Ion source detection system and ion source detection method

Abstract

The invention provides an ion source detection system and method, and the system comprises a vacuum device which is used for providing a preset vacuum environment for an ion source; the n ion sources are connected with the vacuum device; each ion source is further provided with a first communication valve used for controlling and communicating with the vacuum environment. The ion source detection devices and the ion sources are arranged in a one-to-one correspondence manner, and the ion source detection devices are electrically connected with the corresponding ion sources; and each ion source detection device is used for providing working voltage for the ion source and collecting an ion intensity electric signal output when the ion source works. According to the invention, the vacuum device and the ion source detection device are arranged to provide an independent detection system for the ion source to be detected.

Description

Technical Field

[0001] The present invention relates to the field of detection, and in particular to an ion source detection system and an ion source detection method. Background Art

[0002] The ion source is the core component of mass spectrometry. Its function is to convert the gas molecules to be analyzed into charged particles, and store and focus these ions to form an ion flow with specific energy and shape. Therefore, the quality of the ion source directly determines the detection effect of the mass spectrometer.

[0003] However, the existing technology lacks measures for separate detection of ion sources. A common practice is to replace multiple components including the ion source to check one by one when the mass spectrometer has poor detection results, insufficient gas performance or abnormalities, to check whether there is a problem with the ion source. However, this method is time-consuming and labor-intensive and is not necessarily accurate. It is also difficult to judge when faced with problems such as poor results caused by the incompatibility of the ion source and other components, and it is difficult to control the batch differences of system-level products. Another common practice is to adjust some parameters of the mass spectrometer to restore the detection effect of the mass spectrometer, but if there is a problem with the hardware part of the ion source, it is difficult to detect and identify, and this method is not suitable for batch testing and production.

[0004] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present application and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because they are described in the background technology section of the present application. Summary of the invention

[0005] In view of the shortcomings of the prior art described above, an object of the present invention is to provide an ion source detection system and an ion source detection method, which are used to solve the problems in the prior art such as the lack of an independent detection ion source setting, which makes troubleshooting difficult and the effect poor, and the difficulty in achieving mass production of ion sources.

[0006] To achieve the above-mentioned object and other related objects, the present invention provides an ion source detection system, comprising: a vacuum device, n ion sources and n ion source detection devices; n is an integer greater than or equal to 1;

[0007] The vacuum device is used to provide a preset vacuum environment for the ion source;

[0008] The n ion sources are connected to the vacuum device; wherein each of the ion sources is also provided with a first connecting valve for controlling the connection with the vacuum environment;

[0009] Each of the ion source detection devices is arranged in one-to-one correspondence with each of the ion sources, and each of the ion source detection devices is electrically connected to the corresponding ion source; each ion source detection device is used to provide a working voltage for the ion source and collect an ion intensity electrical signal outputted by the ion source when the ion source is working.

[0010] Optionally, the vacuum device includes a pump group, a first chamber, and n second chambers; the pump group is connected to the first chamber and is used to adjust the vacuum degree in the first chamber; each second chamber is arranged in a one-to-one correspondence with each ion source; the first end of each second chamber is respectively connected to the first chamber, and the second end is respectively connected to the corresponding ion source; wherein each second chamber is also provided with a second connecting valve connected to the first chamber; the volume of the second chamber is smaller than the volume of the first chamber.

[0011] Optionally, the pump group includes a molecular pump and a front-stage pump; the first end of the molecular pump is connected to the first chamber, and the second end is connected to the front-stage pump; a vacuum valve is also provided between the front-stage pump and the molecular pump.

[0012] Optionally, the vacuum device also includes a vacuum degree adjustment component; the vacuum degree adjustment component includes n third connecting valves and n sample gas cylinders; the sample gas cylinders, the third connecting valves and the second chamber are arranged in a one-to-one correspondence; the sample gas cylinders are connected to the corresponding second chambers via the third connecting valves for adjusting the vacuum degree of the vacuum device.

[0013] Optionally, the vacuum degree adjustment component further includes a leak hole; the leak hole is arranged between the third connecting valve and the corresponding sample gas cylinder; the third connecting valve is arranged as a bellows valve.

[0014] Optionally, the vacuum device further comprises a vacuum degree measuring component; the vacuum degree measuring component is arranged on at least one of the first chamber and the second chamber, and is used to measure the vacuum degree of the vacuum device.

[0015] Optionally, the ion source includes at least one of an electron bombardment source, a chemical ionization source, and a field ionization source.

[0016] Optionally, the ion source detection device includes a collection module, a power supply module and a comparison module; the power supply module is respectively connected to the ion source, the collection module and the comparison module, and is used to provide working voltages for the ion source, the collection module and the comparison module, respectively; the collection module is connected to the ion source, and is used to collect the ion intensity generated by the ion source and perform magneto-electric conversion to obtain an ion intensity electrical signal; the comparison module is connected to the collection module, receives the ion intensity electrical signal, and is used to compare the ion intensity electrical signal with a preset ion intensity electrical signal to obtain a comparison result.

[0017] Optionally, the acquisition module includes a Faraday cup, a feedthrough, an operational amplifier and an acquisition card; the first end of the Faraday cup is connected to the output end of the ion source, and the second end is connected to the first input end of the operational amplifier through the feedthrough; the second input end of the operational amplifier is connected to a reference ground, and the output end outputs the ion strength electrical signal; the output end of the operational amplifier is also connected to the first input end through a feedback resistor; the acquisition card is connected to the output end of the operational amplifier, and is used to convert the ion strength electrical signal into analog-to-digital and amplify the output.

[0018] Optionally, the acquisition module includes a Faraday cup, a feedthrough, an operational amplifier and an acquisition card; the first end of the Faraday cup is connected to the output end of the ion source, and the second end is connected to the first input end of the operational amplifier through the feedthrough; the second input end of the operational amplifier is connected to a reference ground, and the output end outputs the ion strength electrical signal; the output end of the operational amplifier is also connected to the first input end through a feedback resistor; the acquisition card is connected to the output end of the operational amplifier, and is used to convert the ion strength electrical signal into analog-to-digital and amplify the output.

[0019] Optionally, a transfer tube is provided between the ion source and the vacuum device for disassembling each of the ion sources located on the vacuum device.

[0020] To achieve the above object and other related objects, the present invention provides an ion source detection method, which is implemented based on the above ion source detection system, including:

[0021] Providing a preset vacuum environment; opening at least m first communication valves so that the corresponding connected ion sources are connected to the preset vacuum environment; m ion sources are used as ion sources to be tested; m is an integer greater than or equal to 1 and less than or equal to n;

[0022] A working voltage is provided for each of the ion sources to be tested and an ion intensity electrical signal outputted by each of the ion sources to be tested when working is collected.

[0023] Optionally, when the vacuum device includes a pump group, a first chamber, n second chambers, and a vacuum adjustment component, after closing each of the m second connecting valves, the vacuum degree of the second chamber connected to each ion source to be tested is adjusted based on the pump group and the vacuum adjustment component to obtain a linear relationship between the vacuum degree corresponding to each ion source to be tested and the ion intensity electrical signal.

[0024] Optionally, the amplitude of the working voltage of the ion source to be tested is adjusted, and the ion intensity electrical signal output by each ion source to be tested when working is collected to obtain the amplitude of the working voltage corresponding to the maximum amplitude of the ion intensity electrical signal.

[0025] As described above, the ion source detection system and ion source detection method of the present invention have the following beneficial effects:

[0026] The present invention provides an independent detection system for the ion source to be detected by arranging a vacuum device and an ion source detection device. On the one hand, it can efficiently provide a more convenient detection means for the performance of various ion sources and can also more conveniently evaluate the performance of the ion source. On the other hand, it can efficiently improve the batch consistency and yield rate in the mass production of ion sources, avoid the problem that the ion source has fixed parameters but is difficult to adjust, and can only scrap the ion source or remake it, greatly improving the efficiency of mass production of ion sources and mass spectrometers.

[0027] In addition, the batch consistency and stability of the mass spectrometer including the ion source can be effectively reduced, the maintainability of the ion source components can be guaranteed, and the service life of the ion source can be extended. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 Shown is a structural schematic diagram of the ion source detection system of the present invention.

[0029] Figure 2 Shown is a schematic structural diagram of the ion source detection probe of the present invention.

[0030] Figure 3 Shown is a circuit schematic diagram of the ion source detection device of the present invention.

[0031] Figure 4 Shown is a circuit schematic diagram of an ion source provided by the present invention.

[0032] Figure 5 A circuit diagram of another ion source provided by the present invention is shown.

[0033] Figure 6 Shown is a line graph of the sensitivity of the ion source detection system of the present invention in detecting the ion source to be tested.

[0034] Figure 7 It shows the relationship between the pressure of the ion source to be tested and the ion intensity electrical signal of the present invention.

[0035] Component number description

[0036] 1 Ion source detection system

[0037] 11 Vacuum device

[0038] 111 Pump Group

[0039] 1111 Molecular Pump

[0040] 1112 Foreline Pump

[0041] 1113 Vacuum valve

[0042] 112 First Chamber

[0043] 113 Second Chamber

[0044] 1131 Second connecting valve

[0045] 114 Vacuum adjustment assembly

[0046] 1141 Third connecting valve

[0047] 1142 Sample Gas Cylinder

[0048] 1143 Leakage

[0049] 115 Vacuum measurement components

[0050] 1151 Pirani Vacuum Gauge

[0051] 1152 Hot Cathode Gauge

[0052] 12. Ion Source

[0053] 121 Repelling Electrode

[0054] 122 cathode

[0055] 123 Ionization chamber outer wall electrode

[0056] 124 Lead electrode

[0057] 125 Focusing Electrode

[0058] 13. Ion source detection device

[0059] 130 Circuit control box

[0060] 1301 Control Module

[0061] 131 Acquisition Module

[0062] 131 Acquisition Module

[0063] 1311 Faraday Cup

[0064] 1311' Shielding Sleeve

[0065] 1312 Feedthrough

[0066] 1312' Electrode Department

[0067] 1313 Operational Amplifier

[0068] 1314 Capture Card

[0069] 132 Power supply module

[0070] 1321 Power Board

[0071] 1322 Collector

[0072] 14 Host computer DETAILED DESCRIPTION

[0073] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0074] See also Figure 1 to Figure 7 It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0075] like Figure 1 As shown, this embodiment provides an ion source detection system 1, including: a vacuum device 11, n ion sources 12 and n ion source detection devices 13; n is an integer greater than or equal to 1.

[0076] like Figure 1 As shown, the vacuum device 11 is used to provide a preset vacuum environment for the ion source 12 .

[0077] Specifically, the vacuum device includes a pump group 111 , a first chamber 112 , and n second chambers 113 .

[0078] As an example, the pump group 111 is connected to the first chamber 112 for adjusting the vacuum degree in the first chamber 112 .

[0079] In this embodiment, the pump group 111 includes a molecular pump 1111 and a pre-stage pump 1112; the first end of the molecular pump 1111 is connected to the first chamber 112, and the second end is connected to the pre-stage pump 1112; a vacuum valve 1113 is also provided between the pre-stage pump 1112 and the molecular pump 1111, and the molecular pump 1111 and the pre-stage pump 1112 are connected based on the vacuum valve 1113.

[0080] Among them, the molecular pump 1111 mainly uses a high-speed rotating impeller to extract gas molecules from the first chamber 112, thereby achieving a vacuum state. The front pump 1112 ionizes the gas molecules through electric fields and thermal collisions, and then removes them through electrostatic adsorption or squeezes out the gas in the chamber through a peristaltic diaphragm pump. In this embodiment, the front pump 1112 is turned on first after the vacuum valve 1113 is opened. When the system vacuum degree is monitored to be better than 100Pa, the molecular pump 1111 is started, and the vacuum environment is considered to be stable after the speed of the molecular pump 1111 is stable for 5 minutes.

[0081] As an example, each second chamber 113 is arranged in one-to-one correspondence with each ion source 12; the first end of each second chamber 113 is respectively connected to the first chamber 112, and the second end is respectively connected to the corresponding ion source 12; wherein each second chamber 113 is also provided with a second connecting valve 1131 connected to the first chamber 112; the volume of the second chamber 113 is smaller than the volume of the first chamber 112, that is, when the vacuum is drawn, the vacuum degree of the second chamber 113 is easily adjusted to form a high vacuum environment, thereby improving work efficiency; the vacuum degree of the first chamber 112 is more stable. In this embodiment, it is preferred to set the volume of the second chamber 113 to be less than 1000mL.

[0082] It should be noted that only the second chamber 113 may be provided for measurement, and as long as a preset vacuum environment is provided for the ion source 12 , it is within the protection scope of this embodiment.

[0083] As an example, the vacuum device 11 also includes a vacuum degree adjusting component 114; the vacuum degree adjusting component includes n third connecting valves 1141 and n sample gas cylinders 1142; the sample gas cylinders 1142, the third connecting valves 1141 and the second chamber 113 are arranged in a one-to-one correspondence; the sample gas cylinders 1142 are connected to the corresponding second chamber 113 via the third connecting valves 1141, which are used to adjust the vacuum degree of the vacuum device.

[0084] In this embodiment, the sample gas cylinder 1142 may contain, but is not limited to, nitrogen, oxygen, argon, or clean air. Any gas that does not affect the working process of the ion source is within the protection scope of this embodiment.

[0085] In this embodiment, the vacuum adjustment component also includes a leak hole 1143; the leak hole 1143 is arranged between the third connecting valve 1141 and the corresponding sample gas cylinder 1142; the third connecting valve 1141 is arranged as a bellows valve. In this embodiment, the gas injected into the second chamber 112 is injected with limited flow and stability by arranging the leak hole 1143 and the bellows valve, so as to avoid affecting the subsequent adjustment of the vacuum degree and the problem of steep rise and inaccurate detection. In this embodiment, a pressure reducing valve is also arranged between the leak hole 1143 and the sample gas cylinder 1142, which is used to reduce the sudden increase in pressure when providing the sample gas.

[0086] In this embodiment, the vacuum degree in the vacuum environment is within the vacuum degree range of 1.0E-5Pa to 100Pa by providing a pump group 111 and a vacuum degree adjustment component 114.

[0087] Specifically, the vacuum device 11 further includes a vacuum degree measuring component 115 .

[0088] As an example, the vacuum degree measuring component 115 is disposed on at least one of the first chamber 112 and the second chamber 113 to measure the vacuum degree of the vacuum device.

[0089] As a further example, the vacuum degree measuring component 115 is disposed on both the first chamber 112 and the second chamber 113. In actual detection, for the accuracy of the measurement of the ion source detection system 1, the vacuum degree measuring component 115 is preferably disposed close to the ion source for detection.

[0090] In this embodiment, the vacuum degree measuring assembly 115 includes a Pirani vacuum gauge 1151 and a hot cathode gauge 1152 , and the applicable detection ranges thereof are not completely consistent to further ensure the widening of the detection range.

[0091] Specifically, a transfer tube (not shown in the figure) is provided between each ion source 12 and the vacuum device 11, and is used to disassemble each ion source 12 located on the vacuum device 11. The transfer tube is provided as a short tube from CF to KF, and the KF interface of the transfer tube and the KF interface on the second chamber 113 are efficiently and quickly sealed and installed on the vacuum device 11 through a high temperature resistant fluororubber O-ring and a clamp, and different ion sources to be tested can be repeatedly replaced for detection.

[0092] like Figure 1 As shown, n ion sources 1212 are connected to the vacuum device 11; wherein each ion source 12 is also provided with a first communication valve (not shown in the figure) for controlling the connection to the vacuum environment.

[0093] Specifically, the ion source 12 includes at least one ion source 12 selected from the group consisting of an electron impact source (EI), a chemical ionization source (CI), and a field ionization source (FI).

[0094] In this embodiment, an electron bombardment source is set; the EI source is a mature mass spectrometer ion source. For different applications, although the structure of the EI source is different, the EI source (with Figure 3The equivalent circuit diagram example in FIG. 1 includes: a repelling electrode 121, a cathode 122, an ionization chamber (an electrode 123 on the outer wall of the ionization chamber), an extraction electrode 124, and a focusing electrode 125. The basic working principle of the EI source is: after the filament (cathode 122) is lit, it emits thermal electrons, and the thermal electrons enter the ionization chamber under the action of the repelling electrode 121 and the electric field force of the ionization chamber relative to the filament, and collide with neutral atoms / molecules in the ionization chamber to form ions. The formed ions are then focused through the ionization chamber, the extraction electrode 124, and the focusing electrode 125 and introduced into the rear analyzer.

[0095] In this embodiment, the ion source is set to a single cathode ion source and a dual cathode ion source; wherein, the two cathodes in the dual cathode ion source are independent of each other, so that when one cathode fails, it can be switched to the other ion source to achieve continuous mass spectrometry detection / monitoring without stopping.

[0096] It should be noted that the ion source detection system 1 provided in this embodiment can detect multiple ion sources, and preferably set each ion source 12 as the same batch to ensure the rapid implementation of batch consistency detection; it can also be based on the need to set up different working ion sources for detection. At this time, the ion source detection system 1 provided in this embodiment can improve the detection efficiency, and at the same time, separately detecting multiple ion sources is also conducive to industrial detection.

[0097] It should be noted that the specific structure of the ion source 12 is not limited to Figure 3 The equivalent diagram is limited to Figure 4 and Figure 5 Other EI source structures are provided, the difference being that the positional relationship between the ionization chamber, the repeller electrode 121 and the cathode 122 is different, such as Figure 4 The position of the filament in the ionization chamber cover is Figure 3 The location is different; Figure 5 The repeller electrode 121 is disposed at the bottom of the ionization chamber. However, the ion source detection system 12 of this embodiment is applicable to ion sources 12 of any structure and is not limited to this embodiment.

[0098] like Figure 1 to Figure 3 As shown, each ion source detection device 13 is arranged in one-to-one correspondence with each ion source 12, and each ion source detection device 13 is electrically connected to the corresponding ion source 12; each ion source detection device 13 is used to provide a working voltage for the ion source 12 and collect the ion intensity electrical signal output by the ion source 12 when it is working.

[0099] Specifically, the ion source detection device 13 includes a collection module 131 , a power supply module 132 and a comparison module (not shown in the figure).

[0100] As an example, the power supply module 132 is respectively connected to the ion source 12, the acquisition module 131, and the comparison module, and is used to provide working voltages for the ion source 12, the acquisition module 131, and the comparison module. Wherein, when the ion source is an EI source, the power supply module 132 is set to provide 1 current signal and 4 voltage signals (U1~U4) respectively; 1 current signal to the cathode 122; 4 voltage signals are respectively connected to the repelling electrode 121, the ionization chamber outer wall electrode 123 (actually the voltage signal loaded between the ionization chamber and the filament), the extraction electrode 124, and the focusing electrode 125. In this embodiment, the power supply module 132 includes at least a power supply board 1321. In this embodiment, the current signal is set to be adjustable, and its range is 0.5A~8A, preferably 1A~5A, such as 3A, 4A, etc.; the voltage signal is set to be adjustable, and its range is fully adjustable within ±500V, preferably within ±300V, such as -100V, 50V, etc.

[0101] Specifically, the power supply module 132 is also used to feed back the working voltage, current and power actually consumed by the cathode during operation to the ion detection system 1 for subsequent processing. In this embodiment, the feedback parameters are provided to the host computer for subsequent data storage, data comparison and other operations.

[0102] It should be noted that the power supply module 132 also provides a power supply loaded on the collector 1322 for collecting the anode voltage change of the ion source 12, which is used to feedback the voltage change during ion excitation (i.e., the detection of cathode emission current and cathode power supply current). Figure 3 A collector is provided, including a first resistor R1 and an ammeter connected in parallel with the first resistor R1, and the detection current range is 0.1-5mA.

[0103] As an example, the acquisition module 132 is connected to the ion source 12, and is used to acquire the ion intensity generated by the ion source 12 and perform magneto-electric conversion to obtain an ion intensity electrical signal.

[0104] As a further example, Figure 2 and Figure 3 As shown, the acquisition module 131 includes a Faraday cup 1311, a feedthrough 1312, an operational amplifier 1313, and an acquisition card 1314; the first end of the Faraday cup 1311 is connected to the output end of the ion source 12, and the second end is connected to the first input end of the operational amplifier 1313 through the feedthrough 1312 (the electrode portion 1312' of the feedthrough 1312 is connected to the first input end of the operational amplifier 1313); the second input end of the operational amplifier 1313 is connected to the reference ground, and the output end outputs the ion intensity electrical signal; the output end of the operational amplifier 1313 is also connected to the first input end through a feedback resistor. The acquisition card 1314 is connected to the output end of the operational amplifier 1313, and is used to convert the ion intensity electrical signal into analog-to-digital and amplify the output.

[0105] In this embodiment, the Faraday cup 1311 is used to collect ion signals output by the ion source and convert them into magnetic signals; the feedthrough 1312 is used to seal and realize electrical connection, and convert the magnetic signals collected by the Faraday cup 1311 into analog electrical signals. The Faraday cup 1311 and the feedthrough 1312 are connected together as hardware connection parts to form an ion source detection probe part. In the subsequent process, only the ion source on it needs to be replaced to realize the detection of different ion sources.

[0106] In this embodiment, the acquisition module 131 is preferably configured to further include a shielding sleeve 1311'; the shielding sleeve 1311' is disposed on the periphery of the Faraday cup 1311 to eliminate external magnetic interference. Since the Faraday cup 1311 converts ion signals into magnetic signals and has magnetic sensitivity, the shielding sleeve 1311' can further improve the accuracy of the measurement.

[0107] In this embodiment, the operational amplifier 1313 and the acquisition card 1314 are equivalent to performing two amplifications, which can effectively improve the range of the detected electrical signals and ensure that the nA to uA level ion signals received and detected from the end of the ion source entering the Faraday cup 1311 can be detected and used subsequently.

[0108] As an example, the comparison module is connected to the acquisition module 131, receives the ion intensity electrical signal, and is used to compare the ion intensity electrical signal with a preset ion intensity electrical signal to obtain a comparison result.

[0109] In the present embodiment, the comparison module is arranged to be located in the host computer 14, and the comparison result of the ion intensity electric signal and the preset ion intensity electric signal is processed by the host computer. Wherein, in the present embodiment, the preset ion intensity electric signal is set to the data measured by the standard ion source 12. In addition, in the present embodiment, the preset ion intensity electric signal can be set to a preset value of an ion intensity under a certain vacuum degree, and when the collected ion intensity electric signal does not reach this preset value, the ion source does not meet the working conditions. Therefore, it is necessary to make subsequent adjustment processing or directly replace and repair the ion source 12. In another embodiment, since the actual ion source 12 needs to be arranged to work under different vacuum conditions, it is required to work normally within the preset vacuum range, therefore, the preset ion intensity electric signal can be each corresponding ion intensity electric signal within the preset vacuum range. In the present embodiment, the host computer 14 is also used to receive the vacuum data measured by the vacuum measurement component 115, etc.

[0110] It should be noted that, in this embodiment, the acquisition card 1314 and the power board 1321 are integrated in the same circuit control box 130; the circuit control box 130 also includes a control module 1301, which is used to control the power board 1321 to adjust the value of the working voltage, control the power-on sequence of each module, and process the received output signal of the acquisition card 1314 and transmit it to the host computer 14.

[0111] This embodiment also provides an ion source detection method, which is implemented based on the above-mentioned ion source detection system 1 and includes:

[0112] Step S1, providing a preset vacuum environment; opening at least m first connecting valves so that the corresponding connected ion sources 12 are connected to the preset vacuum environment; m ion sources 12 are used as the ion sources 12 to be tested; m is an integer greater than or equal to 1 and less than or equal to n.

[0113] In this embodiment, when a preset vacuum environment is provided, vacuum is drawn by the molecular pump 1111 and the front-stage pump 1112. Specifically, the vacuum valve 1113 and the second connecting valve 1131 are first opened to connect the first chamber 112 and the second chamber 113 with the molecular pump 1111 and the front-stage pump 1112, and then the front-stage pump 1112 is started to draw a vacuum, and after the Pirani vacuum gauge detects that the vacuum degree is better than 100Pa, the molecular pump 1111 is started; after the speed of the molecular pump 111 is stabilized for 5 minutes, the hot cathode gauge is started to detect that the vacuum degree is better than 1.0E-5Pa.

[0114] Step S2, providing a working voltage to each ion source 12 to be tested and collecting an ion intensity electrical signal output by each ion source 12 to be tested when it is working.

[0115] Specifically, when the vacuum device includes a pump group 111, a first chamber 112, n second chambers 113, and a vacuum adjustment component 114, after closing each of the m second connecting valves 1131, the vacuum degree of the second chamber 113 connected to each ion source 12 to be tested is adjusted based on the pump group 111 and the vacuum adjustment component 114 to obtain a linear relationship between the vacuum degree corresponding to each ion source 12 to be tested and the ion strength electrical signal.

[0116] In this embodiment, after detecting that the vacuum is better than 1.0E-5Pa, the cathode of the ion source is lit (starting to provide a current signal), and the ion strength electrical signal at this time can be directly detected. If it is necessary to detect that it can work normally within the preset vacuum range, the vacuum is increased by the pump group 111 and the vacuum is reduced by the vacuum adjustment component 114 to adjust the vacuum range to detect the ion strength electrical signal within this range. Specifically, when evaluating the performance of the ion source, the vacuum after the previous step is recorded first, and then the ion strength electrical signal is detected, and then the second connecting valve 1131 is closed to cut off the connection between the first chamber 112 and the second chamber 113. At this time, only the second chamber 113 is connected to the ion source 12, and the vacuum is slowly reduced by the vacuum adjustment component 114. When the relatively stable speed of the second chamber 113 is reduced from the order of 1.0E-5Pa to the order of 1Pa, the second connecting valve 1141 is closed to end the measurement process. The corresponding linear relationship is obtained by detecting the vacuum degree and the corresponding ion strength electrical signal in this process. The measured linear relationship can be retained in the host computer 14, and data can be compared with any batch of the same type of ion source to analyze and evaluate batch and individual performance differences.

[0117] like Figure 6 and Figure 7 As shown, the higher the vacuum degree (the lower the pressure), the lower the ionization intensity should be; similarly, it is preferred that the vacuum degree and the ionization intensity electrical signal change in a linear relationship to ensure the accuracy of subsequent mass spectrometer detection. Figure 7 The data is further processed to obtain the sensitivity value of the device under each vacuum degree (the sensitivity of the detected ion intensity electrical signal under each vacuum degree).

[0118] Specifically, the amplitude of the working voltage of the ion source 12 to be tested is adjusted, and the ion intensity electrical signal output by each ion source 12 to be tested is collected when it is working, so as to obtain the amplitude of the working voltage corresponding to the maximum amplitude of the ion intensity electrical signal.

[0119] In this embodiment, the ion source detection method is also used to correct the working voltage of the ion source 12. Since in actual use, the voltage setting of some ion sources 12 is not set within the optimal working range, resulting in insufficient ion intensity of the final output, the voltage is adjusted to ensure that the intensity of this part of the ion source is increased. Specifically, the amplitude of each voltage in the ion source 12 is adjusted until the amplitude of the ion intensity electrical signal reaches a preset value, and it is considered that the debugged ion source can be used later. Preferably, it is necessary to adjust the amplitude of the working voltage at this time until the amplitude of the ion intensity electrical signal is maximum.

[0120] It should be noted that after completing step S1 and step S2 of this embodiment, the ion source 12 after detection can be disassembled through the transfer tube and replaced with a new ion source 12 to be detected. At this time, the second chamber 113 is in contact with the outside world and restored to a normal pressure state, but the first chamber 112 is still in a preset vacuum environment. Since the volume difference between the first chamber 112 and the second chamber 113 is large, after replacing the new ion source 12, the adjustment efficiency is higher when the second chamber 112 is readjusted based on the already adjusted first chamber 112, compared with when both the first chamber 112 and the second chamber 113 need to be readjusted, which can improve the efficiency of detection.

[0121] In summary, the present invention provides an ion source detection system and an ion source detection method, wherein the ion source detection system includes a vacuum device for providing a preset vacuum environment for the ion source; n ion sources are connected to the vacuum device; wherein each ion source is also provided with a first connecting valve for controlling the connected vacuum environment; each ion source detection device is provided in a one-to-one correspondence with each ion source, and each ion source detection device is electrically connected to the corresponding ion source; each ion source detection device is used to provide an operating voltage for the ion source and collect an ion intensity electrical signal output when the ion source is working. The present invention provides an independent detection system for the ion source to be detected by providing a vacuum device and an ion source detection device. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0122] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. An ion source detection system, characterized in that: The ion source detection system at least includes: a vacuum device, n ion sources and n ion source detection devices; n is an integer greater than or equal to 1; The vacuum device is used to provide a preset vacuum environment for the ion source; The n ion sources are connected to the vacuum device; wherein each of the ion sources is also provided with a first connecting valve for controlling the connection with the vacuum environment; Each of the ion source detection devices is arranged in one-to-one correspondence with each of the ion sources, and each of the ion source detection devices is electrically connected to the corresponding ion source; each ion source detection device is used to provide a working voltage for the ion source and collect an ion intensity electrical signal outputted by the ion source when the ion source is working.

2. The ion source detection system according to claim 1, characterized in that: The vacuum device comprises a pump group, a first chamber, and n second chambers; The pump group is connected to the first chamber and is used to adjust the vacuum degree in the first chamber; Each of the second chambers is arranged in one-to-one correspondence with each of the ion sources; the first end of each of the second chambers is connected to the first chamber, and the second end is connected to the corresponding ion source; wherein each of the second chambers is also provided with a second connecting valve connected to the first chamber; the volume of the second chamber is smaller than the volume of the first chamber.

3. The ion source detection system according to claim 2, characterized in that: The pump group includes a molecular pump and a fore pump; The first end of the molecular pump is connected to the first chamber, and the second end is connected to the front pump; a vacuum valve is also arranged between the front pump and the molecular pump.

4. The ion source detection system according to claim 2, characterized in that: The vacuum device also includes a vacuum degree adjustment component; the vacuum degree adjustment component includes n third connecting valves and n sample gas cylinders; the sample gas cylinders, the third connecting valves and the second chamber are arranged in a one-to-one correspondence; the sample gas cylinders are connected to the corresponding second chambers via the third connecting valves for adjusting the vacuum degree of the vacuum device.

5. The ion source detection system according to claim 4, characterized in that: The vacuum degree adjustment component also includes a leak hole; the leak hole is arranged between the third connecting valve and the corresponding sample gas cylinder; the third connecting valve is arranged as a bellows valve.

6. The ion source detection system according to claim 2, characterized in that: The vacuum device further comprises a vacuum degree measuring component; the vacuum degree measuring component is arranged on at least one of the first chamber and the second chamber, and is used to measure the vacuum degree of the vacuum device.

7. The ion source detection system according to claim 1, characterized in that: The ion source includes at least one of an electron bombardment source, a chemical ionization source, and a field ionization source.

8. The ion source detection system according to claim 1, characterized in that: The ion source detection device includes a collection module, a power supply module and a comparison module; The power supply module is connected to the ion source, the acquisition module and the comparison module respectively, and is used to provide working voltages for the ion source, the acquisition module and the comparison module respectively; The acquisition module is connected to the ion source and is used to acquire the ion intensity generated by the ion source and perform magnetoelectric conversion to obtain an ion intensity electrical signal; The comparison module is connected to the acquisition module, receives the ion intensity electrical signal, and is used to compare the ion intensity electrical signal with a preset ion intensity electrical signal to obtain a comparison result.

9. The ion source detection system according to claim 8, characterized in that: The acquisition module includes a Faraday cup, a feedthrough, an operational amplifier and an acquisition card; The first end of the Faraday cup is connected to the output end of the ion source, and the second end is connected to the first input end of the operational amplifier via the feedthrough; The second input terminal of the operational amplifier is connected to the reference ground, and the output terminal outputs the ion intensity electrical signal; the output terminal of the operational amplifier is also connected to the first input terminal via a feedback resistor; The acquisition card is connected to the output end of the operational amplifier and is used for performing analog-to-digital conversion and amplifying the output of the ion intensity electrical signal.

10. The ion source detection system according to claim 9, characterized in that: The acquisition module also includes a shielding sleeve; The shielding sleeve is arranged on the periphery of the Faraday cup to eliminate external magnetic interference.

11. The ion source detection system according to claim 1, characterized in that: A transfer tube is arranged between the ion source and the vacuum device for disassembling each of the ion sources located on the vacuum device.

12. An ion source detection method, implemented based on the ion source detection system according to any one of claims 1 to 11, characterized in that: The ion source detection method at least comprises: Providing a preset vacuum environment; opening at least m first communication valves so that the corresponding connected ion sources are connected to the preset vacuum environment; m ion sources are used as ion sources to be tested; m is an integer greater than or equal to 1 and less than or equal to n; A working voltage is provided for each of the ion sources to be tested and an ion intensity electrical signal outputted by each of the ion sources to be tested when working is collected.

13. The ion source detection method according to claim 12, characterized in that: When the vacuum device includes a pump group, a first chamber, n second chambers, and a vacuum degree adjustment component, After closing each of the m second connecting valves, the vacuum degree of the second chamber connected to each ion source to be tested is adjusted based on the pump group and the vacuum degree adjustment component to obtain a linear relationship between the vacuum degree corresponding to each ion source to be tested and the ion intensity electrical signal.

14. The ion source detection method according to claim 12, characterized in that: The amplitude of the working voltage of the ion source to be tested is adjusted, and the ion intensity electrical signal output by each ion source to be tested when working is collected to obtain the amplitude of the working voltage corresponding to the maximum amplitude of the ion intensity electrical signal.

Images