by an embodiment of the present disclosure is shown;

[0037] Figure 2 The structure diagram of the sample carrier device provided in the embodiment of the present disclosure is shown (excluding the sample box 3);

[0038] Figure 3The structure diagram of the sample carrier 2 in the sample carrier device provided in the embodiment of the present disclosure is shown;

[0039] Figure 4 The structure diagram of the sample box 3 in the sample carrier device provided in the embodiment of the present disclosure is shown.

[0040] Explanation of the numbers in the figure: 1. Sample support table; 11. Installation station; 12. Inlet and outlet; 13. Blocking table;

[0041] 2. Sample carrier; 21. Carrying station; 22. Fixing assembly; 221. Elastic pressing sheet; 221a. Avoidance hollow portion; 222. Support block; 23. Marking area; 24. Deformation seam; 25. Concave card slot;

[0042] 3. Sample box; 31. Detection hole; 32. Opening and closing door. DETAILED DESCRIPTION

[0043] In order to make the purpose, features, and advantages of the present disclosure more obvious and easy to understand, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0044] The embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0045] Combination Figure 1 and Figure 2 As shown, the embodiment of the present disclosure provides a sample carrier device, which includes a sample support table 1, a sample slide 2 and a sample box 3; the sample support table 1 is provided with a plurality of installation stations 11 evenly spaced; the sample slides 2 are arranged in a one-to-one correspondence at the installation stations 11, and each sample slide 2 is respectively provided with a carrying station 21 for carrying a sample and a fixing component 22 for fixing the sample; the sample box 3 is wrapped and arranged outside the sample support table 1;

[0046] Among them, multiple sample slides 2 can be taken out from the installation station 11 in sequence or simultaneously; each sample slide 2 is also correspondingly provided with a marking area 23, and the marking area 23 is used to mark and identify the sample information in each sample slide 2.

[0047] The sample carrier device can be specifically but not limitedly used as a sample carrier in a STEM (scanning transmission electron microscope). This example is used to illustrate the use process.

[0048] When the sample carrier device is used, firstly, a plurality of samples can be placed one by one in the loading station 21 of the sample carrier 2, and then the samples are fixed in the loading station 21 by the fixing assembly 22, and then a plurality of sample carriers 2 are placed one by one in the installation station 11 of the sample support 1, and the sample support 1 is sealed and wrapped by the sample box 3, so that the plurality of samples can be fixedly sealed and placed one by one. When one or more samples need to be tested, the sample box 3 can be opened by a manipulator, and the sample support 1 can be taken out of the sample box 3, and then the marking area 23 in each sample carrier 2 can be scanned and identified by the scanning probe or the visual system in the manipulator, so as to obtain the sample information in each sample carrier 2, so that the manipulator can take out the one or more sample carriers 2 to be tested from the installation station 11 corresponding to the sample support 1 according to the instruction, and send them to the subsequent detection device for testing.

[0049] Furthermore, when one or more samples are sent back from the detection device after detection, the scanning probe in the robot can also scan and identify the marking area 23 in each sample carrier 2, and according to the sample information in each sample carrier 2 identified, it can be placed in the installation station 11 in the sample support 1 accordingly, and finally the sample support 1 is inserted into the sample box 3, and then the sample box 3 is covered and sealed.

[0050] Compared with the prior art method of using a sample rod to load a single sample for inspection in STEM, the sample carrier device provided in the embodiment of the present disclosure innovatively marks and carries a variety of samples one by one through a sample carrier 2, and installs all the sample carriers 2 in a corresponding manner through a plurality of installation stations 11 in a sample support 1, so that a whole set of multiple types of samples can be uniformly contained, which is convenient for storage, transportation and classification. At the same time, it can also greatly improve the carrying diversity of the sample carrier device, the uniformity, efficiency and accuracy of the inspection operation process, thereby helping to improve the detection efficiency of the electron microscope equipment.

[0051] In one embodiment, the marking area 23 in the sample slide 2 includes one or more of a barcode, a QR code, an image code or a digital code.

[0052] Specific, combined Figure 3To further explain in detail, the marking area 23 in the sample carrier 2 can be specifically but not limited to being set at one or more corners of the sample carrier 2, and the marking area 23 can be specifically but not limited to being set as one or more of a raised or recessed bar code, a two-dimensional code, an image code or a digital code, and the color of the marking area 23 can even be set to be different from the color of the sample carrier 2. This can facilitate the scanning probe or visual system in the robot to efficiently identify the marking areas 23 in multiple sample carriers 2, so that the specific type information of the sample placed in the carrying station 21 in the sample carrier 2 can be effectively and quickly obtained through the marking area 23.

[0053] The specific arrangement of the marking area 23 has the beneficial effects of simple structure, easy processing, and efficient recognition by a scanning probe or a visual system.

[0054] In one embodiment, the fixing assembly 22 in the sample carrier 2 includes an elastic pressing piece 221 and a supporting block 222; one end of the elastic pressing piece 221 is fixedly connected to the sample carrier 2, and the other end extends to form a pressure covering portion located above the carrying station 21; the supporting block 222 is vertically supported and arranged below the pressure covering portion, and can move back and forth along its own extension direction to change the actual support height of the pressure covering portion.

[0055] Specific, combined Figure 2 and Figure 3 To further explain in detail, the fixing component 22 in the sample carrier 2 is specifically configured to include an elastic pressing plate 221 and a supporting block 222. The overall structural shape of the elastic pressing plate 221 itself can be configured to be an arch-shaped plate, and the supporting station 21 can be correspondingly configured to be a concave spherical shape, so that a space for accommodating the fixed sample can be formed between the elastic pressing plate 221 and the supporting station 21.

[0056] Since one end of the elastic pressing piece 221 is fixedly connected to the sample slide 2, and the other end extends to form a pressure cover portion located above the carrying station 21, the elastic pressing piece 221 can apply a downward pressure elastic force toward the sample slide 2 through the pressure cover portion under the action of its own structural elastic force. In addition, the support block 222 is vertically supported and arranged below the pressure cover portion, and a through slot for the pressure cover portion to slide and insert can be correspondingly arranged in the support block 222, and the slot width can be gradually increased or decreased, so that when the support block 222 reciprocates along its own extension direction, the support block 222 can change the actual support height of the pressure cover portion accordingly, thereby adjusting the actual elastic force applied by the elastic pressing piece 221 to the sample slide 2, so as to facilitate the staff to place or remove the sample from the carrying station 21, or to facilitate the staff to adjust the actual position of the sample in the carrying station 21.

[0057] The specific configuration of the fixing assembly 22 has the beneficial effects of being simple in structure and being able to flexibly adjust the actual fixing force on the sample.

[0058] In one embodiment, the elastic pressing piece 221 in the fixing component 22 is also provided with an avoidance hollow portion 221a in the pressure cover portion; the avoidance hollow portion 221a corresponds to the center of the carrying station 21 so that the pressure cover portion covers both sides of the carrying station 21.

[0059] Specific, combined Figure 3 To further explain in detail, the elastic pressing sheet 221 is also provided with an avoidance hollow portion 221a in the pressure cover portion, and the avoidance hollow portion 221a can be specifically configured as a notch groove, so that the pressure cover portion in the elastic pressing sheet 221 is in an "concave" shape as a whole. Since the avoidance hollow portion 221a corresponds to the center of the carrying station 21, not only can the sample be pressed and fixed in the carrying station 21 by the corresponding solid portion in the pressure cover portion, but the sample can also be directly avoided and exposed by the avoidance hollow portion 221a, so that the scanning transmission electron microscope can better observe the sample through the avoidance hollow portion 221a.

[0060] The specific configuration of the avoidance hollow portion 221 a has the beneficial effects of simple structure and being able to facilitate better observation of samples.

[0061] In one embodiment, a deformation slit 24 conductively connected to the carrying station 21 is provided on one side of the sample carrier 2 ; the deformation slit 24 can increase in elastic deformation correspondingly when the sample is placed on the carrying station 21 .

[0062] Specific, combined Figure 3 To further explain in detail, a deformation seam 24 connected to the carrying station 21 is provided on one side of the sample carrier 2. The deformation seam 24 can be specifically configured as a linear seam located at the center line of the sample carrier 2. In this way, when the fixing component 22 presses and fixes the sample to the carrying station 21 in the sample carrier 2, due to the different sizes and hardness of the samples, the pressing and fixing forces applied by the fixing component 22 will also be different accordingly. When the pressing and fixing force is large, the sample carrier 2 will produce a certain deformation. Therefore, a deformation seam 24 is provided in the sample carrier 2, which can improve the elastic deformation performance of the sample carrier 2, so that the sample carrier 2 can be more pressure-resistant and more stably withstand the fixing pressure of the fixing component 22.

[0063] The specific arrangement of the deformation seam 24 has the beneficial effects of simple structure and being able to improve the pressure resistance and deformation performance of the sample carrier 2 .

[0064] In one embodiment, a concave slot 25 is correspondingly provided in a side of the sample carrier 2 opposite to the deformation slit 24 ; the concave slot 25 is used for a mechanical gripper to clamp and move the sample carrier 2 .

[0065] Specific, combined Figure 3 To further explain in detail, a concave card slot 25 is correspondingly provided on the side of the sample carrier 2 opposite to the deformation slit 24, and the extension direction of the concave card slot 25 can be specifically but not limited to being set perpendicular to the extension direction of the deformation slit 24, and the concave card slot 25 can be specifically set as a slot body with a concave arc surface at the bottom, so that when the mechanical gripper needs to clamp and move the sample carrier 2, it is only necessary to insert the claw head in the mechanical gripper into the concave card slot 25 to grasp and pinch the sample carrier 2. Alternatively, an elastic plug-in strip corresponding to the shape of the concave card slot 25 can be set in the mechanical gripper, and the sample carrier 2 can be grasped by correspondingly inserting and clamping the elastic plug-in strip into the concave card slot 25.

[0066] The specific configuration of the above-mentioned recessed slot 25 has the beneficial effects of simple structure and being able to grab and move the sample carrier 2 .

[0067] In one possible implementation manner, a plurality of inlets and outlets 12 are further provided in the sample support 1; a plurality of sample slides 2 can be placed in the installation station 11 through the inlets and outlets 12 one by one, or can be taken out from the installation station 11 through the inlets and outlets 12 one by one; along the injection direction of the sample slides 2, the inlets and outlets 12 are arranged to be in a tapered shape with a gradually decreasing aperture.

[0068] Specific, combined Figure 2 For further detailed description, it can be specifically but not limited to opening a plurality of evenly spaced and equal-width inlets and outlets 12 in a long side of the sample holder 1, and the plurality of inlets and outlets 12 are respectively connected one-to-one with the mounting station 11 in the sample holder 1, so that the plurality of sample carriers 2 can be respectively placed in the mounting station 11 corresponding to the inlets and outlets 12, or can be respectively taken out from the mounting station 11 through the inlets and outlets 12.

[0069] Moreover, along the injection direction of the sample carrier 2, the inlet and outlet 12 are arranged to be a constricted shape with a gradually decreasing aperture, so that when the robot moves the sample carrier 2 through the inlet and outlet 12 and places it on the installation station 11, even if the sample carrier 2 is not completely aligned with the inlet and outlet 12, but in the process of the sample carrier 2 being gradually inserted into the inlet and outlet 12, the inlet and outlet 12 in the constricted shape can be automatically guided to the center with the sample carrier 2, so that the sample carrier 2 can be automatically centered and aligned and placed in the installation station 11.

[0070] The specific arrangement of the inlet and outlet 12 has the beneficial effects of being simple in structure and being able to automatically center the sample slide 2 during placement.

[0071] In one embodiment, along the injection direction of the sample carrier 2 , a blocking platform 13 for blocking and limiting the sample carrier 2 is further provided at the end of the inlet and outlet 12 .

[0072] Specific, combined Figure 2 To further explain in detail, the blocking platform 13 can be specifically but not limited to being set in a rectangular shape, and a blocking platform 13 can be set between two adjacent inlets and outlets 12, so that when the sample carrier 2 passes through the inlet and outlet 12 and enters the installation station 11, the sample carrier 2 is completely placed in place, and the blocking platform 13 can correspondingly block and limit the sample carrier 2, thereby ensuring the accuracy of the placement of the sample carrier 2 in the installation station 11.

[0073] The specific configuration of the blocking platform 13 has the beneficial effects of being simple in structure and being able to further improve the placement accuracy of the sample carrier 2 in the installation station 11 .

[0074] In one embodiment, a detection hole 31 is further provided in the box body of the sample box 3 ; the detection hole 31 is used for a detector to detect corresponding placement states of a plurality of sample slides 2 in the containing space of the sample box 3 .

[0075] Specific, combined Figure 1 and Figure 4 To further explain in detail, the detection hole 31 can be specifically but not limited to being opened in the side box body, the upper box body or the bottom box body of the sample box 3, and the detection hole 31 can be set in a one-to-one correspondence with the installation station 11, so that the detection probe in the electron microscope system can respectively detect whether a sample carrier 2 is placed in each installation station 11 through the detection hole 31, so that the detection probe can determine whether the robot arm has normally and accurately grasped the sample carrier 2 to be tested based on the status information of the sample carrier 2 before and after grasping the sample carrier 2, thereby further ensuring the detection accuracy of the scanning transmission electron microscope.

[0076] In one embodiment, an opening and closing door 32 is further provided on one side of the sample box 3 ; when the opening and closing door 32 is opened, it can be connected to the containing space to form a passage for the sample holder 1 to enter and exit.

[0077] Specific, combined Figure 1 and Figure 4 To further explain in detail, the opening and closing door 32 can be specifically but not limited to be set on one side of the sample box 3 by flipping. In this way, by flipping and opening and closing the opening and closing door 32, the containing space inside the sample box 3 can be opened to form a passage for the sample support 1 to enter and exit, or the containing space inside the sample box 3 can be closed by the opening and closing door 32, which not only makes it convenient to take and put the sample support 1, but also ensures that the sample support 1 can be fully wrapped, covered and protected by the sample box 3.

[0078] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present disclosure, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0079] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A sample carrier device, characterized in that: include: The sample support table is equipped with multiple installation stations evenly spaced; The sample slides are arranged in one-to-one correspondence at the installation stations, and each of the sample slides is provided with a carrying station for carrying the sample and a fixing component for fixing the sample; A sample box, wrapped and arranged outside the sample support platform; Wherein, a plurality of said sample slides can be taken out from said installation station sequentially or simultaneously; Each of the sample slides is also provided with a corresponding marking area, and the marking area is used to mark and identify the sample information in each of the sample slides.

2. The sample carrier device according to claim 1, characterized in that: The marking area in the sample slide includes one or more of a barcode, a QR code, an image code or a digital code.

3. The sample carrier device according to claim 1, characterized in that: The fixing assembly in the sample slide comprises: An elastic pressing sheet, one end of which is fixedly connected to the sample carrier and the other end of which extends to form a pressing cover portion located above the carrying station; The supporting block is vertically supported and arranged below the pressure cover part, and can reciprocate along its own extension direction to change the actual supporting height of the pressure cover part.

4. The sample carrier device according to claim 3, characterized in that: The elastic pressing sheet in the fixing assembly is also provided with a corresponding avoidance hollow portion in the pressing cover portion; The avoidance hollow portion corresponds to the center of the carrying station, so that the pressing portion presses on both sides of the carrying station.

5. The sample carrier device according to claim 1, characterized in that: A deformation slit is provided on one side of the sample carrier sheet and is conductively connected to the carrying station; The deformable seam can increase in corresponding elastic deformation when the sample is placed on the carrying station.

6. The sample carrier device according to claim 5, characterized in that: A concave slot is correspondingly provided on a side of the sample carrier opposite to the deformation slit; The recessed slot is used for a mechanical gripper to clamp and move the sample carrier.

7. The sample carrier device according to claim 1, characterized in that: The sample support platform is also provided with a plurality of inlets and outlets; The plurality of sample carriers can be placed in the installation station through the inlet and outlet in a one-to-one correspondence, or can be taken out from the installation station through the inlet and outlet in a one-to-one correspondence; Along the injection direction of the sample carrier, the inlet and outlet are configured to be in a constricted shape with a gradually decreasing aperture.

8. The sample carrier device according to claim 7, characterized in that: Along the injection direction of the sample carrier, a blocking platform for blocking and limiting the position of the sample carrier is also provided at the end of the inlet and outlet.

9. The sample carrier device according to any one of claims 1 to 8, characterized in that: The sample box body is also provided with a detection hole; The detection holes are used for the detector to detect the corresponding placement status of the plurality of sample carriers in the containing space of the sample box.

10. The sample carrier device according to claim 9, characterized in that: One side of the sample box is also provided with an opening and closing door; When the opening and closing door is in an open state, it can be connected to the containing space to form a passage for the sample support table to enter and exit.

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