Method for determining a predetermined line position for a processing device and processing device

Abstract

Embodiments of the present application disclose a predetermined line position determination method for a machining device and the machining device. The method comprises: acquiring a first image of a workpiece to be machined collected by a first image collection device; acquiring a second image obtained by sequentially collecting the workpiece to be machined by at least one second image collection device; adjusting a physical position of the workpiece to be machined based on the second image; rotating the workpiece to be machined in the first image according to a rotation angle of the workpiece to be machined before and after correction to obtain a third image; and determining a target physical position of at least one predetermined line based on an image position of the at least one predetermined line in the third image. This scheme can greatly reduce the deviation between the calculated position of the workpiece to be machined and the actual physical position of the workpiece to be machined due to the position correction of the workpiece to be machined.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a method for determining a predetermined line position of a processing device, a processing device, an electronic device and a storage medium. BACKGROUND

[0002] In many industries, such as the semiconductor industry, some processing equipment needs to be positioned with the aid of vision. For example, for a laser processing device used for cutting wafers, the cutting path of the wafer needs to be positioned through vision, so that the cutting path is parallel to the horizontal direction (X-axis movement direction, the X-axis movement mechanism drives the wafer to move along the X-axis, and in this process, the laser processing device processes the wafer).

[0003] In the related art, after the workpiece to be processed is positioned, the position of the workpiece to be processed is calculated according to the contour of the workpiece to be processed, and then the physical position of the workpiece to be processed is corrected. Since the actual position of the workpiece to be processed after the position correction changes, the position of the workpiece to be processed calculated according to the contour before the position correction of the workpiece to be processed will have errors, and the accuracy of the positioning result is low. SUMMARY

[0004] The present application is proposed in consideration of the above problems. The present application provides a method for determining a predetermined line position of a processing device, a processing device, an electronic device and a storage medium, which can greatly reduce the deviation between the position of the workpiece to be processed calculated due to the position correction of the workpiece to be processed and the actual physical position of the workpiece to be processed.

[0005] According to an aspect of the present application, a method for determining a predetermined line position of a processing device is provided, the predetermined line is a feature line on a workpiece to be processed, the processing device includes a first image acquisition device and at least one second image acquisition device, the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the method includes: acquiring a first image of the workpiece to be processed acquired by the first image acquisition device, wherein the first image includes the entire workpiece to be processed; acquiring second images obtained by sequentially using the at least one second image acquisition device to acquire the workpiece to be processed, wherein when the second images are acquired, the relative position between the workpiece to be processed and the corresponding second image acquisition device is determined based on the image position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the last image acquisition device; adjusting the physical position of the workpiece to be processed based on the second images, to correct the parallelism between at least one predetermined line on the workpiece to be processed and a first preset direction; rotating the workpiece to be processed in the first image according to the rotation angle of the workpiece to be processed before and after the correction, to obtain a third image; and determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image.

[0006] Optionally, the physical position of the workpiece is adjusted based on the second images to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction, comprising: after each second image is captured by each second image capturing device, an inclination angle of the at least one predetermined line relative to the first preset direction is determined based on the currently captured second image, and the physical position of the workpiece is adjusted according to the inclination angle to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction.

[0007] Optionally, the physical position of the workpiece is adjusted based on the currently captured second image to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction, comprising: a plurality of groups of predetermined line images to be measured are obtained, each group of predetermined line images to be measured being an image obtained by the second image capturing device when the workpiece moves along the first preset direction and the one or more predetermined lines on the workpiece are imaged, and the second image comprises the plurality of groups of predetermined line images to be measured; a group or a plurality of groups of position points are sequentially determined based on the plurality of groups of predetermined line images to be measured and a reference position point, each group of position points comprising a first position point and a second position point, the first position point and the second position point being located on two sides of the reference position point and along the first preset direction, the distance between the two position points in each group of position points gradually increases, the plurality of groups of position points correspond to the plurality of groups of predetermined line images to be measured in one-to-one correspondence, any group of predetermined line images to be measured comprises two predetermined line images to be measured corresponding to the first position point and the second position point in the corresponding group of position points, and the inclination angle of the line connecting the first position point and the second position point in each group of position points relative to the first preset direction represents the inclination angle of the at least one predetermined line relative to the first preset direction; after each group of position points is determined, the physical position of the workpiece is adjusted according to the inclination angle of the line connecting the first position point and the second position point in the group of position points relative to the first preset direction to correct the parallelism between the at least one predetermined line and the first preset direction; wherein, among the reference position point and the plurality of groups of position points, different position points are position points corresponding to different feature points on the predetermined line.

[0008] Optionally, the group or a plurality of groups of position points are sequentially determined based on the plurality of groups of predetermined line images to be measured and the reference position point, comprising: a template image is obtained, wherein the template image comprises a position feature associated with the predetermined line and a reference point; each predetermined line image of the plurality of groups of predetermined line images to be measured is matched with the template image according to the position feature contained in the template image; for each predetermined line image to be measured, the point corresponding to the reference point in the template image in the predetermined line image to be measured is determined as the feature point corresponding to the predetermined line image to be measured based on the matching result, and the reference position point and the group or a plurality of groups of position points are determined based on the feature point.

[0009] Optionally, the at least one second image acquisition device comprises a coarse adjustment image acquisition device and a fine adjustment image acquisition device, the image acquisition range of the coarse adjustment image acquisition device is greater than the image acquisition range of the fine adjustment image acquisition device, the fine adjustment image acquisition device only acquires a set of predetermined line images to be measured, and the set of predetermined line images to be measured acquired by the fine adjustment image acquisition device is acquired after the workpiece moves by a first target distance to both sides along the first preset direction from an initial position, the first target distance is less than or equal to the first preset distance threshold, and the reference position point is a position point corresponding to a preset feature point on the workpiece when the workpiece is located at the initial position.

[0010] Optionally, the at least one second image acquisition device acquires the second image in an order of gradually decreasing image acquisition range.

[0011] Optionally, after adjusting the physical position of the workpiece to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction, the method further comprises: acquiring two inspection predetermined line images containing one or more predetermined lines, the two inspection predetermined line images being images obtained by the last second image acquisition device acquiring images of the one or more predetermined lines on the workpiece while the workpiece moves along the first preset direction; determining a third position point and a fourth position point one by one based on the two inspection predetermined line images; when the inclination angle of the line connecting the third position point and the fourth position point with respect to the first preset direction is less than or equal to a preset angle threshold, determining that the parallelism between the at least one predetermined line and the first preset direction meets the first preset requirement; and wherein the third position point and the fourth position point correspond to different feature points on the predetermined line respectively.

[0012] Optionally, the third position point and the fourth position point are located on both sides of the reference position point, the two inspection predetermined line images are acquired after the workpiece moves by a second target distance to both sides along the first preset direction from the initial position, the reference position point is a position point corresponding to a preset feature point on the workpiece when the workpiece is located at the initial position, and the second target distance is less than or equal to a second preset distance threshold.

[0013] Optionally, the acquiring the second images obtained by the at least one second image acquisition device for the workpiece in sequence comprises: for the first second image acquisition device, determining a first physical position difference between the physical position of the first product feature and the physical position of the field center of the first image acquisition device based on the image position of the first product feature in the first image; controlling the workpiece to move to the image acquisition range of the first second image acquisition device according to the second physical position difference between the first second image acquisition device and the first image acquisition device and the first physical position difference, and acquiring the second image acquired by the first second image acquisition device; for each non-first second image acquisition device, determining a third physical position difference between the physical position of the first product feature and the physical position of the field center of the last second image acquisition device based on the image position of the first product feature in the third image acquired by the last second image acquisition device; controlling the workpiece to move to the image acquisition range of the current second image acquisition device according to the fourth physical position difference between the current second image acquisition device and the last second image acquisition device and the third physical position difference, and acquiring the second image acquired by the current second image acquisition device.

[0014] Optionally, the determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image comprises: converting the image position of the at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, and the initial physical position is the target physical position; or converting the image position of the at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, and determining the target physical position of the at least one predetermined line based on the initial physical position and a positioning error corresponding to the first image acquisition device, the positioning error being an error of the physical position obtained by converting the image position in the first image acquisition device according to the preset conversion relationship; wherein the preset conversion relationship is a conversion relationship between an image coordinate system used by the first image acquisition device and a world coordinate system, and the physical position is a position in the world coordinate system.

[0015] Optionally, the processing device further comprises a third image acquisition device, an image acquisition range of the third image acquisition device is smaller than an image acquisition range of the first image acquisition device, and before determining the target physical position of the at least one predetermined line based on the initial physical position and the positioning error corresponding to the first image acquisition device, the determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image and the preset conversion relationship further comprises: determining a sixth physical position difference between the physical position corresponding to the first product feature and the physical position corresponding to the second product feature at the same calibration moment based on at least a fifth physical position difference between the physical position corresponding to the first image acquisition device and the physical position corresponding to the third image acquisition device, the sixth physical position difference representing the positioning error; wherein the first product feature is a feature on the third image, the second product feature is a feature on the fourth image, the fourth image is an image acquired by the third image acquisition device for the workpiece to be processed, and the first product feature and the second product feature correspond to the same feature on the workpiece to be processed.

[0016] Optionally, the third image acquisition device is any one of the at least one second image acquisition device.

[0017] Optionally, before acquiring the first image of the workpiece to be processed acquired by the first image acquisition device, the method further comprises: acquiring a fifth image acquired by the first image acquisition device for the workpiece to be processed; determining an included angle between a feature edge on the workpiece to be processed in the fifth image and the second preset direction; and controlling the workpiece to be processed to rotate based on the included angle, so that the parallel degree between the feature edge and the second preset direction meets the second preset requirement.

[0018] Optionally, the preset conversion relationship is a conversion relationship between an image coordinate system adopted by the first image acquisition device and a world coordinate system, the physical position is a position in the world coordinate system, the world coordinate system comprises a first coordinate axis, a second coordinate axis and a third coordinate axis, the workpiece to be processed can be translated along the first coordinate axis and the second coordinate axis and rotated around the third coordinate axis, and the method further comprises: recording a first rotation angle of the workpiece to be processed around the third coordinate axis when the first image acquisition device acquires the first image; and recording a second rotation angle of the workpiece to be processed around the third coordinate axis after the physical position of the workpiece to be processed is adjusted; wherein the rotation angle of the workpiece to be processed before and after the correction is a difference between the second rotation angle and the first rotation angle.

[0019] According to another aspect of the present application, a processing device is also provided, comprising a first image acquisition device, at least one second image acquisition device and a control device, an image acquisition range of the at least one second image acquisition device is smaller than an image acquisition range of the first image acquisition device, and the control device is configured to execute the predetermined line position determination method for the processing device described above.

[0020] According to another aspect of the present application, there is also provided an electronic device comprising a processor and a memory, wherein the memory stores computer program instructions which, when executed by the processor, cause the processor to perform the predetermined line position determination method for a machining device as described above.

[0021] According to yet another aspect of the present application, there is also provided a storage medium having stored thereon program instructions which, when executed, cause a processor to perform the predetermined line position determination method for a machining device as described above.

[0022] The above technical solution obtains the second image obtained by the at least one second image acquisition device in sequence for the workpiece, and when the second image is obtained, the relative position of the workpiece and the second image acquisition device is determined based on the position of the workpiece in the first image and the physical position difference between each second image acquisition device and the previous image acquisition device, which is advantageous to ensure that at least part of the workpiece can be within the image acquisition range of the second image acquisition device when the second image acquisition device acquires the second image, so that each second image can be ensured to be used as a reference image for correcting the physical position of the workpiece; the third image is obtained by rotating the workpiece in the first image based on the rotation angles before and after the correction to obtain the image position of the at least one predetermined line in the third image, which can accurately obtain the physical position of the corrected predetermined line, and this manner can greatly reduce the deviation between the calculated position of the workpiece and the actual physical position of the workpiece due to the position correction of the workpiece, thereby helping to improve the accuracy of subsequent machining of the workpiece.

[0023] The above description is only a summary of the technical solutions of the present application, in order to enable the technical means of the present application to be more clearly understood, the present application can be implemented according to the content of the specification, and in order to enable the above and other purposes, features and advantages of the present application to be more apparent and easy to understand, the following specific embodiments of the present application are described. BRIEF DESCRIPTION OF DRAWINGS

[0024] The above and other purposes, features and advantages of the present application will become more apparent from the following detailed description of the embodiments of the present application, taken in conjunction with the accompanying drawings. The accompanying drawings are provided to assist in the understanding of the embodiments of the present application, and constitute a part of the specification, together with the embodiments of the present application, to explain the present application, and do not constitute a limitation on the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0025] Figure 1 a schematic flowchart of a predetermined line position determination method for a machining device according to an embodiment of the present application is shown;

[0026] Figure 2Fig. 1 shows a structural schematic diagram of a processing device according to an embodiment of the present application;

[0027] Figure 3 Fig. 2 shows a schematic block diagram of an electronic device according to an embodiment of the present application. DETAILED DESCRIPTION

[0028] In order to make the objectives, technical solutions and advantages of the present application more obvious, the following will describe the example embodiments of the present application in detail with reference to the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present application described in the present application, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present application.

[0029] To at least partially solve the above technical problems, the embodiments of the present application provide a predetermined line position determination method for a processing device, a processing device, an electronic device and a storage medium. Please refer to Figure 1 Fig. 1 shows a structural schematic diagram of a processing device according to an embodiment of the present application. According to an aspect of the present application, a predetermined line position determination method for a processing device is provided, the predetermined line being a feature line on a workpiece, the processing device comprising a first image acquisition device and at least one second image acquisition device, the image acquisition range of the at least one second image acquisition device being smaller than the image acquisition range of the first image acquisition device, the method comprising steps S110, S120, S130, S140 and S150.

[0030] Exemplarily, the predetermined line can be a feature line on a workpiece. The workpiece can be any object, such as a ceramic, a wafer, etc. The predetermined line can be any feature line, such as a scribe lane on a wafer, etc. The processing device can comprise a first image acquisition device and at least one second image acquisition device, and can further comprise a movable stage for carrying the workpiece. The first image acquisition device can be, for example, a wide-angle camera, and the at least one second image acquisition device can comprise, for example, a coarse adjustment camera and / or a fine adjustment camera. The image acquisition range of the wide-angle camera can be larger than the image acquisition range of the coarse adjustment camera, and the image acquisition range of the coarse adjustment camera can be larger than the image acquisition range of the fine adjustment camera. Specifically, the image acquisition range of the first image acquisition device is larger than the image acquisition range of each second image acquisition device, which can also be understood as that the resolution of the first image acquisition device is lower than the resolution of each second image acquisition device. It can be considered that the first image acquisition device is a large field of view camera, and the second image acquisition device is a small field of view camera; in other words, the image acquisition range of the first image acquisition device is large but the resolution is low, while the image acquisition range of the second image acquisition device is small but the resolution is high.

[0031] Exemplarily, the workpiece to be processed can be placed on the movable stage, the first image acquisition device is the first image acquisition device for image acquisition of the workpiece to be processed, the at least one second image acquisition device can perform image acquisition of the workpiece to be processed in a preset order, and the first second image acquisition device of the at least one second image acquisition device is the second image acquisition device for image acquisition of the workpiece to be processed. The movable stage can drive the workpiece to be processed to move to the image acquisition range of each second image acquisition device in turn according to the physical position difference between each second image acquisition device and the previous image acquisition device. Specifically, the movable stage can translate in a plane (which can be referred to as a "moving plane") and can also rotate around a fixed rotation axis in the moving plane. Within the moving range of the movable stage, two mutually perpendicular grating rulers can be provided. For example, when the movable stage stays at a certain preset physical position, the readings of the grating rulers at this time can be set to 0, and the physical position can be determined as the origin of the world coordinate system. A first grating ruler can be provided along a first preset direction through the origin of the world coordinate system, and the axis of the first grating ruler can be used as the X axis of the world coordinate system. A second grating ruler can be provided along a second preset direction perpendicular to the X axis and through the origin of the world coordinate system. The axis of the second grating ruler can be used as the Y axis of the world coordinate system. The movable stage can move along the first preset direction and the second preset direction, and based on the readings of the first grating ruler and the second grating ruler, the movement distance of the movable stage in the first preset direction and the second preset direction can be determined. The first preset direction can be any direction, such as a horizontal direction, a vertical direction, etc., and the second preset direction can be a direction perpendicular to the first preset direction.

[0032] In step S110, a first image of the workpiece to be processed acquired by the first image acquisition device is obtained, wherein the first image includes the entire workpiece to be processed.

[0033] Exemplarily, the first image obtained by the first image acquisition device can include the whole workpiece. Specifically, when the first image acquisition device acquires the image of the workpiece, the specific position point (e.g. the center or a preset mark point) of the movable platform can be controlled to coincide with the center of the field of view of the first image acquisition device, and the first product feature of the workpiece on the movable platform can or can not coincide with the specific position point of the movable platform. The first product feature can be any identifiable feature on the workpiece. Exemplarily, the first product feature can be a feature on the workpiece itself, such as a feature on a certain shape or structure. Exemplarily, the first product feature can also be a feature marked on the workpiece by artificial or processing device, such as a certain easily identifiable symbol, pattern, etc. The first product feature can be of any shape, such as a circle, a cross or a star, etc. Taking a wafer as an example, the first product feature can be the center of a scribe lane at a certain position on the wafer, such as the center of a scribe lane at the centermost position on the wafer, which can also be the center of the wafer. The above-mentioned scribe lane center refers to the center point of the intersection area of two perpendicular scribe lanes.

[0034] In step S120, a second image obtained by sequentially using at least one second image acquisition device to acquire the workpiece is acquired, wherein when the second image is acquired, the relative position of the workpiece and the corresponding second image acquisition device is determined based on the image position of the workpiece in the first image and the physical position difference between each second image acquisition device and the last image acquisition device.

[0035] Exemplarily, for the first second image capturing device, the previous image capturing device of the second image capturing device is the first image capturing device. For each non-first second image capturing device, the previous image capturing device of the second image capturing device is the previous second image capturing device of the second image capturing device. The physical position difference between each second image capturing device and the previous image capturing device can be obtained in any manner. For example, the physical position difference between two image capturing devices can be measured by a measuring device. For another example, the physical positions of the two image capturing devices when the field of view centers of the two image capturing devices coincide with the center of the movable platform / rotation axis can be determined respectively, and the difference between the two determined physical positions can be taken as the physical position difference between the two image capturing devices. The image position of the workpiece in the first image can be represented by the pixel coordinates of the first product feature of the workpiece in the image coordinate system of the first image. Based on the image position of the workpiece in the first image, the physical position difference of the workpiece relative to the field of view center of the first image capturing device can be determined. Specifically, the image obtained by image capturing using the first image capturing device has an image coordinate system (i.e., the image coordinate system used by the first image capturing device), and the image coordinate system has a preset conversion relationship with the world coordinate system. For the first image, the physical coordinates of the position points corresponding to each pixel point in the image coordinate system can be determined according to the pixel coordinates of each pixel point in the image coordinate system. It can be understood that the physical position difference of the workpiece relative to the field of view center of the first image capturing device can be obtained by converting the pixel coordinates of the first product feature of the workpiece in the first image and the pixel coordinates of the center pixel point of the first image according to the preset conversion relationship and calculating the difference.

[0036] Exemplarily, based on the image position of the workpiece in the first image, the physical position difference of the workpiece relative to the center of the field of view of the first image acquisition device can be determined, before image acquisition of the workpiece by the second image acquisition device, the movable platform can be controlled to move according to the physical position difference between the first image acquisition device and the first second image acquisition device and the physical position difference of the workpiece relative to the center of the field of view of the first image acquisition device, and the relative position of the workpiece after the movement and the first second image acquisition device can satisfy that the first product feature of the workpiece is located in the image acquisition range of the first second image acquisition device. After the first product feature of the workpiece is located in the image acquisition range of the first second image acquisition device, the second image acquisition device can be used in sequence to acquire the image of the workpiece to obtain the second image. In some embodiments, when the current second image acquisition device is a non-first second image acquisition device, the movable platform can be controlled to move the workpiece based on the physical position difference between the current second image acquisition device and the last second image acquisition device, and the relative position of the workpiece after the movement and the current second image acquisition device satisfies that the first product feature of the workpiece is located in the image acquisition range of the current second image acquisition device. In other embodiments, when the current second image acquisition device is a non-first second image acquisition device, the movable platform can be controlled to move the workpiece based on the physical position difference between the current second image acquisition device and the last second image acquisition device and the position of the workpiece in the second image acquired by the last second image acquisition device, and similarly, the relative position of the workpiece after the movement and the current second image acquisition device satisfies that the first product feature of the workpiece is located in the image acquisition range of the current second image acquisition device.

[0037] In step S130, the physical position of the workpiece is adjusted based on the second image to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction.

[0038] Exemplarily, the second image acquired by the second image acquisition device can include at least part of the workpiece, and specifically can include at least part of the feature line of the workpiece. For the second image acquired by each second image acquisition device, the physical position of the workpiece can be adjusted according to the image position of the feature line of the workpiece included in the second image, and the adjustment manner can include, for example, controlling the movable platform to rotate to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction.

[0039] In step S140, the workpiece in the first image is rotated according to the rotation angle of the workpiece before and after the correction to obtain a third image.

[0040] Exemplarily, after the last adjustment of the physical position of the workpiece to be processed is completed, the rotation angle of the workpiece to be processed in the process of correcting the predetermined line can be obtained, which can also be determined by the rotation angle of the movable platform rotating around the rotation axis. Based on the rotation angle of the workpiece to be processed, the workpiece to be processed in the first image can be rotated according to the rotation angle to obtain a third image.

[0041] In step S150, the target physical position of the at least one predetermined line is determined based on the image position of the at least one predetermined line in the third image.

[0042] Exemplarily, similar to the first image, the third image can include the entire workpiece to be processed, and accordingly can include the at least one predetermined line of the workpiece to be processed. According to the image position of the at least one predetermined line in the third image, the physical position of the at least one predetermined line, i.e. the target physical position, can be obtained by conversion according to the preset conversion relationship. In some embodiments, the template image containing the predetermined line can be matched with the third image by template matching to determine the at least one predetermined line in the third image. In other embodiments, the predetermined line can be drawn according to the preset relative position between the first product feature in the third image and each predetermined line. It can be understood that the intersection of the drawn line in the third image and the contour of the workpiece can be used as the starting position and the ending position of the corresponding predetermined line.

[0043] The above technical solution obtains the second image obtained by sequentially using at least one second image acquisition device to acquire the workpiece to be processed, and when the second image is obtained, the relative position of the workpiece to be processed and the second image acquisition device is determined based on the position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the last image acquisition device, which is beneficial to ensure that at least part of the workpiece to be processed can be within the image acquisition range of the second image acquisition device when the second image acquisition device acquires the second image, so that each second image can be used as a reference image for correcting the physical position of the workpiece to be processed; by rotating the workpiece to be processed in the first image based on the rotation angles before and after correction to obtain the third image to obtain the image position of the at least one predetermined line in the third image, the physical position of the corrected predetermined line can be accurately obtained, which can greatly reduce the deviation between the calculated position of the workpiece to be processed and the actual physical position of the workpiece to be processed due to the position correction of the workpiece to be processed, thereby helping to improve the accuracy of subsequent processing of the workpiece to be processed.

[0044] Optionally, the physical position of the workpiece is adjusted based on the second images to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction, including: after each second image is captured by the second image capturing device, the inclination angle of the at least one predetermined line relative to the first preset direction is determined based on the currently captured second image, and the physical position of the workpiece is adjusted according to the inclination angle to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction.

[0045] Exemplarily, for the second image captured by the current second image capturing device, the at least one predetermined line can be determined in the second image. In some embodiments, the predetermined line in the second image can be identified based on the shape of the predetermined line to determine the position of the at least one predetermined line in the second image, and the identification method may, for example, include Hough transform, edge detection, principal component analysis, etc. Taking a wafer as an example, the predetermined line of the wafer can be a scribe lane, the edge of the scribe lane can be regarded as a straight line, and the predetermined line can be determined by identifying the straight line in the second image. In other embodiments, the feature line can be determined by identifying the feature points on the predetermined line, which will be described below. Exemplarily, after the at least one predetermined line is determined in the second image, the inclination angle of the predetermined line in the second image relative to the reference direction can be determined. Specifically, the reference direction can be preset in the image space of the second image, which can correspond to the first preset direction in the physical space.

[0046] The above technical solution can accurately determine the inclination direction and inclination degree of the predetermined line of the workpiece by adjusting the position of the workpiece based on the inclination angle of the predetermined line relative to the first preset direction, so that the corrected predetermined line is as close as possible to the ideal state, i.e., parallel to the first preset direction.

[0047] Optionally, the inclination angle of the at least one predetermined line relative to the first preset direction is determined based on the currently collected second image, and the physical position of the workpiece is adjusted according to the inclination angle to correct the parallel degree between the at least one predetermined line on the workpiece and the first preset direction, comprising: obtaining a plurality of groups of predetermined line images to be measured, each group of predetermined line images to be measured being an image obtained by the second image acquisition device when the workpiece moves along the first preset direction and the image acquisition device collects the image of one or more predetermined lines on the workpiece, and the second image comprising the plurality of groups of predetermined line images to be measured; determining one or more groups of position points based on the plurality of groups of predetermined line images to be measured and the reference position point, each group of position points comprising a first position point and a second position point, the first position point and the second position point being located on both sides of the reference position point and along the first preset direction, the distance between the two position points contained in each group of position points gradually increasing, the plurality of groups of position points and the plurality of groups of predetermined line images to be measured corresponding to each other, any group of predetermined line images to be measured comprising two predetermined line images to be measured corresponding to the first position point and the second position point in the corresponding group of position points, and the inclination angle of the line connecting any two position points in the group of position points relative to the first preset direction representing the inclination angle of the at least one predetermined line relative to the first preset direction; after each group of position points is determined, the physical position of the workpiece is adjusted according to the inclination angle of the line connecting the first position point and the second position point in the group of position points relative to the first preset direction to correct the parallel degree between the at least one predetermined line and the first preset direction; wherein, among the reference position point and the plurality of groups of position points, different position points are position points corresponding to different feature points on the predetermined line.

[0048] Exemplarily, the predetermined line image to be measured can be an image containing any number of predetermined lines, and each group of predetermined line images to be measured can be an image obtained by the current second image acquisition device capturing a predetermined line on the workpiece when the workpiece moves along the first preset direction. For the convenience of description and understanding, in the embodiments shown below, the first preset direction is described as the horizontal direction. Each group of predetermined line images to be measured can be a static image or any video frame in a dynamic video. Exemplarily, in the reference position point and the plurality of groups of position points, different position points are position points corresponding to different feature points on the predetermined line. The feature points can be any identifiable feature points on the workpiece. Specifically, the feature points can be feature points on the workpiece itself, or feature points additionally marked on the workpiece, for example, by manual or processing device, etc. In one example, the feature points can be the center points of the intersection regions of two cutting lanes perpendicular to each other on the workpiece (referred to as "cutting lane centers" for short). Taking a wafer as an example, different feature points can be cutting lane centers at different positions on the wafer. The position point corresponding to any feature point can be an image position point corresponding to the feature point in the image coordinate system, or a physical position point corresponding to the feature point in the world coordinate system. Each group of predetermined line images to be measured can contain a first predetermined line image to be measured and a second predetermined line image to be measured. In a specific embodiment, the first predetermined line image to be measured can be an image captured by the current second image acquisition device for the intersection region of two predetermined lines perpendicular to each other within the image acquisition range during the movement of the workpiece from the reference position point along the first preset direction. The first predetermined line image to be measured can include a first position point, which can be, for example, an image position point or a physical position point corresponding to the center of the intersection region. The second predetermined line image to be measured can be an image captured by the current second image acquisition device for the intersection region of two predetermined lines perpendicular to each other within the image acquisition range during the movement of the workpiece from the reference position point along the direction opposite to the first preset direction. Similarly, the second predetermined line image to be measured can include a second position point, which can be, for example, an image position point or a physical position point corresponding to the center of the intersection region. In a similar manner, a plurality of groups of position points can be sequentially determined, each group of position points including a first position point and a second position point. The distance between the first position point and the second position point included in each group of position points sequentially determined gradually increases. The number of groups of predetermined line images to be measured is consistent with the number of groups of position points, and each group of predetermined line images to be measured corresponds to one group of position points. It can be understood that the "points" described in the embodiments of the present application, such as position points, feature points, reference points, etc., correspond to a "region" when the corresponding image is enlarged, and the "region" can be an image region composed of a single pixel or multiple pixels in the image.Exemplarily, the physical position of the workpiece to be processed can be adjusted once after each group of position points is determined. Taking the first preset direction as the horizontal direction as an example, after a group of position points is determined, the physical position of the workpiece to be processed can be adjusted according to the angle of the line connecting the first position point and the second position point in the group of position points relative to the line connecting the first position point and the second position point in the horizontal direction. For example, if the line connecting the first position point and the second position point is inclined 1° counterclockwise relative to the horizontal direction, the movable platform can be controlled to rotate 1° clockwise around the rotation axis to drive the workpiece to rotate 1° clockwise. It can be understood that by adjusting the workpiece, the directions of all the predetermined lines on the workpiece can be corrected.

[0049] The technical solution described above corrects the positions of the predetermined lines on the workpiece by determining a plurality of groups of position points and adjusting the position of the workpiece based on the angle of the line connecting two position points in each group of position points relative to the first preset direction. By setting a plurality of groups of position points, high-precision correction of the predetermined lines on the workpiece can be achieved in a wide range.

[0050] Optionally, one or more groups of position points are determined based on the plurality of groups of predetermined line images and the reference position point, including: obtaining a template image, wherein the template image contains position features associated with the predetermined lines and reference points; matching the template image with each predetermined line image of the plurality of groups of predetermined line images according to the position features contained in the template image; for each predetermined line image, determining the point corresponding to the reference point in the template image in the predetermined line image as the feature point corresponding to the predetermined line image based on the matching result, and determining the reference position point and one or more groups of position points based on the feature point.

[0051] Exemplarily, the template image can be an image containing any position feature associated with the predetermined line on the workpiece to be processed and a reference point. The template image can be consistent with or smaller than the image size of the to-be-tested predetermined line image. The template image is pre-labeled with the position feature associated with the predetermined line and the reference point. The reference point can be any identifiable point on the predetermined line. The reference point is consistent with the above-mentioned feature point type, which is used to be matched to each to-be-tested predetermined line image to determine the position of the identified point therein. For example, when the workpiece is a wafer, the reference point can be the center of the scribe lane. Taking the template image as an example, which is collected from the intersection area of two mutually perpendicular scribe lanes of the wafer, the template image can include the intersection area, and can also include the area within a preset range around the intersection area (which can be denoted as a reference area), wherein the preset range is set such that the image features contained in the intersection area and the reference area enable the image processing algorithm to identify the positions of the intersection area and the reference area from the second image collected by the second image collection device based on the image features. The position feature contained in the template image can refer to the intersection area and the reference area. According to the position feature contained in the template image, the template image can be matched with any current to-be-tested predetermined line image. Specifically, for any current to-be-tested predetermined line image, the position feature matching the position feature in the template image can be identified from the to-be-tested predetermined line image, and the image position of the position feature in the to-be-tested predetermined line image is determined as the image position of the position feature in the template image in the to-be-tested predetermined line image. In addition, based on the matching result on the current to-be-tested predetermined line image, and based on the relative positional relationship between the reference point and the position feature in the template image, the point in the current to-be-tested predetermined line image corresponding to the reference point in the template image can be determined as the current feature point corresponding to the current to-be-tested predetermined line image.

[0052] The above technical solution can determine the current feature point corresponding to the current to-be-tested predetermined line image through the matching result of the template image and any current to-be-tested predetermined line image. This method does not require complex operations and calculations, and can accurately and efficiently obtain the feature point in the to-be-tested predetermined line image.

[0053] Optionally, the at least one second image collection device includes a coarse adjustment image collection device and a fine adjustment image collection device, the image collection range of the coarse adjustment image collection device is greater than the image collection range of the fine adjustment image collection device, the fine adjustment image collection device only collects a group of to-be-tested predetermined line images, and the group of to-be-tested predetermined line images collected by the fine adjustment image collection device is collected after the workpiece moves by a first target distance to both sides along the first preset direction from the initial position, the first target distance is less than or equal to the first preset distance threshold, and the reference position point is a position point corresponding to a preset feature point on the workpiece when the workpiece is located at the initial position.

[0054] Exemplarily, the second image acquisition device can include a coarse image acquisition device (e.g., a coarse camera) and a fine image acquisition device (e.g., a fine camera), and the image acquisition range of the coarse image acquisition device is greater than the image acquisition range of the fine image acquisition device. When the predetermined line images to be measured are acquired by using the coarse image acquisition device, a plurality of groups of predetermined line images to be measured can be acquired, and the specific process can refer to the above embodiments, which will not be described herein again. When the predetermined line images to be measured are acquired by using the fine image acquisition device, only one group of predetermined line images to be measured can be acquired. Specifically, the movable platform can drive the workpiece to move a first target distance in a first preset direction from an initial position, and after the movable platform and the workpiece move the first target distance, the fine image acquisition device can acquire images of the predetermined line of the workpiece to obtain one of the group of predetermined line images to be measured. It can be understood that another predetermined line image to be measured in the group of predetermined line images to be measured is an image acquired by the fine image acquisition device for the predetermined line of the workpiece after the movable platform drives the workpiece to move the first target distance in a direction opposite to the first preset direction from the initial position. The initial position is the position of the movable platform and the workpiece when the image acquisition range of the last image acquisition device moves to the image acquisition range of the current second image acquisition device. When the fine image acquisition device is the current second image acquisition device, the last image acquisition device is the coarse image acquisition device. When the movable platform and the workpiece are located at the initial position corresponding to the fine image acquisition device, the second image acquired by the fine image acquisition device for the predetermined line of the workpiece can include a reference position point, which can be consistent with the reference position point used when the coarse image acquisition device acquires a plurality of groups of predetermined line images to be measured. In other words, the reference position point and the reference position point used when the coarse image acquisition device acquires a plurality of groups of predetermined line images to be measured are position points corresponding to the same preset feature point on the workpiece. Exemplarily, the first target distance can be less than or equal to a first preset distance threshold, which can be 0.5 times the length of the workpiece in the first preset direction, or can be the product of 0.5 times the length of the workpiece in the first preset direction and a preset proportionality coefficient, and the preset proportionality coefficient can be less than or equal to 1. The first preset distance threshold can be defined by the user according to the position of the predetermined line on the workpiece and the length of the predetermined line, and the embodiments of the present application are not limited specifically. Taking a wafer as the workpiece and a scribe lane as the predetermined line for example, the starting position and / or the end position of the scribe lane on the wafer can have a reserved interval from the edge of the wafer. For example, the starting position and the end position of the scribe lane passing through the center of the wafer are respectively 0.05 times the diameter of the wafer away from the edge of the wafer in the first preset direction, and in this case, the first preset distance threshold can be set to 0.9 times the radius of the wafer.

[0055] In the technical solution, the image acquisition range of the fine adjustment image acquisition device is small, and when the workpiece is located in the image acquisition range of the fine adjustment image acquisition device, the included angle between the predetermined line and the first preset direction is small, so that the time for image acquisition can be saved by acquiring only one group of predetermined line images. In addition, by controlling the movement distance of the workpiece to be less than or equal to the first preset distance threshold, the problem that the acquired image does not contain the position point due to the too long movement distance can be avoided.

[0056] Optionally, the at least one second image acquisition device acquires the second image in an order of gradually decreasing image acquisition ranges.

[0057] For example, the second image acquisition devices can include a coarse adjustment camera and a fine adjustment camera, and the image acquisition range of the coarse adjustment camera is greater than that of the fine adjustment camera, so that the order of acquiring the second image can be: first acquiring the second image by using the coarse adjustment camera, and then acquiring the second image by using the fine adjustment camera. In this case, the movable platform can drive the workpiece to move from the image acquisition range of the first image acquisition device (for example, which can be a wide-angle camera) to the image acquisition range of the coarse adjustment camera, and then to the image acquisition range of the fine adjustment camera.

[0058] The above technical solution is advantageous in gradually increasing the resolution of the obtained second image, so that the angle between the predetermined line of the workpiece and the first preset direction can be gradually reduced by adjusting the physical position of the workpiece based on the second image, which is helpful to improve the accuracy in subsequent processing of the workpiece.

[0059] Optionally, after adjusting the physical position of the workpiece to correct the parallelism between the at least one predetermined line on the workpiece and the first preset direction, the method further comprises: acquiring two inspection predetermined line images containing one or more predetermined lines, the two inspection predetermined line images being images acquired by the last second image acquisition device for one or more predetermined lines on the workpiece when the workpiece moves along the first preset direction; determining a third position point and a fourth position point one by one based on the two inspection predetermined line images; when the inclination angle of the line connecting the third position point and the fourth position point with respect to the first preset direction is less than or equal to a preset angle threshold, determining that the parallelism between the at least one predetermined line and the first preset direction meets the first preset requirement; and wherein the third position point and the fourth position point correspond to different feature points on the predetermined line, respectively.

[0060] Exemplarily, after the physical position of the workpiece is adjusted based on the last second image captured by the second image capturing device, the second image capturing device can be used to capture a test predetermined line image, which can be an image containing any number of predetermined lines. The test predetermined line image can be a static image or any video frame in a dynamic video. The two test predetermined line images can be two images captured when the workpiece moves in the first preset direction, or can be two images captured when the workpiece moves in the direction opposite to the first preset direction, or can be an image captured when the workpiece moves in the first preset direction and an image captured when the workpiece moves in the direction opposite to the first preset direction, respectively. Similarly, the third position point and the fourth position point are position points corresponding to different feature points on the predetermined line, respectively. The specific process of determining the third position point and the fourth position point based on the two test predetermined line images in a one-to-one correspondence can refer to the above-mentioned embodiment of sequentially determining one or more groups of position points based on a plurality of groups of to-be-measured predetermined line images and a reference position point, which will not be described again. Exemplarily, the inclination angle of the line connecting the third position point and the fourth position point with respect to the first preset direction can represent the parallel degree between the predetermined line and the first preset direction, and the inclination angle of the line connecting the third position point and the fourth position point with respect to the first preset direction can represent the inclination angle of the predetermined line with respect to the first preset direction. When the inclination angle of the line connecting the third position point and the fourth position point with respect to the first preset direction is less than or equal to a preset angle threshold, it can be considered that the parallel degree between the predetermined line and the first preset direction meets the preset requirement. The preset angle threshold can be defined by itself according to actual conditions, for example, it can be 0.1°, and the embodiment of the present application does not limit the specific value of the preset angle threshold. In some embodiments, after the physical position of the workpiece is adjusted for the last time, before the two test predetermined line images containing one or more predetermined lines are obtained, the workpiece can also be controlled to move to a position where the reference position point coincides with the center of the field of view of the last second image capturing device.

[0061] The above technical solution can verify the parallel degree of the predetermined line on the workpiece after adjusting the physical position of the workpiece, which helps to ensure the subsequent machining accuracy.

[0062] Optionally, the third position point and the fourth position point are located on two sides of the reference position point, respectively, and the two test predetermined line images are obtained after the workpiece moves second target distances to two sides from the initial position along the first preset direction, the reference position point is a position point corresponding to a preset feature point on the workpiece when the workpiece is located at the initial position, and the second target distance is less than or equal to a second preset distance threshold.

[0063] Exemplarily, one of the two verification predetermined line images can be an image collected by the last second image collection device for the predetermined line of the workpiece after the workpiece moves a second target distance in a first preset direction from the reference position point; similarly, the other image can be an image collected by the last second image collection device for the predetermined line of the workpiece after the workpiece moves the second target distance in a direction opposite to the first preset direction from the reference position point. Similarly to the first position point and the second position point, the third position point and the fourth position point can be feature points on the predetermined line included in the two verification predetermined line images, respectively. When the movable carrier and the workpiece are located at the initial position corresponding to the last second image collection device, the reference position point can be located within the image collection range of the last second image collection device, and the description about the reference position point can refer to the foregoing embodiments, which will not be described herein again. The second target distance can be less than or equal to a second preset distance threshold, which can be 0.5 times the length of the workpiece in the first preset direction, or can be a product of 0.5 times the length of the workpiece in the first preset direction and a preset proportionality coefficient, and the preset proportionality coefficient can be less than or equal to 1. The second target distance can be the same as or different from the first target distance; and the second preset distance threshold can be the same as or different from the first preset distance threshold.

[0064] The above technical solution can obtain the direction of the line connecting the third position point and the fourth position point more accurately by collecting the verification predetermined line images on both sides of the reference position point, so that the direction of the line connecting the third position point and the fourth position point can represent the direction of the predetermined line, thereby facilitating to ensure the accuracy of the verification result. In addition, by controlling the movement distance of the workpiece to be less than or equal to the second preset distance threshold, it can be avoided that the collected image does not include the position point due to the too long movement distance.

[0065] Optionally, based on the image position of the workpiece in the first image and the physical position difference between each second image acquisition device and the previous image acquisition device, the second image obtained by sequentially using at least one second image acquisition device to acquire the workpiece includes: for the first second image acquisition device, based on the image position of the first product feature in the first image, determining the first physical position difference between the physical position of the first product feature and the physical position of the field center of the first image acquisition device; according to the second physical position difference between the first second image acquisition device and the first image acquisition device and the first physical position difference, controlling the workpiece to move to the image acquisition range of the first second image acquisition device, and acquiring the second image acquired by the first second image acquisition device; for each non-first second image acquisition device, based on the image position of the first product feature in the third image acquired by the previous second image acquisition device, determining the third physical position difference between the physical position of the first product feature and the physical position of the field center of the previous second image acquisition device; according to the fourth physical position difference between the current second image acquisition device and the previous second image acquisition device and the third physical position difference, controlling the workpiece to move to the image acquisition range of the current second image acquisition device, and acquiring the second image acquired by the current second image acquisition device.

[0066] Exemplarily, when the first image acquisition device acquires the first image, the specific position point of the movable carrier can coincide with the field center of the first image acquisition device. In order to facilitate description and understanding, the following description is made with the specific position point being the center of the movable carrier (referred to as "carrier center") and the first product feature being the center of the workpiece (referred to as "product center"). In the first image, the pixel coordinates of the product center can be used as the image position of the product center, and based on the image position of the product center, the physical position of the product center can be determined. The physical position of the field center of the first image acquisition device can be represented by the physical position of the carrier center. According to the physical position of the product center and the physical position of the carrier center, the physical position difference between the product center and the carrier center can be determined, which can be used as the first physical position difference. The physical position difference between the first second image acquisition device and the first image acquisition device is referred to as the second physical position difference, and the second physical position difference can be the physical position difference between the field center of the first image acquisition device and the field center of the first second image acquisition device. According to the first physical position difference and the second physical position difference, the workpiece can be controlled to move to the image acquisition range of the first second image acquisition device. In other words, the relative position of the workpiece after moving according to the first physical position difference and the second physical position difference can be used as the relative position of the workpiece and the first second image acquisition device when acquiring the first second image.

[0067] It can be understood that, since the image acquisition range of the first image acquisition device is larger than the image acquisition range of the second image acquisition device, when the physical position of the product center does not coincide with the physical position of the table center, only controlling the movement of the workpiece according to the second physical position difference may cause the product center to fail to fall within the image acquisition range of the first second image acquisition device. Therefore, the movement of the workpiece can be controlled according to the first physical position difference and the second physical position difference, so that the product center falls within the image acquisition range of the first second image acquisition device.

[0068] Exemplarily, the second image acquired by each second image acquisition device can include an image (denoted as “initial image”) acquired when the workpiece is located at the initial position corresponding to the second image acquisition device. After the second image acquisition device completes the acquisition of the second image, the workpiece can be located at the initial position corresponding to the last second image acquisition device. According to the image position of the product center in the initial image acquired by the last second image acquisition device, a third physical position difference between the physical position of the product center and the physical position of the field center of the last second image acquisition device can be determined. According to the third physical position difference and a fourth physical position difference between the last second image acquisition device and the current second image acquisition device, the movement of the workpiece to the initial position corresponding to the current second image acquisition device can be controlled. The second image acquisition device can acquire the second image after the workpiece moves to the initial position corresponding to the current second image acquisition device. In other words, the relative position between the workpiece moved according to the third physical position difference and the fourth physical position difference and the current second image acquisition device can be used as the relative position between the workpiece and the current second image acquisition device when the current second image acquisition device acquires the second image.

[0069] The above technical solutions can quickly and accurately control the movement of the workpiece into the image acquisition range of each second image acquisition device.

[0070] Optionally, determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image comprises: converting the image position of the at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, and the initial physical position is the target physical position; or converting the image position of the at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, and determining the target physical position of the at least one predetermined line based on the initial physical position and a positioning error corresponding to the first image acquisition device, the positioning error being an error of a physical position obtained by converting an image position in the first image acquisition device according to a preset conversion relationship; wherein the preset conversion relationship is a conversion relationship between an image coordinate system used by the first image acquisition device and a world coordinate system, and the physical position is a position in the world coordinate system.

[0071] Exemplarily, the third image is an image obtained by rotating the workpiece in the first image, and thus the image position of the predetermined line in the third image can be converted into the initial physical position of the predetermined line according to the preset conversion relationship adopted by the first image acquisition device. In some embodiments, the initial physical position of the predetermined line can be taken as the target physical position of the predetermined line. In other embodiments, after the initial physical position of the predetermined line is obtained, the target physical position of the predetermined line can be determined according to the initial physical position and the positioning error of the first image acquisition device. Specifically, since the image acquisition range of the first image acquisition device is large, and accordingly the resolution thereof is small, the physical position of the predetermined line determined based on the image position of the predetermined line in the image space of the first image acquisition device has an error, i.e., a positioning error. The image space of the third image and the image space of the first image are both the image space of the first image acquisition device, and thus the initial physical position can be corrected based on the positioning error corresponding to the first image acquisition device, and the corrected physical position can be regarded as the accurate physical position of the current predetermined line, i.e., the target physical position.

[0072] The technical solution described above can quickly and accurately obtain the corrected physical position of the predetermined line by converting the image position of the third image into the initial physical position according to the preset conversion relationship, and taking the initial physical position as the target physical position, or determining the target physical position based on the initial physical position and the positioning error corresponding to the first image acquisition device, which is beneficial to the subsequent processing accuracy of the workpiece.

[0073] Optionally, the processing device further comprises a third image acquisition device, the image acquisition range of the third image acquisition device is smaller than the image acquisition range of the first image acquisition device, and before the target physical position of the at least one predetermined line is determined based on the initial physical position and the positioning error corresponding to the first image acquisition device, the determining of the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image and the preset conversion relationship further comprises: determining a sixth physical position difference between the physical position corresponding to the first product feature and the physical position corresponding to the second product feature at the same calibration moment based on at least a fifth physical position difference between the physical position corresponding to the first image acquisition device and the physical position corresponding to the third image acquisition device, the sixth physical position difference representing the positioning error; wherein the first product feature is a feature on the third image, the second product feature is a feature on a fourth image, the fourth image is an image acquired by the third image acquisition device for the workpiece, and the first product feature and the second product feature correspond to the same feature on the workpiece.

[0074] Exemplarily, the processing device can further include a third image acquisition device with an image acquisition range smaller than that of the first image acquisition device. Since the resolutions of the images acquired by the first and third image acquisition devices are different, there is a difference between the image positions corresponding to the two, and there is also a difference between the physical positions corresponding to the two at the same time (referred to herein as a calibration time). Detecting such a difference can help obtain the error of the initial physical position of any predetermined line determined based on the third image, which can be regarded as the positioning error of the first image acquisition device. The second physical position difference (ΔX2, ΔY2) between the physical position corresponding to the first product feature and the physical position corresponding to the second product feature at the same calibration time can be determined at least according to the fifth physical position difference (ΔX1, ΔY1) between the first image acquisition device and the third image acquisition device. The fifth physical position difference can be obtained in any manner. The fourth image can represent an image acquired by the third image acquisition device. The fourth image contains the second product feature. The first product feature and the second product feature correspond to the same feature on the workpiece to be processed. For example, both can be the center of the scribe lane at the centermost position on the wafer, which is also the center of the wafer. In one example, the first image acquisition device is a wide-angle camera that can acquire a first image containing the entire wafer. Based on the first image acquired by the wide-angle camera, only a rough position of the wafer center can be determined, that is, due to resolution and other issues, the wafer center cannot be accurately identified from the first image, and the position of the scribe lane center coinciding with the wafer center cannot be accurately identified. The third image acquisition device can be a fine adjustment camera that can acquire a relatively clear scribe lane center within its field of view. Preferably, the field of view (i.e., the image acquisition range) of the fine adjustment camera can be set to only acquire a single scribe lane center each time, and the scribe lane center coinciding with the wafer center can be placed within the field of view of the fine adjustment camera, or other scribe lane centers can be excluded by shielding them, so that the fourth image acquired by the fine adjustment camera contains only the scribe lane center coinciding with the wafer center. Based on the fourth image acquired by the fine adjustment camera, the position of the scribe lane center coinciding with the wafer center can be identified therefrom. As can be seen from the above, the first product feature identified from the first image acquired by the wide-angle camera is a relatively rough wafer center, and the second product feature identified from the fourth image acquired by the fine adjustment camera is a relatively accurate scribe lane center coinciding with the wafer center, that is, a relatively accurate wafer center. It can be seen that the first product feature and the second product feature essentially correspond to the same feature, but due to the resolution of the images acquired by the two image acquisition devices, there is a difference between the image positions corresponding to the two, and there is also a difference (i.e., a sixth physical position difference) between the physical positions corresponding to the two at the calibration time. The sixth physical position difference can be regarded as the positioning error of the first image acquisition device.

[0075] The technical solution above acquires images of the workpiece to be processed by using two image acquisition devices with different field of view. The image acquired by the first image acquisition device with large field of view can be used for rough positioning of the predetermined line to obtain the initial physical position of the predetermined line, the positioning deviation of the predetermined line is determined according to the deviation between the product features on the images acquired by the two image acquisition devices, and the accurate positioning result of the predetermined line is obtained based on the positioning deviation and the rough positioning result of the predetermined line.

[0076] Optionally, the third image acquisition device is any of the at least one second image acquisition device.

[0077] Exemplarily, any of the second image acquisition devices can be used as the third image acquisition device. For example, when the second image acquisition device includes a fine adjustment camera and a coarse adjustment camera, the third image acquisition device can be the coarse adjustment camera in the second image acquisition device, or can be the fine adjustment camera in the second image acquisition device.

[0078] The technical solution above can save the hardware cost for determining the positioning error corresponding to the first image acquisition device by using any image acquisition device as the second image acquisition device, and can save the time for repeated image acquisition.

[0079] Optionally, before acquiring the first image of the workpiece acquired by the first image acquisition device, the method further includes: acquiring a fifth image of the workpiece acquired by the first image acquisition device; determining the included angle between the feature edge on the workpiece and the second preset direction in the fifth image; and controlling the workpiece to rotate based on the included angle so that the parallel degree between the feature edge and the second preset direction meets the second preset requirement.

[0080] Exemplarily, before the first image is collected, the first image collection device can be used to collect an image of the workpiece to obtain a fifth image. It can be understood that the fifth image can include the entire workpiece, and accordingly can include a characteristic edge on the workpiece. The characteristic edge can be an edge on the workpiece itself. Taking a wafer as an example, the characteristic edge can be a specific cutting path edge on the wafer, for example, a cutting path edge passing through the center of the wafer in the second preset direction. Exemplarily, the characteristic edge of the workpiece in the fifth image can be identified based on an image recognition algorithm, and the workpiece can be controlled to rotate according to the included angle between the characteristic edge on the workpiece and the second preset direction. For example, if the characteristic edge is counterclockwise inclined by 1° with respect to the second preset direction, the movable stage can be controlled to rotate clockwise by 1° around the rotation axis to drive the workpiece to rotate clockwise by 1°. The second preset direction can be regarded as the direction of the characteristic edge in an ideal state (which is a theoretical direction), and the second preset direction can be the same as or different from the first preset direction. The second preset requirement can be, for example, that the included angle between the characteristic edge and the second preset direction is less than or equal to a preset included angle threshold.

[0081] The above technical solution can first correct the physical position of the workpiece according to the fifth image collected by the first image collection device, which helps to make the parallelism between the predetermined line and the first preset direction higher when the second image is collected, and can make the position accuracy (i.e., the parallelism between the first preset direction) of the corrected predetermined line higher when the position of the workpiece is adjusted based on the second image.

[0082] Optionally, the preset conversion relationship is a conversion relationship between an image coordinate system used by the first image collection device and a world coordinate system, the physical position is a position in the world coordinate system, the world coordinate system includes a first coordinate axis, a second coordinate axis and a third coordinate axis, the workpiece can be translated along the first coordinate axis and the second coordinate axis and rotated around the third coordinate axis, and the method further includes: recording a first rotation angle of the workpiece around the third coordinate axis when the first image collection device collects the first image; recording a second rotation angle of the workpiece around the third coordinate axis after the physical position of the workpiece is adjusted; and wherein the rotation angle of the workpiece before and after the correction is a difference between the second rotation angle and the first rotation angle.

[0083] Exemplarily, the axes where the two grating scales of the movable platform are located can be respectively the first coordinate axis and the second coordinate axis of the coordinate system, and the straight line where the rotation axis of the movable platform is located can be the third coordinate axis. When the first image acquisition device acquires the first image, the first rotation angle of the workpiece around the third coordinate axis can be obtained. Specifically, a reference line can be preset in the world coordinate system, the reference line can be parallel to the first coordinate axis or the second coordinate axis, and a reference line can be preset on the movable platform, and the included angle between the reference line and the reference line can be taken as the rotation angle of the movable platform around the third coordinate axis. It can be understood that when the first image acquisition device acquires the first image, the included angle between the reference line of the movable platform and the reference line can be taken as the first rotation angle of the workpiece around the third coordinate axis. Similarly, after adjusting the physical position of the workpiece, the included angle between the reference line of the movable platform and the reference line can be taken as the second rotation angle of the workpiece around the third coordinate axis. The difference between the second rotation angle and the first rotation angle can be regarded as the rotation angle of the workpiece before and after correction.

[0084] The above technical solution can quickly and accurately obtain the rotation angle of the workpiece during correction, so that the target physical position obtained by converting the image position of the workpiece in the third image is relatively accurate.

[0085] According to another aspect of the present application, a machining device is also provided, which comprises a first image acquisition device, at least one second image acquisition device, and a control device, the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the control device is used to execute the above-mentioned predetermined line position determination method for the machining device.

[0086] Please refer to Figure 2 Fig. 1 shows a structure schematic diagram of a machining device according to an embodiment of the present application. Figure 2 The machining device shown can comprise a first image acquisition device 202, a coarse adjustment image acquisition device 203, a fine adjustment image acquisition device 204, and a control device 205. Figure 2The first image acquisition device 202 has a larger image acquisition range than the coarse adjustment image acquisition device 203, and the coarse adjustment image acquisition device 203 has a larger image acquisition range than the fine adjustment image acquisition device 204. The first image acquired by the first image acquisition device 202 can include the entire workpiece, and the second image acquired by the coarse adjustment image acquisition device 203 and the fine adjustment image acquisition device 204 can include part of the workpiece. The processing device can further include a movable platform 201, which can move linearly in a horizontal plane along a first preset direction and a second preset direction, and can also rotate around a rotation axis passing through the center of the platform in the horizontal plane. The first image acquisition device 202 can first acquire an image of the workpiece on the movable platform 201 to obtain a first image. The control device can obtain the first image, and based on the physical position difference between the first image acquisition device 202 and the coarse adjustment image acquisition device 203, and the image position of the workpiece in the first image, control the movable platform 201 to move from the image acquisition range of the first image acquisition device 202 to the image acquisition range of the coarse adjustment image acquisition device 203. The control device can also obtain the second image acquired by the coarse adjustment image acquisition device 203, and based on the second image acquired by the coarse adjustment image acquisition device 203, control the movable platform 201 to rotate to correct the parallelism between at least one predetermined line on the workpiece and the first preset direction. After correcting the predetermined line on the workpiece based on the second image acquired by the coarse adjustment image acquisition device 203, the control device can control the movable platform 201 to move from the image acquisition range of the coarse adjustment image acquisition device 203 to the image acquisition range of the fine adjustment image acquisition device 204 based on the physical position difference between the coarse adjustment image acquisition device 203 and the fine adjustment image acquisition device 204. Alternatively, the control device can control the movable platform 201 to move from the image acquisition range of the coarse adjustment image acquisition device 203 to the image acquisition range of the fine adjustment image acquisition device 204 based on the physical position difference between the coarse adjustment image acquisition device 203 and the fine adjustment image acquisition device 204, and the image position of the workpiece in the second image acquired by the coarse adjustment image acquisition device 203. After the fine adjustment image acquisition device 204 acquires the second image, the control device can control the movable platform 201 to rotate based on the second image acquired by the fine adjustment image acquisition device 204 to correct the parallelism between at least one predetermined line on the workpiece and the first preset direction again. The control device can also rotate the workpiece in the first image according to the rotation angle of the workpiece before and after correction to obtain a third image, and determine the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image. The processing device can further include a processing head 205, and the control device can control the processing head 205 to process the workpiece based on the determined target physical position after determining the target physical position of the at least one predetermined line.

[0087] Referring to Figure 3 As shown in Fig. 3, which is a schematic block diagram of the electronic device 300 according to an embodiment of the present application, according to still another aspect of the present application, an electronic device is also provided, comprising a processor 310 and a memory 320, wherein the memory 320 stores computer program instructions, and the computer program instructions are used to execute the above-mentioned predetermined line position determination method for a machining device when executed by the processor 310.

[0088] According to still another aspect of the present application, a storage medium is also provided, on which program instructions are stored, and the program instructions cause a computer or a processor to execute the above-mentioned corresponding steps of the predetermined line position determination method for a machining device according to an embodiment of the present application, and are used to implement corresponding modules in the above-mentioned machining device according to an embodiment of the present application or the above-mentioned corresponding modules for a machining device. The storage medium may, for example, include a memory card of a smart phone, a memory component of a tablet computer, a hard disk of a personal computer, a read-only memory (ROM), an erasable programmable read-only memory (EPROM), a portable compact disc read-only memory (CD-ROM), a USB memory, or any combination of the above-mentioned storage media. The computer-readable storage medium can be any combination of one or more computer-readable storage media.

[0089] According to still another aspect of the present application, a computer program product is also provided, comprising computer program instructions, which are used to execute the above-mentioned predetermined line position determination method for a machining device when executed.

[0090] Those skilled in the art can understand the specific implementation and advantages of the above-mentioned machining device by reading the above-mentioned specific description of the predetermined line position determination method for a machining device, and for brevity, will not be described here.

[0091] Although the example embodiments have been described herein with reference to the accompanying drawings, it is to be understood that the example embodiments are only exemplary and are not intended to limit the scope of the present application. Those skilled in the art can make various changes and modifications without departing from the scope and spirit of the present application. All these changes and modifications are intended to be included within the scope of the present application as claimed in the appended claims.

[0092] Those skilled in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be realized in electronic hardware, or a combination of computer software and electronic hardware. Whether the functions are executed in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present application.

[0093] In several embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are merely schematic, and the division of units is merely a logical functional division. In actual implementation, another division manner can be used, for example, a plurality of units or components can be combined or integrated into another device, or some features can be omitted or not executed.

[0094] In the specification provided herein, a large number of specific details are described. However, it can be understood that the embodiments of the present application can be practiced without these specific details. In some examples, well-known methods, structures and techniques are not described in detail in order not to obscure the understanding of the present specification.

[0095] Similarly, it should be appreciated that the individual features of the application described in the description of the exemplary embodiments of the application are sometimes grouped together in a single embodiment, figure or description of a related item. However, this method of the application should not be construed to reflect an intention that the application requires more features than are explicitly recited in each claim. Rather, it is intended that the application lie in at least as many embodiments as there are individual features that can be presented in a separate claim. Thus, the following claims are hereby expressly incorporated into this detailed description of the specifically disclosed embodiments of the application, to the extent that specific claims express the application that can be addressed by less than all of the features of a disclosed embodiment. The applicant hereby gives permission for any instrument to be used by those skilled in the art to determine essential features of an application defined in any claim. The applicant hereby states that any claim that is necessarily dependent upon another claim should be interpreted as including a feature recited in the base claim or in any other claim that the base claim depends upon, and the application based on such claim should not be limited to the features of the specific base claim. Thus, following the specific description of embodiments of the application, the claims hereinafter are hereby expressly incorporated into this detailed description of the specifically disclosed embodiments of the application, to the extent that specific claims express the application that can be addressed by less than all of the features of a disclosed embodiment. The applicant hereby gives permission for any instrument to be used by those skilled in the art to determine essential features of an application defined in any claim. The applicant hereby states that any claim that is necessarily dependent upon another claim should be interpreted as including a feature recited in the base claim or in any other claim that the base claim depends upon, and the application based on such claim should not be limited to the features of the specific base claim.

[0096] Those skilled in the art can understand that, except for mutual exclusion between features, any combination of all features disclosed in the specification (including the accompanying claims, abstract and drawings) and all processes or units of any method or device disclosed in this way can be combined. Unless explicitly stated otherwise, each feature disclosed in the specification (including the accompanying claims, abstract and drawings) can be replaced by an alternative feature that provides the same, equivalent or similar purpose.

[0097] In addition, those skilled in the art can understand that although some embodiments herein include certain features rather than others included in other embodiments, the combination of features of different embodiments means that it is within the scope of the application and forms different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0098] The various component embodiments of the present invention can be implemented in hardware, or as software modules running on one or more processors, or a combination thereof. Those skilled in the art will understand that microprocessors or digital signal processors (DSPs) can be used in practice to implement some or all of the functions of some modules in the processing apparatus according to embodiments of the present invention. The present invention can also be implemented as an apparatus program (e.g., a computer program and computer program product) for performing some or all of the methods described herein. Such programs implementing the present invention can be stored on a computer-readable medium or can be in the form of one or more signals. Such signals can be downloaded from an Internet website, provided on a carrier signal, or provided in any other form.

[0099] It should be noted that the above embodiments are illustrative of the invention and not restrictive, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The invention can be implemented by means of hardware comprising several different elements and by means of a suitably programmed computer. In the unit claims enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

[0100] The above are merely specific embodiments or descriptions of the present invention, and the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. The scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A method for determining a predetermined line position for a processing device, characterized in that, The predetermined line is a feature line on the workpiece to be processed, the processing device comprises a first image acquisition device and at least one second image acquisition device, the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the method comprises: acquiring a first image of the workpiece to be processed acquired by the first image acquisition device, wherein the first image comprises the entire workpiece to be processed; acquiring second images obtained by sequentially using the at least one second image acquisition device to acquire the workpiece to be processed, wherein when the second images are acquired, the relative position of the workpiece to be processed and the corresponding second image acquisition device is determined based on the image position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the last image acquisition device; adjusting the physical position of the workpiece to be processed based on the second images to correct the parallelism between at least one predetermined line on the workpiece to be processed and a first preset direction; rotating the workpiece to be processed in the first image according to the rotation angle of the workpiece to be processed before and after correction to obtain a third image; determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image.

2. The method of claim 1, wherein, The method further comprises: after acquiring the second image by using each second image acquisition device, determining the inclination angle of the at least one predetermined line relative to the first preset direction based on the currently acquired second image, and adjusting the physical position of the workpiece to be processed according to the inclination angle to correct the parallelism between the at least one predetermined line on the workpiece to be processed and the first preset direction.

3. The method of claim 2, wherein, The method further comprises: acquiring a plurality of groups of predetermined line images to be tested containing one or more predetermined lines, each group of predetermined line images to be tested being an image obtained by the second image acquisition device for image acquisition of the one or more predetermined lines on the workpiece to be processed when the workpiece to be processed moves along the first preset direction, and the second image comprising the plurality of groups of predetermined line images to be tested. determining one or more groups of position points based on the plurality of groups of to-be-tested predetermined line images and the reference position point, each group of position points comprising a first position point and a second position point, the first position point and the second position point being located on two sides of the reference position point respectively and along the first preset direction, the interval between the two position points included in each group of position points gradually increases, the plurality of groups of to-be-tested predetermined line images correspond to the plurality of groups of position points one by one, any group of to-be-tested predetermined line images comprises two to-be-tested predetermined line images corresponding to the first position point and the second position point in the corresponding group of position points respectively, and the inclination angle of the line connecting the first position point and the second position point in each group of position points relative to the first preset direction represents the inclination angle of the at least one predetermined line relative to the first preset direction; after each group of position points is determined, adjusting the physical position of the workpiece according to the inclination angle of the line connecting the first position point and the second position point in the group of position points relative to the first preset direction, so as to correct the parallel degree between the at least one predetermined line and the first preset direction; wherein, among the reference position point and the plurality of groups of position points, different position points are position points corresponding to different feature points on the predetermined line.

4. The method of claim 3, wherein, The method further comprises: obtaining a template image, wherein the template image comprises a position feature associated with the predetermined line and a reference point; matching the template image with each predetermined line image of the plurality of groups of to-be-tested predetermined line images according to the position feature included in the template image; for each to-be-tested predetermined line image, determining a point corresponding to the reference point in the template image in the to-be-tested predetermined line image as a feature point corresponding to the to-be-tested predetermined line image based on the matching result, and determining the reference position point and the one or more groups of position points based on the feature point.

5. The method of claim 3, wherein, The at least one second image acquisition device comprises a coarse adjustment image acquisition device and a fine adjustment image acquisition device, the image acquisition range of the coarse adjustment image acquisition device is greater than the image acquisition range of the fine adjustment image acquisition device, the fine adjustment image acquisition device only acquires one group of to-be-tested predetermined line images, the group of to-be-tested predetermined line images acquired by the fine adjustment image acquisition device is acquired after the workpiece moves a first target distance to both sides along the first preset direction from an initial position, the first target distance is less than or equal to a first preset distance threshold, and the reference position point is a position point corresponding to a preset feature point on the workpiece when the workpiece is located at the initial position.

6. The method according to any one of claims 2-5, characterized in that, The at least one second image acquisition device acquires the second image in an order of gradually decreasing image acquisition ranges.

7. The method according to any one of claims 2-5, characterized in that, After the physical position of the workpiece is adjusted to correct the parallel degree between the at least one predetermined line on the workpiece and the first preset direction, the method further comprises: obtaining two inspection predetermined line images containing one or more predetermined lines, the two inspection predetermined line images being images obtained by a last second image acquisition device when the workpiece moves along the first preset direction, and the one or more predetermined lines on the workpiece are imaged; determining a third position point and a fourth position point one by one based on the two inspection predetermined line images; when the inclination angle of the line connecting the third position point and the fourth position point relative to the first preset direction is less than or equal to a preset angle threshold, determining that the parallel degree between the at least one predetermined line and the first preset direction meets a first preset requirement; wherein the third position point and the fourth position point correspond to different feature points on the predetermined line respectively.

8. The method of claim 7, wherein, The third position point and the fourth position point are located on both sides of a reference position point, and the two inspection predetermined line images are obtained after the workpiece moves along the first preset direction by a second target distance from an initial position to both sides, and the reference position point is a position point corresponding to a preset feature point on the workpiece when the workpiece is located at the initial position, and the second target distance is less than or equal to a second preset distance threshold.

9. The method of any one of claims 1-5, wherein the obtaining sequentially uses second images obtained by the at least one second image acquisition device for the workpiece, comprising: for a first second image acquisition device, determining a first physical position difference between the physical position of the first product feature and the physical position of the center of the field of view of the first image acquisition device based on the image position of the first product feature in the first image; controlling the workpiece to move to the image acquisition range of the first second image acquisition device according to the second physical position difference between the first second image acquisition device and the first image acquisition device and the first physical position difference, and obtaining the second image acquired by the first second image acquisition device; for each non-first second image acquisition device, determining a third physical position difference between the physical position of the first product feature and the physical position of the center of the field of view of the last second image acquisition device based on the image position of the first product feature in the second image acquired by the last second image acquisition device; controlling the workpiece to move to the image acquisition range of the current second image acquisition device according to the fourth physical position difference between the current second image acquisition device and the last second image acquisition device and the third physical position difference, and obtaining the second image acquired by the current second image acquisition device.

10. The method according to any one of claims 1 to 5, characterized in that, the determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image, comprising: converting the image position of the at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, the initial physical position being the target physical position; or, The image position of the at least one predetermined line in the third image is converted according to the preset conversion relationship to obtain an initial physical position of the at least one predetermined line, and a target physical position of the at least one predetermined line is determined based on the initial physical position and a positioning error corresponding to the first image acquisition device, the positioning error being an error of a physical position obtained by converting an image position in the first image acquisition device according to the preset conversion relationship; The preset conversion relationship is a conversion relationship between an image coordinate system adopted by the first image acquisition device and a world coordinate system, and the physical position is a position in the world coordinate system.

11. The method of claim 10, wherein, The processing device further comprises a third image acquisition device, and an image acquisition range of the third image acquisition device is smaller than an image acquisition range of the first image acquisition device. Before the target physical position of the at least one predetermined line is determined based on the initial physical position and the positioning error corresponding to the first image acquisition device, the target physical position of the at least one predetermined line is further determined based on the image position of the at least one predetermined line in the third image and the preset conversion relationship, and the method further comprises: determining a sixth physical position difference between the physical position corresponding to the first product feature and the physical position corresponding to the second product feature at the same calibration moment based on at least a fifth physical position difference between the physical position corresponding to the first image acquisition device and the physical position corresponding to the third image acquisition device, the sixth physical position difference representing the positioning error; The first product feature is a feature on the third image, the second product feature is a feature on a fourth image, the fourth image is an image of the workpiece acquired by the third image acquisition device, and the first product feature and the second product feature correspond to the same feature on the workpiece.

12. The method of claim 10, when dependent on claim 2, wherein, The third image acquisition device is any one of the at least one second image acquisition device.

13. The method according to any one of claims 1-5, characterized in that, Before the first image of the workpiece acquired by the first image acquisition device is obtained, the method further comprises: acquiring a fifth image of the workpiece acquired by the first image acquisition device; determining an included angle between a feature edge on the workpiece in the fifth image and a second preset direction; controlling the workpiece to rotate based on the included angle, so that a parallel degree between the feature edge and the second preset direction meets a second preset requirement.

14. The method according to any one of claims 1-5, characterized in that, The preset conversion relationship is a conversion relationship between an image coordinate system adopted by the first image acquisition device and a world coordinate system, and the physical position is a position in the world coordinate system. The world coordinate system comprises a first coordinate axis, a second coordinate axis and a third coordinate axis. The workpiece can be translated along the first coordinate axis and the second coordinate axis and rotated around the third coordinate axis. The method further comprises: recording a first rotation angle of the workpiece around the third coordinate axis when the first image acquisition device acquires the first image; After the physical position of the workpiece is adjusted, a second rotation angle of the workpiece around the third coordinate axis is recorded; The rotation angle of the workpiece before and after the correction is a difference between the second rotation angle and the first rotation angle.

15. A processing device, characterized by The method comprises a first image acquisition device, at least one second image acquisition device, and a control device. The image acquisition range of the at least one second image acquisition device is smaller than that of the first image acquisition device. The control device is used to execute the predetermined line position determination method for a machining device according to any one of claims 1-14.

16. An electronic device comprising a processor and a memory, characterized in that The memory stores computer program instructions, which, when executed by the processor, are used to execute the predetermined line position determination method for a machining device according to any one of claims 1-14.

17. A storage medium having stored thereon program instructions, the program instructions being executable by a processor to cause the processor to execute operations comprising: The program instructions, when executed, are used to execute the predetermined line position determination method for a machining device according to any one of claims 1-14.

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