Moving mirror motion control method and system

Abstract

The embodiment of the invention discloses a moving mirror motion control method and system, and the method comprises the steps: calibrating the actual assembly positions of a plurality of execution modules and a plurality of measurement modules through an adjustment module, and obtaining a corresponding calibration relation; wherein the adjusting module is arranged at the actual assembly position of the execution module; according to the calibration relationship, establishing a motion model between the execution modules and the measurement module, and calculating unit displacement when each execution module moves for one step length based on the motion model; and obtaining the target displacement of the execution modules, and determining the step length of each execution module according to the unit displacement and the target displacement. According to the technical scheme provided by the embodiment of the invention, the motion control of the moving mirror can be more accurate, and the error of the moving mirror reaching an ideal posture is smaller. In addition, the number of iterations of moving mirror adjustment can be reduced, and the adjustment efficiency can be improved.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of photolithography technology, and in particular to a moving mirror motion control method and system. Background Art

[0002] As the core component of the lithography equipment, the objective lens system plays a vital role in whether the exposure imaging meets the requirements in the lithography process.

[0003] The objective system usually includes some moving mirrors and moving mirror motion control systems, which are used to adjust the moving mirrors to compensate for imaging errors. However, in the actual assembly process of the objective system, due to the assembly errors and manufacturing errors between system components, there is an error between the assembly point of the objective system and the position of the ideal model, which leads to deviations in the actual adjustment results and makes it impossible for the moving mirror to reach the ideal posture. Summary of the invention

[0004] The embodiments of the present invention provide a moving mirror motion control method and system to improve the precision of moving mirror motion control.

[0005] According to one aspect of the present invention, a moving mirror motion control method is provided, wherein the moving mirror motion control method is executed by a moving mirror motion control system, wherein the moving mirror motion control system comprises a plurality of execution modules and a plurality of measurement modules;

[0006] The moving mirror motion control method comprises:

[0007] Calibrate the actual assembly positions of the plurality of execution modules and the plurality of measurement modules through the adjustment module, and obtain corresponding calibration relationships; wherein the adjustment module is arranged at the actual assembly position of the execution module;

[0008] According to the calibration relationship, a motion model between the execution module and the measurement module is established, and based on the motion model, a unit displacement when each execution module moves one step is calculated;

[0009] The target displacement of the execution module is obtained, and the step length of each execution module is determined according to the unit displacement and the target displacement.

[0010] Optionally, the calibration relationship includes a ratio of a vertical distance between each of the execution modules and the plurality of measurement modules to a corresponding same rotation axis.

[0011] Optionally, the step of calibrating the actual assembly positions of the plurality of execution modules and the plurality of measurement modules through the adjustment module and obtaining corresponding calibration relationships includes:

[0012] Acquire an adjustment value of the adjustment module and a measurement value of the measurement module corresponding to the adjustment value of the adjustment module;

[0013] According to the adjustment value of the regulating module and the measurement value of the measuring module, the ratio of the vertical distance between each of the execution modules and the plurality of measurement modules to the corresponding same rotation axis is calculated.

[0014] Optionally, the ratio of the vertical distances between the execution module and any of the measurement modules and the corresponding same rotation axis is equal to the ratio of the adjustment value of the regulation module corresponding to the execution module to the measurement value of the measurement module.

[0015] Optionally, establishing a motion model between the execution module and the measurement module according to the calibration relationship, and calculating a unit displacement when each execution module moves one step based on the motion model, includes:

[0016] Determine the total measurement value of each of the measurement modules corresponding to each of the execution modules adjusting the preset step size;

[0017] Based on the calibration relationship and in combination with the total measurement value of each of the measurement modules, a motion model between the execution module and the measurement module is established, and a preset displacement of each of the execution modules is determined according to the motion model;

[0018] The unit displacement is determined according to a preset displacement of the execution module and the preset step size.

[0019] Optionally, the number of the execution modules and the number of the measurement modules are both three;

[0020] The motion model includes: ; Wherein, N is equal to 1, 2, and 3 respectively, e1 is the displacement of the first execution module, e2 is the displacement of the second execution module, and e3 is the displacement of the third execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the first execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the second execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the third execution module, is the vertical distance from the first execution module to its corresponding rotation axis, is the vertical distance from the second execution module to its corresponding rotation axis, is the vertical distance from the third execution module to its corresponding rotation axis, is the total measurement value of the Nth measurement module;

[0021] Wherein, the rotation axis corresponding to any one of the execution modules is a line connecting the assembly positions of the other two execution modules.

[0022] Optionally, while determining the step size of each execution module according to the unit displacement and the target displacement, the method further includes:

[0023] Based on the motion model, target measurement values ​​of the measurement modules corresponding to each of the execution modules when adjusting the target displacement are determined.

[0024] Optionally, the moving mirror motion control method further includes:

[0025] After each of the execution modules is adjusted according to the determined step length, an actual measurement value of each of the measurement modules is obtained, and a measurement error of each of the measurement modules is calculated according to the actual measurement value of the measurement module and the target measurement value;

[0026] When the measurement error is greater than a preset error, an adjustment value of each of the execution modules that satisfies the measurement error is calculated based on the motion model.

[0027] According to another aspect of the present invention, a moving mirror motion control system is provided, which is used to execute the moving mirror motion control method provided by any embodiment of the present invention, and the moving mirror motion control system includes multiple execution modules and multiple measurement modules, and the multiple execution modules and the multiple measurement modules are assembled on the same circular plane, one of the execution modules and one of the measurement modules are arranged opposite to each other, the execution module is used to drive the moving mirror to move in the vertical direction, and the measurement module is used to measure the displacement of the execution module.

[0028] Optionally, the number of the execution modules and the number of the measurement modules are both three, and the execution modules and the measurement modules divide the circular plane into six equal parts;

[0029] The execution module includes a peristaltic motor, and the measurement module includes a displacement sensor.

[0030] The moving mirror motion control method provided by the embodiment of the present invention calibrates the actual assembly positions of multiple execution modules and multiple measurement modules through an adjustment module to obtain a corresponding calibration relationship, and establishes a motion model between the execution module and the measurement module based on the calibration relationship. Based on the motion model, the unit displacement of each execution module when it moves one step is calculated, so that the step of each execution module can be determined according to the unit displacement and the acquired target displacement. Compared with the solutions in the related art, the technical solution provided by the embodiment of the present invention estimates the displacement corresponding to the movement of each execution module by one step based on the calibration relationship. Since the calibration relationship is obtained by calibrating the actual positions of the execution module and the measurement module, the estimated displacement corresponding to the movement of the execution module by one step has a high accuracy, making the motion control of the moving mirror more accurate and making the error of the moving mirror reaching the ideal posture smaller. In addition, the number of iterations of the moving mirror adjustment can be saved, which is conducive to improving the adjustment efficiency.

[0031] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0033] Figure 1 A schematic structural diagram of assembly points of a moving mirror motion control system provided by an embodiment of the present invention;

[0034] Figure 2 A flow chart of a moving mirror motion control method provided by an embodiment of the present invention;

[0035] Figure 3 A schematic diagram of a curve relationship between a displacement corresponding to a step length of a peristaltic motor and a hinge ball vertex pressure provided in an embodiment of the present invention;

[0036] Figure 4 A schematic diagram of a calibration of a moving mirror motion control system provided by an embodiment of the present invention;

[0037] Figure 5 A flow chart of another moving mirror motion control method provided by an embodiment of the present invention;

[0038] Figure 6 A schematic diagram of another calibration of a moving mirror motion control system provided by an embodiment of the present invention;

[0039] Figure 7 A flow chart of another moving mirror motion control method provided by an embodiment of the present invention;

[0040] Figure 8 A flowchart of another moving mirror motion control method provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0042] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0043] Figure 1 A schematic diagram of the structure of the assembly points of a moving mirror motion control system provided by an embodiment of the present invention is shown in FIG. Figure 1As shown, the moving mirror motion control system includes multiple execution modules and multiple measurement modules, for example, including three execution modules and three measurement modules, the execution modules are used to drive the moving mirror to move in the vertical direction, and the measurement modules are used to measure the displacement of the execution modules. When the moving mirror motion control system is installed, in an ideal case, it is hoped that the three execution modules and the three measurement modules are on the same circular plane and the circle is divided into six equal parts. At this time, the connection lines of the three execution modules and the connection lines of the three measurement modules are two equally divided equilateral triangles. Among them, M1', M2' and M3' are respectively the ideal assembly positions of the three execution modules, and S1', S2' and S3' are respectively the ideal assembly positions of the three measurement modules. However, due to the existence of assembly errors and manufacturing errors, the actual assembly positions of the execution modules and the measurement modules are different from the ideal assembly positions, M1, M2 and M3 are respectively the actual assembly positions of the three execution modules, and S1, S2 and S3 are respectively the actual assembly positions of the three measurement modules, thereby affecting the adjustment accuracy of the moving mirror.

[0044] Figure 2 A flow chart of a moving mirror motion control method provided by an embodiment of the present invention. The moving mirror motion control method can be executed by a moving mirror motion control system. Figure 2 The moving mirror motion control method provided in this embodiment includes:

[0045] S110, calibrating the actual assembly positions of the plurality of execution modules and the plurality of measurement modules through an adjustment module, and obtaining corresponding calibration relationships; wherein the adjustment module is arranged at the actual assembly position of the execution module.

[0046] Specifically, the adjustment module is arranged at the actual assembly position of the execution module to replace the execution module, and the actual assembly positions of the execution module and the measurement module can be calibrated by the adjustment module. Here, the calibration relationship can be the positional relationship between the execution module and the measurement module.

[0047] The adjustment module may be a micrometer, and the adjustment value may be directly obtained by adjusting the micrometer.

[0048] S120 . Establish a motion model between the execution module and the measurement module according to the calibration relationship, and calculate the unit displacement of each execution module when it moves one step based on the motion model.

[0049] Specifically, during the movement process, one of the plurality of execution modules moves with the line connecting the other two execution modules arranged opposite to it as the rotation axis. Figure 1As shown, for example, when the first execution module (whose assembly point is M1) moves, its rotation axis is the line connecting M2 and M3; when the second execution module (whose assembly point is M2) moves, its rotation axis is the line connecting M1 and M3; when the third execution module (whose assembly point is M3) moves, its rotation axis is the line connecting M2 and M1.

[0050] When one execution module moves, the measurement values ​​of the three measurement modules all change. According to the calibration relationship determined in step S110, the motion relationship between the execution module and the measurement module, such as the relationship between the displacements, can be obtained. The corresponding motion model can be obtained by modeling the motion relationship between the execution module and the measurement module.

[0051] Among them, during the movement of the execution module, it is impossible to know the specific displacement of the execution module when it moves one step, so when the moving mirror is adjusted later, it is impossible to know how many steps should be adjusted to make the moving mirror reach the target posture. In this embodiment, since the motion model can characterize the motion relationship between the execution module and the measurement module, the displacement of each execution module can be obtained through the motion model established above, thereby obtaining the unit displacement corresponding to one step.

[0052] S130, obtaining the target displacement of the execution module, and determining the step size of each execution module according to the unit displacement and the target displacement.

[0053] Specifically, when actually controlling the motion process of the moving mirror, the step length of each execution module can be determined by calculating the ratio of the target displacement to the unit displacement according to the acquired target displacement of each execution module.

[0054] The moving mirror motion control method provided by the embodiment of the present invention calibrates the actual assembly positions of multiple execution modules and multiple measurement modules through an adjustment module to obtain a corresponding calibration relationship, and establishes a motion model between the execution module and the measurement module based on the calibration relationship. Based on the motion model, the unit displacement of each execution module when it moves one step is calculated, so that the step of each execution module can be determined according to the unit displacement and the acquired target displacement. Compared with the solutions in the related art, the technical solution provided by the embodiment of the present invention estimates the displacement corresponding to the movement of each execution module by one step based on the calibration relationship. Since the calibration relationship is obtained by calibrating the actual positions of the execution module and the measurement module, the estimated displacement corresponding to the movement of the execution module by one step has a high accuracy, making the motion control of the moving mirror more accurate and making the error of the moving mirror reaching the ideal posture smaller. In addition, the number of iterations of the moving mirror adjustment can be saved, which is conducive to improving the adjustment efficiency.

[0055] Optionally, in this embodiment, the execution module may be a peristaltic motor, and the measurement module may be a displacement sensor. The number of the execution modules and the measurement modules are both three, and the hinge ball vertices of the three peristaltic motors and the three displacement sensors are located on the same circular plane, and the circular plane is divided into six equal parts. According to the properties of the peristaltic motor, the input parameter of the peristaltic motor is the step length of its adjustment. Figure 3 A schematic diagram of a curve relationship between a displacement corresponding to a step length of a peristaltic motor and a pressure at the apex of a hinge ball provided in an embodiment of the present invention, with reference to Figure 3 , the displacement corresponding to a step of the peristaltic motor (specifically the displacement of the hinge ball) is related to the pressure value of the hinge ball vertex, and the displacement corresponding to a step is not a constant value, but is related to the pressure value of the hinge ball vertex. Among them, the hinge ball is a mechanical connection component used to contact the mirror surface. If the step of the peristaltic motor is converted into the movement of the hinge ball through a transmission mechanism. Therefore, in this embodiment, the displacement size of the hinge ball corresponding to a step is refined through the motion model, which can make the adjustment result closer to the ideal adjustment value, and is conducive to reducing the number of adjustments and reducing the workload.

[0056] Optionally, the calibration relationship includes a ratio of vertical distances from each execution module to the plurality of measurement modules to the corresponding same rotation axis.

[0057] Specifically, according to the control process of the moving mirror motion control system and its own properties, it can be known that the property of the moving mirror motion control system is a rigid system with high deformation resistance and fast response characteristics to external interference. When the peristaltic motor rotates around the rotation axis, the angle between the vertical line from any point on the current mirror surface to the rotation axis and the original mirror surface (the mirror surface before the peristaltic motor rotates) is equal. In addition, when a certain peristaltic motor (hereinafter referred to as the peristaltic motor to represent the execution module and the displacement sensor to represent the measurement module) rotates around the rotation axis, the rotation axis is the vertices of the other two peristaltic motor hinge balls. Therefore, the ratio of the displacement of the hinge ball of the peristaltic motor in the vertical direction to the change of the corresponding micrometer (adjustment module) is a constant, that is, the change of the micrometer can be used to represent the displacement of the hinge ball of the peristaltic motor in the vertical direction.

[0058] Figure 4 A schematic diagram of a moving mirror motion control system calibration provided by an embodiment of the present invention, wherein: Figure 4 Only the schematic diagram of the first peristaltic motor installed at point M1 when adjusting the step length is shown. Figure 4, the second peristaltic motor is mounted at M2, the third peristaltic motor is mounted at M3, and the second displacement sensor is mounted at S2. When the first peristaltic motor rotates around the rotation axis M2M3, the circular plane where the peristaltic motor and displacement sensor are located changes from a black circular plane to an orange circular plane. In the vertical direction, the displacement of the first peristaltic motor is , the measurement value of the second displacement sensor is According to the above principle, the angle between the perpendicular line M11AX1 from M11 to the rotation axis M2M3 and the black original plane is equal to the angle between the perpendicular line S22A2 from S22 to the rotation axis M2M3 and the black circular plane, and both M1M11 and S2S22 are perpendicular to the black circular plane. Therefore, Figure 4 The two pink triangles shown in are similar triangles. According to the principle of similar triangles, the ratio of the vertical distances from the execution module to any measurement module to the corresponding same rotation axis is equal to the ratio of the adjustment value of the adjustment module corresponding to the execution module to the measurement value of the measurement module. In other words, and The ratio is equal to and The ratio of the vertical displacement of the hinge ball of the peristaltic motor to the change of the corresponding micrometer (adjustment module) is a constant. Therefore, the ratio between the adjustment value of the micrometer and the measured value of the displacement sensor can be used to equivalently calculate the displacement of the motor. and The ratio of the first peristaltic motor and the second displacement sensor is obtained, thereby realizing the calibration of the first peristaltic motor and the second displacement sensor. Similarly, the positional relationship between the first peristaltic motor and other displacement sensors can also be calibrated in the above manner.

[0059] Figure 5 A flowchart of another moving mirror motion control method provided by an embodiment of the present invention, referring to Figure 5 Based on the above embodiments, optionally, the moving mirror motion control method provided in this embodiment includes:

[0060] S1101. Acquire an adjustment value of an adjustment module and a measurement value of a measurement module corresponding to the adjustment value of the adjustment module.

[0061] The adjustment value of the adjustment module is the adjustment value of the micrometer, and the measurement value of the measurement module is the measurement value measured by the displacement sensor during the micrometer adjustment process. Here, when each peristaltic motor rotates around the rotation axis, the three displacement sensors can measure the measurement value of the corresponding assembly point. Therefore, in this embodiment, each adjustment module can obtain the measurement value corresponding to the three displacement sensors after adjustment. For example, combined with Figure 1 and Figure 4 , adjust the micrometer installed at point M1 to , the corresponding measurement values ​​of the three displacement sensors are: ρ s1 , s2 , s3 ; Adjust the micrometer installed at point M2 to , the corresponding measurement values ​​of the three displacement sensors are: , , ; Adjust the micrometer installed at point M3 to the value , the corresponding measurement values ​​of the three displacement sensors are: , , .

[0062] S1102, calculating the ratio of the vertical distances between each execution module and the plurality of measurement modules to the corresponding same rotation axis according to the adjustment value of the adjustment module and the measurement value of the measurement module.

[0063] Specifically, Figure 6 A schematic diagram of another calibration of a moving mirror motion control system provided by an embodiment of the present invention, wherein M11, M22 and M33 are respectively the assembly points after three micrometer adjustments, and S11, S22 and S33 are respectively the assembly points of three displacement sensors after micrometer adjustments. Figure 6 , the perpendicular line from the first micrometer to the rotation axis M2M3 (the second and third micrometers are not adjusted at this time, and the rotation axis is M2M3) is M11AX1, the perpendicular line from the first displacement sensor to the rotation axis M2M3 is S11A1, the perpendicular line from the second displacement sensor to the rotation axis M2M3 is S22A2, and the perpendicular line from the third displacement sensor to the rotation axis M2M3 is S33A3. The perpendicular line from the second micrometer to the rotation axis M11M3 (the first micrometer has been adjusted, the third micrometer has not been adjusted, and the rotation axis is M11M3) is M22AX2, the perpendicular line from the first displacement sensor to the rotation axis M11M3 is S11B1, the perpendicular line from the second displacement sensor to the rotation axis M11M3 is S22B2, and the perpendicular line from the third displacement sensor to the rotation axis M22M3 is S33B3. The perpendicular line from the third micrometer to the rotation axis M11M22 (at this time, the first micrometer and the second micrometer have been adjusted, and the rotation axis is M11M22) is M33AX3, the perpendicular line from the first displacement sensor to the rotation axis M11M22 is S11C1, the perpendicular line from the second displacement sensor to the rotation axis M11M22 is S22C2, and the perpendicular line from the third displacement sensor to the rotation axis M11M22 is S33C3.

[0064] According to the adjustment value of the micrometer and the measurement value of the displacement sensor obtained above, the ratio of the vertical distance from each vertical line to the corresponding same rotation axis is obtained, wherein the ratio of the vertical distance from the three displacement sensors to the three micrometers to the three corresponding rotation axes is as follows:

[0065]

[0066]

[0067]

[0068] S120 . Establish a motion model between the execution module and the measurement module according to the calibration relationship, and calculate the unit displacement of each execution module when it moves one step based on the motion model.

[0069] S130, obtaining the target displacement of the execution module, and determining the step size of each execution module according to the unit displacement and the target displacement.

[0070] The technical solution provided by the embodiment of the present invention, combined with the rigidity properties of the moving mirror motion control system, respectively sets three micrometers at the assembly positions of the three peristaltic motors, and calculates the ratio of the vertical distance from each peristaltic motor to any displacement sensor to the corresponding same rotating axis to achieve calibration of the actual assembly position of each peristaltic motor and displacement sensor, thereby making the accuracy of the moving mirror motion control more accurate and the error of the moving mirror to the ideal posture smaller.

[0071] Figure 7 A flowchart of another moving mirror motion control method provided by an embodiment of the present invention, referring to Figure 7 Based on the above embodiment, optionally, the moving mirror motion control method provided in this embodiment includes:

[0072] S1101. Acquire an adjustment value of an adjustment module and a measurement value of a measurement module corresponding to the adjustment value of the adjustment module.

[0073] S1102, calculating the ratio of the vertical distances between each execution module and the plurality of measurement modules to the corresponding same rotation axis according to the adjustment value of the adjustment module and the measurement value of the measurement module.

[0074] S1201, determining the total measurement value of each measurement module corresponding to each execution module adjusting the preset step size.

[0075] S1202: Based on the calibration relationship and in combination with the total measurement value of each measurement module, a motion model between the execution module and the measurement module is established, and a preset displacement of each execution module is determined according to the motion model.

[0076] The motion models include: ; Where N is equal to 1, 2, and 3 respectively, e1 is the displacement of the first execution module, e2 is the displacement of the second execution module, and e3 is the displacement of the third execution module. is the vertical distance from the Nth measurement module to the rotation axis corresponding to the first execution module, is the vertical distance from the Nth measurement module to the rotation axis corresponding to the second execution module, is the vertical distance from the Nth measurement module to the rotation axis corresponding to the third execution module, is the vertical distance from the first execution module to its corresponding rotation axis, is the vertical distance from the second execution module to its corresponding rotation axis, is the vertical distance from the third execution module to its corresponding rotation axis, is the total measurement value of the Nth measurement module. Here, the total measurement value of the measurement module refers to the measurement value corresponding to the measurement module after the adjustment of the three execution modules is completed.

[0077] Specifically, assuming that the first peristaltic motor is adjusted by a steps, the second peristaltic motor is adjusted by b steps, and the third peristaltic motor is adjusted by c steps, the measured values ​​of the three displacement sensors are , and When the displacements of the hinge balls of the three peristaltic motors are e1, e2, and e3, respectively, they can satisfy the measurement values ​​of the three displacement sensors. Based on the proportional relationship obtained above, the motion model is established as follows:

[0078]

[0079] Specifically, it is known that the measurement values ​​of the three displacement sensors are obtained , and On this basis, according to the above motion model, the values ​​of e1, e2 and e3 can be obtained, that is, the preset displacement of the hinge ball when the first peristaltic motor adjusts a steps, the preset displacement of the hinge ball when the second peristaltic motor adjusts b steps, and the preset displacement of the hinge ball when the third peristaltic motor adjusts c steps.

[0080] S1203: Determine a unit displacement according to a preset displacement and a preset step size of the execution module.

[0081] Specifically, after the preset displacement of each peristaltic motor is obtained, the unit displacement of the peristaltic motor can be determined according to the ratio of the preset displacement and the corresponding preset step length.

[0082] Among them, the unit displacement of the first peristaltic motor is e1 / a, the unit displacement of the second peristaltic motor is e2 / b, and the unit displacement of the third peristaltic motor is e3 / c.

[0083] S130, obtaining the target displacement of the execution module, and determining the step size of each execution module according to the unit displacement and the target displacement.

[0084] The technical solution provided by the embodiment of the present invention, after calibrating the actual positions of each peristaltic motor and each displacement sensor, can improve the accuracy of the estimated value by estimating the displacement corresponding to the hinge ball when each peristaltic motor moves one step according to the calibration relationship, thereby improving the adjustment accuracy of the moving mirror motion control and effectively reducing the number of iterations of the moving mirror adjustment, which is beneficial to improving the adjustment efficiency.

[0085] Figure 8 A flowchart of another moving mirror motion control method provided by an embodiment of the present invention, referring to Figure 8 Based on the above embodiments, optionally, the moving mirror motion control method provided in this embodiment includes:

[0086] S1101. Acquire an adjustment value of an adjustment module and a measurement value of a measurement module corresponding to the adjustment value of the adjustment module.

[0087] S1102, calculating the ratio of the vertical distances between each execution module and the plurality of measurement modules to the corresponding same rotation axis according to the adjustment value of the adjustment module and the measurement value of the measurement module.

[0088] S1201, determining the total measurement value of each measurement module corresponding to each execution module adjusting the preset step size.

[0089] S1202: Based on the calibration relationship and in combination with the total measurement value of each measurement module, a motion model between the execution module and the measurement module is established, and a preset displacement of each execution module is determined according to the motion model.

[0090] S1203: Determine a unit displacement according to a preset displacement and a preset step size of the execution module.

[0091] S1301, obtaining a target displacement of an execution module, determining a step size of each execution module according to a unit displacement and a target displacement, and determining a target measurement value of each measurement module corresponding to each execution module when adjusting the target displacement based on a motion model.

[0092] Specifically, the target displacement of each peristaltic motor can be obtained through the moving mirror motion control system, for example, it can be pre-stored in the moving mirror motion control system and directly called in the acquisition stage. The target displacement is the actual displacement that the peristaltic motor needs to adjust. By calculating the ratio between the target displacement of each peristaltic motor and the corresponding unit displacement, the step size that each peristaltic motor needs to adjust can be determined.

[0093] S140, after each execution module is adjusted according to the determined step size, an actual measurement value of each measurement module is obtained, and a measurement error of each measurement module is calculated according to the actual measurement value of the measurement module and a target measurement value.

[0094] Specifically, in this embodiment, after determining the step length that each peristaltic motor needs to adjust, each peristaltic motor can be controlled to adjust according to the determined step length. After the adjustment is completed, the actual measurement value of each displacement sensor can also be obtained. It should be understood that when each peristaltic motor is adjusted according to the determined step length, each displacement sensor corresponds to a measurement value, and the measurement value is the actual displacement of the hinge ball corresponding to the peristaltic motor when it is adjusted according to the determined step length. Due to the existence of assembly errors and manufacturing errors, the actual measurement value of each displacement sensor may not be the same as the target measurement value, and there is an error between the two. Among them, the target measurement value is the theoretical measurement value of the displacement sensor after the peristaltic motor adjusts the step length.

[0095] Here, the error of each displacement sensor from the target measurement value is equal to the absolute value of the difference between the target measurement value and the actual measurement value.

[0096] S150. When the measurement error is greater than a preset error, the adjustment value of each execution module is calculated based on the motion model to satisfy the measurement error.

[0097] Specifically, the preset error can be the minimum error allowed between the target measurement value and the actual measurement value of the displacement sensor, which can be set according to actual design requirements. When it is detected that the measurement error is greater than the preset error, the adjustment value of each execution module in the next iteration is calculated based on the above motion model.

[0098] For example, assuming that the displacements of the hinge balls of the three peristaltic motors are adjusted by x, y, and z respectively, the errors of the three displacement sensors can meet the requirements of the preset errors. Then, according to the motion model, it can be obtained that:

[0099]

[0100] in, is the measurement value when the measurement error of the first displacement sensor meets the preset error, is the measured value when the measurement error of the second displacement sensor meets the preset error, It is the measured value when the measurement error of the third displacement sensor meets the preset error.

[0101] After determining the values ​​of x, y, and z, the values ​​of x, y, and z are assigned to e1, e2, and e3 respectively, and the control process of steps S1203-S150 is repeated to complete the precise adjustment of the moving mirror posture. The technical solution provided in this embodiment makes a relatively accurate estimate of the unit displacement of each peristaltic motor hinge ball, so the measurement error of the displacement sensor is small, which can save the iteration number of the moving mirror adjustment and improve the efficiency of the control system in the adjustment process.

[0102] Optionally, an embodiment of the present invention further provides a moving mirror motion control system, which can be used to execute the moving mirror motion control method provided by any embodiment of the present invention, and the moving mirror motion control system can be applied to a photolithography machine. The moving mirror motion control system includes a plurality of execution modules and a plurality of measurement modules, the plurality of execution modules and the plurality of measurement modules are assembled on the same circular plane, an execution module and a measurement module are arranged opposite to each other, the execution module is used to drive the moving mirror to move in a vertical direction, and the measurement module is used to measure the displacement of the execution module.

[0103] Optionally, the number of the execution modules and the measurement modules are both three, and the execution modules and the measurement modules divide the circular plane into six equal parts; the execution module includes a peristaltic motor, and the measurement module includes a displacement sensor.

[0104] The specific working principle and control process of the moving mirror motion control system provided in this embodiment can refer to the relevant description in any of the above embodiments, which will not be repeated here. Since the moving mirror motion control system is used to execute the moving mirror motion control method provided in any of the above embodiments, the moving mirror motion control system also has the beneficial effects described in any of the above embodiments.

[0105] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0106] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A moving mirror motion control method, characterized in that: The moving mirror motion control method is executed by a moving mirror motion control system, and the moving mirror motion control system includes a plurality of execution modules and a plurality of measurement modules; The moving mirror motion control method comprises: Calibrate the actual assembly positions of the plurality of execution modules and the plurality of measurement modules through the adjustment module, and obtain corresponding calibration relationships; wherein the adjustment module is arranged at the actual assembly position of the execution module; According to the calibration relationship, a motion model between the execution module and the measurement module is established, and based on the motion model, a unit displacement when each execution module moves one step is calculated; The target displacement of the execution module is obtained, and the step length of each execution module is determined according to the unit displacement and the target displacement.

2. The moving mirror motion control method according to claim 1, characterized in that: The calibration relationship includes a ratio of a vertical distance between each of the execution modules and the plurality of measurement modules to a corresponding same rotation axis.

3. The moving mirror motion control method according to claim 2, characterized in that: The actual assembly positions of the plurality of execution modules and the plurality of measurement modules are calibrated by the adjustment module, and corresponding calibration relationships are obtained, including: Acquire an adjustment value of the adjustment module and a measurement value of the measurement module corresponding to the adjustment value of the adjustment module; The ratio of the vertical distance between each of the execution modules and the plurality of measurement modules to the corresponding same rotation axis is calculated according to the adjustment value of the adjustment module and the measurement value of the measurement module.

4. The moving mirror motion control method according to claim 3, characterized in that: The ratio of the vertical distances between the execution module and any of the measurement modules and the corresponding same rotation axis is equal to the ratio of the adjustment value of the adjustment module corresponding to the execution module to the measurement value of the measurement module.

5. The moving mirror motion control method according to claim 1, characterized in that: The step of establishing a motion model between the execution module and the measurement module according to the calibration relationship, and calculating a unit displacement when each execution module moves one step based on the motion model, comprises: Determine the total measurement value of each of the measurement modules corresponding to each of the execution modules adjusting the preset step size; Based on the calibration relationship and in combination with the total measurement value of each of the measurement modules, a motion model between the execution module and the measurement module is established, and a preset displacement of each of the execution modules is determined according to the motion model; The unit displacement is determined according to a preset displacement of the execution module and the preset step size.

6. The moving mirror motion control method according to claim 5, characterized in that: The number of the execution modules and the number of the measurement modules are both three; The motion model includes: ; Wherein, N is equal to 1, 2, and 3 respectively, e1 is the displacement of the first execution module, e2 is the displacement of the second execution module, and e3 is the displacement of the third execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the first execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the second execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the third execution module, is the vertical distance from the first execution module to its corresponding rotation axis, is the vertical distance from the second execution module to its corresponding rotation axis, is the vertical distance from the third execution module to its corresponding rotation axis, is the total measurement value of the Nth measurement module; Wherein, the rotation axis corresponding to any one of the execution modules is a line connecting the assembly positions of the other two execution modules.

7. The moving mirror motion control method according to claim 1, characterized in that: While determining the step size of each execution module according to the unit displacement and the target displacement, the method further includes: Based on the motion model, target measurement values ​​of the measurement modules corresponding to each of the execution modules when adjusting the target displacement are determined.

8. The moving mirror motion control method according to claim 7, characterized in that: The moving mirror motion control method further comprises: After each of the execution modules is adjusted according to the determined step length, an actual measurement value of each of the measurement modules is obtained, and a measurement error of each of the measurement modules is calculated according to the actual measurement value of the measurement module and the target measurement value; When the measurement error is greater than a preset error, an adjustment value of each of the execution modules that satisfies the measurement error is calculated based on the motion model.

9. A moving mirror motion control system, characterized in that: Used to execute the moving mirror motion control method described in any one of claims 1-8, the moving mirror motion control system includes multiple execution modules and multiple measurement modules, the multiple execution modules and the multiple measurement modules are assembled on the same circular plane, one execution module and one measurement module are arranged opposite to each other, the execution module is used to drive the moving mirror to move in the vertical direction, and the measurement module is used to measure the displacement of the execution module.

10. The moving mirror motion control system according to claim 9, characterized in that: The number of the execution modules and the number of the measurement modules are both three, and the execution modules and the measurement modules divide the circular plane into six equal parts; The execution module includes a peristaltic motor, and the measurement module includes a displacement sensor.

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