Detection Device and Detection Method

Abstract

This application relates to the field of detection technologies, and provides a detection device and a detection method. The detection device includes a first light source, a first polarizer, a second polarizer, a third polarizer, a first detector assembly, a second detector assembly, and a processor. The first light source is configured to provide first light to a first surface of a to-be-detected object; the first polarizer is configured to convert the first light into first polarized light, the first polarized light forms a first transmitted signal light after passing through the to-be-detected object by transmission, and the first polarized light forms a first return light after returning through the first surface; the first return light forms a first signal light after passing through the second polarizer, and the first transmitted signal light forms a second signal light after passing through the third polarizer; the first detection assembly is configured to receive the first signal light; the second detection assembly is configured to receive the second signal light; and the processor detects the to-be-detected object according to the first signal light and the second signal light. The embodiments of this application can at least improve the practicability of the detection device.

Description

Technical Field

[0001] This application relates to the field of detection technologies, and in particular, to a detection device and a detection method. Background Art

[0002] In the process of semiconductor manufacturing, in order to ensure the quality of semiconductor devices, defect detection needs to be carried out in each link of the semiconductor manufacturing process. There are often various types of defects in semiconductor materials, and detection devices often require multiple detection modes to detect various types of defects.

[0003] In the related art, the detection mode of the detection device is single. For example, it only includes a single detection light source to detect a single type of defect, resulting in missed detection of defects in the object to be measured, and the practicability of the detection device is low. Moreover, because the detection mode of the detection device is single, the detector needs to replace the detection device to complete defect detection under different light sources, resulting in low efficiency of defect detection, thus leading to low practicability of the detection device. Therefore, the practicability of the detection device in the related art is low. Summary of the Invention

[0004] Embodiments of this application provide a detection device, which at least improves the practicability of the detection device.

[0005] According to some embodiments of this application, on the one hand, embodiments of this application provide a detection device, which includes: a first light source for providing first light to the first surface of the object to be measured; a first polarizer for converting the first light into first polarized light, the first polarized light forms a first transmitted signal light after passing through the object to be measured, and the first polarized light forms a first return light after returning through the first surface; a second polarizer, the first return light forms a first signal light after passing through the second polarizer, and the polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer; a third polarizer, the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light forms a second signal light after passing through the third polarizer; a first detection component for receiving the first signal light; a second detection component for receiving the second signal light; a processor for detecting the object to be measured according to the first signal light and the second signal light.

[0006] In some embodiments, the detection device further includes: a first rotation assembly, the first rotation assembly is connected to the second polarizer, the first rotation assembly is configured to drive the second polarizer to rotate around a first rotation axis, the first rotation axis is not parallel to the polarization direction of the second polarizer, so that the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable, or, the first rotation assembly is respectively connected to the first polarizer and the third polarizer, the first rotation assembly is configured to drive the third polarizer to rotate around a second rotation axis, and at the same time drive the first polarizer to rotate synchronously around the second rotation axis, the second rotation axis is not parallel to the polarization direction of the first polarizer, so that the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable; wherein, the first detection component is further configured to generate a first image according to the first signal light, and the second detection component is further configured to generate a second image according to the second signal light.

[0007] In some embodiments, the first light source is a coaxial light source, and the detection device further includes: a first beam splitter, the first beam splitter is configured to reflect the first polarized light to the object to be measured and transmit the first return light to the second polarizer, or, the first beam splitter is configured to transmit the first polarized light to the object to be measured and reflect the first return light to the second polarizer; wherein, the first polarizer is located on the optical path between the first beam splitter and the first light source, and the second polarizer is located on the optical path between the first beam splitter and the first detection component.

[0008] In some embodiments, the detection device further includes: a second light source, the second light source is configured to provide second light to the second surface of the object to be measured; a fourth polarizer, the fourth polarizer is configured to convert the second light into the second polarized light, the second polarized light returns through the second surface to form a second return light, the second return light forms a third signal light through the third polarizer, the second polarized light transmits through the object to be measured to form a second transmitted signal light, the second transmitted signal light forms a fourth signal light through the second polarizer, the polarization direction of the fourth polarizer is perpendicular to the polarization direction of the second polarizer; the polarization direction of the fourth polarizer is not perpendicular to the polarization direction of the third polarizer; wherein, the second detection component is further configured to receive the third signal light and generate a third image according to the third signal light, and the first detection component is further configured to receive the fourth signal light and generate a fourth image according to the fourth signal light.

[0009] In some embodiments, the detection device further includes: a second rotation assembly, which is connected to the third polarizer. The second rotation assembly is configured to drive the third polarizer to rotate around a third rotation axis, and the third rotation axis is not parallel to the polarization direction of the third polarizer, so that the included angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer is variable. Or, the second rotation assembly is respectively connected to the second polarizer and the fourth polarizer. The second rotation assembly is configured to drive the second polarizer to rotate around a fourth rotation axis and simultaneously drive the fourth polarizer to rotate synchronously around the fourth rotation axis. The fourth rotation axis is not parallel to the polarization direction of the second polarizer, so that the included angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer is adjustable.

[0010] In some embodiments, the second light source is a coaxial light source. The detection device further includes: a second beam splitter, which is configured to reflect the second polarized light to the object to be measured and transmit the first transmitted signal light and the second returned light to the third polarizer. Or, the second beam splitter is configured to transmit the second polarized light to the object to be measured and reflect the first transmitted signal light and the second returned light to the third polarizer. Wherein, the third polarizer is located on the optical path between the second beam splitter and the second detection assembly, and the fourth polarizer is located on the optical path between the second beam splitter and the second light source.

[0011] In some embodiments, the detection device further includes a dark field light source assembly, and the dark field light source assembly includes at least one of a first dark field light source and a second dark field light source: the first dark field light source is configured to provide a first dark field light to the object to be measured, and the first dark field light is scattered by the first surface of the object to be measured to form a first dark field signal light. The second dark field light source is configured to provide a second dark field light to the object to be measured, and the second dark field light is scattered by the second surface of the object to be measured to form a second dark field signal light. The first detection assembly is configured to receive the first dark field signal light and generate a first dark field image according to the first dark field signal light; the second detection assembly is configured to receive the second dark field signal light and generate a second dark field image according to the second dark field signal light.

[0012] In some embodiments, the first dark field light source is a strip light source, and / or the second dark field light source is a strip light source. The detection device further includes: a rotating table, which is configured to drive the object to be measured and the dark field light source assembly to rotate relative to each other.

[0013] In some embodiments, the first detection component includes a plurality of first detectors. The plurality of first detectors are arranged in a strip shape in the first field of view, and the field of view of adjacent first detectors partially overlaps or is staggered; the second detection component includes a plurality of second detectors. The plurality of second detectors are arranged in a strip shape in the field of view of the second surface, and the field of view of adjacent second detectors partially overlaps or is staggered; the first dark-field light source is a strip light source, and the first dark-field light source is arranged parallel to the arrangement direction of the field of view of the first detector; the second dark-field light source is a strip light source, and the second dark-field light source is arranged parallel to the arrangement direction of the field of view of the second detector.

[0014] In some embodiments, the first polarized light forms the first return light after being reflected by the first surface. The incident direction of the first polarized light forms an acute angle with the first surface, or the first polarized light forms the first return light after being scattered by the first surface; the second polarized light forms the second return light after being reflected by the second surface. The incident direction of the second polarized light forms an acute angle with the second surface, or the second polarized light forms the second return light after being scattered by the second surface.

[0015] In some embodiments, the first surface is conjugate to the photosensitive surface of the first detection component, and the second surface is conjugate to the photosensitive surface of the second detection component.

[0016] According to some embodiments of the present application, on the other hand, an embodiment of the present application provides a detection method based on the detection device described in the above embodiments. The detection method includes detection processing, and the detection processing includes: providing first light to the first surface of the object to be detected through a first light source; a first polarizer converts the first light into first polarized light. The first polarized light forms a first transmitted signal light after passing through the object to be detected, and the first polarized light forms a first return light after returning through the first surface; a second polarizer forms a first signal light from the first return light. The polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer; the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light forms a second signal light after passing through the third polarizer; receiving the first signal light through a first detection component; receiving the second signal light through a second detection component; detecting the object to be detected according to the first signal light, and the signal light includes one or a combination of the first signal light and the second signal light.

[0017] In some embodiments, before detecting the object to be detected according to the signal light, the detection processing further includes: adjusting the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer to adjust the light intensity of the first signal light.

[0018] In some embodiments, if the detection device further includes: a second light source for providing second light to the second surface of the object to be measured; a fourth polarizer for converting the second light into second polarized light, the second polarized light returns through the second surface to form second return light, the second return light forms third signal light through the third polarizer, the second polarized light transmits through the object to be measured to form second transmitted signal light, the second transmitted signal light forms fourth signal light through the second polarizer, the polarization direction of the fourth polarizer is perpendicular to the polarization direction of the second polarizer; the polarization direction of the fourth polarizer is not perpendicular to the polarization direction of the third polarizer; the detection process further includes: detecting the object to be measured according to the third signal light and the fourth signal light; before detecting the object to be measured according to the third signal light and the fourth signal light, the detection process further includes: adjusting the included angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer to adjust the light intensity of the second signal light.

[0019] In some embodiments, if the detection device further includes: a first rotation assembly connected to the second polarizer, or the first rotation assembly is respectively connected to the first polarizer and the third polarizer; adjusting the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer includes: controlling the first rotation assembly to drive the second polarizer to rotate around a first rotation axis, the first rotation axis is not parallel to the polarization direction of the second polarizer, or by controlling the first rotation assembly to drive the third polarizer to rotate around a second rotation axis, and simultaneously driving the first polarizer to rotate synchronously around the second rotation axis to ensure that the polarization direction of the first polarizer is perpendicular to the polarization direction of the third polarizer, the second rotation axis is not parallel to the polarization direction of the first polarizer; and / or, if the detection device further includes a second rotation assembly connected to the third polarizer, or the second rotation assembly is respectively connected to the second polarizer and the fourth polarizer; adjusting the included angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer includes: controlling the second rotation assembly to drive the third polarizer to rotate around a third rotation axis, the third rotation axis is not parallel to the polarization direction of the third polarizer, or controlling the second rotation assembly to drive the second polarizer to rotate around a fourth rotation axis, and simultaneously driving the fourth polarizer to rotate synchronously around the fourth rotation axis to ensure that the polarization direction of the second polarizer is perpendicular to the polarization direction of the fourth polarizer, the fourth rotation axis is not parallel to the polarization direction of the second polarizer.

[0020] In some embodiments, detecting the object to be measured according to the signal light includes: respectively obtaining detection images according to different signal lights received by the first detection component and the second detection component; detecting and classifying the object to be detected according to each of the detection images, and the detection target includes defects.

[0021] In some embodiments, the detection device includes: a dark field light source component, and the dark field light source component includes at least one of a first dark field light source and a second dark field light source; the first dark field light source is configured to provide a first dark field light to the object to be measured, and the first dark field light is scattered by the first surface of the object to be measured to form a first dark field signal light, and the second dark field light source is configured to provide a second dark field light to the object to be measured, and the second dark field light is scattered by the second surface of the object to be measured to form a second dark field signal light; the detection process further includes: receiving the first dark field signal light through the first detection component, and receiving the second dark field signal light through the second detection component, and the signal light further includes one or a combination of the first dark field signal light and the second dark field signal light.

[0022] In some embodiments, the detection method further includes: controlling the dark field light source component to perform multiple times of the detection process on the object to be measured, and rotating the object to be measured by a preset angle relative to the dark field light source component between adjacent detection processes, and the dark field light source component includes one or a combination of the first dark field light source and the second dark field light source; the first dark field light source is a strip light source, and / or the second dark field light source is a strip light source.

[0023] In some embodiments, detecting the object to be measured according to the signal light includes: controlling each light source to flash in sequence, and controlling the first detection component and the second detection component to simultaneously collect the signal light image at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes one or a combination of the first light source and the dark field light source component.

[0024] In some embodiments, controlling each light source to flash in sequence includes: controlling the first dark field light source and the second dark field light source to flash simultaneously, and controlling the first detection component and the second detection component to simultaneously collect the signal light at the preset frequency; the preset frequency is greater than or equal to the flashing frequency of the first dark field light source and the second dark field light source.

[0025] The technical solution provided by the embodiments of the present application has at least the following advantages:

[0026] In the technical solution of the detection device provided by the embodiment of the present application, the detection device includes a first light source for providing first light to a first surface of a to-be-detected object; a first polarizer for converting the first light into first polarized light, the first polarized light forms a first transmitted signal light after passing through the to-be-detected object by transmission, and the first polarized light forms a first return light after returning through the first surface; a second polarizer, the first return light forms a first signal light after passing through the second polarizer, and the polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer; a third polarizer, the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light forms a second signal light after passing through the third polarizer; a first detection component for receiving the first signal light; a second detection component for receiving the second signal light; and a processor for detecting the to-be-detected object according to the first signal light and the second signal light.

[0027] In the detection device provided by the embodiment of the present application, the first light emitted by the first light source can sequentially pass through the first polarizer, the to-be-detected object, and the second polarizer to form a first signal light. The first light emitted by the first light source can also sequentially pass through the first polarizer, the to-be-detected object, and the third polarizer to form a second signal light. The processor can detect the to-be-detected object based on the first signal light and the second signal light. That is, using this detection device, two types of defect detections can be completed with one light source, which can avoid missed detections of defect types and improve the detection efficiency, thereby improving the practicality of the detection device.

[0028] In addition, the detection device of the embodiment of the present application can complete two types of defect detections, enabling the detector to complete the defect detection of the to-be-detected object under different types of light without replacing the detection device, thereby improving the detection efficiency and the practicality of the detection device. In addition, by comparing the manifestation forms of the defects of the to-be-detected object detected by different signal lights, more accurate defect classification can be achieved, which is beneficial to improving the practicality of the detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] One or more embodiments are illustrated by way of example in the accompanying drawings, which do not constitute a limitation to the embodiments unless otherwise stated. The figures in the drawings do not constitute a scale limitation. In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the following described drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0030] Figure 1 FIG. 15 is a schematic structural diagram of a detection device for detecting a to-be-detected object provided by the first embodiment of the present application;

[0031] Figure 2 is Figure 1 a top view of the field of view of the first detector in the first detection component and the first dark field light source in Figure 1

[0032] Figure 3 is Figure 1 a bottom view of the field of view of the first detector in the first detection component and the second dark field light source in Figure 1

[0033] Figure 4 is Figure 1 a top view of the field of view of the second detector in the second detection component and the first dark field light source in Figure 1

[0034] Figure 5 is Figure 1 a bottom view of the field of view of the second detector in the second detection component and the second dark field light source in Figure 1

[0035] Figure 6 is a schematic structural diagram of a detection device for detecting a to - be - detected object provided in the second embodiment of the present application;

[0036] Figure 7 is a schematic structural diagram of a detection device for detecting a to - be - detected object provided in the third embodiment of the present application;

[0037] Figure 8 is a schematic structural diagram of a detection device for detecting a to - be - detected object provided in the fourth embodiment of the present application;

[0038] Figure 9 is a schematic structural diagram of a detection device for detecting a to - be - detected object provided in the fifth embodiment of the present application;

[0039] Figure 10 is a flowchart of the first detection method provided in the embodiments of the present application;

[0040] Figure 11 is a flowchart of the second detection method provided in the embodiments of the present application. Detailed implementation manners

[0041] As can be seen from the background art, the practicability of the detection device in the related art needs to be improved.

[0042] An embodiment of the present application provides a detection device. The first light emitted by the first light source can sequentially pass through a first polarizer, a test object, and a second polarizer to form a first signal light. The first light emitted by the first light source can also sequentially pass through the first polarizer, the test object, and a third polarizer to form a second signal light. The processor can detect the test object based on the first signal light and the second signal light. That is, using this detection device, two types of defect detections can be completed with one light source, which can avoid missing the detection of defect types and improve the detection efficiency, and improve the practicality of the detection device. In addition, the detection device according to the embodiment of the present application can complete two types of defect detections, enabling the detector to complete the defect detection of the test object under different types of light without replacing the detection device, thereby improving the detection efficiency and the practicality of the detection device. In addition, by comparing the manifestation forms of the defects of the test object detected by different signal lights, more accurate defect classification can be achieved, which is beneficial to improving the practicality of the detection device.

[0043] The embodiments of the present application will be described in detail below with reference to the accompanying drawings. However, those of ordinary skill in the art can understand that in the embodiments of the present application, many technical details are proposed to help readers better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present application can still be implemented.

[0044] Figure 1 It is a schematic structural diagram of a detection device for detecting a test object provided by the first embodiment of the present application.

[0045] Reference Figure 1 , the detection device includes a first light source 100, a first polarizer 101, a second polarizer 102, a third polarizer 103, a first detection component 104, a second detection component 105, and a processor (not shown). The first light source 100 is used to provide first light to the first surface 12 of the test object 11; the first polarizer 101 is used to convert the first light into first polarized light. The first polarized light forms a first transmitted signal light after passing through the test object 11, and the first polarized light forms a first return light after returning through the first surface 12; the first return light forms a first signal light after passing through the second polarizer 102, and the polarization direction of the second polarizer 102 is not perpendicular to the polarization direction of the first polarizer 101; the polarization direction of the third polarizer 103 is perpendicular to the polarization direction of the first polarizer 101, and the first transmitted signal light forms a second signal light after passing through the third polarizer 103; the first detection component 104 is used to receive the first signal light; the second detection component 105 is used to receive the second signal light; the processor is used to detect the test object 11 according to the first signal light and the second signal light.

[0046] The detection device is used to detect a test target of the test object 11, and the test target includes defects.

[0047] The material of the object 11 to be measured is a uniaxial crystal or a multiaxial crystal. Uniaxial crystals and biaxial crystals are two types of anisotropic materials. Due to their anisotropic properties, both uniaxial crystals and biaxial crystals exhibit polarization effects when light passes through them. The detection device provides the first polarized light to the object 11 to be measured, and defects with polarization effects of the object 11 under polarized light can be detected. In other embodiments of the present application, the object 11 to be measured may also be an amorphous material.

[0048] Specifically, in this embodiment, the object 11 to be measured is a silicon carbide substrate. In other embodiments of the present application, the object 11 to be measured may be a transparent substrate such as a glass substrate or a plastic substrate, and the object 11 to be measured may also be a transparent wafer, such as a sapphire wafer or a diamond wafer.

[0049] The object 11 to be measured has opposite first surface 12 and second surface 13. The first surface 12 is conjugate to the photosensitive surface of the first detection component 104, and the second surface 13 is conjugate to the photosensitive surface of the second detection component 105. With such a setting, it is beneficial for the first detection component 104 to better receive the signal light emitted from the object 11 to be measured and generate a clearer image, and it is beneficial for the second detection component 105 to better receive the signal light emitted from the object 11 to be measured and generate a clearer image, which is beneficial to improving the practicability of the detection device.

[0050] The first light source 100 is used to provide the first light. In this embodiment, the first light source 100 is a coaxial light source. In other embodiments of the present application, the first light source 100 may be a dark field light source.

[0051] The first polarizer 101 is used to convert the first light into the first polarized light.

[0052] The first polarized light forms the first transmitted signal light after passing through the object 11 to be measured, and the first polarized light forms the first return light after returning through the first surface 12. In this embodiment, the first polarized light forms the first return light after being reflected by the first surface 12, and the incident direction of the first polarized light is perpendicular to the first surface 12. In other embodiments of the present application, the first polarized light may form the first return light after being scattered by the first surface 12, or the first polarized light forms the first return light by reflection, but the incident angle between the first polarized light and the first surface 12 is an acute angle.

[0053] The polarization direction of the second polarizer 102 is not perpendicular to the polarization direction of the first polarizer 101, and the first return light forms the first signal light after passing through the second polarizer 102.

[0054] The polarization direction of the third polarizer 103 is perpendicular to the polarization direction of the first polarizer 101, and the first transmitted signal light forms the second signal light after passing through the third polarizer 103.

[0055] The first detection component 104 receives the first signal light and generates a first image based on the first signal light. The second detection component 105 receives the second signal light and generates a second image based on the second signal light.

[0056] In this embodiment, the detection device further includes a first beam splitter 106. The first beam splitter 106 is a semi-transmissive and semi-reflective mirror. The first beam splitter 106 reflects the first polarized light to the object to be measured 11 and transmits the first return light to the second polarizer 102. Among them, the first polarizer 101 is located on the optical path between the first beam splitter 106 and the first light source 100, and the second polarizer 102 is located on the optical path between the first beam splitter 106 and the first detection component 104.

[0057] The detection device further includes a first rotation component (not shown). The first rotation component is connected to the second polarizer 102. The first rotation component is used to drive the second polarizer 102 to rotate around the first rotation axis. The first rotation axis is not parallel to the polarization direction of the second polarizer 102, so that the included angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 is adjustable. Or, the first rotation component is respectively connected to the first polarizer 101 and the third polarizer 103. The first rotation component is used to drive the third polarizer 103 to rotate around the second rotation axis, and at the same time drive the first polarizer 101 to rotate synchronously around the second rotation axis. The second rotation axis is not parallel to the polarization direction of the first polarizer 101, so that the included angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 is adjustable.

[0058] In other words, the first rotation component is used to adjust the included angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101. According to Malus' law, the light intensity of the first signal light received by the first detection component 104 is related to the included angle between the polarization direction of the first polarizer 101 and the polarization direction of the second polarizer 102 on the optical path between the first light source 100 and the first detection component 104. Therefore, by adjusting the included angle between the polarization direction of the first polarizer 101 and the polarization direction of the second polarizer 102, while ensuring that the first signal light has sufficient light intensity, it is also possible to avoid the overexposure phenomenon of the first detection component 104 caused by the too high light intensity of the first signal light, and the reliability of the detection device can be improved.

[0059] The first rotation component drives the first polarizer 101 and the third polarizer 103 to rotate synchronously to ensure that the polarization directions of the first polarizer 101 and the third polarizer 103 are always perpendicular during the detection process.

[0060] The detection device further includes a dark-field light source assembly, which includes a first dark-field light source 117 and a second dark-field light source 127. The first dark-field light source 117 is used to provide a first dark-field light to the object to be measured 11. The first dark-field light is scattered by the first surface 12 of the object to be measured 11 to form a first dark-field signal light. The second dark-field light source 127 is used to provide a second dark-field light to the object to be measured 11. The second dark-field light is scattered by the second surface 13 of the object to be measured 11 to form a second dark-field signal light. The first detection component 104 is used to receive the first dark-field signal light and generate a first dark-field image according to the first dark-field signal light. The second detection component 105 is used to receive the second dark-field signal light and generate a second dark-field image according to the second dark-field signal light. The first beam splitter 106 is further used to transmit the first dark-field signal light to the first detection component 104.

[0061] In other embodiments of the present application, the dark-field light source assembly may also include only one of the first dark-field light source 117 and the second dark-field light source 127, or the detection device may not include the first dark-field light source 117 and the second dark-field light source 127.

[0062] In this embodiment, the first dark-field light is scattered and transmitted by the object to be measured 11 to form a third dark-field signal light. The second detection component 105 is further used to receive the third dark-field signal light and generate a third dark-field image according to the third dark-field signal light.

[0063] It should be noted that when there are defects inside the object to be measured 11, the first dark-field light will be scattered inside the object to be measured 11, and the scattered light is transmitted to form a third dark-field signal light. Therefore, in this embodiment, the first dark-field light is transmitted by the object to be measured 11 to form a third dark-field signal light, which is used to detect the defects inside the object to be measured 11 to improve the practicability of the detection device. When there are no defects inside the object to be measured 11, the first dark-field light will not form a third dark-field signal light after being scattered and transmitted by the object to be measured 11. Therefore, in other embodiments of the present application, there may be no formation of a third dark-field signal light after the first dark-field light is scattered and transmitted by the object to be measured 11.

[0064] In this embodiment, the second dark-field light is scattered and transmitted by the object to be measured 11 to form a fourth dark-field signal light. The first detection component 104 is further used to receive the fourth dark-field signal light and generate a fourth dark-field image according to the fourth dark-field signal light.

[0065] It should be noted that when there are defects inside the object to be measured 11, the second dark-field light will be scattered inside the object to be measured 11, and the scattered light is transmitted to form the fourth dark-field signal light. Therefore, in this embodiment, the second dark-field light is transmitted through the object to be measured 11 to form the fourth dark-field signal light, which is used to detect the defects inside the object to be measured 11 to improve the practicability of the detection device. When there are no defects inside the object to be measured 11, the second dark-field light will not form the fourth dark-field signal light after passing through the object to be measured 11. Therefore, in other embodiments of the present application, there may be no formation of the fourth dark-field signal light after the second dark-field light is scattered and transmitted through the object to be measured 11.

[0066] The incident direction of the first dark-field light source 117 is asymmetric with respect to the optical axis direction of the first detection component 104 about the first surface 12. Specifically, there is a non-zero angle between the incident direction of the first dark-field light source 117 and the optical axis direction of the first detection component 104. The optical axis of the first detection component 104 is perpendicular to the first surface 12, and the incident direction of the first dark-field light source 117 has an acute angle with the normal of the first surface 12.

[0067] The incident direction of the second dark-field light source 127 is asymmetric with respect to the optical axis direction of the second detection component 105 about the second surface 13. Specifically, there is a non-zero angle between the incident direction of the second dark-field light source 127 and the optical axis direction of the second detection component 105. The optical axis of the second detection component 105 is perpendicular to the second surface 13, and the incident direction of the second dark-field light source 127 has an acute angle with the normal of the second surface 13.

[0068] In this embodiment, the first dark-field light source 117 is a strip light source, and the second dark-field light source 127 is a strip light source. In other embodiments of the present application, the first dark-field light source 117 may also be an annular light source, a surface light source, a bowl-shaped light source, etc. The second dark-field light source 127 may also be an annular light source, a surface light source, a bowl-shaped light source, etc.

[0069] The detection device further includes a rotating table (not shown), and the rotating table is used to relatively rotate the object to be measured 11 and the dark-field light source assembly. The setting of the rotating table enables the detection device to capture the corresponding images of the corresponding signal lights under the first dark-field light and the second dark-field light at multiple angles, thereby improving the practicability of the detection device.

[0070] In this embodiment, the light beam emitted by the first dark-field light source 117 is blue light; the light beam emitted by the second dark-field light source 127 is blue light. The wavelength of blue light is short, and defects scatter short-wavelength light more strongly, which is beneficial to the imaging of the first detection component 104 and the second detection component 105, thereby improving the practicability of the detection device. In addition, the short wavelength of blue light is beneficial to detecting defects such as small particles and can improve the sensitivity of the detection device. In other embodiments of the present application, the light beam emitted by the first dark-field light source 117 may be white light, and the light beam emitted by the second dark-field light source 127 may also be white light.

[0071] Figure 2 is Figure 1 a top view of the field of view of the first detector in the first detection component and the first dark field light source in Figure 3 is Figure 1 a bottom view of the field of view of the first detector in the first detection component and the second dark field light source in Figure 4 is Figure 1 a top view of the field of view of the second detector in the second detection component and the first dark field light source in Figure 5 is Figure 1 a bottom view of the field of view of the second detector in the second detection component and the second dark field light source in. It should be noted that Figures 2 to 5 in, for the convenience of illustration, only the fields of view 1041 of 3 first detectors and the fields of view 1051 of 3 second detectors are schematically shown. In fact, the number of the first detectors and the second detectors can be other values except 3. The embodiments of the present application do not limit the number of the first detectors and the second detectors.

[0072] With reference to Figures 1 to 5 , the first detection component 104 includes a plurality of first detectors. The fields of view 1041 of the plurality of first detectors are arranged in a strip shape on the first surface 12, and the fields of view 1041 of adjacent first detectors partially overlap or stagger; the second detection component 105 includes a plurality of second detectors. The fields of view 1051 of the plurality of second detectors are arranged in a strip shape on the second surface 13, and the fields of view 1051 of adjacent second detectors partially overlap or stagger; the first dark field light source 117 is a strip light source, and the first dark field light source 117 is arranged parallel to the arrangement direction of the fields of view 1041 of the first detectors; the second dark field light source 127 is a strip light source, and the second dark field light source 127 is arranged parallel to the arrangement direction of the fields of view 1051 of the second detectors. With such an arrangement, the first detection component 104 and the second detection component 105 have a larger field of view, thereby improving the practicability of the detection device.

[0073] The detection device further includes a first objective lens 108 and a second objective lens 109. The first objective lens 108 is located in the optical path between the first surface 12 and the first detection component 104, and is used to focus the signal light emitted by the object to be measured 11 towards the first detection component 104. The second objective lens 109 is located in the optical path between the second surface 13 and the second detection component 105, and is used to focus the signal light emitted by the object to be measured 11 towards the second detection component 105. With such an arrangement, the imaging effects of the first detection component 104 and the second detection component 105 can be better, which is beneficial to improving the practicability of the detection device.

[0074] In this embodiment, the processor is configured to obtain detection images according to different signal lights received by the first detection component 104 and the second detection component 105, and detect and classify the target to be measured according to each detection image, where the target to be measured includes defects. The signal lights include various combinations of a first signal light, a second signal light, a first dark-field signal light, and a second dark-field light. The detection images include various combinations of a first image, a second image, a first dark-field image, and a second dark-field image.

[0075] The second embodiment of the present application further provides a detection device, which is substantially the same as the detection device provided in the first embodiment. The main difference between this detection device and the detection device provided in the first embodiment is that the positions of the first detection component and the first light source in the detection device provided in the second embodiment are different from those in the first embodiment. The following will describe this detection device in detail with reference to the accompanying drawings. It should be noted that for the same or corresponding features as those in the first embodiment, to avoid repetition, they will not be described in detail below. Without contradiction, the corresponding descriptions in the first embodiment also apply to the corresponding features in the second embodiment.

[0076] Figure 6 It is a schematic structural diagram of a detection device for detecting an object to be measured provided in the second embodiment of the present application.

[0077] Reference Figure 6 , the detection device includes: a first light source 200, a first polarizer 201, a second polarizer 202, a third polarizer 203, a first detection component 204, a second detection component 205, and a processor (not shown). The first light source 200 is configured to provide first light to the first surface 12 of the object to be measured 11; the first polarizer 201 is configured to convert the first light into first polarized light. The first polarized light forms a first transmitted signal light after passing through the object to be measured 11, and the first polarized light forms a first return light after returning through the first surface 12; the first return light forms a first signal light after passing through the second polarizer 202, and the polarization direction of the second polarizer 202 is not perpendicular to the polarization direction of the first polarizer 201; the polarization direction of the third polarizer 203 is perpendicular to the polarization direction of the first polarizer 201, and the first transmitted signal light forms a second signal light after passing through the third polarizer 203; the first detection component 204 is configured to receive the first signal light; the second detection component 205 is configured to receive the second signal light; the processor is configured to detect the object to be measured 11 according to the first signal light and the second signal light.

[0078] It should be noted that the dark-field light source assembly, the first dark-field light source 217, the second dark-field light source 227, the first objective lens 208, and the second objective lens 209 in this embodiment can refer to the corresponding descriptions of the dark-field light source assembly, the first dark-field light source 117, the second dark-field light source 127, the first objective lens 108, and the second objective lens 109 in the first embodiment, and will not be elaborated here.

[0079] In this embodiment, the detection device further includes a first beam splitter 206, which is configured to transmit the first polarized light to the object to be measured 11 and reflect the first return light to the second polarizer 202.

[0080] The first beam splitter 206 is further configured to reflect the first dark field signal light to the first detection component 204.

[0081] The third embodiment of the present application further provides a detection device, which is substantially the same as the detection device provided in the first embodiment. The main difference is that the detection device provided in the third embodiment further includes a second light source and a fourth polarizer. The following will describe this detection device in detail with reference to the accompanying drawings. It should be noted that the same or corresponding features as those in the first embodiment will not be described in detail below to avoid redundancy. Without contradiction, the corresponding descriptions in the first embodiment also apply to the corresponding features in the third embodiment.

[0082] Figure 7 FIG. is a schematic structural diagram of a detection device for detecting an object to be measured provided in the third embodiment of the present application.

[0083] Reference Figure 7 , the detection device includes a first light source 300, a first polarizer 301, a second polarizer 302, a third polarizer 303, a first detection component 304, a second detection component 305, and a processor (not shown). The first light source 300 is configured to provide first light to the first surface 12 of the object to be measured 11; the first polarizer 301 is configured to convert the first light into first polarized light. The first polarized light forms first transmitted signal light after passing through the object to be measured 11, and the first polarized light forms first return light after returning through the first surface 12; the first return light forms first signal light after passing through the second polarizer 302, and the polarization direction of the second polarizer 302 is not perpendicular to the polarization direction of the first polarizer 301; the polarization direction of the third polarizer 303 is perpendicular to the polarization direction of the first polarizer 301, and the first transmitted signal light forms second signal light after passing through the third polarizer 303; the first detection component 304 is configured to receive the first signal light; the second detection component 305 is configured to receive the second signal light; the processor is configured to detect the object to be measured 11 according to the first signal light and the second signal light.

[0084] It should be noted that the first beam splitter 306, the dark field light source assembly, the first dark field light source 317, the second dark field light source 327, the first objective lens 308, and the second objective lens 309 in this embodiment can refer to the corresponding descriptions of the first beam splitter 106, the dark field light source assembly, the first dark field light source 117, the second dark field light source 127, the first objective lens 108, and the second objective lens 109 in the first embodiment, and will not be elaborated here.

[0085] The detection device further includes a second light source 310 and a fourth polarizer 311. The second light source 310 is configured to provide a second light to the second surface 13 of the object to be measured 11. The fourth polarizer 311 is configured to convert the second light into a second polarized light. The second polarized light returns through the second surface 13 to form a second return light. The second return light forms a third signal light through the third polarizer 303. The second polarized light transmits through the object to be measured 11 to form a second transmitted signal light. The second transmitted signal light forms a fourth signal light through the second polarizer. The polarization direction of the fourth polarizer 311 is perpendicular to the polarization direction of the second polarizer 302. The polarization direction of the fourth polarizer 311 is not perpendicular to the polarization direction of the third polarizer 303. Wherein, the second detection component is further configured to receive the third signal light and generate a third image according to the third signal light. The first detection component is further configured to receive the fourth signal light and generate a fourth image according to the fourth signal light.

[0086] In this embodiment, the second light source 310 is a coaxial light source. In other embodiments of the present application, the second light source 310 may be a dark field light source.

[0087] The second light source 310 is configured to provide a second light. In this embodiment, the second light source 310 is a coaxial light source. In other embodiments of the present application, the second light source 310 may be a dark field light source.

[0088] The fourth polarizer 311 is configured to convert the second light into a second polarized light. In this embodiment, the second polarized light is reflected by the second surface 13 to form a second return light, and the incident direction of the second polarized light is perpendicular to the second surface 13. In other embodiments of the present application, the second polarized light may be scattered by the second surface 13 to form a second return light, or the second polarized light is reflected to form a second return light, but the incident angle between the second polarized light and the second surface 13 is an acute angle.

[0089] The detection device further includes a second rotation assembly (not shown). The second rotation assembly is connected to the third polarizer 303. The second rotation assembly is configured to drive the third polarizer 303 to rotate around a third rotation axis. The third rotation axis is not parallel to the polarization direction of the third polarizer 303, so that the included angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 is variable. Or, the second rotation assembly is respectively connected to the second polarizer 302 and the fourth polarizer 311. The second rotation assembly is configured to drive the second polarizer 302 to rotate around a fourth rotation axis, and at the same time drive the fourth polarizer 311 to rotate synchronously around the fourth rotation axis. The fourth rotation axis is not parallel to the polarization direction of the second polarizer 302, so that the included angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 is adjustable.

[0090] In other words, the second rotating component is used to adjust the angle between the polarization directions of the third polarizer 303 and the fourth polarizer 311. According to Malus' law, the intensity of the third signal light received by the second detection component 305 is related to the angle between the polarization directions of the third polarizer 303 and the fourth polarizer 311 on the optical path between the second light source 310 and the second detection component. Therefore, by adjusting the angle between the polarization directions of the third polarizer 303 and the fourth polarizer 311, while ensuring that the third signal light has sufficient intensity, it is also possible to avoid the overexposure phenomenon of the second detection component 305 caused by the excessive intensity of the third signal light, thereby improving the reliability of the detection device.

[0091] The second rotating component drives the second polarizer 302 and the fourth polarizer 311 to rotate synchronously to ensure that the polarization directions of the second polarizer 302 and the fourth polarizer 311 are always perpendicular.

[0092] The detection device further includes a second beam splitter 312. The second beam splitter 312 is a semi-transmissive and semi-reflective mirror. The second beam splitter 312 is used to reflect the second polarized light to the object to be measured 11 and to transmit the first transmitted signal light and the second return light to the third polarizer 303. Among them, the third polarizer 303 is located on the optical path between the second beam splitter 312 and the second detection component, and the fourth polarizer 311 is located on the optical path between the second beam splitter 312 and the second light source 310.

[0093] The fourth embodiment of the present application further provides a detection device. This detection device is substantially the same as the detection device provided in the third embodiment. The main difference is that the positions of the second detection component and the second coaxial light source in the detection device provided in the fourth embodiment are different from those in the first embodiment. The following will describe this detection device in detail with reference to the accompanying drawings. It should be noted that the same or corresponding features as those in the third embodiment will not be described in detail below to avoid repetition. In the case of no contradiction, the corresponding descriptions in the third embodiment also apply to the corresponding features in the fourth embodiment.

[0094] Figure 8 It is a schematic structural diagram of a detection device for detecting an object to be measured provided in the fourth embodiment of the present application.

[0095] Reference Figure 8, the detection device includes a first light source 400, a first polarizer 401, a second polarizer 402, a third polarizer 403, a first detection component 404, a second detection component 405, and a processor (not shown). The first light source 400 is used to provide first light to the first surface 12 of the object to be measured 11; the first polarizer 401 is used to convert the first light into first polarized light. The first polarized light forms a first transmitted signal light after passing through the object to be measured 11, and the first polarized light forms a first returned light after returning through the first surface 12; the first returned light forms a first signal light after passing through the second polarizer 402, and the polarization direction of the second polarizer 402 is not perpendicular to the polarization direction of the first polarizer 401; the polarization direction of the third polarizer 403 is perpendicular to the polarization direction of the first polarizer 401, and the first transmitted signal light forms a second signal light after passing through the third polarizer 403; the first detection component 404 is used to receive the first signal light; the second detection component 405 is used to receive the second signal light; the processor is used to detect the object to be measured 11 according to the first signal light and the second signal light.

[0096] It should be noted that the first beam splitter 406, the dark field light source assembly, the first dark field light source 417, the second dark field light source 427, the first objective lens 408, the second objective lens 409, the second light source 410, and the fourth polarizer 411 in this embodiment can refer to the corresponding descriptions of the first beam splitter 306, the dark field light source assembly, the first dark field light source 317, the second dark field light source 327, the first objective lens 308, the second objective lens 309, the second light source 310, and the fourth polarizer 311 in the third embodiment, and will not be elaborated here.

[0097] In this embodiment, the detection device further includes a second beam splitter 412. The second beam splitter 412 is a semi-transmissive and semi-reflective mirror. The second beam splitter 412 is used to transmit the second polarized light to the object to be measured 11, and is used to reflect the first transmitted signal light and the second returned light to the third polarizer 403.

[0098] The fifth embodiment of the present application further provides a detection device. This detection device is substantially the same as the detection device provided in the third embodiment. The main difference is that both the first light source and the second light source in the detection device provided in the fifth embodiment are dark field light sources. The following will describe this detection device in detail with reference to the drawings. It should be noted that for the same or corresponding features as those in the third embodiment, to avoid redundancy, they will not be described in detail below. Without contradiction, the corresponding descriptions in the third embodiment also apply to the corresponding features in the fifth embodiment.

[0099] Figure 9 It is a schematic structural diagram of a detection device for detecting an object to be measured provided in the fifth embodiment of the present application.

[0100] Refer to Figure 9, the detection device includes a first light source 500, a first polarizer 501, a second polarizer 502, a third polarizer 503, a first detection component 504, a second detection component 505, and a processor (not shown). The first light source 500 is used to provide first light to the first surface 12 of the object to be measured 11; the first polarizer 501 is used to convert the first light into first polarized light. The first polarized light forms a first transmitted signal light after passing through the object to be measured 11, and the first polarized light forms a first return light after returning through the first surface 12; the first return light forms a first signal light after passing through the second polarizer 502, and the polarization direction of the second polarizer 502 is not perpendicular to the polarization direction of the first polarizer 501; the polarization direction of the third polarizer 503 is perpendicular to the polarization direction of the first polarizer 501, and the first transmitted signal light forms a second signal light after passing through the third polarizer 503; the first detection component 504 is used to receive the first signal light; the second detection component 505 is used to receive the second signal light; the processor is used to detect the object to be measured 11 according to the first signal light and the second signal light.

[0101] The detection device further includes a second light source 510 and a fourth polarizer 511. The second light source 510 is used to provide second light to the second surface 13 of the object to be measured 11; the fourth polarizer 511 is used to convert the second light into second polarized light. The second polarized light forms a second return light after returning through the second surface 13, the second return light forms a third signal light after passing through the third polarizer 503, the second polarized light forms a second transmitted signal light after passing through the object to be measured 11, and the second transmitted signal light forms a fourth signal light after passing through the second polarizer. The polarization direction of the fourth polarizer 511 is perpendicular to the polarization direction of the second polarizer 502; the polarization direction of the fourth polarizer 511 is not perpendicular to the polarization direction of the third polarizer 503; wherein, the second detection component 505 is further used to receive the third signal light and generate a third image according to the third signal light, and the first detection component 504 is further used to receive the fourth signal light and generate a fourth image according to the fourth signal light.

[0102] In this embodiment, the first light source 500 is a dark-field light source. In other embodiments of the present application, the first light source can also be a bright-field light source.

[0103] In this embodiment, the second light source 510 is a dark-field light source. In other embodiments of the present application, the second light source can also be a bright-field light source.

[0104] In this embodiment, the first polarized light is scattered by the first surface 12 to form a first return light, and the second polarized light is scattered by the second surface 13 to form a second return light. In other embodiments of the present application, the first polarized light can be reflected by the first surface 12 to form a first return light, the incident direction of the first polarized light forms an acute angle with the first surface 12, the second polarized light is reflected by the second surface 13 to form a second return light, and the incident direction of the second polarized light forms an acute angle with the second surface 13.

[0105] In the detection device provided above, the first light emitted by the first light source can sequentially pass through the first polarizer, the object to be measured, and the second polarizer to form a first signal light. The first light emitted by the first light source can also sequentially pass through the first polarizer, the object to be measured, and the third polarizer to form a second signal light. The processor can detect the object to be measured based on the first signal light and the second signal light. That is, using this detection device, two types of defect detections can be completed with one light source, which can avoid missing detections of defect types and improve the detection efficiency, thereby enhancing the practicality of the detection device. In addition, the detection device of the embodiments of the present application can complete two types of defect detections, enabling the detector to complete the defect detection of the object to be measured under different types of light without replacing the detection device, thus improving the detection efficiency and enhancing the practicality of the detection device. Additionally, by comparing the manifestation forms of the defects of the object to be measured detected by different signal lights, more accurate defect classification can be achieved, which is beneficial to improving the practicality of the detection device.

[0106] According to some embodiments of the present application, on the other hand, the embodiments of the present application provide a detection method based on the detection device of any of the above embodiments. For the same or corresponding parts as the previous embodiment, reference can be made to the corresponding description of the previous embodiment, and details will not be elaborated below.

[0107] Refer to Figure 1 , the detection device includes a first light source 100, a first polarizer 101, a second polarizer 102, a third polarizer 103, a first detection component 104, and a second detection component 105. The first light source 100 is used to provide first light to the first surface 12 of the object to be measured 11; the first polarizer 101 is used to convert the first light into first polarized light, and the first polarized light forms a first transmitted signal light after passing through the object to be measured 11, and the first polarized light forms a first returned light after returning through the first surface 12; the first returned light forms a first signal light after passing through the second polarizer 102, and the polarization direction of the second polarizer 102 is not perpendicular to the polarization direction of the first polarizer 101; the polarization direction of the third polarizer 103 is perpendicular to the polarization direction of the first polarizer 101, and the first transmitted signal light forms a second signal light after passing through the third polarizer 103; the first detection component 104 is used to receive the first signal light; the second detection component 105 is used to receive the second signal light.

[0108] Figure 10 It is a flowchart of the first detection method provided by the embodiments of the present application.

[0109] The first detection method provided by the present application includes a detection process, and the steps of the detection process include:

[0110] Combined with reference to Figure 1 and Figure 10, a first light is provided to a first surface 12 of a device under test 11 by a first light source 100; a first polarizer 101 converts the first light into first polarized light, the first polarized light forms a first transmitted signal light after passing through the device under test 11, and the first polarized light forms a first return light after returning through the first surface 12; a second polarizer 102 causes the first return light to form a first signal light, the polarization direction of the second polarizer 102 is not perpendicular to the polarization direction of the first polarizer 101, the polarization direction of a third polarizer 103 is perpendicular to the polarization direction of the first polarizer 101, and the first transmitted signal light forms a second signal light after passing through the third polarizer 103; a first detection component 104 receives the first signal light; a second detection component 105 receives the second signal light; the device under test 11 is detected according to the signal light, and the signal light includes one or a combination of the first signal light and the second signal light.

[0111] Among them, detecting the device under test 11 according to the signal light includes: respectively obtaining detection images according to different signal lights received by the first detection component 104 and the second detection component 105; detecting and classifying a detection target according to each detection image, and the detection target includes defects.

[0112] Before detecting the device under test according to the signal light, it further includes: adjusting the included angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 to adjust the light intensity of the first signal light.

[0113] According to Malus's law, the light intensity of the first signal light is related to the included angle between the polarization direction of the first polarizer 101 and the polarization direction of the second polarizer 102. Therefore, the light intensity of the first signal light can be adjusted by adjusting the included angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101, so as to ensure that the first signal light has sufficient light intensity while preventing the first detection component 104 from being overexposed, and the reliability of detection can be improved.

[0114] Specifically, in this embodiment, the detection device further includes: a first rotation component (not shown), the first rotation component is connected to the second polarizer 102, and adjusting the included angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 includes: controlling the first rotation component to drive the second polarizer 102 to rotate around a first rotation axis. Among them, the first rotation axis is not parallel to the polarization direction of the second polarizer 102.

[0115] In other embodiments of the present application, the first rotation assembly may also be connected to the first polarizer 101 and the third polarizer 103 respectively. Adjusting the included angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 includes: driving the third polarizer 103 to rotate around the second rotation axis by controlling the first rotation assembly, and simultaneously driving the first polarizer 101 to rotate synchronously around the second rotation axis to ensure that the polarization direction of the first polarizer 101 is perpendicular to the polarization direction of the third polarizer 103. Wherein, the second rotation axis is not parallel to the polarization direction of the first polarizer 101.

[0116] The detection device further includes a dark field light source assembly, and the dark field light source assembly includes a first dark field light source 117 and a second dark field light source 127. The first dark field light source 117 is used to provide a first dark field light to the object to be measured 11, and the first dark field light is scattered by the first surface 12 of the object to be measured 11 to form a first dark field signal light. The second dark field light source 127 is used to provide a second dark field light to the object to be measured 11, and the second dark field light is scattered by the second surface 13 of the object to be measured 11 to form a second dark field signal light.

[0117] In this embodiment, the dark field light source assembly includes a first dark field light source 117 and a second dark field light source 127. In other embodiments of the present application, the dark field light source assembly may only include one of the first dark field light source and the second dark field light source. When detecting the object to be measured according to the signal light, it can be detected only by one of the first dark field signal light and the second dark field signal light.

[0118] The detection method further includes: controlling the dark field light source assembly to perform multiple detection processes on the object to be measured 11, and rotating the object to be measured 11 by a preset angle relative to the dark field light source assembly between adjacent detection processes. The dark field light source assembly includes one or both combinations of the first dark field light source 117 and the second dark field light source 127; the first dark field light source is a strip light source, and / or the second dark field light source is a strip light source. With such a setting, the detection device can collect the corresponding signal light under the first dark field light and / or the second dark field light at multiple angles, thereby improving the accuracy and comprehensiveness of detection.

[0119] Combined with reference Figure 1 and Figure 10In steps S101 and S102, before detecting the object to be measured 11 according to the signal light, the detection process further includes: controlling each light source to flash sequentially, and controlling the first detection component 104 and the second detection component 105 to collect the signal light simultaneously at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes one or both of the first light source 100 and the dark field light source assembly. The signal light includes one or a combination of the first signal light, the second signal light, the first dark field signal light, and the second dark field signal light. Controlling each light source to flash sequentially enables the object to be measured 11 to complete the defect detection under different light sources in sequence. Such a setting can detect various types of defects of the object to be measured 11, thereby reducing the missed detection of defect types, improving the practicability of the detection device. Moreover, by controlling each light source to flash sequentially, the detector can complete the defect detection of the object to be measured 11 under multiple light sources without replacing the detection device, thus reducing the detection time and improving the practicability of the detection device. Some defects of the object to be measured 11 can be measured under multiple light sources. By comparing the manifestation forms of the defects under different light sources, more accurate defect classification can be achieved, which is beneficial to improving the practicability of the detection device. In addition, the preset frequency being greater than or equal to the flashing frequency of the light source can ensure that the signal light emitted by each object to be measured 11 under the flashing of the corresponding light source is collected by the first detection component 104 and the second detection component 105, improving the reliability of the detection device.

[0120] Controlling each light source to flash sequentially includes: controlling the first dark field light source 117 and the second dark field light source 127 to flash simultaneously, and controlling the first detection component 104 and the second detection component 105 to collect the signal light simultaneously at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of the first dark field light source 117 and the second dark field light source 127.

[0121] The simultaneous flashing of the first dark field light source 117 and the second dark field light source 127 can save the test time and improve the test efficiency. The preset frequency being greater than or equal to the flashing frequency of the first dark field light source 117 and the second dark field light source 127 can ensure that the signal light emitted by each object to be measured 11 under the flashing of the first dark field light source 117 and the second dark field light source 127 is collected by the first detection component 104 and the second detection component 105, improving the reliability of the detection device.

[0122] In other embodiments of the present application, the first dark field light source 117 and the second dark field light source 127 may not flash simultaneously.

[0123] Before the detection and processing, the detection method further includes: performing a first pre-detection on the detection device to determine a first matching angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101; the pre-detection includes: continuously adjusting a first angle to be measured between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101, and obtaining a first signal light through the first detection component 104; obtaining the first angle to be measured at which the first detection component 104 is not overexposed and reaches a preset sensitivity as the first matching angle. Adjusting the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 to adjust the light intensity of the first signal light includes: making the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 be the first matching angle.

[0124] Specifically, referring to Figure 10 , the first detection method provided in this embodiment includes:

[0125] Step S100, adjusting the angle between the polarization direction of the first polarizer and the polarization direction of the second polarizer.

[0126] Step S101, controlling the first light source and the dark field light source assembly to flash in sequence, so as to provide a first light to the first surface of the object to be measured through the first light source. The first polarizer converts the first light into a first polarized light. The first polarized light returns through the first surface to form a first return light. The second polarizer makes the first return light form a first signal light. The first polarized light is transmitted through the object to be measured to form a first transmitted signal light. The first transmitted signal light forms a second signal light through the third polarizer; providing a first dark field light to the object to be measured through the first dark field light source in the dark field light source assembly. The first dark field light is scattered by the object to be measured to form a first dark field signal light. Providing a second dark field light to the object to be measured through the second dark field light source in the dark field light source assembly. The second dark field light is scattered by the object to be measured to form a second dark field signal light.

[0127] Step S102, controlling the first detection component and the second detection component to collect the signal light simultaneously at a preset frequency, and the preset frequency is greater than or equal to the flashing frequency of the light sources of the first light source and the dark field light source assembly.

[0128] Step S103, detecting the object to be measured according to the signal light.

[0129] The present application also provides a second detection method, which is substantially the same as the first detection method. The main difference is that the detection device corresponding to the second detection method further includes a second light source and a fourth polarizer. The second detection method also detects the object to be measured based on the third signal light and the fourth signal light, and adjusts the light intensity of the third signal light before detecting the object to be measured. The following will describe the detection device in detail with reference to the accompanying drawings. It should be noted that the same or corresponding features as those of the first detection method will not be described in detail below to avoid redundancy. In the case of no contradiction, the corresponding descriptions of the first detection method also apply to the corresponding features of the second detection method.

[0130] Figure 11 It is a flowchart of the second detection method provided by the embodiment of the present application.

[0131] The second detection method provided by the present application includes a detection process, and the steps of the detection process include:

[0132] With reference to Figure 7 and Figure 11 , a first light is provided to the first surface 12 of the object to be measured 11 by a first light source 300; a first polarizer 301 converts the first light into a first polarized light, the first polarized light forms a first transmitted signal light after passing through the object to be measured 11, and the first polarized light forms a first return light after returning through the first surface 12; a second polarizer 302 makes the first return light form a first signal light, and the polarization direction of the second polarizer 302 is not perpendicular to the polarization direction of the first polarizer 301; the polarization direction of a third polarizer 303 is perpendicular to the polarization direction of the first polarizer 301, and the first transmitted signal light forms a second signal light after passing through the third polarizer 303; a first detection component 304 receives the first signal light; a second detection component 305 receives the second signal light; the object to be measured 11 is detected according to the signal light, and the signal light includes one or a combination of the first signal light and the second signal light.

[0133] Before detecting the object to be measured according to the signal light, the detection process further includes: adjusting the included angle between the polarization direction of the second polarizer 302 and the polarization direction of the first polarizer 301 to adjust the light intensity of the first signal light.

[0134] According to Malus' law, the light intensity of the first signal light is related to the included angle between the polarization direction of the first polarizer 301 and the polarization direction of the second polarizer 302. Therefore, the light intensity of the first signal light can be adjusted by adjusting the included angle between the polarization direction of the second polarizer 302 and the polarization direction of the first polarizer 301, so as to ensure that the first signal light has sufficient light intensity while preventing the first detection component 304 from being overexposed, and the reliability of the detection device can be improved.

[0135] Specifically, in this embodiment, the detection device further includes: a first rotation assembly (not shown), the first rotation assembly is connected to the second polarizer 302, and adjusting the included angle between the polarization direction of the second polarizer 302 and the polarization direction of the first polarizer 301 includes: controlling the first rotation assembly to drive the second polarizer 302 to rotate around the first rotation axis. Wherein, the first rotation axis is not parallel to the polarization direction of the second polarizer 302.

[0136] In other embodiments of the present application, the first rotation assembly can also be respectively connected to the first polarizer 301 and the third polarizer 303. Adjusting the included angle between the polarization direction of the second polarizer 302 and the polarization direction of the first polarizer 301 includes: by controlling the first rotation assembly to drive the third polarizer 303 to rotate around the second rotation axis, and at the same time driving the first polarizer 301 to rotate synchronously around the second rotation axis to ensure that the polarization direction of the first polarizer 301 is perpendicular to the polarization direction of the third polarizer 303. Wherein, the second rotation axis is not parallel to the polarization direction of the first polarizer 301.

[0137] The detection device further includes a second light source 310 and a fourth polarizer 311. The second light source 310 is used to provide second light to the second surface 13 of the object to be measured 11; the fourth polarizer 311 converts the second light into second polarized light. The second polarized light returns through the second surface 13 to form a second return light. The second return light forms a third signal light through the third polarizer 303. The second polarized light is transmitted through the object to be measured 11 to form a second transmitted signal light. The second transmitted signal light forms a fourth signal light through the second polarizer 302. The polarization direction of the fourth polarizer 311 is perpendicular to the polarization direction of the second polarizer 302; the polarization direction of the fourth polarizer 311 is not perpendicular to the polarization direction of the third polarizer 303.

[0138] The detection process further includes: detecting the object to be measured 11 according to the third signal light and the fourth signal light; before detecting the object to be measured 11 according to the third signal light and the fourth signal light, the detection process further includes: adjusting the included angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 to adjust the light intensity of the second signal light.

[0139] According to Malus' law, the light intensity of the second signal light is related to the included angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311. Therefore, by adjusting the included angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311, the light intensity of the second signal light can be adjusted to ensure that the second signal light has sufficient light intensity while preventing the second detection component 305 from being overexposed, thereby improving the reliability of the detection.

[0140] Specifically, in this embodiment, the detection device further includes: a second rotation assembly (not shown), the second rotation assembly is connected to the third polarizer 303, and adjusting the included angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 includes: controlling the second rotation assembly to drive the third polarizer 303 to rotate around the third rotation axis. Wherein, the third rotation axis is not parallel to the polarization direction of the third polarizer 303.

[0141] In other embodiments of the present application, the second rotation assembly is respectively connected to the second polarizer 302 and the fourth polarizer 311; controlling the second rotation assembly to drive the second polarizer 302 to rotate around the fourth rotation axis, and at the same time driving the fourth polarizer 311 to rotate synchronously around the fourth rotation axis to ensure that the polarization direction of the second polarizer 302 is perpendicular to the polarization direction of the fourth polarizer 311. Wherein, the fourth rotation axis is not parallel to the polarization direction of the second polarizer 302.

[0142] Detecting the object to be measured 11 according to the signal light includes: respectively obtaining detection images according to different signal lights received by the first detection component 304 and the second detection component 305; detecting and classifying the object to be measured according to each detection image, and the detection target includes defects.

[0143] The detection device further includes a dark field light source assembly, and the dark field light source assembly includes a first dark field light source 317 and a second dark field light source 327. The first dark field light source 317 is used to provide a first dark field light to the object to be measured 11, and the first dark field light is scattered by the first surface 12 of the object to be measured 11 to form a first dark field signal light. The second dark field light source 327 is used to provide a second dark field light to the object to be measured 11, and the second dark field light is scattered by the second surface 13 of the object to be measured 11 to form a second dark field signal light. The detection process further includes: receiving the first dark field signal light through the first detection component 304, and receiving the second dark field signal light through the second detection component 305. The signal light also includes one or both combinations of the first dark field signal light and the second dark field signal light.

[0144] In this embodiment, the dark field light source assembly includes a first dark field light source 317 and a second dark field light source 327. In other embodiments of the present application, the dark field light source assembly may only include one of the first dark field light source and the second dark field light source. When detecting the object to be measured according to the signal light, it may be detected only by one of the first dark field signal light and the second dark field signal light.

[0145] The detection method further includes: controlling the dark-field light source assembly to perform multiple detection processes on the object to be measured 11, and rotating the object to be measured 11 relative to the dark-field light source assembly by a preset angle between adjacent detection processes; the dark-field light source assembly includes one or both combinations of the first dark-field light source 317 and the second dark-field light source 327; the first dark-field light source 317 is a strip light source, and / or the second dark-field light source 327 is a strip light source. With such a setting, the detection device can collect the corresponding signal light under the first dark-field light and / or the second dark-field light at multiple angles, so as to improve the reliability of the test.

[0146] Combined reference Figure 7 and Figure 11 In steps S201 and S202 in, before detecting the object to be measured 11 according to the signal light, it includes: controlling each light source to flash in sequence, and controlling the first detection component 304 and the second detection component 305 to collect the signal light simultaneously at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes one or more combinations of the first light source 300, the second light source 310, and the dark-field light source assembly. The signal light includes one or more combinations of the first signal light, the second signal light, the third signal light, the fourth signal light, the first dark-field signal light, and the second dark-field signal light. Controlling each light source to flash in sequence enables the object to be measured 11 to complete the defect detection under different light sources in sequence. With such a setting, various types of defects of the object to be measured 11 can be detected, so as to reduce the missed detection of defect types, improve the practicability of the detection device, and controlling each light source to flash in sequence allows the detector to complete the defect detection of the object to be measured 11 under multiple light sources without replacing the detection device, thus reducing the detection time and improving the practicability of the detection device. Some defects of the object to be measured 11 can be measured under multiple light sources. By comparing the manifestation forms of the defects under different light sources, more accurate defect classification can be achieved, which is beneficial to improving the practicability of the detection device. In addition, the preset frequency is greater than or equal to the flashing frequency of the light source, which can ensure that the signal light emitted by each object to be measured 11 under the flashing of the corresponding light source is collected by the first detection component 304 and the second detection component 305, and can improve the reliability of the detection.

[0147] Controlling each light source to flash in sequence includes: controlling the first dark-field light source 317 and the second dark-field light source 327 to flash simultaneously, and controlling the first detection component 304 and the second detection component 305 to collect the signal light simultaneously at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of the first dark-field light source 317 and the second dark-field light source 327. With such a setting, the test time can be saved and the test efficiency can be improved.

[0148] In other embodiments of the present application, the first dark-field light source 317 and the second dark-field light source 327 may not flash simultaneously.

[0149] Before the detection process, the detection method further includes: performing a second pre-detection on the detection device to determine a second matching angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311; the pre-detection includes: continuously adjusting a second angle to be measured between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311, and obtaining a second signal light through a second detection component 305; obtaining the second angle to be measured at which the second detection component 305 is not overexposed and reaches a preset sensitivity as the second matching angle. Adjusting the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 to adjust the light intensity of the second signal light includes: making the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 be the second matching angle.

[0150] Specifically, referring to Figure 11 , the second detection method provided by the embodiment of the present application includes:

[0151] Step S200, adjusting the angle between the polarization direction of the first polarizer and the polarization direction of the second polarizer, and adjusting the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer.

[0152] Step S201, controlling the first light source, the second light source, and the dark field light source assembly to flash in sequence, so as to provide a first light to the first surface of the object to be measured through the first light source. The first polarizer converts the first light into a first polarized light. The first polarized light returns through the first surface to form a first return light. The second polarizer makes the first return light form a first signal light. The first polarized light is transmitted through the object to be measured to form a first transmitted signal light. The first transmitted signal light forms a second signal light through the third polarizer; providing a second light to the second surface of the object to be measured through the second light source. The fourth polarizer converts the second light into a second polarized light. The second polarized light returns through the second surface to form a second return light. The second return light forms a third signal light through the third polarizer. The second polarized light is transmitted through the object to be measured to form a second transmitted signal light. The second transmitted signal light forms a fourth signal light through the second polarizer; providing a first dark field light to the object to be measured through the first dark field light source in the dark field light source assembly. The first dark field light is scattered by the object to be measured to form a first dark field signal light. Providing a second dark field light to the object to be measured through the second dark field light source in the dark field light source assembly. The second dark field light is scattered by the object to be measured to form a second dark field signal light.

[0153] Step S202, controlling the first detection component and the second detection component to simultaneously collect the signal light at a preset frequency, and the preset frequency is greater than or equal to the flashing frequency of the light sources of the first light source, the second light source, and the dark field light source assembly.

[0154] Step S203, detecting the object to be measured according to the signal light.

[0155] Those of ordinary skill in the art can understand that the above-described embodiments are specific examples for implementing the present application. In actual applications, various changes can be made to it in form and details without departing from the spirit and scope of the present application. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application should be subject to the scope defined by the claims.

Claims

1. A detection device for detecting a test object, the test object including opposite first and second surfaces, characterized in that, The detection device includes: A first light source for providing first light to the first surface of the object to be measured. A first polarizer for converting the first light into first polarized light. The first polarized light forms a first transmitted signal light after passing through the object to be measured, and the first polarized light forms a first return light after returning through the first surface. A second polarizer. The first return light forms a first signal light after passing through the second polarizer. The polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer, and the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable. A third polarizer. The polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer. The first transmitted signal light forms a second signal light after passing through the third polarizer. A second light source for providing second light to the second surface of the object to be measured. A fourth polarizer for converting the second light into second polarized light. The second polarized light forms a second return light after returning through the second surface. The second return light forms a third signal light after passing through the third polarizer. The second polarized light forms a second transmitted signal light after passing through the object to be measured. The second transmitted signal light forms a fourth signal light after passing through the second polarizer. The polarization direction of the fourth polarizer is perpendicular to the polarization direction of the second polarizer. The polarization direction of the fourth polarizer is not perpendicular to the polarization direction of the third polarizer. A first detection component for receiving the first signal light and also for receiving the fourth signal light and generating a fourth image according to the fourth signal light. A second detection component for receiving the second signal light and also for receiving the third signal light and generating a third image according to the third signal light. A processor for detecting the object to be measured according to the first signal light and the second signal light.

2. The detection device according to claim 1, characterized in that, The detection device further includes: A first rotation component connected to the second polarizer. The first rotation component is used to drive the second polarizer to rotate around a first rotation axis. The first rotation axis is not parallel to the polarization direction of the second polarizer, so that the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable. Or, the first rotation component is respectively connected to the first polarizer and the third polarizer. The first rotation component is used to drive the third polarizer to rotate around a second rotation axis and drive the first polarizer to rotate synchronously around the second rotation axis. The second rotation axis is not parallel to the polarization direction of the first polarizer, so that the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable. Wherein, the first detection component is further used to generate a first image according to the first signal light, and the second detection component is further used to generate a second image according to the second signal light.

3. The detection device according to claim 2, wherein The first light source is a coaxial light source. The detection device further includes: The first beam splitter, which is configured to reflect the first polarized light to the object to be measured and transmit the first return light to the second polarizer, or to transmit the first polarized light to the object to be measured and reflect the first return light to the second polarizer; Wherein, the first polarizer is located on the optical path between the first beam splitter and the first light source, and the second polarizer is located on the optical path between the first beam splitter and the first detection component.

4. The detection device according to claim 3, wherein The detection device further includes: A second rotation component, which is connected to the third polarizer. The second rotation component is configured to drive the third polarizer to rotate around a third rotation axis that is not parallel to the polarization direction of the third polarizer, so that the included angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer is variable. Or, the second rotation component is respectively connected to the second polarizer and the fourth polarizer. The second rotation component is configured to drive the second polarizer to rotate around a fourth rotation axis and drive the fourth polarizer to rotate synchronously around the fourth rotation axis. The fourth rotation axis is not parallel to the polarization direction of the second polarizer, so that the included angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer is adjustable.

5. The detection device according to claim 4, wherein The second light source is a coaxial light source. The detection device further includes: A second beam splitter, which is configured to reflect the second polarized light to the object to be measured and transmit the first transmitted signal light and the second return light to the third polarizer, or to transmit the second polarized light to the object to be measured and reflect the first transmitted signal light and the second return light to the third polarizer; Wherein, the third polarizer is located on the optical path between the second beam splitter and the second detection component, and the fourth polarizer is located on the optical path between the second beam splitter and the second light source.

6. The detection device according to claim 1, wherein The detection device further includes a dark field light source assembly, and the dark field light source assembly includes at least one of a first dark field light source and a second dark field light source: The first dark field light source is configured to provide a first dark field light to the object to be measured. The first dark field light is scattered by the first surface of the object to be measured to form a first dark field signal light. The second dark field light source is configured to provide a second dark field light to the object to be measured. The second dark field light is scattered by the second surface of the object to be measured to form a second dark field signal light. The first detection component is configured to receive the first dark field signal light and generate a first dark field image based on the first dark field signal light; the second detection component is configured to receive the second dark field signal light and generate a second dark field image based on the second dark field signal light.

7. The detection device according to claim 6, wherein, The first dark field light source is a strip light source, and / or the second dark field light source is a strip light source; the detection device further includes a rotating stage, which is configured to drive the object to be measured and the dark field light source assembly to rotate relative to each other.

8. The detection device according to claim 7, characterized in that The first detection component includes a plurality of first detectors, and the plurality of first detectors are arranged in a strip shape in the first field of view, and the field of view of adjacent first detectors partially overlaps or is staggered; The second detection component includes a plurality of second detectors, and the plurality of second detectors are arranged in a strip shape in the field of view of the second surface, and the field of view of adjacent second detectors partially overlaps or is staggered; The first dark-field light source is a strip light source, and the first dark-field light source is arranged parallel to the arrangement direction of the field of view of the first detector; the second dark-field light source is a strip light source, and the second dark-field light source is arranged parallel to the arrangement direction of the field of view of the second detector.

9. The detection device according to claim 1, wherein The first polarized light is reflected by the first surface to form the first return light, and the incident direction of the first polarized light forms an acute angle with the first surface, or the first polarized light is scattered by the first surface to form the first return light; The second polarized light is reflected by the second surface to form the second return light, and the incident direction of the second polarized light forms an acute angle with the second surface, or the second polarized light is scattered by the second surface to form the second return light.

10. The detection device according to claim 1, wherein, The first surface is conjugate to the photosensitive surface of the first detection component, and the second surface is conjugate to the photosensitive surface of the second detection component.

11. A detection method based on the detection device according to any one of claims 1 to 10, for detecting a to-be-detected object, the to-be-detected object including opposite first and second surfaces, wherein The detection method includes a detection process, and the detection process includes: Providing first light to the first surface of the to-be-detected object through a first light source; The first polarizer converts the first light into first polarized light, the first polarized light is transmitted through the to-be-detected object to form a first transmitted signal light, and the first polarized light is returned by the first surface to form a first return light; The second polarizer causes the first return light to form a first signal light, and the polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer; the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light forms a second signal light through the third polarizer; Receiving the first signal light through the first detection component; Receiving the second signal light through the second detection component; Detecting the to-be-detected object according to the signal light, and the signal light includes one or a combination of the first signal light and the second signal light.

12. The detection method according to claim 11, wherein, Before detecting the to-be-detected object according to the signal light, the detection process further includes: Adjusting the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer to adjust the light intensity of the first signal light.

13. The detection method according to claim 11, wherein If the detection device further includes: a second light source for providing second light to the second surface of the object to be measured; a fourth polarizer for converting the second light into second polarized light, the second polarized light returns through the second surface to form second return light, the second return light forms third signal light through the third polarizer, the second polarized light transmits through the object to be measured to form second transmitted signal light, the second transmitted signal light forms fourth signal light through the second polarizer, the polarization direction of the fourth polarizer is perpendicular to the polarization direction of the second polarizer; the polarization direction of the fourth polarizer is not perpendicular to the polarization direction of the third polarizer; The detection process further includes: detecting the object to be measured according to the third signal light and the fourth signal light; Before detecting the object to be measured according to the third signal light and the fourth signal light, the detection process further includes: adjusting the included angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer to adjust the light intensity of the second signal light.

14. The detection method according to claim 13, wherein If the detection device further includes: a first rotation assembly connected to the second polarizer, or the first rotation assembly is respectively connected to the first polarizer and the third polarizer; Adjusting the included angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer includes: controlling the first rotation assembly to drive the second polarizer to rotate around a first rotation axis, the first rotation axis is not parallel to the polarization direction of the second polarizer, or controlling the first rotation assembly to drive the third polarizer to rotate around a second rotation axis, and at the same time driving the first polarizer to rotate synchronously around the second rotation axis to ensure that the polarization direction of the first polarizer is perpendicular to the polarization direction of the third polarizer, the second rotation axis is not parallel to the polarization direction of the first polarizer; And / or, if the detection device further includes a second rotation assembly connected to the third polarizer, or the second rotation assembly is respectively connected to the second polarizer and the fourth polarizer; Adjusting the included angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer includes: controlling the second rotation assembly to drive the third polarizer to rotate around a third rotation axis, the third rotation axis is not parallel to the polarization direction of the third polarizer, or controlling the second rotation assembly to drive the second polarizer to rotate around a fourth rotation axis, and at the same time driving the fourth polarizer to rotate synchronously around the fourth rotation axis to ensure that the polarization direction of the second polarizer is perpendicular to the polarization direction of the fourth polarizer, the fourth rotation axis is not parallel to the polarization direction of the second polarizer.

15. The detection method according to claim 11, characterized in that, Detecting the object to be measured according to the signal light includes: respectively obtaining detection images according to different signal lights received by the first detection component and the second detection component; detecting and classifying the object to be measured according to each detection image, and the object to be measured includes defects.

16. The detection method according to claim 11 or 13, characterized in that, The detection device includes: a dark-field light source assembly, the dark-field light source assembly including at least one of a first dark-field light source and a second dark-field light source; the first dark-field light source provides first dark-field light to the object to be measured, and the first dark-field light is scattered by the first surface of the object to be measured to form first dark-field signal light, the second dark-field light source provides second dark-field light to the object to be measured, and the second dark-field light is scattered by the second surface of the object to be measured to form second dark-field signal light; the detection process further includes: receiving the first dark-field signal light through the first detection assembly, receiving the second dark-field signal light through the second detection assembly, and the signal light further includes one or a combination of both the first dark-field signal light and the second dark-field signal light.

17. The detection method according to claim 16, wherein The detection method further includes: controlling the dark-field light source assembly to perform multiple times of the detection process on the object to be measured, and rotating the object to be measured by a preset angle relative to the dark-field light source assembly between adjacent times of the detection process, the dark-field light source assembly including one or a combination of both the first dark-field light source and the second dark-field light source; the first dark-field light source is a strip light source, and / or the second dark-field light source is a strip light source.

18. The detection method according to claim 16, wherein Before detecting the object to be measured according to the signal light, it includes: controlling each light source to flash in sequence, and controlling the first detection assembly and the second detection assembly to simultaneously collect the signal light at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes one or a combination of both the first light source and the dark-field light source assembly.

19. The detection method according to claim 18, characterized in that, Controlling each light source to flash in sequence includes: controlling the first dark-field light source and the second dark-field light source to flash simultaneously, and controlling the first detection assembly and the second detection assembly to simultaneously collect the signal light at the preset frequency; the preset frequency is greater than or equal to the flashing frequencies of the first dark-field light source and the second dark-field light source.

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