Variable-diameter Tesla valve phase change cooling micro-channel capable of being directly embedded into chip

Abstract

The invention discloses a variable-diameter Tesla valve phase change cooling microchannel capable of being directly embedded into a chip. The variable-diameter Tesla valve phase change cooling microchannel comprises a microchannel processing layer substrate and a Tesla valve variable-diameter microchannel, a traditional Tesla valve is designed into a variable-diameter structure, and then a plurality of variable-diameter Tesla valves are combined into a valve sequence; arranging the valve sequence into a circular sequence, and processing the circular sequence on a channel processing layer substrate by using a laser ablation process to obtain a Tesla valve reducing micro-channel; a liquid working medium flows in from the center of the Tesla valve reducing micro-channel, and steam subjected to phase change flows out from the periphery of the Tesla valve reducing micro-channel. The variable-diameter Tesla valve micro-channel designed by the invention not only can effectively inhibit reverse crosstalk caused by steam countercurrent to phase change mass transfer, but also provides a relaxation space for steam transportation, reduces the expansion extrusion force of high-pressure steam to the wall surface of the micro-channel, and ensures the structural strength of a chip; the variable-diameter Tesla valve micro-channel structure has good heat dissipation characteristics and countercurrent resistance, and can be directly introduced into a chip design process to realize high-efficiency chip heat dissipation capability.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a phase change cooling microchannel based on a variable diameter Tesla valve structure that can be directly embedded in a chip. Background Art

[0002] With the rapid development of artificial intelligence technology, AI chips have become the core engine driving high-performance computing. The competition in artificial intelligence is ultimately a competition of computing power, and the bottleneck that restricts high-computing power chips is "heat". Studies have shown that when the chip works at a temperature above 70℃ to 80℃, its reliability will decrease by 5% for every 1℃ increase in temperature, and the frequency of chip failure will increase significantly. In order to effectively dissipate heat from the chip, researchers have developed a variety of microchannel structures suitable for liquid working fluid transportation, among which common structures include simple straight channels; zigzag flow channels, serpentine flow channels, wavy flow channels, manifolds, etc. with complex curved shapes. Compared with simple straight pipes, curved shapes are more likely to generate secondary flows in the pipe to break the boundary layer, thereby improving the heat transfer capacity. However, the steam generated by the phase change of the liquid working fluid due to heat will reversely interfere with the phase change mass transfer process, resulting in a weakened heat dissipation capacity. At the same time, the high-pressure steam squeezes the wall of the microchannel, which may cause channel rupture and damage to the chip circuit system, which is very unfavorable to the reliability and performance of the chip.

[0003] In the existing technology, although various microchannel structures can effectively dissipate heat for chips with high heat flux density, they still have the defects of large thermal resistance and poor anti-backflow performance of liquid working fluid during heat dissipation. Therefore, how to improve the anti-backflow performance of the microchannel structure while improving the heat dissipation characteristics and maximally reduce the thermal resistance has become a problem that needs to be solved. Summary of the invention

[0004] In view of the above problems existing in the prior art, the present invention provides a phase change cooling microchannel based on a variable diameter Tesla valve structure that can be directly embedded in the chip. The channel structure is directly processed on the chip integrated circuit substrate by means of photolithography or laser processing, which effectively reduces the thermal resistance of the traditional chip heat dissipation method and improves the heat transfer capacity. At the same time, this Tesla valve microchannel can effectively suppress the reverse crosstalk caused by steam backflow on phase change mass transfer. The variable diameter structure can also provide relaxation space for steam transport and reduce the expansion and extrusion force of high-pressure steam on the microchannel wall. It has the characteristics of simple processing, convenient process, and good heat dissipation performance.

[0005] The technical solution of the present invention is as follows:

[0006] A variable diameter Tesla valve phase change cooling microchannel directly embedded in a chip, comprising a microchannel processing layer substrate, a Tesla valve microchannel, a liquid input port, and a steam output port;

[0007] The projection diagram of the Tesla valve microchannel on a two-dimensional plane is called a microchannel projection diagram; the design method of the microchannel projection diagram is as follows:

[0008] S1-1. Select a two-dimensional plane, called the XY plane; select a point on the XY plane as the origin O, and draw two line segments through the origin O with lengths L1 and L2 respectively, called line segment L1 and line segment L2; observe with the origin O as the center, line segment L2 is in the counterclockwise direction of line segment L1, and the angle between the two is α;

[0009] S1-2, the midpoint of line segment L2 is called point P; the other end point of line segment L2 is called point Q2; the other end point of line segment L1 is called point Q1;

[0010] S1-3. Draw a line segment of length l3 through point q2, called line segment L3. Observe from point q2 as the center, line segment L3 is in the counterclockwise direction of line segment L2, and the angle between the two is β.

[0011] S1-4, draw an arc through points Q1 and Q3, called arc R1; arc R1 is tangent to line segments L1 and L3; the figure formed by line segments L1, L3 and arc R1 is called the inner trajectory;

[0012] S1-5. Draw a line segment through the origin O that is perpendicular to the line segment L1 and has a length of L5, called line segment L5; observed from the origin O as the center, line segment L5 is in the clockwise direction of line segment L1; the other end point of line segment L5 is called point Q5;

[0013] S1-6. Draw a line segment L7 through point Q5, satisfying the following conditions:

[0014] (1-6-1) Observe from point Q5, which is located in the clockwise direction of line segment L5;

[0015] The angle between (1-6-2) and line segment L1 is γ;

[0016] The projection of (1-6-3) on line segment L1 completely coincides with line segment L1;

[0017] The other endpoint of line segment L7 is called point Q7;

[0018] S1-7. Starting from point Q2, draw a line segment of length L4 along the direction of OQ2, which is called line segment L4; the other end point of line segment L4 is called point Q4;

[0019] S1-8. Draw a line segment of length L6 through point Q4, called line segment L6. Observe from point Q4 as the center, line segment L6 is in the counterclockwise direction of line segment L4, and the angle between the two is β-γ. The other end point of line segment L6 is called point Q6.

[0020] S1-9, draw an arc through points Q6 and Q7, called arc R2; arc R2 is tangent to line segments L6 and L7; the figure composed of line segments L6, L7 and arc R2 is called the outer trajectory line; the figure composed of line segments L2, L4, L5, the inner trajectory line and the outer trajectory line is called the variable diameter Tesla valve structure;

[0021] A series of variable diameter Tesla valve structures are combined into a Tesla valve sequence as follows:

[0022] S2-1, setting the number of variable diameter Tesla valve structures to M;

[0023] S2-2, the variable diameter Tesla valve structure obtained in S1-9 is called the first unit; the shape of the first unit is proportionally enlarged to K times the original, to obtain a variable diameter Tesla valve structure with a larger size, which is called the second unit;

[0024] S2-3. Arrange the first unit and the second unit on the XY plane according to the following rules:

[0025] (2-3-1) Extend the line segment l2 of the first unit to both ends to obtain a new straight line, and call this new straight line the X-axis;

[0026] (2-3-2) The line segment L4 of the second unit is aligned with the X-axis, and the inner trajectory line of the second unit and the inner trajectory line of the first unit are located on both sides of the X-axis respectively;

[0027] (2-3-3) Make point Q4 of the second unit coincide with point P of the first unit;

[0028] (2-3-4) Extend the line segments L1 and L7 of the first unit until they intersect with the line segment L1 of the second unit; delete the line segment L5 of the first unit;

[0029] (2-3-5) Extend the line segments L3 and L6 of the second unit until they intersect with the line segment L1 of the second unit; delete the line segment L4 of the second unit;

[0030] S2-4, the shape of the second unit is proportionally enlarged to K times of the original, to obtain a larger-sized variable-diameter Tesla valve structure, called the third unit, and the operation of S2-3 is repeated again;

[0031] S2-5, repeat S2-3 and S2-4 until the number of variable diameter Tesla valve structures reaches M;

[0032] S2-6. With point P of the first unit as the endpoint, draw a line segment with a length of L8 along the direction of PQ4, which is called line segment L8; the other endpoint of line segment L8 is called point Q8;

[0033] S2-7, using line segment L8 as the long side, a rectangle is constructed, and the rectangle and the first unit are located on both sides of the X axis respectively; the rectangle is called the water inlet channel;

[0034] S2-8, delete the line segment L4 of the first unit; delete the line segment blocked by the water inlet channel in the second unit, and also delete the line segment blocked by the second unit in the water inlet channel;

[0035] S2-9, extend the line segments L1 and L7 of the last variable diameter Tesla valve structure to intersect with the X-axis to obtain two intersection points, and then connect the two intersection points. The line between the two intersection points is the liquid outlet; delete the line segment L5 of the last variable diameter Tesla valve structure; the graph obtained at this time is the Tesla valve sequence;

[0036] A series of Tesla valve sequences are combined into a microchannel projection map as follows:

[0037] S3-1. Draw a line segment with a length of L9 on line segment L8 along the direction of PQ8, which is called line segment L9; the other end point of line segment L9 is called point Q9;

[0038] S3-2, draw a circle with point Q9 as the center and line segment L9 as the radius, called circle R2;

[0039] S3-3, setting the number of Tesla valve sequences to N; arranging the N Tesla valve sequences evenly into a circular array with point Q9 as the center;

[0040] S3-4, extending the two sides of the water inlet channel of the N Tesla valve sequences parallel to the X-axis to intersect with the circle R2, and then deleting the part of the line segment of the circle R2 between the two sides and the side of the water inlet channel perpendicular to the X-axis, and the final figure obtained is the microchannel projection diagram;

[0041] A three-dimensional structure of a microchannel projection image is processed on a microchannel processing layer substrate by laser ablation to obtain a Tesla valve variable diameter microchannel;

[0042] The liquid working medium flows into the circle R2 of the Tesla valve variable diameter microchannel from the liquid input port, and then flows from the center to the surroundings, flows through the variable diameter Tesla valve structures in the Tesla valve sequence in sequence, and flows out from the vapor-liquid output port of the last variable diameter Tesla valve structure.

[0043] Furthermore, α≤45°; 100°≤β≤125°; γ≤5°; K=1.2; M=5; N=8.

[0044] The beneficial technical effects of the present invention are:

[0045] (1) By directly embedding the microchannel inside the chip, the heat dissipation path is shortened and the thermal resistance is reduced. Compared with the existing microchannel structure, the structural design proposed by the present invention does not require the introduction of additional materials for the processing and manufacturing of the microchannel, and avoids the need to use a specific adhesive material to connect the chip integrated circuit system and the cooling microchannel due to the separate design of the two;

[0046] (2) The microchannel structure proposed in the present invention is designed based on the Tesla valve structure and has more complex curved shapes, which makes it easier to generate secondary flow to break the boundary layer and improve the heat transfer capacity. At the same time, it provides relaxation space for the steam generated by the phase change of the liquid working medium, reduces the expansion and extrusion force of the high-pressure steam on the microchannel wall, and ensures the stability of the microchannel structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 It is the inner track line diagram of the variable diameter Tesla valve structure;

[0048] Figure 2 It is the inner and outer track line diagram of the variable diameter Tesla valve structure;

[0049] Figure 3 This is a schematic diagram of the arrangement of Tesla's valve sequence;

[0050] Figure 4 It is a projection diagram of Tesla valve sequence;

[0051] Figure 5 It is a microchannel projection diagram;

[0052] Figure 6 This is a three-dimensional image of the Tesla valve variable diameter microchannel;

[0053] Figure 7 It is a schematic diagram of the processing process of a circular sheet silicon substrate;

[0054] Figure 8 It is a schematic diagram of the processing process of a rectangular sheet silicon substrate. DETAILED DESCRIPTION

[0055] The present invention is described in detail below in conjunction with the accompanying drawings and embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0056] Example 1

[0057] like Figures 1 to 7As shown, in Example 1, a variable diameter Tesla valve phase change cooling microchannel is processed on a circular sheet silicon substrate by photolithography or laser processing technology. The reason for selecting a circular sheet silicon substrate as the processing material is to keep the structural size of the constituent units of the microchannel consistent.

[0058] like Figure 6 As shown, Example 1 includes a chip processing layer cover plate, a microchannel processing layer substrate, a Tesla valve microchannel, a liquid input port, and a liquid output port. The specific implementation process is as follows Figure 7 As shown, the two-dimensional plane projection image of the designed Tesla valve microchannel is processed onto the microchannel processing layer substrate through a laser ablation process to obtain a phase change cooling microchannel structure based on the variable diameter Tesla valve structure; and then the chip processing layer cover plate used for processing chip integrated circuits is integrated into the microchannel processing layer substrate to form a closed flow channel.

[0059] The projection diagram of Tesla valve microchannel on a two-dimensional plane is called microchannel projection diagram. The design method of microchannel projection diagram is as follows:

[0060] S1-1, such as Figure 1 As shown, select a two-dimensional plane, called the XY plane; select a point on the XY plane as the origin O, and make two line segments through the origin O with lengths L1 and L2 respectively, called line segment L1 and line segment L2; observe with the origin O as the center, line segment L2 is in the counterclockwise direction of line segment L1, and the angle α between the two is ≤45°;

[0061] S1-2, the midpoint of line segment L2 is called point P; the other end point of line segment L2 is called point Q2; the other end point of line segment L1 is called point q1;

[0062] S1-3. Draw a line segment of length L3 through point Q2, called line segment L3. Observe from point Q2 as the center. Line segment L3 is in the counterclockwise direction of line segment L2, and the angle β∈[100°,125°] between the two.

[0063] S1-4, draw an arc through points Q1 and Q2, called arc R1; arc R1 is tangent to line segments L1 and L3; the figure formed by line segments L1, L3 and arc R1 is called the inner trajectory;

[0064] S1-5, such as Figure 2 As shown, a line segment perpendicular to line segment L1 and with a length of L5 is drawn through the origin O, which is called line segment L5; observing from the origin O as the center, line segment L5 is in the clockwise direction of line segment L1; the other end point of line segment L5 is called point Q5;

[0065] S1-6. Draw a line segment L7 through point Q5, satisfying the following conditions:

[0066] (1-6-1) Observe from point Q5, which is located in the clockwise direction of line segment L1;

[0067] The angle γ between (1-6-2) and line segment L1 is ≤ 5°;

[0068] The projection of (1-6-3) on line segment L1 completely coincides with line segment L1;

[0069] The other endpoint of line segment L7 is called point Q7;

[0070] S1-7. Starting from point Q2, draw a line segment of length L4 along the direction of OQ2, which is called line segment L4; the other end point of line segment L4 is called point Q4;

[0071] S1-8. Draw a line segment of length l6 through point q4, called line segment L6. Observe from point q4 as the center. Line segment l6 is in the counterclockwise direction of line segment L4, and the angle between the two is β-γ. The other end point of line segment L6 is called point Q6.

[0072] S1-9, draw an arc through points Q6 and Q7, called arc R2; arc R2 is tangent to line segments L6 and L7; the figure composed of line segments L6, L7 and arc R2 is called the outer trajectory line; the figure composed of line segments L2, L4, L5, the inner trajectory line and the outer trajectory line is called the variable diameter Tesla valve structure ( Figure 2 ). Designing the traditional Tesla valve into a variable diameter structure can not only effectively suppress the reverse crosstalk caused by steam backflow on phase change mass transfer, but also provide relaxation space for steam transport and reduce the expansion and squeezing force of high-pressure steam on the microchannel wall.

[0073] like Figure 3 As shown, a series of variable diameter Tesla valve structures are combined into a Tesla valve sequence, and the method is as follows:

[0074] S2-1, setting the number of variable diameter Tesla valve structures to 5;

[0075] S2-2, the variable diameter Tesla valve structure obtained in S1-9 is called the first unit; the shape of the first unit is proportionally enlarged by 20% to obtain a variable diameter Tesla valve structure with a larger size, which is called the second unit;

[0076] S2-3. Arrange the first unit and the second unit on the XY plane according to the following rules:

[0077] (2-3-1) Extend the line segment L2 of the first unit to both ends to obtain a new straight line, which is called the X-axis;

[0078] (2-3-2) The line segment L4 of the second unit is aligned with the X-axis, and the inner trajectory line of the second unit and the inner trajectory line of the first unit are located on both sides of the X-axis respectively;

[0079] (2-3-3) Make point Q4 of the second unit coincide with point P of the first unit;

[0080] (2-3-4) Figure 4 As shown, the line segments L1 and L7 of the first unit are extended until they intersect with the line segment L1 of the second unit; the line segment L5 of the first unit is deleted;

[0081] (2-3-5) Extend the line segments L3 and L6 of the second unit until they intersect with the line segment L1 of the second unit; delete the line segment L4 of the second unit;

[0082] S2-4, the shape of the second unit is enlarged by 20% to obtain a larger-sized variable-diameter Tesla valve structure, which is called the third unit, and the operation of S2-3 is repeated again;

[0083] S2-5, repeat S2-3 and S2-4 until the number of the variable diameter Tesla valve structures reaches 5;

[0084] S2-,6. With point P of the first unit as the endpoint, draw a line segment of length L8 along the direction of PQ4, called line segment l8; the other endpoint of line segment L8 other than point P is called point q8;

[0085] S2-7, with line segment L8 as the long side, make a rectangle, and the rectangle and the first unit are located on both sides of the X axis; the rectangle is called the water inlet channel ( Figure 4 );

[0086] S2-8, delete the line segment L4 of the first unit; delete the line segment blocked by the water inlet channel in the second unit, and also delete the line segment blocked by the second unit in the water inlet channel;

[0087] S2-9, extend the line segments L1 and L7 of the last variable diameter Tesla valve structure until they intersect with the X axis to obtain two intersection points, and then connect the two intersection points. The line between the two intersection points is the liquid outlet; delete the line segment L5 of the last variable diameter Tesla valve structure. The graph obtained at this time is the Tesla valve sequence ( Figure 4 ).

[0088] like Figure 5 As shown, a series of Tesla valve sequences are combined into a microchannel projection diagram as follows:

[0089] S3-1. Draw a line segment with a length of L9 on line segment L8 along the direction of PQ8, which is called line segment L9; the other end point of line segment L9 other than point Q8 is called point Q9;

[0090] S3-2, draw a circle with point Q9 as the center and line segment L9 as the radius, called circle R2;

[0091] S3-3, setting the number of Tesla valve sequences to 8; arranging the 8 Tesla valve sequences evenly into a circular array with point Q9 as the center;

[0092] S3-4, extend the two sides of the water inlet channel of the 8 Tesla valve sequences parallel to the X axis to intersect with the circle R2, then delete the part of the line segment of the circle R2 between the two sides, and the side of the water inlet channel perpendicular to the X axis; the final figure is the microchannel projection diagram. The microchannel projection diagram is processed onto the microchannel processing layer substrate using laser ablation technology to obtain the Tesla valve variable diameter microchannel.

[0093] like Figure 6 As shown, the liquid working medium used for cooling flows from the liquid input port into the circle R2 of the Tesla valve variable diameter microchannel, then flows from the center to the surroundings, flows through the variable diameter Tesla valve structure in the Tesla valve sequence in sequence, and flows out from the vapor-liquid output port. The liquid working medium is in direct contact with the integrated circuit on the upper chip processing layer cover plate, which effectively reduces the thermal resistance and improves the heat dissipation capacity.

[0094] Example 2

[0095] The difference from Example 1 is that Example 2 uses a rectangular silicon substrate as the processing material. The specific implementation process is as follows: Figure 8 The circular sheet substrate in Example 1 is replaced by a rectangular sheet substrate because the overall structure of most existing chips is rectangular, so the use of a rectangular sheet silicon substrate is more convenient for the design and arrangement of chip integrated circuits.

[0096] in conclusion: Figure 7 and Figure 8 Phase change cooling microchannels based on the variable diameter Tesla valve structure are constructed through circular and rectangular silicon plates respectively. The liquid working medium is directly in contact with the chip as a coolant for cooling and heat dissipation. The liquid working medium changes phase when heated to produce steam, and the curved part of the Tesla valve structure provides space to accommodate steam, effectively reducing the reverse crosstalk of steam to the phase change mass transfer process. The above two embodiments can effectively reduce thermal resistance, suppress steam reverse crosstalk, and improve cooling and heat dissipation efficiency when actually used.

[0097] Although the embodiments of the present invention have been disclosed as above, they are not limited to the applications listed in the specification and implementation modes, and can be fully applicable to various fields suitable for the present invention. For those familiar with the art, for those of ordinary skill in the art, various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to specific details.

Claims

1. A variable diameter Tesla valve phase change cooling microchannel directly embedded in a chip, characterized by: It includes a microchannel processing layer substrate, a Tesla valve variable diameter microchannel, a liquid input port, and a vapor-liquid output port; The projection diagram of the Tesla valve variable diameter microchannel on a two-dimensional plane is called a microchannel projection diagram; the design method of the microchannel projection diagram is as follows: S1-1. Select a two-dimensional plane, called the XY plane; select a point on the XY plane as the origin O, and draw two line segments through the origin O with lengths L1 and L2 respectively, called line segment L1 and line segment L2; observe with the origin O as the center, line segment L2 is in the counterclockwise direction of line segment L1, and the angle between the two is α; S1-2, the midpoint of line segment L2 is called point P; the other end point of line segment L2 is called point Q2; the other end point of line segment L1 is called point Q1; S1-3. Draw a line segment of length L3 through point Q2, called line segment L3. Observe from point Q2 as the center, line segment L3 is in the counterclockwise direction of line segment L2, and the angle between the two is β. S1-4, draw an arc through points Q1 and Q3, called arc R1; arc R1 is tangent to line segments L1 and L3; the figure formed by line segments L1, L3 and arc R1 is called the inner trajectory; S1-5. Draw a line segment through the origin O that is perpendicular to the line segment L1 and has a length of L5, called line segment L5; observed from the origin O as the center, line segment L5 is in the clockwise direction of line segment L1; the other end point of line segment L5 is called point Q5; S1-6. Draw a line segment L7 through point Q5, satisfying the following conditions: S1-6-1, observe from point Q5, located in the clockwise direction of line segment L5; S1-6-2, the angle between it and line segment L1 is γ; S1-6-3, the projection on line segment L1 completely coincides with line segment L1; The other endpoint of line segment L7 is called point Q7; S1-7. Starting from point Q2, draw a line segment of length L4 along the direction of OQ2, which is called line segment L4; the other end point of line segment L4 is called point Q4; S1-8. Draw a line segment of length L6 through point Q4, called line segment L6. Observe from point Q4 as the center, line segment L6 is in the counterclockwise direction of line segment L4, and the angle between the two is β-γ. The other end point of line segment L6 is called point Q6. S1-9, draw an arc through points Q6 and Q7, called arc R2; arc R2 is tangent to line segments L6 and L7; the figure composed of line segments L6, L7 and arc R2 is called the outer trajectory line; the figure composed of line segments L2, L4, L5, the inner trajectory line and the outer trajectory line is called the variable diameter Tesla valve structure; A series of variable diameter Tesla valve structures are combined into a Tesla valve sequence as follows: S2-1, setting the number of variable diameter Tesla valve structures to M; S2-2, the variable diameter Tesla valve structure obtained in S1-9 is called the first unit; the shape of the first unit is proportionally enlarged to K times the original, to obtain a variable diameter Tesla valve structure with a larger size, which is called the second unit; S2-3. Arrange the first unit and the second unit on the XY plane according to the following rules: S2-3-1. Extend the line segment L2 of the first unit to both ends to obtain a new straight line, and call the new straight line the X-axis; S2-3-2, aligning the line segment L4 of the second unit with the X-axis, and the inner track line of the second unit and the inner track line of the first unit are located on both sides of the X-axis respectively; S2-3-3, align point Q4 of the second unit with point P of the first unit; S2-3-4, extend the line segments L1 and L7 of the first unit until they intersect with the line segment L1 of the second unit; delete the line segment L5 of the first unit; S2-3-5, extend the line segments L3 and L6 of the second unit until they intersect with the line segment L1 of the second unit; delete the line segment L4 of the second unit; S2-4, the shape of the second unit is proportionally enlarged to K times of the original, to obtain a larger-sized variable-diameter Tesla valve structure, called the third unit, and the operation of S2-3 is repeated again; S2-5, repeat S2-3 and S2-4 until the number of variable diameter Tesla valve structures reaches M; S2-6. With point P of the first unit as the endpoint, draw a line segment with a length of L8 along the direction of PQ4, which is called line segment L8; the other endpoint of line segment L8 is called point Q8; S2-7, using line segment L8 as the long side, a rectangle is constructed, and the rectangle and the first unit are located on both sides of the X axis respectively; the rectangle is called the water inlet channel; S2-8, delete the line segment L4 of the first unit; delete the line segment blocked by the water inlet channel in the second unit, and also delete the line segment blocked by the second unit in the water inlet channel; S2-9, extend the line segments L1 and L7 of the last variable diameter Tesla valve structure to intersect with the X-axis to obtain two intersection points, and then connect the two intersection points. The line between the two intersection points is the liquid outlet; delete the line segment L5 of the last variable diameter Tesla valve structure; the graph obtained at this time is the Tesla valve sequence; A series of Tesla valve sequences are combined into a microchannel projection map as follows: S3-1. Draw a line segment with a length of L9 on line segment L8 along the direction of PQ8, which is called line segment L9; the other end point of line segment L9 is called point Q9; S3-2, draw a circle with point Q9 as the center and line segment L9 as the radius, called circle R2; S3-3, setting the number of Tesla valve sequences to N; arranging the N Tesla valve sequences evenly into a circular array with point Q9 as the center; S3-4, extending the two sides of the water inlet channel of the N Tesla valve sequences parallel to the X-axis to intersect with the circle R2, and then deleting the part of the line segment of the circle R2 between the two sides and the side of the water inlet channel perpendicular to the X-axis, and the final figure obtained is the microchannel projection diagram; A three-dimensional structure of a microchannel projection image is processed on a microchannel processing layer substrate by laser ablation to obtain a Tesla valve microchannel; The liquid working medium flows into the circle R2 of the Tesla valve variable diameter microchannel from the liquid input port, and then flows from the center to the surroundings, flows through the variable diameter Tesla valve structures in the Tesla valve sequence in sequence, and flows out from the liquid output port of the last variable diameter Tesla valve structure.

2. According to claim 1, a variable diameter Tesla valve phase change cooling microchannel directly embedded in a chip, characterized in that: α≤45°; 100°≤β≤125°; γ≤5°; K=1.2; M=5; N=8.

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