Processing apparatus and semiconductor device

Abstract

The application provides a processing device and a semiconductor device. The processing device comprises a cavity, a lamp head and a connecting body. The peripheral wall of the cavity is provided with a plurality of connecting shafts which are arranged at intervals along the circumference of the cavity and extend along the radial direction of the cavity. The lamp head is located on one side of the cavity in the axial direction of the cavity. The connecting body is in abutment with the lamp head. The connecting body comprises a plurality of connecting pieces which are located outside the cavity and arranged at intervals along the circumference of the cavity. Each connecting piece is provided with a matching groove which penetrates the connecting piece. The connecting body can rotate relative to the cavity and drive the lamp head to move relative to the cavity. Each connecting piece can move relative to the connecting shaft. Each connecting shaft can enter the matching groove and abut against the inner wall of the matching groove. In the case that each connecting shaft abuts against the inner wall of the matching groove, the cavity is assembled with the lamp head through the connecting body, which is conducive to improving the stability and reliability of the assembled lamp head and cavity.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of integrated circuit manufacturing, and particularly relates to a processing device and a semiconductor equipment. BACKGROUND

[0002] In the process of manufacturing various semiconductor products (for example, chips), an epitaxy (EPI) layer needs to be formed on the surface of a wafer through a processing device of a semiconductor equipment. The processing device comprises a cavity and a lamp head, and the lamp head is mounted on the cavity. The cavity is used for accommodating the wafer, and the lamp head is used for heating the wafer. In the process of growing the epitaxy layer, the processing device adjusts the temperature of the wafer through the lamp head to control the crystal direction and the growth rate of the epitaxy layer formed on the surface of the wafer. The existing lamp head and the cavity are mounted together through a buckle. However, since the buckle is easy to deform, the lamp head and the cavity have the problems of insufficient installation precision and reliability after being assembled. SUMMARY

[0003] The present application provides a processing device and a semiconductor equipment, and aims to solve the problem of insufficient installation precision and reliability of the lamp head and the cavity after being assembled.

[0004] In a first aspect, an embodiment of the present application provides a processing device, and the processing device comprises:

[0005] a cavity, a plurality of connecting shafts are arranged on a peripheral wall of the cavity, the plurality of connecting shafts are arranged at intervals along a circumferential direction of the cavity and extend along a radial direction of the cavity;

[0006] a lamp head, the lamp head is located on one side of the cavity in an axial direction of the cavity; and

[0007] a connecting body, the connecting body abuts against the lamp head, the connecting body comprises a plurality of connecting pieces, the plurality of connecting pieces are located outside the cavity and arranged at intervals along the circumferential direction of the cavity, each connecting piece is provided with a matching groove, and the matching groove penetrates through the connecting piece;

[0008] wherein the connecting body can rotate relative to the cavity and drive the lamp head to move relative to the cavity, each connecting piece can move relative to the connecting shaft, and each connecting shaft can enter the matching groove and abut against an inner wall of the matching groove.

[0009] The processing device provided by the application can be applied to a semiconductor device, and the processing device can be accommodated in a shell of the semiconductor device. In the processing device provided by the application, the cavity is used to accommodate a wafer, the lamp head can emit heat light to heat the wafer, and an operator can adjust the temperature of the wafer by controlling the light-emitting efficiency of the lamp head, so as to form an epitaxial layer on the surface of the wafer. The connecting body can rotate relative to the cavity and drive the lamp head to move relative to the cavity, each connecting piece can move relative to the connecting shaft, and each connecting shaft can enter the matching groove and abut against the inner wall of the matching groove. In the case that each connecting shaft abuts against the inner wall of the matching groove, under the action of no external force, through the cooperation of the connecting shaft and the matching groove, the connecting body is relatively fixed with the cavity in the axial direction of the cavity, that is, the connecting body and the cavity cannot move relative to each other in the axial direction of the cavity, and the lamp head abutting against the connecting body cannot move relative to the cavity in the axial direction of the cavity. That is, through the cooperation of the connecting shaft and the matching groove, the cavity and the lamp head cannot move relative to each other in the axial direction of the cavity, and the cavity is assembled with the lamp head through the connecting body.

[0010] Compared with the existing scheme in which the cavity and the lamp head are assembled through buckling, on the one hand, the connecting body is not easy to deform, which is beneficial to improve the installation precision of the assembled lamp head and cavity, the stability and reliability of the assembled lamp head and cavity, and the structural stability of the processing device; on the other hand, the operator only needs to rotate the connecting body relative to the cavity to realize the assembly of the lamp head and the cavity, which is not only simple to operate and convenient to assemble, but also ensures that the processing device accommodated in the shell of the semiconductor device can be assembled on one side, avoids surrounding the processing device to realize the assembly of the cavity and the lamp head, and further avoids reserving an installation operation space in the shell for the assembly of the lamp head and the cavity, which is beneficial to the miniaturization design of the shell and further beneficial to the miniaturization design of the semiconductor device.

[0011] In a possible implementation, the matching groove includes an open groove and a clamping groove, the open groove and the clamping groove are sequentially communicated along the circumference of the cavity, and the open groove extends through the connecting piece along the circumference of the cavity.

[0012] Each connecting shaft can enter the clamping groove from the open groove and abut against the inner wall of the clamping groove; in the case that the connecting shaft is located in the open groove, the lamp head and the cavity have a spacing in the axial direction of the cavity, and in the process that each connecting shaft moves from the open groove to the clamping groove, the connecting body drives the lamp head to move towards the cavity.

[0013] Since the connecting body drives the lamp head to move towards the cavity along the axial direction of the cavity in the process that the connecting shaft moves from the opening slot to the clamping slot, the distance between the lamp head and the cavity in the axial direction of the cavity gradually decreases in the process of assembling the lamp head and the cavity, which is beneficial to reducing the size of the lamp head and the cavity in the axial direction of the cavity after the lamp head and the cavity are assembled, facilitating the miniaturization design of the processing device; on the other hand, it is beneficial to shorten the distance between the heating light emitted by the lamp head and the wafer accommodated in the cavity, and to improve the heating efficiency of the lamp head on the wafer, facilitating the formation of an epitaxial layer on the wafer surface.

[0014] In a possible implementation, the lamp head and the cavity are in abutment when the connecting shaft is located in the clamping slot.

[0015] In a possible implementation, the lamp head and the cavity are in abutment when the connecting shaft is located in the clamping slot, that is, when the lamp head and the cavity are assembled together by the connecting body, which is beneficial to improving the structural stability of the lamp head and the cavity after being assembled, and further improving the structural stability of the processing device.

[0016] In a possible implementation, the inner wall of the clamping slot includes a clamping surface perpendicular to the axial direction of the cavity, and the inner wall of the opening slot includes a guide surface connected with the clamping surface, the guide surface is arranged to be inclined relative to the clamping surface, so that the caliber of the fitting slot presents a decreasing trend from the opening slot to the clamping slot; wherein, the connecting shaft is in abutment with the guide surface when the connecting shaft is located in the opening slot, and the connecting shaft is in abutment with the clamping surface when the connecting shaft is located in the clamping slot.

[0017] Since the guide surface is arranged to be inclined relative to the clamping surface in the axial direction of the cavity, so that the caliber of the fitting slot presents a decreasing trend from the opening slot to the clamping slot, and the connecting shaft is in abutment with the guide surface when the connecting shaft is located in the opening slot; in this way, the connecting shaft moves from the opening slot to the clamping slot along the guide surface, and in this process, the connecting body drives the lamp head to move towards the cavity along the axial direction of the cavity through the cooperation between the guide surface and the connecting shaft.

[0018] In addition, since the clamping surface is perpendicular to the axial direction of the cavity, and the connecting shaft is in abutment with the clamping surface when the connecting shaft is located in the clamping slot; through the cooperation between the connecting shaft and the clamping surface, the connecting body cannot drive the lamp head to move along the axial direction of the cavity without external force. The lamp head and the cavity are relatively fixed in the axial direction of the cavity. The lamp head and the cavity are assembled together through the connecting body. The design of the guide surface is beneficial to improving the movement accuracy of the lamp head moving towards the cavity, and is beneficial to improving the structural stability of the lamp head and the cavity in the assembling process, facilitating the assembly. The design of the cooperation between the clamping surface and the connecting shaft to realize the assembly of the lamp head and the cavity not only has a simple structure, is convenient for design, but also is not easy to deform, and is beneficial to improving the structural stability and reliability of the cavity and the lamp head after being assembled.

[0019] In a possible implementation, the guide surface is away from the lamp head relative to the clamping surface.

[0020] In a possible implementation, the included angle between the guide surface and the clamping surface is greater than 0° and less than 60°.

[0021] In this way, the connecting shaft is prevented from being separated from the fitting groove in the open groove, which facilitates the movement of the connecting shaft from the open groove to the clamping groove of the connecting member, and further facilitates the assembly of the lamp head and the cavity.

[0022] In a possible implementation, the connecting shaft comprises a bearing, the bearing is located outside the cavity, and the connecting body is rotatable relative to the cavity. The bearing of each connecting shaft can enter the fitting groove and abut against the inner wall of the fitting groove.

[0023] During the rotation of the connecting body relative to the cavity and the movement of each connecting member relative to the connecting shaft, the connecting shaft abuts against the inner wall of the fitting groove through the bearing. The design of the bearing can prevent the connecting shaft from directly contacting the connecting member, which facilitates the conversion of the sliding friction between the connecting member and the connecting shaft into rolling friction, reduces the friction between the connecting member and the connecting shaft, and reduces the operation resistance of the connecting body relative to the cavity, thereby saving labor and facilitating assembly.

[0024] In a possible implementation, the connecting body comprises a connecting ring, the plurality of connecting members are fixedly connected with the connecting ring and are arranged at intervals in the circumferential direction of the connecting ring. In the axial direction of the cavity, the connecting ring is located on the side of the lamp head away from the cavity and is sleeved on the outside of the lamp head.

[0025] In this way, the plurality of connecting members form a whole through the connecting ring, which facilitates the improvement of the overall structural stability of the connecting body. Moreover, the connecting ring is located on the side of the lamp head away from the cavity and is sleeved on the outside of the lamp head in the axial direction of the cavity, which facilitates the reduction of the size of the connecting body and the lamp head in the axial direction of the cavity, and further facilitates the miniaturization design of the processing device.

[0026] In a possible implementation, the connecting member comprises a first connecting part and a second connecting part. The first connecting part comprises a first wall surface and a second wall surface. In the radial direction of the cavity, the first wall surface faces the cavity, and the second wall surface faces away from the cavity. The first connecting part is provided with a fitting groove extending from the first wall surface to the second wall surface in the radial direction of the cavity. The second connecting part is fixedly connected to the first wall surface. The connecting ring is located on the side of the second connecting part away from the first wall surface and is fixedly connected with the second connecting part. In the axial direction of the cavity, the second connecting part is located on the side of the lamp head away from the cavity and abuts against the lamp head.

[0027] In this way, since the second connecting part abuts against the lamp head, the connecting member drives the lamp head to move relative to the cavity through the second connecting part during the movement of the connecting shaft relative to the connecting member.

[0028] In a possible implementation, the second connecting part is provided with a lubricating member facing the surface of the cavity, and the lamp head is mounted on the lubricating member.

[0029] It can be understood that, during the rotation of the connecting body relative to the cavity and the movement of the connecting shaft relative to the connecting member, i.e., during the assembly of the lamp head and the cavity, the connecting body rotates relative to the lamp head, and there is a frictional resistance between the second connecting part of the connecting member and the lamp head. Since the second connecting part is provided with a lubricating member facing the surface of the cavity, and the lamp head is mounted on the lubricating member, the second connecting part contacts the lamp head through the lubricating member, and the design of the lubricating member is conducive to reducing the frictional resistance between the second connecting part and the lamp head, improving the smoothness of the rotation of the connecting body relative to the cavity, and facilitating the assembly of the lamp head and the cavity.

[0030] In a possible implementation, the lamp head comprises a main body part and a fitting part, the fitting part is arranged around the main body part, and, in the axial direction of the cavity, the connecting ring is located on the side of the fitting part away from the cavity and is sleeved on the outside of the main body part, and the fitting part abuts against the surface of the lubricating member away from the second connecting part.

[0031] In a possible implementation, the connecting member is provided with an assembly hole penetrating through the connecting member, the cavity is provided with a fixing hole extending along the radial direction of the cavity and having an opening, the opening of the fixing hole is located on the peripheral wall of the cavity, and the processing device further comprises a locking shaft.

[0032] In the case where the connecting shaft is located in the clamping groove, the projection of the fixing hole overlaps the projection of the assembly hole of one connecting member in the radial direction of the cavity, and the locking shaft passes through the fixing hole and is sleeved in the assembly hole.

[0033] It can be understood that, during the rotation of the connecting body relative to the cavity and the movement of the connecting shaft relative to the connecting member, i.e., during the assembly of the lamp head and the cavity, the connecting body rotates relative to the lamp head, and there is a frictional resistance between the second connecting part of the connecting member and the lamp head. Since the second connecting part is provided with a lubricating member facing the surface of the cavity, and the lamp head is mounted on the lubricating member, the second connecting part contacts the lamp head through the lubricating member, and the design of the lubricating member is conducive to reducing the frictional resistance between the second connecting part and the lamp head, improving the smoothness of the rotation of the connecting body relative to the cavity, and facilitating the assembly of the lamp head and the cavity.

[0034] In a possible implementation, the cavity is provided with a guide shaft extending from the surface of the cavity facing the lamp head and extending along the axial direction of the cavity, and the lamp head is provided with a limiting hole penetrating through the lamp head along the axial direction of the cavity, and the guide shaft is sleeved in the limiting hole of the lamp head.

[0035] Thus, through cooperation of the guide shafts and the limiting holes of the lamp head, the movement accuracy of the lamp head relative to the cavity in the axial direction of the cavity is improved, the structural stability of the lamp head and the cavity during assembly is improved, and the assembly of the processing device is facilitated. Moreover, cooperation of the plurality of guide shafts and the plurality of limiting holes ensures that the lamp head can only slide relative to the cavity in the axial direction of the cavity, further improves the movement accuracy of the lamp head relative to the cavity in the axial direction of the cavity, avoids large shaking of the lamp head relative to the cavity during sliding, facilitates assembly of the lamp head and the cavity, and facilitates assembly of the processing device.

[0036] In a possible implementation, the cavity includes a receiving cavity, the lamp head is embedded with a lamp group, the lamp group is exposed outside the lamp head from a surface of the lamp head facing the cavity, and in the axial direction of the cavity, a projection of the lamp group is located in the receiving cavity.

[0037] The cavity receives a wafer through the receiving cavity, and the lamp head emits heat-generating light through the lamp group. In the axial direction of the cavity, the projection of the lamp group is located in the receiving cavity, which ensures that the heat-generating light emitted by the lamp group can enter the receiving cavity to heat the wafer received in the receiving cavity, thereby facilitating formation of an epitaxial layer on the surface of the wafer.

[0038] In a possible implementation, the processing device further includes a second lamp head, the second lamp head is located on a side of the cavity opposite to the lamp head, and is fixedly connected with the cavity.

[0039] Thus, on the basis of heating the wafer through the lamp head, the wafer can be further heated through the second lamp head, the heating efficiency is improved, and the processing time is saved. In addition, by controlling the light-emitting efficiency of the second lamp head, the temperature of the wafer can be adjusted to control the crystal direction and growth rate of the epitaxial layer formed on the surface of the wafer, thereby facilitating formation of a target epitaxial layer on the surface of the wafer.

[0040] In a second aspect, the embodiments of the present application further provide a semiconductor device, which includes the processing device of any one of the first aspect and a shell, and the processing device is received in the shell. BRIEF DESCRIPTION OF DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings needed to be used in the embodiments of the present application or the background art will be described below.

[0042] Figure 1 is a structural block diagram of a semiconductor device provided by the embodiments of the present application;

[0043] Figure 2 is a structural schematic diagram of a processing device provided by the embodiments of the present application;

[0044] Figure 3 is Figure 2The processing device shown in another angle of structural schematic diagram;

[0045] Figure 4 is Figure 3 The processing device shown in cross-sectional view along A-A line;

[0046] Figure 5 is Figure 4 The cavity of the processing device shown in structural schematic diagram;

[0047] Figure 6 is Figure 4 The lamp holder of the processing device shown in structural schematic diagram;

[0048] Figure 7 is Figure 3 The processing device shown in structural schematic diagram omitting the cavity, guide shaft, lamp holder, locking shaft and second lamp holder;

[0049] Figure 8 is Figure 7 The processing device shown in cross-sectional view along B-B line;

[0050] Figure 9 is Figure 8 The connecting body of the processing device shown in structural schematic diagram;

[0051] Figure 10 is Figure 7 The connecting member (omitting lubricating member) of the connecting body shown in another angle of structural schematic diagram;

[0052] Figures 11 to 13 is Figure 3 The processing device shown in another angle of assembly process schematic diagram;

[0053] Figure 14 is Figure 3 The second lamp holder of the processing device shown in cross-sectional view along A-A line.

[0054] Explanation of reference signs:

[0055] 10-cavity; 11-first surface; 12-second surface; 13-third surface; 14-receiving cavity; 15-accepting table; 16-first channel; 17-second channel; 18-connecting hole; 19-fixing hole;

[0056] 10a-guide shaft; 100-processing device; 19a-mounting hole; 19b-matching hole;

[0057] 1000-semiconductor equipment;

[0058] 20-connecting shaft;

[0059] 20a-shaft body; 20b-bearing;

[0060] 200 - housing

[0061] 30 - lamp head; 31 - main body portion; 32 - fitting portion; 33 - accommodating hole; 34 - lamp group; 35 - limiting hole

[0062] 311 - first end surface; 312 - second end surface; 321 - first fitting surface; 322 - second fitting surface

[0063] 40 - connecting body; 41 - connecting member; 42 - connecting ring

[0064] 411 - first connecting portion; 412 - second connecting portion; 413 - lubricating member

[0065] 4111 - first wall surface; 4112 - second wall surface; 4113 - third wall surface; 4114 - fourth wall surface; 4115 - fitting groove

[0066] 4116 - clamping groove; 4117 - opening groove; 4118 - fitting hole; 4121 - first layer surface; 4122 - second layer surface; 4123 - third layer surface; 4124 - fourth layer surface; 4125 - fifth layer surface; 4126 - mounting groove; 4131 - first connecting surface; 4132 - second connecting surface; 4133 - third connecting surface

[0067] 4116a - clamping surface; 4116b - second clamping surface; 4116c - third clamping surface; 4117a - opening; 4117b - guide surface

[0068] 4117c - second guide surface; 4117d - first edge; 4117e - second edge

[0069] 50 - locking shaft

[0070] 60 - second lamp head; 61 - second main body portion; 62 - second fitting portion; 63 - second accommodating hole; 64 - second lamp group; 65 - through hole

[0071] 611 - third end surface; 612 - fourth end surface; 621 - third fitting surface; 622 - fourth fitting surface

[0072] 70 - fastening member DETAILED DESCRIPTION

[0073] The embodiment of the present application provides a processing device and a semiconductor device. The processing device is applied to the semiconductor device. The processing device and the semiconductor device provided by the embodiment of the present application are characterized in that the lamp head and the cavity are assembled through the rotating connecting body. Compared with the prior art which assembles the lamp head and the cavity through the buckle, the processing device and the semiconductor device have the advantages that the processing device and the semiconductor device are convenient to assemble, the mounting precision and the mounting reliability of the lamp head and the cavity are improved, the structural stability of the processing device and the semiconductor device is improved, the processing device applied to the semiconductor device can be assembled on one side, the mounting operation space of the semiconductor device is reduced, and the miniaturization design of the semiconductor device is facilitated.

[0074] The embodiment of the present application is described below with reference to the drawings in the embodiment of the present application.

[0075] Please refer to Figure 1 , Figure 1 is a structural block diagram of a semiconductor device 1000 provided by the embodiment of the present application. The semiconductor device 1000 is an epitaxial device for example, and the semiconductor device 1000 is used for forming an epitaxial layer on a wafer.

[0076] In some embodiments, the semiconductor device 1000 comprises a processing device 100 and a shell 200. The processing device 100 is accommodated in the shell 200. The processing device 100 is used for forming an epitaxial layer on a wafer surface. The semiconductor device 1000 forms an epitaxial layer on a wafer surface through the processing device 100. The shell 200 can be various shapes including but not limited to a columnar box or a rectangular box, which is not limited in the present application.

[0077] Please refer to Figure 2 , Figure 3 , Figure 4 and Figure 5 , Figure 2 is a structural schematic diagram of a processing device 100 provided by the embodiment of the present application. Figure 3 is a structural schematic diagram of the processing device 100 shown in Figure 2 from another angle. Figure 4 is a sectional view of the processing device 100 along the line A-A shown in Figure 3 . Figure 5 is a structural schematic diagram of a cavity 10 of the processing device 100 shown in Figure 4 .

[0078] As shown in Figure 2 , Figure 3 and Figure 4As shown, in some embodiments, the processing device 100 comprises a cavity 10, a guide shaft 10a, a plurality of connecting shafts 20, a lamp head 30, a connecting body 40, a locking shaft 50, and a second lamp head 60. For example, the cavity 10 is a column. Specifically, the cavity 10 is a cylinder. In the axial direction of the cavity 10, the guide shaft 10a is located on one side of the cavity 10 and fixedly connected with the cavity 10. The plurality of connecting shafts 20 are arranged on the peripheral wall of the cavity 10 in the circumferential direction of the cavity 10. In the axial direction of the cavity 10, the lamp head 30 is located on the side of the cavity 10 facing the guide shaft 10a and sleeved on the outside of the guide shaft 10a. The lamp head 30 can move towards or away from the cavity 10 along the guide shaft 10a relative to the cavity 10. In the axial direction of the cavity 10, the connecting body 40 is partially located on the side of the lamp head 30 away from the cavity 10 and sleeved on the outside of the lamp head 30 and abuts against the lamp head 30. The connecting body 40 is rotatably mounted on the cavity 10. The lamp head 30 is mounted on the cavity 10 through the connecting body 40. The locking shaft 50 is connected with the cavity 10 through the connecting body 40. The locking shaft 50 is used to limit the rotation of the connecting body 40 relative to the cavity 10. The second lamp head 60 is located on the side of the cavity 10 away from the lamp head 30 and connected with the cavity 10. Among them, the cavity 10 is used to accommodate a wafer. The lamp head 30 and the second lamp head 60 are used to heat the wafer so as to form an epitaxial layer on the surface of the wafer.

[0079] As shown in Figure 3 , Figure 4 and Figure 5 , for example, the cavity 10 is made of transparent quartz. In other embodiments, the cavity 10 can also be made of other transparent materials such as glass, which is not limited in the present application. In some embodiments, the cavity 10 comprises a first surface 11, a second surface 12 and a third surface 13. The first surface 11 and the second surface 12 are planes, and the third surface 13 is a curved surface. In the axial direction of the cavity 10, the first surface 11 and the second surface 12 are arranged opposite to each other. The third surface 13 is connected between the first surface 11 and the second surface 12. It can be understood that the first surface 11 and the second surface 12 are opposite end surfaces of the cavity 10. The third surface 13 is the peripheral wall of the cavity 10.

[0080] In some embodiments, the cavity 10 is provided with a receiving cavity 14 extending in the axial direction of the cavity 10. Among them, the receiving cavity 14 is provided with a receiving table 15 on the cavity wall away from the first surface 11. The receiving table 15 is used to carry a wafer. Specifically, the wafer is mounted on the surface of the receiving table 15 away from the first surface 11. In other words, the wafer is accommodated in the receiving cavity 14.

[0081] In some embodiments, the cavity 10 is provided with a first channel 16 and a second channel 17. In the radial direction of the cavity 10, the first channel 16 and the second channel 17 are located on two sides of the receiving cavity 14 and are both in communication with the receiving cavity 14. The first channel 16 and the second channel 17 both extend in the radial direction of the cavity 10 and both have openings, the openings of the first channel 16 and the second channel 17 are both located on the third surface 13. In the radial direction of the cavity 10, the opening of the first channel 16 and the opening of the second channel 17 are arranged opposite to each other.

[0082] The external processing gas can be transported from the outside of the cavity 10 into the receiving cavity 14 through the first channel 16 and transported from the receiving cavity 14 to the outside of the cavity 10 through the second channel 17. The processing gas can be, but is not limited to, silicon tetrachloride, trichlorosilane, silane, dichlorosilane, etc., which is not limited in the present application. The processing gas can form an epitaxial layer on the surface of the wafer loaded on the receiving platform 15 after being heated at high temperature.

[0083] In some embodiments, the cavity 10 is provided with a plurality of connecting holes 18. For example, the number of connecting holes 18 is four, and the four connecting holes 18 are spaced apart and uniformly distributed along the circumference of the cavity 10. Specifically, the four connecting holes 18 are spaced apart and uniformly distributed around the receiving cavity 14 and are both spaced apart from the receiving cavity 14. In the axial direction of the cavity 10, the four connecting holes 18 are both located on the side of the first channel 16 facing the first surface 11 and are spaced apart from the first channel 16; and the four connecting holes 18 are both located on the side of the second channel 17 facing the first surface 11 and are spaced apart from the second channel 17. Each connecting hole 18 extends in the radial direction of the cavity 10 and has an opening, and the opening is located on the third surface 13. In other embodiments, the number of connecting holes 18 can also be two, three or more, which is not limited in the present application.

[0084] In some embodiments, the cavity 10 is provided with a fixing hole 19. For example, the number of fixing holes 19 is four, and the four fixing holes 19 are spaced apart and uniformly distributed along the circumference of the cavity 10. Specifically, the four fixing holes 19 are spaced apart and uniformly distributed around the receiving cavity 14 and are both spaced apart from the receiving cavity 14. In the axial direction of the cavity 10, the four fixing holes 19 are both located on the side of each connecting hole 18 facing the first surface 11 and are spaced apart from each connecting hole 18. Each fixing hole 19 extends in the radial direction of the cavity 10 and has an opening, and the opening is located on the third surface 13. In other words, the cavity 10 is provided with a fixing hole 19, the fixing hole 19 extends in the radial direction of the cavity 10 and has an opening, and the opening of the fixing hole 19 is located on the peripheral wall of the cavity 10. In the axial direction of the cavity 10, the projections of the four fixing holes 19 respectively overlap the projections of the four connecting holes 18. In other embodiments, the number of fixing holes 19 can also be one, three or more, which is not limited in the present application.

[0085] In some embodiments, the cavity 10 is provided with a plurality of mounting holes 19a. Exemplarily, the number of the mounting holes 19a is four. The four mounting holes 19a are spaced and evenly distributed along the circumference of the cavity 10. Specifically, the four mounting holes 19a are spaced and evenly distributed around the receiving cavity 14, and are spaced from the receiving cavity 14. In the axial direction of the cavity 10, the four mounting holes 19a are located on the side of the first passage 16 facing the first surface 11, and are spaced from the first passage 16; the four mounting holes 19a are located on the side of the second passage 17 facing the first surface 11, and are spaced from the second passage 17. In the radial direction of the cavity 10, the four mounting holes 19a are respectively located between the receiving cavity 14 and the four fixing holes 19, and are spaced from the receiving cavity 14 and the four fixing holes 19. Each mounting hole 19a extends in the axial direction of the cavity 10 and has an opening on the first surface 11. In other embodiments, the number of the mounting holes 19a can also be one, two, three or more, which is not specifically limited in the present application.

[0086] In some embodiments, the cavity 10 is provided with a plurality of mounting holes 19a. Exemplarily, the number of the mounting holes 19a is four. The four mounting holes 19a are spaced and evenly distributed along the circumference of the cavity 10. Specifically, the four mounting holes 19a are spaced and evenly distributed around the receiving cavity 14, and are spaced from the receiving cavity 14. In the axial direction of the cavity 10, the four mounting holes 19a are located on the side of the first passage 16 facing the first surface 11, and are spaced from the first passage 16; the four mounting holes 19a are located on the side of the second passage 17 facing the first surface 11, and are spaced from the second passage 17. In the radial direction of the cavity 10, the four mounting holes 19a are respectively located between the receiving cavity 14 and the four fixing holes 19, and are spaced from the receiving cavity 14 and the four fixing holes 19. Each mounting hole 19a extends in the axial direction of the cavity 10 and has an opening on the first surface 11. In other embodiments, the number of the mounting holes 19a can also be one, two, three or more, which is not specifically limited in the present application.

[0087] Exemplarily, the number of the guide shafts 10a is four. The four guide shafts 10a are fixedly inserted into the four mounting holes 19a by means of welding, gluing or threaded connection, etc. Each guide shaft 10a extends in the axial direction of the cavity 10 and protrudes outside the cavity 10. In other words, the cavity 10 is provided with guide shafts 10a, each of which extends in the axial direction of the cavity 10 and protrudes from the first surface 11 of the cavity 10. In other embodiments, the number of the guide shafts 10a can also be one, two, three or more, which is not specifically limited in the present application.

[0088] In some embodiments, the connecting shafts 20 are embedded in the cavity 10 and extend along the radial direction of the cavity 10 and protrude from the third surface 13 of the cavity 10. Specifically, the connecting shafts 20 are fixedly fitted in the connecting holes 18 of the cavity 10 and extend along the radial direction of the cavity 10 and protrude from the third surface 13 of the cavity 10. For example, the number of the connecting shafts 20 is four. Specifically, the number of the connecting shafts 20 is four. The four connecting shafts 20 are fixedly fitted in the four connecting holes 18 of the cavity 10 and extend along the radial direction of the cavity 10 and protrude from the third surface 13 of the cavity 10. It can be understood that the four connecting shafts 20 are arranged at intervals along the circumferential direction of the cavity 10 and extend along the radial direction of the cavity 10. In other words, the peripheral wall of the cavity 10 is provided with a plurality of connecting shafts 20, and the plurality of connecting shafts 20 are arranged at intervals along the circumferential direction of the cavity 10 and extend along the radial direction of the cavity 10.

[0089] In some embodiments, the connecting shaft 20 comprises a shaft body 20a and a bearing 20b, and the bearing 20b is sleeved outside the shaft body 20a. For example, the number of the bearing 20b is one. In other embodiments, the number of the bearing 20b can also be two, three or more, which is not limited in the present application. The shaft body 20a is fixedly fitted in the connecting hole 18 of the cavity 10 by means of welding or gluing, the shaft body 20a extends along the radial direction of the cavity 10 and partially protrudes outside the cavity 10, and the bearing 20b sleeved outside the shaft body 20a is located outside the cavity 10.

[0090] Please refer to Figure 6 , in combination with Figure 4 and Figure 5 , Figure 6 is Figure 4 the structure diagram of the lamp holder 30 of the processing device 100 shown in FIG. 1.

[0091] As shown in Figure 4 , Figure 5 and Figure 6 , in some embodiments, in the axial direction of the cavity 10, the lamp holder 30 is located on the side of the cavity 10 facing the guide shaft 10a. Specifically, the lamp holder 30 is located on the side of the first surface 11 of the cavity 10 away from the second surface 12. In other words, in the axial direction of the cavity 10, the lamp holder 30 is located on one side of the cavity 10. The lamp holder 30 is sleeved outside the guide shaft 10a, and the lamp holder 30 can move towards or away from the cavity 10 along the guide shaft 10a (i.e. the axial direction of the cavity 10). Specifically, the lamp holder 30 can move towards or away from the first surface 11 of the cavity 10 along the guide shaft 10a (i.e. the axial direction of the cavity 10).

[0092] It can be understood that, since the lamp head 30 is located on the side of the first surface 11 of the cavity 10 which is away from the second surface 12, the first surface 11 of the cavity 10 is the surface of the cavity 10 which faces the lamp head 30; and since the guide shaft 10a extends along the axial direction of the cavity 10 and extends out of the first surface 11 of the cavity 10, that is to say, the guide shaft 10a extends out of the surface of the cavity 10 which faces the lamp head 30 (i.e. the first surface 11) and extends along the axial direction of the cavity 10.

[0093] In some embodiments, the lamp head 30 comprises a main body part 31 and a fitting part 32. The fitting part 32 is arranged around the main body part 31. For example, the main body part 31 and the fitting part 32 are integrally formed. In this way, the overall strength of the lamp head 30 is improved, and the structural stability of the lamp head 30 is improved. The main body part 31 is a cylindrical body. In other embodiments, the main body part 31 can be various shapes including but not limited to a rectangular block or a rectangular column, and the present application does not make a specific limitation in this regard.

[0094] The main body part 31 comprises a first end surface 311 and a second end surface 312. The first end surface 311 and the second end surface 312 are arranged opposite to each other in the axial direction of the cavity 10. The first end surface 311 faces the cavity 10, and the first end surface 311 faces the first surface 11 of the cavity 10. The second end surface 312 is away from the cavity 10, and the second end surface 312 is away from the first surface 11 of the cavity 10.

[0095] The fitting part 32 comprises a first fitting surface 321 and a second fitting surface 322. The first fitting surface 321 and the second fitting surface 322 are arranged opposite to each other in the axial direction of the cavity 10. The first fitting surface 321 is away from the first end surface 311 and is arranged between the first end surface 311 and the second end surface 312 in the axial direction of the cavity 10. The second fitting surface 322 is away from the second end surface 312, and the second fitting surface 322 is flush with the first end surface 311 in the radial direction of the cavity 10. It can be understood that, the surface of the lamp head 30 which is away from the first fitting surface 321 comprises the second fitting surface 322 and the first end surface 311. The first fitting surface 321 is away from the cavity 10, and the first fitting surface 321 is away from the first surface 11 of the cavity 10. The second fitting surface 322 faces the cavity 10, and the second fitting surface 322 faces the first surface 11 of the cavity 10.

[0096] In some embodiments, the lamp head 30 is provided with a receiving hole 33. Specifically, the main body 31 is provided with the receiving hole 33, which extends along the axial direction of the cavity 10 and has an opening on the first end surface 311 of the main body 31. The receiving hole 33 is used to accommodate the lamp group 34. The lamp group 34 is used to emit heat-generating light. The lamp group 34 is accommodated in the receiving hole 33 by means including but not limited to welding or gluing, and the lamp group 34 is exposed outside the lamp head 30 from the first end surface 311 of the main body 31. In other words, the lamp head 30 is embedded with the lamp group 34, and the lamp group 34 is exposed outside the lamp head 30 from the surface of the lamp head 30 facing the cavity 10. Among them, in the axial direction of the cavity 10, the projection of the lamp group 34 is located in the receiving cavity 14.

[0097] For example, the number of receiving holes 33 is two, and the number of lamp groups 34 is also two, and the two lamp groups 34 are respectively accommodated in the two receiving holes 33. The two receiving holes 33 are arranged at intervals along the circumferential direction of the cavity 10. The two lamp groups 34 are arranged at intervals along the circumferential direction of the cavity 10. Among them, in the axial direction of the cavity 10, the projections of the two lamp groups 34 are both located in the receiving cavity 14. In other embodiments, the number of receiving holes 33 and lamp groups 34 can also be one, three or more, which is not limited in the present application.

[0098] In this way, the cavity 10 accommodates the wafer through the receiving cavity 14, and the lamp head 30 emits heat-generating light through the lamp group 34. In the axial direction of the cavity 10, the projection of the lamp group 34 is located in the receiving cavity 14, which ensures that the heat-generating light emitted by the lamp group 34 can enter the receiving cavity 14 to heat the wafer accommodated in the receiving cavity 14, thereby facilitating the formation of an epitaxial layer on the surface of the wafer.

[0099] In some embodiments, the lamp head 30 is provided with a limiting hole 35. Specifically, the main body 31 is provided with the limiting hole 35, which extends along the axial direction of the cavity 10 and has two openings on the first end surface 311 and the second end surface 312 of the main body 31. In other words, the limiting hole 35 extends along the axial direction of the cavity 10 and penetrates the lamp head 30. For example, the number of limiting holes 35 is four, and the four limiting holes 35 are arranged at intervals and uniformly distributed along the circumferential direction of the cavity 10. Specifically, the four limiting holes 35 are arranged at intervals and uniformly distributed around the two receiving holes 33. In other embodiments, the number of limiting holes 35 can also be two, three or more, which is not limited in the present application. Among them, the four guide shafts 10a are respectively threaded into the four limiting holes 35. That is to say, the guide shaft 10a is threaded into the limiting hole 35 of the lamp head 30. The lamp head 30 is sleeved on the outside of the guide shaft 10a through the limiting hole 35. The lamp head 30 can slide relative to the cavity 10 along the four guide shafts 10a (i.e. the axial direction of the cavity 10), so that the surface of the lamp head 30 away from the first matching surface 321 (including the first end surface 311 and the second matching surface 322) is close to or away from the first surface 11 of the cavity 10.

[0100] The cooperation between the guide shaft 10a and the limiting hole 35 of the lamp holder 30 improves the motion accuracy of the lamp holder 30 relative to the cavity 10 along the axial direction, enhances the structural stability of the lamp holder 30 and the cavity 10 during assembly, and facilitates the assembly of the processing device 100. Furthermore, the cooperation between multiple guide shafts 10a and multiple limiting holes 35 ensures that the lamp holder 30 can only slide relative to the cavity 10 along the axial direction, further improving the motion accuracy of the lamp holder 30 relative to the cavity 10 along the axial direction, preventing significant wobbling of the lamp holder 30 relative to the cavity 10 during sliding, and facilitating the assembly of the lamp holder 30 and the cavity 10, as well as the assembly of the processing device 100.

[0101] Please see Figure 7 , Figure 8 , Figure 9 and Figure 10 and combined Figure 4 , Figure 5 and Figure 6 , Figure 7 yes Figure 3 The schematic diagram of the processing device 100 shown omits the cavity 10, guide shaft 10a, lamp head 30, locking shaft 50 and second lamp head 60. Figure 8 yes Figure 7 The processing device 100 shown is a cross-sectional view along line BB. Figure 9 yes Figure 8 A schematic diagram of the structure of the connector 41 of the connecting body 40 of the processing device 100 shown. Figure 10 yes Figure 7 A schematic diagram of the connector 41 (lubricant 413 omitted) of the connector 40 shown from another angle.

[0102] like Figure 4 , Figure 7 and Figure 8 As shown, in some embodiments, in the axial direction of the cavity 10, the connector 40 is located on the side of the lamp holder 30 facing away from the cavity 10, abuts against the lamp holder 30, and is rotatably mounted on the cavity 10. Specifically, the connector 40 is fitted onto the outside of the main body 31, and the connector 40 is located on the side of the mating part 32 facing away from the cavity 10, abuts against the mating part 32, and is rotatably mounted on the cavity 10.

[0103] In some embodiments, the connector 40 includes a plurality of connectors 41 and a connecting ring 42. The plurality of connectors 41 are fixedly connected to the connecting ring 42 and are evenly distributed and spaced apart along the circumference of the connecting ring 42. Specifically, in the axial direction of the cavity 10, the connecting ring 42 is located on the side of the lamp holder 30 facing away from the cavity 10 and is fitted onto the outside of the lamp holder 30. More specifically, in the axial direction of the cavity 10, the connecting ring 42 is located on the side of the mating portion 32 of the lamp holder 30 facing away from the cavity 10 and is fitted onto the outside of the main body portion 31 of the lamp holder 30. The plurality of connectors 41 are respectively mounted on a plurality of connecting shafts 20, and each connector 41 abuts against the lamp holder 30. Specifically, each connector 41 is mounted on a bearing 20b of a connecting shaft 20, and each connector 41 abuts against the mating portion 32 of the lamp holder 30.

[0104] For example, there are four connectors 41, each fixedly connected to a connecting ring 42, and evenly distributed and spaced apart along the circumference of the connecting ring 42 (i.e., the circumference of the cavity 10). Each connector 41 is mounted on one of four connecting shafts 20, and all four connectors abut against the lamp holder 30. Specifically, each connector 41 is mounted on a bearing 20b of the connecting shaft 20 and abuts against the mating portion 32 of the lamp holder 30. In other embodiments, the number of connectors 41 may be two, three, or more; this application does not specifically limit this.

[0105] In this way, multiple connectors 41 are integrated into a single unit via connecting rings 42, which improves the overall structural stability of the connector 40. Furthermore, because the connecting rings 42 are located on the side of the lamp holder 30 facing away from the cavity 10 and are fitted onto the outside of the lamp holder 30 in the axial direction of the cavity 10, this design helps to reduce the axial dimensions of the connector 40 and the lamp holder 30 within the cavity 10, thereby reducing the axial dimensions of the processing device 100 within the cavity 10 and facilitating the miniaturization of the processing device 100. It can be understood that the axial direction of the connecting rings 42 is the same as the axial direction of the cavity 10, the circumferential direction of the connecting rings 42 is the same as the circumferential direction of the cavity 10, and the radial direction of the connecting rings 42 is the same as the radial direction of the cavity 10. Multiple connectors 41 are located on the outside of the cavity 10 and spaced apart along the circumferential direction of the cavity 10.

[0106] like Figure 8 , Figure 9 and Figure 10 As shown, in some embodiments, the connector 41 includes a first connecting portion 411 and a second connecting portion 412. In the radial direction of the connecting ring 42 (i.e., in the radial direction of the cavity 10), the second connecting portion 412 is located on one side of the first connecting portion 411 and is fixedly connected to it. Exemplarily, the first connecting portion 411 and the second connecting portion 412 are integrally formed, which helps to improve the overall strength of the connector 41 and enhances its structural stability.

[0107] Exemplarily, the first connecting portion 411 is a rectangular plate body. The first connecting portion 411 comprises a first wall surface 4111, a second wall surface 4112, a third wall surface 4113 and a fourth wall surface 4114. In the radial direction of the connecting ring 42 (i.e. in the radial direction of the cavity 10), the first wall surface 4111 is arranged opposite to the second wall surface 4112. In the circumferential direction of the cavity 10 (i.e. in the circumferential direction of the cavity 10), the third wall surface 4113 and the fourth wall surface 4114 are arranged opposite to each other and are both connected between the first wall surface 4111 and the second wall surface 4112.

[0108] As shown in Figure 8 , Figure 9 and Figure 10 , in some embodiments, the first connecting portion 411 is provided with a matching groove 4115. The matching groove 4115 extends from the first wall surface 4111 to the second wall surface 4112 in the radial direction of the connecting ring 42 (i.e. in the radial direction of the cavity 10). The matching groove 4115 penetrates the first connecting portion 411 in the radial direction of the connecting ring 42 (i.e. in the radial direction of the cavity 10). In other words, the connecting piece 41 is provided with the matching groove 4115, and the matching groove 4115 penetrates the connecting piece 41 in the radial direction of the connecting ring 42 (i.e. in the radial direction of the cavity 10).

[0109] The matching groove 4115 comprises a clamping groove 4116 and an opening groove 4117. The opening groove 4117 and the clamping groove 4116 are sequentially communicated in the circumferential direction of the connecting ring 42 (i.e. in the circumferential direction of the cavity 10). Specifically, in the circumferential direction of the connecting ring 42 (i.e. in the circumferential direction of the cavity 10), the opening groove 4117 is located between the clamping groove 4116 and the third wall surface 4113 of the first connecting portion 411 and is in communication with the clamping groove 4116. Among them, the opening groove 4117 has an opening 4117a located on the third wall surface 4113. That is to say, the opening 4117a penetrates the connecting piece 41 in the circumferential direction of the connecting ring 42 (i.e. in the circumferential direction of the cavity 10). In the circumferential direction of the connecting ring 42 (i.e. in the circumferential direction of the cavity 10), the clamping groove 4116 is located on the side of the opening groove 4117 away from the opening 4117a thereof and is in communication with the opening groove 4117.

[0110] The inner wall of the clamping groove 4116 comprises a clamping surface 4116a, a second clamping surface 4116b and a third clamping surface 4116c. Exemplarily, the clamping surface 4116a and the second clamping surface 4116b are flat surfaces. The third clamping surface 4116c is a curved surface. Specifically, the third clamping surface 4116c is a circular arc surface. In the axial direction of the connecting ring 42 (i.e. in the axial direction of the cavity 10), the clamping surface 4116a and the second clamping surface 4116b are spaced apart and parallel to each other. The third clamping surface 4116c is connected between the clamping surface 4116a and the second clamping surface 4116b. Among them, the clamping surface 4116a and the second clamping surface 4116b are both perpendicular to the axial direction of the connecting ring 42 (i.e. the axial direction of the cavity 10).

[0111] The inner wall of the opening slot 4117 comprises a guide surface 4117b and a second guide surface 4117c. In the axial direction of the connecting ring 42 (i.e. the axial direction of the cavity 10), the guide surface 4117b is spaced apart from the second guide surface 4117c. The guide surface 4117b is connected between the clamping surface 4116a and the third wall surface 4113 of the first connecting portion 411. The second guide surface 4117c is connected between the second clamping surface 4116b and the third wall surface 4113 of the first connecting portion 411. The second guide surface 4117c is arranged perpendicular (allowing a small deviation) to the axial direction of the connecting ring 42 (i.e. the axial direction of the cavity 10). The guide surface 4117b is arranged obliquely relative to the second guide surface 4117c. The guide surface 4117b comprises a first edge 4117d and a second edge 4117e, which are arranged opposite to each other in the circumferential direction of the connecting ring 42 (i.e. the circumferential direction of the cavity 10). The first edge 4117d is connected to the clamping surface 4116a of the clamping slot 4116. The second edge 4117e is connected to the third wall surface 4113 of the first connecting portion 411. In the axial direction of the connecting ring 42 (i.e. the axial direction of the cavity 10), the distance between the guide surface 4117b and the second guide surface 4117c gradually increases from the first edge 4117d to the second edge 4117e. In some other embodiments, the guide surface 4117b can also be arranged parallel to the second guide surface 4117c, which is not limited in the present application.

[0112] It can be understood that the guide surface 4117b is arranged obliquely relative to the clamping surface 4116a, so that the caliber of the fitting slot 4115 (i.e. the size of the fitting slot 4115 in the axial direction of the cavity 10) shows a decreasing trend from the opening slot 4117 to the clamping slot 4116. In the axial direction of the connecting ring 42 (i.e. the axial direction of the cavity 10), the guide surface 4117b is arranged away from the second clamping surface 4116b relative to the clamping surface 4116a. The second guide surface 4117c is flush with the second clamping surface 4116b. The included angle between the guide surface 4117b and the clamping surface 4116a is greater than 0° and less than 60°.

[0113] In some embodiments, the first connecting portion 411 is provided with an assembly hole 4118. The assembly hole 4118 extends from the first wall surface 4111 to the second wall surface 4112 in the radial direction of the connecting ring 42 (i.e., the radial direction of the cavity 10). In other words, the assembly hole 4118 penetrates the first connecting portion 411, and the assembly hole 4118 penetrates the connecting member 41. In the axial direction of the connecting ring 42 (i.e., the axial direction of the cavity 10), the assembly hole 4118 is located on one side of the clamping groove 4116 and the opening groove 4117 and is spaced apart from the clamping groove 4116 and the opening groove 4117. Specifically, the assembly hole 4118 is located on the side of the second clamping surface 4116b of the clamping groove 4116 away from the clamping surface 4116a and is spaced apart from the second clamping surface 4116b. Moreover, the assembly hole 4118 is located on the side of the second guide surface 4117c of the opening groove 4117 away from the guide surface 4117b and is spaced apart from the second guide surface 4117c.

[0114] In some embodiments, the second connecting portion 412 is fixedly connected to the first wall surface 4111 of the first connecting portion 411 and is located on the side of the assembly hole 4118 away from the clamping groove 4116 and the opening groove 4117 and is spaced apart from the assembly hole 4118 in the axial direction of the connecting ring 42 (i.e., the axial direction of the cavity 10). For example, the second connecting portion 412 is a rectangular plate body. The second connecting portion 412 includes a first layer surface 4121, a second layer surface 4122, a third layer surface 4123, a fourth layer surface 4124, and a fifth layer surface 4125. In the axial direction of the connecting ring 42 (i.e., the axial direction of the cavity 10), the first layer surface 4121 is arranged away from the second layer surface 4122. In the circumferential direction of the connecting ring 42 (i.e., the circumferential direction of the cavity 10), the third layer surface 4123 and the fourth layer surface 4124 are arranged away from each other. The third layer surface 4123 and the fourth layer surface 4124 are connected between the first layer surface 4121 and the second layer surface 4122. The fifth layer surface 4125 is connected between the first layer surface 4121 and the second layer surface 4122 and is connected between the third layer surface 4123 and the fourth layer surface 4124. In this case, the first layer surface 4121 faces the clamping groove 4116 and the opening groove 4117. The second layer surface 4122 is arranged away from the clamping groove 4116 and the opening groove 4117. The third layer surface 4123 is flush with the third wall surface 4113 of the first connecting portion 411. The fourth layer surface 4124 is flush with the fourth wall surface 4114 of the first connecting portion 411. The fifth layer surface 4125 is arranged away from the first wall surface 4111 of the first connecting portion 411.

[0115] The first surface 4121 and the second surface 4122 are parallel to the clamping surface 4116a of the clamping groove 4116, the second clamping surface 4116b of the clamping groove 4116, and the second guide surface 4117c of the opening groove 4117. It can be understood that the guide surface 4117b of the opening groove 4117 is arranged obliquely relative to the first surface 4121 of the second connecting portion 412. The guide surface 4117b of the opening groove 4117 is away from the second surface 4122 relative to the first surface 4121. Among them, in the axial direction of the connecting ring 42 (i.e. the axial direction of the cavity 10), the distance between the guide surface 4117b and the first surface 4121 gradually increases from the first edge 4117d to the second edge 4117e.

[0116] In some embodiments, the second connecting portion 412 is provided with a mounting groove 4126. The mounting groove 4126 extends from the third surface 4123 of the second connecting portion 412 to the fourth surface 4124 along the circumferential direction of the connecting ring 42 (i.e. the circumferential direction of the cavity 10) and has an opening, and the opening is located at the fifth surface 4125. Among them, the mounting groove 4126 is used for fixedly connecting with the connecting ring 42. For example, the connecting ring 42 is fixedly connected in the mounting groove 4126 by means including but not limited to welding or gluing. It can be understood that the connecting ring 42 is located on the side of the second connecting portion 412 away from the first wall surface 4111 of the first connecting portion 411 and is fixedly connected with the second connecting portion 412. Through the mounting groove 4126, the connecting piece 41 is fixedly connected on the connecting ring 42.

[0117] In some embodiments, the connecting piece 41 is provided with a lubricating piece 413. Specifically, the second connecting portion 412 is provided with the lubricating piece 413, and the lubricating piece 413 is fixedly connected on the first surface 4121 of the second connecting portion 412. For example, the lubricating piece 413 is a gasket. The lubricating piece 413 is made of materials including but not limited to PTFE (Polytetrafluoroethylene) and other materials with lubricating properties.

[0118] In some embodiments, the lubricant 413 is a rectangular block. The lubricant 413 includes a first connecting surface 4131, a second connecting surface 4132, and a third connecting surface 4133. In the axial direction of the connecting ring 42 (i.e., in the axial direction of the cavity 10), the first connecting surface 4131 and the second connecting surface 4132 are disposed opposite to each other. The third connecting surface 4133 connects between the first connecting surface 4131 and the second connecting surface 4132. Specifically, the second connecting surface 4132 is opposite to and connected to the first layer 4121 of the second connecting portion 412 by means including but not limited to welding or adhesive bonding, and the third connecting surface 4133 is opposite to and connected to the first wall surface 4111 of the first connecting portion 411. The first connecting surface 4131 faces away from the first layer 4121 of the second connecting portion 412. The lubricant 413 is fixedly stacked on the first layer 4121 of the second connecting portion 412 and fixedly connected to the first connecting portion 411.

[0119] The design of the lubricating component 413 being fixedly stacked on the first layer 4121 of the second connecting part 412 and fixedly connected to the first connecting part 411 is beneficial to improving the connection strength between the lubricating component 413 and the second connecting part 412, improving the structural stability of the connecting body 40, and improving the structural stability of the processing device 100.

[0120] like Figure 4 , Figure 6 and Figure 8 As shown, in the axial direction of the cavity 10, the connecting ring 42 of the connector 40 is fitted onto the outside of the main body 31 of the lamp holder 30 from the side of the mating portion 32 facing away from the cavity 10. The connecting ring 42 is located on the side of the mating portion 32 facing away from the cavity 10 and is fitted onto the outside of the main body 31. The first connecting surface 4131 of the lubricating element 413 of each connector 41 is opposite to and in contact with the first mating surface 321 of the mating portion 32 of the lamp holder 30. The mating portion 32 of the lamp holder 30 abuts against the lubricating element 413 of each connector 41. The mating portion 32 abuts against the surface of the lubricating element 413 facing away from the second connecting portion 412 (i.e., the first connecting surface 4131). In the radial direction of the connecting ring 42 (i.e., the radial direction of the cavity 10), the first wall surface 4111 of the first connecting portion 411 faces the lamp holder 30, and the second wall surface 4112 of the first connecting portion 411 faces away from the lamp holder 30.

[0121] Through the lubricant 413, the mating portion 32 of the lamp holder 30 is stacked on the first layer 4121 of the second connecting portion 412 of each connector 41, and the mating portion 32 of the lamp holder 30 is mounted on the second connecting portion 412 of the connector 41. That is to say, in the axial direction of the cavity 10, the second connecting portion 412 of the connector 41 is located on the side of the mating portion 32 facing away from the cavity 10 and abuts against the mating portion 32. In the axial direction of the cavity 10, the second connecting portion 412 is located on the side of the lamp holder 30 facing away from the cavity 10 and abuts against the lamp holder 30. Wherein, in the axial direction of the cavity 10, the first layer 4121 of the second connecting portion 412 faces the cavity 10, and the second layer 4122 of the second connecting portion 412 faces away from the cavity 10. In other words, the surface of the second connecting portion 412 facing the cavity 10 (i.e., the first layer 4121) is provided with the lubricant 413, and the lamp holder 30 is mounted on the lubricant 413.

[0122] Please see Figure 11 , Figure 12 and Figure 13 and combined Figure 4 and Figure 10 , Figures 11 to 13 yes Figure 3 The processing device 100 shown (second lamp head 60 omitted) is shown in a schematic diagram of the assembly process from another angle.

[0123] like Figure 10 , Figure 11 and Figure 12 As shown, the connector 40 is rotatable relative to the cavity 10, and the plurality of connectors 41 are respectively movable relative to the plurality of connecting shafts 20. The plurality of connecting shafts 20 are respectively able to enter the mating grooves 4115 of the connector 41 through the openings 4117a of the opening slots 4117 of the plurality of connectors 41, and abut against the inner wall of the mating grooves 4115. In other words, the connector 40 is rotatable relative to the cavity 10, each connector 41 is movable relative to the connecting shaft 20, and each connecting shaft 20 is able to enter the mating grooves 4115 and abut against the inner wall of the mating grooves 4115.

[0124] Specifically, the connecting body 40 is capable of rotating relative to the cavity 10, the bearing 20b of each connecting shaft 20 is capable of entering the matching groove 4115 of the connecting piece 41 from the opening 4117a of the opening groove 4117 of the connecting piece 41, and abutting against the inner wall of the matching groove 4115. That is, the connecting body 40 is capable of rotating relative to the cavity 10, and the bearing 20b of each connecting shaft 20 is capable of entering the matching groove 4115 and abutting against the inner wall of the matching groove 4115. Wherein, in the radial direction of the cavity 10, the first wall surface 4111 of the first connecting part 411 of the connecting piece 41 faces the cavity 10, and the second wall surface 4112 of the first connecting part 411 faces away from the cavity 10. The clamping surface 4116a of the clamping groove 4116 faces the lamp head 30 and is perpendicular to the axial direction of the cavity 10 (a small amount of deviation can also be allowed). The guide surface 4117b of the opening groove 4117 faces the lamp head 30 and is connected with the clamping surface 4116a. In the axial direction of the cavity 10, the guide surface 4117b is arranged obliquely relative to the clamping surface 4116a, and the guide surface 4117b faces away from the lamp head 30 relative to the clamping surface 4116a. In the axial direction of the cavity 10, the first side 4117d of the guide surface 4117b is closer to the lamp head 30 relative to the second side 4117e.

[0125] It can be understood that the connecting body 40 is capable of rotating relative to the cavity 10, and each connecting shaft 20 is capable of moving from the opening groove 4117 to the clamping groove 4116 of the matching groove 4115 relative to the connecting piece 41. In the case that the connecting shaft 20 is located in the opening groove 4117, the bearing 20b of the connecting shaft 20 abuts against the guide surface 4117b of the opening groove 4117. Through the bearing 20b, in the case that the connecting shaft 20 is located in the opening groove 4117, the connecting shaft 20 abuts against the guide surface 4117b of the opening groove 4117. Wherein, in the axial direction of the cavity 10, the lamp head 30 is arranged spaced apart from the cavity 10. In other words, in the case that the connecting shaft 20 is located in the opening groove 4117, the lamp head 30 has a spacing in the axial direction of the cavity 10 relative to the cavity 10.

[0126] The connecting body 40 rotates relative to the cavity 10, each connecting piece 41 moves relative to the connecting shaft 20, and each connecting shaft 20 moves from the opening groove 4117 to the clamping groove 4116, the bearing 20b of the connecting shaft 20 moves along the guide surface 4117b from the second side 4117e to the first side 4117d, until the bearing 20b of the connecting shaft 20 moves from the opening groove 4117 to the clamping groove 4116. In the case that the connecting shaft 20 is located in the clamping groove 4116, the bearing 20b of the connecting shaft 20 abuts against the clamping surface 4116a of the clamping groove 4116. Through the bearing 20b, in the case that the connecting shaft 20 is located in the clamping groove 4116, the connecting shaft 20 abuts against the clamping surface 4116a. It can be understood that each connecting shaft 20 is capable of entering the clamping groove 4116 from the opening groove 4117 and abutting against the inner wall (i.e. the clamping surface 4116a) of the clamping groove 4116.

[0127] In the case that the connecting shaft 20 is located in the clamping groove 4116, the bearing 20b of the connecting shaft 20 also contacts the second clamping surface 4116b and the third clamping surface 4116c. In this way, under the restriction of the clamping surface 4116a and the second clamping surface 4116b of the clamping groove 4116, the bearing 20b is prevented from shaking greatly in the clamping groove 4116, so that the bearing 20b can be stably accommodated in the clamping groove 4116. Under the cooperation of the third clamping surface 4116c of the clamping groove 4116 and the bearing 20b, the rotation of the connecting body 40 relative to the cavity 10 can be limited, which plays an indicating role and facilitates the assembly of the processing device 100. In addition, during the rotation of the connecting body 40 relative to the cavity 10 and the movement of each connecting piece 41 relative to the connecting shaft 20, the connecting shaft 20 abuts against the inner wall (including the guide surface 4117b and the clamping surface 4116a) of the cooperating groove 4115 through the bearing 20b. The design of the bearing 20b can prevent the connecting shaft 20 from directly contacting the connecting piece 41, which is conducive to converting the sliding friction between the connecting piece 41 and the connecting shaft 20 into rolling friction, reducing the friction between the connecting piece 41 and the connecting shaft 20, and reducing the operation resistance of the connecting body 40 relative to the cavity 10, thereby saving labor and facilitating assembly.

[0128] In addition, during the movement of the bearing 20b of each connecting shaft 20 from the opening groove 4117 to the clamping groove 4116 along the guide surface 4117b, under the restriction of the guide surface 4117b, the connecting piece 41 drives the lamp holder 30 to move along the guide shaft 10a towards the cavity 10 in the axial direction of the cavity 10 through the cooperation of the lubricating piece 413 and the cooperating part 32 of the lamp holder 30, until the bearing 20b of the connecting shaft 20 is located in the clamping groove 4116. Specifically, since the second connecting part 412 of the connecting piece 41 abuts against the lamp holder 30 through the lubricating piece 413, the connecting piece 41 drives the lamp holder 30 to move close to the cavity 10 in the axial direction of the cavity 10 during the movement of the connecting shaft 20 from the opening groove 4117 to the clamping groove 4116. It can be understood that the connecting body 40 drives the lamp holder 30 to move towards the cavity 10 during the movement of each connecting shaft 20 from the opening groove 4117 to the clamping groove 4116. In some other embodiments, during the movement of the connecting shaft 20 from the opening groove 4117 to the clamping groove 4116, the connecting body 40 can also drive the lamp holder 30 to move away from the cavity 10 in the axial direction of the cavity 10.

[0129] In the case that the connecting shaft 20 is located in the clamping groove 4116, the surface of the lamp holder 30 away from the first cooperating surface 321 of the cooperating part 32 (including the first end surface 311 of the main body 31 and the second cooperating surface 322 of the cooperating part 32) abuts against the first surface 11 of the cavity 10, and the lamp holder 30 abuts against the cavity 10.

[0130] Since the guide surface 4117b is arranged obliquely relative to the clamping surface 4116a in the axial direction of the cavity 10, the caliber of the fitting groove 4115 (the size of the fitting groove 4115 in the axial direction of the cavity 10) presents a decreasing trend from the opening groove 4117 to the clamping groove 4116, and the connecting shaft 20 is in abutment with the guide surface 4117b when the connecting shaft 20 is located in the opening groove 4117; in this way, the connecting shaft 20 moves from the opening groove 4117 to the clamping groove 4116 along the guide surface 4117b, and in this process, the connecting member 41 drives the lamp head 30 to move towards the cavity 10 along the axial direction of the cavity 10 through the cooperation between the guide surface 4117b and the connecting shaft 20.

[0131] In addition, since the clamping surface 4116a is perpendicular to the axial direction of the cavity 10, and the connecting shaft 20 is in abutment with the clamping surface 4116a when the connecting shaft 20 is located in the clamping groove 4116; through the limitation of the connecting shaft 20 and the clamping surface 4116a, the connecting member 40 cannot drive the lamp head 30 to move along the axial direction of the cavity 10 without external force. In the axial direction of the cavity 10, the lamp head 30 is relatively fixed with the cavity 10. The lamp head 30 and the cavity 10 are assembled together through the connecting member 40. The design of the guide surface 4117b is conducive to improving the movement accuracy of the lamp head 30 moving towards the cavity 10, and is conducive to improving the structural stability of the lamp head 30 and the cavity 10 during assembly, and is convenient for assembly. The design of the cooperation between the clamping surface 4116a and the connecting shaft 20 to realize the assembly of the lamp head 30 and the cavity 10 not only has a simple structure and is convenient for design, but also is not easy to deform, and is conducive to improving the structural stability and reliability of the cavity 10 and the lamp head 30 after assembly.

[0132] It can be understood that since the included angle between the guide surface 4117b of the opening groove 4117 and the clamping surface 4116a of the clamping groove 4116 is greater than 0° and less than 60°, in this way, it is ensured that the connecting shaft 20 is not easy to be separated from the fitting groove 4115 from the opening groove 4117 when the connecting shaft 20 is located in the opening groove 4117, which is conducive to reducing the difficulty of the connecting shaft 20 moving from the opening groove 4117 towards the clamping groove 4116 relative to the connecting member 41, and further conducive to reducing the assembly difficulty of the lamp head 30 and the cavity 10, and convenient for the assembly of the lamp head 30 and the cavity 10.

[0133] It can be understood that when the connecting shaft 20 is located in the clamping groove 4116, that is, when the lamp head 30 and the cavity 10 are assembled together through the connecting member 40, the design that the lamp head 30 and the cavity 10 are in abutment is conducive to improving the structural stability of the lamp head 30 and the cavity 10 after assembly, and further conducive to improving the structural stability of the processing device 100.

[0134] It can be understood that during the rotation of the connecting body 40 relative to the cavity 10 and the movement of the connecting shaft 20 relative to the connecting piece 41, i.e. during the assembly of the lamp head 30 and the cavity 10, the connecting body 40 rotates relative to the lamp head 30, and there is a frictional resistance between the second connecting portion 412 of the connecting piece 41 and the lamp head 30. Since the surface of the second connecting portion 412 facing the cavity 10 is provided with the lubricating member 413, the lamp head 30 is mounted on the lubricating member 413, the second connecting portion 412 contacts the lamp head 30 through the lubricating member 413, and the design of the lubricating member 413 is conducive to reducing the frictional resistance between the second connecting portion 412 and the lamp head 30, improving the smoothness of the rotation of the connecting body 40 relative to the cavity 10, and facilitating the assembly of the lamp head 30 and the cavity 10.

[0135] As shown in Figure 4 , Figure 11 and Figure 12 , the external processing gas is transported from the outside of the cavity 10 to the receiving cavity 14 through the first channel 16, and from the receiving cavity 14 to the outside of the cavity 10 through the second channel 17, and the processing gas flows in the receiving cavity 14. When the lamp head 30 is assembled with the cavity 10 through the connecting body 40, the plurality of lamp groups 34 of the lamp head 30 can emit heat-generating light, and the heat-generating light emitted by the plurality of lamp groups 34 is emitted from the openings of the plurality of receiving holes 33 and irradiated to the receiving table 15 through the cavity wall of the receiving cavity 14 to heat the receiving table 15. Thus, the heat-generating light emitted by the plurality of lamp groups 34 of the lamp head 30 heats the wafer mounted on the receiving table 15 through the receiving table 15, so as to form an epitaxial layer on the surface of the wafer. In this way, by controlling the light-emitting efficiency of the plurality of lamp groups 34 of the lamp head 30, the temperature of the wafer can be adjusted to control the crystal direction and growth rate of the epitaxial layer formed on the surface of the wafer, so as to facilitate the formation of a target epitaxial layer on the surface of the wafer.

[0136] As shown in Figure 4 , Figure 11 and Figure 12As shown, in the processing device 100 shown in the embodiments of the present application, the connecting body 40 can rotate relative to the cavity 10 and drive the lamp head 30 to move relative to the cavity 10, each connecting piece 41 can move relative to the connecting shaft 20, and each connecting shaft 20 can enter the matching groove 4115 and abut against the inner wall of the matching groove 4115. Specifically, the connecting shaft 20 can enter the matching groove 4115 from the opening groove 4117 and abut against the inner wall (i.e. the guide surface 4117b) of the opening groove 4117; the connecting shaft 20 can enter the clamping groove 4116 from the opening groove 4117 and abut against the inner wall (i.e. the clamping surface 4116a) of the clamping groove 4116. During the movement of each connecting shaft 20 from the opening groove 4117 to the clamping groove 4116, the connecting body 40 drives the lamp head 30 to move towards the cavity 10. When the connecting shaft 20 is located in the clamping groove 4116, the lamp head 30 abuts against the cavity 10. At this time, the lamp head 30 can stably emit the heating light into the receiving cavity 14 of the cavity 10 through the plurality of lamp heads 30, so as to heat the wafer received in the receiving cavity 14, thereby facilitating the formation of an epitaxial layer on the wafer surface.

[0137] It can be understood that, in the case where each connecting shaft 20 abuts against the inner wall of the matching groove 4115, under the action of no external force, through the cooperation of the connecting shaft 20 and the matching groove 4115, the connecting body 40 is relatively fixed with the cavity 10 in the axial direction of the cavity 10, that is, the connecting body 40 and the cavity 10 cannot move relative to each other in the axial direction of the cavity 10, and the lamp head 30 abutting against the connecting body 40 cannot move relative to the cavity 10 in the axial direction of the cavity 10. That is, through the cooperation of the connecting shaft 20 and the matching groove 4115, the cavity 10 and the lamp head 30 cannot move relative to each other in the axial direction of the cavity 10, and the cavity 10 is assembled with the lamp head 30 through the connecting body 40. Compared with the existing solution that the cavity 10 and the lamp head 30 are assembled through buckling, on the one hand, it is not easy to deform, which is conducive to improving the installation precision, stability and reliability of the assembled lamp head 30 and cavity 10, and further improving the structural stability of the processing device 100; on the other hand, the operator only needs to rotate the connecting body 40 relative to the cavity 10 to realize the assembly of the lamp head 30 and the cavity 10, which is simple to operate and convenient to assemble.

[0138] As each connecting shaft 20 moves from the opening slot 4117 toward the snap-fit ​​slot 4116, the connecting body 40 drives the lamp head 30 to move toward the cavity 10. During the assembly process of the lamp head 30 and the cavity 10, the distance between the lamp head 30 and the cavity 10 in the axial direction of the cavity 10 gradually decreases. This is beneficial in two ways: firstly, it helps to reduce the size of the lamp head 30 in the axial direction of the cavity 10 after assembly, which is beneficial to the miniaturization design of the processing device 100; secondly, it helps to shorten the distance that the heating light emitted by the lamp head 30 is focused on the wafer housed in the cavity 10, which helps to improve the heating efficiency of the lamp head 30 on the wafer and facilitates the formation of an epitaxial layer on the wafer surface.

[0139] like Figure 10 , Figure 11 and Figure 12 As shown, when the connecting shaft 20 is located in the snap-fit ​​groove 4116, that is, when the lamp holder 30 is assembled with the cavity 10 through the connecting body 40, in the radial direction of the cavity 10, the projection of the mounting hole 4118 of each connecting member 41 overlaps with the projection of a fixing hole 19 of the cavity 10. Specifically, in the radial direction of the cavity 10, the projections of the mounting holes 4118 of the four connecting members 41 overlap with the projections of the four fixing holes 19 of the cavity 10.

[0140] like Figure 11 , Figure 12 and Figure 13 As shown, exemplarily, the number of locking shafts 50 is three. The three locking shafts 50 pass through the mounting holes 4118 of the three connectors 41 respectively, and are fixedly mounted in the three fixing holes 19 of the cavity 10, by means including but not limited to threads. In other words, when the connecting shaft 20 is located in the snap-fit ​​groove 4116, the locking shaft 50 passes through the mounting holes 4118 of the connector 41 and is fixedly mounted in the fixing holes 19 of the cavity 10. That is, when the connecting shaft 20 is located in the snap-fit ​​groove 4116, in the radial direction of the cavity 10, the projection of the fixing hole 19 overlaps with the projection of the mounting hole 4118 of one connector 41, and the locking shaft 50 passes through the fixing hole 19 and is mounted in the mounting hole 4118. In some other embodiments, the number of locking shafts 50 may be one, two, or more, and this application does not specifically limit this.

[0141] It can be understood that when the connecting body 40 rotates relative to the cavity 10, the connecting member 41 rotates relative to the cavity 10, and the connecting shaft 20 moves relative to the connecting member 41. Since the connecting shaft 20 is located in the clamping groove 4116, that is, the lamp holder 30 is assembled with the cavity 10, the locking shaft 50 passes through the fixing hole 19 and is fitted into the assembly hole 4118. After the lamp holder 30 is assembled with the cavity 10, the cooperation of the locking shaft 50 with the fixing hole 19 and the assembly hole 4118 can limit the rotation of the connecting body 40 relative to the cavity 10, thereby limiting the movement of the connecting shaft 20 relative to the connecting member 41, which is beneficial to improve the structural stability and reliability of the lamp holder 30 after being assembled with the cavity 10.

[0142] Please refer to Figure 14 , combined with Figure 4 and Figure 5 , Figure 14 is Figure 3 the second lamp holder 60 of the processing device 100 shown in the cross-sectional view along the A-A line.

[0143] In some embodiments, in the axial direction of the cavity 10, the second lamp holder 60 is located on the side of the cavity 10 away from the lamp holder 30 and is fixedly connected with the cavity 10. Specifically, the second lamp holder 60 is located on the side of the second surface 12 of the cavity 10 away from the first surface 11, and the second lamp holder 60 is fixedly connected to the second surface 12.

[0144] In some embodiments, the second lamp holder 60 includes a second main body part 61 and a second matching part 62. The second matching part 62 is arranged around the outside of the second main body part 61 and is fixedly connected with the second main body part 61. For example, the second main body part 61 and the second matching part 62 are integrally formed. In this way, the overall strength of the second lamp holder 60 is improved, and the structural stability of the second lamp holder 60 is improved. The second main body part 61 is a cylindrical body. In other embodiments, the second main body part 61 can also be various shapes including but not limited to a rectangular block or a rectangular column, which is not limited in the present application.

[0145] The second main body part 61 includes a third end face 611 and a fourth end face 612. In the axial direction of the cavity 10, the third end face 611 is arranged opposite to the fourth end face 612. The second matching part 62 includes a third matching face 621 and a fourth matching face 622. In the axial direction of the cavity 10, the third matching face 621 is arranged opposite to the fourth matching face 622. In the axial direction of the cavity 10, the third matching face 621 is located between the third end face 611 and the fourth end face 612 and is spaced apart from the third end face 611 and the fourth end face 612. The fourth matching face 622 is away from the third end face 611, and in the radial direction of the cavity 10, the fourth matching face 622 is flush with the fourth end face 612. Among them, the third end face 611 and the third matching face 621 are away from the cavity 10, and the fourth end face 612 and the fourth matching face 622 are towards the cavity 10.

[0146] In some embodiments, the second lamp head 60 is provided with a second receiving hole 63. Specifically, the second body part 61 is provided with the second receiving hole 63. The second receiving hole 63 extends along the axial direction of the cavity 10 and has an opening on the fourth end surface 612 of the second body part 61. The second receiving hole 63 is used to receive the second lamp group 64. The second lamp group 64 is received in the second receiving hole 63 by means including but not limited to welding or gluing. In other words, the second body part 61 is embedded with the second lamp group 64, and the second lamp group 64 is exposed outside the second lamp head 60 from the fourth end surface 612 of the second body part 61. The second lamp head 60 is embedded with the second lamp group 64, and the second lamp group 64 is exposed outside the second lamp head 60 from the surface of the second lamp head 60 facing the cavity 10. The second lamp group 64 is used to emit heat-generating light.

[0147] For example, the number of the second receiving hole 63 is two, and the number of the second lamp group 64 is also two, and the two second lamp groups 64 are respectively received in the two second receiving holes 63. In the radial direction of the cavity 10, the two second receiving holes 63 are arranged at intervals. In the radial direction of the cavity 10, the two second lamp groups 64 are arranged at intervals. In other embodiments, the number of the second receiving hole 63 and the second lamp group 64 can also be one, three or more, which is not limited in the present application.

[0148] In some embodiments, the second lamp head 60 is provided with a through hole 65. Specifically, the second fitting part 62 is provided with the through hole 65. The through hole 65 extends along the axial direction of the cavity 10 and has two openings, one on the third fitting surface 621 and the other on the fourth fitting surface 622. For example, the number of the through hole 65 is two, and the two through holes 65 are arranged at intervals around the second body part 61. In other embodiments, the number of the through hole 65 can also be one, three or more, which is not limited in the present application.

[0149] In some embodiments, in the axial direction of the cavity 10, the second lamp head 60 is located on the side of the second surface 12 of the cavity 10 facing away from the first surface 11, the fourth end surface 612 of the second body part 61 and the fourth matching surface 622 of the second matching part 62 are opposite and in contact with the second surface 12 of the cavity 10, and the third end surface 611 of the second body part 61 and the third matching surface 621 of the second matching part 62 face away from the second surface 12 of the cavity 10. Among them, in the axial direction of the cavity 10, the projections of the two through holes 65 of the second matching part 62 respectively overlap the projections of the two matching holes 19b of the cavity 10. The second lamp head 60 is fixedly connected with the cavity 10 through the fasteners 70. Specifically, the number of fasteners 70 is two, and the two fasteners 70 pass through the two through holes 65 of the second lamp head 60 respectively by means of, but not limited to, threaded connection, gluing, interference fit, and are fixedly installed in the two matching holes 19b of the cavity 10 respectively. Through the cooperation of the two fasteners 70 and the two through holes 65 and the two matching holes 19b, the second lamp head 60 is fixedly stacked on the second surface 12 of the cavity 10. The second lamp head 60 is fixedly connected to the second surface 12 of the cavity 10.

[0150] It can be understood that the plurality of second lamp groups 64 of the second lamp head 60 can emit heat-generating light, and the light emitted by the plurality of second lamp groups 64 can be emitted from the openings of the plurality of second accommodating holes 63 respectively, and irradiated to the wafer on the receiving table 15 through the cavity wall of the accommodating cavity 14, so as to heat the wafer, so that the process gas flowing in the accommodating cavity 14 forms an epitaxial layer on the surface of the wafer. In this way, on the basis of heating the wafer by the lamp head 30, the wafer can be further heated by the second lamp head 60, which facilitates to improve the heating efficiency and is beneficial to save the processing time. In addition, by controlling the light-emitting efficiency of the second lamp head 60, the temperature of the wafer can be adjusted to control the crystal direction and growth rate of the epitaxial layer formed on the surface of the wafer, which is convenient for forming a target epitaxial layer on the surface of the wafer.

[0151] Please refer again to Figure 1 、 Figure 11 and Figure 12The processing device 100 provided by the application can be applied to the semiconductor device 1000, and the processing device 100 can be accommodated in the shell 200 of the semiconductor device 1000. In the processing device 100 provided by the application, the cavity 10 is used to accommodate a wafer, the lamp head 30 can emit heat light to heat the wafer, and the operator can adjust the temperature of the wafer by controlling the light-emitting efficiency of the lamp head 30, so as to form an epitaxial layer on the surface of the wafer. The connecting body 40 can rotate relative to the cavity 10 and drive the lamp head 30 to move relative to the cavity 10, each connecting piece 41 can move relative to the connecting shaft 20, and each connecting shaft 20 can enter the matching groove 4115 and abut against the inner wall of the matching groove 4115. In the case that each connecting shaft 20 abuts against the inner wall of the matching groove 4115, under the action of no external force, through the cooperation of the connecting shaft 20 and the matching groove 4115, the connecting body 40 is relatively fixed with the cavity 10 in the axial direction of the cavity 10, that is, the connecting body 40 and the cavity 10 cannot move relative to each other in the axial direction of the cavity 10, and the lamp head 30 abutting against the connecting body 40 cannot move relative to the cavity 10 in the axial direction of the cavity 10. That is, through the cooperation of the connecting shaft 20 and the matching groove 4115, the cavity 10 and the lamp head 30 cannot move relative to each other in the axial direction of the cavity 10, and the cavity 10 is assembled with the lamp head 30 through the connecting body 40.

[0152] Compared with the prior art that the cavity 10 and the lamp head 30 are assembled through buckling, on the one hand, the cavity 10 and the lamp head 30 are not easy to deform, which is beneficial to improve the installation precision, stability and reliability of the cavity 10 and the lamp head 30 after assembly, and further beneficial to improve the structural stability of the processing device 100; on the other hand, the operator only needs to rotate the connecting body 40 relative to the cavity 10 to realize the assembly of the cavity 10 and the lamp head 30, which is not only simple to operate and convenient to assemble, but also ensures that the processing device 100 accommodated in the shell 200 of the semiconductor device 1000 can be assembled on one side, avoids surrounding the processing device 100 to realize the assembly of the cavity 10 and the lamp head 30, and further avoids reserving an installation operation space for the assembly of the cavity 10 and the lamp head 30 in the shell 200, which is beneficial to the miniaturization design of the shell 200, and further beneficial to the miniaturization design of the semiconductor device 1000.

[0153] The above is only part of the embodiments and implementation manners of the application, and the protection scope of the application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the application, which should be covered in the protection scope of the application. Therefore, the protection scope of the application should be subject to the protection scope of the claims.

Claims

1. A processing apparatus characterized by comprising: The processing device comprises: a cavity, a peripheral wall of the cavity is provided with a plurality of connecting shafts, the plurality of connecting shafts are arranged at intervals along the circumference of the cavity and extend along the radial direction of the cavity; a lamp head, the lamp head is located on one side of the cavity in the axial direction of the cavity; and a connecting body, the connecting body abuts against the lamp head, the connecting body comprises a plurality of connecting pieces, the plurality of connecting pieces are located outside the cavity and arranged at intervals along the circumference of the cavity, each of the connecting pieces is provided with a matching groove, and the matching groove penetrates through the connecting piece; wherein the connecting body can rotate relative to the cavity and drive the lamp head to move relative to the cavity, each of the connecting pieces can move relative to the connecting shaft, and each of the connecting shafts can enter the matching groove and abut against the inner wall of the matching groove; the matching groove comprises an open groove and a clamping groove, the open groove and the clamping groove are sequentially communicated along the circumference of the cavity, and the open groove extends through the connecting piece along the circumference of the cavity; each of the connecting shafts can enter the clamping groove from the open groove and abut against the inner wall of the clamping groove; wherein, when the connecting shaft is located in the open groove, the lamp head has a spacing from the cavity in the axial direction of the cavity, during the movement of each of the connecting shafts from the open groove to the clamping groove, the connecting body drives the lamp head to move towards the cavity, and when the connecting shaft is located in the clamping groove, the lamp head abuts against the cavity.

2. The processing apparatus of claim 1, wherein the inner wall of the clamping groove comprises a clamping surface, the clamping surface is perpendicular to the axial direction of the cavity, the inner wall of the open groove comprises a guide surface, the guide surface is connected with the clamping surface, the guide surface is arranged obliquely relative to the clamping surface, so that the caliber of the matching groove presents a decreasing trend from the open groove to the clamping groove; wherein, when the connecting shaft is located in the open groove, the connecting shaft abuts against the guide surface, and when the connecting shaft is located in the clamping groove, the connecting shaft abuts against the clamping surface.

3. The processing apparatus of claim 2, wherein the included angle between the guide surface and the clamping surface is greater than 0° and less than 60°.

4. The apparatus of claim 1 wherein, the connecting shaft comprises a bearing, the bearing is located outside the cavity, the connecting body can rotate relative to the cavity, and the bearing of each of the connecting shafts can enter the matching groove and abut against the inner wall of the matching groove.

5. The processing apparatus according to any one of claims 1 to 4, characterized by the connecting body comprises a connecting ring, the plurality of connecting pieces are fixedly connected with the connecting ring and arranged at intervals along the circumference of the connecting ring, and in the axial direction of the cavity, the connecting ring is located on the side of the lamp head away from the cavity and is sleeved on the outside of the lamp head.

6. The processing apparatus of claim 5, wherein The connecting piece comprises a first connecting part and a second connecting part, the first connecting part comprises a first wall surface and a second wall surface, the first wall surface faces the cavity in the radial direction of the cavity, the second wall surface faces away from the cavity, the first connecting part is provided with the matching groove, the matching groove extends from the first wall surface to the second wall surface in the radial direction of the cavity, the second connecting part is fixedly connected to the first wall surface, the connecting ring is located on the side of the second connecting part away from the first wall surface and is fixedly connected with the second connecting part, and the second connecting part is located on the side of the lamp head away from the cavity in the axial direction of the cavity and abuts against the lamp head.

7. The processing apparatus of claim 6, wherein The surface of the second connecting part facing the cavity is provided with a lubricating piece, and the lamp head is mounted on the lubricating piece.

8. The processing apparatus of claim 7, wherein The lamp head comprises a main body part and a matching part, the matching part surrounds the periphery of the main body part, the connecting ring is located on the side of the matching part away from the cavity in the axial direction of the cavity and is sleeved on the outside of the main body part, and the matching part abuts against the surface of the lubricating piece away from the second connecting part.

9. The processing apparatus according to any one of claims 1 to 4, characterized by The connecting piece is provided with an assembly hole penetrating through the connecting piece, the cavity is provided with a fixing hole extending in the radial direction of the cavity and having an opening, the opening of the fixing hole is located on the peripheral wall of the cavity, and the machining device further comprises a locking shaft. When the connecting shaft is located in the clamping groove, the projection of the fixing hole overlaps the projection of the assembly hole of one connecting piece in the radial direction of the cavity, and the locking shaft penetrates through the fixing hole and is sleeved in the assembly hole.

10. The processing apparatus according to any one of claims 1 to 4, characterized by The cavity is provided with a guide shaft, the guide shaft extends from the surface of the cavity facing the lamp head and extends in the axial direction of the cavity, the lamp head is provided with a limiting hole penetrating through the lamp head in the axial direction of the cavity, and the guide shaft is sleeved in the limiting hole of the lamp head.

11. The processing apparatus according to any one of claims 1 to 4, characterized by The cavity comprises a receiving cavity, the lamp head is embedded with a lamp group, the lamp group is exposed outside the lamp head from the surface of the lamp head facing the cavity, and the projection of the lamp group is located in the receiving cavity in the axial direction of the cavity.

12. The processing apparatus according to any one of claims 1 to 4, characterized by The machining device further comprises a second lamp head, the second lamp head is located on the side of the cavity away from the lamp head and is fixedly connected with the cavity.

13. A semiconductor device, characterized by comprising: The semiconductor device comprises the machining device according to any one of claims 1 to 12 and a shell, and the machining device is accommodated in the shell.

Images