Anti-vibration structure and method for manufacturing anti-vibration structure

Abstract

Provided are: an anti-vibration structure having desired anti-vibration characteristics; and a method for manufacturing the anti-vibration structure. The anti-vibration structure is fixed to a vibration source and on which a measurement device is placed, and includes a first anti-vibration structure fixed to the vibration source and a second anti-vibration structure overlapping the first anti-vibration structure, the first anti-vibration structure including a first mass body and a first anti-vibration member supporting the first mass body, and the second anti-vibration structure including a second mass body and a second anti-vibration member supporting the second mass body. The second anti-vibration structure includes a second mass body and a second anti-vibration member that supports the second mass body, the measurement device is placed on the second mass body, and a second configuration ratio of the second anti-vibration structure is greater than a first configuration ratio of the first anti-vibration structure.

Description

Technical Field

[0001] The present invention relates to a vibration-proof structure of an inertial measurement device and a method for manufacturing the vibration-proof structure. Background Art

[0002] An inertial measurement unit (IMU) is known that has multiple sensors such as angular velocity sensors or acceleration sensors and is used to measure the displacement of buildings or structures. In the structure of the existing inertial measurement unit, since vibrations from outside that are different from the detection object are transmitted to the sensor, it is impossible to detect accurate measurement data, so a solution has been proposed to set a vibration-proof structure in the inertial measurement unit.

[0003] For example, Patent Document 1 discloses an inertial measurement device having a vibration-proof structure. In the inertial measurement device, a vibration-proof structure is provided for holding a sensor unit including an inertial sensor, and the vibration-proof structure is formed by laminating a first substrate and a second substrate. A vibration-proof member such as a gel bushing is provided between the first substrate and the second substrate to prevent vibration from the outside from being transmitted to the sensor unit.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2022-50915

[0005] However, there is room for improvement in the inertial measurement device of Patent Document 1. Specifically, Patent Document 1 does not describe optimization of the vibration-proof structure in consideration of vibration-proof characteristics including resonance frequency and amplitude magnification, and sufficient vibration-proof performance may not be obtained. Summary of the invention

[0006] That is, a vibration-proof structure having desired vibration-proof characteristics and a method for manufacturing the same are required.

[0007] One scheme of the present application involves a vibration-proof structure which is fixed to a vibration source and carries a measuring device, wherein the structure comprises a first vibration-proof structure fixed to the vibration source and a second vibration-proof structure overlapping the first vibration-proof structure, the first vibration-proof structure comprising a first mass body and a first vibration-proof component supporting the first mass body, the second vibration-proof structure comprising a second mass body and a second vibration-proof component supporting the second mass body, the measuring device is carried on the second mass body, and the second structural ratio of the second vibration-proof structure is greater than the first structural ratio of the first vibration-proof structure.

[0008] One embodiment of the present application relates to a method for manufacturing a vibration isolation structure, wherein the vibration isolation structure includes a first vibration isolation structure fixed to a vibration source and a second vibration isolation structure overlapping the first vibration isolation structure, the first vibration isolation structure includes a first mass body and a first vibration isolation component, the second vibration isolation structure includes a second mass body and a second vibration isolation component, and a measuring device is placed on the second mass body, the method for manufacturing a vibration isolation structure including: a step of acquiring the unit parameter of the vibration isolation component used from a unit parameter database; a step of generating a reference parameter based on a desired resonant frequency and an amplitude magnification; a step of determining three points on coordinates in a correlation between the resonant frequency and the amplitude magnification based on the reference parameter; a step of calculating an approximate straight line in an arbitrary structural ratio Rr based on the three points on the coordinates; a step of dividing the approximate straight line based on a division ratio to calculate the amount of the second mass body and the amount of the second vibration isolation component in the second vibration isolation structure; and a step of outputting the calculated result. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a top view of the vibration-proof structure according to the first embodiment.

[0010] Figure 2 It is a side view of the vibration-proof structure.

[0011] Figure 3 yes Figure 1 A cross-sectional view of the vibration-proof member in section bb.

[0012] Figure 4 This is a schematic diagram that models the vibration-proof structure.

[0013] Figure 5 It is a vibration model diagram used in the design of vibration-proof structures.

[0014] Figure 6 This is a flowchart showing the flow of a method for acquiring a unit parameter.

[0015] Figure 7 This is a schematic diagram of a device for measuring unit parameters.

[0016] Figure 8 is a graph showing an example of gain-frequency characteristics.

[0017] Fig. 9 This is a flowchart showing the flow of a method for designing a vibration-proof structure.

[0018] Fig.10 It is a graph showing an example of correlation between an arbitrary structure ratio Rr and the amplitude magnification factor.

[0019] Fig.11 : is a graph showing an example of the correlation between an arbitrary structure ratio Rr and a resonance frequency.

[0020] Fig.12 : is a graph showing an example of the correlation between the resonance frequency and the amplitude magnification factor using the structure ratio Rr as a parameter.

[0021] Fig.13 It is a top view of the vibration-proof structure involved in Embodiment 2.

[0022] Fig.14 It is a side view of the vibration-proof structure.

[0023] Fig.15 This is a vibration model diagram used for the design of a two-layer vibration-proof structure.

[0024] Fig.16 This is a flowchart showing the flow of a design method of a two-layer vibration-proof structure.

[0025] Fig.17 3 is a graph showing an example of correlation between an arbitrary structure ratio Rr and an amplitude magnification factor in the vibration-proofing structure 0 and the vibration-proofing structure 2.

[0026] Fig.18 3 is a graph showing an example of correlation between an arbitrary structure ratio Rr and a resonance frequency in the vibration-proofing structure 0 and the vibration-proofing structure 2.

[0027] Fig.19 : is a graph showing an example of the correlation between the resonance frequency and the amplitude magnification factor using the structure ratio Rr of the vibration-proof structure 2 as a parameter.

[0028] Fig. 20 yes Fig.19 An enlarged coordinate diagram of the area around the approximate straight line in .

[0029] Fig.21 This is a functional block diagram of a measuring device including a vibration-proof structure.

[0030] Fig. 22 It is a graph showing the correlation between the bandwidth of the measurement device and the gain-frequency characteristic of the vibration isolation structure.

[0031] Fig.23 This is a diagram showing an example of an installation plan of a vibration-proof structure.

[0032] Description of Reference Numerals

[0033] 0…Vibration-proof structure; 1…Vibration-proof structure, vibration model; 2…Vibration-proof structure, vibration model; Rr, Rr1, Rr2…Structural ratio; 3…Elastomer; 3a…Elastomer; 3b…Elastomer; 4…Ring; 5…Washer; 6…Bolt; 8…Vibration-proof member; 9…Approximate straight line; 10…Substrate; 11…Hole; 15…Base substrate; 16…Magnet; 20…Substrate; 41…Sensor; 42…AD conversion unit; 43…LPF; 44…Signal processing unit; 45…Curve; 50…Measuring device; 70-77: Curve; 80: Curve; 81…Sensor; 82…Sensor; 90…Bridge pier; 91…Bridge abutment; 92…Bridge; 93…Plurality of bridge piers; 95…Tram; 98…Measuring device; 100…Vibration-proof structure; 200…Two-layer vibration-proof structure; 200m…Vibration model. DETAILED DESCRIPTION

[0034] Implementation Method 1

[0035] Overview of vibration-proof structure

[0036] Figure 1 It is a top view of the vibration-proof structure according to the present embodiment. Figure 2 It is a side view of the vibration-proof structure. Figure 3 yes Figure 1 A cross-sectional view of the vibration-proof member in section bb.

[0037] The vibration-proof structure 100 of the present embodiment is a pedestal with a vibration-proof function, which is equipped with a plurality of sensors such as an angular velocity sensor or an acceleration sensor, and carries an inertial measurement unit (IMU: Inertial Measurement Unit) for measuring the displacement of a building or a structure, or a measurement device 50. In addition, the measurement device 50 is not limited to an IMU, and may be, for example, an inertial navigation system (INS: Inertial Navigation System), an acceleration sensor, a displacement meter, a gyro sensor, an optical sensor, or an image measurement device. In other words, the measurement device 50 is any one of an inertial measurement device, an inertial navigation device, an acceleration sensor, a displacement meter, a gyro sensor, an optical sensor, and an image measurement device.

[0038] like Figure 1 , Figure 2As shown, a measuring device 50 in a roughly rectangular shape is placed on a rectangular substrate 10. The substrate 10 is mounted on a base substrate 15 via vibration-proof members 8 provided at the four corners of the substrate 10. The base substrate 15 is a metal substrate that is one size larger than the substrate 10, and a plate-shaped magnet 16 having a size roughly the same as that of the base substrate 15 is mounted on the lower surface. The magnet 16 is fixedly attached to a magnetic metal portion of the vibration source. In addition, the magnet 16 is not limited to a plate-shaped magnet, but may also be a coin-shaped magnet. In this case, it is preferred to arrange the coin-shaped magnets at multiple locations of the base substrate 15 including the four corners.

[0039] In addition, in each of the drawings, the X-axis, Y-axis, and Z-axis are illustrated as three axes that are orthogonal to each other. In the present embodiment, the direction in which the long side of the substrate 10 that forms a substantially rectangular shape when viewed from above is extended is set as the positive X direction, the direction in which the short side is extended is set as the positive Y direction, and the height direction of the vibration-proof structure 100 is set as the positive Z direction. The positive X direction and the negative X direction are also collectively referred to as the X-axis direction. The same is true for the Y-axis and the Z-axis. The positive Z direction is also referred to as the top, and the negative Z direction is also referred to as the bottom.

[0040] like Figure 2 As shown, the vibration isolation structure 100 is formed by stacking the substrate 10 on the base substrate 15. The substrate 10 is a flat substrate made of aluminum in a preferred example. In addition, the material of the substrate 10 is not limited to aluminum, and other metal substrates or ceramic substrates can also be used.

[0041] The substrate 10 is fixed to the base substrate 15 via four vibration-isolating members 8. The number of the vibration-isolating members 8 is not limited to four, and may be three, or five or more.

[0042] like Figure 3 As shown, the vibration-proof member 8 is composed of elastic bodies 3a, 3b, a collar 4, a washer 5, a bolt 6, etc., and adopts a vibration-proof structure in which the base plate 10 is clamped by the elastic bodies 3a, 3b.

[0043] In a preferred example, the elastic bodies 3a and 3b are gel bushings, but are not limited to gel bushings, and may be any elastic member, such as silicone rubber, other rubber, or synthetic rubber.

[0044] The elastic body 3a includes a hemispherical portion and a cylindrical portion extending upward from the hemispherical portion, and the cylindrical portion is inserted into the hole 11 of the substrate 10. Through holes through which the collar 4 is inserted are formed in the cylindrical portion and the hemispherical portion.

[0045] The collar 4 is a cylindrical collar, and in a preferred example, is made of brass. In addition, it is not limited to brass, and can be made of, for example, aluminum, other metals, or resins.

[0046] The elastic body 3b is a hemispherical member that forms a pair with the elastic body 3a, and has a hole in the center. The cylindrical portion of the elastic body 3a is inserted into the hole of the elastic body 3b. The combination of the elastic bodies 3a and 3b is also referred to as the elastic body 3.

[0047] In a preferred example, an aluminum washer is used as the washer 5. In addition, it is not limited to aluminum, and other metals or resins may also be used.

[0048] In a preferred example, a stainless steel bolt is used as the bolt 6. In addition, it is not limited to stainless steel, and any metal can be used, such as steel or other metals.

[0049] like Figure 3 As shown, the cylindrical portion of the elastic body 3a is inserted into the hole 11 of the base plate 10, and the elastic body 3b matches the cylindrical portion protruding to the upper part of the hole 11. In addition, with the collar 4 placed in the through hole of the cylindrical portion of the elastic body 3a, the bolt 6 is inserted through the washer 5, and the screw at the front end of the bolt 6 is screwed with the base base plate 15 to form the vibration-proof member 8. Since the vibration-proof member 8 is a type that allows the bolt 6 to pass through, the lateral shaking can be suppressed to a minimum.

[0050] Here, the collar 4 is a compression limiting member, and the bolt 6 is a fixing member. The vibration-proof member 8 is a structure in which the elastic bodies 3a and 3b are compressed by the washers 5 and the bolts 6 and the compression limiting is performed by the collar 4 so that the elastic bodies 3a and 3b are compressed at an appropriate crushing pressure.

[0051] Vibration Modeling of Vibration-Isolated Structures

[0052] Figure 4 This is a schematic diagram that models the vibration-proof structure. Figure 5 It is a vibration model diagram used in the design of vibration-proof structures.

[0053] like Figure 4 As shown, the vibration-proof component 8 can be represented in the vibration model as a vibration model in which the spring rigidity part k and the attenuation part C are connected in parallel. The attenuation part C is a damper, also called the attenuation coefficient C. The other three vibration-proof components 8 are also represented by the same vibration model. In addition, Figure 4 In the figure, it is considered that the base substrate 15 and the vibration source are integrated.

[0054] In the design method of the vibration-proof structure described below, the Figure 4 The four vibration-proof components of the model are concentrated into one Figure 5 The vibration model 0 is used for calculation.

[0055] Obtaining unit parameters

[0056] Figure 6 This is a flowchart showing the flow of a method for acquiring a unit parameter. Figure 7This is a schematic diagram of a device for measuring unit parameters.

[0057] First, as a preparatory work in designing the vibration-proof structure, a method of acquiring unit parameters of the vibration-proof structure will be described.

[0058] In step S11, a vibration-proof component is selected. Specifically, a vibration-proof component that can be used in the designed vibration-proof structure is selected, and unit parameters are individually obtained for the selected vibration-proof component. The vibration-proof component can be a commercially available general component or a specially designed vibration-proof component.

[0059] In step S12, the vibration-proof structure for obtaining the unit parameter is determined. Figure 2 The vibration-proof structure 100 is considered as the determined vibration-proof structure. Figure 5 The unit structure of the vibration model 0. In addition, the vibration model 0 is also referred to as the 0th vibration isolation structure.

[0060] In step S13, the selected vibration-proof member is mounted on the vibration-proof structure 100. Figure 7 The measuring device 98 measures the vibration response characteristics. In detail, Figure 7 As shown, the measuring device 98 includes two sensors 81 and 82, the sensor 82 is mounted on the vibration source, and the sensor 81 is mounted on the upper part of the vibration-proof structure 100. In a preferred example, the vibration source is a vibration table such as an exciter, and the sensors 81 and 82 are acceleration sensors. The measuring device 98 measures the outputs of the two sensors 81 and 82 when the vibration acceleration of the vibration source is frequency-sweeped.

[0061] In step S14, the vibration propagation frequency characteristic G is obtained by equation (1): AB Specifically, based on the frequency characteristics of the vibration responses obtained after FFT processing of the acquired vibration responses, the frequency characteristics Ga(f) of the vibration response of the sensor 81 are divided by the frequency characteristics Gb(f) of the vibration response of the sensor 82 to obtain the vibration propagation frequency characteristics GAB(f).

[0062] [Mathematical formula 1]

[0063]

[0064] Figure 8 : is a graph showing an example of gain-frequency characteristics, where the horizontal axis represents frequency (Hz) and the vertical axis represents gain (db). Figure 8 A curve 70 is an example of a curve showing the gain-frequency characteristic of vibration propagation obtained in step S14 , and shows the gain-frequency characteristic in the vibration model 0 using the selected vibration isolating member.

[0065] In the curve 70 , there is a peak near a frequency exceeding 20 Hz. As shown by a dotted line, the frequency of the peak is the resonance frequency f0 , and the peak is the amplitude magnification T0 .

[0066] In step S15 , the resonance frequency and the amplitude magnification factor in the measured gain-frequency characteristics are calculated, and the mass m0 of the mass body, the vibration isolating member S0 , the resonance frequency f0 , and the amplitude magnification factor T0 are used as a parameter set as unit parameters.

[0067] In other words, the unit parameter is a combination of data including the resonant frequency calculated based on the gain-frequency characteristics of the 0th vibration isolation structure, the amplitude amplification factor at the resonant frequency, the amount of the vibration isolation component, and the amount of the mass body in the 0th vibration isolation structure having a vibration isolation component connected to the vibration source and a mass body supported by the vibration isolation component.

[0068] In step S16 , the obtained unit parameter set is stored in the database as unit parameter data in various vibration isolation components.

[0069] In other words, a method for generating a unit parameter database includes, in a 0th vibration isolation structure having a vibration isolation component connected to a vibration source and a mass body supported by the vibration isolation component: a process of measuring the gain-frequency characteristics in the 0th vibration isolation structure; a process of calculating the resonant frequency and the amplitude amplification factor based on the measurement results; a unit parameter generation process of generating a combination of the calculated resonant frequency and the amplitude amplification factor, and the amount of the vibration isolation component and the amount of the mass body; and a process of storing the generated unit parameters in a database.

[0070] Design method of 1-layer vibration-proof structure

[0071] Fig. 9 This is a flowchart showing the flow of a method for designing a vibration-proof structure.

[0072] Here, for those who have Figure 2 The following describes a method for designing a single-layer vibration-proof structure for a single substrate 10. The method for designing a vibration-proof structure is also referred to as a method for manufacturing a vibration-proof structure.

[0073] In step S101, the vibration-proof characteristics to be designed are determined, including the maximum allowable amplitude amplification factor, the minimum allowable resonance frequency, the desired frequency of increase in attenuation rate, and the minimum number of vibration-proof components to be used.

[0074] In step S102, the vibration isolation member to be used is selected. The vibration isolation member is selected from the members for which the unit parameters have been acquired. However, when using a vibration isolation member that is not registered in the database, the unit parameters are first acquired and added to the database in advance.

[0075] In step S103, the unit parameter corresponding to the vibration-isolating member to be used is referenced from the database. Figure 7 In the vibration model 0 of FIG. 1 , the mass m0 of the mass body, the vibration isolating member S0 , the resonance frequency f0 , and the amplitude magnification T0 are referenced. The ratio of the resonance frequency f0 to the amplitude magnification T0 is set to a structural ratio Rref=1.

[0076] In step S104 , a correlation graph between the resonance frequency and the amplitude amplification factor is generated based on the referenced unit parameter.

[0077] First, in Figure 7 In the vibration model 0, the mass as a unit is set to mass m0, an arbitrary mass is set to mass m, and a mass ratio mr to the mass as a unit is set to mr=m / m0.

[0078] Furthermore, let a vibration isolating member serving as a unit be a vibration isolating member S0, let an arbitrary vibration isolating member be a vibration isolating member S, and let a vibration isolating member ratio Sr with respect to the vibration isolating member serving as a unit be Sr=S / S0.

[0079] Then, the structure ratio Rr is defined based on the mass ratio mr and the vibration-isolating member ratio Sr. The structure ratio Rr is expressed by mathematical formula (2).

[0080] [Mathematical formula 2]

[0081]

[0082] As described above, the structural ratio Rr in the single-layer vibration model 0 is the ratio obtained by dividing the vibration-isolating member ratio Sr by the mass ratio mr. The definition of the structural ratio is the same in the two-layer vibration model and the n-layer vibration model with two or more layers described later.

[0083] In other words, the nth vibration-proof structure including the first vibration-proof structure and / or the second vibration-proof structure includes an nth mass body and an nth vibration-proof component, and the nth structure ratio of the nth vibration-proof structure is a mass ratio obtained by dividing the mass of the mass body with a unit parameter used as a reference by the mass of the nth mass body, a vibration-proof component ratio obtained by dividing the amount of the nth vibration-proof component with a unit parameter used as a reference by the vibration-proof component, and a ratio obtained by dividing the vibration-proof component ratio by the mass ratio. In addition, the nth mass body is a component having an elastic modulus greater than the elastic modulus of the elastic body, and the amount of the nth mass body is a weight. In addition, in a preferred embodiment, the component having a large elastic modulus is a substrate.

[0084] Based on the referenced unit parameter, the structure ratio Rref of the vibration isolation structure is obtained by using the mass m0 and the structure ratio Rr in the vibration isolation member S0 as units. The structure ratio Rref is expressed by mathematical formula (3).

[0085] [Mathematical formula 3]

[0086]

[0087] When the resonance frequency in the structure ratio Rref is set to the resonance frequency f0(Rref) and the amplitude magnification is set to the amplitude magnification T0(Rref), the amplitude magnification Test(Rr) of an arbitrary structure ratio Rr is calculated based on the mathematical formula (4) as an approximate formula.

[0088] [Formula 4]

[0089]

[0090] Then, the resonance frequency fest(Rr) of an arbitrary structure ratio Rr is calculated based on the mathematical formula (5) which is an approximate formula.

[0091] [Mathematical formula 5]

[0092]

[0093] Fig.10 : This is a graph showing an example of correlation between an arbitrary structure ratio Rr and an amplitude magnification factor, where the structure ratio (Rr) is represented on the horizontal axis and the amplitude increase rate is represented on the vertical axis. Fig.11 : is a graph showing an example of correlation between an arbitrary structure ratio Rr and a resonance frequency, where the structure ratio (Rr) is plotted on the horizontal axis and the resonance frequency (Hz) is plotted on the vertical axis.

[0094] like Fig.10 As shown in the curve 71, when the structure ratio Rr becomes larger, the amplitude amplification becomes smaller. On the other hand, Fig.11 As shown in the curve 72, it can be seen that when the structure ratio Rr becomes larger, the resonance frequency becomes higher.

[0095] Fig.12 : This is a graph showing an example of correlation between the resonance frequency and the amplitude magnification factor using the structure ratio Rr as a parameter, where the resonance frequency (Hz) is represented on the horizontal axis and the amplitude increase rate is represented on the vertical axis.

[0096] exist Fig.12 The curve 73 of FIG. 7 shows a point where the structure ratio Rr=1 and a point where the structure ratio Rr=2.5. The curve 73 allows selection of a structure ratio Rr that can obtain a resonant frequency / amplitude amplification factor close to the desired vibration-proofing characteristics. The curve 73 is referred to as a resonant frequency / amplitude amplification factor correlation graph.

[0097] In step S105 , a point of resonance frequency / amplitude magnification factor close to the conditions of desired vibration-proof characteristics is selected on the generated resonance frequency / amplitude magnification factor correlation graph.

[0098] In step S106, the mass and the vibration-isolating member are determined based on the arbitrary structural ratio Rrs corresponding to the selected point. Specifically, based on the arbitrary structural ratio Rrs, the mass km0 and the vibration-isolating member jS0 are obtained using equation (6) to determine the arbitrary mass and vibration-isolating member distribution ratio.

[0099] [Mathematical formula 6]

[0100]

[0101] Here, it is assumed that n=j / k, n≥j≥1, and 1 / n≤k≤1.

[0102] In a preferred example, the amount of vibration-proof components is the number of vibration-proof components. For example, in the case of the structural ratio Rr=2.5 in the curve 73, the multiplier n relative to the reference structural ratio is 2.5, and this 2.5 is distributed between j and k. When j is set to 1, k is 1 / 2.5.

[0103] In this case, the vibration-proof component can be formed with a mass that is 1 / 2.5 greater than the mass of the vibration-proof structure measured by the unit parameter, and the number of vibration-proof components is 4. In addition, it is not limited to the number of vibration-proof components, and for example, it can be the volume of the elastic body of the vibration-proof component or the contact area between the elastic body and the substrate.

[0104] In other words, the amount of the n-th vibration isolating member is any one of the number of the vibration isolating members, the volume of the elastic body of the vibration isolating member, or the contact area between the elastic body and the n-th mass body.

[0105] In step S107, it is determined whether the calculated mass and vibration-proof member are appropriate. If optimization is required, the process returns to step S101 to calculate again.

[0106] In step S108, the result derived in step S106 is output.

[0107] As described above, according to the vibration-proof structure and the method for manufacturing the vibration-proof structure of the present embodiment, the following effects can be obtained.

[0108] In the past, when designing a vibration-proof structure, a vibration-proof component that seemed to be usable was selected, assembled into the vibration-proof structure, and repeatedly evaluated and tested separately, which resulted in the design being implemented in an incorrect manner. This is because, in commercially available vibration-proof components, since the vibration characteristic parameters are not disclosed and are not easy to know, the only method to design the vibration-proof structure is to repeatedly conduct trial production experiments. Therefore, the design period is long and costs money. In addition, since the vibration-proofing in the inertial measurement device is different from the frequency domain in which the general vibration-proofing is performed, there is no method for optimizing the vibration-proofing structure for good attenuation characteristics (no increase in resonance gain) in the measurement device.

[0109] In contrast, according to the manufacturing method of the vibration-proof structure of the present embodiment, a database of unit parameters is generated in advance for a plurality of selectable vibration-proof components, and a correlation graph of resonant frequency / amplitude amplification factor with the structural ratio as a parameter is generated using the unit parameters of the database. By referring to the correlation graph, a structural ratio of resonant frequency / amplitude amplification factor that is close to the conditions for the desired vibration-proof characteristics can be selected.

[0110] Therefore, it is possible to design a vibration-proof structure having desired attenuation characteristics (no increase in resonance amplification factor and a large attenuation factor) in a short period of time, and it is also possible to suppress costs.

[0111] Therefore, it is possible to provide a vibration-proof structure having desired vibration-proof characteristics and a method for manufacturing the same.

[0112] Implementation Method 2

[0113] 2-layer anti-vibration structure

[0114] Fig.13 is a top view of the vibration-proof structure according to Embodiment 2, and Figure 1 correspond. Fig.14 is a side view of the vibration isolation structure, Figure 2 correspond.

[0115] In the above embodiment, the vibration-proof structure 100 is described as a single-layer vibration-proof structure in which the measuring device 50 is placed on the substrate 10 having the vibration-proof member 8, but the present invention is not limited thereto and may be a two-layer vibration-proof structure. Hereinafter, the same reference numerals are given to the same parts as those in the above embodiment, and repeated descriptions are omitted.

[0116] like Fig.13 , Fig.14 As shown, the vibration-proof structure 200 of this embodiment further includes a substrate 20 between the base substrate 15 and the substrate 10. The planar dimensions of the substrate 20 are substantially the same as those of the base substrate 15, and vibration-proof members 8 are provided at the four corners thereof. The bolts 6 ( Figure 3 ) is screwed to the base substrate 15. The base substrate 20 is fixed to the base substrate 15 via four vibration-proof members 8. The base substrate 20 is made of the same material as the base substrate 10.

[0117] like Fig.14 As shown, the bolts 6 of the vibration-proof member 8 at four locations of the base plate 10 ( Figure 3 ) is screwed with the substrate 20. The substrate 10 is fixed to the substrate 20 via four vibration-proof members 8 in a state where the measuring device 50 is placed. In this way, the vibration-proof structure 200 becomes a vibration-proof structure of a two-layer structure in which the substrate 20 and the substrate 10 are superimposed. In addition, the number of vibration-proof members 8 in each layer is not limited to 4, and can be 3, or 5 or more.

[0118] Vibration modeling of a two-layer vibration-proof structure

[0119] Fig.15 This is a vibration model diagram used for the design of a two-layer vibration-proof structure. Figure 5 correspond.

[0120] like Fig.15 As shown, when the two-layer vibration-proof structure 200 is vibration-modeled, it becomes a vibration model 200m in which the vibration model 1 and the vibration model 2 are stacked. The parameters of the vibration model 1 are mass m1 and the vibration-proof component S1. The parameters of the vibration model 2 are mass m2 and the vibration-proof component S2. In addition, the vibration model 1 is also referred to as the vibration-proof structure 1, and the vibration model 2 is also referred to as the vibration-proof structure 2.

[0121] In other words, it is a vibration-proofing structure 200 fixed to a vibration source and carrying a measuring device 50, and the vibration-proofing structure 200 includes a vibration-proofing structure 1 as a first vibration-proofing structure fixed to the vibration source, and a vibration-proofing structure 2 as a second vibration-proofing structure overlapping with the first vibration-proofing structure, the vibration-proofing structure 1 includes a mass m1 as a first mass body and a vibration-proofing component S1 as a first vibration-proofing component, the vibration-proofing structure 2 includes a mass m2 as a second mass body and a vibration-proofing component S2 as a second vibration-proofing component, and the measuring device 50 is carried on the second mass body.

[0122] Design method of two-layer vibration-proof structure

[0123] Fig.16 is a flowchart showing the flow of a method for designing a two-layer vibration-proof structure, and Fig. 9 Here, refer to Fig.15 The design method of the two-layer vibration-proof structure is described using the vibration model 200m. The design method of the vibration-proof structure is also referred to as a manufacturing method of the vibration-proof structure.

[0124] First, steps S201 to S203 and Fig. 9 Specifically, the vibration isolation characteristics to be designed are determined in step S201, the vibration isolation components to be used are selected in step S202, and the unit parameters corresponding to the vibration isolation components to be used are referenced from the database in step S203.

[0125] In step S204, for Figure 5 A correlation graph between the amplitude amplification factor and the resonance frequency when the structure ratio Rr is arbitrarily changed is generated for the vibration-proof structure 0. The amplitude amplification factor Test0 (Rr) of an arbitrary structure ratio Rr is calculated based on the approximate formula (7).

[0126] [Mathematical formula 7]

[0127]

[0128] In addition, the resonance frequency fest0 (Rr0) of an arbitrary structure ratio Rr0 is calculated based on the equation (8) which is an approximate equation.

[0129] [Mathematical formula 8]

[0130]

[0131] Next, a correlation graph is generated between the amplitude magnification and the resonance frequency when the structural ratio of the vibration isolation structure 2 is changed. In addition, the structural ratio Rr0=Rr1=Rr2, the vibration isolation member S0=S1=S2, or the mass m0=m1=m2.

[0132] The amplitude magnification factor T2ref when the structural ratio Rr1=Rr2=1 is T2ref=C T2 ×T0. Where, let coefficient C T2 = 2. The resonance frequency f2ref of the anti-vibration structure 2 is f2ref = 2 / πf0.

[0133] The amplitude magnification factor T2Rr of the vibration-proof structure 2 with an arbitrary structure ratio Rr1=Rr2=Rr is calculated based on the approximate formula (9). The resonance frequency f2(Rr) is calculated based on the approximate formula (10).

[0134] [Mathematical formula 9]

[0135]

[0136] Fig.17 is a graph showing an example of correlation between an arbitrary structure ratio Rr and an amplitude magnification factor in the vibration-proof structure 0 and the vibration-proof structure 2, and Fig.10 Curve 74 is the curve of the anti-vibration structure 0, and curve 75 is the curve of the anti-vibration structure 2.

[0137] Fig.18 is a graph showing an example of the correlation between the arbitrary structure ratio Rr and the resonance frequency in the vibration-proof structure 0 and the vibration-proof structure 2, and Fig.11 Curve 76 is the curve of the anti-vibration structure 0, and curve 77 is the curve of the anti-vibration structure 2.

[0138] In step S205, according to the Fig.17 , Fig.18 The correlation curve between the arbitrary structure ratio Rr and the amplitude amplification factor / resonance frequency in the vibration-proof structure 0 and the vibration-proof structure 2 shown is selected, and the structure ratio Rrs including the desired resonance frequency fp and the amplitude amplification factor Tp is selected, and the unit parameters of the vibration-proof structure 0 and the vibration-proof structure 1 are set again.

[0139] The structure ratio Rrs is selected so that the desired amplitude magnification Tp is included in the straight line connecting the amplitude magnification Test0 (Rr) of the vibration isolation structure 0 and the amplitude magnification T2 (Rr) of the vibration isolation structure 2 using the structure ratio Rr as a parameter. The correlation between them is expressed by the following equation.

[0140] Test0(Rrs)≤Tp≤T2(Rrs)

[0141] The structure ratio Rrs is selected so that the desired resonance frequency fp is included in the straight line connecting the resonance frequency fest0 (Rr) of the vibration isolation structure 0 and the resonance frequency f2 (Rr) of the vibration isolation structure 2 using the structure ratio Rr as a parameter. The correlation between them is expressed by the following equation.

[0142] f2(Rrs)≤fp≤fest0(Rrs)

[0143] Then, the selected structure ratio Rrs is updated to the structure ratio Rr0 of the vibration isolation structure 0. The resonance frequency fest0 (Rrs) and the amplitude magnification Test0 (Rrs) of the vibration isolation structure 0 at this time are set as the unit parameters of the vibration isolation structure 0 as the resonance frequency f0s and the amplitude magnification T0s.

[0144] Based on the selected structure ratio Rrs, the mass km0 of the anti-vibration structure 0 and the amount jS0 of the anti-vibration member are determined by mathematical formula (11).

[0145] [Formula 10]

[0146]

[0147] Here, it is assumed that n=j / k, n≥j≥1, and 1 / n≤k≤1.

[0148] The selected structure ratio Rrs, the allocated mass km0, and the amount jS0 of the vibration-proofing members are reset to unit parameters of the vibration-proofing structure 0, the vibration-proofing structure 1, and the vibration-proofing structure 2 as shown in the following equation.

[0149] Rr0=Rr1=Rr2=1

[0150] S0s→S o =S1=S2

[0151] m 0S →M0=M1=M2

[0152] In step S206, based on the unit parameter of the vibration-proof structure 0, the amplitude magnification factor T when the structure ratio Rr0 = 0.5 is calculated by using equation (12). 0（Rr0=0.5） , the resonant frequency f is calculated by mathematical formula (13): 0（Rr0=0.5） .

[0153] [Mathematical formula 11]

[0154]

[0155] Next, based on the fact that the unit parameters of the vibration-proofing structures 1 and 2 are the same, the amplitude magnification factor T of the vibration-proofing structure 2 when the structure ratio Rr2 = 1 is calculated from the resonance frequency f0s and the amplitude magnification factor T0s of the vibration-proofing structure 0 by the following formula: 2A（Rr2=1） , resonant frequency f 2A（Rr2=1） . T 2A（Rr2=1） =C T2 ×T 0S

[0156] f 2A（Rr2=1） =2 / π×f 0S

[0157] Fig.19 is a graph showing an example of the correlation between the resonance frequency and the amplitude magnification factor using the structural ratio Rr of the vibration-proof structure 2 as a parameter, and Fig.12 correspond. Fig. 20 yes Fig.19 An enlarged coordinate diagram of the area around the approximate straight line in .

[0158] According to the above, if Fig.19 As shown in the example of the range of the correlation curve, the following three points on the coordinates of the resonance frequency / amplitude magnification factor are determined.

[0159] Point a; (f 0s , T 0s )

[0160] Point b; (f 0（Rr0=0.5） , T 0（Rr0=0.5） )

[0161] Point c; (f 2A（Rr2=1） , T 2A（Rr2=1） )

[0162] In step S207 , the structure ratio Rr in the vibration isolation structure 2 is changed within the range of n≧1. Refer to equation (14).

[0163] [Mathematical formula 12]

[0164]

[0165] Here, it is assumed that n=j / k, n≥j≥1, and 1 / n≤k≤1.

[0166] Here, when the mass m2 is changed so that j=1 and 1 / n=k, the amplitude magnification T of the vibration isolation structure 2 is 2BEST（Rr） and the resonant frequency f 2BEST（Rr）The approximate value of changes from point c to point b. Refer to equation (15) and equation (16).

[0167] [Mathematical formula 13]

[0168]

[0169] Among them, C T2B , C F2B is a power coefficient, and is assumed to be a change when the structure ratio Rr represented by a value from -1 to -0.7 is used as a parameter.

[0170] The amplitude magnification factor T of the vibration-proof structure 2 at any distribution ratio in the structure ratio Rr 2est（Rr） and the resonant frequency f 2est（Rr） The approximate value is through Fig.19 The point d in the correlation curve (f 2BEST（Rr） , T 2BEST（Rr） ) and point e (f 2Cest（Rr） , T 2Cest（Rr） ) is an approximate straight line 9. The approximate formula is mathematical formula (17).

[0171] [Mathematical formula 14]

[0172]

[0173] The resonant frequency is set to f 2Cest（Rr） ≤f 2est（Rr） ≤f 2BEST（Rr） range.

[0174] Here, in Fig.19 In the virtual triangle with point c as the vertex and including point a and point b, as shown by the arrow, from point c toward the base connecting point a and point b, the second structure ratio Rr2 of the vibration-proof structure 2 is greater than the first structure ratio of the vibration-proof structure 1.

[0175] In other words, the vibration isolation structure 200 includes the vibration isolation structure 1 fixed to the vibration source and the vibration isolation structure 2 overlapping the vibration isolation structure 1 , and the second structure ratio of the vibration isolation structure 2 is greater than the first structure ratio of the vibration isolation structure 1 .

[0176] In step S208 , the distribution ratio of the mass m2 and the vibration isolating member S2 when the structural ratio Rr=n of the vibration isolating structure 2 is determined by equation (18).

[0177] [Mathematical formula 15]

[0178]

[0179] Here, it is assumed that n=j / k, n≥j≥1, and 1 / n≤k≤1.

[0180] In step S209, the resonant frequency and the amplitude magnification factor after dividing the approximate straight line 9 according to the division ratio are calculated. When the structure ratio Rr=n, the ratio of dividing the range of 1 / n≤k≤1 is set as the division ratio kr. The division ratio kr is obtained by equation (19).

[0181] [Formula 16]

[0182]

[0183] The ratio at which the frequency difference between the point e and the point d of the approximate straight line 9 is divided is referred to as the division ratio Fr. The division ratio Fr is obtained by the mathematical formula (20).

[0184] [Mathematical formula 17]

[0185]

[0186] When it is assumed that the division ratio kr is proportional to the division ratio Fr, the relationship is as shown in equation (21).

[0187] [Mathematical formula 18]

[0188]

[0189] Then, the resonance frequency f when the mass is divided by the division ratio kr is 2est（nRr2） It is obtained by mathematical formula (22). Amplitude magnification T 2est（nRr2） It is obtained by using the mathematical formula (23) as an approximate formula.

[0190] [Mathematical formula 19]

[0191]

[0192] The distribution ratio of the vibration-isolating member S2 is obtained by j=nk=kr(n-1)+1.

[0193] In step S210, it is determined whether the calculated mass and vibration-proof member are appropriate. If optimization is required, the process returns to step S201 for recalculation.

[0194] In step S211, the result derived in the above is output.

[0195] In other words, in a manufacturing method of a vibration isolation structure, the vibration isolation structure includes a first vibration isolation structure fixed to a vibration source and a second vibration isolation structure overlapping the first vibration isolation structure, the first vibration isolation structure includes a first mass body and a first vibration isolation component, the second vibration isolation structure includes a second mass body and a second vibration isolation component, and a measuring device is placed on a second substrate. In the manufacturing method of the vibration isolation structure, the steps include: a process of acquiring unit parameters of the vibration isolation component used from a unit parameter database; a process of generating reference parameters based on a desired resonant frequency and an amplitude amplification factor; a process of determining three points on coordinates in a correlation between the resonant frequency and the amplitude amplification factor based on the reference parameters; a process of calculating an approximate straight line in an arbitrary structural ratio Rr based on the three points on the coordinates; a process of dividing the approximate straight line based on a division ratio to calculate the amount of the second mass body and the amount of the second vibration isolation component in the second vibration isolation structure; and a process of outputting the calculated results.

[0196] Relationship with the bandwidth of the measuring device

[0197] Fig.21 This is a functional block diagram of a measuring device including a vibration-proof structure. Fig. 22 is a graph showing the correlation between the bandwidth of the measuring device and the gain-frequency characteristic of the vibration-proof structure, and Figure 8 correspond.

[0198] like Fig.21 As shown, the measuring device 50 includes a sensor 41, an AD converter 42, an LPF 43, a signal processing unit 44, etc. The sensor 41 is an inertial sensor such as an acceleration sensor or an angular velocity sensor.

[0199] like Fig.21 As shown, vibration is input to the sensor 41 via the vibration-proof structure having the vibration-proof member 8. The detection signal of the sensor 41 is AD-converted by the AD conversion unit 42 and input to the signal processing unit 44 via the LPF 43 as a low-pass filter.

[0200] Fig. 22 The curve 80 is a curve showing the gain frequency characteristic of the anti-vibration structure, and the curve 45 is a curve showing the cutoff frequency characteristic of the LPF 43. The curve 80 shows the gain frequency characteristic of the second-layer anti-vibration structure 2 in the two-layer anti-vibration structure.

[0201] like Fig. 22 As shown, in the vibration isolation structure 200, in a preferred example, when the sampling frequency of the measuring device 50 is set to the frequency fsmp, 1 / 2 of the frequency fsmp (frequency fsmp / 2) is set to be greater than the resonance frequency fo of the vibration isolation structure 2, and the cutoff frequency f of the LPF 43 is set to be greater than LPF It is set to be lower than the resonance frequency fo of the anti-vibration structure 2 .

[0202] The reason for making the resonance frequency fo of the vibration-proof structure 2 lower than the Nyquist frequency of the sampling frequency fsmp of the measuring device 50 is to reduce the influence of foldback in the AD conversion of the AD converter 42. LPF The reason for setting the frequency to be equal to or lower than the resonance frequency fo of the vibration-proof structure 2 is to prevent the output gain of the measuring device 50 from being affected by the amplitude amplification factor.

[0203] In other words, the resonance frequency in the anti-vibration structure 200 is lower than a frequency of ½ of the sampling frequency fsmp of the measuring device 50 , and is higher than the upper limit of the output frequency band of the measuring device 50 .

[0204] Example of installing a vibration-proof structure

[0205] Fig.23 This is a diagram showing an example of an installation plan of a vibration-proof structure.

[0206] like Fig.23 As shown, in a preferred example, the vibration-proof structure 200 on which the measuring device 50 is mounted is installed on a bridge 92 of a pier 90 of a railway.

[0207] The bridge pier 90 is configured by, for example, bridging a bridge 92 over a pair of abutments 91 provided on both sides of a river. A plurality of bridge piers 93 are provided in the middle of the bridge 92 .

[0208] like Fig.23 As shown, one anti-vibration structure 200 is provided on the upper surface of the bridge 92 and one is provided on the lower surface. In addition, multiple anti-vibration structures 200 may be provided on the upper surface and the lower surface. In a preferred embodiment, the anti-vibration structure 200 is adsorbed and fixed with magnets 16 ( Fig.14 ). In addition, the base substrate 15 may be fixed to the bridge 92 by screws without being limited to the adsorption based on magnetic force, or may be fixed by bonding with an adhesive.

[0209] In this way, by installing the anti-vibration structure 200 on the bridge pier 90, the deflection amount of the bridge pier 90 generated when the electric car 95 passes through can be measured as the displacement amount.

[0210] Furthermore, the vibration-proof structure 200 is not limited to being installed on bridge piers, but can also be installed on buildings such as buildings, roads, towers, electric poles, reservoirs and other artificial structures. In addition, these structures can also include natural structures such as mountains, rivers, cliffs, etc. In addition, the vibration-proof structure 200 is not limited to being installed on structures, but can also be installed on mobile bodies such as two-wheeled vehicles, automobiles, agricultural vehicles such as tractors, or construction vehicles such as bulldozers.

[0211] As described above, according to the vibration-proof structure and the method for manufacturing the vibration-proof structure of the present embodiment, in addition to the effects of the first embodiment, the following effects can be obtained.

[0212] The manufacturing method of a two-layer vibration-proof structure includes: a process of acquiring unit parameters of the vibration-proof components used from a unit parameter database; a process of generating reference parameters based on a desired resonant frequency and an amplitude magnification factor; a process of determining three points on coordinates in a correlation between the resonant frequency and the amplitude magnification factor based on the reference parameters; a process of calculating an approximate straight line in an arbitrary structural ratio Rr based on the three points on the coordinates; a process of dividing the approximate straight line based on a division ratio to calculate the amount of the second mass body and the amount of the second vibration-proof component in the second vibration-proof structure; and a process of outputting the calculated results.

[0213] Thus, even in a two-layer vibration-proof structure, a structural ratio of resonance frequency / amplitude magnification factor that can obtain conditions close to the desired vibration-proof characteristics can be selected. Therefore, a vibration-proof structure that can achieve the desired attenuation characteristics (no increase in resonance magnification factor, large attenuation rate) can be designed in a short period of time, and costs can also be suppressed.

[0214] Therefore, it is possible to provide a vibration-proof structure having desired vibration-proof characteristics and a method for manufacturing the same.

[0215] In addition, the step of generating the reference parameter is a step of acquiring the unit parameter of the vibration isolation member used from a database, calculating a second amplitude magnification factor obtained by multiplying the first amplitude magnification factor by a predetermined first coefficient based on the first resonance frequency and the first amplitude magnification factor of the unit parameter, calculating a second resonance frequency obtained by multiplying the first resonance frequency by 2 / π, and calculating a structural ratio, the first resonance frequency, and the first resonance frequency based on a structural ratio of a value of the standardized vibration isolation member and a value of the standardized mass body obtained by standardizing the amount of the first vibration isolation member and the amount of the first mass body according to the amount of the first vibration isolation member and the amount of the first mass body according to the unit parameter. The amplitude amplification factor, the second resonant frequency and the correlation of the second amplitude amplification factor are selected, and a structural ratio is selected in which the desired resonant frequency is between the first resonant frequency and the second resonant frequency or the desired amplitude amplification factor is between the first amplitude amplification factor and the second amplitude amplification factor. Based on the amount of the first mass body and the amount of the first vibration isolation component of the obtained unit parameters, the selected structural ratio, and the desired distribution ratio, the amount of the second mass body and the amount of the second vibration isolation component are determined, and the combination of the second resonant frequency, the second amplitude amplification factor, the amount of the second mass body and the amount of the second vibration isolation component is set as a reference parameter of the structural ratio Rr=1.

[0216] In addition, the process of determining three points on the coordinates includes the following processes: based on the second resonant frequency and the second amplitude magnification of the reference parameters, calculating the third amplitude magnification from the structure ratio = 0.5 and the second amplitude magnification, calculating the third resonant frequency from the structure ratio = 0.5, the third amplitude magnification and the second resonant frequency, calculating the fourth amplitude magnification obtained by multiplying the second amplitude magnification by a predetermined first coefficient, calculating the fourth resonant frequency obtained by multiplying the second resonant frequency by 2 / π, and determining the second resonant frequency and the second amplitude magnification, the third resonant frequency and the third amplitude magnification, the fourth resonant frequency, and the three points on the coordinates of the fourth amplitude magnification.

[0217] In addition, the steps of calculating the approximate straight line are as follows: subtracting from the second amplitude magnification a fifth amplitude magnification a value obtained by multiplying a value obtained by subtracting the fourth amplitude magnification from the second amplitude magnification by a value raised to the power of the first power exponent with the first structural ratio as the base; subtracting from the second resonance frequency a fifth resonance frequency a value obtained by multiplying a value obtained by subtracting the fourth resonance frequency from the second resonance frequency by a value raised to the power of the second power exponent with the first structural ratio as the base; and subtracting from the third amplitude magnification a value obtained by subtracting the fourth amplitude magnification from the third amplitude magnification. In the embodiment of the present invention, a sixth amplitude magnification factor is obtained by multiplying a value obtained by raising the first structural ratio to the power of the third power; and a sixth resonance frequency is obtained by subtracting a value obtained by subtracting the fourth resonance frequency from the third resonance frequency and multiplying a value obtained by raising the first structural ratio to the power of the fourth power, from the third resonance frequency. In the orthogonal coordinates of the resonance frequency and the amplitude magnification factor, a straight line passing through a point of the fifth resonance frequency and the fifth amplitude magnification factor and a straight line passing through a point of the sixth resonance frequency and the sixth amplitude magnification factor are set as approximate straight lines in an arbitrary structural ratio.

[0218] In addition, the process of calculating the amount of the second mass body and the amount of the second vibration-isolating member in the second vibration-isolating structure is to determine a division ratio for dividing the approximate straight line in the resonance frequency range below the fifth resonance frequency and above the sixth resonance frequency, calculate the seventh amplitude magnification and the seventh resonance frequency on the approximate straight line divided by the division ratio, calculate the distribution ratio based on the first structure ratio and the division ratio, and calculate the amount of the second vibration-isolating member and the amount of the second mass body from the distribution ratio, the amount of the first vibration-isolating member of the reference parameter, and the amount of the first mass body. In addition, the division of the approximate straight line is not limited to one-to-two.

[0219] In addition, the step of outputting the calculation result outputs the amount of the second vibration isolating member, the amount of the second mass body, the seventh amplitude amplification factor, and the seventh resonance frequency.

[0220] In addition, the first structural ratio is greater than one.

[0221] In addition, the first coefficient is 2.

[0222] In addition, the first power exponent, the second power exponent, the third power exponent, and the fourth power exponent are values ​​in the range of -1 to -0.7.

[0223] According to these contents, even in a two-layer vibration-proof structure, a structural ratio of resonance frequency / amplitude magnification factor that can obtain conditions close to the desired vibration-proof characteristics can be selected. Therefore, it is possible to design a vibration-proof structure that can achieve the desired attenuation characteristics (no increase in resonance magnification factor, large attenuation rate) in a short period of time, and it is also possible to suppress costs.

[0224] Therefore, it is possible to provide a vibration-proof structure having desired vibration-proof characteristics and a method for manufacturing the same.

Claims

1. A vibration-proof structure, characterized in that: It is a vibration-proof structure that is fixed to the vibration source and carries the measuring device. The vibration isolation structure includes a first vibration isolation structure fixed to the vibration source and a second vibration isolation structure overlapping the first vibration isolation structure. The first vibration-isolating structure includes a first mass body and a first vibration-isolating member supporting the first mass body. The second vibration-isolating structure includes a second mass body and a second vibration-isolating member supporting the second mass body. The measuring device is placed on the second mass body. A second structural ratio of the second vibration isolation structure is greater than a first structural ratio of the first vibration isolation structure.

2. The vibration-proof structure according to claim 1, wherein: The nth vibration isolation structure including the first vibration isolation structure and / or the second vibration isolation structure includes an nth mass body and an nth vibration isolation member, The nth structural ratio of the nth vibration-proof structure is The mass ratio is obtained by dividing the mass of the nth mass body by the mass of the mass body serving as a reference unit parameter, The vibration-proofing member ratio is obtained by dividing the amount of the nth vibration-proofing member by the vibration-proofing member of the reference unit parameter, A ratio obtained by dividing the vibration-isolating member ratio by the mass ratio.

3. The vibration-proof structure according to claim 2, wherein: The amount of the n-th vibration isolating member is any one of the number of the vibration isolating members, the volume of the elastic body of the vibration isolating member, or the area in which the elastic body contacts the n-th mass body.

4. The vibration-proof structure according to claim 3, wherein: The nth mass body is a member having an elastic modulus larger than that of the elastic body, and the amount of the nth mass body is weight.

5. The vibration-proof structure according to claim 2, wherein: The unit parameters In the 0th vibration isolation structure including a vibration isolation member connected to a vibration source and a mass body supported by the vibration isolation member, The method includes a combination of data on a resonance frequency calculated from the gain-frequency characteristic of the 0th vibration isolation structure, an amplitude magnification factor at the resonance frequency, and the amount of the vibration isolation member and the amount of the mass body.

6. The vibration-proof structure according to claim 1, wherein: The resonance frequency of the vibration-proof structure is lower than a frequency of 1 / 2 of a sampling frequency of the measuring device and higher than an upper limit of an output frequency band of the measuring device.

7. The vibration-proof structure according to claim 6, wherein: The measuring device is any one of an inertial measuring device, an inertial navigation device, an acceleration sensor, a displacement meter, a gyro sensor, an optical sensor, and an image measuring device.

8. A method for manufacturing a vibration-proof structure, characterized in that: The vibration isolation structure comprises a first vibration isolation structure fixed to a vibration source and a second vibration isolation structure overlapping the first vibration isolation structure, wherein the first vibration isolation structure comprises a first mass body and a first vibration isolation component, and the second vibration isolation structure comprises a second mass body and a second vibration isolation component, and a measuring device is placed on the second mass body. The manufacturing method of the vibration isolation structure comprises: A step of acquiring the unit parameter of the vibration-proof member to be used from a unit parameter database; The step of generating reference parameters based on the desired resonant frequency and amplitude amplification factor; A step of determining three points on coordinates in the correlation between the resonance frequency and the amplitude magnification factor based on the reference parameter; A step of calculating an approximate straight line in an arbitrary structure ratio Rr based on the three points on the coordinates; a step of dividing the approximate straight line based on a division ratio to calculate the amount of the second mass body and the amount of the second vibration isolating member in the second vibration isolating structure; and A step of outputting the calculated result.

9. The method for manufacturing a vibration-proof structure according to claim 8, wherein: Method for generating the database of the unit parameters In a 0th vibration isolation structure including a vibration isolation member connected to a vibration source and a mass body supported by the vibration isolation member, the structure includes: a step of measuring a gain-frequency characteristic in the 0th vibration isolation structure to obtain a measurement result; a step of calculating a resonance frequency and an amplitude magnification factor based on the measurement result; a unit parameter generating step of generating a combination of the calculated resonance frequency and the amplitude magnification, and the amount of the vibration isolating member and the amount of the mass body; and A step of storing the generated unit parameter in the database.

10. The method for manufacturing a vibration-proof structure according to claim 8, wherein: The process of generating the reference parameters is a step of acquiring a unit parameter of the vibration-isolating member to be used from the database, Based on the first resonance frequency and the first amplitude magnification of the unit parameter, a second amplitude magnification is calculated by multiplying the first amplitude magnification by a predetermined first coefficient, and a second resonance frequency is calculated by multiplying the first resonance frequency by 2 / π. Based on the structure ratio of the value of the normalized vibration isolating member and the value of the normalized mass body, the amount of any vibration isolating member and the amount of the mass body are normalized according to the amount of the first vibration isolating member and the amount of the first mass body of the unit parameter, calculating the correlation among the structure ratio, the first resonance frequency, the first amplitude magnification factor, the second resonance frequency, and the second amplitude magnification factor, Selecting a structural ratio in which a desired resonance frequency is between the first resonance frequency and the second resonance frequency or a desired amplitude magnification is between the first amplitude magnification and the second amplitude magnification, determining the amount of the second mass body and the amount of the second vibration isolating member based on the acquired unit parameters of the first mass body and the first vibration isolating member, the selected structural ratio, and the desired distribution ratio, A combination of the second resonance frequency, the second amplitude magnification factor, the amount of the second mass body, and the amount of the second vibration isolating member is set as a reference parameter for a structural ratio Rr=1.

11. The method for manufacturing a vibration-proof structure according to claim 8, wherein: The process of determining the three points on the coordinates includes the following steps: The second resonance frequency and the second amplitude magnification based on the reference parameter, The third amplitude magnification is calculated based on the structure ratio = 0.5 and the second amplitude magnification. The third resonance frequency is calculated from the structure ratio = 0.5, the third amplitude magnification factor and the second resonance frequency. calculating a fourth amplitude magnification factor obtained by multiplying the second amplitude magnification factor by a predetermined first coefficient, The fourth resonance frequency is calculated by multiplying the second resonance frequency by 2 / π. Three points on the coordinates of the second resonance frequency and the second amplitude magnification factor, the third resonance frequency and the third amplitude magnification factor, and the fourth resonance frequency and the fourth amplitude magnification factor are determined.

12. The method for manufacturing a vibration-proof structure according to claim 11, wherein: The process of calculating the approximate straight line is: a fifth amplitude magnification factor, wherein a value obtained by subtracting the fourth amplitude magnification factor from the second amplitude magnification factor and multiplying the value obtained by subtracting the fourth amplitude magnification factor from the second amplitude magnification factor by a power raised to a first power with the first structure ratio as a base; a fifth resonance frequency subtracting from the second resonance frequency a value obtained by multiplying a value obtained by subtracting the fourth resonance frequency from the second resonance frequency by a power raised to a second power with the first structural ratio as a base; subtracting from the third amplitude magnification a sixth amplitude magnification obtained by multiplying a value obtained by subtracting the fourth amplitude magnification from the third amplitude magnification by a value raised to a third power with the first structure ratio as a base, from the third amplitude magnification; and A sixth resonance frequency is obtained by subtracting from the third resonance frequency a value obtained by multiplying a value obtained by subtracting the fourth resonance frequency from the third resonance frequency by a fourth power exponent with the first structure ratio as the base, In the orthogonal coordinates of resonant frequency and amplitude magnification, A straight line passing through a point at the fifth resonance frequency and the fifth amplitude magnification factor and a straight line passing through a point at the sixth resonance frequency and the sixth amplitude magnification factor is set as an approximate straight line at an arbitrary configuration ratio.

13. The method for manufacturing a vibration-proof structure according to claim 12, wherein: The step of calculating the amount of the second mass body and the amount of the second vibration isolating member in the second vibration isolating structure is In the approximate straight line in the resonance frequency range below the fifth resonance frequency and above the sixth resonance frequency, Determine the division ratio of the approximate straight line, calculating a seventh amplitude magnification and a seventh resonance frequency on the approximate straight line divided by the division ratio, calculating a distribution ratio based on the first structural ratio and the division ratio, The amount of the second vibration isolating member and the amount of the second mass body are calculated from the distribution ratio and the amount of the first vibration isolating member and the amount of the first mass body which are reference parameters.

14. The method for manufacturing a vibration-proof structure according to claim 13, wherein: Process output that outputs the calculated results the amount of the second vibration isolating member and the amount of the second mass body, the seventh amplitude amplification factor, and the seventh resonance frequency.

15. The method for manufacturing a vibration-proof structure according to claim 12, wherein: The first structural ratio is greater than 1.

16. The method for manufacturing a vibration-proof structure according to claim 10 or 11, wherein: The first coefficient is 2.

17. The method for manufacturing a vibration-proof structure according to claim 12, wherein: The first power exponent, the second power exponent, the third power exponent, and the fourth power exponent are values ​​ranging from -1 to -0.7.

Images