A wafer surface cleaning device and a method for driving a brush to clean a wafer

Abstract

The present invention belongs to the technical field of wafer cleaning equipment, and specifically relates to a wafer surface cleaning equipment and a method for driving a brush to clean a wafer, including a platform, a swing arm rotating shaft, a protective cover, a bearing seat, a rotating rod and a brush; a driving mechanism, the driving mechanism is arranged at the lower end of the platform; a cooling mechanism, the cooling mechanism is arranged in the protective cover; a tensioning mechanism, the tensioning mechanism is arranged in the protective cover; wherein, the cooling mechanism includes a refrigeration box, the refrigeration box is fixedly installed on the bottom surface of the protective cover, cooling transmission parts are fixedly installed at both ends of the protective cover, an infusion part is arranged between the refrigeration box and the cooling transmission parts, and an air cooling part is arranged at the lower end of the protective cover. The present invention enhances the transmission stability by optimizing the motor layout, and is equipped with an automatic tensioning and warning mechanism, significantly improving the accuracy, stability and reliability of the wafer cleaning process, while reducing the maintenance difficulty and cost.

Description

Technical Field

[0001] The present invention belongs to the technical field of wafer cleaning equipment, and particularly relates to a wafer surface cleaning equipment and a method for driving a brush to clean a wafer. Background Art

[0002] A wafer refers to a silicon wafer used for fabricating silicon semiconductor circuits, and its raw material is silicon. High-purity polysilicon is dissolved and doped with a silicon crystal seed, and then slowly pulled out to form a cylindrical single-crystal silicon. After the silicon ingot is ground, polished, and sliced, a silicon wafer is formed, that is, a wafer. In the field of semiconductor manufacturing, wafer surface cleaning is a crucial process and plays an irreplaceable role in ensuring product quality and performance.

[0003] However, for the brush cleaning structure used by most current manufacturers, the motor that drives the brush to operate is generally placed above the swing arm. During the cleaning process, due to the increased weight of the swing arm, the swing arm jitter will be aggravated, which has a greater impact on the cleaning effect and also affects aspects such as the structural strength of the swing arm.

[0004] In addition, traditional transmission structures such as belts and chains often lack effective anti-deviation measures, and the tension decreases due to wear and other reasons after long-term operation. These factors will affect the stability and accuracy of the transmission, and thus affect the cleaning effect. Moreover, a large amount of heat will be generated during the long-term operation of the transmission components. If not effectively cooled, it will accelerate the aging of the components and shorten the equipment life. Summary of the Invention

[0005] The purpose of the present invention is to provide a wafer surface cleaning equipment and a method for driving a brush to clean a wafer, which can enhance the transmission stability by optimizing the motor layout, and equipped with an automatic tensioning and warning mechanism, significantly improving the accuracy, stability and reliability of the wafer cleaning process, while reducing the maintenance difficulty and cost.

[0006] The technical solutions adopted by the present invention are specifically as follows:

[0007] A wafer surface cleaning equipment includes a platform, a circular protective shell is provided on the top surface of the platform, a swing arm rotating shaft is rotatably provided on the platform, the upper end of the swing arm rotating shaft is fixedly connected with a protective cover, and a sealing cover is provided at the upper end of the protective cover;

[0008] A driving mechanism, the driving mechanism is arranged at the lower end of the platform and operates by using a driving device;

[0009] A bearing seat, the bearing seat is installed on the bottom surface of the protective cover, a rotating rod is rotatably connected to the bearing seat, the upper end of the rotating rod extends into the protective cover and is rotatably connected to the protective cover, and a brush is installed at the lower end of the rotating rod;

[0010] Cooling mechanism, which is arranged in the protective cover and is used to cool the transmission component;

[0011] Tensioning mechanism, which is arranged in the protective cover and is used to tension the transmission component;

[0012] Among them, the cooling mechanism includes a refrigeration box, the refrigeration box is fixedly installed on the bottom surface of the protective cover, cooling transmission parts are fixedly installed at both ends of the protective cover, an infusion part is arranged between the refrigeration box and the cooling transmission part, and an air-cooling part is arranged at the lower end of the protective cover.

[0013] In a preferred solution, the driving mechanism includes a swing arm motor and a brush motor. The swing arm motor and the brush motor are both installed on the bottom surface of the platform. A first driving gear is fixedly installed at the upper end of the output shaft of the swing arm motor. A second driving gear is fixedly installed at the lower end of the output shaft of the brush motor. A driving rod is rotatably connected inside the swing arm rotating shaft, and the upper end of the driving rod extends into the protective cover and is rotatably connected to the protective cover. A first driven gear is fixedly installed on the outer wall of the lower end of the swing arm rotating shaft. A second driven gear is fixedly installed at the lower end of the driving rod.

[0014] In a preferred solution, the cooling transmission part includes a linkage shaft. The two linkage shafts are respectively connected to the upper ends of the rotating rod and the driving rod. A limiting plate is inserted at the upper end of the linkage shaft. A rotating ring is rotatably connected to the bottom surface of the limiting plate. The upper end of the linkage shaft is threadedly connected with a fastening bolt. A first transmission gear is installed in the middle of the linkage shaft. The lower end of the linkage shaft is rotatably connected to a limiting seat, and the bottom surface of the limiting seat is fixedly connected to the bottom surface of the inner cavity of the protective cover by a support rod. A cooling shell is rotatably connected inside the limiting seat. A water inlet pipe and a water outlet pipe are connected to the limiting seat.

[0015] In a preferred solution, the infusion part includes a water pump. The water pump is installed on the front surface of the refrigeration box, and the water pumping end of the water pump is communicated with the refrigeration box. The water drainage end of the water pump is connected with a water delivery pipe. One end of the water delivery pipe extends into the protective cover and is connected with two groups of shunt pipes, and the other ends of the two groups of shunt pipes are respectively connected with the two water inlet pipes. Two return pipes are connected to the back surface of the refrigeration box, and the other ends of the return pipes are connected with the water outlet pipe.

[0016] In a preferred solution, the air-cooling part includes a driving motor. The driving motor is installed on the bottom surface of the protective cover. A second transmission gear is fixedly installed on the output shaft of the driving motor. A ventilation groove is opened on the bottom surface of the protective cover. A support is fixedly connected to the inner wall of the ventilation groove, and a round rod is rotatably connected to the center of the support. A fan blade is fixedly installed at the upper end of the round rod. A filter plate is fixedly connected to the lower end of the ventilation groove, and the filter plate is rotatably connected to the round rod. A third transmission gear is fixedly installed at the lower end of the round rod. A brush plate is also installed at the lower end of the round rod.

[0017] In a preferred embodiment, the tensioning mechanism includes a support seat, which is connected to the bottom surface of the inner cavity of the protective cover, the top surface of the support seat is fixedly connected to a vertical plate, the side of the vertical plate is fixedly connected to a spring, the other end of the spring is fixedly connected to a U-shaped seat, a tensioning wheel is rotatably connected to the U-shaped seat, the side of the vertical plate is also connected to a guide rod, a guide block is slidably connected to the guide rod, and the guide block is fixedly connected to the U-shaped seat, a contact switch is also installed on the top surface of the support seat, and a resistance block is fixedly connected to the bottom surface of the U-shaped seat.

[0018] In a preferred embodiment, the swing arm shaft is made of SUS material, and a Teflon coating is sprayed on the outside of the swing arm shaft.

[0019] In a preferred embodiment, a warning light is installed on the front of the protective cover, and the warning light is electrically connected to the contact switch.

[0020] A method for cleaning a wafer surface using a driven brush, applied to the above-mentioned wafer surface cleaning equipment, comprises the following steps:

[0021] Step 1: Start the swing arm motor to drive the first drive gear to rotate, and drive the swing arm shaft to rotate through the gear meshing transmission, start the brush motor to drive the second drive gear to rotate, and drive the drive rod to rotate through the gear meshing transmission;

[0022] Step 2: The rotation of the driving rod drives the linkage shaft to rotate, and the first transmission gears on the two linkage shafts rotate synchronously through the toothed belt;

[0023] Step 3: The rotation of the left linkage shaft drives the rotating rod to rotate, and the rotation of the rotating rod drives the brush to rotate and start cleaning the wafer;

[0024] Step 4: Place both the swing arm motor and the brush motor on the bottom of the platform to optimize the center of gravity of the swing arm and reduce vibration during operation;

[0025] Step 5: Install a limit plate and a limit seat on the toothed belt to prevent the toothed belt from deviating and improve operating stability. When installing the toothed belt, fix the limit plate with the fastening bolt to ensure that the toothed belt is effectively limited.

[0026] Step 6: Use the refrigeration box to cool the coolant. The coolant is pumped by a water pump and enters the limit seat through the water pipe, the diversion pipe and the water inlet pipe. The coolant enters the cooling shell to cool the first transmission gear and the toothed belt. Then, the coolant flows along the outer ring slot of the cooling shell into the upper end of the limit seat, is discharged into the return pipe through the outlet pipe, and finally flows back to the refrigeration box for circulation cooling.

[0027] Step 7: The drive motor drives the fan blade to rotate, blowing cold air into the protective cover to further reduce the temperature of the first transmission gear and the toothed belt. The rotation of the round rod also drives the brush plate to rotate, cleaning the filter plate to prevent blockage and ensuring the air circulation speed;

[0028] Step 8: The two tension pulleys ensure that the toothed belt fits tightly against the first transmission gear to prevent slipping or slackening. When the toothed belt is severely slack, it triggers the warning light to turn on, prompting the staff to perform maintenance or repair in a timely manner.

[0029] The technical effects achieved by this invention are as follows:

[0030] In this invention, by placing the motor that drives the rotation of the brush below the overall structure of the cleaning swing arm, the center of gravity of the swing arm is effectively placed near the axis of the swing arm rotation shaft. This design reduces the weight at the end of the swing arm, thereby significantly reducing the inertia of the swing arm based on the rotation shaft during operation. This means that the jitter and jerks of the swing arm during operation are significantly reduced, thereby improving the accuracy and stability of the cleaning process. This is particularly important for wafers that require high-precision cleaning, ensuring the consistency of the cleaning quality and effect; at the same time, the design of placing the motor below the swing arm also helps to protect the motor from contamination, reduces the maintenance difficulty, and ensures the safety of the maintenance personnel;

[0031] In this invention, by setting a limit plate above the toothed belt and a limit seat below it, not only ensures the stable operation of the toothed belt, but also effectively prevents the toothed belt from running off track during operation. In addition, by using a cooling system to cool the transmission components, it can effectively avoid the high-temperature problem caused by long-term transmission, thereby reducing equipment wear and enhancing the stability and durability of the system;

[0032] The automatic tensioning mechanism equipped in this invention can ensure that the transmission toothed belt is always in an appropriate tension state. Even if the toothed belt becomes slack due to wear or elongation, the automatic adjustment function of the tension pulley can be used to maintain the normal tension level. This can not only reduce vibration and noise, but also improve the transmission efficiency and extend the service life of the transmission components. When the toothed belt is slack to a certain extent, the warning system will timely remind the staff to perform necessary maintenance or replacement, further ensuring the reliability and working efficiency of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is the overall structural schematic diagram of this invention;

[0034] Figure 2 is the installation schematic diagram of the platform and the drive structure of this invention;

[0035] Figure 3 is this invention Figure 2 bottom view;

[0036] Figure 4 It is a schematic structural diagram of the protective cover of the present invention;

[0037] Figure 5 It is the present invention Figure 4 Disassembly schematic diagram of the sealing cover;

[0038] Figure 6 It is the present invention Figure 5 Rear view; < Mystery tag remains unchanged as it's likely a placeholder or an unrecognized tag in this context. < Mystery tag

[0039] remains unchanged as it's likely a placeholder or an unrecognized tag in this context. < Mystery tag Figure 7 remains unchanged as it's likely a placeholder or an unrecognized tag in this context. It is a connection schematic diagram of two cooling transmission parts of the present invention;

[0040] Figure 8 It is a cross-sectional view of the cooling transmission part of the present invention;

[0041] Figure 9 It is an exploded view of the cooling transmission part of the present invention;

[0042] Figure 10 It is the present invention Figure 9 Bottom view; < Mystery tag

[0043] remains unchanged as it's likely a placeholder or an unrecognized tag in this context. < Mystery tag Figure 11 remains unchanged as it's likely a placeholder or an unrecognized tag in this context. It is a cross-sectional view of the cooling housing of the present invention;

[0044] Figure 12 It is a cross-sectional view of the protective cover 3 of the present invention;

[0045] Figure 13 It is the present invention Figure 12 Enlarged schematic diagram of part A shown;

[0046] Figure 14 It is a schematic structural diagram of the tensioning mechanism of the present invention;

[0047] Figure 15 It is the present invention Figure 14 Front view.

[0048] In the attached drawings, the list of components represented by each reference numeral is as follows:

[0049] 1, platform; 2, swing arm rotating shaft; 3, protective cover; 31, sealing cover; 4, drive mechanism; 5, bearing seat; 6, rotating rod; 7, brush; 8, cooling mechanism; 9, tensioning mechanism; 10, warning light;

[0050] 401, swing arm motor; 402, first drive gear; 403, brush motor; 404, second drive gear; 405, drive rod; 406, first driven gear; 407, second driven gear;

[0051] 81, refrigeration box; 82, cooling transmission part; 83, infusion part; 84, air cooling part;

[0052] Some tags like ,

[0039] , Figure 7 ,

[0043] , Figure 11 seem to be placeholders or unrecognized tags in this context, so they are left unchanged as per the instruction. If there's more context available, we might be able to better handle them.821, linkage shaft; 822, limit plate; 823, rotating ring; 824, fastening bolt; 825, first transmission gear; 826, limit seat; 827, cooling shell; 828, water inlet pipe; 829, water outlet pipe;

[0053] 831, water pump; 832, water pipe; 833, diversion pipe; 834, return pipe;

[0054] 841, drive motor; 842, second transmission gear; 843, ventilation slot; 844, round rod; 845, fan blade; 846, filter plate; 847, third transmission gear; 848, brush plate;

[0055] 901. Support seat; 902. Vertical plate; 903. Spring; 904. U-shaped seat; 905. Guide rod; 906. Guide block; 907. Tensioning pulley; 908. Contact switch; 909. Resistance block. DETAILED DESCRIPTION

[0056] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0057] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0058] Secondly, the term "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in a preferred embodiment" appearing in various places throughout this specification does not necessarily refer to the same embodiment, nor does it constitute a separate or selective embodiment that is mutually exclusive of other embodiments.

[0059] Furthermore, the present invention is described in detail with reference to schematic diagrams. For ease of illustration, when describing the embodiments of the present invention, cross-sectional views illustrating device structures may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely illustrative and should not limit the scope of protection of the present invention. Furthermore, in actual production, the three-dimensional dimensions of length, width, and depth should be included.

[0060] Please see the attached Figures 1 to 15 As shown, this embodiment provides a wafer surface cleaning device, including a platform 1, a circular protective shell is provided on the top surface of the platform 1, a swing arm shaft 2 is rotatably provided on the platform 1, a protective cover 3 is fixedly connected to the upper end of the swing arm shaft 2, and a sealing cover 31 is provided on the upper end of the protective cover 3;

[0061] The driving mechanism 4 is arranged at the lower end of the platform 1 and operates by means of a driving device;

[0062] The bearing seat 5 is installed on the bottom surface of the protective cover 3. A rotating rod 6 is rotatably connected to the bearing seat 5. The upper end of the rotating rod 6 extends into the protective cover 3 and is rotatably connected to the protective cover 3. A brush 7 is installed at the lower end of the rotating rod 6;

[0063] The cooling mechanism 8 is arranged in the protective cover 3 and is used for cooling the transmission components;

[0064] The tensioning mechanism 9 is arranged in the protective cover 3 and is used for tensioning the transmission components;

[0065] Among them, the cooling mechanism 8 includes a refrigeration box 81 which is fixedly installed on the bottom surface of the protective cover 3. Cooling transmission parts 82 are fixedly installed at both ends of the protective cover 3. An infusion part 83 is arranged between the refrigeration box 81 and the cooling transmission parts 82. An air-cooling part 84 is arranged at the lower end of the protective cover 3.

[0066] Secondly, please refer to again Figure 2 and Figure 3 The driving mechanism 4 includes a swing arm motor 401 and a brush motor 403. The swing arm motor 401 and the brush motor 403 are both installed on the bottom surface of the platform 1. A first driving gear 402 is fixedly installed at the upper end of the output shaft of the swing arm motor 401. A second driving gear 404 is fixedly installed at the lower end of the output shaft of the brush motor 403. A driving rod 405 is rotatably connected inside the swing arm rotating shaft 2. The upper end of the driving rod 405 extends into the protective cover 3 and is rotatably connected to the protective cover 3. A first driven gear 406 is fixedly installed on the outer wall of the lower end of the swing arm rotating shaft 2. A second driven gear 407 is fixedly installed at the lower end of the driving rod 405.

[0067] In this embodiment, after starting the swing arm motor 401, it will drive the first driving gear 402 to start rotating. This rotation is transmitted through the meshing between the first driving gear 402 and the first driven gear 406, and finally the swing arm rotating shaft 2 can be rotated. Similarly, after starting the brush motor 403, it will drive the second driving gear 404 to start rotating. This rotation is transmitted through the meshing between the second driving gear 404 and the second driven gear 407, and finally the driving rod 405 can be rotated. These two processes are both realized by starting the motor. Starting the motor enables the meshing transmission between the gears, thereby realizing the rotation of the swing arm rotating shaft 2 and the driving rod 405. This series of actions are all for realizing the functions of the device. By precisely controlling the start and stop of the motor, the rotation of the swing arm rotating shaft 2 and the driving rod 405 can be precisely controlled, so as to achieve the expected effect.

[0068] In addition, both the swing arm motor 401 and the brush 7 motor are arranged on the bottom surface of the platform 1, which can place the center of gravity of the swing arm near the axis of the swing arm rotation shaft, greatly reducing the weight at the end of the swing arm. During operation, the inertia of the swing arm based on the rotation shaft will be reduced, which can reduce the jitter and jerks of the swing arm during operation. Moreover, placing the motor below the entire swing arm is more convenient for maintenance, avoiding contamination caused by opening the process cavity and also avoiding personal injury.

[0069] Next, please also refer to Figures 4 to 11 , the cooling transmission part 82 includes a linkage shaft 821. Two linkage shafts 821 are respectively connected to the upper ends of the rotating rod 6 and the driving rod 405. A limiting plate 822 is inserted at the upper end of the linkage shaft 821. A rotating ring 823 is rotatably connected to the bottom surface of the limiting plate 822. A fastening bolt 824 is threadedly connected to the upper end of the linkage shaft 821. A first transmission gear 825 is installed at the middle end of the linkage shaft 821. The lower end of the linkage shaft 821 is rotatably connected to a limiting seat 826, and the bottom surface of the limiting seat 826 is fixedly connected to the bottom surface of the inner cavity of the protective cover 3 by a support rod. A cooling shell 827 is rotatably connected in the limiting seat 826. A water inlet pipe 828 and a water outlet pipe 829 are connected to the limiting seat 826.

[0070] In this embodiment, the function of the driving rod 405 is to drive the linkage shaft 821 fixedly connected to its upper end to rotate. First transmission gears 825 are installed on the two linkage shafts 821, and they are driven by a toothed belt to achieve the synchronous rotation of the two linkage shafts 821. When the left linkage shaft 821 rotates, it will drive the rotating rod 6 to rotate, and then drive the brush 7 to rotate.

[0071] In order to ensure the stability of the toothed belt during operation and prevent it from shifting, a limiting plate 822 is arranged above the toothed belt, and a limiting seat 826 is arranged below it. The limiting plate 822 and the limiting seat 826 limit the toothed belt, which can improve the stability of the toothed belt during operation. The specific installation steps are as follows: First, the sealing cover 31 needs to be opened, and then the toothed belt is sleeved on the two first transmission gears 825. Then, the limiting plate 822 is sleeved on the linkage shaft 821, and then the fastening bolt 824 is threadedly connected to the upper end of the linkage shaft 821 and tightened. The limiting plate 822 can be pressed down by the fastening bolt 824 to limit the toothed belt.

[0072] In addition, a rotating ring 823 is rotatably connected to the bottom surface of the limit plate 822. The rotating ring 823 protrudes slightly from the bottom surface of the limit plate 822 by a certain part, so the limit plate 822 will not contact the first transmission gear 825 and the toothed belt. Similarly, the cooling shell 827 rotatably connected to the limit seat 826 below the first transmission gear 825 also protrudes slightly from the top surface of the limit seat 826 by a certain part, so the limit seat 826 will not contact the first transmission gear 825 and the toothed belt either. By the rotating rotating ring 823 and the cooling shell 827 contacting the first transmission gear 825, such a design can reduce the frictional force generated during the operation of the toothed belt and lower the transmission resistance.

[0073] Secondly, please refer to Figures 4 to 7 again. The infusion part 83 includes a water pump 831. The water pump 831 is installed on the front surface of the refrigeration box 81, and the water pumping end of the water pump 831 is communicated with the refrigeration box 81. A water delivery pipe 832 is connected to the water drainage end of the water pump 831. One end of the water delivery pipe 832 extends into the protective cover 3 and is connected with two groups of shunt pipes 833, and the other ends of the two groups of shunt pipes 833 are respectively connected with two water inlet pipes 828. Two return pipes 834 are connected to the back surface of the refrigeration box 81, and the other ends of the return pipes 834 are connected with the water outlet pipe 829.

[0074] In this embodiment, first, the refrigeration box 81 cools the coolant inside it to ensure that its temperature is appropriate. Immediately afterwards, the water pump 831 is started. Its function is to pump the coolant. After starting the water pump 831, the coolant will be guided to flow along the water delivery pipe 832, then enter the shunt pipes 833, and finally enter the bottom of the limit seat 826 through the water inlet pipes 828. As the coolant in the limit seat 826 continuously increases, the liquid level of the coolant will gradually rise. The purpose of this process is to ensure that the coolant can fully contact the components that need to be cooled.

[0075] After the liquid level rises, the coolant will flow into the cooling shell 827 along the annular groove opened at the lower end of the cooling shell 827. The first transmission gear 825 and the toothed belt are effectively cooled through the way of heat exchange. This is to avoid damage to the transmission components caused by excessive temperature due to the heat generated by friction during long-term transmission.

[0076] After cooling the first transmission gear 825 and the toothed belt, the coolant will flow into the upper end of the limit seat 826 along the slot holes opened on the outer circle of the cooling shell 827. Then, the coolant will be discharged into the return pipe 834 through the water outlet pipe 829. This step is to redirect the coolant back to the refrigeration box 81 for a new round of cooling process.

[0077] Such a cyclic process can continuously cool the first transmission gear 825 and the toothed belt, effectively avoiding equipment wear problems caused by overheating. This cooling mechanism not only improves the cooling efficiency of the equipment, but also extends the service life of the equipment and improves its stability.

[0078] It should be noted that the function of the refrigeration box 81 is to cool the internal coolant, and a publicly available product on the current market is used. When selecting a model, it should be selected to meet the requirements of this application as much as possible on the premise that the specifications and usage scenarios are suitable. The specific model specifications are not limited here.

[0079] Please refer to again Figure 12 With Figure 13 , the air-cooling part 84 includes a driving motor 841. The driving motor 841 is installed on the bottom surface of the protective cover 3. A second transmission gear 842 is fixedly installed on the output shaft of the driving motor 841. A ventilation groove 843 is opened on the bottom surface of the protective cover 3. A bracket is fixedly connected to the inner wall of the ventilation groove 843, and a round rod 844 is rotatably connected to the center of the bracket. A fan blade 845 is fixedly installed at the upper end of the round rod 844. A filter plate 846 is fixedly connected to the lower end of the ventilation groove 843, and the filter plate 846 is rotatably connected to the round rod 844. A third transmission gear 847 is fixedly installed at the lower end of the round rod 844, and a brush plate 848 is also installed at the lower end of the round rod 844.

[0080] In this embodiment, a driving motor 841 that can be started during the cooling stage is designed. This motor will drive the second transmission gear 842 to rotate. Immediately afterwards, the second transmission gear 842 and the third transmission gear 847 drive the round rod 844 to rotate through meshing transmission, and then the fan blade 845 can rotate to generate wind and send it into the protective cover 3. It should be noted that during the air flow process, it will first pass through the shunt pipe 833. This design effectively cools the air and turns it into cold air. This cold air can dissipate heat from the inside of the protective cover 3 as a whole, thus greatly reducing the working temperature of the first transmission gear 825 and the toothed belt. This not only ensures the stability of the drive system, but also greatly extends their service life and reduces their aging speed.

[0081] In addition, a filter plate 846 is designed on the bottom surface of the ventilation groove 843. This filter plate 846 can effectively block particulate impurities in the air and prevent these impurities from entering the protective cover 3. At the same time, during the rotation of the round rod 844, it will drive the brush plate 848 to rotate to clean the filter plate 846. Such a cleaning mechanism effectively prevents the blockage of the filter plate 846, thus ensuring the air flow speed and the stable operation of the entire system.

[0082] It should be added that a temperature sensor can be installed in the protective cover 3 to detect the temperature inside the protective cover 3 in real time, so as to select the start and stop of the air cooling part 84.

[0083] Please refer to again Figure 14 and Figure 15 , the tensioning mechanism 9 includes a support base 901, the support base 901 is connected to the bottom surface of the inner cavity of the protective cover 3, a vertical plate 902 is fixedly connected to the top surface of the support base 901, a spring 903 is fixedly connected to the side surface of the vertical plate 902, the other end of the spring 903 is fixedly connected to a U-shaped seat 904, a tensioning wheel 907 is rotatably connected to the U-shaped seat 904, a guide rod 905 is also connected to the side surface of the vertical plate 902, a guide block 906 is slidably connected to the guide rod 905, and the guide block 906 is fixedly connected to the U-shaped seat 904. A contact switch 908 is also installed on the top surface of the support base 901, and a contact block 909 is fixedly connected to the bottom surface of the U-shaped seat 904. Among them, a warning light 10 is installed on the front surface of the protective cover 3, and the warning light 10 is electrically connected to the contact switch 908.

[0084] In this embodiment, the two tensioning wheels 907 tightly abut against the toothed belt, ensuring that the transmission toothed belt is closely fitted to the first transmission gear 825 during the transmission process, preventing slipping or slackening. This helps to reduce vibration and noise, and improve the transmission efficiency and reliability. When the transmission toothed belt becomes slack due to wear or elongation, the two tensioning wheels 907 can move away from each other under the action of the restoring force of the spring 903, thereby automatically adjusting the position of the tensioning wheels 907 and increasing the tension to maintain an appropriate tension state; and a guide block 906 is provided on the U-shaped frame where the tensioning wheels 907 are installed, and the guide block 906 and the guide rod 905 form a sliding structure, so that it can be guided and limited during the movement of the tensioning wheels 907, ensuring the stability during operation; in addition, when the transmission toothed belt is severely slack and the two U-shaped seats 904 move to the maximum range, the contact block 909 will abut against the contact switch 908, and at this time the warning light 10 will light up to prompt the staff to perform maintenance or repair in time.

[0085] Please refer to again Figure 1 , the swing arm rotating shaft 2 is made of SUS304 material, and a Teflon coating is sprayed on the outside of the swing arm rotating shaft 2. The swing arm rotating shaft 2 is made of SUS304 material to ensure the bending resistance of the swing arm rotating shaft 2. At the same time, a Teflon coating is sprayed on the outside of the swing arm rotating shaft 2, which can further improve the corrosion resistance of the swing arm shaft.

[0086] A method for cleaning a wafer surface with a driving brush to clean the wafer, which is applied to the above-mentioned wafer surface cleaning equipment, includes the following steps:

[0087] Step 1: Start the swing arm motor 401 to drive the first drive gear 402 to rotate. Through gear meshing transmission, drive the swing arm rotating shaft 2 to rotate. Start the brush motor 403 to drive the second drive gear 404 to rotate. Through gear meshing transmission, drive the drive rod 405 to rotate;

[0088] Step 2: The rotation of the drive rod 405 drives the linkage shaft 821 to rotate. The first transmission gears 825 on the two linkage shafts 821 achieve synchronous rotation through the toothed belt;

[0089] Step 3: The rotation of the left linkage shaft 821 drives the rotating rod 6 to rotate. The rotation of the rotating rod 6 drives the brush 7 to rotate, and starts to clean the wafer;

[0090] Step 4: Both the swing arm motor 401 and the brush motor 403 are placed at the bottom of the platform 1 to optimize the center of gravity position of the swing arm and reduce the jitter during operation;

[0091] Step 5: Set the limit plate 822 and the limit seat 826 on the toothed belt to prevent the toothed belt from running off track, improve the operation stability. When installing the toothed belt, fix the limit plate 822 through the fastening bolt 824 to ensure that the toothed belt is effectively limited;

[0092] Step 6: Use the refrigeration box 81 to cool the coolant. Extract the coolant through the water pump 831, and enter the limit seat 826 through the water delivery pipe 832, the shunt pipe 833 and the water inlet pipe 828. The coolant enters the cooling shell 827 to cool the first transmission gear 825 and the toothed belt. Then it flows into the upper end of the limit seat 826 along the outer groove holes of the cooling shell 827, and is discharged into the return pipe 834 through the water outlet pipe 829, and finally flows back to the refrigeration box 81 for circulating cooling;

[0093] Step 7: The drive motor 841 drives the fan blade 845 to rotate, and blows cold air into the inside of the protective cover 3 to further reduce the temperature of the first transmission gear 825 and the toothed belt. The rotation of the round rod 844 also drives the brush plate 848 to rotate to clean the filter plate 846, prevent blockage, and ensure the air circulation speed;

[0094] Step 8: The two tension wheels 907 ensure that the toothed belt fits tightly with the first transmission gear 825 to prevent slipping or slackening. When the toothed belt is severely slackened, the warning light 10 is triggered to prompt the staff to perform maintenance or repair in time.

[0095] The working principle of the present invention is:

[0096] Start the swing arm motor 401 to drive the first drive gear 402 to rotate. This gear drives the first driven gear 406 through meshing transmission, and then makes the swing arm rotating shaft 2 rotate. Start the brush motor 403 to drive the second drive gear 404 to rotate, which drives the second driven gear 407 through meshing transmission, and then drives the drive rod 405 to rotate. The rotation of the drive rod 405 also drives the linkage shaft 821 fixedly connected to its upper end to rotate. The first transmission gears 825 on the two linkage shafts 821 rotate synchronously through belt transmission. The rotation of the left linkage shaft 821 drives the rotating rod 6 to rotate, and then drives the brush 7 to rotate.

[0097] To ensure the stable operation of the belt and prevent it from running off track, a limit plate 822 is set above the belt, and a limit seat 826 is set below it. The two jointly limit the belt, improving the stability of operation. The bottom surface of the limit plate 822 is rotatably connected with a rotating ring 823, and the rotating ring 823 slightly protrudes from the bottom surface of the limit plate 822 to prevent the limit plate 822 from contacting the first transmission gear 825 and the belt. At the same time, the cooling shell 827 rotatably connected to the limit seat 826 below the first transmission gear 825 also slightly protrudes from the top surface of the limit seat 826 to prevent the limit seat 826 from contacting the first transmission gear 825 and the belt, so as to reduce the friction force and lower the transmission resistance.

[0098] Cool the coolant through the control of the refrigeration box 81, and the water pump 831 extracts the coolant and enters the bottom of the limit seat 826 along the water delivery pipe 832, the shunt pipe 833 and the water inlet pipe 828. As the coolant increases, the liquid level gradually rises and enters the cooling shell 827, and cools the first transmission gear 825 and the belt through heat exchange. Subsequently, the coolant then flows into the upper end of the limit seat 826 along the outer groove holes of the cooling shell 827, is discharged into the return pipe 834 through the water outlet pipe 829, and finally flows back to the refrigeration box 81 for circulating cooling.

[0099] In addition, a ventilation and heat dissipation structure is also equipped. The drive motor 841 drives the second transmission gear 842 to rotate, which drives the round rod 844 to rotate through meshing transmission, and then drives the fan blade 845 to rotate to blow air into the inside of the protective cover 3. When the air flows, it is first cooled into cold air by the shunt pipe 833 to dissipate heat from the inside of the protective cover 3 as a whole, further reducing the temperature of the first transmission gear 825 and the belt. The filter plate 846 set on the bottom surface of the ventilation slot 843 can block particulate impurities in the air and prevent the impurities from entering the protective cover 3. The rotation of the round rod 844 also drives the brush plate 848 to rotate to clean the filter plate 846 and prevent blockage, ensuring the air flow rate.

[0100] Two tension wheels 907 tightly contact the toothed belt, ensuring that the toothed belt closely adheres to the first transmission gear 825 during the transmission process, preventing slipping or slackening. When the toothed belt becomes slack due to wear or elongation, the tension wheels 907 move away from each other under the action of the restoring force of the spring 903, automatically adjusting the tension state. The guide block 906 provided on the U-shaped seat 904 and the guide rod 905 form a sliding structure, providing guidance and limit for the movement of the tension wheels 907. When the toothed belt is severely slack, the contact block 909 will contact the contact switch 908, triggering the warning light 10 to light up, prompting the staff to perform maintenance or repair in a timely manner.

[0101] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention. The structures, devices, and operation methods not specifically described and explained in the present invention, unless otherwise specifically stated and limited, are implemented according to the conventional means in the art.

Claims

1. A wafer surface cleaning device, characterized in that: The invention comprises a platform (1), wherein a circular protective shell is provided on the top surface of the platform (1), a swing arm shaft (2) is rotatably provided on the platform (1), a protective cover (3) is fixedly connected to the upper end of the swing arm shaft (2), and a sealing cover (31) is provided at the upper end of the protective cover (3); A driving mechanism (4), the driving mechanism (4) being arranged at the lower end of the platform (1) and being operated by a driving device; A bearing seat (5), the bearing seat (5) is mounted on the bottom surface of the protective cover (3), a rotating rod (6) is rotatably connected to the bearing seat (5), and the upper end of the rotating rod (6) extends into the protective cover (3) and is rotatably connected to the protective cover (3), and a brush (7) is mounted on the lower end of the rotating rod (6); A cooling mechanism (8), the cooling mechanism (8) being arranged in the protective cover (3) and being used for cooling the transmission assembly; A tensioning mechanism (9), the tensioning mechanism (9) being arranged in the protective cover (3) and being used for tensioning the transmission assembly; The cooling mechanism (8) includes a refrigeration box (81), the refrigeration box (81) is fixedly mounted on the bottom surface of the protective cover (3), cooling transmission parts (82) are fixedly mounted on both ends of the protective cover (3), an infusion part (83) is provided between the refrigeration box (81) and the cooling transmission part (82), and an air cooling part (84) is provided at the lower end of the protective cover (3).

2. The wafer surface cleaning device according to claim 1, characterized in that: The driving mechanism (4) comprises a swing arm motor (401) and a brush motor (403), both of which are mounted on the bottom surface of the platform (1), a first driving gear (402) being fixedly mounted on the upper end of the output shaft of the swing arm motor (401), a second driving gear (404) being fixedly mounted on the lower end of the output shaft of the brush motor (403), a driving rod (405) being rotatably connected to the interior of the swing arm rotating shaft (2), and an upper end of the driving rod (405) extending into the protective cover (3) and being rotatably connected to the protective cover (3), a first driven gear (406) being fixedly mounted on the outer wall of the lower end of the swing arm rotating shaft (2), and a second driven gear (407) being fixedly mounted on the lower end of the driving rod (405).

3. The wafer surface cleaning device according to claim 2, characterized in that: The cooling transmission part (82) includes a linkage shaft (821), and the two linkage shafts (821) are respectively connected to the upper ends of the rotating rod (6) and the driving rod (405), the upper ends of the linkage shafts (821) are plugged with a limit plate (822), the bottom surface of the limit plate (822) is rotatably connected to a rotating ring (823), the upper end of the linkage shaft (821) is threadedly connected to a fastening bolt (824), the middle end of the linkage shaft (821) is installed with a first transmission gear (825), the lower end of the linkage shaft (821) is rotatably connected to a limit seat (826), and the bottom surface of the limit seat (826) is fixedly connected to the bottom surface of the inner cavity of the protective cover (3) by a support rod, the limit seat (826) is rotatably connected to a cooling shell (827), and the limit seat (826) is connected to a water inlet pipe (828) and a water outlet pipe (829).

4. The wafer surface cleaning device according to claim 3, characterized in that: The infusion part (83) includes a water pump (831), which is installed on the front of the refrigeration box (81), and the water pump end of the water pump (831) is connected to the refrigeration box (81). The water discharge end of the water pump (831) is connected to a water pipe (832), one end of the water pipe (832) extends into the protective cover (3) and is connected to two groups of diversion pipes (833), and the other ends of the two groups of diversion pipes (833) are respectively connected to two water inlet pipes (828). The back of the refrigeration box (81) is connected to two return pipes (834), and the other end of the return pipe (834) is connected to the water outlet pipe (829).

5. The wafer surface cleaning device according to claim 1, characterized in that: The air cooling part (84) includes a driving motor (841), which is mounted on the bottom surface of the protective cover (3). A second transmission gear (842) is fixedly mounted on the output shaft of the driving motor (841). A ventilation slot (843) is provided on the bottom surface of the protective cover (3). The inner wall of the ventilation slot (843) is fixedly connected to a bracket, and a round rod (844) is rotatably connected to the center of the bracket. A fan blade (845) is fixedly mounted on the upper end of the round rod (844). A filter plate (846) is fixedly connected to the lower end of the ventilation slot (843), and the filter plate (846) is rotatably connected to the round rod (844). A third transmission gear (847) is fixedly mounted on the lower end of the round rod (844). A brush plate (848) is also mounted on the lower end of the round rod (844).

6. The wafer surface cleaning device according to claim 1, characterized in that: The tensioning mechanism (9) comprises a support seat (901), the support seat (901) is connected to the bottom surface of the inner cavity of the protective cover (3), the top surface of the support seat (901) is fixedly connected to a vertical plate (902), the side surface of the vertical plate (902) is fixedly connected to a spring (903), the other end of the spring (903) is fixedly connected to a U-shaped seat (904), a tensioning wheel (907) is rotatably connected to the U-shaped seat (904), the side surface of the vertical plate (902) is also connected to a guide rod (905), the guide rod (905) is slidably connected to a guide block (906), and the guide block (906) is fixedly connected to the U-shaped seat (904), the top surface of the support seat (901) is also installed with a contact switch (908), and the bottom surface of the U-shaped seat (904) is fixedly connected to a resistance block (909).

7. The wafer surface cleaning device according to claim 1, characterized in that: The swing arm shaft (2) is made of SUS304 material, and a Teflon coating is sprayed on the outside of the swing arm shaft (2).

8. The wafer surface cleaning device according to claim 1, characterized in that: A warning light (10) is installed on the front of the protective cover (3), and the warning light (10) is electrically connected to the contact switch (908).

9. A method for cleaning a wafer surface using a driven brush, characterized in that: A wafer surface cleaning device according to any one of claims 1 to 8, comprising the following steps: Step 1: Start the swing arm motor (401), drive the first drive gear (402) to rotate, drive the swing arm shaft (2) to rotate through the gear meshing transmission, start the brush motor (403), drive the second drive gear (404) to rotate, and drive the drive rod (405) to rotate through the gear meshing transmission; Step 2: The rotation of the driving rod (405) drives the linkage shaft (821) to rotate, and the first transmission gears (825) on the two linkage shafts (821) rotate synchronously through the toothed belt; Step 3: The rotation of the left linkage shaft (821) drives the rotating rod (6) to rotate, and the rotation of the rotating rod (6) drives the brush (7) to rotate, and the wafer cleaning begins; Step 4: The swing arm motor (401) and the brush motor (403) are both placed on the bottom surface of the platform (1) to optimize the center of gravity position of the swing arm and reduce vibration during operation; Step 5: Set a limit plate (822) and a limit seat (826) on the toothed belt to prevent the toothed belt from deviating. When installing the toothed belt, fix the limit plate (822) by fastening bolts (824) to ensure that the toothed belt is effectively limited; Step 6: Use the refrigeration box (81) to cool the coolant, extract the coolant through the water pump (831), pass through the water pipe (832), the diversion pipe (833) and the water inlet pipe (828) into the limit seat (826), and the coolant enters the cooling shell (827) to cool the first transmission gear (825) and the toothed belt, and then flows along the outer ring slot of the cooling shell (827) into the upper end of the limit seat (826), and is discharged into the return pipe (834) through the outlet pipe (829), and finally flows back to the refrigeration box (81) for circulation cooling; Step 7: The driving motor (841) drives the fan blades (845) to rotate, blowing cold air into the interior of the protective cover (3), further reducing the temperature of the first transmission gear (825) and the toothed belt. The rotation of the round rod (844) also drives the brush plate (848) to rotate, cleaning the filter plate (846) to prevent blockage and ensure air circulation speed; Step 8: The two tensioning wheels (907) ensure that the toothed belt fits tightly against the first transmission gear (825) to prevent slippage or loosening. When the toothed belt is severely loose, the trigger warning light (10) lights up, prompting the staff to perform maintenance or repair in time.

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