A high-entropy heat quantization ceramic composite sintering carrier and a preparation method thereof

Abstract

This invention provides a high-entropy thermal quantization ceramic composite sintering support and its preparation method, comprising the following components by weight percentage: Al2O3 nanocrystals: 35%–45%; Si3N4 nanocrystals: 20%–30%; Yb2O3-doped Y2O3 nanocrystals: 10%–20%; Y2Si2O7-doped Y3Al5O3... 12 Nanocrystals: 15%–25%; MgO nanocrystals: 2%–6%; By optimizing the composition and preparation process, technical problems such as poor heat uniformity, poor density, and decreased resistance to deformation and cracking during high-temperature sintering are solved, thereby improving the performance and stability of high-entropy heat-ionized ceramic composite sintering carriers.

Description

Technical Field

[0001] This invention relates to the field of ceramic sintering support technology, specifically to a high-entropy thermal quantization ceramic composite sintering support and its preparation method. Background Technology

[0002] In advanced materials science, particularly in the research and application of ceramic materials, the concept of high-entropy materials is gradually demonstrating its enormous potential. High-entropy materials, with their multi-component and highly disordered characteristics, typically exhibit superior performance compared to traditional single-component or binary materials, such as higher hardness, better thermal stability, and superior wear and corrosion resistance. These properties make high-entropy materials suitable for a wider range of applications in extreme environments, such as high temperature, high pressure, and strong radiation.

[0003] Ceramic materials, especially those used in precision manufacturing and high-temperature environments, such as cleavers in semiconductor packaging, require extremely high hardness, toughness, and wear resistance. While traditional ceramic materials can meet these requirements to some extent, their performance is often limited under more extreme operating conditions. Therefore, developing novel high-performance ceramic materials has become an important direction in current materials science research.

[0004] In recent years, research on high-entropy ceramics has gradually emerged. By introducing the concept of high entropy into the design of ceramic materials, researchers have successfully prepared a series of high-entropy ceramics with excellent properties. These high-entropy ceramics typically contain multiple main elements, and through precise composition control and optimization of the preparation process, significant improvements in material properties can be achieved.

[0005] Despite the numerous advantages of high-entropy ceramics, their preparation process, especially the high-temperature sintering stage (typically ≥1800℃), faces a series of severe technical challenges:

[0006] 1. Poor heat uniformity: Due to their complex composition, high-entropy ceramics exhibit significant differences in thermal conductivity between different elements, making it difficult to achieve a uniform heat distribution during sintering. This not only affects the uniformity of the material's microstructure but may also lead to localized overheating or uneven cooling, thereby impacting the overall performance of the material.

[0007] 2. Poor Density: During high-temperature sintering, the presence of pores and defects, as well as the unevenness of grain growth, make it difficult for high-entropy ceramics to achieve the desired degree of densification. This not only reduces the mechanical properties of the material, such as strength and hardness, but may also affect its thermal and chemical stability.

[0008] 3. Decreased resistance to deformation and cracking: Due to the thermal and residual stresses generated during sintering, as well as the inhomogeneity of the internal microstructure of the material, high-entropy ceramics are prone to deformation or even cracking when subjected to external forces or temperature changes. This not only affects the reliability and stability of the material, but also limits its application in extreme environments.

[0009] The above background information is provided only to assist in understanding the inventive concept and technical solution of this invention. It does not necessarily belong to the prior art of this patent application, nor does it necessarily provide technical teaching. In the absence of clear evidence that the above information was disclosed before the filing date of this patent application, the above background information should not be used to evaluate the novelty and inventiveness of this application. Summary of the Invention

[0010] To address the technical problems of poor heat uniformity, poor density, and decreased resistance to deformation and cracking in traditional sintering carriers, this invention proposes a high-entropy heat-ionized ceramic composite sintering carrier and its preparation method. By optimizing the composition and preparation process, the invention solves the technical problems of poor heat uniformity, poor density, and decreased resistance to deformation and cracking that occur during high-temperature sintering, thereby improving the performance and stability of the high-entropy heat-ionized ceramic composite sintering carrier.

[0011] To achieve the above objectives, the technical solution of the present invention is as follows:

[0012] On one hand, the present invention provides a high-entropy thermal ionization ceramic composite sintering support, comprising the following components by weight percentage:

[0013] Al2O3 nanocrystals: 35%–45%;

[0014] Si3N4 nanocrystals: 20%–30%;

[0015] Yb₂O₃-doped Y₂O₃ nanocrystals: 10%–20%;

[0016] Y₂Si₂O₇ doped with Y₃Al₅O 12 Nanocrystals: 15%–25%;

[0017] MgO nanocrystals: 2%–6%.

[0018] This invention proposes a high-entropy thermal quantization ceramic composite sintering carrier and its preparation method. By optimizing the composition and preparation process, it solves the technical problems such as poor heat homogenization, poor density, and decreased resistance to deformation and cracking during high-temperature sintering, thereby improving the performance and stability of the high-entropy thermal quantization ceramic composite sintering carrier.

[0019] As a preferred technical solution, the doping amount of Yb2O3 in the Yb2O3-doped Y2O3 nanocrystals is 0.1% to 20%.

[0020] As a preferred technical solution, Y3Al5O is doped into the Y2Si2O7. 12 The doping amount of Y2Si2O7 in the nanocrystals is 10% to 50%.

[0021] As a preferred technical solution, the Al2O3 nanocrystals, the Si3N4 nanocrystals, the Yb2O3-doped Y2O3 nanocrystals, and the Y2Si2O7-doped Y3Al5O3 nanocrystals are all mentioned. 12 The particle size of both the Al2O3 nanocrystals and the MgO nanocrystals is 5–20 nm; the Al2O3 nanocrystals, the Si3N4 nanocrystals, the Yb2O3-doped Y2O3 nanocrystals, and the Y2Si2O7-doped Y3Al5O7 nanocrystals are all 5–20 nm. 12 The specific surface area of ​​both the nanocrystals and the MgO nanocrystals is >50m². 2 / g.

[0022] On the other hand, the present invention provides a method for preparing a high-entropy thermal ionization ceramic composite sintering support, which, in order to obtain the high-entropy thermal ionization ceramic composite sintering support as described in any of the preceding claims, includes the following steps:

[0023] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals were ball-milled and mixed to obtain a uniformly mixed slurry;

[0024] S2 involves freezing and vacuum in-situ solidification of a uniformly mixed slurry to obtain a porous ceramic pre-reservoir.

[0025] S3 sequentially subjected the porous ceramic pre-reservoir to supercritical drying and pre-sintering to obtain the initial porous ceramic green body;

[0026] S4 involves hot isostatic pressing of the initial porous ceramic blank to obtain a dense sintered carrier blank.

[0027] S5 sequentially performs quantum control and high-entropy infiltration on the dense sintered carrier blank to obtain a high-entropy thermally quantized ceramic composite sintered carrier.

[0028] As a preferred technical solution, in step S1, Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O7 nanocrystals are weighed according to weight percentage. 12The nanocrystals and MgO nanocrystals are ball-milled and mixed, specifically including the following steps:

[0029] S101 is weighed according to the following weight percentages: 35%–45% Al2O3 nanocrystals, 20%–30% Si3N4 nanocrystals, 10%–20% Yb2O3-doped Y2O3 nanocrystals, and 15%–25% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12 Nanocrystalline particles and 2% to 6% MgO nanocrystalline particles are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0030] S102 was ball-milled for 5 to 7 hours at a ball milling speed of 750 to 850 rpm under vacuum argon protection.

[0031] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 1.5 to 2.5 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1.

[0032] As a preferred technical solution, step S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry, specifically including the following steps:

[0033] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at a temperature of -190 to -170°C to obtain the frozen slurry;

[0034] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -70 to -50°C for 23 to 24 hours to obtain a porous ceramic pre-reserved body.

[0035] As a preferred technical solution, step S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering, specifically including the following steps:

[0036] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0037] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 750℃~850℃ for 1.5~2.5 hours to obtain the initial porous ceramic green body.

[0038] As a preferred technical solution, step S4 involves hot isostatic pressing (HIP) sintering of the initial porous ceramic green body, specifically including the following steps:

[0039] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3The material is heated to 1500–1700℃, subjected to a uniaxial pressure of 90–110 MPa, and held for 3.5–4.5 hours to obtain a dense sintered carrier blank.

[0040] As a preferred technical solution, step S5 involves sequentially performing quantum control and high-entropy infiltration on the dense sintered support blank, specifically including the following steps:

[0041] S501 Quantum Control: Transforming a densely sintered support blank into a vacuum of 10... -3 Under Pa conditions, the quantum-controlled thermal oscillator is held at 850–950°C for 1.5–2.5 hours and then cooled to 200°C to obtain a quantum-controlled sintered support.

[0042] S502 High Entropy Infiltration: MgO nanoparticles are infiltrated into a quantum-controlled sintering support at a temperature of 1800℃~2000℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0043] The present invention provides a high-entropy thermal quantization ceramic composite sintering support and its preparation method, which has the following beneficial effects:

[0044] 1) By optimizing the composition and preparation process, solve the technical problems such as poor heat uniformity, poor density, and decreased resistance to deformation and cracking during high-temperature sintering, and improve the performance and stability of high-entropy heat-integrated ceramic composite sintering carriers;

[0045] 2) At high-temperature sintering temperatures ≥1800℃, the reaction between Al2O3 and Si3N4 generates a liquid phase. The presence of this liquid phase promotes the dissolution and precipitation of Si3N4, thereby accelerating the sintering process. The liquid phase also fills the voids between grains, improving the density and strength of the composite ceramic. During sintering, sintering aids (such as MgO, Y2O3, etc.) react with Al2O3 and Si3N4 to generate an intergranular glass phase. This intergranular glass phase softens and fills the voids between grains at high temperatures, further improving the density of the composite ceramic. Simultaneously, the intergranular glass phase also acts as a lubricant, promoting grain rearrangement and densification. At high temperatures, Si3N4 may undergo solid solution reactions and crystal transformations, generating SiAl. New crystal phases such as ON can be introduced; these new crystal phases may have higher hardness and strength, thereby improving the performance of ceramic composite sintering supports. Solid solution reactions and crystal transformations can also promote grain growth and densification, further enhancing the network structure of ceramic composite sintering supports. When the weight percentage of Al2O3 nanocrystals in the composition is too low, Al2O3, as a network formant, cannot form a complete network structure due to insufficient content. This leads to insufficient bonding with Si3N4 particles, resulting in more voids and defects. The incomplete network structure reduces the high-temperature stability of ceramic composite sintering supports. At high temperatures, due to the lack of sufficient Al2O3 to stabilize the structure, ceramic composite sintering supports may soften, deform, or even crack, and may fail to form a sufficient composite ceramic network structure with Si3N4, resulting in insufficient structural stability at high temperatures. When the weight percentage of Al2O3 nanocrystals in the composition is too high, the excessive Al2O3 content may occupy too much space, making it difficult to form sandwich clusters between Si3N4 particles. The formation of sandwich clusters helps the transfer and dispersion of heat in the ceramic composite sintering support. When the formation of sandwich clusters is hindered, the heat quantization effect will be weakened, resulting in a decrease in the thermal conductivity of the ceramic composite sintering support. Therefore, the content of Al2O3 nanocrystals in the ceramic composite sintering support in this application needs to be controlled within an appropriate range (e.g., 35% to 45%) to ensure that a sufficient composite ceramic network structure is formed with Si3N4, thereby preventing structural instability at high temperatures and improving the thermal conductivity of the ceramic composite sintering support.

[0046] This application incorporates Yb₂O₃-doped Y₂O₃ nanocrystals. Rare earth elements in rare earth oxides possess a unique 4f electron shell structure, and these electrons exhibit rich spectral properties during energy level transitions. In the Yb₂O₃-doped Y₂O₃ nanocrystals, Yb… 3+The 4f electrons of ions may interact with the 4f electrons of other rare earth elements or other electrons in the lattice, thereby enhancing the coupling between quantum states. The enhanced quantum state coupling helps electrons to transition more efficiently between energy levels, which may promote the transfer of heat in smaller units (i.e., closer to the quantum form), promote the heat quantization process, and heat quantization helps heat to be distributed more uniformly inside the material, thereby improving heat homogeneity.

[0047] The weight percentage of Yb₂O₃-doped Y₂O₃ nanocrystals in the composition of this application is preferably 10% to 20%. Appropriate Yb₂O₃ doping can refine the grain size of Y₂O₃; smaller grains can be more tightly packed together, reducing inter-grain voids and thus improving the material's density. As a dopant, Yb₂O₃ can fill the tiny pores and defects in the Y₂O₃ matrix; this filling effect helps reduce the material's porosity, further improving its density. Preferably, the weight percentage of Yb₂O₃-doped Y₂O₃ nanocrystals is 10% to 20%, which reduces the overall density of the material, thereby improving its resistance to deformation and cracking.

[0048] Y₂Si₂O₇ doped with Y₃Al₅O 12 Nanocrystals: 15%–25%, Y2Si2O7 doping can be achieved in Y3Al5O 12 Nanocrystals are formed at the grain boundaries, which can optimize the grain boundary structure and reduce defects and scattering centers at the grain boundaries. The optimized grain boundary structure helps heat transfer between grains more efficiently, reducing heat loss and scattering at the grain boundaries, thereby improving the overall heat transfer rate. Y2Si i2O7 doped with Y3Al5O 12 The weight percentage of the nanocrystals is preferably 15% to 25%. Appropriate Y2Si2O7 doping can form continuous heat conduction paths, which can more effectively transfer heat from one part of the material to another. This continuous heat conduction path helps to reduce the diffusion resistance of heat inside the material, further improving the heat conduction efficiency of the material. It also helps to achieve a more uniform heat distribution, thereby improving heat homogeneity.

[0049] Y2Si2O7 doping can fill Y3Al5O 12 The voids and pores in the material reduce its porosity; the filling effect helps to improve the material's density, making it more compact and robust; Y2Si2O7 doped with Y3Al5O 12 The preferred weight percentage of the nanocrystals is 15%–25%, and appropriate Y2Si2O7 doping can suppress Y3Al5O 12 Excessive grain growth makes the grain size more uniform and fine; uniform grain size helps to further improve the density of the material.

[0050] Y2Si2O7 doping enhances Y3Al5O 12 Strength at grain boundaries; reinforced grain boundaries can more effectively resist external stress and deformation, thereby improving the material's resistance to deformation.

[0051] The introduction of magnesium oxide nanocrystals enhances the high-temperature atomic diffusion and migration capabilities of the material. This is because nanocrystals have a high specific surface area and surface activity, which can provide more atomic diffusion channels and migration sites. In addition, the introduction of nanocrystals may also change the grain boundary structure and chemical composition of the material, thereby affecting the atomic diffusion and migration behavior. At high temperatures, the enhanced atomic diffusion and migration capabilities contribute to the homogenization and densification process inside the material, thereby improving the overall performance of the material.

[0052] The preferred weight percentage of magnesium oxide nanocrystals is 2%–6%. Optimizing the proportion of magnesium oxide nanocrystals can, to some extent, suppress material deformation and cracking. This is because the introduction of magnesium oxide nanocrystals can alter the mechanical properties of the material, such as increasing grain boundary strength. These changes help reduce internal defects and stress concentration, thereby improving the material's resistance to deformation and cracking. Furthermore, the introduction of magnesium oxide nanocrystals may also alter the material's coefficient of thermal expansion and thermal stress distribution, thus helping to reduce thermal stress concentration and cracking caused by temperature changes.

[0053] 3) The high-entropy heat-inducing ceramic composite sintering carrier provided by this invention significantly improves the comprehensive performance of the material by introducing a variety of nanocrystals and doped nanocrystals during the preparation process, and by using high-entropy effect and quantum control technology. It not only realizes the heat induction transfer of the sintering carrier, but also has excellent high-entropy stability and high-temperature performance, improves the thermal conductivity, high-temperature stability and mechanical properties of the sintering carrier, and is less prone to serious deformation or cracking. Detailed Implementation

[0054] The preferred embodiments of the present invention will be described in detail below with reference to examples.

[0055] This invention provides a high-entropy thermal ionization ceramic composite sintering support, comprising the following components by weight percentage:

[0056] Al2O3 nanocrystals: 35%–45%;

[0057] Si3N4 nanocrystals: 20%–30%;

[0058] Yb₂O₃-doped Y₂O₃ nanocrystals: 10%–20%;

[0059] Y₂Si₂O₇ doped with Y₃Al₅O 12 Nanocrystals: 15%–25%;

[0060] MgO nanocrystals: 2%–6%.

[0061] This invention proposes a high-entropy thermal quantization ceramic composite sintering support, which improves the thermal conductivity, high-temperature stability and mechanical properties of the sintering support, solves the shortcomings of traditional sintering supports in the high-entropy ceramic sintering process, and ensures the quality of the sintering support and the performance of the final product.

[0062] Preferably, in the Yb2O3-doped Y2O3 nanocrystals, the doping amount of Yb2O3 is 0.1% to 20%; the preferred doping amounts of Yb2O3 are 0.1%, 0.6%, 1%, 5%, 10%, 15%, and 20%. Due to space limitations and for the sake of brevity, the present invention will not exhaustively list the specific values ​​included in the range.

[0063] Preferably, the Y2Si2O7 is doped with Y3Al5O 12 In the nanocrystals, the doping amount of Y2Si2O7 is 10% to 50%, and the preferred doping amount of Y2Si2O7 is 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45% and 50%. Due to space limitations and for the sake of brevity, the present invention will not exhaustively list the specific values ​​included in the range.

[0064] Preferably, the Al₂O₃ nanocrystals, the Si₃N₄ nanocrystals, the Yb₂O₃-doped Y₂O₃ nanocrystals, and the Y₂Si₂O₇-doped Y₃Al₅O₃ nanocrystals are... 12 The particle size of both the Al2O3 nanocrystals and the MgO nanocrystals is 5–20 nm; the Al2O3 nanocrystals, the Si3N4 nanocrystals, the Yb2O3-doped Y2O3 nanocrystals, and the Y2Si2O7-doped Y3Al5O7 nanocrystals are all 5–20 nm. 12 The preferred particle sizes of the Al2O3 nanocrystals and the MgO nanocrystals are 5nm, 10nm, 15nm, and 20nm. For space limitations and for the sake of brevity, this invention will not exhaustively list all the specific values ​​included in these ranges. The Al2O3 nanocrystals, the Si3N4 nanocrystals, the Yb2O3-doped Y2O3 nanocrystals, and the Y2Si2O7-doped Y3Al5O7 nanocrystals are also mentioned. 12 The specific surface area of ​​both the nanocrystals and the MgO nanocrystals is >50m². 2 / g.

[0065] This invention provides a method for preparing a high-entropy thermal quantization ceramic composite sintering support, comprising the following steps:

[0066] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0067] S101 is weighed according to the following weight percentages: 35%–45% Al2O3 nanocrystals, 20%–30% Si3N4 nanocrystals, 10%–20% Yb2O3-doped Y2O3 nanocrystals, and 15%–25% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12 Nanocrystalline particles and 2% to 6% MgO nanocrystalline particles are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0068] S102 was ball-milled for 5 to 7 hours at a ball milling speed of 750 to 850 rpm under vacuum argon protection.

[0069] S103 is mixed with dispersant and pore-forming agent, and ball milling is continued for 1.5 to 2.5 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0070] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0071] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at a temperature of -190 to -170°C to obtain the frozen slurry;

[0072] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -70 to -50°C for 23 to 24 hours to obtain a porous ceramic pre-reserved body.

[0073] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0074] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0075] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 750℃~850℃ for 1.5~2.5 hours to obtain the initial porous ceramic green body;

[0076] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0077] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1500-1700℃, subjected to uniaxial pressure of 90-110MPa, and held for 3.5-4.5 hours to prepare a dense sintered carrier blank;

[0078] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0079] S501 Quantum Control: Transforming a densely sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator is held at 850–950°C for 1.5–2.5 hours to quantum control the thermal oscillator, and then cooled to 200°C to obtain a quantum-controlled sintered support.

[0080] S502 High Entropy Infiltration: MgO nanoparticles are infiltrated into a quantum-controlled sintering support at a temperature of 1800℃~2000℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0081] This invention provides a method for preparing a high-entropy heat-quantized ceramic composite sintering carrier. During the preparation process, the high-entropy heat-quantized ceramic composite sintering carrier introduces various nanocrystals and doped nanocrystals, and employs high-entropy effects and quantum control technology to significantly improve the overall performance of the material. This not only achieves heat quantization transfer in the sintering carrier but also possesses excellent high-entropy stability at high temperatures, improving the thermal conductivity, high-temperature stability, and mechanical properties of the sintering carrier, and reducing the likelihood of severe deformation or cracking.

[0082] Example 1

[0083] This invention provides a method for preparing a high-entropy thermally quantized ceramic composite sintering support, comprising the following steps:

[0084] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0085] S101 is weighed according to the following weight percentages: 38% Al₂O₃ nanocrystals, 23% Si₃N₄ nanocrystals, 15% Yb₂O₃-doped Y₂O₃ nanocrystals, and 20% Y₂Si₂O₇-doped Y₃Al₅O₄ nanocrystals. 12The nanocrystals and 4% MgO nanocrystals are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0086] S102 was ball-milled for 6 hours at a speed of 800 rpm under vacuum argon protection.

[0087] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 2 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0088] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0089] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -180℃ to obtain the frozen slurry;

[0090] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -60℃ for 23.5 hours to obtain a porous ceramic pre-reserved body;

[0091] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0092] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0093] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 800℃ for 2 hours to obtain the initial porous ceramic green body;

[0094] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0095] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1600℃, uniaxial pressure of 100MPa, and held for 4 hours to prepare a dense sintered carrier blank;

[0096] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0097] S501 Quantum Control: Transforming a densely sintered support blank into a vacuum of 10... -3Under Pa conditions, the thermal oscillator was held at 900℃ for 2 hours to obtain a quantum-controlled thermal oscillator, and then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0098] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 1800℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0099] Example 2

[0100] This invention provides a method for preparing a high-entropy thermal ionization ceramic composite sintering support, comprising the following steps:

[0101] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0102] S101 is weighed according to the following weight percentages: 35% Al2O3 nanocrystals, 30% Si3N4 nanocrystals, 18% Yb2O3-doped Y2O3 nanocrystals, and 15% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12 Nanocrystals and 2% MgO nanocrystals are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0103] S102 was ball-milled for 7 hours at a speed of 750 rpm under vacuum argon protection.

[0104] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 1.5 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0105] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0106] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -190℃ to obtain the frozen slurry;

[0107] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -70℃ for 23 hours to obtain a porous ceramic pre-reservoir.

[0108] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0109] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0110] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 750℃ for 2.5 hours to obtain the initial porous ceramic green body;

[0111] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0112] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1500℃, subjected to a uniaxial pressure of 110MPa, and held for 4.5 hours to prepare a dense sintered carrier blank;

[0113] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0114] S501 Quantum Control: Transforming a densely sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator was held at 850℃ for 2.5 hours to obtain a quantum-controlled thermal oscillator, which was then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0115] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 1900℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0116] Example 3

[0117] This invention provides a method for preparing a high-entropy thermally quantized ceramic composite sintering support, comprising the following steps:

[0118] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0119] S101 is weighed according to the following weight percentages: 45% Al2O3 nanocrystals, 20% Si3N4 nanocrystals, 12% Yb2O3-doped Y2O3 nanocrystals, and 17% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12Nanocrystalline particles and 6% MgO nanocrystalline particles are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0120] S102 was ball-milled for 5 hours at a speed of 850 rpm under vacuum argon protection.

[0121] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 2.5 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0122] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0123] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -170℃ to obtain the frozen slurry;

[0124] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -50°C for 24 hours to obtain a porous ceramic pre-reservoir.

[0125] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0126] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0127] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 850℃ for 1.5 hours to obtain the initial porous ceramic green body;

[0128] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0129] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1700℃, subjected to uniaxial pressure of 90MPa, and held for 3.5 hours to prepare a dense sintered carrier blank;

[0130] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0131] S501 Quantum Control: Transforming a densely sintered support blank into a vacuum of 10... -3Under Pa conditions, the thermal oscillator was held at 950℃ for 1.5 hours to quantum control the thermal oscillator, and then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0132] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 2000℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0133] Comparative Example 1

[0134] Comparative Example 1 provides a method for preparing a high-entropy thermal quantization ceramic composite sintering support, comprising the following steps:

[0135] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0136] S101 is weighed according to the following weight percentages: 30% Al2O3 nanocrystals, 25% Si3N4 nanocrystals, 20% Yb2O3-doped Y2O3 nanocrystals, and 21% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12 The nanocrystals and 4% MgO nanocrystals are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0137] S102 was ball-milled for 6 hours at a speed of 800 rpm under vacuum argon protection.

[0138] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 2 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0139] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0140] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -180℃ to obtain the frozen slurry;

[0141] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -60℃ for 23.5 hours to obtain a porous ceramic pre-reserved body;

[0142] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0143] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0144] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 800℃ for 2 hours to obtain the initial porous ceramic green body;

[0145] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0146] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1600℃, uniaxial pressure of 100MPa, and held for 4 hours to prepare a dense sintered carrier blank;

[0147] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0148] S501 Quantum Control: Transforming a dense sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator was held at 900℃ for 2 hours to obtain a quantum-controlled thermal oscillator, and then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0149] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 1800℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0150] Comparative Example 2

[0151] Comparative Example 2 provides a method for preparing a high-entropy thermal quantization ceramic composite sintering support, comprising the following steps:

[0152] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0153] S101 is weighed according to the following weight percentages: 50% Al2O3 nanocrystals, 20% Si3N4 nanocrystals, 10% Yb2O3-doped Y2O3 nanocrystals, and 15% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12 Nanocrystalline particles and 5% MgO nanocrystalline particles are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0154] S102 was ball-milled for 6 hours at a speed of 800 rpm under vacuum argon protection.

[0155] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 2 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0156] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0157] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -180℃.

[0158] The frozen slurry was obtained;

[0159] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -60℃ for 23.5 hours to obtain a porous ceramic pre-reserved body;

[0160] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0161] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0162] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 800℃ for 2 hours to obtain the initial porous ceramic green body;

[0163] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0164] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1600℃, uniaxial pressure of 100MPa, and held for 4 hours to prepare a dense sintered carrier blank;

[0165] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0166] S501 Quantum Control: Transforming a dense sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator was held at 900℃ for 2 hours to obtain a quantum-controlled thermal oscillator, and then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0167] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 1800℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0168] Comparative Example 3

[0169] Comparative Example 3 provides a method for preparing a high-entropy thermal quantization ceramic composite sintering support, comprising the following steps:

[0170] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0171] S101 is weighed according to the following weight percentages: 23% Si3N4 nanocrystals, 15% Yb2O3-doped Y2O3 nanocrystals, and 20% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12 The nanocrystals and 4% MgO nanocrystals are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0172] S102 was ball-milled for 6 hours at a speed of 800 rpm under vacuum argon protection.

[0173] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 2 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0174] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0175] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -180℃ to obtain the frozen slurry;

[0176] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -60℃ for 23.5 hours to obtain a porous ceramic pre-reserved body;

[0177] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0178] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0179] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 800℃ for 2 hours to obtain the initial porous ceramic green body;

[0180] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0181] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1600℃, uniaxial pressure of 100MPa, and held for 4 hours to prepare a dense sintered carrier blank;

[0182] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0183] S501 Quantum Control: Transforming a dense sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator was held at 900℃ for 2 hours to obtain a quantum-controlled thermal oscillator, and then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0184] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 1800℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0185] Comparative Example 4

[0186] Comparative Example 4 provides a method for preparing a high-entropy thermal quantization ceramic composite sintering support, comprising the following steps:

[0187] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0188] S101 is weighed according to the following weight percentages: 38% Al₂O₃ nanocrystals, 23% Si₃N₄ nanocrystals, and 20% Y₂Si₂O₇ doped with Y₃Al₅O₂. 12 The nanocrystals and 4% MgO nanocrystals are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:1.

[0189] S102 was ball-milled for 6 hours at a speed of 800 rpm under vacuum argon protection.

[0190] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 2 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0191] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0192] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -180℃.

[0193] The frozen slurry was obtained;

[0194] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -60℃ for 23.5 hours to obtain a porous ceramic pre-reserved body;

[0195] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0196] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0197] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 800℃ for 2 hours to obtain the initial porous ceramic green body;

[0198] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0199] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1600℃, uniaxial pressure of 100MPa, and held for 4 hours to prepare a dense sintered carrier blank;

[0200] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0201] S501 Quantum Control: Transforming a densely sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator was held at 900℃ for 2 hours to obtain a quantum-controlled thermal oscillator, and then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0202] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 1800℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0203] Comparative Example 5

[0204] Comparative Example 5 provides a method for preparing a high-entropy thermal quantization ceramic composite sintering support, comprising the following steps:

[0205] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0206] S101 weighs 38% Al2O3 nanocrystals, 23% Si3N4 nanocrystals, 15% Yb2O3-doped Y2O3 nanocrystals and 4% MgO nanocrystals according to weight percentage and feeds them into a ball mill. Then, nano ZrO2 balls are put into the ball mill. The weight ratio of the nano ZrO2 balls to the feed is 10:1.

[0207] S102 was ball-milled for 6 hours at a speed of 800 rpm under vacuum argon protection.

[0208] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 2 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0209] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0210] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -180℃ to obtain the frozen slurry;

[0211] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -60℃ for 23.5 hours to obtain a porous ceramic pre-reserved body;

[0212] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0213] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0214] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 800℃ for 2 hours to obtain the initial porous ceramic green body;

[0215] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0216] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1600℃, uniaxial pressure of 100MPa, and held for 4 hours to prepare a dense sintered carrier blank;

[0217] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0218] S501 Quantum Control: Transforming a densely sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator was held at 900℃ for 2 hours to obtain a quantum-controlled thermal oscillator, and then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0219] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 1800℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0220] Comparative Example 6

[0221] Comparative Example 6 provides a method for preparing a high-entropy thermal quantization ceramic composite sintering support, comprising the following steps:

[0222] S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed to obtain a uniformly mixed slurry, specifically including the following steps:

[0223] S101 is weighed according to the following weight percentages: 38% Al2O3 nanocrystals, 23% Si3N4 nanocrystals, 15% Yb2O3-doped Y2O3 nanocrystals, and 20% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12 The nanocrystals are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed material is 10:1.

[0224] S102 was ball-milled for 6 hours at a speed of 800 rpm under vacuum argon protection.

[0225] S103 is added with dispersant and pore-forming agent, and ball milling is continued for 2 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:1;

[0226] S2 involves freezing and vacuum in-situ curing of the uniformly mixed slurry to obtain a porous ceramic pre-reservoir, specifically including the following steps:

[0227] S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at -180℃ to obtain the frozen slurry;

[0228] S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -60℃ for 23.5 hours to obtain a porous ceramic pre-reserved body;

[0229] S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering to obtain the initial porous ceramic green body, specifically including the following steps:

[0230] S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir;

[0231] S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 800℃ for 2 hours to obtain the initial porous ceramic green body;

[0232] S4 involves hot isostatic pressing of the initial porous ceramic preform to obtain a dense sintered carrier preform, specifically including the following steps:

[0233] S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 Pa, heated to 1600℃, uniaxial pressure of 100MPa, and held for 4 hours to prepare a dense sintered carrier blank;

[0234] S5 involves sequentially performing quantum manipulation and high-entropy infiltration on a dense sintered support blank to obtain a high-entropy thermally quantized ceramic composite sintered support, specifically including the following steps:

[0235] S501 Quantum Control: Transforming a densely sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator was held at 900℃ for 2 hours to obtain a quantum-controlled thermal oscillator, and then cooled to 200℃ to obtain a quantum-controlled sintered support.

[0236] S502 High Entropy Infiltration: Quantum-controlled sintering support is infiltrated with MgO nanoparticles at a temperature of 1800℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

[0237] Experimental methods for testing experimental data

[0238] The high-entropy thermally quantized ceramic composite sintering supports prepared in Examples 1-3 and Comparative Examples 1-6 were measured using the following experimental methods:

[0239] 1. Thermal conductivity: The thermal diffusivity was measured using a laser thermal conductivity analyzer (LFA467 model) manufactured by NETZSCH Instruments GmbH, Germany.

[0240] The thermal conductivity λ of a material is calculated using the measured thermal diffusivity, as follows: λ = α·Cp·ρ. Where α represents the thermal diffusivity of the ceramic material, Cp represents the specific heat capacity of the ceramic material, and ρ represents the actual density of the ceramic material.

[0241] The LFA467 laser thermal conductivity analyzer uses the laser pulse method to determine the thermal diffusivity of ceramic materials. A laser pulse flash is applied to the surface of an opaque, dark-colored sample without specular reflection (light-colored samples require surface coloring to avoid the influence of sample reflection on measurement accuracy). The principle is that a laser is emitted onto one side of the sample surface to radiate it; the heat generated by the radiation will propagate to the other side of the sample. The thermal diffusivity of the material is calculated by recording the time it takes for the temperature of the other side surface to rise to a predetermined value. Three different thicknesses of the same sample were selected for measurement (1.5 mm, 2 mm, and 3 mm), and the average of the three measurements was taken as the result.

[0242] 2. Density test: The density was tested using a PEM density tester. The preload was 1.961 N, the main load weight was 10.58 N, the indenter size was 0.6 mm, and the indentation depth was 0.01 mm. The instrument readings were recorded.

[0243] 3. Place the prepared sample on the support device of the three-point mechanical testing machine to ensure that the sample is in stable and secure contact with the support point;

[0244] Adjust the distance between the support points to determine the appropriate span based on the sample size and test requirements;

[0245] According to the testing standards or experimental requirements, set the testing speed, loading method, and other parameters of the testing machine to ensure accurate and complete data recording during the testing process; start the testing machine and gradually increase the load until the sample fails. During the application of load, carefully observe the deformation and failure characteristics of the sample; the testing machine will automatically record load-displacement data during the test. These data are the basis for subsequent analysis of the sample's bending strength and deformation behavior.

[0246] Based on the recorded load-displacement data, the three-point bending strength of the sample can be calculated. The formula for calculating the three-point bending strength is: σ=3FL / (2bh), where F is the failure load, L is the span, b is the sample width, and h is the sample height. The average value after three measurements is taken as the measurement result.

[0247] The experimental data of the high-entropy thermally quantized ceramic composite sintering supports prepared in Examples 1 and Comparative Examples 1-6, measured using the above experimental methods, are shown in Table 1 below:

[0248] Table 1 Experimental Data

[0249]

[0250] From Table 1, we can observe that the high-entropy thermal quantization ceramic composite sintering supports prepared in Examples 1-3, through composition optimization, not only achieve higher thermal conductivity experimental data to address the technical problem of poor heat homogenization during high-temperature sintering, but also achieve higher density experimental data to address the technical problem of poor compactness during high-temperature sintering. Simultaneously, they achieve higher three-point bending strength experimental data to address technical problems such as decreased resistance to deformation and cracking during high-temperature sintering, thus improving the performance and stability of the high-entropy thermal quantization ceramic composite sintering supports. Comparative documents 1-2 differ from the high-entropy thermal quantization ceramic composite sintering supports prepared in Example 1 in terms of component content, especially the content of Al2O3 nanocrystals in the ceramic composite sintering supports is not controlled within the range of 35%–45% by weight. The internal structure of the high-entropy thermally fused ceramic composite sintering support resulted in varying degrees of decrease in properties such as thermal conductivity, density, and three-point bending strength. Comparative document 3, compared to Example 1, lacked Al2O3 nanocrystals in its composition, leading to the largest decrease in experimental data for thermal conductivity, density, and three-point bending strength. Comparative document 4, compared to Example 1, lacked Yb2O3-doped Y2O3 nanocrystals in its composition, resulting in a slight decrease in experimental data for thermal conductivity, density, and three-point bending strength. Comparative document 5, compared to Example 1, lacked Y2Si2O7-doped Y3Al5O7 in its composition. 12 The presence of MgO nanocrystals in the high-entropy thermal quantization ceramic composite sintering support leads to a decrease in experimental data such as thermal conductivity, density, and three-point bending strength. In contrast, the high-entropy thermal quantization ceramic composite sintering support prepared in Comparative Document 6 does not contain MgO nanocrystals, resulting in a decrease in experimental data such as thermal conductivity, density, and three-point bending strength.

[0251] It is understood that this invention has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of this invention. Furthermore, under the teachings of this invention, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of this invention. Therefore, this invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are protected by this invention. Furthermore, under the teachings of this invention, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of this invention. Therefore, this invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of this invention.

Claims

1. A high-entropy thermal quantization ceramic composite sintering carrier, characterized in that, Includes the following components by weight percentage: Al2O3 nanocrystals: 35%–45%; Si3N4 nanocrystals: 20%–30%; Yb₂O₃-doped Y₂O₃ nanocrystals: 10%–20%; Y₂Si₂O₇ doped with Y₃Al₅O 12 Nanocrystals: 15%–25%; MgO nanocrystals: 2%–6%.

2. The high-entropy thermal quantization ceramic composite sintering carrier according to claim 1, characterized in that, In the Yb2O3-doped Y2O3 nanocrystals, the doping amount of Yb2O3 is 0.1% to 20%.

3. The high-entropy thermal quantization ceramic composite sintering carrier according to claim 1, characterized in that, Y2Si2O7 doped with Y3Al5O 12 The doping amount of Y2Si2O7 in the nanocrystals is 10% to 50%.

4. The high-entropy thermal quantization ceramic composite sintering carrier according to claim 1, characterized in that, The Al2O3 nanocrystals, the Si3N4 nanocrystals, the Yb2O3-doped Y2O3 nanocrystals, and the Y2Si2O7-doped Y3Al5O 12 The particle size of the nanocrystals and the MgO nanocrystals are both 5-20 nm; the Al2O3 nanocrystals, the Si3N4 nanocrystals, the Yb2O3-doped Y2O3 nanocrystals, and the Y2Si2O7-doped Y3Al5O7 nanocrystals are all 5-20 nm. 12 The specific surface area of ​​both the nanocrystals and the MgO nanocrystals is >50m². 2 / g.

5. A method for preparing a high-entropy thermal quantization ceramic composite sintering support, characterized in that, The preparation of the high-entropy thermal quantization ceramic composite sintering support as described in any one of claims 1-4 includes the following steps: S1 weighs Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals according to their weight percentages. 12 The nanocrystals and MgO nanocrystals were ball-milled and mixed to obtain a uniformly mixed slurry; S2 involves freezing and vacuum in-situ solidification of a uniformly mixed slurry to obtain a porous ceramic pre-reservoir. S3 sequentially subjected the porous ceramic pre-reservoir to supercritical drying and pre-sintering to obtain the initial porous ceramic green body; S4 involves hot isostatic pressing of the initial porous ceramic blank to obtain a dense sintered carrier blank. S5 sequentially performs quantum control and high-entropy infiltration on the dense sintered carrier blank to obtain a high-entropy thermally quantized ceramic composite sintered carrier.

6. The method for preparing a high-entropy thermal quantization ceramic composite sintering support according to claim 5, characterized in that, In step S1, Al2O3 nanocrystals, Si3N4 nanocrystals, Yb2O3-doped Y2O3 nanocrystals, and Y2Si2O7-doped Y3Al5O3 nanocrystals are weighed according to their weight percentages. 12 The nanocrystals and MgO nanocrystals are ball-milled and mixed, specifically including the following steps: S101 is weighed according to the following weight percentages: 35%–45% Al2O3 nanocrystals, 20%–30% Si3N4 nanocrystals, 10%–20% Yb2O3-doped Y2O3 nanocrystals, and 15%–25% Y2Si2O7-doped Y3Al5O3 nanocrystals. 12 Nanocrystalline particles and 2% to 6% MgO nanocrystalline particles are fed into a ball mill, and then nano ZrO2 balls are added to the ball mill. The weight ratio of the nano ZrO2 balls to the fed materials is 10:

1. S102 was ball-milled for 5 to 7 hours at a ball milling speed of 750 to 850 rpm under vacuum argon protection. S103 is added with dispersant and pore-forming agent, and ball milling is continued for 1.5 to 2.5 hours to obtain a uniformly mixed slurry, wherein the weight ratio of dispersant and pore-forming agent is 1:

1.

7. The method for preparing a high-entropy thermal quantization ceramic composite sintering support according to claim 5, characterized in that, Step S2 involves freezing and vacuum curing the uniformly mixed slurry in situ, specifically including the following steps: S201 injects the uniformly mixed slurry into a precast mold and rapidly freezes it at a temperature of -190 to -170°C to obtain the frozen slurry; S202 transfers the frozen slurry to a vacuum in-situ curing device and cures it at -70 to -50°C for 23 to 24 hours to obtain a porous ceramic pre-reserved body.

8. The method for preparing a high-entropy thermal quantization ceramic composite sintering support according to claim 5, characterized in that, Step S3 involves sequentially subjecting the porous ceramic pre-substrate to supercritical drying and pre-sintering, specifically including the following steps: S301 supercritical drying includes the following steps: drying the porous ceramic pre-reservoir with supercritical CO2 to obtain the dried porous ceramic pre-reservoir; S302 pre-sintering includes the following steps: pre-firing the dried porous ceramic pre-substrate at 750℃~850℃ for 1.5~2.5 hours to obtain the initial porous ceramic green body.

9. The method for preparing a high-entropy thermal quantization ceramic composite sintering support according to claim 5, characterized in that, Step S4 involves hot isostatic pressing (HIP) sintering the initial porous ceramic green body, specifically including the following steps: S401 places the initial porous ceramic preform into the hot pressing chamber of the hot press, where the vacuum level is 10. -3 The material is heated to 1500–1700℃, subjected to a uniaxial pressure of 90–110 MPa, and held for 3.5–4.5 hours to obtain a dense sintered carrier blank.

10. The method for preparing a high-entropy thermal quantization ceramic composite sintering support according to claim 5, characterized in that, Step S5 involves sequentially performing quantum manipulation and high-entropy infiltration on the dense sintered support blank, specifically including the following steps: S501 Quantum Control: Transforming a dense sintered support blank into a vacuum of 10... -3 Under Pa conditions, the thermal oscillator is held at 850–950°C for 1.5–2.5 hours to quantum control the thermal oscillator, and then cooled to 200°C to obtain a quantum-controlled sintered support. S502 High Entropy Infiltration: MgO nanoparticles are infiltrated into a quantum-controlled sintering support at a temperature of 1800℃~2000℃ and then cooled to room temperature to obtain a high-entropy thermal quantumized ceramic composite sintering support.

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