Disassembling and assembling equipment

Abstract

The invention provides dismounting and mounting equipment. The dismounting and mounting equipment comprises a base; the graphite boat piece positioning device is arranged on the base and is used for placing and positioning a graphite boat piece of the graphite boat; the first ceramic tube dismounting and mounting device is arranged on the base, and at least part of the first ceramic tube dismounting and mounting device can be located below the graphite boat piece positioning device; the graphite block dismounting and mounting devices are arranged on the base and located at the two ends of the graphite boat piece positioning device in the first direction; the second ceramic tube dismounting and mounting device is positioned above the graphite boat sheet positioning device in a lifting manner; and the lifting device is arranged on the base, connected with the second ceramic tube dismounting and mounting device and used for driving the second ceramic tube dismounting and mounting device to ascend and descend. According to the dismounting and mounting equipment, manual intervention can be effectively reduced, the consistency and stability of operation are improved, the mounting and dismounting time is shortened, and the production efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of automation equipment, and in particular to a disassembly and assembly device. Background Art

[0002] In the field of solar photovoltaic cell coating, graphite boat is a key equipment used to carry cells for high temperature treatment. At present, the installation and removal process of graphite boat mainly relies on manual operation, which has the following problems.

[0003] Due to the lack of standardized operating procedures, the operating habits and skill levels of different operators vary greatly, making it difficult to maintain consistency in the installation and removal of the graphite boat. During the manual installation process, the operator may cause collision and friction between the ceramic tube and the graphite boat due to improper operation or improper use of tools, thereby scratching the graphite boat and affecting its service life and performance. In addition, manual installation and removal of the graphite boat takes a long time, especially on large-scale production lines. Frequent assembly and disassembly operations affect overall production efficiency and increase labor costs.

[0004] In addition, graphite materials are somewhat brittle. When manually disassembling or installing a graphite boat, uneven force or improper operation may easily cause damage or even breakage of the inner sheets of the graphite boat, increasing production costs. In severe cases, it may cause the production line to shut down, affecting production efficiency. Summary of the invention

[0005] In view of this, the present invention provides a disassembly and assembly equipment, which can effectively reduce manual intervention, improve the consistency and stability of operation, shorten the installation and disassembly time, and improve production efficiency.

[0006] In order to solve at least one of the above technical problems, the present invention adopts the following technical solutions:

[0007] According to an embodiment of the present application, a disassembly and assembly device is used for installing and disassembling a graphite boat, comprising:

[0008] Base;

[0009] A graphite boat piece positioning device, the graphite boat piece positioning device is arranged on the base, and is used for placing and positioning the graphite boat piece of the graphite boat;

[0010] a first ceramic tube disassembly and assembly device, which is disposed on the base and at least partially located below the graphite boat piece positioning device, and is used for disassembling and assembling each ceramic tube at the lower part of the graphite boat;

[0011] A graphite block disassembly and assembly device, the graphite block disassembly and assembly device is arranged on the base and located at two ends of the graphite boat piece positioning device in the first direction, and is used for disassembling and assembling the graphite blocks at two ends of the graphite boat;

[0012] A second ceramic tube disassembly and assembly device, which is located above the graphite boat piece positioning device and can be lifted and lowered, and is used for disassembling and assembling each ceramic tube on the upper part of the graphite boat;

[0013] A lifting device is arranged on the base and connected to the second ceramic tube disassembly device, and is used to drive the second ceramic tube disassembly device to rise and fall.

[0014] Wherein, the first direction is the length direction of the graphite boat.

[0015] According to some embodiments of the present application, the graphite boat positioning device includes:

[0016] A plurality of parts, wherein the plurality of parts are sequentially arranged at intervals along the first direction, and an avoidance groove extending along the second direction is formed between two adjacent parts in the first direction,

[0017] Wherein, each of said parts comprises:

[0018] A plurality of thin plates, the plurality of thin plates extending along the first direction and arranged in sequence along the second direction, wherein a graphite boat positioning groove extending along the first direction is formed between two adjacent thin plates in the second direction; and

[0019] a limiting plate extending along the first direction and arranged at an end of each of the parts in the second direction,

[0020] The graphite boat positioning grooves corresponding to each other in each part are combined together to place and position each graphite boat sheet of the graphite boat during the disassembly process.

[0021] The second direction is perpendicular to the first direction.

[0022] According to some embodiments of the present application, a plurality of lower ceramic tube disassembly and assembly grooves are provided on the base, and the plurality of lower ceramic tube disassembly and assembly grooves extend along the second direction and are located below the avoidance groove in a one-to-one correspondence with the avoidance groove.

[0023] According to some embodiments of the present application, the first ceramic tube disassembly and assembly device includes a first linear translation module and a plurality of first grasping devices.

[0024] The first linear translation module comprises: a first base, a first linear driving member, and a first slide plate, wherein the first base is arranged on the base, the first linear driving member is arranged on the first base, and is connected to the first slide plate to drive the first slide plate to slide along the second direction to extend into the lower ceramic tube disassembly groove or move out of the lower ceramic tube disassembly groove,

[0025] Wherein, the first slide plate at least comprises a plurality of extension plates corresponding to the lower ceramic tube disassembly and assembly grooves one by one, and each of the extension plates is provided with the first grabbing device.

[0026] Wherein, the first base is provided with a first linear guide rail for slidingly cooperating with the first slide plate.

[0027] According to some embodiments of the present application, the first grasping device includes:

[0028] a second base, the second base being disposed on the extension plate corresponding thereto;

[0029] A crank-rocker mechanism, wherein the crank-rocker mechanism is arranged on the second base;

[0030] A first manipulator module, wherein the first manipulator module is connected to the crank rocker mechanism;

[0031] A first grabbing driving member, wherein the first grabbing driving member is connected to the crank rocker mechanism, and the first grabbing driving member drives the crank rocker mechanism to output a swinging motion, and the crank rocker mechanism drives the first manipulator module to clamp or release each ceramic tube of a ceramic rod at the bottom of the graphite boat through the swinging motion.

[0032] According to some embodiments of the present application, the first manipulator module includes a first parallel rod and a plurality of first clamping assemblies, wherein the first parallel rod extends along the second direction, and the plurality of first clamping assemblies are spaced apart on the first parallel rod along the second direction.

[0033] Each of the first clamping assemblies includes: a first connecting rod seat connected to the first parallel rod, and two first connecting rods, two second connecting rods and two first ceramic tube fixing claws symmetrically arranged on opposite sides of the first connecting rod seat in the first direction.

[0034] The lower ends of the two second connecting rods are respectively hinged to the second base, and the upper ends are respectively hinged to the first ceramic tube fixing claws;

[0035] The lower ends of the two first connecting rods are respectively hinged to the first connecting rod seats, and the upper ends are respectively hinged to the middle parts of the second connecting rods.

[0036] The crank rocker mechanism is connected to the first parallel rod and drives the first parallel rod to move up and down through a rocking motion. The first parallel rod is respectively connected to multiple first clamping assemblies to drive the first clamping assemblies to clamp or release the ceramic tube.

[0037] According to some embodiments of the present application, the second ceramic tube disassembly and assembly device includes a second linear translation module and a plurality of second grasping devices.

[0038] The second linear translation module comprises: a base plate, a second linear driving member, and a second slide plate, wherein the base plate is used to be connected to the lifting device, and the second linear driving member is connected to the second slide plate to drive the second slide plate to reciprocate linearly along the second direction.

[0039] Wherein, a plurality of the second grabbing devices are arranged below the second slide plate at intervals from each other along the first direction and correspond one by one to the ceramic rods on the upper part of the graphite boat,

[0040] Wherein, the base plate is also provided with a second linear guide rail for cooperating with the linear motion of the second slide plate.

[0041] According to some embodiments of the present application, the second grasping device includes:

[0042] A manipulator base, the manipulator base is arranged below the second slide plate;

[0043] A second robot module, wherein the second robot module is arranged below the robot base;

[0044] The second grabbing driving member is arranged on the second slide plate, and the output end passes through the manipulator base to connect the second manipulator module to drive the second manipulator module to respectively clamp or release each ceramic tube of a ceramic rod corresponding to the upper part of the graphite boat.

[0045] According to some embodiments of the present application, the second manipulator module includes a second parallel rod and a plurality of second clamping assemblies, wherein the second parallel rod extends along the second direction, and the plurality of second clamping assemblies are arranged on the second parallel rod at intervals along the second direction.

[0046] Each of the second clamping assemblies comprises: a second connecting rod seat connected to the second parallel rod, and two third connecting rods, two fourth connecting rods and two second ceramic tube fixing claws symmetrically arranged on opposite sides of the second connecting rod seat in the first direction.

[0047] The upper ends of the two fourth connecting rods are respectively hinged to the manipulator base, and the lower ends are respectively hinged to the second ceramic tube fixing claws.

[0048] The upper ends of the two third connecting rods are respectively hinged to the second connecting rod seats, and the lower ends are respectively hinged to the middle part of the fourth connecting rod.

[0049] The output end of the second grabbing driving member is connected to the second parallel rod to drive the second parallel rod to move up and down, and the second parallel rod is respectively connected to a plurality of the second clamping assemblies to drive the second clamping assemblies to clamp or release the ceramic tube.

[0050] According to some embodiments of the present application, each of the graphite block disassembly and assembly devices comprises:

[0051] A movable bracket, the movable bracket is arranged on the base and can reciprocate linearly along the first direction, the movable bracket is provided with a support rod and a pressure rod mechanism extending along the second direction, and the distance between the pressure rod mechanism and the support rod can be adjusted to clamp the graphite block of the graphite boat,

[0052] Wherein, the base is also provided with a third linear guide rail for cooperating with the linear motion of the movable bracket.

[0053] The above technical solution of the present invention has at least one of the following beneficial effects:

[0054] The disassembly and assembly equipment according to the embodiment of the present invention includes: a base, a graphite boat positioning device, a first ceramic tube disassembly and assembly device, a graphite block disassembly and assembly device, a lifting device and a second ceramic tube disassembly and assembly device.

[0055] Wherein, the base provides a stable support platform, and the graphite boat sheet positioning device is arranged on the base, and the graphite boat sheet positioning device is used to place and position the graphite boat sheet of the graphite boat. The first ceramic tube disassembly and assembly device is arranged on the base and can be at least partially located below the graphite boat sheet positioning device, and is used to disassemble and assemble the various ceramic tubes at the lower part of the graphite boat. The graphite block disassembly and assembly device is arranged on the base and is located at both ends of the graphite boat sheet positioning device in the length direction of the graphite boat, and is used to disassemble and assemble the graphite blocks at both ends of the graphite boat. The second ceramic tube disassembly and assembly device, the second ceramic tube disassembly and assembly device can be lifted and lowered above the graphite boat sheet positioning device, and is used to disassemble and assemble the various ceramic tubes on the upper part of the graphite boat. The lifting device is arranged on the base and connected to the second ceramic tube disassembly and assembly device, and is used to drive the second ceramic tube disassembly and assembly device to lift and lower.

[0056] By positioning and fixing multiple graphite boats through the graphite boat positioning device, positioning and fixing the lower ceramic tubes from below through the first ceramic tube disassembly device, positioning and fixing the graphite blocks from both ends through the graphite block disassembly device, and positioning and fixing the upper ceramic tubes from above through the second ceramic tube disassembly device, the ceramic rods passing through the graphite boats and ceramic tubes and the graphite rods passing through the graphite boats and graphite blocks can be freely and conveniently disassembled and installed, thereby completing the disassembly and assembly of the graphite boat. As a result, manual intervention in the disassembly and assembly process of the graphite boat can be effectively reduced, thereby avoiding the problems of high arbitrariness and poor uniformity in the installation or disassembly of the graphite boat.

[0057] Furthermore, the disassembly and assembly equipment of the embodiment of the present invention installs or removes the ceramic tube on the graphite boat through the first ceramic tube disassembly and assembly device and the second ceramic tube disassembly and assembly device, which can effectively avoid collision and friction between the manually installed ceramic tube and the graphite boat, thereby ensuring the quality of disassembly and assembly, and improving the safety and stability of production. It can therefore be widely used in the field of solar photovoltaic cell coating, and improve the automation level and production efficiency of the production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] Figure 1 A schematic diagram of the structure of a disassembly and assembly device according to an embodiment of the present invention;

[0059] Figure 2 It is a structural schematic diagram of a graphite boat positioning device according to an embodiment of the present invention;

[0060] Figure 3 This is a schematic structural diagram of a first ceramic tube disassembly and assembly device according to an embodiment of the present invention;

[0061] Figure 4 for Figure 3 The enlarged schematic diagram at C in the middle;

[0062] Figure 5 for Figure 3 The enlarged schematic diagram at D in the middle;

[0063] Figure 6 It is a structural schematic diagram of a first clamping assembly according to an embodiment of the present invention;

[0064] Figure 7 It is a structural schematic diagram of a second ceramic tube disassembly and assembly device according to an embodiment of the present invention;

[0065] Figure 8 is a schematic structural diagram of a second clamping assembly according to an embodiment of the present invention;

[0066] Fig. 9 It is a structural schematic diagram of a graphite block disassembly and assembly device according to an embodiment of the present invention;

[0067] Fig.10 A schematic diagram of disassembling and assembling a graphite boat using disassembling and assembling equipment according to an embodiment of the present invention;

[0068] Fig.11 This is a schematic diagram of disassembling and assembling a graphite boat using a disassembling and assembling device according to an embodiment of the present invention.

[0069] Reference numerals: 1, base; 11, step; 12, lower ceramic tube disassembly and assembly slot;

[0070] 2. Graphite boat positioning device; 21. Thin plate; 22. Avoidance groove; 23. Limiting plate;

[0071] 3. First ceramic tube disassembly and assembly device;

[0072] 31. first linear translation module; 311. first base; 312. screw transmission device; 313. first slide plate; 3131. connecting plate; 3132. extension plate; 314. first motor; 315. first linear guide rail;

[0073] 32, first gripping device; 321, second base; 322, crank rocker mechanism; 323, first manipulator module; 3231, first parallel rod; 3232, first clamping assembly; 3232-1, first connecting rod seat; 3232-2, first connecting rod; 3232-3, second connecting rod; 3232-4, first ceramic tube fixing claw; 324, first gripping drive member;

[0074] 4. Graphite block disassembly and assembly device; 41. Movable bracket; 42. Press rod mechanism; 43. Third linear guide rail; 44. Support rod;

[0075] 5. Lifting device; 51. Vertical legs; 52. Lifting rod; 53. Lifting drive member;

[0076] 6. Second ceramic tube disassembly and assembly device;

[0077] 61, second linear translation module; 611, substrate; 612, second motor; 613, second slide plate; 614, second linear guide rail; 615, rack;

[0078] 62, second grasping device; 621, second manipulator module; 6211, manipulator base; 6212, second parallel rod; 6213, second clamping assembly; 6213-1, second connecting rod seat; 6213-2, third connecting rod; 6213-3, fourth connecting rod; 6213-4, second ceramic tube fixing claw; 622, second grasping drive member; 6221, drive cylinder; 6222, drive rod;

[0079] 7. Graphite boat. DETAILED DESCRIPTION

[0080] In order to make the purpose, technical solution and advantages of the embodiment of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present invention.

[0081] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0082] Firstly, the disassembly and assembly equipment according to the embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0083] like Figures 1 to 11 As shown, the disassembly and assembly equipment according to an embodiment of the present invention is used for the installation and disassembly of the graphite boat 7, and may include: a base 1, a graphite boat sheet positioning device 2, a first ceramic tube disassembly and assembly device 3, a graphite block disassembly and assembly device 4, a lifting device 5 and a second ceramic tube disassembly and assembly device 6.

[0084] The graphite boat 7 includes a plurality of graphite boat sheets arranged at intervals and a plurality of ceramic tubes arranged between the graphite boat sheets. The plurality of ceramic tubes and the plurality of graphite boat sheets are alternately arranged and connected together by ceramic rods, wherein the ceramic tubes and the ceramic rods are arranged at the upper and lower parts of the graphite boat sheets; the graphite blocks are arranged at the two ends of the graphite boat 7 and connected to the graphite boat sheets by the graphite rods.

[0085] The base 1 provides a stable supporting platform, and the graphite boat piece positioning device 2 is arranged on the base 1 . The graphite boat piece positioning device 2 is used for placing and positioning a plurality of graphite boat pieces of the graphite boat 7 .

[0086] The first ceramic tube disassembly and assembly device 3 is arranged on the base 1 and at least partly located below the graphite boat positioning device 2. The first ceramic tube disassembly and assembly device 3 is used to disassemble and assemble the ceramic tubes at the bottom of the graphite boat 7. The graphite block disassembly and assembly device 4 is arranged on the base 1 and located at both ends of the graphite boat positioning device 2 in the first direction, and is used to disassemble and assemble the graphite blocks at both ends of the graphite boat 7. The first direction is the length direction of the graphite boat 7, that is, Figure 2 A direction shown.

[0087] The second ceramic tube disassembly and assembly device 6 is located above the graphite boat positioning device 2 and is used to disassemble and assemble the ceramic tubes on the upper part of the graphite boat 7. The lifting device 5 is arranged on the base 1 and connected to the second ceramic tube disassembly and assembly device 6, and is used to drive the second ceramic tube disassembly and assembly device 6 to rise and fall.

[0088] A plurality of graphite boats are positioned and fixed by the graphite boat positioning device 2, the lower ceramic tubes are positioned and fixed from below by the first ceramic tube disassembly and assembly device 3, the graphite blocks are positioned and fixed from both ends by the graphite block disassembly and assembly device 4, and the upper ceramic tubes are positioned and fixed from above by the second ceramic tube disassembly and assembly device 6. At this time, the ceramic rods passing through the graphite boats and ceramic tubes and the graphite rods passing through the graphite boats and graphite blocks can be freely and conveniently disassembled and installed, thereby completing the disassembly and assembly of the graphite boat 7.

[0089] Combine the following Figures 1 to 11 , briefly describe the disassembly and assembly equipment of the embodiment of the present invention, which is used for the working process of disassembling and assembling the graphite boat 7:

[0090] Disassembling the graphite boat 7: Step 1, before placing the graphite boat 7 to be disassembled, the first ceramic tube disassembling device 3 is moved in advance to the corresponding lower part of the graphite boat piece positioning device 2. Then, the graphite boat 7 to be disassembled is carried to the base 1, and the graphite boat piece of the graphite boat 7 is positioned by the graphite boat piece positioning device 2 to ensure that the position of the graphite boat piece on the base 1 is accurate, so as to avoid disassembly errors caused by incorrect position.

[0091] Step 2, the first ceramic tube disassembly and assembly device 3 can, for example, grab and fix the various ceramic tubes on all the ceramic rods at the bottom of the graphite boat 7 from below through its manipulator or other grasping device, ensuring that the ceramic tubes will not be displaced or dropped during the disassembly of the ceramic rods. Similarly, the second ceramic tube disassembly and assembly device 6 moves to the corresponding working position (i.e., the ceramic tube disassembly and assembly position on the upper part of the graphite boat 7) and the lifting device 5 drives the second ceramic tube disassembly and assembly device 6 to be lifted and lowered, for example, it can also grab and fix the various ceramic tubes on all the ceramic rods at the upper part of the graphite boat 7 from above through its manipulator or other grasping device. The graphite block disassembly and assembly device 4 moves to the corresponding working position (for example, it can be the two ends of the graphite boat 7), and clamps and fixes the graphite blocks at the two ends of the graphite boat 7 on the graphite boat sheet positioning device 2, ensuring that the graphite blocks will not be displaced or dropped during the disassembly process.

[0092] Step 3, the operator manually removes the washers and graphite nuts at the ends of each ceramic rod and graphite rod on the graphite boat 7, and then extracts each ceramic rod and graphite rod from the graphite boat 7. At this time, the graphite boat sheet, ceramic tube, and graphite block are separated from each other. Then, the lifting device 5 drives the second ceramic tube disassembly and assembly device 6 to move upward, first moving all the upper ceramic tubes grabbed by the second ceramic tube disassembly and assembly device 6 upward from between the graphite boat sheets, and after ensuring that all the upper ceramic tubes are safely separated from the graphite boat sheet, the operator manually removes all the ceramic tubes grabbed by the second ceramic tube disassembly and assembly device 6. Then, the operator moves the graphite blocks at both ends of the graphite boat sheet from between the graphite boat sheets to the outside of both ends through the graphite block disassembly and assembly device 4. Then, the operator manually removes the graphite boat sheets one by one from the graphite boat sheet positioning device 2, and finally removes all the ceramic tubes grabbed by the first ceramic tube disassembly and assembly device 3. At this point, the disassembly action of the graphite boat 7 is completed.

[0093] Installing the graphite boat 7: Step 1. Before placing the graphite boat 7 to be installed, the first ceramic tube disassembly and assembly device 3 first clamps all the ceramic tubes required for assembling the lower part of the graphite boat 7, and then the first ceramic tube disassembly and assembly device 3 that has clamped all the ceramic tubes is moved in advance to the corresponding lower part of the graphite boat sheet positioning device 2. Similarly, the second ceramic tube disassembly and assembly device 6 clamps all the ceramic tubes required for assembling the upper part of the graphite boat 7, and the graphite block disassembly and assembly device 4 installs the graphite blocks required for assembling the graphite boat 7. The second ceramic tube disassembly and assembly device 6 and the graphite block disassembly and assembly device 4 remain stationary for the time being, waiting for subsequent positioning and fixing.

[0094] Step 2, place each graphite boat piece of the graphite boat 7 on the graphite boat piece positioning device 2 on the base 1 to ensure that the position of the graphite boat piece on the base 1 is accurate to avoid installation errors caused by incorrect positioning. At this time, each ceramic tube required for the lower part of the graphite boat 7 clamped by the first ceramic tube disassembly and assembly device 3 is already located in the gap at the lower part of the graphite boat piece. Next, the second ceramic tube disassembly and assembly device 6 first moves to the upper part corresponding to the graphite boat piece positioning device 2, and the lifting device 5 drives the second ceramic tube disassembly and assembly device 6 to move downward, so that all the ceramic tubes clamped by the second ceramic tube disassembly and assembly device 6 are located in the gap at the upper part of the graphite boat piece. Similarly, the graphite block disassembly and assembly device 4 installs the graphite block into the gap at both ends of the graphite boat piece.

[0095] In step 3, the operator manually passes the ceramic rods through the alternately arranged graphite boat sheets and ceramic tubes in sequence, and passes the graphite rods through the alternately arranged graphite boat sheets and graphite blocks in sequence, and after installing the ceramic rods and graphite rods on the upper and lower parts of the graphite boat 7, the operator finally installs the washers and graphite nuts at the ends of the ceramic rods and graphite rods. At this point, the installation of the graphite boat 7 is completed.

[0096] Therefore, the disassembly and assembly equipment of the embodiment of the present invention can effectively reduce manual intervention during the installation and disassembly of the graphite boat 7 through the coordinated action of the base 1, the graphite boat sheet positioning device 2, the first ceramic tube disassembly and assembly device 3, the graphite block disassembly and assembly device 4, the lifting device 5 and the second ceramic tube disassembly and assembly device 6, thereby avoiding the problems of high arbitrariness and poor uniformity of manual intervention during the installation or disassembly of the graphite boat 7.

[0097] Furthermore, the disassembly and assembly equipment of the embodiment of the present invention installs or removes the ceramic tube on the graphite boat through the first ceramic tube disassembly and assembly device 3 and the second ceramic tube disassembly and assembly device 6, which can effectively avoid collision and friction between the manually installed ceramic tube and the graphite boat, thereby ensuring the disassembly and assembly quality, improving the safety and stability of production, and thus can be widely used in the field of solar photovoltaic cell coating, thereby improving the automation level and production efficiency of the production line.

[0098] In some embodiments of the present invention, Figure 1 to Figure 2 As shown, the graphite boat positioning device 2 may include: a plurality of parts, the plurality of parts are sequentially arranged in a first direction, and an avoidance groove 22 extending in a second direction is formed between two adjacent parts in the first direction. Each part includes a plurality of thin plates 21 and a limiting plate 23, and the plurality of thin plates 21 are arranged in a first direction ( Figure 2 A direction marked in the figure) is extended on the base 1 and extends along the second direction ( Figure 2 The two thin plates 21 are arranged in a sequentially spaced manner along the direction B marked in the figure. In the second direction, a graphite boat positioning groove extending along the first direction is formed between two adjacent thin plates 21. The graphite boat positioning grooves corresponding to each other in each part are combined together to place and position each graphite boat sheet of the graphite boat 7 during the disassembly process. The limiting plate 23 extends along the first direction and is arranged at the end of each part in the second direction. The second direction is perpendicular to the first direction, and the first direction and the second direction are both perpendicular to the vertical direction. The first direction is the length direction of the graphite boat.

[0099] That is to say, during the disassembly and assembly process, the operator only needs to insert the graphite boat pieces into the respective graphite boat positioning grooves in the prescribed order, which is simple and convenient to operate, reduces the need for manual intervention, and reduces the labor intensity. In addition, the shape and size of each graphite boat positioning groove match the corresponding graphite boat piece, thereby, the graphite boat positioning groove provides a stable support for each graphite boat piece of the graphite boat 7, avoiding collision or friction during the disassembly and assembly process, resulting in damage to the graphite boat piece, and improving product quality.

[0100] In some embodiments of the present invention, Figures 1 to 3As shown, a plurality of lower ceramic tube disassembly and assembly grooves 12 are provided on the base 1, and the plurality of lower ceramic tube disassembly and assembly grooves 12 extend along the second direction and are located below the avoidance grooves 22 in a one-to-one correspondence with the avoidance grooves 22. The lower ceramic tube disassembly and assembly grooves 12 are used to correspond one-to-one with the ceramic rods at the bottom of the graphite boat 7, and the first ceramic tube disassembly and assembly device 3 disassembles and assembles the ceramic tubes through each lower ceramic tube disassembly and assembly groove 12.

[0101] That is to say, each lower ceramic tube disassembly and assembly groove 12 corresponds to the ceramic rod at the bottom of the graphite boat 7 one by one, ensuring that the first ceramic tube disassembly and assembly device 3 can fix and disassemble the ceramic tube at the bottom of the graphite boat 7 through these lower ceramic tube disassembly and assembly grooves 12, and then smoothly install or disassemble without interfering with the graphite boat sheet. The design of the avoidance groove 22 allows the graphite boat sheet to be avoided from damage caused by collision or friction when inserting or removing the lower ceramic tube. At the same time, the avoidance groove 22 also provides sufficient space for the disassembly and assembly of the lower ceramic tube, making the disassembly and assembly operation of the lower ceramic tube smoother. The area of ​​the limit plate 23 is larger than the area of ​​the thin plate, which is used to strengthen the structural stability of the graphite boat sheet positioning device 2, avoid the graphite boat sheet from tipping over when inserted or removed, and also provide an obvious positioning mark for the operator to manually start inserting or stop inserting the graphite boat sheet.

[0102] In order to enable the first ceramic tube disassembly and assembly device 3 to pass through from under the graphite boat positioning groove, the base 1 can be provided with a step 11, and the graphite boat positioning device 2 is arranged on the step 11. A lower ceramic tube disassembly and assembly groove 12 extending along the second direction can be opened on the step 11. The lower ceramic tube disassembly and assembly groove 12 corresponds one-to-one to the avoidance groove 22 on the graphite boat positioning device 2. The first ceramic tube disassembly and assembly device 3 is arranged under the step 11 and can enter / exit the lower ceramic tube disassembly and assembly groove 12 along the second direction. After the first ceramic tube disassembly and assembly device 3 enters the lower ceramic tube disassembly and assembly groove 12, it can correspond to the gap between the graphite boat sheets through the avoidance groove 22, thereby positioning, fixing and disassembling the ceramic tubes between the graphite boat sheets.

[0103] In some embodiments of the present invention, Figures 1 to 5 As shown, the first ceramic tube disassembly and assembly device 3 includes a first linear translation module 31 and a plurality of first grasping devices 32. The first linear translation module 31 is arranged on the base 1, specifically, can be arranged under the step 11 of the base 1. The first grasping device 32 is connected to the first linear translation module 31. The first linear translation module 31 is used to drive the first grasping device 32 to reciprocate along the second direction so that the first grasping device 32 extends into each lower ceramic tube disassembly and assembly groove 12 or moves out of each lower ceramic tube disassembly and assembly groove 12.

[0104] That is to say, combined Figures 1 to 4Before placing the graphite boat 7 to be disassembled or installed, the first grabbing device 32 moves linearly back and forth along the second direction through the first linear translation module 31, thereby moving in advance to the corresponding disassembly and assembly position below the graphite boat piece positioning device 2 (i.e., in the lower ceramic tube disassembly and assembly groove 12), thereby grabbing or releasing the ceramic tube below the graphite boat 7. And, after completing the disassembly and assembly operation, the operator removes the graphite boat 7 on the graphite boat positioning groove, and the first grabbing device 32 moves linearly back and forth along the second direction through the first linear translation module 31, moves out of the lower ceramic tube disassembly and assembly groove 12, returns to the initial position, and prepares for the next disassembly and assembly operation.

[0105] In some embodiments of the present invention, Figures 1 to 5 As shown, the first linear translation module 31 includes: a first base 311 , a first linear driving member and a first slide plate 313 .

[0106] The first base 311 is arranged on the base 1, specifically, under the step 11 of the base 1. The first linear drive is arranged on the first base 311 and connected to the first slide 313 to drive the first slide 313 to slide in the second direction to extend into the lower ceramic tube disassembly groove 12 or move out of the lower ceramic tube disassembly groove 12. For example, the first linear drive may include a screw transmission device 312 and a first motor 314. The screw transmission device 312 is arranged on the first base 311 along the second direction. The screw transmission device 312 may, for example, adopt a ball screw device, which has high transmission efficiency and is suitable for long-term continuous disassembly and assembly operations. The screw transmission device 312 may include a screw and a nut. The screw rotates and drives the nut to reciprocate in the second direction. The first slide 313 is connected to the nut of the screw transmission device 312, and the first gripping device 32 is arranged on the first slide 313. The first motor 314 is connected to the screw of the screw transmission device 312, and the first motor 314 is used to drive the screw transmission device 312 to rotate so that the nut reciprocates linearly in the second direction, thereby driving the first slide plate 313 to reciprocate linearly in the second direction. Among them, the first base 311 is also provided with a first linear guide 315 for cooperating with the linear motion of the first slide plate 313, and the first linear guide 315 extends along the second direction. Specifically, a slider is provided on the first slide plate 313, and the slider is movably arranged in the first linear guide 315. Under the drive of the motor, the first slide plate 313 reciprocates linearly in the second direction, and the slider of the first slide plate 313 slides in the first linear guide 315, thereby increasing the moving stability of the first slide plate 313.

[0107] That is, when disassembly and assembly operations are required, the first motor 314 is started, driving the screw of the screw transmission device 312 to rotate, driving the nut of the screw transmission device 312 to move linearly along the screw, thereby driving the first slide plate 313 connected to the nut of the screw transmission device 312 to move linearly along the second direction. The first slide plate 313 cooperates with the first linear guide rail 315 through the slider to ensure that its linear motion is smooth and without deviation.

[0108] The first grabbing device 32 is arranged on the first slide 313, and the first grabbing device 32 moves with the first slide 313. When the first slide 313 moves along the second direction to the lower ceramic tube disassembly groove 12, the first grabbing device 32 reaches the predetermined disassembly position, which just corresponds to the ceramic tube between the multiple graphite boat sheets of the graphite boat 7, and grabs, positions and fixes the multiple ceramic tubes. Therefore, the improvement of the degree of automation can significantly shorten the disassembly time and improve production efficiency. In addition, the screw transmission device 312 and the first linear guide 315 ensure the movement accuracy of the first slide 313, avoiding problems such as scratches and damages to the graphite boat sheets caused by human factors.

[0109] In some embodiments of the present invention, Figures 1 to 5 As shown, the first slide plate 313 at least includes a plurality of extension plates 3132 corresponding to the lower ceramic tube disassembly groove 12, and a first grabbing device 32 is arranged on each extension plate 3132. The first slide plate 313 may also include a connecting plate 3131, the connecting plate 3131 is used to connect with the nut of the screw transmission device 312, a plurality of extension plates 3132 extend along the second direction and are respectively connected to the connecting plates 3131, a plurality of extension plates 3132 are evenly spaced along the first direction, the extension plates 3132 correspond to the lower ceramic tube disassembly groove 12, there are a plurality of first grabbing devices 32, and a first grabbing device 32 is arranged on the upper surface of each extension plate 3132, that is, each extension plate 3132 and the first grabbing device 32 thereon are inserted into the lower ceramic tube disassembly groove 12 in a one-to-one correspondence with the lower ceramic tube disassembly groove 12.

[0110] In some embodiments of the present invention, Figures 1 to 5 As shown, each first grabbing device 32 includes: a second base 321 , a crank rocker mechanism 322 , a first manipulator module 323 and a first grabbing driving member 324 .

[0111] Specifically, the second base 321 is disposed on the corresponding extension plate 3132. The crank-rocker mechanism 322 is disposed on the second base 321. The first manipulator module 323 is connected to the crank-rocker mechanism 322. The first grabbing driving member 324 is connected to the crank-rocker mechanism 322, and the first grabbing driving member 324 drives the crank-rocker mechanism 322 to output a swinging motion, and the crank-rocker mechanism 322 drives the first manipulator module 323 to clamp or release each ceramic tube of a ceramic rod at the bottom of the graphite boat 7 through the swinging motion.

[0112] In some embodiments of the present invention, Figures 1 to 6 As shown, the first manipulator module 323 includes a first parallel rod 3231 and a plurality of first clamping assemblies 3232, wherein the first parallel rod 3231 extends along the second direction, and the plurality of first clamping assemblies 3232 are arranged on the first parallel rod 3231 at intervals along the second direction, the crank rocker mechanism 322 is connected to the first parallel rod 3231, and the first parallel rod 3231 is connected to each of the first clamping assemblies 3232, and the first clamping assemblies 3232 are used to correspond to the ceramic tubes on each ceramic rod at the bottom of the graphite boat 7 one by one, wherein, as Figure 6 As shown, each first clamping assembly 3232 includes: a first connecting rod seat 3232-1 connected to the first parallel rod 3231, and two first connecting rods 3232-2, two second connecting rods 3232-3 and two first ceramic tube fixing claws 3232-4 symmetrically arranged on opposite sides of the first connecting rod seat 3232-1 in the first direction.

[0113] The lower ends of the two second connecting rods 3232 - 3 are respectively hinged to the second base 321 , and the upper ends are respectively hinged to the first ceramic tube fixing claws 3232 - 4 .

[0114] The lower ends of the two first connecting rods 3232-2 are respectively hinged to the first connecting rod seats 3232-1, and the upper ends are respectively hinged to the middle parts of the second connecting rods 3232-3.

[0115] The crank rocker mechanism 322 is connected to the first parallel rod 3231 and drives the first parallel rod 3231 to move up and down through the output rocking action. The first parallel rod 3231 is respectively connected to multiple first clamping assemblies 3232 to drive the first clamping assemblies 3232 to clamp or release the ceramic tube.

[0116] That is, the first grabbing driving member 324 can be, for example, disposed at one end of the extension plate 3132 and connected to the crank rocker mechanism 322. When the first grabbing driving member 324 (e.g., a cylinder) is started, the piston rod of the cylinder drives the crank rocker mechanism 322 to swing, so that the crank rocker mechanism 322 drives the first connecting rod seat 3232-1 to move through the first parallel rod 3231. The first connecting rod seat 3232-1 drives the two first ceramic tube fixing claws 3232-4 to clamp or release the ceramic tube through the linkage of the two first connecting rods 3232-2 and the two second connecting rods 3232-3.

[0117] Specifically, when the first grabbing driving member 324 drives the crank rocker mechanism 322 to swing, the first parallel rod 3231 pushes the first connecting rod seat 3232-1 downward, so that the two first connecting rods 3232-2 and the two second connecting rods 3232-3 move relative to each other, and finally the two first ceramic tube fixing claws 3232-4 approach each other and clamp the ceramic tube. When the first grabbing driving member 324 reversely drives the crank rocker mechanism 322 to swing, the first parallel rod 3231 pulls the first connecting rod seat 3232-1 upward, so that the two first connecting rods 3232-2 and the two second connecting rods 3232-3 return to the initial position, and finally the two first ceramic tube fixing claws 3232-4 move away from each other and release the ceramic tube. Therefore, through the above-mentioned automated design, the efficiency of disassembly and assembly of the graphite boat 7 is effectively improved, the consistency of each disassembly and assembly is ensured, and the quality of disassembly and assembly is improved.

[0118] In some other embodiments, the first grasping drive member 324 (such as an electric cylinder or a pneumatic cylinder) can be precisely controlled by a control system (such as a PLC or a computer) to adjust the clamping force and movement speed to ensure the efficiency and accuracy of the grasping operation.

[0119] In some embodiments of the present invention, Figure 1 As shown, the second ceramic tube disassembly and assembly device 6 includes a second linear translation module 61 and a plurality of second grabbing devices 62. The second linear translation module 61 is arranged on the lifting device 5, and the second linear translation module 61 is driven to be lifted and lowered by the lifting device 5. The second grabbing device 62 is connected to the second linear translation module 61, and the second linear translation module 61 is used to drive the second grabbing device 62 to reciprocate along the second direction so that the second grabbing device 62 moves to the corresponding ceramic tube disassembly and assembly position above the graphite boat 7.

[0120] Similarly, the second grabbing device 62 also reciprocates along the second direction through the second linear translation module 61, moves to the corresponding disassembly position above the graphite boat piece positioning device 2 (i.e., the disassembly position of the ceramic tube on the upper part of the graphite boat 7), and drives the second grabbing device 62 to be lifted and lowered through the lifting device 5, so as to grab or position the ceramic tube on the upper part of the graphite boat 7. Moreover, after the disassembly operation is completed, the second grabbing device 62 is lifted and lowered through the lifting device 5, and reciprocates along the second direction through the second linear translation module 61, so that the second grabbing device 62 is moved out from above the positioning device of the graphite boat 7, and returns to the initial position, ready for the next disassembly operation.

[0121] Specifically, Figures 7 and 8 As shown, the second linear translation module 61 includes a base plate 611 , a second linear driving member and a second slide plate 613 .

[0122] Specifically, the substrate 611 is used to be connected to the lifting device 5, and is driven by the lifting device 5 to perform lifting motion. The second linear drive is connected to the second slide 613 to drive the second slide 613 to reciprocate linearly in the second direction. In other words, the second slide 613 is connected to the substrate 611 through the second linear drive, and moves up and down with the substrate 611. Among them, a plurality of second gripping devices 62 are arranged below the second slide 613 at intervals from each other along the first direction and correspond one by one to the ceramic tubes on the upper part of the graphite boat 7, and a second linear guide 614 for cooperating with the linear motion of the second slide 613 is also provided on the substrate 611.

[0123] like Figure 7 As shown, the second linear drive may include: a second motor 612, a gear (not shown) and a rack 615. The second motor 612 may be arranged on the second slide 613, the gear is arranged on the lower surface of the second slide 613, the rack 615 is arranged on the substrate 611 along the second direction, and the gear is meshed with the rack 615. The second motor 612 drives the gear to move along the rack 615, driving the second slide 613 to perform linear reciprocating motion along the second direction. In order to ensure the accuracy of the linear motion, a second linear guide 614 for cooperating with the linear motion of the second slide 613 is also provided on the substrate 611. The second slide 613 cooperates with the second linear guide 614 through a slider, and the second linear guide 614 can also provide support. As a result, the second linear translation module 61 can work in coordination with the first linear translation module 31 of the first ceramic tube disassembly and assembly device 3 to ensure the coordination and consistency of the disassembly and assembly process, and improve the stability and disassembly and assembly efficiency of the graphite boat 7.

[0124] In some embodiments of the present invention, Figures 1 to 8 As shown, the second grabbing device 62 includes: a robot base 6211 , a plurality of second robot modules 621 and a second grabbing driving member 622 .

[0125] The robot base 6211 is disposed below the second slide plate 613 , specifically, spaced apart from the second slide plate 613 .

[0126] The second manipulator module 621 is arranged below the manipulator base 6211 to correspond to the ceramic rods on the upper part of the graphite boat 7. The second grab driving member 622 is arranged on the second slide 613 and the output end is connected to the second manipulator module 621 through the manipulator base 621 to drive each second manipulator module 621 to clamp or release each ceramic tube of each ceramic rod on the upper part of the corresponding graphite boat 7.

[0127] That is to say, the second grabbing driving member 622 may include a driving cylinder 6221 and a plurality of driving rods 6222 connected to the driving cylinder 6221, and every two driving rods 6222 may be connected to the two ends of a second manipulator module 621, so that the driving cylinder 6221 drives the second manipulator module 621 to clamp or release each ceramic tube of a ceramic rod of the graphite boat 7 through the driving rods 6222.

[0128] In some embodiments of the present invention, Figures 7 and 8 As shown, the second manipulator module 621 may include: a second parallel rod 6212 and a plurality of second clamping assemblies 6213, the second parallel rod 6212 extends along the second direction, and the plurality of second clamping assemblies 6213 are arranged on the second parallel rod 6212 at intervals along the second direction. The driving rod 6222 passes through the manipulator base 6211 and is connected to the driving cylinder 6221, and every two driving rods 6222 are connected to a second parallel rod 6212, and the second parallel rod 6212 is respectively connected to each second clamping assembly 6213, and the second clamping assembly 6213 is used to correspond to a ceramic tube of a ceramic rod on the upper part of the graphite boat 7 one by one, and each second clamping assembly 6213 includes: a second connecting rod seat 6213-1 connected to the second parallel rod 6212, and two third connecting rods 6213-2, two fourth connecting rods 6213-3 and two second ceramic tube fixing claws 6213-4 symmetrically arranged on opposite sides of the second connecting rod seat 6213-1 in the first direction. The upper ends of the two fourth connecting rods 6213-3 are respectively hinged to the manipulator base, and the lower ends are respectively hinged to the second ceramic tube fixing claws 6213-4. The upper ends of the two third connecting rods 6213-2 are respectively hinged to the second connecting rod seats 6213-1, and the lower ends are respectively hinged to the middle of the fourth connecting rod 6213-3. The output end of the second grabbing driving member 622 is connected to the second parallel rod 6212 to drive the second parallel rod 6212 to move up and down, and the second parallel rod 6212 is respectively connected to multiple second clamping assemblies 6213 to drive the second clamping assemblies 6213 to clamp or release the ceramic tube.

[0129] When the second slide plate 613 reaches the predetermined position, the lifting drive member 622 is activated, and the driving cylinder 6221 pushes or pulls the driving rod 6222 to move up and down, thereby driving each second manipulator module 621 to respectively clamp or release each ceramic tube of a ceramic rod on the upper part of the corresponding graphite boat 7. The working principle of each component of the second clamping assembly 6213 during this period is the same as that of the first clamping assembly 3232, and this application will not repeat it again.

[0130] In some embodiments of the present invention, Figures 1 to 9 As shown, there are two graphite block disassembly and assembly devices 4 , which are arranged at two ends of the graphite boat positioning device 2 along the first direction. Each graphite block disassembly and assembly device 4 includes: a movable bracket 41 and a pressure rod mechanism 42 .

[0131] Specifically, the movable bracket 41 is arranged on the base 1 and can move back and forth linearly along the first direction. The movable bracket 41 is provided with a support rod 44 extending along the second direction, and the support rod 44 is used to support the graphite block on which the graphite boat 7 is placed. The pressure rod mechanism 42 is arranged on the movable bracket 41 along the second direction and is located above the corresponding support rod 44. The distance between the pressure rod mechanism 42 and the support rod 44 can be adjusted to clamp the graphite block of the graphite boat 7. The base 1 is also provided with a third linear guide rail 43 for cooperating with the linear motion of the movable bracket 41. Correspondingly, the bracket 41 is provided with a slider movable relative to the third linear guide rail 43.

[0132] Here, combined Figures 1 to 9 The working principle of the graphite block disassembly and assembly device 4 is explained by taking the disassembly process of the graphite boat 7 as an example:

[0133] After each graphite boat sheet of the graphite boat 7 is placed in place on the graphite boat sheet positioning device 2, the movable bracket 41 moves linearly along the first direction through the third linear guide 43 until the support rod 44 extends under the graphite blocks at both ends of the graphite boat 7 to support the graphite blocks. Subsequently, according to the thickness of the graphite block, the operator adaptively adjusts the height of the pressure rod mechanism 42, such as loosening the nut at the end of the pressure rod mechanism 42, and moving the pressure rod mechanism 42 downward along the long hole in the vertical direction to a suitable position, and finally making the pressure rod mechanism 42 press the graphite block on the support rod 44 downward. Then, the movable bracket 41 moves linearly along the first direction through the third linear guide 43 to remove the graphite block from the graphite boat 7 to be disassembled, and finally the operator loosens the pressure rod mechanism 42 to take out the graphite block. The installation process is similar, and will not be repeated here. As a result, the disassembly and assembly efficiency of the graphite boat 7 is effectively improved, and the applicability is wide, and it can adapt to the disassembly and assembly of graphite blocks of different thicknesses.

[0134] In some embodiments of the present invention, Figures 1 to 5As shown, the lifting device 5 includes: two vertical legs 51 , two lifting rods 52 and a lifting drive member 53 .

[0135] Specifically, the two vertical legs 51 are symmetrically arranged; the two lifting rods 52 are respectively arranged on the respective corresponding vertical legs 51. The lifting drive member 53 is connected to the two lifting rods 52, and the lifting drive member 53 is used to drive the two lifting rods 52 to move up and down synchronously. Among them, the first ceramic tube disassembly and assembly device 3 is located between the two vertical legs 51, and the second ceramic tube disassembly and assembly device 6 is respectively connected to the two lifting rods 52. The lifting drive member 53 can be two lifting motors, and the two lifting motors correspond to the two lifting rods 52 one by one, driving the lifting rods 52 to cooperate with the vertical legs 51 through sliders or other connection methods to realize the reciprocating motion of the lifting rods 52 in the vertical direction. This set of lifting devices 5 has low maintenance costs, good load-bearing capacity, and is safe and reliable.

[0136] Based on the above-mentioned embodiments of the present invention, in the absence of explicit negation or conflict, the technical features of one embodiment may be beneficially combined with one or more other embodiments.

[0137] The above is a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A disassembly and assembly equipment for the installation and disassembly of a graphite boat, characterized in that: include: Base; A graphite boat piece positioning device, the graphite boat piece positioning device is arranged on the base, and is used for placing and positioning the graphite boat piece of the graphite boat; A first ceramic tube disassembly and assembly device, which is disposed on the base and at least partially located below the graphite boat piece positioning device, and is used for disassembling and assembling each ceramic tube at the lower part of the graphite boat; A graphite block disassembly and assembly device, the graphite block disassembly and assembly device is arranged on the base and located at two ends of the graphite boat piece positioning device in the first direction, and is used for disassembling and assembling the graphite blocks at two ends of the graphite boat; A second ceramic tube disassembly and assembly device, which is located above the graphite boat piece positioning device and can be lifted and lowered, and is used for disassembling and assembling each ceramic tube on the upper part of the graphite boat; A lifting device is arranged on the base and connected to the second ceramic tube disassembly device, and is used to drive the second ceramic tube disassembly device to rise and fall. Wherein, the first direction is the length direction of the graphite boat.

2. The disassembly and assembly equipment according to claim 1, characterized in that: The graphite boat positioning device comprises: A plurality of parts, wherein the plurality of parts are sequentially arranged at intervals along the first direction, and an avoidance groove extending along the second direction is formed between two adjacent parts in the first direction, Wherein, each of said parts comprises: A plurality of thin plates, the plurality of thin plates extending along the first direction and arranged in sequence along the second direction, wherein a graphite boat positioning groove extending along the first direction is formed between two adjacent thin plates in the second direction; and a limiting plate extending along the first direction and arranged at an end of each of the parts in the second direction, The graphite boat positioning grooves corresponding to each other in each part are combined together to place and position each graphite boat sheet of the graphite boat during the disassembly process. The second direction is perpendicular to the first direction.

3. The disassembly and assembly equipment according to claim 2, characterized in that: The base is provided with a plurality of lower ceramic tube disassembly and assembly grooves, which extend along the second direction and are located below the avoidance grooves in a one-to-one correspondence with the avoidance grooves.

4. The disassembly and assembly equipment according to claim 3, characterized in that: The first ceramic tube disassembly and assembly device comprises a first linear translation module and a plurality of first grasping devices. The first linear translation module comprises: a first base, a first linear driving member, and a first slide plate, wherein the first base is arranged on the base, the first linear driving member is arranged on the first base, and is connected to the first slide plate to drive the first slide plate to slide along the second direction to extend into the lower ceramic tube disassembly groove or move out of the lower ceramic tube disassembly groove, Wherein, the first slide plate at least comprises a plurality of extension plates corresponding to the lower ceramic tube disassembly and assembly grooves one by one, and each of the extension plates is provided with the first grabbing device. Wherein, the first base is provided with a first linear guide rail for slidingly cooperating with the first slide plate.

5. The disassembly and assembly equipment according to claim 4, characterized in that: The first grasping device comprises: a second base, the second base being disposed on the extension plate corresponding thereto; A crank-rocker mechanism, wherein the crank-rocker mechanism is arranged on the second base; A first manipulator module, wherein the first manipulator module is connected to the crank rocker mechanism; A first grabbing driving member, wherein the first grabbing driving member is connected to the crank rocker mechanism, and the first grabbing driving member drives the crank rocker mechanism to output a swinging motion, and the crank rocker mechanism drives the first manipulator module to clamp or release each ceramic tube of a ceramic rod at the bottom of the graphite boat through the swinging motion.

6. The disassembly and assembly equipment according to claim 5, characterized in that: The first robot module comprises a first parallel rod and a plurality of first clamping assemblies, wherein the first parallel rod extends along the second direction, and the plurality of first clamping assemblies are arranged on the first parallel rod at intervals along the second direction. Each of the first clamping assemblies includes: a first connecting rod seat connected to the first parallel rod, and two first connecting rods, two second connecting rods and two first ceramic tube fixing claws symmetrically arranged on opposite sides of the first connecting rod seat in the first direction. The lower ends of the two second connecting rods are respectively hinged to the second base, and the upper ends are respectively hinged to the first ceramic tube fixing claws; The lower ends of the two first connecting rods are respectively hinged to the first connecting rod seats, and the upper ends are respectively hinged to the middle parts of the second connecting rods. The crank rocker mechanism is connected to the first parallel rod and drives the first parallel rod to move up and down through a rocking motion. The first parallel rod is respectively connected to multiple first clamping assemblies to drive the first clamping assemblies to clamp or release the ceramic tube.

7. The disassembly and assembly equipment according to claim 4, characterized in that: The second ceramic tube disassembly and assembly device includes a second linear translation module and a plurality of second grasping devices. The second linear translation module comprises: a base plate, a second linear driving member, and a second slide plate, wherein the base plate is used to be connected to the lifting device, and the second linear driving member is connected to the second slide plate to drive the second slide plate to reciprocate linearly along the second direction. Wherein, a plurality of the second grabbing devices are arranged below the second slide plate at intervals from each other along the first direction and correspond one by one to the ceramic rods on the upper part of the graphite boat, Wherein, the base plate is also provided with a second linear guide rail for cooperating with the linear motion of the second slide plate.

8. The disassembly and assembly equipment according to claim 7, characterized in that: The second gripping device comprises: A manipulator base, the manipulator base is arranged below the second slide plate; A second robot module, wherein the second robot module is arranged below the robot base; The second grabbing driving member is arranged on the second slide plate, and the output end passes through the manipulator base to connect the second manipulator module to drive the second manipulator module to respectively clamp or release each ceramic tube of a ceramic rod corresponding to the upper part of the graphite boat.

9. The disassembly and assembly equipment according to claim 8, characterized in that: The second robot module comprises a second parallel rod and a plurality of second clamping assemblies, wherein the second parallel rod extends along the second direction, and the plurality of second clamping assemblies are arranged on the second parallel rod at intervals along the second direction. Each of the second clamping assemblies comprises: a second connecting rod seat connected to the second parallel rod, and two third connecting rods, two fourth connecting rods and two second ceramic tube fixing claws symmetrically arranged on opposite sides of the second connecting rod seat in the first direction. The upper ends of the two fourth connecting rods are respectively hinged to the manipulator base, and the lower ends are respectively hinged to the second ceramic tube fixing claws. The upper ends of the two third connecting rods are respectively hinged to the second connecting rod seats, and the lower ends are respectively hinged to the middle part of the fourth connecting rod. The output end of the second grabbing driving member is connected to the second parallel rod to drive the second parallel rod to move up and down, and the second parallel rod is respectively connected to a plurality of the second clamping assemblies to drive the second clamping assemblies to clamp or release the ceramic tube.

10. The disassembly and assembly equipment according to claim 2, characterized in that: Each of the graphite block disassembly and assembly devices comprises: A movable bracket, the movable bracket is arranged on the base and can reciprocate linearly along the first direction, the movable bracket is provided with a support rod and a pressure rod mechanism extending along the second direction, and the distance between the pressure rod mechanism and the support rod can be adjusted to clamp the graphite block of the graphite boat, Wherein, the base is also provided with a third linear guide rail for cooperating with the linear motion of the movable bracket.

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