Semiconductor product detection, transmission and positioning method and device

Abstract

The invention discloses a semiconductor product detection, transmission and positioning method and device, and the method comprises the steps: S1, feeding: feeding a semiconductor product from an inlet of a transmission mechanism; s2, transmission positioning is carried out, and when the moving material tray passes through a speed reduction sensor, the speed reduction sensor detects a material tray signal; s3, detection analysis: detecting the semiconductor product in a double-sided detection mode; s4, positioning is relieved, and the downward pressure of the pressing plate on the material disc is relieved; and S5, discharging, through the transmission mechanism, a belt line is controlled to run in a decelerating mode when a speed reduction sensor senses a material box, the productivity is improved, meanwhile, the transmission positioning precision is guaranteed, a side edge positioning mechanism is combined to conduct transmission positioning on a material disc, the transmission positioning precision is further improved, and the production efficiency is improved. The reset sensor is additionally arranged in the positioning transmission method, and the next process can be started under the condition that the current process is not finished, so that the time of the whole process flow is saved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor optical detection, and in particular to a semiconductor product detection transmission positioning method and a device thereof. Background Art

[0002] The appearance defect detection of semiconductor products is highly valued in the industry. For example, for IGBT module detection, most of the detection equipment currently used in the industry is belt line online detection. In order to improve production capacity, the belt line transmission speed is often increased. However, too fast a transmission speed may result in the inability to stop in time when reaching the detection position, and may even collide with the limit mechanism, causing damage to the product to be inspected.

[0003] The existing technology is to control the transmission speed of the belt line and select and remove defective products by slowing down the speed, but this will affect the production capacity. In addition, the existing positioning method usually uses a pressure plate to press down and fix the inspected parts when they reach the inspection position. It only positions in a single direction. There may be a certain angle difference in the transmission process of the inspected parts, which directly affects the inspection results. Summary of the invention

[0004] The purpose of the present invention is to solve at least one of the technical problems existing in the prior art, and to provide a semiconductor product detection transmission positioning method and device thereof, which uses a belt line for rapid transmission, and uses a deceleration sensor to control the belt line to decelerate when a material box is sensed, thereby improving production capacity while ensuring transmission positioning accuracy. By combining the side positioning mechanism, the material tray is transmitted and positioned, and the transmission positioning accuracy is further improved. By adding a reset sensor to the positioning transmission method, the next process can be started before the current process is completed, saving time for the entire process and greatly improving production capacity.

[0005] The present invention also provides a semiconductor product detection transmission positioning method as described above, comprising the following steps: S1. Loading: loading semiconductor products from the entrance of the transmission mechanism; S2, transmission positioning, when the moving tray passes through the deceleration sensor, the deceleration sensor detects the tray signal. After the moving tray signal is detected by the deceleration sensor, the transmission mechanism runs at a low speed until the tray is blocked by the limit mechanism, and the side positioning mechanism works to push the tray to one side of the transmission mechanism, and then the pressure plate presses down to fix the tray. The limit mechanism has two initial states: rising and falling. S3, detection and analysis, testing semiconductor products through double-sided detection; S4, release the positioning, by releasing the downward pressure of the pressure plate on the tray, at this time the limit mechanism descends, the side positioning mechanism resets, and the transmission mechanism resumes operation to continue to transmit semiconductor products; S5, discharging, the semiconductor products after inspection are transferred to the discharging end for discharging through the transmission mechanism.

[0006] According to a semiconductor product inspection and transmission device provided by the present invention, after step S1 and before step S2, it also includes dust removal, and an ion wind dust collector is used to quickly remove dust from the surface of the to-be-inspected part on the material tray.

[0007] According to a semiconductor product detection and transmission device provided by the present invention, after step S2 and before step S3, it further includes a code reader, and uses a code reader to read the material information of the to-be-detected piece.

[0008] According to a semiconductor product detection and transmission device provided by the present invention, during feeding, the transmission mechanism first detects a feeding signal of a material tray through a feeding sensor and then starts, thereby realizing rapid transmission.

[0009] According to a semiconductor product inspection and transmission device provided by the present invention, in step S2, the limit mechanism is initially in a descending state. When the deceleration sensor detects a tray signal, the transmission mechanism decelerates and runs at a low speed, and at the same time the limit mechanism rises. In step S4, releasing the positioning includes releasing the downward pressure of the pressure plate on the tray. At the same time, the limit mechanism descends and the side positioning mechanism is reset.

[0010] According to a semiconductor product inspection and transmission device provided by the present invention, in step S2, the limit mechanism is initially in an ascending state. When the deceleration sensor detects a tray signal, the transmission mechanism decelerates and runs at a low speed until the tray is blocked by the limit mechanism. In step S4, releasing the positioning includes releasing the downward pressure of the pressure plate on the tray, resetting the side positioning mechanism, and at the same time, the limit mechanism descends.

[0011] According to a semiconductor product inspection and transmission device provided by the present invention, in step S2, after the material tray is blocked by the limiting mechanism, the transmission mechanism maintains low-speed operation until the edge positioning is completed.

[0012] According to a semiconductor product detection and transmission device provided by the present invention, in step S5, a reset sensor is provided between the detection position and the discharge end. When the reset sensor cannot detect the tray signal, the limit mechanism is reset and step S1 is executed at the same time.

[0013] According to a semiconductor product detection transmission device provided by the present invention, the transmission device includes a feed sensor, a limit mechanism, a belt line, a side positioning mechanism, and a reset sensor, wherein the feed sensor is arranged at the feed port of the transmission device, and the belt line drives the conveyor belt through a conveying motor to move the material tray.

[0014] According to a semiconductor product detection and transmission device provided by the present invention, the transmission device also includes an ion wind dust collector, which is arranged at the rear end of the feeding sensor and is located above the transmission device. The material tray is transported to the side of the deceleration sensor through the ion wind dust collector and then through the conveyor belt. After the speed reducer detection, the belt line is decelerated. At this time, the material tray is positioned by a limit mechanism, a side positioning mechanism and a pressure plate, and the semiconductor product is inspected. After the inspection is completed, the early cycle feeding action is performed through the reset sensor.

[0015] Compared with the prior art, a semiconductor product detection, transmission and positioning method and device of the present invention uses a belt line for rapid transmission, and uses a deceleration sensor to control the belt line to decelerate when a material box is sensed, thereby improving production capacity while ensuring transmission and positioning accuracy.

[0016] Compared with the prior art, a semiconductor product detection transmission positioning method and device of the present invention, by combining a side positioning mechanism, performs transmission positioning of the material tray in multiple directions, thereby further improving the transmission positioning accuracy.

[0017] Compared with the prior art, a semiconductor product detection transmission positioning method and device of the present invention adds a reset sensor to the positioning transmission method, so that the next process can be started before the current process is completed, thereby saving time of the entire process and greatly improving production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described below in conjunction with the accompanying drawings and embodiments; Figure 1 This is a flow chart of the semiconductor product detection transmission positioning method of the present invention; Figure 2 This is the overall structure diagram of the semiconductor product detection transmission and positioning device of the present invention; Figure 3 This is a side structural diagram of the semiconductor product detection transmission and positioning device of the present invention; Figure 4 It is a partial schematic diagram of the semiconductor product detection transmission positioning device of the present invention.

[0019] Legend: 1. Feeding sensor; 2. Feeding tray; 3. Belt line; 4. Deceleration sensor; 5. Limiting mechanism; 6. Side positioning mechanism; 7. Pressing plate; 8. Reset sensor; 9. Discharging sensor; 10. Ion wind dust collector. DETAILED DESCRIPTION

[0020] This section will describe in detail the specific embodiments of the present invention. The preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present invention, but it cannot be understood as a limitation on the scope of protection of the present invention. Example

[0021] Reference Figure 2 , 3 4. The semiconductor product detection, transmission and positioning device of the present invention, when the limiting mechanism 5 is initially in a descending state, comprises the following steps: Step 1: The feeding sensor 1 detects the feeding signal of the material tray 2, the belt line 3 starts, transmits quickly, and uses the ion wind dust collector 10 to quickly remove dust; Step 2: The deceleration sensor 4 detects the signal of the tray 2, the belt line 3 decelerates and transmits at a low speed, and the limit mechanism 5 rises at the same time; Step 3: When the tray 2 is blocked by the limiting mechanism 5, the belt line 3 stops, and the two side positioning mechanisms 6 on one side of the belt line 3 work to push the tray 2 to the other side of the belt line 3 and position it against the side, and then the pressing plate 7 is pressed down to fix the tray 2; Step 4: Detect and analyze semiconductor products through double-sided detection; Step 5: The pressing plate 7 rises and the state of the pressing plate 7 is released. At the same time, the limiting mechanism 5 and the side positioning mechanism 6 are reset, and the belt line 3 is started for rapid transmission; Step 6: When the discharge sensor 9 detects the signal of the tray 2, the discharge end outputs the semiconductor products that have been tested, and the input end continues to input the semiconductor products to be tested, and step 1 is restarted. Example

[0022] Reference Figure 2 , 3 4. The semiconductor product detection, transmission and positioning device of the present invention, when the limit mechanism 5 is initially in the rising state, comprises the following steps: Step 1: The feeding sensor 1 detects the feeding signal of the material tray 2, the belt line 3 starts, transmits quickly, and uses the ion wind dust collector 10 to quickly remove dust; Step 2: The deceleration sensor 4 detects the signal of the tray 2, and the belt line 3 decelerates and transmits at a low speed; Step 3: When the tray 2 is blocked by the limiting mechanism 5, the belt line 3 maintains the transmission state. At this time, the side positioning mechanism 6 prevents the position of the tray 2 from being deflected during the pushing process; The distance between the limit mechanism 5 and the deceleration sensor 4 is maintained at an appropriate buffer distance of 20 to 30 mm. If it is too short, it will not have a deceleration effect, and if it is too long, it will affect the production capacity. Step 4: Detect and analyze semiconductor products through double-sided detection; First, read the code and then test, read the material information of the part to be tested, and perform a secondary check to prevent wrong detection; Step 5: The pressing plate 7 rises and the state of the pressing plate 7 is released. At the same time, the side positioning mechanism 6 is reset, the limit mechanism 5 is lowered to avoid the material tray 2, and the belt line 3 is started for rapid transmission; Step 6: When the reset sensor 8 detects no signal from the tray 2, the limit mechanism 5 rises and resets, and the material is fed at the same time, and step 1 is restarted; Step 7: When the discharging sensor 9 detects the signal from the tray 2, the material is discharged.

[0023] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the purpose of the present invention.

Claims

1. A semiconductor product detection transmission positioning method, characterized in that: The following steps are involved: S1. Loading: loading semiconductor products from the entrance of the transmission mechanism; S2, transmission positioning, when the moving tray passes through the deceleration sensor, the deceleration sensor detects the tray signal. After the moving tray signal is detected by the deceleration sensor, the transmission mechanism runs at a low speed until the tray is blocked by the limit mechanism, and the side positioning mechanism works to push the tray to one side of the transmission mechanism, and then the pressure plate presses down to fix the tray. The limit mechanism has two initial states: rising and falling. S3, detection and analysis, testing semiconductor products through double-sided detection; S4, release the positioning, by releasing the downward pressure of the pressure plate on the tray, at this time the limit mechanism descends, the side positioning mechanism resets, and the transmission mechanism resumes operation to continue to transmit semiconductor products; S5, discharging, the semiconductor products after inspection are transferred to the discharging end for discharging through the transmission mechanism.

2. A semiconductor product detection transmission positioning method according to claim 1, characterized in that: After step S1 and before step S2, dust removal is also included, and an ion wind dust collector is used to quickly remove dust from the surface of the to-be-detected parts on the material tray.

3. A semiconductor product detection transmission positioning method according to claim 1, characterized in that: After step S2 and before step S3, the process further includes code reading, in which a code reader is used to read the material information of the to-be-detected piece.

4. A semiconductor product detection transmission positioning method according to claim 1, characterized in that: When feeding, the transmission mechanism first detects the feeding signal of the material tray through the feeding sensor and then starts to realize rapid transmission.

5. A semiconductor product detection transmission positioning method according to claim 1, characterized in that: In step S2, the limit mechanism is initially in a descending state. When the deceleration sensor detects the tray signal, the transmission mechanism decelerates and runs at a low speed. At the same time, the limit mechanism rises. In step S4, releasing the positioning includes releasing the downward pressure of the pressure plate on the tray. At the same time, the limit mechanism descends and the side positioning mechanism is reset.

6. A semiconductor product detection transmission positioning method according to claim 1, characterized in that: In step S2, the limiting mechanism is initially in an ascending state. When the deceleration sensor detects the tray signal, the transmission mechanism decelerates and runs at a low speed until the tray is blocked by the limiting mechanism. In step S4, releasing the positioning includes releasing the downward pressure of the pressure plate on the tray, resetting the side positioning mechanism, and at the same time, the limiting mechanism descends.

7. A semiconductor product detection transmission positioning method according to claim 1, characterized in that: In step S2, after the material tray is blocked by the limiting mechanism, the transmission mechanism keeps running at a low speed until the edge positioning is completed.

8. A semiconductor product detection transmission positioning method according to any one of claims 1 to 7, characterized in that: In step S5, a reset sensor is provided between the detection position and the discharge end. When the reset sensor cannot detect the tray signal, the limit mechanism is reset and step S1 is executed at the same time.

9. A semiconductor product detection transmission device, using a semiconductor product detection transmission positioning method according to any one of claims 1 to 7, characterized in that: The transmission device includes a feed sensor, a limit mechanism, a belt line, a side positioning mechanism, and a reset sensor, wherein the feed sensor is arranged at the feed inlet of the transmission device, and the belt line drives the conveyor belt through a conveying motor to move the material tray.

10. A semiconductor product detection and transmission device according to claim 9, characterized in that: The transmission device also includes an ion wind dust collector, which is arranged at the rear end of the feeding sensor and above the transmission device. The material tray is transported to the side of the deceleration sensor through the ion wind dust collector and then through the conveyor belt. The belt line is decelerated after detection by the reducer. At this time, the material tray is positioned by a limit mechanism, a side positioning mechanism and a pressure plate, and the semiconductor product is inspected. After the inspection is completed, the early cycle feeding action is performed through the reset sensor.

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