High-precision tray placing equipment for porcelain pieces and semiconductor production line

Abstract

The invention provides high-precision placing equipment for porcelain pieces and a semiconductor production line, and belongs to the field of semiconductor manufacturing. The high-precision placing equipment for the porcelain pieces comprises a feeding assembly, a first multi-head grabbing mechanism, a second multi-head grabbing mechanism and a discharging mechanism, and the feeding mechanism comprises a material box lifting assembly and a first carrying assembly; the first carrying assembly can move the feeding box. The first multi-head grabbing mechanism comprises a first mounting part and a plurality of first chucks, the first mounting part is used for mounting the first chucks, the first chucks are used for clamping and positioning porcelain pieces and feeding boxes, and the second multi-head grabbing mechanism comprises a second mounting part and a plurality of second chucks; the discharging mechanism comprises a material disc lifting assembly and a second carrying assembly, the second carrying assembly transfers the discharging disc between the second chucks and the material disc lifting assembly, and the second chucks can transfer the porcelain pieces in the moving process of the discharging disc. Compared with the prior art, the technical problems that an existing ceramic piece wobble plate is high in machining cost and complex in machining step are solved.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor processing, and more specifically, relates to a high-precision plate-staggering device for ceramic parts. The present invention also relates to a semiconductor production line. Background Art

[0002] Before side printing or processing of multi-layer ceramics, the ceramic pieces need to be placed in the positioning tooling with the printed surface facing up, and then the printing or processing is performed in alignment. Due to the different sizes and types of ceramic pieces, specific tooling needs to be made according to the structure of the ceramic pieces, which requires high precision and high cost. When placing ceramic pieces on the tooling manually, avoidance and protection measures are taken to prevent pinching and knocking of the ceramic pieces. This requires certain operating experience for the personnel and has low operating efficiency. In addition, when placing ceramic pieces manually, it is easy to place them upside down and print incorrectly for structurally symmetrical ceramic pieces, causing serious quality problems.

[0003] Due to the high tooling cost, complex manual operation, poor placement accuracy and other problems of the above-mentioned porcelain display parts, the printing quality needs to be checked one by one after side printing. The increase in processing steps is likely to introduce new defects, which urgently needs improvement. Summary of the invention

[0004] The object of the present invention is to provide a high-precision porcelain plate placing device to solve the technical problems of high processing cost and complicated processing steps of the existing porcelain plate placing device.

[0005] To achieve the above purpose, the technical solution adopted by the present invention is: to provide a high-precision plate-laying device for porcelain parts, comprising:

[0006] A feeding mechanism, the feeding mechanism comprising a material box lifting assembly and a first conveying assembly, the material box lifting assembly is used to convey the feeding box in the up and down direction, the first conveying assembly is arranged on one side of the lifting assembly and can move the feeding box in the horizontal direction and the up and down direction;

[0007] A first multi-head gripping mechanism, comprising a first mounting portion and a plurality of first chucks, wherein the first mounting portion is used to mount each of the first chucks, and the first chucks can move along a first horizontal direction and a second horizontal direction, the first chucks are used to clamp and position the porcelain parts and the loading box, and each of the first chucks can move along an up-and-down direction;

[0008] A second multi-head gripping mechanism comprises a second mounting portion and a plurality of second chucks, wherein the second mounting portion is used to mount each of the second chucks, and each of the second chucks can move along a first horizontal direction and a second horizontal direction;

[0009] The unloading mechanism includes a tray lifting assembly and a second conveying assembly, wherein the tray lifting assembly is used to convey the unloading tray in the up and down directions, the second conveying assembly is arranged on one side of the second chuck, and the second conveying assembly can convey the unloading tray in the second horizontal direction to transfer the unloading tray between the second chuck and the tray lifting assembly, and each second chuck can transfer the porcelain pieces from the loading box to the unloading tray during the movement of the unloading tray.

[0010] In a possible implementation, the first conveying assembly includes a dual-axis robotic arm and a clamping mechanism, the dual-axis robotic arm includes a first robotic arm, a second robotic arm, a first vertical axis and a second vertical axis, the first vertical axis and the second vertical axis are respectively arranged at two ends of the first robotic arm, the first vertical axis is used to control the swing of the first robotic arm, the second vertical axis is used to connect the first robotic arm and the second robotic arm, and is used to control the swing of the first robotic arm, the clamping mechanism is arranged on the second robotic arm, and the clamping mechanism can clamp the loading box in the up and down directions.

[0011] In a possible implementation, the first multi-head grasping mechanism also includes a first linear drive module, a second linear drive module and a third linear drive module, the power output direction of the first linear drive module is parallel to the first horizontal direction, the second linear drive module is arranged at the power output end of the first linear drive module, and the power output direction of the second linear drive module extends in the up and down direction, the third linear drive module is arranged at the power output end of the second linear drive module, and the power output direction of the third linear drive module extends in the second horizontal direction, and the first mounting portion is arranged at the power output end of the third linear drive module.

[0012] In a possible implementation, the second multi-head grasping mechanism includes a fourth linear drive module, a fifth linear drive module and a sixth linear drive module, the power output direction of the fourth linear drive module extends along the second horizontal direction, the fifth linear drive module is arranged at the power output end of the fourth linear drive module, the power output direction of the fifth linear drive module extends along the up and down direction, the sixth linear drive module is arranged at the power output end of the fifth linear drive module, the power output direction of the sixth linear drive module extends along the first horizontal direction, and the second mounting portion is arranged at the power output end of the sixth linear drive module.

[0013] In a possible implementation, the high-precision plating equipment for porcelain pieces also includes a top-shooting mechanism, which includes a global camera disposed above the feeding mechanism, and the global camera can perform visual positioning of the material in the feeding box.

[0014] In one possible implementation, the high-precision plating equipment for porcelain parts also includes a flipping mechanism, which includes a steering wheel arranged downstream of the first conveying component, the steering axis of the steering wheel extends in the up and down directions, and the steering wheel is used to receive the porcelain parts and the loading box after the first chuck has initially positioned them.

[0015] In a possible implementation, the high-precision plating equipment for porcelain pieces also includes a bottom photographing mechanism for photographing the porcelain pieces to be plated from the bottom, the bottom photographing mechanism includes a first bottom photographing camera and a second bottom photographing camera, the first bottom photographing camera is arranged below the first chuck and between the steering wheel and the global camera, the second bottom photographing camera is arranged below the second chuck and between the steering wheel and the second transport assembly.

[0016] In one possible implementation, the material box lifting assembly includes an upper and lower driving module and a material receiving part, the upper and lower driving module can drive the material receiving part to move up and down, the material receiving part is provided with a plurality of material receiving troughs, the material receiving troughs are used to accommodate the unloading tray, the length direction of each of the material receiving troughs is parallel to the second horizontal direction, and the material receiving troughs are provided with a notch facing the second conveying assembly.

[0017] In a possible implementation, the second multi-head grasping mechanism further includes a visual positioning camera disposed on the second mounting portion.

[0018] Compared with the prior art, in the specific implementation process of the high-precision plating equipment for porcelain pieces provided by the present invention, multiple loading boxes are moved up to a specified height under the drive of the material box lifting assembly, and under the action of the first conveying assembly, the loading boxes located at the top of the material box lifting assembly are transferred to the bottom of each first chuck. As the first conveying assembly drives the material box to move, each first chuck can arrange the porcelain pieces in the loading box, so that the arrangement of the porcelain pieces after plating is convenient for the subsequent clamping of the second chuck. Similarly, the second conveying assembly can move the lower material tray to the vicinity of the upper material tray, and then the second chuck, with the cooperation of the second conveying assembly, can transfer the porcelain pieces in the loading box to the lower material tray. In the process of the lower material tray being transferred to the upper assembly of the material tray by the second conveying assembly, each second chuck can also continue to arrange the material in the lower material tray with high precision. The whole process does not require manual operation and setting of fixed tooling other than that, which is conducive to enhancing the plating efficiency and plating accuracy of porcelain pieces, thereby solving the technical problems of complex manual operation and poor plating accuracy in the existing porcelain plating.

[0019] Another object of the present invention is to provide a semiconductor production line, including the high-precision plate-swinging device for ceramic parts as described above.

[0020] Compared with the prior art, the semiconductor production line of the present invention has all the advantages of the high-precision plate-staging equipment for ceramic parts mentioned above, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the prior art description. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0022] Figure 1 A three-dimensional diagram of the high-precision plate-staggering device for porcelain parts provided by the present invention;

[0023] Figure 2 for Figure 1 An enlarged view of the part shown at A in the middle;

[0024] Figure 3 A three-dimensional diagram of the high-precision plate-laying device for porcelain pieces of the present invention at another viewing angle;

[0025] Figure 4 A three-dimensional diagram of the high-precision plate-laying device for porcelain pieces of the present invention at another viewing angle;

[0026] Figure 5 It is a top view of the high-precision dish-placement device for porcelain parts of the present invention.

[0027] In the figure:

[0028] 1. Feeding mechanism; 11. Material box lifting assembly; 12. First transport assembly; 121. Dual-axis robotic arm; 122. Clamping mechanism;

[0029] 2. First multi-head grasping mechanism; 21. First mounting portion; 22. First chuck; 23. First linear drive module; 24. Second linear drive module; 25. Third linear drive module;

[0030] 3. Second multi-head grasping mechanism; 31. Second mounting portion; 32. Second chuck; 33. Fourth linear drive module; 34. Fifth linear drive module; 35. Sixth linear drive module; 36. Visual positioning camera;

[0031] 4. Top shooting mechanism; 41. Global camera;

[0032] 5. Turning mechanism; 51. Steering wheel;

[0033] 6. Bottom-shooting mechanism; 61. First bottom-shooting camera; 62. Second bottom-shooting camera;

[0034] 7. Material unloading mechanism; 71. Material tray lifting assembly; 711. Up and down driving module; 712. Material receiving part; 72. Second transport assembly. DETAILED DESCRIPTION

[0035] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0036] In the description of the present invention, it should be noted that if terms such as "upper", "lower", "inside" and "back" appear to indicate orientation or positional relationship, they are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0037] In addition, in the description of the present invention, unless otherwise clearly defined, the terms "installed", "connected", "connection", and "connector" should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or a connection between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in combination with specific circumstances.

[0038] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0039] Please also read Figures 1 to 5, the high-precision plating equipment for porcelain pieces provided by the present invention is now described. The high-precision plating equipment for porcelain pieces includes a loading assembly, a first multi-head gripping mechanism 2, a second multi-head gripping mechanism 3 and a unloading mechanism 7, wherein the loading mechanism 1 includes a material box lifting assembly 11 and a first conveying assembly 12, the material box lifting assembly 11 is used to convey the loading box in the up and down directions, the first conveying assembly 12 is arranged on one side of the lifting assembly, and can move the loading box in the horizontal direction and the up and down directions; the first multi-head gripping mechanism 2 includes a first mounting portion 21 and a plurality of first chucks 22, the first mounting portion 21 is used to mount each first chuck 22, and the first chuck 22 can move in the first horizontal direction and the second horizontal direction, the first chuck 22 is used to clamp and position porcelain pieces and the loading box, and each first chuck 22 can move in the up and down direction; the second multi-head grasping mechanism 3 includes a second mounting portion 31 and a plurality of second chucks 32, the second mounting portion 31 is used to mount each second chuck 32, and each second chuck 32 can move in the first horizontal direction and the second horizontal direction; the unloading mechanism 7 includes a tray lifting assembly 71 and a second conveying assembly 72, the tray lifting assembly 71 is used to convey the unloading tray in the up and down direction, the second conveying assembly 72 is arranged on one side of the second chuck 32, and the second conveying assembly 72 can convey the unloading tray in the second horizontal direction to transfer the unloading tray between the second chuck 32 and the tray lifting assembly 71, and each second chuck 32 can transfer the porcelain pieces from the loading box to the unloading tray when the unloading tray moves.

[0040] The specific implementation process of this embodiment is as follows: the power output end of the first conveying component 12 moves along the horizontal direction, so as to transfer the loading box from the material box lifting component 11 to the bottom of the first chuck 22. During the feeding process of the first conveying component 12, the first chuck 22 can perform the initial position adjustment on the porcelain pieces in the loading box, so that the porcelain pieces in the loading box are neatly stacked. When the loading box approaches the second chuck 32, the power output end of the second conveying component 72 moves along the second horizontal direction, so that the unloading tray approaches the loading box. During this process, the second chuck 32 can transfer the neatly stacked porcelain pieces in the loading box to the unloading tray, thereby enhancing the stacking density of the porcelain pieces. When the unloading tray moves along the second horizontal direction to the tray lifting component 71, the second chuck 32 can perform a higher-precision position adjustment on the porcelain pieces in the unloading tray. The various mechanisms in the above process cooperate with each other, thereby automatically completing processes such as loading and unloading of the material box, initial tray placement, loading and unloading of the material tray, and secondary tray placement.

[0041] In the above embodiment, the loading box can generally be arranged at the unloading and collecting station of the porcelain pieces before the porcelain pieces are arranged on the plate. The porcelain pieces that have been initially processed are placed in the loading box in a disordered and messy posture. After the porcelain pieces are initially arranged on the plate by the present invention, the unloading plate can accommodate porcelain pieces with a higher arrangement density and a more neat posture during the secondary shaping process, so as to facilitate subsequent printing and other operations of the porcelain pieces.

[0042] Compared with the prior art, in the specific implementation process of this embodiment, multiple loading boxes are moved up to a specified height under the drive of the material box lifting component 11. Under the action of the first conveying component 12, the loading boxes located at the top of the material box lifting component 11 are transferred to the bottom of each first clamp 22. As the first conveying component 12 drives the material box to move, each first clamp 22 can arrange the porcelain pieces in the loading box so that the arrangement of the porcelain pieces after the arrangement is convenient for the subsequent clamping of the second clamp 32. Similarly, the second conveying component 72 can place the unloading material The tray moves to the vicinity of the loading tray, and then the second chuck 32, with the cooperation of the second conveying component 72, can transfer the porcelain pieces in the loading box to the unloading tray. During the process of the unloading tray being transferred to the upper component of the tray by the second conveying component 72, each second chuck 32 can also continue to arrange the materials in the unloading tray with high precision. The whole process does not require manual operation and setting of fixed tooling, which is conducive to enhancing the efficiency and accuracy of porcelain arrangement, thereby solving the technical problems of complex manual operation and poor arrangement accuracy of existing porcelain arrangement.

[0043] For the first conveying component 12, based on the above design ideas, a more preferred embodiment is proposed, the first conveying component 12 includes a dual-axis robot arm 121 and a clamping mechanism 122, the dual-axis robot arm 121 includes a first robot arm, a second robot arm, a first vertical axis and a second vertical axis, the first vertical axis and the second vertical axis are respectively arranged at both ends of the first robot arm, the first vertical axis is used to control the swing of the first robot arm, the second vertical axis is used to connect the first robot arm and the second robot arm, and is used to control the swing of the first robot arm, the clamping mechanism 122 is arranged on the second robot arm, and the clamping mechanism 122 can clamp the loading box in the up and down directions, so as to drive the two robot arms to swing by driving the two vertical axes to rotate respectively, so as to solve the technical problems that the existing robot arm occupies too much space and the clamping mechanism 122 can only move along a single arc, so as to improve the range of activities of the clamping mechanism 122, so that the clamping mechanism 122 can move in the first horizontal direction or the second horizontal direction, and it is beneficial to save the space occupied by the first conveying component 12 in the entire plating device.

[0044] Based on the above embodiments, a feasible implementation method is proposed. In order to drive the first chuck 22 and the second chuck 32 to move, the first multi-head grasping mechanism 2 also includes a first linear drive module 23, a second linear drive module 24 and a third linear drive module 25. The power output direction of the first linear drive module 23 is parallel to the first horizontal direction. The second linear drive module 24 is arranged at the power output end of the first linear drive module 23, and the power output direction of the second linear drive module 24 extends in the up and down direction. The third linear drive module 25 is arranged at the power output end of the second linear drive module 24, and the power output direction of the third linear drive module 25 extends in the second horizontal direction. The first mounting portion 21 is arranged at the power output end of the third linear drive module 25. The second multi-head grasping mechanism 3 includes a fourth linear drive module 33, a fifth linear drive module 34 and a sixth linear drive module 35. The power output direction of the fourth linear drive module 33 extends along the second horizontal direction. The fifth linear drive module 34 is arranged at the power output end of the fourth linear drive module 33. The power output direction of the fifth linear drive module 34 extends along the up-down direction. The sixth linear drive module 35 is arranged at the power output end of the fifth linear drive module 34. The power output direction of the sixth linear drive module 35 extends along the first horizontal direction. The second mounting portion 31 is arranged at the power output end of the sixth linear drive module 35. As set above, under the cooperation of the first, second and third linear drive modules 25, the first chuck 22 can cooperate with the first transport assembly 12 to perform a plate swing operation on the upper material box during the movement of the upper material box. Similarly, under the cooperation of the fourth, fifth and sixth linear drive modules 35, the second chuck 32 can transfer the porcelain pieces in the upper material box to the lower material tray and adjust the porcelain pieces therein during the movement of the lower material tray.

[0045] In order to improve the plating accuracy of porcelain parts, a feasible implementation method is proposed. Specifically, the high-precision plating equipment for porcelain parts also includes a top shooting mechanism 4. The top shooting mechanism 4 includes a global camera 41 arranged above the feeding mechanism 1. The global camera 41 can visually locate the material in the feeding box, so as to calibrate the actions of the above two mechanisms during the process of the first conveying component 12 moving the feeding box and the first chuck 22 swinging the porcelain parts, thereby improving the positioning accuracy of the porcelain parts and the feeding box.

[0046] Based on the above embodiments, in a feasible implementation manner, the high-precision plating equipment for porcelain pieces also includes a flipping mechanism 5, which includes a steering wheel 51 arranged downstream of the first conveying assembly 12, and the steering axis of the steering wheel 51 extends in the up and down directions. The steering wheel 51 is used to receive the porcelain pieces and the loading box after the first chuck 22 has initially positioned them, so as to facilitate the transfer of the porcelain pieces between the loading box and the unloading tray, and transfer part of the position operation steps of the porcelain pieces from the movement of the chuck to the rotation of the steering wheel 51, thereby reducing the mobility of the first chuck 22 and the second chuck 32, which is beneficial to improve the clamping accuracy of the first chuck 22 and the second chuck 32.

[0047] Similar to the top shooting mechanism 4 set above, in a feasible embodiment, the high-precision plate-staging equipment for porcelain pieces also includes a bottom shooting mechanism 6, which is used to take pictures of the porcelain pieces to be placed on the plate from the bottom. The bottom shooting mechanism 6 includes a first bottom shooting camera 61 and a second bottom shooting camera 62. The first bottom shooting camera 61 is arranged below the first chuck 22 and between the steering wheel 51 and the global camera 41. The second bottom shooting camera 62 is arranged below the second chuck 32 and between the steering wheel 51 and the second conveying assembly 72. With such an arrangement, this embodiment can position the loading box and the porcelain pieces therein in the process of the loading box approaching the steering wheel 51, which is convenient for the initial material preparation of the first chuck 22. The second bottom shooting mechanism 6 can position the unloading tray transported by the second conveying assembly 72 and the porcelain pieces therein, so as to facilitate the second chuck 32 to accurately position the porcelain pieces in the unloading tray.

[0048] Based on the above embodiments, a feasible implementation method is proposed. The material box lifting component 11 includes an upper and lower driving module 711 and a material receiving part 712. The upper and lower driving module 711 can drive the material receiving part 712 to move up and down. The material receiving part 712 is provided with a plurality of material receiving grooves to enhance the material receiving grooves for accommodating the unloading tray. The length direction of each material receiving groove is parallel to the second horizontal direction, and the material receiving groove is provided with a notch facing the second conveying component 72. Therefore, in this embodiment, the unloading tray can enter and exit the material receiving groove through the mutual cooperation of the upper and lower driving modules 711 and the second conveying component 72, and the movement process of the unloading tray is more reasonable.

[0049] Based on the above embodiments, a feasible implementation method is proposed, where the second multi-head grasping mechanism 3 also includes a visual positioning camera 36 arranged on the second mounting portion 31, so as to improve the placement accuracy of the porcelain pieces during the movement of the second chuck 32 through the visual positioning camera 36.

[0050] In summary, compared with the prior art, the high-precision plating equipment for porcelain pieces provided by the present invention can platter the porcelain pieces inside once during the loading process of the loading box, and can platter the porcelain pieces inside for a second time during the unloading process of the unloading tray. With the cooperation of the conveying mechanism, the grabbing mechanism and the photographing mechanism, as the loading box and the unloading tray move up and down and horizontally in batches, the porcelain pieces are stacked from the loading box to the unloading tray. The whole process does not require manual operation or fixed tooling other than setting, which is conducive to enhancing the plating efficiency and plating accuracy of porcelain pieces, thereby solving the technical problems of complex manual operation and poor plating accuracy in the existing porcelain plating.

[0051] Based on the same inventive concept, the present invention also proposes a semiconductor production line, which includes the high-precision plate-swinging device for ceramic parts mentioned above.

[0052] Compared with the prior art, the semiconductor production line of the present invention has all the advantages of the high-precision plate-staging equipment for ceramic parts mentioned above, which will not be described in detail here.

[0053] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision plate-laying device for porcelain parts, characterized in that: include: A feeding mechanism, the feeding mechanism comprising a material box lifting assembly and a first conveying assembly, the material box lifting assembly is used to convey the feeding box in the up and down direction, the first conveying assembly is arranged on one side of the lifting assembly and can move the feeding box in the horizontal plane and in the up and down direction; A first multi-head gripping mechanism is disposed downstream of the material box lifting assembly and includes a first mounting portion and a plurality of first chucks, wherein the first mounting portion is used to mount each of the first chucks, and the first mounting portion can drive the first chucks to move along a first horizontal direction and a second horizontal direction, the first chucks are used to grip and position the porcelain piece and the material box, and each of the first chucks is movably disposed on the first mounting portion along an up-and-down direction; A second multi-head gripping mechanism is provided downstream of the first multi-head gripping mechanism and comprises a second mounting portion and a plurality of second chucks, wherein the second mounting portion is used to mount each of the second chucks, and the second mounting portion can drive the second chucks to move along the first horizontal direction and the second horizontal direction, the second chucks are used to grip and position the porcelain parts and the loading box, and each of the second chucks is movably provided on the second mounting portion along the up-down direction; The unloading mechanism is arranged downstream of the second multi-head gripping mechanism, and includes a tray lifting assembly and a second conveying assembly. The tray lifting assembly is used to convey the unloading tray in the up and down directions. The second conveying assembly is arranged on one side of the second chuck, and the second conveying assembly can convey the unloading tray in the second horizontal direction to transfer the unloading tray between the second chuck and the tray lifting assembly. Each second chuck can transfer the porcelain pieces from the loading box to the unloading tray during the movement of the unloading tray.

2. The high-precision porcelain plate arrangement device according to claim 1, characterized in that: The first conveying assembly includes a dual-axis robotic arm and a clamping mechanism for clamping a loading box, the dual-axis robotic arm includes a first robotic arm, a second robotic arm, a first vertical axis and a second vertical axis, the length directions of the first robotic arm and the second robotic arm are perpendicular to the up and down directions, one end of the first robotic arm rotates synchronously with the first vertical axis, and the other end is rotationally adapted to the second vertical axis, the first vertical axis is rotatable around its own axis and is arranged on one side of the material box lifting assembly, one end of the second robotic arm rotates synchronously with the second vertical axis, and the other end is connected to the clamping mechanism, and the clamping mechanism is movably arranged on the second robotic arm along the up and down directions.

3. The high-precision porcelain plate arrangement device according to claim 1, characterized in that: The first multi-head grasping mechanism also includes a first linear drive module, a second linear drive module and a third linear drive module. The power output direction of the first linear drive module is parallel to the first horizontal direction. The second linear drive module is arranged at the power output end of the first linear drive module, and the power output direction of the second linear drive module extends in the up and down direction. The third linear drive module is arranged at the power output end of the second linear drive module, and the power output direction of the third linear drive module extends in the second horizontal direction. The first mounting portion is arranged at the power output end of the third linear drive module.

4. The high-precision plating device for porcelain pieces according to claim 1, characterized in that: The second multi-head grasping mechanism includes a fourth linear drive module, a fifth linear drive module and a sixth linear drive module. The power output direction of the fourth linear drive module extends along the second horizontal direction. The fifth linear drive module is arranged at the power output end of the fourth linear drive module. The power output direction of the fifth linear drive module extends along the up and down direction. The sixth linear drive module is arranged at the power output end of the fifth linear drive module. The power output direction of the sixth linear drive module extends along the first horizontal direction. The second mounting portion is arranged at the power output end of the sixth linear drive module.

5. The high-precision porcelain plate arrangement device according to claim 1, characterized in that: The high-precision plating equipment for porcelain pieces also includes a top-shooting mechanism, which includes a global camera arranged above the feeding mechanism, and the global camera can visually locate the material in the feeding box.

6. The high-precision porcelain plate arrangement device according to claim 5, characterized in that: The high-precision plate-staggering equipment for the porcelain parts also includes a flipping mechanism, which includes a steering wheel arranged downstream of the first conveying component, the steering axis of the steering wheel extends in the up and down directions, and the steering wheel is used to receive the porcelain parts and the loading box after the first chuck has positioned them for the first time.

7. The high-precision porcelain plate arrangement device according to claim 6, characterized in that: The high-precision plating equipment for porcelain pieces also includes a bottom photographing mechanism for photographing the porcelain pieces to be plated from the bottom, the bottom photographing mechanism includes a first bottom photographing camera and a second bottom photographing camera, the first bottom photographing camera is arranged below the first chuck and between the steering wheel and the global camera, the second bottom photographing camera is arranged below the second chuck and between the steering wheel and the second transport assembly.

8. The high-precision porcelain plate arrangement device according to claim 7, characterized in that: The material box lifting assembly includes an upper and lower driving module and a material receiving part. The upper and lower driving module can drive the material receiving part to move up and down. The material receiving part is provided with a plurality of material receiving grooves. The material receiving grooves are used to accommodate the unloading tray. The length direction of each of the material receiving grooves is parallel to the second horizontal direction, and the material receiving grooves are provided with a notch facing the second conveying assembly.

9. The high-precision porcelain plate arrangement device according to claim 1, characterized in that: The second multi-head grasping mechanism also includes a visual positioning camera arranged on the second mounting portion.

10. A semiconductor production line, characterized in that: A high-precision plating device comprising the porcelain pieces as described in any one of claims 1 to 9.

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