Semiconductor processing wafer basket claw clamping equipment with state detection function

Abstract

The invention relates to the technical field of semiconductor cleaning, in particular to a piece basket claw clamping device with a state detection function for semiconductor processing, which comprises a shell, an immersion cleaning tank is mounted on the shell, a storage box is further mounted on the shell, a lifting assembly is arranged in the storage box, and the lifting assembly can drive an external attached box arranged on the storage box to slide relative to the shell. When the outer attached box slides, a lifting assembly arranged in the shell and connected with the outer attached box can drive a bearing piece installed in the immersion cleaning tank to slide in the depth direction of the immersion cleaning tank. Two groups of rotary support arms are symmetrically mounted on the outer attached box, each group of rotary support arms is provided with a hook claw, the two groups of rotary support arms are connected with a deflection assembly arranged in the outer attached box, and when the deflection assembly acts to drive the two groups of rotary support arms to rotate reversely and a semiconductor arranged in the immersion cleaning tank is clamped, the two groups of rotary support arms are driven to rotate reversely; and the state detection assembly is arranged in the hook claw and can detect the position state of the hook claw, so that the hook claw is in a normal clamping state.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor cleaning, in particular to a semiconductor processing sheet basket claw clamping device with state detection function. Background Art

[0002] Semiconductor wet tank cleaning equipment is an important equipment in the semiconductor industry cleaning process, mainly composed of a cleaning tank, a heating system, a rotation system, a nozzle system, a discharge system, etc. It removes impurities and residues on the surface of semiconductor wafers by wet cleaning, thereby ensuring the quality and performance of semiconductor products.

[0003] In semiconductor tank wet process equipment, a wafer basket claw clamping structure is generally used to achieve a stable clamping and transportation effect. However, most semiconductor tank cleaning equipment currently produced by manufacturers only has a single-sided wafer basket detection. This detection part is located in the middle of the wafer basket and can only detect the clamping state, but not the actual state of the wafer basket, such as tilting, overlapping baskets and other dangerous states. These states will cause damage to the wafers in the wafer basket during the next clamping or process, causing huge losses. Summary of the invention

[0004] The object of the present invention is to provide a semiconductor processing wafer basket claw clamping device with state detection to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions: A semiconductor processing sheet basket claw clamping device with state detection, comprising: A shell, a washing tank is installed on the shell, and a storage box is fixedly installed on the shell, a lifting assembly is arranged in the storage box, and the lifting assembly can drive an external auxiliary box slidably arranged on the storage box to slide relative to the shell, and when the external auxiliary box slides, the lifting assembly arranged in the shell and connected to the external auxiliary box can drive the supporting member installed in the washing tank to slide along the depth direction of the washing tank; Two groups of rotating arms are symmetrically installed on the external box, each group of rotating arms is provided with hooks, and the two groups of rotating arms are connected to the deflection assembly arranged in the external box. When the deflection assembly is actuated to drive the two groups of rotating arms to rotate in opposite directions, thereby clamping the semiconductor placed in the immersion tank, the state detection assembly arranged in the hook can detect the position state of the hook to put the hook in a normal clamping state.

[0006] The semiconductor processing sheet basket claw clamping device with status detection as described above: the lifting component includes a lifting plate fixedly connected to the external accessory box, a threaded sleeve and a lifting sleeve are fixedly arranged on the lifting plate, the threaded sleeve is threadedly connected to the screw rod rotatably installed in the storage box, and the lifting sleeve is slidably connected to the sliding rod fixedly arranged in the external accessory box.

[0007] The semiconductor processing sheet basket claw clamping device with status detection as described above: the lifting assembly includes a moving structure and a trigger structure, the moving structure includes a supporting plate fixedly arranged in the shell, a guide plate is slidably arranged on the supporting plate, and two groups of guide plates are symmetrically arranged along the length direction of the supporting plate, each group of guide plates is provided with an engaging groove body, and a first pulley rotatably connected to the lifting plate is slidably arranged in the engaging groove body.

[0008] The semiconductor processing sheet basket claw clamping device with state detection as described above: the trigger structure includes a trigger block fixedly connected to the guide plate, and the trigger block can drive the supporting member to move relative to the immersion tank.

[0009] The semiconductor processing sheet basket claw clamping device with status detection as described above: the supporting member includes a placement plate slidably arranged in the immersion tank, and a plurality of sets of fixing rods are evenly installed on the side of the placement plate facing the supporting plate, and a second pulley is rotatably installed on one end of the fixing rod away from the placement plate.

[0010] The semiconductor processing sheet basket claw clamping device with state detection as described above: the deflection assembly includes a locking structure and a driving structure, the driving structure includes a tooth plate slidably arranged in the outer auxiliary box, and the tooth plate is symmetrically arranged in two groups along the length direction of the outer auxiliary box, and each group of the tooth plates is provided with a fixed plate, the two groups of the fixed plates are connected to the double-headed cylinder fixedly arranged in the outer auxiliary box, and the two groups of the tooth plates are respectively meshed with the coaxially fixed gears on the two groups of the rotating arms.

[0011] The semiconductor processing sheet basket claw clamping device with status detection as described above: the locking structure includes a plug-in rod fixedly installed in the external box, a sleeve sleeve is slidably provided on the plug-in rod, a first spring is rotatably installed on the end of the sleeve sleeve away from the plug-in rod, one end of the first spring abuts against the plug-in rod, and the other end abuts against the sleeve sleeve, and a sliding wheel is rotatably installed on the side of the sleeve sleeve away from the plug-in rod, and the sliding wheel cooperates with a trigger member fixedly provided on the tooth plate.

[0012] The semiconductor processing sheet basket claw clamping device with state detection as described above: the trigger member includes a moving block fixedly connected to the tooth plate, and the moving block is formed with a first locking groove, a first inclined surface, a second locking groove and a second inclined surface.

[0013] The semiconductor processing sheet basket claw clamping device with state detection as described above: the detection component includes a state sensor inserted in the hook claw, and the hook claw is provided with a protective cover.

[0014] Compared with the prior art, the present invention has the following beneficial effects: By setting a lifting assembly and a lifting assembly, in the process of the lifting assembly driving the external box to descend, the placement plate arranged in the immersion tank is pushed upward, so as to facilitate the subsequent rotating support arm to perform clamping operations; and when the placement plate rises, the height sensor arranged in the shell will detect the position of the second pulley on the placement plate to ensure that the placement plate has risen to the pre-clamping position at this time, to prevent the subsequent rotating support arm from having empty clamping or unstable clamping during clamping, and to avoid damage to the semiconductor during clamping. Once an abnormality occurs in the height detection, the height sensor will emit an audible and visual alarm, and then the deflection assembly will not move, and the clamping action will stagnate, so as to prevent further losses in the future; At the same time, by setting a deflection assembly, the two sets of rotating arms and hooks are driven to perform clamping operations by utilizing the cooperation between the locking structure and the driving structure. When clamping, the clamping force of the hook on the semiconductor is provided by the first spring, so that when the hook performs the clamping operation, the clamping damage to the semiconductor is minimized; A detection component is also provided on the hook, which detects the status of the hook. Once the four groups of status sensors do not meet the status requirements at the same time, an alarm will be issued to indicate that the clamping plate is tilted or overlapped. After the alarm, the equipment will stop immediately to avoid further losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The schematic diagram is a structural diagram of a semiconductor processing wafer basket claw clamping device with status detection.

[0016] Figure 2 The present invention is a schematic diagram of the structure inside the shell of a semiconductor processing wafer basket claw clamping device with state detection.

[0017] Figure 3 The present invention is a structural schematic diagram of the connection between the storage box and the external accessory box in a semiconductor processing sheet basket claw clamping device with status detection.

[0018] Figure 4 The schematic diagram is a structural diagram of the interior of a storage box in a semiconductor processing wafer basket claw clamping device with status detection.

[0019] Figure 5 The present invention is a schematic diagram of the structure of a supporting member in a semiconductor processing wafer basket claw clamping device with state detection.

[0020] Figure 6 The present invention is a schematic diagram of the structure of a lifting assembly in a semiconductor processing wafer basket claw clamping device with status detection.

[0021] Figure 7 The present invention is a schematic diagram of the structure inside the outer and inner boxes of a semiconductor processing wafer basket claw clamping device with status detection.

[0022] Figure 8 The present invention is a schematic diagram of the structure of a deflection assembly in a semiconductor processing wafer basket claw clamping device with state detection.

[0023] Fig. 9 The present invention is a schematic diagram of the structure of the locking structure and the triggering member in a semiconductor processing wafer basket claw clamping device with state detection.

[0024] Fig.10 The present invention is a schematic diagram of the structure of the detection component in the semiconductor processing film basket claw clamping device with state detection.

[0025] In the figure: 1, housing; 101, supporting plate; 102, height sensor; 2, storage box; 3, external box; 301, guide rod; 4, immersion tank; 401, plug-in cylinder; 5, guide plate; 501, vertical slot; 502, inclined slot; 6, trigger block; 601, guide inclined surface; 7, first pulley; 8, rotating support arm; 9, mounting block; 10, hook; 11, clamping plate; 12, lifting plate; 13, screw rod; 14, threaded sleeve; 15, lifting Sleeve; 16, slide bar; 17, placement plate; 1701, fixed rod; 18, second pulley; 19, gear; 20, double-headed cylinder; 21, tooth plate; 22, moving block; 2201, first locking groove; 2202, first inclined surface; 2203, second inclined surface; 2204, second locking groove; 23, socket tube; 24, first spring; 25, plug-in rod; 26, fixed plate; 27, status sensor; 28, protective cover; 29, second spring. DETAILED DESCRIPTION

[0026] Various exemplary embodiments, features and aspects of the present application will be described in detail below with reference to the accompanying drawings. The same reference numerals in the accompanying drawings represent elements with the same or similar functions. Although various aspects of the embodiments are shown in the accompanying drawings, the drawings are not necessarily drawn to scale unless otherwise specified.

[0027] The word “exemplary” is used exclusively herein to mean “serving as an example, example, or illustration.” Any embodiment described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other embodiments.

[0028] In addition, in order to better illustrate the present application, numerous specific details are provided in the specific embodiments below. It should be understood by those skilled in the art that the present application can also be implemented without certain specific details. In some examples, methods, means, and elements well known to those skilled in the art are not described in detail in order to highlight the subject matter of the present application.

[0029] See also Figure 1-Figure 10 In an embodiment of the present invention, a semiconductor processing sheet basket claw clamping device with state detection includes: A shell 1, on which a immersion tank 4 is installed, and a storage box 2 is also fixedly installed on the shell 1, and a lifting assembly is arranged in the storage box 2, and the lifting assembly can drive an external accessory box 3 slidably arranged on the storage box 2 to slide relative to the shell 1, and when the external accessory box 3 slides, the lifting assembly arranged in the shell 1 and connected to the external accessory box 3 can drive a supporting member installed in the immersion tank 4 to slide along the depth direction of the immersion tank 4; The lifting assembly includes a lifting plate 12 fixedly connected to the external accessory box 3, a threaded sleeve 14 and a lifting sleeve 15 fixedly arranged on the lifting plate 12, the threaded sleeve 14 is threadedly connected to a screw rod 13 rotatably installed in the storage box 2, and the lifting sleeve 15 is slidably connected to a slide rod 16 fixedly arranged in the external accessory box 3; Preferably, see Figure 3 , Figure 4 The lifting sleeve 15 and the threaded sleeve 14 are symmetrically arranged along the length direction of the lifting plate 12. Due to the cooperation between the lifting sleeve 15 and the sliding rod 16, the lifting plate 12 can only be lifted and lowered along the vertical direction of the storage box 2 space, and the end of the screw rod 13 away from the external auxiliary box 3 is coaxially fixedly connected with the output shaft of the servo motor fixedly installed at the bottom of the storage box 2. In the initial state, the external auxiliary box 3 is away from the storage box 2, and the lifting plate 12 is away from the servo motor. When it is necessary to clamp the semiconductor in the immersion tank 4, the servo motor is driven, and the servo motor output shaft that continuously rotates in the same direction will drive the screw rod 13 to rotate continuously in the same direction, and then the threaded sleeve 14 will be driven to descend along the axial direction of the screw rod 13 until the screw rod 13 moves to the end of the stroke of the screw rod 13, and the external auxiliary box 3 is close to the immersion tank 4, so that the rotating arm 8 arranged on the external auxiliary box 3 is convenient for clamping the semiconductor in the immersion tank 4.

[0030] The lifting assembly includes a moving structure and a triggering structure, wherein the moving structure includes a supporting plate 101 fixedly arranged in the housing 1, and a guide plate 5 is slidably arranged on the supporting plate 101, and two groups of guide plates 5 are symmetrically arranged along the length direction of the supporting plate 101, and each group of guide plates 5 is provided with an embedded groove body, and a first pulley 7 rotatably connected to the lifting plate 12 is slidably arranged in the embedded groove body; For details, please refer to Figure 2 , Figure 5 , Figure 6 The guide plate 5 is provided with Figure 6 As shown in the vertical slot 501 and the inclined slot 502, in the initial state, the above two groups of first pulleys 7 are located at the end of the stroke of the vertical slot 501 away from the inclined slot 502. When the servo motor drives the screw rod 13 to force the lifting plate 12 to descend, the first pulley 7 will first slide along the vertical slot 501. At this time, the position of the guide plate 5 remains unchanged until the first pulley 7 is combined with the inclined slot 502. The continuously descending lifting plate 12 will cause the first pulley 7 and the slot wall of the inclined slot 502 to be squeezed. At this time, the squeezed inclined slot 502 will drive the guide plate 5 away from the storage box 2, and then the trigger structure fixedly connected to the guide plate 5 will cooperate with the supporting member to make the supporting member move along the depth direction of the immersion tank 4 toward the direction away from the supporting plate 101, thereby protruding the semiconductor placed on the supporting member out of the immersion tank 4 for subsequent rotating support arm 8 to clamp.

[0031] The trigger structure includes a trigger block 6 fixedly connected to the guide plate 5, and the trigger block 6 can drive the support member to move relative to the immersion tank 4; Preferably, see Figure 5 , Figure 6 The trigger blocks 6 are arranged in two groups equidistantly along the length direction of the support plate 101. The two groups of trigger blocks 6 are fixedly connected to each other and connected to the guide plate 5. They can move synchronously with the guide plate 5. The two groups of trigger blocks 6 are arranged in a "right-angle trapezoidal" structure, including a group of guide slopes 601 (such as Figure 6 As shown in the figure), the guide slope 601 cooperates with the supporting member to drive the supporting member to slide relative to the immersion tank 4.

[0032] The supporting member includes a placement plate 17 slidably disposed in the immersion tank 4, and a plurality of fixed rods 1701 are evenly installed on one side of the placement plate 17 facing the supporting plate 101, and a second pulley 18 is rotatably installed on one end of the fixed rod 1701 away from the placement plate 17; Specifically, Figure 5 As shown, the above-mentioned fixing rods 1701 are provided with four groups, wherein two groups of fixing rods 1701 arranged along the width direction of the immersion tank 4 are in the same straight line and cooperate with one group of trigger blocks 6. In detail, each group of fixing rods 1701 is inserted into the plug-in cylinder 401 arranged at the bottom of the immersion tank 4. In particular, the four groups of fixing rods 1701 are respectively connected with the bottom of the immersion tank 4 in a sliding and sealing manner to prevent the solution in the immersion tank 4 from leaking into the plug-in cylinder 401, and the above-mentioned fixing rods 1701 are also slidably provided with a second spring 29, one end of which abuts against the immersion tank 4, and the other end abuts against the gasket formed on the fixing rod 1701; It should be noted that the second spring 29 is always in a compressed state. At this time, since the immersion tank 4 is fixedly mounted on the shell 1, the compressed second spring 29 will push the fixing rod 1701 to move toward the ground, so that the second pulley 18 contacts the guide inclined surface 601 of the trigger block 6. At this time, the placement plate 17 is in contact with the bottom of the immersion tank 4. In combination with the above, when the external box 3 is descending, due to the cooperation between the first pulley 7 and the inclined groove 502, the guide plate 5 will drive the trigger block 6 to move away from the storage box 2. At this time, the guide inclined surface 601 will squeeze the second pulley 18 upward, so that the second spring 29 is further compressed, and then the placement plate 17 gradually protrudes outward away from the bottom of the immersion tank 4, thereby facilitating the subsequent rotating support arm 8 to perform clamping operations; In particular, see Figure 5 A height sensor 102 is fixedly mounted on the inner wall of the housing 1. The height sensor 102 is used to monitor the height position of the second pulley 18. When the placement plate 17 rises to the highest point under the cooperation of the guide slope 601, the second spring 29 and the second pulley 18, the height sensor 102 will detect the position of the second pulley 18 to ensure that the placement plate 17 has risen to the pre-clamping position at this time, to prevent the subsequent rotating arm 8 from being empty or unstable during clamping, and to avoid damage to the semiconductor during clamping; After the clamping is completed, the lifting plate 12 driven to descend by the servo motor will pull the guide plate 5 gradually closer to the storage box 2 under the cooperation of the first pulley 7 and the inclined groove 502. At this time, the trigger block 6 following the movement of the guide plate 5 will slowly return to the initial position. During this process, the second spring 29 will continue to release elastic potential energy, so that the second pulley 18 is always in contact with the guide inclined surface 601, and then the placement plate 17 gradually approaches the bottom of the immersion tank 4, until the guide plate 5 returns to the initial position, the first pulley 7 is combined with the vertical groove 501, and the placement plate 17 is in contact with the bottom of the immersion tank 4 and returns to the initial position, thereby facilitating the immersion process of the next group of semiconductors.

[0033] For further information, see Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 7 , Figure 8 , Fig. 9 , Fig.10Two groups of rotating arms 8 are symmetrically mounted on the external box 3, each group of rotating arms 8 is provided with hooks 10, and the two groups of rotating arms 8 are connected to the deflection assembly provided in the external box 3. When the deflection assembly is actuated to drive the two groups of rotating arms 8 to rotate in opposite directions, thereby clamping the semiconductor placed in the immersion tank 4, the state detection assembly provided in the hooks 10 can detect the position state of the hooks 10, so as to place the hooks 10 in a normal clamping state; The deflection assembly includes a locking structure and a driving structure, and the driving structure includes a tooth plate 21 slidably arranged in the external accessory box 3, and two groups of the tooth plates 21 are symmetrically arranged along the length direction of the external accessory box 3, and each group of the tooth plates 21 is provided with a fixing plate 26, and the two groups of the fixing plates 26 are connected to the double-headed cylinder 20 fixedly arranged in the external accessory box 3, and the two groups of the tooth plates 21 are respectively meshed with the coaxially fixed gears 19 on the two groups of the rotating arms 8; For details, please refer to Figure 7 , Figure 8 , Fig. 9 The fixing plate 26 is provided with a slide groove, the tooth plate 21 is slidably connected with a guide rod 301 fixedly arranged in the outer attachment box 3, and the guide rod 301 is arranged along the width direction of the outer attachment box 3. In the initial state, the telescopic end of the double-headed cylinder 20 is located at the end of the stroke of the slide groove away from the tooth plate 21. At this time, the hook claws 10 on the two sets of rotating arms 8 are in the unfolded state (such as Figure 7 As shown in the figure, when the external box 3 drops to the lowest height, if the height sensor 102 inside the shell 1 detects the height of the second pulley 18 normally, the double-headed cylinder 20 will receive the signal feedback from the height sensor 102 and start to act. (If the height detection is abnormal, the height sensor 102 will send out an audible and visual alarm to remind the operator that there is a failure in the lifting height of the placement plate 17 inside the immersion tank 4 or the external box 3. Then the double-headed cylinder 20 will not act, and the clamping action will stagnate to prevent further losses in the future.) The telescopic end retracts, pulling the two sets of fixed plates 26 and the toothed plates 21 closer to each other. At this time, the two sets of toothed plates 21 approaching each other will force The two sets of gears 19 drive the hooks 10 set on the rotating support arm 8 to approach each other, thereby performing the clamping operation. After the double-headed cylinder 20 stops moving, the two sets of tooth plates 21 will continue to approach each other autonomously with the cooperation of the locking structure and the trigger member set on the tooth plate 21. At this time, the fixed plate 26 will slide relative to the telescopic end of the double-headed cylinder 20 until the end of the slide groove close to the tooth plate 21 is combined with the telescopic end of the double-headed cylinder 20. The position of the tooth plate 21 will be fixed by the locking structure, and accordingly, the position of the rotating support arm 8 will also be fixed at the same time. At this time, the hooks 10 on the two sets of rotating support arms 8 are in a clamping state, enclosing the semiconductor placed on the placement plate 17.

[0034] Further, the locking structure includes a plug rod 25 fixedly installed in the external accessory box 3, a sleeve 23 is slidably provided on the plug rod 25, a first spring 24 is rotatably installed on one end of the sleeve 23 away from the plug rod 25, one end of the first spring 24 abuts against the plug rod 25, and the other end abuts against the sleeve 23, and a sliding wheel is rotatably installed on the side of the sleeve 23 away from the plug rod 25, and the sliding wheel cooperates with a trigger member fixedly provided on the toothed plate 21; The trigger member includes a moving block 22 fixedly connected to the tooth plate 21 , and a first locking groove 2201 , a first inclined surface 2202 , a second locking groove 2204 and a second inclined surface 2203 are formed on the moving block 22 ; For details, please refer to Figure 8 , Fig. 9 The first locking groove 2201, the first inclined surface 2202 and the second inclined surface 2203, the second locking groove 2204 are symmetrically arranged (such as Fig. 9 As shown in the figure, in the initial state, the first spring 24 is in a pulled-up state. The first spring 24 in the pulled-up state will pull the sleeve 23 to have a tendency to move toward the plug-in rod 25, thereby causing the sliding wheel to engage with the second locking groove 2204. At this time, the hook 10 remains in the expanded state. Combined with the above, when the double-headed cylinder 20 receives feedback from the height sensor 102 and starts working to pull the two sets of tooth plates 21 closer to each other, the sliding wheel will first slide along the second inclined surface 2203. In this process, the first spring 24 will be further Pull up until the double-headed cylinder 20 stops moving, and the sliding wheel just passes the symmetry center of the second inclined surface 2203 and the first inclined surface 2202. Then, the retraction of the first spring 24 will force the two sets of tooth plates 21 to continue to approach each other, and the sliding wheel will slide along the first inclined surface 2202 until the sliding wheel is combined with the first locking groove 2201. The hook 10 is in a clamping state. At this time, the clamping force of the hook 10 on the semiconductor is provided by the first spring 24, so that when the hook 10 performs the clamping operation, the clamping damage to the semiconductor is minimized.

[0035] The detection assembly includes a state sensor 27 inserted in the hook 10, and the hook 10 is covered with a protective cover 28; In particular, see Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 7 , Fig.10 The hook claws 10 are provided in four groups, and the four groups of hook claws 10 are respectively provided on the mounting blocks 9 installed on the rotating support arm 8. Fig.10As shown, a detachable clamping plate 11 is provided between two adjacent groups of hook claws 10, and the above-mentioned hook claws 10 are made of corrosion-resistant stainless steel pipe material. Sensor indicator light observation windows are provided on the hook claws 10 and the protective cover 28, so as to facilitate knowing the status of the status sensor 27 placed on the stainless steel pipe hook claw 10. When the status sensor 27 is combined with the hook claw 10, the corrosion-resistant protective cover 28 is put on its surface, and then clamping and releasing work can be performed.

[0036] In detail, each of the four groups of hooks 10 is provided with a status sensor 27. When the deflection assembly drives the hooks 10 on the rotating arm 8 to clamp, the status sensor 27 will detect the status of the hooks 10. Once the four groups of status sensors 27 do not meet the status requirements at the same time, an alarm will be issued to indicate that the clamping plate 11 is tilted or overlapped (there is another clamping plate 11 at the work station, and when the clamping plate 11 is placed again, overlap will occur). After the alarm, the equipment will stop immediately to avoid further losses.

[0037] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0038] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A semiconductor processing sheet basket claw clamping device with state detection, characterized in that: include: A shell (1), wherein a washing tank (4) is mounted on the shell (1), and a storage box (2) is also fixedly mounted on the shell (1), wherein a lifting assembly is arranged in the storage box (2), and wherein the lifting assembly is capable of driving an external box (3) slidably arranged on the storage box (2) to slide relative to the shell (1), and when the external box (3) slides, the lifting assembly arranged in the shell (1) and connected to the external box (3) is capable of driving a supporting member mounted in the washing tank (4) to slide along a depth direction of the washing tank (4); Two groups of rotating arms (8) are symmetrically mounted on the external accessory box (3), each group of rotating arms (8) is provided with a hook (10), and the two groups of rotating arms (8) are connected to a deflection assembly arranged in the external accessory box (3). When the deflection assembly is actuated to drive the two groups of rotating arms (8) to rotate in opposite directions and clamp the semiconductor placed in the immersion tank (4), a state detection assembly arranged in the hook (10) can detect the position state of the hook (10) so that the hook (10) is placed in a normal clamping state.

2. A semiconductor processing sheet basket claw clamping device with state detection according to claim 1, characterized in that: The lifting assembly comprises a lifting plate (12) fixedly connected to the external accessory box (3); a threaded sleeve (14) and a lifting sleeve (15) are fixedly arranged on the lifting plate (12); the threaded sleeve (14) is threadedly connected to a screw rod (13) rotatably mounted in the storage box (2); and the lifting sleeve (15) is slidably connected to a sliding rod (16) fixedly arranged in the external accessory box (3).

3. A semiconductor processing sheet basket claw clamping device with state detection according to claim 2, characterized in that: The lifting assembly comprises a moving structure and a triggering structure, wherein the moving structure comprises a supporting plate (101) fixedly arranged in the shell (1), a guide plate (5) being slidably arranged on the supporting plate (101), two groups of guide plates (5) being symmetrically arranged along the length direction of the supporting plate (101), each group of guide plates (5) being provided with an engaging groove body, and a first pulley (7) rotatably connected to the lifting plate (12) being slidably arranged in the engaging groove body.

4. A semiconductor processing sheet basket claw clamping device with state detection according to claim 3, characterized in that: The trigger structure comprises a trigger block (6) fixedly connected to the guide plate (5), and the trigger block (6) is capable of driving the supporting member to move relative to the immersion tank (4).

5. A semiconductor processing sheet basket claw clamping device with state detection according to claim 4, characterized in that: The supporting member comprises a placement plate (17) slidably arranged in the immersion tank (4); a plurality of sets of fixing rods (1701) are evenly installed on one side of the placement plate (17) facing the supporting plate (101); and a second pulley (18) is rotatably installed on one end of the fixing rod (1701) away from the placement plate (17).

6. A semiconductor processing sheet basket claw clamping device with state detection according to claim 2, characterized in that: The deflection assembly comprises a locking structure and a driving structure, wherein the driving structure comprises a tooth plate (21) slidably arranged in the external accessory box (3), wherein two groups of the tooth plates (21) are symmetrically arranged along the length direction of the external accessory box (3), and each group of the tooth plates (21) is provided with a fixing plate (26), and the two groups of the fixing plates (26) are connected to a double-headed cylinder (20) fixedly arranged in the external accessory box (3), and the two groups of the tooth plates (21) are respectively meshed with coaxially fixed gears (19) on the two groups of the rotating arms (8).

7. A semiconductor processing sheet basket claw clamping device with state detection according to claim 6, characterized in that: The locking structure comprises a plug-in rod (25) fixedly mounted in the external accessory box (3), a sleeve tube (23) being slidably mounted on the plug-in rod (25), a first spring (24) being rotatably mounted on one end of the sleeve tube (23) away from the plug-in rod (25), one end of the first spring (24) abutting against the plug-in rod (25), and the other end abutting against the sleeve tube (23), and a sliding wheel being rotatably mounted on one side of the sleeve tube (23) away from the plug-in rod (25), and the sliding wheel cooperating with a triggering member fixedly mounted on the toothed plate (21).

8. A semiconductor processing sheet basket claw clamping device with state detection according to claim 7, characterized in that: The trigger member comprises a moving block (22) fixedly connected to the tooth plate (21), and a first locking groove (2201), a first inclined surface (2202), a second locking groove (2204) and a second inclined surface (2203) are formed on the moving block (22).

9. A semiconductor processing sheet basket claw clamping device with state detection according to claim 1, characterized in that: The detection component comprises a state sensor (27) inserted into the hook (10), and the hook (10) is covered with a protective cover (28).

Images