Coil adjusting device and plasma etching equipment

Abstract

The invention relates to the technical field of plasma etching, in particular to a coil adjusting device and plasma etching equipment. The coil adjusting device comprises a coil support and at least two lifting mechanisms. The at least two lifting mechanisms are symmetrically arranged in the circumferential direction of the coil; the coil bracket is provided with at least two end parts; each end part is correspondingly connected with one lifting mechanism, and the lifting mechanisms can drive the end parts to ascend or descend in the vertical direction; wherein each end portion ascends by the same distance or descends by the same distance; or each end part ascends for different distances or descends for different distances. Therefore, the height distance between the coil and the dielectric window is adjusted, and the angle between the coil and the dielectric window is adjusted, so that the uniformity of a radio frequency magnetic field is improved, the uniformity of a substrate etching process and the product yield are improved, and the service life of parts in the etching cavity is prolonged.

Description

Technical Field

[0001] The present application relates to the field of plasma etching technology, and in particular to a coil adjustment device and plasma etching equipment. Background Art

[0002] Plasma etching equipment includes an etching chamber, an upper electrode and a lower electrode. The etching chamber, as the main part, supports the construction of the entire process reaction environment. The upper electrode and the lower electrode are both arranged in the etching chamber, and the upper electrode and the lower electrode together form a plasma reaction zone. The upper electrode generally includes functions such as RF emission, gas feeding, gas homogenization, gas partitioning, RF circuit, and equipment heating. The lower electrode generally includes functions such as electrostatic chuck, RF feeding, and wafer lifting mechanism.

[0003] In plasma etching equipment, the coil is the main component of the upper electrode, carrying the RF output function, and is mainly used to generate high-frequency current to generate a magnetic field, ionizing the gas in the etching chamber to generate plasma; the plasma etching equipment also includes a dielectric window, which is made of a material with good dielectric properties. The dielectric window is used to isolate the plasma from other parts of the equipment to prevent the plasma from damaging other parts of the equipment, while allowing RF energy or microwave energy to pass through to excite and maintain plasma energy. The coil is set above the dielectric window. Adjusting the height distance, angle and other physical parameters between the coil and the dielectric window will directly affect the energy in the etching chamber, thereby affecting the plasma density, etching efficiency, etching uniformity and the service life of the components in the etching chamber during the entire reaction process.

[0004] However, the coil adjustment device in the related art can only adjust the height of the coil but cannot adjust its angle. Summary of the invention

[0005] The present application provides a coil adjustment device and a plasma etching device, which realize height adjustment and angle adjustment of the coil by at least two lifting mechanisms symmetrically arranged along the circumference of the coil.

[0006] In the first aspect, the present application provides a coil adjustment device, which includes: a coil support and at least two lifting mechanisms; the at least two lifting mechanisms are symmetrically arranged along the circumference of the coil; the coil support has at least two ends, each of which is connected to one of the lifting mechanisms, and the lifting mechanisms can drive the ends to rise or fall in a vertical direction; wherein each of the ends rises the same distance or falls the same distance; or, each of the ends rises a different distance or falls a different distance.

[0007] In one possible implementation, the coil support includes a cross bar having at least two ends; a plurality of first connecting members and a plurality of second connecting members are arranged on the cross bar, the plurality of first connecting members are located in a middle area of ​​the cross bar, and the plurality of first connecting members are used to fix the first coil; in a radial direction of the coil, the plurality of second connecting members are arranged around the plurality of first connecting members, and the plurality of second connecting members are used to fix the second coil.

[0008] The first connecting member and the second connecting member can be clamping members for fixing the coil. The first connecting member and the second connecting member can be fixed on the cross bar by clamping or threaded connection, so that the lifting mechanism can realize the lifting and lowering of the coil only by driving the end of the cross bar; the structure is simple, the manufacturing cost is low and it is easy to implement.

[0009] In one possible implementation, the plurality of first connecting members and the plurality of second connecting members are all made of insulating material; or, the cross bar, the plurality of first connecting members, and the plurality of second connecting members are all made of insulating material.

[0010] Insulating materials can prevent current leakage between coils or between coils and other metal parts, reduce the risk of short circuits and electric shock, and ensure the safety and reliability of the equipment; insulating materials also have good thermal conductivity to prevent the coils from overheating; at the same time, insulating materials are light in weight, which can help reduce the overall weight of the equipment and ensure that the lifting mechanism can drive the crossbar up and down.

[0011] In one possible implementation, the lifting mechanism includes a driving assembly, a screw rod, a threaded connector and a fixing member; the driving assembly is fixedly connected to one end of the screw rod, and the driving assembly can drive the screw rod to rotate clockwise or counterclockwise along the vertical axis; the threaded connector is slidably connected to the screw rod, and when the screw rod rotates clockwise along the vertical axis, the threaded connector rises along the vertical direction; when the screw rod rotates counterclockwise along the vertical axis, the threaded connector descends along the vertical direction; a first connecting hole is also provided on the threaded connector, and a second connecting hole is provided at the end of the cross bar, and the fixing member is connected to both the first connecting hole and the second connecting hole.

[0012] The rotational motion is converted into linear motion through the screw rod, ensuring that the threaded connector set on the screw rod can rise or fall in the vertical direction, thereby driving the end of the cross bar to rise or fall; the lifting mechanism composed of the screw rod and the threaded connector has a simple structure, low manufacturing cost and small size, avoiding occupying the use space of other equipment.

[0013] In one possible implementation, the threaded connector includes a threaded sleeve, which is slidably connected to the screw rod, and a connecting surface extends outward from the outer circumference of the threaded sleeve, and the first connecting hole is provided on the connecting surface; the end of the cross bar is located below the connecting surface along the vertical direction.

[0014] The one-piece threaded connector consisting of a threaded sleeve and a connecting table can connect the crossbar to the screw rod, ensuring that the end of the crossbar can be driven to rise or fall when the screw rod rotates; the one-piece threaded connector has a simple installation process and a stable movement process.

[0015] In one possible implementation, the drive assembly includes a drive motor, a reducer, a coupling, a bearing and a bearing support, the output end of the drive motor is connected to the reducer, and the reducer is connected to one end of the screw rod through the coupling; the bearing is embedded in the bearing support, and one end of the screw rod is connected to the coupling after passing through the bearing.

[0016] The drive motor can accurately control the rotation angle of the screw, and the reducer can reduce the speed and increase the torque, so that the drive motor has a more stable and precise motion control; the coupling is used to connect the drive shaft of the reducer and the screw as the driven shaft, so that the screw and the drive shaft of the reducer rotate together to transmit torque, which has the effect of buffering and vibration reduction, ensuring the reliability of the power transmission of the drive motor. The bearing and the bearing support have a fixing effect on the screw, which can ensure the working stability and centering of the screw.

[0017] In one possible implementation, the control cable of the drive motor includes a cable body and an electromagnetic shielding layer arranged outside the cable body.

[0018] Prevent the control signal of the drive motor from generating a magnetic field that interferes with the radio frequency, and prevent the radio frequency magnetic field from generating excessive current that may damage the collector.

[0019] In one possible implementation, the drive assembly also includes a shell, and the drive motor, the reducer, the coupling, the bearing and the bearing support are all arranged in the shell; the lifting mechanism also includes a first displacement sensor, which is arranged on the outer wall of the shell, and the first displacement sensor is used to detect the movement distance of the end along the vertical direction.

[0020] The shell is used to isolate the drive motor, reducer, coupling, bearing and bearing support from other external equipment to ensure that the drive assembly can work normally; the first displacement sensor arranged on the outer wall of the shell is used to detect the moving distance of the end of the cross bar in the vertical direction to realize real-time monitoring of the moving distance of the cross bar.

[0021] In one possible implementation, the drive assembly includes a cylinder, a bellows, a piston and a spring, wherein the bellows, the piston and the spring are all arranged in the cylinder; the elastic expansion and contraction directions of the bellows and the spring are both parallel to the vertical direction; the bellows has a first connecting end and a second connecting end relative to each other along its elastic expansion and contraction direction, and the spring has a third connecting end and a fourth connecting end relative to each other along its elastic expansion and contraction direction; the piston has an upper surface and a lower surface relative to each other along the vertical direction; the first connecting end is connected to the upper surface, and the second connecting end is connected to the first inner wall of the cylinder; the third connecting end is connected to the lower surface, and the fourth connecting end is connected to the second inner wall of the cylinder; the first inner wall and the second inner wall are opposite to each other along the vertical direction; one end of the screw rod enters the cylinder from the first inner wall, and is connected to the upper surface of the piston after passing through the bellows.

[0022] The end of the crossbar is driven up or down by the cylinder, which can avoid the influence of the drive component on the coil compared with other electric drives; and the drive component composed of the cylinder, bellows, piston and spring screw has a simple structure, low manufacturing cost and small size, avoiding occupying the use space of other equipment.

[0023] In a possible implementation, the lifting mechanism further includes a second displacement sensor, which is disposed on an outer wall of the cylinder, and is used to detect a moving distance of the end portion along the vertical direction.

[0024] The second displacement sensor arranged on the outer wall of the cylinder is used to detect the moving distance of the end of the cross bar along the vertical direction, so as to realize real-time monitoring of the moving distance of the cross bar.

[0025] In a possible implementation, the lifting mechanism further includes a controller, which is electrically connected to the second displacement sensor, and the controller can control the operation of the cylinder according to the moving distance fed back by the second displacement sensor.

[0026] The controller controls the operation of the cylinder according to the moving distance fed back by the second displacement sensor, and can realize real-time monitoring of the moving distance of the crossbar and real-time adjustment of the moving distance of the crossbar, thereby improving the accuracy of the movement of the crossbar.

[0027] In a possible implementation, the at least two lifting mechanisms simultaneously drive the at least two ends to rise or fall in a vertical direction.

[0028] The time taken by the coil adjusting device to adjust the coil is reduced, and the efficiency of the coil adjustment is improved.

[0029] In a second aspect, the present application provides a plasma etching device, which includes the coil adjustment device described above.

[0030] The coil adjustment device provided by the present application has the following technical effects:

[0031] The coil adjustment device can not only adjust the height distance between the coil and the dielectric window, but also adjust the angle between the coil and the dielectric window, thereby improving the uniformity of the RF magnetic field, improving the uniformity of the substrate etching process and the product yield, and increasing the service life of the components in the etching chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0033] Figure 1 A schematic diagram of the structure of the coil adjustment device provided in the embodiment of the present application Figure 1 ;

[0034] Figure 2 A schematic diagram of the structure of the coil adjustment device provided in the embodiment of the present application Figure 2 ;

[0035] Figure 3 A schematic diagram of the structure of the coil adjustment device provided in the embodiment of the present application Figure 3 ;

[0036] Figure 4 Schematic diagram of the structure of the drive assembly of the coil adjustment device provided in the embodiment of the present application Figure 1 ;

[0037] Figure 5 Schematic diagram of the structure of the drive assembly of the coil adjustment device provided in the embodiment of the present application Figure 2 .

[0038] Reference numerals:

[0039] 100-coil support;

[0040] 101-first connecting member; 102-second connecting member;

[0041] 201-first coil; 202-second coil;

[0042] 301-first lifting mechanism; 302-second lifting mechanism;

[0043] 401-driving assembly; 402-screw rod; 403-threaded connector; 404-fixing member;

[0044] 4032-threaded sleeve; 4031-connecting table;

[0045] 4011-drive motor; 4012-reducer; 4013-coupling; 4014-bearing; 4015-bearing support; 4016-control cable; 4017-housing;

[0046] 4021-cylinder; 4022-bellows; 4023-piston; 4024-spring. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings. The terms used in the following embodiments are only for the purpose of describing specific embodiments, and are not intended to be used as limitations to the present application. As used in the specification and the appended claims of the present application, the singular expressions "one", "a kind of", "said", "above", "the" and "this" are intended to also include, for example, "one or more" such expressions, unless there is clearly an opposite indication in the context.

[0048] References to "one embodiment" or "some embodiments" etc. described in this specification mean that one or more embodiments of the present application include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the sentences "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0049] like Figure 1 As shown, the coil adjustment device provided in the embodiment of the present application includes: a coil bracket 100, the coil bracket 100 is used to fix the coil, the coil includes a first coil 201 and a second coil 202, and the second coil 202 is arranged around the first coil 201 in the radial direction of the first coil 201.

[0050] Among them, the first coil 201 can be an inner coil, and the second coil 202 can be an outer coil; the inner coil is usually located inside the device or system, while the outer coil is located on the periphery; the inner coil and the outer coil have different functions, usually one is used for transmission and the other is used for reception, or one is used to generate a magnetic field and the other is used for induction; the parameter design of the inner coil and the outer coil varies according to their functional requirements.

[0051] The coil adjustment device also includes: at least two lifting mechanisms, which are symmetrically arranged along the circumference of the coil. The coil support 100 has at least two ends, each end is connected to a lifting mechanism, and the lifting mechanism can drive the end to rise or fall in the vertical direction.

[0052] Each end portion rises or falls by the same distance, that is, after the lifting mechanism drives the end portion to rise or fall in the vertical direction, each end portion is located on the same horizontal plane.

[0053] Alternatively, each end portion rises or falls by a different distance, that is, after the lifting mechanism drives the end portion to rise or fall in the vertical direction, each end portion is located at a different horizontal plane.

[0054] This allows the coil height and angle to be adjusted.

[0055] The embodiment of the present application takes two lifting mechanisms: a first lifting mechanism 301 and a second lifting mechanism 302 as examples to illustrate the working principle of the coil adjustment device.

[0056] The coil support 100 has a first end and a second end, and the first end and the second end are symmetrically arranged along the circumference of the coil; the first end is connected to the first lifting mechanism 301, and the first lifting mechanism 301 can drive the first end to rise or fall in the vertical direction; the second end is connected to the second lifting mechanism 302, and the second lifting mechanism 302 can drive the second end to rise or fall in the vertical direction.

[0057] The first lifting mechanism 301 can drive the first end to rise a first distance or fall a first distance in the vertical direction, and the second lifting mechanism 302 can drive the second end to rise a second distance or fall a second distance in the vertical direction.

[0058] like Figure 2 As shown, in one embodiment, the first distance is equal to the second distance, and the first end and the second end are located in the same horizontal plane.

[0059] In another embodiment, the first distance is greater than the second distance, the first end and the second end are located at different horizontal planes, and in the vertical direction, the first end is higher than the second end, and the first coil 201 and the second coil 202 are both tilted, thereby achieving height adjustment and angle adjustment of the first coil 201 and the second coil 202.

[0060] like Figure 3 As shown, in another embodiment, the first distance is smaller than the second distance, the first end and the second end are located at different horizontal planes, and in the vertical direction, the first end is lower than the second end, and the first coil 201 and the second coil 202 are both tilted, thereby achieving height adjustment and angle adjustment of the first coil 201 and the second coil 202.

[0061] It should be noted that in the embodiment of the present application, each lifting mechanism drives one end to rise or fall in the vertical direction, and at least two lifting mechanisms simultaneously drive at least two ends to rise or fall in the vertical direction, thereby reducing the time for the coil adjustment device to adjust the coil and improving the efficiency of coil adjustment.

[0062] Wherein, while the first lifting mechanism 301 drives the first end portion to rise a first distance or to fall a first distance in the vertical direction, the second lifting mechanism 302 drives the second end portion to rise a second distance or to fall a second distance in the vertical direction.

[0063] In the embodiment of the present application, the coil support 100 may include a cross bar having at least two ends: a first end and a second end; a plurality of first connecting members 101 and a plurality of second connecting members 102 are arranged on the cross bar, the plurality of first connecting members 101 are located in the middle area of ​​the cross bar, and the plurality of first connecting members 101 are used to fix the first coil 201; in the radial direction of the coil, the plurality of second connecting members 102 are arranged around the plurality of first connecting members 101, and the plurality of second connecting members 102 are used to fix the second coil 202.

[0064] The first connecting member 101 and the second connecting member 102 can be clamping members for fixing the coil. The first connecting member 101 and the second connecting member 102 can be fixed on the cross bar by clamping or threading, so that the lifting mechanism can realize the lifting and lowering of the coil only by driving the end of the cross bar; the structure is simple, the manufacturing cost is low and it is easy to implement.

[0065] The plurality of first connecting members 101 and the plurality of second connecting members 102 are all made of insulating material.

[0066] Alternatively, the crossbar, the plurality of first connecting members 101 and the plurality of second connecting members 102 are all made of insulating materials.

[0067] Insulating materials can prevent current leakage between coils or between coils and other metal parts, reduce the risk of short circuits and electric shock, and ensure the safety and reliability of the equipment; insulating materials also have good thermal conductivity to prevent the coils from overheating; at the same time, insulating materials are light in weight, which can help reduce the overall weight of the equipment and ensure that the lifting mechanism can drive the crossbar up and down.

[0068] The insulating material may be ceramic, PEEK (Polyetheretherketone) or polyetheretherketone, etc. PEEK also has excellent dielectric properties.

[0069] like Figure 4 and Figure 5 As shown, in the embodiment of the present application, the lifting mechanism may include a driving component 401, a screw rod 402, a threaded connector 403 and a fixing component 404; the screw rod 402 has a first end and a second end relative to each other in the vertical direction, and the driving component 401 is fixedly connected to the first end of the screw rod 402, and the driving component 401 can drive the screw rod 402 to rotate clockwise or counterclockwise along the vertical axis.

[0070] The threaded connector 403 is slidably connected to the screw rod 402, and the rotational motion of the screw rod 402 will be converted into the linear motion of the threaded connector 403; when the screw rod 402 rotates clockwise along the vertical axis, the threaded connector 403 will rise in the vertical direction; when the screw rod 402 rotates counterclockwise along the vertical axis, the threaded connector 403 will descend in the vertical direction.

[0071] A first connecting hole is also provided on the threaded connector 403, and a second connecting hole is provided at the end of the cross bar. The fixing member 404 is connected to both the first connecting hole and the second connecting hole, so that the end of the cross bar is connected to the threaded connector 403. When the threaded connector 403 rises or falls in the vertical direction, it will drive the end of the cross bar to rise or fall in the vertical direction.

[0072] The rotational motion is converted into linear motion through the screw rod 402, ensuring that the threaded connector 403 set on the screw rod 402 can rise or fall in the vertical direction, thereby driving the end of the cross bar to rise or fall; the lifting mechanism composed of the screw rod 402 and the threaded connector 403 has a simple structure, low manufacturing cost and small size, avoiding occupying the use space of other equipment.

[0073] In the embodiment of the present application, the threaded connector 403 may include a threaded sleeve 4032, the threaded sleeve 4032 has an internal thread matching the screw rod 402, so that the threaded sleeve 4032 is slidably connected to the screw rod 402; the outer circumference of the threaded sleeve 4032 extends outwardly with a connecting table 4031. The end of the crossbar is located below the connecting table 4031 in the vertical direction, and the end of the crossbar abuts against the connecting table 4031.

[0074] A first connecting hole is provided on the connecting table 4031 , and a second connecting hole is provided at the end of the cross bar. The first connecting hole and the second connecting hole match each other. After the fixing member 404 is connected to the first connecting hole and the second connecting hole, the end of the cross bar is fixed on the threaded connector 403 .

[0075] The one-piece threaded connector 403 composed of a threaded sleeve 4032 and a connecting table 4031 can connect the crossbar to the screw rod 402, ensuring that the end of the crossbar can be driven to rise or fall when the screw rod 402 rotates; the one-piece threaded connector 403 has a simple installation process and a stable movement process.

[0076] Alternatively, the end of the cross bar can also be located above the connecting surface 4031 in the vertical direction, and the end of the cross bar abuts against the connecting surface 4031; the end of the cross bar abuts against the connecting surface 4031 due to its own gravity, thereby improving the connection stability between the end of the cross bar and the threaded connector 403.

[0077] The first connection hole and the second connection hole are both threaded holes, and the fixing member 404 is a threaded connection member.

[0078] The threaded connector 403 may be a nut flange, which may be made of resin material to avoid friction between the nut flange and the coil.

[0079] like Figure 4 As shown, in one embodiment of the present application, the driving assembly 401 may include: a driving motor 4011, a reducer 4012 and a coupling 4013, wherein the output end of the driving motor 4011 is connected to the reducer 4012, and the reducer 4012 is connected to the first end of the screw rod 402 through the coupling 4013. The driving motor 4011 drives the reducer 4012 to rotate, the reducer 4012 drives the coupling 4013 to rotate, and the coupling 4013 drives the first end of the screw rod 402 to rotate.

[0080] The driving motor 4011 can accurately control the rotation angle of the screw rod 402, and the reducer 4012 can reduce the rotation speed and increase the torque, so that the driving motor 4011 has smoother and more precise motion control; the coupling 4013 is used to connect the driving shaft of the reducer 4012 and the screw rod 402 as the driven shaft, so that the screw rod 402 and the driving shaft of the reducer 4012 rotate together to transmit torque, which has the effect of buffering and vibration reduction, thereby ensuring the reliability of power transmission of the driving motor 4011.

[0081] The driving assembly 401 may include: a bearing 4014 and a bearing support 4015, wherein the bearing 4014 is embedded in the bearing support 4015, and the first end of the screw rod 402 passes through the bearing 4014 and is connected to the coupling 4013. The bearing 4014 and the bearing support 4015 have a fixing effect on the screw rod 402, and can ensure the working stability and centering of the screw rod 402.

[0082] In the embodiment of the present application, the control cable 4016 of the drive motor 4011 includes a cable body and an electromagnetic shielding layer arranged outside the cable body to prevent the control signal of the drive motor 4011 from generating a magnetic field to interfere with the radio frequency and to prevent the radio frequency magnetic field from generating excessive current and causing damage to the collector.

[0083] In the embodiment of the present application, the driving assembly 401 may further include a housing 4017 , in which the driving motor 4011 , the reducer 4012 , the coupling 4013 , the bearing 4014 and the bearing support 4015 are all disposed.

[0084] The housing 4017 is used to isolate the drive motor 4011, the reducer 4012, the coupling 4013, the bearing 4014 and the bearing support 4015 from other external devices to ensure that the drive assembly 401 can work normally.

[0085] The lifting mechanism may further include a first displacement sensor, which is disposed on the outer wall of the housing 4017 and is used to detect the movement distance of the end of the cross bar.

[0086] The first displacement sensor arranged on the outer wall of the shell 4017 is used to detect the moving distance of the end of the cross bar along the vertical direction, so as to realize real-time monitoring of the moving distance of the cross bar.

[0087] The lifting mechanism may also include a controller, which is electrically connected to the first displacement sensor. The controller can control the operation of the drive motor 4011 according to the moving distance feedback from the first displacement sensor, so as to realize real-time monitoring and real-time adjustment of the moving distance of the cross bar, thereby improving the accuracy of the movement of the cross bar.

[0088] like Figure 5As shown, in another embodiment of the present application, the driving assembly 401 may include: a cylinder 4021, a bellows 4022, a piston 4023 and a spring 4024, wherein the bellows 4022, the piston 4023 and the spring 4024 are all arranged in the cylinder 4021; the elastic expansion and contraction direction of the bellows 4022 and the elastic expansion and contraction direction of the spring 4024 are both parallel to the vertical direction; the bellows 4022 has a first connecting end and a second connecting end opposite to each other along its elastic expansion and contraction direction, and the spring 4024 has a first connecting end and a second connecting end opposite to each other along its elastic expansion and contraction direction. It has a third connecting end and a fourth connecting end relative to each other; the piston 4023 has an upper surface and a lower surface relative to each other in the vertical direction; the first connecting end is connected to the upper surface, and the second connecting end is connected to the first inner wall of the cylinder 4021; the third connecting end is connected to the lower surface, and the fourth connecting end is connected to the second inner wall of the cylinder 4021, and the first inner wall and the second inner wall are relative to each other in the vertical direction; the first end of the screw rod 402 enters the cylinder 4021 from the first inner wall, and is connected to the upper surface of the piston 4023 after passing through the bellows 4022.

[0089] Among them, the piston 4023 divides the cylinder 4021 into a first cavity and a second cavity, and the first cavity and the second cavity are sealed by the piston 4023. The bellows 4022 is located in the first cavity, and the spring 4024 is located in the second cavity. When gas is introduced into the second cavity, the pressure in the second cavity increases, which will push the piston 4023 to move upward, and the piston 4023 will push the end of the screw rod 402 to move upward synchronously, thereby driving the threaded connector 403 set on the screw rod 402 to move upward synchronously, and the threaded connector 403 will drive the end of the cross bar to move upward synchronously, ultimately realizing the height adjustment and angle adjustment of the coil.

[0090] The cylinder 4021 drives the end of the cross bar to rise or fall, which can avoid the influence of the drive component 401 on the coil compared with other electric drives; and the drive component 401 composed of the cylinder 4021, the bellows 4022, the piston 4023 and the spring 4024 has a simple structure, low manufacturing cost and small size, avoiding occupying the use space of other equipment.

[0091] It should be noted that when the spring 4024 is in a compressed state, the bellows 4022 is also in a compressed state.

[0092] When no gas is introduced into the second cavity, the spring 4024 will be in a compressed state due to the deadweight of the piston 4023. In order to ensure that the bellows 4022 will not be excessively stretched and its service life will not be reduced, the bellows 4022 is also in a compressed state at this time.

[0093] In the embodiment of the present application, the lifting mechanism may further include a second displacement sensor, which is disposed on the outer wall of the cylinder 4021 and is used to detect the movement distance of the end of the cross bar.

[0094] The second displacement sensor arranged on the outer wall of the cylinder 4021 is used to detect the moving distance of the end of the cross bar in the vertical direction, so as to realize real-time monitoring of the moving distance of the cross bar.

[0095] In the embodiment of the present application, the lifting mechanism may further include a controller, which is electrically connected to the second displacement sensor, and the controller can control the operation of the cylinder 4021 according to the moving distance fed back by the second displacement sensor.

[0096] The controller controls the operation of the cylinder 4021 according to the moving distance fed back by the second displacement sensor, so as to realize real-time monitoring of the moving distance of the crossbar and real-time adjustment of the moving distance of the crossbar, thereby improving the accuracy of the movement of the crossbar.

[0097] An embodiment of the present application also provides a plasma etching device, which includes the coil adjustment device described above.

[0098] In summary, an embodiment of the present application provides a coil adjustment device and a plasma etching device, wherein the coil adjustment device comprises: a coil bracket 100 and at least two lifting mechanisms, wherein the coil bracket 100 is used to fix the coil, and the at least two lifting mechanisms are symmetrically arranged along the circumference of the coil, and the coil bracket 100 has at least two ends, each end being connected to a corresponding lifting mechanism, and the lifting mechanism can drive the end to rise or fall in a vertical direction; wherein each end rises the same distance or falls the same distance, or each end rises a different distance or falls a different distance, thereby realizing the adjustment of the coil height and the angle.

[0099] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A coil adjustment device, characterized in that: include: a coil support and at least two lifting mechanisms; The at least two lifting mechanisms are symmetrically arranged along the circumference of the coil; The coil support has at least two ends, each of which is connected to a corresponding lifting mechanism, and the lifting mechanism can drive the end to rise or fall in a vertical direction; wherein each of the ends rises by the same distance or falls by the same distance; or, Each of the ends rises a different distance or falls a different distance.

2. The coil adjustment device according to claim 1, characterized in that: The coil support includes a crossbar having at least two ends; The crossbar is provided with a plurality of first connecting members and a plurality of second connecting members, wherein the plurality of first connecting members are located in a middle area of ​​the crossbar, and the plurality of first connecting members are used to fix the first coil; In the radial direction of the coil, the plurality of second connecting members are arranged around the plurality of first connecting members, and the plurality of second connecting members are used to fix the second coil.

3. The coil adjustment device according to claim 2, characterized in that: The plurality of first connecting members and the plurality of second connecting members are both made of insulating material; or, The crossbar, the plurality of first connecting members and the plurality of second connecting members are all made of insulating material.

4. The coil adjustment device according to claim 2, characterized in that: The lifting mechanism includes a driving assembly, a screw rod, a threaded connector and a fixing member; The driving assembly is fixedly connected to one end of the screw rod, and the driving assembly can drive the screw rod to rotate clockwise or counterclockwise along the vertical axis; The threaded connector is slidably connected to the screw rod, and when the screw rod rotates clockwise along the vertical axis, the threaded connector rises along the vertical direction; when the screw rod rotates counterclockwise along the vertical axis, the threaded connector descends along the vertical direction; The threaded connector is also provided with a first connection hole, the end of the cross bar is provided with a second connection hole, and the fixing member is connected to both the first connection hole and the second connection hole.

5. The coil adjustment device according to claim 4, characterized in that: The threaded connector comprises a threaded sleeve, the threaded sleeve is slidably connected to the screw rod, a connecting table extends outward from the outer circumference of the threaded sleeve, and the first connecting hole is arranged on the connecting table; The end of the cross bar is located below the connecting table along the vertical direction.

6. The coil adjustment device according to claim 4, characterized in that: The driving assembly includes a driving motor, a reducer, a coupling, a bearing and a bearing support, the output end of the driving motor is connected to the reducer, and the reducer is connected to one end of the screw rod through the coupling; The bearing is embedded in the bearing support, and one end of the screw rod passes through the bearing and is connected to the coupling.

7. The coil adjustment device according to claim 6, characterized in that: The control cable of the drive motor includes a cable body and an electromagnetic shielding layer arranged outside the cable body.

8. The coil adjustment device according to claim 6, characterized in that: The drive assembly further comprises a housing, wherein the drive motor, the reducer, the coupling, the bearing and the bearing support are all arranged in the housing; The lifting mechanism further includes a first displacement sensor, which is disposed on an outer wall of the shell and is used to detect a moving distance of the end portion along the vertical direction.

9. The coil adjustment device according to claim 4, characterized in that: The driving assembly comprises a cylinder, a bellows, a piston and a spring, wherein the bellows, the piston and the spring are all arranged in the cylinder; The elastic expansion and contraction direction of the bellows and the elastic expansion and contraction direction of the spring are both parallel to the vertical direction; The bellows has a first connecting end and a second connecting end opposite to each other along its elastic expansion and contraction direction, and the spring has a third connecting end and a fourth connecting end opposite to each other along its elastic expansion and contraction direction; The piston has an upper surface and a lower surface opposite to each other along the vertical direction; The first connection end is connected to the upper surface, and the second connection end is connected to the first inner wall of the cylinder; The third connection end is connected to the lower surface, and the fourth connection end is connected to the second inner wall of the cylinder; The first inner wall and the second inner wall are opposite to each other along the vertical direction; One end of the screw rod enters the cylinder from the first inner wall and is connected to the upper surface of the piston after passing through the bellows.

10. The coil adjustment device according to claim 9, characterized in that: The lifting mechanism further includes a second displacement sensor, which is disposed on an outer wall of the cylinder and is used to detect a moving distance of the end portion along the vertical direction.

11. The coil adjustment device according to claim 10, characterized in that: The lifting mechanism further includes a controller, which is electrically connected to the second displacement sensor. The controller can control the cylinder to operate according to the moving distance fed back by the second displacement sensor.

12. The coil adjustment device according to claim 1, characterized in that: The at least two lifting mechanisms simultaneously drive the at least two ends to rise or fall in a vertical direction.

13. A plasma etching device, characterized in that: The invention comprises the coil adjustment device as described in any one of claims 1 to 12.

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