Crystal pulling anaerobic ash conveying system

Abstract

The invention belongs to the field of process dust removal in industrial production of monocrystalline silicon, polycrystalline silicon, heavily doped silicon single crystal and the like, and particularly relates to a crystal pulling oxygen-free ash conveying system. Aiming at the problems that the resistance of a filter bag of an existing simple harmonic dust collector is gradually increased, the quality of a crystal bar and the power consumption of rear-end equipment are seriously influenced, for example, the crystallization rate is reduced, the original crystal rate is reduced, the original crystal per unit yield is reduced and the oxygen content is increased, the following scheme is provided. The device comprises a crystal pulling furnace L located at the front end of the process, a simple harmonic dust collector A used for filtering and collecting impurities generated in the crystal pulling process, and an ash conveying pipeline B. Through automatic control, double cleaning of rapping and back flushing is carried out on a filter bag of the simple harmonic dust collector, vacuum pipeline ash discharging operation is carried out on an ash bin of the simple harmonic dust collector, and passivation treatment of dust is carried out. The safety and sustainability of production are guaranteed, the product quality is improved, the energy consumption of enterprises is reduced, the production efficiency is improved, conditions are provided for realizing continuous crystal pulling, and a step is made for the enterprises to realize intelligent factories.

Description

Technical Field

[0001] The invention relates to the technical field of process dust removal in industrial production of single crystal silicon, polycrystalline silicon, heavily doped silicon single crystal, etc., and in particular to a crystal pulling oxygen-free ash conveying system. Background Art

[0002] The single / multi-crystal furnace crystal pulling process produces a large amount of SiO dust that can spontaneously combust when exposed to air. The SiO dust needs to be treated during the production process.

[0003] The existing treatment of SiO dust has the following deficiencies:

[0004] When SiO dust is treated, it is processed by a harmonic dust collector. During the treatment process, the resistance of the filter bag of the harmonic dust collector will gradually increase, which seriously affects the quality of the crystal rod and the power consumption of the back-end equipment, such as: the crystallization rate decreases, the original product crystal rate decreases, the original crystal yield decreases, and the oxygen content increases. The SiO dust in the ash bin of the harmonic dust collector needs to be shut down and cleaned by manual digging, shoveling, sweeping and other primitive methods. In view of the characteristics of SiO dust that can spontaneously combust or even explode when it encounters air, the SiO dust must be slowly oxidized before manual cleaning to slowly oxidize the SiO dust into SiO2 dust, but this process takes a lot of time and is prone to misoperation, resulting in incomplete oxidation of dust in the harmonic dust collector, causing the filter bag to burn through. The safety and sustainability of production cannot be guaranteed, which seriously affects production.

[0005] In view of the above problems, the present invention document proposes a crystal pulling oxygen-free ash conveying system to solve the above problems. Summary of the invention

[0006] The present invention provides a crystal pulling oxygen-free ash conveying system, which solves the problem that the prior art uses a harmonic dust collector to process SiO dust. During the processing, the resistance of the filter bag of the harmonic dust collector will gradually increase, which seriously affects the quality of the crystal rod and the power consumption of the back-end equipment, such as: the crystallization rate decreases, the original product crystal rate decreases, the original crystal yield decreases, and the oxygen content increases. The SiO dust in the ash bin of the harmonic dust collector needs to be shut down and cleaned by manual digging, shoveling, sweeping and other primitive methods. In view of the characteristics of SiO dust that it can spontaneously combust or even explode when it encounters air, the SiO dust must be slowly oxidized before manual cleaning to slowly oxidize the SiO dust into SiO2 dust. However, this process consumes a lot of time and is prone to misoperation, resulting in incomplete oxidation of dust in the harmonic dust collector, causing the filter bag to burn through. The safety and sustainability of production cannot be guaranteed, which seriously affects the production shortcomings.

[0007] The present invention provides the following technical solutions:

[0008] A crystal pulling oxygen-free ash conveying system comprises: a crystal pulling furnace L located at the front end of the process and a simple harmonic dust collector A for filtering and collecting impurities generated in the crystal pulling process, an ash conveying pipeline B, a centralized dust collector C, a buffer tank D, an oxidation bed E, a chain conveyor and a water tank G. A cartridge dust collector J and a vacuum unit K2 are connected between the crystal pulling furnace L and the simple harmonic dust collector A through an emergency pipeline. The crystal pulling furnace L is connected to the simple harmonic dust collector A through an inert gas pipeline. The simple harmonic dust collector A comprises an upper shell, a lower shell, an ash cleaning port, a first pneumatic ball valve, a first pulse valve, four purge pipelines, a flower plate, a bracket, a fixed hanger, a guide mechanism, a movable hanger, a spring, a filter bag, a cylinder and a second pneumatic ball valve. The ash cleaning port is located on one side of the lower shell and connected to the ash conveying pipeline B. The first pneumatic ball valve and the first pulse valve constitute a filter bag blowing pipeline. A first air outlet is provided on the upper shell, a first air inlet is provided on the upper side of the lower shell, an air bag is provided on the upper shell, a purge pipeline is composed of a first manual ball valve and a purge nozzle, the purge nozzle is installed at an appropriate position opposite to the ash cleaning port, there are four purge nozzles, the first air outlet is connected to a vacuum unit K1 through a pipeline, the flower plate is welded to the lower shell, the bracket is installed on the flower plate, the fixed hanger is installed on the bracket, the guide mechanism fixing seat is installed on the fixed hanger, the guide rod of the guide mechanism is installed on the movable hanger, the spring connects the movable hanger with the fixed hanger, the filter bag is installed between the movable hanger and the flower plate, the cylinder is installed in the upper shell, the second pneumatic ball valve is installed at the first air inlet and connected to the crystal pulling furnace pipeline, and the water tank G is installed under the chain conveyor.

[0009] In a possible design, the ash conveying pipeline B includes a second manual ball valve, a third pneumatic ball valve and a pipeline, the second manual ball valve and the third pneumatic ball valve are both installed at the front end of the pipeline, the front end of the ash conveying pipeline B is connected to a simple harmonic dust collector A and the rear end is connected to a centralized dust collector C.

[0010] In one possible design, the centralized dust collector C includes legs, a cylinder, a filter cartridge plate, a filter cartridge, an air bag bracket, a second air inlet, an upper head, a back-blowing pipe opening, a second air outlet, a back-blowing air bag, a second pulse valve, a conical ash hopper, a main shaft fixing plate, a main shaft fixing frame, a motor fixing seat, a first motor reducer, a main shaft, a graphite bearing, a material level sensor, a first locking nut, a screw, a first key, a reducer and a coupling. The cylinder is mounted on the legs through ears, the filter cartridge plate is welded in the cylinder, the filter cartridge is mounted on the filter cartridge plate, the air bag bracket is welded on the outside of the cylinder, the second air inlet is located on the lower side of the upper cylinder and connected to the ash conveying pipeline B, the upper head is mounted on the cylinder, the back-blowing pipe opening is located on the side wall of the upper head, and the second air outlet is located on the lower side of the upper cylinder. On the side wall of the upper head and connected to the vacuum unit K3 through a pipeline, the back-blowing air bag is installed on the air bag bracket, the second pulse valve is connected to the back-blowing air bag and the back-blowing pipe mouth, the conical ash hopper is installed at the lower part of the cylinder, the main shaft fixing plate is welded to the inner side of the conical ash hopper, the main shaft fixing frame is installed between the fixing plates, the motor fixing seat is welded to the inner side of the conical ash hopper, the first motor reducer is installed on the motor fixing seat, the main shaft is installed on the main shaft fixing frame, the graphite bearing is installed between the main shaft and the main shaft fixing frame, the reducer is connected to the main shaft through a first locking nut, a screw, and a first key, the coupling connects the reducer and the first motor reducer, the bottom of the conical ash hopper is provided with a first discharge port, and the material level sensor is installed at the high and low positions of the conical ash hopper.

[0011] In one possible design, the cache tank D includes a fourth pneumatic ball valve, a cache tank, a first corrugated hose, a fifth pneumatic ball valve, a sixth pneumatic ball valve and a second corrugated hose, the fourth pneumatic ball valve is connected to the first discharge port, the cache tank is connected to the fourth pneumatic ball valve, the first corrugated hose is threadedly connected to the cache tank and the cylinder, the fifth pneumatic ball valve is installed in the first corrugated hose pipeline, a cache tank discharge port is provided at the lower part of the cache tank, the sixth pneumatic ball valve is installed on the cache tank discharge port, and the second corrugated hose is installed on the sixth pneumatic ball valve.

[0012] In a possible design, the oxidation bed E includes a planetary ash unloading valve, an oxidation bed shell and a temperature sensor. A first feed port is provided on the oxidation bed shell and is connected to the second corrugated hose of the cache tank. The planetary ash unloading valve is connected to the first feed port. The oxidation bed shell is covered with a skin. The oxidation bed shell is equipped with a front door and a rear door. The front door is equipped with a valve, and the rear door is equipped with a fan. Three temperature sensors are installed on the top of the oxidation bed shell, and a water supply port is provided on the side wall of the oxidation bed shell skin.

[0013] In one possible design, the water tank G includes a water tank shell, a support beam, a water supply hose, a water replenishment hose, a water pump, a liquid level gauge, an instrument mounting plate, a water supply pipe, a third manual ball valve, a water barrier plate and a solenoid valve. The water tank shell and the support beam are respectively installed on the front and rear sides below the water tank shell and connected to the oxidation bed shell. The water supply hose is installed on the water outlet side of the water pump. A water tank replenishment port is provided below the water tank shell. The water replenishment hose connects the water tank replenishment port and the water replenishment port for replenishing water to the system from the outside. The water pump is installed at the lowest point of the water tank G. The liquid level gauge is fixed on the instrument mounting plate. The instrument mounting plate is installed on one side of the water pump of the water tank G. The water supply pipe is connected to the water pump through a water supply hose. The third manual ball valve is installed in the water supply pipeline. The water barrier plate is welded on one side of the water supply pipe orifice. The solenoid valve is connected to the water pump and the humidifier H through a hose.

[0014] In a possible design, the humidifier H is installed in the oxidation bed shell and faces the conveying direction of the chain conveyor. The humidifier H includes: a humidifier shell, a second feed port, a second discharge port, a humidifier motor mounting seat, a humidifier base, a flange, a humidifier main shaft, a second motor reducer, four nozzles, a first bearing, a second key, a bearing seat, a second bearing, a gasket, a second locking nut, a bus, a nozzle hose and a feed hopper. The second discharge port is located on one side of the humidifier shell, the second feed port is located at one end of the humidifier shell, the humidifier motor mounting seat is installed on one side of the second discharge port, the humidifier base is welded to the bottom of the humidifier shell and one on each side, the flange is welded to the humidifier shell for connecting to the oxidation bed shell and sealing, and the The humidifier main shaft is installed inside the humidifier housing, and a stirring rod is welded at the front end of the humidifier main shaft in a spiral arrangement and a spiral blade is welded at the rear end. The second motor reducer is installed on the humidifier motor mounting seat by screws. Four nozzle fixing ports are provided on the humidifier housing, and four nozzles are respectively installed on the nozzle fixing ports. The first bearing is installed in the humidifier motor mounting seat, and the second key connects the second motor reducer and the humidifier main shaft. The bearing seat is installed on one side of the second feed port, and the second bearing is installed inside the bearing seat. The gasket and the second locking nut are installed on the stirring rod end of the humidifier main shaft, and the bus is installed on the humidifier housing. The nozzle hose connects the nozzle and the bus, and the feed hopper is installed on the second feed port.

[0015] In a possible design, the chain conveyor is installed inside the oxidation bed housing and below the planetary ash discharge valve.

[0016] It is to be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the invention.

[0017] The beneficial effects of the present invention are:

[0018] In the present invention, the secondary pollution to the working environment is reduced through automated dust cleaning, which greatly improves the working environment, further reduces the cost for the enterprise, and takes another step towards building a smart factory.

[0019] In the present invention, the product quality and production efficiency are improved by shortening the downtime waiting time of the crystal pulling furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the system structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0021] Figure 2 A schematic diagram of the main structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0022] Figure 3 A schematic diagram of the top view of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0023] Figure 4 A schematic cross-sectional view of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0024] Figure 5 A schematic diagram of the first part of the structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0025] Figure 6 A schematic diagram of a partial top view of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0026] Figure 7 A schematic cross-sectional view of a partial structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0027] Figure 8 A schematic diagram of a first partial structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0028] Fig. 9 A schematic diagram of a partial structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0029] Fig.10 A schematic diagram of the second part of the structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0030] Fig.11 A schematic diagram of the third part of the structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0031] Fig.12 A schematic diagram of the fourth structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0032] Fig.13 A schematic diagram of the fifth structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0033] Fig.14 A schematic diagram of the structure of a chain conveyor portion of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0034] Fig.15 A schematic diagram of a second partial structure of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0035] Fig.16 A third partial structural schematic diagram of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0036] Fig.17 A sixth structural schematic diagram of a crystal pulling oxygen-free ash conveying system provided by an embodiment of the present invention;

[0037] Fig.18 This is a schematic diagram of the eighth part of the structure of a crystal pulling oxygen-free ash conveying system provided in an embodiment of the present invention.

[0038] Reference numerals:

[0039] 1. Upper shell; 2. Lower shell; 3. Cleaning port; 4. First pneumatic ball valve; 5. First pulse valve; 6. Air bag; 7. First manual ball valve; 8. Purge nozzle; 9. First air outlet; 10. First air inlet; 11. Flower plate; 12. Bracket; 13. Fixed hanger; 14. Guide mechanism; 15. Movable hanger; 16. Spring; 17. Filter bag; 18. Cylinder; 19. Second pneumatic ball valve; 20. Second manual ball valve; 21. Third pneumatic ball valve; 22. Pipeline; 23. Leg; 24. Cylinder; 25. Ear; 26. Filter cartridge flower plate; 27. Filter cartridge; 28. Air bag bracket; 29. ​​Second air inlet; 30. Upper head; 31. Back-blowing pipe port; 32. Second air outlet; 33. Back-blowing air bag; 34. Second pulse valve; 35. Conical ash hopper; 36. Fixed plate; 37. Main shaft fixing bracket; 38. Motor fixing seat; 39. First motor reducer; 40. Main shaft; 41. Graphite bearing; 42. Material level sensor; 43. First locking nut; 44. Screw; 45. First key; 46. Reducer; 47. Coupling; 48. First outlet; 49. Fourth pneumatic ball valve; 50. Cache tank; 51. First corrugated hose; 52. Fifth pneumatic ball valve; 53. Cache tank outlet; 54. Sixth pneumatic ball valve; 55. Second corrugated hose; 56. First feed port; 57. Planetary ash discharge valve; 58. Oxidation bed shell; 59. Front door; 60. Rear door; 61. Valve; 62. Fan; 63. Temperature sensor; 66. Water supply port; 67. Chain conveyor; 68. Water tank shell; 69. Support beam; 70. Water hose; 71. Water supply port of water tank; 72. Water supply hose; 73. Water pump; 74. Liquid level meter; 75. Instrument installation Plate; 76, water pipe; 77, the third manual ball valve; 78, water barrier plate; 79, solenoid valve; 80, humidifier housing; 81, the second feed inlet; 82, the second discharge outlet; 83, the humidifier motor mounting seat; 84, the humidifier base; 85, flange; 86, the humidifier main shaft; 87, the second motor reducer; 88, the nozzle fixing port; 89, the nozzle; 90, the first bearing; 91, the second key; 92, the bearing seat; 93, the second bearing; 94, the gasket; 95, the second locking nut; 96, the bus; 97, the nozzle hose; 98, the feed hopper. DETAILED DESCRIPTION

[0040] The embodiments of the present invention are described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0041] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms, "connection" and "installation" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. In addition, "connection" can be a direct connection or an indirect connection through an intermediate medium. Among them, "fixed" means that they are connected to each other and the relative position relationship after connection remains unchanged. The directional terms mentioned in the embodiments of the present invention, such as "inside", "outside", "top", "bottom", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of the present invention, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0042] In the embodiments of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0043] In the embodiments of the present invention, "and / or" is only a description of the association relationship of the associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0044] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present invention. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0045] Example 1

[0046] Reference Figure 1-18, a crystal pulling oxygen-free ash conveying system, including: a crystal pulling furnace L located at the front end of the process, a simple harmonic dust collector A, an ash conveying pipeline B, a centralized dust collector C, a buffer tank D, an oxidation bed E, a chain conveyor 67 and a water tank G. The dust-containing gas generated by the crystal pulling furnace L is first sent to the simple harmonic dust collector A through an inert gas pipeline for dust removal. The simple harmonic dust collector A is composed of an upper shell 1, a lower shell 2, a ash cleaning port 3, a first pneumatic ball valve 4, a first pulse valve 5 and other components. The ash cleaning port 3 is located on one side of the lower shell 2 and is connected to the centralized dust collector C through the ash conveying pipeline B. The first pneumatic ball valve 4 and the first pulse valve 5 form a filter bag blowing pipeline for regularly cleaning the dust on the filter bag 17. A first air outlet 9 is provided on the upper shell 1, which is connected to the vacuum unit K1 through a pipeline to maintain a negative pressure state in the dust collector. The purge nozzle 8 is installed opposite the ash cleaning port 3 to provide additional purge force during ash cleaning.

[0047] The ash conveying pipeline B includes a second manual ball valve 20, a third pneumatic ball valve 21 and a pipeline 22, which together control the conveyance of dust from the simple harmonic dust collector A to the centralized dust collector C.

[0048] The centralized dust collector C includes a cylinder 24, a filter cartridge 27, a back-blowing air bag 33 and other components. The dust-containing gas enters the cylinder 24 from the second air inlet 29, is filtered by the filter cartridge 27, and the clean gas is discharged from the second air outlet 32 ​​and connected to the vacuum unit K3 through a pipeline. The dust is deposited in the conical ash hopper 35, and the dust can be discharged regularly through the drive of the main shaft 40 and the reducer 46.

[0049] The buffer tank D is used to temporarily store dust discharged from the centralized dust collector C. It includes components such as the fourth pneumatic ball valve 49 and the buffer tank 50. The dust enters the buffer tank 50 through the first discharge port 48 and the fourth pneumatic ball valve 49, and is then transported to the oxidation bed E through the second corrugated hose 55.

[0050] The oxidation bed E includes a planetary dust discharge valve 57, an oxidation bed shell 58 and other components. Dust enters the oxidation bed shell 58 from the first feed port 56 and is oxidized inside. A temperature sensor 63 is installed on the oxidation bed shell 58 to monitor the internal temperature. The front door 59 and the rear door 60 are respectively installed with a valve 61 and a fan 62 to control the inlet and outlet airflow.

[0051] The chain conveyor 67 is installed inside the oxidation bed shell 58 and below the planetary ash discharge valve 57, and is used to transport the processed dust to the subsequent process.

[0052] The water tank G includes a water tank housing 68, a water pump 73 and other components. It is used to provide the water required by the system and to transport water to the water plate 78 through a water pipe 76 to flush the dust left by the chain conveyor. The liquid level meter 74 is used to monitor the water level in the water tank.

[0053] Example 2

[0054] On the basis of the first embodiment, the second embodiment further includes:

[0055] Reference Figure 1-18 The humidifier H is installed in the oxidation bed housing 58 and is used to humidify the dust. It includes a humidifier housing 80, a second motor reducer 87, four nozzles 89 and other components. A stirring rod and a spiral blade are welded on the humidifier main shaft 86 to stir the dust during the humidification process. The second motor reducer 87 is connected to the humidifier main shaft 86 through a second key 91 to provide power. The four nozzles 89 are respectively installed on the humidifier housing 80 and connected to the bus 96 through a nozzle hose 97 to spray water mist evenly on the dust.

[0056] During use, the dust-containing gas generated by the crystal pulling furnace L first enters the simple harmonic dust collector A for dust removal, and then is transported to the centralized dust collector C through the ash conveying pipeline B for further treatment. The treated dust enters the buffer tank D for temporary storage, and then is oxidized by the oxidation bed E. Finally, the treated dust is transported to the subsequent process by the chain conveyor 67. The water tank G provides the water required by the system, and the dust is humidified by the humidifier H.

[0057] However, as is well known to those skilled in the art, the working principles and wiring methods of the cylinder 18, the first motor reducer 39, the level sensor 42, the reducer 46, the temperature sensor 63, the fan 62, and the second motor reducer 87 are commonplace, and are all conventional means or common knowledge, and will not be elaborated here. Those skilled in the art can make any optional selections according to their needs or convenience.

[0058] The working principle and use process of this technical solution are as follows: during the crystal pulling process of the crystal pulling furnace, clean inert gas protection is required. The negative pressure generated by the vacuum unit K1 causes a pressure difference at both ends of the pipeline from the vacuum unit K1 to the crystal pulling furnace. The inert gas carries the impurities and dust volatilized during the heating process of the raw materials from the crystal pulling furnace L. Under the action of the pressure difference, it passes through the pipeline to the first air inlet 10 of the simple harmonic dust collector A. The inert gas passes through the filter bag 17 to filter out dust impurities. The inert gas passes through the simple harmonic dust collector A to the first air outlet 9, and then through the vacuum pipeline to the vacuum unit K1, and is discharged to the gas recovery pipeline for back-end processing. After running for a period of time, the filter bag resistance of the simple harmonic dust collector A increases. In order to achieve the same gas flow rate, the frequency of the vacuum unit K1 will also increase. At this time, the filtering operation of the simple harmonic dust collector A needs to be stopped, and its filter bags and ash bins need to be cleaned to reduce the resistance of the filter bags. First, the second pneumatic ball valve 19 installed on the first air inlet 10 is closed to prevent the backblowing airflow from affecting the furnace pressure of the crystal pulling furnace L. At the same time, the filter cartridge dust collector and the vacuum unit K2 are started to ensure the normal production of the crystal pulling furnace L. After that, the filter bag 17 is backblown, and the air bag 6 releases a high-pressure and large-flow inert airflow instantaneously and intermittently through the first pulse valve 5 and the first pneumatic ball valve 4. The outer surface of the filter bag 17 is impacted by the instantaneous high-pressure gas to remove the attachments on the inner surface of the filter bag 17. After the backflush is stopped, the cylinder 18 is turned on for vibration. The cylinder 18 pushes the movable hanger 15 and moves downward along the guide mechanism 14. The spring 16 is stretched and the filter bag 17 is in a relaxed state. When the cylinder 18 is retracted, the movable hanger 15 suddenly loses its thrust. Under the action of the spring 16, the filter bag 17 is tightened and the filter bag 17 is pulled and tightened rapidly, shaking off the dust attached to the inner surface of the filter bag 17. The three groups of filter bags 17 are vibrated in turn. After several rounds of vibration, the dust removal operation begins. The dust accumulated in the lower shell 2 is removed. During the ash discharge operation, first open the second manual ball valve 20 and the third pneumatic ball valve 21 on the pipeline system B, open the first manual ball valve 7 (the first manual ball valve 7 is normally open and is used for manual closing in an emergency) and the first pneumatic ball valve 4 on the pipeline connecting the air bag 6, and the high-pressure inert gas in the air bag 6 passes through the pipeline through the four purge nozzles 8 to purge the dust in different directions of the lower shell 2. The high-pressure airflow carries the dust and is discharged to the second air inlet 29 of the centralized dust collector C through the ash conveying pipeline B. The dust is filtered by the filter cartridge 27 and falls into the conical ash hopper 35. The filtered inert gas is discharged from the second air outlet 32 ​​to the gas recovery pipeline through the vacuum unit K1 for collection, treatment and utilization. When the frequency of vacuum unit K3 is high, the centralized dust collector C, during the interval of dust collection, instantaneously and intermittently performs multiple rounds of back-blowing operations on the filter cartridge 27 through the back-blowing air bag 33 and the second pulse valve 34 to remove the dust attached to the outer surface of the filter cartridge, thereby reducing the resistance of the dust collection pipeline B. After collecting the dust from several simple harmonic dust collectors A, the centralized dust collector C performs the dust discharge operation, and the dust collection work of the centralized dust collector is not affected during the dust discharge operation.Open the fourth pneumatic ball valve 49 and the fifth pneumatic ball valve 52 to connect the buffer tank D with the centralized dust collector C, start the first motor reducer 39, transmit the torque to the reducer 46 through the coupling 47, and then to the main shaft 40. The spiral blades on the main shaft 40 push the dust into the buffer tank D. When the dust in the conical ash hopper 35 reaches the low position, the material level sensor 42 sends a signal, the first motor reducer 39 stops, and the fourth pneumatic ball valve 49 and the fifth pneumatic ball valve 52 are closed. Open the sixth pneumatic ball valve 54, and the dust in the buffer tank D is discharged to the oxidation bed E. Through the first feed port 56 to the planetary ash discharge valve 57, the dust is evenly spread by the planetary ash discharge valve 57 on the steel conveyor belt of the chain plate conveyor 67 below. The chain plate conveyor 67 runs slowly at a predetermined speed, and the fan 62 of the oxidation bed E replenishes air into the oxidation bed E at a set speed, and the dust and air are controlled. Oxidation. The remaining dust on the chain plate that returns to the bottom of the chain plate conveyor F falls into the water tank F below under the vibration of the equipment operation and the action of gravity. The bottom of the water tank F is welded at a certain slope to facilitate the flow of water. The dust in the water tank F is transported by the water pipe 76 to the water overflowing from the side of the water barrier 78 of the water tank, and the dust is washed to the lowest point of the water tank. The water pump 73 transports part of the water mixed with dust back to the side of the water barrier 78, and the other part is transported to the humidifier H for dust humidification and reprocessing. The humidifier H is connected to the shell of the oxidation bed E through the flange 85 on the humidifier shell 80 to ensure the sealing of the oxidation bed shell 58. The second discharge port 82 of the humidifier H is placed on the outer side 58 of the oxidation bed shell for dust recovery after humidification and extrusion. The dust transported to the end by the chain conveyor F falls into the feed hopper 98 of the humidifier H. The second motor reducer 87 starts to drive the humidifier main shaft 86. The humidifier main shaft 86 spirally arranges welded stirring rods to stir the dust from the second feed port 81 to the second discharge port 82. The solenoid valve 79 of the water tank G opens, and water is transported to the bus 96 of the humidifier H along the water hose 70. The water is distributed to each of the four nozzles 89 through the bus to humidify the dust. The humidified dust is gradually discharged by the humidifier main shaft 86 toward the second discharge port 82. While the dust is discharged, it is humidified, stirred and squeezed by the spiral humidifier H. After the dust is humidified and squeezed, the surface area of ​​the dust is greatly reduced, which reduces the activity of the dust. The treated dust is safer, the product quality and production efficiency are further improved, the burn-through phenomenon of the filter bag is reduced, the conveying efficiency is high, the conveying is in a closed environment, the degree of automation is high, the downtime is shortened, and it is safe and reliable, which saves manpower and time costs for the enterprise and improves the working environment of the workshop. Through automated dust cleaning, the secondary pollution to the working environment is reduced, the working environment is greatly improved, and the cost is further reduced for the enterprise. Building a smart factory has taken another step forward.

[0059] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention; the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A crystal pulling oxygen-free ash conveying system, characterized in that: include: A crystal pulling furnace L located at the front end of the process and a simple harmonic dust collector A for filtering and collecting impurities generated during the crystal pulling process, an ash conveying pipeline B, a centralized dust collector C, a buffer tank D, an oxidation bed E, a chain conveyor (67) and a water tank G. A cartridge dust collector J and a vacuum unit K2 are connected between the crystal pulling furnace L and the simple harmonic dust collector A via an emergency pipeline. The crystal pulling furnace L is connected to the simple harmonic dust collector A via an inert gas pipeline. The simple harmonic dust collector A comprises an upper shell (1), a lower shell (2), an ash cleaning port (3), a first pneumatic ball valve (4), a first A pulse valve (5), four purge pipelines, a flower plate (11), a bracket (12), a fixed hanger (13), a guide mechanism (14), a movable hanger (15), a spring (16), a filter bag (17), a cylinder (18) and a second pneumatic ball valve (19); the ash cleaning port (3) is located on one side of the lower shell (2) and is connected to the ash conveying pipeline B; the first pneumatic ball valve (4) and the first pulse valve (5) form a filter bag blowing pipeline; the upper shell (1) is provided with a first air outlet (9); the upper side of the lower shell (2) is provided with a There is a first air inlet (10), the upper shell (1) is provided with an air bag (6), the purge pipeline is composed of a first manual ball valve (7) and a purge nozzle (8), the purge nozzle (8) is installed at an appropriate position opposite to the dust cleaning port (3), there are four purge nozzles (8), the first air outlet (9) is connected to a vacuum unit K1 through a pipeline, the flower plate (11) is welded to the lower shell (2), the bracket (12) is installed on the flower plate (11), the fixed hanger (13) is installed on the bracket (12), and the The fixing seat of the guide mechanism (14) is installed on the fixed hanger (13), the guide rod of the guide mechanism (14) is installed on the movable hanger (15), the spring (16) connects the movable hanger (15) and the fixed hanger (13), the filter bag (17) is installed between the movable hanger (15) and the flower plate (11), the cylinder (18) is installed in the upper shell (1), the second pneumatic ball valve (19) is installed at the first air inlet (10) and connected to the crystal pulling furnace pipeline, and the water tank G is installed below the chain conveyor (67).

2. The crystal pulling oxygen-free ash conveying system according to claim 1, characterized in that: The ash conveying pipeline B comprises a second manual ball valve (20), a third pneumatic ball valve (21) and a pipeline (22); the second manual ball valve (20) and the third pneumatic ball valve (21) are both installed at the front end of the pipeline (22); the front end of the ash conveying pipeline B is connected to a simple harmonic dust collector A and the rear end is connected to a centralized dust collector C.

3. The crystal pulling oxygen-free ash conveying system according to claim 1, characterized in that: The centralized dust collector C comprises a support leg (23), a cylinder (24), a filter cartridge plate (26), a filter cartridge (27), an air bag bracket (28), a second air inlet (29), an upper head (30), a back-blowing pipe opening (31), a second air outlet (32), a back-blowing air bag (33), a second pulse valve (34), a conical ash hopper (35), a main shaft fixing plate (36), a main shaft fixing frame (37), a motor fixing seat (38), a first motor reducer (39), a main shaft (40), a graphite bearing (41), a material level sensor (42), a first locking nut (43), a screw ( 44), a first key (45), a reducer (46) and a coupling (47), the cylinder (24) is mounted on the support leg (23) through the support ear (25), the filter cartridge flower plate (26) is welded inside the cylinder (24), the filter cartridge (27) is mounted on the filter cartridge flower plate (26), the air bag bracket (28) is welded to the outside of the cylinder (24), the second air inlet (29) is located at the lower side of the upper cylinder (24) and connected to the ash conveying pipeline B, the upper head (30) is mounted on the cylinder (24), the back-blowing pipe port (31) is located on the side wall of the upper head (30), and the first The second air outlet (32) is located on the side wall of the upper head (30) and is connected to the vacuum unit K3 through a pipeline. The back-blowing air bag (33) is installed on the air bag bracket (28). The second pulse valve (34) connects the back-blowing air bag (33) and the back-blowing pipe port (31). The conical ash hopper (35) is installed at the lower part of the cylinder (24). The main shaft fixing plate (36) is welded to the inner side of the conical ash hopper (35). The main shaft fixing frame (37) is installed between the fixing plates (36). The motor fixing seat (38) is welded to the inner side of the conical ash hopper (35). The first motor reducer (3 9) is installed on the motor fixing seat (38), the main shaft (40) is installed on the main shaft fixing frame (37), the graphite bearing (41) is installed between the main shaft (40) and the main shaft fixing frame (37), the reducer (46) is connected to the main shaft (40) through a first locking nut (43), a screw (44), and a first key (45), the coupling (47) connects the reducer (46) and the first motor reducer (39), the bottom of the conical ash hopper (35) is provided with a first discharge port (48), and the material level sensor (42) is installed at the high and low positions of the conical ash hopper (35).

4. The crystal pulling oxygen-free ash conveying system according to claim 1, characterized in that: The cache tank D includes a fourth pneumatic ball valve (49), a cache tank (50), a first corrugated hose (51), a fifth pneumatic ball valve (52), a sixth pneumatic ball valve (54) and a second corrugated hose (55). The fourth pneumatic ball valve (49) is connected to the first discharge port (48), the cache tank (50) is connected to the fourth pneumatic ball valve (49), the first corrugated hose (51) is threadedly connected to the cache tank (50) and the cylinder (24), the fifth pneumatic ball valve (52) is installed in the pipeline of the first corrugated hose (51), the cache tank (50) is provided with a cache tank discharge port (53) at the lower part, the sixth pneumatic ball valve (54) is installed on the cache tank discharge port (53), and the second corrugated hose (55) is installed on the sixth pneumatic ball valve (54).

5. The crystal pulling oxygen-free ash conveying system according to claim 1, characterized in that: The oxidation bed E includes a planetary ash discharge valve (57), an oxidation bed shell (58) and a temperature sensor (63). The oxidation bed shell (58) is provided with a first feed port (56) and is connected to the second corrugated hose (55) of the buffer tank. The planetary ash discharge valve (57) is connected to the first feed port (56). The oxidation bed shell (58) is covered with a skin. The oxidation bed shell (58) is equipped with a front door (59) and a rear door (60). The front door (59) is equipped with a valve (61), and the rear door (60) is equipped with a fan (62). Three temperature sensors (63) are installed on the top of the oxidation bed shell (58), and a water supply port (66) is provided on the side wall of the skin of the oxidation bed shell (58).

6. The crystal pulling oxygen-free ash conveying system according to claim 1, characterized in that: The water tank G comprises a water tank shell (68), a support beam (69), a water delivery hose (70), a water supply hose (72), a water pump (73), a liquid level meter (74), an instrument mounting plate (75), a water delivery pipe (76), a third manual ball valve (77), a water barrier plate (78) and a solenoid valve (79). The water tank shell (68) and the support beam (69) are respectively mounted on the front and rear sides below the water tank shell (68) and connected to the oxidation bed shell (58). The water delivery hose (70) is mounted on the water outlet side of the water pump (73). A water tank water supply port (71) is provided below the water tank shell (68). The water supply hose (72) connects the water supply port (71) of the water tank and the water supply port (66) for supplying water to the system from the outside. The water pump (73) is installed at the lowest point of the water tank G. The liquid level meter (74) is fixed on the instrument mounting plate (75). The instrument mounting plate (75) is installed on one side of the water pump (73) of the water tank G. The water delivery pipe (76) is connected to the water pump (73) through the water delivery hose (70). The third manual ball valve (77) is installed in the water delivery pipeline. The water barrier plate (78) is welded on one side of the pipe mouth of the water delivery pipe (76). The solenoid valve (79) is connected to the water pump (73) and the humidifier H through a hose.

7. The crystal pulling oxygen-free ash conveying system according to claim 6, characterized in that: The humidifier H is installed in the oxidation bed housing (58) and faces the conveying direction of the chain conveyor (67). The humidifier H includes: a humidifier housing (80), a second feed port (81), a second discharge port (82), a humidifier motor mounting seat (83), a humidifier base (84), a flange (85), a humidifier main shaft (86), a second motor reducer (87), four nozzles (89), a first bearing (90), a second key (91), a bearing seat (92), a second bearing (93), a gasket (94), and a second locking A nut (95), a bus bar (96), a nozzle hose (97) and a feed hopper (98), the second discharge port (82) is located on one side of the humidifier housing (80), the second feed port (81) is located at one end of the humidifier housing (80), the humidifier motor mounting base (83) is installed on one side of the second discharge port (82), the humidifier base (84) is welded to the bottom of the humidifier housing (80) and one on each side, the flange (85) is welded to the humidifier housing (80) for connecting to the oxidation bed housing (58) and sealing, the The humidifier main shaft (86) is installed inside the humidifier housing (80), the front end of the humidifier main shaft (86) is welded with a stirring rod arranged in a spiral shape, and the rear end is welded with a spiral blade, the second motor reducer (87) is installed on the humidifier motor mounting seat (83) by screws, the humidifier housing (80) is provided with four nozzle fixing ports (88), and the four nozzles (89) are respectively installed on the nozzle fixing ports (88), the first bearing (90) is installed in the humidifier motor mounting seat (83), and the second key (91 ) connects the second motor reducer (87) and the humidifier main shaft (86), the bearing seat (92) is installed on one side of the second feed port (81), the second bearing (93) is installed inside the bearing seat (92), the gasket (94) and the second locking nut (95) are installed on the stirring rod end of the humidifier main shaft (86), the bus (96) is installed on the humidifier housing (80), the nozzle hose (97) connects the nozzle (89) and the bus (96), and the feed hopper (98) is installed on the second feed port (81).

8. The crystal pulling oxygen-free ash conveying system according to claim 5, characterized in that: The chain conveyor (67) is installed inside the oxidation bed shell (58) and below the planetary ash discharge valve (57).

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