Mechanical arm calibration device and manipulator

Abstract

The mechanical arm calibration device comprises a calibration base station which is coaxially arranged with the axis of a joint, and a plurality of arc-shaped guide channels are formed in the surface of the calibration base station in a circumferential array mode; a plurality of fixing areas opposite to the arc-shaped guide channel are distributed on the circumference of the bearing surface of the base, and at least two fixing holes are formed in each fixing area; the restraining assembly comprises a restraining ring body and a locking piece, the restraining ring body is rotatably arranged on the calibration base table, and a plurality of through holes vertically corresponding to the arc-shaped guide channels are evenly formed in the restraining ring body; the through hole, the arc-shaped guide channel and the fixing hole are selected to form a penetrating constraint path, the locking piece applies axial pressing force along the constraint path, and continuous annular constraint on the calibration base table, the constraint ring body and the base is formed. By the adoption of the scheme, the calibration adjustment range and adjustment precision of the mechanical arm are improved, and the stability of the calibration device is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transfer equipment, and in particular to a robot arm calibration device and a robot arm. Background Art

[0002] In semiconductor processing, dual SCARA (selective compliance articulated robot arm) arm robots can be used to transfer wafers to and from semiconductor processing modules. Dual SCARA arm robots generally allow for rapid exchange of substrates to and from processing modules, where rapid exchange can be referred to as removing one substrate from a processing module and immediately placing another different substrate into the same processing module. The rapid wafer exchange capability of dual SCARA arm robots has become the key to improving production line efficiency. Such robots need to complete precise wafer placement within milliseconds, which places strict requirements on the symmetry calibration accuracy and dynamic stability of the dual arms. Although the current mainstream dual SCARA system can achieve high-speed transfer of substrates, in high-frequency operation scenarios, the robotic arm needs to be calibrated in order to have the ability to maintain long-term posture. In addition, the two robotic arms of the dual SCARA arm robot also need to be calibrated to make them symmetrical.

[0003] Traditional dual-arm calibration has significant limitations: First, the existing technology relies on disassembly calibration, which requires frequent disassembly and assembly of the forearm and upper arm components, which not only prolongs the equipment downtime, but also the repeated disassembly and assembly can easily cause wear of the connecting parts and introduce secondary installation errors; Second, in the existing technology, the calibration of the forearm and the upper arm is achieved through multiple threaded holes preset at the connection: when adjusting, it is necessary to select a combination of different threaded holes to change the relative position, but because the hole spacing is fixed, only discrete step-by-step adjustment can be achieved, resulting in a limited calibration range and accuracy that is difficult to meet sub-micron requirements; At the same time, the discontinuous constraint formed by the point-by-point bolt fixing makes the connection interface weak in rigidity due to insufficient contact area, which can easily cause micro-displacement accumulation due to stress concentration during high-speed movement.

[0004] Therefore, it is necessary to provide a robot arm calibration device and a robot arm to solve the above problems existing in the prior art. Summary of the invention

[0005] The object of the present invention is to provide a robot arm calibration device and a robot arm, so as to improve the calibration adjustment range and adjustment accuracy of the robot arm and increase the stability of the calibration device.

[0006] To achieve the above object, the technical solution of the present invention is as follows: A first aspect: A robot arm calibration device is applied to a joint of a robot arm, where the joint has a joint axis, comprising: The calibration base is coaxially arranged with the joint axis and has a plurality of arc-shaped guide channels formed in a circular array on its surface; A base, the bearing surface of which is circumferentially distributed with a plurality of fixing areas arranged opposite to the arc-shaped guide channel, each of the fixing areas being provided with at least two fixing holes; A constraint assembly, comprising a constraint ring body and a locking member, wherein the constraint ring body is rotatably arranged on the calibration base with the joint axis as the rotation center, and a plurality of through holes corresponding to the arc-shaped guide channel in a uniform manner are formed on the constraint ring body; the through holes, the arc-shaped guide channel and the fixing hole are selected to form a through constraint path, and the locking member applies an axial pressing force along the constraint path to form a continuous annular constraint on the calibration base, the constraint ring body and the base; Wherein, when the constraint ring body rotates relative to the calibration base, the vertical projection of at least one fixing hole in each fixing area always forms a dynamic overlapping area with one of the multiple arc-shaped guide channels, and when the calibration base rotates relative to the base, at least one fixing hole in each fixing area is always maintained to correspond vertically to one of the multiple arc-shaped guide channels.

[0007] The beneficial effect of a manipulator shoulder joint provided by the present invention is that by opening a plurality of arc-shaped guide channels in the circumference of the mounting shell, replacing the traditional step-by-step threaded hole design, the relative angle adjustment of the forearm and upper arm components breaks through the discrete spacing limitation. The continuous guiding characteristics of the arc-shaped guide channel allow the manipulator to be adjusted steplessly along the circumferential direction, and the calibration step length is reduced from a fixed hole spacing to a continuously adjustable one, thereby improving the calibration accuracy and calibration range. In addition, when the constraint ring body forms an axial clamping force through the through hole, the arc-shaped guide channel and the base fixing hole, the overlapping area of ​​the multiple through holes distributed in an annular manner and the arc-shaped guide channel together constitute an annular tightening belt. Compared with the traditional single-bolt point fixation, the annular contact surface disperses the local stress into a uniformly distributed load, thereby increasing the effective contact area of ​​the connection interface and increasing the stability of the connection after calibration.

[0008] Optionally, the mounting shell includes a calibration base, the calibration base is located inside the mounting shell and fixedly connected to an inner wall of the mounting shell, and the arc-shaped guide channel is provided on the calibration base.

[0009] By adopting the above technical solution, the calibration base is located inside the mounting shell, and an arc-shaped guide channel is opened on it, providing an installation foundation for the constraint ring body. This not only improves the calibration accuracy and range of the robot arm, breaks through the discrete spacing limitation of the traditional fixing method, and realizes stepless adjustment in the circumferential direction, but also forms an annular fastening belt through the cooperation of the constraint ring body, the arc-shaped guide channel, and the base fixing hole, disperses local stress, and effectively increases the stability of the connection after calibration.

[0010] Optionally, a rotating connector is provided in the mounting shell, and the rotating connector is used to connect two adjacent joints of the robotic arm. The constraint ring body is annular, and the inner side of the constraint ring body has a clamping area, and the clamping area abuts against the outer side of the rotating connector.

[0011] By adopting the above technical solution, the rotating connector can flexibly connect the adjacent joints of the robot arm, making the movement of the robot arm more stable and helping to accurately control the movement trajectory of the robot arm. The contact between the inner clamping area of ​​the annular constraint ring and the rotating connector can distribute the pressure more evenly, ensuring the stable fixation of the rotating connector, thereby improving the accuracy and reliability of calibration and reducing the error of the robot arm during movement.

[0012] Optionally, a plurality of the arc-shaped guide channels surround and form a calibration area, the calibration base is provided with a countersunk mounting groove downwardly along the edge of the calibration area, the countersunk mounting groove is connected to the arc-shaped guide channel, and the constraint ring is arranged in the countersunk mounting groove.

[0013] By adopting the above technical solution, the countersunk installation groove is opened downward around the edge of the calibration area and connected to the arc-shaped guide channel, providing a special placement space for the constraint ring body, so that the constraint ring body can be stably accommodated in the groove, effectively preventing it from being displaced during installation or use, thereby improving the stability and calibration accuracy of the entire robot arm calibration device. At the same time, this design also helps to optimize the spatial layout inside the installation shell, making the cooperation between the various components more compact and coordinated, and further improving the overall performance of the robot arm calibration device.

[0014] Optionally, the number of the fixing holes is at least twice that of the arc-shaped guide channels, and the projection portion of each arc-shaped guide channel can cover at least two of the fixing holes.

[0015] Optionally, the locking member comprises a bolt, and at least one of the fixing hole and the through hole is a threaded hole, and the bolt is threadedly connected to the fixing hole and / or the through hole.

[0016] Optionally, the calibration base extends horizontally along one side of the inner wall of the mounting shell and is formed integrally therewith.

[0017] Optionally, when the head of the constraining ring body forms a rigid abutment with the bottom wall of the countersunk mounting groove, the top surface of the constraining ring body is arranged coplanar with the reference plane of the calibration base to form a flush assembly surface without step difference.

[0018] Optionally, the rotating connection member comprises a roller bearing having an inner ring and an outer ring, and the projection of the inner edge of the constraining ring body in the vertical direction is located on the outer ring.

[0019] Optionally, it further comprises a first pulley and a second pulley, wherein the first pulley is arranged on the joint axis and fixedly connected to the bottom of the base, the base is fixedly connected to the mounting housing, and the second pulley is coaxial with the first pulley and rotatably connected to the inner ring of the roller bearing. The second pulley is fixedly connected to the power output shaft of the driving source for transmitting the power of the driving source.

[0020] The second aspect: A robotic arm, comprising the above-mentioned robotic arm calibration device, also includes: a main body, a left arm and a right arm pivotally connected to the main body, the left arm and the right arm each comprising an upper arm rotatable around a shoulder axis, a forearm rotatably connected to the upper arm around an elbow axis, and an end effector rotatably connected to the forearm around a wrist axis, the end effector being used to clamp a wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A partial cross-sectional view of a robot arm calibration device according to an embodiment of the present invention; Figure 2 A partial exploded view of a robot arm calibration device according to an embodiment of the present invention; Figure 3 It is a schematic top view of the structure of the base according to an embodiment of the present invention; Figure 4 It is a schematic diagram of the structure of a constraining ring body according to an embodiment of the present invention; Figure 5 It is a partial schematic diagram of a robot arm calibration device according to an embodiment of the present invention; Figure 6 1 is an overall structural diagram of a manipulator according to an embodiment of the present invention.

[0022] Figure numerals: 1. Mounting shell; 11. Arc guide channel; 12. Calibration base; 13. Rotating connection member; 14. Calibration area; 15. Countersunk mounting groove; 2. Constraint assembly; 21. Constraint ring; 211. Through hole; 212. Clamping area; 22. Locking member; 3. Base; 31. Fixing hole; 32. Fixing area; 4. First pulley; 5. Second pulley; 6. Main body; 7. Left arm; 71. Upper arm; 72. Forearm; 73. End effector; 8. Right arm; 9. Wafer. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0024] The following is combined with Figure 1 - Attachment Figure 6 , the specific implementation modes of the present invention are further described in detail.

[0025] First, refer to Figure 1-Figure 2 In some embodiments of the present invention, a robot arm calibration device includes a mounting housing 1, a constraint assembly 2, and a base 3, wherein the mounting housing 1 has a joint axis. The joint axis refers to the shoulder joint axis, elbow joint axis, or wrist joint axis inside the robot arm.

[0026] The constraint assembly 2 includes a constraint ring body 21 and a locking member 22. The mounting shell 1 is provided with a plurality of arc-shaped guide channels 11 in a circular array with the joint axis as the center. The arc-shaped guide channel 11 runs through the mounting shell 1 for connecting to the base 3 below. A plurality of through holes 211 are evenly provided on the constraint ring body 21. By adjusting the position of the constraint ring body 21, the through holes 211 can be connected to or blocked from the arc-shaped guide channel 11. In some specific embodiments of the present invention, the constraint ring body 21 is an annular gasket, the through hole 211 is provided on the annular gasket, and the arc-shaped guide channel 11 is concave toward the center of the gasket.

[0027] In some embodiments of the present invention, the base 3 has a plurality of fixing areas 32 evenly distributed on the circumference of the upper surface of the base 3, and at least one fixing hole 31 is provided in each fixing area 32. The base 3 is fixedly connected to the mounting housing 1 through the constraint assembly 2. The base 3 is coaxial with the joint axis, and the relative position of the base 3 and the mounting housing 1 can be adjusted, and then the base 3 and the mounting housing 1 are fixedly installed through the constraint assembly 2, thereby realizing the calibration of the base 3 and the mounting housing 1.

[0028] Reference Figure 3 and Figure 4In some embodiments of the present invention, one or more of the constraint ring body 21, the calibration base 12, and the base 3 are rotated to cause relative displacement so that the through hole 211, the arc-shaped guide channel 11, and the fixing hole 31 on the constraint ring body 21 form a constraint path that can be penetrated, and the locking member 22 applies an axial pressing force along the constraint path to form a continuous annular constraint on the calibration base 12, the constraint ring body 21, and the base 3; wherein, when the constraint ring body 21 rotates relative to the calibration base 12, the vertical projection of at least one fixing hole 31 in each fixing area 32 always forms a dynamic overlapping area with one of the multiple arc-shaped guide channels 11, and when the calibration base 12 rotates relative to the base 3, at least one fixing hole 31 in each fixing area 32 always maintains a vertical correspondence with one of the multiple arc-shaped guide channels. By opening multiple arc-shaped guide channels 11 circumferentially in the mounting housing 1, replacing the traditional step-by-step threaded hole design, the relative angle adjustment of the forearm 72 and upper arm 71 components breaks through the discrete spacing limitation. The continuous guiding characteristics of the arc-shaped guide channel 11 allow the robot arm to be adjusted steplessly in the circumferential direction, and the calibration step is reduced from the distance of the fixed hole 31 to a continuously adjustable one, thereby improving the calibration accuracy. In addition, when the constraint ring body 21 forms an axial clamping force through the through hole 211, the arc-shaped guide channel 11 and the fixed hole 31 of the base 3, the overlapping area of ​​the multiple through holes 211 distributed in an annular manner and the arc-shaped guide channel 11 together constitute an annular tightening belt. Compared with the traditional single-bolt point fixation, the annular contact surface disperses the local stress into a uniformly distributed load, increases the effective contact area of ​​the connection interface, and increases the stability of the connection after calibration.

[0029] In some embodiments of the present invention, the mounting shell 1 includes a calibration base 12, which is located inside the mounting shell 1 and fixedly connected to the inner wall of the mounting shell 1, and the arc guide channel 11 is opened on the calibration base 12. In some specific embodiments of the present invention, the calibration base 12 extends horizontally along one side of the inner wall of the mounting shell 1 and is integrally formed. The one-piece molding process of the calibration base 12 eliminates the assembly gap between the traditional split calibration base 12 and the shell, reduces the coaxiality error between the opening reference of the arc guide channel 11 and the joint axis, and ensures the circumferential geometric consistency during angle adjustment; in addition, the horizontally extended base structure forms an annular reinforcement rib effect on the inner wall of the mounting shell 1, and its cross-sectional inertia moment is greatly improved compared with the independent base, which can suppress the radial deformation caused by centrifugal force, thereby ensuring the posture stability after calibration.

[0030] In some embodiments of the present invention, a rotating connector 13 is provided in the mounting shell 1, and the rotating connector 13 is used to connect two adjacent joints of the robot arm. The inner side of the constraint ring body 21 has a clamping area 212, and the clamping area 212 is in at least partial contact with the rotating connector 13. The rotating connector 13 can flexibly connect the adjacent joints of the robot arm, making the movement of the robot arm more stable, and helping to accurately control the movement trajectory of the robot arm. The contact between the clamping area 212 of the annular constraint ring body 21 and the rotating connector 13 can distribute the pressure more evenly, ensuring the stable fixation of the rotating connector 13, thereby improving the accuracy and reliability of the calibration and reducing the error of the robot arm during movement.

[0031] In some specific embodiments of the present invention, the rotating connection member 13 includes a roller bearing having an inner ring and an outer ring. The projection of the inner edge of the constraint ring body 21 in the vertical direction is located above the outer ring. The fastening area on the inner side of the annular constraint ring body 21 can also press and fix the roller bearing.

[0032] In some embodiments of the present invention, a plurality of arc-shaped guide channels 11 surround and form a calibration area 14, and the calibration base 12 is provided with a countersunk mounting groove 15 downwardly along the edge of the calibration area 14, the countersunk mounting groove 15 is connected to the arc-shaped guide channel 11, and the constraint ring body 21 is arranged in the countersunk mounting groove 15. When the head of the constraint ring body 21 forms a rigid abutment with the bottom wall of the countersunk mounting groove 15, the top surface of the constraint ring body 21 is arranged coplanar with the reference plane of the calibration base 12, forming a flush assembly surface without step difference. The countersunk mounting groove 15 has multiple effects: on the one hand, the constraint ring body 21 forms an annular fastening surface in the countersunk mounting groove 15, and the contact with the countersunk mounting groove 15 expands the contact area with the mounting housing 1. Compared with the point-type fixing of the traditional fixing bolts, this surface contact greatly improves the fastening effect and makes the connection more firm and reliable; on the other hand, the countersunk mounting groove 15 optimizes the installation layout of the constraint ring body 21, saves the installation space, makes the internal structure of the calibration device more compact and reasonable, and helps to improve the overall accuracy and stability of the robot arm.

[0033] In some embodiments of the present invention, the number of fixing holes 31 is at least twice that of the arc-shaped guide channel 11, and the projection of each arc-shaped guide channel 11 can cover at least two fixing holes 31. This design allows each arc-shaped guide channel 11 to form a fixing area 32 with two fixing holes 31, and the arc-shaped guide channel 11 and the fixing area 32 at least partially overlap, so that the calibration fixation can be completed, thereby significantly expanding the calibration range. On the one hand, by increasing the number of fixing holes 31 and optimizing their coordination with the arc-shaped guide channel 11, the robot arm can achieve higher accuracy and flexibility during the calibration process, reduce the error caused by the displacement of the fixing holes 31, and ensure that the robot arm can be accurately calibrated at different positions. On the other hand, this design also enhances the connection strength, and multiple fixed points share the load, which improves the overall stability and reliability of the calibration device and reduces the error and looseness of the robot arm during movement. In addition, each arc-shaped guide channel 11 can cooperate with two fixing holes 31, increasing the number of connection points, thereby improving the overall connection strength and stability of the calibration device.

[0034] Reference Figure 5 In some specific embodiments of the present invention, the length of the arc-shaped guide channel 11 is set according to the distribution of the fixing holes 31 on the base 3. The fixing holes 31 on the base 3 are evenly arranged on the surface circumference of the base 3, and each arc-shaped guide channel 11 can cover at least two fixing holes 31.

[0035] In some specific embodiments of the present invention, there are four arc-shaped bar holes and through holes 211, and eight fixing holes 31. The locking member 22 includes a bolt, and at least one of the fixing hole 31 and the through hole 211 is a threaded hole, and the bolt is threadedly connected to the fixing hole 31 and the through hole 211. The arc-shaped bar holes, the through holes 211 and the fixing holes 31 form a symmetrical and dense distribution of fixing points. This layout enables the robot arm to achieve higher accuracy and stability during the calibration process. By increasing the number of fixing holes 31, each arc-shaped guide channel 11 can cooperate with two fixing holes 31, thereby expanding the calibration range and improving the connection strength. The locking member 22 adopts a bolt, and at least one of the fixing hole 31 and the through hole 211 is a threaded hole. The cooperation between the bolt and the threaded hole not only provides a strong axial clamping force, but also allows fine-tuning during the installation process to achieve precise alignment.

[0036] In some specific embodiments of the present invention, the robot arm calibration device also includes a first pulley 4 and a second pulley 5, the first pulley 4 is arranged on the joint axis and is fixedly connected to the bottom of the base 3, the base 3 is fixedly connected to the mounting shell 1, and the second pulley 5 is coaxial with the first pulley 4 and is rotatably connected to the inner ring of the roller bearing.

[0037] The beneficial effects of the present invention are multifaceted: first, the calibration and fixation can be completed by at least partially overlapping the arc-shaped guide channel 11 with the fixing area, which significantly expands the calibration range, improves the flexibility of calibration, and reduces the error caused by the displacement of the fixing hole 31; secondly, the annular constraint ring body 21 forms an annular fastening surface, and the contact area with the mounting shell 1 is greatly increased compared with the point fixation of traditional fixing bolts. This surface contact not only improves the fastening effect, but also makes the connection more firm and reliable, enhances the overall stability of the calibration device, and reduces the error of the robot arm during movement; finally, the fastening area on the inner side of the annular constraint ring body 21 can also press and fix the roller bearing, further ensuring the stability of the rotating connection 13 and the movement accuracy of the robot arm, and improving the reliability of the entire calibration device.

[0038] Second, refer to Figure 6 A robotic arm includes the above-mentioned robotic arm calibration device, and also includes: a main body 6, a left arm 7 and a right arm 8 pivotally connected to the main body 6, the left arm 7 and the right arm 8 each include an upper arm 71 rotatable around a shoulder axis, a forearm 72 rotatably connected to the upper arm 71 around an elbow axis, and an end effector 73 rotatably connected to the forearm 72 around a wrist axis, the end effector 73 being used to clamp a wafer 9.

[0039] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A robot arm calibration device, applied to a joint of a robot arm, wherein the joint has a joint axis, characterized in that: include: A calibration base (12) is coaxially arranged with the joint axis and has a plurality of arc-shaped guide channels (11) formed in a circular array on its surface; A base (3) having a bearing surface with a plurality of fixing areas (32) distributed circumferentially thereon and arranged opposite to the arc-shaped guide channel (11), each of the fixing areas (32) being provided with at least two fixing holes (31); A constraint assembly (2) comprises a constraint ring body (21) and a locking member (22), wherein the constraint ring body (21) is rotatably arranged on the calibration base (12) with the joint axis as the rotation center, and the constraint ring body (21) is evenly provided with a plurality of through holes (211) vertically corresponding to the arc-shaped guide channel (11); the through holes (211), the arc-shaped guide channel (11) and the fixing hole (31) are selected to form a through constraint path, and the locking member (22) applies an axial pressing force along the constraint path to form a continuous annular constraint on the calibration base (12), the constraint ring body (21) and the base (3); When the constraint ring (21) rotates relative to the calibration base (12), the vertical projection of at least one fixing hole (31) in each fixing area (32) always forms a dynamic overlapping area with one of the plurality of arc-shaped guide channels (11); and when the calibration base (12) rotates relative to the base (3), the vertical correspondence between at least one fixing hole (31) in each fixing area (32) and one of the plurality of arc-shaped guide channels is always maintained.

2. A robot arm calibration device according to claim 1, characterized in that: It also comprises a mounting shell (1), wherein the calibration base (12) is located inside the mounting shell (1) and is integrally formed with the inner wall of the mounting shell (1).

3. A robot arm calibration device according to claim 2, characterized in that: A rotating connection piece (13) is arranged in the mounting shell (1), and the rotating connection piece (13) is used to connect two adjacent joints of the robot arm. The constraint ring body (21) is ring-shaped, and the inner side of the constraint ring body (21) has a pressing area (212), and the pressing area (212) abuts against the outer side of the rotating connection piece (13).

4. A robot arm calibration device according to claim 1, characterized in that: A plurality of the arc-shaped guide channels (11) surround and form a calibration area (14); the calibration base (12) is provided with a countersunk mounting groove (15) extending downward along the edge of the calibration area (14); the countersunk mounting groove (15) is communicated with the arc-shaped guide channel (11); and the restraining ring body (21) is rotatably embedded in the countersunk mounting groove (15).

5. A robot arm calibration device according to claim 1, characterized in that: The number of the fixing holes (31) is at least twice the number of the arc-shaped guide channels (11), and the projection portion of each arc-shaped guide channel (11) can cover at least two of the fixing holes (31).

6. A robot arm calibration device according to claim 1, characterized in that: The locking member (22) comprises a bolt, at least one of the fixing hole (31) and the through hole (211) is a threaded hole, and the bolt is threadedly connected to the fixing hole (31) and / or the through hole (211).

7. A robot arm calibration device according to claim 2, characterized in that: The calibration base (12) extends horizontally along one side of the inner wall of the mounting shell (1) and is integrally formed.

8. A robot arm calibration device according to claim 4, characterized in that: When the head of the constraint ring body (21) forms a rigid abutment with the bottom wall of the countersunk mounting groove (15), the top surface of the constraint ring body (21) is coplanarly arranged with the reference plane of the calibration base (12), forming a flush assembly surface without step difference.

9. A robot arm calibration device according to claim 3, characterized in that: The rotating connection member (13) comprises a roller bearing, the roller bearing having an inner ring and an outer ring, and the projection of the inner edge of the restraining ring body (21) in the vertical direction is located on the outer ring.

10. A robot arm calibration device according to claim 9, characterized in that: It also comprises a first pulley (4) and a second pulley (5), wherein the first pulley (4) is arranged on the joint axis and is fixedly connected to the bottom of the base (3), the base (3) is fixedly connected to the mounting housing (1), and the second pulley (5) is coaxial with the first pulley (4) and is rotatably connected to the inner ring of the roller bearing.

11. A robot, comprising the robot arm calibration device according to any one of claims 1 to 10, characterized in that: Also includes: A body (6), a left arm (7) and a right arm (8) pivotally connected to the body (6), wherein the left arm (7) and the right arm (8) each comprise an upper arm (71) rotatable about a shoulder axis, a forearm (72) rotatably connected to the upper arm (71) about an elbow axis, and an end effector (73) rotatably connected to the forearm (72) about a wrist axis, wherein the end effector (73) is used to clamp a wafer (9).

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