A basket for cleaning and drying wafers

Abstract

The application belongs to the technical field of wafer processing technology, in particular to a flower basket for cleaning and drying wafers, which comprises a fixed bottom part, a clamping part is arranged on the back of the outer surface of the fixed bottom part, a drainage part is arranged at the bottom of the clamping part, a drainage part is arranged on the side of the fixed bottom part, the fixed bottom part comprises a horizontal box shell, and guide sliding rods are symmetrically arranged on the lower surface of the horizontal box shell. When the device is used, the wafers are stored in the wafer storage part, then the sealed box shell is injected with cleaning liquid, and the effect of centralized cleaning of the wafers is realized. In order to ensure the stability of the wafers, the general flower basket clamps the wafers, at this time, the clamped part of the wafers cannot be cleaned because the cleaning liquid cannot contact it, and a cleaning dead angle is generated. The device fixes the wafers in the inside through the rubber rollers, and the wafers can continuously rotate in the cleaning process, so that the cleaning dead angle of the wafers is eliminated.

Description

Technical Field

[0001] This invention belongs to the field of wafer processing technology, specifically a flower basket for cleaning and drying wafers. Background Technology

[0002] In the field of wafer processing, wafers need to undergo multiple cleaning processes with high cleanliness requirements, followed by timely drying. Both cleaning and drying processes must ensure the wafers are not damaged; furthermore, the effectiveness and efficiency of cleaning and drying must be improved.

[0003] Existing basket cleaning equipment gathers the wafers to be cleaned and dries them inside the basket. However, during the cleaning process, the annular side of the wafers cannot be effectively cleaned because it is in contact with the basket. If the basket's holding tank is enlarged, although the cleaning fluid can effectively clean the wafers, the wafers cannot be effectively contained and fixed, making them prone to loosening during cleaning and thus easily breaking. Therefore, effective improvements are needed. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the technical solution adopted by this invention to solve its technical problems is: a flower basket for cleaning and drying wafers, comprising a fixed base, a fastening component provided on the back of the outer surface of the fixed base, a drainage component provided at the bottom of the fastening component, and a flow guiding component provided at the bottom of the fixed base.

[0005] The fixed base includes a horizontal box shell, and guide slide rods are symmetrically arranged on both sides of the lower surface of the horizontal box shell. Wafer storage components are evenly arranged on the inner wall of the horizontal box shell to store vertically placed wafers. The wafer storage components on the upper and lower sides need to be combined together to relatively seal the internal wafers.

[0006] The wafer storage component includes an arc-shaped rotating shell. Arc-shaped clamping plates are fixedly connected to the outer surfaces of both sides of the arc-shaped rotating shell. Rubber rollers are symmetrically arranged on both sides of the inner cavity of the arc-shaped clamping plates via rotating rods. A motor is installed inside the inner cavity of the arc-shaped clamping plates. The rotation of the rubber rollers is controlled by inserting the rod of the rotating shaft into the inner wall of the rubber rollers, preventing water from entering the motor. Blowers are symmetrically arranged on both sides of the inner wall of the arc-shaped clamping plates. A flow-diverting plate is fixedly connected to the air outlet of the blowers via a nozzle. Water-proof baffles are symmetrically arranged on both sides of the lower surface of the arc-shaped rotating shell. The blowers can divert and diffuse the hot air blown out by the blowers through the flow-diverting plates, and then enter the area where the internal wafer is located through the water-proof baffles.

[0007] Furthermore, the fastening component includes a fastening shell and a side base. Both sides of the upper surface of the side base are fixedly connected to a long cylindrical shell via a support plate. The upper part of the inner cavity of the long cylindrical shell is evenly provided with annular rotating grooves. A solid rotating rod is rotatably connected to the inner wall of the long cylindrical shell. The outer surface of the solid rotating rod is fixedly connected to the back of the outer surface of the fastening shell via a connecting plate. Torque motors are fixedly connected to both ends of the solid rotating rod. The torque motors can drive the fastening shell to rotate axially by rotating the solid rotating rod, thereby achieving the effect of opening the fixed bottom component.

[0008] Furthermore, the outer surface of the side base is slidably connected to the lower part of the outer surface of the horizontal housing via a guide groove, the outer surface of the snap-fit ​​shell is slidably connected to the outer surface of the long cylindrical shell via a circumferentially cut groove, and the outer surface of the torque motor is fixedly connected to the side of the long cylindrical shell. The outer surface of the arc-shaped clamping plate is fixedly connected to the inner wall of the horizontal housing, and drainage grooves are evenly provided at the bottom of the inner cavity of the horizontal housing. The outer surface of the blower box is fixedly connected to the inner wall of the arc-shaped clamping plate, and the outer surface of the water-proof baffle and the outer surface of the diversion plate are pressed against each other, thereby blowing hot air into the blower box on both sides of the bottom of the inner wall of the arc-shaped clamping plate. Then, the gas flows back from bottom to top to the area where the wafer is located through the opening at the bottom of the arc-shaped rotating groove shell due to the diversion effect of the water-proof baffle, thereby drying the wafer. The inner cavity of the arc-shaped rotating shell has symmetrical through slots on both sides. A portion of the outer surface of the rubber roller is exposed to the inner cavity of the arc-shaped rotating shell through the through slots. The rubber roller can rotate in the inner cavity of the arc-shaped rotating shell to rotate the wafer. The inner wall of the snap-fit ​​shell is also uniformly provided with wafer storage components.

[0009] Furthermore, the drainage component includes a drainage tube with drainage grooves evenly distributed within its inner cavity. A pressure divider is evenly distributed on the outer surface of the drainage tube, and a vertical drain pipe is evenly distributed at the bottom of the pressure divider's inner cavity. Both ends of the drainage tube are fixedly connected to a pressure booster, and the bottom of the pressure booster's inner cavity is fixedly connected to a water inlet. The pressure booster first adds cleaning fluid to the inside of the drainage tube by pressurizing it. The cleaning fluid enters the pressure divider under the diversion effect of the drainage grooves, and is then pumped along the vertical drain pipe into the side area of ​​the wafer storage component. The cleaning fluid then seeps into the merged wafer storage component from the side. The lower surface of the pressure divider is fixedly connected to the upper surface of the snap-fit ​​shell. The outer surface of the drainage tube is fixedly connected to the inner cavity of the pressure divider through the drainage grooves. The bottom end of the vertical drain pipe extends into the interior of the snap-fit ​​shell through a through-hole. The outer surface of the pressure booster is fixedly connected to the outer surface of the snap-fit ​​shell.

[0010] Furthermore, the drainage component includes a water receiving tank. The bottom of the inner cavity of the water receiving tank is uniformly provided with drainage grooves. The front and rear sides of the upper surface of the water receiving tank are symmetrically provided with guide rails. The left and right sides of the outer surface of the water receiving tank are symmetrically provided with height adjustment plates. The top of the height adjustment plate is fixedly connected with a compression rod. The height adjustment plate can slide up and down through the segmented structure in the middle. The top of the height adjustment plate can control the actual length of the compression rod by pressurizing the compression rod. The end of the compression rod away from the height adjustment plate is fixedly connected with a connecting plate. The middle of the inner cavity of the connecting plate is provided with an insertion groove. Semi-circular grooves are provided on both sides of the snap-fit ​​shell and both sides of the horizontal shell. The connecting plate can be inserted into the semi-circular groove through the insertion groove in the middle. The lower surface of the horizontal housing is slidably connected to the inner wall of the drainage groove via a guide slide rod. The lower part of the inner cavity of the connecting plate is inserted into the inner cavity of the horizontal housing via an insertion groove. The upper part of the inner cavity of the connecting plate is inserted into the inner cavity of the fastening shell via an insertion groove.

[0011] The beneficial effects of this invention are as follows:

[0012] 1. When using this device, the wafer is stored inside the wafer storage component, and then cleaning fluid is injected into the combined sealed box to achieve centralized cleaning of the wafer. Because ordinary baskets clamp the wafer to ensure its stability, the clamped parts of the wafer cannot be cleaned because the cleaning fluid cannot reach them, resulting in cleaning dead corners. This device uses rubber rollers to fix the wafer inside, and during the cleaning process, the wafer can be continuously rotated to eliminate cleaning dead corners.

[0013] 2. After the cleaning process is completed, the wafers and the arc-shaped turntable housing on which the wafers are placed will definitely be covered with cleaning liquid. At this time, drying is required to remove water stains. The blowers on both sides can spray the added gas from the inside out, thereby cleaning the water stains inside the wafer storage component. Since the hot air blows out from the bottom up and exhausts through the vertical drain pipe above, there will be no problem of incomplete drying or water stains remaining in the corners inside the wafer storage component.

[0014] 3. The device first uses high-powered pressure boosters on both sides to keep each drainage tube full of liquid. Then, it uses a lower-powered pressure divider to inject the cleaning fluid into the tank. This ensures a sufficient supply of cleaning fluid while avoiding the problem of the pressure booster directly supplying liquid to the inside of the tank, which would cause excessive pressure on the internal components and damage them.

[0015] 4. During the cleaning process, the connecting plates on both sides slide left and right synchronously via the compression linkage, which in turn drives the horizontal housing to slide along the drainage groove via the guide slide at the bottom, causing the housing to sway left and right. Since the wafer is fixed in place by the rubber rollers, the cleaning fluid inside will sway relative to the wafer, thus effectively cleaning the sides of the wafer. The shaking of the housing can quickly dry any residual cleaning fluid inside, which is more efficient than natural drainage, thereby improving work efficiency. Attached Figure Description

[0016] Figure 1 This is the front view of the present invention;

[0017] Figure 2 This is a cross-sectional view of the present invention;

[0018] Figure 3 This is a cross-sectional view of the fixing base of the present invention;

[0019] Figure 4 This is a cross-sectional view of the wafer storage component of the present invention;

[0020] Figure 5 This is a cross-sectional view of the fastening component of the present invention;

[0021] Figure 6 This is a schematic diagram of the drainage component of the present invention;

[0022] Figure 7 This is a schematic diagram of the drainage component of the present invention.

[0023] In the diagram: 1. Fastening component; 2. Fixing base; 3. Drainage component; 4. Drainage component; 21. Horizontal housing; 22. Guide slide rod; 23. Wafer storage component; 231. Arc-shaped rotating slot housing; 232. Arc-shaped clamping plate; 233. Rubber roller; 234. Waterproof baffle; 235. Blower box; 236. Diverter plate; 11. Fastening housing; 12. Side base; 13. Long cylindrical housing; 14. Circumferential rotating slot; 15. Solid rotating rod; 16. Torque motor; 41. Drainage long pipe; 42. Drainage slot; 43. Pressure divider; 44. Vertical drain pipe; 45. Pressure booster; 46. Water inlet; 31. Water receiving tank; 32. Guide slide rail; 33. Drainage slot; 34. Height adjustment plate; 35. Compression connecting rod; 36. Connecting plate; 37. Insertion slot. Detailed Implementation

[0024] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the invention to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical application of the invention, and to enable those skilled in the art to understand the invention and design various embodiments with various modifications suitable for a particular purpose.

[0025] Example 1, please refer to Figures 1-5 The present invention provides a technical solution: a flower basket for cleaning and drying wafers, including a fixed base 2, a fastening component 1 is provided on the back of the outer surface of the fixed base 2, a drainage component 3 is provided at the bottom of the fastening component 1, and a drainage component 4 is provided at the bottom of the fixed base 2.

[0026] The fixed base 2 includes a horizontal box shell 21. Guide slide rods 22 are symmetrically arranged on both sides of the lower surface of the horizontal box shell 21. Wafer storage components 23 are evenly arranged on the inner wall of the horizontal box shell 21 to store vertically placed wafers. The wafer storage components 23 on the upper and lower sides need to be combined together to relatively seal the internal wafers.

[0027] The wafer storage component 23 includes an arc-shaped rotating housing 231. Arc-shaped clamping plates 232 are fixedly connected to the outer surfaces of both sides of the arc-shaped rotating housing 231. Rubber rollers 233 are symmetrically arranged on both sides of the inner cavity of the arc-shaped clamping plates 232 via rotating rods. A motor is installed in the inner cavity of the arc-shaped clamping plates 232. The rod of the rotating shaft is inserted into the inner wall of the rubber rollers 233 to control the rotation of the rubber rollers 233 and prevent water from entering the motor. Blowers 235 are symmetrically arranged on both sides of the inner wall of the arc-shaped clamping plates 232. A diversion plate 236 is fixedly connected to the air outlet of the blowers 235 via a nozzle. Water-proof baffles 234 are symmetrically arranged on both sides of the lower surface of the arc-shaped rotating housing 231. The blowers 235 can divert and diffuse the hot air blown out by the diversion plate 236, and then enter the area where the internal wafer is located through the water-proof baffles 234.

[0028] The fastening component 1 includes a fastening shell 11 and a side base 12. Both sides of the upper surface of the side base 12 are fixedly connected to a long cylindrical shell 13 by a support plate. The upper part of the inner cavity of the long cylindrical shell 13 is evenly provided with annular rotating grooves 14. A solid rotating rod 15 is rotatably connected to the inner wall of the long cylindrical shell 13. The outer surface of the solid rotating rod 15 is fixedly connected to the back of the outer surface of the fastening shell 11 by a connecting plate. A torque motor 16 is fixedly connected to both ends of the solid rotating rod 15. The torque motor 16 can drive the fastening shell 11 to rotate axially by rotating the solid rotating rod 15, thereby achieving the effect of opening the fixed bottom component 2.

[0029] The outer surface of the side base 12 is slidably connected to the lower part of the outer surface of the horizontal housing 21 via a guide groove. The outer surface of the snap-fit ​​housing 11 is slidably connected to the outer surface of the long cylindrical housing 13 via a ring-cut groove 14. The outer surface of the torque motor 16 is fixedly connected to the side of the long cylindrical housing 13. The outer surface of the arc-shaped clamping plate 232 is fixedly connected to the inner wall of the horizontal housing 21. Drainage grooves are evenly provided at the bottom of the inner cavity of the horizontal housing 21. The outer surface of the blower box 235 is fixedly connected to the inner wall of the arc-shaped clamping plate 232. The outer surface of the water-proof baffle 234 and the outer surface of the diversion plate 236 are pressed against each other, so that hot air is blown in through the blower box 235 on both sides of the bottom of the inner wall of the arc-shaped clamping plate 232. Then, the gas flows back from bottom to top to the area where the wafer is located through the opening at the bottom of the arc-shaped rotating groove housing 231 by the diversion effect of the water-proof baffle 234, thereby drying the wafer. The inner cavity of the arc-shaped rotating housing 231 is symmetrically provided with through slots on both sides. A portion of the outer surface of the rubber roller 233 is exposed to the inner cavity of the arc-shaped rotating housing 231 through the through slots. The rubber roller 233 can rotate in the inner cavity of the arc-shaped rotating housing 231 to rotate the wafer. The inner wall of the snap-fit ​​housing 11 is also uniformly provided with wafer storage components 23.

[0030] When cleaning wafers using this device, the round wafers are sequentially inserted into the wafer storage component 23 inside the fixed base 2, ensuring that each wafer is in a vertical position under the support of the wafer storage component 23. Then, the torque motor 16 on the back controls the solid rotating rod 15 to rotate, causing the upper snap-fit ​​shell 11 to snap onto the horizontal box shell 21. At this time, the wafer storage components 23 on the upper and lower sides are spliced ​​together to confine the wafers to the internal area.

[0031] During the cleaning process, cleaning fluid is injected into the interior of the chamber through the upper drainage component 4. Since the speed of adding cleaning fluid is faster than the speed of discharge through the bottom drainage channel of the horizontal chamber shell 21, the cleaning fluid will gradually fill the entire chamber. Then, during cleaning, the rubber rollers 233 that are in direct contact with the side of the wafer will rotate under the control of the arc-shaped clamping plate 232. Then, the rubber rollers 233 on all four sides will drive the wafer held in the arc-shaped rotating chamber shell 231 to rotate around the axis, thereby making the wafer rotate inside the cleaning fluid and achieving the effect of cleaning the wafer.

[0032] After cleaning, the cleaning fluid inside the chamber is discharged through the groove at the bottom of the horizontal chamber shell 21. After discharge, the snap-fit ​​shell 11 is not opened temporarily. Hot air is first blown in through the blowers 235 on both sides of the bottom of the inner wall of the arc-shaped card plate 232. Then, the gas flows back from bottom to top to the area where the wafer is located through the opening at the bottom of the arc-shaped rotating shell 231 by the diversion effect of the water-proof baffle 234, and dries the residual cleaning fluid.

[0033] After drying, open the snap-fit ​​shell 11 and take out the internal wafers in sequence to obtain relatively clean wafers that have been cleaned.

[0034] Example 2, please refer to Figures 1-7 The present invention provides a technical solution: Based on the first embodiment, the drainage component 4 includes a drainage tube 41, the inner cavity of the drainage tube 41 is uniformly provided with drainage grooves 42, the outer surface of the drainage tube 41 is uniformly provided with pressure dividers 43, the bottom of the inner cavity of the pressure divider 43 is uniformly provided with vertical drainage pipes 44, both ends of the drainage tube 41 are fixedly connected with pressure boosters 45, the bottom of the inner cavity of the pressure booster 45 is fixedly connected with a water inlet 46, the pressure booster 45 first adds cleaning fluid to the inside of the drainage tube 41 by pressurization, the cleaning fluid enters the pressure divider 43 under the diversion action of the drainage grooves 42, the pressure divider 43 pumps the cleaning fluid along the vertical drainage pipes 44 into the side area of ​​the wafer storage component 23, and then the cleaning fluid seeps into the merged wafer storage component 23 from the side. The lower surface of the pressure divider 43 is fixedly connected to the upper surface of the snap-fit ​​housing 11. The outer surface of the drain pipe 41 is fixedly connected to the inner cavity of the pressure divider 43 through the drain groove 42. The bottom end of the vertical drain pipe 44 extends into the interior of the snap-fit ​​housing 11 through the through-hole. The outer surface of the pressure booster 45 is fixedly connected to the outer surface of the snap-fit ​​housing 11.

[0035] The drainage component 3 includes a water receiving tank 31. The bottom of the inner cavity of the water receiving tank 31 is evenly provided with drainage grooves 33. The front and rear sides of the upper surface of the water receiving tank 31 are symmetrically provided with guide rails 32. The left and right sides of the outer surface of the water receiving tank 31 are symmetrically provided with height adjustment plates 34. The top of the height adjustment plate 34 is fixedly connected with a compression rod 35. The height adjustment plate 34 can slide up and down through the segmented structure in the middle. The top of the height adjustment plate 34 can control the actual length of the compression rod 35 by pressurizing the compression rod 35. The end of the compression rod 35 away from the height adjustment plate 34 is fixedly connected with a connecting plate 36. The middle of the inner cavity of the connecting plate 36 is provided with an insertion groove 37. Semi-circular grooves are provided on both sides of the snap-fit ​​shell 11 and both sides of the horizontal shell 21. The connecting plate 36 can be inserted into the semi-circular groove through the insertion groove 37 in the middle. The lower surface of the horizontal housing 21 is slidably connected to the inner wall of the drainage groove 33 via the guide slide rod 22. The lower part of the inner cavity of the connecting plate 36 is inserted into the inner cavity of the horizontal housing 21 via the insertion groove 37. The upper part of the inner cavity of the connecting plate 36 is inserted into the inner cavity of the fastening shell 11 via the insertion groove 37.

[0036] The cleaning fluid is injected into the enclosed housing using the drainage component 4. The liquid is injected into each drainage tube 41 through the pressure injectors 45 on both sides. The cleaning fluid is evenly distributed to each pressure divider 43 through the drainage groove 42 of the drainage tube 41. Then, the pressure divider 43 pressurizes the cleaning fluid here and injects it into the vertical drain pipe 44. The cleaning fluid is poured into the enclosed housing through the vertical drain pipe 44. The cleaning fluid seeps into the interior of the wafer storage component 23 through the side area of ​​the wafer storage component 23.

[0037] When the snap-fit ​​shell 11 and the horizontal box shell 21 are merged, the cuts on both sides of the horizontal box shell 21 will be inserted into the insertion slots 37 on the upper part of the connecting plate 36. At this time, the merged shell will be connected to the connecting plate 36 on both sides. During the cleaning operation, the connecting plates 36 on both sides will slide left and right synchronously through the compression connecting rod 35, thereby driving the horizontal box shell 21 to slide along the drainage slot 33 through the bottom guide slide rod 22, causing the box shell to sway left and right. Since the wafer is fixed by the rubber roller 233 and will not sway, the cleaning fluid inside will sway relative to the wafer, thereby rinsing the wafer in the horizontal direction. The waste liquid discharged from the bottom slot of the horizontal box shell 21 will be discharged through the drainage slot 33.

[0038] Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of the present invention without inventive effort should fall within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described and explained in the present invention, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A flower basket for cleaning and drying wafers, comprising a fixed base (2), wherein a fastening component (1) is provided on the back of the outer surface of the fixed base (2), a drainage component (3) is provided at the bottom of the fastening component (1), and a drainage component (4) is provided on the side of the fixed base (2), characterized in that: The fixed base (2) includes a horizontal box shell (21), and guide slide rods (22) are symmetrically arranged on both sides of the lower surface of the horizontal box shell (21). Wafer storage components (23) are uniformly arranged on the inner wall of the horizontal box shell (21) to store vertically placed wafers. The wafer storage component (23) includes an arc-shaped rotating shell (231). Arc-shaped clamping plates (232) are fixedly connected to the outer surfaces of both sides of the arc-shaped rotating shell (231). Rubber rollers (233) are symmetrically arranged on both sides of the inner cavity of the arc-shaped clamping plate (232) via rotating rods. Blowers (235) are symmetrically arranged on both sides of the inner wall of the arc-shaped clamping plate (232). A flow divider plate (236) is fixedly connected to the air outlet of the blower (235) via a nozzle. Water-proof baffles (234) are symmetrically arranged on both sides of the lower surface of the arc-shaped rotating shell (231). The fastening component (1) includes a fastening shell (11) and a side base (12). Both sides of the upper surface of the side base (12) are fixedly connected to a long cylindrical shell (13) by a support plate. The upper part of the inner cavity of the long cylindrical shell (13) is evenly provided with annular grooves (14). A solid rotating rod (15) is rotatably connected to the inner wall of the long cylindrical shell (13). The outer surface of the solid rotating rod (15) is fixedly connected to the back of the outer surface of the fastening shell (11) by a connecting plate. Both ends of the solid rotating rod (15) are fixedly connected to a torque motor (16). The outer surface of the side base (12) is slidably connected to the lower part of the outer surface of the horizontal box shell (21) through the guide groove, the outer surface of the snap-fit ​​shell (11) is slidably connected to the outer surface of the long cylindrical shell (13) through the circumferential rotating groove (14), and the outer surface of the torque motor (16) is fixedly connected to the side of the long cylindrical shell (13). The outer surface of the arc-shaped card plate (232) is fixedly connected to the inner wall of the horizontal box shell (21). The bottom of the inner cavity of the horizontal box shell (21) is uniformly provided with drainage grooves. The outer surface of the blower box (235) is fixedly connected to the inner wall of the arc-shaped card plate (232). The outer surface of the water-proof baffle (234) and the outer surface of the diversion plate (236) are squeezed against each other, so that hot air is blown in through the blower box (235) on both sides of the bottom of the inner wall of the arc-shaped card plate (232). Then, the gas flows back from bottom to top to the area where the wafer is located through the opening at the bottom of the arc-shaped rotating shell (231) through the diversion effect of the water-proof baffle (234), thereby drying the wafer. The inner cavity of the arc-shaped rotating shell (231) is symmetrically provided with through slots on both sides. A portion of the outer surface of the rubber roller (233) is exposed to the inner cavity of the arc-shaped rotating shell (231) through the through slots. The rubber roller (233) can rotate in the inner cavity of the arc-shaped rotating shell (231) to rotate the wafer. The inner wall of the snap-fit ​​shell (11) is also uniformly provided with wafer storage components (23).

2. The flower basket for cleaning and drying wafers according to claim 1, characterized in that: The drainage component (4) includes a drainage tube (41), the inner cavity of the drainage tube (41) is uniformly provided with drainage grooves (42), the outer surface of the drainage tube (41) is uniformly provided with pressure dividers (43), the bottom of the inner cavity of the pressure divider (43) is uniformly provided with vertical drainage pipes (44), both ends of the drainage tube (41) are fixedly connected with pressure boosters (45), and the bottom of the inner cavity of the pressure booster (45) is fixedly connected with a water inlet (46).

3. The flower basket for cleaning and drying wafers according to claim 2, characterized in that: The lower surface of the pressure divider (43) is fixedly connected to the upper surface of the snap-fit ​​shell (11). The outer surface of the drain pipe (41) is fixedly connected to the inner cavity of the pressure divider (43) through the drain groove (42). The bottom end of the vertical drain pipe (44) extends into the interior of the snap-fit ​​shell (11) through the through-hole. The outer surface of the pressure booster (45) is fixedly connected to the outer surface of the snap-fit ​​shell (11).

4. The flower basket for cleaning and drying wafers according to claim 1, characterized in that: The drainage component (3) includes a water receiving tank (31). The bottom of the inner cavity of the water receiving tank (31) is evenly provided with a drainage groove (33). The front and rear sides of the upper surface of the water receiving tank (31) are symmetrically provided with guide rails (32). The left and right sides of the outer surface of the water receiving tank (31) are symmetrically provided with height adjustment plates (34). The top of the height adjustment plate (34) is fixedly connected with a compression rod (35). The end of the compression rod (35) away from the height adjustment plate (34) is fixedly connected with a connecting plate (36). The middle of the inner cavity of the connecting plate (36) is provided with an insertion groove (37).

5. The flower basket for cleaning and drying wafers according to claim 4, characterized in that: The lower surface of the horizontal housing (21) is slidably connected to the inner wall of the drainage groove (33) via the guide slide rod (22). The lower part of the inner cavity of the connecting plate (36) is inserted into the inner cavity of the horizontal housing (21) via the insertion groove (37). The upper part of the inner cavity of the connecting plate (36) is inserted into the inner cavity of the snap-fit ​​shell (11) via the insertion groove (37).

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