An arc method quartz crucible vacuum pumping device and method

Abstract

The present invention relates to the technical field of quartz crucible preparation, and specifically discloses an arc method quartz crucible vacuum pumping device and method, which includes a vacuum pump and a mold for producing quartz crucibles above it. A heat conduction cavity filled with heat conduction liquid is arranged inside the side wall of the mold. A flow disturbing device is provided in the heat conduction cavity, and the flow disturbing device can rotate circumferentially along the heat conduction cavity. Two air inlets are arranged behind the heat conduction cavity, and the two air inlets are connected to the positive pressure end of the vacuum pump in an alternative air intake manner. The outer wall of the mold has a heat conduction structure, and a micropore group is opened on the inner wall of the mold. The micropore group is collected through a cavity arranged inside the side wall of the mold. The present invention evacuates the inside of the mold through a vacuum pump to form a negative pressure environment, effectively reducing the bubble residue during the forming process of the quartz melt. At the same time, combined with the circulating heat dissipation design of the heat conduction cavity on the side wall of the mold, vacuum forming and temperature control are realized simultaneously, reducing the influence of gas expansion at high temperature on the crucible structure and solving the problem of heat dissipation hysteresis.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz crucible preparation, and particularly relates to a vacuum pumping device and method for an arc method quartz crucible. Background Art

[0002] The vacuum pumping device for an arc method quartz crucible is one of the core components in the production process. Its function is to optimize the transparency of the inner layer of the crucible and reduce bubble defects by creating a vacuum environment;

[0003] For example, the prior art publication number: "CN117209122" discloses a patent application for an invention named "Arc Electrode Device for Producing Quartz Crucibles, Arc Furnace and Method for Producing Quartz Crucibles". The specification of this patent application details the preparation method of the quartz crucible: "The production of quartz crucibles generally uses the vacuum arc method. The process includes: pouring high-purity quartz sand raw materials into a graphite mold or a metal mold, evenly forming the quartz sand raw materials on the inner surface of the mold through a forming device, then melting the quartz sand at a high temperature above 3000°C through a high-temperature arc furnace, and finally forming a quartz (glass) crucible through rapid cooling";

[0004] During the preparation process of the quartz crucible, in order to ensure that the quartz crucible does not generate too many bubbles, during the forming process of the quartz crucible, it is necessary to evacuate the inside of the mold. Since the quartz crucible generates high heat during the forming process, in order to prevent the mold from deforming and causing the quartz crucible to deform along with the deformation of the mold when the vacuum is pumped, in the prior art, it is necessary to dissipate heat from the mold during vacuum pumping. The common method is through coolant circulation. However, since the coolant circulates through continuous cavities, in actual applications, there is a heat dissipation hysteresis in some positions of the mold, so it is necessary to improve this. Summary of the Invention

[0005] The purpose of this part is to outline some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this part, as well as in the abstract and title of the present application, to avoid obscuring the purpose of this part, the abstract, and the title of the invention. Such simplifications or omissions cannot be used to limit the scope of the present invention.

[0006] The present invention provides a vacuum pumping device and method for an arc method quartz crucible, which can solve the problem of "in actual applications, there is a heat dissipation hysteresis in some positions of the mold, resulting in the deformation of the quartz crucible". The specific solutions are as follows:

[0007] On the one hand, the present invention provides a vacuum pumping device for an arc method quartz crucible, which includes a vacuum pump and a mold above it for producing quartz crucibles. A heat conduction cavity filled with heat conduction liquid is formed inside the side wall of the mold. A flow disturbing device is provided in the heat conduction cavity, and the flow disturbing device rotates circumferentially along the heat conduction cavity. Two air inlets are arranged outside the heat conduction cavity, and the two air inlets are connected to the positive pressure end of the vacuum pump in an alternative air intake manner. The outer wall of the mold has a heat conduction structure, and a micropore group is provided on the inner wall of the mold. The micropore group is collected through a cavity formed inside the side wall of the mold. This cavity is located between the mold cavity and the heat conduction cavity of the mold, and this cavity is communicated with the negative pressure end of the vacuum pump;

[0008] During operation:

[0009] The negative pressure end of the vacuum pump evacuates the mold through the cavity and the micropore group;

[0010] The gas at the positive pressure end of the vacuum pump enters the heat conduction cavity through one of the air inlets and then pushes the flow disturbing device to rotate in the heat conduction cavity, disturbing the heat conduction liquid in the heat conduction cavity.

[0011] Preferably, the heat conduction cavity includes:

[0012] An annular main body section, continuously distributed circumferentially along the side wall of the mold;

[0013] Longitudinal termination sections, closing at the upper and lower end faces of the mold, and having an arc extension portion at the bottom thereof that matches the bottom wall of the mold.

[0014] Preferably, the top end of the heat conduction cavity is communicated with the outside through at least one exhaust hole to release the gas in the heat conduction cavity.

[0015] Preferably, the flow disturbing device is rod-shaped and has an arc-shaped structure extending circumferentially along the heat conduction cavity.

[0016] Preferably, a negative pressure cavity is provided at the bottom of the mold. The negative pressure cavity is communicated with the mold cavity through a cavity formed inside the side wall of the mold and the micropore group. The negative pressure cavity is connected to the negative pressure end of the vacuum pump. The vacuum pump evacuates the negative pressure cavity, the cavity and the micropore group to create a vacuum environment inside the mold.

[0017] Preferably, a switching device is provided outside the two air inlets. The switching device includes a fixed sleeve, the fixed sleeve is fixedly connected to the outer wall of the mold, one end of the fixed sleeve is connected with two air inlet pipes corresponding to the positions of the two air inlets, the other ends of the two air inlet pipes are fixedly connected with a gas collecting disc, the two air inlet pipes are both communicated with the gas collecting disc, a rotating disc is covered outside the gas collecting disc, the rotating disc is rotatably connected to the inner wall of the gas collecting disc, and the middle of the rotating disc is connected with a rotating sleeve, and the rotating sleeve is sleeved on the top end of the second pipe.

[0018] Preferably, an impeller is connected to the outer wall of the rotating disk. An annular groove is provided on the inner wall of the air collecting disk. The impeller can rotate in the annular groove. An air inlet hole is formed at the bottom of the air collecting disk. The gas flow path of the air inlet hole is tangent to the inner wall of the annular groove. The outside of the air inlet hole is connected to the top end of the first pipe through a third pipe. A dispersion box is connected to the top of the first pipe. The dispersion box is used to disperse the air flow at the positive pressure end of the vacuum pump. One end of the third pipe away from the air collecting disk is connected to the top of the dispersion box and communicates with the inside of the dispersion box.

[0019] Preferably, the rotating disk is hollow. A notch is formed at one end of the rotating disk close to the air inlet pipe. One end of the rotating disk contacts the air collecting disk. It is configured that when the projection plane of the notch completely overlaps or partially overlaps with the projection plane at the inlet of the air inlet pipe, the gas in the rotating disk can enter the air inlet pipe through the notch.

[0020] Preferably, the flow disturbance device includes a flow disturbance plate. The inside of the flow disturbance plate has a hollow structure. The heat-conducting liquid is filled in the area outside the heat-conducting cavity of the flow disturbance plate. When the flow disturbance plate rotates, the heat-conducting liquid rotates synchronously in the heat-conducting cavity along with the rotation of the flow disturbance plate, so that the heat-conducting liquid flows regularly in the heat-conducting cavity.

[0021] On the other hand, the present invention provides an arc method for evacuating a quartz crucible, including the following steps:

[0022] S1. Evacuate the inside of the mold by using a vacuum pump through the heat-conducting cavity provided in the side wall of the mold and the micropore group communicated therewith, wherein the micropore group communicates with the negative pressure end of the vacuum pump through the chamber in the side wall of the mold;

[0023] S2. Introduce the gas generated at the positive pressure end of the vacuum pump into the heat-conducting cavity through an alternative air inlet, so that the flow disturbance device in the heat-conducting cavity rotates under the drive of the gas to disturb the heat-conducting liquid in the heat-conducting cavity, and quickly cool down the side wall of the mold.

[0024] Compared with the prior art, the present invention can at least achieve one of the following beneficial effects:

[0025] 1. The present invention evacuates the inside of the mold through a vacuum pump to form a negative pressure environment, effectively reducing the bubble residue in the process of quartz melt forming. At the same time, combined with the circulating heat dissipation design of the heat-conducting cavity on the side wall of the mold, it realizes vacuum forming and temperature control at the same time. The vacuum environment promotes the close packing of quartz particles, reduces the influence of gas expansion at high temperature on the crucible structure, and the flow disturbance plate in the heat-conducting cavity drives the directional flow of the heat-conducting liquid, which can quickly conduct out the heat of the mold cavity, avoiding cracking or deformation of the quartz material caused by local overheating, and solving the problem of heat dissipation hysteresis.

[0026] 2. The present invention actively agitates the heat-conducting liquid in the heat-conducting cavity to form a turbulent flow, improving the heat exchange efficiency of the mold side wall. The cooperation between the spoiler and the gap of the heat-conducting cavity allows the liquid to flow in multiple paths, avoiding the heat dissipation blind area caused by local liquid flow stagnation, and can also utilize the fluid inertia to strengthen heat transfer. The air pressure driving mechanism of the spoiler is linked with the vacuum pump system, and can dynamically adjust the rotation speed according to the production stage. For example, it accelerates heat dissipation during the high-temperature melting stage and slows down the disturbance during the cooling and shaping stage, so as to accurately match the heat load requirements of different process nodes, avoiding the high energy consumption problem of external cooling devices and solving the reliability risk caused by pipeline blockage or leakage in the traditional water cooling system.

[0027] 3. The present invention uses the gas output from the positive pressure end of the vacuum pump to drive the spoiler to rotate, realizing the recycling of energy. The switching device automatically switches the gas input path through the periodic on-off of the notch of the rotating disk and the intake pipe, ensuring the continuous unidirectional rotation of the spoiler, simplifying the mechanical structure and reducing the maintenance cost. Through the precise control of the gas flow rate by the pressure regulating valve, the stepless adjustment of the rotation speed of the spoiler is realized. The tangential air flow of the impeller and the annular groove increases the stability of the rotational power, avoiding the sudden change of the rotation speed caused by air pressure fluctuations.

[0028] 4. Through the synergistic effect of negative pressure suction and particle characteristics in the micropore group on the inner wall of the mold of the present invention, the dual goals of efficient gas discharge and zero particle leakage are achieved. The design of the inner diameter of the micropores fully considers the dense packing effect of quartz particles, and with the continuous adsorption force of the vacuum negative pressure, it prevents tiny particles from entering the micropores and causing blockage.

[0029] Other features and advantages of the present invention will be described in the subsequent specific embodiments, and some of them will be obvious from the specification or understood by implementing the present invention. The objectives and other advantages of the present invention can be achieved and obtained through the structures specifically pointed out in the written specification and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings. Among them:

[0031] Figure 1 is a three-dimensional view of the mold of the present invention in use state;

[0032] Figure 2 is a three-dimensional view of the whole mold of the present invention;

[0033] Figure 3 is a front cross-sectional view of the present invention;

[0034] Figure 4 For the present invention Figure 3 Enlarged view of part A in the present invention;

[0035] Figure 5 Side sectional view of the mold of the present invention;

[0036] Figure 6 Three-dimensional view of the first scheme of the spoiler of the present invention;

[0037] Figure 7 Three-dimensional view of the second scheme of the spoiler of the present invention;

[0038] Figure 8 Top view of the second scheme of the spoiler of the present invention;

[0039] Figure 9 Top view of the third scheme of the spoiler of the present invention;

[0040] Figure 10 Top sectional view of the present invention;

[0041] Figure 11 Three-dimensional view of the present invention from the first rear side perspective;

[0042] Figure 12 Three-dimensional view of the present invention from the second rear side perspective;

[0043] Figure 13 Exploded view of one side of the switching device of the present invention;

[0044] Figure 14 Exploded view of the other side of the switching device of the present invention;

[0045] Figure 15 Specific structural schematic diagram of the impeller of the present invention;

[0046] Figure 16 Installation schematic diagram of the impeller and the air collecting disc of the present invention.

[0047] Among them, the reference numerals are as follows:

[0048] 1, processing room; 2, mold; 3, observation aisle; 4, vacuum pump; 5, base; 6, spoiler; 7, support seat; 8, heat conduction cavity; 9, quartz crucible; 10, electrode; 11, exhaust hole; 12, mold cover; 13, micropore; 14, limiting ring; 15, arc section; 16, air inlet; 17, one-way valve; 18, convex block; 19, first pipeline; 20, second pipeline; 21, fixed sleeve; 22, air collecting disc; 23, intake pipe; 24, rotating disc; 25, impeller; 26, notch; 27, dispersion box; 28, intake hole; 29, third pipeline; 30, pressure regulating valve; 31, rotating sleeve; 32, annular groove; 33, negative pressure cavity. Specific embodiments

[0049] The preferred embodiments of the present invention will be specifically described below in conjunction with the accompanying drawings, where the drawings form a part of the present invention and are used together with the embodiments of the present invention to explain the principles of the present invention.

[0050] Embodiment 1: As Figure 1 shown, this embodiment provides an arc method quartz crucible vacuum pumping device, including a vacuum pump 4 and a mold 2 above it. The vacuum pump 4 and the mold 2 are installed in a processing room 1. The side wall of the processing room 1 also has an observation walkway 3, which can monitor the operation inside the mold 2. A base 5 is provided at the bottom of the mold 2, and support seats 7 are provided on both sides of the base 5 and the mold 2. The support seats 7 are fixed in the processing room 1, and the vacuum pump 4 is installed between the two support seats 7;

[0051] As Figure 2 , Figure 3 , Figure 5 shown, the middle part of the mold 2 is a mold cavity, and the quartz crucible 9 is made in this mold cavity. Around the mold cavity, that is, inside the side wall of the mold 2, a heat conduction cavity 8 is opened or formed. A flow disturbing device is arranged inside the heat conduction cavity 8. The flow disturbing device includes a flow disturbing plate 6, and the flow disturbing plate 6 can rotate along the circumferential direction of the heat conduction cavity 8 inside the heat conduction cavity 8. The heat conduction cavity 8 includes an annular main body section, and the annular main body section is continuously distributed along the circumferential direction of the side wall of the mold 2; and a longitudinal termination section, and the longitudinal termination section is closed at the upper and lower end faces of the mold 2. The bottom of the longitudinal termination section has an arc extension part matching the bottom wall of the mold 2. An electrode 10 is arranged inside the mold 2, and the electrode 10 is installed in the middle of a mold cover 12 at the top of the mold 2. A protrusion matching the top edge of the mold 2 is arranged around the bottom of the mold cover 12, so that the mold cover 12 can be matched and installed with the top of the mold 2. The outer wall of the mold 2 has a heat conduction structure, and the heat conduction structure can specifically be a heat dissipation fin, a fan, a water cooling circulation component or any component with a heat dissipation effect;

[0052] As Figure 4 shown, a number of micropores 13 are also opened on the inner wall of the mold 2. The number of micropores 13 is evenly distributed inside the mold 2, and the number of micropores 13 forms a micropore group. Among them, the micropore group is collected through a chamber formed inside the side wall of the mold 2. This chamber is opened between the mold cavity of the mold 2 and the heat conduction cavity 8. The micropore group is arranged on the side wall of the chamber close to the mold cavity of the mold 2. The inner diameter of each micropore 13 is smaller than the outer diameter of the quartz material particles. For example, the diameters of the quartz material particles used to produce the quartz crucible 9 are generally between 177 and 180 microns. Therefore, the inner diameter of the micropores 13 is preferably less than 177 microns;

[0053] As a possible embodiment, due to the dense packing effect, the inner diameter of the micropores 13 can also be larger than the outer diameter of the adaptable material particles. This phenomenon is mainly related to the interaction between particles and particle characteristics. The principle and actual application scenarios are as follows:

[0054] There are several key mechanisms of the dense packing effect as follows:

[0055] Friction and bridging between particles: When particles are piled up on the sieve surface, mechanical occlusion or bridging structures will be formed between particles due to friction, van der Waals forces (for micron-sized particles), or electrostatic adsorption, resulting in particles being "stuck" in the micro-pores 13;

[0056] Example: Micron-sized quartz sand (such as 80 mesh, 177μm) may agglomerate due to electrostatic adsorption when dry, forming aggregates with diameters much larger than the micro-pores 13, hindering passage;

[0057] Influence of screening kinetics: If the vibration or air flow disturbance during the screening process is not sufficient to break the packing structure, particles will form a dense layer due to their own gravity or external pressure (such as extrusion by upper-layer particles), reducing the screening efficiency;

[0058] As Figure 3 shown, a negative pressure cavity 33 is provided at the bottoms of the mold 2 and the base 5. The negative pressure cavity 33 communicates with the mold cavity of the mold 2 through a cavity and a micropore group formed inside the side wall of the mold 2. The negative pressure cavity 33 is connected to the negative pressure end of the vacuum pump 4. The vacuum pump 4 is used to evacuate the negative pressure cavity 33, the cavity, and the micropore group, so as to create a vacuum environment inside the mold 2.

[0059] As Figure 6 shown, as a possible embodiment, one specific configuration of the spoiler 6 is: a limiting ring 14 is provided at the bottom of the spoiler 6 (for the convenience of display, the limiting ring 14 in the figure has a notch, but actually the limiting ring 14 is a complete circular structure), and the spoiler 6 and the limiting ring 14 are connected by an arc section 15, and the arc section 15 is used to match the shape of the bottom of the heat conduction cavity 8;

[0060] As Figure 7 、 Figure 8 shown, as a possible embodiment, another specific configuration of the spoiler 6 is: a limiting ring 14 is provided at the bottom of the spoiler 6, and the spoiler 6 and the limiting ring 14 are connected by an arc section 15. The spoiler device is rod-shaped and has an arc structure extending along the circumferential direction of the heat conduction cavity 8. Specifically explained as: the shape of the spoiler 6 is inclined, and the specific inclination method is such that the spoiler 6 has a certain extension along the axial direction of the heat conduction cavity 8. It can also be understood that the spoiler 6 is twisted around the central axis of the heat conduction cavity 8 to form an inclination angle. In order to match the annular heat conduction cavity 8, therefore, while the spoiler 6 has an inclination angle, as Figure 8 shown in the top view of the spoiler 6 in , the spoiler 6 also has an arc structure concentric with the heat conduction cavity 8 in the top view direction, so that the spoiler 6 can rotate normally inside the heat conduction cavity 8;

[0061] As a possible embodiment, in the two specific configuration modes of the spoiler 6 described above, there is a gap between the top end and / or the bottom end of the spoiler 6 and the upper end and / or the lower end of the heat conduction cavity 8. Thus, when the heat conduction liquid in the heat conduction cavity 8 is disturbed by the spoiler 6, the heat conduction liquid can pass through from the top end and / or the bottom end of the spoiler 6. Optionally, there is also a gap between the two side surfaces of the spoiler 6 and the side wall of the heat conduction cavity 8, allowing the heat conduction liquid inside the heat conduction cavity 8 to be disturbed inside the heat conduction cavity 8, so that the heat conduction liquid flows inside the side wall of the mold 2;

[0062] As Figure 9 shown, as a possible embodiment, the spoiler 6 is configured in a relatively wide shape and is hollow inside. Through this solution, when the spoiler 6 rotates at this time, the heat conduction liquid in the part other than the hollow inside the spoiler 6 can rotate synchronously with the rotation of the spoiler 6, making the heat conduction liquid flow regularly inside the heat conduction cavity 8;

[0063] It should be noted that the above heat conduction liquid can be a water-based heat conduction liquid or an oil-based heat conduction liquid. The water-based heat conduction liquid is a heat carrier with water as the core, and mainly realizes temperature adaptability and anti-corrosion functions by adding different components. Among them, the water-based heat conduction liquid can be: pure water liquid, ethylene glycol-based solution, propylene glycol-based solution, ethylene glycol-based, propylene glycol-based, etc.;

[0064] The oil-based heat conduction liquid can be: diphenyl ether mixture, alkyl biphenyl type synthetic oil.

[0065] As Figure 10 shown, two air inlets 16 are opened at the rear end of the heat conduction cavity 8. The outer ends of the air inlets 16 are connected to the positive pressure end of the vacuum pump 4. The high-pressure gas generated by the positive pressure end of the vacuum pump 4 can alternatively enter the heat conduction cavity 8 from the two air inlets 16, thereby pushing the spoiler 6 through air pressure to make the spoiler 6 rotate inside the heat conduction cavity 8. And a one-way valve 17 is installed inside the two air inlets 16 to prevent the liquid inside the heat conduction cavity 8 from flowing back from the air inlets 16, but the gas can normally enter the heat conduction cavity 8. And at least one exhaust hole 11 is opened at the top end of the heat conduction cavity 8. The gas inside the heat conduction cavity 8 can be discharged through the exhaust hole 11, and the exhaust volume achieved by the number and diameter of the exhaust holes 11 is greater than the volume of the gas injected from the air inlets 16, so that no high-pressure environment is formed inside the heat conduction cavity 8;

[0066] As Figure 10As shown, the spoiler 6 is configured not to pass between the two air inlets 16, so as not to cause the spoiler 6 to lose the driving force of air pressure. Therefore, a bump 18 with a relatively low protrusion degree is also provided at the bottom of the heat conduction cavity 8. Without affecting the air pressure power, the bump 18 can block the spoiler 6. Specifically, it forms a block on the spoiler 6 by contacting and limiting the arc section 15. A dotted line is formed between the two bumps 18, and the spoiler 6 does not exceed the dotted line part when rotating.

[0067] As Figure 11 , Figure 12 shown, the positive pressure end at the rear end of the vacuum pump 4 is connected to a first pipe 19. The top end of the first pipe 19 is connected to a second pipe 20. The top end of the second pipe 20 is connected to the two air inlets 16, so that the high-pressure gas generated by the vacuum pump 4 can enter the heat conduction cavity 8 through the air inlets 16, and the gas can enter the heat conduction cavity 8 from one of the two air inlets 16 through the switching device.

[0068] As Figure 13 , Figure 14 , Figure 15 , Figure 16 shown, the switching device includes a fixed sleeve 21. The fixed sleeve 21 is fixedly connected to the outer wall of the mold 2. One end of the fixed sleeve 21 is connected to two air inlet pipes 23 corresponding to the positions of the two air inlets 16. The other ends of the two air inlet pipes 23 are fixedly connected to a gas collecting disc 22. The two air inlet pipes 23 are both communicated with the gas collecting disc 22. The outside of the gas collecting disc 22 is covered with a rotating disc 24. The rotating disc 24 is rotatably connected to the inner wall of the gas collecting disc 22. The middle of the rotating disc 24 is connected to a rotating sleeve 31. The rotating sleeve 31 is sleeved on the top end of the second pipe 20, so that when the rotating disc 24 rotates, the second pipe 20 can intake air normally. And in order to ensure the sealing performance, a sealing ring is provided on the inner wall of the rotating sleeve 31 and / or the outer wall of the second pipe 20, so that the connection position between the two is in close contact and sealed, and the gas in the second pipe 20 will not leak;

[0069] The outer wall of the rotating disk 24 is connected with an impeller 25. An annular groove 32 is provided on the inner wall of the air collecting disk 22. The teeth on the impeller 25 rotate in the annular groove 32, and a sealed annular groove 32 is formed between the annular groove 32 and the outer wall of the rotating disk 24. An air inlet hole 28 is opened at the bottom of the air collecting disk 22. The gas flow path of the air inlet hole 28 is tangent to the inner wall of the annular groove 32. The outside of the air inlet hole 28 is connected to the top end of the first pipe 19 through a third pipe 29. The top of the first pipe 19 is connected with a dispersion box 27. The dispersion box 27 is used for dispersing the air flow of the vacuum pump 4. One end of the third pipe 29 far away from the air collecting disk 22 is connected to the top of the dispersion box 27 and is communicated with the inside of the dispersion box 27. Thus, when the vacuum pump 4 works, the gas can enter the annular groove 32 through the third pipe 29 and the air inlet hole 28, and then the impeller 25 is driven to rotate by the air pressure; by arranging a pressure regulating valve 30 in the middle of the third pipe 29, the flow rate of the third pipe 29 entering the annular groove 32 is controlled, so as to indirectly control the driving force of the air pressure, and thus the purpose of adjusting the rotation speed of the rotating disk 24 is achieved;

[0070] In the above scheme, the air flow enters the annular groove 32 from the air inlet hole 28 to realize the uninterrupted rotation of the rotating disk 24, and is matched with the gas entering the air collecting disk 22 from the rotating sleeve 31, so as to realize that the gas periodically blows to the two intake pipes 23 alternately;

[0071] It should be noted that the pressure regulating valve 30 can be one of the following:

[0072] Self-operated pressure regulating valve: The valve core is driven by the pressure of the medium itself, without external energy, and is suitable for a stable gas supply system (such as urban heating pipelines).

[0073] Proportional pressure regulating valve: The opening degree is adjusted proportionally through an electric signal or a gas signal to achieve high-precision pressure control;

[0074] Piston type pressure regulating valve: The position of the valve core is changed by the up and down movement of the piston. The structure is simple and it can withstand high pressure differences, and is suitable for industrial high-pressure gas circuits;

[0075] Diaphragm type pressure regulating valve: The valve core is driven by the deformation of the diaphragm. The structure is compact and the sensitivity is high, and it is suitable for low pressure differences and high-precision regulation;

[0076] Sleeve type pressure regulating valve: It adopts a structure of a sleeve and a valve core, and reduces the fluid impact through balance holes, and is suitable for high pressure differences and high-noise environments;

[0077] In order to achieve the effect that gas selectively enters the heat conduction cavity 8 from two air inlets 16, first of all, the rotating disk 24 is configured to be hollow, and a notch 26 is opened at one end of the rotating disk 24 close to the air inlet pipe 23. The notch 26 has a certain length, so as to provide a longer air intake time when the rotating disk 24 rotates. It should be noted that one end of the rotating disk 24 is in contact with the air collecting disk 22, so that only when the projection surface of the notch 26 overlaps or partially overlaps with the projection surface at the inlet of the air inlet pipe 23, the gas can enter the air inlet pipe 23 through the notch 26. When the projection surface of the notch 26 does not overlap with the projection surface at the inlet of the air inlet pipe 23, the air inlet pipe 23 is in a closed state. It should be noted that the edge of the notch 26 does not affect the sealing performance of the annular groove 32, and the annular groove 32 is not in an absolutely sealed state, but a relatively sealed space formed by the close contact between parts. In this way, when the gas enters from the air inlet hole 28, it can normally drive the impeller 25 to rotate, and the small amount of air leakage caused by the relatively sealed space will not affect the driving force of the gas.

[0078] Through the above solution, when this solution is implemented, the negative pressure end of the vacuum pump 4 evacuates the inside of the mold 2, and at the same time, the positive pressure end of the vacuum pump 4 outputs high-pressure gas. The high-pressure gas enters the cavity of the rotating disk 24 through the first pipeline 19 and the second pipeline 20, then enters the air inlet pipe 23 through the notch 26, and finally blows into the heat conduction cavity 8 from the air inlet 16, so as to push the spoiler 6 to move, and drives the impeller 25 to rotate by blowing air through the third pipeline 29, so that the rotating disk 24 rotates, and the notch 26 periodically covers the inlets of the two air inlet pipes 23 respectively, so that the gas periodically blows to both ends of the heat conduction cavity 8 respectively. Specifically: when the gas in one of the air inlet pipes 23 blows to one end of the heat conduction cavity 8, it can drive the spoiler 6 to rotate to the other side. When the spoiler 6 rotates to the other side of the heat conduction cavity 8, the air flow in the corresponding air inlet pipe 23 on the other side continues to blow, causing the spoiler 6 to start to turn back. The switching device of the present application integrates the functions of periodic air intake and switching speed, and controls them in coordination.

[0079] Embodiment 2: The technical solution of this embodiment is different from that of Embodiment 1 in that this embodiment provides an arc method for evacuating a quartz crucible, including the following steps:

[0080] S1. Evacuate the inside of the mold 2 by using the vacuum pump 4 through the heat conduction cavity 8 provided in the side wall of the mold 2 and the micropore group communicated therewith, wherein the micropore group is communicated with the negative pressure end of the vacuum pump 4 through the chamber in the side wall of the mold 2.

[0081] Vacuum pumping and particle filling: Start the vacuum pump 4, evacuate the interior of the mold 2 through the negative pressure chamber 33, the mold side wall chamber and the micropore group to form a negative pressure environment. The quartz particles are heated and melted by the electrode 10 of the top mold cover 12 of the mold 2. The vacuum environment promotes the close packing of the particles, reduces the residual bubbles. The inner diameter design of the micropores 13 combines with the dense packing effect of the quartz particles and the vacuum adsorption force to prevent the particles from entering the micropores 13 and ensure the efficient discharge of gas.

[0082] S2. Introduce the gas generated at the positive pressure end of the vacuum pump 4 into the heat conduction chamber 8 through the alternative intake port 16, so that the turbulence device in the heat conduction chamber 8 rotates driven by the gas to disturb the heat conduction liquid in the heat conduction chamber 8 and rapidly cool the side wall of the mold 2.

[0083] Heat conduction liquid circulation heat dissipation: The heat conduction chamber 8 is filled with heat conduction liquid. The high-pressure gas output from the positive pressure end of the vacuum pump 4 is transported to the switching device through the first pipeline 19 and the second pipeline 20. The gas pushes the turbulence plate 6 in the heat conduction chamber 8 to rotate, agitating the heat conduction liquid to form a turbulent flow, strengthening the heat exchange efficiency of the side wall of the mold 2. The gap design between the turbulence plate 6 and the heat conduction chamber 8 allows the liquid to flow in multiple paths, avoiding heat dissipation blind spots, and accelerating heat transfer through fluid inertia.

[0084] S3. Turbulence plate drive and speed regulation: The switching device periodically connects the intake pipe 23 through the notch 26 of the rotating disk 24 to alternately input gas into the two intake ports 16, driving the turbulence plate 6 to continuously rotate in one direction. The pressure regulating valve 30 adjusts the gas flow rate of the third pipeline 29 to control the tangential air flow intensity of the impeller 25 in the annular groove 32, realizing stepless adjustment of the rotation speed of the turbulence plate 6. Accelerate the rotation of the turbulence plate 6 during the high-temperature melting stage to enhance heat dissipation, and reduce the speed during the cooling and shaping stage to slow down the disturbance.

[0085] S4. Operation of the pneumatic switching device: The air collecting disc 22 is periodically connected and disconnected from the intake pipe 23 through the notch 26 of the rotating disk 24 to automatically switch the gas input path. The rotating sleeve 31 is hermetically connected to the second pipeline 20 to ensure that the gas only enters the target intake pipe 23 through the notch 26, avoiding leakage. The convex block 18 limits the rotation range of the turbulence plate 6 to prevent it from blocking the intake port 16 and ensuring the continuity of driving.

[0086] S5. Dynamic anti-blocking of micropores and gas discharge: The vacuum pump 4 continuously sucks the negative pressure chamber 33. The gas flow on the surface of the micropores 13 dynamically peels off the loose particles to maintain the smoothness of the micropore group. The frictional force and bridging effect between the quartz particles form a self-locking structure, combined with the vacuum adsorption force, to achieve gas discharge and zero particle leakage. The exhaust hole 11 discharges the gas in the heat conduction chamber 8 to balance the cavity pressure and avoid the risk of liquid backflow or high pressure.

[0087] In summary, the present invention uses the vacuum pump 4 to evacuate the inside of the mold 2 to form a negative pressure environment, effectively reducing the residual bubbles in the quartz melt molding process, and at the same time, combined with the circulating heat dissipation design of the heat conduction cavity 8 on the side wall of the mold 2, vacuum molding and temperature control are achieved at the same time. The vacuum environment promotes the close accumulation of quartz particles, reduces the influence of gas expansion on the crucible structure at high temperature, and the spoiler 6 in the heat conduction cavity 8 drives the heat conduction liquid to flow in a directional manner, which can quickly remove the heat from the mold cavity, avoid local overheating and cause the quartz material to crack or deform, and solve the hysteresis of heat dissipation.

[0088] The spoiler 6 in the heat transfer cavity 8 actively stirs the heat transfer liquid to form turbulence, thereby improving the heat exchange efficiency of the side wall of the mold 2. The coordination between the spoiler 6 and the gap between the heat transfer cavity 8 allows the liquid to flow in multiple paths, avoiding the heat dissipation blind spot caused by local liquid flow stagnation, and can also use the fluid inertia to enhance heat transfer. The air pressure drive mechanism of the spoiler 6 is linked with the vacuum pump 4 system, and can dynamically adjust the speed according to the production stage, such as accelerating heat dissipation in the high-temperature melting stage and slowing down disturbances in the cooling and finalizing stage, thereby accurately matching the heat load requirements of different process nodes, avoiding the high energy consumption problem of the external cooling device, and solving the reliability risk of the traditional water cooling system caused by pipe blockage or leakage.

[0089] The spoiler 6 is driven to rotate by the gas output from the positive pressure end of the vacuum pump 4, thus realizing the recycling of energy. The switching device automatically switches the gas input path by periodically switching the notch 26 of the rotating disk 24 and the air inlet pipe 23, thereby ensuring the continuous unidirectional rotation of the spoiler 6, simplifying the mechanical structure and reducing the maintenance cost. The speed of the spoiler 6 is adjusted steplessly by the precise control of the air flow by the pressure regulating valve 30. The tangential airflow between the impeller 25 and the annular groove 32 increases the stability of the rotational power and avoids sudden changes in speed caused by air pressure fluctuations.

[0090] The micropores on the inner wall of mold 2 achieve the dual goals of efficient gas discharge and zero particle leakage through the synergistic effect of negative pressure suction and particle characteristics. The inner diameter design of micropore 13 fully considers the dense accumulation effect of quartz particles, and cooperates with the continuous adsorption force of vacuum negative pressure to prevent tiny particles from entering micropore 13 and causing blockage.

[0091] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0092] In the description of the embodiments of the present application, the terms "first", "second", "third", "fourth", etc. (if any) in the specification, claims and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily limit to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0093] The term "plurality" herein refers to two or more. The term "and / or" herein merely describes the associated relationship of associated objects and indicates that three relationships may exist. For example, A and / or B may represent three situations: A exists alone, A and B exist simultaneously, and B exists alone.

[0094] In the embodiments of the present application or the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation on the embodiments of the present application. In the description of the embodiments of the present application, the meaning of "plurality" is two or more, unless otherwise specifically specified.

[0095] Parallel: The parallel defined in the present application is not limited to absolute parallelism. This definition of parallel can be understood as substantially parallel, allowing for non-absolute parallelism due to factors such as assembly tolerances, design tolerances, and the influence of structural flatness. Small-angle range errors are allowed. For example, within an assembly error range of less than 10 degrees, it can be understood as a parallel relationship.

[0096] Vertical: The vertical defined in the present application is not limited to an absolute perpendicular intersection (angle of 90 degrees). A non-absolute perpendicular intersection relationship is allowed due to factors such as assembly tolerances, design tolerances, and the influence of structural flatness. Small-angle range errors are allowed. For example, within an assembly error range of 80 degrees to 100 degrees, it can be understood as a vertical relationship.

[0097] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific embodiments described. Obviously, many modifications and variations can be made according to the content of this specification. These embodiments are selected and specifically described in this specification to better explain the principles and practical applications of the present invention, so that those skilled in the art can well understand and utilize the present invention. The present invention is only limited by the claims and their full scope and equivalents.

Claims

1. An arc method quartz crucible vacuum pumping device, comprising a vacuum pump (4) and a mold (2) for producing a quartz crucible above it, characterized in that: A heat conduction cavity (8) filled with heat conduction liquid is formed inside the side wall of the mold (2). A flow disturbing device is arranged inside the heat conduction cavity (8), and the flow disturbing device rotates along the circumferential direction of the heat conduction cavity (8). Two air inlets (16) are arranged outside the heat conduction cavity (8), and the two air inlets (16) are connected to the positive pressure end of the vacuum pump (4) in an alternative air intake manner. The outer wall of the mold (2) has a heat conduction structure, and a micropore group is formed on the inner wall of the mold (2). The micropore group is collected through a cavity formed inside the side wall of the mold (2), and this cavity is located between the mold cavity of the mold (2) and the heat conduction cavity (8). This cavity is communicated with the negative pressure end of the vacuum pump (4); During operation: The negative pressure end of the vacuum pump (4) evacuates the inside of the mold (2) through the cavity and the micropore group; The gas at the positive pressure end of the vacuum pump (4) enters the heat conduction cavity (8) through one of the air inlets (16), and then pushes the flow disturbing device to rotate in the heat conduction cavity (8) to disturb the heat conduction liquid inside the heat conduction cavity (8); The flow disturbing device includes a flow disturbing plate (6). The inside of the flow disturbing plate (6) has a hollow structure. The heat conduction liquid is filled in the area outside the flow disturbing plate (6) inside the heat conduction cavity (8). When the flow disturbing plate (6) rotates, the heat conduction liquid rotates synchronously in the heat conduction cavity along with the rotation of the flow disturbing plate (6), so that the heat conduction liquid flows regularly inside the heat conduction cavity (8).

2. An arc method quartz crucible vacuum pumping device according to claim 1, characterized in that: The heat conduction cavity (8) includes: An annular main body section, continuously distributed along the circumferential direction of the side wall of the mold (2); A longitudinal termination section, closing at the upper and lower end faces of the mold (2), and its bottom has an arc extension part matching the bottom wall of the mold (2).

3. The vacuum extraction device for an arc method quartz crucible according to claim 1, characterized in that: The top end of the heat conduction cavity (8) is communicated with the outside through at least one exhaust hole to release the gas inside the heat conduction cavity (8).

4. A vacuum pumping device for an arc method quartz crucible according to claim 1, characterized in that: The flow disturbing device is rod-shaped and has an arc structure extending along the circumferential direction of the heat conduction cavity (8).

5. A vacuum pumping device for an arc method quartz crucible according to claim 1, characterized in that: A negative pressure cavity (33) is formed at the bottom of the mold (2). The negative pressure cavity (33) is communicated with the mold cavity of the mold (2) through a cavity formed inside the side wall of the mold (2) and the micropore group. The negative pressure cavity (33) is connected to the negative pressure end of the vacuum pump (4). The vacuum pump (4) evacuates the negative pressure cavity (33), the cavity and the micropore group to create a vacuum environment inside the mold (2).

6. The vacuum pumping device for an arc method quartz crucible according to claim 1, wherein: A switching device is arranged outside the two air inlets (16). The switching device includes a fixed sleeve (21). The fixed sleeve (21) is fixedly connected to the outer wall of the mold (2). One end of the fixed sleeve (21) is connected with two air inlet pipes (23) corresponding to the positions of the two air inlets (16). The other ends of the two air inlet pipes (23) are fixedly connected with a gas collecting disc (22). The two air inlet pipes (23) are both communicated with the gas collecting disc (22). The outside of the gas collecting disc (22) is covered with a rotating disc (24). The rotating disc (24) is rotatably connected to the inner wall of the gas collecting disc (22). The middle part of the rotating disc (24) is connected with a rotating sleeve (31). The rotating sleeve (31) is sleeved on the top end of the second pipe (20).

7. The vacuum pumping device for an arc method quartz crucible according to claim 6, characterized in that: The outer wall of the rotating disk (24) is connected with an impeller (25). The inner wall of the air collecting disk (22) is provided with an annular groove (32). The impeller (25) can rotate in the annular groove (32). The bottom of the air collecting disk (22) is provided with an air inlet hole (28). The gas flow path of the air inlet hole (28) is tangent to the inner wall of the annular groove (32). The outside of the air inlet hole (28) is connected to the top end of the first pipe (19) through a third pipe (29). The top of the first pipe (19) is connected with a dispersion box (27). The dispersion box (27) is used for dispersing the air flow at the positive pressure end of the vacuum pump (4). One end of the third pipe (29) far away from the air collecting disk (22) is connected to the top of the dispersion box (27) and is communicated with the inside of the dispersion box (27).

8. The vacuum pumping device for an arc method quartz crucible according to claim 7, characterized in that: The rotating disk (24) is hollow. One end of the rotating disk (24) close to the air inlet pipe (23) is provided with a notch (26). One end of the rotating disk (24) is in contact with the air collecting disk (22). It is configured that when the projection plane of the notch (26) completely overlaps or partially overlaps with the projection plane at the inlet of the air inlet pipe (23), the gas in the rotating disk (24) can enter the air inlet pipe (23) through the notch (26).

9. A method for evacuating an arc-process quartz crucible, using an arc-process quartz crucible evacuation device according to any one of claims 1-8, characterized in that: It includes the following steps: S1. Through the heat conduction cavity (8) arranged in the side wall of the mold (2) and the micropore group communicated with it, use the vacuum pump (4) to evacuate the inside of the mold (2), wherein the micropore group is communicated with the negative pressure end of the vacuum pump (4) through the cavity in the side wall of the mold (2); S2. Introduce the gas generated at the positive pressure end of the vacuum pump (4) into the heat conduction cavity (8) through the alternatively selected air inlet (16), so that the turbulence device in the heat conduction cavity (8) rotates under the drive of the gas to disturb the heat conduction liquid in the heat conduction cavity (8) and quickly cool the side wall of the mold (2).

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