Precursor cartridge

Abstract

The invention relates to the technical field of process equipment, in particular to a precursor box. The precursor box comprises a shell, a steel cylinder assembly and an evaporator assembly, the steel cylinder assembly and the evaporator assembly are arranged in the shell, the shell is provided with a first hole group and a second hole group, the first hole group comprises a plurality of first air holes and at least one first liquid hole, and the second hole group comprises a plurality of second air holes and at least one second liquid hole; a first pipeline group in the steel cylinder assembly comprises at least one first liquid pipe and a plurality of first gas pipes, the number of the first gas pipes is smaller than or equal to the number of the first gas holes and the number of the second gas holes, and the number of the first liquid pipes is smaller than or equal to the number of the first liquid holes and the number of the second liquid holes; a second pipeline set in the evaporator assembly comprises at least one second liquid pipe and a plurality of second air pipes, the number of the second air pipes is smaller than or equal to the number of the second air holes and the number of the first air holes, and the number of the second liquid pipes is smaller than or equal to the number of the second liquid holes and the number of the first liquid holes. The precursor box can meet the use requirements of different types of precursors.

Description

Technical Field

[0001] The present application relates to the technical field of process equipment, and in particular to a precursor box. Background Art

[0002] Precursors are substances that carry target elements in gaseous or volatile liquid form, have chemical and thermal stability, and also have corresponding reactivity or material properties. Precursors are the core manufacturing materials of thin film deposition processes. Precursors are usually fixed or liquid at room temperature. Before use, they need to be effectively vaporized in the precursor box through carrier gas, heating pipelines, etc. before the thin film deposition process can be carried out.

[0003] However, in the prior art, different types of precursors require different types of precursor boxes for transmission, and a variety of precursor boxes need to be designed to meet usage requirements. Summary of the invention

[0004] The present application provides a precursor box, which can be applicable to the use requirements of different types of precursors.

[0005] The present application provides a precursor box, which includes a shell, a cylinder assembly and an evaporator assembly. The shell has a storage space, and the cylinder assembly and the evaporator assembly are both arranged in the storage space, and along a first direction, the cylinder assembly and the evaporator assembly are arranged at intervals; a first hole group and a second hole group are arranged on the shell, the first hole group includes a plurality of first air holes and at least one first liquid hole, and the second hole group includes a plurality of second air holes and at least one second liquid hole; the cylinder assembly includes a cylinder and a first pipeline group connected to the cylinder, the first pipeline group includes at least one first liquid pipe and a plurality of first air pipes, the plurality of first air pipes are used to connect with the plurality of first air holes or the plurality of second air holes, and the number of the first air pipes is less than or equal to The number of the first air holes and the second air holes is determined by the number of the first liquid tubes, at least one first liquid tube is used to connect with at least one first liquid hole or at least one second liquid hole, and the number of the first liquid tubes is less than or equal to the number of the first liquid holes and the second liquid holes; the evaporator assembly includes an evaporator and a second pipeline group connected to the evaporator, the second pipeline group includes at least one second liquid tube and a plurality of second air tubes, the plurality of second air tubes are used to connect with a plurality of second air holes or a plurality of first air holes, and the number of the second air tubes is less than or equal to the number of the second air holes and the first air holes, at least one second liquid tube is used to connect with at least one second liquid hole or at least one first liquid hole, and the number of the second liquid tubes is less than or equal to the number of the second liquid holes and the first liquid holes. When the precursor needs to be adjusted, since the number of the first air holes and the second air holes on the precursor box is greater than or equal to the number of the first air tubes and the second air tubes, the number of the first liquid holes and the second liquid holes are greater than the number of the first liquid tubes and the second liquid tubes, the type of the cylinder in the cylinder assembly can be directly adjusted, or the type of the evaporator of the evaporator assembly can be adjusted, so that the precursor box can be suitable for different precursors. In addition, the number of first air pipes in the cylinder assembly is less than or equal to the number of first air holes and second air holes, the number of first liquid pipes is less than or equal to the number of first liquid holes and second liquid holes, the number of second air pipes in the evaporator assembly is less than or equal to the number of second air holes and first air holes, and the number of second liquid pipes is less than or equal to the number of second liquid holes and first liquid holes. The positions of the cylinder assembly and the evaporator assembly in the accommodating space can be interchanged to improve the convenience of installing the cylinder assembly and the evaporator assembly on the shell.

[0006] In some implementations, the shell includes a main frame, a first end plate and a second end plate, the main frame includes a top plate, a first side plate, a bottom plate and a second side plate connected in sequence, the main frame has a receiving cavity with two ends open, the first end plate and the second end plate are respectively arranged at the two open ends of the receiving cavity to form the receiving space; the plurality of first air holes and the plurality of second air holes are located on the first end plate or the second end plate, the plurality of first air holes and the plurality of second air holes are both extended along the first direction, and on the projection of the bottom plate, the plurality of first air holes and the plurality of second air holes do not overlap, wherein the first direction is the arrangement direction of the first side plate and the second side plate; the at least one first liquid hole and the at least one second liquid hole are arranged on the first side plate or the second side plate. In this arrangement, the arrangement of the plurality of first air holes and the plurality of second air holes is conducive to the positional interchange of the cylinder assembly and the evaporator assembly.

[0007] In some implementations, at least one first liquid pipe includes a first liquid inlet pipe, multiple first air pipes include a first air outlet pipe, a second air outlet pipe and a first air inlet pipe, and the first pipeline group also includes a first main pipe and a second main pipe; the first ends of the first main pipe and the second main pipe are both connected to the cylinder, the second ends of the first main pipe are respectively connected to the first liquid inlet pipe and the second air outlet pipe, the second ends of the second main pipe are respectively connected to the first air outlet pipe and the second air outlet pipe, and the first air inlet pipe is respectively connected to the first main pipe and the second main pipe.

[0008] In some implementations, in the direction from the first end of the first main pipe to the second end of the first main pipe, the first stop valve, the first solenoid valve, the first three-way valve and the second three-way valve are sequentially arranged on the first main pipe; the first end of the first three-way valve is connected to the first solenoid valve, the second end of the first three-way valve is connected to the first end of the second three-way valve, the third end of the first three-way valve is connected to the first air inlet pipe, the second end of the second three-way valve is connected to the first liquid inlet pipe, and the third end of the second three-way valve is connected to the second air outlet pipe. This method can control the on-off of the first main pipe, and can also control the on-off of the first main pipe with the first liquid inlet pipe, the second air outlet pipe and the first air inlet pipe.

[0009] In some implementations, in order to control the on-off of the second main pipe, and the on-off of the second main pipe with the first air inlet pipe, the first air outlet pipe, and the second air outlet pipe, the second main pipe is provided with a second stop valve, a second solenoid valve, a third three-way valve, and a fourth three-way valve in sequence in the direction from the first end of the second main pipe to the second end of the second main pipe; one end of the third three-way valve is connected to the second solenoid valve, the second end of the third three-way valve is connected to the first end of the fourth three-way valve, the third end of the third three-way valve is connected to the first air inlet pipe, the second end of the fourth three-way valve is connected to the first air outlet pipe, and the third end of the fourth three-way valve is connected to the second air outlet pipe.

[0010] In some implementations, in order to control the opening and closing of the first liquid inlet pipe, the first air inlet pipe and the first air outlet pipe, a third solenoid valve is provided on the first liquid inlet pipe, a fourth solenoid valve is provided on the first air inlet pipe, and a fifth solenoid valve is provided on the first air outlet pipe.

[0011] In some implementations, the at least one second liquid pipe includes a second liquid inlet pipe, the multiple second air pipes include a third air outlet pipe, a fourth air outlet pipe and a second air inlet pipe, and the second pipe group also includes a third main pipe; the second air inlet pipe and the second liquid inlet pipe are both connected to the evaporator, the first end of the third main pipe is connected to the evaporator, and the second end of the third main pipe is respectively connected to the third air outlet pipe and the fourth air outlet pipe.

[0012] In some implementations, in order to control the on-off of the second air inlet pipe, a sixth solenoid valve, a seventh solenoid valve and an eighth solenoid valve are sequentially arranged on the second air inlet pipe, and the eighth solenoid valve is connected to the evaporator; in order to control the on-off of the second liquid inlet pipe and the evaporator, and the on-off of the second liquid inlet pipe and the second air inlet pipe, a ninth solenoid valve, a fifth three-way valve and a tenth solenoid valve are sequentially arranged on the second liquid inlet pipe, and the tenth solenoid valve is connected to the evaporator, the first end of the fifth three-way valve is connected to the ninth solenoid valve, the second end of the fifth solenoid valve is connected to the tenth solenoid valve, and the third end of the fifth solenoid valve is connected between the seventh solenoid valve and the eighth solenoid valve; in order to control the on-off of the third main pipe and the evaporator, and control the on-off of the third main pipe and the third and fourth air outlet pipes, an eleventh solenoid valve and a sixth three-way valve are arranged on the third main pipe, the first end of the sixth three-way valve is connected to the second end of the third main pipe, the second end of the sixth three-way valve is connected to the third air outlet pipe, and the third end of the sixth three-way valve is connected to the fourth air outlet pipe.

[0013] In some implementations, in order to detect the liquid level in the cylinder and the liquid level in the evaporator, the precursor box also includes a first liquid level sensor and a second liquid level sensor, and the first liquid level sensor and the second liquid level sensor are arranged on the top plate of the shell, the first liquid level sensor is used to detect the liquid level in the cylinder, and the second liquid level sensor is used to detect the liquid level in the evaporator.

[0014] In some implementations, in order to ensure the smoothness of gas in the shell, the shell also includes an air intake plate, which is disposed on the second side plate or the first side plate, and the air intake plate is provided with multiple air inlets, and the second side plate or the first side plate is provided with openings corresponding to the multiple air inlets. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1A schematic diagram of the structure of a precursor box provided in an embodiment of the present application;

[0016] Figure 2 A front view of a precursor box provided in an embodiment of the present application;

[0017] Figure 3 A schematic diagram of the structure of a steel cylinder assembly provided in an embodiment of the present application;

[0018] Figure 4 A schematic diagram of the structure of the evaporator assembly provided in an embodiment of the present application.

[0019] Reference numerals:

[0020] 10-shell; 11-first air hole; 110-first gas inlet; 111-first gas outlet; 112-second gas outlet; 12-second air hole; 120-second gas inlet; 121-third gas outlet; 122-fourth gas outlet; 13-bottom plate; 14-top plate; 15-first side plate; 16-second side plate; 17-first end plate; 18-inlet plate; 20-steel cylinder; 30-first pipeline group; 31-first liquid inlet pipe; 310-third solenoid valve; 32-first outlet pipe; 320-fifth solenoid valve; 33-second outlet pipe; 34-first inlet pipe; 340-fourth solenoid valve; 35-first main pipe; 350-first stop valve; 351-first solenoid valve; 352-first three-way valve; 353 -second three-way valve; 36-second main pipe; 360-second stop valve; 361-second solenoid valve; 362-third three-way valve; 363-fourth three-way valve; 37-first flowmeter; 40-evaporator; 41-second liquid inlet pipe; 410-ninth solenoid valve; 411-fifth three-way valve; 412-tenth solenoid valve; 413-second flowmeter; 42-third air outlet pipe; 43-fourth air outlet pipe; 44-second air inlet pipe; 440-sixth solenoid valve; 441-seventh solenoid valve; 442-eighth solenoid valve; 45-third main pipe; 450-eleventh solenoid valve; 451-sixth three-way valve; 452-third flowmeter; 46-seventh three-way valve; 50-first liquid level sensor; 60-second liquid level sensor; 70-valve island. DETAILED DESCRIPTION

[0021] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings.

[0022] Precursors are a type of substance that has a target element, is in gaseous or volatile liquid form, has chemical and thermal stability, and has corresponding reactivity or physical properties. Precursors are mainly used in material vapor deposition, chemical vapor deposition, and atomic vapor deposition to form various types of thin films that meet the requirements. During the use of the precursor, it is necessary to be effectively vaporized in the precursor box through carrier gas, heating pipelines, etc. before use.

[0023] However, in the prior art, different types of precursors require different types of precursor boxes for transmission, and a variety of precursor boxes need to be designed to meet usage requirements.

[0024] Therefore, a new type of precursor box is urgently needed to be suitable for different types of precursors.

[0025] The terms used in the following embodiments are only for the purpose of describing specific embodiments and are not intended to be limiting of the present application. As used in the specification and appended claims of the present application, the singular expressions "a", "an", "said", "above", "the" and "this" are intended to also include expressions such as "one or more", unless there is a clear contrary indication in the context.

[0026] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present application. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear at different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0027] Figure 1 A schematic diagram of the structure of a precursor box provided in an embodiment of the present application, Figure 2 for Figure 1 The front view of the Figure 1 and Figure 2The precursor box includes a shell 10, a cylinder assembly and an evaporator assembly, the shell 10 has a storage space, the cylinder assembly and the evaporator assembly are both arranged in the storage space, and along the first direction, the cylinder assembly and the evaporator assembly are arranged at intervals; the shell 10 is provided with a first hole group and a second hole group, the first hole group includes a plurality of first air holes 11 and at least one first liquid hole, the second hole group includes a plurality of second air holes 12 and at least one second liquid hole; the cylinder assembly includes a cylinder 20 and a first pipeline group connected to the cylinder 20, the first pipeline group includes at least one first liquid pipe and a plurality of first air pipes A, the plurality of first air pipes A are used to connect with the plurality of first air holes 11 or the plurality of second air holes 12, and the number of the first air pipes is less than or equal to the number of the first air holes 1 1 and the number of second air holes 12, at least one first liquid pipe is used to connect with at least one first liquid hole or at least one second liquid hole, and the number of first liquid pipes is less than or equal to the number of first liquid holes and second liquid holes; the evaporator assembly includes an evaporator 40 and a second pipeline group connected to the evaporator 40, the second pipeline group includes at least one second liquid pipe and multiple second air pipes B, multiple second air pipes B are used to connect with multiple second air holes 12 or multiple first air holes 11, and the number of second air pipes B is less than or equal to the number of second air holes 12 and first air holes 11, at least one second liquid pipe is used to connect with at least one second liquid hole or at least one first liquid hole, and the number of second liquid pipes is less than or equal to the number of second liquid holes and first liquid holes. When the precursor needs to be adjusted, since the number of first air holes 11 and second air holes 12 on the precursor box is greater than or equal to the number of first air pipes A and second air pipes B, the number of first liquid holes and the number of second liquid holes are greater than the number of first liquid pipes and second liquid pipes, the type of the cylinder assembly can be directly replaced, or the type of the evaporator assembly can be adjusted so that the precursor box can be suitable for different precursors. In addition, the number of first air pipes A in the cylinder assembly is less than or equal to the number of first air holes and second air holes, the number of first liquid pipes is less than or equal to the number of first liquid holes and second liquid holes, the number of second air pipes B in the evaporator assembly is less than or equal to the number of second air holes 12 and first air holes 11, and the number of second liquid pipes is less than or equal to the number of second liquid holes and first liquid holes. The positions of the cylinder assembly and the evaporator assembly in the accommodating space can be interchanged to improve the convenience of installing the cylinder assembly and the evaporator assembly in the shell.

[0028] Continue to refer to Figure 1 and Figure 2The shell 10 includes a main frame, a first end plate 17 and a second end plate. The main frame includes a top plate 14, a first side plate 15, a bottom plate 13 and a second side plate 16 connected in sequence. The main frame has a receiving cavity with two ends open. The first end plate 17 and the second end plate are respectively arranged at the two open ends to form the above-mentioned receiving space. A plurality of first air holes 11 and a plurality of second air holes 12 are located on the first end plate 17 or the second end plate. The plurality of first air holes 11 and the plurality of second air holes 12 extend along the first direction, and on the projection of the bottom plate 13, the plurality of first air holes 11 and the plurality of second air holes 12 do not overlap, wherein the first direction is the arrangement direction of the first side plate 15 and the second side plate 16; at least one first liquid hole and at least one second liquid hole are arranged on the first side plate 15 or the second side plate 16. Specifically, the connection line of the centers of the plurality of first air holes 11 and the connection line of the centers of the plurality of second air holes 12 can overlap, so as to facilitate the installation of the cylinder assembly and the evaporator assembly, or the interchange of the positions of the cylinder assembly and the evaporator assembly.

[0029] The following is an example in which a plurality of first air holes 11 include a first gas inlet 110, a first gas outlet 111, and a second gas outlet 112 spaced apart along a first direction, and a plurality of first liquid holes include a first liquid inlet; a plurality of second air holes 12 include a second gas inlet 120, a third gas outlet 121, and a fourth gas outlet 122 spaced apart along a first direction, and a plurality of second liquid holes include a second liquid inlet.

[0030] Figure 3 This is a schematic diagram of the structure of the cylinder assembly provided in the embodiment of the present application. Figure 1 , Figure 2 and Figure 3 , at least one first liquid pipe includes a first liquid inlet pipe 31, a plurality of first gas pipes A include a first gas outlet pipe 32, a second gas outlet pipe 33 and a first gas inlet pipe 34, and the first pipeline group 30 also includes a first main pipe 35 and a second main pipe 36, wherein one end of the first liquid inlet pipe 31 is arranged at the first liquid hole, one end of the first gas outlet pipe 32 is arranged at the first gas outlet 111, one end of the second gas outlet pipe 33 is arranged at the second gas outlet 112, and one end of the first gas inlet pipe 34 is arranged at the first gas inlet 110. The first end of the first main pipe 35 and the first end of the second main pipe 36 are both connected to the cylinder 20, the second end of the first main pipe 35 is respectively connected to the first liquid inlet pipe 31 and the second gas outlet pipe 33, the second end of the second main pipe 36 is respectively connected to the first gas outlet pipe 32 and the second gas outlet pipe 33, and the first gas inlet pipe 34 is respectively connected to the first main pipe 35 and the second main pipe 36.

[0031] In the specific implementation process, in order to facilitate the control of the opening and closing of each pipeline, and the opening and closing between each pipeline. In the direction from the first end of the first main pipe 35 to the second end of the first main pipe 35, the first main pipe 35 is sequentially provided with a first stop valve 350, a first solenoid valve 351, a first three-way valve 352 and a second three-way valve 353, wherein the first stop valve 350 can adjust the flow of the fluid on the first main pipe 35, the first solenoid valve 351 can control the opening and closing between the cylinder 20 and the first end a1 of the first three-way valve 352, the second end a2 of the first three-way valve 352 is connected to the first end b1 of the second three-way valve 353, the second end b2 of the second three-way valve 353 is connected to the first liquid inlet pipe 31, and the third end b3 of the second three-way valve 353 is connected to the second gas outlet pipe 33. The second main pipe 36 is provided with a second stop valve 360, a second solenoid valve 361, a third three-way valve 362, a first flow meter 37 and a fourth three-way valve 363. One end of the second stop valve 360 ​​is communicated with the cylinder 20, the other end of the second stop valve 360 ​​is communicated with the second solenoid valve 361, the other end of the second solenoid valve 361 is communicated with the first end c1 of the third three-way valve 362, the second end c2 of the third three-way valve 362 is communicated with one end of the first flow meter 37, the third end c3 of the third three-way valve 362 is communicated with the first air inlet pipe 34, the other end of the first flow meter 37 is communicated with the first end d1 of the fourth three-way valve 363, the second end d2 of the fourth three-way valve 363 is communicated with the first air outlet pipe 32, the third end d3 of the fourth three-way valve 363 is communicated with the second air outlet pipe 33, that is, the third end d3 of the fourth three-way valve 363 is also communicated with the third end b3 of the second three-way valve 353. Specifically, the second stop valve 360 ​​can adjust the flow rate of the fluid on the second main pipe 36, the second solenoid valve 361 can control the on-off between the cylinder 20 and the first end c1 of the third three-way valve 362, and the first flowmeter 37 can monitor the flow rate between the second end of the third three-way valve 362 and the first end d1 of the fourth three-way valve 363.

[0032] In order to control the opening and closing of the first liquid inlet pipe 31, a third solenoid valve 310 may be provided on the first liquid inlet pipe 31. A fourth solenoid valve 340 for controlling the opening and closing of the first air inlet pipe 34 is provided on the first air inlet pipe 34, and a fifth solenoid valve 320 for controlling the opening and closing of the first air outlet pipe 32 is provided on the first air outlet pipe 32.

[0033] Figure 4 This is a schematic diagram of the structure of the evaporator assembly provided in the embodiment of the present application. Figure 1 , Figure 2 and Figure 4, at least one second liquid pipe includes a second liquid inlet pipe 41, a plurality of second gas pipes B include a third gas outlet pipe 42, a fourth gas outlet pipe 43 and a second gas inlet pipe 44, and the second pipeline group further includes a third main pipe 45, wherein one end of the second liquid inlet pipe 41 is arranged at the second liquid hole, one end of the third gas outlet pipe 42 is arranged at the third gas outlet 121, one end of the fourth gas outlet pipe 43 is arranged at the fourth gas outlet 122, and one end of the second gas inlet pipe 44 is arranged at the second gas inlet 120. The second gas inlet pipe 44 and the second liquid inlet pipe 41 are both in communication with the evaporator 40, the first end of the third main pipe 45 is in communication with the evaporator 40, and the second end of the third main pipe 45 is in communication with the third gas outlet pipe 42 and the fourth gas outlet pipe 43, respectively.

[0034] In order to facilitate the control of the on-off of each pipeline and the on-off between each pipeline, the second air intake pipe 44 is provided with a sixth solenoid valve 440, a seventh solenoid valve 441 and an eighth solenoid valve 442, one end of the sixth solenoid valve 440 is connected to one end of the seventh solenoid valve 441, the other end of the seventh solenoid valve 441 is connected to the eighth solenoid valve 442, and the other end of the eighth solenoid valve 442 is connected to the evaporator 40, and any one of the sixth solenoid valve 440, the seventh solenoid valve 441 and the eighth solenoid valve 442 can control the on-off between the second air intake pipe 44 and the evaporator 40. The second liquid inlet pipe 41 is provided with a ninth solenoid valve 410, a second flow meter 413, a fifth three-way valve 411 and a tenth solenoid valve 412. One end of the tenth solenoid valve 412 is connected to the evaporator 40, the other end of the tenth solenoid valve 412 is connected to the second flow meter 413, the other end of the second flow meter 413 is connected to the second end e2 of the fifth three-way valve 411, the tenth solenoid valve 412 is used to control the connection and disconnection between the second end e2 of the fifth three-way valve 411 and the evaporator 40, the second flow meter 413 is used to detect the flow between the second end e2 of the fifth three-way valve 411 and the evaporator, the first end e1 of the fifth three-way valve 411 is connected to the ninth solenoid valve 410, and the ninth solenoid valve 410 is used to control the connection and disconnection between the first end e1 of the fifth three-way valve 411 and the inlet of the second liquid inlet pipe 41. The third main pipe 45 is provided with an eleventh solenoid valve 450, a third flowmeter 452 and a sixth solenoid valve 440. One end of the eleventh solenoid valve 450 is connected to the evaporator 40, the other end of the eleventh solenoid valve 450 is connected to the third flowmeter 452, the other end of the third flowmeter 452 is connected to the first end f1 of the sixth three-way valve 451, the eleventh solenoid valve 450 is used to control the connection and disconnection between the first end f1 of the sixth three-way valve 451 and the evaporator 40, and the third flowmeter 452 is used to detect the flow between the first end f1 of the sixth three-way valve 451 and the evaporator 40; the second end f2 of the sixth three-way valve 451 is connected to the third outlet pipe 42, and the third end f3 of the sixth three-way valve 451 is connected to the fourth outlet pipe 43.

[0035] In some embodiments, a seventh three-way valve 46 may also be provided on the third air outlet pipe 42, and the first end g1 of the seventh three-way valve 46 is connected to the second end f2 of the sixth three-way valve 451, and the second end g2 of the seventh three-way valve 46 is used to be connected to the air outlet of the third air outlet pipe 42, and the third end g3 of the seventh three-way valve 46 is connected to the air inlet of the second air inlet pipe 44, and an electromagnetic valve may also be provided between the third end g3 of the seventh three-way valve 46 and the inlet of the second air inlet pipe 44.

[0036] In the above embodiment, continue to refer to Figure 1 and Figure 2 In order to detect the liquid level in the cylinder 20 and the liquid level in the evaporator 40, the precursor box also includes a first liquid level sensor 50 and a second liquid level sensor 60. The first liquid level sensor 50 and the second liquid level sensor 60 are arranged on the top plate 14 of the shell 10. The first liquid level sensor 50 is used to detect the liquid level in the cylinder 20, and the second liquid level sensor 60 is used to detect the liquid level in the evaporator 40.

[0037] In order to ensure the smoothness of the gas in the shell, the shell 10 further includes an air intake plate 18, which is disposed on the second side plate 16 or the first side plate 15, and is provided with a plurality of air intake ports, and the second side plate 16 or the first side plate 15 is provided with openings corresponding to the plurality of air intake ports. Specifically, in order to prevent external liquid from entering the interior of the shell, an air intake baffle may be provided at each air intake port of the air intake plate 18, the air intake baffle is disposed in the accommodation space, and one end of the air intake baffle is connected to the air intake plate, and the other end of the air intake baffle extends to one side of the bottom plate 13.

[0038] The precursor box also includes a valve island 70 for controlling the opening and closing of each valve body in the cylinder assembly and the evaporator assembly. The cylinder assembly also includes a plurality of first heating sleeves and a plurality of second heating sleeves, one of the plurality of first heating sleeves can be mounted on the cylinder, and two of the plurality of first heating sleeves can be mounted on the first outlet pipe and the second outlet pipe respectively. One of the plurality of second heating sleeves is mounted on the evaporator, and two of the plurality of second heating sleeves are mounted on the third outlet pipe and the fourth outlet pipe respectively. In addition, the type of the cylinder in the above-mentioned cylinder assembly can be adjusted according to actual needs.

[0039] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A precursor box, characterized in that: include: A housing, the housing having a receiving space, the housing being provided with a first hole group and a second hole group, the first hole group comprising a plurality of first air holes and at least one first liquid hole, the second hole group comprising a plurality of second air holes and at least one second liquid hole; A steel cylinder assembly, the steel cylinder assembly is arranged in the accommodating space, the steel cylinder assembly comprises a steel cylinder and a first pipeline group connected to the steel cylinder, the first pipeline group comprises at least one first liquid pipe and a plurality of first air pipes, the plurality of first air pipes are used to connect with the plurality of first air holes or the plurality of second air holes, and the number of the first air pipes is less than or equal to the number of the first air holes and the second air holes, the first liquid pipe is used to connect with the at least one first liquid hole or the at least one second liquid hole, and the number of the first liquid pipes is less than or equal to the number of the first liquid holes and the second liquid holes; An evaporator assembly, wherein the evaporator assembly is arranged in the accommodating space, the evaporator assembly and the cylinder assembly are spaced apart along a first direction, the evaporator assembly includes an evaporator and a second pipeline group connected to the evaporator, the second pipeline group includes at least one second liquid pipe and a plurality of second air pipes, the plurality of second air pipes are used to connect with the plurality of second air holes or the plurality of first air holes, and the number of the second air pipes is less than or equal to the number of the second air holes and the first air holes, the at least one second liquid pipe is used to connect with the at least one second liquid hole or the at least one first liquid hole, and the number of the second liquid pipes is less than or equal to the number of the second liquid holes and the first liquid holes.

2. The precursor box according to claim 1, characterized in that: The shell comprises a main frame, a first end plate and a second end plate, the main frame comprises a top plate, a first side plate, a bottom plate and a second side plate connected in sequence end to end, the main frame has a receiving cavity with two ends open, the first end plate and the second end plate are respectively arranged at two open ends of the receiving cavity to form the receiving space; The plurality of first air holes and the plurality of second air holes are located on the first end plate or the second end plate, the plurality of first air holes and the plurality of second air holes are both extended along a first direction, and on the projection of the bottom plate, the plurality of first air holes and the plurality of second air holes do not overlap, wherein the first direction is the arrangement direction of the first side plate and the second side plate; The at least one first liquid hole and the at least one second liquid hole are disposed on the first side plate or the second side plate.

3. The precursor box according to claim 2, characterized in that: The at least one first liquid pipe includes a first liquid inlet pipe, the plurality of first gas pipes include a first gas outlet pipe, a second gas outlet pipe and a first gas inlet pipe, and the first pipeline group also includes a first main pipe and a second main pipe; The first ends of the first main pipe and the second main pipe are both connected to the cylinder, the second ends of the first main pipe are respectively connected to the first liquid inlet pipe and the second air outlet pipe, the second ends of the second main pipe are respectively connected to the first air outlet pipe and the second air outlet pipe, and the first air inlet pipe is respectively connected to the first main pipe and the second main pipe.

4. The precursor box according to claim 3, characterized in that: In a direction from the first end of the first main pipe to the second end of the first main pipe, a first stop valve, a first solenoid valve, a first three-way valve and a second three-way valve are sequentially arranged on the first main pipe; The first end of the first three-way valve is connected to the first solenoid valve, the second end of the first three-way valve is connected to the first end of the second three-way valve, the third end of the first three-way valve is connected to the first air inlet pipe, the second end of the second three-way valve is connected to the first liquid inlet pipe, and the third end of the second three-way valve is connected to the second air outlet pipe.

5. The precursor box according to claim 3 or 4, characterized in that: In the direction from the first end of the second main pipe to the second end of the second main pipe, the second main pipe is provided with a second stop valve, a second solenoid valve, a third three-way valve and a fourth three-way valve in sequence; One end of the third three-way valve is connected to the second solenoid valve, the second end of the third three-way valve is connected to the first end of the fourth three-way valve, the third end of the third three-way valve is connected to the first air inlet pipe, the second end of the fourth three-way valve is connected to the first air outlet pipe, and the third end of the fourth three-way valve is connected to the second air outlet pipe.

6. The precursor box according to any one of claims 3 to 5, characterized in that: The first liquid inlet pipe is provided with a third solenoid valve, the first air inlet pipe is provided with a fourth solenoid valve, and the first air outlet pipe is provided with a fifth solenoid valve.

7. The precursor box according to any one of claims 3 to 6, characterized in that: The at least one second liquid pipe includes a second liquid inlet pipe, the plurality of second gas pipes include a third gas outlet pipe, a fourth gas outlet pipe and a second gas inlet pipe, and the second pipeline group also includes a third main pipe; The second air inlet pipe and the second liquid inlet pipe are both connected to the evaporator, the first end of the third main pipe is connected to the evaporator, and the second end of the third main pipe is respectively connected to the third air outlet pipe and the fourth air outlet pipe.

8. The precursor box according to claim 7, characterized in that: The second air intake pipe is provided with a sixth solenoid valve, a seventh solenoid valve and an eighth solenoid valve in sequence, and the eighth solenoid valve is connected to the evaporator; The second liquid inlet pipe is provided with a ninth solenoid valve, a fifth three-way valve and a tenth solenoid valve in sequence, the tenth solenoid valve is communicated with the evaporator, the first end of the fifth three-way valve is communicated with the ninth solenoid valve, the second end of the fifth solenoid valve is communicated with the tenth solenoid valve, and the third end of the fifth solenoid valve is connected between the seventh solenoid valve and the eighth solenoid valve; The third main pipe is provided with an eleventh solenoid valve and a sixth three-way valve, the first end of the sixth three-way valve is connected to the second end of the third main pipe, the second end of the sixth three-way valve is communicated with the third air outlet pipe, and the third end of the sixth three-way valve is communicated with the fourth air outlet pipe.

9. The precursor box according to any one of claims 3 to 8, characterized in that: The precursor box also includes a first liquid level sensor and a second liquid level sensor, the first liquid level sensor and the second liquid level sensor are arranged on the top plate of the shell, the first liquid level sensor is used to detect the liquid level in the cylinder, and the second liquid level sensor is used to detect the liquid level in the evaporator.

10. The precursor box according to any one of claims 3 to 8, characterized in that: The shell further includes an air intake plate, which is disposed on the second side plate or the first side plate, the air intake plate is provided with a plurality of air intake ports, and the second side plate or the first side plate is provided with openings corresponding to the plurality of air intake ports.

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