Loading and unloading equipment, loading and unloading equipment and copper electroplating production line

Abstract

The invention relates to the technical field of photovoltaics and semiconductors, in particular to loading and unloading equipment, loading and unloading equipment and a copper electroplating production line, and solves the problem of low product loading and unloading efficiency of the loading and unloading equipment. The loading and unloading equipment comprises a transferring device, an overturning device and a sheet carrying device. According to the loading and unloading equipment, the sheet materials are automatically conveyed through the transferring device, the carrier with the two faces capable of loading the sheet materials is automatically conveyed through the overturning device, and the carrier is overturned so that the sheet materials can be loaded and unloaded on the two faces of the carrier; the sheet carrying device is used for automatically carrying unprocessed sheet materials from the transferring device to the two faces of the carrier so as to achieve automatic loading of the sheet materials, or the sheet carrying device is used for automatically carrying processed sheet materials from the carrier to the transferring device so as to achieve automatic unloading of the sheet materials. Therefore, the loading and unloading efficiency of the flaky materials is improved.

Description

Technical Field

[0001] The present application relates to the fields of photovoltaic and semiconductor technology, and in particular to a loading and unloading device, loading and unloading equipment, and a copper electroplating production line. Background Art

[0002] At present, in the photovoltaic and semiconductor fields, silver paste is the core material for battery production. The high consumption and cost of silver paste are key factors restricting the industrial development of batteries. Especially in the era of N-type batteries, the proportion of silver paste in the cost has increased significantly, so low silver and silver removal have become important technical means to reduce the cost of battery production in the industry. Electroplating copper technology is a new metallization process. As one of the technologies to replace silver paste, it can reduce the silver content of the battery, thereby reducing the cost of battery production.

[0003] Currently, during the copper electroplating process, batteries are usually loaded and unloaded manually, resulting in low efficiency in loading and unloading batteries. Summary of the invention

[0004] In view of this, the embodiments of the present application provide a loading and unloading device, loading and unloading equipment and a copper electroplating production line, which solve the problem of low loading and unloading efficiency of products.

[0005] In a first aspect, an embodiment of the present application provides a loading and unloading device, which is configured to load sheet materials onto a carrier, or unload the sheet materials from the carrier; wherein the loading and unloading device includes: a transferring device, which is configured to transport the unprocessed sheet materials or the processed sheet materials; a flipping device, which is arranged adjacent to the transferring device, is configured to carry and transport the carrier, and is capable of flipping the carrier, wherein the carrier has a first side and a second side arranged opposite to each other, and both the first side and the second side can be loaded with the sheet materials; a sheet material conveying device, which is arranged adjacent to the transferring device and the flipping device, and is configured to convey the unprocessed sheet materials on the transferring device to the first side and the second side of the carrier before and after the flipping device is flipped, respectively, or to convey the processed sheet materials loaded on the carrier to the transferring device.

[0006] In some embodiments, the flipping device includes: a flipping frame having a placement space for accommodating the carrier; two sets of conveying mechanisms arranged opposite to each other and arranged in the placement space of the flipping frame; a flipping mechanism, arranged on the flipping frame and configured to flip the flipping frame; wherein, when the carrier is located between the two sets of conveying mechanisms, the conveying mechanism located below carries and transports the carrier.

[0007] In some embodiments, the transfer device includes: one or more carrying components, configured to carry the unprocessed sheet material or the processed sheet material; one or more first driving sources, connected to the carrying component, configured to drive the carrying component to move; wherein, the transfer device includes an upper material position, a loading and unloading position, and a lower material position, and the sheet material handling device inserts and unloads the sheet material between the carrying component at the loading and unloading position and the flipping device, and the first driving source can drive the carrying component to move between the upper material position, the loading and unloading position, and the lower material position.

[0008] In some embodiments, the transfer device includes: two carrying components, the two carrying components are arranged at intervals along a first direction, wherein one of the carrying components is configured to carry the unprocessed sheet material, and the other carrying component is configured to carry the processed sheet material; wherein the transfer device includes a loading position, a loading and unloading position, and a unloading position arranged in sequence along the first direction, one of the carrying components can travel back and forth between the loading and unloading position, and the other of the carrying components can travel back and forth between the loading and unloading position and the unloading position.

[0009] In some embodiments, the supporting assembly includes: a supporting plate that moves along a first direction, the supporting plate including a plurality of first accommodating spaces, the first accommodating spaces being configured to accommodate the sheet material; a plurality of first supporting members connected to the supporting plate and configured to support the sheet material, the first supporting members being located above the supporting plate, and each of the first accommodating spaces being formed by two or more adjacent first supporting members; a plurality of first limiting members being located above the supporting plate and connected to the supporting plate, and being configured to abut against the side of the sheet material; wherein the first limiting members have a guide surface at the end portion close to the first accommodating space, and the guide surface is configured to guide the sheet material to enter and exit the first accommodating space; the transferring device also includes: one or more first slide rails extending along the first direction and located below the supporting assembly; two or more first sliders being slidably connected to the first slide rails, and each of the supporting assemblies being connected to one or more first sliders.

[0010] In some embodiments, the sheet material handling device includes: a linear drive mechanism, which is arranged above the transfer device and the flipping device along a second direction, wherein the second direction intersects with the direction in which the transfer device transports the sheet material; a grabbing mechanism, which is connected to the linear drive mechanism and is arranged on a side of the linear drive mechanism close to the flipping device, and moves along the second direction to above the carrier carried by the carrying assembly or the flipping device under the drive of the linear drive mechanism, and at the same time, the grabbing mechanism can move in a vertical direction and grab and place the sheet material.

[0011] In some embodiments, the carrier includes: a carrier plate having the first surface and the second surface arranged opposite to each other, the first surface and the second surface each including a plurality of second accommodating spaces, the second accommodating spaces being configured to accommodate the sheet material; a plurality of pressing plates arranged on the first surface and the second surface, the first end of the pressing plate being connected to the first surface or the second surface, the second end of the pressing plate being capable of being driven to press the sheet material or deviate from the second accommodating space so that the sheet material is pressed or released from the carrier plate; when the sheet material is released from being pressed, the grabbing mechanism moves in a vertical direction to grab or place the sheet material in the second accommodating space.

[0012] In some embodiments, the carrier is provided with more than two pressing plate groups, and the plurality of pressing plate groups are arranged in a straight line; each pressing plate group includes a plurality of pressing plates arranged in sequence in a straight line direction, and the arrangement direction of the pressing plates is perpendicular to the arrangement direction of the pressing plate group; two adjacent pressing plate groups can press the two opposite sides of the same sheet material; or two adjacent pressing plate groups can press the adjacent sides of two sheet materials; the pressing plates in the same pressing plate group are arranged in parallel in sequence with equal intervals; the pressing plate has elastic deformation, and when the second end of the pressing plate is separated from the sheet material, the pressing plate is driven to deform toward the first end of the pressing plate, so that the second end of the pressing plate can deviate from the second accommodating space and separate from the sheet material.

[0013] In some embodiments, the carrier also includes: a plurality of second support members, disposed on the first surface and / or the second surface, configured to support the sheet material; a plurality of second limit members, disposed on the first surface and / or the second surface, configured to abut the side of the sheet material; wherein, the plurality of pressing plates are located outside the second accommodating space and are arranged adjacent to the plurality of second support members one by one, and the second end of the pressing plate can abut against a side of the sheet material away from the carrier to press the sheet material against the second support member.

[0014] In some embodiments, the sheet material handling device further includes: a vertical driving mechanism, the grabbing mechanism is connected to the linear driving mechanism through the vertical driving mechanism; a hook mechanism is connected to the vertical driving mechanism, the hook mechanism includes a plurality of hooks, the hooks are driven to hook the pressing sheet so that the second end of the pressing sheet is away from the sheet material, and at the same time the grabbing mechanism can move in a vertical direction to grab or place the sheet material in the second accommodating space.

[0015] In some embodiments, the crochet mechanism includes multiple groups of crochet assemblies, and the multiple groups of crochet assemblies are arranged in a straight line; each of the crochet assemblies includes: a plurality of crochet hooks arranged in sequence in a straight line, and the arrangement direction of the crochet hooks is perpendicular to the arrangement direction of the crochet hook assembly; one or more second driving sources are arranged in the vertical driving mechanism and connected to the crochet hooks, and are configured to drive the crochet hooks to insert into or move away from the area between the pressing plate and the carrier plate; one or more third driving sources are arranged in the vertical driving mechanism and connected to the crochet hooks, and are configured to drive the crochet hooks to hook the pressing plate in a vertical direction and make the second end of the pressing plate move away from the sheet material; the crochet hooks in the same crochet assembly are arranged in parallel in sequence with equal intervals.

[0016] In some embodiments, the loading and unloading equipment also includes: one or more carrier transport devices, arranged adjacent to the flipping device and on one side or both sides of the flipping device, configured to transport the empty carrier or the carrier loaded with the processed sheet material or the carrier loaded with the unprocessed sheet material.

[0017] In a second aspect, an embodiment of the present application provides a loading and unloading device, comprising: the loading and unloading device as described in the first aspect, configured to load sheet materials onto a carrier, or unload the sheet materials from the carrier; and a transporting device, configured to transport the carrier to the loading and unloading device, or to receive and transport the carrier on the loading and unloading device.

[0018] In a third aspect, an embodiment of the present application provides a copper electroplating production line, comprising: copper electroplating equipment, configured to perform a copper electroplating process on sheet materials; a loading and unloading equipment as described in the second aspect, arranged adjacent to the copper electroplating equipment, and configured to transport the sheet materials to the copper electroplating equipment, or to receive and transport the sheet materials in the copper electroplating equipment.

[0019] The loading and unloading equipment provided in the embodiment of the present application utilizes a transferring device to automatically transport sheet materials, utilizes a flipping device to automatically transport a carrier that can be loaded with sheet materials on both sides, and flips the carrier so that the sheet materials can be loaded and unloaded on both sides of the carrier, utilizes a sheet material transporting device to automatically transport unprocessed sheet materials from the transferring device to both sides of the carrier to realize automatic loading of sheet materials, or utilizes a sheet material transporting device to automatically transport processed sheet materials from the carrier to the transferring device to realize automatic unloading of sheet materials, thereby improving the loading and unloading efficiency of sheet materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0021] Figure 1 Shown is a schematic structural diagram of a loading and unloading device provided in one embodiment of the present application.

[0022] Figure 2 Shown is a schematic structural diagram of a flipping device provided in one embodiment of the present application.

[0023] Figure 3 Shown is a side view of a flipping device and a carrier provided in one embodiment of the present application.

[0024] Figure 4 Shown is a side view of a flipping device and a carrier provided in another embodiment of the present application.

[0025] Figure 5 Shown is a top view of a transfer device and a sheet material provided in one embodiment of the present application.

[0026] Figure 6 Shown Figure 5 A partial enlarged view of the transfer device and the sheet material in area A is shown.

[0027] Figure 7 Shown is a schematic structural diagram of a transfer device and a sheet material provided in one embodiment of the present application.

[0028] Figure 8 Shown Figure 7 A partial enlarged view of the transfer device and the sheet material in area B is shown.

[0029] Fig. 9 Shown is a schematic structural diagram of a bearing assembly provided in one embodiment of the present application.

[0030] Fig.10 Shown Fig. 9 A partial enlarged view of the load-bearing component in area C is shown.

[0031] Fig.11 Shown is a schematic structural diagram of a sheet material provided in one embodiment of the present application.

[0032] Fig.12 Shown is a schematic structural diagram of a sheet material transporting device provided in one embodiment of the present application.

[0033] Fig.13Shown is a schematic structural diagram of a carrier and a sheet material provided in one embodiment of the present application.

[0034] Fig.14 Shown Fig.13 A partial enlarged view of the carrier and the sheet material in area D is shown.

[0035] Fig.15 Shown is a side view of a carrier and a sheet material provided in one embodiment of the present application.

[0036] Fig.16 Shown Fig.15 A partial enlarged view of the carrier and the sheet material in area E is shown.

[0037] Fig.17 Shown Fig.12 The sheet material handling device shown does not include a structural schematic diagram of a sheet grabbing mechanism.

[0038] Fig.18 Shown Fig.17 The sheet material handling device is shown in a partially enlarged view of the F area.

[0039] Fig.19 Shown is a schematic structural diagram of a grabbing mechanism provided in one embodiment of the present application.

[0040] Fig. 20 Shown is a schematic diagram of an application scenario of a loading and unloading device provided in one embodiment of the present application.

[0041] Fig.21 Shown is a schematic structural diagram of a copper electroplating production line provided in one embodiment of the present application.

[0042] Reference numerals:

[0043] 14. Copper electroplating production line; 1. Loading and unloading equipment; 10. Loading and unloading equipment; 101. Loading position; 102. Loading and unloading position; 103. Unloading position; 100. Transfer device; 110. Carrying assembly; 1101. First accommodating space; 1110. Carrying plate; 1120. First support member; 1130. First stop member; 1131. Guide surface; 120. First driving source; 130. First slide rail; 140. First slider; 200. Turning device; 210. Conveying mechanism; 220. Turning mechanism; 230. Clamping and positioning mechanism; 240. Turning frame; 2401. Placement space; 300. Sheet material handling device; 310. Linear driving mechanism; 320. Sheet grabbing mechanism; 3210. Fourth driving source; 3220. Sheet grabbing assembly; 330. Vertical driving Driving mechanism; 340, hook mechanism; 3410, hook assembly; 3411, second driving source; 3412, third driving source; 3413, hook; 3414, connecting piece; 350, supporting assembly; 450, carrier transport device; 400, first carrier transport device; 500, second carrier transport device; 2, sheet material; 21, first surface; 22, second surface; 23, side of sheet material; 3, carrier; 31, first side; 32, second side; 301, carrier plate; 302, pressing sheet; 3021, first end of pressing sheet; 3022, second end of pressing sheet; 303, second supporting piece; 304, second limiting piece; 3001, second accommodating space; 3010, blocking bar; X1, first direction; X2, second direction; 4, copper electroplating equipment. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0045] The specific structure of the loading and unloading equipment is described below in conjunction with the embodiments.

[0046] Figure 1 The figure shows a schematic diagram of the structure of a loading and unloading device provided in one embodiment of the present application. Figure 1 As shown, the handling device 10 is configured to load the sheet material 2 onto the carrier 3 , or unload the sheet material 2 from the carrier 3 .

[0047] The loading and unloading equipment 10 includes a transfer device 100, a turning device 200 and a sheet material conveying device 300. The transfer device 100 is configured to transport an unprocessed sheet material 2 or a processed sheet material 2. The turning device 200 is disposed adjacent to the transfer device 100, and is configured to carry and transport a carrier 3, and to turn the carrier 3 over. The carrier 3 has a first surface 31 and a second surface 32 disposed opposite to each other, and both the first surface 31 and the second surface 32 can be loaded with a sheet material 2. The sheet material conveying device 300 is disposed adjacent to the transfer device 100 and the turning device 200, and is configured to convey the unprocessed sheet material 2 on the transfer device 100 to the first surface 31 and the second surface 32 of the carrier 3 before and after the turning device 200 is turned over, respectively, or to convey the processed sheet material 2 loaded on the carrier 3 to the transfer device 100.

[0048] The loading and unloading equipment 10 utilizes the transferring device 100 to automatically transport the sheet material 2, utilizes the flipping device 200 to automatically transport the carrier 3 that can be loaded with the sheet material 2 on both sides, and flips the carrier 3 so that the sheet material 2 can be loaded and unloaded on both sides of the carrier 3, utilizes the sheet material transporting device 300 to automatically transport the unprocessed sheet material 2 from the transferring device 100 to both sides of the carrier 3 to realize the automatic loading of the sheet material 2, or utilizes the sheet material transporting device 300 to automatically transport the processed sheet material 2 from the carrier 3 to the transferring device 100 to realize the automatic unloading of the sheet material 2 by the loading and unloading equipment 10, thereby improving the loading and unloading efficiency of the sheet material 2.

[0049] Exemplarily, the transfer device 100 may include a driving component and a grabbing component connected to the driving component, the grabbing component is used to grab the sheet material 2, and the driving component is used to drive the grabbing component to move to transport the sheet material 2. Exemplarily, the driving component may be a robot arm, a linear module, or other structures with a driving function. Exemplarily, the grabbing component may be a gripper, a suction cup, or other structures with a grabbing function.

[0050] Exemplarily, the flipping device 200 may include a manipulator, which is used to grab and transport the carrier 3 and flip the carrier 3. The flipping device 200 may also include a rotary cylinder and a grabbing member connected to the rotary cylinder, which is used to grab the carrier 3 and is used to rotate the grabbing member by the rotary cylinder to flip the carrier 3. The flipping device 200 may also include other structures with transportation, bearing and flipping functions.

[0051] Exemplarily, the sheet material transporting device 300 may include a driving mechanism and a grasping mechanism, the grasping mechanism is used to grasp the sheet material 2, and the driving mechanism is used to drive the grasping mechanism to move so as to transport the sheet material 2. Exemplarily, the driving mechanism may include a mechanical arm, a linear module, or other structures with a driving function. Exemplarily, the grasping mechanism may include a gripper, a suction cup, or other structures with a grasping function.

[0052] Exemplarily, the sheet material 2 may be a product such as a silicon wafer, a battery panel, or a glass substrate.

[0053] In some embodiments, Figure 2 and Figure 3 As shown, the flipping device 200 includes a flipping frame 240, two sets of conveying mechanisms 210 and a flipping mechanism 220 arranged opposite to each other, the flipping frame 240 has a placement space 2401 for accommodating the carrier 3, the two sets of conveying mechanisms 210 are arranged in the placement space 2401 of the flipping frame 240, and the flipping mechanism 220 is arranged on the flipping frame 240 and is configured to flip the flipping frame 240. When the carrier 3 is located between the two sets of conveying mechanisms 210, the conveying mechanism 210 located at the bottom carries and transports the carrier 3.

[0054] The flipping device 200 uses the flipping mechanism 220 to flip the flipping frame 240, so that the flipping frame 240 drives the conveying mechanism 210 and the carrier 3 carried by the conveying mechanism 210 to flip, so that the sheet material 2 can be loaded and unloaded on both sides of the carrier 3, and two sets of conveying mechanisms 210 are used to carry and transport the carrier 3 before and after flipping respectively. There is no need to flip the flipped carrier 3 back to its original position and then continue to transport the carrier 3, thereby improving the transportation efficiency of the flipping device 200 for the carrier 3, so as to further improve the loading and unloading efficiency of the loading and unloading equipment 10 for the sheet material 2.

[0055] For example, the conveying mechanism 210 may be transported by a conveyor belt, a linear module, or other transport methods. For example, the flipping mechanism 220 may include a mechanical arm, a rotary cylinder, or other structures with a flipping function.

[0056] For example, Figure 4 As shown, the flipping device 200 further includes a clamping and positioning mechanism 230. The clamping and positioning mechanism 230 is used to clamp and position the carrier 3, which can prevent the carrier 3 from shifting or even falling during the flipping of the conveying mechanism 210, and improve the positioning accuracy of the carrier 3 on the conveying mechanism 210, so that the sheet material 2 can be accurately taken and placed on the carrier 3. Exemplarily, the clamping and positioning mechanism 230 is arranged on the flipping frame 240, and is located on the upper side or the lower side of the placement space 2401.

[0057] In some embodiments, Figure 1 As shown, the transfer device 100 includes one or more bearing components 110 and one or more first driving sources 120, and the bearing component 110 is configured to carry unprocessed sheet materials 2 or processed sheet materials 2. The first driving source 120 is connected to the bearing component 110 and is configured to drive the bearing component 110 to move. The transfer device 100 includes a loading position 101, a loading and unloading position 102, and a unloading position 103. The sheet material handling device 300 inserts and unloads the sheet material 2 between the bearing component 110 at the loading and unloading position 102 and the turning device 200, and the first driving source 120 can drive the bearing component 110 to move between the loading and unloading position 101, the loading and unloading position 102, and the unloading position 103.

[0058] Exemplarily, the first driving source 120 may be a robotic arm, a linear module, or other structures capable of providing driving force.

[0059] Exemplarily, the transfer device 100 includes a bearing assembly 110 and a first driving source 120 , and the first driving source 120 drives the bearing assembly 110 to move so that the bearing assembly 110 can move between a loading position 101 , a loading and unloading position 102 , and a unloading position 103 .

[0060] In some embodiments, Figure 1 , Figure 5 and Figure 7 As shown, the transfer device 100 includes two bearing assemblies 110, and the two bearing assemblies 110 are arranged at intervals along the first direction X1. One bearing assembly 110 is configured to carry an unprocessed sheet material 2, and the other bearing assembly 110 is configured to carry a processed sheet material 2. The transfer device 100 includes a loading position 101, a loading and unloading position 102, and a unloading position 103 arranged in sequence along the first direction X1. One bearing assembly 110 can go back and forth between the loading and unloading position 101 and the loading and unloading position 102, and the other bearing assembly 110 can go back and forth between the loading and unloading position 102 and the unloading position 103.

[0061] Exemplarily, the number of the first driving source 120 is one, and the first driving source 120 is connected to the two supporting assemblies 110 respectively, so that the first driving source 120 can drive the two supporting assemblies 110 to move simultaneously along the first direction X1.

[0062] Exemplarily, the first driving source 120 is a cylinder. Exemplarily, the two bearing assemblies 110 are connected to each other, the first driving source 120 is located on one side of one bearing assembly 110 and is connected to one bearing assembly 110, the first driving source 120 drives one bearing assembly 110 to move along the first direction X1, and the one bearing assembly 110 drives the other bearing assembly 110 to move along the first direction X1.

[0063] Exemplarily, in the process of loading the sheet material 2, the first driving source 120 drives the carrying component 110 to move along the first direction X1, so that one carrying component 110 moves along the first direction X1 to the loading position 101, so that the unprocessed sheet material 2 can be loaded onto the one carrying component 110 at the loading position 101, and the first driving source 120 drives the carrying component 110 to move along the first direction X1, so that the carrying component 110 carrying the unprocessed sheet material 2 moves from the loading position 101 to the loading and unloading position 102, so that the sheet material handling device 300 can transport the unprocessed sheet material 2 carried by the carrying component 110 located at the loading and unloading position 102 to the empty carrier 3 carried by the flipping device 200.

[0064] Exemplarily, during the process of unloading the sheet material 2, the first driving source 120 drives the carrying component 110 to move so that another unloaded carrying component 110 moves along the first direction X1 to the loading and unloading position 102, so that the sheet material handling device 300 can transport the processed sheet material 2 loaded by the carrier 3 carried by the flipping device 200 to the unloaded carrying component 110 located at the loading and unloading position 102. The first driving source 120 drives the carrying component 110 to move along the first direction X1, so that the carrying component 110 carrying the processed sheet material 2 moves from the loading and unloading position 102 to the unloading position 103, so as to unload the processed sheet material 2 on the carrying component 110 at the unloading position 103.

[0065] In some embodiments, Figures 5 to 11 As shown, the bearing assembly 110 includes a bearing plate 1110, a plurality of first support members 1120 and a plurality of first stop members 1130. The bearing plate 1110 is connected to the first driving source 120 and moves along the first direction X1 under the drive of the first driving source 120. The bearing plate 1110 includes a plurality of first accommodating spaces 1101, and the first accommodating spaces 1101 are configured to accommodate sheet materials 2. The plurality of first support members 1120 are connected to the bearing plate 1110 and configured to support sheet materials 2. The first support members 1120 are located above the bearing plate 1110, and each first accommodating space 1101 is formed by two or more adjacent first support members 1120. The plurality of first stop members 1130 are located above the bearing plate 1110 and connected to the bearing plate 1110, and are configured to abut against the side surface 23 of the sheet material to limit the sheet material 2. The first stopper 1130 has a guide surface 1131 at the end close to the first accommodation space 1101, and the guide surface 1131 is configured to guide the sheet material 2 to enter and exit the first accommodation space 1101. Exemplarily, in the vertical downward direction, the distance between the opposite guide surfaces 1131 gradually decreases.

[0066] Exemplarily, the sheet material 2 further has a first surface 21 and a second surface 22, and a side surface 23 of the sheet material connects the first surface 21 and the second surface 22. The plurality of first support members 1120 are arranged in multiple rows and columns, and each first accommodation space 1101 is formed by two adjacent first support members 1120 in one column. When the sheet material 2 is located in the first accommodation space 1101, the first support member 1120 can contact the second surface 22.

[0067] For example, Fig. 9 As shown, the plurality of first support members 1120 are arranged in four rows and three columns, a first accommodation space 1101 is formed between two adjacent first support members 1120 in the same column, and the bearing assembly 110 has 12 first accommodation spaces 1101. Exemplarily, when the sheet material 2 is located in the first accommodation space 1101, two adjacent first support members 1120 can contact both ends of the second surface 22 of the sheet material 2, so that the two first support members 1120 can stably support the sheet material 2.

[0068] For example, Fig.10 As shown, a plurality of first limiting members 1130 are located above the first supporting member 1120 and connected to the first supporting member 1120 .

[0069] Exemplarily, the material of the first support member 1120 is a non-metal material. Exemplarily, the non-metal material may be plastic, rubber, etc. The first support member 1120 made of a non-metal material is used to support the sheet material 2 to avoid damage to the sheet material 2 as much as possible.

[0070] Exemplarily, the material of the first stopper 1130 is a non-metallic material. Exemplarily, the non-metallic material may be plastic, rubber, etc. The first stopper 1130 made of non-metallic material abuts against the side surface 23 of the sheet material to avoid damage to the sheet material 2 as much as possible. In addition, the guide surface 1131 of the first stopper 1130 made of non-metallic material is used to guide the sheet material 2 to enter and exit the first accommodating space 1101, so as to reduce the friction generated between the sheet material 2 and the guide surface 1131 during the process of the sheet material 2 entering and exiting the first accommodating space 1101 as much as possible, thereby avoiding damage to the sheet material 2 as much as possible.

[0071] In some embodiments, the transfer device 100 further includes one or more first slide rails 130 and two or more first sliders 140, wherein the first slide rails 130 extend along the first direction X1 and are located below the bearing assembly 110. One or more first sliders 140 are slidably connected to the first slide rails 130, and each bearing assembly 110 is connected to one or more first sliders 140.

[0072] The first slide rail 130 and the first slider 140 are used to guide the movement of the bearing assembly 110 to improve the movement accuracy of the bearing assembly 110 .

[0073] For example, Figure 5 , Figure 7 and Figure 8 As shown, the transfer device 100 includes two first slide rails 130 and a plurality of first sliders 140, the two first slide rails 130 are located at both ends below the carrier plate 1110, and the plurality of first sliders 140 are connected to one carrier plate 1110 and slidably connected to the first slide rails 130. The two first slide rails 130 and the plurality of first sliders 140 are used to guide the movement of the carrier assembly 110, so as to further improve the movement accuracy and stability of the carrier assembly 110.

[0074] In some embodiments, Figure 1 and Fig.12 As shown, the sheet material transporting device 300 includes a linear drive mechanism 310 and a grabbing mechanism 320. The linear drive mechanism 310 is arranged above the transfer device 100 and the flip device 200 along the second direction X2. The second direction X2 intersects with the direction in which the transfer device 100 transports the sheet material 2. The grabbing mechanism 320 is connected to the linear drive mechanism 310. The grabbing mechanism 320 is arranged on a side of the linear drive mechanism 310 close to the flip device 200. Under the drive of the linear drive mechanism 310, the grabbing mechanism 320 moves along the second direction X2 to above the carrier 3 carried by the bearing assembly 110 or the flip device 200. At the same time, the grabbing mechanism 320 can move in the vertical direction to grab and place the sheet material 2.

[0075] Exemplarily, the second direction X2 is perpendicular to the first direction X1.

[0076] For example, the linear drive mechanism 310 can be transported by a conveyor belt, a gantry, a linear module, or other transport methods. For example, the linear drive mechanism 310 includes a motor, a gear, a rack, and other structures, and the gear and the rack are engaged to drive the grabbing mechanism 320 to move along the second direction X2.

[0077] In some embodiments, Fig.11 , Figures 13 to 16As shown, the carrier 3 includes a carrier plate 301 and a plurality of pressing plates 302. The carrier plate 301 has a first surface 31 and a second surface 32 that are arranged opposite to each other. The first surface 31 and the second surface 32 both include a plurality of second accommodating spaces 3001, and the second accommodating spaces 3001 are configured to accommodate sheet materials 2. The plurality of pressing plates 302 are arranged on the first surface 31 and the second surface 32, and the first end 3021 of the pressing plate is connected to the first surface 31 or the second surface 32. The second end 3022 of the pressing plate can be driven to press the sheet material 2 or deviate from the second accommodating space 3001, so that the sheet material 2 is pressed or released from the carrier plate 301. When the sheet material 2 is released from being pressed, the grabbing mechanism 320 moves in the vertical direction to grab or place the sheet material 2 in the second accommodating space 3001.

[0078] In some embodiments, Fig.13 and Fig.14 As shown, the carrier 3 is provided with more than two pressing tablet groups, and the plurality of pressing tablet groups are arranged in a straight line. Each pressing tablet group includes a plurality of pressing tablets 302 arranged in sequence in a straight line direction, and the arrangement direction of the pressing tablets 302 is perpendicular to the arrangement direction of the pressing tablet group. Two adjacent pressing tablet groups can press the two opposite sides of the same sheet material 2, or two adjacent pressing tablet groups can press the adjacent sides of two sheet materials 2. The pressing tablets 302 in the same pressing tablet group are arranged in parallel in sequence at equal intervals. The pressing tablet 302 has elastic deformation, and when the second end 3022 of the pressing tablet is separated from the sheet material 2, the pressing tablet 302 is driven to deform toward the first end 3021 of the pressing tablet, so that the second end 3022 of the pressing tablet can deviate from the second accommodating space 3001 and separate from the sheet material 2.

[0079] In some embodiments, Figures 13 to 16 As shown, the carrier 3 further includes a plurality of second support members 303 and a plurality of second stop members 304. The first surface 31 or the second surface 32 is connected with a plurality of second support members 303, or the first surface 31 and the second surface 32 are both connected with a plurality of second support members 303, and the second support members 303 are configured to support the sheet material 2. The first surface 31 or the second surface 32 is connected with a plurality of second stop members 304, or the first surface 31 and the second surface 32 are both connected with a plurality of second stop members 304, and the second stop members 304 are configured to abut against the side surface 23 of the sheet material. The plurality of pressing sheets 302 are located outside the second accommodating space 3001, and are arranged adjacent to the plurality of second support members 303 one by one, and the second end 3022 of the pressing sheet can abut against a side of the sheet material 2 away from the carrier 301, so as to press the sheet material 2 against the second support member 303.

[0080] The sheet material 2 is supported by multiple second support members 303 to reduce the contact area between the carrier 301 and the sheet material 2, so as to avoid damage to the sheet material 2 as much as possible. The sheet material 2 is limited by multiple second position limiting members 304, and the sheet material 2 is pressed against the second support member 303 by multiple pressing sheets 302 to prevent the sheet material 2 from shifting on the carrier 301, thereby preventing the sheet grabbing mechanism 320 from being unable to accurately grab the sheet material 2 due to the displacement of the sheet material 2. Once the sheet grabbing mechanism 320 is unable to accurately grab the sheet material 2, the sheet material 2 may be damaged.

[0081] Exemplarily, multiple second support members 303 and multiple second limiting members 304 located on the same surface of the carrier 301 form a second accommodating space 3001. When the sheet material 2 is located in the second accommodating space 3001, the second support members 303 can contact one side of the sheet material 2, and the second limiting members 304 can abut against the side surface 23 of the sheet material.

[0082] Exemplarily, the plurality of second accommodating spaces 3001 are regularly arranged so that the sheet materials 2 are regularly arranged on the carrier 3. Exemplarily, one side of the carrier 3 has 12 second accommodating spaces 3001, and the 12 second accommodating spaces 3001 are arranged in four rows and three columns, and one side of the carrier 3 can load 12 sheets of sheet materials 2. One carrier 3 can load 24 sheets of sheet materials 2.

[0083] Exemplarily, the pressing sheet 302 is an elastic pressing sheet. Exemplarily, the pressing sheet 302 includes an elastic structure, which can realize elastic contact between the pressing sheet 302 and the sheet material 2 to avoid damage to the sheet material 2 caused by rigid contact between the pressing sheet 302 and the sheet material 2.

[0084] Exemplarily, the pressing sheet 302 is a non-elastic pressing sheet, and the material of the pressing sheet 302 is a non-metallic material. Exemplarily, the non-metallic material can be plastic, rubber, etc. The pressing sheet 302 made of non-metallic material is used to abut against the sheet material 2 to avoid damage to the sheet material 2 as much as possible.

[0085] Exemplarily, both ends of the carrier 301 have baffles 3010, and the baffles 3010 and the carrier 301 form a groove. During the processing of the sheet material 2, if water vapor adheres to the surface of the sheet material 2, the groove can receive the water vapor to prevent excessive water vapor from adhering to the surface of the sheet material 2 and affecting the quality of the sheet material 2.

[0086] In some embodiments, Figure 1 , Figure 12 to Figure 14As shown, the sheet material handling device 300 further includes a vertical driving mechanism 330 and a hook mechanism 340. The sheet grabbing mechanism 320 is connected to the linear driving mechanism 310 through the vertical driving mechanism 330. The vertical driving mechanism 330 is arranged on a side of the linear driving mechanism 310 close to the flipping device 200. The hook mechanism 340 is connected to the vertical driving mechanism 330 and moves in a vertical direction under the drive of the vertical driving mechanism 330. The hook mechanism 340 includes a plurality of hooks 3413, and the hooks 3413 are driven to hook the pressing sheet 302 so that the second end 3022 of the pressing sheet is away from the sheet material 2. At the same time, the sheet grabbing mechanism 320 can move in a vertical direction to grab or place the sheet material 2 in the second accommodating space 3001.

[0087] The linear drive mechanism 310 is used to drive the vertical drive mechanism 330 to move along the second direction X2, and the vertical drive mechanism 330 drives the grabbing mechanism 320 and the hook mechanism 340 to move synchronously along the second direction X2. When the grabbing mechanism 320 and the hook mechanism 340 are located above the carrier 3 carried by the flipping device 200, the vertical drive mechanism 330 drives the hook mechanism 340 to move along the vertical direction to the pressing sheet 302 close to the carrier 3, and the hook mechanism 340 moves in the vertical direction and in the direction close to the pressing sheet 302, and the hook 3413 hooks the pressing sheet 302, so that the second end 3022 of the pressing sheet is away from the sheet material 2, and the sheet material 2 is released. At the same time, the grabbing mechanism 320 moves in the vertical direction and grabs the sheet material 2 on the carrier 3, or places the sheet material 2 on the carrier 3.

[0088] Exemplarily, the pressing sheet 302 is made of an elastic material and has certain elastic deformation properties. When the hook mechanism 340 moves in the vertical direction and in the direction close to the pressing sheet 302 and hooks the pressing sheet 302, and the second end 3022 of the pressing sheet is separated from the sheet material 2, the pressing sheet 302 is driven to undergo elastic deformation in the direction of the first end 3021 of the pressing sheet, so that the second end 3022 of the pressing sheet can be away from the sheet material 2.

[0089] Exemplarily, the vertical drive mechanism 330 may adopt a linear module transport method, a conveyor belt transport method, or other transport methods.

[0090] In some embodiments, Figures 12 to 18 As shown, the sheet material handling device 300 further includes a support assembly 350, which is connected to the vertical drive mechanism 330. The hook mechanism 340 includes a plurality of hook assemblies 3410, which are slidably connected to the support assembly 350. The hook assemblies 3410 can move in a vertical direction and in a direction close to the pressing sheet 302, and hook the pressing sheet 302 to move the second end 3022 of the pressing sheet away from the sheet material 2, and release the sheet material 2.

[0091] Since there are more than two pressing tablet groups on the carrier 301, multiple pressing tablet groups are arranged in sequence along a straight line (the first direction X1 in this embodiment). Each pressing tablet group includes multiple pressing tablets 302 arranged in sequence at equal intervals along a straight line direction (the second direction X2 in this embodiment), and the arrangement direction of the above pressing tablets 302 is perpendicular to the arrangement direction of the pressing tablet group. Correspondingly, the hook mechanism 340 includes multiple groups of hook components 3410, and multiple groups of hook components 3410 are arranged in a straight line (the first direction X1 in this embodiment). At the same time, each hook component 3410 includes multiple hooks 3413 arranged in sequence at equal intervals along a straight line direction (the second direction X2 in this embodiment), and when the hook component 3410 approaches the pressing tablet 302 in the vertical direction, the pressing tablet group corresponds to the hook component 3410 one by one, so that each hook 3413 corresponds to a pressing tablet 302 and hooks the pressing tablet 302.

[0092] In some embodiments, the hook assembly 3410 includes one or more second drive sources 3411, one or more third drive sources 3412, a plurality of hooks 3413 and a connector 3414. The second drive source 3411 is connected to the support assembly 350. The third drive source 3412 can be slidably connected to the support assembly 350 in a direction close to or away from the second accommodating space 3001. A plurality of hooks 3413 are jointly arranged on the connector 3414 and connected to the second drive source 3411 and the third drive source 3412 through the connector 3414. Driven by the second drive source 3411, the hook 3413 can be inserted into or away from the area between the pressing sheet 302 and the carrier plate 301, so that the hook 3413 moves in a direction close to or away from the second accommodating cavity 3001. The crochet hook 3413 drives the third driving source 3412 to approach or move away from the second accommodating space 3001 in the vertical direction. When the second driving source 3411 drives the crochet hook 3413 to the area between the pressing sheet 302 and the carrier 301, the third driving source 3412 can drive the crochet hook 3413 to move in the vertical direction, so that the crochet hook 3413 hooks the pressing sheet 302 and makes the second end 3022 of the pressing sheet move away from the sheet material 2, so that the sheet material 2 and the carrier 301 are released from being pressed.

[0093] The vertical driving mechanism 330 is used to simultaneously drive the multiple groups of hook needle assemblies 3410 to move in the vertical direction, so that the multiple groups of hook needle assemblies 3410 are simultaneously close to or away from the pressing sheet 302.

[0094] Exemplarily, the hook mechanism 340 includes four groups of hook assemblies 3410 , and the four groups of hook assemblies 3410 simultaneously hook the multiple pressing sheets 302 outside the four rows of second accommodating spaces 3001 of the carrier 3 .

[0095] Exemplarily, the hook assembly 3410 includes a second driving source 3411 and two third driving sources 3412. The two third driving sources 3412 are located on both sides of the second driving source 3411.

[0096] Exemplarily, the second driving source 3411 may be a slide cylinder, an oil cylinder, etc., and the third driving source 3412 may be an air cylinder, an oil cylinder, etc.

[0097] In some embodiments, Fig.12 and Fig.19 As shown, the grabbing mechanism 320 includes a fourth driving source 3210 and a plurality of grabbing components 3220. The fourth driving source 3210 is connected to the vertical driving mechanism 330, and the grabbing components 3220 are connected to the fourth driving source 3210. Under the drive of the fourth driving source 3210, the plurality of grabbing components 3220 can move in the vertical direction at the same time and grab and place a plurality of sheet materials 2.

[0098] Exemplarily, the fourth driving source 3210 is connected to the supporting assembly 350 , and the supporting assembly 350 is connected to the vertical driving mechanism 330 .

[0099] Exemplarily, the grabbing mechanism 320 includes 12 groups of grabbing assemblies 3220, which are arranged in four rows and three columns. The 12 groups of grabbing assemblies 3220 can grab and place 12 sheets of sheet materials 2 at the same time.

[0100] Exemplarily, the fourth driving source 3210 may be an air cylinder, an oil cylinder, or the like.

[0101] Exemplarily, the grasping piece assembly 3220 includes four suction cups, which respectively absorb four edge positions of the sheet material 2 to reduce the contact area between the grasping piece assembly 3220 and the sheet material 2 and ensure that the grasping piece assembly 3220 stably grasps the sheet material 2.

[0102] Exemplarily, when the multiple grabbing pieces assemblies 3220 grab multiple sheets of sheet material 2 from the transfer device 100 , the distance between two adjacent sheets of sheet material 2 will be shortened so that the sheet material 2 can be accurately placed in the second receiving space 3001 of the carrier 3 carried by the flipping device 200 .

[0103] In some embodiments, the loading and unloading equipment 10 also includes one or more carrier transport devices 450, which are arranged adjacent to the flipping device 200 and on one side or both sides of the flipping device 200. The carrier transport device 450 is configured to transport an empty carrier 3 or a carrier 3 loaded with processed sheet materials 2 or a carrier 3 loaded with unprocessed sheet materials 2.

[0104] For example, Figure 1As shown, the loading and unloading equipment 10 includes a first carrier transport device 400 and a second carrier transport device 500. The first carrier transport device 400 is disposed adjacent to the flip device 200 and is configured to transport an empty carrier 3 or a carrier 3 loaded with processed sheet materials 2 or a carrier 3 loaded with unprocessed sheet materials 2. The second carrier transport device 500 is located on a side of the flip device 200 away from the first carrier transport device 400, and the second carrier transport device 500 is configured to transport a carrier 3 loaded with unprocessed sheet materials 2 or an empty carrier 3 or a carrier 3 loaded with processed sheet materials 2.

[0105] The first carrier transport device 400 and the second carrier transport device 500 are used to automatically transport the carrier 3 to further improve the automation level of the loading and unloading equipment 10 .

[0106] For example, the first carrier transport device 400 may adopt a linear module transport method, a conveyor belt transport method, or other transport methods.

[0107] For example, the second carrier transport device 500 may adopt a linear module transport method, a conveyor belt transport method, or other transport methods.

[0108] Fig. 20 The figure shows a schematic diagram of an application scenario of a loading and unloading device provided in an embodiment of the present application. Fig. 20 As shown, the loading and unloading equipment 1 includes the loading and unloading equipment 10 and the transportation equipment 20 mentioned in the above embodiment, and the loading and unloading equipment 10 is configured to load the sheet material 2 onto the carrier 3, or unload the sheet material 2 from the carrier 3. The transportation equipment 20 is configured to transport the carrier 3 to the loading and unloading equipment 10, or receive and transport the carrier 3 on the loading and unloading equipment 10.

[0109] Exemplarily, the transport device 20 may adopt a transport mode of a transport cart, a conveyor belt or a robot arm, and may also adopt other transport modes.

[0110] The transport equipment 20 is used to automatically transport the carrier 3 , thereby improving the transport efficiency of the carrier 3 , thereby improving the loading and unloading efficiency of the loading and unloading equipment 1 .

[0111] Since the loading and unloading equipment 1 includes the loading and unloading equipment 10 , the loading and unloading equipment 1 includes all the technical features and technical effects of the loading and unloading equipment 10 , which will not be repeated here.

[0112] Fig.21 The figure shows a schematic diagram of the structure of a copper electroplating production line provided by an embodiment of the present application. Fig.21As shown, the copper electroplating production line 14 includes the loading and unloading equipment 1 and the copper electroplating equipment 4 as mentioned in the above embodiment. The copper electroplating equipment 4 is configured to perform a copper electroplating process on the sheet material 2. The loading and unloading equipment 1 is arranged adjacent to the copper electroplating equipment 4, and is configured to transport the sheet material 2 to the copper electroplating equipment 4, or to receive and transport the sheet material 2 in the copper electroplating equipment 4.

[0113] By improving the loading and unloading efficiency of the loading and unloading equipment 1, the production efficiency of the copper electroplating equipment 4 is improved and the production capacity of the copper electroplating equipment 4 is increased.

[0114] Exemplarily, the working process of the loading and unloading equipment 1 is: the transportation equipment 20 transports the empty carrier 3 to the first carrier transportation device 400, the first carrier transportation device 400 receives and transports the empty carrier 3, the flipping device 200 receives the empty carrier 3 delivered by the first carrier transportation device 400, and transports the empty carrier 3 to a preset position, and the empty carrier 3 is loaded with unprocessed sheet material 2 at the preset position.

[0115] A carrying assembly 110 of the transfer device 100 carries the unprocessed sheet material 2 at the loading position 101 and moves from the loading position 101 to the loading and unloading position 102 along the first direction X1.

[0116] The linear drive mechanism 310 of the sheet material transporting device 300 drives the vertical drive mechanism 330 to move along the second direction X2, and the vertical drive mechanism 330 drives the grabbing mechanism 320 and the hook mechanism 340 to move along the second direction X2 to above the carrying assembly 110 carrying the unprocessed sheet material 2. The vertical drive mechanism 330 drives the grabbing mechanism 320 and the hook mechanism 340 to move in the vertical direction to approach the carrying assembly 110, and the grabbing mechanism 320 moves in the vertical direction to grab the unprocessed sheet material 2 carried by the carrying assembly 110. The grabbing mechanism 320 moves in the vertical direction to move the unprocessed sheet material 2 away from the carrying assembly 110.

[0117] The linear drive mechanism 310 drives the vertical drive mechanism 330 to move along the second direction X2, and the vertical drive mechanism 330 drives the grabbing mechanism 320 and the hook mechanism 340 to move along the second direction X2 to above the empty carrier 3 carried by the flipping device 200. The vertical drive mechanism 330 drives the grabbing mechanism 320 and the hook mechanism 340 to move in the vertical direction to approach the empty carrier 3. The hook mechanism 340 moves in the vertical direction and in the direction close to the pressing sheet 302 of the carrier 3, and hooks the pressing sheet 302, and the hook mechanism 340 moves in the vertical direction to move the second end 3022 of the pressing sheet away from the carrier 301.

[0118] The sheet grabbing mechanism 320 moves in a vertical direction to place the unprocessed sheet material 2 on one side of the carrier 3 carried by the turning device 200 .

[0119] The flipping device 200 flips the carrier 3 , and the transfer device 100 and the sheet material transporting device 300 repeat the above process to place the unprocessed sheet material 2 on the other side of the carrier 3 , thereby completing the loading of the unprocessed sheet material 2 onto the carrier 3 .

[0120] The flipping device 200 transports the carrier 3 loaded with the unprocessed sheet material 2, and the second carrier transport device 500 receives and transports the carrier 3 loaded with the unprocessed sheet material 2 transported by the flipping device 200. The transport device 20 receives the carrier 3 loaded with the unprocessed sheet material 2 transported by the second carrier transport device 500, and transports the carrier 3 loaded with the unprocessed sheet material 2 to the copper electroplating device 4.

[0121] Since the copper electroplating production line 14 includes the loading and unloading equipment 1, the copper electroplating production line 14 includes all the technical features and technical effects of the loading and unloading equipment 1, which will not be repeated here.

[0122] In the embodiments of the present disclosure, if not clearly defined, the connection may be in the form of detachable connection by means of bolts and nuts, screws, buckles, magnets, etc. In some connections, if there is no special requirement for detachable matching, non-detachable connection may be achieved by means of welding, bonding, etc.

[0123] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0124] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0125] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0126] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0127] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A loading and unloading equipment, characterized in that: configured to load sheet material into a carrier, or unload the sheet material from the carrier; Wherein, the loading and unloading equipment includes: A transfer device, configured to transport the unprocessed sheet material or the processed sheet material; a flipping device, disposed adjacent to the transfer device, configured to carry and transport a carrier and capable of flipping the carrier, wherein the carrier has a first surface and a second surface disposed opposite to each other, and both the first surface and the second surface can be loaded with the sheet material; The sheet material transporting device is arranged adjacent to the transferring device and the turning device, and is configured to transport the unprocessed sheet material on the transferring device to the first surface and the second surface of the carrier before and after the turning device turns the sheet material, respectively, or to transport the processed sheet material loaded on the carrier to the transferring device.

2. The loading and unloading equipment according to claim 1, characterized in that: The turning device comprises: A flip frame having a placement space for accommodating the carrier; Two sets of conveying mechanisms are arranged opposite to each other and are arranged in the placement space of the flip frame; A flipping mechanism, disposed on the flipping frame and configured to flip the flipping frame; Wherein, when the carrier is located between two groups of the conveying mechanisms, the conveying mechanism located below carries and transports the carrier.

3. The loading and unloading equipment according to claim 1, characterized in that: The transfer device comprises: One or more supporting components, configured to support the unprocessed sheet material or the processed sheet material; One or more first driving sources, connected to the bearing assembly and configured to drive the bearing assembly to move; Among them, the transfer device includes a loading position, a loading and unloading position and a unloading position, the sheet material handling device inserts and unloads the sheet material between the bearing component at the loading and unloading position and the flipping device, and the first driving source can drive the bearing component to move between the loading position, the loading and unloading position and the unloading position.

4. The loading and unloading equipment according to claim 1, characterized in that: The transfer device comprises: Two carrying assemblies, the two carrying assemblies are spaced apart along a first direction, wherein one of the carrying assemblies is configured to carry the unprocessed sheet material, and the other of the carrying assemblies is configured to carry the processed sheet material; Among them, the transfer device includes a loading position, a loading and unloading position and a unloading position arranged in sequence along the first direction, one of the bearing components can move back and forth between the loading and unloading position, and the other bearing component can move back and forth between the loading and unloading position and the unloading position.

5. The loading and unloading equipment according to claim 3 or 4, characterized in that: The bearing assembly comprises: A carrying plate moves along a first direction, the carrying plate comprising a plurality of first accommodating spaces, wherein the first accommodating spaces are configured to accommodate the sheet material; A plurality of first support members connected to the carrier plate and configured to support the sheet material, wherein the first support members are located above the carrier plate, and each of the first accommodating spaces is formed by two or more adjacent first support members; A plurality of first stoppers, located above the carrying plate and connected to the carrying plate, and configured to abut against the side surface of the sheet material; Wherein, the first stopper has a guide surface at an end portion close to the first accommodation space, and the guide surface is configured to guide the sheet material to enter and exit the first accommodation space; The transfer device also includes: One or more first slide rails extending along the first direction and located below the bearing assembly; Two or more first sliding blocks are slidably connected to the first sliding rail, and each of the bearing components is connected to one or more first sliding blocks.

6. The loading and unloading equipment according to claim 1, characterized in that: The sheet material conveying device comprises: A linear drive mechanism is disposed above the transfer device and the flip device along a second direction, wherein the second direction intersects with a direction in which the transfer device transports the sheet material; The grabbing mechanism is connected to the linear drive mechanism and is arranged on a side of the linear drive mechanism close to the flipping device. Driven by the linear drive mechanism, the grabbing mechanism moves along the second direction to above the transfer device or the carrier carried by the flipping device. At the same time, the grabbing mechanism can move in the vertical direction to grab and place the sheet material.

7. The loading and unloading equipment according to claim 6, characterized in that: The vehicle comprises: A carrier plate, comprising the first surface and the second surface arranged opposite to each other, wherein the first surface and the second surface each comprise a plurality of second accommodating spaces, and the second accommodating spaces are configured to accommodate the sheet material; A plurality of pressing sheets, arranged on the first surface and the second surface, wherein a first end of the pressing sheet is connected to the first surface or the second surface, and a second end of the pressing sheet can be driven to press the sheet material or deviate from the second accommodation space, so that the sheet material is pressed or released from the carrier; When the sheet material is released from being pressed, the sheet grabbing mechanism moves in a vertical direction to grab or place the sheet material in the second accommodating space.

8. The loading and unloading equipment according to claim 7, characterized in that: The carrier is provided with more than two pressing tablet groups, and the plurality of pressing tablet groups are arranged in a straight line; each pressing tablet group includes a plurality of pressing tablets arranged in sequence in a straight line direction, and the arrangement direction of the pressing tablets is perpendicular to the arrangement direction of the pressing tablet groups; Two adjacent pressing groups can press two opposite sides of the same sheet material; or two adjacent pressing groups can press adjacent sides of two sheet materials; The tablets in the same tablet group are arranged in parallel in sequence with equal spacing; The pressing sheet has elastic deformation. When the second end of the pressing sheet is separated from the sheet material, the pressing sheet is driven to deform toward the first end of the pressing sheet, so that the second end of the pressing sheet can deviate from the second accommodating space and separate from the sheet material.

9. The loading and unloading equipment according to claim 7, characterized in that: The vehicle also includes: a plurality of second support members, disposed on the first surface and / or the second surface, configured to support the sheet material; a plurality of second stoppers, disposed on the first surface and / or the second surface, and configured to abut against the side surface of the sheet material; Among them, the multiple pressing plates are located outside the second accommodating space and are arranged adjacent to the multiple second supporting members one by one. The second end of the pressing plate can abut against the side of the sheet material away from the carrier to press the sheet material against the second supporting member.

10. The loading and unloading equipment according to claim 7, characterized in that: The sheet material transporting device further comprises: A vertical driving mechanism, through which the grabbing mechanism is connected to the linear driving mechanism; A hook mechanism is connected to the vertical driving mechanism, and the hook mechanism includes a plurality of hooks. The hooks are driven to hook the pressing sheet so that the second end of the pressing sheet is away from the sheet material. At the same time, the grabbing sheet mechanism can move in a vertical direction to grab or place the sheet material in the second accommodating space.

11. The loading and unloading equipment according to claim 10, characterized in that: The hook mechanism comprises a plurality of hook assemblies, and the plurality of hook assemblies are arranged in a straight line; each of the hook assemblies comprises: A plurality of the crochet hooks are sequentially arranged along a straight line, wherein the arrangement direction of the crochet hooks is perpendicular to the arrangement direction of the crochet hook assembly; One or more second driving sources, disposed in the vertical driving mechanism and connected to the hook, configured to drive the hook to insert into or move away from the area between the pressing sheet and the carrier plate; One or more third driving sources, disposed in the vertical driving mechanism and connected to the hook needle, configured to drive the hook needle to hook the pressing sheet in a vertical direction and to move the second end of the pressing sheet away from the sheet material; The hook needles in the same hook needle assembly are arranged in parallel in sequence with equal intervals.

12. The loading and unloading equipment according to any one of claims 1 to 11, characterized in that: Also includes: One or more carrier transport devices are arranged adjacent to the flipping device and on one side or both sides of the flipping device, and are configured to transport the empty carrier or the carrier loaded with the processed sheet material or the carrier loaded with the unprocessed sheet material.

13. A loading and unloading equipment, characterized in that: include: The handling device according to any one of claims 1 to 12, configured to load sheet material onto a carrier, or to unload the sheet material from the carrier; The transport equipment is configured to transport the carrier to the loading and unloading equipment, or to receive and transport the carrier on the loading and unloading equipment.

14. A copper electroplating production line, characterized in that: include: A copper electroplating device configured to perform a copper electroplating process on a sheet material; The loading and unloading equipment as described in claim 13 is arranged adjacent to the copper electroplating equipment, and is configured to transport the sheet material to the copper electroplating equipment, or to receive and transport the sheet material in the copper electroplating equipment.

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