Anti-fragmentation horizontal quartz boat cleaning equipment

Abstract

The invention discloses anti-fragmentation horizontal quartz boat cleaning equipment, and relates to the technical field of quartz boat cleaning, the anti-fragmentation horizontal quartz boat cleaning equipment comprises a rectangular water tank, and arc-shaped water pipes are arranged on the two sides of the rectangular water tank; the arc-shaped water passing plate is arranged to be an arc-shaped plate body internally provided with an arc-shaped cavity, a high-pressure water pump is arranged on the outer side of the arc-shaped water passing plate, and an arc-shaped round hole is formed in the inner side of the arc-shaped water passing plate. The situation that residual acid liquid on the surface of the quartz boat is still difficult to remove, and then the quartz boat is carried and treated, so that the quartz boat is easily broken and damaged, and use is affected is prevented; a V-shaped flow guide plate is arranged on the inner wall of an arc-shaped water passing plate to chock water flow sprayed in under high pressure, so that the water flow is sprayed out under high pressure through an arc-shaped round hole; and the situation that water flow sprayed into the arc-shaped water passing plate at high pressure is directly sprayed out from a part of the arc-shaped round holes and is difficult to uniformly spray out from each arc-shaped round hole is prevented.

Description

Technical Field

[0001] The invention relates to the technical field of quartz boat cleaning, and in particular to a horizontal quartz boat cleaning device that is anti-fragmentation. Background Art

[0002] Quartz boats are usually used in the semiconductor, photovoltaic and other industries to carry silicon wafers and other materials for high-temperature treatment (such as diffusion, annealing and other processes). The silicon wafer diffusion process is to insert the silicon wafer on the quartz boat, and then put the quartz boat and the silicon wafer into the quartz tube, and then put them into the high-temperature diffusion furnace. After that, a certain amount of gas containing diffusion source is introduced into the tail of the furnace tube. Under high temperature conditions, the diffusion source gas reacts chemically with the silicon wafer to complete the diffusion process. After each diffusion process, a certain amount of diffused particles will remain on the surface of the quartz boat, and the quartz boat is in direct contact with the silicon wafer. Therefore, the cleanliness of the surface of the quartz boat directly affects the quality of the entire diffusion process.

[0003] In the existing quartz boat cleaning process, the quartz boat is usually tilted by immersion and acid washing, and the quartz boat needs to be transported back and forth for processing again after cleaning. Since the acid liquid still remains on the surface of the quartz boat and is difficult to remove, the quartz boat is easily broken and damaged after transportation and processing, affecting its use. Therefore, we propose an anti-fragmentation horizontal quartz boat cleaning equipment. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a horizontal quartz boat cleaning device that prevents breakage, comprising:

[0005] An annular electric slide rail, wherein a bottom column is arranged on the outer side of the annular electric slide rail;

[0006] An electric slide rail, one side of which is provided with a clamping device;

[0007] A cleaning device, which cleans the horizontal quartz boat by high-pressure spraying to prevent acid residues on the surface of the quartz boat that are difficult to remove and which may cause breakage and damage to the quartz boat during transportation and affect its use;

[0008] The outer side of the annular electric slide rail is fixedly connected to the top of the bottom column, one side of the annular electric slide rail is rotatably connected to one side of the electric slide rail, and the side of the electric slide rail away from the annular electric slide rail is slidably connected to one side of the clamping device;

[0009] Wherein, the cleaning device comprises:

[0010] A rectangular water tank, wherein arc-shaped water pipes are arranged on both sides of the rectangular water tank;

[0011] An arc-shaped water-passing plate, which is configured as an arc-shaped plate body having an arc-shaped cavity inside, and a high-pressure water pump is disposed outside the arc-shaped water-passing plate;

[0012] The inner side of the arc-shaped water-passing plate is provided with an arc-shaped circular hole, and the horizontal quartz boat is washed under high pressure by opening the arc-shaped circular hole with a smaller aperture, so as to prevent the acid liquid from remaining on the surface of the quartz boat and being difficult to remove, which may cause the quartz boat to be broken and damaged during transportation and affect its use;

[0013] One side of the rectangular water tank is connected to one end of the arc-shaped water pipe, one end of the arc-shaped water pipe away from the rectangular water tank is connected to the water inlet of the high-pressure water pump, and the water outlet of the high-pressure water pump is connected to the outer side of the arc-shaped water-passing plate;

[0014] The inner wall of the arc-shaped water-passing plate is fixedly connected with a V-shaped guide plate, and the V-shaped guide plate is arranged on the inner wall of the arc-shaped water-passing plate to block the water flow sprayed in at high pressure, so that the water flow can be sprayed out at high pressure through the arc-surface circular holes, and the water flow sprayed into the arc-shaped water-passing plate at high pressure is prevented from being directly sprayed out from a part of the arc-surface circular holes and being difficult to be sprayed out uniformly from each arc-surface circular hole. The bottom of the arc-shaped water-passing plate is fixedly connected with an arc-shaped connecting rod, and the inner wall of the rectangular water tank is fixedly connected with a square filter plate, and the square filter plate is arranged in the rectangular water tank to filter the cleaned water, so as to prevent the water containing debris after cleaning the quartz boat from being recycled in the rectangular water tank and being difficult to be recycled. The top of the rectangular water tank is fixedly connected with a corrugated rubber pad, and the corrugated rubber pad of elastic material is arranged on the rectangular water tank to slow down the hard damage caused by the horizontal quartz boat falling, so as to prevent the horizontal quartz boat from colliding with the hard tip on the top of the rectangular water tank when it falls down after cleaning, causing damage and being difficult to use.

[0015] One end of the arc-shaped connecting rod away from the arc-shaped water-passing plate is fixedly connected to one side of the rectangular water tank, and a plurality of the arc-shaped connecting rods are provided, and the plurality of the arc-shaped connecting rods are distributed at the bottom of the arc-shaped water-passing plate;

[0016] There are two arc-shaped water pipes, and the two arc-shaped water pipes are respectively distributed on both sides of the rectangular water tank.

[0017] Furthermore, the clamping device includes an arc-shaped clamping plate, and a hollow air cushion is fixedly connected to the inner side of the arc-shaped clamping plate. A hollow air cushion made of elastic material is arranged on the inner side of the arc-shaped clamping plate to perform elastic adaptive contact with the horizontal quartz boat, so as to prevent the arc-shaped clamping plate from being in direct hard contact with the horizontal quartz boat and causing hard wear on its surface due to difficulty in controlling the force. Square holes are provided on the top and bottom of the hollow air cushion, and a square sponge board is fixedly connected to the inner wall of the square hole. When the square sponge board is squeezed and compressed, the moisture absorbed inside will overflow to the outside, so as to prevent the square sponge board from absorbing too much moisture for a long time and having poor water permeability, resulting in the inability to discharge the accumulated water inside the hollow air cushion in time and continuous accumulation. An arc-shaped gasket is fixedly connected to the inner wall of the hollow air cushion, and an arc-shaped gasket is arranged between the inner wall of the hollow air cushion and the ventilation mechanism to isolate the hollow air cushion from hard contact with the ventilation mechanism, so as to prevent the hollow air cushion from being squeezed and compressed and deformed. The ventilating mechanism on the inner wall causes an indentation on the horizontal quartz boat, the outer side of the arc-shaped gasket is fixedly connected with a ventilating mechanism, the outer surface of the ventilating mechanism is sleeved and slidably connected with a return spring, the return spring which loses the extrusion force pushes the arc-shaped gasket through the extension force to make the hollow air cushion expand and recover, so as to prevent the hollow air cushion from being greatly affected by the compression force after repeated use and being difficult to recover to the initial shape through the elastic restoring force, one side of the arc-shaped splint is slidably connected with one side of the electric slide rail, the arc-shaped splints are provided with a plurality of, and the plurality of arc-shaped splints are distributed on one side of the electric slide rail, the hollow air cushion is provided with a rubber body having an arc-shaped cavity inside, the arc-shaped gaskets are provided with a plurality of, and the plurality of arc-shaped gaskets are distributed on the inner wall of the hollow air cushion, the end of the ventilating mechanism away from the arc-shaped gasket passes through the hollow air cushion and extends to the outer side of the arc-shaped splint, and the end of the return spring away from the arc-shaped gasket is fixedly connected to the inner wall of the hollow air cushion.

[0018] Furthermore, the ventilation mechanism includes a circular through-tube, the outer surface of which is provided with a circular ventilation hole. By providing a plurality of circular ventilation holes on the outer surface of the circular through-tube, the gas inside the hollow air cushion can be discharged in time to prevent the hollow air cushion from being damaged by explosion due to excessive internal gas pressure being too high and difficult to be discharged in time when the hollow air cushion is squeezed too much. A dust filter circular plate is fixedly connected to one end of the circular through-tube, and a dust filter circular plate is provided on a side of the circular through-tube away from the hollow air cushion to filter the gas entering the circular through-tube to prevent the external gas from being sucked into the circular through-tube and gradually accumulating mixed dust therein, which affects the subsequent ventilation effect. An inner oblique ring plate is fixedly connected to the side of the dust filter circular plate close to the circular through-tube, and an inner oblique ring plate is provided on the inner wall of the circular through-tube to filter water droplets accidentally entering the circular through-tube through the oblique ring plate. The circular through-tube is guided out of the surface to prevent water droplets that accidentally flow into the dust filter circular plate in the circular through-tube from continuously accumulating in the circular through-tube and overflowing into the hollow air cushion. The side of the inner oblique ring plate away from the dust filter circular plate is fixedly connected with an arc-shaped ring plate. The arc-shaped ring plate is arranged on the side of the inner oblique ring plate away from the dust filter circular plate to seal the gap area between the inner oblique ring plate and the circular through-tube, so that water that continuously accumulates in the circular through-tube is prevented from accumulating in the gap between the inner oblique ring plate and the circular through-tube and being difficult to discharge. One end of the circular through-tube away from the dust filter circular plate is fixedly connected to the outer side of the arc-shaped gasket, and one end of the circular through-tube close to the dust filter circular plate passes through the hollow air cushion and extends to the outside of the arc-shaped clamping plate. The outer side of the circular through-tube is slidably connected to the inner side of the reset spring, and the outer side of the arc-shaped ring plate is fixedly connected to the inner wall of the circular through-tube.

[0019] The present invention has the beneficial effects:

[0020] 1. The present invention provides curved circular holes with smaller apertures to perform high-pressure washing on the horizontal quartz boat, thereby preventing acid liquid from remaining on the surface of the quartz boat and being difficult to remove, which may cause the quartz boat to be easily broken and damaged during transportation and processing, thus affecting its use; a hollow air cushion made of elastic material is provided on the inner side of the curved clamping plate to perform elastic adaptive contact with the horizontal quartz boat, thereby preventing the curved clamping plate from being in direct hard contact with the horizontal quartz boat and causing hard wear on its surface due to difficulty in controlling the force; and a plurality of ventilating circular holes are provided on the outer surface of the circular through-tube to facilitate timely discharge of the internal gas of the hollow air cushion, thereby preventing the internal gas pressure of the hollow air cushion from being too high and being difficult to be discharged in time when the hollow air cushion is squeezed too much, thereby preventing explosion damage caused by excessive internal gas pressure.

[0021] 2. The present invention provides a cleaning device and performs high-pressure cleaning on the horizontal quartz boat by opening arc-surface circular holes with smaller apertures, so as to prevent acid liquid from remaining on the surface of the quartz boat and being difficult to remove, which may cause the quartz boat to be broken and damaged easily after being transported and handled, affecting its use; a V-shaped guide plate is provided on the inner wall of the arc-shaped water-passing plate to block the water flow sprayed in at high pressure, so as to facilitate the water flow to be sprayed out at high pressure through the arc-surface circular holes, and prevent the water flow sprayed into the arc-shaped water-passing plate at high pressure from being directly sprayed out from a part of the arc-surface circular holes and being difficult to be sprayed out from each arc-surface circular hole evenly; a square filter plate is provided in the rectangular water tank to filter the cleaned water, so as to prevent the water containing debris after cleaning the quartz boat from being difficult to be recycled after being recovered in the rectangular water tank; a corrugated rubber pad made of elastic material is provided on the rectangular water tank to mitigate the hard damage caused by the falling of the horizontal quartz boat, so as to prevent the horizontal quartz boat from colliding with the hard tip on the top of the rectangular water tank when it falls down after cleaning, causing damage and being difficult to use.

[0022] 3. The present invention provides a clamping device and a hollow air cushion made of elastic material on the inner side of the arc-shaped clamping plate to perform elastic adaptive contact with the horizontal quartz boat, thereby preventing the arc-shaped clamping plate from directly and hard contacting with the horizontal quartz boat and causing hard wear on its surface due to difficulty in controlling the force; and provides an arc-shaped gasket between the inner wall of the hollow air cushion and the ventilation mechanism to isolate the hard contact between the hollow air cushion and the ventilation mechanism, thereby preventing the ventilation mechanism of the inner wall from causing indentations on the horizontal quartz boat when the hollow air cushion is squeezed and compressed and deformed; when the square sponge plate is squeezed and compressed, the moisture absorbed inside will overflow to the outside, thereby preventing the square sponge plate from absorbing too much moisture for a long time and having poor water permeability, resulting in the inability to discharge the accumulated water inside the hollow air cushion in time and continuing to accumulate; the reset spring that loses the extrusion force pushes the arc-shaped gasket through the extension force to make the hollow air cushion expand and recover, thereby preventing the hollow air cushion from being greatly affected by the compression force after repeated use and being difficult to recover to its original shape through the elastic restoring force.

[0023] 4. The present invention provides a ventilation mechanism, and a plurality of ventilation circular holes are opened on the outer surface of the circular tube to facilitate timely discharge of the internal gas of the hollow air cushion, so as to prevent the hollow air cushion from being damaged by explosion due to excessive internal gas pressure being too high and difficult to be discharged in time when the hollow air cushion is squeezed too much; a dust filter circular plate is provided on the side of the circular tube away from the hollow air cushion to filter the gas entering the circular tube, so as to prevent the external gas from being sucked into the circular tube and gradually accumulating mixed dust therein, affecting the subsequent ventilation effect; an inner oblique ring plate is provided on the inner wall of the circular tube to guide water droplets accidentally entering the circular tube out of the circular tube through the inclined surface, so as to prevent water droplets accidentally flowing into the circular tube and passing through the dust filter circular plate from continuously accumulating in the circular tube and overflowing into the hollow air cushion; an arc-shaped ring plate is provided on the side of the inner oblique ring plate away from the dust filter circular plate to seal the gap area between the inner oblique ring plate and the circular tube, so as to prevent the water continuously accumulated in the circular tube from accumulating in the gap between the inner oblique ring plate and the circular tube and being difficult to be discharged. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of the horizontal quartz boat cleaning equipment of the present invention;

[0025] Figure 2 This is a schematic diagram of the bottom structure of the horizontal quartz boat cleaning equipment of the present invention;

[0026] Figure 3 It is a schematic diagram of the structure of the cleaning device of the present invention;

[0027] Figure 4 It is a schematic diagram of the bottom side cross-section structure of the cleaning device of the present invention;

[0028] Figure 5 It is a schematic diagram of the structure of the clamping device of the present invention;

[0029] Figure 6 It is a schematic diagram of the internal structure of the clamping device of the present invention;

[0030] Figure 7 It is a schematic diagram of the structure of the ventilation mechanism of the present invention;

[0031] Figure 8 It is a schematic diagram of the side section structure of the ventilation mechanism of the present invention;

[0032] In the figure: 1. annular electric slide rail; 2. bottom column; 3. electric slide rail; 4. cleaning device; 5. clamping device; 401. rectangular water tank; 402. arc-shaped water pipe; 403. arc-shaped water-passing plate; 404. high-pressure water pump; 405. arc-shaped circular hole; 406. V-shaped guide plate; 407. arc-shaped connecting rod; 408. square filter plate; 409. corrugated rubber pad; 501. arc-shaped clamping plate; 502. hollow air cushion; 503. square hole; 504. square sponge plate; 505. arc-shaped gasket; 506. ventilation mechanism; 507. reset spring; 5061. circular through-tube; 5062. ventilation circular hole; 5063. dust filter circular plate; 5064. inner oblique ring plate; 5065. arc-shaped ring plate. DETAILED DESCRIPTION

[0033] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

[0034] For the first embodiment, please refer to Figure 1-Figure 4 The present invention is a horizontal quartz boat cleaning device that prevents breakage, comprising:

[0035] An annular electric slide rail 1, with a bottom column 2 disposed on the outer side of the annular electric slide rail 1;

[0036] An electric slide rail 3, a clamping device 5 is provided on one side of the electric slide rail 3;

[0037] A cleaning device 4, which cleans the horizontal quartz boat by high-pressure spraying;

[0038] The outer side of the annular electric slide rail 1 is fixedly connected to the top of the bottom column 2, one side of the annular electric slide rail 1 is rotatably connected to one side of the electric slide rail 3, and the side of the electric slide rail 3 away from the annular electric slide rail 1 is slidably connected to one side of the clamping device 5;

[0039] Wherein, the cleaning device 4 comprises:

[0040] A rectangular water tank 401, with arc-shaped water pipes 402 disposed on both sides of the rectangular water tank 401;

[0041] An arc-shaped water-passing plate 403, wherein the arc-shaped water-passing plate 403 is configured as an arc-shaped plate body having an arc-shaped cavity inside, and a high-pressure water pump 404 is disposed outside the arc-shaped water-passing plate 403;

[0042] A curved circular hole 405 is provided on the inner side of the curved water-passing plate 403;

[0043] One side of the rectangular water tank 401 is connected to one end of the arc-shaped water pipe 402, and one end of the arc-shaped water pipe 402 away from the rectangular water tank 401 is connected to the water inlet of the high-pressure water pump 404, and the water outlet of the high-pressure water pump 404 is connected to the outer side of the arc-shaped water-passing plate 403;

[0044] The inner wall of the arc-shaped water-passing plate 403 is fixedly connected with a V-shaped guide plate 406, the bottom of the arc-shaped water-passing plate 403 is fixedly connected with an arc-shaped connecting rod 407, the inner wall of the rectangular water tank 401 is fixedly connected with a square filter plate 408, and the top of the rectangular water tank 401 is fixedly connected with a corrugated rubber pad 409;

[0045] One end of the arc-shaped connecting rod 407 away from the arc-shaped water-passing plate 403 is fixedly connected to one side of the rectangular water tank 401. A plurality of arc-shaped connecting rods 407 are provided, and the plurality of arc-shaped connecting rods 407 are distributed at the bottom of the arc-shaped water-passing plate 403.

[0046] There are two arc-shaped water pipes 402, and the two arc-shaped water pipes 402 are respectively distributed on both sides of the rectangular water tank 401, and the horizontal quartz boat is placed between two symmetrical clamping devices 5. When in use, the two symmetrical clamping devices 5 are driven to move inward by the electric slide rail 3 to perform elastic contact adaptation clamping on the horizontal quartz boat, and then the horizontal quartz boat can be fully cleaned by the cleaning device 4. At the same time, the electric slide rail 3 can be driven to rotate by the annular electric slide rail 1 so that the clamped horizontal quartz boat rotates together. When the horizontal quartz boat rotates, the cleaning device 4 can fully clean it and pour out the accumulated water in the horizontal quartz boat. The water in the rectangular water tank 401 is pumped from the arc-shaped water pipe 402 to the arc-shaped water-passing plate 403 by the high-pressure water pump 404. The water entering the arc-shaped water-passing plate 403 contacts the V-shaped guide plate 406 and flows along the inclined path of the V-shaped guide plate 406 until the arc-shaped water-passing plate 403 is filled with water. The water flow will be sprayed outward through the arc surface circular hole 405. The horizontal quartz boat is washed with high pressure by opening the arc surface circular hole 405 with a smaller aperture. The V-shaped guide plate 406 is provided on the inner wall of the arc water-passing plate 403 to block the water flow sprayed in with high pressure, so that the water flow can be sprayed out with high pressure through the arc surface circular hole 405. The water flow washed on the horizontal quartz boat will fall into the rectangular water tank 401 and be filtered by the square filter plate 408 and stored at the bottom of the square filter plate 408. The square filter plate 408 is provided in the rectangular water tank 401 to filter the washed water. After the horizontal quartz boat is washed, the clamping device 5 can be driven by the electric slide rail 3 to release the clamping of the horizontal quartz boat. At this time, the horizontal quartz boat falls on the corrugated rubber pad 409 on the rectangular water tank 401 and waits to be removed. The corrugated rubber pad 409 made of elastic material is provided on the rectangular water tank 401 to slow down the hard damage caused by the falling of the horizontal quartz boat.

[0047] For the second embodiment, please refer to Figure 1-Figure 8The present invention provides a horizontal quartz boat cleaning device that prevents breakage: the clamping device 5 includes an arc-shaped clamping plate 501, a hollow air cushion 502 is fixedly connected to the inner side of the arc-shaped clamping plate 501, a square hole 503 is opened on the top and bottom of the hollow air cushion 502, a square sponge plate 504 is fixedly connected to the inner wall of the square hole 503, an arc-shaped gasket 505 is fixedly connected to the inner wall of the hollow air cushion 502, a ventilation mechanism 506 is fixedly connected to the outer side of the arc-shaped gasket 505, a reset spring 507 is sleeved and slidably connected to the outer surface of the ventilation mechanism 506, and the arc-shaped clamping plate 501 is fixedly connected to the inner wall of the hollow air cushion 502. One side of 1 is slidably connected with one side of the electric slide rail 3, a plurality of arc-shaped clamping plates 501 are provided, and the plurality of arc-shaped clamping plates 501 are distributed on one side of the electric slide rail 3, the hollow air cushion 502 is provided as a rubber body with an arc-shaped cavity inside, a plurality of arc-shaped gaskets 505 are provided, and the plurality of arc-shaped gaskets 505 are distributed on the inner wall of the hollow air cushion 502, one end of the ventilation mechanism 506 away from the arc-shaped gasket 505 penetrates the hollow air cushion 502 and extends to the outside of the arc-shaped clamping plate 501, and one end of the return spring 507 away from the arc-shaped gasket 505 is fixedly connected to the inner wall of the hollow air cushion 502;

[0048] The ventilation mechanism 506 includes a circular through-tube 5061, the outer surface of which is provided with a ventilation circular hole 5062, one end of the circular through-tube 5061 is fixedly connected to a dust filter circular plate 5063, the side of the dust filter circular plate 5063 close to the circular through-tube 5061 is fixedly connected to an inner oblique ring plate 5064, the side of the inner oblique ring plate 5064 away from the dust filter circular plate 5063 is fixedly connected to an arcuate ring plate 5065, the end of the circular through-tube 5061 away from the dust filter circular plate 5063 is fixedly connected to the outer side of the arcuate gasket 505, the end of the circular through-tube 5061 close to the dust filter circular plate 5063 passes through the hollow air cushion 502 and extends to the outer side of the arcuate clamping plate 501, the outer side of the circular through-tube 5061 is slidably connected to the inner side of the reset spring 507, and the arcuate ring The outer side of plate 5065 is fixedly connected to the inner wall of circular through-tube 5061. When in use, before cleaning the horizontal quartz boat, the two symmetrically arranged arc-shaped clamping plates 501 are driven to move inward by the electric slide rail 3. When the arc-shaped clamping plates 501 move, the hollow air cushion 502 on the inner side is driven to move together. When the hollow air cushion 502 moves, it will elastically contact with the horizontal quartz boat. When the arc-shaped clamping plates 501 continue to move, the hollow air cushion 502 is squeezed and compressed by the horizontal quartz boat. The gas inside the hollow air cushion 502 is also compressed and discharged to the outside through the ventilation mechanism 506. When the hollow air cushion 502 is compressed, the internal reset spring 507 is compressed. At the same time, when the hollow air cushion 502 is compressed, it pushes the ventilation mechanism 506 to move toward the arc-shaped clamping plates 501. A hollow air cushion 502 made of elastic material is arranged on the inner side of the clamping plate 501 to make elastic adaptive contact with the horizontal quartz boat, and an arc-shaped gasket 505 is arranged between the inner wall of the hollow air cushion 502 and the ventilation mechanism 506 to isolate the hard contact between the hollow air cushion 502 and the ventilation mechanism 506. When the hollow air cushion 502 is compressed, the square sponge plates 504 at the top and bottom are squeezed together, and the accumulated water infiltrated into the hollow air cushion 502 flows downward onto the square sponge plates 504 and is absorbed by the square sponge plates 504. When the square sponge plates 504 are squeezed and compressed, the water absorbed inside will overflow to the outside, and when the two arc-shaped clamping plates 501 move outward, they drive the hollow air cushion 502 to break away from the pushing and clamping on the horizontal quartz boat. At this time, the reset spring 507 also loses its squeezing force, and the squeezing force is lost. The pressure return spring 507 pushes the arc gasket 505 through the stretching force to make the hollow air cushion 502 expand and recover. When the hollow air cushion 502 is compressed, the air inside enters the circular tube 5061 through the ventilation hole 5062, and then passes through the arc ring plate 5065, the annular inclined plate and the dust filter circular plate 5063 from the circular tube 5061 to be discharged to the outside. By providing a plurality of ventilation holes 5062 on the outer surface of the circular tube 5061, the gas inside the hollow air cushion 502 is easily discharged in time. When the hollow air cushion 502 expands and recovers, the gas outside is sucked into the inside through the circular tube 5061. By providing a dust filter circular plate 5063 on the side of the circular tube 5061 away from the hollow air cushion 502, the gas entering the circular tube 5061 is filtered.By setting an inner oblique ring plate 5064 on the inner wall of the circular through-tube 5061, water droplets accidentally entering the circular through-tube 5061 are guided out of the circular through-tube 5061 through the inclined surface, and by setting an arc-shaped ring plate 5065 on the side of the inner oblique ring plate 5064 away from the dust filtering circular plate 5063, the gap area between the inner oblique ring plate 5064 and the circular through-tube 5061 is blocked.

[0049] When the present invention is in operation, the electric slide rail 3 drives two symmetrical clamping devices 5 to move inward to perform elastic contact adaptation clamping on the horizontal quartz boat, and then the cleaning device 4 can be used to fully clean the horizontal quartz boat. At the same time, the annular electric slide rail 1 can drive the electric slide rail 3 to rotate so that the clamped horizontal quartz boat rotates together. When the horizontal quartz boat rotates, the cleaning device 4 can fully clean it and pour out the accumulated water in the horizontal quartz boat. The water in the rectangular water tank 401 is pumped from the arc water pipe 402 to the arc water passing plate 403 through the high-pressure water pump 404. The water entering the arc water passing plate 403 contacts the V-shaped guide plate 406 and flows along the inclined path of the V-shaped guide plate 406 until the arc water passing plate 403 is filled with water. The water will be sprayed outward through the arc surface circular hole 405. The horizontal quartz boat is washed with high pressure by opening the arc surface circular hole 405 with a smaller aperture. The V-shaped guide plate 406 is set on the inner wall of the arc water-passing plate 403 to block the water flow sprayed in with high pressure, so that the water can be sprayed out with high pressure through the arc surface circular hole 405. The water flow washed on the horizontal quartz boat will fall into the rectangular water tank 401, be filtered by the square filter plate 408, and be stored at the bottom of the square filter plate 408. The square filter plate 408 is set in the rectangular water tank 401 to filter the washed water. After the horizontal quartz boat is washed, the clamping device 5 can be driven by the electric slide rail 3 to release the clamping of the horizontal quartz boat. At this time, the horizontal quartz boat falls on the corrugated rubber pad 409 on the rectangular water tank 401. Waiting for removal, a corrugated rubber pad 409 made of elastic material is arranged on the rectangular water tank 401 to mitigate the hard damage caused by the falling of the horizontal quartz boat. Before cleaning the horizontal quartz boat, the two symmetrically arranged arc-shaped clamping plates 501 are driven to move inward by the electric slide rail 3. When the arc-shaped clamping plates 501 move, the hollow air cushion 502 inside is driven to move together. When the hollow air cushion 502 moves, it will elastically contact with the horizontal quartz boat. When the arc-shaped clamping plates 501 continue to move, the hollow air cushion 502 is squeezed and compressed by the horizontal quartz boat, and the gas inside the hollow air cushion 502 is also compressed and discharged to the outside through the ventilation mechanism 506. When the hollow air cushion 502 is compressed, the internal return spring 507 is compressed. At the same time, when the hollow air cushion 502 is compressed, it pushes the ventilation mechanism 5 06 moves toward the arc clamping plate 501, and a hollow air cushion 502 made of elastic material is arranged on the inner side of the arc clamping plate 501 to make elastic adaptive contact with the horizontal quartz boat, and an arc gasket 505 is arranged between the inner wall of the hollow air cushion 502 and the ventilation mechanism 506 to isolate the hard contact between the hollow air cushion 502 and the ventilation mechanism 506. When the hollow air cushion 502 is compressed, the top and bottom square sponge plates 504 are squeezed together, and the accumulated water infiltrated into the hollow air cushion 502 flows downward onto the square sponge plate 504 and is absorbed by the square sponge plate 504. When the square sponge plate 504 is squeezed and compressed, the water absorbed inside will overflow to the outside, and when the two arc clamping plates 501 move outward, the hollow air cushion 502 is driven to break away from the pushing and clamping of the horizontal quartz boat.At this time, the return spring 507 also loses its extrusion force. The return spring 507 that loses its extrusion force pushes the arc gasket 505 through the extension force to make the hollow air cushion 502 expand and recover. When the hollow air cushion 502 is compressed, the air inside enters the circular through-tube 5061 through the ventilation circular hole 5062, and then passes through the arc ring plate 5065, the annular inclined plate and the dust filter circular plate 5063 from the circular through-tube 5061 in sequence to be discharged to the outside. By opening a plurality of ventilation circular holes 5062 on the outer surface of the circular through-tube 5061, the gas inside the hollow air cushion 502 is discharged in time, and the hollow air cushion 502 expands and recovers. When the circular tube 5061 is used to suck the gas from the outside into the inside, a dust filter disc 5063 is provided on the side of the circular tube 5061 away from the hollow air cushion 502 to filter the gas entering the circular tube 5061, an inner oblique ring plate 5064 is provided on the inner wall of the circular tube 5061 to guide water droplets accidentally entering the circular tube 5061 out of the circular tube 5061 through the inclined surface, and an arc-shaped ring plate 5065 is provided on the side of the inner oblique ring plate 5064 away from the dust filter disc 5063 to block the gap area between the inner oblique ring plate 5064 and the circular tube 5061.

[0050] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A horizontal quartz boat cleaning device that prevents breakage, characterized in that: include: An annular electric slide rail (1), wherein a bottom column (2) is arranged on the outer side of the annular electric slide rail (1); An electric slide rail (3), wherein a clamping device (5) is provided on one side of the electric slide rail (3); A cleaning device (4), the cleaning device (4) cleans the horizontal quartz boat by high-pressure spraying; The outer side of the annular electric slide rail (1) is fixedly connected to the top of the bottom column (2), one side of the annular electric slide rail (1) is rotatably connected to one side of the electric slide rail (3), and the side of the electric slide rail (3) away from the annular electric slide rail (1) is slidably connected to one side of the clamping device (5); Wherein, the cleaning device (4) comprises: A rectangular water tank (401), wherein arc-shaped water pipes (402) are provided on both sides of the rectangular water tank (401); An arc-shaped water-passing plate (403), wherein the arc-shaped water-passing plate (403) is configured as an arc-shaped plate body having an arc-shaped cavity inside, and a high-pressure water pump (404) is disposed outside the arc-shaped water-passing plate (403); A circular arc hole (405) is provided on the inner side of the arc-shaped water-passing plate (403); One side of the rectangular water tank (401) is connected to one end of the arc-shaped water pipe (402), one end of the arc-shaped water pipe (402) away from the rectangular water tank (401) is connected to the water inlet of the high-pressure water pump (404), and the water outlet of the high-pressure water pump (404) is connected to the outer side of the arc-shaped water-passing plate (403).

2. The anti-fragmentation horizontal quartz boat cleaning equipment according to claim 1, characterized in that: The inner wall of the arc-shaped water-passing plate (403) is fixedly connected to a V-shaped guide plate (406), the bottom of the arc-shaped water-passing plate (403) is fixedly connected to an arc-shaped connecting rod (407), the inner wall of the rectangular water tank (401) is fixedly connected to a square filter plate (408), and the top of the rectangular water tank (401) is fixedly connected to a corrugated rubber pad (409).

3. The anti-fragmentation horizontal quartz boat cleaning equipment according to claim 2, characterized in that: One end of the arc-shaped connecting rod (407) away from the arc-shaped water-passing plate (403) is fixedly connected to one side of the rectangular water tank (401), and a plurality of the arc-shaped connecting rods (407) are provided, and the plurality of the arc-shaped connecting rods (407) are distributed at the bottom of the arc-shaped water-passing plate (403).

4. The anti-fragmentation horizontal quartz boat cleaning device according to claim 2, characterized in that: Two arc-shaped water pipes (402) are provided, and the two arc-shaped water pipes (402) are respectively distributed on both sides of the rectangular water tank (401).

5. The anti-fragmentation horizontal quartz boat cleaning equipment according to claim 1, characterized in that: The clamping device (5) comprises an arc-shaped clamping plate (501), the inner side of which is fixedly connected to a hollow air cushion (502), the top and bottom of the hollow air cushion (502) are provided with square holes (503), the inner wall of the square hole (503) is fixedly connected to a square sponge plate (504), the inner wall of the hollow air cushion (502) is fixedly connected to an arc-shaped gasket (505), the outer side of the arc-shaped gasket (505) is fixedly connected to a ventilation mechanism (506), and the outer surface of the ventilation mechanism (506) is sleeved and slidably connected to a return spring (507).

6. The anti-fragmentation horizontal quartz boat cleaning equipment according to claim 5, characterized in that: One side of the arc-shaped clamping plate (501) is slidably connected to one side of the electric slide rail (3); a plurality of the arc-shaped clamping plates (501) are provided, and the plurality of the arc-shaped clamping plates (501) are distributed on one side of the electric slide rail (3).

7. The anti-fragmentation horizontal quartz boat cleaning device according to claim 5, characterized in that: The hollow air cushion (502) is configured as a rubber body having an arc-shaped cavity inside, and a plurality of the arc-shaped gaskets (505) are provided, and the plurality of the arc-shaped gaskets (505) are distributed on the inner wall of the hollow air cushion (502).

8. The anti-fragmentation horizontal quartz boat cleaning device according to claim 5, characterized in that: One end of the ventilation mechanism (506) away from the arc-shaped gasket (505) passes through the hollow air cushion (502) and extends to the outside of the arc-shaped clamping plate (501), and one end of the return spring (507) away from the arc-shaped gasket (505) is fixedly connected to the inner wall of the hollow air cushion (502).

9. The anti-fragmentation horizontal quartz boat cleaning device according to claim 5, characterized in that: The ventilation mechanism (506) comprises a circular through-tube (5061), the outer surface of which is provided with a ventilation circular hole (5062), one end of the circular through-tube (5061) being fixedly connected to a dust filter circular plate (5063), a side of the dust filter circular plate (5063) close to the circular through-tube (5061) being fixedly connected to an inner oblique ring plate (5064), and a side of the inner oblique ring plate (5064) away from the dust filter circular plate (5063) being fixedly connected to an arc-shaped ring plate (5065).

10. The anti-fragmentation horizontal quartz boat cleaning device according to claim 9, characterized in that: The end of the circular through-tube (5061) away from the dust filtering circular plate (5063) is fixedly connected to the outer side of the arc-shaped gasket (505), and the end of the circular through-tube (5061) close to the dust filtering circular plate (5063) passes through the hollow air cushion (502) and extends to the outer side of the arc-shaped clamping plate (501). The outer side of the circular through-tube (5061) is slidably connected to the inner side of the return spring (507), and the outer side of the arc-shaped ring plate (5065) is fixedly connected to the inner wall of the circular through-tube (5061).

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