Silicon optical chip optical coupling test implementation method and device, and storage medium

Abstract

The invention discloses a silicon optical chip optical coupling test implementation method, and relates to the technical field of silicon optical chip testing. According to the optical coupling test implementation method for the silicon optical chip, after the incident waveguide device and the emergent waveguide device respectively realize coarse matching with the target silicon optical chip, the wavelength of the incident laser in the incident waveguide device can be periodically adjusted; the emergent laser power change information in the emergent waveguide device when the wavelength of the incident laser periodically changes is obtained, and the emergent laser power change information can judge whether coupling succeeds or not and can also be used for analyzing to obtain a first position adjustment scheme, so that a correct adjustment direction can be found without continuous trial and error, and the accuracy of the adjustment direction is improved. And optical coupling between the incident waveguide device and the silicon optical chip is finally realized through continuous feedback fine tuning. According to the invention, the coupling speed is higher, and the time for the optical coupling test of the silicon optical chip is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon photonic chip testing, and in particular to a method and device for implementing optical coupling testing of a silicon photonic chip, and a storage medium. Background Art

[0002] Silicon photonic chip is a new type of chip that integrates optical elements and semiconductor devices on the same silicon wafer. Silicon photonic chip has the characteristics of high integration, low cost, and higher transmission bandwidth. Because silicon photonic chip uses silicon as the substrate of the integrated chip, it can integrate more optical devices; in optical modules, the cost of optical chips is very high, but with the realization of large-scale production, the low cost of silicon photonic chips has become a huge advantage; silicon waveguide has good transmission performance, because the refractive index difference of silicon photonic material is larger, which can achieve high-density waveguides and higher transmission bandwidth under the same area.

[0003] An essential step in the production process of silicon photonic chips is optical coupling testing. The main purposes of optical coupling testing include: (1) Evaluating coupling efficiency: ensuring that optical signals can be efficiently transmitted from optical fibers to chip waveguides to reduce coupling losses. (2) Detecting optical mode matching: verifying the degree of mode matching between chip waveguides and optical fibers to avoid signal attenuation caused by mode field mismatch. (3) Screening for good products: quickly screening out qualified chips through wafer-level testing to reduce packaging costs. (4) Optimizing design and process: optimizing chip design and manufacturing processes through feedback from test results.

[0004] In the prior art, as described in Chinese patent publications CN 110187454 A and CN 113702004 A, the optical coupling test of existing silicon photonic chips mainly includes the following steps: (1) Chip fixation: The silicon photonic chip is glued and fixed on the substrate. (2) Fiber alignment: Use a high-precision fiber probe or fiber array to align the fiber with the waveguide end face or grating coupler of the chip. (3) Coupling test: The optical signal is coupled into the chip through the light source, and the intensity and quality of the output optical signal are detected. (4) Data acquisition and analysis: Record parameters such as coupling loss and optical mode matching to evaluate chip performance. However, in each coupling process of the above operation, the input fiber and the output fiber need to be re-coupled with the silicon photonic chip, which takes a long time. For example, the vertical coupling test of a single fiber takes 3-4 seconds each time, and the vertical coupling test of the entire fiber array takes 2-3 seconds. For a single silicon photonic chip that is tested thousands of times, the entire coupling test takes a long time. Summary of the invention

[0005] The present invention provides a method and device for implementing optical coupling test of a silicon photonic chip, and a storage medium, which are used to reduce the optical coupling test time of a silicon photonic chip.

[0006] In order to solve the above technical problems, the first aspect of the present invention discloses a method for implementing optical coupling test of a silicon photonic chip, the method comprising: The first adjustment device roughly matches the incident waveguide device with the light inlet on the target silicon photonic chip; the second adjustment device roughly matches the output waveguide device with the light outlet on the target silicon photonic chip; Adjustment and judgment step: periodically adjusting the wavelength of the incident laser in the incident waveguide device, obtaining the output laser power change information in the output waveguide device when the incident laser wavelength changes periodically, and judging whether the output laser power change information indicates that the incident waveguide device is coupled with the light entrance; If it is determined that the output laser power change information indicates that the incident waveguide device is not coupled to the light entrance, a first position adjustment scheme of the first adjustment device is determined according to the output laser power change information; the first adjustment device adjusts the position of the incident waveguide device according to the first position adjustment scheme, and re-triggering the adjustment judgment step; If it is determined that the output laser power change information indicates that the incident waveguide device is coupled with the light entrance, the position of the incident waveguide device in the current state is determined to be the incident coupling position.

[0007] As an optional implementation, in the first aspect of the present invention, if the optical path currently being tested on the target silicon photonic chip is a reversible optical path, then after determining the incident coupling position of the incident waveguide device, the method further includes: Turn off the laser in the incident waveguide device, and control the output waveguide device to emit a test laser; Reverse adjustment judgment step: periodically adjusting the test laser wavelength in the above-mentioned output waveguide device, obtaining reverse output laser power change information in the incident waveguide device when the test laser wavelength changes periodically, and judging whether the reverse output laser power change information indicates that the output waveguide device is coupled with the light outlet; If it is determined that the reverse output laser power change information indicates that the output waveguide device is not coupled to the light outlet, a second position adjustment scheme of the second adjustment device is determined according to the reverse output laser power change information; the second adjustment device adjusts the position of the output waveguide device according to the second position adjustment scheme, and re-triggers the reverse adjustment judgment step; If it is determined that the reverse output laser power change information indicates that the output waveguide device is coupled with the light exit, the position of the output waveguide device in the current state is determined to be the output coupling position.

[0008] As an optional implementation, in the first aspect of the present invention, if the optical path currently being tested on the target silicon photonic chip is an irreversible optical path, then after determining the incident coupling position of the incident waveguide device, the method further includes: The wavelength of the incident laser in the incident waveguide device is fixed, and the second adjustment device adjusts the position of the output waveguide device multiple times according to a preset position adjustment scheme, and obtains the output laser power in the output waveguide device when the output waveguide device is at different positions; A target output laser power with the largest power is selected from the plurality of output laser powers, and the position of the output waveguide device corresponding to the target output laser power is determined as the output coupling position.

[0009] As an optional embodiment, in the first aspect of the present invention, the method further comprises: The first adjustment device adjusts the incident waveguide device to the incident coupling position, and the second adjustment device adjusts the exit waveguide device to the exit coupling position, so that the incident waveguide device, the target silicon photonic chip and the exit waveguide device form a test light path, and an optical coupling test is performed on the target silicon photonic chip based on the test light path.

[0010] As an optional implementation manner, in the first aspect of the present invention, the adjustment determination step specifically includes: In each adjustment cycle, adjusting the wavelength of the incident laser in the incident waveguide device from a first wavelength to a second wavelength, and obtaining information on the change in power of the output laser in the output waveguide device during the process in which the wavelength of the incident laser changes from the first wavelength to the second wavelength; For each adjustment period, a wavelength-power curve is obtained by fitting according to the output laser power change information in the output waveguide device within the adjustment period, wherein the wavelength-power curve is used to represent the corresponding relationship between the incident laser wavelength and the output laser power; Determine whether the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent. If it is determined that the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent, determine that the wavelength-power curve corresponding to each adjustment cycle when the wavelength-power curve is consistent is the target wavelength-power curve; It is determined whether the target wavelength-power curve indicates that the incident waveguide device is coupled to the light entrance.

[0011] As an optional embodiment, in the first aspect of the present invention, adjusting the wavelength of the incident laser in the incident waveguide device from the first wavelength to the second wavelength in each adjustment period includes: In each adjustment cycle, at each preset time interval, the wavelength of the incident laser in the incident waveguide device is increased by a preset wavelength increment, so that the wavelength of the incident laser changes from a first wavelength to a second wavelength; And, the determining whether the target wavelength-power curve indicates that the incident waveguide device is coupled with the light entrance comprises: It is determined whether the target wavelength-power curve is a straight line parallel to the horizontal axis. If the target wavelength-power curve is a straight line parallel to the horizontal axis, it is determined that the incident waveguide device is coupled to the light entrance.

[0012] As an optional implementation, in the first aspect of the present invention, determining the first position adjustment scheme of the first adjustment device according to the output laser power change information includes: The target incident laser wavelength corresponding to the maximum incident laser power is determined according to the emitted laser power change information, and the rotation direction and rotation angle corresponding to the first adjustment device are determined according to the wavelength value of the target incident laser wavelength.

[0013] A second aspect of the present invention discloses a device for implementing optical coupling test of a silicon photonic chip, the device comprising: A first adjustment device, used to roughly match the incident waveguide device with the light entrance on the target silicon photonic chip; A second adjustment device is used to roughly match the output waveguide device with the light outlet on the target silicon photonic chip; an adjustment judgment module, configured to execute an adjustment judgment step, wherein the adjustment judgment step comprises: periodically adjusting the wavelength of the incident laser in the incident waveguide device, obtaining output laser power change information in the output waveguide device when the wavelength of the incident laser changes periodically, and judging whether the output laser power change information indicates that the incident waveguide device is coupled with the light entrance; A first adjustment planning module is used to determine a first position adjustment scheme of the first adjustment device according to the output laser power change information when it is determined that the output laser power change information indicates that the incident waveguide device is not coupled with the light inlet; The first adjusting device is further used to adjust the position of the incident waveguide device according to the first position adjustment scheme, and re-trigger the adjustment judgment module to perform the adjustment judgment step; The first adjustment planning module is further configured to determine that the position of the incident waveguide device in the current state is the incident coupling position when it is determined that the output laser power change information indicates that the incident waveguide device is coupled with the light entrance.

[0014] As an optional implementation, in the second aspect of the present invention, the device further includes: an optical path adjustment module, configured to, when the optical path currently being tested on the target silicon photonic chip is a reversible optical path and after determining the incoupling position of the incident waveguide device, turn off the laser in the incident waveguide device and control the output waveguide device to emit a test laser; a reverse adjustment judgment module, configured to execute a reverse adjustment judgment step, wherein the reverse adjustment judgment step comprises: periodically adjusting the test laser wavelength in the above-mentioned output waveguide device, obtaining reverse output laser power change information in the incident waveguide device when the test laser wavelength changes periodically, and judging whether the reverse output laser power change information indicates that the output waveguide device is coupled with the light outlet; A second adjustment planning module is used to determine a second position adjustment scheme of the second adjustment device according to the reverse output laser power change information when it is determined that the reverse output laser power change information indicates that the output waveguide device is not coupled with the light outlet; The second adjustment device is further used to adjust the position of the output waveguide device according to the second position adjustment scheme, and re-trigger the reverse adjustment judgment module to perform the reverse adjustment judgment step; The second adjustment planning module is further configured to determine the position of the output waveguide device in the current state as the output coupling position when it is determined that the reverse output laser power change information indicates that the output waveguide device is coupled with the light outlet.

[0015] As an optional implementation, in the second aspect of the present invention, the device further includes: a third adjustment planning module, configured to, when the optical path currently being tested on the target silicon photonic chip is an irreversible optical path and after determining the incident coupling position of the incident waveguide device, fix the incident laser wavelength in the incident waveguide device, control the second adjustment device to adjust the position of the output waveguide device multiple times according to a preset position adjustment scheme, and obtain the output laser power in the output waveguide device when the output waveguide device is at different positions; The third adjustment planning module is further used to select a target output laser power with the largest power from the multiple output laser powers, and determine the output waveguide device position corresponding to the target output laser power as the output coupling position.

[0016] As an optional embodiment, in the second aspect of the present invention, the first adjustment device is further used to adjust the incident waveguide device to the incident coupling position; the second adjustment device is further used to adjust the output waveguide device to the output coupling position, so that the incident waveguide device, the target silicon photonic chip and the output waveguide device form a test light path; And, the device further comprises: A coupling test module is used to perform an optical coupling test on the target silicon photonic chip based on the test optical path.

[0017] As an optional implementation manner, in the second aspect of the present invention, the specific manner in which the adjustment determination module performs the adjustment determination step includes: In each adjustment cycle, adjusting the wavelength of the incident laser in the incident waveguide device from a first wavelength to a second wavelength, and obtaining information on the change in power of the output laser in the output waveguide device during the process in which the wavelength of the incident laser changes from the first wavelength to the second wavelength; For each adjustment period, a wavelength-power curve is obtained by fitting according to the output laser power change information in the output waveguide device within the adjustment period, wherein the wavelength-power curve is used to represent the corresponding relationship between the incident laser wavelength and the output laser power; Determine whether the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent. If it is determined that the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent, determine that the wavelength-power curve corresponding to each adjustment cycle when the wavelength-power curve is consistent is the target wavelength-power curve; It is determined whether the target wavelength-power curve indicates that the incident waveguide device is coupled to the light entrance.

[0018] As an optional implementation, in the second aspect of the present invention, the specific manner in which the adjustment judgment module adjusts the wavelength of the incident laser in the incident waveguide device from the first wavelength to the second wavelength in each adjustment period includes: In each adjustment cycle, at each preset time interval, the wavelength of the incident laser in the incident waveguide device is increased by a preset wavelength increment, so that the wavelength of the incident laser changes from a first wavelength to a second wavelength; Furthermore, the adjustment judgment module judges whether the target wavelength-power curve represents a specific mode of coupling between the incident waveguide device and the light entrance, including: It is determined whether the target wavelength-power curve is a straight line parallel to the horizontal axis. If the target wavelength-power curve is a straight line parallel to the horizontal axis, it is determined that the incident waveguide device is coupled to the light entrance.

[0019] As an optional implementation, in the second aspect of the present invention, the first adjustment planning module determines a specific manner of adjusting the first position of the first adjustment device according to the output laser power change information, including: The target incident laser wavelength corresponding to the maximum incident laser power is determined according to the emitted laser power change information, and the rotation direction and rotation angle corresponding to the first adjustment device are determined according to the wavelength value of the target incident laser wavelength.

[0020] A third aspect of the present invention discloses a silicon photonic chip optical coupling test implementation system, the system comprising: A memory storing executable program code; a processor coupled to the memory; The processor calls the executable program code stored in the memory to execute the method for implementing the optical coupling test of a silicon photonic chip disclosed in the first aspect of the present invention.

[0021] The fourth aspect of the present invention discloses a computer storage medium, which stores computer instructions. When the computer instructions are called, they are used to execute the silicon photonic chip optical coupling test implementation method disclosed in the first aspect of the present invention.

[0022] Compared with the prior art, the method for implementing the optical coupling test of a silicon photonic chip of the present invention can, after the incident waveguide device and the output waveguide device are respectively roughly matched with the target silicon photonic chip, periodically adjust the wavelength of the incident laser in the incident waveguide device, and obtain the output laser power change information in the output waveguide device when the incident laser wavelength changes periodically. The output laser power change information can determine whether the coupling is successful, and can also be used to analyze and obtain a first position adjustment plan, so that the correct adjustment direction can be found without continuous trial and error, and thus has a faster coupling speed and reduces the time required for the optical coupling test of the silicon photonic chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0024] Figure 1 It is a flow chart of a method for implementing optical coupling test of a silicon photonic chip disclosed in an embodiment of the present invention; Figure 2 It is a structural schematic diagram of a silicon photonic chip optical coupling test implementation device disclosed in an embodiment of the present invention; Figure 3 It is a structural schematic diagram of another device for implementing optical coupling test of a silicon photonic chip disclosed in an embodiment of the present invention; Figure 4 It is a structural schematic diagram of another device for implementing optical coupling test of a silicon photonic chip disclosed in an embodiment of the present invention; Figure 5 It is a structural schematic diagram of a silicon photonic chip optical coupling test implementation system disclosed in an embodiment of the present invention. DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] The terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish different objects rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, device, product or end including a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units inherent to these processes, methods, products or ends.

[0027] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present invention. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0028] The present invention discloses a method and device for realizing optical coupling test of a silicon photonic chip, and a storage medium, which are used to reduce the optical coupling test time of the silicon photonic chip.

[0029] Embodiment 1 See also Figure 1 , Figure 1 1 is a flow chart of a method for implementing a silicon photonic chip optical coupling test disclosed in an embodiment of the present invention. Figure 1 The described method for implementing the optical coupling test of a silicon photonic chip can be implemented in a device for implementing the optical coupling test of a silicon photonic chip, and the device for implementing the optical coupling test of a silicon photonic chip can be integrated in a cloud server or a local server. Figure 1 As shown, the method for implementing the silicon photonic chip optical coupling test may include the following operations: Step 101: A first adjustment device roughly matches an incident waveguide device with a light inlet on a target silicon photonic chip; a second adjustment device roughly matches an output waveguide device with a light outlet on a target silicon photonic chip.

[0030] In an embodiment of the present invention, a waveguide device is a structure or device that can guide the propagation of electromagnetic waves. It confines electromagnetic waves within a certain path through specific material and shape design to achieve efficient transmission. In this embodiment, the waveguide device may include a hollow metal waveguide tube, a surface wave guide, a dielectric waveguide, an optical fiber, etc.

[0031] The method for implementing the optical coupling test of the silicon photonic chip of this embodiment relies on an optical coupling test platform for implementation. The optical coupling test platform at least includes a first adjustment device capable of adjusting the position of the incident waveguide device, and a second adjustment device capable of adjusting the position of the exit waveguide device. The incident waveguide device is used to couple with the light inlet on the target silicon photonic chip, and the exit waveguide device is used to couple with the light outlet on the target silicon photonic chip, so that the incident waveguide device, the target silicon photonic chip and the exit waveguide device form a test light path, thereby performing an optical coupling test on a tested light path in the target silicon photonic chip. Since the optical coupling process has high requirements for accuracy, it is generally necessary to perform a rough match first, for example, record the coupling position coordinates according to the coupling process of similar products, and then perform a rough match according to the coupling position coordinates; the incident waveguide device and the light inlet can also be identified according to a visual sensor such as a camera, and then a rough matching scheme can be determined according to the recognition result of the visual sensor; a theoretical rough matching scheme can also be calculated according to the design drawings of the silicon photonic chip. After completing the rough matching, the coupling of the incident waveguide device with the light entrance on the target silicon photonic chip, and the coupling of the output waveguide device with the light exit on the target silicon photonic chip cannot be achieved. Further more precise matching is required to find the accurate incident coupling position of the incident waveguide device.

[0032] Step 102, adjustment judgment step: periodically adjust the incident laser wavelength in the incident waveguide device, obtain the output laser power change information in the output waveguide device when the incident laser wavelength changes periodically, and judge whether the output laser power change information indicates that the incident waveguide device is coupled with the light entrance.

[0033] In this embodiment, the adjustment judgment step is a feedback adjustment step of continuous fine-tuning. Specifically, by periodically changing the wavelength of the incident laser, the power change of the outgoing laser can be obtained. The embodiment of the present invention finds that in the process of fine-tuning the coupling position, it is generally possible to achieve approximate coupling, and only a small angle adjustment is required. However, the refractive index of light of different wavelengths in the medium is different, which leads to the use of lasers of different wavelengths as incident light, resulting in differences in the direction of the incident laser, and thus different powers of the final outgoing laser. When the incident waveguide device is fully coupled with the light inlet, lasers of different wavelengths can all be coupled, and the power of the outgoing laser will not change due to wavelength changes. However, when the incident waveguide device is not fully coupled with the light inlet, most of the wavelengths of lasers cannot be coupled, and only a small number of wavelengths of lasers can be coupled to a certain extent, resulting in a situation where the outgoing laser power of a certain section or certain sections of the wavelength in the outgoing laser is higher. Therefore, the embodiment of the present invention measures the position deviation of the incident waveguide device by periodically adjusting the wavelength of the incident laser in the incident waveguide device.

[0034] Step 103: If it is determined that the output laser power change information indicates that the incident waveguide device is not coupled to the light entrance, a first position adjustment scheme of the first adjustment device is determined according to the output laser power change information; the first adjustment device adjusts the position of the incident waveguide device according to the first position adjustment scheme, and re-triggers the adjustment judgment step.

[0035] In this embodiment, Figure 1 As shown, step 103 and step 102 constitute a loop feedback adjustment step. In an optional embodiment, determining whether the output laser power change information indicates that the incident waveguide device is coupled with the light entrance may include: The output laser power variation information is input into a pre-trained wavelength-position analysis model, and the wavelength-position analysis model is obtained by training a series of training data, wherein the training data includes standard output laser power variation information and position deviation corresponding to each standard output laser power variation information. Because the embodiment of the present invention can measure the position deviation of the incident waveguide device by periodically adjusting the incident laser wavelength in the incident waveguide device, the wavelength-position analysis model can be used to obtain position deviation information according to the input output laser power variation information, and then determine whether the coupling is successful according to the position deviation information, and obtain the first position adjustment scheme according to the position deviation information.

[0036] The optical coupling fine-tuning process in the prior art often uses continuous trial and error or a climbing algorithm to find the best coupling position, but it is impossible to find the correct adjustment direction during the adjustment process, resulting in a long coupling time. The embodiment of the present invention can obtain a subsequent adjustment plan based on the information of the change in the output laser power, so that the correct adjustment direction can be found without continuous trial and error, and thus has a faster coupling speed.

[0037] Step 104: If it is determined that the output laser power variation information indicates that the incident waveguide device is coupled with the light entrance, the position of the incident waveguide device in the current state is determined to be the incident coupling position.

[0038] In this embodiment, during the optical coupling test of the silicon photonic chip, it is necessary to ensure that the incident waveguide device is coupled with the light inlet in order to implement the subsequent optical coupling test steps, but the coupling requirements for the output waveguide device and the light outlet are lower. For optical coupling tests with low precision requirements, it is not necessary to require the output waveguide device to be completely coupled with the light outlet. Therefore, it is only necessary to determine the incident coupling position between the incident waveguide device and the light inlet to implement the optical coupling test of the silicon photonic chip. In addition, in some optional embodiments, the incident waveguide device can be an incident light with higher precision, and the output waveguide device can be set to other waveguide devices that can receive the output laser from the light outlet. The waveguide device only needs to receive most of the output laser.

[0039] It can be seen that the method for implementing the optical coupling test of a silicon photonic chip in an embodiment of the present invention can periodically adjust the wavelength of the incident laser in the incident waveguide device after the incident waveguide device and the output waveguide device are respectively roughly matched with the target silicon photonic chip, and obtain the output laser power change information in the output waveguide device when the incident laser wavelength changes periodically. The output laser power change information can determine whether the coupling is successful, and can also be used to analyze and obtain the first position adjustment plan, so that the correct adjustment direction can be found without continuous trial and error, and thus has a faster coupling speed and reduces the time required for the optical coupling test of the silicon photonic chip.

[0040] In an optional embodiment, for some optical coupling tests with high precision requirements, the output waveguide device and the light outlet are also required to be strictly coupled, and the coupling operation of the output waveguide device and the light outlet needs to be performed. In this optional embodiment, if the optical path currently being tested on the target silicon photonic chip is a reversible optical path, it means that the laser can be transmitted in the reverse direction in the optical path. At this time, the incident waveguide device can be changed to the laser receiver, and the output waveguide device can be changed to the laser transmitter, so that the laser is reversed, and then the coupling between the output waveguide device and the light outlet is realized according to the same principle as the coupling process of the incident waveguide device and the light inlet.

[0041] Specifically, in this optional embodiment, after determining the incident coupling position of the incident waveguide device, the method may further include: Turn off the laser in the incident waveguide device and control the output waveguide device to emit a test laser; Reverse adjustment judgment step: periodically adjusting the test laser wavelength in the above-mentioned output waveguide device, obtaining reverse output laser power change information in the incident waveguide device when the test laser wavelength changes periodically, and judging whether the reverse output laser power change information indicates that the output waveguide device is coupled with the light outlet; If it is determined that the reverse output laser power change information indicates that the output waveguide device is not coupled to the light outlet, a second position adjustment scheme of the second adjustment device is determined according to the reverse output laser power change information; the second adjustment device adjusts the position of the output waveguide device according to the second position adjustment scheme, and re-triggers the reverse adjustment judgment step; If it is determined that the reverse output laser power change information indicates that the output waveguide device is coupled with the light exit, the position of the output waveguide device in the current state is determined to be the output coupling position.

[0042] In this optional embodiment, after achieving coupling between the incident waveguide device and the light entrance, for the reversible light path, it is only necessary to reverse the laser direction, periodically adjust the test laser wavelength in the exit waveguide device, obtain the reverse exit laser power change information in the incident waveguide device when the test laser wavelength changes periodically, and couple the exit waveguide device according to the coupling principle of the incident waveguide device, thereby achieving coupling between the exit waveguide device and the light outlet, thereby providing support for high-precision optical coupling testing.

[0043] In another optional embodiment, if the optical path currently being tested on the target silicon photonic chip is an irreversible optical path, it is difficult to apply the solution of adjusting the laser direction in the above optional embodiment. Therefore, in this optional embodiment, if the optical path currently being tested on the target silicon photonic chip is an irreversible optical path, then after determining the incident coupling position of the incident waveguide device, the method may further include: The wavelength of the incident laser in the incident waveguide device is fixed, and the second adjustment device adjusts the position of the output waveguide device multiple times according to a preset position adjustment scheme, and obtains the output laser power in the output waveguide device when the output waveguide device is at different positions; A target output laser power with the largest power is screened out from a plurality of output laser powers, and a position of an output waveguide device corresponding to the target output laser power is determined as an output coupling position.

[0044] In this optional embodiment, the preset position adjustment scheme may be that the second adjustment device scans within a preset cone angle around the current position, or may traverse a number of positions around the current position randomly generated based on the current position of the second adjustment device, and may also use a hill climbing algorithm to add feedback steps to find the maximum power position. This optional embodiment can achieve coupling between the output waveguide device and the light outlet, thereby providing support for high-precision optical coupling testing.

[0045] In yet another optional embodiment, the method may further include: The first adjustment device adjusts the incident waveguide device to the incident coupling position, and the second adjustment device adjusts the output waveguide device to the output coupling position, so that the incident waveguide device, the target silicon photonic chip and the output waveguide device form a test light path, and an optical coupling test is performed on the target silicon photonic chip based on the test light path.

[0046] Further optionally, after the test of the current test optical path is completed, the next optical path to be tested in the silicon photonic chip is selected, and the above operations in the embodiment of the present invention are repeated, and finally the test of all optical paths on the entire silicon photonic chip is quickly realized.

[0047] In yet another optional embodiment, the adjustment determination step specifically includes: In each adjustment cycle, the wavelength of the incident laser in the incident waveguide device is adjusted from the first wavelength to the second wavelength. Optionally, the wavelength of the incident laser in the incident waveguide device can be increased by a preset wavelength increment at each preset time interval in each adjustment cycle, so that the wavelength of the incident laser changes from the first wavelength to the second wavelength. For example, the wavelength of the incident laser in the incident waveguide device is adjusted to gradually change from infrared light to ultraviolet light, and the wavelength of the incident laser is increased once at a fixed time interval in each cycle. After the current adjustment cycle ends, the above wavelength change operation is repeated in the next adjustment cycle. In each adjustment cycle, the output laser power change information in the output waveguide device during the process of the incident laser wavelength changing from the first wavelength to the second wavelength is obtained. So far, for each wavelength in each adjustment cycle, there is a corresponding output laser power.

[0048] For each adjustment period, a wavelength-power curve is fitted based on the output laser power variation information in the output waveguide device during the adjustment period, wherein the wavelength-power curve is used to represent the corresponding relationship between the incident laser wavelength and the output laser power.

[0049] It is determined whether the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent. If it is determined that the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent, the wavelength-power curve corresponding to each adjustment cycle when the wavelength-power curve is consistent is determined to be the target wavelength-power curve. In this optional embodiment, since the position of the incident waveguide device is constantly changing during feedback adjustment, the measured output laser power is only instructive only when its position stably reaches the next position. In this optional embodiment, if it is determined that the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent, it means that the incident waveguide device at this time has stably reached the next position, and the wavelength-power curve at this time is a stable wavelength-power curve, which is instructive.

[0050] Determine whether the target wavelength-power curve indicates that the incident waveguide device is coupled with the light entrance. In this optional embodiment, when the incident waveguide device is fully coupled with the light entrance, incident laser light of any wavelength can pass through the optical path, so the target wavelength-power curve is a straight line parallel to the horizontal axis; but in some special cases, the optical path has a large light loss for some wavelengths, while other wavelengths of light can pass through with lower loss. At this time, the target wavelength-power curve presents a fixed shape, which can be measured and saved in advance. Once the target wavelength-power curve conforms to this curve trend, it is determined that the incident waveguide device is coupled with the light entrance.

[0051] It can be seen that in this optional embodiment, the principle that lasers of different wavelengths (colors) have different refractive indices in the medium is utilized, and the wavelength of the incident laser is adjusted to replace the continuous probing of the position of the incident laser waveguide device, thereby greatly improving the efficiency of the optical coupling test and saving the coupling test time.

[0052] Furthermore, the wavelength-position analysis model described above is already capable of determining the first position adjustment scheme. In an optional embodiment, the target wavelength-power curve can also be input into the wavelength-position analysis model. At this time, the wavelength-position analysis model is trained by a series of training data, wherein the training data includes a standard wavelength-power curve and the position deviation corresponding to each standard wavelength-power curve. Therefore, the wavelength-position analysis model can be used to obtain position deviation information according to the input wavelength-power curve, and then determine whether the coupling is successful according to the position deviation information, and obtain the first position adjustment scheme according to the position deviation information.

[0053] In a preferred embodiment, determining the first position adjustment scheme of the first adjustment device according to the output laser power change information may include: The target incident laser wavelength corresponding to the maximum incident laser power is determined according to the emitted laser power variation information, and the rotation direction and rotation angle corresponding to the first adjustment device are determined according to the wavelength value of the target incident laser wavelength.

[0054] In this preferred embodiment, when the output laser power is the maximum, it means that the incident angle of the corresponding target incident laser wavelength is closest to the angle when the coupling is successful, then the distribution of the target incident laser wavelength in the first wavelength and the second wavelength can reflect the adjustment scheme corresponding to the first adjustment device. Therefore, optionally, the preliminary adjustment scheme corresponding to each wavelength can be recorded in advance, and when any wavelength becomes the target laser wavelength, its corresponding preliminary adjustment scheme is screened out as the first position adjustment scheme. It can be seen that this preferred embodiment can more efficiently and quickly realize the determination of the first position adjustment scheme, thereby further improving the efficiency of the optical coupling test.

[0055] Embodiment 2 See also Figure 2 , Figure 2 Schematic diagram of a silicon photonic chip optical coupling test implementation device disclosed in an embodiment of the present invention. Figure 2 As shown, the silicon photonic chip optical coupling test implementation device may include: A first adjustment device 201 is used to roughly match the incident waveguide device with the light entrance on the target silicon photonic chip; A second adjustment device 202, used to roughly match the output waveguide device with the light outlet on the target silicon photonic chip; The adjustment judgment module 203 is used to perform the adjustment judgment step, which may include: periodically adjusting the wavelength of the incident laser in the incident waveguide device, obtaining the output laser power change information in the output waveguide device when the wavelength of the incident laser changes periodically, and judging whether the output laser power change information indicates that the incident waveguide device is coupled with the light entrance; A first adjustment planning module 204 is used to determine a first position adjustment scheme of the first adjustment device according to the output laser power change information when it is determined that the output laser power change information indicates that the incident waveguide device is not coupled with the light inlet; The first adjusting device 201 is also used to adjust the position of the incident waveguide device according to the first position adjustment scheme, and re-trigger the adjustment judgment module to perform the adjustment judgment step; The first adjustment planning module 204 is further configured to determine the position of the incident waveguide device in the current state as the incident coupling position when it is determined that the output laser power variation information indicates that the incident waveguide device is coupled with the light entrance.

[0056] In an optional embodiment, if Figure 3 As shown, the device may also include: The optical path adjustment module 205 is used to turn off the laser in the incident waveguide device and control the output waveguide device to emit the test laser when the optical path currently being tested on the target silicon photonic chip is a reversible optical path and after the incoupling position of the incident and output waveguide devices is determined; The reverse adjustment judgment module 206 is used to perform the reverse adjustment judgment step, which may include: periodically adjusting the test laser wavelength in the output waveguide device, obtaining reverse output laser power change information in the incident waveguide device when the test laser wavelength changes periodically, and judging whether the reverse output laser power change information indicates that the output waveguide device is coupled with the light outlet; The second adjustment planning module 207 is used to determine a second position adjustment scheme of the second adjustment device according to the reverse output laser power change information when it is determined that the reverse output laser power change information indicates that the output waveguide device is not coupled with the light outlet; The second adjustment device 202 is also used to adjust the position of the output waveguide device according to the second position adjustment scheme, and re-trigger the reverse adjustment judgment module to perform the reverse adjustment judgment step; The second adjustment planning module 207 is further configured to determine the position of the output waveguide device in the current state as the output coupling position when it is determined that the reverse output laser power change information indicates that the output waveguide device is coupled with the light outlet.

[0057] In another optional embodiment, Figure 4 As shown, the device may also include: The third adjustment planning module 208 is used to fix the wavelength of the incident laser in the incident waveguide device when the optical path currently being tested on the target silicon photonic chip is an irreversible optical path and after determining the incident coupling position of the incident waveguide device, control the second adjustment device to adjust the position of the output waveguide device multiple times according to a preset position adjustment scheme, and obtain the output laser power in the output waveguide device when the output waveguide device is at different positions; The third adjustment planning module 208 is further used to select a target output laser power with the largest power from a plurality of output laser powers, and determine the output waveguide device position corresponding to the target output laser power as the output coupling position.

[0058] In another optional embodiment, the first adjusting device 201 is further used to adjust the incident waveguide device to the incident coupling position; the second adjusting device 202 is further used to adjust the output waveguide device to the output coupling position, so that the incident waveguide device, the target silicon photonic chip and the output waveguide device form a test light path; And, the device may also include: The coupling test module (not shown) is used to perform an optical coupling test on the target silicon photonic chip based on a test optical path.

[0059] In yet another optional embodiment, the specific manner in which the adjustment determination module 203 performs the adjustment determination step may include: In each adjustment cycle, the wavelength of the incident laser in the incident waveguide device is adjusted from the first wavelength to the second wavelength, and the output laser power change information in the output waveguide device is obtained during the process of the incident laser wavelength changing from the first wavelength to the second wavelength; For each adjustment period, a wavelength-power curve is obtained by fitting according to the output laser power change information in the output waveguide device during the adjustment period, wherein the wavelength-power curve is used to represent the corresponding relationship between the incident laser wavelength and the output laser power; Determine whether the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent. If it is determined that the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent, determine that the wavelength-power curve corresponding to each adjustment cycle when the wavelength-power curve is consistent is the target wavelength-power curve; A determination is made as to whether the target wavelength-power curve indicates that the incident waveguide device is coupled to the light entrance.

[0060] In yet another optional embodiment, the specific manner in which the adjustment judgment module 203 adjusts the wavelength of the incident laser in the incident waveguide device from the first wavelength to the second wavelength in each adjustment period may include: In each adjustment cycle, at each preset time interval, the wavelength of the incident laser in the incident waveguide device is increased by a preset wavelength increment, so that the wavelength of the incident laser changes from a first wavelength to a second wavelength; Furthermore, the adjustment judgment module 203 judges whether the target wavelength-power curve represents a specific mode of coupling between the incident waveguide device and the light entrance, which may include: It is determined whether the target wavelength-power curve is a straight line parallel to the horizontal axis. If the target wavelength-power curve is a straight line parallel to the horizontal axis, it is determined that the incident waveguide device is coupled to the light entrance.

[0061] In another optional embodiment, the first adjustment planning module 204 determines the specific manner of the first position adjustment scheme of the first adjustment device according to the output laser power change information, which may include: The target incident laser wavelength corresponding to the maximum incident laser power is determined according to the emitted laser power variation information, and the rotation direction and rotation angle corresponding to the first adjustment device are determined according to the wavelength value of the target incident laser wavelength.

[0062] Embodiment 3 See also Figure 5 , Figure 5 Schematic diagram of a silicon photonic chip optical coupling test implementation system disclosed in an embodiment of the present invention. Figure 5As shown, the silicon photonic chip optical coupling test implementation system may include: A memory 301 storing executable program codes; a processor 302 coupled to the memory 301; The processor 302 calls the executable program code stored in the memory 301 to execute the steps in the method for implementing the optical coupling test of a silicon photonic chip described in the first embodiment of the present invention.

[0063] Embodiment 4 An embodiment of the present invention discloses a computer storage medium, which stores computer instructions. When the computer instructions are called, they are used to execute the steps in the method for implementing the optical coupling test of a silicon photonic chip described in the first embodiment of the present invention.

[0064] Embodiment 5 An embodiment of the present invention discloses a computer program product, which includes a non-transitory computer-readable storage medium storing a computer program, and the computer program is operable to enable a computer to execute the steps in the method for implementing silicon photonic chip optical coupling testing described in Example 1.

[0065] The device embodiments described above are only illustrative, wherein the modules described as separate components may or may not be physically separated, and the components displayed as modules may or may not be physical modules, i.e., they may be located in one place, or they may be distributed on multiple network modules. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Those of ordinary skill in the art may understand and implement it without creative work.

[0066] Through the specific description of the above embodiments, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, can also be implemented by hardware. Based on such an understanding, the above technical solution can be essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, and the storage medium includes a read-only memory (ROM), a random access memory (RAM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), a one-time programmable read-only memory (OTPROM), an electronically erasable programmable read-only memory (EEPROM), a compact disc (CD-ROM) or other optical disc storage, magnetic disk storage, magnetic tape storage, or any other computer-readable medium that can be used to carry or store data.

[0067] Finally, it should be noted that the method and device for implementing optical coupling testing of a silicon photonic chip, and the storage medium disclosed in the embodiments of the present invention are only preferred embodiments of the present invention, and are only used to illustrate the technical scheme of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical schemes described in the aforementioned embodiments may still be modified, or some of the technical features therein may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical schemes from the spirit and scope of the technical schemes of the embodiments of the present invention.

Claims

1. A method for implementing optical coupling test of silicon photonic chip, characterized in that: The method comprises: The first adjustment device roughly matches the incident waveguide device with the light inlet on the target silicon photonic chip; the second adjustment device roughly matches the output waveguide device with the light outlet on the target silicon photonic chip; Adjustment and judgment step: periodically adjusting the wavelength of the incident laser in the incident waveguide device, obtaining the output laser power change information in the output waveguide device when the incident laser wavelength changes periodically, and judging whether the output laser power change information indicates that the incident waveguide device is coupled with the light entrance; If it is determined that the output laser power change information indicates that the incident waveguide device is not coupled to the light entrance, a first position adjustment scheme of the first adjustment device is determined according to the output laser power change information; the first adjustment device adjusts the position of the incident waveguide device according to the first position adjustment scheme, and re-triggering the adjustment judgment step; If it is determined that the output laser power change information indicates that the incident waveguide device is coupled with the light entrance, the position of the incident waveguide device in the current state is determined to be the incident coupling position.

2. The method for implementing the optical coupling test of a silicon photonic chip according to claim 1, characterized in that: If the optical path currently being tested on the target silicon photonic chip is a reversible optical path, after determining the incident coupling position of the incident waveguide device, the method further includes: Turn off the laser in the incident waveguide device, and control the output waveguide device to emit a test laser; Reverse adjustment judgment step: periodically adjusting the test laser wavelength in the above-mentioned output waveguide device, obtaining reverse output laser power change information in the incident waveguide device when the test laser wavelength changes periodically, and judging whether the reverse output laser power change information indicates that the output waveguide device is coupled with the light outlet; If it is determined that the reverse output laser power change information indicates that the output waveguide device is not coupled to the light outlet, a second position adjustment scheme of the second adjustment device is determined according to the reverse output laser power change information; the second adjustment device adjusts the position of the output waveguide device according to the second position adjustment scheme, and re-triggers the reverse adjustment judgment step; If it is determined that the reverse output laser power change information indicates that the output waveguide device is coupled with the light exit, the position of the output waveguide device in the current state is determined to be the output coupling position.

3. The method for implementing the optical coupling test of a silicon photonic chip according to claim 1, characterized in that: If the optical path currently being tested on the target silicon photonic chip is an irreversible optical path, after determining the incident coupling position of the incident waveguide device, the method further includes: The wavelength of the incident laser in the incident waveguide device is fixed, and the second adjustment device adjusts the position of the output waveguide device multiple times according to a preset position adjustment scheme, and obtains the output laser power in the output waveguide device when the output waveguide device is at different positions; A target output laser power with the largest power is selected from the plurality of output laser powers, and the position of the output waveguide device corresponding to the target output laser power is determined as the output coupling position.

4. The method for implementing the optical coupling test of a silicon photonic chip according to any one of claims 2 or 3, characterized in that: The method further comprises: The first adjustment device adjusts the incident waveguide device to the incident coupling position, and the second adjustment device adjusts the exit waveguide device to the exit coupling position, so that the incident waveguide device, the target silicon photonic chip and the exit waveguide device form a test light path, and an optical coupling test is performed on the target silicon photonic chip based on the test light path.

5. The method for implementing the optical coupling test of a silicon photonic chip according to claim 1, characterized in that: The adjustment and judgment step specifically includes: In each adjustment cycle, adjusting the wavelength of the incident laser in the incident waveguide device from a first wavelength to a second wavelength, and obtaining information on the change in power of the output laser in the output waveguide device during the process in which the wavelength of the incident laser changes from the first wavelength to the second wavelength; For each adjustment period, a wavelength-power curve is obtained by fitting according to the output laser power change information in the output waveguide device within the adjustment period, wherein the wavelength-power curve is used to represent the corresponding relationship between the incident laser wavelength and the output laser power; Determine whether the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent. If it is determined that the wavelength-power curves corresponding to the preset number of consecutive adjustment cycles are consistent, determine that the wavelength-power curve corresponding to each adjustment cycle when the wavelength-power curve is consistent is the target wavelength-power curve; It is determined whether the target wavelength-power curve indicates that the incident waveguide device is coupled to the light entrance.

6. The method for implementing the optical coupling test of a silicon photonic chip according to claim 5, characterized in that: The step of adjusting the wavelength of the incident laser in the incident waveguide device from the first wavelength to the second wavelength in each adjustment period comprises: In each adjustment cycle, at each preset time interval, the wavelength of the incident laser in the incident waveguide device is increased by a preset wavelength increment, so that the wavelength of the incident laser changes from a first wavelength to a second wavelength; And, the determining whether the target wavelength-power curve indicates that the incident waveguide device is coupled with the light entrance comprises: It is determined whether the target wavelength-power curve is a straight line parallel to the horizontal axis. If the target wavelength-power curve is a straight line parallel to the horizontal axis, it is determined that the incident waveguide device is coupled to the light entrance.

7. The method for implementing the optical coupling test of a silicon photonic chip according to claim 1, characterized in that: Determining a first position adjustment scheme of the first adjustment device according to the output laser power change information includes: The target incident laser wavelength corresponding to the maximum incident laser power is determined according to the emitted laser power change information, and the rotation direction and rotation angle corresponding to the first adjustment device are determined according to the wavelength value of the target incident laser wavelength.

8. A device for implementing optical coupling test of silicon photonic chip, characterized in that: The device comprises: A first adjustment device is used to roughly match the incident waveguide device with the light entrance on the target silicon photonic chip; A second adjustment device is used to roughly match the output waveguide device with the light outlet on the target silicon photonic chip; an adjustment judgment module, configured to execute an adjustment judgment step, wherein the adjustment judgment step comprises: periodically adjusting the wavelength of the incident laser in the incident waveguide device, obtaining output laser power change information in the output waveguide device when the wavelength of the incident laser changes periodically, and judging whether the output laser power change information indicates that the incident waveguide device is coupled with the light entrance; A first adjustment planning module, configured to determine a first position adjustment scheme of the first adjustment device according to the output laser power change information when it is determined that the output laser power change information indicates that the incident waveguide device is not coupled to the light inlet; The first adjusting device is further used to adjust the position of the incident waveguide device according to the first position adjustment scheme, and re-trigger the adjustment judgment module to perform the adjustment judgment step; The first adjustment planning module is further configured to determine that the position of the incident waveguide device in the current state is the incident coupling position when it is determined that the output laser power change information indicates that the incident waveguide device is coupled with the light entrance.

9. A silicon photonic chip optical coupling test implementation system, characterized in that: The system includes: a memory storing executable program code; a processor coupled to the memory; the processor calls the executable program code stored in the memory to execute the silicon photonic chip optical coupling test implementation method as described in any one of claims 1-7.

10. A computer storage medium, characterized in that: The computer storage medium stores computer instructions, which, when called, are used to execute the method for implementing the optical coupling test of a silicon photonic chip as described in any one of claims 1 to 7.

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