Precise rotary table motion error measuring device based on three-point method error separation technology

Abstract

The invention discloses a precise rotary table motion error measuring device based on a three-point method error separation technology, and the device comprises a marble table surface which is used for supporting and installing a precise rotary table to be measured; the leveling tool is connected to the table top of the precise rotary table; the standard flat plate cushion block is mounted on the leveling tool; the standard flat plate is arranged on the standard flat plate cushion block; the mounting frame is connected to the marble table top, and axial error measurement or inclination error cross validation measurement of the precise rotary table is achieved by mounting different numbers of displacement sensors. According to the method, the detection mode that machining cannot be conducted in China and only depends on imported high-precision detection rods is abandoned, and a standard flat plate obtained through surface grinding machine grinding or single-point diamond turning machining is replaced to serve as a standard workpiece. And the standard flat plate can be accurately leveled by matching with a leveling tool, so that the mounting inclination of the standard workpiece is reduced. The device has the advantages of being high in measurement accuracy, flexible to operate, easy to adjust, good in adaptability and low in cost.

Description

Technical Field

[0001] The invention relates to the field of precision detection technology, and in particular to a precision turntable motion error measuring device based on a three-point method error separation technology. Background Art

[0002] Motion error is an important technical indicator of precision turntables. This indicator will significantly affect the machining accuracy of precision machining equipment integrated with the precision turntable or the detection accuracy of precision measuring instruments, generally resulting in reduced machining accuracy of precision machining equipment or increased uncertainty of precision measuring instruments. Therefore, motion error measurement must be performed on precision turntables during the development process or before they are put into use.

[0003] At present, the spindle measuring instrument of Lion Precision (Lion) in the United States on the market can measure the motion error of precision turntables. To ensure its measurement accuracy, the Lion spindle measuring instrument is equipped with a high-precision test rod, whose roundness is less than 50 nanometers. The test rod is made of metal and is manufactured through ultra-precision processing. The Lion spindle measuring instrument is expensive, which greatly restricts the popularity of the instrument. In addition, its measurement results include the roundness error of the test rod itself, and accurate measurement is not achieved. In order to reduce costs, some domestic scholars have built a similar measurement system based on the principle of the measuring instrument. However, due to the current domestic processing technology level, high-precision test rods are still imported.

[0004] At present, most precision turntable manufacturers use electronic levels to measure the tilt error of precision turntables. The electronic level is placed at the center of the turntable along the directions of 0°, 90°, 180°, and 270°. The peak and valley values ​​of the readings are defined as the turntable tilt error runout value, which is used to evaluate the turntable tilt error index. This evaluation method is simple to operate and the measuring instrument is moderately priced. However, the turntable tilt error measurement method based on the electronic level has a low resolution of the electronic level and cannot perform dynamic measurement.

[0005] Based on the above technical problems, technicians in this field urgently need to develop a precision turntable motion error measuring device that can achieve dynamic and accurate measurement of tilt error and axial error in the precision turntable motion error indicators. Summary of the invention

[0006] The purpose of the present invention is to provide a precision turntable motion error measuring device based on the three-point method error separation technology, which can realize dynamic and accurate measurement of tilt error and axial error in the precision turntable motion error index.

[0007] In order to achieve the above object, the present invention provides the following technical solutions:

[0008] The present invention provides a precision turntable motion error measuring device based on a three-point method error separation technology, the measuring device comprising:

[0009] A marble tabletop to support and mount the precision turntable to be measured; and

[0010] A leveling tool connected to the table top of the precision turntable;

[0011] A standard flat pad installed on the leveling fixture;

[0012] The measuring device also includes:

[0013] a standard flat plate mounted on the standard flat plate spacer; and

[0014] The mounting frame connected to the marble table is used to mount displacement sensors. By mounting different numbers of the displacement sensors, axial error measurement or tilt error cross-verification measurement of the precision turntable can be achieved.

[0015] Furthermore, the mounting frame includes two support base plates symmetrically connected to the marble table top; and

[0016] a mounting plate support connected to the support base plate;

[0017] A sensor mounting plate is installed on the two mounting plate supports. A displacement sensor is installed at the central hole in the middle of the sensor mounting plate to measure the axial error of the precision turntable. Three displacement sensors are installed at three holes randomly selected from the circumferential holes in the middle of the sensor mounting plate to cross-validate the tilt error of the precision turntable.

[0018] Further, the leveling tool is configured as a split structure, including a lower adapter plate connected to the tabletop of the precision turntable; and

[0019] An upper mounting plate, whose upper end surface forms an annular mounting surface for mounting the standard flat plate pad, and the upper mounting plate and the lower adapter plate are locked by a locking washer and a locking screw;

[0020] Three precision micrometer heads are evenly distributed on the upper mounting plate. Adjusting the extension length of the screws of the three precision micrometer heads can provide height adjustment and parallel adjustment for the upper mounting plate.

[0021] Furthermore, a plurality of connection holes are symmetrically provided at both ends of the sensor mounting plate for connecting the mounting plate support.

[0022] Furthermore, a first mounting hole is provided in the middle of the sensor mounting plate, and the displacement sensor is mounted in the first mounting hole to measure the axial error of the precision turntable;

[0023] A plurality of second mounting holes are provided in the middle of the sensor mounting plate and on the outer circumference of the first mounting hole. Three of the second mounting holes can be randomly selected to install a displacement sensor respectively, so as to perform cross-verification measurement of the tilt error of the precision turntable.

[0024] Furthermore, a row of second connection holes is formed on the support bottom plate for connecting to the marble table top, and waist holes for connecting to the marble table top are symmetrically provided at both ends of the support bottom plate;

[0025] A plurality of third connection holes are opened in the middle of the support bottom plate for connecting the mounting plate support.

[0026] In the above technical solution, the precision turntable motion error measuring device based on the three-point method error separation technology provided by the present invention has the following beneficial effects:

[0027] The precision turntable motion error measuring device based on the three-point error separation technology of the present invention abandons the detection method that relies on high-precision inspection rods that cannot be processed domestically and can only be imported, and instead uses a standard flat plate that can be obtained by surface grinding or single-point diamond turning as the standard workpiece. The standard flat plate can be accurately leveled with a leveling tool to reduce the installation tilt of the standard workpiece. The sensor mounting plate is equipped with a plurality of sensor mounting holes, which can be used to measure the axial error and tilt error of the turntable. In addition, when measuring the tilt error of the turntable, the sensor mounting plate can adapt to the installation of displacement sensors with a variety of angle combinations, which is conducive to cross-verification of the measurement results. And this device has the advantages of high measurement accuracy, flexible operation, easy adjustment, good adaptability and low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0029] Figure 1 A schematic diagram of a combination of a precision turntable motion error measurement device based on a three-point error separation technology provided by an embodiment of the present invention;

[0030] Figure 2 A schematic diagram of the structure of a leveling tool in a precision turntable motion error measurement device based on a three-point method error separation technology provided by an embodiment of the present invention;

[0031] Figure 3 A top view of a sensor mounting plate in a precision turntable motion error measurement device based on a three-point error separation technology provided by an embodiment of the present invention;

[0032] Figure 4 A schematic diagram of a support base plate in a precision turntable motion error measurement device based on a three-point error separation technology provided in an embodiment of the present invention.

[0033] Description of reference numerals:

[0034] 1. Marble table; 2. Precision turntable; 3. Leveling tool; 4. Standard flat plate pad; 5. Standard flat plate; 6. Displacement sensor; 7. Sensor mounting plate; 8. Mounting plate support; 9. Support base plate;

[0035] 3-1, precision micrometer head; 3-2, upper mounting plate; 3-3, lower adapter plate;

[0036] 7-1, second mounting hole; 7-2, first mounting hole; 7-3, connecting hole;

[0037] 9-1, connecting waist hole; 9-2, second connecting hole; 9-3, third connecting hole. DETAILED DESCRIPTION

[0038] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0039] See also Figure 1 to Figure 4 As shown;

[0040] The present invention provides a precision turntable motion error measuring device based on a three-point method error separation technology, the measuring device comprising:

[0041] A marble table 1, used to support and install a precision turntable 2 to be measured; and

[0042] A leveling tool 3 connected to the table top of the precision turntable 2;

[0043] A standard flat pad 4 installed on the leveling tool 3;

[0044] The measuring device also includes:

[0045] A standard plate 5 mounted on the standard plate pad 4, the upper surface of the standard plate 5 being the measurement target surface of the displacement sensor 6, and the leveling fixture 3 being used for carrying or leveling the standard plate pad 4 and the standard plate 5;

[0046] The mounting frame connected to the marble table top 1 is used to mount the displacement sensor 6 . By mounting different numbers of the displacement sensors 6 , the axial error measurement or the tilt error cross-validation measurement of the precision turntable 2 can be realized.

[0047] As a further introduction to this embodiment, the mounting frame includes two support base plates 9 symmetrically connected to the marble table top 1; and

[0048] A mounting plate support 8 connected to the support base plate 9;

[0049] The sensor mounting plate 7 mounted on the two mounting plate supports 8 is a sensor fixture mounting plate. One displacement sensor 6 is mounted on the sensor mounting plate 7 to measure the axial error of the precision turntable 2. Three displacement sensors 6 are mounted on the sensor mounting plate 7 to perform cross-verification measurement of the tilt error of the precision turntable 2. In this embodiment, the displacement sensor 6 is a capacitive displacement sensor.

[0050] As a further introduction to this embodiment, the leveling tool 3 is configured as a split structure, including a lower adapter plate 3-3 connected to the table top of the precision turntable 2; and

[0051] The upper mounting plate 3-2 has an annular mounting surface formed on its upper end surface for mounting the standard flat plate pad 4, and the upper mounting plate 3-2 and the lower adapter plate 3-3 are locked by a locking washer 3-4 and a locking screw 3-5;

[0052] The three precision micrometer heads 3-1 evenly distributed on the upper mounting plate 3-2 can provide height adjustment and parallel adjustment for the upper mounting plate 3-2 by adjusting the extension length of the screws of the three precision micrometer heads 3-1, so that the standard plate 5 can be adjusted to a suitable height and parallel to the surface of the precision turntable 2. After adjustment, the upper mounting plate 3-2 and the lower adapter plate 3-3 are locked by locking washers 3-4 and locking screws 3-5.

[0053] As a further introduction to this embodiment, a plurality of connection holes 7 - 3 are symmetrically provided at both ends of the sensor mounting plate 7 for connecting the mounting plate support 8 .

[0054] As a further introduction to this embodiment, a first mounting hole 7-2 is provided in the middle of the sensor mounting plate 7, and the first mounting hole 7-2 is used to mount the displacement sensor 6 to measure the axial error of the precision turntable 2;

[0055] A plurality of second mounting holes 7-1 are provided in the middle of the sensor mounting plate 7 and on the outer circumference of the first mounting hole 7-2. By selecting any three of the second mounting holes 7-1 and installing a displacement sensor 6 in each of them, the tilt error cross-verification measurement of the precision turntable 2 can be performed.

[0056] The displacement sensor 6 provided in this embodiment can be selectively installed in the three second mounting holes 7-1 for measuring the tilt error in actual use, and the three hole angle combinations can be arbitrarily selected multiple times to perform cross-validation measurement of the turntable tilt error. The displacement sensor 6 can also be installed in the first mounting hole 7-2 for measuring the axial error to measure the turntable axial error.

[0057] As a further introduction to this embodiment, a row of second connecting holes 9-2 are opened on the support base plate 9 for connecting to the marble table top 1, and connecting waist holes 9-1 between the marble table top 1 are symmetrically provided at both ends of the support base plate 9; the connecting waist holes 9-1 can adapt the installation frame to be installed on the marble table top 1 with different hole spacings.

[0058] A plurality of third connection holes 9 - 3 are opened in the middle of the support base plate 9 for connecting the mounting plate support 8 .

[0059] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A precision turntable motion error measurement device based on three-point error separation technology, characterized in that: The measuring device comprises: A marble table (1) for mounting a precision turntable (2) to be measured; and A leveling tool (3) connected to the table top of the precision turntable (2); A standard flat pad (4) mounted on the leveling tool (3); The measuring device also includes: a standard flat plate (5) mounted on the standard flat plate spacer (4); and A mounting frame connected to the marble tabletop (1) is used to mount a displacement sensor (6). By mounting different numbers of the displacement sensors (6), axial error measurement or tilt error cross-verification measurement of the precision turntable (2) can be achieved.

2. The precision turntable motion error measuring device based on the three-point error separation technology according to claim 1 is characterized in that: The mounting frame comprises two support base plates (9) symmetrically connected to the marble table top (1); as well as A mounting plate support (8) connected to the support base plate (9); A sensor mounting plate (7) is mounted on two mounting plate supports (8), and one displacement sensor (6) is mounted on the sensor mounting plate (7) so as to measure the axial error of the precision turntable (2); and three displacement sensors (6) are mounted on the sensor mounting plate (7) so as to cross-verify the tilt error of the precision turntable (2).

3. The precision turntable motion error measuring device based on the three-point error separation technology according to claim 1 is characterized in that: The leveling tool (3) is configured as a split structure, comprising a lower adapter plate (3-3) connected to the tabletop of the precision turntable (2); and The upper mounting plate (3-2) has an upper end surface formed with a ring-shaped mounting surface for mounting the standard flat plate pad (4), and the upper mounting plate (3-2) and the lower adapter plate (3-3) are locked by a locking washer (3-4) and a locking screw (3-5); Three precision differential heads (3-1) are evenly distributed on the upper mounting plate (3-2). Adjusting the extension length of the screws of the three precision differential heads (3-1) can provide height adjustment and parallel adjustment for the upper mounting plate (3-2).

4. The precision turntable motion error measuring device based on the three-point error separation technology according to claim 2 is characterized in that: A plurality of connection holes (7-3) are symmetrically provided at both ends of the sensor mounting plate (7) for connecting to the mounting plate support (8).

5. The precision turntable motion error measuring device based on the three-point error separation technology according to claim 2 is characterized in that: A first mounting hole (7-2) is provided in the middle of the sensor mounting plate (7), and the first mounting hole (7-2) is used to mount the displacement sensor (6) so as to measure the axial error of the precision turntable (2); A plurality of second mounting holes (7-1) are provided in the middle of the sensor mounting plate (7) and on the outer circumference of the first mounting hole (7-2). Three of the second mounting holes (7-1) are selected to respectively mount one of the displacement sensors (6) so as to perform cross-verification measurement of the tilt error of the precision turntable (2).

6. The precision turntable motion error measuring device based on the three-point error separation technology according to claim 1 is characterized in that: The support base plate (9) is provided with a row of second connection holes (9-2) for connecting to the marble table top (1), and waist holes (9-1) for connecting to the marble table top (1) are symmetrically provided at both ends of the support base plate (9); A plurality of third connection holes (9-3) are formed in the middle of the support base plate (9) for connecting to the mounting plate support (8).

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