Pipeline purging control system, method, equipment and medium

Abstract

The invention discloses a pipeline purging control system, method and equipment and a medium. The pipeline purging control system comprises a tail gas treatment pipeline, a current carrying pipeline, a purging pipeline and a controller. And the tail gas treatment pipeline is provided with a gas detector. The output end of the current-carrying pipeline is connected with the tail gas treatment pipeline, and carrier gas is introduced into the input end of the current-carrying pipeline; and the current-carrying pipeline is provided with a current-carrying valve. The purging pipeline comprises a first purging pipeline and a second purging pipeline; the first purging pipeline comprises a process pipeline through which process gas flows, purging gas is introduced into the input end of the process pipeline, and the output end is connected with a current-carrying pipeline; and the process pipeline is provided with a process valve. The controller is in communication connection with the gas detector, the process valve and the current-carrying valve, receives feedback signals sent by the gas detector, sends control commands to the process valve and the current-carrying valve according to the feedback signals, controls opening and closing of the valves and achieves pipeline purging. According to the pipeline purging control system, the convenience, reliability and safety of the pipeline purging process are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a pipeline purge control system, method, equipment and medium. Background Art

[0002] Tetrakis(dimethylamino)titanium (TDMAT) is an important organometallic compound that plays a key role in processes such as chemical vapor deposition. However, tetrakis(dimethylamino)titanium has the characteristics of violent reaction with water and high flammability, so strict safety regulations must be followed during its use and operation.

[0003] At present, after the chemical vapor deposition process is completed, the tetrakis(dimethylamino)titanium remaining in the pipeline is removed by introducing a purge gas, and the tetrakis(dimethylamino)titanium gas cylinder is disassembled and replaced. However, since it is currently impossible to determine the stop point for the pipeline purge time, it is necessary to extend the pipeline purge time as much as possible to prevent the tetrakis(dimethylamino)titanium remaining in the pipeline from burning and polluting the pipeline, causing machine downtime and even personal injury accidents. In addition, the existing pipeline purge time is determined based on the operating experience of the personnel, which makes the degree of pipeline purge uncertain.

[0004] In addition, the chemical vapor deposition process involves complex pipelines and numerous valves, which require personnel to adjust the valves in multiple steps based on experience to control the purge of different pipelines and determine the duration of each purge operation. This operation is time-consuming, wastes a lot of purge gas, and the degree of pipeline purge is highly uncertain, posing a great safety risk.

[0005] Therefore, a control system is needed that can effectively determine the degree of pipeline purge, automatically adjust the stop node of the purge time, and improve the convenience, reliability and safety of the pipeline purge process. Summary of the invention

[0006] The object of the present invention is to provide a pipeline purge control system, method, equipment and medium to improve the convenience, reliability and safety of the pipeline purge process.

[0007] In order to achieve the above object, in a first aspect, the present invention provides a pipeline purge control system, comprising:

[0008] The tail gas treatment pipeline is provided with a gas detector, and the gas detector is used to detect the process gas content;

[0009] A flow-carrying pipeline, whose output end is connected to the tail gas treatment pipeline, and whose input end is fed with a carrier gas; the flow-carrying pipeline is provided with a flow-carrying valve, and the flow-carrying valve is an electronic valve;

[0010] The purge pipeline comprises: a first purge pipeline; the first purge pipeline comprises a process pipeline through which a process gas flows, the purge gas is introduced into the input end of the process pipeline, and the output end is connected to the current-carrying pipeline; and the process pipeline is provided with a process valve, and the process valve is an electronic valve;

[0011] The controller is respectively connected to the gas detector, process valve and flow-carrying valve for communication, receives the feedback signal containing the process gas content sent by the gas detector, and sends control commands to the process valve and the flow-carrying valve according to the feedback signal, thereby controlling the purge of the process gas in the pipeline by controlling the valve switch.

[0012] Optionally, the carrier gas valve comprises: a first carrier gas valve and a second carrier gas valve, wherein the first carrier gas valve is arranged at the input end of the carrier gas pipeline, and the second carrier gas valve is arranged at the output end of the carrier gas pipeline;

[0013] The connection point between the process pipeline and the carrier gas pipeline is located between the first carrier gas valve and the second carrier gas valve.

[0014] Optionally, a gasification valve is provided at the connection between the process pipeline and the current-carrying pipeline.

[0015] Optionally, the first purge pipeline further includes: a first air supply pipeline; the purge gas is introduced into the input end of the first air supply pipeline, and the output end thereof is connected to the input end of the process pipeline via an isolation valve;

[0016] Wherein, a first air supply valve is arranged on the first air supply pipeline; the isolation valve and the first air supply valve are both electronic valves, which are connected to the controller for communication and control the switch according to the control command sent by the controller.

[0017] Optionally, the input end of the process pipeline is connected to the output end of the process gas source bottle, and process gas is introduced into the process pipeline; the output end of the first gas supply pipeline is connected to the input end of the process gas source bottle; and the input end and output end of the process gas source bottle can be closed by a switch valve arranged thereon.

[0018] Optionally, the purge pipeline further includes a second purge pipeline;

[0019] The second purge pipeline comprises a first parallel pipeline and a second parallel pipeline connected in parallel; the input end of the first parallel pipeline is respectively connected to the output end of the first gas delivery pipeline and the input end of the process gas source bottle, and the output end thereof is connected to the tail gas treatment pipeline; the input end of the second parallel pipeline is respectively connected to the input end of the process pipeline and the output end of the process gas source bottle, and the output end thereof is connected to the tail gas treatment pipeline;

[0020] Among them, multiple second purge valves are respectively provided on the first parallel pipeline and the second parallel pipeline, and the multiple second purge valves are respectively arranged at the input end and output end of the first parallel pipeline and the input end and output end of the second parallel pipeline; the second purge valve is an electronic valve, which is communicated with the controller and controls the switch according to the control command sent by the controller.

[0021] Optionally, the purge pipeline also includes a third purge pipeline; the purge gas is introduced into the input end of the third purge pipeline, and the output end thereof is connected to the current-carrying pipeline, and the connection between the third purge pipeline and the current-carrying pipeline is located between the first carrier gas valve and the second carrier gas valve; and the third purge pipeline is provided with a third purge valve that is communicatively connected to the controller, and the third purge valve is an electronic valve that can control the switch according to the control command sent by the controller.

[0022] Optionally, it also includes: a second air supply pipeline, the output end of the second air supply pipeline is respectively connected to the input end of the first parallel pipeline and the input end of the process gas source bottle, and is connected to the input end of the second parallel pipeline through an isolation valve; the input end of the second air supply pipeline is introduced with protective gas; the second air supply pipeline is provided with a second air supply valve which is communicatively connected to the controller, and the second air supply valve is an electronic valve which can control the switch according to the control command sent by the controller.

[0023] Optionally, it further comprises: a reaction gas delivery pipeline; the input end of the reaction gas delivery pipeline is connected to the carrier pipeline, and the connection between the input end of the reaction gas delivery pipeline and the carrier pipeline is arranged between the second carrier gas valve and the connection between the third purge pipeline and the carrier pipeline; the output end of the reaction gas delivery pipeline is connected to the reaction chamber through the reaction valve;

[0024] Wherein, the reaction gas delivery pipeline is provided with a reaction valve which is communicatively connected with the controller, and the reaction valve is an electronic valve which can be controlled to switch according to the control command sent by the controller.

[0025] Optionally, the carrier gas introduced into the carrier pipeline is hydrogen and helium; the purge gas introduced into the first gas supply pipeline is nitrogen; and the protective gas introduced into the second gas supply pipeline is helium.

[0026] In a second aspect, the present invention provides a pipeline purging method, which is implemented by using the above-mentioned pipeline purging control system, comprising:

[0027] Step 1: close the input and output ends of the process gas source bottle and the reaction valve through the controller; open the carrier valve through the controller and control the carrier pipeline to purge; until the controller receives a feedback signal from the gas detector indicating that it has not detected the process gas, the purge is completed;

[0028] Step 2, opening the carrier valve, the isolation valve, the process valve and the first gas supply valve through the controller, and controlling the carrier pipeline and the first purge pipeline to be purged simultaneously; until the controller receives a feedback signal sent by the gas detector indicating that it has not detected the process gas, the purge is completed;

[0029] Step 3, opening the second purge valve, the isolation valve, and the first air supply valve through the controller, and controlling the second purge pipeline to purge; until the controller receives a feedback signal sent by the gas detector indicating that it has not detected the process gas, the purge is completed;

[0030] Step 4, disassemble the input end and the output end of the process gas source bottle, and replace the new process gas source bottle.

[0031] Optionally, the method for determining that the controller receives a feedback signal sent by the gas detector indicating that the controller does not detect the process gas includes:

[0032] A detection time threshold is set in the controller. When the controller continuously receives a feedback signal indicating that the process gas content is 0 for a period greater than the detection time threshold, the feedback signal indicates that no process gas is detected.

[0033] Optionally, in step 1, the method of controlling the current-carrying pipeline to be purged includes:

[0034] Close all second purge valves of the second purge pipeline and the third purge valve of the third purge pipeline, as well as the process valve, the isolation valve, and the first air supply valve of the first purge pipeline through the controller; and send a control command to the first carrier gas valve and the second carrier gas valve of the carrier gas pipeline through the controller to open the first carrier gas valve and the second carrier gas valve;

[0035] The carrier gas reaches the tail gas treatment pipeline through the first carrier gas valve, the gasification valve, and the second carrier gas valve, thereby achieving the purge of the carrier gas pipeline;

[0036] At this time, the gas detector sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the first carrier gas valve and the second carrier gas valve to close the first carrier gas valve and the second carrier gas valve.

[0037] Optionally, in step 2, the method of controlling the current-carrying pipeline and the first purge pipeline to be purged simultaneously includes:

[0038] Close all second purge valves of the second purge pipeline and the third purge valve of the third purge pipeline through the controller; send control commands to the process valve, the first air supply valve and the isolation valve of the first purge pipeline, and the first carrier gas valve and the second carrier gas valve of the carrier pipeline through the controller, and open the process valve, the first air supply valve, the isolation valve, the first carrier gas valve and the second carrier gas valve;

[0039] The purge gas passes through the first gas supply valve, the isolation valve, and the process valve to reach the gasification valve, and is combined with the carrier gas that passes through the first carrier gas valve to reach the gasification valve. The combined purge gas and carrier gas pass through the second carrier gas valve to reach the tail gas treatment pipeline, thereby achieving the common purge of the carrier gas pipeline and the first purge pipeline;

[0040] At this time, the gas detector sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the process valve, the first gas supply valve, the isolation valve, the first carrier gas valve and the second carrier gas valve to close the process valve, the first gas supply valve, the isolation valve, the first carrier gas valve and the second carrier gas valve.

[0041] Optionally, the step 2 further comprises: after the simultaneous purging of the current-carrying pipeline and the first purge pipeline is completed, controlling the third purge pipeline to be purged by a controller;

[0042] Close all second purge valves of the second purge pipeline, the first carrier gas valve of the flow-carrying pipeline, and the process valve, isolation valve, and first air supply valve of the first purge pipeline through the controller; send a control command to the third purge valve of the third purge pipeline and the second carrier gas valve of the flow-carrying pipeline through the controller to open the third purge valve and the second carrier gas valve;

[0043] The purge gas passes through the third purge valve and the second carrier gas valve in sequence and reaches the tail gas treatment pipeline to achieve the purge of the third purge pipeline;

[0044] At this time, the gas detector sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the third purge valve and the second carrier gas valve to close the third purge valve and the second carrier gas valve.

[0045] Optionally, in step 3, the method of controlling the second purge pipeline to perform purge by the controller includes:

[0046] Close the process valve of the first purge pipeline, the first carrier gas valve and the second carrier gas valve of the carrier gas pipeline, and the third purge valve of the third purge pipeline through the controller; send a control command to the isolation valve, the first air supply valve of the first air supply pipeline, and all the second purge valves of the second purge pipeline through the controller to open the isolation valve, the first air supply valve, and all the second purge valves;

[0047] The purge gas is separated into a first gas path and a second gas path after passing through the first gas supply valve. The first gas path reaches the tail gas treatment pipeline through the isolation valve and the second purge valve on the second parallel pipeline; the second gas path reaches the tail gas treatment pipeline through the second purge valve on the first parallel pipeline, thereby achieving the purge of the second purge pipeline.

[0048] At this time, the gas detector sends a feedback signal to the controller in real time. After the feedback signal indicates that it has not detected the process gas, the controller sends a control command to the isolation valve, the first air supply valve and all the second purge valves to close the isolation valve, the first air supply valve and all the second purge valves.

[0049] In a third aspect, the present invention provides an electronic device, including a processor and a memory, wherein the memory stores a computer program, and when the computer program is executed by the processor, the above-mentioned pipeline purging method is implemented.

[0050] In a fourth aspect, the present invention further provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed, the above-mentioned pipeline purging method can be implemented.

[0051] Compared with the prior art, the technical solution of the present invention has at least the following beneficial effects:

[0052] The present invention arranges a gas detector on the exhaust gas treatment pipeline, replaces all valves in the pipeline with electronic valves, and adds a controller to establish a communication connection relationship between the gas detector and the electronic valve; the controller receives the process gas content in the exhaust gas treatment pipeline sent by the gas detector in real time, controls the switching of the electronic valves in each pipeline, realizes automatic control of the purge time, reduces the use of the purge gas and ensures the cleanliness of the pipeline purge, and prevents the process gas from remaining in the pipeline and causing pipeline pollution.

[0053] The present invention determines through a controller whether the feedback signal sent by the gas detector indicates that it has not detected the process gas, and then automatically controls the purge time and purge sequence of each pipeline, thereby reducing personnel operation and improving the convenience of the pipeline purge process; at the same time, it reduces personnel operation risks and improves the safety of the pipeline purge process. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] Figure 1 The figure is a pipeline diagram of process gas in the purge pipeline in the prior art.

[0055] Figure 2 Schematic diagram of the pipeline purge control system of the present invention.

[0056] In the figure, 1-the first carrier gas valve, 2-the gasification valve, 3-the third purge valve, 4-the second carrier gas valve, 5-the reaction valve, 6-the purge valve, 7-the protective gas valve, 8-the second gas supply valve, 9-the first gas supply valve, 10-the first valve, 11-the switch valve at the input end of the process gas source bottle, 12-the isolation valve, 13-the switch valve at the output end of the process gas source bottle, 14-the first process valve, 15-the second valve, 16-the second process valve, 17-the third valve, 18-the liquid control meter, 19-the tail gas valve, 20-the tail gas treatment pipeline, 21-the process gas source bottle, 22-the reaction chamber, 23-the gas detector. DETAILED DESCRIPTION

[0057] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0058] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0059] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0060] See also Figure 1, is a pipeline diagram of process gas in the purge pipeline of the prior art. The pipeline includes: an exhaust gas treatment pipeline 20, a flow-carrying pipeline, and a purge pipeline. The input end of the exhaust gas treatment pipeline 20 is connected to the reaction chamber 22 through the exhaust valve 19, which is used to discharge the exhaust gas in the reaction chamber 22; and the output end of the exhaust gas treatment pipeline 20 is connected to the exhaust pump, which is used to extract the exhaust gas in the exhaust gas treatment pipeline 20. The input end of the flow-carrying pipeline is fed with carrier gas, and its output end is connected to the exhaust gas treatment pipeline 20; and a flow-carrying valve is provided on the flow-carrying pipeline. The purge pipeline includes: a process pipeline through which process gas flows during process production, the input end of the process pipeline is fed with purge gas, and the output end is connected to the flow-carrying pipeline; and a process valve is provided on the process pipeline; the process valve includes: a first process valve 14 and a second process valve 16, and the first process valve 14 is arranged at the input end of the process pipeline, and the second process valve 16 is arranged at the output end. Wherein, the process gas is tetrakis(dimethylamino)titanium (TDMAT).

[0061] The purge pipeline also includes a second purge pipeline arranged in parallel with the process pipeline for further purging the pipeline; and one end of the second purge pipeline is connected to the purge gas, and the other end is connected to the tail gas treatment pipeline 20. A plurality of manual valves are arranged on the second purge pipeline for controlling the connection state of the second purge pipeline.

[0062] In the prior art, after the production is completed, when the process pipeline is purged, it is necessary to manually open the flow-carrying valve and the vacuum pump at the tail gas treatment pipeline 20, so that the flow-carrying pipeline is always in a purging state for the tail gas treatment pipeline 20. At the same time, the first process valve 14 is manually controlled to open so that the purge gas fills the process pipeline; then the first process valve 14 is closed, and the second process valve 16 is opened, so that the purge gas drives the process gas in the process pipeline to flow to the flow-carrying pipeline together, and the carrier gas carries the process gas and the purge gas to the tail gas treatment pipeline 20, so as to achieve the purging of the process pipeline. After that, the first process valve 14 and the second process valve 16 are closed, and the manual valve on the second purge pipeline is opened for further purging. At present, it is difficult to control whether the process gas in the process pipeline and the tail gas treatment pipeline 20 is purged clean. In order to avoid the process gas from polluting the pipeline, it is necessary to manually repeat the operation of opening and closing the first process valve 14 and the second process valve 16 for at least 15 times, and increase the time for purging the current-carrying pipeline and the purge pipeline, resulting in low purging efficiency. In addition, the valves set on the purge pipeline in the prior art all require manual operation to control the switch, especially when operating the manual valve, personnel need to go to the site to complete the opening and closing of the manual valve. This operation not only takes a long time to purge, which wastes gas resources, but also makes it difficult to ensure whether the process gas in the process pipeline and the tail gas treatment pipeline 20 is purged clean, which poses a safety hazard; and increases the frequency of manual operation by personnel, which consumes a lot of manpower.

[0063] In order to solve the problems existing in the above-mentioned existing process pipeline purging process, on the first aspect, the present invention provides a pipeline purging control system, which replaces all the valves in the existing pipeline with automatic valves, and adds a gas detector 23 and a controller to establish a communication connection between the controller and the gas detector 23 and the automatic valve, so as to realize automatic purging of the process gas in the pipeline and improve the convenience, reliability and safety of the pipeline purging process.

[0064] See also Figure 2 The pipeline purge control system includes: an exhaust gas treatment pipeline 20, a current-carrying pipeline, a purge pipeline and a controller. A gas detector 23 is provided on the exhaust gas treatment pipeline 20 to detect the process gas content in the exhaust gas treatment pipeline 20.

[0065] The output end of the flow-carrying pipeline is connected to the exhaust gas treatment pipeline 20, and the carrier gas is introduced into its input end; the flow-carrying valve is an electronic valve, including: a first carrier gas valve 1 and a second carrier gas valve 4; and the first carrier gas valve 1 is arranged at the input end of the flow-carrying pipeline, and the second carrier gas valve 4 is arranged at the output end of the flow-carrying pipeline.

[0066] The purge pipeline includes: a first purge pipeline. The first purge pipeline includes: a first air supply pipeline and a process pipeline. The input end of the first air supply pipeline is connected to the purge gas main pipeline through a purge valve 6 for introducing purge gas; and a first air supply valve 9 is provided on the first air supply pipeline. The input end of the process pipeline is connected to the first air supply pipeline through an isolation valve 12 to input purge gas into the process pipeline; the output end of the process pipeline is connected to the current-carrying pipeline; and a process valve is provided on the process pipeline. Among them, the purge valve 6, the first air supply valve 9 and the process valve are all electronic valves.

[0067] The controller is respectively connected to the gas detector 23, the purge valve 6, the process valve, the first gas supply valve 9, the first carrier gas valve 1 and the second carrier gas valve 4 for communication, and is capable of receiving a feedback signal containing the process gas content sent by the gas detector 23, and sending a control command to the purge valve 6, the process valve, the first gas supply valve 9, the first carrier gas valve 1 and the second carrier gas valve 4 according to the feedback signal, thereby controlling the purge of the process gas in the pipeline by controlling the switches of each valve.

[0068] Furthermore, the input end of the process pipeline is connected to the output end of the process gas source bottle 21, and the process gas is introduced into the process pipeline. The output end of the first gas delivery pipeline is connected to the input end of the process gas source bottle 21. The process gas source bottle 21 is used to store liquid process gas, and its input end and output end can be closed by a switch valve provided thereon. When the output end of the process gas source bottle 21 is in an open state (that is, the pipeline is in a process production state), liquid process gas will be transmitted in the process pipeline.

[0069] In a preferred embodiment, the process valve includes: a first process valve 14 and a second process valve 16, wherein the first process valve 14 is arranged at the input end of the process pipeline, and the second process valve 16 is arranged at the output end of the process pipeline; the first process valve 14 and the second process valve 16 are both electronic valves connected to the controller in communication, and can be controlled to switch according to the control command sent by the controller. A liquid control meter 18 (LFM) is also arranged between the first process valve 14 and the second process valve 16, which is used to adjust the flow rate of the liquid process gas in the process pipeline during the process production process.

[0070] Furthermore, the connection between the process pipeline and the carrier pipeline is arranged between the first carrier gas valve 1 and the second carrier gas valve 4, and the connection is provided with a gasification valve 2. The carrier gas valve is used to gasify the liquid process gas in the process pipeline and further transfer it to the carrier pipeline.

[0071] During the purging process of the first purge pipeline, the exhaust valve 19 between the reaction chamber 22 and the exhaust gas treatment pipeline 20 is closed by the controller, and the control command is sent to the first carrier gas valve 1, the second carrier gas valve 4, the process valve, the first air supply valve 9, the isolation valve 12, and the purge valve 6 by the controller to open the first carrier gas valve 1, the second carrier gas valve 4, the process valve, the first air supply valve 9, the isolation valve 12, and the purge valve 6. The purge gas is passed through the purge valve 6, the first air supply valve 9, and the isolation valve 12 in sequence to enter the process pipeline, and the purge gas is used to purge the residual liquid process gas in the process pipeline through the process valve (i.e., the first process valve 14 and the second process valve 16) to the gasification valve 2, so that the liquid process gas is gasified when passing through the gasification valve 2, and the process gas, the purge gas and the carrier gas that pass through the first carrier valve 1 to reach the gasification valve 2 are combined, and together reach the tail gas treatment pipeline 20 through the second carrier valve 4; and the process gas, the purge gas, and the carrier gas in the tail gas treatment pipeline 20 are extracted by the vacuum pump. At the same time, the gas detector 23 detects the process gas content in the tail gas treatment pipeline 20 in real time, and converts the process gas content into a feedback signal and sends it to the controller in real time; and the controller determines whether the purge is completed according to the feedback signal. When the feedback signal received by the controller indicates that it has not detected the process gas, a control command is generated and sent to the first carrier gas valve 1, the second carrier gas valve 4, the process valve, the first gas supply valve 9, the isolation valve 12, and the purge valve 6, so that the first carrier gas valve 1, the second carrier gas valve 4, the process valve, the first gas supply valve 9, the isolation valve 12, and the purge valve 6 are closed. The purge process is controlled by the controller according to the content of the process gas in the tail gas treatment pipeline 20 to control the valve switch, effectively improve the reliability of the pipeline purge process, and prevent the process gas from remaining.

[0072] In one embodiment, in order to prevent process gas from remaining at the input and output ends of the process gas source bottle 21 when the process gas source bottle 21 is replaced, the purge pipeline further includes: a second purge pipeline. The second purge pipeline includes: a first parallel pipeline and a second parallel pipeline connected in parallel. Figure 2 As shown in the middle end point A, the input end of the first parallel pipeline is respectively connected to the output end of the first gas supply pipeline and the input end of the process gas source bottle 21, and its output end is connected to the tail gas treatment pipeline 20; Figure 2 As shown in the middle end B, the input end of the second parallel pipeline is respectively connected to the input end of the process pipeline and the output end of the process gas source bottle 21, and its output end is connected to the tail gas treatment pipeline 20. Among them, a plurality of second purge valves are respectively arranged on the first parallel pipeline and the second parallel pipeline, and the plurality of second purge valves are respectively arranged at the input end and output end of the first parallel pipeline and the input end and output end of the second parallel pipeline. The second purge valve is an electronic valve, which is connected to the controller in communication and controls the switch according to the control command sent by the controller.

[0073] In a preferred embodiment, in order to achieve neatness of the pipeline, Figure 2 As shown, the output end of the first parallel pipeline and the output end of the second parallel pipeline are combined and connected to the exhaust gas treatment pipeline 20. At this time, the second purge valve arranged at the input end of the first parallel pipeline is regarded as the first valve 10, the second purge valve arranged at the input end of the second parallel pipeline is regarded as the second valve 15, and the second purge valve arranged at the output end of the first parallel pipeline and the output end of the second parallel pipeline is regarded as the third valve 17. The first parallel pipeline and the second parallel pipeline are both connected to the exhaust gas treatment pipeline 20 through the third valve 17.

[0074] During the purging process of the second purge pipeline, the tail gas valve 19 between the reaction chamber 22 and the tail gas treatment pipeline 20, as well as the flow valve and the process valve are closed by the controller; and the controller is used to send control commands to the purge valve 6, the first air supply valve 9, the isolation valve 12, and all the second purge valves (i.e., the first valve 10, the second valve 15, and the third valve 17) to open the purge valve 6, the first air supply valve 9, the isolation valve 12, and all the second purge valves, so that the purge gas passes through the purge valve 6 and the first air supply valve 9 in sequence and is separated into the first gas path and the second gas path; the first gas path passes through the isolation valve 12 and the second purge valve on the second parallel pipeline (i.e., the second valve 15 and the third valve 17) in sequence to reach the tail gas treatment pipeline 20; the second gas path passes through the second purge valve on the first parallel pipeline (i.e., the first valve 10 and the third valve 17) in sequence to reach the tail gas treatment pipeline 20; and the process gas and purge gas in the tail gas treatment pipeline 20 are extracted by the vacuum pump. At the same time, the gas detector 23 detects the process gas content in the tail gas treatment pipeline 20 in real time, and converts the process gas content into a feedback signal and sends it to the controller in real time; and the controller determines whether the purge is completed based on the feedback signal. When the feedback signal received by the controller indicates that it has not detected the process gas, a control command is generated and sent to the purge valve 6, the first air supply valve 9, the isolation valve 12, and all the second purge valves (i.e., the first valve 10, the second valve 15, and the third valve 17), so that the purge valve 6, the first air supply valve 9, the isolation valve 12, and all the second purge valves are closed to complete the purge of the second purge pipeline. The purge process is controlled by the controller according to the content of the process gas in the tail gas treatment pipeline 20, so as to improve the reliability of the pipeline purge process and prevent the process gas from remaining.

[0075] In this case, since the purge gas will also pass through the input end of the process gas source bottle 21 (i.e. Figure 2 The purge gas also flows through the output end of the process gas source bottle 21 (i.e., the end point A in the process gas source bottle 21) when flowing through the second parallel pipeline. Figure 2 End point B in the process gas source bottle 21), therefore, in this embodiment, the second purge line can be used to purge the input and output ends of the process gas source bottle 21, thereby preventing residual process gas at the input and output ends of the process gas source bottle 21 and improving the safety of the operation of replacing the process gas source bottle 21.

[0076] In one embodiment, during the purging process using the first purge pipeline, since the distance between the second carrier gas valve 4 on the carrier pipeline and the tail gas treatment pipeline 20 is too long, in order to prevent the presence of process gas residues in this section of the carrier pipeline, the purge pipeline also includes: a third purge pipeline. The input end of the third purge pipeline is connected to the purge gas main pipeline through the purge valve 6 for passing the purge gas, and its output end is connected to the carrier pipeline, and the connection between the third purge pipeline and the carrier pipeline is located between the first carrier gas valve 1 and the second carrier gas valve 4; and the third purge pipeline is provided with a third purge valve 3 that is communicatively connected to the controller, and the third purge valve 3 is an electronic valve that can be controlled to switch according to the control command sent by the controller.

[0077] In a preferred embodiment, in order to reduce the flow path of the purge gas in the pipeline and thereby reduce the amount of purge gas used, the connection between the third purge pipeline and the carrier pipeline is arranged between the gasification valve 2 and the second carrier gas valve 4 .

[0078] During the purging process of the third purge pipeline, the tail gas valve 19 between the reaction chamber 22 and the tail gas treatment pipeline 20, as well as the first carrier gas valve 1, the process valve and all the second purge valves are closed by the controller; and the controller is used to send control commands to the purge valve 6, the third purge valve 3, and the second carrier gas valve 4 to open the purge valve 6, the third purge valve 3, and the second carrier gas valve 4. The purge gas enters the tail gas treatment pipeline 20 through the purge valve 6, the third purge valve 3, and the second carrier gas valve 4 in sequence; and the process gas and purge gas in the tail gas treatment pipeline 20 are extracted by the vacuum pump. At the same time, the gas detector 23 detects the process gas content in the tail gas treatment pipeline 20 in real time, and converts the process gas content into a feedback signal and sends it to the controller in real time; and the controller determines whether the purge is completed according to the feedback signal. When the feedback signal received by the controller indicates that it has not detected the process gas, a control command is generated and sent to the purge valve 6, the third purge valve 3, and the second carrier gas valve 4, so that the purge valve 6, the third purge valve 3, and the second carrier gas valve 4 are closed to complete the purge of the third purge pipeline. The purge process is controlled by the controller according to the content of the process gas in the tail gas treatment pipeline 20 to control the valve switch, thereby improving the reliability of the pipeline purge process and preventing the process gas from remaining.

[0079] In one embodiment, in order to reduce the cost of purge gas, the carrier gas introduced into the carrier pipeline is hydrogen and helium; the purge gas introduced into the first gas supply pipeline is nitrogen. However, nitrogen may affect the chemical vapor deposition reaction in the reaction chamber 22; and when the process gas source bottle 21 is disassembled and replaced, air will enter the input end of the first parallel pipeline and the input end of the second parallel pipeline; therefore, in order to exhaust the air and nitrogen in the first parallel pipeline and the second pipeline and facilitate the preparation work before process production, the pipeline purge control system also includes: a second gas supply pipeline. The output end of the second gas supply pipeline is respectively connected to the input end of the first parallel pipeline and the input end of the process gas source bottle 21 (i.e. Figure 2 The first end of the second parallel pipeline is connected to the first end of the second air supply pipeline through the isolation valve 12; the second air supply pipeline is connected to the main protective gas pipeline through the protective gas valve 7 for introducing the protective gas. The protective gas is helium; and the second air supply pipeline is provided with a second air supply valve 8 that is connected to the controller in communication; the second air supply valve 8 and the protective gas valve 7 are both electronic valves that can be controlled to switch according to the control command sent by the controller.

[0080] During the process of protective gas purging after replacing the process gas source bottle 21, close the tail gas valve 19 between the reaction chamber 22 and the tail gas treatment pipeline 20, as well as the carrier valve, process valve, purge valve 6 and third purge valve 3; open the protective gas valve 7, the second air supply valve 8, the isolation valve 12, and all the second purge valves (i.e., the first valve 10, the second valve 15, and the third valve 17). The protective gas is separated into the third gas path and the fourth gas path after passing through the protective gas valve 7 and the second air supply valve 8 in sequence. The third gas path passes through the isolation valve 12 and the second purge valve on the second parallel pipeline (i.e., the second valve 15 and the third valve 17) in sequence to reach the tail gas treatment pipeline 20; the fourth gas path passes through the second purge valve on the first parallel pipeline (i.e., the first valve 10 and the third valve 17) in sequence to reach the tail gas treatment pipeline 20; the purge process of the protective gas is completed, and the air in the first parallel pipeline and the second parallel pipeline is discharged.

[0081] Further, in order to simplify the pipeline, the pipeline purge control system also includes: a reaction gas delivery pipeline. The input end of the reaction gas delivery pipeline is connected to the carrier pipeline, and the connection between the reaction gas delivery pipeline and the carrier pipeline is arranged between the second carrier gas valve 4 and the connection between the third purge pipeline and the carrier pipeline; the output end of the reaction gas delivery pipeline is connected to the reaction chamber 22 through the reaction valve 5. Among them, the reaction gas delivery pipeline is provided with a reaction valve 5 that is communicatively connected to the controller, and the reaction valve 5 is an electronic valve that can control the switch according to the control command sent by the controller. When the pipeline is in process production, in order to allow the process gas to enter the reaction chamber 22, the second carrier gas valve 4 will be closed by the controller and the reaction valve 5 will be opened; when the pipeline is in the purge state, in order to prevent the purge gas from entering the reaction chamber 22, the reaction valve 5 will be closed by the controller and the second carrier gas valve 4 will be opened.

[0082] At this time, the carrier pipeline, the second gas supply pipeline, the process pipeline, and the reaction gas delivery pipeline can be used for process production. During the process production process, the controller is used to close the second carrier valve 4, all second purge valves, the isolation valve 12, the first gas supply valve 9, and the purge valve 6, and the controller is used to open the first carrier valve 1, the protective gas valve 7, the second gas supply valve 8, the switch valves at the input and output ends of the process gas source bottle 21, the process valve, and the reaction valve 5. The protective gas enters the process gas source bottle 21 through the protective gas valve 7, the second gas supply valve 8, and the switch valve 11 at the input end of the process gas source bottle 21 in turn, and presses out the liquid process gas in the process gas source bottle 21; the liquid process gas passes through the switch valve 13 at the output end of the process gas source bottle 21, the first process valve 14, and the second process valve 16 to reach the gasification valve 2, so that the liquid process gas is gasified; at the same time, the carrier gas is combined with the process gas through the first carrier valve 1, driving the process gas to enter the reaction chamber 22 through the reaction valve 5.

[0083] In a second aspect, the present invention provides a pipeline purging method, which is implemented using the above-mentioned pipeline purging control system, and the specific steps include:

[0084] Step 1: Close the input and output ends of the process gas source bottle 21, the reaction valve 5, and the tail gas valve 19 through the controller; and keep the switch valves at the input and output ends of the process gas source bottle 21, the reaction valve 5, and the tail gas valve 19 in a closed state. Open the carrier valve through the controller and control the carrier pipeline to purge; until the controller receives a feedback signal sent by the gas detector 23 indicating that it has not detected the process gas, the purge is completed.

[0085] Specifically, a detection time threshold is set in the controller. When the controller continuously receives a feedback signal indicating that the process gas content is 0 for a period greater than the detection time threshold, the feedback signal indicates that the process gas is not detected. The detection time threshold can be set as needed, and is usually set to 10s.

[0086] Specifically, during the purging process of the flow-carrying pipeline, the protective gas valve 7, the purge valve 6, all the second purge valves of the second purge pipeline and the third purge valve 3 of the third purge pipeline, as well as the process valve, the isolation valve 12 and the first air supply valve 9 of the first purge pipeline are closed through the controller; and a control command is sent to the first carrier gas valve 1 and the second carrier gas valve 4 of the flow-carrying pipeline through the controller to open the first carrier gas valve 1 and the second carrier gas valve 4.

[0087] The carrier gas reaches the tail gas treatment pipeline 20 through the first carrier gas valve 1, the gasification valve 2, and the second carrier gas valve 4, thereby achieving the purge of the carrier gas pipeline.

[0088] At this time, the gas detector 23 sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the first carrier gas valve 1 and the second carrier gas valve 4 to close the first carrier gas valve 1 and the second carrier gas valve 4.

[0089] Step 2, open the purge valve 6, the carrier valve, the isolation valve 12, the process valve and the first air supply valve 9 through the controller, and control the carrier pipeline and the first purge pipeline to be purged at the same time; until the controller receives the feedback signal sent by the gas detector 23 indicating that it has not detected the process gas, the purge is completed.

[0090] Specifically, the protective gas valve 7, the second air supply valve 8, all the second purge valves of the second purge pipeline and the third purge valve 3 of the third purge pipeline are closed through the controller; control commands are sent to the purge valve 6, the process valve of the first purge pipeline, the first air supply valve 9 and the isolation valve 12, the first carrier gas valve 1 and the second carrier gas valve 4 of the carrier pipeline through the controller to open the purge valve 6, the first process valve 14, the second process valve 16, the first air supply valve 9, the isolation valve 12, the first carrier gas valve 1 and the second carrier gas valve 4.

[0091] The purge gas passes through the purge valve 6, the first air supply valve 9, the isolation valve 12, the first process valve 14, and the second process valve 16 in sequence to reach the gasification valve 2, and is combined with the carrier gas that passes through the first carrier gas valve 1 to reach the gasification valve 2. The combined purge gas and carrier gas pass through the second carrier gas valve 4 together to reach the exhaust gas treatment pipeline 20, thereby achieving the joint purge of the carrier gas pipeline and the first purge pipeline.

[0092] At this time, the gas detector 23 sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the purge valve 6, the first process valve 14, the second process valve 16, the first gas supply valve 9, the isolation valve 12, the first carrier gas valve 1 and the second carrier gas valve 4 to close the purge valve 6, the first process valve 14, the second process valve 16, the first gas supply valve 9, the isolation valve 12, the first carrier gas valve 1 and the second carrier gas valve 4.

[0093] Furthermore, in order to further purge the process gas remaining in the carrier gas pipeline between the second carrier gas valve 4 and the tail gas treatment pipeline 20, a third purge pipeline is used for purge.

[0094] Specifically, after the simultaneous purging of the flow-carrying pipeline and the first purge pipeline is completed, the third purge pipeline is controlled by the controller to be purged. The protection gas valve 7, all the second purge valves of the second purge pipeline, the first carrier gas valve 1 of the flow-carrying pipeline, and the process valve, isolation valve 12, and first air supply valve 9 of the first purge pipeline are closed by the controller; the controller sends a control command to the purge valve 6, the third purge valve 3 of the third purge pipeline, and the second carrier gas valve 4 of the flow-carrying pipeline to open the purge valve 6, the third purge valve 3, and the second carrier gas valve 4;

[0095] The purge gas passes through the purge valve 6, the third purge valve 3 and the second carrier gas valve 4 in sequence, and reaches the tail gas treatment pipeline 20, thereby achieving the purge of the third purge pipeline.

[0096] At this time, the gas detector 23 sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the purge valve 6, the third purge valve 3 and the second carrier gas valve 4 to close the purge valve 6, the third purge valve 3 and the second carrier gas valve 4.

[0097] Step 3, open the purge valve 6, the second purge valve, the isolation valve 12, and the first air supply valve 9 through the controller, and control the second purge pipeline to purge; until the controller receives the feedback signal sent by the gas detector 23 indicating that it has not detected the process gas, the purge is completed.

[0098] Specifically, the protective gas valve 7, the process valve of the first purge pipeline, the first carrier gas valve 1 and the second carrier gas valve 4 of the carrier pipeline, and the third purge valve 3 of the third purge pipeline are closed through the controller; the controller sends a control command to the purge valve 6, the isolation valve 12, the first air supply valve 9 of the first air supply pipeline, and all the second purge valves (i.e., the first valve 10, the second valve 15, and the third valve 17) of the second purge pipeline to open the purge valve 6, the isolation valve 12, the first air supply valve 9, and all the second purge valves;

[0099] The purge gas is separated into a first gas path and a second gas path after passing through the purge valve 6 and the first air supply valve 9. The first gas path reaches the exhaust gas treatment pipeline 20 through the isolation valve 12 and the second purge valve on the second parallel pipeline (i.e., the second valve 15 and the third valve 17); the second gas path reaches the exhaust gas treatment pipeline 20 through the second purge valve on the first parallel pipeline (i.e., the first valve 10 and the third valve 17); the purge of the second purge pipeline is realized.

[0100] At this time, the gas detector 23 sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the purge valve 6, the isolation valve 12, the first air supply valve 9 and all the second purge valves to close the purge valve 6, the isolation valve 12, the first air supply valve 9 and all the second purge valves.

[0101] Step 4, close all valves, dismantle the switch valves at the input and output ends of the process gas source bottle 21 to achieve disassembly of the process gas source bottle 21, and replace it with a new process gas source bottle 21.

[0102] In a preferred embodiment, after replacing the process gas source bottle 21, in order to exhaust the air in the first parallel pipeline and the second parallel pipeline and facilitate the preparation work before process production, the pipeline purging method further includes:

[0103] Step 5, controlling the second air supply pipeline and the second purge pipeline to be purged simultaneously through the controller.

[0104] Specifically, the purge valve 6, the first air supply valve 9, the process valve, and the flow-carrying valve are closed through the controller, and a control command is sent to the protective gas valve 7, all second purge valves (i.e., the first valve 10, the second valve 15, the third valve 17), and the second air supply valve 8 through the controller to open the protective gas valve 7, all second purge valves, and the second air supply valve 8.

[0105] The protective gas is separated into a third gas path and a fourth gas path after passing through the protective gas valve 7 and the second gas supply valve 8. The third gas path reaches the exhaust gas treatment pipeline 20 after passing through the isolation valve 12 and the second purge valve (i.e., the second valve 15 and the third valve 17) arranged on the second parallel pipeline; the fourth gas path reaches the exhaust gas treatment pipeline 20 after passing through the second purge valve (i.e., the first valve 10 and the third valve 17) arranged on the first parallel pipeline; the simultaneous purge of the second gas supply pipeline and the second purge pipeline is realized.

[0106] The gas detector 23 sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the purge gas. The controller then stops sending control commands to the protective gas valve 7, the second air supply valve 8 and all second purge valves to close the protective gas valve 7, the second air supply valve 8 and all second purge valves.

[0107] In a third aspect, the present invention provides an electronic device, comprising: a processor and a memory. The memory is used to store a computer program; the processor can call and execute the computer program in the memory. When the computer program is executed by the processor, the above pipeline purging method will be implemented.

[0108] In a fourth aspect, the present invention further provides a computer-readable storage medium storing a computer program, wherein when the computer program is executed, the above pipeline purging method can be implemented.

[0109] In summary, the present invention realizes automatic control of purge time by establishing a communication connection between the controller and the gas detector and the electronic valve, thereby reducing the usage of purge gas and ensuring the cleanliness of the pipeline purge, and preventing process gas from remaining in the pipeline and causing pipeline pollution; at the same time, the controller determines whether the feedback signal indicates that it has not detected process gas, and automatically controls the purge time and purge sequence of each pipeline, thereby improving the convenience, reliability and safety of the pipeline purge process.

[0110] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A pipeline purge control system, used for purging process gas in a pipeline, characterized in that: include: The tail gas treatment pipeline is provided with a gas detector, and the gas detector is used to detect the process gas content; A carrier gas pipeline, the output end of which is connected to the tail gas treatment pipeline, and the input end of which is fed with carrier gas; The current-carrying pipeline is provided with a current-carrying valve, and the current-carrying valve is an electronic valve; The purge pipeline comprises: a first purge pipeline; the first purge pipeline comprises a process pipeline through which a process gas flows, the purge gas is introduced into the input end of the process pipeline, and the output end of the process pipeline is connected to the current-carrying pipeline; The process pipeline is provided with a process valve, which is an electronic valve; The controller is respectively connected to the gas detector, process valve and flow-carrying valve for communication, receives the feedback signal containing the process gas content sent by the gas detector, and sends control commands to the process valve and the flow-carrying valve according to the feedback signal, thereby controlling the purge of the process gas in the pipeline by controlling the valve switch.

2. The pipeline purge control system according to claim 1, characterized in that: The carrier gas valve comprises: a first carrier gas valve and a second carrier gas valve, wherein the first carrier gas valve is arranged at the input end of the carrier gas pipeline, and the second carrier gas valve is arranged at the output end of the carrier gas pipeline; The connection point between the process pipeline and the carrier gas pipeline is located between the first carrier gas valve and the second carrier gas valve.

3. The pipeline purge control system according to claim 2, characterized in that: A gasification valve is provided at the connection between the process pipeline and the current-carrying pipeline.

4. The pipeline purge control system according to claim 1, characterized in that: The first purge pipeline further includes: a first air supply pipeline; the purge gas is introduced into the input end of the first air supply pipeline, and the output end thereof is connected to the input end of the process pipeline via an isolation valve; Wherein, a first air supply valve is arranged on the first air supply pipeline; the isolation valve and the first air supply valve are both electronic valves, which are connected to the controller for communication and control the switch according to the control command sent by the controller.

5. The pipeline purge control system according to claim 4, characterized in that: The input end of the process pipeline is connected to the output end of the process gas source bottle, and process gas is introduced into the process pipeline; the output end of the first gas supply pipeline is connected to the input end of the process gas source bottle; and the input end and output end of the process gas source bottle can be closed by the switch valve arranged thereon.

6. The pipeline purge control system according to claim 5, characterized in that: The purge pipeline also includes a second purge pipeline; The second purge pipeline comprises a first parallel pipeline and a second parallel pipeline connected in parallel; the input end of the first parallel pipeline is respectively connected to the output end of the first gas delivery pipeline and the input end of the process gas source bottle, and the output end thereof is connected to the tail gas treatment pipeline; the input end of the second parallel pipeline is respectively connected to the input end of the process pipeline and the output end of the process gas source bottle, and the output end thereof is connected to the tail gas treatment pipeline; Among them, multiple second purge valves are respectively provided on the first parallel pipeline and the second parallel pipeline, and the multiple second purge valves are respectively arranged at the input end and output end of the first parallel pipeline and the input end and output end of the second parallel pipeline; the second purge valve is an electronic valve, which is communicated with the controller and controls the switch according to the control command sent by the controller.

7. The pipeline purge control system according to claim 2, characterized in that: The purge pipeline also includes a third purge pipeline; the purge gas is introduced into the input end of the third purge pipeline, and the output end thereof is connected to the current-carrying pipeline, and the connection between the third purge pipeline and the current-carrying pipeline is located between the first carrier gas valve and the second carrier gas valve; and the third purge pipeline is provided with a third purge valve that is communicatively connected to the controller, and the third purge valve is an electronic valve that can control the switch according to the control command sent by the controller.

8. The pipeline purge control system according to claim 5, characterized in that: Also includes: A second air supply pipeline, the output end of the second air supply pipeline is respectively connected to the input end of the first parallel pipeline and the input end of the process gas source bottle, and is connected to the input end of the second parallel pipeline through an isolation valve; protective gas is introduced into the input end of the second air supply pipeline; a second air supply valve communicatively connected to the controller is provided on the second air supply pipeline, and the second air supply valve is an electronic valve, which can be controlled to switch according to the control command sent by the controller.

9. The pipeline purge control system according to claim 7, characterized in that: Also includes: A reaction gas delivery pipeline; the input end of the reaction gas delivery pipeline is connected to the flow-carrying pipeline, and the connection between the input end of the reaction gas delivery pipeline and the flow-carrying pipeline is arranged between the second carrier gas valve and the connection between the third purge pipeline and the flow-carrying pipeline; the output end of the reaction gas delivery pipeline is connected to the reaction chamber through the reaction valve; Wherein, the reaction gas delivery pipeline is provided with a reaction valve which is communicatively connected with the controller, and the reaction valve is an electronic valve which can be controlled to switch according to the control command sent by the controller.

10. The pipeline purging method according to claim 8, characterized in that: The carrier gas introduced into the carrier pipeline is hydrogen and helium; the purge gas introduced into the first gas supply pipeline is nitrogen; and the protective gas introduced into the second gas supply pipeline is helium.

11. A pipeline purging method, implemented by using the pipeline purging control system according to any one of claims 1 to 10, characterized in that: include: Step 1: close the input and output ends of the process gas source bottle and the reaction valve through the controller; open the carrier valve through the controller and control the carrier pipeline to purge; until the controller receives a feedback signal from the gas detector indicating that it has not detected the process gas, the purge is completed; Step 2, opening the carrier valve, the isolation valve, the process valve and the first gas supply valve through the controller, and controlling the carrier pipeline and the first purge pipeline to be purged simultaneously; until the controller receives a feedback signal sent by the gas detector indicating that it has not detected the process gas, the purge is completed; Step 3, opening the second purge valve, the isolation valve, and the first air supply valve through the controller, and controlling the second purge pipeline to purge; until the controller receives a feedback signal sent by the gas detector indicating that it has not detected the process gas, the purge is completed; Step 4, disassemble the input end and the output end of the process gas source bottle, and replace the new process gas source bottle.

12. The pipeline purging method according to claim 11, characterized in that: The controller receives a feedback signal from the gas detector indicating that it has not detected the process gas. The method includes: A detection time threshold is set in the controller. When the controller continuously receives a feedback signal indicating that the process gas content is 0 for a period greater than the detection time threshold, the feedback signal indicates that no process gas is detected.

13. The pipeline purging method according to claim 12, characterized in that: In step 1, the method of controlling the current-carrying pipeline to be purged includes: Close all second purge valves of the second purge pipeline and the third purge valve of the third purge pipeline, as well as the process valve, the isolation valve, and the first air supply valve of the first purge pipeline through the controller; and send a control command to the first carrier gas valve and the second carrier gas valve of the carrier gas pipeline through the controller to open the first carrier gas valve and the second carrier gas valve; The carrier gas reaches the tail gas treatment pipeline through the first carrier gas valve, the gasification valve, and the second carrier gas valve, thereby achieving the purge of the carrier gas pipeline; At this time, the gas detector sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the first carrier gas valve and the second carrier gas valve to close the first carrier gas valve and the second carrier gas valve.

14. The pipeline purging method according to claim 12, characterized in that: In step 2, the method of controlling the current-carrying pipeline and the first purge pipeline to be purged simultaneously includes: Close all second purge valves of the second purge pipeline and the third purge valve of the third purge pipeline through the controller; send control commands to the process valve, the first air supply valve and the isolation valve of the first purge pipeline, and the first carrier gas valve and the second carrier gas valve of the carrier pipeline through the controller, and open the process valve, the first air supply valve, the isolation valve, the first carrier gas valve and the second carrier gas valve; The purge gas passes through the first gas supply valve, the isolation valve, and the process valve to reach the gasification valve, and is combined with the carrier gas that passes through the first carrier gas valve to reach the gasification valve. The combined purge gas and carrier gas pass through the second carrier gas valve to reach the tail gas treatment pipeline, thereby achieving the common purge of the carrier gas pipeline and the first purge pipeline; At this time, the gas detector sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the process valve, the first gas supply valve, the isolation valve, the first carrier gas valve and the second carrier gas valve to close the process valve, the first gas supply valve, the isolation valve, the first carrier gas valve and the second carrier gas valve.

15. The pipeline purging method according to claim 12, characterized in that: The step 2 further includes: after the current-carrying pipeline and the first purge pipeline are purged simultaneously, controlling the third purge pipeline to be purged by a controller; Close all second purge valves of the second purge pipeline, the first carrier gas valve of the flow-carrying pipeline, and the process valve, isolation valve, and first air supply valve of the first purge pipeline through the controller; send a control command to the third purge valve of the third purge pipeline and the second carrier gas valve of the flow-carrying pipeline through the controller to open the third purge valve and the second carrier gas valve; The purge gas passes through the third purge valve and the second carrier gas valve in sequence and reaches the tail gas treatment pipeline to achieve the purge of the third purge pipeline; At this time, the gas detector sends a feedback signal to the controller in real time until the feedback signal indicates that it has not detected the process gas. The controller then sends a control command to the third purge valve and the second carrier gas valve to close the third purge valve and the second carrier gas valve.

16. The pipeline purging method according to claim 12, characterized in that: In step 3, the method of controlling the second purge pipeline to perform purge by the controller includes: Close the process valve of the first purge pipeline, the first carrier gas valve and the second carrier gas valve of the carrier gas pipeline, and the third purge valve of the third purge pipeline through the controller; send a control command to the isolation valve, the first air supply valve of the first air supply pipeline, and all the second purge valves of the second purge pipeline through the controller to open the isolation valve, the first air supply valve, and all the second purge valves; The purge gas is separated into a first gas path and a second gas path after passing through the first gas supply valve. The first gas path reaches the tail gas treatment pipeline through the isolation valve and the second purge valve on the second parallel pipeline; the second gas path reaches the tail gas treatment pipeline through the second purge valve on the first parallel pipeline, thereby achieving the purge of the second purge pipeline. At this time, the gas detector sends a feedback signal to the controller in real time. After the feedback signal indicates that it has not detected the process gas, the controller sends a control command to the isolation valve, the first air supply valve and all the second purge valves to close the isolation valve, the first air supply valve and all the second purge valves.

17. An electronic device, characterized in that: It comprises a processor and a memory, wherein a computer program is stored in the memory, and when the computer program is executed by the processor, the pipeline purging method as described in claims 11-16 is implemented.

18. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed, the pipeline purging method as described in claims 11-16 can be implemented.

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