Uniform gas inlet mixing device of vapor deposition fluidized bed
By designing the extended reaction tube and graphite sleeve seal structure in the vapor deposition fluidized bed, the problems of stirring lag and insufficient reaction time caused by powdered materials are solved, and more efficient reaction and more stable device operation are achieved.
Patent Information
- Application Number
- CN202510116864.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-24
- Publication Date
- 2025-05-02
AI Technical Summary
The vapor-phase deposition fluidized bed is prone to produce powdery materials during the stirring process, resulting in agitation lag and damage. At the same time, the length of the reaction tube is short, the residence time of the reaction gas and solid particles is insufficient, making it difficult to fully contact and react.
A uniform air intake mixing device for vapor deposition fluidized bed is designed, including a lengthened reaction tube, an inner sleeve, a shaft sleeve and a stirring paddle. The reaction time is extended by lengthening the reaction tube, and the graphite sleeve seal is used to prevent the powder from entering the gap, ensuring stirring stability and reaction efficiency.
By increasing the reaction time by lengthening the reaction tube, the contact and reaction efficiency between reactants are improved and the product quality is improved. At the same time, the sealing design of the graphite sleeve avoids lag and damage to the transmission shaft and extends the service life of the device.
Smart Images
Figure CN119913487A_ABST
Abstract
Description
Technical Field
[0001] The invention mainly relates to the technical field of fluidized beds, and in particular to a uniform air intake mixing device for a gas phase deposition fluidized bed. Background Art
[0002] Fluidized bed vapor deposition is an advanced material preparation process that combines fluidized bed and chemical vapor deposition (CVD) technology. It provides reactants to the reactor through a gas fluidized bed, suspends solid particles in the gas and undergoes chemical reactions, thereby depositing thin films on the surface of the substrate or preparing nanomaterials. This technology has the characteristics of high film uniformity, excellent material quality, high production efficiency and a wide range of applications. It is widely used in solar cells, semiconductor processes, nuclear fuel fields, catalyst preparation and other fields, showing important application value and potential.
[0003] When the vapor deposition fluidized bed is stirring materials, the friction between the materials will produce powdered materials. The powdered materials can easily enter the gap between the stirring shaft and the sleeve, causing the stirring to get stuck and damaged. On the other hand, the reaction tube of the existing vapor deposition fluidized bed is relatively short, and the residence time of the reaction gas and solid particles in the pipe is relatively short, making it difficult for the two to fully contact and react. Summary of the invention
[0004] 1. Technical problem to be solved by the invention: The present invention provides a uniform air intake mixing device for a gas phase deposition fluidized bed, which is used to solve the technical problems existing in the above-mentioned background technology.
[0005] 2. Technical solution: To achieve the above object, the technical solution provided by the present invention is: a uniform air intake mixing device for a gas phase deposition fluidized bed, comprising an outer sleeve, wherein an extended reaction tube and an inner sleeve are sequentially sleeved from top to bottom in the outer sleeve, a discharge bottom plate is fixedly installed on the top of the inner sleeve, and a circumferentially arranged through grooves are opened on the surface of the discharge bottom plate; A shaft sleeve is coaxially arranged inside the inner sleeve, a transmission shaft is rotatably installed in the shaft sleeve, one end of the transmission shaft is connected to the servo motor through a coupling, and the other end extends into the extended reaction tube and is fixedly installed with a stirring paddle, the bottom of the stirring paddle abuts against a first graphite sleeve, the first graphite sleeve is arranged in the shaft sleeve and is sealed and rotatably connected to the transmission shaft.
[0006] Furthermore, the inner wall of the connecting portion of the stirring paddle is provided with a first internal thread, and the first internal thread matches with a first external thread provided on the outer side of the transmission shaft.
[0007] Furthermore, a first bearing, a second bearing and a third bearing are sequentially arranged in the sleeve from top to bottom, the three bearings are all connected to the transmission shaft bearing, and oil seals are arranged at both ends of the third bearing.
[0008] Furthermore, an annular groove is opened on the outer side of the transmission shaft, and a full-friction O-ring is installed in the annular groove. The outer side of the full-friction O-ring abuts against the second graphite sleeve. The second graphite sleeve is located between the first graphite sleeve and the first bearing, and is sealed and rotatably connected to the transmission shaft.
[0009] Furthermore, a third graphite sleeve and a fourth graphite sleeve are sequentially arranged between the first bearing and the second bearing from top to bottom, and both graphite sleeves are sealingly and rotatably connected to the transmission shaft, and a second external thread is arranged on the outer side of the fourth graphite sleeve, and the second external thread matches the second internal thread arranged on the inner wall of the sleeve.
[0010] Furthermore, one side of the outer sleeve and the inner sleeve is provided with a discharge port, and the two discharge ports are coaxially distributed. The other side of the outer sleeve and the inner sleeve is provided with an air inlet, and the two air inlets are coaxially distributed.
[0011] Furthermore, a graphite column is sleeved on the shaft sleeve, the outer diameter of the graphite column is the same as that of the inner sleeve, the top of the graphite column is provided with a slope, and a connecting groove connected to the air inlet is opened, and the bottom of the slope is connected to the discharge port.
[0012] Furthermore, the bottoms of the outer sleeve and the inner sleeve are connected via an outer flange and an inner flange.
[0013] Furthermore, a lower plate is fixedly installed at the bottom of the inner sleeve, the bottom of the lower plate is connected to one end of the water jacket flange, the other end of the water jacket flange is connected to the top of the servo motor through the bottom flange, the transmission shaft extends into the water jacket flange, a water jacket is arranged on the outside of the water jacket flange, and a liquid inlet pipe and a liquid outlet pipe are respectively connected on both sides of the water jacket.
[0014] 3. Beneficial effects: The technical solution provided by the present invention has the following beneficial effects compared with the prior art: the extended reaction tube is longer than the traditional reaction tube, so the residence time of the reaction gas and solid particles in the tube is correspondingly increased, which helps the reactants to contact and react more fully, thereby improving the reaction efficiency and product quality, and the first graphite sleeve abuts against the bottom of the stirring paddle, which can achieve sealing between the two, thereby preventing material powder from entering the gap between the sleeve and the transmission shaft, thereby preventing the transmission shaft from being stuck and damaged. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the overall cutaway structure of the present invention; Figure 2 It is a schematic diagram of the overall cut-away structure after the reaction tube is lengthened according to the present invention; Figure 3 For the present invention Figure 2 The enlarged structural diagram at A in the middle; Figure 4 For the present invention Figure 2 The enlarged structural diagram at B in the middle; Figure 5 For the present invention Figure 2 Enlarged structural diagram at point C in the middle.
[0016] Reference numerals: 1. Outer sleeve; 2. Inner sleeve; 1201. Discharge port; 1202. Air inlet; 3. Extended reaction tube; 4. Discharge bottom plate; 401. Through groove; 5. Bushing; 501. Second internal thread; 6. Transmission shaft; 601. First external thread; 602. Annular groove; 7. Servo motor; 8. Stirring paddle; 801. First internal thread; 9. First graphite sleeve; 10. First bearing; 11. Second bearing; 12. Third bearing; 13. Oil seal; 14. Second graphite sleeve; 15. Fully ether O-ring; 16. Third graphite sleeve; 17. Fourth graphite sleeve; 1701. Second external thread; 18. Graphite column; 1801. Connecting groove; 19. Lower plate; 20. External flange; 21. Internal flange; 22. Water jacket; 2201. Liquid inlet pipe; 2202. Liquid outlet pipe; 23. Water jacket flange; 24. Bottom flange. DETAILED DESCRIPTION
[0017] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are shown in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.
[0018] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “page”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.
[0019] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0020] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be internal communication between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Example
[0021] See attached Figure 1-5 A uniform gas inlet mixing device for a gas phase deposition fluidized bed comprises an outer sleeve 1, wherein an extended reaction tube 3 and an inner sleeve 2 are sequentially sleeved in the outer sleeve 1 from top to bottom, a discharge bottom plate 4 is fixedly mounted on the top of the inner sleeve 2, and a circumferentially arranged through grooves 401 are opened on the surface of the discharge bottom plate 4; A shaft sleeve 5 is coaxially arranged inside the inner sleeve 2, and a transmission shaft 6 is rotatably installed in the shaft sleeve 5. One end of the transmission shaft 6 is connected to the servo motor 7 through a coupling, and the other end extends into the extended reaction tube 3 and is fixedly installed with a stirring paddle 8. The bottom of the stirring paddle 8 is abutted against a first graphite sleeve 9, which is arranged in the shaft sleeve 5 and is sealed and rotatably connected to the transmission shaft 6.
[0022] In this embodiment, after a certain amount of material is placed in the extended reaction tube 3, the reaction gas is introduced through the through groove 401, and the servo motor 7 is used to drive the stirring paddle 8 to rotate, so that the material and the reaction gas can be stirred and mixed. The extended reaction tube 3 is longer than the traditional reaction tube, so the residence time of the reaction gas and solid particles in the pipeline is correspondingly increased, which helps the reactants to contact and react more fully, thereby improving the reaction efficiency and product quality. The first graphite sleeve 9 abuts against the bottom of the stirring paddle 8, which can achieve sealing between the two, thereby preventing material powder from entering the gap between the sleeve 5 and the transmission shaft 6, thereby preventing the transmission shaft 6 from being stuck and damaged.
[0023] The inner wall of the connection portion of the stirring paddle 8 is provided with a first internal thread 801 , and the first internal thread 801 matches with the first external thread 601 provided on the outer side of the transmission shaft 6 .
[0024] In this embodiment, the first internal thread 801 is threadedly connected to the first external thread 601 to achieve installation of the stirring paddle 8 and the transmission shaft 6. During the installation process, the stirring paddle 8 will squeeze the first graphite sleeve 9 to achieve a sealing effect.
[0025] The sleeve 5 is provided with a first bearing 10 , a second bearing 11 and a third bearing 12 in sequence from top to bottom. The three bearings are all connected to the transmission shaft 6 , and oil seals 13 are provided at both ends of the third bearing 12 .
[0026] In this embodiment, the transmission shaft 6 is relatively long, so the first bearing 10, the second bearing 11 and the third bearing 12 are connected to each other to ensure the stability of the transmission shaft 6 during rotation.
[0027] An annular groove 602 is provided on the outer side of the transmission shaft 6, and a full-friction O-ring 15 is installed in the annular groove 602. The outer side of the full-friction O-ring 15 abuts against the second graphite sleeve 14. The second graphite sleeve 14 is located between the first graphite sleeve 9 and the first bearing 10, and is sealed and rotatably connected to the transmission shaft 6.
[0028] In this embodiment, the full-polyether O-ring 15 is soft and high-temperature resistant, and after being abutted against the second graphite sleeve 14 , it can improve the sealing performance between the second graphite sleeve 14 and the transmission shaft 6 .
[0029] A third graphite sleeve 16 and a fourth graphite sleeve 17 are arranged between the first bearing 10 and the second bearing 11 from top to bottom, and both graphite sleeves are sealed and rotatably connected to the transmission shaft 6, and a second external thread 1701 is arranged on the outer side of the fourth graphite sleeve 17, and the second external thread 1701 matches with the second internal thread 501 arranged on the inner wall of the sleeve 5.
[0030] In this embodiment, after rotating the fourth graphite sleeve 17, the threaded connection between the second internal thread 501 and the second external thread 1701 can be used to drive the fourth graphite sleeve 17 to move up and down in the shaft sleeve 5, thereby squeezing the third graphite sleeve 16 to abut against the second graphite sleeve 14, so as to further improve the sealing effect.
[0031] A discharge port 1201 is provided on one side of the outer sleeve 1 and the inner sleeve 2, and the two discharge ports 1201 are coaxially distributed. An air inlet 1202 is provided on the other side of the outer sleeve 1 and the inner sleeve 2, and the two air inlet 1202 are coaxially distributed.
[0032] In this embodiment, the air inlet 1202 is used to allow the reaction gas to pass through the inner sleeve 2 and then enter the extended reaction tube 3 through the through groove 401. The reacted material can fall into the inner sleeve 2 through the through groove 401 and then be discharged from the discharge port 1201. It should be noted that when the material falls into the inner sleeve 2 through the through groove 401, the reaction gas will still be introduced into the air inlet 1202, thereby preventing the material from being discharged from the air inlet 1202.
[0033] A graphite column 18 is sleeved on the shaft sleeve 5 , and the outer diameter of the graphite column 18 is the same as that of the inner sleeve 2 . The graphite column 18 is provided with a slope at the top and a connecting groove 1801 connected to the air inlet 1202 . The bottom of the slope is connected to the discharge port 1201 .
[0034] In this embodiment, the slope is used to guide the material to be discharged from the discharge port 1201, and the connecting groove 1801 is used to ensure that the gas introduced from the air inlet 1202 can enter the inner sleeve 2.
[0035] The bottoms of the outer sleeve 1 and the inner sleeve 2 are connected via an outer flange 20 and an inner flange 21 .
[0036] A lower plate 19 is fixedly installed at the bottom of the inner sleeve 2, and the bottom of the lower plate 19 is connected to one end of a water jacket flange 23. The other end of the water jacket flange 23 is connected to the top of the servo motor 7 through a bottom flange 24. The transmission shaft 6 extends into the water jacket flange 23. A water jacket 22 is arranged on the outside of the water jacket flange 23. A liquid inlet pipe 2201 and a liquid outlet pipe 2202 are respectively connected to the two sides of the water jacket 22.
[0037] In this embodiment, the transmission shaft 6 will generate a certain amount of heat during the rotation process and transfer it to the water jacket flange 23. After the coolant is introduced into the liquid inlet pipe 2201, the coolant enters the water jacket 22 and takes away the temperature of the water jacket flange 23, and is finally discharged from the liquid outlet pipe 2202, thereby being able to dissipate heat for the transmission shaft 6.
[0038] The above-described embodiments only express a certain implementation mode of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the patent scope of the present invention. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be based on the attached claims.
[0039] It should be noted that the above contents belong to the technical cognition scope of the inventor. Since the technical contents in this field are vast and too complicated, the above contents of this application do not necessarily constitute prior art.
Claims
1. A uniform air intake mixing device for a gas phase deposition fluidized bed, characterized in that: It comprises an outer sleeve (1), wherein an extended reaction tube (3) and an inner sleeve (2) are sleeved in sequence from top to bottom in the outer sleeve (1), a discharge bottom plate (4) is fixedly mounted on the top of the inner sleeve (2), and a surface of the discharge bottom plate (4) is provided with circumferentially arranged through grooves (401); A shaft sleeve (5) is coaxially arranged inside the inner sleeve (2), a transmission shaft (6) is rotatably mounted inside the shaft sleeve (5), one end of the transmission shaft (6) is connected to a servo motor (7) via a coupling, and the other end extends into the extended reaction tube (3) and is fixedly mounted with a stirring paddle (8), the bottom of the stirring paddle (8) is in contact with a first graphite sleeve (9), the first graphite sleeve (9) is arranged in the shaft sleeve (5) and is sealingly rotatably connected to the transmission shaft (6).
2. The uniform air intake mixing device for a vapor deposition fluidized bed according to claim 1, characterized in that: The inner wall of the connection portion of the stirring paddle (8) is provided with a first internal thread (801), and the first internal thread (801) matches with a first external thread (601) provided on the outer side of the transmission shaft (6).
3. The uniform air intake mixing device for a vapor deposition fluidized bed according to claim 1, characterized in that: A first bearing (10), a second bearing (11) and a third bearing (12) are arranged in sequence from top to bottom in the shaft sleeve (5); the three bearings are all connected to the bearing of the transmission shaft (6); and oil seals (13) are arranged at both ends of the third bearing (12).
4. The uniform air intake mixing device for a vapor deposition fluidized bed according to claim 3, characterized in that: An annular groove (602) is provided on the outer side of the transmission shaft (6), a full-friction O-ring (15) is installed in the annular groove (602), the outer side of the full-friction O-ring (15) abuts against the second graphite sleeve (14), the second graphite sleeve (14) is located between the first graphite sleeve (9) and the first bearing (10), and is sealed and rotatably connected to the transmission shaft (6).
5. The uniform air intake mixing device for a vapor deposition fluidized bed according to claim 3, characterized in that: A third graphite sleeve (16) and a fourth graphite sleeve (17) are arranged between the first bearing (10) and the second bearing (11) from top to bottom, and the two graphite sleeves are both rotatably connected to the transmission shaft (6) in a sealed manner, and a second external thread (1701) is arranged on the outer side of the fourth graphite sleeve (17), and the second external thread (1701) matches a second internal thread (501) arranged on the inner wall of the sleeve (5).
6. The uniform air intake mixing device for a vapor deposition fluidized bed according to claim 1, characterized in that: A discharge port (1201) is provided on one side of the outer sleeve (1) and the inner sleeve (2), and the two discharge ports (1201) are coaxially distributed. An air inlet (1202) is provided on the other side of the outer sleeve (1) and the inner sleeve (2), and the two air inlet ports (1202) are coaxially distributed.
7. The uniform air intake mixing device for a vapor deposition fluidized bed according to claim 6, characterized in that: A graphite column (18) is sleeved on the shaft sleeve (5), the outer diameter of the graphite column (18) being the same as that of the inner sleeve (2), the top of the graphite column (18) being provided with a slope, and a connecting groove (1801) being provided which is connected to the air inlet (1202), and the bottom of the slope being connected to the discharge port (1201).
8. The uniform air intake mixing device for a vapor deposition fluidized bed according to claim 1, characterized in that: The bottoms of the outer sleeve (1) and the inner sleeve (2) are connected via an outer flange (20) and an inner flange (21).
9. The uniform air intake mixing device for a vapor deposition fluidized bed according to claim 1, characterized in that: A lower plate (19) is fixedly mounted on the bottom of the inner sleeve (2); the bottom of the lower plate (19) is connected to one end of a water jacket flange (23); the other end of the water jacket flange (23) is connected to the top of a servo motor (7) via a bottom flange (24); the transmission shaft (6) extends into the water jacket flange (23); a water jacket (22) is arranged outside the water jacket flange (23); and a liquid inlet pipe (2201) and a liquid outlet pipe (2202) are respectively connected to the two sides of the water jacket (22).