Manipulator upper arm, circuit arrangement method and mechanical arm

Abstract

The invention discloses a mechanical arm upper arm, a circuit arrangement method and a mechanical arm, and the mechanical arm upper arm comprises a mounting shell, two ends of the mounting shell are respectively provided with a shoulder joint axis and an elbow joint axis, and a power input area and a power output area are respectively formed; the power input part and the power output part are coaxially butted with the power input area and the power output area respectively; the shoulder joint mandrel and the elbow joint mandrel are integrally formed with the mounting shell, the shoulder joint mandrel and the elbow joint mandrel are coaxially arranged along the shoulder joint axis and the elbow joint axis respectively, an axially-through mounting area is arranged in the shoulder joint mandrel, the shoulder joint mandrel and the mounting first containing area form a second containing area, and the elbow joint mandrel and the mounting shell form a second containing area; and the power transmission part forms a continuous transmission path along the power input area, the mounting area, the first accommodating area and the second accommodating area and is used for transmitting the torque of the power input part to the power output part. By adopting the scheme, the concentricity deviation of the upper arm of the manipulator is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer conveying equipment, and in particular to a robot upper arm, a line layout method and a robot arm. Background Art

[0002] In the field of semiconductor wafer manufacturing, the robot arm is the core actuator for wafer transportation, and its movement accuracy and stability directly affect the process yield and equipment reliability. A typical robot arm usually adopts a multi-joint serial structure, consisting of an upper arm, a forearm and an end effector, and realizes the precise transfer of wafers in a vacuum chamber through the coordinated movement of the shoulder, elbow and wrist axis system. Among them, the upper arm is the load-bearing component connecting the shoulder joint and the elbow joint, and its internal structure needs to integrate drive cables, gas circuits and sensor signal channels to support the power transmission and real-time feedback of each joint.

[0003] As semiconductor process nodes continue to shrink, the requirements for wafer positioning accuracy have been raised to the sub-micron level. In existing robotic arm designs, the spindle components and the load-bearing shell in the upper arm joint area mostly adopt a split assembly structure, such as mechanical connection through bolt fixing or interference fit. However, this type of split design is prone to microscopic gaps in the mating interface during long-term high-frequency reciprocating motion due to factors such as differences in material thermal expansion coefficients and residual assembly stress, resulting in cumulative deviations in the concentricity of the spindle and the shell. More importantly, the manufacturing tolerance of the split structure will be superimposed on the transmission link of the shoulder joint and the elbow joint, causing the trajectory deviation of the end effector to exceed the process window requirements, which is particularly significant under high-speed motion conditions.

[0004] Therefore, it is necessary to provide a robot upper arm, a circuit layout method and a robot arm to solve the above problems existing in the prior art. Summary of the invention

[0005] The object of the present invention is to provide a robot upper arm, a line layout method and a robot arm, so as to avoid the cumulative concentricity deviation caused by the separate design of the spindle part and the shell of the shoulder joint and the elbow joint on the basis of realizing power transmission.

[0006] To achieve the above object, the technical solution of the present invention is as follows: In a first aspect, a robot arm includes: The housing is installed, and the two ends are provided with a shoulder joint axis and an elbow joint axis, respectively, and a power input area and a power output area are formed around the shoulder joint axis and the elbow joint axis respectively; The power input part and the power output part are coaxially connected to the power input area and the power output area respectively; The shoulder joint spindle and the elbow joint spindle integrally formed with the installation shell are coaxially arranged along the shoulder joint axis and the elbow joint axis respectively, the shoulder joint spindle has an axially through installation area inside, the outer peripheral surface of the shoulder joint spindle and the inner wall of the installation shell form a first annular gap-shaped accommodation area, and the outer peripheral surface of the elbow joint spindle and the inner wall of the installation shell form a second annular gap-shaped accommodation area; A power transmission member forms a continuous transmission path along the power input area, the installation area, the first accommodating area and the second accommodating area, and is used to transmit the torque of the power input part to the power output part.

[0007] The beneficial effect of a manipulator upper arm provided by the present invention is that by integrally forming the shoulder joint spindle and the elbow joint spindle with the mounting shell, the microscopic gap of the mating interface caused by factors such as differences in material thermal expansion coefficients and residual assembly stress in the traditional split design is effectively avoided, thereby significantly reducing the cumulative deviation of the concentricity of the spindle and the shell, and improving the movement accuracy and stability of the manipulator upper arm. The power transmission component is located in the mounting shell, and can transmit the power of the power input part to the power output area through the power input area, the mounting area, the first accommodating area, and the second accommodating area in sequence, ensuring that the effective transmission of power can still be achieved after the spindle and the shell are integrally formed. At the same time, the power transmission path is made more direct, and the efficiency of power transmission is improved.

[0008] Furthermore, the power input area and the power output area are diagonally distributed along the height direction of the mounting shell, the shoulder joint axis is a cantilever extension structure, including a first root and a first extension, the first root is integrally formed with the mounting shell, and the first extension runs coaxially through the first accommodating area from the first root along the shoulder joint axis, and the elbow joint axis is an inverted cantilever structure, including a second root and a second extension, the second root is integrally formed with the mounting shell, and the second extension runs coaxially through the second accommodating area from the first root along the elbow joint axis.

[0009] Furthermore, the power transmission component includes a first pulley coaxially arranged in the first accommodating area, a transmission belt wrapped around the inner wall of the mounting shell, and a second pulley coaxially arranged in the second accommodating area, the first pulley and the second pulley are respectively rotatably mounted on the shoulder joint spindle and the elbow joint spindle, and the transmission belt is wound between the first pulley and the second pulley to form a closed-loop power transmission path.

[0010] Furthermore, the power transmission component also includes an arm spindle and a torque transmission component. The arm spindle is located in the installation area and is fixedly connected to the output end of the power input part. The torque transmission component is used to transmit the power of the arm spindle to the shoulder joint spindle.

[0011] Furthermore, the mounting shell is provided with a transition zone between the shoulder joint axis and the elbow joint axis, and the transition zone is respectively connected to the first accommodating zone and the second accommodating zone.

[0012] Furthermore, a radial notch is provided at one end of the shoulder joint spindle away from the power input portion, and the notch is used to connect the installation area and the transition area.

[0013] Furthermore, a wire groove area is provided on the side of the elbow joint spindle away from the power output area, and the mounting shell is also provided with a sinking area, which is located between the wire groove area and the transition area, connecting the transition area and the wire groove area.

[0014] Furthermore, a pipeline support is installed in the transition area, and two ends of the pipeline support are respectively located at the notch and the sinking area.

[0015] Furthermore, a pulley base is fixedly connected to the bottom of the first pulley, the pulley base is fixedly arranged relative to the power input part, and a base is fixedly connected to the bottom of the pulley base.

[0016] Furthermore, the power output part includes a power output seat, a flange and a bearing, the second pulley is fixedly connected to the flange, the flange is fixedly connected to the power output seat, the flange is rotatably connected to the mounting shell through the bearing, and the surfaces of the flange and the power output seat facing each other are respectively provided with annular grooves for fastening the inner ring of the bearing.

[0017] In a second aspect, a robotic arm includes the above-mentioned robotic upper arm, and further includes: a forearm pivoted on the elbow joint axis, and an end effector pivotally connected to the forearm.

[0018] In a third aspect, a method for arranging circuits on an upper arm of a robot comprises the following steps: The power input area and the power output area have hollow channels, and pipelines are provided, and pipelines including power supply cables and / or pneumatic pipelines are passed through the hollow channels of the power input area; A notch is provided at one end of the shoulder joint spindle away from the power input area, and the pipeline is led out from the hollow channel to the notch; A pipeline bracket is provided, a wire groove area is provided on the side of the elbow joint spindle away from the power output area, and a sinking area is provided on the mounting shell, and the sinking area is located between the wire groove area and the transition area, and the pipeline is led out from the notch and passes through the pipeline bracket into the sinking area; It is led out from the sinking area through the hollow channels of the wire trough area and the power output area in sequence.

[0019] The beneficial effect of an upper arm circuit layout method provided by the present invention is that the circuit and pipeline channels formed by the circuit layout method avoid interference with the installation shell, extend the service life of the circuit and pipeline, and avoid wear during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the overall structure of an upper arm of a manipulator according to an embodiment of the present invention; Figure 2 This is a structural cross-sectional view of an installation housing according to an embodiment of the present invention; Figure 3 A cross-sectional view of an upper arm of a robot according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the overall structure of the housing installed in an embodiment of the present invention; Figure 5 A bottom view of the housing installed in an embodiment of the present invention; Figure 6 An axonometric view of an installation housing of an embodiment of the present invention; Figure 7 A top view of the housing installed in accordance with an embodiment of the present invention; Figure 8 A side view of the upper arm of the manipulator according to an embodiment of the present invention; Fig. 9 The figure is a schematic diagram of the overall structure of a robotic arm according to an embodiment of the present invention.

[0021] 1. Mounting shell; 11. Shoulder joint axis; 12. Elbow joint axis; 13. Power input area; 14. Power output area; 15. Mounting area; 16. First accommodating area; 17. Second accommodating area; 18. Transition area; 181. Pipeline support; 182. Window; 19. Sinking area; 191. Wire trough area; 192. Upper cover; 193. Lower cover; 2. Power input part; 21. Pulley base; 3. Power output part; 31. Power output seat; 32. Flange; 4. Shoulder joint spindle; 41. Notch; 5. Elbow joint spindle; 51. Wire guard; 6. Power transmission member; 61. First pulley; 62. Second pulley; 63. Drive belt; 64. Arm spindle; 65. Torque transmission member; 7. Base; 8. Forearm; 9. End effector. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0023] The following is combined with Figure 1 - Attachment Fig. 9 , the specific implementation modes of the present invention are further described in detail.

[0024] Reference Figure 1-Figure 3 In the first aspect, a manipulator upper arm includes a mounting shell 1, a power input part 2, a power output part 3 and a power transmission part 6.

[0025] Reference Figure 2 In some embodiments, the mounting housing 1 has a shoulder joint axis 11 and an elbow joint axis 12 located at the left and right ends and parallel to each other, and has a power input area 13 and a power output area 14 around the shoulder joint axis 11 and the elbow joint axis 12, respectively. The power input area 13 and the power output area 14 are respectively installed with a power input part 2 and a power output part 3, and the power input part 2 and the power output part 3 are used for input and output of kinetic energy, respectively. In some specific embodiments, the first direction and the second direction are perpendicular to each other, the power input area 13 is located at the bottom end of the left side of the mounting housing 1 and is opened along the first direction, and the power output area 14 is located at the top end of the right side of the mounting housing 1 and is opened along the first direction. In some specific embodiments, the upper and lower parts of the mounting housing 1 are open, and the mounting housing 1 also includes an upper cover plate 192 and a lower cover plate 193, and the upper cover plate 192 and the lower cover plate 193 are used to close the open part of the mounting housing 1. The mounting housing 1 is provided with a transition area 18 between the shoulder joint axis 11 and the elbow joint axis 12.

[0026] In some embodiments, the shoulder joint spindle 4 and the elbow joint spindle 5 are respectively located on the shoulder joint axis 11 and the elbow joint axis 12, and form an integral structure with the mounting shell 1. Specifically, the shoulder joint spindle 4 and the elbow joint spindle 5 are respectively integrally formed with the mounting shell 1, which effectively avoids the microscopic gap of the mating interface caused by factors such as differences in material thermal expansion coefficients and residual assembly stress in the traditional split design. In this way, the cumulative deviation of the concentricity of the spindle and the shell can be significantly reduced, thereby improving the movement accuracy and stability of the upper arm of the manipulator, ensuring that the manipulator can maintain high positioning accuracy and reliability during long-term high-frequency reciprocating motion, and meeting the requirements for high-precision transmission in the field of semiconductor wafer manufacturing.

[0027] Reference Figure 3 and Figure 4 In some embodiments, the shoulder joint spindle 4 has an installation area 15 inside for installing a power transmission component to achieve power transmission. The outer circumference of the shoulder joint spindle 4 and the inner wall of the mounting shell 1 form a first accommodating area 16 in the shape of an annular gap, and the outer circumference of the elbow joint spindle 5 and the inner wall of the mounting shell 1 form a second accommodating area 17 in the shape of an annular gap; the power input area 13 and the power output area 14 are diagonally distributed along the height direction of the mounting shell 1, the shoulder joint spindle 4 is a cantilever extension structure, including a first root and a first extension, the first root is integrally formed in the mounting shell 1, and the first extension runs through the first accommodating area 16 coaxially from the first root along the shoulder joint axis 11, the elbow joint spindle 5 is an inverted cantilever structure, including a second root and a second extension, the second root is integrally formed in the mounting shell 1, and the second extension runs through the second accommodating area 17 coaxially from the first root along the elbow joint axis 12, and the first accommodating area 16 and the second accommodating area 17 are used to leave installation space. In addition, a transition zone 18 is provided in the mounting shell 1 between the shoulder joint axis 11 and the elbow joint axis 12, and the transition zone 18 is respectively connected to the first accommodating area 16 and the second accommodating area 17, so that the power transmission component 6 can smoothly transmit the power of the power input part 2 in the mounting shell 1 through the power input area 13, the mounting area 15, the first accommodating area 16, and the second accommodating area 17 to the power output area 14, thereby realizing efficient and stable power transmission and ensuring the power transmission and action execution stability of the robot arm during operation.

[0028] Reference Figure 4-Figure 8 In some specific embodiments, the shoulder joint spindle 4 extends from the inner bottom wall of the mounting housing 1 to the power input area 13 along the second direction, and the elbow joint spindle 5 extends from the inner bottom wall of the mounting housing 1 to the power output area 14 along the second direction. Specifically, the left top of the mounting housing 1 protrudes from top to bottom along the second direction to form a ring-shaped shoulder joint spindle 4. The right bottom of the mounting housing 1 protrudes from bottom to top along the second direction to form a ring-shaped elbow joint spindle 5.

[0029] In some specific embodiments, the shoulder joint spindle 4 extends from the inner bottom wall of the mounting shell 1 to the power input area 13 along the second direction, and the elbow joint spindle 5 extends from the inner bottom wall of the mounting shell 1 to the power output area 14 along the second direction. Specifically, the top left side of the mounting shell 1 protrudes from top to bottom along the second direction to form a ring-shaped shoulder joint spindle 4. This design allows the shoulder joint spindle 4 and the mounting shell 1 to form an integral structure, thereby increasing the concentricity. Similarly, the bottom right side of the mounting shell 1 protrudes from bottom to top along the second direction to form a ring-shaped elbow joint spindle 5. The above layout not only optimizes space utilization and avoids redundant space settings for split installation, but also reduces tolerances, improves the concentricity of the spindle and the shell, and thereby improves the transmission accuracy of the arm, meeting the requirements for high-precision transmission in the field of semiconductor wafer manufacturing.

[0030] In some embodiments, the power transmission member 6 is located in the mounting housing 1, and the power transmission member 6 includes an arm spindle 64 and a torque transmission member 65. The arm spindle 64 is located in the mounting area 15 and is fixedly connected to the output end of the power input part 2. The torque transmission member 65 is used to transmit the power of the arm spindle 64 to the shoulder joint spindle 4. The arm spindle 64 is hollow inside along the axial direction, and the hollow part is used for the passage of power supply and air supply pipelines. This design not only realizes the effective transmission of power, but also cleverly utilizes space, and integrates the power supply and air supply pipelines inside the arm spindle 64, avoiding interference from external pipelines and improving the neatness of the robot arm.

[0031] Reference Figure 3 In some specific embodiments, the torque transmission member 65 adopts a keyless bushing, which is located between the shoulder joint spindle 4 and the arm spindle 64 and includes an outer sleeve and an inner sleeve. The outer sleeve of the keyless bushing is tightly matched with the inner wall of the shoulder joint spindle 4, while the inner sleeve is tightly matched with the arm spindle 64. The tight fit can be achieved by controlling tolerances, using thermal expansion and contraction, etc., which are not limited here. During the assembly process, the keyless bushing uses bolts or other fastening devices to fasten the outer sleeve and the inner sleeve together to transmit torque and rotational force.

[0032] Reference Figure 3In some embodiments, the power transmission member 6 further includes a first pulley 61, a transmission belt 63 and a second pulley 62. The first pulley 61 is located in the first accommodating area 16 and is rotatably sleeved on the shoulder joint spindle 4. The second pulley 62 is located in the second accommodating area 17 and is rotatably sleeved on the elbow joint spindle 5. The transmission belt 63 is connected between the first pulley 61 and the second pulley 62. A window 182 is provided between the second accommodating area 17 and the transition area 18 to connect the two. The window 182 can allow the transmission belt 63 to pass through. The design of the window 182 not only ensures the smoothness of power transmission, but also optimizes the spatial layout, so that the transmission belt 63 can efficiently complete the power transmission task in a limited space.

[0033] In some specific embodiments, the power input part 2 includes a power input shaft, which is fixedly connected to the arm shaft, a bearing is provided between the power input shaft and the mounting housing 1, and a pulley base 21 is also fixedly connected to the bottom of the first pulley 61, and the pulley base 21 is fixed relative to the power source of the power input part 2. The base 7 is fixedly connected to the bottom of the pulley base 21. A bearing is also provided between the pulley and the mounting housing 1.

[0034] In some specific embodiments, the power output part 3 includes a power output seat 31, a flange 32 and a bearing, the second pulley 62 is fixedly connected to the flange 32, the flange 32 is fixedly connected to the power output seat 31, and the flange 32 is rotatably connected to the mounting housing 1 through a bearing. The surfaces of the flange 32 and the power output seat 31 facing each other are respectively provided with an annular groove for fastening the inner ring of the bearing.

[0035] Reference Figure 2-Figure 4, the specific working principle: when working, the power input part 2 drives the arm spindle 64 to rotate, and the arm spindle 64 transmits the power to the shoulder joint spindle 4 through the torque transmission part 65: the shoulder joint spindle 4 drives the installation shell 1 to rotate in the horizontal direction with the shoulder joint spindle 4 as the axis. The shell serves as the bearing body, and its rotation will inevitably synchronously drive the second pulley 62 thereon to produce circumferential displacement. The first pulley 61 is fixed to the base 7 through the pulley base 21 to form a stationary reference system. The second pulley 62 rotates with the shell to form a dynamic reference system. The rotation of the shell causes the second pulley 62 to produce circumferential displacement relative to the first pulley 61. When the shell rotates, the center of the second pulley 62 revolves around the shoulder axis, while the first pulley 61 remains stationary, and a dynamic phase difference is formed between the two pulleys. The synchronous belt is tensioned between the two pulleys by the preload force to form a closed-loop transmission path: when the second pulley 62 produces circumferential displacement with the rotation of the shell, the meshing contact point of the synchronous belt 63 migrates, and the fixed position of the first pulley 61 causes the synchronous belt 63 Being stretched on the inlet side, the displacement of the second pulley 62 causes the synchronous belt 63 to be compressed on the outlet side: the elastic deformation of the synchronous belt converts the circumferential displacement into the misalignment of the meshing tooth surface, forcing the second pulley 62 to produce adaptive rotation around its own axis to maintain the tension balance of the synchronous belt. The adaptive rotation of the second pulley 62 drives the power output seat of the elbow through the flange 32, driving the forearm to rotate around the axis of the elbow.

[0036] In some embodiments, a notch 41 is formed at one end of the shoulder joint spindle 4 away from the power input portion 2 , and the notch 41 is used to connect the installation area 15 and the transition area 18 .

[0037] In some embodiments, a wire trough area 191 is provided on the side of the elbow joint spindle 5 away from the power output area 14, which is used to accommodate and fix the pipelines for power supply, air supply or signal transmission, ensuring that the pipelines remain stable and are not interfered with by the outside world during the movement of the robotic arm. The mounting shell 1 also has a sinking area 19, and the cross-section of the sinking area 19 is L-shaped. The sinking area 19 is located between the wire trough area 191 and the transition area 18. The sinking area 19 can not only allow pipelines for power supply, air supply or signal transmission to pass through, but also provide a pipeline accommodating space to prevent excessively long pipelines from interfering with the rotation of the arm. The sinking area 19 is respectively interconnected with the transition area 18 and the wire trough area 191 to form a smooth pipeline flow path.

[0038] In some embodiments, a pipeline support 181 is installed in the transition area 18, and the two ends of the pipeline support 181 are respectively located at the notch 41 and the sinking area 19, and the pipeline support 181 provides stable support for the pipeline. A wire protection sleeve 51 is coaxially arranged inside the elbow joint spindle 5 to further protect the internal pipeline from mechanical wear or external environment, thereby extending the service life of the pipeline and improving the overall reliability of the robot arm.

[0039] Second, refer to Fig. 9 A robotic arm includes the above-mentioned robotic upper arm, and also includes a forearm 8 pivoted on the elbow joint axis 12, and an end effector 9 pivotally connected to the forearm 8. The base 7 serves as the supporting and fixing part of the robotic arm, providing a stable installation foundation for the entire robotic arm. The forearm 8 is pivotally connected to the robotic upper arm through the elbow joint axis 12. The end effector 9 is pivotally connected to the forearm 8, and can perform grasping, operation or other specific actions according to different application scenarios and task requirements. This structural design enables the robotic arm to achieve high-precision and high-efficiency material transfer and operation tasks in fields such as semiconductor wafer manufacturing.

[0040] In a third aspect, a method for arranging circuits on an upper arm of a robot comprises the following steps: Provide pipelines, including power supply cables and pneumatic pipelines, for transmitting electricity and gas to provide necessary power sources for various components of the robotic arm.

[0041] A hollow channel is formed inside the power input area 13 and the power output area 14, and the pipeline is led out from the hollow part of the power input area 13 to the notch 41 of the power input mandrel. In this way, the pipeline can smoothly enter the power input mandrel from the power input area 13 to ensure stable transmission of power.

[0042] The pipeline is led out from the notch 41 and enters the sinking area 19 through the pipeline support 181. The pipeline support 181 provides stable support and guidance for the pipeline, ensuring the neat arrangement and safe transmission of the pipeline inside the robot arm.

[0043] The pipeline is led out from the sinking area 19 through the wire trough area 191 and the hollow part of the power output area 14. The wire trough area 191 provides a special channel for the pipeline, avoiding interference between the pipeline and other parts of the robot arm, ensuring smooth transmission of the pipeline and the overall stability of the robot arm.

[0044] The circuit and pipeline channels formed by the line arrangement method avoid interference with the installation housing 1, thereby extending the service life of the circuit and pipeline and avoiding wear during use.

[0045] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A robot upper arm, characterized in that: include: A housing (1) is installed, with a shoulder joint axis (11) and an elbow joint axis (12) at both ends, respectively, and a power input area (13) and a power output area (14) are formed around the shoulder joint axis (11) and the elbow joint axis (12); The power input part (2) and the power output part (3) are coaxially connected to the power input area (13) and the power output area (14), respectively; The shoulder joint spindle (4) and the elbow joint spindle (5) are integrally formed with the mounting shell (1), and are coaxially arranged along the shoulder joint axis (11) and the elbow joint axis (12), respectively; the shoulder joint spindle (4) has an axially penetrating mounting area (15) inside; the outer peripheral surface of the shoulder joint spindle (4) and the inner wall of the mounting shell (1) form a first accommodating area (16) in the form of an annular gap; and the outer peripheral surface of the elbow joint spindle (5) and the inner wall of the mounting shell (1) form a second accommodating area (17) in the form of an annular gap; A power transmission member (6) forms a continuous transmission path along the power input area (13), the installation area (15), the first accommodating area (16) and the second accommodating area (17), and is used to transmit the torque of the power input part (2) to the power output part (3).

2. The upper arm of a manipulator according to claim 1, characterized in that: The power input area (13) and the power output area (14) are diagonally distributed along the height direction of the mounting shell (1); the shoulder joint spindle (4) is a cantilever extension structure, comprising a first root portion and a first extension portion, the first root portion being integrally formed with the mounting shell (1), and the first extension portion coaxially passes through the first accommodating area (16) from the first root along the shoulder joint axis (11); the elbow joint spindle (5) is an inverted cantilever structure, comprising a second root portion and a second extension portion, the second root portion being integrally formed with the mounting shell (1), and the second extension portion coaxially passes through the second accommodating area (17) from the first root along the elbow joint axis (12).

3. The upper arm of a manipulator according to claim 1, characterized in that: The power transmission member (6) comprises a first pulley (61) coaxially arranged in the first accommodating area (16), a transmission belt (63) wrapped around the inner wall of the mounting shell (1), and a second pulley (62) coaxially arranged in the second accommodating area (17), the first pulley (61) and the second pulley (62) being rotatably mounted on the shoulder joint spindle (4) and the elbow joint spindle (5), respectively, and the transmission belt (63) is wound between the first pulley (61) and the second pulley (62) to form a closed-loop power transmission path.

4. The robot upper arm according to claim 1, characterized in that: The power transmission component (6) further comprises an arm spindle (64) and a torque transmission component (65); the arm spindle (64) is located in the installation area (15) and is fixedly connected to the output end of the power input part (2); and the torque transmission component (65) is used to transmit the power of the arm spindle (64) to the shoulder joint spindle (4).

5. The upper arm of a manipulator according to claim 1, characterized in that: The mounting housing (1) is provided with a transition area (18) between the shoulder joint axis (11) and the elbow joint axis (12), and the transition area (18) is respectively connected to the first accommodating area (16) and the second accommodating area (17).

6. The robot upper arm according to claim 5, characterized in that: A radial notch (41) is provided at one end of the shoulder joint spindle (4) away from the power input portion (2), and the notch (41) is used to connect the installation area (15) and the transition area (18).

7. The robot upper arm according to claim 6, characterized in that: A wire groove area (191) is provided on a side of the elbow joint spindle (5) facing away from the power output area (14), and the mounting housing (1) is further provided with a sinking area (19), wherein the sinking area (19) is located between the wire groove area (191) and the transition area (18), and connects the transition area (18) and the wire groove area (191).

8. The upper arm of the manipulator according to claim 7, characterized in that: A pipeline support (181) is installed in the transition zone (18), and two ends of the pipeline support (181) are respectively located at the notch (41) and the sinking zone (19).

9. The robot upper arm according to claim 3, characterized in that: The bottom of the first pulley (61) is fixedly connected to a pulley base (21), the pulley base (21) is fixedly arranged relative to the power input part (2), and the bottom of the pulley base (21) is fixedly connected to a base body (7).

10. The robot upper arm according to claim 3, characterized in that: The power output part (3) comprises a power output seat (31), a flange (32) and a bearing, the second pulley (62) is fixedly connected to the flange (32), the flange (32) is fixedly connected to the power output seat (31), the flange (32) is rotatably connected to the mounting housing (1) via the bearing, and the surfaces of the flange (32) and the power output seat (31) facing each other are respectively provided with an annular groove for fastening the inner ring of the bearing.

11. A robotic arm, comprising the robotic arm upper arm according to any one of claims 1 to 10, characterized in that: Also includes: A forearm (8) pivoted on the elbow joint axis (12), and an end effector (9) pivotally connected to the forearm (8).

12. A method for arranging wiring for an upper arm of a robot, used for wiring a upper arm of a robot as claimed in any one of claims 1 to 10, characterized in that: The following steps are involved: The power input area (13) and the power output area (14) have hollow channels, and pipelines are provided, and pipelines including power supply cables and / or pneumatic pipelines are passed through the hollow pipelines of the power input area (13); A notch (41) is formed at one end of the shoulder joint spindle (4) away from the power input area (13), and the pipeline is led out from the hollow channel to the notch (41); A pipeline support (181) is provided, a wire groove area (191) is provided on a side of the elbow joint spindle (5) away from the power output area (14), the installation housing (1) is further provided with a sinking area (19), the installation housing (1) is provided with a transition area (18) between the shoulder joint axis (11) and the elbow joint axis (12), the sinking area (19) is located between the wire groove area (191) and the transition area (18), and the pipeline is led out from the notch (41) and enters the sinking area (19) through the pipeline support (181); The wire is led out from the sinking area (19) through the hollow passages of the wire trough area (191) and the power output area (14) in sequence.

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