Shielding device, motion control method thereof and semiconductor process equipment

Abstract

The invention provides a shielding device, a motion control method thereof and semiconductor process equipment, the shielding device comprises a bearing part and a liftable driving part, the bearing part is used for bearing a shielding disc, and the driving part is used for moving the shielding disc to a base of a process chamber. When a fault occurs, the shielding disc is lifted to exceed the height of the liftable supporting piece in the base; the driving part comprises a connecting seat, a rotating mechanism and a lifting mechanism, the rotating mechanism and the lifting mechanism are mounted on the connecting seat, and the bearing part is connected with the rotating mechanism through a rotating shaft and the connecting seat. By integrating the bearing part and the lifting driving part, effective bearing and moving of the shielding disc are achieved, the function that the shielding disc is automatically lifted to exceed the height of the supporting piece in the base when a fault occurs is achieved, and therefore the collision risk is effectively avoided.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a shielding device, a motion control method and semiconductor process equipment. Background Art

[0002] In the physical vapor deposition (PVD) process, pre-burning the target (BurnIn) is a crucial step, which aims to effectively remove oxides and other impurities on the surface of the target through specific process means to ensure the quality and efficiency of the subsequent deposition process. During the BurnIn process, in order to prevent the sputtered particles from contaminating the base or electrostatic chuck, a shielding plate is usually placed on these parts as a temporary receiving structure.

[0003] Specifically, the PVD chamber is usually composed of a main chamber part and a shielding chamber part connected thereto. A pedestal is arranged in the main chamber part, which is used to support or adsorb silicon wafers and is one of the core components in the process. The shielding chamber part is equipped with a tray, which is specifically used to support the shielding disk. When performing the BurnIn process, the tray will first drive the shielding disk to rotate to the main chamber part, and then the support pin structure in the main chamber part will rise to lift the shielding disk to a predetermined process height. At this time, the tray will withdraw and rotate to the shielding chamber part to provide the necessary space for the subsequent pedestal rise and the process interaction between the shielding disk and the target material. When the pedestal rises to the process position, the shielding disk on the support pin is lifted to a position relative to the target material, thereby starting the formal BurnIn process.

[0004] However, in actual applications, the movement of the tray often triggers alarms for various reasons, which not only increases the complexity of the operation, but also may bring serious risks. In particular, when the actual position relationship between the shielding disk and the support pins on the base cannot be accurately determined, if the support pins are still in the raised state and the tray attempts to carry the shielding disk to move above the base, a collision accident between the support pins and the shielding disk may occur, resulting in deformation or breakage of the support pins or even failure of the entire process. Summary of the invention

[0005] In order to solve all or part of the problems of the above-mentioned prior art, the present invention provides a shielding device, a motion control method thereof and semiconductor process equipment, which can respond quickly when encountering a fault and automatically lift the shielding disk, thereby avoiding the risk of collision caused by the fault.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A shielding device includes a bearing part and a liftable driving part, wherein the bearing part is used to bear a shielding disk, and the driving part is used to move the shielding disk to a base of a process chamber, and to lift the shielding disk to a height exceeding the liftable support member in the base when a fault occurs; the driving part includes a connecting seat, a rotating mechanism and a lifting mechanism, wherein the rotating mechanism and the lifting mechanism are mounted on the connecting seat, and the bearing part is connected to the rotating mechanism via a rotating shaft and the connecting seat. By integrating the bearing part and the liftable driving part, not only is the effective bearing and movement of the shielding disk achieved, but also the function of automatically lifting the shielding disk to a height exceeding the support member in the base when a fault occurs is provided, thereby effectively avoiding the risk of collision.

[0008] It also includes a monitoring and alarm mechanism, which includes at least three groups of monitors, and the monitors are connected to a control system; the monitors are set at at least three monitoring positions, the first monitoring position corresponds to the initial height position of the bearing part, the second monitoring position corresponds to the preset safety height position of the bearing part higher than the liftable support member in the base, and the third monitoring position corresponds to the limit height position of the bearing part.

[0009] The rotating mechanism includes a first transmission device and a first power source, one end of the first transmission device is connected to the driving end of the first power source, and the other end is connected to the bearing part through the rotating shaft, and the connecting seat is provided at the connection between the first transmission device and the rotating shaft.

[0010] The lifting mechanism includes a screw rod, a second transmission device and a second power source, one end of the second transmission device is connected to the driving end of the second power source, and the other end is connected to the screw rod, a displacement block matching the screw rod thread is provided on the connecting seat, and one end of the screw rod is movably connected to the displacement block thread.

[0011] It also includes an auxiliary lifting mechanism, which includes a first mounting plate arranged parallel to the driving part, a slide rail is arranged on the first mounting plate, a slider adapted to the slide rail is arranged on the connecting seat, and the slider is installed in the slide rail.

[0012] The sliding block is mounted on the connecting seat via a second mounting plate, wherein the upper end surface of the second mounting plate is connected to the connecting seat, and the lower end surface of the second mounting plate is connected to the rotating mechanism.

[0013] The auxiliary lifting mechanism is provided with a monitoring and alarm mechanism, which includes a monitor connected to the control system; the monitor includes at least three groups of signal transmitters and one group of signal receivers, the signal receivers are fixedly mounted on the second mounting plate, and the three groups of signal transmitters are sequentially mounted on the slide rails, corresponding to the initial height position, preset safety height position and limit height position of the bearing part.

[0014] The present invention also provides a motion control method for a shielding device, which is implemented using the shielding device described above. When the shielding device fails or triggers an alarm during its rotational movement, the method immediately terminates the subsequent action of the driving unit and performs the following steps in sequence: S1. The rotating mechanism stops its rotational movement; S2. The lifting mechanism starts to lift the bearing part to a preset safety height position; S3. The rotating mechanism restarts to rotate the bearing part back to its initial position.

[0015] In step S2, if the load-bearing part fails to be lifted to a preset safe height position or exceeds a preset limit height position after the lifting mechanism is started, the monitoring alarm mechanism immediately triggers an alarm mechanism, and the control system stops all actions of the driving part.

[0016] The present invention also provides a semiconductor process equipment, comprising a process chamber and the shielding device described above, wherein the shielding device is located in the process chamber; the process chamber comprises: a main chamber portion and a shielding chamber portion connected thereto, wherein the shielding chamber portion is located on one side of the main chamber portion; a base is provided in the main chamber portion, and a rotating mechanism in the shielding device is used to drive the bearing portion to rotate so that the bearing portion drives the shielding disk to move between the main chamber portion and the shielding chamber portion.

[0017] The present invention significantly improves the safety and reliability of semiconductor process equipment through the innovatively designed shielding device and its motion control method. The shielding device can not only stably carry and accurately move the shielding disk, effectively avoiding collision with other components in the process chamber, but also respond quickly when encountering a fault, lift the shielding disk to a safe height, and ensure the safety of the equipment. At the same time, its innovative auxiliary lifting mechanism and monitoring alarm mechanism further enhance the stability and self-protection capabilities of the equipment, reducing the risk of failure and downtime. Combined with the actual needs of semiconductor process equipment, the present invention provides indispensable hardware and technical support for the efficient and precise implementation of semiconductor manufacturing processes, and promotes the continuous development and innovation in the field of semiconductor manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a schematic structural diagram of a shielding device according to Example 1 of the present invention.

[0020] Figure 2 This is a partial cross-sectional view of an auxiliary lifting mechanism in a shielding device according to Example 1 of the present invention.

[0021] Figure 3 This is a schematic structural diagram of a shielding plate in a semiconductor process equipment before being transferred according to Example 2 of the present invention.

[0022] Figure 4 This is a structural schematic diagram of transferring a shielding plate onto a base in a semiconductor process equipment in embodiment 2 of the present invention.

[0023] Figure markings: 1-bearing part; 101-shielding plate; 102-rotating shaft; 2-driving part; 201-connecting seat; 2011-second mounting plate; 202-rotating mechanism; 2021-first transmission device; 2022-first power source; 203-lifting mechanism; 2031-screw rod; 2032-second transmission device; 2033-second power source; 2034-displacement block; 3-monitoring and alarm mechanism; 301-signal transmitter; 302-signal receiver; 4-auxiliary lifting mechanism; 401-first mounting plate; 402-slide rail; 403-slider; 5-process chamber; 501-main chamber part; 5011-base; 5012-support member; 502-shielding chamber part. DETAILED DESCRIPTION

[0024] The technical solutions in the specific embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] Example 1

[0026] In the embodiment of the present invention, in combination with reference Figure 1 to Figure 2As shown, a shielding device is provided, which is mainly composed of two core components: a bearing part 1 and a liftable driving part 2. The main function of the bearing part 1 is to stably carry the shielding disk 101, and the driving part 2 is responsible for accurately moving the bearing part 1 carrying the shielding disk 101 to the top of the base 5011 of the process chamber 5, and when encountering any fault or abnormal situation, it can quickly and reliably lift the shielding disk 101 to a safe height, exceeding the highest position of the liftable support 5012 (such as a support needle) in the base 5011, thereby effectively avoiding potential collision risks. The design of the driving part 2 integrates a connecting seat 201, a rotating mechanism 202 and a lifting mechanism 203. The connecting seat 201 serves as the support and connection center of the entire driving part 2, ensuring the stable installation of the rotating mechanism 202 and the lifting mechanism 203, and also realizes a flexible and stable connection with the bearing part 1 through the rotating shaft 102. The rotating mechanism 202 is responsible for driving the bearing part 1 and the shielding plate 101 thereon to rotate in the horizontal plane, so as to realize the accurate transfer of the shielding plate 101 between different process positions. The lifting mechanism 203 realizes the lifting and lowering movement of the bearing part 1 and the shielding plate 101 in the vertical direction through mechanical transmission, thereby ensuring that the shielding plate 101 can be accurately lifted to the height required by the process and can be lifted urgently when necessary.

[0027] The shielding device also includes a monitoring alarm mechanism 3, which is equipped with at least three groups of monitors, each of which is connected to the control system through a high-reliability communication link to ensure the immediacy and accuracy of data transmission. These monitors are cleverly arranged at at least three key monitoring positions to fully cover the entire lifting process of the load-bearing part 1, thereby achieving all-round monitoring of potential risks. Specifically, the first monitoring position corresponds to the initial height position of the load-bearing part 1, that is, the static state of the load-bearing part 1 before the lifting operation. The setting of this position is intended to monitor the stability and safety of the initial state. The second monitoring position is set at a preset safe height position where the load-bearing part 1 is higher than the liftable support 5012 inside the base 5011. When an abnormal situation occurs, the lifting mechanism 203 of the driving part 2 drives the load-bearing part 1 to rise to this height position, and then rotates back to the shielding chamber through the rotating mechanism 202. The setting of this monitoring position provides a safe transition height for the load-bearing unit 1 when an abnormal situation occurs, ensuring that the load-bearing unit 1 can be smoothly transferred to the inside of the shielding chamber under the premise of ensuring the safety of itself and the surrounding configuration, avoiding secondary failures or safety accidents such as collisions and jams caused by direct transfer operations under abnormal conditions. The third monitoring position is set to the maximum height of the load-bearing unit 1, marking the final point of the lifting stroke. When an unexpected situation occurs and the lifting mechanism 203 rises abnormally to the maximum height position, the alarm mechanism will be triggered, and the control system will immediately respond and stop the further lifting action of the lifting mechanism 203 to avoid contact between the load-bearing unit 1 and the top of the shielding chamber, thereby protecting the equipment from damage.

[0028] In this embodiment, the rotating mechanism 202 is mainly composed of a first transmission device 2021 and a first power source 2022. Among them, one end of the first transmission device 2021 is connected to the driving end of the first power source 2022, and the other end is connected to the bearing part 1 by means of the rotating shaft 102, so that the bearing part 1 can rotate around the rotating shaft 102 under the drive of the first transmission device 2021, thereby realizing the angle adjustment function of the bearing part 1 in the horizontal direction. And a connecting seat 201 is provided at the connection part between the first transmission device 2021 and the rotating shaft 102. The connecting seat 201 not only plays a role in stable connection, but also its structural design fully considers the coordinated operation with the subsequent lifting mechanism 203. This connecting seat 201 is designed as a bellows structure. When the lifting mechanism 203 performs the lifting action, the connecting seat 201 can be compressed and deformed accordingly with the lifting of the lifting mechanism 203. In this process, the bellows structure can effectively adapt to the spatial position changes during the lifting process with its good flexibility and deformability, and always maintain the vacuum state of the process chamber 5. The lifting mechanism 203 includes a screw rod 2031, a second transmission device 2032 and a second power source 2033. One end of the second transmission device 2032 is connected to the driving end of the second power source 2033, and the other end is connected to the screw rod 2031. A displacement block 2034 that matches the thread of the screw rod 2031 is provided on the connecting seat 201, and one end of the screw rod 2031 is matched with the displacement block 2034 in a threaded movable connection. When the second power source 2033 is started, its driving force is transmitted to the screw rod 2031 through the second transmission device 2032, and the screw rod 2031 rotates under the action of the thread of the displacement block 2034, thereby driving the displacement block 2034 to perform linear displacement motion along the axial direction of the screw rod 2031. This design enables the bearing part 1 associated with the connecting seat 201 to be adjusted in height with the aid of the lifting mechanism 203 on the basis of the rotational movement provided by the rotating mechanism 202, thereby greatly enriching the overall spatial movement dimension and flexibility of the equipment and effectively improving the adaptability and functionality of the device in actual application scenarios.

[0029] The device is also provided with an auxiliary lifting mechanism 4, which plays an important auxiliary role in the operation of the entire device to ensure the stability of the movement of related components. Its main structure includes a first mounting plate 401 that is arranged in parallel with the driving part 2. The first mounting plate 401 serves as a basic bearing part 1 of the entire auxiliary lifting mechanism 4, providing a stable supporting platform for the installation and operation of subsequent other components. A slide rail 402 is arranged on the first mounting plate 401, and a slider 403 adapted to the slide rail 402 is arranged on the connecting seat 201, so that smooth relative sliding movement can be achieved between the slider 403 and the slide rail 402. Specifically, the slider 403 is installed on the connecting seat 201 through the second mounting plate 2011. The second mounting plate 2011 plays a key role in connection transition, and its upper end surface is firmly connected to the connecting seat 201, and the lower end surface is connected to the rotating mechanism 202, so that the connecting seat 201, the slider 403, the slide rail 402 and the rotating mechanism 202 are organically integrated into a coordinated whole. When the driving unit 2 drives the relevant components to perform lifting motion, the slider 403 can slide smoothly along the slide rail 402, and with the help of the second mounting plate 2011, drive the connecting seat 201 and the rotating mechanism 202 connected thereto and the bearing unit 1 to achieve vertical displacement. At the same time, due to the connection relationship with the rotating mechanism 202, it can also assist the rotating mechanism 202 to maintain a stable posture and motion trajectory during the lifting process to a certain extent, effectively avoiding the adverse effects on the normal operation of the rotating mechanism 202 caused by the lifting motion, further improving the coordination and reliability of the mechanical structure of the entire device, so that the device can operate stably and efficiently under complex working environments and diversified work task requirements.

[0030] In this embodiment, the monitoring alarm mechanism 3 is arranged on the auxiliary lifting mechanism 4. The monitoring alarm mechanism 3 mainly includes a monitor connected to the control system, and the two realize stable and efficient signal transmission and data interaction through specific communication lines and interface protocols. Specifically, the monitor is composed of at least three groups of signal transmitters 301 and a group of signal receivers 302. The three groups of signal transmitters 301 are installed on the slide rail 402 in sequence and in an orderly manner, and their corresponding positions are the initial height position, the preset safety height position and the limit height position of the bearing part 1. The signal receiver 302 is fixedly installed on the second mounting plate 2011, and its installation position has been precisely designed and debugged to ensure that it can stably receive signals from the signal transmitter 301 during the operation of the equipment. Among them, the signal transmitter 301 corresponding to the initial height position of the load-bearing part 1 is mainly responsible for monitoring and transmitting signals of various parameters in the initial state of the load-bearing part 1, such as monitoring whether the load-bearing part 1 is in a static equilibrium state, whether there is a deviation in the initial position, etc., and timely sending relevant information in the form of signals to the signal receiver 302, so that the control system can comprehensively control and evaluate the basic state of the load-bearing part 1 at the initial stage of the equipment startup, and provide a reliable basis for subsequent safe and stable operation. The signal transmitter 301 corresponding to the preset safety height position plays a key role when an abnormal condition occurs in the operation of the equipment. When an abnormal condition occurs, when the lifting mechanism 203 of the driving part 2 drives the load-bearing part 1 to rise to the preset safety height position, this signal transmitter 301 transmits a specific signal, which is received by the signal receiver 302 and transmitted to the control system, and the control system then drives the rotating mechanism 202 to turn the load-bearing part 1 back to the shielding chamber, so as to ensure that the load-bearing part 1 can be safely transferred to the predetermined position under abnormal conditions, and avoid further safety accidents or equipment damage caused by improper operation under abnormal conditions. The signal transmitter 301 corresponding to the limit height position serves as the last safety line of defense during the entire lifting process. Once the lifting mechanism 203 continues to rise until it reaches the limit height position due to an unexpected situation, the signal transmitter 301 immediately transmits an emergency signal, and the signal receiver 302 prompts the control system to respond immediately after receiving the signal, stopping the further rise of the lifting mechanism 203, thereby preventing the bearing part 1 from contacting and colliding with the top of the shielding chamber, reducing the serious consequences that may be caused by equipment failure or misoperation, and significantly improving the reliability and stability of equipment operation.

[0031] The present invention further provides a motion control method specially adapted for the above-mentioned shielding device, which occupies a core position in the operation control system of the shielding device and is of great significance for ensuring that the shielding device operates stably, safely and efficiently under various working conditions. When the shielding device encounters a fault or triggers an alarm signal during the rotational motion, this motion control method can immediately stop all subsequent actions of the driving unit 2 with an extremely high response speed, thereby effectively preventing further deterioration of the fault or safety accidents caused by misoperation. In addition, after the action of the driving unit 2 is stopped, the following steps will be performed in an orderly manner: First, step S1, the rotating mechanism 202 quickly stops its ongoing rotation after receiving the control instruction. This step can timely terminate the potential dangers that may be caused by the rotational motion, such as avoiding collisions with surrounding structures due to loss of control of the rotating parts, so that the shielding device enters a relatively stable state at the first time, laying the foundation for subsequent fault handling and adjustment operations. Then enter step S2, and the lifting mechanism 203 is immediately started, the purpose of which is to lift the bearing part 1 to a preset safe height position. During this process, the lifting mechanism 203 drives the bearing part 1 to move upward in the vertical direction according to the precise parameters and operation logic set by the control system. If after the lifting mechanism 203 is started, there is an abnormal situation that the bearing part 1 fails to be lifted to the preset safe height position or accidentally exceeds the set limit height position, the monitoring alarm mechanism 3 will immediately trigger the alarm mechanism, and the control system will decisively stop all actions of the driving part 2. This mechanism is like a solid safety line, which can timely detect and deal with abnormal conditions during the lifting process, prevent serious problems such as collision with the top of the shielding chamber and interference with other internal structures caused by the abnormal position of the bearing part 1, and effectively ensure the overall safety and structural integrity of the shielding device. Finally, step S3 is executed. After the bearing part 1 is successfully lifted to the preset safe height position, the rotating mechanism 202 is restarted to rotate the bearing part 1 back to the initial position along a specific rotation path. The successful completion of this step marks the end of the entire fault emergency handling process, allowing the shielding device to return to a relatively safe initial state where further fault troubleshooting and repair can be carried out, providing convenient conditions for subsequent equipment maintenance and normal operation, greatly improving the reliability and self-protection capabilities of the shielding device in complex operating environments, and effectively reducing the risk of equipment damage and downtime caused by faults.

[0032] Example 2

[0033] This embodiment provides a semiconductor process equipment, combined with reference Figure 3 to Figure 4As shown, it includes a process chamber 5 and a shielding device described in detail in Example 1, and the shielding device is located at a specific spatial position inside the process chamber 5. Specifically, the process chamber 5 is further subdivided into a main chamber portion 501 and a shielding chamber portion 502 connected thereto. The main chamber portion 501, as the core processing area of ​​the semiconductor process, is equipped with a base 5011 inside. The base 5011 undertakes the key task of carrying the semiconductor workpiece to be processed during the entire process, and the shielding chamber portion 502 is located on one side of the main chamber portion 501. The main function of the rotating mechanism 202 in the shielding device is to drive the bearing portion 1 to rotate. Through the stable operation of the rotating mechanism 202, the bearing portion 1 can drive the shielding disk 101 connected thereto to achieve accurate and efficient movement between the main chamber portion 501 and the shielding chamber portion 502. This movement is not a simple mechanical displacement, but is carried out on the basis of strictly following the semiconductor process steps and timing requirements. For example, in some process steps, the shielding plate 101 needs to be rotated and moved from the shielding chamber part 502 to the main chamber part 501 to perform specific shielding or auxiliary operations on the process in the main chamber part 501. After other steps are completed, the shielding plate 101 needs to be rotated back to the shielding chamber part 502 to prepare for the next round of process cycle or avoid interference with the subsequent process environment in the main chamber part 501. The semiconductor process equipment provided in this embodiment organically combines the shielding device of embodiment 1 with the process chamber 5 to form a comprehensive equipment system with complete functions, stable operation and high adaptability to semiconductor process requirements.

[0034] The present invention has at least the following beneficial effects:

[0035] 1) In terms of structural design, the bearing part 1 of the shielding device cooperates with the lifting drive part 2. The bearing part 1 can reliably bear the shielding disk 101, and the drive part 2 realizes multi-dimensional motion control through the integrated connection seat 201, the rotating mechanism 202 and the lifting mechanism 203. As a key hub, the connection seat 201 not only ensures the stable installation of each component, but its bellows structure can also maintain the vacuum state of the process chamber 5 during lifting and lowering and adapt to spatial changes, thereby improving the environmental adaptability and structural stability of the device. The lifting mechanism 203 and the rotating mechanism 202 work together to enable the bearing part 1 to move accurately in both vertical and horizontal directions, enriching the spatial movement dimension and flexibility of the equipment, and greatly expanding its application range in different process scenarios. The auxiliary lifting mechanism 4 further enhances the stability and coordination of the movement of the components, effectively avoiding the adverse effects of the lifting movement on the rotating mechanism 202, and improving the reliability and accuracy of the overall operation of the device.

[0036] 2) The setting of the monitoring alarm mechanism 3 significantly improves the safety of the equipment. By arranging at least three groups of monitors at key positions and connecting them with the control system with high reliability, all-round and real-time monitoring of the lifting process of the load-bearing part 1 is achieved. In the initial stage, the initial state of the load-bearing part 1 can be accurately monitored to provide a basis for subsequent safe operation; in abnormal situations, it can be discovered and responded to in a timely manner, such as guiding the load-bearing part 1 to transfer safely at a preset safe height position, and stopping the load-bearing part 1 from continuing to rise in time at the extreme height position, effectively preventing the occurrence of accidents such as collisions and jams, reducing the risk of equipment damage, ensuring the safety of the equipment and surrounding configurations, reducing downtime caused by failures, and improving production efficiency and equipment service life.

[0037] 3) The special motion control method provides a solid guarantee for the stable operation of the shielding device under various working conditions. In case of a rotational motion failure, the action of the driving part 2 can be quickly stopped, and then the steps of stopping rotation, lifting the bearing part 1, and returning to the initial position are executed in order, so as to quickly and effectively handle the failure, avoid the deterioration of the failure and the occurrence of safety accidents, and enable the equipment to quickly recover to a maintainable and re-operational state, thereby enhancing the equipment's self-protection ability and ability to cope with complex working conditions, ensuring the continuity and stability of related production processes such as semiconductor processes, and improving the quality and consistency of product manufacturing.

[0038] It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made to the present invention without departing from the principles of the present invention. These improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A shielding device, characterized in that: The invention comprises a bearing part (1) and a liftable driving part (2), wherein the bearing part (1) is used for bearing a shielding disk (101), and the driving part (2) is used for moving the shielding disk (101) to a base (5011) of a process chamber (5), and lifting the shielding disk (101) to a height exceeding a liftable support member (5012) in the base (5011) when a fault occurs; the driving part (2) comprises a connecting seat (201), a rotating mechanism (202) and a lifting mechanism (203), wherein the rotating mechanism (202) and the lifting mechanism (203) are mounted on the connecting seat (201), and the bearing part (1) is connected to the rotating mechanism (202) via a rotating shaft (102) and the connecting seat (201).

2. The shielding device according to claim 1, characterized in that: It also includes a monitoring alarm mechanism (3), which includes at least three groups of monitors, and the monitors are connected to a control system; the monitors are arranged at at least three monitoring positions, the first monitoring position corresponds to the initial height position of the bearing part (1), the second monitoring position corresponds to the preset safety height position of the bearing part (1) above the liftable support member (5012) in the base (5011), and the third monitoring position corresponds to the maximum height position of the bearing part (1) when it is lifted.

3. The shielding device according to claim 1, characterized in that: The rotating mechanism (202) comprises a first transmission device (2021) and a first power source (2022); one end of the first transmission device (2021) is connected to the driving end of the first power source (2022), and the other end is connected to the bearing part (1) via the rotating shaft (102); the connecting seat (201) is provided at the connection between the first transmission device (2021) and the rotating shaft (102).

4. The shielding device according to claim 1, characterized in that: The lifting mechanism (203) comprises a screw rod (2031), a second transmission device (2032) and a second power source (2033); one end of the second transmission device (2032) is connected to the driving end of the second power source (2033), and the other end is connected to the screw rod (2031); a displacement block (2034) threadedly matched with the screw rod (2031) is provided on the connecting seat (201); one end of the screw rod (2031) is threadedly movably connected to the displacement block (2034).

5. The shielding device according to claim 4, characterized in that: The auxiliary lifting mechanism (4) further comprises a first mounting plate (401) arranged parallel to the driving part (2), a slide rail (402) being arranged on the first mounting plate (401), a slider (403) adapted to the slide rail (402) being arranged on the connecting seat (201), and the slider (403) being installed in the slide rail (402).

6. The shielding device according to claim 5, characterized in that: The sliding block (403) is mounted on the connecting seat (201) via a second mounting plate (2011); the upper end surface of the second mounting plate (2011) is connected to the connecting seat (201), and the lower end surface of the second mounting plate (2011) is connected to the rotating mechanism (202).

7. The shielding device according to claim 5, characterized in that: The auxiliary lifting mechanism (4) is provided with a monitoring alarm mechanism (3), and the monitoring alarm mechanism (3) includes a monitor connected to a control system; the monitor includes at least three groups of signal transmitters (301) and one group of signal receivers (302), and the signal receivers (302) are fixedly mounted on the second mounting plate (2011), and the three groups of signal transmitters (301) are sequentially mounted on the slide rail (402), corresponding to the initial height position, the preset safety height position and the limit height position of the bearing part (1).

8. A motion control method for a shielding device, characterized in that: The method is implemented using the shielding device described in any one of claims 1 to 7. When the shielding device fails or triggers an alarm during the rotational movement, the method immediately terminates the subsequent action of the driving part (2) and performs the following steps in sequence: S1. The rotating mechanism (202) stops its rotational movement; S2. The lifting mechanism (203) starts to lift the bearing part (1) to a preset safety height position; S3. The rotating mechanism (202) restarts to rotate the bearing part (1) back to its initial position.

9. The control method according to claim 8, characterized in that: In step S2, if the carrying part (1) fails to be lifted to a preset safe height position or exceeds a preset limit height position after the lifting mechanism (203) is started, the monitoring alarm mechanism (3) immediately triggers an alarm mechanism, and the control system stops all actions of the driving part (2).

10. A semiconductor process equipment, characterized in that: The invention comprises a process chamber (5) and a shielding device according to any one of claims 1 to 7, wherein the shielding device is located in the process chamber (5); the process chamber (5) comprises: a main chamber portion (501) and a shielding chamber portion (502) connected thereto, wherein the shielding chamber portion (502) is located on one side of the main chamber portion (501); a base (5011) is provided in the main chamber portion (501), and a rotating mechanism (202) in the shielding device is used for driving the bearing portion (1) to rotate so that the bearing portion (1) drives the shielding disk (101) to move between the main chamber portion (501) and the shielding chamber portion (502).

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