Phase shift control circuit and radio frequency power supply system
By designing a phase shift control circuit, the first phase shift unit and the second phase shift unit are used to process the phase angle of the initial RF signal, the phase shift problem of the initial RF signal during the modulation process is solved, and better signal modulation and plasma load energy supply effects are achieved.
Patent Information
- Application Number
- CN202411955367.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-28
- Publication Date
- 2025-04-25
AI Technical Summary
During the modulation process, the initial RF signal will experience different degrees of phase shift, affecting the subsequent signal modulation and the supply of energy to the plasma load.
A phase shift control circuit is designed, including an input terminal, an output terminal, a first phase shift unit and a second phase shift unit, through which the initial radio frequency signal selectively move or not move the phase angle to generate a target radio frequency signal.
It effectively solves the phase shift problem of the initial RF signal during the modulation process, ensuring the quality of subsequent signal modulation and effective power supply to the plasma load.
Smart Images
Figure CN119891692A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of radio frequency technology, and in particular to a phase shift control circuit and a radio frequency power supply system. Background Art
[0002] At present, with the rapid development of RF power technology, the requirements for RF power systems that provide RF power to plasma loads are becoming more and more stringent. In actual applications, it is found that the initial RF signal will have different degrees of phase shift during the modulation process, which will affect the subsequent signal modulation and further affect the energy supply to the plasma load. Therefore, how to solve the phase shift problem of the initial RF signal during the modulation process has become a problem that needs to be considered. Summary of the invention
[0003] The present application provides a phase shift control circuit and a radio frequency power supply system, which can effectively solve the phase shift problem of the initial radio frequency signal during the modulation process.
[0004] In a first aspect, a phase shift control circuit is provided, the phase shift control circuit comprising an input end, an output end, a first phase shift unit and a second phase shift unit, wherein the first phase shift unit and the second phase shift unit are connected between the input end and the output end. The input end is used to connect to a signal source to receive an initial RF signal output by the signal source. The first phase shift unit is used to selectively move or not move the phase angle of the initial RF signal in a first direction, and the second phase shift unit is used to selectively move or not move the phase angle of the initial RF signal in a second direction, wherein the first phase shift unit and / or the second phase shift unit processes the initial RF signal output by the signal source to obtain a target RF signal. The output end is used to connect to an RF power amplifier to output the target RF signal to the RF power amplifier.
[0005] In a possible implementation, the first phase shift unit and the second phase shift unit are sequentially connected between the input end and the output end, the first phase shift unit is used to selectively move or not move the phase angle of the initial RF signal to obtain an intermediate RF signal, and the second phase shift unit is used to selectively move or not move the phase angle of the intermediate RF signal to obtain a target RF signal.
[0006] In a possible implementation manner, the first phase shift unit is used to selectively be in a first connection state or a second connection state, so as to correspondingly move or not move the phase angle of the initial radio frequency signal. The second phase shift unit is used to selectively be in a third connection state or a fourth connection state, so as to correspondingly move or not move the phase angle of the intermediate radio frequency signal.
[0007] In a possible implementation manner, the first phase shift unit further has a variable first phase shift parameter, and when the first phase shift unit is in the first connection state, the shift angle of the phase angle of the initial RF signal by the first phase shift unit changes according to the change of the first phase shift parameter. The second phase shift unit further has a variable second phase shift parameter, and when the second phase shift unit is in the third connection state, the shift angle of the phase angle of the intermediate RF signal by the second phase shift unit changes according to the change of the second phase shift parameter.
[0008] In a possible implementation, the phase shift control circuit further includes a phase difference acquisition unit and a control unit, wherein the phase difference acquisition unit is connected to the input end, the RF power amplifier, and the control unit. The phase difference acquisition unit is used to acquire a first phase difference, wherein the first phase difference is a phase difference between a phase angle of the initial RF signal and a phase angle of the RF power output by the RF power amplifier. The control unit is used to control the first phase shift unit to be in the first connection state or the second connection state according to the first phase difference, and to control the second phase shift unit to be in the third connection state or the fourth connection state.
[0009] In a possible implementation, the control unit is used to control the first phase shift unit to be in the first connection state and the second phase shift unit to be in the fourth connection state when the first phase difference is not equal to zero, or to control the first phase shift unit to be in the second connection state and the second phase shift unit to be in the third connection state; when the first phase difference is equal to zero, control the first phase shift unit to be in the second connection state and control the second phase shift unit to be in the fourth connection state.
[0010] In a possible implementation, the second phase difference is a phase difference between a phase angle of the initial RF signal and a phase angle of the target RF signal. The control unit is further configured to, when the first phase difference is not equal to zero, correspondingly adjust the first phase shift parameter of the first phase shift unit according to the first phase difference, or adjust the second phase shift parameter of the second phase shift unit so that the sum of the second phase difference and the first phase difference is equal to zero.
[0011] In a possible implementation, the first phase shift unit includes a first resistor, a first capacitor, and a first switch, wherein the first resistor and the first capacitor are sequentially connected between the input terminal and the ground, a connection point between the first resistor and the first capacitor is connected to the second phase shift unit, and two ends of the first switch are correspondingly connected to two ends of the first resistor. The first switch is used to selectively be in an on or off state, so as to correspondingly make the first phase shift unit selectively in the second connection state or the first connection state.
[0012] In a possible implementation, the second phase shift unit includes a second resistor, a second capacitor, and a second switch, the second capacitor and the second resistor are sequentially connected between the first phase shift unit and the ground, the connection point between the second capacitor and the second resistor is connected to the output end, and the two ends of the second switch are correspondingly connected to the two ends of the second capacitor. The second switch is used to selectively be in an on or off state, so as to correspondingly make the second phase shift unit selectively in the fourth connection state or the third connection state.
[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a signal source, a radio frequency power amplifier and a phase shift control circuit. The phase shift control circuit comprises an input end, an output end, a first phase shift unit and a second phase shift unit, wherein the first phase shift unit and the second phase shift unit are connected between the input end and the output end. The input end is used to connect with the signal source to receive the initial radio frequency signal output by the signal source. The first phase shift unit is used to selectively move or not move the phase angle of the initial radio frequency signal in a first direction, and the second phase shift unit is used to selectively move or not move the phase angle of the initial radio frequency signal in a second direction, wherein the first phase shift unit and / or the second phase shift unit processes the initial radio frequency signal output by the signal source to obtain a target radio frequency signal. The output end is used to connect with the radio frequency power amplifier to output the target radio frequency signal to the radio frequency power amplifier.
[0014] The phase shift control circuit and the RF power supply system of the present application are configured with a first phase shift unit and a second phase shift unit connected between an input end and an output end, and the first phase shift unit is configured to selectively move or not move the phase angle of the initial RF signal in a first direction, and the second phase shift unit is configured to selectively move or not move the phase angle of the initial RF signal in a second direction, so that the initial RF signal output by the signal source can be processed to obtain a target RF signal, so as to effectively solve the phase shift problem of the initial RF signal during the modulation process, and better perform subsequent signal modulation, thereby better providing RF power to the plasma load. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.
[0016] Figure 1 It is a block diagram of a phase shift control circuit in some embodiments of the present application.
[0017] Figure 2 FIG. 4 is another block diagram of a phase shift control circuit in some embodiments of the present application.
[0018] Figure 3 It is another block diagram of the phase shift control circuit in some embodiments of the present application.
[0019] Figure 4 Schematic diagram of a phase shift control circuit in an embodiment of the present application.
[0020] Figure 5 FIG. 4 is a circuit diagram of a phase shift control circuit in another embodiment of the present application.
[0021] Figure 6 It is a block diagram of a radio frequency power supply system in some embodiments of the present application.
[0022] Explanation of the accompanying drawings: 1000, RF power supply system, SS, signal source, RF1, initial RF signal, PA, RF power amplifier, 10, phase shift control circuit, In, input end, Out, output end, 100, first phase shift unit, R1, first resistor, C1, first capacitor, S1, first switch, S3, third switch, S4, fourth switch, RF2, intermediate RF signal, 200, second phase shift unit, R2, second resistor, C2, second capacitor, S2, second switch, RF3, target RF signal, 300, phase difference acquisition unit, A1, first phase difference, 400, control unit, GND, ground. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0025] In the following, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.
[0026] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.
[0027] Please also read Figure 1 , Figure 2 , Figure 1 is a block diagram of a phase shift control circuit in some embodiments of the present application, Figure 2 FIG. 2 is another block diagram of a phase shift control circuit in some embodiments of the present application. Figure 1 , Figure 2 As shown, the present application provides a phase shift control circuit 10, which includes an input terminal In, an output terminal Out, a first phase shift unit 100 and a second phase shift unit 200, wherein the first phase shift unit 100 and the second phase shift unit 200 are connected between the input terminal In and the output terminal Out. The input terminal In is used to connect to a signal source SS to receive an initial RF signal RF1 output by the signal source SS. The first phase shift unit 100 is used to selectively move or not move the phase angle of the initial RF signal RF1 in a first direction, and the second phase shift unit 200 is used to selectively move or not move the phase angle of the initial RF signal in a second direction, wherein the first phase shift unit 100 and / or the second phase shift unit 200 processes the initial RF signal RF1 output by the signal source SS to obtain a target RF signal RF3. The output terminal Out is used to connect to an RF power amplifier PA to output the target RF signal RF3 to the RF power amplifier PA.
[0028] Thus, the above-mentioned phase shift control circuit 10 in the present application, by setting a first phase shift unit 100 and a second phase shift unit 200 connected between the input terminal In and the output terminal Out, and configuring the first phase shift unit 100 to selectively move or not move the phase angle of the initial RF signal RF1 in the first direction, and the second phase shift unit 200 to selectively move or not move the phase angle of the initial RF signal RF1 in the second direction, can process the initial RF signal RF1 output by the signal source SS to obtain the target RF signal RF3, so as to effectively solve the phase shift problem of the initial RF signal RF1 in the modulation process, and better perform subsequent signal modulation, thereby better providing RF power to the plasma load.
[0029] In one or more embodiments, the first direction may be a direction that causes the phase angle of the initial RF signal RF1 to advance, and correspondingly, the second direction is a direction that causes the phase angle of the initial RF signal RF1 to lag. The first direction may also be a direction that causes the phase angle of the initial RF signal RF1 to lag, and correspondingly, the second direction is a direction that causes the phase angle of the initial RF signal RF1 to advance.
[0030] like Figure 1 As shown, the first phase shift unit 100 and the second phase shift unit 200 may be connected in parallel between the input terminal In and the output terminal Out.
[0031] like Figure 2 As shown, the first phase shift unit 100 and the second phase shift unit 200 are sequentially connected between the input terminal In and the output terminal Out, the first phase shift unit 100 is used to selectively move or not move the phase angle of the initial RF signal RF1 to obtain the intermediate RF signal RF2, and the second phase shift unit 200 is used to selectively move or not move the phase angle of the intermediate RF signal RF2 to obtain the target RF signal RF3.
[0032] Therefore, the phase shift control circuit 10 in the present application can provide a variety of modulation modes according to specific needs by setting the first phase shift unit 100 and the second phase shift unit 200 to modulate the phase angle of the initial radio frequency signal RF1 in sequence.
[0033] In one or more embodiments, the first phase shift unit 100 is used to selectively be in the first connection state or the second connection state, so as to correspondingly move or not move the phase angle of the initial radio frequency signal RF1. The second phase shift unit 200 is used to selectively be in the third connection state or the fourth connection state, so as to correspondingly move or not move the phase angle of the intermediate radio frequency signal RF2.
[0034] Therefore, the phase shift control circuit 10 in the present application can be in a corresponding connection state as required by setting the first phase shift unit 100 and the second phase shift unit 200 to have two different connection states.
[0035] In one or more embodiments, when the first phase shift unit 100 is in the first connection state, the first phase shift unit 100 moves the phase angle of the initial RF signal RF1 in a first direction. When the second phase shift unit 200 is in the third connection state, the second phase shift unit 200 moves the phase angle of the intermediate RF signal RF2 in a second direction. The first direction and the second direction are opposite.
[0036] Therefore, the above-mentioned phase shift control circuit 10 in the present application specifically configures the first phase shift unit 100 to move the phase angle of the initial RF signal RF1 in the first direction when it is in the first connection state, and configures the second phase shift unit 200 to move the phase angle of the intermediate RF signal RF2 in the second direction when it is in the third connection state.
[0037] Further, when the first phase shift unit 100 is in the second connection state, the first phase shift unit 100 does not shift the phase angle of the initial RF signal RF1. When the second phase shift unit 200 is in the fourth connection state, the second phase shift unit 200 does not shift the phase angle of the intermediate RF signal RF2.
[0038] It should be noted that when the first phase shift unit 100 does not move the phase angle of the initial RF signal RF1, the phase angle of the intermediate RF signal RF2 obtained is the same as the phase angle of the initial RF signal RF1. When the second phase shift unit 200 does not move the phase angle of the intermediate RF signal RF2, the phase angle of the target RF signal RF3 obtained is the same as the phase angle of the intermediate RF signal RF2.
[0039] In one or more embodiments, the first phase shift unit 100 further has a variable first phase shift parameter, and when the first phase shift unit 100 is in the first connection state, the shift angle of the phase angle of the initial RF signal RF1 by the first phase shift unit 100 changes according to the change of the first phase shift parameter. The second phase shift unit 200 further has a variable second phase shift parameter, and when the second phase shift unit 200 is in the third connection state, the shift angle of the phase angle of the intermediate RF signal RF2 by the second phase shift unit 200 changes according to the change of the second phase shift parameter.
[0040] Therefore, the phase shift control circuit 10 in the present application can change the shift angle according to specific circumstances by configuring the first phase shift unit 100 to have a variable first phase shift parameter and the second phase shift unit 200 to have a variable second phase shift parameter.
[0041] See also Figure 3 , Figure 3 FIG. 2 is another block diagram of a phase shift control circuit in some embodiments of the present application. Figure 3 As shown, the phase shift control circuit 10 further includes a phase difference acquisition unit 300 and a control unit 400, wherein the phase difference acquisition unit 300 is connected to the input terminal In, the RF power amplifier PA, and the control unit 400. The phase difference acquisition unit 300 is used to acquire a first phase difference A1, wherein the first phase difference A1 is a phase difference between a phase angle of an initial RF signal RF1 and a phase angle of RF power output by the RF power amplifier PA. The control unit 400 is used to control the first phase shift unit 100 to be in a first connection state or a second connection state according to the first phase difference A1, and to control the second phase shift unit 200 to be in a third connection state or a fourth connection state.
[0042] Thus, the above-mentioned phase shift control circuit 10 in the present application can determine the phase shift degree of the phase angle of the initial RF signal RF1 by the RF power amplifier PA by setting the phase difference acquisition unit 300 to acquire the phase difference between the phase angle of the initial RF signal RF1 and the phase angle of the RF power output by the RF power amplifier PA, and then control the first phase shift unit 100 to be in the first connection state or the second connection state according to such a first phase difference A1 by setting the control unit 400, and control the second phase shift unit 200 to be in the third connection state or the fourth connection state, thereby effectively solving the phase shift problem of the initial RF signal RF1 during the power amplification process of the RF power amplifier PA, and avoiding problems in the subsequent provision of RF power to the plasma load.
[0043] In one or more embodiments, the phase difference acquisition unit 300 may include multiple voltage sensors, multiple operational amplifiers, and logic devices such as XOR gates to obtain the first phase difference A1. The voltage sensor is used to obtain the initial RF signal RF1 and the target RF signal RF3, the operational amplifier is used to convert the initial RF signal RF1 and the target RF signal RF3 into square waves, and the logic devices such as XOR gates perform logic operations on the initial RF signal RF1 and the target RF signal RF3 of the square wave to obtain the first phase difference A1.
[0044] In one or more embodiments, the control unit 400 is used to control the first phase shift unit 100 to be in the first connection state and the second phase shift unit 200 to be in the fourth connection state when the first phase difference A1 is not equal to zero, or to control the first phase shift unit 100 to be in the second connection state and the second phase shift unit 200 to be in the third connection state; when the first phase difference A1 is equal to zero, the first phase shift unit 100 is controlled to be in the second connection state and the second phase shift unit 200 is controlled to be in the fourth connection state.
[0045] Therefore, the phase shift control circuit 10 in the present application is specifically configured with the control unit 400 to control the first phase shift unit 100 and the second phase shift unit 200 to be in corresponding connection states according to whether the first phase difference A1 is zero.
[0046] Further, the control unit 400 is used to control the first phase shift unit 100 to be in the first connection state when the first phase difference A1 is greater than zero, and to control the second phase shift unit 200 to be in the fourth connection state, and to control the first phase shift unit 100 to be in the second connection state when the first phase difference A1 is less than zero, and to control the second phase shift unit 200 to be in the third connection state. Alternatively, the control unit 400 is used to control the first phase shift unit 100 to be in the first connection state when the first phase difference A1 is less than zero, and to control the second phase shift unit 200 to be in the fourth connection state, and to control the first phase shift unit 100 to be in the second connection state when the first phase difference A1 is greater than zero, and to control the second phase shift unit 200 to be in the third connection state.
[0047] In one or more embodiments, the second phase difference is the phase difference between the phase angle of the initial RF signal RF1 and the phase angle of the target RF signal RF3. The control unit 400 is also used to adjust the first phase shift parameter of the first phase shift unit 100 according to the first phase difference A1 when the first phase difference A1 is not equal to zero, or adjust the second phase shift parameter of the second phase shift unit 200 so that the sum of the second phase difference and the first phase difference A1 is equal to zero.
[0048] Thus, in the above-mentioned phase shift control circuit 10 in the present application, the control unit 400 makes the sum of the second phase difference and the first phase difference A1 equal to zero, that is, completely solves the phase shift problem of the initial RF signal RF1 during the power amplification process of the RF power amplifier PA, so that the phase angle of the initial RF signal RF1 is the same as the phase angle of the RF electrical energy, that is, the phase difference between the phase angle of the initial RF signal RF1 and the phase angle of the RF electrical energy is zero.
[0049] The RF power amplifier PA amplifies the target RF signal RF3 to obtain RF electric energy with a target power value. It should be noted that the RF electric energy can also be regarded as a RF signal with a target power value, but the power value of the RF electric energy is larger than that of the target RF signal RF3. Therefore, the phase angle of the RF electric energy is also the phase angle of the RF signal with the target power value.
[0050] In one or more embodiments, the phase shift accuracy of the first phase shift unit 100 is different from the phase shift accuracy of the second phase shift unit 200. The control unit 400 can be used to control the first phase shift unit 100 to be in the first connection state and control the second phase shift unit 200 to be in the third connection state when the first phase difference A1 is not equal to zero.
[0051] Therefore, the above-mentioned phase shift control circuit 10 in the present application, when the first phase shift unit 100 and the second phase shift unit 200 are connected between the input terminal In and the output terminal Out in sequence, can simultaneously make the first phase shift unit 100 in the first connection state, and make the second phase shift unit 200 in the third connection state, so as to solve the phase shift problem of the initial RF signal RF1 in the process of power amplification of the RF power amplifier PA to the greatest extent through different phase shift accuracies.
[0052] The phase shift accuracy of the first phase shift unit 100 is the minimum change amount of the first phase shift parameter, and the phase shift accuracy of the second phase shift unit 200 is the minimum change amount of the second phase shift parameter.
[0053] Furthermore, the control unit 400 can also be used to adjust the first phase shift parameter of the first phase shift unit 100 according to the first phase difference A1 and adjust the second phase shift parameter of the second phase shift unit 200 when the first phase difference A1 is not equal to zero, so that the sum of the second phase difference and the first phase difference A1 is equal to zero.
[0054] Please also read Figure 4 , Figure 4 FIG. 1 is a circuit diagram of a phase shift control circuit in an embodiment of the present application. Figure 1 , Figure 4 As shown, the first phase shift unit 100 includes a first resistor R1, a first capacitor C1 and a first switch S1, the first resistor R1 and the first capacitor C1 are connected between the input terminal In and the ground GND in sequence, the connection point between the first resistor R1 and the first capacitor C1 is connected to the second phase shift unit 200, and the two ends of the first switch S1 are correspondingly connected to the two ends of the first resistor R1. Among them, the first switch S1 is used to be selectively in an on or off state, so as to correspondingly make the first phase shift unit 100 selectively in the second connection state or the first connection state.
[0055] Thus, the above-mentioned phase shift control circuit 10 in the present application, by setting the first resistor R1, the first capacitor C1 and the first switch S1 of the first phase shift unit 100 and the corresponding connection relationship, enables the first phase shift unit 100 to selectively move or not move the phase angle of the initial RF signal RF1 in the first direction, and the first direction corresponds to the direction that makes the phase angle of the initial RF signal RF1 lag, and at the same time will not affect other waveform parameters of the initial RF signal RF1, and the other waveform parameters may include waveform, frequency, etc.
[0056] Specifically, the phase difference between the phase angle of the intermediate radio frequency signal RF2 and the phase angle of the initial radio frequency signal RF1 satisfies a first preset relationship, and the first preset relationship may be -tan -1(R1×C1×ω), that is, the phase difference between the phase angle of the initial RF signal RF1 and the phase angle of the intermediate RF signal RF2 is related to the resistance value of the first resistor R1, the capacitance value of the first capacitor C1 and the angular frequency of the initial RF signal RF1, that is, the shift angle of the phase angle of the initial RF signal RF1 by the first phase shift unit 100 is -tan -1 (R1×C1×ω), the first phase shift parameter of the first phase shift unit 100 is related to the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the angular frequency of the initial RF signal RF1.
[0057] Furthermore, the first resistor R1 has an adjustable resistance value and / or the first capacitor C1 has an adjustable capacitance value, and the first phase shift parameter of the first phase shift unit 100 is changed by adjusting the resistance value of the first resistor R1 and / or the capacitance value of the first capacitor C1. Figure 4 As shown, the first capacitor C1 may be an adjustable capacitor to have an adjustable capacitance value.
[0058] Please also read Figure 5 , Figure 5 FIG. 1 is a circuit diagram of a phase shift control circuit in another embodiment of the present application. Figure 1 , Figure 5 As shown, the first phase shift unit 100 may also include a first resistor R1, a first capacitor C1, a third switch S3 and a fourth switch S4, wherein the first resistor R1, the first capacitor C1 and the fourth switch S4 are sequentially connected between the input terminal In and the ground GND, the connection point between the first resistor R1 and the first capacitor C1 is connected to the second phase shift unit 200, and the two ends of the third switch S3 are correspondingly connected to the two ends of the first capacitor C1. The third switch S3 and the fourth switch S4 are used to selectively be in the on or off state at the same time, so as to correspondingly make the first phase shift unit 100 selectively in the second connection state or the first connection state. That is, when the third switch S3 and the fourth switch S4 are both in the on state, the first phase shift unit 100 is selectively in the second connection state, and when the third switch S3 and the fourth switch S4 are both in the off state, the first phase shift unit 100 is selectively in the first connection state.
[0059] like Figure 1 , Figure 4 , Figure 5As shown, the second phase shift unit 200 includes a second resistor R2, a second capacitor C2 and a second switch S2, the second capacitor C2 and the second resistor R2 are sequentially connected between the first phase shift unit 100 and the ground GND, the connection point between the second capacitor C2 and the second resistor R2 is connected to the output terminal Out, and the two ends of the second switch S2 are correspondingly connected to the two ends of the second capacitor C2. Among them, the second switch S2 is used to selectively be in an on or off state, so as to correspondingly make the second phase shift unit 200 selectively in the fourth connection state or the third connection state.
[0060] Thus, the above-mentioned phase shift control circuit 10 in the present application, by setting the second resistor R2, the second capacitor C2 and the second switch S2 of the second phase shift unit 200 and the corresponding connection relationship, enables the second phase shift unit 200 to selectively move or not move the phase angle of the intermediate radio frequency signal RF2 in the second direction, and the second direction corresponds to the direction that makes the phase angle of the intermediate radio frequency signal RF2 advance, and at the same time will not affect other waveform parameters of the intermediate radio frequency signal RF2, and the other waveform parameters may include waveform, frequency, etc.
[0061] Specifically, the phase difference between the phase angle of the target RF signal RF3 and the phase angle of the intermediate RF signal RF2 satisfies a second preset relationship, and the second preset relationship may be tan -1 (1 / R2×C2×ω), that is, the phase difference between the phase angle of the target RF signal RF3 and the phase angle of the intermediate RF signal RF2 is related to the resistance value of the second resistor R2, the capacitance value of the second capacitor C2 and the angular frequency of the intermediate RF signal RF2, that is, the shift angle of the phase angle of the intermediate RF signal RF2 by the second phase shift unit 200 is tan -1 (1 / R2×C2×ω), the second phase shift parameter of the second phase shift unit 200 is related to the resistance value of the second resistor R2, the capacitance value of the second capacitor C2, and the angular frequency of the intermediate RF signal RF2.
[0062] Further, the second resistor R2 has an adjustable resistance value and / or the second capacitor C2 has an adjustable capacitance value, and the second phase shift parameter of the second phase shift unit 200 is changed by adjusting the resistance value of the second resistor R2 and / or the capacitance value of the second capacitor C2. Figure 5 As shown, the second capacitor C2 may be an adjustable capacitor to have an adjustable capacitance value.
[0063] In one or more embodiments, Figure 3 The control unit 400 shown in FIG. Figure 4 , Figure 5One or more of the first switch S1, the second switch S2, the third switch S3 and the fourth switch S4 shown are turned on or off to control the first phase shift unit 100 to be in the first connection state or the second connection state, and to control the second phase shift unit 200 to be in the third connection state or the fourth connection state.
[0064] In one or more embodiments, Figure 3 The control unit 400 shown in FIG. Figure 4 , Figure 5 The capacitance value of the first capacitor C1 and / or the capacitance value of the second capacitor C2 are shown to correspondingly adjust the first phase shift parameter of the first phase shift unit 100 and / or the second phase shift parameter of the second phase shift unit 200 .
[0065] In one or more embodiments, the control unit 400 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).
[0066] The phase shift control circuit 10 of the present application, through the above structure, can effectively solve the phase shift problem of the initial RF signal RF1 during the modulation process according to actual needs, and can better perform subsequent signal modulation, thereby better providing RF power to the plasma load.
[0067] See also Figure 6 , Figure 6 FIG. 1 is a block diagram of a radio frequency power supply system in some embodiments of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a signal source SS, a radio frequency power amplifier PA, and the phase shift control circuit 10 in any of the aforementioned embodiments.
[0068] Please refer again Figure 1 .like Figure 1As shown, the phase shift control circuit 10 includes an input terminal In, an output terminal Out, a first phase shift unit 100 and a second phase shift unit 200, wherein the first phase shift unit 100 and the second phase shift unit 200 are connected between the input terminal In and the output terminal Out. The input terminal In is used to be connected to a signal source SS to receive an initial RF signal RF1 output by the signal source SS. The first phase shift unit 100 is used to selectively move or not move the phase angle of the initial RF signal RF1 in a first direction, and the second phase shift unit 200 is used to selectively move or not move the phase angle of the initial RF signal RF1 in a second direction, wherein the first phase shift unit 100 and / or the second phase shift unit 200 processes the initial RF signal RF1 output by the signal source SS to obtain a target RF signal RF3. The output terminal Out is used to be connected to an RF power amplifier PA to output the target RF signal RF3 to the RF power amplifier PA.
[0069] The more specific structure of the phase shift control circuit 10 can refer to the relevant content of the phase shift control circuit 10 in any of the aforementioned embodiments, which will not be described in detail here.
[0070] Specifically, the signal source SS may be a crystal oscillator, so that the waveform of the output initial RF signal RF1 is a sine wave, and the RF power amplifier PA may be used to amplify the power of the target RF signal RF3 to obtain RF power and output it to the plasma load, wherein the waveform of the RF power is also a sine wave.
[0071] The phase shift control circuit 10 and the RF power supply system 1000 of the present application, through the above structure, can effectively solve the phase shift problem of the initial RF signal RF1 during the modulation process according to actual needs, and can better perform subsequent signal modulation, thereby better providing RF power to the plasma load.
[0072] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. A phase shift control circuit, characterized in that: It includes an input end, an output end, a first phase shift unit and a second phase shift unit, wherein the first phase shift unit and the second phase shift unit are connected between the input end and the output end; The input end is used to connect to a signal source to receive an initial radio frequency signal output by the signal source; The first phase shift unit is used to selectively move or not move the phase angle of the initial radio frequency signal in a first direction, and the second phase shift unit is used to selectively move or not move the phase angle of the initial radio frequency signal in a second direction, wherein the first phase shift unit and / or the second phase shift unit processes the initial radio frequency signal output by the signal source to obtain a target radio frequency signal; The output end is used to connect to a radio frequency power amplifier to output the target radio frequency signal to the radio frequency power amplifier.
2. The phase shift control circuit according to claim 1, characterized in that: The first phase shift unit and the second phase shift unit are sequentially connected between the input end and the output end, the first phase shift unit is used to selectively move or not move the phase angle of the initial RF signal to obtain an intermediate RF signal, and the second phase shift unit is used to selectively move or not move the phase angle of the intermediate RF signal to obtain a target RF signal.
3. The phase shift control circuit according to claim 2, characterized in that: The first phase shift unit is used to selectively be in a first connection state or a second connection state to correspondingly move or not move the phase angle of the initial radio frequency signal; The second phase shift unit is used to selectively be in a third connection state or a fourth connection state to correspondingly move or not move the phase angle of the intermediate radio frequency signal.
4. The phase shift control circuit according to claim 3, characterized in that: The first phase shift unit also has a variable first phase shift parameter. When the first phase shift unit is in the first connection state, the shift angle of the phase angle of the initial radio frequency signal by the first phase shift unit changes according to the change of the first phase shift parameter; The second phase shift unit also has a variable second phase shift parameter. When the second phase shift unit is in the third connection state, the shift angle of the phase angle of the intermediate radio frequency signal by the second phase shift unit changes according to the change of the second phase shift parameter.
5. The phase shift control circuit according to claim 4, characterized in that: The phase shift control circuit further includes a phase difference acquisition unit and a control unit, wherein the phase difference acquisition unit is connected to the input end, the RF power amplifier and the control unit; The phase difference acquisition unit is used to acquire a first phase difference, where the first phase difference is a phase difference between a phase angle of the initial RF signal and a phase angle of the RF electric energy output by the RF power amplifier; The control unit is used for controlling the first phase shift unit to be in the first connection state or the second connection state according to the first phase difference, and controlling the second phase shift unit to be in the third connection state or the fourth connection state.
6. The phase shift control circuit according to claim 5, characterized in that: The control unit is used to control the first phase shift unit to be in the first connection state and the second phase shift unit to be in the fourth connection state when the first phase difference is not equal to zero, or to control the first phase shift unit to be in the second connection state and the second phase shift unit to be in the third connection state; when the first phase difference is equal to zero, control the first phase shift unit to be in the second connection state and control the second phase shift unit to be in the fourth connection state.
7. The phase shift control circuit according to claim 5, characterized in that: The second phase difference is a phase difference between a phase angle of the initial radio frequency signal and a phase angle of the target radio frequency signal; The control unit is further configured to adjust the first phase shift parameter of the first phase shift unit according to the first phase difference, or adjust the second phase shift parameter of the second phase shift unit, so that the sum of the second phase difference and the first phase difference is equal to zero when the first phase difference is not equal to zero.
8. The phase shift control circuit according to claim 3, characterized in that: The first phase shift unit includes a first resistor, a first capacitor and a first switch, the first resistor and the first capacitor are connected between the input terminal and the ground in sequence, a connection point between the first resistor and the first capacitor is connected to the second phase shift unit, and two ends of the first switch are connected to two ends of the first resistor correspondingly; The first switch is used to be selectively in an on or off state, so as to correspondingly enable the first phase shift unit to be selectively in the second connection state or the first connection state.
9. The phase shift control circuit according to claim 3, characterized in that: The second phase shift unit includes a second resistor, a second capacitor and a second switch, the second capacitor and the second resistor are connected between the first phase shift unit and the ground in sequence, a connection point between the second capacitor and the second resistor is connected to the output end, and two ends of the second switch are connected to two ends of the second capacitor correspondingly; The second switch is used to be selectively in an on or off state, so as to correspondingly enable the second phase shift unit to be selectively in the fourth connection state or the third connection state.
10. A radio frequency power supply system, characterized in that: It comprises a signal source, a radio frequency power amplifier and a phase shift control circuit as claimed in any one of claims 1 to 9.