Efficient processing method for EML chip test data

Abstract

The invention discloses an efficient processing method for EML chip test data. The method comprises the steps that software upgrading is conducted on an EML chip test machine, and a JMP interface is added; collecting summarized test data of different design items and different test items corresponding to the design items; and performing data processing on the summarized test data, and importing the processed data into JMP software to obtain a statistical analysis result of the EML chip test data. According to the method, the EML chip test data can be efficiently processed, and the statistical analysis result of the EML chip test data visually shows the influence of different designs of the EML chip on the performance of the EML chip, so that an engineer can quickly identify and check problems influencing the performance of the EML chip from a design end; therefore, the yield and the quality of semiconductor products are further improved, and the working efficiency and the accuracy of engineers are greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor chip testing, and in particular to an efficient data processing method. Background Art

[0002] With the rapid advent of the digital age, optical communication technology, as a vital and booming branch in the field of communication, is evolving and innovating at an unprecedented speed. This technology is not only the cornerstone for the efficient operation of the modern information society, but also an indispensable core component of the Internet infrastructure, supporting the rapid and stable transmission of massive data around the world. Optical fiber networks, known as the "arteries" of the Internet, provide high-speed, large-capacity, and low-latency information transmission by virtue of their own characteristics, meeting the growing communication needs. EML (Electro-absorption Modulated Laser) chips are widely used in the field of high-speed optical communications, especially in data centers, metropolitan area networks, and long-distance transmission systems. At the same time, with the rapid development of semiconductor technology, the complexity and integration of chip design and manufacturing are constantly increasing, and the amount of data required for chip testing is also showing an explosive growth trend. Faced with this challenge, the traditional chip test data processing method has gradually revealed its limitations. Whether in terms of processing efficiency or analysis accuracy, it is difficult to meet the current and future urgent needs of high-performance computing and accurate data analysis. Therefore, it is necessary to explore a more efficient chip test data processing method.

[0003] The invention with application number 202011268516.6 discloses a data processing system and method based on a semiconductor tester. By converting the imitation code bit stream files of each chip manufacturer into a dedicated test code for the tester, and after the test is completed, the batch chip test data is analyzed, and the batch circuit data is analyzed, which solves the limitation of offline burning, reduces manual operations in the test analysis process, and improves production efficiency. However, when the above invention performs data processing, it is impossible to simultaneously analyze multiple chip design types and their corresponding performance, and it is impossible to intuitively feedback the correctness of the design from the test performance. Summary of the invention

[0004] Aiming at the technical problems of time-consuming, inefficient and difficult data analysis of the test data processing method of the traditional EML chip tester, the present invention proposes an efficient data processing method for EML lasers. Compared with the traditional data processing method, by upgrading the chip tester software and adding a JMP interface, efficient statistical analysis of the test data is achieved, and the processing efficiency and analysis accuracy of the chip test data are improved.

[0005] In order to achieve the above object, the technical solution of the present invention is achieved as follows:

[0006] An efficient processing method for EML chip test data comprises the following steps:

[0007] S1. Determine the design items and test items of the EML chip to be tested, and optimize the software of the EML chip tester. When the EML chip tester tests the EML chips to be tested in batches, the design items of different EML chips to be tested are displayed, and the test results are marked with different letters and output;

[0008] S2. Complete the test of the EML chip to be tested under the condition of step S1, obtain summary test data including different design items and different test items corresponding to the design items, and output the summary test data in the form of an electronic spreadsheet to obtain a target electronic data spreadsheet;

[0009] S3. Process the target electronic data table, import the processed target electronic data table into JMP software, and obtain the statistical analysis results of the EML chip test data.

[0010] Preferably, the method for optimizing the software of the EML chip tester is: adding a JMP interface in the machine software of the EML chip tester, setting a number of reserved windows for design items of different EML chips, and defining the design item corresponding to each reserved window.

[0011] Preferably, the EML chip testing machine displays the design items of different EML chips to be tested when batch testing the EML chips to be tested, and outputs the design items with different letters in the test results. The method is as follows: when batch testing the EML chips to be tested, according to the design items of the EML chips to be tested, a reserved window corresponding to the design items of the EML chips to be tested is opened, and unique letter labels are used to represent different design items through manual setting.

[0012] Preferably, the target electronic data table includes at least one design item, and under the design item there is at least one test parameter and value of a test item.

[0013] Preferably, the method for processing data on the target electronic data table is: selecting and changing the data in the column where the design items in the target electronic data table are located to text type, and selecting and changing the data in the column where the test items in the target electronic data table are located to digital type; and performing secondary label classification on the design items in the target electronic data table.

[0014] Preferably, the method for performing secondary label classification on the design items in the target electronic data sheet is: on the basis of using different letters to mark various design items of the EML chip, using a combination of letters and numbers to subdivide and define the design items.

[0015] Preferably, the method of importing the target electronic data spreadsheet after data processing into JMP software to obtain the statistical analysis results of the EML chip test data is as follows: after the text type and digital type data are imported into the JMP software, the corresponding design item and test item title labels are respectively identified and displayed as nominal and continuous variable types; the JMP software distinguishes these two variable types and uses its own graphics generation function to generate a data analysis graph with the design item as the horizontal axis and the test data corresponding to the design item as the vertical axis.

[0016] Preferably, the data analysis graph includes a data graph and eigenvalues ​​calculated by an array.

[0017] Preferably, the design items include epitaxial component composition, grating type, waveguide width and etching depth.

[0018] Preferably, the test items include threshold current, optical output power, extinction ratio and isolation resistance.

[0019] Compared with the prior art, the present invention has the following beneficial effects: the present invention realizes efficient processing of EML chip test data by adding a JMP interface through software upgrade of a traditional EML chip tester; the statistical analysis results of the EML chip test data of the present invention intuitively show the influence of different designs of the EML chip on the performance of the EML chip, so that engineers can quickly identify and troubleshoot problems that affect the performance of the EML chip from the design end, thereby further improving the yield and quality of semiconductor products, and greatly improving the work efficiency and accuracy of engineers. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is the overall flow chart of the present invention.

[0022] Figure 2 This is a data analysis diagram of Example 1 of the present invention.

[0023] Figure 3 This is a data analysis diagram of Example 2 of the present invention. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] An efficient processing method for EML chip test data comprises the following steps:

[0026] S1. Determine the design items and test items of the EML chip to be tested, and optimize the software of the EML chip tester. When the EML chip tester batch tests the EML chips to be tested, the design items of different EML chips to be tested are displayed, and are marked and output with different letters in the test results.

[0027] Furthermore, the design items of the EML chip include epitaxial component composition, grating type, waveguide width and etching depth; the test items of the EML chip include threshold current, optical power, extinction ratio and isolation resistance among the performance indicators.

[0028] Furthermore, the method for optimizing the software of the EML chip tester is as follows: adding a JMP interface to the machine software of the EML chip tester, setting a number of reserved windows for the design items of different EML chips, and defining the design items corresponding to each reserved window. By optimizing the software of the EML chip tester, it is possible to define the complex and cumbersome EML chip data in a labeled manner, and to organize a large amount of complex data in an orderly manner, so as to facilitate the efficient processing and analysis of the EML chip data in the later stage.

[0029] Further, the method for ensuring that the EML chip tester accurately displays the design items of different EML chips to be tested when batch testing the EML chips to be tested, and outputs them with different letters in the test results is as follows: when batch testing the EML chips to be tested, first, according to the design items of the EML chips to be tested, a reserved window corresponding to the design items of the EML chips to be tested is opened, and then, through manual setting, unique letter labels are used to represent different design items. Finally, the EML chip tester marks the different design items of the EML chips with different letters in the test results and outputs them, obtaining labeled EML chip test data. By labeling the EML chip test data, the performance comparison and analysis of multiple label design items in the batch test data can be easily realized in subsequent processing.

[0030] S2. Complete the test of the EML chip to be tested under the condition of step S1, obtain summary test data including different design items and different test items corresponding to the design items, and output the summary test data in the form of an electronic spreadsheet to obtain a target electronic data spreadsheet.

[0031] The target electronic data table includes at least one design item, and under the design item there is at least one test parameter and value of a test item.

[0032] S3. Process the target electronic data table, import the processed target electronic data table into JMP software, and obtain the statistical analysis results of the EML chip test data.

[0033] The method for processing data on the target electronic data table is as follows: selecting and changing the data in the column where the design items in the target electronic data table are located to text type, and selecting and changing the data in the column where the test items in the target electronic data table are located to digital type; performing secondary label classification on the design items in the target electronic data table to obtain detailed labeled summary test results, i.e., the target electronic data table after data processing.

[0034] The method for performing secondary label classification on the design items in the target electronic data table is as follows: performing secondary label classification and definition on the output summary data, based on using different letters to mark different design items of the EML chip, using a combination of letters and numbers to subdivide and define the design items, such as A represents grating design, A1 represents full grating design, and A2 represents partial grating design. The design items can be classified and organized more clearly through subdivision and secondary definition.

[0035] The method of importing the target electronic data table after data processing into the JMP software to obtain the statistical analysis results of the EML chip test data is as follows: due to the format setting in the electronic table, after the text and digital data are imported into the JMP software, the corresponding design item and test item title labels are respectively identified and displayed as nominal and continuous variable types, the design item label is classified as a nominal variable, and this type of label itself does not contain any information about data changes; and the test item label is a continuous variable, which contains multiple test data of the EML chip.

[0036] JMP software identifies nominal and continuous variables and uses its own graphics generation function to generate a data analysis graph with design items as the horizontal axis and test data corresponding to the design items as the vertical axis; the data analysis graph includes data graphs and eigenvalues ​​calculated by arrays, and by displaying EML chip design items and corresponding test performance, it intuitively shows the EML chip performance classification under different design items, thereby facilitating engineers to compare the impact of different design items on EML chip performance.

[0037] Example 1

[0038] An efficient processing method for EML chip test data, the design items of this batch of EML chips to be tested include: grating type and ridge width, and the test items are power Pf1_1_h (Vea = 0V) and Pf1_h (Vea = open). Open the JMP reserved window corresponding to the grating type and ridge width in the EML chip tester, set the grating type output to E, and the ridge width output to F.

[0039] After completing the chip test of the above batch of EML chips to be tested, the summary test data including different design items and the different test items corresponding to the design items are obtained, and the summary test data is output in the form of an electronic spreadsheet to obtain a target electronic data spreadsheet.

[0040] Data processing was performed on the target electronic data sheet: the data in the columns of grating type and ridge width were selected and changed to text type, and the data in the columns of power Pf1_1_h and power Pf1_h were selected and changed to digital type. The corresponding design items of the single EML chip data in the data were relabeled, and the full grating was defined as E1 and the partial grating as E2; the 2.2μm ridge width was defined as F1 and the 3μm ridge width was defined as F2. The target electronic data sheet after data processing is shown in Table 1.

[0041] Table 1 Detailed labeling summary test results of Example 1

[0042] OCR E (full / partial grating) F(ridge width) SER Pf1_h Pf1_1_h [mW] [mW] S63X11 E1 F1 36.00 8.20 5.41 S62X11 E1 F1 37.00 6.58 5.25 S61X11 E2 F1 38.00 6.61 5.61 S60X11 E2 F1 39.00 7.75 5.11 S59X11 E1 F2 40.00 8.25 6.33 S58X11 E1 F2 41.00 9.28 7.97 S57X11 E2 F2 42.00 7.46 4.79 S56X11 E2 F2 43.00 9.13 7.26

[0043] Import the processed target electronic data table into JMP software, and generate a box plot of EML chip performance distribution with E1, E2, F1, F2 as the horizontal axis and Pf1_1_h, Pf1_h as the vertical axis through the graph generation function, as shown in Figure 2 As shown, it can be intuitively analyzed that the influence of different designs of EML chip using full grating, partial grating, ridge width of 2.2μm and ridge width of 3μm on power.

[0044] Example 2

[0045] An efficient processing method for EML chip test data, the design items of this batch of EML chips to be tested include: grating type, ridge width and wavelength, the test items are threshold Ith_h, series resistance Rs0_h, isolation resistance RO1S_1_h and extinction ratio Rext3_1_h (Vea = -1V). Open the JMP reserved window corresponding to the grating type, ridge width and wavelength in the EML chip tester, set the wavelength output to D, the grating type output to E, and the ridge width output to F.

[0046] After completing the chip test of the above batch of EML chips to be tested, the summary test data including different design items and the different test items corresponding to the design items are obtained, and the summary test data is output in the form of an electronic spreadsheet to obtain a target electronic data spreadsheet.

[0047] Data processing was performed on the target electronic data sheet: the data in the columns of wavelength, grating type and ridge width were selected and changed to text type, and the data in the columns of threshold Ith_h, series resistance Rs0_h, isolation resistance RO1S_1_h and extinction ratio Rext3_1_h were selected and changed to digital type. The corresponding design items of the single EML chip data in the data were relabeled, and the 1572nm wavelength was defined as D1, the 1577nm wavelength was defined as D2, and the 1582nm wavelength was defined as D3; the full grating was defined as E1, and the partial grating was defined as E2; the 1.8μm ridge width was defined as F1, and the 2.2μm ridge width was defined as F2. The target electronic data sheet after data processing is shown in Table 2.

[0048] Table 2 Detailed labeling summary test results of Example 2

[0049]

[0050] Import the processed target electronic data table into JMP software, and generate a box plot of EML chip performance distribution with D1, D2, D3, E1, E2, F1, F2 as the horizontal axis and Ith_h, Rs0_h, RO1S_1_h and Rext3_1_h as the vertical axis through the graph generation function, as shown in Figure 3 As shown, it can be intuitively shown that the performance of the EML chip at different wavelengths using different designs of full grating, partial grating, ridge width of 1.8μm, and ridge width of 2.2μm is affected.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An efficient processing method for EML chip test data, characterized in that: The following steps are involved: S1. Determine the design items and test items of the EML chip to be tested, and optimize the software of the EML chip tester. When the EML chip tester tests the EML chips to be tested in batches, the design items of different EML chips to be tested are displayed, and the test results are marked with different letters and output; S2. Complete the test of the EML chip to be tested under the condition of step S1, obtain summary test data including different design items and different test items corresponding to the design items, and output the summary test data in the form of an electronic spreadsheet to obtain a target electronic data spreadsheet; S3. Process the target electronic data table, import the processed target electronic data table into JMP software, and obtain the statistical analysis results of the EML chip test data.

2. The efficient processing method for EML chip test data according to claim 1, characterized in that: The method for optimizing software of an EML chip tester comprises: adding a JMP interface in the machine software of the EML chip tester, setting a plurality of reserved windows for design items of different EML chips, and defining the design item corresponding to each reserved window.

3. The efficient processing method for EML chip test data according to claim 2, characterized in that: The EML chip testing machine displays the design items of different EML chips to be tested when testing the EML chips to be tested in batches, and outputs the design items of the different EML chips to be tested with different letter labels in the test results. The method is as follows: when testing the EML chips to be tested in batches, according to the design items of the EML chips to be tested, a reserved window corresponding to the design items of the EML chips to be tested is opened, and unique letter labels are used to represent different design items through manual setting.

4. The efficient processing method for EML chip test data according to claim 3, characterized in that: The target electronic data table includes at least one design item, and under the design item there is at least one test parameter and value of a test item.

5. The efficient processing method for EML chip test data according to claim 4, characterized in that: The method for processing data on the target electronic data table is as follows: selecting and changing the data in the column where the design items in the target electronic data table are located to text type, selecting and changing the data in the column where the test items in the target electronic data table are located to digital type; and performing secondary label classification on the design items in the target electronic data table.

6. The efficient processing method for EML chip test data according to claim 5, characterized in that: The method for performing secondary label classification on the design items in the target electronic data sheet is: on the basis of using different letters to mark various design items of the EML chip, a combination of letters and numbers is used to subdivide and define the design items.

7. The efficient processing method for EML chip test data according to claim 5, characterized in that: The method of importing the target electronic data table after data processing into the JMP software to obtain the statistical analysis results of the EML chip test data is as follows: after the text type and the digital type data are imported into the JMP software, the corresponding design item and the test item title labels are respectively identified and displayed as nominal type and continuous type variable types; the JMP software distinguishes these two types of variables and uses its own graphic generation function to generate a data analysis graph with the design item as the horizontal axis and the test data corresponding to the design item as the vertical axis.

8. The efficient processing method for EML chip test data according to claim 7, characterized in that: The data analysis graph includes a data graph and characteristic values ​​calculated by an array.

9. The efficient processing method for EML chip test data according to any one of claims 1 to 8, characterized in that: The design items include epitaxial component composition, grating type, waveguide width and etching depth.

10. The efficient processing method for EML chip test data according to any one of claims 1, 4, 5, and 7, characterized in that: The test items include threshold current, optical power, extinction ratio and isolation resistance.

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