Plasma linear device sample table and plasma linear device

Abstract

The invention relates to the technical field of plasma linear devices, and discloses a plasma linear device sample table and a plasma linear device. Comprising a sample rod, a mounting piece, an insulating assembly, a corrugated pipe and an adjusting assembly. A sample seat for placing a sample is arranged at the first end of the sample rod. The installation piece is provided with an installation hole communicated with the body, the sample rod penetrates through the installation hole, and the diameter of the installation hole is larger than the outer diameter of the sample rod. The insulating assembly is fixedly connected with the second end of the sample rod. The corrugated pipe sleeves the sample rod, the inner diameter of the corrugated pipe is larger than the outer diameter of the sample rod, one end of the corrugated pipe is hermetically connected with the insulating component, and the other end is hermetically connected with the mounting piece. The adjusting assembly is connected with the insulating assembly. The insulating assembly insulates the sample rod from the corrugated pipe and insulates the sample rod from the adjusting assembly, the diameter of the mounting hole and the inner diameter of the corrugated pipe are both larger than the outer diameter of the sample rod, the sample rod is prevented from making contact with the mounting piece or the corrugated pipe in the moving process, and the insulating performance of the plasma linear device sample table is improved.

Description

Technical Field

[0001] The invention relates to the technical field of plasma linear devices, and in particular to a plasma linear device sample stage and a plasma linear device. Background Art

[0002] The plasma linear device is an important device for studying the first wall material of nuclear fusion. Samples of different materials are placed on the sample stage and are irradiated with high energy facing the plasma in the vacuum chamber. The irradiation temperature is very high, and most of the heat needs to be removed by the cooling system. With the deepening of the research, the plasma density is getting higher and higher, the energy of the sample irradiation is getting higher and higher, and the requirements for the insulation and sealing of the sample stage are getting higher and higher. In addition, after the sample stage and the plasma linear device are installed, the sample stage is facing the plasma source in the vacuum chamber. During the test, the sample stage and the plasma source need to be coaxial. In order to compensate for the processing and installation errors of the sample stage, and to be able to test the experimental data under different distances between the plasma source and the sample, the sample stage needs to be able to be adjusted to the front and back, left and right, and up and down to ensure the reliability of the measurement data. Summary of the invention

[0003] The purpose of the present invention is to provide a plasma linear device sample stage and a plasma linear device, which can ensure the insulation and sealing performance between the sample stage and the vacuum chamber, and the sample stage is adjustable, which can improve the reliability of measurement data.

[0004] In order to achieve the above object, the present invention provides a plasma linear device sample stage, comprising: A sample rod, wherein a sample seat for placing a sample is provided at a first end of the sample rod; A mounting member, used to be connected to the main body of the plasma linear device, the mounting member is provided with a mounting hole communicating with the vacuum chamber in the main body, the sample rod is passed through the mounting hole, and the diameter of the mounting hole is larger than the outer diameter of the sample rod; an insulating component, wherein the insulating component is fixedly connected to the second end of the sample rod; A bellows, sleeved on the sample rod, the inner diameter of the bellows is larger than the outer diameter of the sample rod, one end of the bellows is sealed and connected to the insulating component, the other end of the bellows is sealed and connected to the mounting member, and the bellows is communicated with the mounting hole; An adjusting component is connected to the insulating component to adjust the position of the sample rod.

[0005] According to one embodiment of the present invention, the second end of the sample rod is provided with a connecting portion. The insulation assembly comprises: A connecting flange, the connecting flange is connected to the bellows and blocks one end of the bellows, and a first through hole is provided on the connecting flange; An insulating tube, wherein the insulating tube is sleeved on the sample rod, one end of the insulating tube is connected to the connecting flange, the first through hole and the insulating tube jointly define a connecting channel, the sample rod is passed through the connecting channel, the diameter of the connecting channel is larger than the outer diameter of the sample rod, and the other end of the insulating tube is connected to the connecting portion.

[0006] According to one embodiment of the present invention, the plasma linear device sample stage also includes a support member, which is sleeved on the sample rod and in contact with the sample rod. The support member is located on a side of the connecting flange away from the insulating tube and is connected to the connecting flange. The support member is made of polytetrafluoroethylene material.

[0007] According to one embodiment of the present invention, the connecting flange includes a flange body and at least one measuring tube, the flange body is connected to the bellows, the first through hole is provided on the flange body, the flange body is connected to the insulating tube on one side facing the bellows, the measuring tube is connected to the flange body, and the measuring tube is communicated with the bellows.

[0008] According to one embodiment of the present invention, the sample rod includes a rod body, a sample holder and a fixing member, the sample holder is connected to one end of the rod body, the fixing member is connected to the sample holder, the sample clamp is arranged between the fixing member and the sample holder, and the other end of the rod body is connected to the insulating component.

[0009] According to one embodiment of the present invention, the fixing piece is annular, a groove is provided on the side of the sample holder away from the rod body, the fixing piece is sleeved on the sample holder, a sample space is formed between the fixing piece and the groove, the sample is located in the sample space, and a jet hole is provided on the fixing piece, and the jet hole connects the sample space and the external space.

[0010] According to an embodiment of the present invention, a thermocouple groove is provided at the bottom of the sample holder, the thermocouple groove extends from the center of the bottom of the sample holder to the outer peripheral wall of the sample rod, and the thermocouple groove is used to accommodate a thermocouple.

[0011] According to one embodiment of the present invention, the plasma linear device sample stage further includes a water inlet pipe and a water outlet pipe, a cooling cavity is provided in the sample rod, and the water inlet pipe and the water outlet pipe are both connected to the cooling cavity.

[0012] According to one embodiment of the present invention, the cooling cavity extends from the second end to the first end, the end of the water outlet pipe is located at the second end, the water inlet pipe extends from the second end to the first end, the inner wall of the cooling cavity adjacent to the sample holder is the bottom wall of the cooling cavity, and the distance between the water inlet pipe and the bottom wall is L, 8mm≤L≤12mm.

[0013] The present invention also provides a plasma linear device, comprising: A main body, wherein a vacuum chamber is provided in the main body, and a mounting port communicating with the vacuum chamber is provided on the main body; As described above, in the plasma linear device sample stage, the mounting member is sealed and connected to the main body and blocks the mounting opening, and the mounting hole is communicated with the mounting opening.

[0014] A plasma linear device sample stage according to an embodiment of the present invention has a mounting member connected to a bellows, a sample rod passing through a mounting hole of the mounting member and the bellows, and the diameter of the mounting hole and the inner diameter of the bellows are both larger than the outer diameter of the sample rod. The second end of the sample rod is fixed by an insulating component, and the insulating component is connected to the adjustment component and the bellows. In this way, the insulating component insulates the sample rod from the bellows and the adjustment component, and the arrangement of the bellows and the mounting member prevents the sample rod from contacting the mounting member or the bellows during movement, thereby improving the insulation performance of the plasma linear device sample stage and the reliability of the measurement data. In addition, when adjusting the position of the sample rod, the bellows can be stretched and deformed with the movement of the sample rod to ensure the sealing of the plasma linear device sample stage. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a stereoscopic diagram of a sample stage of a plasma linear device provided in an embodiment of the present invention.

[0016] Figure 2 It is a cross-sectional view of a sample stage of a plasma linear device provided in an embodiment of the present invention.

[0017] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0018] Figure 4 This is one of the assembly drawings of the sample rod and the insulating component provided in the embodiment of the present invention.

[0019] Figure 5 This is the second assembly drawing of the sample rod and the insulating component provided in the embodiment of the present invention.

[0020] Figure 6 It is a cross-sectional view of a sample rod and an insulating component provided by an embodiment of the present invention after being connected.

[0021] Figure 7 This is one of the structural schematic diagrams of the connecting flange provided in an embodiment of the present invention.

[0022] Figure 8 This is the second structural schematic diagram of the connecting flange provided in an embodiment of the present invention.

[0023] Fig. 9 It is a schematic diagram of the structure of the insulating tube provided in an embodiment of the present invention.

[0024] Reference numerals: 110, sample rod; 1101, first end; 1102, second end; 111, rod body; 112, sample holder; 1121, groove; 1122, thermocouple groove; 113, connecting part; 114, fixing member; 1141, jet hole; 115, cooling chamber; 116, bottom wall; 120, insulating component; 121, connecting flange; 1211, flange body; 1212, first through hole; 1213, measuring tube; 122, insulating tube; 1221, tube body; 1222, first flange; 1223, second flange; 123, connecting channel; 130, mounting member; 131, mounting hole; 140, bellows; 141, reinforcing rod; 150, support member; 160, water inlet pipe; 161, water outlet pipe; 170, adjustment assembly; 171, fixing seat; 172, supporting seat; 173, sliding platform; 174, base; 175, supporting frame; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0025] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0026] In the description of the embodiments of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0027] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0028] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0029] like Figure 1 and Figure 2 As shown, a plasma linear device sample stage according to an embodiment of the present invention includes a sample rod 110 , an insulating component 120 , a mounting member 130 , a bellows 140 and an adjustment component 170 .

[0030] Specifically, a sample holder 112 for placing a sample is provided at the first end 1101 of the sample rod 110. The mounting member 130 is used to connect with the main body of the plasma linear device. The mounting member 130 is provided with a mounting hole 131 connected with the vacuum chamber in the main body. The sample rod 110 is inserted into the mounting hole 131. The diameter of the mounting hole 131 is larger than the outer diameter of the sample rod 110. The insulating component 120 is fixedly connected with the second end 1102 of the sample rod 110. The bellows 140 is sleeved on the sample rod 110. The inner diameter of the bellows 140 is larger than the outer diameter of the sample rod 110. One end of the bellows 140 is sealed and connected with the insulating component 120. The insulating component 120 blocks one end of the bellows 140. The other end of the bellows 140 is sealed and connected with the mounting member 130. The inner space of the bellows 140 is connected with the mounting hole 131. The adjusting component 170 is connected with the insulating component 120 to adjust the position of the sample rod 110.

[0031] The first end 1101 of the sample rod 110 is provided with a sample holder 112 to fix the sample. Figure 1As shown, the sample holder 112 is located at the end surface of the first end 1101, and the axis of the sample rod 110 passes through the sample holder 112. The sample rod 110 passes through the mounting hole 131 on the mounting member 130, the first end 1101 of the sample rod 110 is located in the vacuum chamber, and the sample holder 112 is located in the iso-vacuum chamber. During operation, the sample is placed on the sample holder 112 and placed in the vacuum chamber to receive high-energy irradiation. The second end 1102 of the sample rod 110 is connected to the bellows 140 through the insulating component 120, which can fix and support the sample rod 110 on the one hand, and insulate the sample rod 110 from the bellows 140 on the other hand. The adjustment component 170 is connected to the insulating component 120, and the adjustment component 170 can drive the sample rod 110 to move and adjust the position of the sample rod 110 through the insulating component 120 to conduct experiments or compensate for errors in the processing and installation process. In some embodiments, the adjustment component 170 can at least drive the insulating component 120 to move along the first direction X, the second direction Y and the third direction Z, wherein the axis of the sample rod 110 is parallel to the first direction X, and the first direction X, the second direction Y and the third direction Z are perpendicular to each other.

[0032] The two ends of the bellows 140 are connected to the mounting member 130 and the insulating assembly 120 respectively, and the bellows 140 is connected to the mounting hole 131, so that when the position of the sample rod 110 is adjusted, the bellows 140 can be extended and deformed with the movement of the sample rod 110 to ensure the sealing of the plasma linear device sample stage. In some embodiments, both ends of the bellows 140 are provided with flanges for connecting with the mounting member 130 or the insulating assembly 120. Figure 2 As shown, a reinforcing rod 141 is detachably connected between the flanges at both ends of the bellows 140. The reinforcing rod 141 is a threaded rod that can fix the length of the bellows 140. The inner diameter of the bellows 140 and the diameter of the mounting hole 131 are both larger than the outer diameter of the sample rod 110, so that the sample rod 110 has a larger range of movement, and the sample rod 110 is prevented from contacting the mounting member 130 during movement, resulting in insulation failure. It is understandable that in order to ensure the irradiation effect on the sample, the sample rod 110 usually has a set installation position. In some embodiments, with the axis of the sample rod 110 at the set installation position as the central axis, the movable range of the sample rod 110 is cylindrical, the diameter of the cylinder is D, the diameter of the sample rod 110 is d, and the inner diameter of the bellows 140 and the diameter of the mounting hole 131 are both larger than D+2d.

[0033] According to the plasma linear device sample stage of the embodiment of the present invention, the mounting member 130 is connected to the bellows 140, the sample rod 110 is inserted into the mounting hole 131 of the mounting member 130 and the bellows 140, and the diameter of the mounting hole 131 and the inner diameter of the bellows 140 are both larger than the outer diameter of the sample rod 110. The second end 1102 of the sample rod 110 is fixed by the insulating component 120, and the insulating component 120 is connected to the adjusting component 170 and the bellows 140. In this way, the insulating component 120 insulates the sample rod 110 from the bellows 140 and the adjusting component 170. The arrangement of the bellows 140 and the mounting member 130 prevents the sample rod 110 from contacting the mounting member 130 or the bellows 140 during movement, thereby improving the insulation performance of the plasma linear device sample stage, and improving the reliability of measurement data and the safety of operation. In addition, when the position of the sample rod 110 is adjusted, the bellows 140 can be extended and deformed along with the movement of the sample rod 110 to ensure the sealing of the sample stage of the plasma linear device.

[0034] like Figure 3 and Figure 4 As shown, according to some embodiments of the present invention, the insulating assembly 120 includes a connecting flange 121 and an insulating tube 122. The connecting flange 121 is connected to the bellows 140 and seals one end of the bellows 140. The connecting flange 121 and the bellows 140 can be connected by fasteners such as bolts. The insulating tube 122 is sleeved on the sample rod 110. The second end 1102 of the sample rod 110 is provided with a connecting portion 113. One end of the insulating tube 122 is connected to the connecting flange 121. The insulating tube 122 and the connecting flange 121 can be connected and sealed by a sealing gasket and a fastener; the other end is connected to the connecting portion 113. The insulating tube 122 is made of an insulating material. For example, the insulating tube 122 can be made of a ceramic material. The insulating tube 122 can insulate the sample rod 110 from the connecting flange 121. Figure 3 In the example, the insulating tube 122 is located in the bellows 140. The connecting flange 121 is provided with a first through hole 1212, and the first through hole 1212 and the insulating tube 122 jointly define a connecting channel 123. The sample rod 110 is passed through the connecting channel 123. The diameter of the connecting channel 123 is greater than the outer diameter of the sample rod 110, and the peripheral wall of the sample rod 110 does not contact the inner wall of the connecting channel 123. The connecting portion 113 is connected to the insulating tube 122, the insulating tube 122 is connected to the connecting flange 121, and the connecting flange 121 is connected to the bellows 140, so as to fix the sample rod 110, isolate the sample rod 110 from the connecting flange 121 and the bellows 140, and ensure the insulation performance of the sample rod 110.

[0035] like Figure 3 and Fig. 9As shown, in some embodiments, the connecting portion 113 is a disc-shaped structure arranged on the outer peripheral wall of the sample rod 110, and the insulating tube 122 includes a first flange 1222, a tube body 1221 and a second flange 1223 connected in sequence. The first flange 1222 can be connected to the connecting flange 121 by screws, and the second flange 1223 is connected to the connecting portion 113 by screws.

[0036] like Figure 3 and Figure 6 As shown, according to some embodiments of the present invention, the plasma linear device sample stage further includes a support member 150, which is sleeved on the sample rod 110 and in contact with the sample rod 110. The support member 150 is located on the side of the connecting flange 121 away from the insulating tube 122 and connected to the connecting flange 121. The support member 150 is made of polytetrafluoroethylene material to separate the sample rod 110 and the connecting flange 121 to play an insulating role. Specifically, the support member 150 is annular, and a second through hole is provided on the support member 150. The sample rod 110 is inserted into the second through hole. The inner wall of the second through hole is in contact with the peripheral wall of the sample rod 110 to block the gap between the sample rod 110 and the first through hole 1212. On the side of the connecting flange 121 facing the bellows 140 , the sample rod 110 is fixed and supported by the connecting portion 113 connected to the insulating tube 122 . On the side of the connecting flange 121 facing away from the bellows 140 , the sample rod 110 is supported by the supporting member 150 to improve the stability of the sample rod 110 .

[0037] like Figure 6 and Figure 7 As shown, according to some embodiments of the present application, the connecting flange 121 includes a flange body 1211 and at least one measuring tube 1213, the flange body 1211 is connected to the bellows 140 and blocks one end of the bellows 140, the first through hole 1212 is provided on the flange body 1211, and the side of the flange body 1211 facing the bellows 140 is connected to the insulating tube 122. The measuring tube 1213 is connected to the flange body 1211, and the measuring tube 1213 is in communication with the bellows 140, and the measuring plug-in and the diagnostic plug-in can be inserted through the measuring tube 1213 to detect parameters such as the temperature inside the sample stage of the plasma linear device, or to detect the sample. In some embodiments, the measuring tube 1213 is located on the side of the flange body 1211 away from the bellows 140, and the end of the measuring tube 1213 is provided with a flange for connecting with the measuring plug-in and the diagnostic plug-in.

[0038] like Figure 6As shown, according to some embodiments of the present invention, the sample rod 110 includes a rod body 111, a sample holder 112 and a fixing member 114. The sample holder 112 is connected to one end of the rod body 111. The sample holder 112 and the rod body 111 can be welded, such as brazed, to improve the stability of the connection between the sample holder 112 and the rod body 111, and the heat transfer performance between the sample holder 112 and the rod body 111 is good to avoid the sample holder 112 from being overheated. The sample holder 112 can be made of oxygen-free copper, and the rod body 111 can be made of stainless steel. The fixing member 114 is connected to the sample holder 112, and the sample clamp is arranged between the fixing member 114 and the sample holder 112. The other end of the rod body 111 is connected to the insulating component 120, and the connecting portion 113 is arranged on the outer wall of the other end of the rod body 111.

[0039] According to some embodiments of the present invention, the fixing member 114 is annular, a groove 1121 is provided on the side of the sample holder 112 away from the rod body 111, the fixing member 114 is sleeved on the sample holder 112, a sample space is formed between the fixing member 114 and the groove 1121, and the sample is located in the sample space. Specifically, part of the sample is located in the sample space, and the other part is clamped between the fixing member 114 and the sample holder 112. A jet hole 1141 is provided on the fixing member 114, and the jet hole 1141 connects the sample space and the external space, and the sample receives high-energy radiation through the jet hole 1141. In some embodiments, the fixing member 114 can be processed into a nut, and the outer peripheral wall of the sample holder 112 is provided with a threaded surface, and the threaded surface is used to connect with the fixing member 114, so as to facilitate the installation and fixing of the sample. The fixing member 114 can be made of a high-temperature resistant material, such as molybdenum.

[0040] According to some embodiments of the present invention, a thermocouple groove 1122 is provided at the bottom of the sample holder 112 , and the thermocouple groove 1122 extends from the center of the bottom of the sample holder 112 to the outer peripheral wall of the sample rod 110 . The thermocouple groove 1122 is used to accommodate a thermocouple, and the thermocouple is used to detect the temperature of the sample holder 112 .

[0041] According to some embodiments of the present invention, the sample stage of the plasma linear device also includes a water inlet pipe 160 and a water outlet pipe 161. A cooling chamber 115 is provided in the sample rod 110. The water inlet pipe 160 and the water outlet pipe 161 are both connected to the cooling chamber 115. The coolant is injected into the cooling chamber 115 through the water inlet pipe 160 to cool the sample rod 110. Finally, the coolant is output through the water outlet pipe 161.

[0042] like Figure 6As shown, according to some embodiments of the present invention, the cooling chamber 115 extends from the second end 1102 of the sample rod 110 to the first end 1101 to increase the flow path length of the water flow, increase the contact area between the coolant and the sample rod 110, and improve the cooling speed. The end of the water outlet pipe 161 is located at the second end 1102, the water inlet pipe 160 extends into the cooling chamber 115, and the water inlet pipe 160 extends from the second end 1102 of the sample rod 110 to the first end 1101, increasing the distance between the end of the water inlet pipe 160 and the end of the water outlet pipe 161, so that the coolant can fully contact the inner wall of the cooling chamber 115, thereby improving the cooling effect. The distance between the water inlet pipe 160 and the bottom wall 116 of the cooling chamber 115 is L, 8mm≤L≤12mm, so that the water column output by the water inlet pipe 160 can directly hit the bottom wall 116 of the cooling chamber 115, accelerating the heat extraction of the sample holder 112. For example, L can be 8 mm, 9 mm, 10 mm, 12 mm, etc. The bottom wall 116 of the cooling cavity 115 is an inner wall adjacent to the sample holder 112, for example, Figure 6 As shown, the sample holder 112 is brazed to one end of the rod body 111, the rod body 111 is hollow, one side of the sample holder 112 and the inner wall of the rod body 111 define a cooling chamber 115, and the distance between the end of the water inlet pipe 160 and the sample holder 112 can be 10 mm. It should be noted that some examples are provided here, and the distance between the end of the water inlet pipe 160 and the sample holder 112 is not limited thereto, as long as the water flow can impact the bottom wall 116 of the cooling chamber 115 to increase the heat exchange rate without affecting the flow of water.

[0043] like Figure 1 and Figure 2 As shown, according to some embodiments of the present invention, the adjustment assembly 170 includes a fixed seat 171, a support seat 172, a sliding platform 173 and a base 174. The sliding platform 173 is movably connected to the base 174, and the sliding platform 173 can move relative to the base 174 in the first direction X, the second direction Y and the third direction Z. The base 174 can be fixed on the ground or fixed on the support frame 175. In some embodiments, the adjustment assembly 170 also includes a first sliding assembly, a second sliding assembly and a third sliding assembly arranged to connect the base 174 and the sliding platform 173. The first sliding assembly can be a screw structure or a pneumatic push rod structure, and the first sliding assembly is used to drive the sliding platform 173 to move along the first direction X; the second sliding assembly can be a screw structure or a pneumatic push rod structure, and the second sliding assembly is used to drive the sliding platform 173 to move along the second direction Y; the third sliding assembly can be a screw structure or a pneumatic push rod structure, and the third sliding assembly is used to drive the sliding platform 173 to move along the third direction Z.

[0044] The fixing seat 171 and the supporting seat are both fixedly connected to the sliding platform 173, the fixing seat 171 is connected to the bellows 140, and the supporting seat 172 is connected to the insulating assembly 120. For example, the fixing seat 171 and the supporting seat 172 are both block-shaped, and the fixing seat 171 and the supporting seat 172 are both formed with arc-shaped grooves, the bellows 140 is located in the arc-shaped groove of the fixing seat 171, and is connected to the fixing seat 171 through fasteners, and the connecting flange 121 of the insulating assembly is located in the arc-shaped groove of the supporting seat 172, and is connected to the supporting seat 172 through fasteners.

[0045] A plasma linear device according to an embodiment of the present invention includes a main body and a plasma linear device sample stage as described above, wherein a vacuum chamber is provided in the main body, and a mounting port communicating with the vacuum chamber is provided on the main body; a mounting member 130 is sealedly connected to the main body and blocks the mounting port, and a mounting hole 131 is communicated with the mounting port. Specifically, the mounting member 130 is connected to the main body by a fastener, and the mounting member 130 and the main body are sealed by a sealing gasket, and the mounting hole 131 on the mounting member 130 is communicated with the mounting port on the main body, so that the mounting hole 131 is communicated with the vacuum chamber, and the sample rod 110 passes through the mounting hole 131 and the mounting port, and the sample holder 112 on the sample rod 110 is located in the vacuum chamber. A plasma source is provided in the vacuum chamber, and the axes of the plasma source, the sample holder 112, and the sample rod 110 are on the same straight line.

[0046] In summary, the embodiment of the present invention provides a plasma linear device sample stage, which has at least the following advantages: 1. The insulating assembly 120 insulates the sample rod 110 from the bellows 140 and the sample rod 110 from the adjustment assembly 170. The arrangement of the bellows 140 and the mounting member 130 prevents the sample rod 110 from contacting the mounting member 130 or the bellows 140 during movement, thereby improving the insulation performance of the sample stage of the plasma linear device; 2. When adjusting the position of the sample rod 110, the bellows 140 can be extended and deformed along with the movement of the sample rod 110 to ensure the sealing of the sample stage of the plasma linear device; 3. By arranging the water inlet pipe 160 close to the bottom wall of the cooling chamber 115 and arranging the water outlet pipe 161 away from the bottom wall of the cooling chamber 115 , the heat dissipation speed of the sample holder 112 is improved.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the present invention, rather than to limit the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A plasma linear device sample stage, characterized in that: include: A sample rod (110), wherein a first end (1101) of the sample rod (110) is provided with a sample seat (112) for placing a sample; A mounting member (130) used for connecting to a main body of the plasma linear device, the mounting member (130) being provided with a mounting hole (131) communicating with a vacuum chamber in the main body, the sample rod (110) passing through the mounting hole (131), and the diameter of the mounting hole (131) being larger than the outer diameter of the sample rod (110); An insulating component (120), the insulating component (120) being fixedly connected to the second end (1102) of the sample rod (110); a bellows (140) sleeved on the sample rod (110), the inner diameter of the bellows (140) being greater than the outer diameter of the sample rod (110), one end of the bellows (140) being sealedly connected to the insulating component (120), and the other end of the bellows (140) being sealedly connected to the mounting member (130), and the bellows (140) being in communication with the mounting hole (131); An adjustment component (170), the adjustment component (170) being connected to the insulating component (120) to adjust the position of the sample rod (110).

2. The plasma linear device sample stage according to claim 1, characterized in that: The second end (1102) of the sample rod (110) is provided with a connecting portion (113). The insulating component (120) comprises: a connecting flange (121), the connecting flange (121) being connected to the bellows (140) and sealing one end of the bellows (140), the connecting flange (121) being provided with a first through hole (1212); An insulating tube (122), the insulating tube (122) being sleeved on the sample rod (110), one end of the insulating tube (122) being connected to the connecting flange (121), the first through hole (1212) and the insulating tube (122) jointly defining a connecting channel (123), the sample rod (110) being passed through the connecting channel (123), the diameter of the connecting channel (123) being greater than the outer diameter of the sample rod (110), and the other end of the insulating tube (122) being connected to the connecting portion (113).

3. The plasma linear device sample stage according to claim 2, characterized in that: The plasma linear device sample stage further comprises a support member (150), the support member (150) being sleeved on the sample rod (110) and in contact with the sample rod (110), the support member (150) being located on a side of the connecting flange (121) away from the insulating tube (122) and being connected to the connecting flange (121), and the support member (150) being made of polytetrafluoroethylene material.

4. The plasma linear device sample stage according to claim 2, characterized in that: The connecting flange (121) comprises a flange body (1211) and at least one measuring tube (1213); the flange body (1211) is connected to the bellows (140); the first through hole (1212) is provided on the flange body (1211); the side of the flange body (1211) facing the bellows (140) is connected to the insulating tube (122); the measuring tube (1213) is connected to the flange body (1211), and the measuring tube (1213) is in communication with the bellows (140).

5. The plasma linear device sample stage according to claim 1, characterized in that: The sample rod (110) comprises a rod body (111), a sample holder (112) and a fixing member (114); the sample holder (112) is connected to one end of the rod body (111); the fixing member (114) is connected to the sample holder (112); the sample clamp is arranged between the fixing member (114) and the sample holder (112); and the other end of the rod body (111) is connected to the insulating component (120).

6. The plasma linear device sample stage according to claim 5, characterized in that: The fixing member (114) is annular in shape, and a groove (1121) is provided on a side of the sample holder (112) facing away from the rod body (111). The fixing member (114) is sleeved on the sample holder (112), and a sample space is formed between the fixing member (114) and the groove (1121). The sample is located in the sample space. The fixing member (114) is provided with a jet hole (1141), and the jet hole (1141) connects the sample space with an external space.

7. The plasma linear device sample stage according to claim 5, characterized in that: A thermocouple groove (1122) is provided at the bottom of the sample holder (112), and the thermocouple groove (1122) extends from the center of the bottom of the sample holder (112) to the outer peripheral wall of the sample rod (110), and the thermocouple groove (1122) is used to accommodate a thermocouple.

8. The plasma linear device sample stage according to claim 1, characterized in that: The plasma linear device sample stage further comprises a water inlet pipe (160) and a water outlet pipe (161); a cooling cavity (115) is provided in the sample rod (110); and both the water inlet pipe (160) and the water outlet pipe (161) are in communication with the cooling cavity (115).

9. The plasma linear device sample stage according to claim 8, characterized in that: The cooling cavity (115) extends from the second end (1102) to the first end (1101), the end of the water outlet pipe (161) is located at the second end (1102), the water inlet pipe (160) extends from the second end (1102) to the first end (1101), an inner wall of the cooling cavity (115) adjacent to the sample holder (112) is the bottom wall of the cooling cavity (115), and a distance between the water inlet pipe (160) and the bottom wall is L, 8 mm ≤ L ≤ 12 mm.

10. A plasma linear device, characterized in that: include: A main body, wherein a vacuum chamber is provided in the main body, and a mounting port communicating with the vacuum chamber is provided on the main body; The plasma linear device sample stage according to any one of claims 1 to 9, wherein the mounting member (130) is sealedly connected to the main body and blocks the mounting port, and the mounting hole (131) is connected to the mounting port.

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