Control circuit of electromagnetic gate valve, control circuit of vacuum pump, and vacuum system

Abstract

The application relates to the field of electronic circuits, and provides a control circuit of an electromagnetic gate valve, a control circuit of a vacuum pump and a vacuum system. The control circuit of the electromagnetic gate valve is connected with the electromagnetic gate valve, the electromagnetic gate valve is used for adjusting the vacuum degree of a sealed space in cooperation with the vacuum pump, and the control circuit of the electromagnetic gate valve comprises a control unit, a driving unit and a switching unit; a control signal and a target clock signal are output by the control unit, in the case of abnormal restart, abnormal reset and the like, the control signal output by the control unit changes from a first state to a second state, and the target clock signal is not output, at this time, the driving unit can continuously output a first switching control signal, that is, a latch operation of the first switching control signal is realized; and the electromagnetic gate valve is continuously controlled to perform a first operation, the electromagnetic gate valve is prevented from being affected by abnormal conditions of a control system, and a new scheme with higher stability and reliability is provided for maintaining a vacuum environment.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of electronic circuits, and particularly relates to a control circuit of an electromagnetic gate valve, a control circuit of a vacuum pump and a vacuum system. BACKGROUND

[0002] A vacuum environment has characteristics such as no matter, low pressure, high conductivity and stability, and is widely used in fields such as aerospace, electronic industry, scientific research and vacuum metallurgy. In order to realize a vacuum environment, a vacuum pump is used to perform a vacuumizing operation on a sealed space in a related technical solution, and an electromagnetic gate valve can be matched to control the airflow, isolation, exhaust and pressure relief of the sealed space.

[0003] However, the electromagnetic gate valve is controlled by a control system of the vacuum pump. If the control system abnormally restarts or abnormally resets, the corresponding drive circuit of the electromagnetic gate valve is also reset, thereby causing the electromagnetic gate valve to perform an abnormal reset operation, and thus affecting the vacuum state of the sealed space and causing losses to industrial production. SUMMARY

[0004] The application aims to provide a control circuit of an electromagnetic gate valve, a control circuit of a vacuum pump and a vacuum system, which can avoid the influence of abnormal conditions of a control system on an electromagnetic gate valve, and provide a new scheme with higher stability and reliability for maintaining a vacuum environment.

[0005] A first aspect of the application provides a control circuit of an electromagnetic gate valve, which is connected with the electromagnetic gate valve. The electromagnetic gate valve is used to adjust the vacuum degree of a sealed space in cooperation with a vacuum pump. The control circuit of the electromagnetic gate valve comprises:

[0006] A control unit, configured to output a control signal and a target clock signal. The control signal comprises a first state and a second state.

[0007] A drive unit, connected with the control unit. The drive unit is configured to receive the control signal and the target clock signal. When the received control signal is in the first state, the drive unit outputs a first switch control signal according to the first state and the target clock signal. When the received control signal changes from the first state to the second state and no target clock signal is received, the drive unit continuously outputs the first switch control signal.

[0008] A switch unit, connected with the electromagnetic gate valve. The switch unit is configured to control the electromagnetic gate valve to perform an opening operation or a closing operation according to the first switch control signal.

[0009] The drive unit is further configured to output a second switch control signal when the received control signal changes from the first state to the second state and a target clock signal is received.

[0010] The switch unit is further configured to control the electromagnetic gate valve to perform an opening operation or a closing operation according to a second switch control signal; and the first switch control signal and the second switch control signal correspond to different operations.

[0011] The control circuit of the electromagnetic gate valve is connected with the electromagnetic gate valve, and the electromagnetic gate valve is used to cooperate with the vacuum pump to adjust the vacuum degree of the sealed space. The control circuit of the electromagnetic gate valve comprises a control unit, a driving unit and a switch unit. The control unit is connected with the driving unit, the driving unit is connected with the switch unit, and the switch unit is connected with the electromagnetic gate valve. The control unit outputs a control signal and a target clock signal. Since the control signal comprises a first state and a second state, the driving unit can receive the control signal and the target clock signal. When the received control signal is in the first state, the driving unit outputs a first switch control signal to the switch unit according to the first state and the target clock signal. The switch unit can control the electromagnetic gate valve to perform an opening operation or a closing operation according to the first switch control signal. Since the driving unit can continuously output the first switch control signal when the received control signal changes from the first state to the second state and no target clock signal is received, when the control unit outputs the control signal from the first state to the second state and no target clock signal is output, the driving unit can continuously output the first switch control signal, that is, the latch operation of the output first switch control signal is realized. When the received control signal changes from the first state to the second state and the target clock signal is received, the driving unit outputs a second switch control signal, so that the switch unit controls the electromagnetic gate valve to perform an opening operation or a closing operation according to the second switch control signal. Here, the first switch control signal and the second switch control signal correspond to different operations. Based on this, the flexible control of different operations of the electromagnetic gate valve can be ensured, and the latch operation of the output first switch control signal can be realized in the case of abnormal restart, abnormal reset and the like, so that the electromagnetic gate valve is prevented from being reset or switched in the case of abnormal restart, abnormal reset and the like, that is, the electromagnetic gate valve is prevented from being affected by the abnormal situation of the control system, thereby providing a new scheme with higher stability and reliability for maintaining the vacuum environment.

[0012] The second aspect of the embodiment of the application provides a control circuit of a vacuum pump, which is used to control the vacuum pump. The control circuit of the vacuum pump comprises a voltage conversion unit and the control circuit of the electromagnetic gate valve provided in the first aspect.

[0013] The input end of the voltage conversion unit is connected with a second preset power supply, the output end of the voltage conversion unit is used as the output end of a first preset power supply, and the voltage conversion unit is used to convert the voltage of the second preset power supply to supply power to the control circuit of the electromagnetic gate valve.

[0014] The third aspect of the embodiment of the present application provides a vacuum system, comprising:

[0015] A closed space being vacuumized;

[0016] A vacuum pump, in communication with the closed space through a gas suction pipeline, for performing a vacuumizing operation on the closed space;

[0017] An electromagnetic gate valve, arranged in the gas suction pipeline;

[0018] The vacuum system further comprises the control circuit of the vacuum pump provided in the second aspect.

[0019] It can be understood that the beneficial effects of the second aspect and the third aspect can be referred to the related description in the first aspect, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 A structural schematic diagram of a control circuit of an electromagnetic gate valve in a vacuum pump provided by the embodiment of the present application;

[0021] Figure 2 A specific structural schematic diagram of a control circuit of an electromagnetic gate valve provided by the embodiment of the present application;

[0022] Figure 3 A specific structural schematic diagram of a control circuit of an electromagnetic gate valve provided by another embodiment of the present application;

[0023] Figure 4 A specific circuit diagram of a control circuit of an electromagnetic gate valve;

[0024] Figure 5 A specific structural schematic diagram of a control circuit of an electromagnetic gate valve provided by another embodiment of the present application;

[0025] Figure 6 A specific circuit diagram of a state feedback unit of an electromagnetic gate valve in the embodiment of the present application;

[0026] Figure 7 A structural schematic diagram of a control circuit of a vacuum pump provided by the embodiment of the present application;

[0027] Figure 8 A structural schematic diagram of a vacuum system provided by the embodiment of the present application. DETAILED DESCRIPTION

[0028] In order to make the technical problems, technical solutions and beneficial effects of the present application more clear, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0029] It is to be noted that when an element is referred to as being "fixed" or "set" on another element, it can be directly on the other element or indirectly on the other element with intervening elements. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or indirectly connected to the other element with intervening elements.

[0030] In addition, the terms "first", "second", etc. are used only to describe purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0031] Referring to Figure 1 , Figure 1 A structural schematic diagram of a control circuit of an electromagnetic gate valve is shown. For ease of illustration, only parts related to the present embodiment are shown, which are described in detail as follows:

[0032] In Figure 1 , a control circuit 100 of an electromagnetic gate valve is connected with an electromagnetic gate valve 110, which is used to cooperate with a vacuum pump 120 to adjust the vacuum degree of a sealed space. The control circuit 100 of the electromagnetic gate valve includes a control unit 10, a driving unit 20 and a switching unit 30. Specifically:

[0033] The control unit 10 is configured to output a control signal and a target clock signal, wherein the control signal includes a first state and a second state. The driving unit 20 is connected with the control unit 10. The driving unit 20 is configured to receive the control signal and the target clock signal, and output a first switching control signal according to the first state and the target clock signal when the received control signal is in the first state. The driving unit 20 is also configured to continuously output the first switching control signal when the received control signal changes from the first state to the second state and no target clock signal is received. The switching unit 30 is connected with the electromagnetic gate valve 110. The switching unit 30 is configured to control the electromagnetic gate valve 110 to perform an opening operation or a closing operation according to the first switching control signal. The driving unit 20 is further configured to output a second switching control signal when the received control signal changes from the first state to the second state and a target clock signal is received. The switching unit 30 is further configured to control the electromagnetic gate valve 110 to perform an opening operation or a closing operation according to the second switching control signal; wherein the first switching control signal and the second control signal correspond to different operations.

[0034] It can be understood that in any scenario of using the vacuum pump 120 to perform the vacuumizing operation on the closed space, the electromagnetic gate valve 110 can be arranged on the pipeline connected with the gas inlet and / or gas outlet of the closed space, and by controlling the opening and closing of the electromagnetic gate valve 110, the on-off state control of the gas inlet and / or gas outlet of the closed space can be realized, and then the vacuum degree of the closed space can be adjusted in cooperation with the vacuum pump 120.

[0035] Exemplarily, as shown in Figure 1 If the electromagnetic gate valve 110 is abnormally reset, the gas suction pipeline 121 connected with the gas inlet of the vacuum pump 120 can be closed, which can cause the vacuum pump 120 to be unable to perform the vacuumizing operation on the closed space and thus affect the vacuum degree of the closed space. Similarly, if the electromagnetic gate valve 110 is abnormally reset, the gas inlet pipeline and / or the pressure relief pipeline 122 of the closed space can be opened, which can affect the vacuum degree of the closed space. Therefore, in actual implementation, the electromagnetic gate valve 110 can be arranged in at least one of the gas suction pipeline connected with the vacuum pump 120, the gas inlet pipeline of the closed space and the pressure relief pipeline of the closed space, and the present application is not limited herein.

[0036] In the embodiment, the control unit 10 can provide the control signal and the target clock signal to the driving unit 20 by being connected with the driving unit 20. Here, the target clock signal refers to the effective clock signal of the driving unit 20 in response to the control signal. The control signal includes the first state and the second state, and the driving unit 20 outputs different switching control signals in response to different control signals.

[0037] Exemplarily, taking the rising edge signal of the clock signal output by the control unit 10 as the target clock signal, in the case that the control unit 10 outputs the control signal to the driving unit 20, if the driving unit 20 receives the rising edge signal provided by the control unit 10, i.e., the target clock signal, the driving unit 20 responds to the control signal and outputs the corresponding switching control signal. In the case that the control unit 10 outputs the control signal to the driving unit 20, if the driving unit 20 does not receive the rising edge signal provided by the control unit 10, i.e., does not receive the target clock signal, the driving unit 20 does not respond to the control signal, and the switching control signal output at this time is the switching control signal output when the control signal is last responded.

[0038] It should be noted that, since the switch unit 30 is connected with the electromagnetic gate valve 110, the switch unit 30 can control the electromagnetic gate valve 110 to perform corresponding operation according to the switch control signal. In the embodiment, the operation performed by the electromagnetic gate valve 110 controlled by the switch unit 30 according to the first switch control signal is different from the operation performed by the electromagnetic gate valve 110 controlled by the switch unit 30 according to the second switch control signal. For example, the switch unit 30 controls the electromagnetic gate valve 110 to perform opening operation according to the first switch control signal, and correspondingly, the switch unit 30 controls the electromagnetic gate valve 110 to perform closing operation according to the second switch control signal. For another example, the switch unit 30 controls the electromagnetic gate valve 110 to perform closing operation according to the first switch control signal, and correspondingly, the switch unit 30 controls the electromagnetic gate valve 110 to perform opening operation according to the second switch control signal.

[0039] Exemplarily, in the specific implementation, the electromagnetic gate valve 110 can be synchronously controlled according to the actual working requirement or working state of the vacuum pump 120. For example, the control circuit 100 of the electromagnetic gate valve provided in the embodiment can be controlled by the control circuit (not shown in the figure) of the vacuum pump, and the control circuit 100 of the electromagnetic gate valve can be instructed to control the electromagnetic gate valve 110 to perform corresponding operation while the control circuit of the vacuum pump controls the vacuum pump 120 to work. As to whether the control circuit 100 of the electromagnetic gate valve instructs the electromagnetic gate valve 110 to perform opening operation or closing operation, it can be related to the position or function of the channel where the electromagnetic gate valve 110 is located.

[0040] In one example, taking the case that the electromagnetic gate valve 110 is arranged in the pumping pipeline 121 connected with the vacuum pump 120 and the sealed space as an example, the original state or reset state of the electromagnetic gate valve 110 is the closing state. While the control circuit of the vacuum pump controls the vacuum pump 120 to work, the control unit 10 in the control circuit 100 of the electromagnetic gate valve can be instructed to provide the control signal and the target clock signal to the driving unit 20, and then the driving unit 20 outputs corresponding first switch control signal to the switch unit 30, so that the switch unit 30 controls the electromagnetic gate valve 110 to perform opening operation in response to the first switch control signal, that is, the electromagnetic gate valve 110 is switched from the closing state to the opening state. At this time, since the electromagnetic gate valve 110 is in the opening state, the pumping pipeline 121 connected with the vacuum pump 120 and the sealed space is conducted, so that the vacuum pump 120 can perform vacuumizing operation on the sealed space, and then the vacuumizing state of the sealed space can be maintained.

[0041] In another example, the original state or reset state of the electromagnetic gate valve 110 is the open state, for example, when the electromagnetic gate valve 110 is arranged in the air inlet pipeline and / or pressure relief pipeline 122 of the sealed space. When the control circuit of the vacuum pump 120 controls the operation of the vacuum pump 120, the control unit 10 in the control circuit 100 of the electromagnetic gate valve can provide a control signal and a target clock signal to the driving unit 20, and then the driving unit 20 outputs a corresponding first switch control signal to the switch unit 30, so that the switch unit 30 controls the electromagnetic gate valve 110 to perform a closing operation in response to the first switch control signal, that is, the electromagnetic gate valve 110 is switched from the open state to the closed state. At this time, since the electromagnetic gate valve 110 is in the closed state, the air inlet pipeline / pressure relief pipeline 122 is closed, so that the sealed space cannot be filled with air or relieved, and at the same time the vacuum pump 120 can perform a vacuumizing operation on the sealed space through the air suction pipeline 121 connected with the sealed space, thereby maintaining the vacuumizing state of the sealed space.

[0042] In combination with the above example, the control circuit 100 of the electromagnetic gate valve can be controlled by the control circuit (not shown in the figure) of the vacuum pump. When the control circuit 100 of the electromagnetic gate valve is used to control the electromagnetic gate valve 110, and the vacuum pump 120 is used to adjust the vacuum degree of the sealed space, the control unit 10 can be interfered by electromagnetic interference or abnormal interference of the control circuit of the vacuum pump, thereby causing abnormal restart, abnormal reset, etc. It should be noted that when abnormal restart, abnormal reset, etc. occur, the control unit 10 executes the program to perform the reset operation, at this time the control signal output by the control unit 10 to the driving unit 20 can change from the first state to the second state, but since the control unit 10 executes the program to reset and does not immediately output the target clock signal to the driving unit 20, the driving unit 20 will not respond to the second state, so the first switch control signal is continuously output, and the latch of the first switch control signal is realized.

[0043] For example, when the control circuit 100 controls the electromagnetic brake valve 110 in cooperation with the vacuum pump 120 to adjust the vacuum degree of the sealed space, the control unit 10 outputs the first state and the target clock signal to the driving unit 20. According to the first state and the target clock signal, the driving unit 20 outputs the first switch control signal to the switch unit 30, so that the switch unit 30 can control the electromagnetic brake valve to perform the opening operation or the closing operation according to the first switch control signal. When the control unit 10 is abnormally restarted or reset due to electromagnetic interference or abnormal interference of the control circuit of the vacuum pump, the control unit 10 is restarted and performs the corresponding reset operation. At this time, the control signal output by the control unit 10 to the driving unit 20 changes from the first state to the second state. Since the control unit 10 does not output the target clock signal at this time, the driving unit 20 does not respond to the second state, so the first switch control signal is continuously output, and the latch of the first switch control signal is realized. Based on this, the switch unit 30 can still control the electromagnetic brake valve to perform the opening operation or the closing operation according to the first switch control signal.

[0044] The above scheme uses the control signal and the target clock signal output by the control unit 10. Since the control signal includes the first state and the second state, the driving unit 20 can receive the control signal and the target clock signal, and when the received control signal is in the first state, the driving unit 20 outputs the first switch control signal to the switch unit 30 according to the first state and the target clock signal. The switch unit 30 can control the electromagnetic brake valve 110 to perform the first operation according to the first switch control signal. Since the driving unit 20 can continuously output the first switch control signal when the received control signal changes from the first state to the second state and no target clock signal is received, when the control unit 10 outputs the control signal from the first state to the second state and no target clock signal is output during abnormal restart, abnormal reset, etc., the driving unit 20 does not respond to the second state and continuously outputs the first switch control signal, thereby realizing the latch of the output first switch control signal. That is, the switch unit 30 can continuously control the electromagnetic brake valve 110 to perform the first operation according to the first switch control signal, so as to avoid the electromagnetic brake valve 110 being reset or switching the operation state during abnormal restart, abnormal reset, etc., thereby improving the stability and reliability of maintaining the vacuum environment.

[0045] It can be understood that when the control unit 10 outputs the control signal from the first state to the second state and also outputs the target clock signal without abnormal restart, abnormal reset, etc., the driving unit 20 responds to the second state.

[0046] In the embodiment, the driving unit 20 is further configured to output the second switch control signal when the received control signal changes from the first state to the second state and the target clock signal is received. The switch unit 30 is further configured to control the electromagnetic gate valve 110 to perform the opening operation or the closing operation according to the second switch control signal. Here, the operations corresponding to the first switch control signal and the second switch control signal are different. That is, the operation performed by the switch unit 30 according to the first switch control signal is different from the operation performed by the switch unit 30 according to the second switch control signal.

[0047] For example, the switch unit 30 controls the electromagnetic gate valve 110 to perform the opening state according to the first switch control signal, and the switch unit 30 controls the electromagnetic gate valve 110 to perform the closing state according to the second switch control signal.

[0048] For another example, the switch unit 30 controls the electromagnetic gate valve 110 to perform the closing state according to the first switch control signal, and the switch unit 30 controls the electromagnetic gate valve 110 to perform the closing state according to the second switch control signal.

[0049] In some embodiments, the control unit 10 provides the control signal and the target clock signal to the driving unit 20, and specifically, the control signal and the target clock signal can be output at the same time.

[0050] It is easy to understand that in other embodiments, the target clock signal can also be a signal output by the control unit 10 to the driving unit 20 in response to the instruction of controlling the electromagnetic gate valve 110. Based on this, in order to ensure that the driving unit 20 can accurately respond to the control signal, the control unit 10 can first output the control signal to the driving unit 20, and then output the target clock signal to the driving unit 20.

[0051] As an example, the control unit 10 is specifically configured to output the target clock signal when the duration of the output of the first state satisfies the preset duration.

[0052] In the embodiment, the preset duration is used to indicate the timing of outputting the target clock signal in the case of having output the first state.

[0053] In the specific implementation, when the control unit 10 outputs the first state and performs timing, when the duration of the output of the first state is not less than the preset duration, the control unit 10 outputs the target clock signal to the driving unit 20. At this time, the driving unit 20 responds to the first data signal under the action of the target clock signal, and then outputs the corresponding first switch control signal.

[0054] As an example, the driving unit 20 is further configured to output a power-on reset signal when powered on. The switch unit 30 is further configured to control the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal.

[0055] In the embodiment, the power-on time refers to the state that the control circuit 100 of the electromagnetic gate valve is just powered on, and can also be understood as the time when the control circuit 100 of the electromagnetic gate valve is powered. Here, in order to ensure that the control of the electromagnetic gate valve 110 by the control circuit 100 of the electromagnetic gate valve does not appear chaotic and the like, the driving unit 20 outputs a power-on reset signal at the power-on time, and the switching unit 30 can be instructed to control the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal.

[0056] In a specific implementation, the power supply end of the driving unit 20 can be connected with a first preset power supply. When the first preset power supply supplies power to the driving unit 20, the driving unit 20 is in a power-on state, and at this time, the corresponding power-on reset signal is output to the switching unit 30. The switching unit 30 controls the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal. It is easy to understand that, unlike the switching control signal, the power-on reset signal is used to instruct the switching unit 30 to control the electromagnetic gate valve 110 to reset, that is, to return to the default state.

[0057] For example, the default state of the electromagnetic gate valve 110 is an open state. The driving unit 20 outputs the power-on reset signal at the power-on time, and the switching unit 30 controls the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal, that is, switches from the closed state to the open state, or keeps the open state.

[0058] For another example, the default state of the electromagnetic gate valve 110 is a closed state. The driving unit 20 outputs the power-on reset signal at the power-on time, and the switching unit 30 controls the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal, that is, switches from the open state to the closed state, or keeps the closed state.

[0059] The above scheme, the driving unit 20 outputs the power-on reset signal at the power-on time, and the switching unit 30 controls the electromagnetic gate valve 110 to perform a reset operation according to the power-on reset signal, which can return the electromagnetic gate valve 110 to the default state, and can ensure the stability of the subsequent control of the electromagnetic gate valve 110 by the control circuit 100 of the electromagnetic gate valve, and improve the reliability of the use of the electromagnetic gate valve 110.

[0060] Figure 2 A specific structure diagram of a control circuit of an electromagnetic gate valve provided by an embodiment of the application is shown. As shown in Figure 2 As an embodiment, the driving unit 20 includes a driving circuit 21.

[0061] The driving circuit 21 comprises a power terminal 211, a reset terminal 212, a first input terminal 213, a second input terminal 214 and an output terminal 215. The power terminal 211 and the reset terminal 212 are connected to the first preset power supply VCC1. The first input terminal 213 and the second input terminal 214 are connected to the control unit 10 respectively. The output terminal 215 is connected to the switching unit 30.

[0062] In the embodiment, the power terminal 211 and the reset terminal 212 of the driving circuit 21 are connected to the first preset power supply VCC1. When the first preset power supply VCC1 supplies power to the driving circuit 21, the power terminal 211 and the reset terminal 212 of the driving circuit 21 are powered up at the same time. Here, the power terminal 211 of the driving circuit 21 is powered up and enters a working state. At this time, the reset terminal 212 enters a reset working state under the action of the power provided by the first preset power supply VCC1, and then outputs a power-up reset signal to the switching unit 30 through the output terminal 215, so that the switching unit 30 can control the electromagnetic gate valve 110 to perform a reset operation according to the power-up reset signal.

[0063] As shown in Figure 2 , the first input terminal 213 and the second input terminal 214 of the driving circuit 21 are connected to the control unit 10 respectively. The control unit 10 can output a target clock signal and a control signal to the driving circuit 21 through the first input terminal 213 and the second input terminal 214. After the driving circuit 21 outputs the power-up reset signal, the driving circuit 21 can output a corresponding switching control signal to the switching unit 30 according to the received control signal and target clock signal.

[0064] The above scheme can connect the power terminal 211 and the reset terminal 212 of the driving circuit 21 to the first preset power supply VCC1. When the first preset power supply VCC1 supplies power to the driving circuit 21, the reset terminal 212 can make the driving circuit 21 enter a reset working state under the action of the power provided by the first preset power supply VCC1. Then, the driving circuit 21 outputs a power-up reset signal to the switching unit 30 through the output terminal 215, so that the switching unit 30 can control the electromagnetic gate valve 110 to perform a reset operation according to the power-up reset signal. The driving circuit 21 can immediately enter a reset working state when powered up, and the electromagnetic gate valve 110 can be controlled to perform a reset operation when powered up.

[0065] Figure 3 A specific structure diagram of a control circuit of an electromagnetic gate valve is shown. As shown in Figure 3 , as an embodiment, the driving unit 20 further comprises an RC circuit 22.

[0066] In Figure 3In the embodiment, the first preset power supply VCC1 is connected with the first end of the RC circuit 22, and the second end of the RC circuit 22 is connected with the reset end 212 of the driving circuit 21. The RC circuit 22 is configured to output a reset electrical signal to the reset end 212 of the driving circuit 21 when the voltage value of the first preset power supply VCC1 is less than a preset voltage value, and stop outputting the reset electrical signal to the reset end 212 of the driving circuit 21 when the voltage value of the first preset power supply VCC1 is not less than the preset voltage value. The driving circuit 21 is further configured to output a power-on reset signal to the switch unit 30 when the reset electrical signal is received, and stop outputting the power-on reset signal to the switch unit 30 when the reset electrical signal is not received.

[0067] In the embodiment, the reset end 212 of the driving circuit 21 is connected with the second end of the RC circuit 22, so that the electric energy of the first preset power supply VCC1 acts on the reset end 212 of the driving circuit 21 after passing through the RC circuit 22.

[0068] In the embodiment, the reset end 212 of the driving circuit 21 is connected with the second end of the RC circuit 22, so that the electric energy of the first preset power supply VCC1 acts on the reset end 212 of the driving circuit 21 after passing through the RC circuit 22.

[0069] The above scheme utilizes the characteristic that the voltage of the first preset power supply VCC1 is unstable when just powered on, cooperates the RC circuit with the unstable voltage, makes the voltage acting on the reset end 212 of the driving circuit 21 have the characteristic of slow rising, and then can be used as the reset electrical signal output to the reset end 212 of the driving circuit 21. When the voltage of the first preset power supply VCC1 is stable, that is, the voltage of the reset end 212 of the driving circuit 21 is not less than the preset voltage value, it can be regarded as the timing of stopping outputting the reset electrical signal to the reset end 212 of the driving circuit 21. Based on this, cooperating with the driving circuit 21, the output of the power-on reset signal to the switch unit 30 and the stop of the output of the power-on reset signal can be realized from the process of the voltage of the first preset power supply VCC1 being unstable to the process of the voltage being stable, the reset is realized immediately after the power-on, and it is ensured that the electromagnetic gate valve 110 can be controlled to perform the reset operation when powered on.

[0070] Figure 4 A specific circuit diagram of the control circuit of the electromagnetic gate valve provided by the embodiment of the application is shown.

[0071] As shown in Figure 4 , as an embodiment, the RC circuit 22 includes a first resistor R1 and a first capacitor C1. The first end of the first resistor R1 is the first end of the RC circuit 22, the second end of the first resistor R1 and the first end of the first capacitor C1 are connected to form a first node P1, the first node P1 is the second end of the RC circuit 22, and the second end of the first capacitor C1 is grounded.

[0072] In combination Figure 3 with Figure 4 , in the embodiment, the RC circuit 22 is connected with the first preset power supply VCC1 through the first resistor R1. When the voltage value of the first preset power supply VCC1 is less than the preset voltage value, under the action of the first resistor R1 and the first capacitor C1, the voltage of the first node P1 slowly rises. At this time, it is equivalent to outputting the reset electrical signal to the reset end 212 of the driving circuit 21. When the voltage value of the first preset power supply VCC1 is not less than the preset voltage value, that is, after the voltage of the first preset power supply VCC1 is stable, the voltage of the first node P1 remains stable at this time, that is, the output of the reset electrical signal to the reset end 212 of the driving circuit 21 is stopped.

[0073] As shown in Figure 4 , as an embodiment, the driving circuit 21 includes a first chip U1, a second capacitor C2, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, and a sixth resistor R6.

[0074] In the embodiment, the power supply end VCC of the first chip U1 and the first end of the second capacitor C2 are connected with the first preset power supply VCC1, the second end of the second capacitor C2 is grounded, the power-on reset end The second resistor R2 serves as the reset terminal 212 of the drive circuit 21. The first terminal of the second resistor R2 serves as the first input terminal 213 of the drive circuit 21. The second terminal of the second resistor R2 and the first terminal of the third resistor R3 are connected to the clock signal input terminal CLK of the first chip U1. The second terminal of the third resistor R3 is grounded. The first terminal of the fourth resistor R4 serves as the second input terminal 214 of the drive circuit 21. The second terminal of the fourth resistor R4 is connected to the control signal input terminal D of the first chip U1. The first terminals of the fifth resistor R5 and the sixth resistor R6 are connected to form the second node P2, which serves as the output terminal of the drive circuit 21. The second terminal of the fifth resistor R5 is connected to the output terminal Q of the first chip U1, and the second terminal of the sixth resistor R6 is grounded.

[0075] exist Figure 4 In this circuit, since the power supply terminal VCC of the first chip U1 and the first terminal of the second capacitor C2 are both connected to the first preset power supply VCC1, and the second terminal of the second capacitor C2 is grounded, the second capacitor C2 is essentially connected between the power supply terminal VCC of the first chip U1 and ground, thus filtering the power supplied by the first preset power supply VCC1. Similar to the function of the second capacitor C2, Figure 4 The first capacitor C1 can also be considered as being connected between the first node P1 and ground. That is, the first capacitor C1 can also serve to filter the electrical energy provided by the first preset power supply VCC1.

[0076] like Figure 4 As shown in the figure, in one embodiment, the switching unit 30 includes a switching transistor Q1 and a diode D1. The controlled terminal of the switching transistor Q1 is connected to the output terminal of the driving circuit 21 (i.e., the second node P2), the ground terminal of the switching transistor Q1 is grounded, the power supply terminal of the switching transistor Q1 is connected to the anode terminal of the diode D1 to form a third node P3, the third node P3 is used to connect the electromagnetic gate valve 110, and the cathode terminal of the diode D1 is connected to the second preset power supply VCC2.

[0077] In all embodiments of this application, the switching unit 30 is connected to the solenoid gate valve 110, specifically, it can be connected to the electromagnetic coil of the solenoid gate valve 110. Here, the solenoid gate valve 110 is grounded through the switching unit 30, and by controlling the on / off state of the switching unit 30, the on / off control of the circuit containing the solenoid gate valve 110 can be achieved.

[0078] For example, when the circuit containing the solenoid gate valve 110 is connected, that is, when the solenoid coil of the solenoid gate valve 110 is energized, the solenoid coil of the solenoid gate valve 110 generates an electromagnetic force, which lifts the closing element in the solenoid gate valve 110 from the valve seat, and the valve of the solenoid gate valve 110 opens. At this time, the solenoid gate valve 110 is open. When the solenoid coil of the solenoid gate valve 110 is de-energized, the electromagnetic force generated by the solenoid coil of the solenoid gate valve 110 disappears, the closing element in the solenoid gate valve 110 is closed and pressed against the valve seat, and the valve of the solenoid gate valve 110 is closed.

[0079] In this embodiment, one end of the electromagnetic coil of the electromagnetic gate valve 110 is connected to the second preset power supply VCC2, and the other end of the electromagnetic coil of the electromagnetic gate valve 110 is connected to the third node P3. By controlling the on and off of the switching transistor Q1, the electromagnetic coil of the electromagnetic gate valve 110 is energized and controlled.

[0080] It is easy to understand that, in a specific implementation, the switching transistor Q1 can be any one of an N-type transistor, a P-type transistor, a triode, or an IGBT with a built-in diode.

[0081] For example, combined Figure 3 and Figure 4 ,by Figure 4 Taking the switch Q1 as an example, the control unit 10 can output control signals and target clock signals to the drive circuit 21 through the first input terminal 213 and the second input terminal 214. At this time, the control signal is current-limited by the fourth resistor R4 and acts on the control signal input terminal D of the first chip U1. The target clock signal acts on the clock signal input terminal CLK of the first chip U1 through the current-limiting voltage divider branch composed of the second resistor R2 and the third resistor R3.

[0082] In one example, when the control signal is in the first state, the first chip U1 outputs the first switch control signal through the output terminal Q of the first chip U1 under the action of the first state and the target clock signal.

[0083] In another example, when an abnormal restart, an abnormal reset, or the like occurs, the control signal output by the control unit 10 changes from the first state to the second state, and at the same time, the control unit 10 is abnormally restarted or abnormally reset, and at this time, the control unit 10 does not output the target clock signal. Accordingly, the clock signal input end CLK of the first chip U1 does not receive the target clock signal, and the control signal input end D of the first chip U1 inputs the control signal changing from the first state to the second state. Since the response of the first chip U1 to the control signal depends on the target clock signal, in the case that the clock signal input end CLK of the first chip U1 does not receive the target clock signal, the first chip U1 does not respond to the second state, and continuously outputs the first switch control signal, thereby realizing the latching of the output first switch control signal.

[0084] In yet another example, when the control signal output by the control unit 10 changes from the first state to the second state, if the control unit 10 still outputs the target clock signal. At this time, the clock signal input end CLK of the first chip U1 receives the target clock signal, and the control signal input end D of the first chip U1 inputs the control signal changing from the first state to the second state. Since the response of the first chip U1 to the control signal depends on the target clock signal, in the case that the clock signal input end CLK of the first chip U1 receives the target clock signal, the first chip U1 responds to the second state, and further outputs the second switch control signal to the switch unit 30.

[0085] It is easy to understand that the first switch control signal can be a high-level signal, and correspondingly, the second switch control signal can be a low-level signal. Alternatively, the first switch control signal can be a low-level signal, and correspondingly, the second switch control signal can be a high-level signal.

[0086] In combination with the above examples, in Figure 4In the embodiment, one end of the electromagnetic coil of the electromagnetic gate valve 110 is connected with the second preset power supply VCC2 in the embodiment, and the other end of the electromagnetic coil of the electromagnetic gate valve 110 is connected with the third node P3. In an example, when the first chip U1 receives the reset electrical signal, the power-on reset signal can be output to the switch tube Q1 through the second node P2. When the power-on reset signal is a low-level signal, the switch tube Q1 is turned on, and at this time, the third node P3 can form a loop with the ground through the switch tube Q1, and at this time, the electromagnetic gate valve 110 is in the energized state, that is, the reset state of the electromagnetic gate valve 110 is the open state. In the example, after the electromagnetic gate valve 110 is reset, when the control unit 10 provides the first chip U1 with the first state and the target clock signal, the first switch control signal output by the first chip U1 according to the first state and the target clock signal can be a high-level signal. At this time, the switch tube Q1 is turned off, at this time, the third node P3 cannot form a loop with the ground through the switch tube Q1, and the electromagnetic gate valve 110 is in the non-energized state, that is, the electromagnetic gate valve 110 is in the closed state. When the control signal input by the first chip U1 changes from the first state to the second state and no target clock signal is received, the first chip U1 continues to output the first switch control signal, and the first switch control signal is a high-level signal, at this time, the switch tube Q1 still remains off, and the electromagnetic gate valve 110 remains in the non-energized state, that is, the electromagnetic gate valve 110 remains in the closed state. When the control signal input by the first chip U1 changes from the first state to the second state and the target clock signal is received, the first chip U1 changes from outputting the first switch control signal to outputting the second switch control signal, and the second switch control signal is a low-level signal, at this time, the switch tube Q1 is turned on, and the electromagnetic gate valve 110 is energized, that is, the electromagnetic gate valve 110 changes from the closed state to the open state.

[0087] In another example, when the first chip U1 receives the reset electrical signal, the power-on reset signal can be output to the switch tube Q1 through the second node P2. When the power-on reset signal is a high level signal, the switch tube Q1 is turned off, at this time, the third node P3 cannot form a loop with the ground through the switch tube Q1, at this time, the electromagnetic gate valve 110 is in a non-power-on state, that is, the reset state of the electromagnetic gate valve 110 is a closed state. In this example, after the electromagnetic gate valve 110 is reset, when the control unit 10 provides the first state and the target clock signal to the first chip U1, the first switch control signal output by the first chip U1 according to the first state and the target clock signal can be a low level signal. At this time, the switch tube Q1 is turned on, at this time, the third node P3 can form a loop with the ground through the switch tube Q1, the electromagnetic gate valve 110 is in a power-on state, that is, the electromagnetic gate valve 110 is in an open state. When the control signal input by the first chip U1 changes from the first state to the second state and no target clock signal is received, the first chip U1 continues to output the first switch control signal, and the first switch control signal is a low level signal, at this time, the switch tube Q1 remains open, and the electromagnetic gate valve 110 remains in a power-on state, that is, the electromagnetic gate valve 110 remains in an open state. Until when the control signal input by the first chip U1 changes from the first state to the second state and the target clock signal is received, the first chip U1 changes from outputting the first switch control signal to outputting the second switch control signal, and the second switch control signal is a high level signal, at this time, the switch tube Q1 is turned off, the electromagnetic gate valve 110 is no longer powered on, that is, the electromagnetic gate valve 110 changes from the open state to the closed state.

[0088] In a specific implementation, the control unit 10 can include a second chip (not shown in the figure), that is, the second chip can drive the first input end 213 and the second input end 214 of the drive circuit 21, and output the target clock signal and the control signal to the drive circuit 21. The first chip U1 can be a latch, which inputs the control signal and the target clock signal, inputs the first switch control signal, and latches the output first switch control signal when the input control signal changes and no corresponding target clock signal is received.

[0089] The above scheme, in the switch unit 30, the power supply end of the switch tube Q1 and the anode end of the diode D1 are connected to form the third node P3, the electromagnetic gate valve 110 is connected through the third node P3, the cathode end of the diode D1 is connected with the second preset power supply VCC2, and then the switch tube Q1 is connected to the loop of the electromagnetic gate valve 110 and the ground. Thus, while ensuring that the latch operation of the output first switch control signal can be realized in the case of abnormal restart, abnormal reset and the like, the on-off control of the switch tube Q1 can realize the on-off control of the ground loop of the electromagnetic gate valve 110, and the rationality of the control of the electromagnetic gate valve 110 is improved.

[0090] Figure 5 A specific structural schematic diagram of a control circuit of an electromagnetic gate valve is shown in another embodiment of the present application. As shown in the figure, Figure 5 The control circuit 100 of the electromagnetic gate valve further includes an electromagnetic gate valve state feedback unit 40.

[0091] In the embodiment, the electromagnetic gate valve state feedback unit 40 is connected with the control unit 10. The electromagnetic gate valve state feedback unit 40 is configured to detect current state information of the electromagnetic gate valve 110, and send the current state information to the control unit 10, where the current state information is used to indicate the open state or the closed state of the electromagnetic gate valve 110.

[0092] In the embodiment, the electromagnetic gate valve state feedback unit 40 can be arranged in the electromagnetic gate valve 110. Specifically, the electromagnetic gate valve state feedback unit 40 can be arranged around the closing member of the electromagnetic gate valve 110, or arranged within the effective range of the closing member of the electromagnetic gate valve 110.

[0093] In specific implementation, the electromagnetic gate valve state feedback unit 40 can be a sensor. When the electromagnetic gate valve 110 is controlled to act, the sensor can detect that the closing member of the electromagnetic gate valve 110 is closed on the valve seat, or detect that the closing member of the electromagnetic gate valve 110 is lifted from the valve seat, and then output the current state information to the control unit 10, which is used to indicate the open state or the closed state of the electromagnetic gate valve 110.

[0094] As shown in the figure, Figure 5 In the embodiment, the electromagnetic gate valve state feedback unit 40 can include a first feedback end 401 and a second feedback end 402. Here, the first feedback end 401 and the second feedback end 402 are respectively connected with the control unit 10.

[0095] In some embodiments, the electromagnetic gate valve state feedback unit 40 can specifically include two sensors, where the first sensor is configured to detect the open state of the closing member of the electromagnetic gate valve 110, and the second sensor is configured to detect the closed state of the closing member of the electromagnetic gate valve 110.

[0096] For example, when the first sensor triggers a corresponding electrical signal, the electromagnetic gate valve state feedback unit 40 can send the current state information indicating that the electromagnetic gate valve 110 is in the open state to the control unit 10 through the first feedback end 401. When the second sensor triggers a corresponding electrical signal, the electromagnetic gate valve state feedback unit 40 can send the current state information indicating that the electromagnetic gate valve 110 is in the closed state to the control unit 10 through the second feedback end 402.

[0097] For example, when the first sensor triggers the corresponding electrical signal, the electromagnetic valve state feedback unit 40 can send the current state information indicating that the electromagnetic valve 110 is in the closed state to the control unit 10 through the first feedback end 401. When the second sensor triggers the corresponding electrical signal, the electromagnetic valve state feedback unit 40 can send the current state information indicating that the electromagnetic valve 110 is in the open state to the control unit 10 through the second feedback end 402.

[0098] As an example, the control unit 10 is further configured to, in response to a system reset instruction, acquire a reset type, and in response to the reset type being a non-power-on reset, control the electromagnetic valve 110 by using the last stored current state information.

[0099] In this embodiment, the system reset instruction refers to an instruction for controlling the electromagnetic valve 110 to perform a reset operation. Here, when the control circuit 100 of the electromagnetic valve is powered on, a power-on reset signal can be automatically triggered, that is, a power-on reset instruction is used to perform a power-on reset operation on the electromagnetic valve 110. Of course, the system reset instruction can also be triggered in an abnormal state. For example, an abnormal reset instruction triggered by electromagnetic interference of the control circuit 100 of the electromagnetic valve.

[0100] It is easy to understand that, when the control unit 10 responds to the system reset instruction, the reset type can be determined according to whether the driving unit 20 responds to the system reset instruction or whether the driving unit 20 outputs the power-on reset signal corresponding to the system reset instruction.

[0101] In combination with Figure 5 For example, when the control circuit 100 of the electromagnetic valve is first connected to the power supply, the driving unit 20 can output a power-on reset signal to control the electromagnetic valve 110 to perform a reset operation. At this time, the control unit 10 can determine that the power-on reset signal is output by the driving unit 20, and thus determine that the reset type is a power-on reset.

[0102] As an example, when the control circuit of the vacuum pump connected to the control circuit 100 of the electromagnetic valve is abnormal, a program restart in the control unit 10 can be triggered, that is, a system reset instruction is sent to the control unit 10, and the control unit 10 can determine that the corresponding reset type is a non-power-on reset when receiving the system reset instruction.

[0103] In another embodiment, the control unit 10 can also acquire the reset type according to the input signal and the output signal of the driving unit 20. For example, when the control signal output by the driving unit 20 changes from the first state to the second state, and the control unit 10 does not output the target clock signal to the driving unit 20 at this time, it can be determined that the corresponding reset type is the non-power-on reset. At this time, since the driving unit 20 does not respond to the second state, the control unit 10 can also determine that the corresponding reset type is the non-power-on reset according to the change of the output control signal and / or whether the driving unit 20 responds to the changed control signal.

[0104] The above scheme can determine that the reset operation of the electromagnetic gate valve 110 is not controlled by the driving unit 20 and the switch unit 30 at this time when the control unit 10 responds to the system reset instruction and determines that the reset type is the non-power-on reset. Based on this, the last stored current state information can be used to control the electromagnetic gate valve 110, that is, the state information of the electromagnetic gate valve registered in the current program of the control unit 10 is the same as the actual state of the electromagnetic gate valve 110. Using the last stored current state information to control the electromagnetic gate valve 110 can ensure the accuracy and stability of the control circuit 100 of the electromagnetic gate valve 110.

[0105] Referring to Figure 6 , Figure 6 The specific circuit diagram of the electromagnetic gate valve state feedback unit in the embodiment of the application is shown. As shown in Figure 6 , as an embodiment, the electromagnetic gate valve state feedback unit 40 can specifically include two electromagnetic gate valve state detection circuits 41 which are the same in structure.

[0106] In combination Figure 5 with Figure 6 , in the embodiment, the electromagnetic gate valve state feedback unit 40 can specifically include two electromagnetic gate valve state detection circuits 41 which are the same in structure, and the feedback ends / outputs of the two electromagnetic gate valve state detection circuits 41 can correspond to the first feedback end 401 and the second feedback end 402 of the electromagnetic gate valve state feedback unit 40, respectively.

[0107] In Figure 6In the embodiment, the two electromagnetic gate valve state detection circuits 41 can correspond to two inductive devices K, two optical couplings U2, two seventh resistors R7, two eighth resistors R8, and two ninth resistors R9. Here, taking a device group composed of one optical coupling U2, one inductive device K, one seventh resistor R7, one eighth resistor R8, and one ninth resistor R9 as an example, the first end of the optical coupling U2 is connected to the second preset power supply VCC2 through the seventh resistor R7. One end of the inductive device K is grounded, and the other end is connected to the second end of the optical coupling U2. The first end of the eighth resistor R8 and the first end of the ninth resistor R9 are connected to the third end of the optical coupling U2, and the second end of the eighth resistor R8 is grounded. The second end of one of the ninth resistors R9 serves as the first feedback end 401 of the electromagnetic gate valve state feedback unit 40, and the second end of the other ninth resistor R9 serves as the second feedback end 402 of the electromagnetic gate valve state feedback unit 40. The fourth end of the optical coupling U2 is connected to the first preset unit VCC1.

[0108] In the embodiment, when the electromagnetic gate valve 110 is opened or closed, the closing member (not shown in the figure) of the electromagnetic gate valve 110 acts, and then causes the inductive device K to close, so as to turn on the power supply circuit between the light emitting device, such as a light emitting diode, and the ground in the optical coupling U2. At this time, the optical coupling U2 outputs a corresponding electrical signal through the second end of the ninth resistor R9 under the action of the light emitting device. The electrical signal can serve as current state information indicating that the electromagnetic gate valve 110 is in an open state or a closed state.

[0109] In the specific implementation, the two inductive devices K in the two electromagnetic gate valve state detection circuits 41 can be respectively arranged at the two ends of the movement direction of the closing member of the electromagnetic gate valve 110. In this way, when the electromagnetic gate valve 110 is opened or closed, only one electromagnetic gate valve state detection circuit 41 can feed back the electrical signal through the first feedback end 401 or the second feedback end 402, that is, at one time, the control unit 10 will only receive one kind of current state information.

[0110] Referring to Figure 7 , Figure 7 A structure diagram of a control circuit of a vacuum pump is shown. As shown in Figure 7 the drawing, as an embodiment, the control circuit 200 of the vacuum pump includes a voltage conversion unit 210 and the control circuit 100 of the electromagnetic gate valve provided in the above embodiment.

[0111] In the embodiment, the input end of the voltage conversion unit 210 is connected to the second preset power supply VCC2, the output end of the voltage conversion unit 210 serves as the output end of the first preset power supply VCC1, and the voltage conversion unit 210 is used for voltage conversion of the voltage of the second preset power supply VCC2 to supply power to the control circuit 100 of the electromagnetic gate valve.

[0112] Referring toFigure 8 , Figure 8 A structural schematic diagram of a vacuum system is shown. As shown in the figure, as an embodiment, a vacuum system 1000 includes a closed space to be vacuumed. A vacuum pump 120 is in communication with the closed space through a suction pipeline 121, and is used to perform vacuum operation on the closed space. An electromagnetic gate valve 110 is arranged in the suction pipeline. The vacuum system 1000 further includes the control circuit 200 of the vacuum pump provided in the above embodiments. Figure 8 It can be understood that the control circuit 200 of the vacuum pump and the vacuum system 1000 provided in the embodiments are all related to the improvement points and specific implementation manners of the present application, which have been described in detail in the embodiments of the control circuit 100 of the corresponding electromagnetic gate valve. Therefore, please refer to the related descriptions in the embodiments of the control circuit 100 of the corresponding electromagnetic gate valve and the control circuit 200 of the vacuum pump for details, which will not be described here again.

[0113] Figures 1 to 6 Figures 1 to 6 Figures 1 to 6

[0114] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the division of the above functional units and modules is taken as an example for illustration, and in actual application, the above functions can be completed by different functional units and modules according to needs, that is, the internal structure of the device is divided into different functional units or modules to complete all or part of the functions described above. Each functional unit and module in the embodiments can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of software functional unit.

[0115] The above-described embodiments are only used to illustrate the technical solutions of the present application, rather than limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for some technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application.​​​​

Claims

1. A control circuit for an electromagnetic gate valve, connected to the electromagnetic gate valve, characterized in that, The electromagnetic gate valve is used in conjunction with a vacuum pump to regulate the vacuum level of a sealed space. The control circuit of the electromagnetic gate valve includes: The control unit is used to output control signals and target clock signals, wherein the control signals include a first state and a second state; A drive unit is connected to the control unit. The drive unit is used to receive the control signal and the target clock signal. When the received control signal is in the first state, it outputs a first switch control signal according to the first state and the target clock signal. When the received control signal changes from the first state to the second state and the target clock signal is not received, it continues to output the first switch control signal. A switching unit is connected to the electromagnetic gate valve, and the switching unit is used to control the electromagnetic gate valve to perform an opening or closing operation according to a first switching control signal. The driving unit is further configured to output a second switch control signal when the received control signal changes from the first state to the second state and the target clock signal is received; The switching unit is further configured to control the electromagnetic gate valve to perform an opening or closing operation according to the second switching control signal; wherein the operations corresponding to the first switching control signal and the second control signal are different. The drive unit is also used to output a power-on reset signal when powered on; The switching unit is also used to control the electromagnetic gate valve to perform a reset operation according to the power-on reset signal; The driving unit includes: a driving circuit; The driving circuit includes a power supply terminal, a reset terminal, a first input terminal, a second input terminal, and an output terminal. The power supply terminal and the reset terminal are connected to a first preset power supply. The first input terminal and the second input terminal are respectively connected to the control unit. The output terminal is connected to the switching unit. The driving unit further includes: an RC circuit; The first terminal of the RC circuit is connected to the first preset power supply, and the second terminal of the RC circuit is connected to the reset terminal of the drive circuit. The RC circuit is used to output a reset signal to the reset terminal of the drive circuit when the voltage value of the first preset power supply is less than the preset voltage value, and to stop outputting the reset signal to the reset terminal of the drive circuit when the voltage value of the first preset power supply is not less than the preset voltage value. The driving circuit is further configured to output the power-on reset signal to the switching unit when the reset electrical signal is received, and to stop outputting the power-on reset signal to the switching unit when the reset electrical signal is not received.

2. The control circuit for the electromagnetic gate valve according to claim 1, characterized in that, The control unit is specifically used to output the target clock signal when the duration of the first state output meets the preset duration.

3. The control circuit for the electromagnetic gate valve according to claim 1, characterized in that, The RC circuit includes: a first resistor and a first capacitor; The first end of the first resistor serves as the first end of the RC circuit, the second end of the first resistor is connected to the first end of the first capacitor to form a first node, the first node serves as the second end of the RC circuit, and the second end of the first capacitor is grounded.

4. The control circuit for the electromagnetic gate valve according to claim 1, characterized in that, The driving circuit includes: a first chip, a second capacitor, a second resistor, a third resistor, a fourth resistor, a fifth resistor, and a sixth resistor; The power supply terminal of the first chip and the first terminal of the second capacitor are connected to the first preset power supply. The second terminal of the second capacitor is grounded. The power-on reset terminal of the first chip serves as the reset terminal of the driving circuit. The first terminal of the second resistor serves as the first input terminal of the driving circuit. The second terminal of the second resistor and the first terminal of the third resistor are connected to the clock signal input terminal of the first chip. The second terminal of the third resistor is grounded. The first terminal of the fourth resistor serves as the second input terminal of the driving circuit. The second terminal of the fourth resistor is connected to the control signal input terminal of the first chip. The first terminal of the fifth resistor and the first terminal of the sixth resistor are connected to form a second node. The second node serves as the output terminal of the driving circuit. The second terminal of the fifth resistor is connected to the output terminal of the first chip. The second terminal of the sixth resistor is grounded.

5. The control circuit for the electromagnetic gate valve according to claim 1, characterized in that, The switching unit includes a switching transistor and a diode; The controlled terminal of the switching transistor is connected to the output terminal of the driving circuit, the ground terminal of the switching transistor is grounded, the power supply terminal of the switching transistor is connected to the anode terminal of the diode to form a third node, the third node is used to connect the electromagnetic gate valve, and the cathode terminal of the diode is connected to a second preset power supply.

6. The control circuit for the electromagnetic gate valve according to any one of claims 1 to 5, characterized in that, Also includes: An electromagnetic gate valve status feedback unit is connected to the control unit. The electromagnetic gate valve status feedback unit is used to detect the current status information of the electromagnetic gate valve and send the current status information to the control unit. The current status information is used to indicate the open or closed state of the electromagnetic gate valve.

7. The control circuit for the electromagnetic gate valve according to claim 6, characterized in that, The control unit is also used to respond to a system reset command, obtain the reset type, and when the reset type is non-power-on reset, regulate the electromagnetic gate valve using the last stored current state information.

8. A control circuit for a vacuum pump, used to control the vacuum pump, characterized in that, The control circuit of the vacuum pump includes a voltage conversion unit and the control circuit of the electromagnetic gate valve as described in any one of claims 1 to 7. The input terminal of the voltage conversion unit is connected to the second preset power supply, and the output terminal of the voltage conversion unit serves as the output terminal of the first preset power supply. The voltage conversion unit is used to convert the voltage of the second preset power supply to supply power to the control circuit of the electromagnetic gate valve.

9. A vacuum system, characterized in that, include: A sealed space that has been evacuated; A vacuum pump, connected to the sealed space via a vacuum pipe, is used to perform a vacuuming operation on the sealed space. An electromagnetic gate valve is installed in the air extraction pipe; The vacuum system further includes the control circuit for the vacuum pump described in claim 8.

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