Manipulator driving structure and wafer loading system

Abstract

The invention discloses a manipulator driving structure and a wafer loading system. The manipulator driving structure comprises at least two adjacent belt wheels, wherein the axes of the belt wheels are parallel; the transmission belt is wound between the belt wheels to form closed-loop transmission; the tension adjusting assembly comprises an anchor point and a swing base station pivoted to the anchor point, and the swing base station is connected with one belt wheel and drives the belt wheel to swing around the anchor point so as to change the axis distance between the adjacent belt wheels; wherein the connecting line between the adjusted belt wheel and the anchor point is defined as a first connecting line, the connecting line between the other belt wheel and the anchor point is defined as a second connecting line, when the first connecting line and the second connecting line are collinear, the axis distance is minimum, and when the second connecting line extends along the reverse extension line of the first connecting line, the axis distance is maximum. And a pre-tightening force self-locking interval is formed. By the adoption of the scheme, the tensioning force between the adjacent belt wheels is adjusted under the condition that the power output belt wheel is rigidly fixed.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transfer equipment, and in particular to a robot drive structure and a wafer loading system. Background Art

[0002] In semiconductor processing, a dual-select compliant articulated robot arm may be used to transfer wafers / silicon wafers to and from semiconductor processing modules, and the dual-select compliant articulated robot arm generally allows for rapid exchange of substrates to and from a processing module, where rapid exchange may refer to removing one substrate from a processing module and immediately placing another, different substrate into the same processing module.

[0003] In the existing selective compliance articulated mechanical arm deceleration mechanism, the speed is reduced and the output torque is increased through the deceleration mechanism; the torque is generally increased by increasing the transmission level, and the torque is transmitted between the pulleys through the synchronous belt. In order to ensure the stable operation of the synchronous belt, it needs to be tensioned, and the conveyor belt is generally tensioned by changing the radial distance between two adjacent pulleys; however, in the prior art, the power output pulley is usually rigidly fixed on the flange base by a bearing, resulting in its radial position being unable to be adjusted. In addition, the existing tensioning adjustment mechanism needs to move the radial position of the power input pulley or the power output pulley during the tensioning adjustment process, and the steps are relatively cumbersome, and the stable transmission of torque after the tensioning adjustment cannot be guaranteed.

[0004] Therefore, it is necessary to provide a robot drive structure and a wafer loading system to solve the above problems existing in the prior art. Summary of the invention

[0005] The object of the present invention is to provide a robot drive structure and a wafer loading system to solve the technical problem that it is difficult to adjust the tension between adjacent pulleys when the power output pulley is rigidly fixed.

[0006] To achieve the above object, the technical solution of the present invention is as follows: A first aspect: A manipulator driving structure, comprising: at least two adjacent pulleys with parallel axes; A transmission belt, wound between the pulleys to form a closed-loop transmission; A tension adjustment assembly, comprising an anchor point, and a swing base pivotally connected to the anchor point, wherein the swing base is connected to one of the pulleys and drives it to swing around the anchor point to change the axial center distance of the adjacent pulleys; Among them, the line connecting the adjusted pulley and the anchor point is defined as the first line, and the line connecting the other pulley and the anchor point is defined as the second line. When the first line and the second line are collinear, the axial center distance reaches the minimum value, and when the second line extends along the reverse extension line of the first line, the axial center distance reaches the maximum value, forming a preload self-locking interval.

[0007] The beneficial effect of a manipulator drive structure provided by the present invention is that: by acting on one of the pulleys through the tension adjustment component to make it pivot around the anchor point, the axial center distance of the pulley relative to the other adjacent pulley changes, thereby achieving the adjustment of the transmission belt tension. The above scheme avoids the limitation that the radial position of the power output pulley cannot be adjusted due to rigid fixation, and does not need to directly change the radial position of the power output pulley, but achieves the purpose of tensioning the transmission belt by changing the axial center distance between adjacent pulleys. And compared with the prior art that requires radial movement of the power input pulley and the power output pulley, the operation is relatively simpler, reducing the complex steps required in the adjustment process and improving the adjustment efficiency.

[0008] Furthermore, it includes a mounting shell, the mounting shell has a accommodating space inside, the mounting shell is fixedly connected to the anchor point, the pulley and the tension adjustment assembly are arranged in the accommodating space, the pulley includes a power input pulley, a power output pulley and a secondary pulley, the power input pulley and the power output pulley are located on the first side of the mounting shell, the secondary pulley is located on the second side of the mounting shell, the secondary pulley includes a coaxial double pulley group, and the double pulley group is respectively connected to the power input pulley and the power output pulley through independent transmission belts.

[0009] By adopting the above technical scheme, the power input pulley and the power output pulley are arranged on the same side, the secondary pulley is arranged on the opposite side and a coaxial double transmission pulley structure is integrated, and the design of the anchor point being fixed to the shell makes it possible for the secondary pulley to swing, and the direction of its pivoting trajectory around the anchor point forms an angle with the direction of the tension of the power input pulley and the power output pulley, thereby converting the bidirectional unidirectional tension originally acting on the secondary pulley into unidirectional component forces, reducing the risk of pulley tilting; at the same time, the layout on opposite sides allows the axial center distance of the input side and the output side drive belt to be synchronously adjusted through a single pivoting action, thereby realizing bidirectional tension linkage compensation, and improving the adjustment efficiency while avoiding changes in the position of the power output pulley.

[0010] Furthermore, the tension adjustment component comprises: A swing base is connected to the secondary pulley, the swing base can swing around the anchor point, a swing hole is provided on the swing base in a direction parallel to the axis of the secondary pulley, a swing hole is provided on the swing base in its own height direction, and a drive hole is provided on the swing base in a depth direction perpendicular to the swing hole, and the swing hole and the drive hole are vertically connected to each other; The adjusting member comprises an adjusting portion and a driving portion, wherein the adjusting portion is located in the swing hole and is connected to the mounting shell, and the driving portion can extend into the driving hole to abut against the adjusting portion, and the driving portion drives the adjusting portion to move in the swing hole by threaded fitting or linear pushing.

[0011] By adopting the above technical solution, the linear drive is converted into swing adjustment through the coordinated design of the swing base and the adjustment part, realizing precise control of tension and self-locking stability. When the driving part enters the driving hole, the axial thrust generated by it acts on the adjustment part, forcing the swing base to produce a controllable arc swing around the anchor point, thereby synchronously changing the axial center distance between the secondary pulley and the power input / output pulley.

[0012] Furthermore, the adjusting part includes an adjusting column, one end of which is fixedly connected to the mounting shell, and the driving part includes a driving bolt, the inner wall of the driving hole is provided with a thread, the driving bolt is threadedly connected to the driving hole and extends into the swing hole to abut the adjusting column.

[0013] By adopting the above technical solution, the self-locking effect of the threaded fit and the sliding constraint of the swing hole on the adjustment part can effectively prevent loosening caused by vibration during operation and ensure long-term stability of the tension.

[0014] Furthermore, the swing hole is a bar-shaped hole, and the diameter of the adjustment column is smaller than the width of the swing hole to form a swing gap.

[0015] Furthermore, the swing base also includes an extension portion, which is close to the anchor point. An arc-shaped hole is provided on the extension portion. The arc-shaped holes are distributed along an extension direction of an arbitrary circle of the anchor point. The curvature of the arc-shaped hole matches the swing trajectory of the swing base. A limiting column is slidably connected in the arc-shaped hole, and one end of the limiting column is fixedly connected to the mounting shell.

[0016] By adopting the above technical solution, the dynamic limit of the swing trajectory of the secondary pulley is formed through the motion coupling constraint of the arc hole and the limit column. When the swing base pivots around the anchor point, the sliding path of the limit column in the arc hole strictly limits the swing angle range, ensuring that the secondary pulley can only swing within the preset plane, eliminating the risk of lateral deviation caused by unbalanced bidirectional tension. The fixed connection between the limit column and the mounting shell further disperses the force of the swing base to the rigid structure of the shell, so that the torque of the swing base is offset by the lateral support force of the limit column to prevent tilting.

[0017] Further, the swing base includes a first area, a second area, a third area and a fourth area; The tension adjustment assembly further includes a bearing portion, the bearing portion is arranged in the first area, the anchor point is arranged in the second area, the adjustment portion is arranged in the third area, and the extension portion is arranged in the fourth area.

[0018] Furthermore, the bearing portion includes a first bearing mounting area opened in the first area, a hollow bearing body protruding downward along the edge of the first bearing mounting area, and an adapter body protruding downward along the bearing body, the bearing body is provided with an opening toward the power output pulley for the transmission belt to pass through, the adapter body is fixedly connected to the bearing body, and the interior of the adapter body is hollow to form a second bearing mounting area.

[0019] Further, the anchor point includes an anchor shaft and an axial hole, one end of the anchor shaft is fixedly connected to the mounting shell, the axial hole is opened in the second area along the height direction of the anchor shaft, and the anchor shaft and the axial hole are pivotally matched.

[0020] Furthermore, the secondary pulley includes a first pulley, a second pulley, a first shaft portion and a second shaft portion, the first shaft portion is located between the first pulley and the second pulley and is coaxially arranged, and the first shaft portion and the inner periphery of the first pulley are provided with an installation space for accommodating the adapter; the second shaft portion is located at the top of the second pulley and is coaxially arranged.

[0021] Furthermore, the secondary pulley is also provided with a bearing portion, and the bearing portion comprises: a first bearing mounted between the second shaft portion and the first bearing mounting area; A second bearing is installed between the first shaft portion and the second bearing installation area.

[0022] In the second aspect, the present invention provides a wafer loading system, comprising the above-mentioned robot drive structure, and further comprising: An arm, the arm extending and retracting along an R-axis direction; The manipulator driving structure is used to drive the arm to rotate along the T-axis direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the internal structure of a manipulator driving structure according to an embodiment of the present invention; Figure 2 This is a schematic diagram of power transmission of a manipulator driving structure according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the motion state of the swing base according to an embodiment of the present invention; Figure 4 This is a schematic diagram of an exploded structure of a manipulator driving structure according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the regional distribution of the swing base according to an embodiment of the present invention; Figure 6 It is a schematic diagram of the structure of a wafer loading system according to an embodiment of the present invention.

[0024] Figure numerals: 1. pulley; 11. power input pulley; 12. power output pulley; 13. secondary pulley; 131. first pulley; 132. second pulley; 133. first shaft; 134. second shaft; 135. bearing; 136. installation space; 2. transmission belt; 3. axis distance; 31. first connecting line; 32. second connecting line; 4. tension adjustment component; 41. anchor point; 411. rotating shaft; 412. shaft hole; 42. swing base; 421. swing hole; 4211. swing gap; 422. extension; 4221. arc hole; 423. first area ; 424, second area; 425, third area; 426, fourth area; 427, load-bearing part; 4271, first bearing installation area; 4272, load-bearing body; 4273, adapter; 4274, open; 4275, second bearing installation area; 43, adjusting member; 431, screw; 432, driving part; 4321, driving bolt; 4322, nut; 4323, driving hole; 5, mounting shell; 51, upper flange; 52, lower flange; 53, outer cover; 6, driving motor; 7, arm; 8, secondary pulley axis motion trajectory; 9, adjusting column motion trajectory. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0026] The following is combined with Figure 1 - Attachment Figure 5 , the specific implementation modes of the present invention are further described in detail.

[0027] First aspect Reference Figure 1 A manipulator driving structure includes at least two adjacent pulleys 1, a transmission belt 2 and a tension adjustment component 4.

[0028] In some embodiments, at least two pulleys have a central axis and are parallel to each other, and the distance between the two central axes is the axial center distance 3. A transmission belt 2 for transmitting power is arranged between at least two adjacent pulleys. The transmission belt 2 is completely or partially wrapped around the pulleys. The tension adjustment component 4 acts on one of the pulleys to pivot around the anchor point 41, so that the axial center distance 3 of the pulley relative to the other adjacent pulley changes, thereby achieving the adjustment of the tension of the transmission belt 2. The above scheme avoids the limitation that the radial position of the power output pulley 12 cannot be adjusted due to rigid fixation, and does not need to directly change the radial position of the power output pulley 12, but achieves the purpose of tensioning the transmission belt 2 by changing the axial center distance 3 between adjacent pulleys. Among them, in this embodiment, one of the at least two adjacent pulleys 1 is a power input pulley 11 or a power output pulley 12, and the other is a secondary pulley 13.

[0029] Reference Figure 1 and Figure 2 In some specific embodiments, the pulley includes a power input pulley 11, a power output pulley 12 and a secondary pulley 13. The power input pulley 11 and the power output pulley 12 are located on the same side, which saves the axial space of the robot arm, and the secondary pulley 13 is arranged on the other side for power transmission. The power input pulley 11 is connected to the drive motor 6, and the drive motor 6 is used to provide power to the power input pulley 11 to drive the power input pulley 11 to rotate, and the power output pulley 12 is used to transmit the power out. The drive motor 6 adopts a servo or direct drive motor.

[0030] In some embodiments, the secondary pulley 13 is located on the other side and includes two coaxially arranged transmission belt wheels, one of which is connected to the power input pulley 11 through a transmission belt 2, and the other is connected to the power output pulley 12 through a transmission belt 2.

[0031] Although the power input pulley 11 and the power output pulley 12 are located on the same side, the axial space of the robot arm is saved. However, when it is necessary to adjust the tension of the synchronous belt between the power output pulley 12 and the secondary pulley 13, it can only be achieved by changing the installation position of the secondary pulley 13. However, during the operation of the robot arm, the secondary pulley 13 continues to bear the tension of the synchronous belt of the power output pulley 12, and the direction of the tension is consistent with the transmission direction. Since the position of the power output pulley 12 is fixed, in dynamic operation, the bidirectional tension forms a superposition effect, causing the secondary pulley 13 to bear an asymmetric lateral load. Under long-term operation, this unbalanced force will cause the secondary pulley 13 to tilt, resulting in a decrease in the stability of torque transmission, which directly affects the wafer transfer accuracy.

[0032] To this end, this example uses a design in which the anchor point 41 is fixed to the shell, so that when the secondary pulley 13 swings, the direction of its pivoting trajectory around the anchor point 41 forms an angle with the direction of the tension of the power input and output pulleys, thereby converting the bidirectional unidirectional tension originally acting on the secondary pulley 13 into unidirectional components, reducing the risk of pulley tilt; at the same time, the opposite-side layout allows the axial center distance 3 of the input and output drive belts 2 to be synchronously adjusted through a single pivoting action, thereby realizing bidirectional tension linkage compensation, and improving the adjustment efficiency while avoiding changes in the position of the power output pulley 12.

[0033] In some embodiments, the manipulator driving structure further includes a mounting housing 5, the interior of the mounting housing 5 has a containing space, wherein the pulley and the tension adjustment assembly 4 are arranged in the containing space. The tension adjustment assembly 4 includes at least one anchor point 41, and the mounting housing 5 is fixedly connected to the anchor point 41. In some embodiments, the anchor point 41 includes an anchoring shaft 411 and an axis hole 412, and one end of the anchoring shaft 411 is fixedly connected to the top of the mounting housing 5.

[0034] In some specific embodiments, the mounting housing 5 is composed of an upper flange 51, a lower flange 52 and an outer cover 53 located on the peripheral side, and the upper flange 51, the lower flange 52 and the outer cover 53 are jointly arranged to form an accommodation space. The upper flange 51, the lower flange 52 and the outer cover 53 are fixed by bolts or welding.

[0035] In some embodiments, the tension adjustment assembly 4 acts on one of the pulleys in a pivoting manner about the anchor point 41, so that the axial center distance 3 of one pulley relative to another adjacent pulley changes to adjust the tension of the transmission belt 2. In some embodiments, the power output pulley 12 is fixedly arranged on the mounting housing 5, such as Figure 2 As shown, it is fixedly arranged on the upper flange 51, and the distance between the axis of the power output pulley 12 and the axis of the secondary pulley 13 is the axis center distance 3.

[0036] Reference Figure 3 In some embodiments, the line between the axis of the power output pulley 12 and the anchor point 41 forms a first line 31, and the line between the secondary pulley 13 and the anchor point 41 forms a second line 32. When the tension adjustment component 4 drives the secondary pulley 13 to swing, within the range of 0°-180°, the larger the angle between the first line 31 and the second line 32, the larger the axis distance 3; when the tension adjustment component 4 drives one of the pulleys to swing, within the range of 180°-360°, the larger the angle between the first line 31 and the second line 32, the smaller the axis distance 3. When the angle between the first line 31 and the second line 32 is 0° or 360°, that is, when the two coincide, the axis distance 3 is the smallest; when the angle between the first line 31 and the second line 32 is 180°, that is, the second line 32 is on the extension path of the first line 31, the axis distance 3 is the largest at this time, and the tension is the largest.

[0037] Reference Figure 4 In some embodiments, the tension adjustment assembly 4 includes a swing base 42 and an adjustment member 43. The swing base 42 is connected to the secondary pulley 13, and the swing base 42 can swing around the anchor point 41. A swing hole 421 is provided on the swing base 42 in a direction parallel to the axis of the secondary pulley 13. A drive hole 4323 is also provided on one side of the swing base 42. The swing hole 421 and the drive hole 4323 are perpendicular to each other and connected to each other. The adjustment member 43 has an adjustment part and a drive part 432. The adjustment part is located in the swing hole 421, and the adjustment part is connected to the mounting shell 5. The drive part 432 can extend into the drive hole 4323 to abut against the adjustment part, and the drive part 432 drives the adjustment part to move in the swing hole 421 by threaded fitting or linear pushing. Through the coordinated design of the swing base 42 and the adjustment member 43, the linear drive is converted into a swing adjustment, and the precise control and self-locking stability of the tension are achieved. When the driving part 432 enters the driving hole 4323 , the axial thrust generated by it acts on the adjusting part, forcing the swing base 42 to produce a controllable arc swing around the anchor point 41 , thereby synchronously changing the axial center distance 3 between the secondary pulley 13 and the power output pulley 12 .

[0038] In some specific embodiments, the adjustment part includes an adjustment column, one end of which is connected to the bottom of the mounting shell 5, that is, the upper flange 51, and specifically, the connection is a detachable connection. The adjustment column has a threaded portion, which is screwed into the bottom of the upper flange 51, and the screwing depth is adjustable. In some embodiments, the adjustment column is a hexagonal bolt. The driving part 432 includes a driving bolt 4321, and the inner wall of the driving hole 4323 is provided with a thread. The driving bolt 4321 is threadedly connected to the driving hole 4323 and extends into the swing hole 421 to abut the adjustment column. In some embodiments, a nut 4322 is also threadedly connected to the side of the driving bolt 4321 away from the adjustment hole, which is used to further fix the driving bolt 4321 to prevent the driving bolt 4321 from loosening. Specifically, the head of the driving bolt 4321 abuts against the adjusting column, and the driving bolt 4321 is continuously tightened, and the driving bolt 4321 is extended in length in the strip hole. Since the adjusting column is fixedly arranged, the driving bolt 4321 drives the swing base 42 to rotate counterclockwise with the anchor point 41 as the rotation center, so that the distance between the secondary pulley 13 and the power output pulley 12 becomes larger. The self-locking effect generated by the threaded cooperation between the driving bolt 4321 and the driving hole 4323 and the sliding constraint of the adjusting part by the swing hole 421. In addition, since the hexagonal bolt can adjust the depth of screwing into the upper flange 51, the swing base 42 can be further tightened, which can effectively maintain the long-term stability of the tension.

[0039] In some specific embodiments, the adjustment part includes a screw 431, and the upper end of the screw 431 is fixedly connected to the upper flange 51. Specifically, it can be welded or threaded. The swing hole 421 is a strip hole, and the two ends of the strip hole are semicircular. The aperture of the strip hole is larger than the diameter of the adjustment column, and a swing gap 4211 is formed between the adjustment column and the inner wall of the strip hole to cooperate with the movement of the adjustment column. By extending the driving part 432 into the adjustment hole and abutting the screw 431, the swing base 42 is driven to swing relative to the adjustment part, thereby realizing the adjustment of the axial center distance 3 between the secondary pulley 13 and the power output pulley 12, and finally realizing the tension adjustment of the secondary pulley 13 and the power output pulley 12. Since the strip hole is a straight line, and the adjusting part actually moves along an arc track during the adjustment process, leaving a swing gap 4211 can allow the adjusting part to have a certain amount of movement space in the strip hole, thereby adapting to the arc movement track, ensuring that the adjusting part can smoothly move in the strip hole, and achieve the adjustment of the axis center distance 3, and then complete the adjustment of the tension of the transmission belt 2. If there is no swing gap 4211, the straight strip hole will limit the arc movement of the adjusting part, resulting in the inability to perform the adjustment normally.

[0040] In other specific embodiments, the driving part 432 does not use the driving bolt 4321, and the driving part 432 uses a linear driving element such as an air pump or an electric cylinder. When the driving part 432 uses an air pump, its working principle is to drive the piston movement in the cylinder through the air pressure generated by the air pump, convert the air pressure energy into mechanical energy, and through compressed air, the piston rod in the cylinder is extended or retracted, and the piston rod extends into the driving hole 4323 to push the adjustment part to move in the swing hole 421, thereby driving the swing base 42 to swing around the anchor point 41, adjusting the axial center distance 3 between the pulleys, and realizing the adjustment of the tension of the transmission belt 2. It is relatively easy to achieve precise control of the moving distance by using a linear drive method, and the existence of the swing gap 4211 avoids the driving part 432 from being directly constrained by the bar hole when driving the adjustment part to move, so that the driving part 432 can push the adjustment part more smoothly and move in a predetermined linear manner.

[0041] In some embodiments, the swing base 42 further includes an extension portion 422, the extension portion 422 is close to the anchor point 41, an arc hole 4221 is provided on the extension portion 422, the arc hole 4221 is distributed along the extension direction of an arbitrary circle of the anchor point 41, the curvature of the arc hole matches the swing trajectory of the swing base 42, a limiting column is slidably connected in the arc hole 4221, and one end of the limiting column is fixedly connected to the mounting shell 5. Through the motion coupling constraint of the arc hole 4221 and the limiting column, a dynamic limit is formed on the swing trajectory of the secondary pulley 13. When the swing base 42 pivots around the anchor point 41, the sliding path of the limiting column in the arc hole 4221 strictly limits the swing angle range, ensuring that the secondary pulley 13 can only swing within a preset plane, eliminating the risk of lateral deviation caused by unbalanced bidirectional tension. The fixed connection between the limit column and the mounting housing 5 further disperses the force of the swing base 42 to the rigid structure of the housing, so that the torque of the swing base 42 is offset by the lateral support force of the limit column to prevent tilting. The above solution solves the technical problem of the prior art that the pulley group is unbalanced due to unbalanced tension, thereby affecting the transmission accuracy.

[0042] Reference Figure 5 In some embodiments, Figure 5As shown, the swing base 42 includes a first area 423, a second area 424, a third area 425 and a fourth area 426. The tension adjustment component 4 also includes a bearing portion 427, the bearing portion 427 is arranged in the first area 423, the anchor point 41 is arranged in the second area 424, the adjustment portion is arranged in the third area 425, and the extension portion 422 is arranged in the fourth area 426. The fourth area 426 is arranged on the side of the swing base 42 away from the power output pulley 12, further dispersing the force of the swing base 42 to the rigid structure of the shell to prevent tilting. Among them, the adjustment portion is arranged in the third area 425, and the third area 425 can be arranged on the outside of the first area 423 away from the second area 424, so as to facilitate adjustment and make the adjustment more labor-saving. Because the farther the adjustment point is from the anchor point 41, the more labor-saving the adjustment is.

[0043] In some embodiments, the bearing portion 427 includes a first bearing installation area 4271 provided in the first area 423, a bearing body 4272 protruding downward along the edge of the first bearing installation area 4271 to form a hollow body, and a transfer body 4273 protruding downward along the bearing body 4272 to form a transfer body, the bearing body 4272 is provided with an opening 4274 for the transmission belt 2 to pass through in the direction of the power output pulley 12, the transfer body 4273 is fixedly connected to the bearing body 4272, and the interior of the transfer body 4273 is hollow to form a second bearing installation area 4275. One end of the anchor shaft 411 is fixedly connected to the installation housing 5, and the shaft hole 412 is provided in the second area 424 along the height direction of the anchor shaft 411, and the anchor shaft 411 and the shaft hole 412 are rotatably matched.

[0044] In some embodiments, the secondary pulley 13 includes a first pulley 131, a second pulley 132, a first shaft 133, and a second shaft 134. The first shaft 133 is located between the first pulley 131 and the second pulley 132 and is coaxially arranged. The first shaft 133 and the inner periphery of the first pulley 131 are formed with an installation space 136 for accommodating the adapter 4273; the second shaft 134 is located at the top of the second pulley 132 and is coaxially arranged. A bearing portion 135 is also provided on the secondary pulley 13, and the bearing portion 135 includes a first bearing and a second bearing. The first bearing is installed between the second shaft 134 and the first bearing installation area 4271; the second bearing is installed between the first shaft 133 and the second bearing installation area 4275.

[0045] In summary, the manipulator drive structure provided by the present invention is designed with a tension adjustment component 4 that pivots around a fixed anchor point 41, so that the swing trajectory direction of the secondary pulley 13 forms an angle with the pulling forces of the power input pulley 11 and the power output pulley 12, thereby converting the originally superimposed pulling forces in the same direction into opposite directions to offset each other. At the same time, the arc hole 4221 of the swing base 42 is used to constrain the swing trajectory of the pulley, and the tension adjustment is achieved in combination with a threaded self-locking adjustment structure. On the one hand, the present invention converts the lever-type adjustment point layout away from the anchor point 41 (such as the outside of the third area 425) and the threaded drive into a swinging motion of the swing base 42, so that a single rotation of the driving bolt 4321 can change the axial center distance 3 between the power output pulley 12 and the secondary pulley 13, thereby changing the tensioning force between the power input pulley 11 and the power output pulley 12, thereby realizing a labor-saving operation of the tensioning adjustment and making the adjustment more convenient; on the other hand, the matching constraint of the limit column and the arc hole 4221 and the stress dispersion design of the extension part 422 can effectively resist the asymmetric load of the bidirectional tension, prevent the pulley from tilting, make the torque transmission more stable, and ensure the wafer transfer accuracy.

[0046] Second aspect Reference Figure 6 The present invention also provides a wafer loading system, including the above-mentioned robot drive structure, and also includes an arm 7, the arm 7 is retracted along the R-axis direction; the above-mentioned robot drive structure is used to drive the arm 7 to rotate along the T-axis direction.

[0047] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A manipulator driving structure, characterized in that: include: At least two adjacent pulleys (1) with parallel axes; A transmission belt (2) is wound between the pulleys (1) to form a closed-loop transmission; A tension adjustment component (4) comprising an anchor point (41) and a swing base (42) pivotally connected to the anchor point (41), wherein the swing base (42) is connected to one of the pulleys (1) and drives it to swing around the anchor point (41) to change the axial center distance (3) of adjacent pulleys (1); The connection line between the adjusted pulley (1) and the anchor point (41) is defined as a first connection line (31), and the connection line between the other pulley (1) and the anchor point (41) is defined as a second connection line (32). When the first connection line (31) and the second connection line (32) are collinear, the axial center distance (3) takes a minimum value, and when the second connection line (32) extends along the reverse extension line of the first connection line (31), the axial center distance (3) takes a maximum value, thereby forming a preload self-locking interval.

2. A manipulator driving structure according to claim 1, characterized in that: The invention comprises a mounting shell (5), wherein the mounting shell (5) has a storage space inside, the mounting shell (5) is fixedly connected to the anchor point (41), the pulley and the tension adjustment assembly (4) are arranged in the storage space, the pulley comprises a power input pulley (11), a power output pulley (12) and a secondary pulley (13), the power input pulley (11) and the power output pulley (12) are located on a first side of the mounting shell (5), the secondary pulley (13) is located on a second side of the mounting shell (5), and the secondary pulley (13) comprises a coaxial double pulley group, and the double pulley group is connected to the power input pulley (11) and the power output pulley (12) through independent transmission belts (2).

3. A manipulator driving structure according to claim 2, characterized in that: The tension adjustment component (4) comprises: A swing base (42) is connected to the secondary pulley (13); the swing base (42) is capable of swinging with the anchor point (41) as the center; a swing hole (421) is provided on the swing base (42) along its height direction; the swing base (42) is also provided with a drive hole (4323) along a depth direction perpendicular to the swing hole (421); the swing hole (421) and the drive hole (4323) are vertically connected to each other; The adjusting member (43) comprises an adjusting portion and a driving portion (432), wherein the adjusting portion is located in the swing hole (421), the adjusting portion is fixedly connected to the mounting shell (5), the driving portion (432) can extend into the driving hole (4323) to abut against the adjusting portion, and the driving portion (432) drives the adjusting portion to move in the swing hole (421) by means of threaded engagement or linear pushing.

4. A manipulator driving structure according to claim 3, characterized in that: The adjusting portion comprises an adjusting column, one end of which is connected to the mounting shell (5); the driving portion (432) comprises a driving bolt (4321); a thread is formed on the inner wall of the driving hole (4323); the driving bolt (4321) is threadedly connected to the driving hole (4323) and extends into the swing hole (421) to abut against the adjusting column.

5. A manipulator driving structure according to claim 4, characterized in that: The swing hole (421) is a bar-shaped hole, and the diameter of the adjustment column is smaller than the width of the swing hole (421) to form a swing gap (4211).

6. A manipulator driving structure according to claim 3, characterized in that: The swing base (42) further comprises an extension portion (422), the extension portion (422) being close to the anchor point (41), the extension portion (422) being provided with an arc-shaped hole (4221), the arc-shaped holes (4221) being distributed along an extension direction of an arbitrary circle of the anchor point (41), the curvature of the arc-shaped holes (4221) matching the swing trajectory of the swing base (42), a limiting column being slidably connected in the arc-shaped hole (4221), and one end of the limiting column being fixedly connected to the mounting shell (5).

7. A manipulator driving structure according to claim 6, characterized in that: The swing base (42) comprises a first area (423), a second area (424), a third area (425) and a fourth area (426); The tension adjustment component (4) further comprises a bearing portion (427), wherein the bearing portion (427) is arranged in the first area (423), the anchor point (41) is arranged in the second area (424), the adjustment portion is arranged in the third area (425), and the extension portion (422) is arranged in the fourth area (426).

8. A manipulator driving structure according to claim 7, characterized in that: The bearing portion (427) includes a first bearing installation area (4271) provided in the first area (423), a bearing body (4272) protruding downward along the edge of the first bearing installation area (4271) to form a hollow body, and a transfer body (4273) protruding downward along the bearing body (4272) to form an opening (4274) for the transmission belt (2) to pass through the bearing body (4272) toward the power output pulley (12), the transfer body (4273) is fixedly connected to the bearing body (4272), and the interior of the transfer body (4273) is hollow to form a second bearing installation area (4275).

9. A manipulator driving structure according to claim 2, characterized in that: The anchor point (41) comprises an anchoring shaft (411) and an axial hole (412); one end of the anchoring shaft (411) is fixedly connected to the mounting housing (5); the axial hole (412) is opened in the second area (424) along the height direction of the anchoring shaft (411); and the anchoring shaft (411) and the axial hole (412) are pivotally matched.

10. A manipulator driving structure according to claim 8, characterized in that: The secondary pulley (13) comprises a first pulley (131), a second pulley (132), a first shaft portion (133) and a second shaft portion (134); the first shaft portion (133) is located between the first pulley (131) and the second pulley (132) and is coaxially arranged; an installation space (136) for accommodating the adapter (4273) is formed around the inner periphery of the first shaft portion (133) and the first pulley (131); and the second shaft portion (134) is located at the top of the second pulley (132) and is coaxially arranged.

11. A manipulator driving structure according to claim 10, characterized in that: The secondary pulley (13) is further provided with a bearing portion (135), and the bearing portion (135) comprises: a first bearing mounted between the second shaft portion (134) and the first bearing mounting area (4271); A second bearing is installed between the first shaft portion (133) and the second bearing installation area (4275).

12. A wafer loading system, comprising a robot drive structure according to any one of claims 1 to 11, characterized in that: Also includes: An arm (7), the arm (7) being extendable along the R-axis direction; The robot drive structure is used to drive the arm (7) to rotate along the T-axis direction.

Images