Oil injection device, oil injection method thereof and evaporation equipment
By designing an oil injection device including oil storage part, piston and track fixture, the problem of difficulty in accurately controlling the amount of lubricant injected oil by artificial oil guns in the evaporation equipment is solved, and the precise control of the lubricant injection amount on the track surface is achieved, and the equipment's harvest rate and lubricant utilization rate are improved.
Patent Information
- Application Number
- CN202510051682.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-13
- Publication Date
- 2025-04-25
AI Technical Summary
During the oil filling process of existing evaporation equipment, it is difficult to accurately control the amount of lubricating oil when filling artificial oil guns, resulting in too much or too little lubricating oil, resulting in poor oil shape, excessive resistance and downtime.
A oil injection device is designed, including an oil storage part, a piston and a track fixture. The piston and track fixture are moved along the track through a driving mechanism, accurately controlling the output of lubricant oil to ensure that the lubricant oil is evenly applied to the track surface.
Accurate control of the amount of lubricant injected on the track surface is achieved, the problem of excessive or too little lubricant is avoided, the yield rate of the evaporation equipment and the utilization rate of lubricant are improved, and the maintenance time and labor cost are reduced.
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Figure CN119878711A_ABST
Abstract
Description
Technical Field
[0001] The embodiments of the present disclosure belong to the field of evaporation technology, and specifically relate to an oil injection device and an oil injection method thereof, and evaporation equipment. Background Art
[0002] OLED (Organic Light-Emitting Diode) display screens have attracted widespread attention due to their advantages such as self-luminescence, low power consumption, lightness, flexibility, bright colors, high contrast, and fast response rate. Summary of the invention
[0003] In a first aspect, an embodiment of the present disclosure provides an oil injection device for injecting oil into a rail, comprising: an oil storage portion, a piston, and a rail clamp,
[0004] The oil storage part is used to store lubricating oil; the oil storage part has openings at two opposite ends along the first direction and is connected;
[0005] The piston is located in the first end opening of the oil reservoir, and the piston can move in the oil reservoir along the first direction to push the lubricating oil in the oil reservoir to be output from the second end opening of the oil reservoir;
[0006] The rail clamp is located at one end of the oil storage portion away from the piston and is connected to the oil storage portion;
[0007] The track clamp comprises a main body and a rolling element, wherein a first channel is provided in the main body, and the first channel is connected to the second end opening;
[0008] The rolling element is located at the exit of the first channel and is used to contact the track. The rolling element can roll relative to the main body and the track.
[0009] In some embodiments, the main body portion includes a first sub-portion and a second sub-portion,
[0010] The space enclosed by the first sub-section and the second sub-section can accommodate the track.
[0011] The first channel includes a first sub-channel and a second sub-channel, the first sub-channel is opened in the first sub-portion, and the second sub-channel is opened in the second sub-portion;
[0012] The rolling element comprises a first part and a second part,
[0013] The first part is located in the first sub-part and at the exit of the first sub-channel, and the first part is movably connected to the first sub-part;
[0014] The second part is located in the second sub-part and at the outlet of the second sub-channel, and the second part is movably connected to the second sub-part.
[0015] In some embodiments, the first portion and the second portion are respectively in contact with the track;
[0016] The first sub-portion and the second sub-portion are not in contact with the track.
[0017] In some embodiments, the shape of the rolling element includes a spherical shape.
[0018] The radial dimension of the outlet of the first passage is smaller than or equal to the radial dimension of the rolling element.
[0019] In some embodiments, the oil storage portion includes a first sub-portion and a second sub-portion.
[0020] The first sub-portion and the second sub-portion are arranged and connected along the first direction;
[0021] A first accommodating space is defined in the first subsection, and the first accommodating space has the first end opening;
[0022] A second accommodating space is provided in the second subsection, and the second accommodating space has the second end opening;
[0023] The first accommodating space extends along the first direction, the second accommodating space extends along the first direction, and the first accommodating space and the second accommodating space are connected;
[0024] A cross-sectional area of the first accommodating space along the direction perpendicular to the first direction is greater than a cross-sectional area of the second accommodating space along the direction perpendicular to the first direction;
[0025] The piston is located in the first accommodating space, and the piston and the first accommodating space are matched in size and shape.
[0026] In some embodiments, the cross-sectional area of the second accommodating space along the direction perpendicular to the first direction, the cross-sectional area of the first sub-channel along the direction perpendicular to its extension direction, and the cross-sectional area of the second sub-channel along the direction perpendicular to its extension direction are equal.
[0027] In some embodiments, a first driving mechanism is further included, which is connected to the oil storage portion and / or the track clamp and can drive the oil storage portion and the track clamp to move reciprocally and at a constant speed along the extension direction of the track.
[0028] In some embodiments, a second driving mechanism is further included, which is connected to the piston and can apply a constant force along the first direction to the piston to push the piston to move at a constant speed along the first direction.
[0029] In a second aspect, an embodiment of the present disclosure further provides a vapor deposition device, comprising the above-mentioned oil injection device.
[0030] In a third aspect, the embodiments of the present disclosure further provide an oil filling method of the above oil filling device, comprising: injecting lubricating oil into an oil storage portion, and assembling a piston and the oil storage portion together;
[0031] Assembling the track clamp and the oil storage part together, and assembling the track clamp and the track so that the rolling element in the track clamp contacts the track;
[0032] The first driving mechanism is turned on to drive the oil storage part and the track clamp to move at a constant speed along the extension direction of the track; at the same time, the second driving mechanism is turned on to apply a constant force along the first direction to the piston to push the piston to move at a constant speed along the first direction, thereby applying the lubricating oil to the track surface.
[0033] Beneficial technical effects of the present invention: the oil injection device provided by the present invention, by providing an oil storage part, a piston and a track clamp, can accurately control the injection amount of lubricating oil injected into the track surface, compared with the current manual oil gun oil injection, thereby avoiding excessive or insufficient injection of lubricating oil, thereby, on the one hand, improving or avoiding poor oil quality caused by splashing of lubricating oil onto the product; on the other hand, it can improve or avoid problems such as excessive resistance and downtime caused by the reduction or exhaustion of lubricating oil on the track, thereby reducing or avoiding the loss of material and production capacity utilization during the evaporation process of the evaporation equipment, and then accurately and efficiently completing the maintenance of the track, improving the utilization rate of the lubricating oil, reducing the time and labor costs of track maintenance, and improving the utilization rate of the evaporation equipment.
[0034] The evaporation equipment provided by the present invention improves the evaporation efficiency and utilization rate of the evaporation equipment by adopting the oil injection device. BRIEF DESCRIPTION OF THE DRAWINGS
[0035] The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. The above and other features and advantages will become more apparent to those skilled in the art by describing detailed example embodiments with reference to the accompanying drawings, in which:
[0036] Figure 1 It is a schematic diagram of the structure of the oil injection device in the embodiment of the present disclosure.
[0037] Figure 2 Schematic diagram of the oil filling process of the oil filling device in the embodiment of the present disclosure.
[0038] Figure 3It is a schematic diagram of the internal oil injection channel of the oil injection device in the embodiment of the present disclosure.
[0039] Figure 4 It is a schematic diagram of the assembly of the components of the oil injection device in the embodiment of the present disclosure. DETAILED DESCRIPTION
[0040] In order to enable those skilled in the art to better understand the technical solution of the embodiment of the present disclosure, an oil filling device and an oil filling method and a vapor deposition device provided by the embodiment of the present disclosure are further described in detail below in conjunction with the drawings and specific implementations.
[0041] The embodiments of the present disclosure will be described more fully below with reference to the accompanying drawings, but the embodiments shown may be embodied in different forms and should not be construed as being limited to the embodiments set forth in the present disclosure. On the contrary, the purpose of providing these embodiments is to make the present disclosure thorough and complete and to enable those skilled in the art to fully understand the scope of the present disclosure.
[0042] The embodiments of the present disclosure are not limited to the embodiments shown in the drawings, but include modifications of the configurations formed based on the manufacturing process. Therefore, the regions illustrated in the drawings have schematic properties, and the shapes of the regions shown in the drawings illustrate the specific shapes of the regions, but are not intended to be limiting.
[0043] At present, the organic film layer (such as the organic light-emitting functional layer) in the OLED display panel is usually prepared by the evaporation process. The evaporation process refers to a process in which an evaporation source heats the evaporation material under certain vacuum conditions to melt (or sublimate) the evaporation material into vapor composed of atoms, molecules or atomic groups, and the vapor condenses on the surface of the substrate to form a film.
[0044] For the evaporation process, the stability of the auxiliary system of the high vacuum evaporation equipment is the current technical difficulty. The auxiliary system of the high vacuum evaporation equipment includes a slider for installing the evaporation source and a linear (LM, Linear Motion) track for the slider to slide. That is, the evaporation source is installed on the slider, and the slider can slide along the linear track with the evaporation source driven by the motor to achieve the purpose of uniformly evaporating the evaporation material onto the surface of the substrate. The stability of the auxiliary system plays a very important role in the film thickness stability and production capacity of the evaporation process.
[0045] The auxiliary systems of high vacuum evaporation equipment require regular maintenance, and maintenance measures include manually injecting lubricating oil on the contact surface of the slider and the linear track using an oil gun. The auxiliary systems of high vacuum evaporation equipment currently have the following problems: During the evaporation process, the slider slides along the linear track. If too much lubricating oil is injected into the contact surface of the track and the slider, the lubricating oil will splash onto the product (such as the substrate to be plated), causing poor oil quality; if too little lubricating oil is injected into the contact surface of the track and the slider, the lubricating oil cannot effectively lubricate the linear track. After a period of time, the lubricating oil on the track gradually decreases or even runs out, causing the slider to slide on the linear track. The resistance is too high, which can easily cause the auxiliary system to shut down, resulting in material and production capacity utilization losses.
[0046] Therefore, the lubricating oil injected into the contact surface of the slider and the linear rail cannot be too much or too little. This requires the user to accurately control the frequency and number of oil injections when using an oil gun. However, it is currently impossible to accurately quantify the amount of oil by manually injecting oil with an oil gun. To solve this problem, there is currently a method of periodic oil injection by manual application. This oil injection method can control the oil quality problem to a certain extent, but due to the differences in the operation of different personnel, there is still the problem of too much or too little oil injection, which leads to frequent downtime or poor evaporation, which needs to be solved urgently.
[0047] Therefore, for high vacuum evaporation equipment and its ancillary systems, how to accurately and efficiently complete the maintenance of the ancillary systems, improve the utilization rate of lubricating oil, reduce the time and labor costs of ancillary system maintenance, and improve the utilization rate of equipment is the current research focus.
[0048] In order to solve the above problems, in a first aspect, an embodiment of the present disclosure provides an oil injection device for injecting oil into a track, such as Figure 1-Figure 4 As shown, it includes: an oil storage part 1, a piston 2 and a track clamp 3, the oil storage part 1 is used to store lubricating oil; the oil storage part 1 is opened and connected at two opposite ends along the first direction Y; the piston 2 is located in the first end opening 101 of the oil storage part 1, and the piston 2 can move in the oil storage part 1 along the first direction Y to push the lubricating oil in the oil storage part 1 to be output from the second end opening 102 of the oil storage part 1; the track clamp 3 is located at the end of the oil storage part 1 away from the piston 2, and is connected to the oil storage part 1; the track clamp 3 includes a main body part 31 and a rolling element 32, a first channel 310 is opened in the main body part 31, and the first channel 310 is connected with the second end opening 102; the rolling element 32 is located at the outlet of the first channel 310, and the rolling element 32 is used to contact with the track 4, and the rolling element 32 can roll relative to the main body part 31 and the track 4.
[0049] The oiling device is used to lubricate the auxiliary system in the evaporation device. The auxiliary system in the evaporation device includes a slider for installing the evaporation source and a linear (LM, Linear Motion) track for the slider to slide, that is, the evaporation source is installed on the slider, and the slider can slide along the linear track with the evaporation source under the drive of the motor to achieve the purpose of uniformly evaporating the evaporation material onto the surface of the substrate. The track 4 in this embodiment refers to the linear track for the slider to slide, and the oiling device in this embodiment is mainly used to lubricate the linear track 4 in the evaporation device, so as to maintain the linear track 4 in the evaporation device after the operation is completed.
[0050] In this embodiment, the track 4 refers to a groove arranged on the linear guide structure 5. The rolling element 32 can be a spherical structural element, such as a spherical steel ball. The oil storage portion 1 can be cylindrical, such as a cylindrical or prismatic shape. The piston 2 is tightly matched with the oil storage portion 1, so that the lubricating oil in the oil storage portion 1 will not leak at the end of the piston 2. The lubricating oil stored in the oil storage portion 1 can be output to the rolling element 32 through the second end opening 102 and the first channel 310 under the push of the piston 2. The rolling element 32 rolls relative to the main body 31 and the track 4, and applies the lubricating oil to the surface of the track 4, thereby realizing the lubrication effect of the lubricating oil on the surface of the track 4. The track clamp 3 and the oil storage portion 1 are fixedly connected by a connecting member 8 (such as a screw).
[0051] The oil filling device in this embodiment, by providing an oil storage portion 1, a piston 2 and a track clamp 3, can accurately control the amount of lubricating oil injected into the surface of the track 4, compared with the current manual oil filling with an oil gun, to avoid excessive or insufficient injection of lubricating oil, thereby, on the one hand, improving or avoiding poor oil quality caused by splashing of lubricating oil onto the product; on the other hand, it can improve or avoid problems such as excessive resistance and downtime caused by the reduction or exhaustion of lubricating oil on the track 4, thereby reducing or avoiding the loss of material and production capacity during the evaporation process of the evaporation equipment, and then accurately and efficiently completing the maintenance of the track 4, improving the utilization rate of the lubricating oil, reducing the time and labor costs of the maintenance of the track 4, and improving the utilization rate of the evaporation equipment.
[0052] In some embodiments, the main body 31 includes a first sub-section 311 and a second sub-section 312, and the space enclosed by the first sub-section 311 and the second sub-section 312 can accommodate the track 4. The first channel 310 includes a first sub-channel A and a second sub-channel B. The first sub-channel A is opened in the first sub-section 311, and the second sub-channel B is opened in the second sub-section 312; the rolling element 32 includes a first part 321 and a second part 322, the first part 321 is located in the first sub-section 311 and at the exit of the first sub-channel A, and the first part 321 is movably connected to the first sub-section 311; the second part 322 is located in the second sub-section 312 and at the exit of the second sub-channel B, and the second part 322 is movably connected to the second sub-section 312.
[0053] In some embodiments, the first part 321 includes two rolling elements 32, and the second part 322 includes two rolling elements 32. The lubricating oil in the oil storage part 1 is output to the position of the rolling elements 32 of the first part 321 through the first sub-channel A; the lubricating oil in the oil storage part 1 is output to the position of the rolling elements 32 of the second part 322 through the second sub-channel B; the first part 321 and the second part 322 are in one-to-one contact with the four grooves (i.e., four tracks 4) provided on the linear guide structure 5, and each rolling element 32 rolls relative to the main body 31 and the corresponding track 4, thereby applying the lubricating oil to the surface of the track 4, thereby realizing the lubrication of the four tracks 4 by the lubricating oil. The oil injection device in this embodiment can realize batch oil injection maintenance of multiple tracks 4, thereby improving the oil injection maintenance efficiency of the tracks 4.
[0054] In some embodiments, the first portion 321 and the second portion 322 are in contact with the track 4 , respectively; the first sub-portion 311 and the second sub-portion 312 are not in contact with the track 4 .
[0055] In this embodiment, the rolling member 32 is adapted to the shape of the track 4, thereby ensuring that the rolling member 32 can roll in the track 4 and can evenly apply the lubricating oil to the surface of the track 4. In addition, the rolling member 32 can roll along the extension direction of the track 4, thereby applying the lubricating oil to the entire track 4. In this embodiment, during the rolling process of the rolling member 32 along the track 4, except for the rolling member 32 in the track clamp 3 that contacts the track 4, other positions of the track clamp 3 do not contact the track 4, so that during the movement of the track clamp 3 relative to the track 4, other positions of the track clamp 3 can be prevented from interfering with the relative movement of the track 4 and the track clamp 3, thereby ensuring that the oiling process of the oiling device can be carried out smoothly and stably.
[0056] In some embodiments, the shape of the rolling element 32 includes a spherical shape, and the radial dimension of the outlet of the first passage 310 is smaller than or equal to the radial dimension of the rolling element 32 .
[0057] The outlet of the first channel 310 is directly opposite to the rolling element 32, that is, the lubricating oil output from the outlet of the first channel 310 is directly delivered to the rolling element 32 (that is, directly in contact with the rolling element 32). By making the radial dimension of the outlet of the first channel 310 smaller than or equal to the radial dimension of the rolling element 32, the waste of lubricating oil in the process of applying lubricating oil to the surface of the track 4 by the rolling element 32 can be reduced or avoided, and the accumulation and blockage of lubricating oil at the position of the rolling element 32 can be avoided, thereby improving the utilization rate of lubricating oil.
[0058] In some embodiments, the oil storage portion 1 includes a first division 11 and a second division 12, which are arranged and connected along a first direction Y; a first accommodating space C is opened in the first division 11, and the first accommodating space C has a first end opening 101; a second accommodating space D is opened in the second division 12, and the second accommodating space D has a second end opening 102; the first accommodating space C extends along the first direction Y, the second accommodating space D extends along the first direction Y, and the first accommodating space C and the second accommodating space D are connected; the cross-sectional area of the first accommodating space C along the direction perpendicular to the first direction Y is larger than the cross-sectional area of the second accommodating space D along the direction perpendicular to the first direction Y; the piston 2 is located in the first accommodating space C, and the size and shape of the piston 2 and the first accommodating space C are adapted to each other.
[0059] The first accommodating space C is mainly used to accommodate lubricating oil, and the second accommodating space D is used to transport the lubricating oil in the first accommodating space C to the first channel 310 under the thrust of the piston 2 .
[0060] In some embodiments, the cross-sectional area of the second accommodating space D along the direction perpendicular to the first direction Y, the cross-sectional area of the first sub-channel A along the direction perpendicular to its extension, and the cross-sectional area of the second sub-channel B along the direction perpendicular to its extension are equal. The second accommodating space D, the first sub-channel A, and the second sub-channel B are mainly used to transport the lubricating oil in the first accommodating space C to the rolling element 32.
[0061] In some embodiments, the oil injection device further includes a first driving mechanism 6 connected to the oil storage portion 1 and / or the track fixture 3 , capable of driving the oil storage portion 1 and the track fixture 3 to move reciprocally and at a constant speed along the extension direction of the track 4 .
[0062] The first driving mechanism 6 can be a motor. The first driving mechanism 6 drives the oil storage part 1 and the track fixture 3 to move back and forth at a constant speed along the extension direction of the track 4, so as to achieve the application of lubricating oil to the surface of the track 4.
[0063] In some embodiments, the oil injection device further includes a second driving mechanism 7 connected to the piston 2 and capable of applying a constant force along the first direction Y to the piston 2 to push the piston 2 to move along the first direction Y at a uniform speed.
[0064] The second driving mechanism 7 may be a motor. The second driving mechanism 7 can apply a continuous and constant force to the piston 2, so as to accurately control the amount of lubricating oil injected into the surface of the track 4.
[0065] Based on the above structure of the oil injection device, the embodiment of the present disclosure further provides an oil injection method of the oil injection device, comprising: step S1: injecting lubricating oil into the oil storage part 1, and assembling the piston 2 and the oil storage part 1 together.
[0066] Step S2: Assemble the rail clamp 3 and the oil storage part 1 together, and assemble the rail clamp 3 and the rail 4 so that the rolling element 32 in the rail clamp 3 contacts the rail 4 .
[0067] In this step, the rail clamp 3 and the rail 4 are fixedly connected together by a connecting member 8 such as a screw.
[0068] Step S3: Turn on the first driving mechanism 6 to drive the oil storage part 1 and the track clamp 3 to move at a uniform speed along the extension direction of the track 4; at the same time, turn on the second driving mechanism 7 to apply a constant force along the first direction Y to the piston 2 to push the piston 2 to move at a uniform speed along the first direction Y, thereby applying lubricating oil to the surface of the track 4.
[0069] The oil injection device provided in the embodiment of the present disclosure, by providing an oil storage portion, a piston and a rail clamp, can accurately control the amount of lubricating oil injected into the rail surface, compared with the current manual oil injection by an oil gun, thereby avoiding excessive or insufficient injection of lubricating oil. On the one hand, it can improve or avoid poor oil quality caused by splashing of lubricating oil onto the product; on the other hand, it can improve or avoid problems such as excessive resistance and downtime caused by the reduction or exhaustion of lubricating oil on the rail, thereby reducing or avoiding material and production capacity utilization losses during the evaporation process of the evaporation equipment, and thus can accurately and efficiently complete the maintenance of the rail, improve the utilization rate of lubricating oil, reduce the time and labor costs of rail maintenance, and improve the utilization rate of the evaporation equipment.
[0070] In a second aspect, an embodiment of the present disclosure further provides a vapor deposition device, comprising the oil injection device in the above embodiment.
[0071] By adopting the oil injection device in the above embodiment, the evaporation efficiency and utilization rate of the evaporation equipment are improved.
[0072] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present disclosure, but the present disclosure is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and substance of the present disclosure, and these modifications and improvements are also considered to be within the scope of protection of the present disclosure.
Claims
1. An oil injection device for injecting oil into a track, characterized in that: include: Oil reservoir, piston and rail clamp, The oil storage part is used to store lubricating oil; the oil storage part has openings at two opposite ends along the first direction and is connected; The piston is located in the first end opening of the oil reservoir, and the piston can move in the oil reservoir along the first direction to push the lubricating oil in the oil reservoir to be output from the second end opening of the oil reservoir; The rail clamp is located at one end of the oil storage portion away from the piston and is connected to the oil storage portion; The track clamp comprises a main body and a rolling element, wherein a first channel is provided in the main body, and the first channel is connected to the second end opening; The rolling element is located at the exit of the first channel and is used to contact the track. The rolling element can roll relative to the main body and the track.
2. The oil injection device according to claim 1, characterized in that: The main body comprises a first sub-section and a second sub-section, The space enclosed by the first sub-section and the second sub-section can accommodate the track. The first channel includes a first sub-channel and a second sub-channel, the first sub-channel is opened in the first sub-portion, and the second sub-channel is opened in the second sub-portion; The rolling element comprises a first part and a second part, The first part is located in the first sub-part and at the exit of the first sub-channel, and the first part is movably connected to the first sub-part; The second part is located in the second sub-part and at the outlet of the second sub-channel, and the second part is movably connected to the second sub-part.
3. The oil injection device according to claim 2, characterized in that: The first portion and the second portion are in contact with the track respectively; The first sub-portion and the second sub-portion are not in contact with the track.
4. The oil injection device according to claim 1, characterized in that: The shape of the rolling element includes a spherical shape, The radial dimension of the outlet of the first passage is smaller than or equal to the radial dimension of the rolling element.
5. The oil injection device according to claim 2, characterized in that: The oil storage part includes a first sub-part and a second sub-part, The first sub-portion and the second sub-portion are arranged and connected along the first direction; A first accommodating space is defined in the first subsection, and the first accommodating space has the first end opening; A second accommodating space is provided in the second subsection, and the second accommodating space has the second end opening; The first accommodating space extends along the first direction, the second accommodating space extends along the first direction, and the first accommodating space and the second accommodating space are connected; A cross-sectional area of the first accommodating space along the direction perpendicular to the first direction is greater than a cross-sectional area of the second accommodating space along the direction perpendicular to the first direction; The piston is located in the first accommodating space, and the piston and the first accommodating space are matched in size and shape.
6. The oil injection device according to claim 5, characterized in that: The cross-sectional area of the second accommodating space along the direction perpendicular to the first direction, the cross-sectional area of the first sub-channel along the direction perpendicular to the extension direction thereof, and the cross-sectional area of the second sub-channel along the direction perpendicular to the extension direction thereof are equal.
7. The oil injection device according to claim 1, characterized in that: It also includes a first driving mechanism, which is connected to the oil storage part and / or the track clamp and can drive the oil storage part and the track clamp to move back and forth at a constant speed along the extension direction of the track.
8. The oil injection device according to claim 1, characterized in that: It also includes a second driving mechanism, which is connected to the piston and can apply a constant force along the first direction to the piston to push the piston to move at a uniform speed along the first direction.
9. A vapor deposition device, characterized in that: The invention comprises the oil injection device according to any one of claims 1 to 8.
10. An oil filling method for an oil filling device according to any one of claims 1 to 8, characterized in that: include: Inject lubricating oil into the oil storage part, and assemble the piston and the oil storage part together; Assembling the track clamp and the oil storage part together, and assembling the track clamp and the track so that the rolling element in the track clamp contacts the track; The first driving mechanism is turned on to drive the oil storage part and the track clamp to move at a constant speed along the extension direction of the track; at the same time, the second driving mechanism is turned on to apply a constant force along the first direction to the piston to push the piston to move at a constant speed along the first direction, thereby applying the lubricating oil to the track surface.