Crystal bar diameter measuring device and crystal bar diameter measuring method

Abstract

The invention provides a crystal bar diameter measuring device and a crystal bar diameter measuring method, and the device comprises two detection units which are arranged at an interval in a first direction, and are respectively arranged at the two radial opposite sides of a to-be-measured crystal bar in the first direction; the first moving unit is configured to drive the two detection units to move towards each other or away from each other along a first direction, so that the detection units can be contacted with or separated from the peripheral surface of the crystal bar to be detected; the sensing unit is arranged on the two detection units and is used for sensing whether the two detection units are in contact with the peripheral surface of the crystal bar to be detected or not; and the acquisition unit is connected with at least one of the moving unit and the detection units, and the acquisition unit is used for acquiring the distance between the two detection units in the first direction. According to the crystal bar diameter measuring device and the crystal bar diameter measuring method, the measuring efficiency and the measuring accuracy can be improved, and the risk that operators are scalded is reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a crystal rod diameter measuring device and a crystal rod diameter measuring method. Background Art

[0002] In the silicon wafer manufacturing process, after the single crystal rod is pulled, the diameter of the single crystal rod needs to be measured. The measured diameter is used to control the crystal growth parameters in the subsequent pulling process, so as to better control the quality of the crystal rod. In the prior art, the diameter of the crystal rod is measured manually. During the crystal rod diameter measurement process, the operator first measures the axial length of the crystal rod and marks different positions on the axial length of the crystal rod. Then, the diameter of the crystal rod at the marked position is measured with a vernier caliper.

[0003] However, the above-mentioned crystal rod diameter measurement process is labor-intensive. Due to the differences in individual measurement benchmarks of operators, the accuracy and stability of the measured diameter data are low. In addition, since the crystal rod is non-standard circular at some axial positions, the diameter measurement result is not accurate. In addition, since the crystal rod still has a certain residual temperature after cooling, there is a risk of burns when people touch it. Summary of the invention

[0004] In order to solve at least one technical problem in the above-mentioned prior art, the embodiments of the present disclosure provide a crystal rod diameter measuring device and a crystal rod diameter measuring method.

[0005] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0006] In a first aspect, an embodiment of the present disclosure provides a device for measuring a diameter of a crystal rod, comprising:

[0007] Two detection units, the two detection units are arranged at intervals in the first direction, so as to be arranged at two opposite radial sides of the crystal rod to be measured along the first direction;

[0008] a first moving unit, wherein the first moving unit is configured to drive the two detection units to move toward or away from each other along the first direction, so that the detection units can contact or separate from the peripheral surface of the crystal rod to be tested;

[0009] A sensing unit, disposed on the two detection units, and used for sensing whether the two detection units are in contact with the circumference of the crystal rod to be tested;

[0010] An acquisition unit is connected to at least one of the moving unit and the detection unit, and is used to acquire the distance between the two detection units along the first direction.

[0011] Exemplary also include:

[0012] a processing unit, connected to the first moving unit, the sensing unit and the acquiring unit respectively, and configured to:

[0013] According to the sensing signal of the sensing unit, the two detection units are controlled to move from an initial position to a target position, wherein when in the initial position, the two detection units are separated from the crystal rod to be measured, and when in the target position, the two detection units are in contact with the crystal rod to be measured;

[0014] The diameter of the crystal ingot to be measured is obtained according to the distance between the two detection units along the first direction when the crystal ingot is at the target position.

[0015] Exemplarily, the acquisition unit is used to:

[0016] Acquiring an initial distance between the two detection units when they are in the initial position;

[0017] Acquiring the moving strokes of the two detection units along the first direction when they are at the target position;

[0018] According to the initial distance and the moving stroke, the end point distance between the two detection units along the first direction when they are at the target position is obtained.

[0019] Exemplarily, it also includes: the sensing unit includes a contact sensor; each of the detection units has a contact surface for contacting the crystal rod to be measured, the contact surface extends along a second direction, the second direction is perpendicular to the first direction and the axial direction of the crystal rod to be measured, and the contact sensor is arranged on the contact surface.

[0020] Exemplarily, the crystal ingot diameter measuring device further includes a rotation driving unit, and the rotation driving unit is configured to drive the crystal ingot to be measured to rotate around its own axis.

[0021] Exemplarily, the rotation drive unit includes:

[0022] A conveyor belt is arranged on one radial side of the crystal ingot to be measured and contacts the circumferential surface of the crystal ingot to be measured, and the conveying direction of the conveyor belt is along the circumferential direction of the crystal ingot to be measured or along the tangent direction of the crystal ingot to be measured, so that the crystal ingot to be measured is driven to rotate when the conveyor belt moves;

[0023] A conveyor belt driving assembly for driving the conveyor belt to move is connected to the conveyor belt and the conveyor belt driving assembly.

[0024] Exemplarily, the crystal rod diameter measuring device also includes a second movable unit connected to the two detection units, and the second movable unit is constructed to drive the two detection units to be movable along the axial direction of the crystal rod to be measured, so that the detection unit can be moved to different axial positions of the crystal rod to be measured; wherein, the second movable unit includes two slide rails and a sliding assembly arranged in parallel, the slide rails are constructed to be parallel to the axial direction of the crystal rod to be measured, and one detection unit is slidably connected to a corresponding one of the slide rails through the sliding assembly.

[0025] Exemplarily, the slide rail includes a guide groove extending along the axial direction of the crystal rod to be tested; the sliding assembly includes a slider portion, the slider portion is pressed on one side of the two slide rails along the second direction, and is slidably matched with the slide rails; the detection unit is connected to the other side of the slider portion along the second direction, and extends to the bottom of the slide rail through the guide groove;

[0026] Alternatively, the sliding component has a chamber inside, the sliding rail is accommodated in the chamber, and the sliding rail is slidably matched with the sliding component, and the detection unit is connected to the other side of the sliding component along the second direction.

[0027] In a second aspect, an embodiment of the present disclosure further provides a method for measuring the diameter of a crystal ingot, wherein the crystal ingot diameter measuring device as described above is used to measure the diameter of a crystal ingot to be measured, and the method comprises:

[0028] Placing the crystal rod to be tested between the two detection units;

[0029] According to the sensing signal of the sensing unit, the two detection units are controlled to move from an initial position to a target position, wherein the two detection units are separated from the crystal rod to be measured when in the initial position, and the two detection units are in contact with the crystal rod to be measured when in the target position;

[0030] Acquire the distance between the two detection units along the first direction;

[0031] The diameter of the crystal ingot to be measured is obtained according to the distance between the two detection units along the first direction when the crystal ingot is at the target position.

[0032] Exemplarily, obtaining the distance between the two detection units along the first direction specifically includes:

[0033] Acquiring an initial distance between the two detection units when they are in the initial position;

[0034] Acquiring the moving strokes of the two detection units along the first direction when they are at the target position;

[0035] According to the initial distance and the moving stroke, the end point distance between the two detection units along the first direction when they are at the target position is obtained.

[0036] The beneficial effects brought by the embodiments of the present disclosure are as follows:

[0037] In the above scheme, when the crystal rod diameter measuring device provided by the embodiment of the present disclosure is used to measure the crystal rod diameter, the crystal rod to be measured is placed between the two detection units, that is, the two detection units can be respectively arranged on the radially opposite sides of the crystal rod to be measured along the first direction, and the two detection units are respectively moved toward each other from the initial positions separated from the crystal rod to be measured in the direction close to the crystal rod to be measured by the moving unit until the sensing unit senses that the two detection units are in contact with the crystal rod to be measured. At this time, the detection unit can be regarded as reaching the target position, and the diameter of the crystal rod to be measured can be obtained by obtaining the distance between the two detection units in the first direction when they are at the target position.

[0038] In this way, for crystal rods of different sizes to be measured, the distances between the two detection units in the first direction are correspondingly different, thereby achieving the purpose of measuring the diameter of the crystal rod to be measured. Compared with the traditional manual measurement method, the measurement efficiency and accuracy can be improved, and the risk of burns to operators can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 Schematic diagrams showing the structure of the crystal ingot diameter measuring device in the embodiment of the present disclosure, wherein (A) shows a schematic diagram when two detection units are in an initial position, and (B) shows a schematic diagram when two detection units are in a target position;

[0040] Figure 2 A top view of a device for measuring the diameter of a crystal rod in an embodiment of the present disclosure is shown;

[0041] Figure 3 A schematic diagram showing the three-dimensional structure of a crystal rod diameter measuring device provided in an embodiment of the present disclosure;

[0042] Figure 4 A schematic diagram showing the structure of the crystal ingot diameter measuring device provided by an embodiment of the present disclosure when the rotation driving unit drives the crystal ingot to be measured to rotate;

[0043] Figure 5 One of the schematic diagrams showing the connection structure between the second moving unit and the detection unit in the crystal ingot diameter measuring device provided by the embodiment of the present disclosure;

[0044] Figure 6 A second schematic diagram showing the connection structure between the second moving unit and the detection unit in the crystal ingot diameter measuring device provided in an embodiment of the present disclosure;

[0045] Figure 7 A top view of a second moving unit in the crystal rod diameter measuring device provided in an embodiment of the present disclosure is shown. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0047] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0048] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0049] In addition, in this document, unless otherwise defined, the terms "substantially", "substantially", "approximately" and "about" are used to describe and explain small changes. When used with an event or situation, these terms can cover situations where the event or situation occurs exactly, and can also cover situations where the event or situation occurs approximately. For example, when used with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being arranged along the same plane in the micrometer range, for example, arranged along the same plane within 40μm, 30μm, 20μm, 10μm or 1μm.

[0050] like Figures 1 to 3 As shown, the embodiment of the present disclosure provides a device for measuring the diameter of a crystal rod, comprising:

[0051] Two detection units 100, the two detection units 100 are arranged at intervals in the first direction X, so as to be respectively arranged on two opposite radial sides of the crystal rod 10 to be tested along the first direction X;

[0052] A first moving unit 200, wherein the first moving unit 200 is configured to drive the two detection units 100 to move toward or away from each other along the first direction X, so that the detection units 100 can contact or separate from the circumference of the crystal rod 10 to be tested;

[0053] A sensing unit 300 is disposed on the two detection units 100, and is used to sense whether the two detection units 100 are in contact with the circumference of the crystal rod 10 to be tested;

[0054] An acquisition unit is connected to at least one of the moving unit and the detection unit 100 , and is used to acquire a distance between two detection units 100 along the first direction X.

[0055] In the above scheme, when the crystal rod diameter measuring device provided by the embodiment of the present disclosure is used to measure the crystal rod diameter, the crystal rod 10 to be measured is placed between the two detection units 100, that is, the two detection units 100 can be respectively arranged on the radially opposite sides of the crystal rod 10 to be measured along the first direction X, and the two detection units 100 are respectively moved toward each other from the initial position separated from the crystal rod 10 to be measured in the direction close to the crystal rod 10 to be measured by the first moving unit 200, until the sensing unit 300 senses that the two detection units 100 are in contact with the crystal rod 10 to be measured. At this time, the detection unit 100 can be regarded as reaching the target position, and the diameter of the crystal rod 10 to be measured can be obtained by obtaining the distance between the two detection units 100 in the first direction X when they are at the target position.

[0056] In this way, for crystal rods 10 of different sizes to be measured, the distances between the two detection units 100 in the first direction X are correspondingly different, thereby achieving the purpose of measuring the diameter of the crystal rod 10 to be measured. Compared with the traditional manual measurement method, the measurement efficiency and accuracy can be improved, and the risk of burns to operators can be reduced.

[0057] In some exemplary embodiments, the crystal ingot diameter measuring device may further include a processing unit, which is connected to the first moving unit 200, the sensing unit 300 and the acquiring unit respectively, and is used to:

[0058] According to the sensing signal of the sensing unit 300, the two detection units 100 are controlled to move from an initial position to a target position, wherein when in the initial position, the two detection units 100 are separated from the crystal rod 10 to be measured, and when in the target position, the two detection units 100 are in contact with the crystal rod 10 to be measured;

[0059] The diameter of the crystal ingot 10 to be measured is obtained according to the distance between the two detection units 100 along the first direction X when the detection units 100 are at the target position.

[0060] With the above solution, when the detection unit 100 moves from the initial position toward the direction close to the crystal rod 10 to be measured, when the detection unit 100 contacts the crystal rod 10 to be measured, the sensing unit 300 may be triggered, and the sensing signal is fed back to the processing unit. The processing unit may control the first moving unit 200 to stop moving the detection unit 100 when receiving the corresponding sensing signal from the sensing unit 300, so that the detection unit 100 reaches the target position, and the acquisition unit acquires the distance between the two detection units 100 in the first direction X when they are at the target position, and feeds the acquired distance back to the processing unit. The sensing unit 300 may output the diameter of the crystal rod 10 to be measured through the distance fed back by the acquisition unit. In this way, the automatic measurement of the diameter of the crystal rod 10 to be measured is completed.

[0061] It can be understood that, in the above embodiment, the processing unit is connected with the first mobile unit 200, the acquisition unit and the sensing unit 300 to realize the automation of the entire diameter measurement process. However, in other embodiments, the operator may control the first mobile unit 200 to move the detection unit 100 to the target position based on the sensing signal of the sensing unit 300, and the operator may obtain the diameter of the crystal rod 10 to be measured based on the distance between the two detection units 100 in the first direction X when they are at the target position obtained by the acquisition unit.

[0062] In some exemplary embodiments, the acquiring unit is used to:

[0063] Acquire an initial distance between the two detection units 100 when they are in the initial position;

[0064] Acquire the moving strokes of the two detection units 100 along the first direction X when they are at the target position;

[0065] According to the initial distance and the moving stroke, the end point distance between the two detection units 100 along the first direction X when they are at the target position is obtained.

[0066] For example, please combine Figure 1 As shown, when the two detection units 100 are in the initial position, the initial distance between them is a; when the two detection units 100 move along the first direction X to the target position, the moving strokes of the two detection units 100 along the first direction X are b and c respectively, then it can be obtained that when they are in the target position, the terminal distance between the two detection units 100 along the first direction X is d, d=abc, and the diameter D of the crystal rod 10 to be measured is equal to d.

[0067] It should be noted that the first movable unit 200 may include two first movable mechanisms, and the first movable mechanism may include a first driving member, a first track 210 and a second track 220. The first track 210 and the second track 220 are arranged in parallel and both extend along the first direction X. The two opposite ends of the detection unit 100 along the second direction are slidably matched with the first track 210 and the second track 220 respectively. Driven by the first driving member, the detection unit 100 can move along the first track 210 and the second track 220, wherein the second direction is perpendicular to the first direction X and the axial direction of the crystal rod 10 to be tested.

[0068] It should be noted that the acquisition unit may acquire the initial distance and the moving stroke of the two detection units 100 based on the control parameters of the first driving member, and then calculate the end point distance based on the initial distance and the moving stroke.

[0069] It should also be noted that the acquisition unit and the processing unit may be separately provided or integrated.

[0070] However, the structure of the acquisition unit is not limited thereto. For example, in other embodiments, the acquisition unit may also include a distance sensor and a processor, and the distance sensor may be provided on the detection unit 100. The processor may directly calculate the end point distance through the sensing signal of the distance sensor. However, this method also requires that a distance sensor be provided on each of the two detection units 100, which is more costly than the solution of directly using the control parameters of the first driving member to calculate the end point distance.

[0071] In addition, in some exemplary embodiments, the crystal ingot diameter measuring device further includes: the sensing unit 300 includes a contact sensor. Each of the detection units 100 has a contact surface 110 for contacting the crystal ingot 10 to be measured, the contact surface 110 extends along a second direction Y, the second direction Y is perpendicular to the first direction X and the axial direction Z of the crystal ingot 10 to be measured, and the contact sensor is arranged on the contact surface 110.

[0072] In some exemplary embodiments, Figure 1 As shown, the detection unit 100 may be configured as a rod-shaped detection rod, and the detection rod extends axially along the second direction Y. However, this is not limited thereto, for example, the detection unit 100 may also be configured as a plate-shaped detection plate.

[0073] In some exemplary embodiments, the contact sensor may be a pressure sensor, and the pressure sensor may generate a corresponding sensing signal based on the abutting force from the crystal rod 10 to be tested. For example, the pressure sensor may be any suitable sensor such as a piezoelectric sensor. It should be noted that the contact sensor is not limited to the above-mentioned pressure sensor, and other types of sensors may also be selected, such as an optical sensor or an electrical sensor.

[0074] In some exemplary embodiments, Figures 1 to 4 As shown, the crystal ingot diameter measuring device further includes a rotation driving unit 400 , and the rotation driving unit 400 is configured to drive the crystal ingot 10 to be measured to rotate around its own axis.

[0075] By setting the rotation drive unit 400, the crystal rod 10 to be measured can be driven to rotate around its own axis, and the crystal rod 10 to be measured can be rotated to any target angle. In this way, the diameter measurement of different circumferential positions at the same axial position of the crystal rod 10 to be measured can be achieved. From the multiple diameter data measured at different circumferential positions at the same axial position, the actual diameter of the crystal rod 10 to be measured can be determined, thereby avoiding the problem of inaccurate measurement results caused by the non-standard circular shape of the crystal rod 10 to be measured at some axial positions, and improving the accuracy of diameter measurement.

[0076] In some exemplary embodiments, Figure 4 As shown, the rotation drive unit 400 may include: a conveyor belt 410 and a conveyor belt driving assembly 420. The conveyor belt driving assembly 420 and the conveyor belt 410 are used to drive the conveyor belt 410 to move; the conveyor belt 410 may be arranged on one radial side of the crystal rod 10 to be measured and in contact with the circumferential surface of the crystal rod 10 to be measured, and the conveying direction of the conveyor belt 410 is along the circumferential direction of the crystal rod 10 to be measured, or along the tangent direction to the crystal rod 10 to be measured, so that the conveyor belt 410 can drive the crystal rod 10 to be measured to rotate when it moves.

[0077] In the above scheme, the conveyor belt 410 can be located below the crystal rod 10 to be tested to support the crystal rod 10 to be tested, and the conveyor belt 410 is in contact with the circumferential surface of the crystal rod 10 to be tested. When the conveyor belt 410 moves, the contact friction force can be used to drive the crystal rod 10 to be tested to rotate. This structure is simple and easy to operate.

[0078] Exemplarily, the conveyor belt 410 can be a flat conveyor belt, a roller conveyor belt, a chain conveyor belt, a magnetic conveyor belt, a flexible conveyor belt or a belt conveyor, etc.

[0079] It should be understood that, in other embodiments, the specific structure of the rotation driving unit 400 is not limited thereto. For example, the rotation driving unit 400 may further include a crystal rod clamping structure, and the crystal rod clamping structure may be configured to clamp and rotate the crystal rod 10 to be tested.

[0080] Furthermore, in some exemplary embodiments, Figure 2 and Figure 3 As shown, the crystal rod diameter measuring device also includes a second movable unit 500 connected to the two detection units 100, and the second movable unit 500 is constructed to drive the two detection units 100 to be movable along the axial direction of the crystal rod 10 to be measured, so that the detection unit 100 can be moved to different axial positions of the crystal rod 10 to be measured.

[0081] By adopting the above scheme, by setting the second moving unit 500, the detection unit 100 can be moved to any axial position of the crystal rod 10 to be tested, so as to measure the diameter of the crystal rod 10 at different axial positions to facilitate the subsequent adjustment of the crystal growth parameters in the crystal pulling process.

[0082] For example, Figures 5 to 7 As shown, the second movable unit 500 includes two slide rails 510 and a sliding assembly 520 arranged in parallel, the slide rail 510 is constructed to be parallel to the axial direction of the crystal rod 10 to be tested, and one of the detection units 100 is slidably connected to a corresponding one of the slide rails 510 through the sliding assembly 520.

[0083] In some embodiments, Figure 5 As shown, the slide rail 510 includes a guide groove 511 extending along the axial direction of the crystal rod 10 to be tested; the sliding assembly 520 includes a slider portion 521, and the slider portion 521 is pressed on one side of the two slide rails 510 along the second direction Y, and slidably cooperates with the slide rails 510; the detection unit 100 is connected to the other side of the slider portion 521 along the second direction Y, and extends to the bottom of the slide rail 510 through the guide groove 511.

[0084] In the above solution, the slider 521 can be directly overlapped on one side of the slide rail 510 and can move arbitrarily along the slide rail 510, and the detection unit 100 can pass through the guide groove 511 and be connected to the slider 521. This structure is simple and easy to assemble. It can be understood that the above is only an example and is not limited to this.

[0085] In other embodiments, Figure 6As shown, the sliding assembly 520 has a chamber 522 inside, the slide rail 510 is accommodated in the chamber 522, and the slide rail 510 and the sliding assembly 520 are slidably matched, and the detection unit 100 is connected to the other side of the sliding assembly 520 along the second direction Y. Exemplarily, the chamber 522 may include two U-shaped shells 5221, so that when assembling, the two U-shaped shells 5221 can be respectively sleeved on the two side edges of the slide rail 510, and the assembly is simple. It can be understood that the above is only an example and is not limited to this.

[0086] In addition, the embodiment of the present disclosure further provides a method for measuring the diameter of a crystal rod, wherein the crystal rod diameter measuring device in the embodiment of the present disclosure is used to measure the diameter of the crystal rod 10 to be measured, and the method includes:

[0087] Step S01, placing the crystal rod 10 to be tested between the two detection units 100;

[0088] Step S02, according to the sensing signal of the sensing unit 300, controlling the two detection units 100 to move from the initial position to the target position, wherein when in the initial position, the two detection units 100 are separated from the crystal rod 10 to be measured, and when in the target position, the two detection units 100 are in contact with the crystal rod 10 to be measured;

[0089] Step S03, obtaining the distance between the two detection units 100 along the first direction X;

[0090] Step S04: acquiring the diameter of the crystal ingot 10 to be measured according to the distance between the two detection units 100 along the first direction X when the detection units 100 are at the target position.

[0091] Exemplarily, the above step S03 specifically includes:

[0092] Acquire an initial distance between the two detection units 100 when they are in the initial position;

[0093] Acquire the moving strokes of the two detection units 100 along the first direction X when they are at the target position;

[0094] According to the initial distance and the moving stroke, the end point distance between the two detection units 100 along the first direction X when they are at the target position is obtained.

[0095] Obviously, the crystal rod diameter measurement method provided in the embodiment of the present disclosure also has the beneficial effects brought by the crystal rod diameter measurement device provided in the embodiment of the present disclosure, which will not be described in detail here.

[0096] There are a few points to note:

[0097] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0098] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0099] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0100] The above are only specific implementations of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure shall be based on the protection scope of the claims.

Claims

1. A crystal rod diameter measuring device, characterized in that: include: Two detection units, the two detection units are arranged at intervals in the first direction, so as to be arranged at two opposite radial sides of the crystal rod to be measured along the first direction; a first moving unit, wherein the first moving unit is configured to drive the two detection units to move toward or away from each other along the first direction, so that the detection units can contact or separate from the peripheral surface of the crystal rod to be tested; A sensing unit, disposed on the two detection units, and used for sensing whether the two detection units are in contact with the circumference of the crystal rod to be tested; An acquisition unit is connected to at least one of the moving unit and the detection unit, and is used to acquire the distance between the two detection units along the first direction.

2. The crystal rod diameter measuring device according to claim 1, characterized in that: The invention also includes a processing unit, which is connected to the first moving unit, the sensing unit and the acquiring unit respectively, and the processing unit is used to: According to the sensing signal of the sensing unit, the two detection units are controlled to move from an initial position to a target position, wherein when in the initial position, the two detection units are separated from the crystal rod to be measured, and when in the target position, the two detection units are in contact with the crystal rod to be measured; The diameter of the crystal ingot to be measured is obtained according to the distance between the two detection units along the first direction when the crystal ingot is at the target position.

3. The crystal rod diameter measuring device according to claim 2, characterized in that: The acquisition unit is used to: Acquiring an initial distance between the two detection units when they are in the initial position; Acquiring the moving strokes of the two detection units along the first direction when they are at the target position; According to the initial distance and the moving stroke, the end point distance between the two detection units along the first direction when they are at the target position is obtained.

4. The crystal rod diameter measuring device according to claim 1, characterized in that: The sensing unit includes a contact sensor; each of the detection units has a contact surface for contacting the crystal rod to be measured, the contact surface extends along a second direction, the second direction is perpendicular to the first direction and the axial direction of the crystal rod to be measured, and the contact sensor is arranged on the contact surface.

5. The crystal rod diameter measuring device according to claim 1, characterized in that: The crystal ingot diameter measuring device further includes a rotation driving unit, which is configured to drive the crystal ingot to be measured to rotate around its own axis.

6. The crystal rod diameter measuring device according to claim 5, characterized in that: The rotary drive unit comprises: A conveyor belt is arranged on one radial side of the crystal ingot to be measured and contacts the circumferential surface of the crystal ingot to be measured, and the conveying direction of the conveyor belt is along the circumferential direction of the crystal ingot to be measured or along the tangent direction of the crystal ingot to be measured, so that the crystal ingot to be measured is driven to rotate when the conveyor belt moves; A conveyor belt driving assembly for driving the conveyor belt to move is connected to the conveyor belt and the conveyor belt driving assembly.

7. The crystal rod diameter measuring device according to claim 1, characterized in that: The crystal rod diameter measuring device also includes a second movable unit connected to the two detection units, and the second movable unit is constructed to drive the two detection units to be movable along the axial direction of the crystal rod to be measured, so that the detection unit can be moved to different axial positions of the crystal rod to be measured; wherein, the second movable unit includes two slide rails and a sliding assembly arranged in parallel, the slide rails are constructed to be parallel to the axial direction of the crystal rod to be measured, and one of the detection units is slidably connected to a corresponding one of the slide rails through the sliding assembly.

8. The crystal rod diameter measuring device according to claim 7, characterized in that: The slide rail includes a guide groove extending along the axial direction of the crystal rod to be tested; the sliding assembly includes a slider portion, which is pressed on one side of the two slide rails along the second direction and slidably cooperates with the slide rails; the detection unit is connected to the other side of the slider portion along the second direction and extends to the bottom of the slide rail through the guide groove; Alternatively, the sliding component has a chamber inside, the sliding rail is accommodated in the chamber, and the sliding rail is slidably matched with the sliding component, and the detection unit is connected to the other side of the sliding component along the second direction.

9. A method for measuring the diameter of a crystal rod, characterized in that: The crystal ingot diameter measuring device according to any one of claims 1 to 8 is used to measure the diameter of the crystal ingot to be measured, and the method comprises: Placing the crystal rod to be tested between the two detection units; According to the sensing signal of the sensing unit, the two detection units are controlled to move from an initial position to a target position, wherein the two detection units are separated from the crystal rod to be measured when in the initial position, and the two detection units are in contact with the crystal rod to be measured when in the target position; Acquire the distance between the two detection units along the first direction; The diameter of the crystal ingot to be measured is obtained according to the distance between the two detection units along the first direction when the crystal ingot is at the target position.

10. The method for measuring the diameter of a crystal rod according to claim 9, characterized in that: The obtaining of the distance between the two detection units along the first direction specifically includes: Acquiring an initial distance between the two detection units when they are in the initial position; Acquiring the moving strokes of the two detection units along the first direction when they are at the target position; According to the initial distance and the moving stroke, the end point distance between the two detection units along the first direction when they are at the target position is obtained.

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