Active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement

Abstract

The invention provides an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, and the assembly comprises a sample rod which is used for placing a sample to be subjected to alternating gradient magnetic measurement; the first laser vibration meter is used for measuring first vibration of the sample and inputting a signal of the first vibration to the alternating gradient magnetic measurement system; the active vibration isolation sample holder is connected with the sample rod; the second laser vibration meter is used for measuring second vibration of the sample rod at the active vibration isolation sample holder in the horizontal direction; and the active vibration isolation sample holder is used for receiving a second vibration signal sent by the second laser vibration meter and driving the sample rod to carry out vibration correction according to the second vibration signal. According to the active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, the vibration isolation effect is better, the influence of vibration of equipment and the external environment on vibration of a sample rod and a sample can be greatly reduced, and the accuracy of alternating gradient magnetic measurement can be greatly improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement and a control method thereof. Background Art

[0002] Alternating Gradient Magnetometer (AGM) is a test method that measures the force on a magnetic material in a magnetic field to characterize its magnetic properties. It has the characteristics of high measurement accuracy and fast response speed. It can achieve a good signal-to-noise ratio and complete the test in an alternating magnetic field. It is mainly used to measure the change of the magnetic moment of a material with the external magnetic field and temperature. It is particularly suitable for magnetic measurement and research of thin films and other weak signal materials.

[0003] However, since the vibration of the object being measured is very small, it is easily affected by external vibrations and causes measurement errors. Alternating gradient magnetic measurement mainly places the sample on a sample rod so that the sample is placed in an alternating magnetic field environment. Therefore, the sample rod needs to be absolutely still to reduce the interference of the vibration of the sample rod on the sample. In actual use, since the sample rod is fixed to the equipment bracket, the sample rod is easily affected by the environmental vibration together with the equipment bracket and vibrates, which easily drives the sample to vibrate, thereby causing the vibration of the sample to be disturbed. Therefore, the existing alternating gradient magnetic measurement device is easily affected by the vibration of the external environment, resulting in low detection accuracy and large errors. Summary of the invention

[0004] The present invention provides an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement to solve the problem in the prior art that the alternating gradient magnetic measurement device is easily affected by the vibration of the external environment and has low measurement accuracy.

[0005] In order to solve at least one of the above problems existing in the prior art, the present application provides an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, comprising:

[0006] A sample rod, used for placing a sample to be subjected to alternating gradient magnetic measurement;

[0007] A first laser vibrometer, used for measuring a first vibration of the sample and inputting a signal of the first vibration into an alternating gradient magnetic measurement system;

[0008] An active vibration isolation sample holder connected to the sample rod;

[0009] A second laser vibrometer, used for measuring a second vibration of the sample rod at the active vibration isolation sample holder in a horizontal direction;

[0010] The active vibration isolation sample holder is used to receive the second vibration signal sent by the second laser vibrometer, and drive the sample rod to perform vibration correction according to the second vibration signal; the active vibration isolation sample holder includes at least one of the following: an X-axis piezoelectric actuator, a Y-axis piezoelectric actuator, and a Z-axis piezoelectric actuator.

[0011] In some embodiments of the present application, when the active vibration isolation sample holder comprises: the X-axis piezoelectric actuator, the Y-axis piezoelectric actuator, and the Z-axis piezoelectric actuator, the Z-axis piezoelectric actuator is connected to the sample rod;

[0012] The X-axis piezoelectric actuator is disposed on the side of the Z-axis piezoelectric actuator along the X-axis direction; and

[0013] A Y-axis piezoelectric actuator is arranged on the side of the Z-axis piezoelectric actuator along the Y-axis direction.

[0014] In some embodiments of the present application, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement further includes:

[0015] A sample rack displacement stage connected to the active vibration isolation sample rack; the sample rack displacement stage includes: a uniaxial displacement stage, a biaxial displacement stage and a triaxial displacement stage;

[0016] The sample rod fixing platform is connected to the sample rod, and the Z-axis piezoelectric actuator is arranged at the bottom of the sample rod fixing platform.

[0017] In some embodiments of the present application, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement further includes:

[0018] The Z-axis connecting plate is arranged at the bottom of the Z-axis piezoelectric actuator; the Z-axis connecting plate is connected to the outer frame of the active vibration isolation sample holder through the Y-axis actuator support of the Y-axis piezoelectric actuator.

[0019] In some embodiments of the present application, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement further includes:

[0020] The inertial sensor is arranged on the outer frame of the active vibration isolation sample holder, and is used for receiving the vibration signal and sending it to the active vibration isolation sample holder.

[0021] In some embodiments of the present application, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement further includes:

[0022] The vibrometer displacement platform is connected to the laser vibrometer and is used to drive the laser vibrometer to move. The vibrometer displacement platform includes: a single-axis displacement platform, a two-axis displacement platform and a three-axis displacement platform.

[0023] In some embodiments of the present application, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement further includes:

[0024] A sample holder, disposed at one end of the sample rod, for placing the sample;

[0025] A first reflective component, disposed on the side or back of the sample holder, for enhancing the reflected signal of the first laser vibrometer;

[0026] The second reflecting component is arranged on the sample holder displacement stage and is used to enhance the reflected signal of the second laser vibrometer.

[0027] In some embodiments of the present application, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement further includes:

[0028] Two pole heads are respectively arranged on two sides of the sample, and the end faces of the pole heads are perpendicular to the laser of the laser vibrometer.

[0029] In some embodiments of the present application, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement further includes:

[0030] Two excitation coils are respectively arranged on both sides of the sample, and the excitation coil located on the same side of the sample is connected to the pole head; wherein, among the excitation coil and the pole head located on the same side of the sample, the distance between the excitation coil and the sample is greater than the distance between the pole head and the sample.

[0031] In some embodiments of the present application, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement further includes:

[0032] The stand comprises a bracket and an upper fixed plate, and is provided with the two poles and the two excitation coils inside; the sample rack displacement stage is placed on the surface of the upper fixed plate.

[0033] From the above description, it can be seen that the present application provides an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, including: a sample rod, used to place a sample to be measured for alternating gradient magnetic measurement; a first laser vibrometer, used to measure the first vibration of the sample and input the first vibration signal into the alternating gradient magnetic measurement system; an active vibration isolation sample holder, connected to the sample rod; a second laser vibrometer, used to measure the second vibration of the sample rod in the horizontal direction at the active vibration isolation sample holder; the active vibration isolation sample holder is used to receive the second vibration signal sent by the second laser vibrometer, and drive the sample rod to perform vibration correction according to the second vibration signal; the active vibration isolation sample holder includes at least one of the following: an X-axis piezoelectric actuator, a Y-axis piezoelectric actuator, and a Z-axis piezoelectric actuator.

[0034] The active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement provided in the present application has a better vibration isolation effect, can greatly reduce the impact of the vibration of the equipment and the external environment on the vibration of the sample rod and the sample, and can greatly improve the accuracy of alternating gradient magnetic measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the prior art descriptions. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0036] Figure 1 This is a schematic structural diagram of an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement according to an embodiment of the present application.

[0037] Figure 2 Schematic diagram of the X-axis and Z-axis motion structure of the active vibration isolation sample holder according to an embodiment of the present application.

[0038] Figure 3 Schematic diagram of the Y and Z axis motion structure of the active vibration isolation sample holder according to an embodiment of the present application.

[0039] Reference numerals:

[0040] 110: sample rod;

[0041] 120: sample tray;

[0042] 140: sample holder translation stage fixing part;

[0043] 150: sample holder translation stage;

[0044] 160: Active vibration isolation sample holder;

[0045] 210: excitation coil;

[0046] 220: Extreme Head;

[0047] 221: Pole end face;

[0048] 230: Magnetic yoke;

[0049] 310: First laser vibrometer;

[0050] 311: Laser;

[0051] 312: second laser vibrometer;

[0052] 320: Vibrometer displacement stage;

[0053] 410: Vibration isolation platform;

[0054] 420: bracket;

[0055] 430: upper fixed plate;

[0056] 161: outer frame;

[0057] 162: X-axis piezoelectric actuator;

[0058] 163: Y-axis piezoelectric actuator;

[0059] 164: Z-axis piezoelectric actuator;

[0060] 165: Z-axis connecting plate;

[0061] 166: Y-axis actuator support;

[0062] 167: Sample rod fixing table;

[0063] 168: Sample rod mounting fixture;

[0064] 169: Inertial sensor. DETAILED DESCRIPTION

[0065] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0066] It should be noted that the terms "including" and "having" in the specification and claims of the present application and the above-mentioned drawings and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices. In the absence of conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0067] Alternating Gradient Magnetometer (AGM) is an instrument used to measure the magnetic properties of materials. It obtains relevant parameters such as magnetization intensity by detecting the response of the sample in an alternating magnetic field. The working principle and operation mode of AGM enable it to perform high-precision magnetic measurements such as hysteresis loop, remanence and coercivity.

[0068] The basic principle of AGM is to use an alternating gradient magnetic field (usually generated by a pair of electromagnetic coils) to induce mechanical vibrations in the sample. The sample is placed in a gradient magnetic field, and the gradient of this magnetic field exerts a force on the sample, causing the sample to displace. Then, by detecting the displacement of the sample (usually using optical or inductive sensors), the magnetization intensity of the sample can be measured.

[0069] The main components of AGM include: Electromagnetic coil: used to generate an alternating gradient magnetic field. Sample holder: fixes the position of the sample to ensure that the sample can be subjected to uniform force in the magnetic field. Vibration detection system: usually uses optical or inductive sensors to detect the displacement of the sample. Data acquisition and processing system: used to record and analyze the response signal of the sample and calculate the magnetic parameters.

[0070] The AGM measurement process includes:

[0071] Sample preparation: Fix the sample to be tested on the sample holder, making sure it is in the center of the alternating gradient magnetic field generated by the electromagnetic coil.

[0072] Apply magnetic field: An alternating gradient magnetic field is applied through an electromagnetic coil.

[0073] Detection displacement: The displacement of the sample in the gradient magnetic field is recorded by the detection system.

[0074] Data processing: By analyzing the relationship between sample displacement and applied magnetic field, the magnetization intensity and other parameters of the sample are calculated.

[0075] As described in the background technology section of this application, the existing AGM has extremely high requirements for the measurement environment and requires precise calibration and maintenance.

[0076] Based on this, that is, in order to solve at least one of the above-mentioned problems existing in the prior art, an embodiment of the present application provides an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement. Figure 1 Schematic diagram of an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement according to an embodiment of the present application. Figure 1 , Figure 2 as well as Figure 3 As shown, an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement comprises:

[0077] A sample rod 110, used for placing a sample to be subjected to alternating gradient magnetic measurement;

[0078] A first laser vibrometer 310, used for measuring a first vibration of the sample and inputting a signal of the first vibration into an alternating gradient magnetic measurement system;

[0079] An active vibration isolation sample holder 160 connected to the sample rod 110;

[0080] A second laser vibrometer 312, used to measure a second vibration of the sample rod 110 at the active vibration isolation sample holder 160 in the horizontal direction;

[0081] The active vibration isolation sample holder 160 is used to receive the second vibration signal sent by the second laser vibrometer 312, and drive the sample rod to perform vibration correction according to the second vibration signal; the active vibration isolation sample holder 160 includes at least one of the following: an X-axis piezoelectric actuator 162, a Y-axis piezoelectric actuator 163 and a Z-axis piezoelectric actuator 164.

[0082] Preferably, a sample to be measured by alternating gradient magnetic field is placed at one end of the sample rod 110. After receiving the second vibration signal, the active vibration isolation sample holder 160 actively reduces the horizontal vibration of the sample rod 110 at the active vibration isolation sample holder 160 according to a preset control algorithm (Proportion Integral Differential, PID algorithm), so as to reduce the influence of the vibration of the equipment and the external environment on the vibration of the sample rod.

[0083] A laser vibrometer is an instrument that uses laser technology to measure the vibration of an object. It measures the vibration velocity, displacement and acceleration of the surface of an object in a non-contact manner. The working principle of a laser vibrometer is based on the laser Doppler effect. When a laser beam is irradiated onto the surface of a vibrating object, the frequency of the reflected laser beam changes, and this frequency change is proportional to the vibration velocity of the object. By measuring this frequency change, the laser vibrometer can calculate the vibration velocity of the object and further obtain vibration parameters such as displacement and acceleration. The main advantages of a laser vibrometer include:

[0084] Non-contact measurement: No contact with the object being measured is required, avoiding the interference and mass loading effects that may be introduced by traditional contact sensors.

[0085] High precision: Laser measurement technology has very high accuracy and can detect tiny vibrations.

[0086] High frequency response: It can measure high frequency vibrations and is suitable for application scenarios that require high frequency response.

[0087] Wide application: It is suitable for vibration measurement of various materials and surfaces, and is not limited by the surface state of the measured object.

[0088] In addition, when using a laser vibrometer, the following points should be noted:

[0089] Surface reflectivity: The reflectivity of the surface of the object being measured will affect the measurement accuracy. It is usually necessary to spray a reflective film on the surface or use a reflective patch to improve the reflectivity.

[0090] Environmental interference: Ambient light, air turbulence and other factors may interfere with the laser beam and affect the measurement results. Measurements need to be performed in a relatively stable environment.

[0091] Alignment accuracy: The laser beam needs to be accurately aligned with the measuring point of the object to ensure the accuracy of the measurement data.

[0092] A piezoelectric actuator is a device that converts electrical energy into mechanical energy using the piezoelectric effect, which refers to the phenomenon that certain materials generate an electric charge when subjected to mechanical stress and, conversely, deform when an electric field is applied.

[0093] The core of a piezoelectric actuator is a piezoelectric material (such as piezoelectric ceramics). When a voltage is applied to a piezoelectric material, the material will produce a mechanical deformation. This deformation can be linear displacement, bending, or torsion, depending on the structure of the piezoelectric material and the way the electric field is applied. Piezoelectric actuators have the following advantages:

[0094] High Precision: Piezoelectric actuators are capable of nanometer-level precision positioning and are suitable for applications that require extremely high positioning accuracy.

[0095] Fast response: Piezoelectric materials respond very quickly and can complete deformation within microseconds, making them suitable for high-frequency applications.

[0096] High force density: Piezoelectric actuators can generate high forces in a small size, which is suitable for space-constrained application scenarios.

[0097] No electromagnetic interference: No electromagnetic interference is generated during operation, suitable for use in environments sensitive to electromagnetic interference.

[0098] When using piezoelectric actuators for alternating gradient magnetic measurements, the following should be noted:

[0099] Drive voltage: Piezoelectric actuators generally require higher drive voltages, which needs to be taken into account when designing the drive circuit.

[0100] Temperature influence: The performance of piezoelectric materials is greatly affected by temperature, and the temperature changes of the working environment need to be considered when using them.

[0101] Fatigue and aging: Long-term use may cause material performance to deteriorate, requiring regular performance inspection and maintenance.

[0102] Mechanical connection: Piezoelectric actuators usually need to be connected to other mechanical components. The connection method and force transmission efficiency must be considered during design.

[0103] In some embodiments of the present application, see Figure 1 , Figure 2 as well as Figure 3 When the active vibration isolation sample holder 160 includes: the X-axis piezoelectric actuator 162, the Y-axis piezoelectric actuator 163 and the Z-axis piezoelectric actuator 164, the Z-axis piezoelectric actuator 164 is connected to the sample rod 110;

[0104] The X-axis piezoelectric actuator 162 is disposed on the side of the Z-axis piezoelectric actuator 164 along the X-axis direction; and

[0105] A Y-axis piezoelectric actuator 163 is disposed on the side surface of the Z-axis piezoelectric actuator 164 along the Y-axis direction.

[0106] In some embodiments of the present application, see Figure 1 , Figure 2 as well as Figure 3 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0107] The sample rack displacement stage 150 is connected to the active vibration isolation sample rack 160; the types of the sample rack displacement stage 150 include: a uniaxial displacement stage, a biaxial displacement stage and a triaxial displacement stage; the sample rack displacement stage 150 is used to drive the active vibration isolation sample rack 160 to move in a corresponding direction (depending on the type of the sample rack displacement stage 150).

[0108] The sample rod fixing platform 167 is connected to the sample rod 110 , and the Z-axis piezoelectric actuator 164 is disposed at the bottom of the sample rod fixing platform 167 .

[0109] It can be understood that a single-axis translation stage is a device that can move precisely in one direction. It consists of a guide rail and a drive mechanism (such as a screw, stepper motor or piezoelectric actuator). The main features include:

[0110] Direction of movement: Moves in one linear direction only.

[0111] Precision and stroke: Precision and stroke depend on specific needs and designs. Common strokes range from a few millimeters to tens of centimeters, and precision can reach sub-micron levels.

[0112] The two-axis translation stage can move in two mutually perpendicular directions. It is composed of two single-axis translation stages, one of which is mounted on the mobile platform of the other. The main features include:

[0113] Movement direction: Move in two mutually perpendicular plane directions (usually X and Y directions).

[0114] Precision and travel: Similar to single-axis translation stages, precision and travel vary according to design and requirements. Common travel ranges range from a few millimeters to tens of centimeters, and precision can reach sub-micron levels.

[0115] The three-axis translation stage can move in three mutually perpendicular directions. It is usually composed of three single-axis translation stages, one of which is mounted on the mobile platform of another translation stage, and a third translation stage is added to achieve movement in three-dimensional space. The main features include:

[0116] Movement direction: Move in three mutually perpendicular directions (usually X, Y and Z directions).

[0117] Precision and travel: Similar to single-axis and two-axis translation stages, precision and travel are variable according to design and requirements. Common travel ranges range from a few millimeters to tens of centimeters, and precision can reach sub-micron levels.

[0118] The sample holder translation stage can be driven by screw drive, gear rack drive, stepper motor drive, piezoelectric actuator drive, etc. When selecting the drive method, the accuracy requirements, speed requirements and load capacity of the application should be considered.

[0119] In some embodiments of the present application, see Figure 2 as well as Figure 3 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0120] The Z-axis connecting plate 165 is disposed at the bottom of the Z-axis piezoelectric actuator 164 ; the Z-axis connecting plate 165 is connected to the outer frame 161 of the active vibration isolation sample holder 160 through the Y-axis actuator support 166 of the Y-axis piezoelectric actuator 163 .

[0121] Specifically, the sample rod 110 is mounted on a sample rod fixing platform 167, a Z-axis piezoelectric actuator 164 is disposed at the bottom of the sample rod fixing platform 167, a Z-axis connecting plate 165 is disposed at the bottom of the Z-axis piezoelectric actuator 164, and the Z-axis connecting plate 165 is connected to the outer frame 161 through a Y-axis actuator support 166, so that the Z-axis piezoelectric actuator 164 can drive the sample rod 110 to move on the Z-axis when it is extended or shortened; the side of the Z-axis piezoelectric actuator 164 is along the An X-axis piezoelectric actuator 162 is arranged in the X-axis direction. When the X-axis piezoelectric actuator 162 is extended or shortened, it can drive one side of the sample rod fixing table 167 of the Z-axis piezoelectric actuator 164 to move along the X-axis. A Y-axis piezoelectric actuator 163 is arranged on the side of the Z-axis piezoelectric actuator 164 along the Y-axis direction. When the Y-axis piezoelectric actuator 163 is extended or shortened, it can drive one side of the sample rod fixing table 167 of the Z-axis piezoelectric actuator 164 to move along the Y-axis.

[0122] In some embodiments of the present application, see Figure 2 as well as Figure 3 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0123] The inertial sensor 169 is disposed on the outer frame 161 of the active vibration isolation sample holder 160 , and is used to receive the vibration signal and send it to the active vibration isolation sample holder 160 .

[0124] Specifically, an inertial sensor 169 is provided on the outer frame 161 as an input of control signals for the X-axis piezoelectric actuator 162 , the Y-axis piezoelectric actuator 163 , and the Z-axis piezoelectric actuator 164 .

[0125] In some embodiments of the present application, see Figure 1 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0126] The vibrometer displacement stage 320 is connected to the first laser vibrometer 310 and is used to drive the first laser vibrometer 310 to move. The vibrometer displacement stage 320 includes: a uniaxial displacement stage, a biaxial displacement stage and a triaxial displacement stage.

[0127] The functions and types realized by the vibrometer translation stage 320 are similar to those of the sample holder translation stage 150 and are not described here.

[0128] In some embodiments of the present application, see Figure 1 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0129] The sample holder 120 is disposed at one end of the sample rod 110 and is used to place the sample.

[0130] A first reflective component, disposed on the side or back of the sample holder 120 , and used to enhance the reflection signal of the first laser vibrometer 310 ;

[0131] The second reflective component is disposed on the sample holder displacement stage 150 and is used to enhance the reflection signal of the second laser vibrometer 312 .

[0132] Preferably, the second reflective component is attached to the X-direction nano-piezoelectric displacement stage in the sample holder displacement stage 150 (ie, the sample holder displacement stage 150 includes: the X-direction nano-piezoelectric displacement stage, the Y-direction nano-piezoelectric displacement stage and the Z-direction nano-piezoelectric displacement stage).

[0133] Furthermore, the first reflective component and the second reflective component may be reflective mirrors or reflective films, or may be other thin layer materials that can increase the reflective effect.

[0134] In some embodiments of the present application, see Figure 1 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0135] Two pole heads 220 are respectively disposed on two sides of the sample, and pole head end faces 221 of the pole heads 220 are perpendicular to the laser 311 of the first laser vibrometer 310 .

[0136] It can be understood that the pole head 220 is provided with a through hole, and the through hole can allow the laser emitted by the first laser vibrometer 310 to pass through so as to smoothly reach the first reflective component.

[0137] In some embodiments of the present application, see Figure 1 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0138] Two excitation coils 210 are respectively arranged on both sides of the sample, and the excitation coil 210 located on the same side of the sample is connected to the pole head 220; wherein, among the excitation coil 210 and the pole head 220 located on the same side of the sample, the distance between the excitation coil 210 and the sample is greater than the distance between the pole head 220 and the sample.

[0139] The above-mentioned setting method is specifically, from left to right: excitation coil, pole head, sample (sample holder), pole head and excitation coil, wherein the excitation coil is arranged in close contact with its adjacent pole head, and there is a gap between the two pole heads and the sample (sample holder) between them.

[0140] In some embodiments of the present application, see Figure 1 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0141] The stand includes a bracket 420 and an upper fixing plate 430 , and the two pole heads 220 and the two excitation coils 210 are arranged inside; the sample holder displacement stage 150 is placed on the surface of the upper fixing plate 430 .

[0142] In some embodiments of the present application, see Figure 1 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0143] The vibration isolation platform 410 , on which the vibration measuring instrument displacement platform 320 is placed.

[0144] In some embodiments of the present application, see Figure 2 as well as Figure 3 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0145] The sample rod is mounted on a fixture 168 , and the sample rod 110 is connected to the Z-axis piezoelectric actuator 164 via the sample rod mounting fixture 168 .

[0146] In some embodiments of the present application, see Figure 1 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0147] The two yokes 230 are respectively arranged on the outside of the corresponding excitation coils 210 (relative to the sample), that is, the yoke 230 located on the left side of the sample is arranged on the outside of the excitation coil 210 located on the left side of the sample, and the yoke 230 located on the right side of the sample is arranged on the outside of the excitation coil 210 located on the right side of the sample.

[0148] In some embodiments of the present application, see Figure 1 , an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, further comprising:

[0149] The sample rack displacement stage fixing member 140 is connected to the sample rod 110 and the sample rack displacement stage 150 , and is used to fix the sample rod 110 and drive the sample rod 110 to move (ie, the sample rack displacement stage 150 and the sample rod 110 are rigidly connected).

[0150] From the above description, it can be seen that the present application provides an active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, including: a sample rod, used to place a sample to be measured for alternating gradient magnetic measurement; a first laser vibrometer, used to measure the first vibration of the sample and input the first vibration signal into the alternating gradient magnetic measurement system; an active vibration isolation sample holder, connected to the sample rod; a second laser vibrometer, used to measure the second vibration of the sample rod in the horizontal direction at the active vibration isolation sample holder; the active vibration isolation sample holder is used to receive the second vibration signal sent by the second laser vibrometer, and drive the sample rod to perform vibration correction according to the second vibration signal; the active vibration isolation sample holder includes at least one of the following: an X-axis piezoelectric actuator, a Y-axis piezoelectric actuator, and a Z-axis piezoelectric actuator.

[0151] The active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement provided in the present application has a better vibration isolation effect, can greatly reduce the impact of the vibration of the equipment and the external environment on the vibration of the sample rod and the sample, and can greatly improve the accuracy of alternating gradient magnetic measurement.

[0152] In the description of this specification, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0153] The descriptions with reference to the terms "one embodiment", "a specific embodiment", "some embodiments", "for example", "example", "specific example", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. The order of steps involved in each embodiment is used to schematically illustrate the implementation of the present invention, and the order of steps therein is not limited and may be appropriately adjusted as needed.

[0154] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0155] Each embodiment in this specification is described in a progressive manner, and the same and similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment. In the description of this specification, the description of the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of this specification. In this specification, the schematic representation of the above terms does not necessarily target the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, in the absence of contradiction, a person skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0156] The above is only an example of the embodiment of the present specification and is not intended to limit the embodiment of the present specification. For those skilled in the art, the embodiment of the present specification may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the embodiment of the present specification shall be included in the scope of the claims of the embodiment of the present specification.

Claims

1. An active vibration isolation sample rod fixing assembly suitable for alternating gradient magnetic measurement, characterized in that: include: A sample rod, used for placing a sample to be subjected to alternating gradient magnetic measurement; A first laser vibrometer, used for measuring a first vibration of the sample and inputting a signal of the first vibration into an alternating gradient magnetic measurement system; An active vibration isolation sample holder connected to the sample rod; A second laser vibrometer, used for measuring a second vibration of the sample rod at the active vibration isolation sample holder in a horizontal direction; The active vibration isolation sample holder is used to receive the second vibration signal sent by the second laser vibrometer, and drive the sample rod to perform vibration correction according to the second vibration signal; the active vibration isolation sample holder includes at least one of the following: an X-axis piezoelectric actuator, a Y-axis piezoelectric actuator, and a Z-axis piezoelectric actuator.

2. The active vibration isolation sample holder fixing assembly according to claim 1, characterized in that: When the active vibration isolation sample holder includes the X-axis piezoelectric actuator, the Y-axis piezoelectric actuator and the Z-axis piezoelectric actuator, the Z-axis piezoelectric actuator is connected to the sample rod; The X-axis piezoelectric actuator is disposed on the side of the Z-axis piezoelectric actuator along the X-axis direction; and A Y-axis piezoelectric actuator is arranged on the side of the Z-axis piezoelectric actuator along the Y-axis direction.

3. The active vibration isolation sample holder fixing assembly according to claim 2, characterized in that: Also includes: A sample holder displacement stage connected to the active vibration isolation sample holder; The sample rack displacement stage includes: a uniaxial displacement stage, a biaxial displacement stage and a triaxial displacement stage; The sample rod fixing platform is connected to the sample rod, and the Z-axis piezoelectric actuator is arranged at the bottom of the sample rod fixing platform.

4. The active vibration isolation sample holder fixing assembly according to claim 3, characterized in that: Also includes: The Z-axis connecting plate is arranged at the bottom of the Z-axis piezoelectric actuator; the Z-axis connecting plate is connected to the outer frame of the active vibration isolation sample holder through the Y-axis actuator support of the Y-axis piezoelectric actuator.

5. The active vibration isolation sample holder fixing assembly according to claim 4, characterized in that: Also includes: The inertial sensor is arranged on the outer frame of the active vibration isolation sample holder, and is used for receiving the vibration signal and sending it to the active vibration isolation sample holder.

6. The active vibration isolation sample holder fixing assembly according to claim 1, characterized in that: Also includes: The vibrometer displacement platform is connected to the laser vibrometer and is used to drive the laser vibrometer to move. The vibrometer displacement platform includes: a single-axis displacement platform, a two-axis displacement platform and a three-axis displacement platform.

7. The active vibration isolation sample holder fixing assembly according to claim 3, characterized in that: Also includes: A sample holder, disposed at one end of the sample rod, for placing the sample; A first reflective component, disposed on the side or back of the sample holder, for enhancing the reflected signal of the first laser vibrometer; The second reflecting component is arranged on the sample holder displacement stage and is used to enhance the reflected signal of the second laser vibrometer.

8. The active vibration isolation sample holder fixing assembly according to claim 3, characterized in that: Also includes: Two pole heads are respectively arranged on two sides of the sample, and the end faces of the pole heads are perpendicular to the laser of the laser vibrometer.

9. The active vibration isolation sample holder fixing assembly according to claim 8, characterized in that: Also includes: Two excitation coils are respectively arranged on both sides of the sample, and the excitation coil located on the same side of the sample is connected to the pole head; wherein, among the excitation coil and the pole head located on the same side of the sample, the distance between the excitation coil and the sample is greater than the distance between the pole head and the sample.

10. The active vibration isolation sample holder fixing assembly according to claim 9, characterized in that: Also includes: The stand comprises a bracket and an upper fixing plate, and the two poles and the two excitation coils are arranged inside the stand; The sample holder displacement stage is placed on the surface of the upper fixing plate.

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