Material carrying system fault detection device and material carrying system
By automatically collecting and analyzing fault data by fault detection trucks operating on the track of the material handling system, the problems of difficulty in detecting faults and high maintenance costs in the existing technology are solved, efficient and accurate fault detection of the track of the material handling system are achieved, and production rate is improved.
Patent Information
- Application Number
- CN202510174308.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-17
- Publication Date
- 2025-04-29
AI Technical Summary
The existing material handling system is difficult to detect faults and has high maintenance costs. It is impossible to achieve accurate detection of various location points on the track, and the failure rate is high.
Design a fault detection device for material handling system, including a running mechanism, a fault detection module, a fault analysis module, a fault processing module and a data upload module. Through the fault detection car running on the track, it automatically collects and analyzes fault data, and realizes automatic continuous detection of various types of faults.
It realizes automatic fault detection of the tracks of the material handling system, saves manpower and time, improves fault detection accuracy, reduces track failures and production downtime, and improves production rate.
Smart Images
Figure CN119905439A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor technology, and in particular to a material handling system fault detection device and a material handling system. Background Art
[0002] AMHS (Automated Material Handling System) trolley (VHL) is an automatic handling system commonly used in semiconductors, also known as an overhead crane system. Since the overhead crane system is transported on the ceiling and is highly automated, it is very difficult to perform track inspection and PM (preventive maintenance) to ensure production. The current overhead crane system fault detection requires maintenance personnel to perform fixed-point maintenance, which is time-consuming and labor-intensive, and it is impossible to accurately detect each location point, resulting in a high failure rate.
[0003] It should be noted that the information disclosed in the above background technology section is only used to enhance the understanding of the background of the present invention, and therefore may include information that does not constitute the prior art known to ordinary technicians in the field. Summary of the invention
[0004] In response to the problems in the prior art, the purpose of the present application is to provide a material handling system fault detection device and a material handling system, by which the fault detection device performs fault detection during the operation of the material handling system on the track, thereby saving manpower and time and improving the accuracy of fault detection.
[0005] The present application provides a material handling system fault detection device, comprising:
[0006] A running mechanism is installed on the track of the material handling system and can move along the track;
[0007] A fault detection module, used for acquiring fault detection data during the movement of the running mechanism along the track;
[0008] A fault analysis module, used to determine whether there is a specified type of fault based on the fault detection data;
[0009] A fault processing module, configured to execute a fault processing process corresponding to the specified type of fault when it is determined that the specified type of fault exists;
[0010] The data uploading module is used to upload the fault notification to the server when it is determined that the specified type of fault exists.
[0011] In some embodiments, the fault detection module includes a particle detection sensor for collecting track images; the fault analysis module is used to perform image analysis based on the track images to determine whether there is a track particle fault;
[0012] The fault handling module includes a vacuum cleaner and a cleaning vacuum unit, wherein the cleaning vacuum unit is disposed above the track and can be driven to move closer to or away from the track. The fault handling module is used to control the cleaning vacuum unit to move closer to the track and perform a cleaning vacuum operation when it is determined that a track particle fault exists.
[0013] In some embodiments, the fault processing module includes a fault shutdown unit, which is used to execute a material handling system shutdown operation when it is determined that the specified type of fault exists and the specified type of fault corresponds to a shutdown operation.
[0014] In some embodiments, the fault detection module includes a vibration test sensor for collecting vibration data when the device moves on the track; the fault analysis module is used to determine whether there is a vibration fault based on the vibration data.
[0015] In some embodiments, the fault detection module includes a horizontal test sensor for collecting horizontal test data at an electronic horizontal detection point when the device moves on the track; the fault analysis module is used to determine whether there is a horizontal fault based on the horizontal test data.
[0016] In some embodiments, the fault detection module includes a step difference test sensor for collecting step difference data at the connection position of the track segments when the device moves on the track; the fault analysis module is used to determine whether there is a step difference fault based on the step difference data.
[0017] In some embodiments, the fault detection module includes a track height test sensor for collecting height data of the device from the ceiling when the device moves on the track; the fault analysis module is used to determine whether there is a track height fault based on the height data.
[0018] In some embodiments, the fault detection module includes a track excitation line detection sensor for collecting operating parameters of the power supply excitation line in the track; the fault analysis module is used to determine whether there is an excitation line fault based on the operating parameters of the power supply excitation line.
[0019] In some embodiments, the fault detection module also includes a track interference detection sensor for collecting track obstacle data when the device moves on the track; the fault analysis module is used to determine whether there is a track interference fault based on the track obstacle data.
[0020] The present application also provides a material handling system, including:
[0021] track;
[0022] A material handling vehicle, used for carrying designated materials and capable of being driven to move along the track; and
[0023] The material handling system fault detection device.
[0024] The material handling system fault detection device and material handling system provided by the present application have the following advantages:
[0025] The present application provides a fault detection device applied to a material handling system, which automatically performs fault detection during the operation of the material handling system on the track, without the need for frequent manual detection at fixed points, effectively saving manpower and time, and the fault detection device can automatically and continuously detect various types of faults at various positions on the track, which is more accurate than manual inspection, effectively improving the comprehensiveness and accuracy of fault detection, reducing track faults in the material handling system, reducing the situation where production areas are shut down due to faults, and improving production utilization rates. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] The accompanying drawings herein are incorporated into and constitute a part of the specification, illustrate embodiments consistent with the present invention, and together with the specification are used to explain the principles of the present invention. Obviously, the accompanying drawings described below are only some embodiments of the present invention, and for those of ordinary skill in the art, other accompanying drawings can be obtained based on these accompanying drawings without creative work.
[0027] Figure 1 It is a schematic diagram of the structure of a material handling vehicle of a material handling system;
[0028] Figure 2 is a structural schematic diagram of a material handling system fault detection device according to an embodiment of the present application;
[0029] Figure 3 It is a schematic diagram of judging particle detection by a material handling system fault detection device according to an embodiment of the present application;
[0030] Figure 4 It is a structural schematic diagram of a material handling system fault detection device for an embodiment of the present application performing vibration and horizontal tests;
[0031] Figure 5 It is a schematic diagram of a track having a step difference according to an embodiment of the present application;
[0032] Figure 6 It is a structural schematic diagram of a material handling system fault detection device performing a step difference test according to an embodiment of the present application;
[0033] Figure 7 It is a structural schematic diagram of a material handling system fault detection device for performing track height detection according to an embodiment of the present application;
[0034] Figure 8 It is a structural schematic diagram of an excitation line temperature detection performed by a material handling system fault detection device according to an embodiment of the present application;
[0035] Fig. 9 It is a structural schematic diagram of a material handling system fault detection device for detecting track obstacles according to an embodiment of the present application;
[0036] Fig.10 It is a structural block diagram of a material handling system according to an embodiment of the present application.
[0037] Reference numerals:
[0038] 10 Material transport vehicle 24 Cleaning and dust collection unit
[0039] 11 Material transport vehicle travel unit 25 Particle detection sensor
[0040] 12 Front-opening unified material box 26 Vibration and level tester
[0041] 13 Chuck 27 Step detection sensor
[0042] 20 Fault detection device 28 Track height distance sensor
[0043] 21 Shell 29 Excitation line temperature detection sensor
[0044] 22 Vacuum cleaner 210 Track obstacle detection sensor
[0045] 23 running unit 30 track
[0046] 231 Traveling wheel 40 Ceiling DETAILED DESCRIPTION
[0047] The example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in a variety of forms and should not be construed as being limited to the embodiments set forth herein; on the contrary, these embodiments are provided so that the present application will be comprehensive and complete, and the concept of the example embodiments will be fully conveyed to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated descriptions will be omitted. "Or" and "or" in the specification may both represent "and" or "or". Spatial relationship terms such as "on..." and the like can be used here to describe the relationship between an element or feature shown in the figure and other elements or features. It should be understood that in addition to the orientations shown in the figures, spatial relationship terms also include different orientations of devices in use and operation. For example, if the device in the drawings is flipped, the element or feature described as "on..." will be oriented to be "under..." other elements or features. Therefore, the exemplary term "on..." may include both upper and lower orientations. In addition, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptions used herein are interpreted accordingly.
[0048] When used herein, the singular forms "a", "an" and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that when the terms "consisting of" and / or "comprising" are used in this specification, the presence of the features, integers, steps, operations, elements and / or parts can be determined, but the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups is not excluded. At the same time, when used herein, the term "and / or" includes any and all combinations of the relevant listed items. Although "first" or "second" etc. are used in this specification to represent certain features, they are only used to represent the role, and are not used as a limitation on the number and importance of specific features.
[0049] In response to the problems of difficulty in fault detection and high maintenance cost of material handling systems in the prior art, the present application provides a material handling system fault detection device and a material handling system, aiming to perform fault detection on the track of the material handling system through the fault detection device, saving manpower and time and improving the accuracy of fault detection.
[0050] The present application provides a material handling system fault detection device, comprising:
[0051] A running mechanism is installed on the track of the material handling system and can move along the track; the running mechanism at least includes a running wheel and a drive motor, the running wheel is installed on the track, and the running wheel is driven by the drive motor to move on the track;
[0052] A fault detection module, used for acquiring fault detection data during the movement of the running mechanism along the track;
[0053] A fault analysis module, used to determine whether there is a specified type of fault based on the fault detection data;
[0054] A fault processing module is used to execute the fault processing process corresponding to the specified type of fault when it is determined that the specified type of fault exists; in this embodiment, the fault processing module includes a fault shutdown unit, which is used to execute a material handling system shutdown operation when it is determined that the specified type of fault exists and the specified type of fault corresponds to a shutdown operation; the fault processing module may also include other parts, such as a vacuum cleaner for cleaning, etc.;
[0055] The data upload module is used to upload the fault notification to the server when it is determined that the specified type of fault exists. The fault notification includes the fault type and fault detection data related to the fault. After the fault notification is uploaded to the server, the server stores the log. The operation and maintenance personnel can export the data and parse and process the data using a specific software algorithm. The operation and maintenance personnel analyze the cause of the fault by parsing the data and handle it in time, and perform preventive maintenance in advance.
[0056] like Fig.10 As shown, the embodiment of the present application also provides a material handling system, including:
[0057] Track M100, used for installation above the location where the material handling system needs to be installed;
[0058] The material handling vehicle M200 is used to carry designated materials and can be driven to move along the track; for example, when the material handling system is applied to the semiconductor field, the material handling vehicle can be used to transport front-opening unified material boxes;
[0059] The material handling system fault detection device M300.
[0060] The present application provides a fault detection device applied to a material handling system, which automatically performs fault detection during the operation of the material handling system on a track, without the need for frequent manual detection at fixed points, effectively saving manpower and time. The fault detection device can automatically and continuously detect various types of faults at various locations on the track, which is more accurate than manual inspection, effectively improving the comprehensiveness and accuracy of fault detection.
[0061] Figure 1 exemplarily shows a structure of a material handling vehicle and a track. Figure 1 As shown, the material transport vehicle 10 includes a front opening unified pod (FOUP) 12 disposed under a track 30 , a chuck 13 for fixing the pod 12 , and a material transport vehicle travel unit 11 disposed on the track 30 . Figure 2The structure of a material handling system fault detection device of the present application is exemplarily shown in the figure. The fault detection device 20 is configured in the form of a fault detection vehicle (Vehicle, VHL), which is basically similar in shape and size to a material handling vehicle, or can be modified based on an existing material handling vehicle to better adapt to the track 30. The fault detection device 20 can at least realize one or more of the following functions: track particle detection, track vibration detection, track level detection, track segment difference detection, track height detection, track excitation line detection, and track interference detection. The fault detection device 20 is not provided with a structure for carrying materials. As Figure 2 As shown, the fault detection device 20 includes a housing 21, a running mechanism 23 disposed above a track 30, a dust collector disposed below the track 30, and a cleaning dust collecting unit 24 disposed above the track. The material handling system fault detection device can be used for detection during the operation of the material handling system, as long as its movement along the track does not conflict with the material handling vehicle. The fault detection device collects fault detection data in real time during the movement.
[0062] The fault detection device also includes a controller, which can be set on the fault detection vehicle body or separately set outside, such as using an industrial PC as the controller. The fault analysis module, the fault shutdown unit in the fault processing module and the data upload module are set on the controller side. The controller is also used to manage the travel path of the fault detection vehicle and control the test start and end instructions of the fault detection vehicle. After the fault detection module collects the fault detection data, it transmits it to the controller through the OPC substrate by wireless transmission, and the controller records and processes the measurement data. The controller can also be used to collect and display data pages, manage data history, and notify users when a fault occurs. The fault detection module can also collect position data, speed data, time data, etc. to determine the position of the fault detection vehicle on the track. The following takes the fault detection device including the fault detection vehicle and the industrial PC as an example to specifically explain the implementation method of the fault detection device. The controller interacts with the server (MCP) and uploads the data to the server. The operation and detection of the fault detection vehicle can be carried out on demand or periodically.
[0063] Because the material handling vehicle is driven by friction on the track, particles will inevitably appear on the track. If they are not handled in time, it will affect the production and the dust-free environment on site. Figure 2 Schematic diagram of the structure of a material handling system fault detection device according to an embodiment of the present application. Figure 2As shown, the fault detection module includes a particle detection sensor 25 for collecting track images. The particle detection sensor 25 is, for example, an AI camera sensor. The fault analysis module is used to perform image analysis based on the track image to determine whether there is a track particle fault. Figure 3 FIG. 1 is a schematic diagram showing the determination of particle detection by a material handling system fault detection device according to an embodiment of the present application. Figure 3 As shown, the fault analysis module can analyze the track image and divide the track image into a condition with fewer particles, a condition with particle accumulation, a condition with particle scattering, etc. When the particle accumulation condition and the particle scattering condition occur, the dust collection operation and the shutdown operation are triggered to prevent the normal operation of the material handling vehicle from being affected by too many track particles. After the dust collection operation is completed, the start-up operation is triggered, and the material handling system resumes normal operation.
[0064] like Figure 2 As shown, the fault handling module includes a vacuum cleaner 22 and a cleaning dust suction unit 231. The cleaning dust suction unit 231 is arranged above the track 30, and the vacuum cleaner 22 is arranged below the track 30. The cleaning dust suction unit 231 can be driven by a motor to move close to or away from the track. When there is no track particle fault, the cleaning dust suction unit 231 does not contact the surface of the track 30 and is located at a position relatively far away from the track 30 to avoid affecting the normal movement of the fault detection vehicle. The fault handling module is used to control the cleaning dust suction unit 231 to approach the track 30 and perform a cleaning dust suction operation when it is determined that there is a track particle fault. After performing the cleaning dust suction operation, the track particles are continuously detected. If no particles are detected after 5s, the vacuum cleaner is turned off and the cleaning dust suction unit 231 is driven to rise again. Then, the particle detection sensor 25 is used to detect particles in the track dust suction area, and the data and photos before and after cleaning are uploaded to the server.
[0065] During long-term use, the fixing screws and mechanical parts of the track will slightly deform and loosen, resulting in poor mechanical fit, which requires inspection and debugging. It is difficult to shut down the track in the wafer factory, and it is necessary to accurately understand the track accuracy in order to conduct targeted debugging. Figure 4 1 is a schematic diagram of the structure of a material handling system fault detection device for performing vibration and horizontal testing according to an embodiment of the present application. Figure 4 As shown, the fault detection module includes a vibration test sensor and may also include a level test sensor. Figure 3The vibration test sensor and the horizontal test sensor are marked with 26. Sensor 26 can be installed in the opening on the fault detection trolley body. The vibration test sensor is used to collect vibration data when the device moves on the track, obtain vibration data generated by the fault detection trolley executing and turning on the track and upload it to the server. The fault analysis module is used to determine whether there is a vibration fault based on the vibration data. The horizontal test sensor is used to collect horizontal test data at the electronic horizontal detection point when the device moves on the track. Specifically, the fault detection trolley stops briefly at the electronic horizontal detection point (EQ LP) position, and records the current horizontal X / Y value through the horizontal test sensor (such as an electronic horizontal tester) and uploads it to the server, and then the fault detection trolley continues to move to the next position point for measurement. The fault analysis module is used to determine whether there is a horizontal fault based on the horizontal test data.
[0066] Figure 5 Schematic diagram of a track having a step difference in one embodiment of the present application. Figure 5 As shown, due to the long-term use of the track, the fixing screws and mechanical parts will undergo slight deformation and loosening, resulting in poor mechanical fit. The connection between the tracks may cause abnormal mechanical wear due to excessive step differences. Figure 6 1 is a schematic diagram of the structure of a material handling system fault detection device for performing a step difference test according to an embodiment of the present application. Figure 6 As shown, the fault detection module includes a step difference test sensor 27, which is used to collect step difference data at the connection position of the track segment when the device moves on the track. The fault analysis module is used to determine whether there is a step difference fault based on the step difference data. The step difference test sensor 27 can be, for example, an image sensor or a laser ranging sensor. When the fault detection trolley is running, the step difference test sensor 27 continues to work. According to the requirements of mainstream AMHS manufacturers, a step difference of more than 0.5 mm is NG (shutdown), which is recorded and uploaded to the server.
[0067] When the ceiling is used for a long time, screws may become loose or the manual adjustment may be uneven, resulting in inappropriate track height, increased mechanical clearance, and abnormal wear. Figure 7 1 is a schematic diagram of the structure of a material handling system fault detection device for performing track height detection according to an embodiment of the present application. Figure 7As shown, the fault detection module includes a track height test sensor 28, which is used to collect the height data of the device from the ceiling when it moves on the track. The fault analysis module is used to determine whether there is a track height fault based on the height data. The track height test sensor 28 is, for example, a laser ranging sensor. During the movement of the fault detection trolley, the track height test sensor 28 continuously detects the height from the ceiling. According to the requirements of mainstream AMHS manufacturers, it is judged that when the height deviation benchmark is greater than 10mm, it is NG, and the information is recorded and uploaded to the server.
[0068] The power supply for the fault detection trolley and material transport vehicle is wirelessly powered through the track excitation wire, which is fixed in the excitation support wire slot. Due to long-term operation, the excitation wire may be separated from the wire slot and interfere with the running trolley, resulting in power failure of the trolley in a section of the track. In the early stage of interference between the trolley and the excitation wire, the line will wear and cause the line temperature to rise. The power failure can be prevented by monitoring the temperature of the excitation wire. Loose terminal wiring of the excitation wire will also cause the temperature of the excitation line to rise, which was previously difficult to detect. Figure 8 1 is a schematic diagram of the structure of the material handling system fault detection device for detecting the temperature of the excitation line according to an embodiment of the present application. Figure 8 As shown, the fault detection module includes a track excitation line detection sensor 29, which is used to collect the operating parameters of the power supply excitation line in the track; the fault analysis module is used to determine whether there is an excitation line fault based on the operating parameters of the power supply excitation line. The operating parameters of the power supply excitation line include, for example, the temperature of the power supply excitation line. The track excitation line detection sensor 29 is, for example, an excitation line temperature AR detector. During the operation of the fault diagnosis VHL, the excitation line temperature detection Sensor continuously detects the temperature of the excitation line at the location. According to the requirements of the mainstream AMHS manufacturers, if the temperature is ≥60°C, it is regarded as NG, and the fault data is uploaded to the server.
[0069] Due to the long-term operation of the track, some parts may become loose and fall off, causing interference with the track, thereby causing interference failure with the material transport vehicle. Fig. 9 1 is a schematic diagram of the structure of a material handling system fault detection device for detecting track obstacles according to an embodiment of the present application. Fig. 9As shown, the fault detection module also includes a track interference detection sensor 210, which is used to collect track obstacle data when the device moves on the track. The fault analysis module is used to determine whether there is a track interference fault based on the track obstacle data. The track interference detection sensor 210 is, for example, an image sensor or a laser ranging sensor. During the continuous operation of the fault detection trolley, the track interference detection sensor 210 continuously detects the track and obstacles above it. According to the requirements of mainstream AMHS manufacturers, if the distance in the track running area is less than 10mm, it is judged as NG, recorded and uploaded to the server.
[0070] In summary, the material handling system fault detection device and material handling system provided by the present application have the following advantages:
[0071] The present application provides a fault detection device for a material handling system, which automatically performs fault detection during the operation of the track of the material handling system, without the need for frequent manual fixed-point detection, effectively saving manpower and time, and the fault detection device can automatically and continuously detect various types of faults at each position point of the track, which is more accurate than manual inspection, effectively improving the comprehensiveness and accuracy of fault detection, reducing track faults in the material handling system, reducing the situation of regional production downtime caused by faults, and improving production utilization. The function integration of the fault detection device is high, and the efficiency is improved; it greatly reduces the cost of track PM manpower and track PM downtime loss, which can save about 8.08 million for a wafer fab of an average size; it greatly saves preventive maintenance manpower costs. In a traditional wafer fab, one shift requires 6 manufacturer engineers (2 for adjustment, 2 for support, 1 for safety monitoring, and 1 for VHL car blocking operation). Track PM downtime inspection has a great impact on production. In a traditional wafer fab, the cumulative PM of one day can affect the loss of 1Pcs wafers, and there are about 260 days of PM in a year, and the loss in one year is: 260*1*2=5.2 million. By providing particle environment monitoring, the impact of clean room particle environment is improved, effectively improving production yield.
[0072] The above content is a further detailed description of the present application in combination with specific preferred implementation methods, and it cannot be determined that the specific implementation of the present application is limited to these descriptions. For ordinary technicians in the technical field to which the present application belongs, several simple deductions or substitutions can be made without departing from the concept of the present application, which should be deemed to fall within the scope of protection of the present application.
Claims
1. A material handling system fault detection device, characterized in that: include: A running mechanism is installed on the track of the material handling system and can move along the track; A fault detection module, used for acquiring fault detection data during the movement of the running mechanism along the track; A fault analysis module, used to determine whether there is a specified type of fault based on the fault detection data; A fault processing module, configured to execute a fault processing process corresponding to the specified type of fault when it is determined that the specified type of fault exists; The data uploading module is used to upload the fault notification to the server when it is determined that the specified type of fault exists.
2. The material handling system fault detection device according to claim 1, characterized in that: The fault detection module includes a particle detection sensor for collecting track images; the fault analysis module is used to perform image analysis based on the track images to determine whether there is a track particle fault; The fault handling module includes a vacuum cleaner and a cleaning vacuum unit, wherein the cleaning vacuum unit is disposed above the track and can be driven to move closer to or away from the track. The fault handling module is used to control the cleaning vacuum unit to move closer to the track and perform a cleaning vacuum operation when it is determined that a track particle fault exists.
3. The material handling system fault detection device according to claim 1, characterized in that: The fault processing module includes a fault shutdown unit, which is used to execute a material handling system shutdown operation when it is determined that the specified type of fault exists and the specified type of fault corresponds to a shutdown operation.
4. The material handling system fault detection device according to claim 1, characterized in that: The fault detection module includes a vibration test sensor for collecting vibration data when the device moves on the track; the fault analysis module is used to determine whether there is a vibration fault based on the vibration data.
5. The material handling system fault detection device according to claim 1, characterized in that: The fault detection module includes a level test sensor for collecting level test data at an electronic level detection point when the device moves on the track; The fault analysis module is used to determine whether there is a horizontal fault according to the horizontal test data.
6. The material handling system fault detection device according to claim 1, characterized in that: The fault detection module includes a step difference test sensor for collecting step difference data at the connection position of the track segments when the device moves on the track; the fault analysis module is used to determine whether there is a step difference fault based on the step difference data.
7. The material handling system fault detection device according to claim 1, characterized in that: The fault detection module includes a track height test sensor for collecting height data of the device from the ceiling when the device moves on the track; the fault analysis module is used to determine whether there is a track height fault based on the height data.
8. The material handling system fault detection device according to claim 1, characterized in that: The fault detection module includes a track excitation line detection sensor for collecting operating parameters of the power supply excitation line in the track; The fault analysis module is used to determine whether there is an excitation line fault according to the operating parameters of the power supply excitation line.
9. The material handling system fault detection device according to claim 1, characterized in that: The fault detection module further includes a track interference detection sensor for collecting track obstacle data when the device moves on the track; The fault analysis module is used to determine whether there is a track interference fault based on the track obstacle data.
10. A material handling system, characterized in that: include: track; A material handling vehicle, used to carry designated materials and can be driven to move along the track; as well as A material handling system fault detection device as claimed in any one of claims 1 to 9.