Clamping measuring device with turnover mechanism

Abstract

The invention relates to a clamping measuring device with a turnover mechanism. The clamping measuring device comprises a machine table and a clamping set. The machine table comprises a motor and a rotating shaft driven by the motor. The clamping set is connected with the rotating shaft, can turn over and comprises a pair of elastic clamping rods and a pair of movable clamping rods which are oppositely arranged. Each elastic clamping rod comprises a pair of first clamping rods and an elastic element arranged between the pair of first clamping rods. Each movable clamping rod comprises a pair of second clamping rods and an actuating assembly arranged between the pair of second clamping rods. A workpiece to be tested is inserted between the elastic clamping rod and the movable clamping rod, and the actuating assemblies drive the movable clamping rod to move towards the elastic clamping rod and compress the elastic element. Therefore, the workpiece to be measured is clamped between the elastic clamping rod and the movable clamping rod so as to facilitate measurement operation.

Description

Technical Field

[0001] The present invention relates to an automatic measuring device, and in particular to a device capable of turning over and measuring. Background Art

[0002] Since the semiconductor industry has very high requirements for process precision and accuracy, most of them use robotic arms for automated measurement to accurately measure the size, position and characteristics of process components.

[0003] Furthermore, circuit boards are an important part of the semiconductor industry. During the manufacturing process of circuit boards, a copper film needs to be formed, and during the measurement process, the circuit boards need to be turned over several times for thickness measurement. However, most existing circuit board thickness measurement devices require manual turning, or can only measure a single board thickness, which is inconvenient to use and does not meet usage requirements. Summary of the invention

[0004] An object of the present invention is to provide a clamping and measuring device with a flipping mechanism, wherein the clamping group can flip as the shaft of a motor rotates, so as to facilitate the measuring operation.

[0005] In order to achieve the above-mentioned purpose, the present invention is a clamping and measuring device with a flipping mechanism, including a machine and a clamping group. The machine includes a motor and a rotating shaft driven by the motor. The clamping group is connected to the rotating shaft and can be flipped, including a pair of elastic clamping rods and a pair of movable clamping rods arranged opposite to each other. Each elastic clamping rod includes a pair of first clamping rods and an elastic element arranged between the pair of first clamping rods. Each movable clamping rod includes a pair of second clamping rods and an actuating assembly arranged between the pair of second clamping rods. The workpiece to be measured is inserted between the elastic clamping rod and the movable clamping rod, and each actuating assembly drives the movable clamping rod to move toward the direction of the elastic clamping rod and compresses the elastic element. The workpiece to be measured is thereby clamped between the elastic clamping rod and the movable clamping rod.

[0006] In one embodiment of the present invention, the machine is a robotic arm.

[0007] In one embodiment of the present invention, the clamping assembly further includes a support rod connected to the elastic clamping rod and the movable clamping rod, and the support rod is connected to the rotating shaft.

[0008] In one embodiment of the present invention, the clamping assembly is arranged in a U shape.

[0009] In an embodiment of the present invention, the number of the elastic elements is plural, and the plural elastic elements are disposed between the pair of first clamping rods at intervals.

[0010] In one embodiment of the present invention, the actuating assembly includes an actuator and a plurality of connecting rods, one end of each connecting rod is pivotally connected to one of the pair of second clamping rods, and the other end of each connecting rod is driven by the actuator to rotate.

[0011] In one embodiment of the present invention, the actuating assembly further includes at least one guide rod, the pair of second clamping rods include an inner second clamping rod and an outer second clamping rod, the inner second clamping rod faces the elastic clamping rod and is provided with at least one guide hole, one end of the at least one guide rod is passed through at least one guide hole, and the other end is fixed on the outer second clamping rod.

[0012] In one embodiment of the present invention, the actuating assembly further comprises a plurality of supporting blocks, which are slidably disposed on the outer second clamping rod and connected to the inner second clamping rod.

[0013] In one embodiment of the present invention, the clamping and measuring device further includes a sensor for sensing the workpiece to be measured, and the sensor is disposed on the clamping assembly.

[0014] In one embodiment of the present invention, the sensor is a pinpoint sensor or a laser sensor.

[0015] Compared with the prior art, the clamping group of the clamping and measuring device of the present invention is driven by the rotating shaft of the motor to flip. In addition, the clamping group includes an elastic clamping rod and a movable clamping rod. Moreover, the elastic clamping rod includes an elastic element, and the movable clamping rod includes an actuating assembly; accordingly, the actuating assembly drives the movable clamping rod to move toward the elastic clamping rod and compresses the elastic element, so that the workpiece to be measured is clamped between the elastic clamping rod and the movable clamping rod, thereby providing a clamping and measuring device that is easy to operate and can be flipped, increasing the practicality and convenience of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic diagram of the appearance of the clamping and measuring device with a flipping mechanism of the present invention.

[0017] Figure 2 It is a side view of the clamping and measuring device with a flipping mechanism of the present invention.

[0018] Figure 3 It is a front view of the clamping and measuring device with a flipping mechanism of the present invention.

[0019] Figure 4 It is a schematic diagram of the use of the clamping and measuring device with a flipping mechanism of the present invention.

[0020] Figure 5 It is a schematic diagram of the operation of the clamping and measuring device with a flipping mechanism of the present invention.

[0021] Figure 6 FIG. 4 is a schematic diagram of the flipping of the clamping and measuring device with a flipping mechanism of the present invention.

[0022] Figure 7 It is a front view of the clamping and measuring device with a flipping mechanism of the present invention after flipping.

[0023] Figure 8A schematic diagram of a clamping and measuring device with a flipping mechanism according to the present invention having sensors arranged therein.

[0024] In the figure: 1: Clamping and measuring device 2: Workpiece to be tested 10: Machine 11: Motor 12: Rotating shaft 20: Clamping group 200: Reserve gap 21: Elastic clamp rod 211, 213: first clamping rod 212: Elastic element 22: Move the clamping rod 221: Second clamping rod 2210: Guide hole 2211: Inner second clamping rod 2212: External second clamping rod 222: Actuating assembly 223: Actuator 224: Connecting rod 225: Guide rod 226: Support block 23: Support rod 30: Sensor 31: Pin point sensor 32:Laser sensor. DETAILED DESCRIPTION

[0025] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0026] Please refer to Figures 1 to 3 , which are a three-dimensional schematic diagram, a side view and a front view of a clamping and measuring device with a flipping mechanism of the present invention. The present invention is a clamping and measuring device 1 with a flipping mechanism, comprising a machine 10 and a clamping group 20, and the clamping group 20 is combined with the machine 10. The clamping group 20 can clamp an object to be measured and flip it to facilitate measurement.

[0027] The machine 10 includes a motor 11 and a rotating shaft 12 driven by the motor 11. In this embodiment, the machine 10 is a robot arm for performing automated measurement operations.

[0028] The clamping group 20 is connected to the rotating shaft 12 and can be turned over. The clamping group 20 includes a pair of elastic clamping rods 21 and a pair of movable clamping rods 22 that are correspondingly arranged. Each elastic clamping rod 21 includes a pair of first clamping rods 211, 213 and an elastic element 212 arranged between the pair of first clamping rods 211, 213. In addition, each movable clamping rod 22 includes a pair of second clamping rods 221 and an actuating assembly 222 arranged between the pair of second clamping rods 221. In this embodiment, the elastic element 212 is a spring, but this is not limited to this.

[0029] Specifically, the clamping assembly 20 is arranged in a U shape, but is not limited thereto. The clamping assembly 20 further includes a support rod 23 connecting the pair of elastic clamping rods 21 and the pair of movable clamping rods 22, and the support rod 23 is connected to the rotating shaft 12. Therefore, when the motor 11 drives the rotating shaft 12 and the support rod 23 to rotate, the pair of elastic clamping rods 21, the pair of movable clamping rods 22 and the support rod 23 rotate along with the rotating shaft 12. Accordingly, the motor 11 can drive the clamping assembly 20 to rotate.

[0030] In one embodiment of the present invention, the number of the elastic elements 212 is plural and the plural elastic elements 212 are disposed between the pair of first clamping rods 211 and 213 at intervals.

[0031] Furthermore, the actuating assembly 222 includes an actuator 223 and a plurality of connecting rods 224. Moreover, one end of each connecting rod 224 is pivotally connected to one of the pair of second clamping rods 221, and the other end is driven by the actuator 223 to rotate.

[0032] In more detail, the actuating assembly 222 further includes at least one guide rod 225. Moreover, the pair of second clamping rods 221 includes an inner second clamping rod 2211 and an outer second clamping rod 2212. The inner second clamping rod 2211 faces the elastic clamping rod 21 and is provided with at least one guide hole 2210. One end of the at least one guide rod 225 passes through the at least one guide hole 2210, and the other end is fixed to the outer second clamping rod 2212.

[0033] In this embodiment, the actuating assembly 222 further includes a plurality of supporting blocks 226. Each of the supporting blocks 226 is slidably disposed on the outer second clamping rod 2212 and supports the actuator 223. In addition, the number of the guide holes 2210 and the number of the guide rods 225 are correspondingly set to be plural.

[0034] Furthermore, when the actuator 223 drives the connecting rods 224 to move, the guide rod 225 inserted in the guide hole 2210 will move axially in the guide hole 2210. Accordingly, the outer second clamping rod 2212 is driven by the connecting rods 224 and restricted by the guide rod 225 to move axially in the guide hole 2210.

[0035] Please continue to refer to Figure 4 and Figure 5 , which is a schematic diagram of the use and operation of the clamping and measuring device with a flipping mechanism of the present invention. Figure 4 As shown, the clamping measuring device 1 is used to measure a workpiece 2 to be measured. When in use, the workpiece 2 to be measured is inserted into the reserved gap 200 between the pair of elastic clamping rods 21 and the pair of movable clamping rods 22. Figure 5 As shown, after the workpiece 2 to be measured passes through the reserved gap 200 and moves to the appropriate position, the actuating assembly 222 drives the movable clamping rod 22 to move toward the elastic clamping rod 21 and compresses the elastic element 212, so that the workpiece 2 to be measured is clamped between the pair of elastic clamping rods 21 and the pair of movable clamping rods 22.

[0036] Specifically, when the actuating assembly 222 is actuated, the actuator 223 will generate a linear motion. Moreover, one end of each of the connecting rods 224 will move outward along with the actuator 223, and each of the connecting rods 224 will rotate around one end pivotally connected to the inner second clamping rod 2211, and the angle of each of the connecting rods 224 will change from the original oblique direction (such as Figure 2 At the same time, the inner second clamping rod 2211 is guided and restricted by the guide rod 225 to move toward the direction of the elastic clamping rod 21 to push against the workpiece 2 to be tested and abut against the inner second clamping rod 2211. Accordingly, the workpiece 2 to be tested will be clamped between the pair of elastic clamping rods 21 and the pair of movable clamping rods 22.

[0037] Please refer to Figure 6 and Figure 7 , which is a schematic diagram of the flipping of the clamping and measuring device with a flipping mechanism of the present invention and a front view after flipping. The clamping and measuring device 1 of the present invention can drive the workpiece 2 to be measured to flip. In actual use, the motor 11 starts to run and drives the rotating shaft 12 to rotate, and the clamping group 20 flips with the rotation of the rotating shaft 12. Accordingly, the measuring surface of the workpiece 2 to be measured, which was originally located at the bottom, will flip to the top, so as to facilitate measurement.

[0038] Please refer to Figure 8 , is a schematic diagram of a sensor provided in the clamping and measuring device with a flipping mechanism of the present invention. This embodiment is substantially the same as the previous embodiment, except that the clamping and measuring device 1 further includes a sensor 30 for sensing the thickness of the workpiece 2 to be measured. The sensor 30 can be set as a pinpoint sensor 31 or a laser sensor 32, and is selected according to actual use requirements.

[0039] In actual use, after the workpiece 2 to be measured is clamped by the clamping group 20 and is stably presented in a horizontal state, the pinpoint sensor 31 or the laser sensor 32 can be used according to the use requirements to measure the thickness of the workpiece 2 to be measured. Subsequently, the motor 11 can be started to drive the rotating shaft 12 to rotate, and the clamping group 20 is turned over with the rotation of the rotating shaft 12, and the thickness measurement operation of the workpiece 2 to be measured is performed again, thereby completing the thickness measurement operation of the two sides of the workpiece 2 to be measured.

[0040] The above-described embodiments are only preferred embodiments for fully illustrating the present invention, and the protection scope of the present invention is not limited thereto. Equivalent substitutions or changes made by those skilled in the art based on the present invention are within the protection scope of the present invention. The protection scope of the present invention shall be subject to the claims.

Claims

1. A clamping and measuring device with a flipping mechanism, characterized in that: include: A machine including a motor and a rotating shaft driven by the motor; and A clamping group connected to the rotating shaft to be able to flip, the clamping group includes a pair of elastic clamping rods and a pair of movable clamping rods arranged opposite to each other, each elastic clamping rod includes a pair of first clamping rods and an elastic element arranged between the pair of first clamping rods, and each movable clamping rod includes a pair of second clamping rods and an actuating assembly arranged between the pair of second clamping rods; A workpiece to be tested is inserted between the pair of elastic clamping rods and the pair of movable clamping rods, and each actuating assembly drives each movable clamping rod to move toward each elastic clamping rod and compress the elastic element, so that the workpiece to be tested is clamped between the pair of elastic clamping rods and the pair of movable clamping rods.

2. The clamping and measuring device with a flipping mechanism according to claim 1, characterized in that: The machine is a robotic arm.

3. The clamping and measuring device with a flipping mechanism according to claim 1, characterized in that: The clamping assembly further includes a supporting rod connected to the pair of elastic clamping rods and the pair of movable clamping rods, and the supporting rod is connected to the rotating shaft.

4. The clamping and measuring device with a flipping mechanism as claimed in claim 3, characterized in that: The clamping group is arranged in a U shape.

5. The clamping and measuring device with a flipping mechanism according to claim 1, characterized in that: The number of the elastic elements is plural, and the plural elastic elements are arranged between the pair of first clamping rods at intervals.

6. The clamping and measuring device with a flipping mechanism according to claim 1, characterized in that: Each of the actuating components comprises an actuator and a plurality of connecting rods. One end of each connecting rod is pivotally connected to one of the pair of second clamping rods, and the other end is driven by each of the actuators to be able to rotate.

7. The clamping and measuring device with a flipping mechanism according to claim 6, characterized in that: The actuating assembly further includes at least one guide rod, and the pair of second clamping rods include an inner second clamping rod and an outer second clamping rod. The inner second clamping rod faces the elastic clamping rod and is provided with at least one guide hole. One end of the at least one guide rod passes through the at least one guide hole, and the other end is fixed to the outer second clamping rod.

8. The clamping and measuring device with a turning mechanism according to claim 7, characterized in that: The actuating assembly further comprises a plurality of supporting blocks, each of which is slidably disposed on the outer second clamping rod and supports the actuator.

9. The clamping and measuring device with a flipping mechanism according to claim 1, characterized in that: It further comprises a sensor for sensing the workpiece to be measured, and the sensor is arranged on the clamping group.

10. The clamping and measuring device with a turning mechanism according to claim 9, characterized in that: The sensor is a pinpoint sensor or a laser sensor.

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