Novel multifunctional multistage ammonia gas washing tower

Abstract

The invention discloses a novel multifunctional multistage ammonia gas washing tower which comprises a tower frame, a tower body, a temperature control mechanism, a nanometer generation mechanism, a spraying mechanism, a filter bag, a demister, a cooling mechanism and a multistage packing layer, and the tower body is fixedly connected with the tower frame, the filter bag, the demister, the cooling mechanism and the multistage packing layer. The tower body is provided with a first side hole, a flange hole and a bottom opening, the temperature control mechanism comprises a first pneumatic valve, the nanometer generation mechanism comprises a second pneumatic valve and a circulating pump, the spraying mechanism comprises a fifth pneumatic valve and a sixth pneumatic valve, the first pneumatic valve is connected with the first side hole through a pipeline, the second pneumatic valve is fixedly connected with the bottom opening, and the sixth pneumatic valve is fixedly connected with the bottom opening. The sixth pneumatic valve is connected with the flange hole through a pipeline, and the circulating pump is connected with the fifth pneumatic valve through a pipeline; the invention relates to the technical field of ammonia gas washing towers, greatly improves the quality and the product recovery rate, and avoids the situation that the inner wall of a tower body is difficult to clean due to the fact that ultrasonic nano bubbles are sprayed to the inner wall of the tower body.

Description

Technical Field

[0001] The invention relates to the technical field of ammonia scrubbers, in particular to a novel multifunctional multi-stage ammonia scrubber. Background Art

[0002] Electronic grade ultra-pure ammonia is mainly used for cleaning silicon wafers in the semiconductor industry, and can effectively remove impurity particles, metal ions, inorganic residues and carbon deposits on the wafers. With the development of integrated circuits towards large-scale and ultra-large-scale, the replacement speed of integrated circuits is getting faster and faster, the chip integration is getting higher and higher, and the photolithography lines on the wafer surface are becoming more and more refined, and have now broken through from 28 nanometers to below 7 nanometers. At the same time, the quality requirements for electronic grade ultra-pure ammonia are becoming more and more stringent.

[0003] At present, some avant-garde enterprises in China have arranged to produce high-quality ultra-pure ammonia water, but the quality level is G4 or below, which cannot reach the G5 level of high-end enterprises in Europe and the United States. The reason is that equipment and materials are the key factors, especially the capillary heat exchange equipment, washing equipment and absorption equipment currently in common use. The material and processing requirements are very high, but there are common drawbacks such as easy leakage, many dead corners, and difficult cleaning in China, which have a great impact on product quality. In the existing ammonia spray tower equipment, the downward washing liquid will be subject to the horizontal force, and at the same time, when the washing liquid is thrown out, it will collide with each other and cause splashing, causing the washing liquid to be sprayed onto the inner wall of the tower body, making it difficult to clean the inner wall of the tower body. Summary of the invention

[0004] The object of the present invention is to provide a novel multifunctional multi-stage ammonia scrubbing tower to solve the problems in the prior art.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical scheme: a novel multifunctional multi-stage ammonia scrubbing tower comprises a tower frame, a tower body, a temperature control mechanism, a nano-generating mechanism, a spraying mechanism, a filter bag, a demister, a cooling mechanism and a multi-stage packing layer, the tower body is fixedly connected to the tower frame, the filter bag, the demister, the cooling mechanism and the multi-stage packing layer, a first side hole, a flange hole and a bottom port are provided on the tower body, the temperature control mechanism comprises a first pneumatic valve, the nano-generating mechanism comprises a second pneumatic valve and a circulating pump, the spraying mechanism comprises a fifth pneumatic valve and a sixth pneumatic valve, the first pneumatic valve is connected to the first side hole through a pipeline, the second pneumatic valve is fixedly connected to the bottom port, the sixth pneumatic valve is connected to the flange hole through a pipeline, and the circulating pump is connected to the fifth pneumatic valve through a pipeline.

[0006] The present invention is an integrated device for washing and purifying ammonia gas. Ammonia gas is introduced into a tower body through a first pneumatic valve, so that high-purity ammonia gas is evenly diffused into saturated ammonia water at the bottom of the tower body. The saturated ammonia water at the bottom of the tower body is dispersed into nano-scale water bubbles through a second pneumatic valve. A circulating pump evenly sprays the nano-scale water bubbles through a fifth pneumatic valve and a sixth pneumatic valve, and the nano-scale water bubbles are fully mixed and contacted with the rising ammonia gas in a multi-stage packing layer to release ammonia gas with higher purity. Fine water droplets in the ammonia gas are separated and filtered through a filter bag, and impurities such as foam bubbles are further filtered out through a demister. The high-purity ammonia gas is cooled by a cooling mechanism and then discharged.

[0007] Furthermore, the temperature control mechanism also includes a first three-way valve, a second three-way valve, a bottom liquid temperature controller and a liquid level gauge. The tower body is also provided with a second side hole and a third side hole. The first three-way valve is fixedly connected to the first pneumatic valve and the second three-way valve. The bottom liquid temperature controller is connected to the first three-way valve, the second three-way valve and the second side hole through a pipeline. The liquid level gauge is fixedly connected to the third side hole. The bottom liquid temperature controller is connected to the first three-way valve and the second three-way valve through an electrical signal. The nano generating mechanism also includes an ammonia distributor. The first pneumatic valve is connected to the ammonia distributor through a pipeline.

[0008] High-purity ammonia is introduced into the bottom of the tower body through the second three-way valve, the first three-way valve, the first pneumatic valve, and the ammonia distributor. The temperature and liquid level of the saturated ammonia water at the bottom of the tower body are identified by the bottom liquid temperature controller and the liquid level gauge, and the electrical signal is fed back to the second three-way valve and the first three-way valve. The bottom liquid temperature controller is connected with the pipeline between the first three-way valve and the second three-way valve to feedback and control the temperature and liquid level of the saturated ammonia water at the bottom of the tower body. The ammonia distributor can make the high-purity ammonia gas evenly diffuse into the saturated ammonia water at the bottom of the tower body, so as to promote sufficient heat exchange and efficient diffusion contact.

[0009] Furthermore, the nano generating mechanism also includes a third pneumatic valve, a bubble generator, a first side frame and a diverter valve. The first side frame is fixedly connected to the circulation pump and the tower frame. The third pneumatic valve is fixedly connected to the second pneumatic valve. The bubble generator is connected to the second pneumatic valve and the circulation pump through a pipeline. The diverter valve is connected to the second pneumatic valve and the circulation pump through a pipeline.

[0010] The saturated ammonia water at the bottom of the tower body flows out through the bottom port and the second pneumatic valve. The opening and closing of the diverter valve controls the direction of the outflowing ammonia water to pass through the bubble generator. The ultrasonic nanobubbles are pumped to the fifth pneumatic valve through the circulation pump. When the saturated ammonia water at the bottom of the tower body needs to be discharged, the third pneumatic valve is opened and the ammonia water is discharged from the bottom.

[0011] Furthermore, the spray mechanism also includes a second side frame, a filter, a fourth pneumatic valve, a three-way pipe, a rotary spray mechanism and a detection mechanism. The rotary spray mechanism includes a right-angle pipe, and the detection mechanism includes a spiral base. The second side frame is fixedly connected to the filter and the tower frame. The filter is connected to the fourth pneumatic valve through a pipeline. The three-way pipe is connected to the fourth pneumatic valve, the fifth pneumatic valve, and the sixth pneumatic valve through a pipeline. The sixth pneumatic valve is connected to the right-angle pipe through a pipeline, and the spiral base is fixedly connected to the tower body.

[0012] The circulation pump draws the ultrasonic nanobubbles to the three-way pipe through the fifth pneumatic valve, and the ultrapure water passes through the filter and the fourth pneumatic valve into the three-way pipe. The ultrasonic nanobubbles are mixed with the ultrapure water and pass through the sixth pneumatic valve into the right-angle pipe. The rotary spray mechanism sprays the ultrasonic nanobubbles evenly in the tower body, quickly and fully mixes with the ammonia gas, and identifies the downward spraying range of the ultrasonic nanobubbles through the detection mechanism, and feeds back electrical signals to the rotary spray mechanism. The rotary spray mechanism adjusts the spraying speed, spraying angle and spraying flow rate according to the electrical signals to prevent the ultrasonic nanobubbles from being sprayed onto the inner wall of the tower body.

[0013] Furthermore, the rotary spraying mechanism also includes an assembly frame, a first motor, a first gear, a ring shell and a rocker mechanism. The assembly frame is fixedly connected to the right-angle tube and the first motor. The output end of the first motor is fixedly connected to the first gear. The ring shell is provided with a ring gear pair, a hemispherical cavity and a hinged buckle. The first gear is meshed with the tooth surface of the ring gear pair. The ring shell is rotatably connected to the right-angle tube. There are two groups of hemispherical cavities, hinged buckles and rocker mechanisms. The two groups of hemispherical cavities, hinged buckles and rocker mechanisms are symmetrically arranged on both sides of the right-angle tube. The rocker mechanism includes a servo cylinder, a spherical shell tube and a second motor. The spherical shell tube is in contact with the hemispherical cavity. The servo cylinder is hinged to the hinged buckle. The detection mechanism also includes a humidity electrode. The humidity electrode is connected to the first motor, the servo cylinder and the second motor through electrical signals.

[0014] The ultrasonic nanobubbles are mixed with ultrapure water and passed into the right-angle tube through the sixth pneumatic valve. The first motor outputs a fixed-axis torque to the first gear according to the electrical signal. The first gear is meshed with the tooth surface between the first gear and the ring gear pair to transmit the torque of the first gear to the ring shell. The ring shell drives the two sets of rocker mechanisms to rotate around their axes. The rocker mechanisms spray the ultrasonic nanobubbles out in a spiral and evenly scatter them. Due to the rotation of the ring shell, the downward ultrasonic nanobubbles will be subject to a horizontal component of force. At the same time, when the ultrasonic nanobubbles are thrown out, they will collide with each other and cause sputtering, causing the ultrasonic nanobubbles to be sprayed onto the inner wall of the tower body, making it difficult to clean the inner wall of the tower body. The servo cylinder changes the extension amount according to the output end of the electrical signal. The servo cylinder body is hingedly assembled with the hinge buckle. The output end of the servo cylinder is hingedly assembled with the spherical shell tube. The servo cylinder output The outlet end pulls the spherical shell tube to rotate in the hemispherical cavity, changing the inclination angle of the spherical shell tube. The falling point of the ultrasonic nanobubble will not change due to the change of its own weight. The two groups of symmetrically arranged spherical shell tubes rotate towards each other, so that the water outlet point of the ultrasonic nanobubble is close to the axis of the ring shell, the initial position of the ultrasonic nanobubble is changed, and the redundant range of ultrasonic nanobubble sputtering is increased. When the rotation speed of the ring shell is the same, the water outlet flow rate can be increased accordingly. The second motor adjusts the spray flow rate according to the output torque of the electrical signal. While avoiding the ultrasonic nanobubble from being sprayed to the inner wall of the tower body, more ultrasonic nanobubbles are used to complete the washing, thereby improving the overall spray efficiency. When the ultrasonic nanobubble is about to be sprayed to the inner wall of the tower body, the spray flow rate needs to be reduced to avoid the ultrasonic nanobubble from being splashed to the inner wall of the tower body due to collision.

[0015] Furthermore, the rocker mechanism also includes an articulated seat, a sliding buckle, a nozzle, a gear ring, an iris ring and a rack belt. The articulated seat is fixedly connected to the ball shell tube and the second motor. The output end of the servo cylinder is hinged to the articulated seat. The sliding buckle, the nozzle, the gear ring and the iris ring are provided in several groups. The several groups of sliding buckles, the nozzles, the gear rings and the iris rings are linearly evenly distributed along the axis of the ball shell tube. The rack belt is meshed with the tooth surfaces of the output end and the gear ring of the second motor. The sliding buckle and the nozzle are fixedly connected to the ball shell tube. The iris ring is fixedly connected to the nozzle and the gear ring. The gear ring is rotatably connected to the nozzle, and the rack belt is slidably connected to the sliding buckle.

[0016] The second motor outputs a torque rack belt according to the electrical signal, and the output end of the second motor meshes with the tooth surface of the rack belt. A number of gear rings linearly and evenly distributed along the axis of the spherical shell tube mesh with the tooth surface of the rack belt. The second motor drives the rack belt to reciprocate. When the flow rate of the nozzle needs to be changed, the intermittently arranged racks on the rack belt drive the gear ring to rotate. The gear ring assembled on the nozzle rotates to transmit the torque to the iris ring, and the iris ring changes the flow cross-section passing through the nozzle.

[0017] Furthermore, the detection mechanism also includes parallel resistors and electrode seats. The parallel resistors are provided in several groups, and the several groups of parallel resistors are arranged adjacent to each other along the radius of the spiral base. The humidity electrode is fixedly connected to the spiral base, the parallel resistors and the electrode seat.

[0018] The humidity electrodes are evenly distributed on the cross section of the tower body in a vortex shape. The electrode seat acts as a power source and a signal transmitter. The humidity electrode serves as a circuit. When the rocker mechanism sprays the ultrasonic nanobubbles out of the spiral and sprinkles them evenly, the liquid is sprinkled onto the surface of the humidity electrode. The resistance of each section of the humidity electrode connected in parallel by the parallel resistor will change due to the humidity. The range of the ultrasonic nanobubbles sprinkled is identified through several groups of parallel resistors arranged adjacent to each other along the radius of the spiral base. When the ultrasonic nanobubbles are about to be sprayed onto the inner wall of the tower body, the electrode seat sends an electrical signal to feedback the rocker mechanism to reduce the inclination angle and increase the flow rate.

[0019] Furthermore, the cooling mechanism includes a third three-way valve, a seventh pneumatic valve, an eighth pneumatic valve, a heat exchange coil, an outlet thermostat and a ninth pneumatic valve. A top port, a water inlet and a water outlet are also provided on the tower body. The heat exchange coil is fixedly connected to the water inlet and the water outlet. The heat exchange coil is connected to the seventh pneumatic valve and the eighth pneumatic valve through pipes. The third three-way valve is fixedly connected to the seventh pneumatic valve. The outlet thermostat is connected to the third three-way valve and the ninth pneumatic valve through pipes. The outlet thermostat is connected to the third three-way valve through electrical signals, and the ninth pneumatic valve is fixedly connected to the top port.

[0020] After further filtering out foam bubbles and other impurities through the defoaming layer, the heat exchange coil cools the high-purity ammonia to within fifty to sixty degrees Celsius and flows to the outlet thermostat through the top port. The outlet thermostat detects the temperature of the high-purity ammonia and feeds back an electrical signal when the temperature does not meet the requirements. The third three-way valve adjusts the flow of cold water entering the heat exchange coil according to the electrical signal, so as to control the heat exchange coil to cool the high-purity ammonia to the specified temperature. The high-purity ammonia that meets the cooling effect is discharged through the ninth pneumatic valve.

[0021] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention designs a nano-generating mechanism, and the high-purity ammonia can be evenly diffused into the saturated ammonia water at the bottom of the tower body through the ammonia distributor, so as to promote sufficient heat exchange and efficient diffusion contact. The ultrasonic nano-bubbles have extremely high specific surface area and surface energy. After being evenly sprayed by the sprayer, they are fully mixed and contacted with the rising ammonia in the packing layer, effectively increasing the contact area and making the washing effect more sufficient and obvious; the present invention designs a spray mechanism, and the first motor drives two groups of rocker mechanisms to rotate around their axes. The rocker mechanisms spray the ultrasonic nano-bubbles spirally and evenly, and the servo cylinder changes the extension amount according to the output end of the electrical signal, changes the inclination angle of the spherical shell tube, and the falling point of the ultrasonic nano-bubbles will not change due to the change of their own weight. The two groups of symmetrically arranged spherical shell tubes move closer to each other, so that the water outlet point of the ultrasonic nano bubble is close to the axis of the ring shell, the initial position of the ultrasonic nano bubble is changed, and the redundant range of the ultrasonic nano bubble sputtering is increased. When the rotation speed of the ring shell is the same, the water outlet flow rate can be increased accordingly. The second motor outputs the torque to adjust the spray flow rate according to the electrical signal. While avoiding the ultrasonic nano bubble being sprayed to the inner wall of the tower body, more ultrasonic nano bubbles are used to complete the washing, thereby improving the overall spray efficiency. The present invention uses a novel ultrasonic nano foaming washing technology, which integrates washing, defoaming, and heat exchange cooling, and performs multi-layer superposition to form multi-stage washing, which greatly improves the quality and product recovery rate, and at the same time avoids the ultrasonic nano bubble being sprayed to the inner wall of the tower body, making the inner wall of the tower body difficult to clean. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 It is a partial cross-sectional view of the overall structure of the present invention;

[0024] Figure 3 for Figure 2 A schematic diagram of a local A enlargement;

[0025] Figure 4 for Figure 2 A partial enlarged schematic diagram of B;

[0026] Figure 5 for Figure 2 A local C enlarged schematic diagram;

[0027] Figure 6 It is a schematic diagram of the structure of the rotary spraying mechanism of the present invention;

[0028] Figure 7 It is a structural schematic diagram of the rocker mechanism of the present invention;

[0029] Figure 8 It is a partial cross-sectional view of the rocker mechanism of the present invention;

[0030] Fig. 9 It is a schematic diagram of the structure of the detection mechanism of the present invention;

[0031] Fig.10 It is a schematic diagram of the cooling mechanism structure of the present invention.

[0032] In the figure: 1, tower frame; 2, tower body; 21, first side hole; 22, second side hole; 23, third side hole; 24, flange hole; 25, bottom port; 26, top port; 27, water inlet; 28, water outlet; 3, temperature control mechanism; 31, first pneumatic valve; 32, first three-way valve; 33, second three-way valve; 34, bottom liquid temperature controller; 35, liquid level gauge; 4, nanometer generating mechanism; 41, ammonia distributor; 42, second pneumatic valve; 43, third pneumatic valve; 44, bubble generator; 45, diverter valve; 46, first side frame; 47, circulating pump; 5, spray mechanism; 51, second side frame; 52, filter; 53, fourth pneumatic valve; 54, three-way pipe; 55, fifth pneumatic valve; 56, sixth pneumatic valve; 57, rotary spray mechanism; 571, right angle pipe; 572, assembly frame ;573, the first motor;574, the first gear;575, the ring shell;5751, the ring gear pair;5752, the hemispherical cavity;5753, the hinge buckle;576, the rocker mechanism;5761, the servo cylinder;5762, the spherical shell tube;5763, the hinge seat;5764, the second motor;5765, the slide buckle;5766, the nozzle;5767, the gear ring;5768, the iris ring;5769, the rack belt;58, the detection mechanism;581, the spiral base;582, the humidity electrode;583, the electrode seat;584, the parallel resistor;6, the filter bag;7, the demister;8, the cooling mechanism;81, the third three-way valve;82, the seventh pneumatic valve;83, the eighth pneumatic valve;84, the heat exchange coil;85, the outlet temperature controller;86, the ninth pneumatic valve;9, the multi-stage packing layer. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] like Figure 1 , Figure 2 , Figure 3As shown, the present invention provides a technical solution of a novel multifunctional multi-stage ammonia scrubbing tower, including a tower frame 1, a tower body 2, a temperature control mechanism 3, a nanometer generating mechanism 4, a spraying mechanism 5, a filter bag 6, a demister 7, a cooling mechanism 8 and a multi-stage packing layer 9. The tower body 2 is fixedly connected to the tower frame 1, the filter bag 6, the demister 7, the cooling mechanism 8 and the multi-stage packing layer 9. The tower body 2 is provided with a first side hole 21, a flange hole 24 and a bottom opening 25. The temperature control mechanism 3 includes a first pneumatic valve 31, the nanometer generating mechanism 4 includes a second pneumatic valve 42 and a circulating pump 47, the spraying mechanism 5 includes a fifth pneumatic valve 55 and a sixth pneumatic valve 56. The first pneumatic valve 31 is connected to the first side hole 21 through a pipeline, the second pneumatic valve 42 is fixedly connected to the bottom opening 25, the sixth pneumatic valve 56 is connected to the flange hole 24 through a pipeline, and the circulating pump 47 is connected to the fifth pneumatic valve 55 through a pipeline.

[0035] The present invention is an integrated device for washing and purifying ammonia gas. Ammonia gas is introduced into a tower body 2 through a first pneumatic valve 31, so that high-purity ammonia gas is evenly diffused into saturated ammonia water at the bottom of the tower body 2. The saturated ammonia water at the bottom of the tower body 2 is dispersed into nano-scale water bubbles through a second pneumatic valve 42. A circulating pump 47 evenly sprays the nano-scale water bubbles through a fifth pneumatic valve 55 and a sixth pneumatic valve 56, and the nano-scale water bubbles are fully mixed and contacted with the rising ammonia gas in a multi-stage packing layer 9 to release ammonia gas with higher purity. The fine water droplets in the ammonia gas are separated and filtered through a filter bag 6, and then the foam bubbles and other impurities are further filtered out through a demister 7. The high-purity ammonia gas is cooled by a cooling mechanism 8 and discharged.

[0036] like Figure 3 As shown, the temperature control mechanism 3 also includes a first three-way valve 32, a second three-way valve 33, a bottom liquid temperature controller 34 and a liquid level gauge 35. The tower body 2 is also provided with a second side hole 22 and a third side hole 23. The first three-way valve 32 is fixedly connected to the first pneumatic valve 31 and the second three-way valve 33. The bottom liquid temperature controller 34 is connected to the first three-way valve 32, the second three-way valve 33 and the second side hole 22 through a pipeline. The liquid level gauge 35 is fixedly connected to the third side hole 23. The bottom liquid temperature controller 34 is connected to the first three-way valve 32 and the second three-way valve 33 through an electrical signal. The nano generating mechanism 4 also includes an ammonia distributor 41. The first pneumatic valve 31 is connected to the ammonia distributor 41 through a pipeline.

[0037] High-purity ammonia gas is introduced into the bottom of the tower body 2 through the second three-way valve 33, the first three-way valve 32, the first pneumatic valve 31, and the ammonia distributor 41. The temperature and liquid level of the saturated ammonia water at the bottom of the tower body 2 are identified by the bottom liquid temperature controller 34 and the liquid level meter 35, and the electrical signal is fed back to the second three-way valve 33 and the first three-way valve 32. The bottom liquid temperature controller 34 is connected to the pipeline between the first three-way valve 32 and the second three-way valve 33 to feedback and control the temperature and liquid level of the saturated ammonia water at the bottom of the tower body 2. The ammonia distributor 41 can make the high-purity ammonia gas evenly diffuse into the saturated ammonia water at the bottom of the tower body 2, so as to promote sufficient heat exchange and efficient diffusion contact.

[0038] like Figure 3 As shown, the nano generating mechanism 4 also includes a third pneumatic valve 43, a bubble generator 44, a first side frame 46 and a diverter valve 45. The first side frame 46 is fixedly connected to the circulation pump 47 and the tower 1. The third pneumatic valve 43 is fixedly connected to the second pneumatic valve 42. The bubble generator 44 is connected to the second pneumatic valve 42 and the circulation pump 47 through a pipeline. The diverter valve 45 is connected to the second pneumatic valve 42 and the circulation pump 47 through a pipeline.

[0039] The saturated ammonia water at the bottom of the tower body 2 flows out through the bottom port 25 and the second pneumatic valve 42. The opening and closing of the diverter valve 45 controls whether the outflowing ammonia water passes through the bubble generator 44. The ultrasonic nanobubbles are pumped to the fifth pneumatic valve 55 through the circulation pump 47. When the saturated ammonia water at the bottom of the tower body 2 needs to be discharged, the third pneumatic valve 43 is opened, and the ammonia water is discharged from the bottom.

[0040] like Figure 4 , Figure 5 , Figure 6 As shown, the spray mechanism 5 also includes a second side frame 51, a filter 52, a fourth pneumatic valve 53, a three-way pipe 54, a rotary spray mechanism 57 and a detection mechanism 58. The rotary spray mechanism 57 includes a right-angle pipe 571, and the detection mechanism 58 includes a spiral base 581. The second side frame 51 is fixedly connected to the filter 52 and the tower frame 1. The filter 52 is connected to the fourth pneumatic valve 53 through a pipeline. The three-way pipe 54 is connected to the fourth pneumatic valve 53, the fifth pneumatic valve 55, and the sixth pneumatic valve 56 through a pipeline. The sixth pneumatic valve 56 is connected to the right-angle pipe 571 through a pipeline, and the spiral base 581 is fixedly connected to the tower body 2.

[0041] The circulation pump 47 draws the ultrasonic nanobubbles to the three-way pipe 54 through the fifth pneumatic valve 55, and the ultrapure water is passed into the three-way pipe 54 through the filter 52 and the fourth pneumatic valve 53. The ultrasonic nanobubbles are mixed with the ultrapure water and passed into the right-angle pipe 571 through the sixth pneumatic valve 56. The rotary spray mechanism 57 evenly sprays the ultrasonic nanobubbles in the tower body 2, and quickly and fully mixes and contacts with the ammonia gas. The detection mechanism 58 identifies the range of the ultrasonic nanobubbles spraying downward, and feeds back an electrical signal to the rotary spray mechanism 57. The rotary spray mechanism 57 adjusts the spraying speed, spraying angle and spraying flow rate according to the electrical signal to prevent the ultrasonic nanobubbles from being sprayed onto the inner wall of the tower body 2.

[0042] like Figure 6 , Figure 7 , Figure 8As shown, the rotary spray mechanism 57 also includes an assembly frame 572, a first motor 573, a first gear 574, a ring shell 575 and a rocker mechanism 576. The assembly frame 572 is fixedly connected to the right-angle tube 571 and the first motor 573. The output end of the first motor 573 is fixedly connected to the first gear 574. The ring shell 575 is provided with a ring gear pair 5751, a hemispherical cavity 5752 and a hinge buckle 5753. The first gear 574 is meshed with the tooth surface of the ring gear pair 5751. The ring shell 575 is rotatably connected to the right-angle tube 571. The hemispherical cavity 5752, the hinge buckle 5753 , and the rocker mechanism 576 are provided with two groups. The two groups of hemispherical cavities 5752, hinge buckles 5753, and rocker mechanisms 576 are symmetrically arranged on both sides of the right-angle tube 571. The rocker mechanism 576 includes a servo cylinder 5761, a spherical shell tube 5762 and a second motor 5764. The spherical shell tube 5762 is in contact with the hemispherical cavity 5752. The servo cylinder 5761 is hinged to the hinge buckle 5753. The detection mechanism 58 also includes a humidity electrode 582. The humidity electrode 582 is connected to the first motor 573, the servo cylinder 5761, and the second motor 5764 through electrical signals.

[0043] The ultrasonic nanobubbles are mixed with ultrapure water and passed into the right-angle tube 571 through the sixth pneumatic valve 56. The first motor 573 outputs a fixed-axis torque to the first gear 574 according to the electrical signal. The first gear 574 is meshed with the tooth surface of the ring gear pair 5751 to transmit the torque of the first gear 574 to the ring shell 575. The ring shell 575 drives the two sets of rocker mechanisms 576 to rotate around their axes. The rocker mechanisms 576 spray the ultrasonic nanobubbles spirally and evenly. Due to the rotation of the ring shell 575, the downward ultrasonic nanobubbles will be subject to a horizontal force component. At the same time, when the ultrasonic nanobubbles are thrown out, they will collide with each other and cause sputtering, causing the ultrasonic nanobubbles to be sprayed onto the inner wall of the tower body 2, making it difficult to clean the inner wall of the tower body 2. The servo cylinder 5761 changes the extension amount according to the output end of the electrical signal. The main body of the servo cylinder 5761 is hingedly assembled with the hinge buckle 5753. The output end of the servo cylinder 5761 is connected to the spherical shell tube 57 62 is hingedly assembled, and the output end of the servo cylinder 5761 pulls the ball shell tube 5762 to rotate in the hemispherical cavity 5752, changing the inclination angle of the ball shell tube 5762. The falling point of the ultrasonic nano bubble will not change due to the change of its own weight. The two groups of symmetrically arranged ball shell tubes 5762 rotate towards each other, so that the water outlet point of the ultrasonic nano bubble is close to the axis of the ring shell 575, the initial position of the ultrasonic nano bubble is changed, and the redundant range of the ultrasonic nano bubble sputtering is increased. When the rotation speed of the ring shell 575 is the same, the water outlet flow rate can be increased accordingly. The second motor 5764 adjusts the spray flow rate according to the output torque of the electrical signal, while avoiding the ultrasonic nano bubble being sprayed to the inner wall of the tower body 2, more ultrasonic nano bubbles are used to complete the washing, thereby improving the overall spray efficiency. When the ultrasonic nano bubble is about to be sprayed to the inner wall of the tower body 2, the spray flow rate needs to be reduced to avoid the ultrasonic nano bubble being splashed to the inner wall of the tower body 2 due to collision.

[0044] like Figure 6 , Figure 7 , Figure 8 As shown, the rocker mechanism 576 also includes an articulated seat 5763, a slide buckle 5765, a nozzle 5766, a gear ring 5767, an iris ring 5768 and a rack belt 5769. The articulated seat 5763 is fixedly connected to the ball shell tube 5762 and the second motor 5764. The output end of the servo cylinder 5761 is hinged to the articulated seat 5763. The slide buckle 5765, the nozzle 5766, the gear ring 5767, and the iris ring 5768 are provided in a plurality of groups. 5766, the gear ring 5767, and the iris ring 5768 are linearly evenly distributed along the axis of the spherical shell tube 5762, the rack belt 5769 is meshed with the output end of the second motor 5764 and the gear ring 5767, the slide buckle 5765 and the nozzle 5766 are fixedly connected to the spherical shell tube 5762, the iris ring 5768 is fixedly connected to the nozzle 5766 and the gear ring 5767, the gear ring 5767 is rotatably connected to the nozzle 5766, and the rack belt 5769 is slidably connected to the slide buckle 5765.

[0045] The second motor 5764 outputs torque to the rack belt 5769 according to the electrical signal, and the output end of the second motor 5764 meshes with the tooth surface of the rack belt 5769, and a number of gear rings 5767 linearly and evenly distributed along the axis of the spherical shell tube 5762 mesh with the tooth surface of the rack belt 5769. The second motor 5764 drives the rack belt 5769 to reciprocate. When the flow of the nozzle 5766 needs to be changed, the racks intermittently arranged on the rack belt 5769 drive the gear ring 5767 to rotate. The gear ring 5767 mounted on the nozzle 5766 rotates to transmit the torque to the iris ring 5768, and the iris ring 5768 changes the flow cross-section passing through the nozzle 5766.

[0046] like Fig. 9 As shown, the detection mechanism 58 also includes a parallel resistor 584 and an electrode seat 583. The parallel resistor 584 is provided in several groups, and the several groups of parallel resistors 584 are arranged adjacent to each other along the radius of the spiral base 581. The humidity electrode 582 is fixedly connected to the spiral base 581, the parallel resistor 584, and the electrode seat 583.

[0047] The humidity electrodes 582 are evenly distributed on the cross section of the tower body 2 in a vortex shape, and the electrode seat 583 acts as a power source and a signal transmitter. The humidity electrode 582 serves as a circuit. When the rocker mechanism 576 sprays the ultrasonic nano-bubbles out of the spiral and sprinkles them evenly, the liquid is sprinkled on the surface of the humidity electrode 582. The resistance of each section of the humidity electrode 582 connected in parallel by the parallel resistor 584 will change due to the humidity. The range of the ultrasonic nano-bubbles sprinkled is identified by several groups of parallel resistors 584 arranged adjacent to each other along the radius of the spiral base 581. When the ultrasonic nano-bubbles are about to be sprayed onto the inner wall of the tower body 2, the electrode seat 583 sends an electrical signal to feedback the rocker mechanism 576 to reduce the inclination angle and increase the flow rate.

[0048] like Fig.10 As shown, the cooling mechanism 8 includes a third three-way valve 81, a seventh pneumatic valve 82, an eighth pneumatic valve 83, a heat exchange coil 84, an outlet thermostat 85 and a ninth pneumatic valve 86. The tower body 2 is also provided with a top port 26, a water inlet 27 and a water outlet 28. The heat exchange coil 84 is fixedly connected to the water inlet 27 and the water outlet 28. The heat exchange coil 84 is connected to the seventh pneumatic valve 82 and the eighth pneumatic valve 83 through a pipeline. The third three-way valve 81 is fixedly connected to the seventh pneumatic valve 82. The outlet thermostat 85 is connected to the third three-way valve 81 and the ninth pneumatic valve 86 through a pipeline. The outlet thermostat 85 is connected to the third three-way valve 81 through an electrical signal. The ninth pneumatic valve 86 is fixedly connected to the top port 26.

[0049] After the foam removal layer further filters out impurities such as foam bubbles, the heat exchange coil 84 cools the high-purity ammonia to within fifty to sixty degrees Celsius and flows to the outlet thermostat 85 through the top port 26. The outlet thermostat 85 detects the temperature of the high-purity ammonia and feeds back an electrical signal when the temperature does not meet the requirements. The third three-way valve 81 adjusts the flow of cold water entering the heat exchange coil 84 according to the electrical signal, so as to control the heat exchange coil 84 to cool the high-purity ammonia to the specified temperature. The high-purity ammonia that meets the cooling effect is discharged through the ninth pneumatic valve 86.

[0050] Working principle of the present invention: The present invention passes ammonia into the tower body 2 through the first pneumatic valve 31, and the temperature and liquid level of the saturated ammonia water at the bottom of the tower body 2 are feedback-controlled. The ammonia distributor 41 can make the high-purity ammonia gas evenly diffuse into the saturated ammonia water at the bottom of the tower body 2, so as to promote sufficient heat exchange and efficient diffusion contact. The saturated ammonia water at the bottom of the tower body 2 is dispersed into nano-scale bubbles through the second pneumatic valve 42. The opening and closing of the diverter valve 45 controls whether the outflowing ammonia water passes through the bubble generator 44. The circulating pump 47 passes the ultrasonic nano-bubble through the tower body 2. The first motor 573 outputs a fixed-axis torque to drive the two rocker mechanisms 576 to rotate around their axes, spraying the ultrasonic nanobubbles spirally and evenly. The ultrasonic nanobubbles downward will be subject to a horizontal force component. When being thrown out, the ultrasonic nanobubbles will collide with each other and cause splashing, causing the ultrasonic nanobubbles to be sprayed onto the inner wall of the tower body 2, making it difficult to clean the inner wall of the tower body 2. The output end of the servo cylinder 5761 changes the extension amount, changing the inclination angle of the spherical shell tube 5762. The falling point of the ultrasonic nanobubble will not change due to the change of its own weight. The two groups of symmetrically arranged spherical shell tubes 5762 move towards each other, so that the water outlet point of the ultrasonic nanobubble is close to the axis of the ring shell 575, the initial position of the ultrasonic nanobubble changes, and the redundant range of ultrasonic nanobubble sputtering increases. When the rotation speed of the ring shell 575 is the same, the water outlet flow rate can be increased accordingly. While avoiding the ultrasonic nanobubble from being sprayed to the inner wall of the tower body 2, more ultrasonic nanobubbles can be used to complete the washing, thereby improving the overall spraying efficiency. The intermittently arranged racks on the rack belt 5769 drive the gear ring 5767 to rotate, and transmit torque to the iris ring 5768 to change the flow cross-section through the nozzle 5766. After the ultrasonic nanobubble is evenly sprayed, it is fully mixed and contacted with the rising ammonia in the multi-stage packing layer 9, releasing ammonia with higher purity, and then the fine water droplets in the ammonia are separated and filtered by the filter bag 6, and then the foam bubbles and other impurities are further filtered out by the demister 7. The cooling mechanism 8 cools the high-purity ammonia and discharges it.

[0051] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A new type of multifunctional multi-stage ammonia scrubber, characterized by: The washing tower comprises a tower frame (1), a tower body (2), a temperature control mechanism (3), a nanometer generating mechanism (4), a spraying mechanism (5), a filter bag (6), a demister (7), a cooling mechanism (8) and a multi-stage packing layer (9); the tower body (2) is fixedly connected to the tower frame (1), the filter bag (6), the demister (7), the cooling mechanism (8) and the multi-stage packing layer (9); the tower body (2) is provided with a first side hole (21), a flange hole (24) and a bottom opening (25); the temperature control mechanism (3) comprises a first side hole (21), a flange hole (24) and a bottom opening (25); a pneumatic valve (31), the nanometer generating mechanism (4) comprises a second pneumatic valve (42) and a circulation pump (47), the spraying mechanism (5) comprises a fifth pneumatic valve (55) and a sixth pneumatic valve (56), the first pneumatic valve (31) is connected to the first side hole (21) via a pipeline, the second pneumatic valve (42) is fixedly connected to the bottom port (25), the sixth pneumatic valve (56) is connected to the flange hole (24) via a pipeline, and the circulation pump (47) is connected to the fifth pneumatic valve (55) via a pipeline.

2. A novel multifunctional multi-stage ammonia scrubbing tower according to claim 1, characterized in that: The temperature control mechanism (3) further comprises a first three-way valve (32), a second three-way valve (33), a bottom liquid temperature controller (34) and a liquid level gauge (35); the tower body (2) is further provided with a second side hole (22) and a third side hole (23); the first three-way valve (32) is fixedly connected to the first pneumatic valve (31) and the second three-way valve (33); the bottom liquid temperature controller (34) is connected to the first three-way valve (32), the second three-way valve (33) and the second side hole (22) via a pipeline; the liquid level gauge (35) is fixedly connected to the third side hole (23); the bottom liquid temperature controller (34) is connected to the first three-way valve (32) and the second three-way valve (33) via an electrical signal; the nanometer generating mechanism (4) further comprises an ammonia distributor (41); the first pneumatic valve (31) is connected to the ammonia distributor (41) via a pipeline.

3. A novel multifunctional multi-stage ammonia scrubbing tower according to claim 2, characterized in that: The nanometer generating mechanism (4) further comprises a third pneumatic valve (43), a water bubble generator (44), a first side frame (46) and a diverter valve (45); the first side frame (46) is fixedly connected to a circulation pump (47) and a tower frame (1); the third pneumatic valve (43) is fixedly connected to a second pneumatic valve (42); the water bubble generator (44) is connected to the second pneumatic valve (42) and the circulation pump (47) via a pipeline; and the diverter valve (45) is connected to the second pneumatic valve (42) and the circulation pump (47) via a pipeline.

4. A novel multifunctional multi-stage ammonia scrubbing tower according to claim 1, characterized in that: The spray mechanism (5) further comprises a second side frame (51), a filter (52), a fourth pneumatic valve (53), a three-way pipe (54), a rotary spray mechanism (57) and a detection mechanism (58); the rotary spray mechanism (57) comprises a right-angle pipe (571); the detection mechanism (58) comprises a spiral base (581); the second side frame (51) is fixedly connected to the filter (52) and the tower frame (1); the filter (52) is connected to the fourth pneumatic valve (53) via a pipeline; the three-way pipe (54) is connected to the fourth pneumatic valve (53), the fifth pneumatic valve (55) and the sixth pneumatic valve (56) via a pipeline; the sixth pneumatic valve (56) is connected to the right-angle pipe (571) via a pipeline; and the spiral base (581) is fixedly connected to the tower body (2).

5. A novel multifunctional multi-stage ammonia scrubbing tower according to claim 4, characterized in that: The rotary spray mechanism (57) further comprises an assembly frame (572), a first motor (573), a first gear (574), an annular shell (575) and a rocker mechanism (576); the assembly frame (572) is fixedly connected to the right-angle tube (571) and the first motor (573); the output end of the first motor (573) is fixedly connected to the first gear (574); the annular shell (575) is provided with an annular gear pair (5751), a hemispherical cavity (5752) and an articulated buckle (5753); the first gear (574) is meshed with the tooth surface of the annular gear pair (5751); the annular shell (575) is rotatably connected to the right-angle tube (571); the hemispherical cavity (5752), the articulated buckle (5753) and the right-angle tube (571) are rotatably connected; 3) There are two groups of rocker mechanisms (576), and the two groups of hemispherical cavities (5752), hinge buckles (5753), and rocker mechanisms (576) are symmetrically arranged on both sides of the right-angle tube (571). The rocker mechanism (576) includes a servo cylinder (5761), a spherical shell tube (5762), and a second motor (5764). The spherical shell tube (5762) is in contact with the hemispherical cavity (5752), and the servo cylinder (5761) is hinged to the hinge buckle (5753). The detection mechanism (58) also includes a humidity electrode (582), and the humidity electrode (582) is connected to the first motor (573), the servo cylinder (5761), and the second motor (5764) through electrical signals.

6. A novel multifunctional multi-stage ammonia scrubbing tower according to claim 5, characterized in that: The rocker mechanism (576) further comprises an articulated seat (5763), a slide buckle (5765), a nozzle (5766), a gear ring (5767), an iris ring (5768) and a rack belt (5769); the articulated seat (5763) is fixedly connected to the ball shell tube (5762) and the second motor (5764); the output end of the servo cylinder (5761) is articulated to the articulated seat (5763); the slide buckle (5765), the nozzle (5766), the gear ring (5767) and the iris ring (5768) are provided in a plurality of groups; the plurality of groups of the slide buckle (5765), the nozzle (5766), the gear ring (5767) and the iris ring (5768) are provided in a plurality of groups; 766), the gear ring (5767), and the iris ring (5768) are linearly evenly distributed along the axis of the ball shell tube (5762); the rack belt (5769) is meshed with the output end of the second motor (5764) and the gear ring (5767); the slide buckle (5765) and the nozzle (5766) are fixedly connected to the ball shell tube (5762); the iris ring (5768) is fixedly connected to the nozzle (5766) and the gear ring (5767); the gear ring (5767) is rotatably connected to the nozzle (5766); and the rack belt (5769) is slidably connected to the slide buckle (5765).

7. A novel multifunctional multi-stage ammonia scrubbing tower according to claim 5, characterized in that: The detection mechanism (58) further comprises an electrode seat (583) and a parallel resistor (584), wherein the parallel resistor (584) is provided in a plurality of groups, and the plurality of groups of parallel resistors (584) are arranged adjacent to each other along the radius of the spiral base (581), and the humidity electrode (582) is fixedly connected to the spiral base (581), the parallel resistor (584), and the electrode seat (583).

8. A novel multifunctional multi-stage ammonia scrubbing tower according to claim 1, characterized in that: The cooling mechanism (8) comprises a third three-way valve (81), a seventh pneumatic valve (82), an eighth pneumatic valve (83), a heat exchange coil (84), an outlet temperature controller (85) and a ninth pneumatic valve (86). The tower body (2) is also provided with a top opening (26), a water inlet (27) and a water outlet (28). The heat exchange coil (84) is fixedly connected to the water inlet (27) and the water outlet (28). The heat exchange coil (84) is connected to the seventh pneumatic valve (82) and the eighth pneumatic valve (83) via a pipeline. The third three-way valve (81) is fixedly connected to the seventh pneumatic valve (82). The outlet temperature controller (85) is connected to the third three-way valve (81) and the ninth pneumatic valve (86) via a pipeline. The outlet temperature controller (85) is connected to the third three-way valve (81) via an electrical signal. The ninth pneumatic valve (86) is fixedly connected to the top opening (26).

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