Uniaxial out-of-plane MEMS gyroscope

Abstract

The present invention relates to a single-axis out-of-plane MEMS gyroscope, which includes a substrate, an anchor unit, a motion unit, and an electrode unit. The motion unit includes four drive frames, and the four drive frames are arranged in an array along the x-direction and the y-direction. The drive frames have the degree of freedom of linear motion along the x-direction. Between the two drive frames arranged along the x-direction, there are two mass blocks arranged along the x-direction. The mass blocks are connected to the adjacent drive frames along the x-direction through the first decoupling beams. Between the two mass blocks arranged along the x-direction, there is a detection frame, and the detection frame has the degree of freedom of swinging around the y-direction. The detection frame is connected to the two adjacent mass blocks along the x-direction through the second decoupling beams. The electrode unit includes a drive-mode excitation electrode and a sensitive-mode detection electrode. By adopting the two-stage decoupling method to decouple the motion of the drive frame from the motion of the detection frame, the gyroscopic orthogonal error can be reduced from the structural level, and the zero-bias index of the gyroscope can be further reduced, laying a foundation for realizing a high-performance single-axis out-of-plane MEMS gyroscope.

Description

Technical Field

[0001] The present invention relates to the field of detection technologies, and in particular, to a single-axis out-of-plane MEMS gyroscope. Background Art

[0002] MEMS gyroscopes, that is, micro-electromechanical system gyroscopes, have been widely used in fields such as unmanned aerial vehicles, automotive electronics, industrial production, and aerospace due to their advantages of small size, low cost, low power consumption, and high integration. With the development of related application fields and the gradual improvement of detection requirements, the market's demand for gyroscopes with small size, high precision, and high stability is becoming increasingly urgent.

[0003] Currently, typical MEMS gyroscopes are mainly capacitive resonant gyroscopes. Its basic principle is to measure the amplitude of energy transformation between different resonant modes caused by the Coriolis force to obtain the angular velocity. The mainstream MEMS micro-electromechanical gyroscopes include wire vibration type and ring vibration type, etc. Among them, the wire vibration gyroscope structure has the characteristics of high sensitivity with a large Coriolis sensitive mass ratio and easy decoupling of the driving and detecting modal motions. In order to achieve high precision of the wire vibration gyroscope, a relatively large overall structure volume is required, which makes it more sensitive to external disturbances (acceleration, vibration, shock, or temperature effects); the ring vibration gyroscope has a small volume and good symmetry, and it has an inherent immunity to external environmental disturbances (acceleration, vibration, shock, temperature). However, due to its circular characteristic pattern being extremely susceptible to processing errors, it actually presents an elliptical shape in practice, which is extremely likely to cause frequency deviation of the driving sensitive mode and cross-coupling error, and thus leads to low output precision and poor bandwidth adaptability of the gyroscope. Summary of the Invention

[0004] Therefore, the present invention provides a single-axis out-of-plane MEMS gyroscope, which has the advantages of a large Coriolis mass of the wire vibration structure, can achieve high mechanical sensitivity of the MEMS gyroscope, reduces the structural orthogonality error through a two-stage decoupling working mode, and reduces the sensitivity of the structure to external disturbances.

[0005] To solve the above technical problems, the present invention provides a single-axis out-of-plane MEMS gyroscope, including:

[0006] A substrate;

[0007] An anchor unit, the anchor unit is fixedly arranged on the substrate, and the anchor unit includes a first anchor and a second anchor;

[0008] The motion unit includes four driving frames, which are arranged in an array along the x-direction and the y-direction. The driving frames are connected to the first anchor points through first spring beams. The driving frames have the freedom of linear motion along the x-direction. There are two mass blocks arranged along the x-direction between the two driving frames arranged along the x-direction. The mass blocks are connected to the adjacent driving frames along the x-direction through first decoupling beams. There is a detection frame between the two mass blocks arranged along the x-direction. The detection frame is connected to the second anchor points through second spring beams. The detection frame has the freedom of swinging around the y-direction. The detection frame is connected to the two adjacent mass blocks along the x-direction through second decoupling beams;

[0009] The electrode unit is fixedly arranged on the substrate and includes a driving-mode excitation electrode and a sensitive-mode detection electrode. The driving-mode excitation electrode is used to drive the driving frames to linearly move along the x-direction, and the sensitive-mode detection electrode is used to detect the out-of-plane swing displacement of the detection frame around the y-direction.

[0010] Further, the driving frame is concave-shaped and has a first groove. The first groove has a first notch, a first groove wall on the side of the first notch, and a first groove bottom opposite to the first notch. The two first notches arranged along the x-direction are opposite to each other. The first anchor point is arranged inside the first groove. The first spring beam is connected to the first groove wall. The mass block is embedded in the first groove. The first decoupling beam is located in the first groove and connected to the first groove wall.

[0011] Further, the first groove wall is L-shaped and includes a body part and an extension part. The body part extends along the x-direction and is connected to the first groove bottom. The extension part extends along the y-direction. One end of the extension part is connected to the end of the body part away from the first groove bottom. The other ends of the two extension parts of the same driving frame are the first notch. The first spring beam is located in the first groove and connected to the body part. The first decoupling beam is located in the first groove and connected to the extension part. The extension part is connected to the adjacent extension part along the x-direction through a first coupling beam.

[0012] Further, the anchor point unit further includes a third anchor point. The extension part is also connected to the third anchor point through a third spring beam.

[0013] Further, the mass block is concave-shaped and has a second groove. The second groove has a second notch, second groove walls on the sides of the second notch, and a second groove bottom facing the second notch. The two second notches arranged in the x direction are opposite to each other. The first decoupling beam is located outside the second groove and connects the second groove bottom. The detection frame is embedded in the second groove, and the second decoupling beam is located in the second groove and connects the second groove walls.

[0014] Further, the second groove walls are connected by a second coupling beam to the adjacent second groove walls in the x direction.

[0015] Further, the detection frame is I-shaped and has two third grooves. The third grooves have third notches. The two third notches of the same detection frame face the positive Y-axis direction and the negative Y-axis direction respectively. A part of the second coupling beam extends into the third grooves.

[0016] Further, the anchor unit further includes a fourth anchor. One side of the second groove bottom away from the gyroscope center is connected to the fourth anchor by a fourth spring beam. The mass block has degrees of freedom of linear movement in the x direction and swinging around the y direction. One side of the second groove bottom close to the gyroscope center is connected to the adjacent second groove bottom in the y direction by a third coupling beam.

[0017] Further, the second groove walls close to the outer edge of the gyroscope are connected by a fourth coupling beam to the adjacent second groove walls in the x direction, and the second groove walls close to the gyroscope center are connected by a fifth coupling beam to the adjacent second groove walls in the y direction.

[0018] Further, the anchor unit further includes a fifth anchor. Coupling levers are provided on the sides of the two driving frames arranged in the y direction away from the gyroscope center. The coupling levers are connected to the fifth anchor by fifth spring beams. The coupling levers have degrees of freedom of swinging around the Z-axis direction. The two ends of the coupling levers are respectively connected by third decoupling beams to the two adjacent driving frames in the y direction.

[0019] The above technical solution of the present invention has the following advantages compared with the prior art: For the single-axis out-of-plane MEMS gyroscope of the present invention, on the one hand, a two-stage decoupling method is adopted to decouple the movement of the driving frame and the movement of the detection frame, which can reduce the gyro orthogonality error at the structural level, further reduce the zero-bias index of the gyroscope, and lay a foundation for realizing a high-performance gyroscope; on the other hand, under the driving resonance state, the mass block moves linearly, which can provide a larger driving displacement (>10um) compared with the traditional structure. The large driving displacement can improve the signal-to-noise ratio of the gyroscope and enhance the mechanical sensitivity, thereby compensating for the problems of reduced effective detection area and reduced mechanical sensitivity caused by the two-stage decoupling structure. Brief Description of the Drawings

[0020] In order to make the content of the present invention easier to be clearly understood, the following further describes the present invention in detail according to specific embodiments of the present invention in conjunction with the accompanying drawings.

[0021] Figure 1 Schematic diagram of the structure of the single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention;

[0022] Figure 2 Schematic diagram of the driving mode of the single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention;

[0023] Figure 3 Schematic diagram of the sensitive mode of the single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention;

[0024] Figure 4 Partial schematic diagram of the single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention;

[0025] Figure 5 Partial schematic diagram of the single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention;

[0026] Figure 6 Partial schematic diagram of the single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention;

[0027] Figure 7 Partial schematic diagram of the single-axis out-of-plane MEMS gyroscope in the second embodiment of the present invention;

[0028] Figure 8 Partial schematic diagram of the single-axis out-of-plane MEMS gyroscope in the second embodiment of the present invention;

[0029] Figure 9 Schematic diagram of the structure of the single-axis out-of-plane MEMS gyroscope in the third embodiment of the present invention;

[0030] Figure 10 Schematic diagram of the driving mode of the single-axis out-of-plane MEMS gyroscope in the third embodiment of the present invention;

[0031] Figure 11 Schematic diagram of the sensitive mode of the single-axis out-of-plane MEMS gyroscope in the third embodiment of the present invention;

[0032] Figure 12 Partial schematic diagram of the single-axis out-of-plane MEMS gyroscope in the third embodiment of the present invention;

[0033] Figure 13 Partial schematic diagram of the single-axis out-of-plane MEMS gyroscope in the third embodiment of the present invention;

[0034] Figure 14Schematic diagram of a partial structure of the single-axis out-of-plane MEMS gyroscope in Embodiment 3 of the present invention;

[0035] Figure 15 Schematic diagram of the structure of the single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention;

[0036] Figure 16 Schematic diagram of the driving mode of the single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention;

[0037] Figure 17 Schematic diagram of the sensitive mode of the single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention;

[0038] Figure 18 Schematic diagram of a partial structure of the single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention;

[0039] Figure 19 Schematic diagram of a partial structure of the single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention;

[0040] Figure 20 Schematic diagram of a partial structure of the single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention;

[0041] Figure 21 Schematic diagram of a partial structure of the single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention.

[0042] Description of the reference numerals in the drawings of the specification: 21, the first anchor point; 22, the second anchor point; 23, the third anchor point; 24, the fourth anchor point; 25, the fifth anchor point; 31, the driving frame; 311, the first groove bottom; 312, the main body part; 313, the extension part; 32, the mass block; 321, the second groove wall; 322, the second groove bottom; 33, the detection frame; 34, the coupling lever; 41, the first spring beam; 42, the second spring beam; 43, the third spring beam; 44, the fourth spring beam; 45, the fifth spring beam; 51, the first decoupling beam; 52, the second decoupling beam; 53, the third decoupling beam; 61, the driving mode excitation electrode; 62, the sensitive mode detection electrode; 63, the driving mode detection electrode; 64, the orthogonal adjustment electrode; 65, the sensitive mode feedback electrode; 71, the first coupling beam; 72, the second coupling beam; 73, the third coupling beam; 74, the fourth coupling beam; 75, the fifth coupling beam. Detailed implementation manners

[0043] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and implement it, but the embodiments given are not intended to limit the present invention.

[0044] Embodiment 1

[0045] Refer to Figures 1 to 6As shown, an embodiment of the single-axis out-of-plane MEMS gyroscope of the present invention.

[0046] The single-axis out-of-plane MEMS gyroscope includes:

[0047] A substrate;

[0048] An anchor unit, the above-mentioned anchor unit is fixed on the above-mentioned substrate, and the above-mentioned anchor unit includes a first anchor 21 and a second anchor 22;

[0049] A motion unit, including four drive frames 31, the above-mentioned four drive frames 31 are arranged in an array along the x direction and the y direction, the above-mentioned drive frame 31 is connected to the above-mentioned first anchor 21 through a first spring beam 41, the above-mentioned drive frame 31 has a degree of freedom of linear motion along the x direction, and two mass blocks 32 arranged along the x direction are provided between two of the above-mentioned drive frames 31 arranged along the x direction, the above-mentioned mass block 32 is connected to the adjacent above-mentioned drive frame 31 along the x direction through a first decoupling beam 51, a detection frame 33 is provided between two of the above-mentioned mass blocks 32 arranged along the x direction, the above-mentioned detection frame 33 is connected to the above-mentioned second anchor 22 through a second spring beam 42, the above-mentioned detection frame 33 has a degree of freedom of swinging around the y direction, and the above-mentioned detection frame 33 is connected to two adjacent above-mentioned mass blocks 32 along the x direction through a second decoupling beam 52;

[0050] An electrode unit, the above-mentioned electrode unit is fixed on the above-mentioned substrate, and includes a drive-mode excitation electrode 61 and a sensitive-mode detection electrode 62, the above-mentioned drive-mode excitation electrode 61 is used to drive the above-mentioned drive frame 31 to perform linear motion along the x direction, and the above-mentioned sensitive-mode detection electrode 62 is used to detect the out-of-plane swing displacement of the above-mentioned detection frame 33 around the y direction.

[0051] In this embodiment, the motion unit has a symmetry axis in the x-axis direction and a symmetry axis in the y-axis direction. The motion unit includes two motion components arranged at an interval distance along the y-axis direction. Each motion component includes two drive frames 31, two mass blocks 32, and a detection frame 33. In the same motion component, the two mass blocks 32 are symmetrically connected to both sides of the detection frame 33 in the x direction, and the two drive frames 31 are symmetrically connected to both sides of the two mass blocks 32 in the x direction. The drive frame 31, the mass block 32, the detection frame 33, and the coupling lever 34 are all rigid structures.

[0052] The structure and layout of the first spring beam 41 should ensure the degree of freedom of each drive frame 31 to move along its respective reciprocating motion direction and suppress the motion in other directions. The first spring beam 41 is the main beam of the drive-axis stiffness, which can provide the stiffness required for the motion direction of the drive mode and excellent anti-impact characteristics, and can improve the anti-interference ability of the structure along the drive direction and the out-of-plane direction. The structure and layout of the second spring beam 42 should ensure the degree of freedom of the detection frame 33 to swing around the y direction and suppress the motion in other directions.

[0053] When the driving frame 31 moves, it can make the mass block move in the same trend as the driving frame 31. The first decoupling beam 51 enables the driving frame 31 and the mass block 32 to have non-interfering motion modes in different motion directions. After the mass block 32 generates a Coriolis force under the influence of the angular velocity along the Y direction, it drives the detection frame 33 to perform out-of-plane motion. The second decoupling beam 52 enables the mass block 32 and the detection frame 33 to have non-interfering motion modes in different motion directions.

[0054] The driving mode excitation electrode 61 receives the driving signal provided by the peripheral circuit and drives the corresponding driving frame 31 to perform in-plane reciprocating motion along the x direction, and performs in-phase, equal-amplitude, and reverse oscillating motion in the direction shown by the Figure 2 arrow, with the motion amplitude being 10 - 20 μm, constituting the driving mode of the gyroscope. The driving frame 31 and the mass block 32 perform linear motion but do not drive the detection frame 33 to perform linear motion;

[0055] When an angular velocity input with the axial direction along the Y axis is received, the gyroscope will be subjected to a Coriolis force perpendicular to both the driving direction and the angular velocity direction. After being subjected to the Coriolis force, the gyroscope will perform out-of-plane motion around the y direction in the trend shown by the Figure 3 figure. The upper and lower detection frames 33 perform differential motion, constituting the sensitive mode of the gyroscope. The mass block 32 and the detection frame 33 perform out-of-plane swinging but do not drive the driving frame 31 to perform out-of-plane swinging. Through the sensitive mode detection electrode 62, the detection of the out-of-plane swinging displacement of the detection frame 33 can be realized, and then the angular velocity information can be calculated. Among them, the dot in the circle represents the detection frame 33 swinging in-plane perpendicular to the paper surface, and the cross in the circle represents swinging out-of-plane perpendicular to the paper surface.

[0056] In this embodiment, the sensitive mode detection electrode 62 can be added to achieve closed-loop detection, or open-loop detection can be performed according to the current configuration scheme.

[0057] On the one hand, the method of two-stage decoupling is adopted to decouple the motion of the driving frame 31 from the motion of the detection frame 33, which can reduce the gyro orthogonal error from the structural level, further reduce the zero-bias index of the gyroscope, and lay a foundation for realizing a high-performance gyroscope; on the other hand, in the driving resonance state, the mass block 32 performs linear motion, which can provide a larger driving displacement (>10 μm) compared with the traditional structure. The large driving displacement can improve the signal-to-noise ratio of the gyroscope and enhance the mechanical sensitivity, thereby compensating for the problem of reduced effective detection area and reduced mechanical sensitivity caused by the two-stage decoupling structure.

[0058] In this embodiment, the driving frame 31 is U-shaped, the driving frame 31 has a first groove, the first groove has a first notch, a first groove wall, and a first groove bottom 311. The two first notches arranged in the x direction are opposite to each other. The first anchor point 21 is arranged inside the first groove. The first spring beam 41 is connected to the first groove wall. The mass block 32 is embedded in the first groove. The first decoupling beam 51 is located in the first groove and is connected to the first groove wall.

[0059] In this embodiment, the first notch of the driving frame 31 faces the x direction. The two first groove walls of the same first groove are arranged at an interval distance in the y direction. The first groove bottom of the same first groove is opposite to the first notch. One end of the first spring beam 41 is connected to the first anchor point 21, and the other end is connected to the first groove wall. One end of the first decoupling beam 51 is connected to the first groove wall of the driving frame 31, and the other end is connected to the mass block 32. By arranging the driving frame 31 and the mass block 32 to be mutually embedded, this connection method can enable the driving frame 31 to drive the mass block 32 to move together when moving along the X axis, but when the mass block 32 moves out of the plane, it will not drive the mass block 32 to move out of the plane.

[0060] In this embodiment, the first groove wall is L-shaped, including a body part and an extension part. The body part 312 extends in the x direction and is connected to the first groove bottom. The extension part 313 extends in the y direction and is connected to one end of the body part 312 away from the first groove bottom. The first spring beam 41 is located in the first groove and is connected to the body part 312. The first decoupling beam 51 is located in the first groove and is connected to the extension part 313. The extension part 313 is connected to the adjacent extension part 313 in the x direction through a first coupling beam 71.

[0061] In this embodiment, the first groove is similar to a T-shaped groove. That is to say, the dimension of the cavity part of the first groove near the first groove bottom in the y direction is smaller than the dimension of the first notch in the y direction. By arranging the first coupling beam 71, it can ensure that the driving frame of the gyroscope oscillates in a trend of equal amplitude and opposite frequency. By setting the first groove wall of the driving frame to be L-shaped, the design of L-shaped is mainly to realize the in-plane coupling and out-of-plane decoupling connection between the driving frame 31 and the mass block 32 through the first decoupling beam 51.

[0062] In this embodiment, the mass block 32 is U-shaped, the mass block 32 has a second groove, the second groove has a second notch, a second groove wall 321, and a second groove bottom 322. The two second notches arranged in the x direction are opposite to each other. The first decoupling beam 51 is located outside the second groove and is connected to the second groove bottom 322. The detection frame 33 is embedded in the second groove. The second decoupling beam 52 is located in the second groove and is connected to the second groove wall 321.

[0063] In this embodiment, the second notch of the mass block 32 faces the x-direction, the two second groove walls of the same second groove are arranged at a distance along the y-direction, and the second groove bottom of the same second groove is opposite to the second notch. One end of the first decoupling beam 51 is connected to the first groove wall of the driving frame 31, and the other end is connected to the second groove wall of the mass block 32. One end of the second decoupling beam 52 is connected to the second groove wall of the mass block 32, and the other end is connected to the detection frame 33. By arranging the mass block 32 and the detection frame 33 to be mutually embedded, the function of the second decoupling beam 52 is that when the mass block 32 moves in the driving mode, the second decoupling beam 52 has a small stiffness along the X-axis, which can ensure that the detection frame 33 is not affected by the driving movement. At the same time, when the mass block 32 is subjected to the Coriolis force, the sensitive mode can drive the detection frame 33 to move after being excited.

[0064] In this embodiment, the anchor point unit also includes a fifth anchor point 25. A coupling lever 34 is provided on the side of the two driving frames 31 arranged along the y direction away from the center of the gyroscope. The coupling lever 34 is connected to the fifth anchor point 25 through a fifth spring beam 45. The coupling lever 34 has the freedom to swing around the Z-axis direction. Both ends of the coupling lever 34 are respectively connected to the two adjacent driving frames 31 along the y direction through a third decoupling beam 53.

[0065] In this embodiment, the coupling lever 34 extends along the y direction, and the fifth anchor point 25 is connected to the midpoint of the coupling lever 34 through the fifth spring beam 45. The third decoupling beam 53 is arranged so that the motion modes of the driving frame 31 and the coupling lever 34 in different motion directions do not interfere with each other, ensuring that the driving frame 31 can strictly move in the X direction. By setting the coupling lever 34, it can be ensured that the driving frame of the gyroscope performs oscillation motion with the same frequency, equal amplitude and opposite trend.

[0066] In this embodiment, the electrode unit further includes a driving mode detection electrode 63 and an orthogonal adjustment electrode 64 .

[0067] The mass block 32 is provided with a mass balance through hole, and the orthogonal adjustment electrode 64 is directly opposite to the mass balance through hole and constitutes an orthogonal stiffness adjustment structure. The orthogonal adjustment electrode 64 generates corresponding electrostatic negative stiffness to offset the orthogonal stiffness introduced by the processing error, so as to achieve the purpose of orthogonal correction and improve the output accuracy of the gyroscope. The orthogonal coupling error caused by the process manufacturing is reduced by adding orthogonal stiffness compensation electrodes. The high vacuum degree and high Q value inside the cavity of the gyroscope device are achieved by wafer-level vacuum bonding and deposition of getter, so that the invention has the potential of high precision and high performance.

[0068] The above gyroscope process is relatively easy to implement, is conducive to mass production and has low cost.

[0069] Embodiment 2

[0070] See also Figure 7 andFigure 8 As shown, one embodiment of the single-axis out-of-plane MEMS gyroscope of the present invention.

[0071] The rest is the same as the first embodiment, except that, in this embodiment, the anchor point unit further includes a third anchor point 23 , and the extension portion 313 is further connected to the third anchor point 23 via a third spring beam 43 .

[0072] In this embodiment, the third anchor point 23 is disposed between two adjacent extension portions 313 along the x direction. By providing the third anchor point 23 and the third spring beam 43, the stability of the gyroscope can be improved when subjected to interference (vibration, impact load, etc.) along the z direction.

[0073] The working principle and working method of the gyroscope in the second embodiment are consistent with those in the first embodiment.

[0074] In this embodiment, the electrode unit further includes a sensitive mode feedback electrode 65. The sensitive mode feedback electrode 65 is used to enable open-loop detection or closed-loop detection.

[0075] Embodiment 3

[0076] See also Figures 9 to 14 As shown, one embodiment of the single-axis out-of-plane MEMS gyroscope of the present invention.

[0077] The rest is the same as the first embodiment, except that, in this embodiment, the first decoupling beam 51 is connected to the second groove bottom, and the second groove wall is connected to the second groove wall adjacent to the second groove wall along the x direction through the second coupling beam 72 .

[0078] In this embodiment, the driving frame 31 is not in a concave shape but in a rectangular shape, and there is no connection between the two driving frames 31 arranged along the x direction. By providing the second coupling beam 72, it is possible to ensure that the two mass blocks perform seesaw motion in opposite directions, thereby improving the anti-interference characteristics of the gyroscope and separating the interference mode. The working principle and working method of the gyroscope of the third embodiment are consistent with those of the first embodiment.

[0079] In this embodiment, the above-mentioned detection frame 33 is an I-shape, and the above-mentioned detection frame 33 has two third grooves. The above-mentioned third groove has a third notch. The two third notches of the same above-mentioned detection frame 33 are respectively facing the positive direction of the Y-axis and the negative direction of the Y-axis, and part of the above-mentioned second coupling beam 72 extends into the above-mentioned third groove.

[0080] In this embodiment, the detection frame 33 is in an I-shape, and the area of ​​the detection frame is increased as much as possible. A larger area means a larger detection capacitance, higher sensitivity, higher precision, and better gyro performance.

[0081] In this embodiment, the above-mentioned anchor unit further includes a fourth anchor 24. One side of the second groove bottom away from the center of the gyroscope is connected to the fourth anchor 24 through a fourth spring beam 44. The mass block 32 has degrees of freedom of linear movement along the x direction and swinging around the y direction. One side of the second groove bottom close to the center of the gyroscope is connected to the adjacent second groove bottom along the y direction through a third coupling beam 73.

[0082] In this embodiment, by setting the fourth spring beam 44, the fourth anchor 24, and the third coupling beam 73, the main advantages of the fourth spring beam 44 and the fourth anchor 24 are: shielding interference modes other than the driving and sensitive modes, increasing out-of-plane stiffness, and the third coupling beam 73 for increasing the structural impact resistance: improving the robustness of the sensitive mode, enhancing the anti-interference ability and the anti-process error ability.

[0083] Embodiment 4

[0084] See Figures 15 to 21 As shown, an embodiment of the single-axis out-of-plane MEMS gyroscope of the present invention.

[0085] The rest is the same as that in Embodiment 3. The difference is that in this embodiment, the above-mentioned fourth anchor, fourth spring beam, and third coupling beam are not provided. The second groove wall near the outer edge of the gyroscope is connected to the adjacent second groove wall along the x direction through a fourth coupling beam 74, and the second groove wall near the center of the gyroscope is connected to the adjacent second groove wall along the y direction through a fifth coupling beam 75.

[0086] In this embodiment, the above-mentioned fourth anchor, fourth spring beam, and third coupling beam are not provided. The fifth coupling beam 75 is arranged close to the center of the gyroscope, and the periphery of the fifth coupling beam 75 is an anchor point. Setting it close to the center changes the coupling form, which is a different design scheme for this structure.

[0087] The working principle and working mode of the gyroscope in Embodiment 4 are the same as those in Embodiment 1.

[0088] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the present invention.

Claims

1. A single-axis out-of-plane MEMS gyroscope, characterized in that: include: substrate; An anchor point unit, the anchor point unit is fixed on the substrate, and the anchor point unit includes a first anchor point and a second anchor point; A motion unit, comprising four drive frames, the four drive frames are arranged in an array along the x-direction and the y-direction, the drive frames are connected to the first anchor point through a first spring beam, the drive frames have the freedom of linear motion along the x-direction, two mass blocks arranged along the x-direction are arranged between the two drive frames arranged along the x-direction, the mass blocks are connected to the adjacent drive frames along the x-direction through a first decoupling beam, a detection frame is arranged between the two mass blocks arranged along the x-direction, the detection frame is connected to the second anchor point through a second spring beam, the detection frame has the freedom of swinging around the y-direction, and the detection frame is connected to the adjacent two mass blocks along the x-direction through a second decoupling beam; An electrode unit, the electrode unit is fixed on the substrate, and includes a driving mode excitation electrode and a sensitive mode detection electrode, the driving mode excitation electrode is used to drive the driving frame to move linearly along the x direction, and the sensitive mode detection electrode is used to detect the out-of-plane swing displacement of the detection frame around the y direction; The mass block is in a concave shape, and has a second groove, wherein the second groove has a second notch, a second groove wall located on the side of the second notch, and a second groove bottom facing the second notch, and two second notches arranged along the x direction are opposite to each other; The detection frame is embedded in the second groove, the detection frame is I-shaped, the detection frame has two third grooves, the third groove has a third notch, and the two third notches of the same detection frame are respectively facing the positive direction of the Y axis and the negative direction of the Y axis.

2. The single-axis out-of-plane MEMS gyroscope according to claim 1, characterized in that: The driving frame is in a concave shape and has a first groove. The first groove has a first notch, a first groove wall located on the side of the first notch, and a first groove bottom facing the first notch. The two first notches arranged along the x direction are opposite to each other. The first anchor point is arranged inside the first groove. The first spring beam is connected to the first groove wall. The mass block is embedded in the first groove. The first decoupling beam is located in the first groove and connected to the first groove wall.

3. The single-axis out-of-plane MEMS gyroscope according to claim 2, characterized in that: The first groove wall is L-shaped, including a main body and an extension portion, the main body extends along the x direction and is connected to the first groove bottom, the extension portion extends along the y direction, one end of the extension portion is connected to an end of the main body away from the first groove bottom, the other ends of the two extension portions of the same driving frame are between the first notch, the first spring beam is located in the first groove and connected to the main body, the first decoupling beam is located in the first groove and connected to the extension portion, and the extension portion is connected to the adjacent extension portions along the x direction through the first coupling beam.

4. The single-axis out-of-plane MEMS gyroscope according to claim 3, characterized in that: The anchor point unit further includes a third anchor point, and the extension portion is further connected to the third anchor point via a third spring beam.

5. The single-axis out-of-plane MEMS gyroscope according to claim 1, characterized in that: The first decoupling beam is located outside the second groove and connected to the second groove bottom, and the second decoupling beam is located inside the second groove and connected to the second groove wall.

6. The single-axis out-of-plane MEMS gyroscope according to claim 5, characterized in that: The second slot walls are connected to the adjacent second slot walls along the x direction through a second coupling beam.

7. The single-axis out-of-plane MEMS gyroscope according to claim 6, characterized in that: A portion of the second coupling beam extends into the third groove.

8. The single-axis out-of-plane MEMS gyroscope according to claim 5, characterized in that: The anchor point unit also includes a fourth anchor point, and a side of the second slot bottom away from the center of the gyroscope is connected to the fourth anchor point through a fourth spring beam, the mass block has the freedom to move linearly along the x direction and to swing around the y direction, and a side of the second slot bottom close to the center of the gyroscope is connected to the second slot bottom adjacent to the y direction through a third coupling beam.

9. The single-axis out-of-plane MEMS gyroscope according to claim 5, characterized in that: The second slot wall near the outer edge of the gyroscope is connected to the second slot wall adjacent to the gyroscope along the x direction through a fourth coupling beam, and the second slot wall near the center of the gyroscope is connected to the second slot wall adjacent to the y direction through a fifth coupling beam.

10. The single-axis out-of-plane MEMS gyroscope according to claim 1, characterized in that: The anchor point unit also includes a fifth anchor point. A coupling lever is provided on the side of the two driving frames arranged along the y direction away from the center of the gyroscope. The coupling lever is connected to the fifth anchor point through a fifth spring beam. The coupling lever has the freedom to swing around the Z-axis direction. The two ends of the coupling lever are respectively connected to the two adjacent driving frames along the y direction through a third decoupling beam.

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