Vacuum chamber sealing structure

Abstract

The vacuum cabin sealing structure comprises an arc-shaped track, a cabin door and a driving mechanism, the arc-shaped track is provided with an arc-shaped groove, one end of the arc-shaped groove is provided with an inclined groove, and the inclined groove obliquely extends in the direction close to the circle center of the arc-shaped groove from the joint of the inclined groove and the arc-shaped groove; the cabin door comprises a body, the body is provided with rollers, and the cabin door is clamped to the arc-shaped track through the rollers; the driving mechanism is connected with the cabin door and configured to drive the cabin door to move along the arc-shaped groove, and when the cabin door moves till the rollers enter the inclined groove, the cabin door is located at the sealing position. The chute is formed in one end of the arc-shaped groove, so that the cabin door sinks towards the circle center close to the arc-shaped groove under the action of gravity when the cabin door moves until the roller enters the chute, the cabin door is sealed, and an arc normal pre-tightening force does not need to be additionally applied; the technical problems that in the prior art, a rotary cabin door can achieve the sealing effect only by applying arc normal pre-tightening force to an arc-shaped cabin door, but the pre-tightening force can affect movement of the rotary cabin door, and opening of the arc-shaped cabin door is affected are solved.

Description

Technical Field

[0001] The present application relates to the field of testing experiments, and in particular to a vacuum chamber sealing structure. Background Art

[0002] With the continuous development of aerospace technology, high-altitude test equipment can simulate extreme environments such as low temperature and low pressure at high altitude, and be used to conduct performance tests and reliability tests on related equipment. The sealed cabin door is a key component that isolates the high-altitude test equipment from the external environment. Its sealing performance directly affects the safety and reliability of the high-altitude test equipment.

[0003] In the related technologies, the opening of an axially movable door requires a large axial space, and is not applicable to vacuum containers with a short axial length angle and a large door opening ratio; the opening of a flip-type door requires a large vertical space, and is not applicable to working conditions with limited height; the rotating door requires a smaller space, but a pre-tightening force in the normal direction of the arc needs to be applied to the curved door to achieve a sealing effect, but the pre-tightening force will affect the movement of the rotating door and the opening of the curved door.

[0004] Therefore, it is necessary to design a new vacuum chamber sealing structure to overcome the above problems. Summary of the invention

[0005] The present application provides a vacuum chamber sealing structure, which can solve the technical problem in the related technology that the rotary door needs to apply a pre-tightening force in the normal direction of the arc to the curved door to achieve a sealing effect, but the pre-tightening force will affect the movement of the rotary door and affect the opening of the curved door.

[0006] In a first aspect, an embodiment of the present application provides a vacuum chamber sealing structure, comprising an arc track, a cabin door and a driving mechanism, wherein the arc track is provided with an arc groove, one end of the arc groove is provided with an inclined groove, and the inclined groove extends obliquely from the connection with the arc groove toward the direction close to the center of the arc groove; the cabin door comprises a main body, the main body is provided with a roller, and the cabin door is clamped to the arc track through the roller; the driving mechanism is connected to the cabin door, and the driving mechanism is configured to drive the cabin door to move along the arc groove, and when the cabin door moves until the roller enters the inclined groove, the cabin door is in a sealing position.

[0007] In combination with the first aspect, in one embodiment, a first groove is further provided on one side of the arc-shaped groove close to the center thereof, the first groove is spaced apart from the inclined groove, the main body is provided with at least two of the rollers, the arc length between the center of the inclined groove and the center of the first groove is equal to the arc length between two of the rollers, and when one of the rollers is located in the inclined groove and the other roller is located in the first groove, the hatch is in a sealed position.

[0008] In combination with the first aspect, in one embodiment, the inner wall surface of the first groove includes an arc surface and an inclined surface connected to each other, the arc surface and the inclined surface are distributed along the extension direction of the arc groove, and the inclined surface is located on the side of the arc surface away from the inclined groove.

[0009] In combination with the first aspect, in one embodiment, one end of the arc-shaped groove connected to the inclined groove has a first tangent; and the angle between the first tangent and the axis of the inclined groove is set to 15 to 35 degrees.

[0010] In combination with the first aspect, in one embodiment, the vacuum cabin sealing structure also includes a cabin body, the arc track is fixed to the cabin body, the cabin body is provided with a support block, the support block is provided with a second groove, and a sealing ring is installed in the second groove, and when the cabin door is in the sealing position, the cabin door sinks and abuts against the sealing ring.

[0011] In combination with the first aspect, in one embodiment, the sinking amount of the roller from the arc groove into the inclined groove along the radial direction of the arc groove is set to 3 to 10 mm.

[0012] In combination with the first aspect, in one embodiment, the driving mechanism includes: a motor and a transmission shaft, the motor is equipped with a drive sprocket; transmission sprockets are installed at both ends of the transmission shaft, one of the transmission sprockets is connected to the drive sprocket via a first chain, and the transmission sprockets at both ends of the transmission shaft are connected to the hatch via a second chain.

[0013] In combination with the first aspect, in one embodiment, the second chain is further connected to at least two tensioning sprockets, at least two of the tensioning sprockets are located on both sides of the driving sprocket, and at least two of the tensioning sprockets are clamped on opposite sides of the second chain.

[0014] In combination with the first aspect, in one embodiment, the cabin is further provided with a chain slider, and the second chain is slidably disposed on the chain slider.

[0015] In combination with the first aspect, in one embodiment, a plurality of track ribs are provided on one side of the arc track along its circumferential direction.

[0016] The beneficial effects brought by the technical solution provided in the embodiments of the present application include:

[0017] By arranging an inclined groove at one end of the arc groove, the hatch sinks toward the center of the arc groove under the action of gravity when the roller moves to enter the inclined groove, thereby achieving hatch sealing without the need for additional pre-tightening force in the normal direction of the arc. This solves the technical problem in the related technology that the rotary hatch needs to apply a pre-tightening force in the normal direction of the arc to achieve a sealing effect, but the pre-tightening force will affect the movement of the rotary hatch and affect the opening of the arc door. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 A schematic structural diagram of a vacuum chamber sealing structure provided in an embodiment of the present application;

[0020] Figure 2 A front view of a curved track provided in an embodiment of the present application;

[0021] Figure 3 for Figure 2 Sectional view of AA in the middle;

[0022] Figure 4 A partial enlarged view of the chute provided in the embodiment of the present application;

[0023] Figure 5 A partial enlarged view of the first groove provided in an embodiment of the present application;

[0024] Figure 6 A schematic diagram of the structure of the driving mechanism provided in the embodiment of the present application;

[0025] Figure 7 A schematic diagram of the structure of the drive sprocket and the tension sprocket provided in an embodiment of the present application.

[0026] In the figure: 1. arc track; 11. arc groove; 12. inclined groove; 13. first groove; 131. arc surface; 132. inclined surface; 2. hatch; 21. body; 22. roller; 3. drive mechanism; 31. motor; 32. transmission shaft; 33. transmission sprocket; 34. first chain; 35. second chain; 351. bushing; 352. inner chain plate; 353. outer chain plate; 354. chain pin; 36. tensioning sprocket; 4. cabin; 5. support block; 51. second groove; 6. sealing ring; 7. chain slider; 8. track rib plate. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] The embodiment of the present application provides a vacuum cabin sealing structure, which can solve the technical problem that a rotary cabin door needs to apply a pre-tightening force in the normal direction of the arc to the curved cabin door to achieve a sealing effect, but the pre-tightening force will affect the movement of the rotary cabin door and affect the opening of the curved cabin door.

[0029] See also Figure 1 , Figure 2 and Figure 6 As shown, an embodiment of the present application provides a vacuum chamber sealing structure, which includes an arc track 1, a cabin door 2 and a driving mechanism 3, the arc track 1 is provided with an arc groove 11, one end of the arc groove 11 is provided with an inclined groove 12, and the inclined groove 12 extends obliquely from the connection with the arc groove 11 to the direction close to the center of the arc groove 11; the cabin door 2 includes a body 21, the body 21 is provided with a roller 22, and the cabin door 2 is clamped to the arc track 1 through the roller 22; the driving mechanism 3 is connected to the cabin door 2, and the driving mechanism 3 is configured to drive the cabin door 2 to move along the arc groove 11, and when the cabin door 2 moves to the point where the roller 22 enters the inclined groove 12, the cabin door 2 is in a sealing position.

[0030] In this embodiment, the arc track 1 can be set to a hollow arc shape, the arc groove 11 can be set to a circular arc shape, the arc track 1 and the arc groove 11 are set concentrically, the hatch 2 can be set to a circular arc shape, and the hatch 2 can be used in a vacuum cabin with a limited axial length to save the space occupied by the vacuum cabin. The width of the arc groove 11 can be set to be equal to the width of the inclined groove 12. The roller 22 moves in the arc groove 11 so that the hatch 2 can move along the circumferential direction of the arc track 1. The body 21 can be provided with one roller 22 or two rollers 22 or more rollers 22. The main body 21 is provided with a roller 22. When the hatch 2 moves to the point where one of the rollers 22 enters the inclined groove 12, the hatch 2 is in a sealed position. Preferably, the main body 21 is provided with two rollers 22, which are located at both ends of the main body 21. When the hatch 2 moves to the point where one of the rollers 22 enters the inclined groove 12, the hatch 2 is in a sealed position. When the roller 22 enters the inclined groove 12, the hatch 2 sinks along the extension direction of the inclined groove 12 toward the center of the arc groove 11 under the action of gravity, thereby achieving sealing of the hatch 2 without the need for additional pre-tightening force in the normal direction of the arc.

[0031] In this embodiment, the inclined groove 12 is provided at one end of the arc groove 11, so that when the door 2 moves to the point where the roller 22 enters the inclined groove 12, the door 2 sinks toward the center of the arc groove 11 under the action of gravity, thereby achieving sealing of the door 2 without the need for additional pre-tightening force in the normal direction of the arc. This solves the technical problem in the related art that the rotary door 2 needs to be pre-tightened in the normal direction of the arc to achieve a sealing effect, but the pre-tightening force will affect the movement of the rotary door 2 and the opening of the arc door 2.

[0032] Further, see Figure 1 and Figure 2 As shown, in some embodiments, a first groove 13 is further provided on one side of the arc groove 11 close to the center thereof, the first groove 13 is spaced apart from the inclined groove 12, the main body 21 is provided with at least two rollers 22, the arc length between the center of the inclined groove 12 and the center of the first groove 13 is equal to the arc length between two of the rollers 22, and when one of the rollers 22 is located in the inclined groove 12 and the other roller 22 is located in the first groove 13, the hatch 2 is in a sealing position.

[0033] In this embodiment, the first groove 13 is located on one side of the arc groove 11 close to the center of the arc groove 11. When one of the rollers 22 is located in the inclined groove 12 and the other roller 22 is located in the first groove 13, the hatch 2 is limited between the inclined groove 12 and the first groove 13. The arc length between the center of the inclined groove 12 and the center of the first groove 13 is equal to the arc length between two of the rollers 22. The arc length between the center of the inclined groove 12 and the center of the first groove 13 is adjusted according to the size of the hatch 2. The amount of sinking of one of the rollers 22 from the arc groove 11 into the inclined groove 12 along the radial direction of the arc groove 11 is equal to the amount of sinking of the other roller 22 from the arc groove 11 into the first groove 13 along the radial direction of the arc groove 11, so that the hatch 2 sinks as a whole and completes the sealing.

[0034] Further, see Figure 1 , Figure 2 and Figure 5 As shown, in some embodiments, the inner wall surface of the first groove 13 includes an arc surface 131 and an inclined surface 132 that are connected to each other, and the arc surface 131 and the inclined surface 132 are distributed along the extension direction of the arc groove 11, and the inclined surface 132 is located on the side of the arc surface 131 away from the inclined groove 12.

[0035] In this embodiment, when the hatch 2 is in the sealing position, the roller 22 enters the first groove 13 along the inclined surface 132, and the arc surface 131 limits the roller 22, so that the roller 22 is not easy to escape from the first groove 13. When the hatch 2 is opened, the roller 22 exits the first groove 13 along the inclined surface 132. The inclined surface 132 is located on the side of the arc surface 131 away from the inclined groove 12, so that the roller 22 can easily move into or exit the first groove 13 along the inclined surface 132, thereby facilitating the sealing or opening of the hatch 2. The angle between the inclined surface 132 and the tangent of the connected arc track 1 can be set to be equal to the angle between the axis of the inclined groove 12 and the tangent of the arc groove 11 connecting the inclined groove 12.

[0036] Further, see Figure 1 , Figure 2 and Figure 4 As shown, in some embodiments, one end of the arc groove 11 connected to the inclined groove 12 has a first tangent; the angle between the first tangent and the axis of the inclined groove 12 is set to 15-35°.

[0037] In this embodiment, the angle between the first tangent and the axis of the inclined groove 12 can be set to 15-35°. Preferably, the angle between the first tangent and the axis of the inclined groove 12 is set to 30°, so that the hatch 2 can be sealed with an appropriate sinking amount and is convenient for subsequent opening. When the angle between the first tangent and the axis of the inclined groove 12 is small, in order to ensure the sinking amount of the hatch 2, the sinking length of the arc track 1 needs to be increased, resulting in a too long friction length of the sealing ring 6 contacted by the hatch 2. The hatch 2 will wear the sealing ring 6 during the movement. When the angle between the first tangent and the axis of the inclined groove 12 is large, the resistance to opening the hatch 2 is large, which is not convenient for the subsequent opening of the hatch 2.

[0038] Further, see Figure 1-3 As shown, in some embodiments, the vacuum cabin sealing structure also includes a cabin body 4, the arc track 1 is fixed to the cabin body 4, the cabin body 4 is provided with a support block 5, the support block 5 is provided with a second groove 51, and the second groove 51 is installed with a sealing ring 6. When the cabin door 2 is in the sealing position, the cabin door 2 sinks and abuts against the sealing ring 6.

[0039] In this embodiment, when one of the rollers 22 enters the chute 12, the hatch 2 is in a sealed position, the hatch 2 sinks as a whole, and the cabin body 4 and the hatch 2 complete a preliminary seal. In a vacuum state, as the vacuum degree increases, the hatch 2 presses the sealing ring 6 under the action of atmospheric pressure, and the cabin body 4 and the hatch 2 can achieve a reliable seal. There is enough downward pressure space between the hatch 2 and the arc track 1, and the arc track 1 will not affect the downward pressure of the hatch 2. The distance between the hatch 2 and the support block 5 can be set The sliding angle of the hatch door 2 is set to be greater than the sinking amount of the hatch door 2, so that the hatch door 2 has no contact with the sealing ring 6 during the sliding process along the arc groove 11, which can effectively prevent the hatch door 2 from scratching the sealing ring 6. The sealing ring 6 can be made of rubber material or other elastic materials. When the hatch door 2 moves to the point where the roller 22 enters the inclined groove 12, the hatch door 2 automatically sinks along the extension direction of the inclined groove 12 and presses the sealing ring 6, so that the sealing ring 6 produces a certain amount of deformation, thereby realizing the initial sealing of the hatch door 2 without the need to apply additional pre-tightening force in the normal direction of the arc.

[0040] Further, see Figure 1 , Figure 2 and Figure 4 As shown, in some embodiments, the sinking amount of the roller 22 from the arc groove 11 into the inclined groove 12 along the radial direction of the arc groove 11 is set to 3-10 mm.

[0041] In this embodiment, the sinking amount of the roller 22 from the arc groove 11 into the inclined groove 12 along the radial direction of the arc groove 11 is equal to the sinking amount of the hatch 2, the sinking amount of the hatch 2 is equal to the offset between the center of the inclined groove 12 and the axis of the arc groove 11 connecting one end of the inclined groove 12, and the sinking amount of the hatch 2 is equal to the depth of the first groove 13. The sinking amount of the hatch 2 is designed according to the deformation amount of the sealing ring 6. The sinking amount of the hatch 2 can be set to 3~10㎜. Preferably, the sinking amount of the hatch 2 is set to 6㎜, so that the hatch 2 completes the initial sealing with the best sealing effect and is convenient for subsequent opening.

[0042] Further, see Figure 6 As shown, in some embodiments, the driving mechanism 3 includes: a motor 31 and a transmission shaft 32, wherein the motor 31 is equipped with a driving sprocket; transmission sprockets 33 are installed at both ends of the transmission shaft 32, wherein one of the transmission sprockets 33 is connected to the driving sprocket via a first chain 34, and the transmission sprockets 33 at both ends of the transmission shaft 32 are connected to the cabin door 2 via a second chain 35.

[0043] In this embodiment, the hatch 2 is provided with a connecting hole, and the second chain 35 passes through the connecting hole to be connected to the hatch 2. The first chain 34 is arranged in parallel with the second chain 35. The motor 31 drives the driving sprocket to rotate, so that the first chain 34 moves. The first chain 34 drives one of the transmission sprockets 33 to rotate, so that the transmission shaft 32 rotates. The transmission shaft 32 drives the second chain 35 to move through the transmission sprockets 33 at both ends, so that the hatch 2 moves along the arc groove 11 under the action of the second chain 35. The number of teeth of the driving sprocket is related to the transmission ratio of the driving mechanism 3. The more teeth the driving sprocket has, the smoother the movement of the second chain 35. The transmission force of the second chain 35 can be increased by slowing down the moving speed of the second chain 35. The transmission ratio of the driving mechanism 3 is adjusted according to the weight of the hatch 2. The hatch 2 can be automatically closed and opened by the driving mechanism 3, and there is no need to use an additional lifting device to cooperate with the driving mechanism 3 to drive the hatch 2, thereby saving manpower.

[0044] Further, see Figure 6 and Figure 7 As shown, in some embodiments, the second chain 35 is also connected to at least two tensioning sprockets 36 , and the at least two tensioning sprockets 36 are located on both sides of the driving sprocket 33 , and the at least two tensioning sprockets 36 are clamped on opposite sides of the second chain 35 .

[0045] In this embodiment, at least two of the tensioning sprockets 36 can be set as two tensioning sprockets 36 or more tensioning sprockets 36. The two tensioning sprockets 36 are located on both sides of the transmission sprocket 33. The transmission sprocket 33 drives the cabin door 2 to move along the arc groove 11 through the second chain 35. The two tensioning sprockets 36 are used to control the tensioning force of the second chain 35, so that the torque output by the motor 31 can be transmitted to the cabin door 2 through the second chain 35. The transmission sprocket 33 cooperates with the two tensioning sprockets 36 to make the transmission of the second chain 35 smoother, so that the cabin door 2 can move smoothly along the arc groove 11.

[0046] Further, see Figure 3 As shown, in some embodiments, the cabin body 4 is further provided with a chain slider 7 , and the second chain 35 is slidably disposed on the chain slider 7 .

[0047] In this embodiment, the second chain 35 includes a plurality of bushings 351. The plurality of bushings 351 are arranged at intervals along the extending direction of the second chain 35. The plurality of bushings 351 are slidably arranged on the chain slider 7. Inner link plates 352 and outer link plates 353 are sequentially sleeved on both sides of each bushing 351. The inner link plates 352 and the outer link plates 353 are in abutment and are arranged in a staggered manner, so that the plurality of bushings 351 are connected. The inner link plates 352 are sleeved on the inner sides of the bushings 351, and the outer link plates 353 are sleeved on the outer sides of the bushings 351. Each bushing 351 is fixed to the corresponding inner link plate 352 and outer link plate 353 by a chain pin 354.

[0048] Further, as shown in Figure 1 and Figure 3 In some embodiments, a plurality of track rib plates 8 are arranged on one side of the arc track 1 along its circumferential direction.

[0049] In this embodiment, the track rib plate 8 can be arranged in a U shape. The opening of the track rib plate 8 faces the arc groove 11. The length of the track rib plate 8 can be set to be equal to the width of the arc track 1. The plurality of track rib plates 8 are arranged at intervals. The extending direction of each track rib plate 8 can be perpendicular to the tangent direction of the corresponding arc track 1. The plurality of track rib plates 8 can improve the stiffness of the arc track 1 and prevent the arc track 1 from deforming during the movement of the hatch door 2. In other embodiments, the length of the track rib plate 8 can be set to be less than or greater than the width of the arc track 1. The extending direction of each track rib plate 8 can be inclined to the tangent direction of the corresponding arc track 1.

[0050] In the description of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "upper" and "lower" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present application. Unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0051] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0052] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. A vacuum chamber sealing structure, characterized in that: It includes: An arc track (1), wherein the arc track (1) is provided with an arc groove (11), one end of the arc groove (11) is provided with an inclined groove (12), and the inclined groove (12) extends obliquely from a connection with the arc groove (11) toward a direction close to the center of the arc groove (11); A hatch (2), the hatch (2) comprising a body (21), the body (21) being provided with a roller (22), and the hatch (2) being clamped to the arc track (1) via the roller (22); A driving mechanism (3), wherein the driving mechanism (3) is connected to the hatch (2), and the driving mechanism (3) is configured to drive the hatch (2) to move along the arc-shaped groove (11), and when the hatch (2) moves until the roller (22) enters the inclined groove (12), the hatch (2) is in a sealed position.

2. The vacuum chamber sealing structure according to claim 1, characterized in that: A first groove (13) is further provided on one side of the arc-shaped groove (11) close to the center thereof, the first groove (13) being spaced apart from the inclined groove (12), the body (21) being provided with at least two rollers (22), the arc length between the center of the inclined groove (12) and the center of the first groove (13) being equal to the arc length between two of the rollers (22), and when one of the rollers (22) is located in the inclined groove (12) and the other roller (22) is located in the first groove (13), the hatch (2) is in a sealing position.

3. The vacuum chamber sealing structure according to claim 2, characterized in that: The inner wall surface of the first groove (13) comprises an arc surface (131) and an inclined surface (132) which are connected to each other, the arc surface (131) and the inclined surface (132) are distributed along the extension direction of the arc groove (11), and the inclined surface (132) is located on a side of the arc surface (131) away from the inclined groove (12).

4. The vacuum chamber sealing structure according to claim 1, characterized in that: One end of the arc-shaped groove (11) connected to the inclined groove (12) has a first tangent line; The included angle between the first tangent line and the axis of the inclined groove (12) is set to 15-35°.

5. The vacuum chamber sealing structure according to claim 1, characterized in that: The vacuum chamber sealing structure further comprises a chamber body (4), the arc-shaped track (1) being fixedly mounted on the chamber body (4), the chamber body (4) being provided with a support block (5), the support block (5) being provided with a second groove (51), a sealing ring (6) being installed in the second groove (51), and when the chamber door (2) is in a sealing position, the chamber door (2) sinks and abuts against the sealing ring (6).

6. The vacuum chamber sealing structure according to claim 5, characterized in that: The sinking amount of the roller (22) from the arc-shaped groove (11) into the inclined groove (12) along the radial direction of the arc-shaped groove (11) is set to 3 to 10 mm.

7. The vacuum chamber sealing structure according to claim 5, characterized in that: The driving mechanism (3) comprises: A motor (31), wherein the motor (31) is provided with a driving sprocket; A transmission shaft (32), with transmission sprockets (33) installed at both ends of the transmission shaft (32), one of the transmission sprockets (33) being connected to the driving sprocket via a first chain (34), and the transmission sprockets (33) at both ends of the transmission shaft (32) being connected to the cabin door (2) via a second chain (35).

8. The vacuum chamber sealing structure according to claim 7, characterized in that: The second chain (35) is also connected to at least two tensioning sprockets (36), and the at least two tensioning sprockets (36) are located on both sides of the driving sprocket (33), and the at least two tensioning sprockets (36) are clamped on opposite sides of the second chain (35).

9. The vacuum chamber sealing structure according to claim 7, characterized in that: The cabin body (4) is also provided with a chain slider (7), and the second chain (35) is slidably arranged on the chain slider (7).

10. The vacuum chamber sealing structure according to claim 1, characterized in that: One side of the arc-shaped track (1) is provided with a plurality of track ribs (8) along its circumferential direction.

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