A method and device for eliminating vibration in scanning electron microscope images

Abstract

The present application provides a method, apparatus, electronic device, and storage medium for eliminating vibrations in a scanning electron microscope image. The method includes: determining vibration sampling points; performing spectral analysis on the secondary electron sampling signals obtained by single-point sampling of the vibration sampling points to obtain corresponding vibration amplitude information and vibration frequency information; determining signal peaks in the spectrogram obtained by spectral analysis, and fitting the signal peaks using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information; and performing vibration elimination processing on the target scanning electron microscope image. The method, apparatus, electronic device, and storage medium for eliminating vibrations in a scanning electron microscope image provided by the embodiments of the present invention obtain the numerical values of the frequency-amplitude combination of the main vibration peaks by optimizing the selection of vibration sampling points and performing single-point scanning. In this way, only the phase needs to be fitted during the graphic restoration process, greatly improving the efficiency and effect of graphic restoration.

Description

Technical Field

[0001] This application relates to the field of image processing, and particularly to a method and device for eliminating vibration in scanning electron microscope images. Background Art

[0002] A scanning electron microscope (SEM) is a large and precise instrument used for high-resolution micro-area morphology analysis. It has the characteristics of large depth of field, high resolution, intuitive imaging, strong three-dimensional sense, a wide magnification range, and the ability to rotate and tilt the sample to be measured in three-dimensional space. In addition, it has the advantages of a rich variety of sample types that can be measured, almost no damage and pollution to the original sample, and the ability to obtain morphology, structure, composition, and crystallographic information simultaneously.

[0003] When we obtain the surface image of a sample using a scanning electron microscope, different types of noise are usually accompanied. These noises have a relatively serious impact on the quality of the obtained image. For example, there is a mechanical pump and a molecular pump in the scanning electron microscope, which are used to provide a vacuum environment so that the emitted electron beam does not collide with impurities in the air during the process of passing through the lens aperture and reaching the sample. However, the motors of these two pumps generate periodic vibrations, and these vibrations may be transmitted to the device and affect the measurement results. Generally, we will try to suppress these vibrations as much as possible through the vibration suppressor outside the device, but distortions caused by vibrations can still be seen in the image. In addition, the stray electromagnetic fields in the environment where the scanning electron microscope device is located will also interfere with the movement of scanning electrons, resulting in vibration distortion in the final imaging. The above various vibration interferences will ultimately affect the improvement of the quality of scanning electron microscope images. Summary of the Invention

[0004] The purpose of the embodiments of this application is to provide a method, device, electronic device, and storage medium for eliminating vibration in scanning electron microscope images.

[0005] In a first aspect, an embodiment of the present invention provides a method for eliminating vibration in scanning electron microscope images, the method comprising:

[0006] Obtain a target scanning electron microscope image to be processed, and determine vibration sampling points in the target scanning electron microscope image;

[0007] Perform spectral analysis on the secondary electron sampling signals obtained by performing single-point sampling on the vibration sampling points for a preset time to obtain corresponding vibration amplitude information and vibration frequency information;

[0008] Determine the signal peak in the spectrogram obtained by spectral analysis, and fit the signal peak using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information;

[0009] Perform vibration elimination processing on the target scanning electron microscope image by using the vibration amplitude information, the vibration frequency information, and the vibration phase information.

[0010] Optionally, determining the vibration sampling points in the target scanning electron microscope image specifically includes:

[0011] Determine the vibration sampling points in the target scanning electron microscope image according to the change gradient values of the secondary electron yield at different positions in the target scanning electron microscope image in the X-axis and Y-axis directions.

[0012] Optionally, using the boundary length information in the target scanning electron microscope image to fit the signal peak to obtain the corresponding vibration phase information specifically includes:

[0013] Determine the boundary length where the vibration sampling points are located in the target scanning electron microscope image;

[0014] Use the boundary length as an adaptation function to fit the signal peak to obtain the corresponding vibration phase information.

[0015] Optionally, using the boundary length information in the target scanning electron microscope image to fit the signal peak to obtain the corresponding vibration phase information specifically includes:

[0016] Determine the pixel values on the boundary where the vibration sampling points are located in the target scanning electron microscope image;

[0017] Perform a fast Fourier transform on the pixel values on the boundary to determine the vibration phase information where the boundary pixel values change most smoothly.

[0018] Optionally, performing vibration elimination processing on the target scanning electron microscope image by using the vibration amplitude information, the vibration frequency information, and the vibration phase information specifically includes:

[0019] Obtain image displacement information according to the vibration amplitude information, the vibration frequency information, and the vibration phase information;

[0020] Use the image displacement information to move the image data of the target scanning electron microscope image to the target position, and interpolate the two images before and after the movement to obtain a scanning electron microscope image after vibration elimination.

[0021] Optionally, the vibration sampling points include horizontal vibration sampling points and vertical vibration sampling points.

[0022] Optionally, the vibration amplitude information, the vibration frequency information, and the vibration phase include horizontal vibration amplitude information, vibration frequency information, and vibration phase information, and vertical vibration amplitude information, vibration frequency information, and vibration phase information.

[0023] Second aspect, embodiments of the present invention provide a vibration elimination device for scanning electron microscope images, characterized in that the device includes:

[0024] A sampling point determination module, configured to obtain a target scanning electron microscope image to be processed and determine vibration sampling points in the target scanning electron microscope image;

[0025] A spectrum analysis module, configured to perform spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling on the vibration sampling points for a preset time, to obtain corresponding vibration amplitude information and vibration frequency information;

[0026] A phase determination module, configured to determine signal peaks in the spectrogram obtained by spectrum analysis, and fit the signal peaks using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information;

[0027] A vibration elimination module, configured to perform vibration elimination processing on the target scanning electron microscope image using the vibration amplitude information, the vibration frequency information, and the vibration phase information.

[0028] Third aspect, embodiments of the present invention provide an electronic device, characterized in that it includes:

[0029] One or more processors;

[0030] A memory, configured to store one or more programs;

[0031] Wherein, when the one or more programs are executed by the one or more processors, the one or more processors are caused to execute the method as described in the first aspect.

[0032] Fourth aspect, embodiments of the present invention provide a computer-readable storage medium, on which executable instructions are stored, characterized in that when the executable instructions are executed by a processor, the processor is caused to execute the method as described in the first aspect.

[0033] The vibration elimination method, device, electronic device, and storage medium for scanning electron microscope images provided by the embodiments of the present invention are intended to solve the problem that in the traditional vibration elimination method for scanning electron microscopes, there is no known information during the vibration fitting process, and only by combining different amplitudes, frequencies, and phases for fitting, resulting in too many unknown parameters, thus the recovery efficiency is low and the effect is poor. The embodiments of the present invention obtain the numerical values of the frequency-amplitude combination of the main vibration peaks by optimizing the selection of vibration sampling points and performing single-point scanning, so that only the phase needs to be fitted during the graph recovery process, greatly improving the efficiency and effect of graph recovery. Description of the Drawings

[0034] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments of the present application.

[0035] Figure 1 Schematic flowchart of the vibration elimination method for scanning electron microscope images provided by the embodiments of the present invention;

[0036] Figure 2 Schematic diagram of the determination result of vibration sampling points provided by the embodiments of the present invention;

[0037] Figure 3 Schematic flowchart of the vibration phase determination method provided by the embodiments of the present invention;

[0038] Figure 4 Another schematic flowchart of the vibration phase determination method provided by the embodiments of the present invention;

[0039] Figure 5 Schematic flowchart of the vibration elimination method provided by the embodiments of the present invention;

[0040] Figure 6 Schematic diagram of the fitted vibration images in the horizontal and vertical directions provided by the embodiments of the present invention;

[0041] Figure 7 Comparison diagram of scanning electron microscope images before and after interpolation provided by the embodiments of the present invention;

[0042] Figure 8 Schematic structural diagram of the scanning electron microscope image vibration elimination device provided by the embodiments of the present invention;

[0043] Figure 9 Schematic structural diagram of the electronic device provided by the embodiments of the present invention. Detailed implementation manners

[0044] The following will describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application.

[0045] Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of the present application, the terms "first", "second", etc. are only used for distinguishing descriptions and cannot be construed as indicating or implying relative importance.

[0046] Scanning electron microscope (SEM) is a large precision instrument used for high-resolution micro-area morphology analysis. It has the characteristics of large depth of field, high resolution, intuitive imaging, strong three-dimensional sense, wide magnification range, and the ability to rotate and tilt the sample to be tested in three-dimensional space. In addition, it has the advantages of rich testable sample types, almost no damage or contamination to the original sample, and the ability to obtain morphology, structure, composition and crystallography information at the same time.

[0047] When we use a scanning electron microscope to obtain an image of the sample surface, it is usually accompanied by different types of noise. These noises have a serious impact on the quality of the image obtained. For example, there is a mechanical pump and a molecular pump in the scanning electron microscope, which are used to provide a vacuum environment, so that the emitted electron beam will not collide with impurities in the air when passing through the lens hole and reaching the sample. However, the motors of these two pumps will produce periodic vibrations, and these vibrations may be transmitted to the equipment and affect the measurement results. Generally, we will use vibration suppressors outside the equipment to suppress these vibrations as much as possible, but the distortion caused by vibration can still be seen in the image. In addition, the stray electromagnetic fields in the environment where the scanning electron microscope equipment is located will also interfere with the movement of the scanning electrons, causing vibration distortion in the final imaging. The above-mentioned types of vibration interference will ultimately affect the quality of the scanning electron microscope image. Based on this, an embodiment of the present invention provides a method for eliminating vibration of a scanning electron microscope image, attached. Figure 1 A schematic flow chart of a method for eliminating vibration of a scanning electron microscope image provided by an embodiment of the present invention is shown.

[0048] Step S110, acquiring a target scanning electron microscope image to be processed, and determining vibration sampling points in the target scanning electron microscope image.

[0049] For a scanning electron microscope, the electron beam emitted by its electron gun is focused and converged into a point light source, which forms a high-energy electron beam under the acceleration voltage. The high-energy electron beam is focused into a light spot with a small diameter through multiple (one, two, three, etc.) electromagnetic lenses. After passing through the last electromagnetic lens with a scanning coil, the electron beam bombards the sample surface point by point in a raster scanning manner, and stimulates electron signals at different depths at the same time. At this time, the electron signal will be received by the probes of different signal receivers above the sample, and transmitted synchronously to the computer display through the amplifier to form a real-time imaging record. The electron signals stimulated by the incident electron bombarding the sample surface are: Auger electrons (AuE), secondary electrons (SE), backscattered electrons (BSE), X-rays (characteristic X-rays, continuous X-rays), cathode fluorescence (CL), absorbed electrons (AE) and transmitted electrons. The purpose of each electron signal varies depending on the depth of action.

[0050] The embodiments of the present invention are mainly used to restore the distortion of scanning electron microscope (SEM) images caused by vibrations in some fixed patterns. These distortions may come from the vacuum pump (usually rotating at several hundred to several thousand revolutions per minute (RPM)) and the regular vibrations of the entire imaging result caused by interfering electromagnetic fields. The characteristics of these vibrations are that their periods and vibration modes are relatively fixed. We can use the single-point scanning method to extract the characteristic information of these vibrations, which helps us remove the distortion in the SEM image more quickly and effectively.

[0051] Therefore, in this step, it is first necessary to determine the position of single-point scanning in the SEM image, that is, the vibration sampling point. The vibration information in the present invention will be decomposed into vibrations in the horizontal direction and vibrations in the vertical direction, corresponding to the vibration sampling points in the horizontal direction and the vertical direction of the single-point scanning respectively. The vibrations in the horizontal direction and the vibrations in the vertical direction will be eliminated separately in the subsequent steps.

[0052] The single-point scanning in the embodiments of the present invention refers to fixing the electron gun of the scanning electron microscope at a suitable position, performing long-term electron emission, and collecting the change curve I(t) of the secondary electron yield over time. According to the principle of SEM imaging, when the incident conditions remain unchanged, the yield of secondary electrons per unit time is related to the spatial configuration (mainly the topography) of the position where the electrons are incident on the sample.

[0053] During the single-point scanning process, when the position where the electron gun performs single-point scanning is at a point with a gentle slope, the displacement generated by the vibration is within a linear range. The spatial displacement of the sample will be scaled proportionally to the change in the secondary electron yield, and the periodic displacement vibration will also be linearly converted into a periodic oscillation change in the secondary electron yield.

[0054] Specifically, the method for determining the vibration sampling point in this step can be achieved by determining the vibration sampling point in the target SEM image according to the change gradient values of the secondary electron yields at different positions in the X-axis and Y-axis directions of the target SEM image. Taking the vibration sampling point in the vertical direction as an example, as Figure 2 shown in the schematic diagram of the determination result of the vibration sampling point, when traversing the SEM image, the vibration sampling point as shown in the figure can be found. Here, the change in the secondary electron yield in the Y direction is relatively significant and linear, and it is almost unchanged in the X direction. Therefore, by sampling this position, the vibration situation in the Y direction can be obtained. Similarly, a position suitable for measuring the vibration in the X direction can also be found, that is, the judgment condition becomes that the change in the secondary electron yield in the X direction is relatively significant and linear, and it is almost unchanged in the Y direction. It should be noted that there may be multiple vibration sampling points in the horizontal direction and the vertical direction that meet the conditions in a SEM image. Only one vibration sampling point in the horizontal direction and one vibration sampling point in the vertical direction need to be determined respectively.

[0055] Step S120 , performing spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling at the vibration sampling points for a preset time to obtain corresponding vibration amplitude information and vibration frequency information.

[0056] After determining the vibration sampling points in the horizontal direction and the vibration sampling points in the vertical direction, this step performs spectrum analysis on the secondary electron sampling signals obtained by single-point scanning of the vibration sampling points. The preset time in the step can be a preset empirical value. It can also be used as the initial setting time. In the process of single-point sampling, the sampling time needs to be controlled until a satisfactory signal is obtained, that is, a single-point sampling of a non-preset time period is performed at each sampling point. The length of this time period is determined based on the vibration characteristics that are expected to be captured, in order to ensure that the key details of the vibration behavior can be fully recorded while avoiding unnecessary noise interference. After the single-point sampling is completed, we obtain a series of secondary electron sampling signals representing the vibration state at different time points. These signals are captured by specific detectors, and they reflect the changes in the secondary electron emission intensity stimulated by the tiny displacement of the material surface caused by the vibration. Secondary electrons are ideal for analyzing vibration characteristics because of their high sensitivity to surface morphology.

[0057] Next, in order to extract useful information from these complex signals, it is necessary to apply spectrum analysis techniques, which is a mathematical method for converting time domain signals into frequency domain, which allows us to observe the intensity of the components of the signal at different frequencies. By performing spectrum analysis on the secondary electron sampling signal, we can identify specific frequency components related to the vibration, which directly correspond to the natural frequency of the vibrating system or the vibration frequency caused by external excitation.

[0058] In addition, the results of spectrum analysis can also provide information on vibration amplitude. Amplitude reflects the maximum distance that the vibration deviates from the equilibrium position and is an important indicator for measuring vibration intensity. In the spectrum graph, amplitude information is usually expressed as the intensity (or amplitude) of each frequency component. The higher the intensity, the more significant the vibration at that frequency. So far, the above process is applied to the vibration sampling points in the horizontal direction and the vibration sampling points in the vertical direction respectively, and the vibration amplitude information and vibration frequency information corresponding to the horizontal direction and the vertical direction are obtained.

[0059] Step S130, determining the signal peak in the spectrum diagram obtained by spectrum analysis, and fitting the signal peak using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information.

[0060] Specifically, as attached Figure 3 As shown, the vibration phase determination method in step S130 can be implemented according to steps S131~S132.

[0061] Step S131, determine the boundary length where the vibration sampling points are located in the target scanning electron microscope image.

[0062] Step S132, use the boundary length as an adaptation function to fit the signal peak value to obtain the corresponding vibration phase information.

[0063] In the above steps, it is necessary to identify and select the most significant several peaks from the vibration spectrogram as the basis for fitting. These significant peaks usually correspond to the main frequency components in the vibration, and they can reflect the key dynamic characteristics of the vibration system. By only focusing on these significant peaks, we can reduce the computational complexity while retaining sufficient information to approximate the entire vibration signal.

[0064] Next, the embodiment of the present invention uses the boundary length where the vibration sampling points are located in the scanning electron microscope image as an adaptation function for fitting the signal peak value. Since the phase of the vibration is unknown, by adjusting the parameters of the vibration phase, calculate the boundary lengths of the SEM images under different phase combinations, and find the phase combination that makes the boundary length the shortest. This step is actually optimizing an objective function, that is, minimizing the boundary length of the SEM image, so as to approximate the true vibration phase. This method makes full use of the spatial information of the SEM image and improves the accuracy of vibration phase estimation.

[0065] On the other hand, when the vibration phase fitted in steps S131 - S132 finally results in an unsatisfactory image vibration elimination effect, as shown in the appendix Figure 4 shown, the vibration phase determination method in step S130 can be implemented according to steps S133 - S134.

[0066] Step S133, determine the pixel values on the boundary where the vibration sampling points are located in the target scanning electron microscope image;

[0067] Step S134, perform a fast Fourier transform on the pixel values on the boundary to determine the vibration phase information where the change of the boundary pixel values is the gentlest.

[0068] In the above steps, if the initially fitted vibration phase fails to achieve an ideal image vibration elimination effect, another possible implementation manner of the present invention is a method of verifying and optimizing the phase by extracting the data on the boundary and performing a fast Fourier transform (FFT). FFT analysis can reveal the frequency components and their changes in the boundary data. By comparing the FFT results under different phase combinations, the phase combination that makes the change of the boundary data the gentlest can be found. Specifically, it can refer to that the distribution of the frequency components in the frequency domain is more uniform or continuous, which usually means that the vibration signal is more stable and easier to process.

[0069] In summary, the embodiments of the present invention use steps S131 to S132 or steps S133 to S134 for the vibration sampling points in the horizontal direction and the vertical direction to obtain the vibration phase information corresponding to the horizontal direction and the vertical direction.

[0070] Step S140, perform vibration elimination processing on the target scanning electron microscope image by using the vibration amplitude information, the vibration frequency information, and the vibration phase information.

[0071] Specifically, as Figure 5 shown, the vibration elimination method in step S140 can be implemented through steps S141 to S142.

[0072] Step S141, obtain image displacement information according to the vibration amplitude information, the vibration frequency information, and the vibration phase information;

[0073] Step S142, after moving the image data of the target scanning electron microscope image to the target position by using the image displacement information, and performing interpolation on the two images before and after the movement to obtain the scanning electron microscope image after vibration elimination.

[0074] Appendix Figure 6 respectively show the fitted vibration images in the horizontal direction and the vertical direction. In the previous steps, vibration amplitude information, vibration frequency information, and vibration phase information have been obtained. These information are obtained by real-time monitoring and analysis of the minute vibrations of the equipment or the sample during the imaging process of the target scanning electron microscope image. The vibration amplitude reveals the degree of deviation of the vibration from the equilibrium position, the vibration frequency reflects the speed at which the vibration occurs, and the vibration phase describes the position of a certain moment in the vibration waveform relative to the reference point.

[0075] Based on these vibration information, we can further calculate the image displacement information. The image displacement information directly reflects the actual displacement of the pixel points in the target scanning electron microscope image due to vibration. Since the vibration information is associated with the pixel positions of the target scanning electron microscope image, the displacement amount generated by each pixel point due to vibration can be obtained. Once we obtain the image displacement information, we can use this information to correct the scanning electron microscope image. Specifically, we move the image data of the target scanning electron microscope image to its proper target position according to the calculated displacement amount. This process involves precise adjustment and rearrangement of the image data to ensure that each pixel point is located at its correct position. Specifically, the vibration amplitude information, the vibration frequency information, and the vibration phase include the vibration amplitude information, vibration frequency information, and vibration phase information in the horizontal direction, and the vibration amplitude information, vibration frequency information, and vibration phase information in the vertical direction.

[0076] However, simply moving the image data to the target location may not be sufficient to completely eliminate the impact of vibrations. Because in actual operation, vibrations may cause blanks or overlaps in certain areas of the image. To solve this problem, we adopted image interpolation technology to fill the blank areas of the image caused by vibrations and smooth the overlapping parts of the image, thereby obtaining a more complete and clear scanning electron microscope image. Specifically, linear interpolation can be sampled to perform linear interpolation on the images before and after displacement in the horizontal and vertical directions respectively to obtain a scanning electron microscope image after vibration elimination. The effect is as shown in the Figure 7 comparison chart of the scanning electron microscope images before and after interpolation in the appendix.

[0077] Finally, after the above steps of processing, we obtained a scanning electron microscope image after vibration elimination. This image not only has higher clarity and stability, but also can more accurately reflect the microscopic structure and characteristics of the sample surface.

[0078] The scanning electron microscope image vibration elimination method provided by the embodiments of the present invention aims to solve the problem that in the process of vibration fitting for traditional scanning electron microscope vibration elimination methods, there is no known information, and only by combining different amplitudes, frequencies, and phases can fitting be performed, resulting in too many unknown parameters and thus low recovery efficiency and poor effect. The embodiments of the present invention obtain the numerical values of the frequency-amplitude combination of the main vibration peaks by optimizing the selection of vibration sampling points and performing single-point scanning in this way. In this way, only the phase needs to be fitted during the graphic recovery process, greatly improving the efficiency and effect of graphic recovery.

[0079] Based on any of the above embodiments, as shown in the Figure 8 appendix, the embodiments of the present invention provide a scanning electron microscope image vibration elimination device, which is characterized in that the device includes:

[0080] A sampling point determination module 810, configured to obtain a target scanning electron microscope image to be processed and determine vibration sampling points in the target scanning electron microscope image;

[0081] A spectrum analysis module 820, configured to perform spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling on the vibration sampling points for a preset time to obtain corresponding vibration amplitude information and vibration frequency information;

[0082] A phase determination module 830, configured to determine signal peaks in the spectrogram obtained by spectrum analysis and fit the signal peaks using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information;

[0083] A vibration elimination module 840, configured to perform vibration elimination processing on the target scanning electron microscope image using the vibration amplitude information, the vibration frequency information, and the vibration phase information.

[0084] The vibration elimination device for scanning electron microscope images provided by the embodiments of the present invention aims to solve the problem that in the process of vibration fitting of traditional scanning electron microscope vibration elimination methods, there is no known information, and only by combining different amplitudes, frequencies, and phases can fitting be carried out, resulting in too many unknown parameters, thus reducing the efficiency and effectiveness of restoration. The embodiments of the present invention obtain the numerical values of the frequency - amplitude combination of the main vibration peaks by optimizing the selection of vibration sampling points and performing single - point scanning. In this way, only the phase needs to be fitted during the image restoration process, greatly improving the efficiency and effectiveness of image restoration.

[0085] Based on any of the above - mentioned embodiments, Figure 9 The schematic physical structure diagram of the electronic device provided by the embodiments of the present invention is shown. The electronic device may include: a processor 910, a communication interface 920, a memory 930, and a communication bus 940. Among them, the processor 910, the communication interface 920, and the memory 930 complete mutual communication through the communication bus 940. The processor 910 can call the logical instructions in the memory 930 to execute the following methods:

[0086] Obtain the target scanning electron microscope image to be processed, and determine the vibration sampling points in the target scanning electron microscope image;

[0087] Perform spectrum analysis on the secondary electron sampling signals obtained by respectively performing single - point sampling on the vibration sampling points for a preset time to obtain the corresponding vibration amplitude information and vibration frequency information;

[0088] Determine the signal peaks in the spectrogram obtained by spectrum analysis, and fit the signal peaks using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information;

[0089] Perform vibration elimination processing on the target scanning electron microscope image using the vibration amplitude information, the vibration frequency information, and the vibration phase information.

[0090] In addition, when the logical instructions in the above-mentioned memory 930 are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the embodiment of the present invention, in essence, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in the embodiment of the present invention. The foregoing storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (ROMs), random access memories (RAMs), magnetic disks, or optical discs that can store program codes.

[0091] On the other hand, the embodiment of the present invention also provides a non-transitory computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, it is configured to execute the methods provided in the above embodiments, for example, including:

[0092] Obtain a target scanning electron microscope image to be processed, and determine vibration sampling points in the target scanning electron microscope image;

[0093] Perform spectral analysis on the secondary electron sampling signals obtained by performing single-point sampling on the vibration sampling points for a preset time to obtain corresponding vibration amplitude information and vibration frequency information;

[0094] Determine signal peaks in the spectrogram obtained by spectral analysis, and fit the signal peaks using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information;

[0095] Perform vibration elimination processing on the target scanning electron microscope image using the vibration amplitude information, the vibration frequency information, and the vibration phase information.

[0096] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. A person of ordinary skill in the art can understand and implement it without creative efforts.

[0097] Through the description of the above embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on such an understanding, the essence of the above technical solution or the part that contributes to the prior art can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0098] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for eliminating vibration in a scanning electron microscope image, characterized in that, The method includes: Obtaining a target scanning electron microscope (SEM) image to be processed, and determining vibration sampling points in the target SEM image; Performing spectral analysis on the secondary electron sampling signals obtained by performing single-point sampling on the vibration sampling points for a preset time to obtain corresponding vibration amplitude information and vibration frequency information; wherein, the single-point scanning refers to fixing the electron gun of the scanning electron microscope at the vibration sampling point for electron emission, and collecting the change curve of the secondary electron yield over time; the spatial displacement of the sample will be scaled proportionally to the change of the secondary electron yield; determining the signal peak in the spectrogram obtained by spectral analysis, and fitting the signal peak using the boundary length information in the target SEM image to obtain the corresponding vibration phase information; Performing vibration elimination processing on the target SEM image by using the vibration amplitude information, the vibration frequency information, and the vibration phase information; Wherein, determining the signal peak in the spectrogram obtained by spectral analysis, and fitting the signal peak using the boundary length information in the target SEM image to obtain the corresponding vibration phase information specifically includes: Determining the boundary length where the vibration sampling point is located in the target SEM image; fitting the signal peak with the boundary length as the adaptation function to obtain the corresponding vibration phase information, including: identifying and selecting the most significant several peaks as signal peaks from the spectrogram and using the boundary length where the vibration sampling point is located as the adaptation function for fitting the signal peak, calculating the boundary length of the target SEM image under different phase combinations by adjusting the parameters of the vibration phase, and finding the phase combination that makes the boundary length the shortest; Or, Determining the pixel values on the boundary where the vibration sampling point is located in the target SEM image; performing a fast Fourier transform on the pixel values on the boundary, and determining the vibration phase information with the smoothest change of the boundary pixel values by comparing the results of the fast Fourier transform under different phase combinations.

2. The vibration elimination method for scanning electron microscope images according to claim 1, wherein Determining the vibration sampling points in the target SEM image specifically includes: Determining the vibration sampling points in the target SEM image according to the change gradient values of the secondary electron yields at different positions in the target SEM image in the X-axis and Y-axis directions.

3. The method for eliminating vibration of a scanning electron microscope image according to claim 1, characterized in that, Performing vibration elimination processing on the target SEM image by using the vibration amplitude information, the vibration frequency information, and the vibration phase information specifically includes: Obtaining image displacement information according to the vibration amplitude information, the vibration frequency information, and the vibration phase information; Moving the image data of the target SEM image to the target position by using the image displacement information, and performing interpolation on the two images before and after the movement to obtain a vibration-eliminated SEM image.

4. The method for eliminating vibration of a scanning electron microscope image according to any one of claims 1 to 3, characterized in that, The vibration sampling points include vibration sampling points in the horizontal direction and vibration sampling points in the vertical direction.

5. The method for eliminating vibration of a scanning electron microscope image according to any one of claims 1 to 3, characterized in that, The vibration amplitude information, the vibration frequency information, and the vibration phase include vibration amplitude information, vibration frequency information, and vibration phase information in the horizontal direction, and vibration amplitude information, vibration frequency information, and vibration phase information in the vertical direction.

6. A vibration elimination device for scanning electron microscope images, characterized in that, The device includes: A sampling point determination module, configured to obtain a target scanning electron microscope image to be processed and determine vibration sampling points in the target scanning electron microscope image; A spectrum analysis module, configured to perform spectrum analysis on secondary electron sampling signals obtained by performing single-point sampling on the vibration sampling points for a preset time, to obtain corresponding vibration amplitude information and vibration frequency information; wherein, the single-point scanning refers to fixing the scanning electron microscope electron gun at the vibration sampling point for electron emission and collecting the change curve of the secondary electron yield over time; the spatial displacement of the sample will be scaled proportionally to the change of the secondary electron yield; A phase determination module, configured to determine signal peaks in the spectrogram obtained by spectrum analysis and fit the signal peaks by using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information; A vibration elimination module, configured to perform vibration elimination processing on the target scanning electron microscope image by using the vibration amplitude information, the vibration frequency information, and the vibration phase information; Wherein, the determining signal peaks in the spectrogram obtained by spectrum analysis and fitting the signal peaks by using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information specifically includes: Determining the boundary length where the vibration sampling point is located in the target scanning electron microscope image; fitting the signal peaks by using the boundary length as a fitness function to obtain corresponding vibration phase information, including: identifying and selecting the most significant several peaks from the spectrogram as signal peaks and using the boundary length where the vibration sampling point is located as the fitness function for fitting the signal peaks, calculating the boundary length of the target scanning electron microscope image under different phase combinations by adjusting the parameters of the vibration phase, and finding the phase combination that makes the boundary length the shortest; Or, Determining the pixel values on the boundary where the vibration sampling point is located in the target scanning electron microscope image; performing a fast Fourier transform on the pixel values on the boundary, and determining the vibration phase information with the gentlest change of the boundary pixel values by comparing the results of the fast Fourier transform under different phase combinations.

7. An electronic device, characterized in that, Including: One or more processors; A memory, configured to store one or more programs; Wherein, when the one or more programs are executed by the one or more processors, the one or more processors are caused to execute the method according to any one of claims 1 to 5.

8. A computer-readable storage medium having executable instructions stored thereon, characterized in that, When the executable instructions are executed by the processor, the processor is caused to execute the method according to any one of claims 1 to 5.

Images