Manual-automatic integrated probe card back tightening device

Abstract

The invention belongs to the technical field of wafer testing, and provides a manual-automatic integrated probe card back tightening device, which comprises a boss, a clamping device and a clamping device, a movable rod; a jacking rod; a reverse transmission assembly; a jacking assembly; and a fine-tuning assembly. A tested chip is driven to move upwards through a probe station, a plurality of movable rods make contact with the surface of the probe station so that the movable rods can slowly move towards the interior of a machine shell, and then a jacking rod moves downwards through a reverse transmission assembly so that the jacking rod can make contact with the back of a probe card so that the back of the probe card can be jacked tightly. The jacking rod is in contact with the back of the probe card through the telescopic column at the bottom of the jacking rod, and the telescopic column is in elastic contact with the back of the probe card, so that the probe cards of different specifications can be stably jacked by the telescopic column through the telescoping of the telescopic column. Therefore, the probe card is effectively prevented from moving at the moment when the wafer moves upwards and is contacted with the probe card due to a larger upward force, the unstable contact between the probe card and the wafer is avoided, and the adaptability of the probe cards 4 with different specifications in the jacking process is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of wafer testing, and in particular relates to a manual-automatic integrated probe card back tightening device. Background Art

[0002] The probe card is a key tool for wafer testing. It serves as a bridge between the chip under test and the tester. Its main function is to perform preliminary measurements of electrical properties and screen out defective chips before chip packaging. It connects the tester and the chip and transmits signals to test chip parameters, ensuring that only qualified chips enter the next packaging process.

[0003] During wafer testing, the probe card is generally fixed by the center fixture on the test head, and the wafer is dragged upward by the probe station so that the probes on the probe card contact the bumps on the chip under test, thereby achieving the purpose of chip testing; the probe station drags the wafer upward to complete the contact with the probes. During this process, the probe card may have an upward displacement, resulting in unstable contact between the probe and the wafer, so the back of the probe card needs to be tightened; currently, there are two ways to tighten the probe card, one is manual adjustment, during which the center fixture needs to be manually adjusted, and the test head needs to be lifted and flipped 180 degrees to adjust the probe card to be ejected The height, that is, the distance between the probe and the bump on the chip under test, needs to be adjusted and then the test head needs to be closed for testing to check the adjustment effect. This takes a long time to adjust and requires repeated adjustments to reach the optimal position, which is inefficient. The other method is pneumatic adjustment and tightening. During pneumatic adjustment, the center clamp is connected to the cylinder, and the cylinder drives the center clamp to move, thereby tightening the back of the probe card. Although this method reduces the difficulty of adjustment, reduces the adjustment time, and improves efficiency, the force is fixed and cannot be adjusted, and the tightening effect is different for probe cards of different specifications, that is, the stability of the probe card after being tightened cannot be guaranteed, resulting in low adaptability. Summary of the invention

[0004] The object of the present invention is to provide a manual and automatic probe card back tightening device, aiming to solve the technical problem of low adaptability of the probe card back tightening device in the prior art.

[0005] The purpose of the present invention can be achieved through the following technical solutions: A manual and automatic probe card back tightening device, comprising a housing and a connecting rod installed on the top of the housing, the device also includes: A boss, the boss is arranged at the bottom of the housing, the boss is annular, an annular mounting groove is provided at the bottom of the boss, a plurality of spherical pistons are arranged on the annular mounting groove, and the probe card is fixed by the plurality of spherical pistons; A movable rod, a plurality of movable rods are movably installed on the boss through the longitudinal direction, a plurality of movable grooves are opened in the boss, a fixed plate is arranged on the surface of the movable rod, the fixed plate extends into the movable groove, and an elastic member 1 is fixedly connected between the bottom of the fixed plate and the movable groove; A tightening rod, wherein a tightening rod is installed at the central axis of the housing, and the tightening rod abuts against the probe card; A reverse transmission assembly is installed on the movable rod and the tension rod, and the movable rod and the tension rod are moved in opposite directions by the reverse transmission assembly; A tightening assembly, wherein the tightening rod is connected with the tightening assembly; A fine-tuning component is installed on the side of the housing, and the fine-tuning component is connected to the tightening component.

[0006] As a preferred embodiment of the above technical solution, the reverse transmission assembly includes: Gear, a mounting rod is installed between the inner walls of the housing, and a gear is rotatably mounted on the mounting rod; Rack 1, a connecting plate is provided between the plurality of movable rods, a rack 1 is provided on the connecting plate, and the rack 1 is meshed with the gear; Rack 2, a movable ring is rotatably installed on the top of the tightening rod, and a rack 2 is arranged on the side of the movable ring, and the rack 2 is meshed with the gear.

[0007] As a preferred embodiment of the above technical solution, a telescopic column is sleeved on the bottom of the tightening rod, and an elastic member 4 is connected between the telescopic column and the inner cavity of the tightening rod.

[0008] The cam is provided with a plurality of clamping plates, one end of which is abutted against the movable rod and the other end is used to fix the tensioning rod and the telescopic column. A movable groove is provided in the boss. The clamping plate is located in the movable groove. A groove is provided on the surface of the movable rod. When the bottom end of the movable rod is located below the boss, one end of the clamping plate is located in the groove. A slope is provided at the bottom of the groove. When the movable rod moves up, the clamping plate is moved toward the tensioning rod and fixes the tensioning rod and the telescopic column through the extrusion of the slope. The boss also has a telescopic groove 1 and a telescopic groove 2, which are respectively located at the top and the bottom of the movable groove, and the telescopic groove 1 and the telescopic groove 2 are both connected with the movable groove. An elastic member 2 is horizontally installed in the telescopic groove 1, a pressure block is provided on the top of the clamping plate, the pressure block extrude the elastic member 2, an elastic member 3 is longitudinally installed in the telescopic groove 2, and the elastic member 3 is extruded at the bottom of the clamping plate.

[0009] As a preferred embodiment of the above technical solution, the tension rod is provided with a plurality of through grooves in a longitudinal array on one side close to the card plate, and the telescopic column surface is provided with a plurality of card slots in a longitudinal array. The card plate passes through the through grooves and is carded in the card slots to fix the tension rod and the telescopic column.

[0010] As a preferred embodiment of the above technical solution, a plurality of locking plates are arranged on the periphery of the pushing rod, and an elastic plate is elastically and telescopically mounted on the bottom end of the locking plate, and the elastic plate abuts against the top edge of the probe card.

[0011] As a preferred embodiment of the above technical solution, a plurality of locking grooves are provided along the inner ring at the top of the boss, a notch is provided on one side of the top of the locking groove, the locking plate enters the locking groove through the notch, a guide groove is provided on the surface of the tightening rod, the guide groove is divided into three sections, the upper and lower end sections are in a longitudinal state, and the middle section is in a curved state, a fixing rod is provided on the inner wall of the casing, the fixing rod is sleeved in the guide groove, and the fixing rod moves along the guide groove so that the tightening rod drives a plurality of locking plates to rotate in the locking groove, the top of the inner cavity of the locking groove is in an inclined state, and the locking plate moves downward along the inclined surface of the top of the inner cavity of the locking groove during rotation.

[0012] As a preferred embodiment of the above technical solution, the tightening assembly includes: A threaded rod, the threaded rod is threadedly connected to the inner side of the movable ring, a plurality of guide rods are longitudinally penetrated through the movable ring, and the guide rods are fixed to the top of the inner cavity of the housing; A sleeve, wherein the sleeve is sleeved on the top of the threaded rod, a plurality of limit blocks are arranged on the periphery of the threaded rod, a plurality of limit grooves are opened in the sleeve, and the limit blocks are stuck in the limit grooves so that the threaded rod can only move longitudinally but cannot rotate; A secondary bevel gear is provided on the top of the sleeve, the top of the secondary bevel gear is rotatably connected to the top of the inner cavity of the casing, and the secondary bevel gear is connected to the fine-tuning component.

[0013] As a preferred embodiment of the above technical solution, the fine-tuning component includes: A rotating rod is provided through the side of the housing and is connected to an external driving component.

[0014] A main bevel gear is provided at one end of the rotating rod located in the casing, and the main bevel gear is meshed with the slave bevel gear.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. In the present invention, the chip under test is driven to move upward by the probe station, so that the chip under test is slowly approached to the probe card. First, a plurality of movable rods are in contact with the surface of the probe station. At this time, the chip under test is flush with the surface of the probe station, so that the plurality of movable rods are slowly moved toward the housing, and then the rack 1 is moved upward by the connecting plate, so that the gear rotates. The rotation of the gear causes the rack 2 to drive the movable ring and the tightening rod to move downward, so that the tightening rod contacts the back of the probe card, thereby tightening the back of the probe card. The tightening rod contacts the back of the probe card through the telescopic column at its bottom, and the telescopic column is in elastic contact with the back of the probe card. In this way, through the extension and retraction of the telescopic column, probe cards of different specifications can be stably tightened by the telescopic column, effectively avoiding the position movement of the probe card after being subjected to a large upward force at the moment when the wafer moves up and contacts the probe card, avoiding unstable contact between the probe card and the wafer, and improving the adaptability of the probe cards of different specifications when tightened. 2. In the present invention, when the movable rod moves upward, the telescopic column on the clamping rod will contact the back of the probe card in advance, and the movable rod continues to move upward, squeezing the card plate through the slope at the bottom of the groove, so that the card plate moves toward the clamping rod. When the movable rod is flush with the bottom of the boss, one end of the card plate contacts the surface of the movable rod. At this time, the telescopic column is in a state of clamping the probe card, and at the same time, the card plate passes through the through slot at the same horizontal position and is clamped in the slot, thereby fixing the clamping rod and the telescopic column, so that the telescopic column remains in a fixed state after clamping the probe card, thereby effectively avoiding the position of the probe card from being offset, and keeping the probe card stable when contacting the wafer for testing; 3. In the present invention, during the downward movement of the push rod, the fixing rod and the guide groove on the push rod cooperate to make the push rod rotate after moving downward for a certain distance, so that the locking plate rotates after passing through the notch and entering the locking groove, so that the locking plate is stuck in the locking groove, thereby stabilizing the push rod, and further making the telescopic column maintain a stable state after being fixed in position, thereby improving the stability of the probe card after being pushed; 4. In the present invention, after the telescopic column presses the probe card, the external control unit is manually controlled to start the external driving component and slowly rotate the rotating rod, so that the main bevel gear drives the slave bevel gear to rotate slowly, and the sleeve drives the threaded rod to rotate slowly. Since the threaded rod is threadedly connected to the movable ring and the movable ring is guided by the guide rod, the movable ring moves downward slowly, so that the pressing rod drives the telescopic column to move downward slowly, thereby finely adjusting the position of the telescopic column, so that the telescopic column can accurately press the back of the probe card and keep the probe card stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the reverse transmission component structure; Figure 3 It is a schematic diagram of the cross-sectional structure of the present invention; Figure 4 for Figure 3 The enlarged structural diagram at A in the middle; Figure 5 for Figure 3 The enlarged structural diagram at B in the middle; Figure 6 It is a schematic diagram of the structure of the tightening component and the fine-tuning component.

[0017] In the figure: 1. Housing; 2. Boss; 21. Locking groove; 22. Movable groove; 23. Elastic member 1; 24. Movable groove; 25. Telescopic groove 1; 26. Telescopic groove 2; 27. Elastic member 2; 28. Elastic member 3; 3. Card; 31. Press block; 4. Probe card; 5. Movable rod; 51. Fixed plate; 52. Groove; 521. Slope; 6. Tightening rod; 61. Movable ring; 62. Locking plate; 63. Elastic plate; 64. Telescopic column; 6 41. Slot; 65. Guide groove; 66. Elastic member 4; 67. Through groove; 7. Reverse transmission assembly; 71. Gear; 711. Mounting rod; 72. Rack 1; 721. Connecting plate; 73. Rack 2; 8. Clamping assembly; 81. Sleeve; 82. Threaded rod; 83. Slave bevel gear; 9. Fine-tuning assembly; 91. Rotating rod; 92. Main bevel gear; 10. Connecting rod; 11. Fixing rod; 12. Guide rod; 13. Spherical piston. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0019] The specific implementation of the present invention is described in detail below in conjunction with specific embodiments.

[0020] like Figure 1 and Figure 2 As shown, a manual and automatic probe card back tightening device includes a housing 1 and a connecting rod 10 installed on the top of the housing 1, and the device also includes: Boss 2, boss 2 is arranged at the bottom of housing 1, boss 2 is annular, boss 2 is provided with an annular mounting groove at the bottom, and a plurality of spherical pistons 13 are arranged on the annular mounting groove, and probe card 4 is fixed by the plurality of spherical pistons 13; A movable rod 5 is provided on the boss 2, and a plurality of movable rods 5 are movably installed on the boss 2. A plurality of movable grooves 22 are provided in the boss 2. A fixed plate 51 is provided on the surface of the movable rod 5. The fixed plate 51 extends into the movable groove 22. An elastic member 23 is fixedly connected between the bottom of the fixed plate 51 and the movable groove 22. A tightening rod 6 is installed at the central axis of the housing 1, and the tightening rod 6 abuts against the probe card 4; Reverse transmission assembly 7, the movable rod 5 and the jacking rod 6 are provided with a reverse transmission assembly 7, and the movable rod 5 and the jacking rod 6 are moved in opposite directions by the reverse transmission assembly 7; A tightening assembly 8, the tightening rod 6 is connected with the tightening assembly 8; A fine-tuning component 9 is installed on the side of the housing 1 , and the fine-tuning component 9 is connected to the tightening component 8 .

[0021] Furthermore, the reverse transmission assembly 7 comprises: A mounting rod 711 is installed between the gear 71 and the inner wall of the housing 1, and the gear 71 is rotatably mounted on the mounting rod 711; A rack 72, a connecting plate 721 is provided between the plurality of movable rods 5, a rack 72 is provided on the connecting plate 721, and the rack 72 and the gear 71 are meshed with each other; The second rack 73, the top of the tightening rod 6 is rotatably mounted with a movable ring 61, and the side of the movable ring 61 is provided with a second rack 73, and the second rack 73 and the gear 71 are meshed with each other.

[0022] Furthermore, a telescopic column 64 is sleeved at the bottom of the tightening rod 6, and an elastic member 46 is connected between the telescopic column 64 and the inner cavity of the tightening rod 6.

[0023] In one case of this embodiment, the spherical piston 13 is a central clamp for clamping the probe card 4, which is a prior art and will not be described in detail again; the elastic member 23 can be a spring or other elastically retractable member, and the elastic member 23 facilitates the movable rod 5 to return to its original position.

[0024] When this embodiment is actually used, the probe station drives the chip under test to move upward, so that the chip under test is slowly approached to the probe card 4. First, a number of movable rods 5 contact the surface of the probe station. At this time, the chip under test is flush with the surface of the probe station, so that the several movable rods 5 slowly move toward the housing 1, and then the rack 1 72 is moved upward through the connecting plate 721, so that the gear 71 rotates. The rotation of the gear 71 causes the rack 2 73 to drive the movable ring 61 and the tightening rod 6 to move downward, so that the tightening rod 6 contacts the back of the probe card 4, thereby tightening the back of the probe card 4. The tightening rod 6 contacts the back of the probe card 4 through the telescopic column 64 at its bottom, and the telescopic column 64 is in elastic contact with the back of the probe card 4. In this way, through the extension and retraction of the telescopic column 64, probe cards 4 of different specifications can be stably tightened by the telescopic column 64, effectively avoiding the probe card 4 from moving after being subjected to a large upward force at the moment when the wafer moves up and contacts the probe card 4, avoiding unstable contact between the probe card 4 and the wafer, and improving the adaptability of the probe cards 4 of different specifications when tightened.

[0025] like Figure 1-Figure 5As shown, a plurality of card plates 3 are installed through the inner side of the boss 2, one end of the card plate 3 is against the movable rod 5, and the other end is used to fix the top rod 6 and the telescopic column 64. A movable groove 24 is provided in the boss 2, and the card plate 3 is located in the movable groove 24. A groove 52 is provided on the surface of the movable rod 5. When the bottom end of the movable rod 5 is located below the boss 2, one end of the card plate 3 is located in the groove 52. A slope 521 is provided at the bottom of the groove 52. When the movable rod 5 moves upward, the card plate 3 is moved toward the top rod 6 by squeezing the slope 521. The tightening rod 6 and the telescopic column 64 are fixed, and a telescopic groove 1 25 and a telescopic groove 26 are also provided in the boss 2. The telescopic groove 1 25 and the telescopic groove 26 are respectively located at the top and the bottom of the movable groove 24, and the telescopic groove 1 25 and the telescopic groove 26 are both connected to the movable groove 24. An elastic member 27 is horizontally installed in the telescopic groove 1 25, and a pressure block 31 is provided on the top of the card plate 3. The pressure block 31 squeezes the elastic member 27, and an elastic member 3 28 is longitudinally installed in the telescopic groove 26. The elastic member 3 28 is squeezed at the bottom of the card plate 3.

[0026] Furthermore, a plurality of through slots 67 are longitudinally arranged in an array on one side of the clamping rod 6 close to the clamping plate 3, and a plurality of slots 641 are longitudinally arranged on the surface of the telescopic column 64. The clamping plate 3 passes through the through slots 67 and is clamped in the slots 641, thereby fixing the clamping rod 6 and the telescopic column 64.

[0027] It should be noted that, when the telescopic column 64 is pressed against the back of the probe card 4, the telescopic column 64 is not necessarily in a state of being stationary, which may cause the position of the probe card 4 to be shifted. Based on this problem, relevant results are proposed to solve it.

[0028] In one case of this embodiment, the second elastic member 27 and the third elastic member 28 can both be springs or other elastically retractable members. The second elastic member 27 and the third elastic member 28 can facilitate the return of the card plate 3 to its original position.

[0029] In actual application of this embodiment, when the movable rod 5 moves upward, the telescopic column 64 on the clamping rod 6 will contact the back of the probe card 4 in advance, and the movable rod 5 continues to move upward to squeeze the card plate 3 through the slope 521 at the bottom of the groove 52, so that the card plate 3 moves toward the clamping rod 6. When the movable rod 5 is flush with the bottom of the boss 2, one end of the card plate 3 contacts the surface of the movable rod 5. At this time, the telescopic column 64 is in a state of clamping the probe card 4. At the same time, the card plate 3 passes through the through groove 67 at the same horizontal position and is clamped in the clamping groove 641, thereby fixing the clamping rod 6 and the telescopic column 64, so that the telescopic column 64 remains in a fixed state after clamping the probe card 4, thereby effectively avoiding the position of the probe card 4 from being offset, and allowing the probe card 4 to remain stable when contacting the wafer for testing.

[0030] like Figure 6As shown, a plurality of locking plates 62 are disposed on the periphery of the push rod 6 , and an elastic plate 63 is elastically and telescopically mounted on the bottom end of the locking plate 62 , and the elastic plate 63 abuts against the top edge of the probe card 4 .

[0031] A plurality of locking grooves 21 are provided along the inner ring at the top of the boss 2, and a notch is provided on one side of the top of the locking groove 21, and the locking plate 62 enters into the locking groove 21 through the notch. A guide groove 65 is provided on the surface of the top clamping rod 6, and the guide groove 65 is divided into three sections, the upper and lower end sections are in a longitudinal state, and the middle section is in a curved state. A fixing rod 11 is provided on the inner wall of the casing 1, and the fixing rod 11 is sleeved in the guide groove 65. The fixing rod 11 moves along the guide groove 65 so that the top clamping rod 6 drives a plurality of locking plates 62 to rotate in the locking groove 21. The top of the inner cavity of the locking groove 21 is in an inclined state, and the locking plate 62 moves downward along the inclined surface of the top of the inner cavity of the locking groove 21 during rotation.

[0032] It should be noted that although the position of the telescopic column 64 is fixed, the tightening rod 6 may shake during the downward movement, which may cause the telescopic column 64 to be unstable after being fixed; based on this problem, a related structure is proposed to solve it.

[0033] In one aspect of this embodiment, the elastic plate 63 may be connected to the locking plate 62 via a spring.

[0034] In actual application of this embodiment, during the downward movement of the push rod 6, the fixing rod 11 cooperates with the guide groove 65 on the push rod 6, so that the push rod 6 rotates after moving downward for a certain distance, so that the locking plate 62 rotates after passing through the notch and entering the locking groove 21, so that the locking plate 62 is stuck in the locking groove 21, so that the push rod 6 is stabilized, and then the telescopic column 64 is kept in a stable state after being fixed in position, thereby improving the stability of the probe card 4 after being pushed; When the locking plate 62 rotates and moves downward, the elastic plate 63 contacts the edge of the back of the probe card 4 , thereby pressing against the back edge of the probe card 4 , effectively preventing the probe card 4 from shaking and further improving the stability of the probe card 4 after being tightened.

[0035] like Figure 1 and Figure 6 As shown, the tightening assembly 8 includes: A threaded rod 82, the threaded rod 82 is threadedly connected to the inner side of the movable ring 61, and a plurality of guide rods 12 are longitudinally penetrated through the movable ring 61, and the guide rods 12 are fixed to the top of the inner cavity of the housing 1; The sleeve 81 is sleeved on the top of the threaded rod 82. A plurality of limit blocks are arranged on the periphery of the threaded rod 82. A plurality of limit grooves are opened in the sleeve 81. The limit blocks are stuck in the limit grooves so that the threaded rod 82 can only move longitudinally but cannot rotate. A secondary bevel gear 83 is provided on the top of the sleeve 81 . The top of the secondary bevel gear 83 is rotatably connected to the top of the inner cavity of the casing 1 , and the secondary bevel gear 83 is connected to the fine-tuning component 9 .

[0036] The fine-tuning component 9 includes: A rotating rod 91 is passed through the side of the housing 1 and is connected to an external driving component.

[0037] Main bevel gear 92 , a main bevel gear 92 is disposed at one end of the rotating rod 91 in the housing 1 , and the main bevel gear 92 and the slave bevel gear 83 are meshed with each other.

[0038] In one case of this embodiment, the external driving component may be a motor or other components capable of driving the rotating rod 91 to rotate. The external driving component is connected to an external control unit, which may be a computer terminal.

[0039] It should be noted that due to certain errors in mechanical transmission and differences in size of probe cards 4 of different specifications, the probe card 4 may be slightly loose when the telescopic column 64 is pressing against the probe card 4, thereby affecting the stability of the probe card 4 during wafer detection; based on this problem, a relevant structure is proposed to solve it.

[0040] In actual application of this embodiment, after the telescopic column 64 presses against the probe card 4, the external control unit is manually controlled to start the external driving component and slowly rotate the rotating rod 91, so that the main bevel gear 92 drives the slave bevel gear 83 to rotate slowly, so that the sleeve 81 drives the threaded rod 82 to rotate slowly. Since the threaded rod 82 is threadedly connected to the movable ring 61, and the movable ring 61 is guided by the guide rod 12, the movable ring 61 moves slowly downward, so that the tightening rod 6 drives the telescopic column 64 to move slowly downward, so that the position of the telescopic column 64 is finely adjusted, so that the telescopic column 64 can accurately press against the back of the probe card 4, so that the probe card 4 remains stable.

[0041] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A manual and automatic probe card back tightening device, comprising a housing (1) and a connecting rod (10) mounted on the top of the housing (1), characterized in that: The device also includes: A boss (2), the boss (2) being arranged at the bottom of the housing (1), the boss (2) being annular, an annular mounting groove being provided at the bottom of the boss (2), a plurality of spherical pistons (13) being arranged on the annular mounting groove, and the probe card (4) being fixed by the plurality of spherical pistons (13); A movable rod (5), a plurality of movable rods (5) are movably installed on the boss (2) through the longitudinal direction, a plurality of movable grooves (22) are provided in the boss (2), a fixed plate (51) is provided on the surface of the movable rod (5), the fixed plate (51) extends into the movable groove (22), and an elastic member (23) is fixedly connected between the bottom of the fixed plate (51) and the movable groove (22); A tightening rod (6), wherein a tightening rod (6) is installed at the central axis of the housing (1), and the tightening rod (6) abuts against the probe card (4); A reverse transmission assembly (7), wherein the movable rod (5) and the tension rod (6) are provided with a reverse transmission assembly (7), and the movable rod (5) and the tension rod (6) are moved in opposite directions by the reverse transmission assembly (7); A tightening assembly (8), the tightening rod (6) being connected to the tightening assembly (8); A fine-tuning component (9) is installed on the side of the housing (1), and the fine-tuning component (9) is connected to the tightening component (8).

2. The manual and automatic probe card back tightening device according to claim 1, characterized in that: The reverse transmission assembly (7) comprises: A gear (71), a mounting rod (711) is mounted between the inner walls of the housing (1), and a gear (71) is rotatably mounted on the mounting rod (711); Rack one (72), a connecting plate (721) is provided between the plurality of movable rods (5), a rack one (72) is provided on the connecting plate (721), and the rack one (72) and the gear (71) are meshed with each other; A second rack (73), a movable ring (61) is rotatably mounted on the top of the tightening rod (6), a second rack (73) is arranged on the side of the movable ring (61), and the second rack (73) and the gear (71) are meshed with each other.

3. The manual and automatic probe card back tightening device according to claim 1, characterized in that: A telescopic column (64) is sleeved on the bottom of the tightening rod (6), and an elastic member 4 (66) is connected between the telescopic column (64) and the inner cavity of the tightening rod (6).

4. The manual and automatic probe card back tightening device according to claim 3, characterized in that: A plurality of clamping plates (3) are installed through the inner side of the boss (2), one end of the clamping plate (3) is against the movable rod (5), and the other end is used to fix the tension rod (6) and the telescopic column (64). A movable groove (24) is provided in the boss (2), and the clamping plate (3) is located in the movable groove (24). A groove (52) is provided on the surface of the movable rod (5). When the bottom end of the movable rod (5) is located below the boss (2), one end of the clamping plate (3) is located in the groove (52). A slope (521) is provided at the bottom of the groove (52). When the movable rod (5) moves upward, the clamping plate (3) is moved toward the tension rod (6) and is pressed by the slope (521). A fixing clamping rod (6) and a telescopic column (64) are provided in the boss (2). A telescopic groove 1 (25) and a telescopic groove 2 (26) are provided in the boss (2). The telescopic groove 1 (25) and the telescopic groove 2 (26) are respectively located at the top and the bottom of the movable groove (24). The telescopic groove 1 (25) and the telescopic groove 2 (26) are both connected to the movable groove (24). An elastic member 2 (27) is horizontally installed in the telescopic groove 1 (25). A pressing block (31) is provided at the top of the card plate (3). The pressing block (31) squeezes the elastic member 2 (27). An elastic member 3 (28) is longitudinally installed in the telescopic groove 2 (26). The elastic member 3 (28) is squeezed at the bottom of the card plate (3).

5. The manual and automatic probe card back tightening device according to claim 4, characterized in that: A plurality of through slots (67) are formed in a longitudinal array on one side of the clamping plate (3) near the clamping plate, and a plurality of clamping slots (641) are formed in a longitudinal array on the surface of the telescopic column (64). The clamping plate (3) passes through the through slots (67) and is clamped in the clamping slots (641), thereby fixing the clamping rod (6) and the telescopic column (64).

6. The manual and automatic probe card back tightening device according to claim 2, characterized in that: A plurality of locking plates (62) are arranged on the periphery of the locking rod (6), and an elastic plate (63) is elastically and telescopically mounted on the bottom end of the locking plate (62), and the elastic plate (63) abuts against the top edge of the probe card (4).

7. The manual and automatic probe card back tightening device according to claim 6, characterized in that: A plurality of locking grooves (21) are provided along the inner ring at the top of the boss (2), a notch is provided at one side of the top of the locking groove (21), and the locking plate (62) enters into the locking groove (21) through the notch. A guide groove (65) is provided on the surface of the push rod (6), and the guide groove (65) is divided into three sections, with the upper and lower end sections being in a longitudinal state and the middle section being in a curved state. A fixing rod (11) is provided on the inner wall of the housing (1), and the fixing rod (11) is sleeved in the guide groove (65). When the fixing rod (11) moves along the guide groove (65), the push rod (6) drives the plurality of locking plates (62) to rotate in the locking groove (21), and the top of the inner cavity of the locking groove (21) is in an inclined state. When the locking plate (62) rotates, it moves downward along the inclined surface of the top of the inner cavity of the locking groove (21).

8. The manual and automatic probe card back tightening device according to claim 2, characterized in that: The tightening assembly (8) comprises: a threaded rod (82), the threaded rod (82) being threadably connected to the inner side of the movable ring (61), the movable ring (61) being longitudinally penetrated by a plurality of guide rods (12), the guide rods (12) being fixed to the top end of the inner cavity of the housing (1); A sleeve (81), wherein the sleeve (81) is sleeved on the top end of the threaded rod (82), a plurality of limit blocks are arranged on the periphery of the threaded rod (82), a plurality of limit grooves are opened in the sleeve (81), and the limit blocks are stuck in the limit grooves so that the threaded rod (82) can only move longitudinally but cannot rotate; A secondary bevel gear (83) is provided at the top of the sleeve (81), the top of the secondary bevel gear (83) is rotatably connected to the top of the inner cavity of the housing (1), and the secondary bevel gear (83) is connected to the fine-tuning assembly (9).

9. The manual and automatic probe card back tightening device according to claim 8, characterized in that: The fine-tuning component (9) comprises: A rotating rod (91), wherein the rotating rod (91) passes through the side of the housing (1), and the rotating rod (91) is connected to an external driving component; A main bevel gear (92), wherein one end of the rotating rod (91) located inside the housing (1) is provided with a main bevel gear (92), and the main bevel gear (92) and the slave bevel gear (83) are meshed with each other.

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