Silicon wafer basket drying equipment and drying method thereof

Abstract

The invention discloses silicon wafer flower basket drying equipment, and relates to the technical field of silicon wafer production, the silicon wafer flower basket drying equipment comprises a box body, a control panel and a flower basket, and also comprises a transportation assembly arranged on the box body; the clamping assembly is arranged on the transportation assembly and used for clamping the flower basket; the sealing assembly is arranged on the box body; the microwave drying assembly is arranged on the box body; the transfer assembly is arranged on the box body; the first fixing plate and the second fixing plate are attracted through the magnetic force of the first electromagnet and the second electromagnet, so that the basket can be placed in the space between the first fixing plate and the second fixing plate, and then the basket can be clamped by the first fixing plate and the second fixing plate through the elastic force of the first spring and the second spring. Therefore, the flower basket is more convenient and faster to assemble and disassemble. And through the cooperation of the transfer assembly and the clamping assembly, the dried silicon wafer can be automatically and rapidly transferred to the next process, so that the working efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer production, and in particular to a silicon wafer basket drying device and a drying method thereof. Background Art

[0002] The last step of silicon wafer cleaning is to dry the silicon wafer. The reason for drying is to prevent the silicon wafer from being contaminated again and leaving marks on the surface of the silicon wafer. Microwave drying equipment is an efficient, energy-saving and pollution-free drying equipment used to dry silicon-based materials such as silicon wafers and solar cells. The equipment uses microwave heating technology to evaporate the moisture in the material in a very short time, thereby achieving a rapid drying effect.

[0003] The existing Chinese patent with authorization announcement number CN220818289U discloses a silicon wafer basket microwave drying device, including a table board, a plurality of supporting legs are fixedly installed on the bottom surface of the table board, and a mounting plate is fixedly installed on the top surface of the table board. The present invention relates to the field of silicon wafer production technology. The silicon wafer basket microwave drying device can quickly replace silicon wafers through the conveying mechanism, and the silicon wafers are placed inside the silicon wafer basket body, and then the uniform speed motor is started to drive the driving shaft to drive the silicon wafer basket body through the conveyor belt to make the silicon wafer enter the inside of the drying box, and then the uniform speed motor is turned off to let the drying box dry it. When the uniform speed motor is turned off, the conveyor belt will also stop conveying. At this time, the empty silicon wafer basket body can be filled. When the silicon wafer is dried, the uniform speed motor is started again to drive the silicon wafer basket body to take out the dried silicon wafers, and at the same time, the next group of silicon wafer basket bodies will be conveyed to the inside of the drying box.

[0004] The above-mentioned drying equipment also has some defects. The flower basket of the above-mentioned drying equipment is fixed on the conveying mechanism, so that the silicon wafers need to be loaded into the flower basket one by one, which makes the downtime of the drying equipment too long, thereby reducing the working efficiency. In addition, the silicon wafers need to be unloaded one by one after drying, which further reduces the working efficiency of the equipment. Summary of the invention

[0005] In view of the deficiencies in the prior art, the object of the present invention is to provide a silicon wafer basket drying device and a drying method thereof, aiming to solve the above technical problems.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] A silicon wafer flower basket drying device comprises a box body, a control panel and a flower basket, and also comprises:

[0008] A transport component is arranged on the box body;

[0009] A clamping assembly, arranged on the transport assembly, for clamping the flower basket, making loading and unloading of the flower basket more convenient;

[0010] A sealing assembly is arranged on the box body;

[0011] A microwave drying component is arranged on the box body;

[0012] The transfer assembly is arranged on the box body and cooperates with the clamping assembly so that the dried silicon wafers can be automatically and quickly transferred to the next process.

[0013] Preferably, the transport assembly comprises:

[0014] A first drive motor is disposed on the box body, and the first drive motor is fixedly connected to the box body;

[0015] A conveyor belt, arranged on the output shaft of the first drive motor, the conveyor belt being rollingly connected to the output shaft of the first drive motor;

[0016] A rotating shaft is arranged on the box body, the rotating shaft is rollingly connected to the box body, and the rotating shaft is rollingly connected to the conveyor belt;

[0017] A transmission roller is arranged on the rotating shaft, and the transmission roller is fixedly connected to the rotating shaft;

[0018] A conveyor belt is arranged on the transmission roller, and the conveyor belt is rollingly connected with the transmission roller;

[0019] A fixed block is arranged on the conveyor belt, and the fixed block is fixedly connected to the conveyor belt.

[0020] Preferably, the clamping assembly comprises:

[0021] A mounting base, disposed on the fixing block, the mounting base being fixedly connected to the fixing block;

[0022] A first electromagnet is disposed on the mounting base, and the first electromagnet is fixedly connected to the mounting base;

[0023] A second electromagnet is disposed on the mounting base, and the second electromagnet is fixedly connected to the mounting base;

[0024] A first spring is disposed on the mounting base, and the first spring is fixedly connected to the mounting base;

[0025] A second spring is disposed on the mounting base, and the second spring is fixedly connected to the mounting base;

[0026] A first fixing plate, disposed on the first spring, the first fixing plate being fixedly connected to the first spring, and the first fixing plate being magnetically connected to the first electromagnet;

[0027] The second fixing plate is arranged on the second spring, the second fixing plate is fixedly connected to the second spring, and the second fixing plate is magnetically connected to the second electromagnet.

[0028] Preferably, the sealing assembly comprises:

[0029] A second drive motor is disposed on the box body, and the second drive motor is fixedly connected to the box body;

[0030] A gear, disposed on the output shaft of the second drive motor, the gear being fixedly connected to the output shaft of the second drive motor;

[0031] A sealing door is arranged on the box body, and the sealing door is slidably connected to the box body;

[0032] A groove is provided on the sealing door, and the groove is fixedly connected to the sealing door;

[0033] A rack is arranged on the groove, the rack is fixedly connected to the groove, and the rack is meshingly connected to the gear.

[0034] Preferably, the microwave drying assembly comprises:

[0035] A mounting plate, disposed on the box body, the mounting plate being fixedly connected to the box body;

[0036] A magnetron is arranged on the mounting plate, and the magnetron is fixedly connected to the mounting plate;

[0037] A ventilation pipe is arranged on the box body, and the ventilation pipe is fixedly connected to the box body;

[0038] A bracket is arranged on the box body, and the bracket is fixedly connected to the box body;

[0039] An exhaust fan is arranged on the bracket, and the exhaust fan is fixedly connected to the bracket;

[0040] A dustproof net is arranged on the ventilation pipe, and the dustproof net is fixedly connected to the ventilation pipe.

[0041] Preferably, the transport assembly comprises:

[0042] A hydraulic cylinder is disposed on the box body, and the hydraulic cylinder is fixedly connected to the box body;

[0043] A hydraulic rod is disposed on the hydraulic cylinder, and the hydraulic rod is slidably connected to the hydraulic cylinder;

[0044] A mounting frame, arranged on the hydraulic rod, wherein the mounting frame is fixedly connected to the hydraulic rod;

[0045] A servo motor is disposed on the mounting frame, and the servo motor is fixedly connected to the mounting frame;

[0046] A threaded rod, disposed on the mounting frame, the threaded rod is rollingly connected to the mounting frame, and the threaded rod is fixedly connected to the output shaft of the servo motor;

[0047] A slider is disposed on the threaded rod, and the slider is threadedly connected to the threaded rod;

[0048] A first clamping plate, disposed on the slider, wherein the first clamping plate is fixedly connected to the slider;

[0049] An electric telescopic rod is arranged on the slider, and the electric telescopic rod is fixedly connected to the slider;

[0050] The second clamping plate is arranged on the electric telescopic rod, and the second clamping plate is fixedly connected to the electric telescopic rod.

[0051] Preferably, there are several fixing blocks, which are evenly distributed on the conveyor belt.

[0052] Preferably, there are several groups of the clamping assemblies, and they are evenly distributed on the transport assembly.

[0053] Preferably, a method for drying a silicon wafer basket, using the above-mentioned drying equipment, comprises the following steps:

[0054] S1, fixing the flower basket: start the first electromagnet and the second electromagnet through the control panel to generate magnetic force to attract the fixing plate, put the flower basket with silicon wafers between the two fixing plates, and after turning off the electromagnet, the fixing plate rebounds under the elastic force of the spring to fix the flower basket;

[0055] S2, transporting the flower basket to the drying area: starting the first driving motor to drive the conveyor belt to rotate, and then driving the rotating shaft, the transmission roller, the conveyor belt and the fixed block to rotate in sequence, so that the flower basket is transported to the microwave drying assembly;

[0056] S3, silicon wafer drying: start the second drive motor, drive the sealing door down through the gear and rack, close it after it is in close contact with the conveyor belt, start the magnetron to generate microwave heating to evaporate water molecules, and start the exhaust fan to discharge the water vapor to the outside of the equipment through the ventilation pipe;

[0057] S4, transportation after drying: open the sealed door. When the flower basket containing the dried silicon wafers is transported to the bottom of the transfer component, start the servo motor to slide the slider to the top of the flower basket and then close it. Start the hydraulic cylinder to push the installation frame down. Start the electric telescopic rod to retract so that the second clamping plate clamps the flower basket and releases the fixing component. Transport the dried silicon wafers and flower basket to the next process to complete the drying work.

[0058] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0059] 1. Through the arrangement of the first electromagnet, the second electromagnet, the first spring, the second spring, the first fixing plate and the second fixing plate, the first fixing plate and the second fixing plate are first attracted by the magnetic force of the first electromagnet and the second electromagnet, so that the space between the first fixing plate and the second fixing plate can be placed in the flower basket, and then the elastic force of the first spring and the second spring is used to clamp the flower basket, thereby making the loading and unloading of the flower basket more convenient and quick.

[0060] 2. Through the cooperation of the transfer component and the clamping component, the dried silicon wafers can be automatically and quickly transferred to the next process, thereby improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0061] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0062] Figure 1 The invention shows a structural schematic diagram of a silicon wafer basket drying device.

[0063] Figure 2 A top view of a silicon wafer basket drying device is shown.

[0064] Figure 3 Shows Figure 2 Cross-sectional view at AA in the middle.

[0065] Figure 4 A front view of a silicon wafer basket drying device is shown.

[0066] Figure 5 Shows Figure 4 Cross-sectional view at BB in the middle.

[0067] Figure 6 Shows Figure 4 Cross-sectional view at CC.

[0068] Figure 7 Shows Figure 6 A local enlarged schematic diagram of point A in the middle.

[0069] Figure 8 A drying step of a silicon wafer basket is shown.

[0070] Legend:

[0071] 1. Box body; 2. Control panel; 3. Flower basket; 4. First drive motor; 5. Conveyor belt; 6. Rotating shaft; 7. Drive roller; 8. Transport belt; 9. Fixed block; 10. Mounting base; 11. First electromagnet; 12. Second electromagnet; 13. First spring; 14. Second spring; 15. First fixed plate; 16. Second fixed plate; 17. Second drive motor; 18. Gear; 19. Sealing door; 20. Groove; 21. Rack; 22. Mounting plate; 23. Magnetron; 24. Ventilation duct; 25. Bracket; 26. Exhaust fan; 27. Dustproof net; 28. Hydraulic cylinder; 29. ​​Hydraulic rod; 30. Mounting frame; 31. Servo motor; 32. Threaded rod; 33. Sliding block; 34. First clamping plate; 35. Electric telescopic rod; 36. Second clamping plate. DETAILED DESCRIPTION

[0072] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0073] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0074] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0075] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0076] Reference Figures 1 to 8 The present invention further describes a silicon wafer basket drying device and a drying method embodiment thereof.

[0077] A silicon wafer flower basket drying device comprises a box body 1, a control panel 2 and a flower basket 3, and further comprises:

[0078] A transport assembly is arranged on the box 1, and the transport assembly comprises:

[0079] A first drive motor 4 is disposed on the box body 1, and the first drive motor 4 is fixedly connected to the box body 1;

[0080] A conveyor belt 5 is arranged on the output shaft of the first driving motor 4, and the conveyor belt 5 is rollingly connected with the output shaft of the first driving motor 4;

[0081] A rotating shaft 6 is disposed on the box body 1, the rotating shaft 6 is rollingly connected to the box body 1, and the rotating shaft 6 is rollingly connected to the conveyor belt 5;

[0082] A transmission roller 7 is disposed on the rotating shaft 6, and the transmission roller 7 is fixedly connected to the rotating shaft 6;

[0083] A conveyor belt 8 is arranged on the transmission roller 7, and the conveyor belt 8 is rollingly connected with the transmission roller 7;

[0084] A fixed block 9 is disposed on the conveyor belt 8 . The fixed block 9 is fixedly connected to the conveyor belt 8 . There are a plurality of fixed blocks 9 , which are evenly distributed on the conveyor belt 8 .

[0085] The first drive motor 4 is started through the control panel 2. The output shaft of the first drive motor 4 rotates to drive the conveyor belt 5 rollingly connected to the output shaft of the first drive motor 4, thereby driving the rotating shaft 6 rollingly connected to the conveyor belt 5 to rotate. The rotation of the rotating shaft 6 drives the transmission roller 7 fixedly connected to the rotating shaft 6 to rotate, thereby driving the conveyor belt 8 rollingly connected to the transmission roller 7 to rotate. The rotation of the conveyor belt 8 drives the fixed block 9 fixedly connected to the conveyor belt 8 to rotate, which facilitates subsequent work.

[0086] Reference Figures 1 to 8The clamping assembly is arranged on the transport assembly and is used to clamp the flower basket 3, so that the loading and unloading of the flower basket 3 is more convenient. The clamping assembly has several groups and is evenly distributed on the transport assembly. The clamping assembly includes:

[0087] A mounting base 10 is disposed on the fixing block 9, and the mounting base 10 is fixedly connected to the fixing block 9;

[0088] A first electromagnet 11 is disposed on the mounting base 10, and the first electromagnet 11 is fixedly connected to the mounting base 10;

[0089] A second electromagnet 12 is disposed on the mounting base 10, and the second electromagnet 12 is fixedly connected to the mounting base 10;

[0090] A first spring 13 is disposed on the mounting base 10, and the first spring 13 is fixedly connected to the mounting base 10;

[0091] A second spring 14 is disposed on the mounting base 10, and the second spring 14 is fixedly connected to the mounting base 10;

[0092] A first fixing plate 15 is disposed on the first spring 13, the first fixing plate 15 is fixedly connected to the first spring 13, and the first fixing plate 15 is magnetically connected to the first electromagnet 11;

[0093] The second fixing plate 16 is disposed on the second spring 14 . The second fixing plate 16 is fixedly connected to the second spring 14 . The second fixing plate 16 is magnetically connected to the second electromagnet 12 .

[0094] The first electromagnet 11 and the second electromagnet 12 are started through the control panel 2, and the first electromagnet 11 and the second electromagnet 12 generate magnetic force to respectively attract the first fixing plate 15 and the second fixing plate 16, and the flower basket 3 containing the silicon wafer is placed between the first fixing plate 15 and the second fixing plate 16, and the first electromagnet 11 and the second electromagnet 12 are turned off, and the first fixing plate 15 and the second fixing plate 16 rebound under the elastic force of the first spring 13 and the second spring 14 respectively fixedly connected, so as to achieve the effect of fixing the flower basket 3.

[0095] Reference Figures 1 to 8By setting the first electromagnet 11, the second electromagnet 12, the first spring 13, the second spring 14, the first fixing plate 15, and the second fixing plate 16, the first fixing plate 15 and the second fixing plate 16 are firstly attracted by the magnetic force of the first electromagnet 11 and the second electromagnet 12, so that the space between the first fixing plate 15 and the second fixing plate 16 can be placed in the flower basket 3, and then the elastic force of the first spring 13 and the second spring 14 is used to clamp the first fixing plate 15 and the second fixing plate 16, so that the loading and unloading of the flower basket 3 is more convenient and quick.

[0096] A sealing assembly is arranged on the box body 1, and the sealing assembly comprises:

[0097] A second driving motor 17 is disposed on the box body 1, and the second driving motor 17 is fixedly connected to the box body 1;

[0098] A gear 18 is disposed on the output shaft of the second drive motor 17, and the gear 18 is fixedly connected to the output shaft of the second drive motor 17;

[0099] A sealing door 19 is provided on the box body 1, and the sealing door 19 is slidably connected to the box body 1;

[0100] A groove 20 is provided on the sealing door 19, and the groove 20 is fixedly connected to the sealing door 19;

[0101] The rack 21 is disposed on the groove 20 , the rack 21 is fixedly connected to the groove 20 , and the rack 21 is meshedly connected to the gear 18 .

[0102] The second drive motor 17 is started, and the output shaft of the second drive motor 17 rotates to drive the gear 18 fixedly connected to the output shaft of the second drive motor 17 to rotate, thereby driving the rack 21 meshing with the gear 18 to move downward. The downward movement of the rack 21 drives the groove 20 fixedly connected to the rack 21 to move downward, thereby driving the sealing door 19 fixedly connected to the groove 20 to move downward, until it moves to close contact with the conveyor belt 8 and then turns off the second drive motor 17.

[0103] Reference Figures 1 to 8 , a microwave drying component is arranged on the box body 1, and the microwave drying component includes:

[0104] A mounting plate 22 is disposed on the box body 1, and the mounting plate 22 is fixedly connected to the box body 1;

[0105] A magnetron 23 is disposed on the mounting plate 22, and the magnetron 23 is fixedly connected to the mounting plate 22;

[0106] A ventilation pipe 24 is provided on the box body 1, and the ventilation pipe 24 is fixedly connected to the box body 1;

[0107] A bracket 25 is disposed on the box body 1, and the bracket 25 is fixedly connected to the box body 1;

[0108] An exhaust fan 26 is disposed on the bracket 25, and the exhaust fan 26 is fixedly connected to the bracket 25;

[0109] The dustproof net 27 is disposed on the ventilation pipe 24 , and the dustproof net 27 is fixedly connected to the ventilation pipe 24 .

[0110] The magnetron 23 is started through the control panel 2, and the magnetron 23 generates microwaves to heat the water droplets on the surface of the flower basket and the silicon wafer to evaporate them, and then the exhaust fan 26 is started to discharge the water vapor in the drying process to the outside of the equipment through the ventilation pipe 24.

[0111] Reference Figures 1 to 8 The transfer component is arranged on the box body 1 and cooperates with the clamping component so that the dried silicon wafer can be automatically and quickly transferred to the next process. The transfer component includes:

[0112] A hydraulic cylinder 28 is disposed on the box body 1, and the hydraulic cylinder 28 is fixedly connected to the box body 1;

[0113] A hydraulic rod 29 is disposed on the hydraulic cylinder 28, and the hydraulic rod 29 is slidably connected to the hydraulic cylinder 28;

[0114] A mounting frame 30 is disposed on the hydraulic rod 29, and the mounting frame 30 is fixedly connected to the hydraulic rod 29;

[0115] A servo motor 31 is disposed on the mounting frame 30, and the servo motor 31 is fixedly connected to the mounting frame 30;

[0116] A threaded rod 32 is disposed on the mounting frame 30 , the threaded rod 32 is rollingly connected to the mounting frame 30 , and the threaded rod 32 is fixedly connected to the output shaft of the servo motor 31 ;

[0117] A slider 33 is disposed on the threaded rod 32, and the slider 33 is threadedly connected to the threaded rod 32;

[0118] A first clamping plate 34 is disposed on the slider 33, and the first clamping plate 34 is fixedly connected to the slider 33;

[0119] An electric telescopic rod 35 is disposed on the slider 33, and the electric telescopic rod 35 is fixedly connected to the slider 33;

[0120] The second clamping plate 36 is disposed on the electric telescopic rod 35 , and the second clamping plate 36 is fixedly connected to the electric telescopic rod 35 .

[0121] The servo motor 31 is started, and the output shaft of the servo motor 31 rotates to drive the threaded rod 32 fixedly connected to the output shaft of the servo motor 31 to rotate, thereby driving the slider 33 threadedly connected to the threaded rod 32 to slide on the mounting frame 30. When the slider 33 moves to the top of the flower basket 3, the servo motor 31 is turned off, and the hydraulic cylinder 28 is started. The liquid in the hydraulic cylinder 28 pushes the hydraulic rod 29 slidably connected to the hydraulic cylinder 28 to move downward, thereby driving the mounting frame 30 fixedly connected to the hydraulic rod 29 to move downward. After the lower end surface of the mounting frame 30 is flush with the top of the flower basket 3, the hydraulic cylinder 28 is turned off, and the electric telescopic rod 35 is started. The electric telescopic rod 35 retracts and drives the second clamping plate 36 fixedly connected to the electric telescopic rod 35 to retract until the flower basket 3 is clamped. At the same time, the fixing assembly to the flower basket 3 is released, thereby automatically and quickly transporting the dried silicon wafers and the flower basket 3 to the next process.

[0122] By cooperating with the transfer component and the clamping component, the dried silicon wafers can be automatically and quickly transferred to the next process, thereby improving work efficiency.

[0123] A method for drying a silicon wafer basket, using the above-mentioned drying equipment, comprises the following steps:

[0124] S1, fixing the flower basket 3: start the first electromagnet 11 and the second electromagnet 12 through the control panel 2 to generate magnetic force to attract the fixing plate, put the flower basket 3 with silicon wafers between the two fixing plates, and after turning off the electromagnet, the fixing plate rebounds under the elastic force of the spring to fix the flower basket 3;

[0125] S2, transporting the flower basket 3 to the drying area: starting the first driving motor 4, driving the conveyor belt 5 to rotate, and then driving the rotating shaft 6, the transmission roller 7, the conveyor belt 8 and the fixing block 9 to rotate in sequence, so that the flower basket 3 is transported to the microwave drying assembly;

[0126] S3, silicon wafer drying: start the second drive motor 17, drive the sealing door 19 to descend through the gear 18 and the rack 21, close it after it is in close contact with the conveyor belt 8, start the magnetron 23 to generate microwave heating to evaporate water molecules, and start the exhaust fan 26 to discharge the water vapor to the outside of the equipment through the ventilation pipe 24;

[0127] S4, transportation after drying: open the sealing door 19, when the flower basket 3 carrying the dried silicon wafers is transported to the bottom of the transportation component, start the servo motor 31 to slide the slider 33 to the top of the flower basket 3 and then close it, start the hydraulic cylinder 28 to push the installation frame 30 down, start the electric telescopic rod 35 to retract the second clamping plate 36 to clamp the flower basket 3 and release the fixing component, transport the dried silicon wafers and the flower basket 3 to the next process, and complete the drying work.

[0128] Working principle: Refer to Figures 1 to 8, the first electromagnet 11 and the second electromagnet 12 are started through the control panel 2, and the first electromagnet 11 and the second electromagnet 12 generate magnetic force to respectively attract the first fixing plate 15 and the second fixing plate 16, and the flower basket 3 containing the silicon wafer is placed between the first fixing plate 15 and the second fixing plate 16, and the first electromagnet 11 and the second electromagnet 12 are closed, and the first fixing plate 15 and the second fixing plate 16 rebound under the elastic force of the first spring 13 and the second spring 14 respectively connected to each other, so as to achieve the effect of fixing the flower basket 3, and the first driving motor 4 is started through the control panel 2, and the output shaft of the first driving motor 4 rotates to drive the conveyor belt 5 connected to the output shaft of the first driving motor 4 to rotate, thereby the conveyor belt The rotating shaft 6 connected to the conveyor belt 5 in a rolling manner rotates, and the rotating shaft 6 drives the driving roller 7 fixedly connected to the rotating shaft 6 to rotate, thereby driving the conveyor belt 8 connected to the driving roller 7 to rotate, and the conveyor belt 8 drives the fixed block 9 fixedly connected to the conveyor belt 8 to rotate, thereby driving the flower basket 3 containing the silicon wafers to move into the microwave drying assembly, and starting the second driving motor 17, and the output shaft of the second driving motor 17 rotates to drive the gear 18 fixedly connected to the output shaft of the second driving motor 17 to rotate, thereby driving the rack 21 meshing with the gear 18 to move downward, and the downward movement of the rack 21 drives the groove 20 fixedly connected to the rack 21 to move downward, thereby driving the fixed block 9 fixedly connected to the groove 20 to move downward. The sealing door 19 moves downward until it moves to be in close contact with the conveyor belt 8, and then the second driving motor 17 is turned off. The magnetron 23 is started through the control panel 2. The magnetron 23 generates microwaves to heat the water droplets on the surface of the flower basket and the silicon wafers to evaporate them. Then the exhaust fan 26 is started to discharge the water vapor in the drying process to the outside of the equipment through the ventilation pipe 24. The sealing door 19 is opened and the transport component is started. When the flower basket 3 carrying the dried silicon wafers is transported to the bottom of the transfer component, the servo motor 31 is started. The output shaft of the servo motor 31 rotates to drive the threaded rod 32 fixedly connected to the output shaft of the servo motor 31 to rotate, thereby driving the slider 33 threadedly connected to the threaded rod 32 on the mounting frame 30. When the slider 33 moves to the top of the flower basket 3, the servo motor 31 is turned off and the hydraulic cylinder 28 is started. The liquid in the hydraulic cylinder 28 pushes the hydraulic rod 29 slidably connected to the hydraulic cylinder 28 to move downward, thereby driving the mounting frame 30 fixedly connected to the hydraulic rod 29 to move downward. When the mounting frame 30 moves until the lower end surface is flush with the top of the flower basket 3, the hydraulic cylinder 28 is turned off and the electric telescopic rod 35 is started. The electric telescopic rod 35 retracts to drive the second clamping plate 36 fixedly connected to the electric telescopic rod 35 to retract until the flower basket 3 is clamped. At the same time, the fixing assembly to the flower basket 3 is released, thereby automatically and quickly transporting the dried silicon wafers and the flower basket 3 to the next process.

[0129] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A silicon wafer basket drying device, comprising a housing (1), a control panel (2) and a basket (3), characterized in that: Also includes: A transport component, arranged on the box body (1); A clamping assembly, arranged on the transport assembly, for clamping the flower basket (3), so that the loading and unloading of the flower basket (3) is more convenient; A sealing assembly, arranged on the box body (1); A microwave drying component is arranged on the box body (1); The transfer assembly is arranged on the box body (1) and cooperates with the clamping assembly so that the dried silicon wafers can be automatically and quickly transferred to the next process.

2. The silicon wafer basket drying device according to claim 1, characterized in that: The transport assembly comprises: A first drive motor (4) is arranged on the box (1), and the first drive motor (4) is fixedly connected to the box (1); A conveyor belt (5) is arranged on the output shaft of the first drive motor (4), and the conveyor belt (5) is rollingly connected to the output shaft of the first drive motor (4); A rotating shaft (6) is arranged on the box body (1), the rotating shaft (6) is rollingly connected to the box body (1), and the rotating shaft (6) is rollingly connected to the conveyor belt (5); A transmission roller (7) is arranged on the rotating shaft (6), and the transmission roller (7) is fixedly connected to the rotating shaft (6); A conveyor belt (8) is arranged on the transmission roller (7), and the conveyor belt (8) is rollingly connected to the transmission roller (7); A fixed block (9) is arranged on the conveyor belt (8), and the fixed block (9) is fixedly connected to the conveyor belt (8).

3. The silicon wafer basket drying device according to claim 2, characterized in that: The clamping assembly comprises: A mounting base (10) is disposed on the fixing block (9), and the mounting base (10) is fixedly connected to the fixing block (9); A first electromagnet (11) is disposed on the mounting base (10), wherein the first electromagnet (11) is fixedly connected to the mounting base (10); A second electromagnet (12) is disposed on the mounting base (10), and the second electromagnet (12) is fixedly connected to the mounting base (10); A first spring (13) is disposed on the mounting base (10), and the first spring (13) is fixedly connected to the mounting base (10); A second spring (14) is disposed on the mounting base (10), and the second spring (14) is fixedly connected to the mounting base (10); A first fixing plate (15) is disposed on the first spring (13), the first fixing plate (15) is fixedly connected to the first spring (13), and the first fixing plate (15) is magnetically connected to the first electromagnet (11); The second fixing plate (16) is arranged on the second spring (14), the second fixing plate (16) is fixedly connected to the second spring (14), and the second fixing plate (16) is magnetically connected to the second electromagnet (12).

4. The silicon wafer basket drying device according to claim 3, characterized in that: The sealing assembly comprises: A second drive motor (17) is disposed on the box (1), and the second drive motor (17) is fixedly connected to the box (1); a gear (18) disposed on an output shaft of the second drive motor (17), the gear (18) being fixedly connected to the output shaft of the second drive motor (17); A sealing door (19) is arranged on the box body (1), and the sealing door (19) is slidably connected to the box body (1); A groove (20) is provided on the sealing door (19), and the groove (20) is fixedly connected to the sealing door (19); A rack (21) is arranged on the groove (20), the rack (21) is fixedly connected to the groove (20), and the rack (21) is meshingly connected to the gear (18).

5. The silicon wafer basket drying device according to claim 4, characterized in that: The microwave drying assembly comprises: A mounting plate (22) is arranged on the box body (1), and the mounting plate (22) is fixedly connected to the box body (1); A magnetron (23) is arranged on the mounting plate (22), and the magnetron (23) is fixedly connected to the mounting plate (22); A ventilation pipe (24) is arranged on the box body (1), and the ventilation pipe (24) is fixedly connected to the box body (1); A bracket (25) is arranged on the box body (1), and the bracket (25) is fixedly connected to the box body (1); An exhaust fan (26) is disposed on the bracket (25), and the exhaust fan (26) is fixedly connected to the bracket (25); A dustproof net (27) is arranged on the ventilation pipe (24), and the dustproof net (27) is fixedly connected to the ventilation pipe (24).

6. The silicon wafer basket drying device according to claim 5, characterized in that: The transport component comprises: A hydraulic cylinder (28) is arranged on the box (1), and the hydraulic cylinder (28) is fixedly connected to the box (1); A hydraulic rod (29) is arranged on the hydraulic cylinder (28), and the hydraulic rod (29) is slidably connected to the hydraulic cylinder (28); A mounting frame (30) is arranged on the hydraulic rod (29), and the mounting frame (30) is fixedly connected to the hydraulic rod (29); A servo motor (31) is disposed on the mounting frame (30), and the servo motor (31) is fixedly connected to the mounting frame (30); A threaded rod (32) is disposed on the mounting frame (30), the threaded rod (32) is rollingly connected to the mounting frame (30), and the threaded rod (32) is fixedly connected to the output shaft of the servo motor (31); A slider (33) is disposed on the threaded rod (32), and the slider (33) is threadedly connected to the threaded rod (32); A first clamping plate (34) is disposed on the slider (33), wherein the first clamping plate (34) is fixedly connected to the slider (33); An electric telescopic rod (35) is arranged on the slider (33), and the electric telescopic rod (35) is fixedly connected to the slider (33); The second clamping plate (36) is arranged on the electric telescopic rod (35), and the second clamping plate (36) is fixedly connected to the electric telescopic rod (35).

7. The silicon wafer basket drying device according to claim 6, characterized in that: There are a plurality of fixing blocks (9), which are evenly distributed on the conveyor belt (8).

8. The silicon wafer basket drying device according to claim 7, characterized in that: The clamping components are arranged in several groups and are evenly distributed on the transport component.

9. The silicon wafer basket drying device according to claim 8, characterized in that: There are two groups of sealing components, which are symmetrically distributed on the box body (1).

10. A method for drying a silicon wafer basket, characterized in that: The drying device according to any one of claims 1 to 9 comprises the following steps: S1, fixing the flower basket (3): start the first electromagnet (11) and the second electromagnet (12) through the control panel (2) to generate magnetic force to attract the fixing plate, put the flower basket (3) containing silicon wafers between the two fixing plates, and after turning off the electromagnet, the fixing plate rebounds under the elastic force of the spring to fix the flower basket (3); S2, transporting the flower basket (3) to the drying area: starting the first driving motor (4), driving the conveyor belt (5) to rotate, and then driving the rotating shaft (6), the transmission roller (7), the conveyor belt (8) and the fixing block (9) to rotate in sequence, so that the flower basket (3) is transported to the microwave drying assembly; S3, silicon wafer drying: start the second drive motor (17), drive the sealing door (19) to descend through the gear (18) and the rack (21), close it after it comes into close contact with the conveyor belt (8), start the magnetron (23) to generate microwave heating to evaporate water molecules, and at the same time start the exhaust fan (26) to discharge the water vapor to the outside of the equipment through the ventilation pipe (24); S4, transportation after drying: open the sealed door (19), when the flower basket (3) carrying the dried silicon wafers is transported to the bottom of the transport assembly, start the servo motor (31) to slide the slider (33) to the top of the flower basket (3) and then close it, start the hydraulic cylinder (28) to push the installation frame (30) down, start the electric telescopic rod (35) to retract the second clamping plate (36) to clamp the flower basket (3) and release the fixing assembly, transport the dried silicon wafers and the flower basket (3) to the next process, and complete the drying work.

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