High-density integrated radio frequency array with transmitting channel on-line monitoring function

By using the amplitude-phase information inversion method of coupled coherence differences between array elements in high-density integrated RF arrays, the online monitoring and calibration of phased array antenna transmission channels is realized, solving the problems of difficulty in fast online calibration, poor linearity in performance evaluation, and high testing costs in the prior art, and improving the efficiency and accuracy of performance monitoring and calibration.

CN119852706APending Publication Date: 2025-04-18BEIJING INST OF REMOTE SENSING EQUIP
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Patent Information

Application Number
CN202411968880.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-04-18

AI Technical Summary

Technical Problem

Existing phased array antennas are difficult to achieve rapid online calibration, poor linearity of performance evaluation and high testing costs.

Method used

Using an amplitude-phase information inversion method based on the coupling coherence difference between array elements, a high-density integrated radio frequency array with online monitoring function of transmission channels is provided. The RF power is measured through the radio frequency detection circuit of the radio frequency chip, amplitude and phase information are obtained, and online monitoring and calibration are realized.

Benefits of technology

The online amplitude and phase performance monitoring and calibration of the phased array antenna transmission channel is realized, and the global performance monitoring and calibration of the global transmission channel is independently carried out, reducing the testing cost and improving the linearity of performance evaluation.

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Abstract

The invention discloses a high-density integrated radio frequency array with an on-line emission channel monitoring function, which belongs to the technical field of phased-array antennas and comprises an antenna array surface, a radio frequency chip, high-temperature co-fired ceramic, a high-thermal-conductivity heat storage structure and a high-thermal-conductivity heat conduction pad. According to the modular structure / thermal control / radio frequency integration, a high-efficiency and miniaturized novel phased-array antenna system with high-density integration of an array plane, radio frequency, power supply and control is realized; during working, heat of the radio frequency chips is conducted to the high-temperature co-fired ceramic, is conducted to the high-heat-conduction heat storage structure and the heat conduction pad through the high-temperature co-fired ceramic, and then is conducted to the cold end, so that the temperature gradient between the radio frequency chips is rapidly reduced, and the reliability is improved; meanwhile, through extracting amplitude detection information and an amplitude-phase information inversion method based on coupling coherence difference between array elements, channel amplitude-phase performance monitoring and accurate automatic compensation are realized, and the problems of poor linearity of phased-array antenna online rapid calibration and performance evaluation, high test cost and the like are solved.
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Description

Technical Field

[0001] The present invention relates to the technical field of phased array antennas, and in particular to a high-density integrated radio frequency array with a transmitting channel online monitoring function. Background Art

[0002] With the rapid development of electronic technology and technology and the continuous advancement of microwave integration technology, phased array antenna technology has become more and more mature. Compared with traditional machine-scanned arrays, phased array antennas achieve rapid beamforming in the form of spatial power synthesis by changing the channel phase. They have the characteristics of beam agility, multi-beam forming, beamforming, high reliability, and high flexibility. They have been widely used in fields including satellite communications, 5G / 6G communications, space detection, radar guidance, etc. As the working frequency band of phased array antennas continues to expand and increase, the integration and channel scale of phased array antennas have also increased, and large-scale high-density integrated RF array microsystems have been derived, which have a large number of channels and extremely high integration. Therefore, the system has put forward higher requirements for the heat dissipation, volume and weight, profile height and other structural dimensions of phased array antennas, and the requirements for important electrical properties such as power, sidelobe level, gain and beam pointing are also getting higher and higher. At the same time, after leaving the darkroom test environment, the demand for online channel-level RF performance health monitoring of in-service products is becoming more and more urgent in view of long-term storage requirements.

[0003] High-density integrated RF array is a new type of phased array antenna technology. It adopts an integrated and lightweight design concept to integrate the components in the system with high density, realizing the integrated design of antenna array surface, feeding network, transceiver channel and structure, and thermal control. Antenna on chip (AOC) and packaged antenna (AIP) are the existing implementation methods of high-density integrated RF array. The antenna on chip uses semiconductor technology to integrate the antenna array surface and circuit on a chip, and the packaged antenna uses packaging technology to integrate the antenna array surface in the packaging material carrying the chip. Although both methods have achieved lightweight and integrated design, it is difficult to meet the high-power density working requirements. After the high-power phased array antenna system is highly integrated, severe heat density concentration problems will occur, resulting in the degradation of antenna system performance, and ultimately unable to meet the use requirements.

[0004] Furthermore, to ensure electrical performance, the phased array antenna must calibrate the amplitude and phase of each channel array element before leaving the factory. The amplitude and phase accuracy of all channel-related array elements are important factors affecting the electrical performance of the phased array antenna. The phased array antenna controls the compensation values ​​of the phase shifter and attenuator through the wave control system, and performs differentiated compensation for the amplitude and phase of the array, thereby achieving the best radiation performance of the phased array antenna. After delivery to the customer, the phased array antenna also needs to be tested and diagnosed from time to time, but due to limitations such as the test environment, test equipment, and product storage environment, channel-level online performance health monitoring is usually not possible. When the product encounters performance problems, it often needs to be returned to the factory for disassembly and secondary calibration testing.

[0005] Online monitoring of the performance of the RF transmission channel of a phased array antenna means that during the use of the phased array antenna, the amplitude and phase of the array can be tested at any time and anywhere; failed array elements can be diagnosed and screened out, and performance can be evaluated online; the amplitude and phase of each channel of the array can be independently measured and adjusted to ensure good radiation characteristics of the phased array antenna. This will enable health monitoring of the entire life cycle of the phased array antenna. At present, depending on the injection or acquisition point of the measurement signal, the basic methods for monitoring the array of phased array antennas are divided into two types: "internal monitoring" and "external monitoring". The existing traditional near-field and far-field calibration methods such as commutation method, modulation method and mutual coupling method all fall into the category of these two basic methods.

[0006] However, whether it is "external monitoring" or "internal monitoring", external computers and supporting test equipment are required, including computers, control equipment, vector network analyzers, signal sources, spectrum analyzers, etc. Some systems that can realize self-calibration functions rely on complex analog and digital circuit designs at the back end to realize sub-array-level performance monitoring and calibration in the digital domain. In the performance monitoring and calibration process, multi-level test errors of the feed network, RF cables, and analog / digital conversion circuits are mixed, and global channel performance monitoring and calibration cannot be achieved. At the same time, with the improvement of system integration, the increase in device coupling and channel coupling further increases the difficulty of calibration, which makes the realization of array monitoring and calibration functions highly dependent on external resources and human and technical capabilities, resulting in extremely high testing costs and poor online linearity in evaluating the performance of phased array antennas.

[0007] At present, the monitoring and calibration compensation methods of phased array antenna arrays are mostly implemented by relying on external test equipment, or by implementing multi-channel sub-array transceiver calibration in the digital domain through analog-to-digital conversion. The process is cumbersome and the method is complex. Due to the limitations of the environment, equipment, site and technical personnel, it is impossible to independently realize the amplitude and phase performance monitoring and precise automatic compensation of the transmitting channel of the RF array. Summary of the invention

[0008] The purpose of the present invention is to provide a high-density integrated radio frequency array with online monitoring function of transmission channel based on the amplitude-phase information inversion method of coupling coherence difference between array elements, so as to solve the problems of difficulty in rapid online calibration of phased array antennas, poor online linearity of performance evaluation and high testing cost.

[0009] To achieve the above object, the present invention adopts the following technical solution:

[0010] On the one hand, the present specification provides a high-density integrated radio frequency array with a transmission channel online monitoring function, including:

[0011] Antenna array surface 1, radio frequency chip 2, high temperature co-fired ceramic 3, high thermal conductivity heat storage structure 4, high thermal conductivity thermal pad 5; the lower surface of the antenna array surface 1 and the upper surface of the radio frequency chip 2 are welded through BGA ball planting 23, the lower surface of the radio frequency chip 2 and the upper surface of the high temperature co-fired ceramic 3 are welded through BGA ball planting 23, the upper surface of the high thermal conductivity heat storage structure 5 and the lower surface of the high temperature co-fired ceramic 3 are welded by brazing, and the high thermal conductivity thermal pad 5 and the lower surface of the high thermal conductivity heat storage structure 4 are connected by bonding; the heat of the radio frequency chip 2 is transferred to the high temperature co-fired ceramic 3, transferred from the high temperature co-fired ceramic 3 to the high thermal conductivity heat storage structure 4, transferred from the high thermal conductivity heat storage structure 4 to the high thermal conductivity thermal pad 5, and then transferred to the cold end.

[0012] On the other hand, the present specification provides a method for online performance monitoring of a radio frequency channel of a high-density integrated radio frequency array, comprising:

[0013] Step 102, based on the radio frequency detection circuit 21 of the radio frequency chip 2, measuring and obtaining radio frequency power detection information;

[0014] Step 104, obtaining amplitude detection information based on the radio frequency power detection information;

[0015] Step 106: Calculate and obtain the phase information of the radio frequency channel based on the output codeword of the amplitude detection information.

[0016] Based on the above technical solution, this specification can achieve the following technical effects:

[0017] (1) Utilizing the coupling characteristics between the channels of the phased array antenna, a high-density integrated RF array with online monitoring of the transmission channel performance is proposed, realizing the online amplitude and phase performance monitoring and calibration functions of the phased array antenna transmission channel.

[0018] (2) The online monitoring function of the RF transmission channel performance does not rely on external test equipment and back-end redundant analog circuits and digital circuit designs, and can independently perform global transmission channel performance monitoring and calibration.

[0019] (3) The online monitoring function of the RF transmission channel performance can be realized independently, and no other device needs to be in the receiving state during transmission calibration.

[0020] (4) By utilizing the high integration and high thermal conductivity of high-temperature co-fired ceramics, the device achieves ultra-low profile and miniaturized RF array integration while ensuring thermal design, ensuring a small temperature gradient during the calibration process and improving calibration accuracy.

[0021] (5) The RF array can be adapted to different antenna array unit forms and array arrangements. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 The figure is a schematic diagram of the structure of a high-density integrated radio frequency array with online monitoring function of transmission channels in one embodiment of the present invention.

[0023] 1. Antenna array; 2. RF chip; 3. High temperature co-fired ceramics; 4. High thermal conductivity heat storage structure; 5. High thermal conductivity thermal pad;

[0024] Figure 2 The figure is a detailed structural diagram of a high-density integrated radio frequency array with online monitoring function of transmission channels in one embodiment of the present invention.

[0025] 11. Metal patch; 12. Metallized via; 13. Dielectric board; 14. Metal base plate; 21. Detection circuit; 22. RF package chip; 23. BGA solder ball; 31. High temperature co-fired ceramic upper metal base plate; 32. High temperature co-fired ceramic body; 33. High temperature co-fired ceramic lower metal base plate; 34. High temperature co-fired ceramic internal metallized blind hole; 35. High temperature co-fired ceramic internal circuit; 36. High temperature co-fired ceramic metallized through hole; 41. Molybdenum copper alloy; 42. RF connector; 43. Metal implant pin;

[0026] Figure 3 This is a power detection amplitude information codeword output timing diagram of a millimeter wave high-density integrated radio frequency array device with online monitoring of radio frequency transmission channel performance in one embodiment of the present invention - power detection function enabling timing 1.

[0027] Figure 4 This is a power detection amplitude information codeword output timing diagram of a millimeter wave high-density integrated radio frequency array device with online monitoring of radio frequency transmission channel performance in one embodiment of the present invention - power detection function enabling timing 2.

[0028] Figure 5 This is a power detection amplitude information codeword output timing diagram of a millimeter wave high-density integrated radio frequency array device with online monitoring of radio frequency transmission channel performance in one embodiment of the present invention - power detection function enabling timing 3.

[0029] Figure 6 This is a power detection amplitude information codeword output timing diagram - codeword output timing of a millimeter wave high-density integrated radio frequency array device with online monitoring of radio frequency transmission channel performance in one embodiment of the present invention.

[0030] Figure 7 The figure is a corresponding relationship diagram between channel power and detection codeword of a millimeter wave high-density integrated radio frequency array device capable of online monitoring of radio frequency transmission channel performance in one embodiment of the present invention.

[0031] Figure 8 The present invention is a flowchart of a method for online performance monitoring of a radio frequency channel of a millimeter wave high-density integrated radio frequency array in one embodiment of the present invention. DETAILED DESCRIPTION

[0032] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description and claims. It should be noted that the drawings are all in very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0033] It should be noted that, in order to clearly explain the content of the present invention, the present invention specifically cites multiple embodiments to further illustrate different implementations of the present invention, wherein the multiple embodiments are enumerated rather than exhaustive. In addition, for the sake of brevity of explanation, the contents mentioned in the previous embodiments are often omitted in the subsequent embodiments. Therefore, the contents not mentioned in the subsequent embodiments can refer to the previous embodiments accordingly.

[0034] Example 1

[0035] Please refer to Figure 1 , Figure 1 The figure shows a high-density integrated radio frequency array with a function of online monitoring of transmission channels provided by this embodiment. In this embodiment, the array includes:

[0036] Antenna array surface 1, millimeter wave radio frequency chip 2, high temperature co-fired ceramic 3, high thermal conductivity heat storage structure 4, high thermal conductivity thermal pad 5; the lower surface of the antenna array surface 1 and the upper surface of the millimeter wave radio frequency chip 2 are welded through BGA ball planting 23, the lower surface of the millimeter wave radio frequency chip 2 and the upper surface of the high temperature co-fired ceramic 3 are welded through BGA ball planting 23, the upper surface of the high thermal conductivity heat storage structure 5 and the lower surface of the high temperature co-fired ceramic 3 are welded by brazing, and the high thermal conductivity thermal pad 5 and the lower surface of the high thermal conductivity heat storage structure 4 are connected by bonding; the heat of the millimeter wave radio frequency chip 2 is conducted to the high temperature co-fired ceramic 3, and then conducted from the high temperature co-fired ceramic 3 to the high thermal conductivity heat storage structure 4, and then conducted from the high thermal conductivity heat storage structure 4 to the high thermal conductivity thermal pad 5, and then conducted to the cold end.

[0037] In this embodiment, in the transmitting state, the millimeter wave RF energy is transmitted to the millimeter wave RF chip 2 through the high temperature co-fired ceramic 3, and after being amplified by the millimeter wave RF chip 2, it is transmitted to the antenna array surface 1 to realize the transmission of the millimeter wave energy.

[0038] In this embodiment, reference Figure 2 The antenna array surface 1 includes a metal patch 11, a metal through hole 12, a dielectric plate 13 and a metal base plate 14; wherein the metal patch 11 is placed on the upper surface of the dielectric plate 13, the metal base plate 14 is placed on the lower surface of the dielectric plate 13, and the metal through hole 12 is placed inside the dielectric plate 13 to achieve the connection between the metal patch 11 and the metal base plate 14.

[0039] In this embodiment, the final output port of the internal transmission link of the millimeter wave radio frequency chip 2 is encapsulated with four radio frequency detection circuits 21 for outputting radio frequency power detection information via digital signals.

[0040] In this embodiment, reference Figure 2 The high temperature co-fired ceramic 3 includes: a high temperature co-fired ceramic upper metal base plate 31, a high temperature co-fired ceramic body 32, a high temperature co-fired ceramic lower metal base plate 33, a high temperature co-fired ceramic internal metalized blind hole 34, a high temperature co-fired ceramic internal circuit 35, and a high temperature co-fired ceramic metalized through hole 36; the high temperature co-fired ceramic metalized through hole 36 runs through the high temperature co-fired ceramic body 32 to achieve the connection between the high temperature co-fired ceramic upper metal base plate 31 and the high temperature co-fired ceramic lower metal base plate 33.

[0041] In this embodiment, reference Figure 2 The high temperature co-fired ceramic 3 also includes a radio frequency connector 42 and a metal implant pin 43; the power signal and control signal in the high temperature co-fired ceramic are transmitted through the metal implant pin 43, and the power signal and control signal in the high temperature co-fired ceramic are transmitted between the millimeter wave radio frequency chip through the high temperature co-fired ceramic metallized through hole 36; the radio frequency connector 42 is used to realize the transmission of radio frequency signals with the wave control calibration module.

[0042] In this embodiment, the operating frequency band of the antenna array surface 1 is the millimeter wave frequency band.

[0043] In this embodiment, the high thermal conductivity heat storage structure 4 is a molybdenum-copper alloy 41.

[0044] In this embodiment, the high thermal conductivity thermal pad 5 is a graphene thermal pad.

[0045] Figure 3 This is a power detection amplitude information codeword output timing diagram of a millimeter wave high-density integrated radio frequency array device with online monitoring of radio frequency transmission channel performance provided by an embodiment - power detection function enabling timing 1;

[0046] Figure 4 This is a power detection amplitude information codeword output timing diagram of a millimeter wave high-density integrated radio frequency array device with online monitoring of radio frequency transmission channel performance provided by an embodiment - power detection function enabling timing 2;

[0047] Figure 5 This is a power detection amplitude information codeword output timing diagram of a millimeter wave high-density integrated radio frequency array device with online monitoring of radio frequency transmission channel performance provided by an embodiment - power detection function enabling timing 3;

[0048] Figure 6 The embodiment provides a millimeter wave high-density integrated radio frequency array device with online monitoring of radio frequency transmission channel performance, a power detection amplitude information codeword output timing diagram - codeword output timing;

[0049] in, Figure 3 , Figure 4 , Figure 5 , Figure 6 For the detection control timing example, Figure 3 As the first step, control the transmit enable register to open; Figure 4 The second step is to send code to control the RF function transmission; Figure 5 For the third step, control the detection function to open; Figure 6 For the fourth step, pull the detection enable high to obtain the detection output serial code;

[0050] Among them, CLK is the synchronous reference clock; TIN is the transmit enable register control; TEN is the transmit enable input; DIN is the serial control data input; DEN is the secondary register load signal; EN is the tertiary register load signal; OE is the detection enable input; DOUT is the serial data output;

[0051] Figure 7 A diagram showing a corresponding relationship between channel power and detection codewords of a millimeter wave high-density integrated radio frequency array device capable of online monitoring of radio frequency transmission channel performance provided by an embodiment of the present invention;

[0052] Example description: The horizontal axis is the phase value, ranging from 0 to 360 degrees; the vertical axis on the left is the power amplitude value, in dBm; the vertical axis on the right is the detection output codeword; the figure shows that when the power amplitude of the detection channel drops below -10dBm, the detection codeword changes from -162 to -163, realizing the detection output of power.

[0053] Based on this, this array realizes the global online channel performance monitoring of the RF transmission channel of the phased array antenna array and adaptive calibration compensation during use. The device can independently perform channel monitoring and calibration, does not rely on external test equipment, has strong applicability, and its application form is not limited by the phased array antenna array layout, and has great application promotion potential.

[0054] In summary, the array has the following beneficial effects:

[0055] (1) Utilizing the coupling characteristics between the channels of the phased array antenna, a millimeter-wave high-density integrated RF array with online monitoring of the transmission channel performance is proposed, realizing the online amplitude and phase performance monitoring and calibration functions of the phased array antenna transmission channel.

[0056] (2) The online monitoring function of the RF transmission channel performance does not rely on external test equipment and back-end redundant analog circuits and digital circuit designs, and can independently perform global transmission channel performance monitoring and calibration.

[0057] (3) The online monitoring function of the RF transmission channel performance can be realized independently, and no other device needs to be in the receiving state during transmission calibration.

[0058] (4) By utilizing the high integration and high thermal conductivity of high-temperature co-fired ceramics, the device achieves ultra-low profile and miniaturized RF array integration while ensuring thermal design.

[0059] (5) The RF array can be adapted to different antenna array unit forms and array arrangements.

[0060] Example 2

[0061] Please refer to Figure 8 , Figure 8 The figure shows a method for online performance monitoring of a radio frequency channel of a millimeter wave high-density integrated radio frequency array provided in this embodiment. In this embodiment, the method includes:

[0062] Step 102, based on the radio frequency detection circuit 21 of the millimeter wave radio frequency chip 2, measuring and obtaining radio frequency power detection information;

[0063] Step 104, obtaining amplitude detection information based on the radio frequency power detection information;

[0064] Step 106: Calculate and obtain the phase information of the radio frequency channel based on the output codeword of the amplitude detection information.

[0065] Based on this, this method realizes the global online channel performance monitoring of the RF transmission channel of the phased array antenna array and adaptive calibration compensation during use through the millimeter wave high-density integrated RF array. The device can independently perform channel monitoring and calibration, does not rely on external test equipment, has strong applicability, and its application form is not limited by the phased array antenna layout method, and has great application promotion potential.

[0066] The above is only an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims

1. A high-density integrated radio frequency array with online monitoring function of transmission channels, characterized in that: include: Antenna array surface (1), radio frequency chip (2), high temperature co-fired ceramic (3), high thermal conductivity heat storage structure (4), high thermal conductivity thermal pad (5); the lower surface of the antenna array surface (1) and the upper surface of the radio frequency chip (2) are welded via BGA ball planting (23), the lower surface of the radio frequency chip (2) and the upper surface of the high temperature co-fired ceramic (3) are welded via BGA ball planting (23), the upper surface of the high thermal conductivity heat storage structure (5) and the lower surface of the high temperature co-fired ceramic (3) are welded via brazing, and the high thermal conductivity thermal pad (5) and the lower surface of the high thermal conductivity heat storage structure (4) are connected via bonding; the heat of the radio frequency chip (2) is transferred to the high temperature co-fired ceramic (3), transferred from the high temperature co-fired ceramic (3) to the high thermal conductivity heat storage structure (4), transferred from the high thermal conductivity heat storage structure (4) to the high thermal conductivity thermal pad (5), and then transferred to the cold end.

2. The high-density integrated radio frequency array according to claim 1, characterized in that: In the transmitting state, radio frequency energy is transmitted to the radio frequency chip (2) through the high temperature co-fired ceramic (3), and after being amplified by the radio frequency chip (2), it is transmitted to the antenna array surface (1), thereby achieving the transmission of radio frequency energy.

3. The high-density integrated radio frequency array according to claim 1, characterized in that: The antenna array surface (1) comprises a metal patch (11), a metal through hole (12), a dielectric plate (13) and a metal base plate (14); wherein the metal patch (11) is placed on the upper surface of the dielectric plate (13), the metal base plate (14) is placed on the lower surface of the dielectric plate (13), and the metal through hole (12) is placed inside the dielectric plate (13) to achieve connection between the metal patch (11) and the metal base plate (14).

4. The high-density integrated radio frequency array according to claim 1, characterized in that: The final output port of the internal transmission link of the radio frequency chip (2) is encapsulated with four radio frequency detection circuits (21) for outputting radio frequency power detection information via digital signals.

5. The high-density integrated radio frequency array according to claim 1, characterized in that: The high temperature co-fired ceramic (3) comprises: a high temperature co-fired ceramic upper metal base plate (31), a high temperature co-fired ceramic body (32), a high temperature co-fired ceramic lower metal base plate (33), a high temperature co-fired ceramic internal metalized blind hole (34), a high temperature co-fired ceramic internal circuit (35), and a high temperature co-fired ceramic metalized through hole (36); the high temperature co-fired ceramic metalized through hole (36) runs through the high temperature co-fired ceramic body (32) to achieve the connection between the high temperature co-fired ceramic upper metal base plate (31) and the high temperature co-fired ceramic lower metal base plate (33).

6. The high-density integrated radio frequency array according to claim 5, characterized in that: The high temperature co-fired ceramic (3) also includes a radio frequency connector (42) and a metal implant pin (43); the power signal and the control signal in the high temperature co-fired ceramic are transmitted through the metal implant pin (43), and the power signal and the control signal in the high temperature co-fired ceramic are transmitted between the millimeter wave radio frequency chip and the high temperature co-fired ceramic metallized through hole (36); the radio frequency connector (42) is used to realize the transmission of radio frequency signals with the wave control calibration module.

7. The high-density integrated radio frequency array according to claim 1, characterized in that: The operating frequency band of the antenna array surface (1) corresponds to the operating frequency band of the radio frequency signal.

8. The high-density integrated radio frequency array according to claim 1, characterized in that: The high thermal conductivity heat storage structure (4) is a molybdenum-copper alloy.

9. The high-density integrated radio frequency array according to claim 1, characterized in that: The high thermal conductivity thermal pad (5) is a graphene thermal pad.

10. A method for online performance monitoring of a radio frequency channel using the high-density integrated radio frequency array according to any one of claims 1 to 9, characterized in that: include: Based on the radio frequency detection circuit (21) of the radio frequency chip (2), radio frequency power detection information is measured and obtained; Based on the radio frequency power detection information, amplitude detection information is obtained; Based on the codeword of the amplitude detection information, the phase information of the RF channel is calculated.

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