Method, apparatus, and medium for layout processing

Abstract

According to an exemplary embodiment of the present disclosure, there are provided a method, an apparatus, and a medium for layout processing. In this method, first, a plurality of initial graphic segments in a target layout are determined. Based on the degree of change in the simulated light intensity at each initial graphic segment and the positional relationship of the initial graphic segments, a plurality of initial graphic segments with relatively small behavioral differences are merged into a target graphic segment, thereby achieving the fragmentation of the target layout. Thereby, the efficiency and accuracy of the fragmentation of the layout image are improved. Further, since the behavior of the target graphic segment is consistent with the behavior of the plurality of initial graphic segments that make up the target graphic segment, using the target graphic segment to correct the target layout can ensure the accuracy of the corrected layout image.

Description

Technical Field

[0001] Embodiments of the present disclosure mainly relate to the field of integrated circuits, and more particularly, to methods, devices, and media for layout processing. Background Art

[0002] A circuit layout (which can also be simply referred to as a layout) is a series of graphics converted from a circuit that has been designed, simulated, and optimized, and it contains physical information data related to devices such as the size of an integrated circuit and the topological definition of each layer. Integrated circuit manufacturers use this data to manufacture masks. The layout pattern on the mask determines the size of the devices or the physical layer of the connections on the chip.

[0003] As the technology node of the integrated circuit manufacturing process decreases, the distance between target patterns in the integrated circuit decreases, and the density of the layout patterns corresponding to the target patterns on the mask increases. Since light waves diffract at the layout patterns of the mask, the actually formed pattern is distorted compared with the layout pattern. For this reason, optical proximity correction (OPC) has been proposed to adjust the layout pattern of the mask in order to form a desired target pattern. OPC changes the light intensity distribution on the wafer surface during the lithography process by changing the graphics in the mask layout, thereby compensating for the pattern transfer distortion caused by the optical proximity effect. During the process of correcting the layout pattern of the mask using OPC technology, it is necessary to fragment the layout pattern. Summary of the Invention

[0004] In a first aspect of the present disclosure, a method for layout processing is provided. The method includes: determining a signal change metric corresponding to each of a plurality of initial graphic segments corresponding to a target layout to be corrected, the signal change metric indicating the degree of change in the simulated light intensity of the initial graphic segment; determining at least one target graphic segment based on the positional relationship between the plurality of initial graphic segments and the signal change metrics respectively determined for the plurality of initial graphic segments, where a target graphic segment in the at least one target graphic segment is obtained by merging at least two of the plurality of initial graphic segments; and determining a correction result for the target layout based on the at least one target graphic segment.

[0005] In a second aspect of the present disclosure, an electronic device is provided. The electronic device includes a processor and a memory coupled to the processor. The memory has instructions stored therein, and when the instructions are executed by the processor, the electronic device executes the method according to the first aspect of the present disclosure.

[0006] In a third aspect of the present disclosure, a computer-readable storage medium is provided. A computer program is stored on the computer-readable storage medium. When the computer program is executed by a processor, the method according to the first aspect of the present disclosure is implemented.

[0007] It will be understood from the following description that, according to embodiments of the present disclosure, based on the degree of change in the simulated light intensity and the positional relationship of the initial graphic segments, multiple initial graphic segments with small behavioral differences are combined into a target graphic segment, thereby achieving the fragmentation of the target layout. Thus, the efficiency and accuracy of layout image fragmentation are improved. Further, since the behavior of the target graphic segment is consistent with the behaviors of the multiple initial graphic segments that make up the target graphic segment, using the target graphic segment to correct the target layout can ensure the accuracy of the corrected layout image.

[0008] It should be understood that the content described in the present invention content section is not intended to limit the key features or important features of the embodiments of the present disclosure, nor is it used to limit the scope of the present disclosure. Other features of the present disclosure will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] In conjunction with the accompanying drawings and with reference to the following detailed description, the above and other features, advantages, and aspects of the embodiments of the present disclosure will become more apparent. In the drawings, the same or similar reference numerals denote the same or similar elements, where:

[0010] Figure 1 A schematic diagram of an exemplary environment in which the embodiments of the present disclosure can be implemented is shown;

[0011] Figure 2 A schematic diagram of an initial graphic segment according to some embodiments of the present disclosure is shown;

[0012] Figure 3 A schematic diagram of a trend chart provided by some embodiments of the present disclosure is shown;

[0013] Figure 4 A schematic diagram of a target graphic segment according to some embodiments of the present disclosure is shown;

[0014] Figure 5 A schematic diagram of a target point according to some embodiments of the present disclosure is shown;

[0015] Figure 6 A flowchart of an exemplary layout processing procedure provided by some embodiments of the present disclosure is shown; and

[0016] Figure 7 A block diagram of an electronic device in which one or more embodiments of the present disclosure can be implemented is shown. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although some embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Instead, these embodiments are provided to more thoroughly and completely understand the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not used to limit the protection scope of the present disclosure.

[0018] In the description of the embodiments of the present disclosure, the term "comprising" and its like should be understood as an open inclusion, that is, "including but not limited to". The term "based on" should be understood as "at least partially based on". The term "an embodiment" or "the embodiment" should be understood as "at least one embodiment". The terms "first", "second", etc. may refer to different or the same objects. There may also be other explicit and implicit definitions hereinafter.

[0019] As used herein, the "correction amount" of a graphic segment or a similar expression may at least indicate the magnitude of the movement of the graphic segment in the layout, and may additionally refer to the direction of the movement. That is, the "correction amount" may be a scalar, a scalar with direction information, or a vector.

[0020] Figure 1 A schematic diagram of an exemplary environment 100 in which embodiments of the present disclosure can be implemented is shown. The exemplary environment 100 generally may include an electronic device 120.

[0021] The electronic device 120 obtains a target layout 110 (also referred to as a "mask layout") to be processed as an input. The target layout 110 to be processed includes one or more graphics to be processed (e.g., a target graphic 112) that are expected to obtain a graphic corresponding to the target graphic 122 on the wafer after lithography. In order to prevent the image formed on the wafer from being distorted due to light wave diffraction, it is necessary to determine the placement position or size of each graphic in the target layout 110 to be processed through a simulation signal. It should be understood that Figure 1 the shapes, sizes, and numbers of the layouts, masks, and target graphic segments shown are only exemplary and not restrictive. The scope of the present disclosure is not limited in this regard.

[0022] The electronic device 120 processes the target layout 110 to be processed to obtain the processed target layout 130. The processed target layout 130 includes the processed target pattern 122 (also referred to as the processed target pattern), that is, the target pattern 122 is corrected. Compared with the target pattern 112 in the target layout 110 to be processed, the size and / or position of the processed target pattern 132 in the processed target layout 130 has changed. For example, in the processed target layout 130, the processed target pattern 132 is the output pattern after OPC, which can also be referred to as the "pattern after OPC". The above-mentioned changes in the size and / or position of the processed target pattern 132 compared with the target pattern 112 before processing can be determined by the electronic device 120. In other words, the adjustment method in the OPC process can be determined by the electronic device 120.

[0023] To correct the target pattern 112, the target pattern 112 can be divided into different pattern segments. By adjusting these pattern segments, the target pattern 112 is corrected to obtain the processed target pattern 132. Specifically, each pattern segment can be provided with sampling points. The adjustment of the corresponding pattern segment can be determined through lithography simulation related to the sampling points.

[0024] In the example environment 100, the electronic device 120 can be any type of device with computing capabilities, including a terminal device or a server device. The terminal device can be any type of mobile terminal, fixed terminal or portable terminal, including a mobile phone, a desktop computer, a laptop computer, a notebook computer, a netbook computer, a tablet computer, a media computer, a multimedia tablet, a personal communication system (PCS) device, a personal navigation device, a personal digital assistant (PDA), an audio / video player, a digital camera / video camera, a positioning device, a television receiver, a radio broadcast receiver, an e-book device, a gaming device, or any combination of the foregoing, including accessories and peripherals of these devices or any combination thereof. The server device can, for example, include a computing system / server, such as a mainframe, an edge computing node, a computing device in a cloud environment, and so on.

[0025] It should be understood that the structure and functions of the environment 100 are described only for exemplary purposes and do not imply any limitation on the scope of the present disclosure. Figure 1 The target layout 110 to be processed, the processed target layout 130, and the patterns therein shown are only exemplary and are not intended to limit the scope of the present disclosure. The exemplary embodiments according to the present disclosure will be described in detail below with reference to the drawings.

[0026] As briefly mentioned above, in the process of correcting the layout pattern of a mask using OPC technology, it is necessary to divide the layout pattern into multiple segments and adjust the layout pattern based on the multiple segments. Therefore, the way of fragmenting the layout pattern has a great impact on the adjustment process of the layout pattern.

[0027] Usually, the rules for fragmenting the layout pattern are determined based on the experience of designers (for example, the layout pattern can be fragmented based on a fixed length), and the rules are continuously optimized during the process of correcting the mask pattern based on the rules. However, the fragmentation rules corresponding to different layout patterns are different. During the process of determining the design rules corresponding to each layout pattern, the above rule optimization process needs to be repeated multiple times. This makes it impossible for designers to efficiently determine the optimization rules for different layout patterns, resulting in the inability to fragment the layout pattern in a reasonable manner and affecting the layout correction effect. Therefore, how to fragment the layout pattern is an urgent problem for those skilled in the art to solve.

[0028] To this end, embodiments of the present disclosure provide a method for layout processing to solve or at least partially solve the above problems and / or other potential problems in traditional methods. According to embodiments of the present disclosure, for a target layout to be corrected, first, a signal change metric corresponding to multiple initial graphic segments in the target layout is determined. The signal change metric indicates the degree of change in the simulated light intensity of the corresponding initial graphic segment. Subsequently, based on the positional relationship between the initial graphic segments and the corresponding signal change metrics, the multiple initial graphic segments are merged into at least one target graphic segment. Based on the at least one target graphic segment, a correction result for the target layout is determined.

[0029] In this way, based on the degree of change in the simulated light intensity and the positional relationship of the initial graphic segments, multiple initial graphic segments with small behavioral differences are merged into a target graphic segment, thereby realizing the fragmentation of the target layout. Thereby, the efficiency and accuracy of layout image fragmentation are improved. Further, since the behavior of the target graphic segment is consistent with the behavior of the multiple initial graphic segments that make up the target graphic segment, using the target graphic segment to correct the target layout can ensure the accuracy of the corrected layout image.

[0030] Next, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.

[0031] Figure 2 FIG. shows a schematic diagram of an initial graphic segment 200 according to some embodiments of the present disclosure. As Figure 2As shown, there are multiple target patterns in the target layout 110 to be corrected. The electronic device 120 can divide the multiple target patterns in the target layout 110 to be processed into multiple initial pattern segments based on a pre-determined segment division rule. In some embodiments, the segment division rule corresponding to the target layout 110 to be processed can be determined based on the type of the target layout 110 to be processed and the process parameters of the target layout 110 to be processed. Exemplarily, if the target layout 110 to be processed is a layout with a precision of 30 nm, then half of the minimum design feature size of the target layout is used as the length of the initial pattern segment, so as to divide the target layout 110 to be processed into multiple initial pattern segments. If the target layout 110 to be processed is a layout with a precision of 10 nm, then the minimum design feature size of the target layout is used as the length of the initial pattern segment, so as to divide the target layout 110 to be processed into multiple initial pattern segments. Within a certain range, the larger the number of the divided initial pattern segments (i.e., the smaller the length of the initial pattern segment), the higher the accuracy of the finally determined target pattern segment. However, as the number of initial pattern segments increases, the computational amount also increases. As Figure 2 shown, the "X" symbol represents the segmentation point of the target layout 110 to be processed, and the part between two "X" symbols is used as an initial pattern segment.

[0032] In some embodiments, the target layout 110 to be processed that has been processed (such as assisted exposure processing, pattern insertion processing, etc.) is provided to the electronic device 120 to correct the target layout 110 to be processed. For a certain initial pattern segment among the multiple initial pattern segments corresponding to the target layout to be corrected, the electronic device 120 first determines the signal change metric corresponding to the initial pattern segment. In some embodiments, the signal change metric for a certain initial pattern segment can be the signal change metric at a certain point on the initial pattern segment, or the average change metric of the initial pattern segment. The signal change metric indicates the change degree of the simulated light intensity of the initial pattern segment, that is, the behavior habit of the signal at a certain point on the initial pattern segment.

[0033] In some embodiments, the signal change metric at a certain sampling point on the initial pattern segment can be used as the signal change metric corresponding to the initial pattern segment. For a certain initial pattern segment among the multiple initial pattern segments, the sampling point corresponding to the initial pattern segment can be first determined based on the sampling rule. Exemplarily, the sampling rule can be the endpoint or the center point of the initial pattern segment, or the point with the largest change degree of the simulated light intensity in the initial pattern segment. Based on the change of the simulated light intensity at the sampling point, the logarithmic change rate of the light intensity corresponding to the sampling point is determined. Subsequently, based on the logarithmic change rate of the light intensity and the width of the initial pattern segment at the sampling point, the signal change metric at the sampling point is determined. In some embodiments, the normalized logarithmic slope of the light intensity signal can be used as the signal change metric. The calculation formula of the signal change metric can be:

[0034] (1)

[0035] wherein is the normalized logarithmic slope (i.e., the signal change metric), is the width of the initial graphic segment at the sampling point, is the simulated light intensity signal, is the logarithmic change rate of the light intensity, indicates that the normalized logarithmic slope is obtained at the edge, is the logarithmic slope.

[0036] In some embodiments, the electronic device 120 performs a full-map simulation verification operation on the target layout 110 to be processed to obtain the signal change metrics corresponding to the respective initial graphic segments. Subsequently, the electronic device 120 determines at least one target graphic segment based on the positional relationship between the multiple initial graphic segments and the signal change metrics respectively determined for the multiple initial graphic segments. The target graphic segment in the at least one target graphic segment is obtained by combining at least two of the multiple initial graphic segments. Exemplarily, the initial graphic segments with similar and adjacent signal change metrics can be combined into one target graphic segment. In some embodiments, if the signal change metrics corresponding to different initial graphic segments are close, it indicates that the behavioral differences between these initial graphic segments are small. During the process of correcting the target layout 110 to be processed, the correction methods adopted for the initial graphic segments with small behavioral differences are relatively close. Therefore, they can be combined into the same target graphic segment to facilitate the correction of the target layout 110 to be processed.

[0037] Determine at least one segment group from multiple initial graphic segments based on the positional relationship between the multiple initial graphic segments and the signal change metrics respectively determined for the multiple initial graphic segments. The segment groups included in the at least one segment group are pairwise adjacent among the multiple initial graphic segments, and the differences between the signal change metrics corresponding to the multiple initial graphic segments are lower than a difference threshold. In some embodiments, for a certain initial graphic segment among the multiple initial graphic segments, determine the signal change metric of the adjacent initial graphic segment. If the difference between the signal change metric of the adjacent initial graphic segment and the signal change metric of this initial graphic segment is lower than the difference threshold, then divide these graphic segments into the same group of graphic segments. In this way, the multiple initial graphic segments of the target layout to be processed are divided into multiple initial graphic segments. In some embodiments, if the differences between a certain initial graphic segment and its adjacent initial graphic segments are all greater than the threshold, then take this initial graphic segment alone as a group. In some embodiments, the difference threshold can be a value specified by a designer or determined based on the process parameters of the target layout. Exemplarily, the difference threshold can be determined based on the average value of the signal change metrics respectively determined for the multiple initial graphic segments. In some embodiments, the higher the precision of the target layout 110 to be processed, the smaller the difference threshold.

[0038] In some embodiments, the segment groups determined by the electronic device 120 may include at least two initial graphic segments. By merging the at least two initial graphic segments included in a certain segment group, a target graphic segment can be determined. It should be understood that the number of initial graphic segments included in each segment group is less than the total number of initial graphic segments. In addition, the initial graphic segments included in different segment groups may not overlap with each other. In some embodiments, for an initial graphic segment whose differences from adjacent initial graphic segments are all greater than the difference threshold, it can be determined as a target graphic segment. That is to say, such an initial graphic segment may not be merged with other initial graphic segments. Subsequently, the electronic device 120 determines at least one target graphic segment corresponding to at least one segment group respectively by merging the corresponding initial graphic segments included in the at least one segment group.

[0039] In some embodiments, a change trend graph of the signal change metric of the target layout 110 to be processed can be generated based on the signal change metrics respectively generated for each initial graphic segment. The change trend graph presents the signal change metrics respectively determined for the multiple initial graphic segments according to the positional relationship between the multiple initial graphic segments. Figure 3 Shows a schematic diagram of the change trend graph 300 provided by some embodiments of the present disclosure. As Figure 3 shown, the horizontal axis of the change trend graph 300 is the serial number of each initial graphic segment, and the vertical axis is the value of the signal change metric. Each point in the change trend graph 300 represents a set of data of (initial graphic segment, signal change metric).

[0040] In the process of generating the trend chart, the presentation order can be determined according to the positional relationship between multiple initial graphic segments, so as to present the data groups corresponding to each initial graphic segment in the trend chart. Exemplarily, for a certain graphic in the target layout 110 to be processed, the presentation order of the initial graphic segments can be determined in a counterclockwise or clockwise order. Exemplarily, taking a certain initial graphic segment as the initial graphic segment 01, the initial graphic segment adjacent to this initial graphic segment in the counterclockwise direction is the initial graphic segment 02. Subsequently, the data groups corresponding to each initial graphic segment are connected in sequence to generate the trend curve 310.

[0041] In some embodiments, multiple initial graphic segments can be divided into at least one segment group based on the change rate of the trend chart. Exemplarily, for a curve segment between two points in the trend curve 310, if the change rate of this curve segment (i.e., the curve slope) is lower than the change rate threshold, it indicates that the initial graphic segments corresponding to these two points can be divided into the same segment group. If the change rate of the curve segment exceeds the change rate threshold, the initial graphic segments corresponding to these two points are divided into different segment groups. In some embodiments, the change rate threshold can be determined based on the difference threshold. As Figure 3 shown, the difference threshold is 0.15. The initial graphic segments (including graphic segment 02, graphic segment 03, graphic segment 04, graphic segment 05, and graphic segment 06) with the information change measure in the range of 1.4 ± 0.15 can be used as the first group of graphic segments, and the initial graphic segments (including graphic segment 07, graphic segment 08, graphic segment 09, and graphic segment 10) with the information change measure in the range of 1.5 ± 0.15 can be used as the second group of graphic segments. Exemplarily, the initial graphic segments in the first group of graphic segments can be merged head-to-tail in sequence to obtain the first target graphic segment. The initial graphic segments in the second group of graphic segments can be merged head-to-tail in sequence to obtain the second target graphic segment.

[0042] Figure 4 shows a schematic diagram of the target graphic segment 400 according to some embodiments of the present disclosure. As Figure 4 shown, after merging adjacent initial graphic segments with close signal change measures in the target layout 110 to be processed, multiple target graphic segments 410 can be obtained. For a certain target graphic segment among the multiple target graphic segments 410, its behavior information is consistent with the behavior information of the multiple initial graphic segments it includes.

[0043] In some embodiments, the electronic device 120 determines a correction result for the target layout based on at least one target graphic segment. In some embodiments, the electronic device 120 may provide the obtained multiple target graphic segments to an OPC model to utilize the OPC model to implement correction for the target layout. Exemplarily, for a certain target graphic segment among the obtained multiple target graphic segments, information related to the target graphic segment (such as coordinate information and design dimensions, etc.) may be provided to the OPC model. The OPC model determines measurement information corresponding to the target graphic segment based on the difference between the size of the target graphic segment and the design size of the target layout. Exemplarily, the electronic device 120 may determine measurement information based on the distance between the target graphic segment and other graphic segments. In this way, by embedding the determination process of the target graphic segment into the correction process of the target layout to be processed, seamless switching for the end user is achieved without additional training of the OPC model.

[0044] In some embodiments, if it is detected that the difference between a certain measurement data in at least one measurement data and the design size exceeds a first size threshold, then the target graphic segment corresponding to the measurement data needs to be adjusted to correct the target layout 110 to be processed. In some embodiments, if it is detected that the distance between a certain graphic segment and other graphic segments is too small and affects the imaging of the target layout 110 to be processed, it is determined that the graphic segment needs to be adjusted.

[0045] In some embodiments, the electronic device 120 may adjust the corresponding target graphic segment based on the target point corresponding to the target graphic segment. Figure 5 A schematic diagram of a target point 500 according to some embodiments of the present disclosure is shown. As Figure 5 shown, the selected sampling points include a first target point 510-1, a second target point 510-2, a third target point 510-3, a fourth target point 510-4, a fifth target point 510-5, and a sixth target point 510-6. The first target point 510-1, the second target point 510-2, the third target point 510-3, the fourth target point 510-4, the fifth target point 510-5, and the sixth target point 510-6 may also be collectively or individually referred to as the target point 510. In Figure 5 the example of, a first target graphic segment 520-1, a second target graphic segment 520-2, a third target graphic segment 520-3, and a fourth target graphic segment 520-4 are shown, which are also collectively or individually referred to as the target graphic segment 520. There is a large gap between the target graphic segment (dashed line) and the actual layout graphic (solid line), that is, the difference between the measurement data and the design size exceeds the first size threshold, and the target graphic segment needs to be adjusted. Figure 5 The number of target graphic segments and target points shown in is only exemplary and is not intended to impose any limitation.

[0046] In some embodiments, the electronic device 120 may determine a target point for adjusting a given target graphic segment from the given target graphic segment based on at least one sampling point corresponding to the given target graphic segment. The at least one sampling point is a sampling point corresponding to a plurality of initial graphic segments included in the target graphic segment respectively. Exemplarily, the sampling point at the center of the target graphic segment may be used as the target point.

[0047] In some embodiments, the electronic device 120 may determine the moving distance of the target graphic segment based on the above difference. For example, the moving distance may be one half of the difference. In some embodiments, in order to prevent the correction amplitude from being too large and affecting the accuracy of the target layout 110 to be processed, the target graphic segment may be moved based on the above difference only when the difference between the measurement data and the design dimension is less than a second dimension threshold.

[0048] Figure 6 The flowchart of an example layout processing procedure 600 according to some embodiments of the present disclosure is shown. The procedure 600 may be implemented at the electronic device 120. The following references Figure 1 are used to describe the procedure 600.

[0049] As Figure 6 shown, at block 610, the electronic device 120 determines, for a plurality of initial graphic segments corresponding to a target layout to be corrected, a signal change metric corresponding to each initial graphic segment, where the signal change metric indicates the degree of change in the simulated light intensity of the initial graphic segment.

[0050] In some embodiments, determining the signal change metric corresponding to the initial graphic segment includes: determining sampling points on the initial graphic segment based on a sampling rule; determining the logarithmic light intensity change rate corresponding to the sampling points based on the change in the simulated light intensity at the sampling points; and determining the signal change metric based on the logarithmic light intensity change rate and the width of the initial graphic segment at the sampling points.

[0051] In some embodiments, the plurality of initial graphic segments are determined by: determining a segment division rule corresponding to the target layout based on the target layout and the process parameters corresponding to the target layout; and dividing the target layout into a plurality of initial graphic segments based on the segment division rule.

[0052] In some embodiments, the length of the plurality of initial graphic segments is one half of the minimum design feature size of the target layout.

[0053] At block 620, the electronic device 120 determines at least one target graphic segment based on the positional relationship between the plurality of initial graphic segments and the signal change metrics respectively determined for the plurality of initial graphic segments, where the target graphic segments in the at least one target graphic segment are obtained by combining at least two of the plurality of initial graphic segments.

[0054] In some embodiments, determining at least one target graphic segment includes: determining at least one segment group from a plurality of initial graphic segments based on the positional relationship between the plurality of initial graphic segments and the signal change metrics respectively determined for the plurality of initial graphic segments, wherein the plurality of initial graphic segments included in the segment group of the at least one segment group are adjacent to each other pairwise, and the difference between the signal change metrics corresponding to the plurality of initial graphic segments is lower than a difference threshold; and determining at least one target graphic segment corresponding to the at least one segment group respectively by combining the corresponding initial graphic segments included in the at least one segment group.

[0055] In some embodiments, determining at least one segment group includes: generating a change trend graph based on the signal change metrics respectively determined for the plurality of initial graphic segments, the change trend graph presenting the signal change metrics respectively determined for the plurality of initial graphic segments according to the positional relationship between the plurality of initial graphic segments; and dividing the plurality of initial graphic segments into at least one segment group based on the change rate of the change trend graph.

[0056] In some embodiments, the difference threshold is determined based on the average value of the signal change metrics respectively determined for the plurality of initial graphic segments.

[0057] At block 630, the electronic device 120 determines a correction result for the target layout based on the at least one target graphic segment.

[0058] In some embodiments, determining a correction result for the target layout includes: determining at least one measurement information item corresponding to at least one target graphic segment in the target layout, the measurement information in the at least one measurement information item indicating the difference between the size of the corresponding target graphic segment and the design size of the target layout; and in response to detecting target measurement information in the at least one measurement information item whose difference from the design size exceeds a first size threshold, adjusting a given target graphic segment corresponding to the target measurement information based on the difference.

[0059] In some embodiments, process 600 further includes: determining a target point for adjusting a given target graphic segment from the given target graphic segment based on at least one sampling point corresponding to the given target graphic segment, the at least one sampling point corresponding to at least one initial graphic segment included in the given target graphic segment respectively, and wherein adjusting the given target graphic segment based on the difference includes: in response to determining that the difference is lower than a second size threshold, determining a moving distance based on the difference; and moving the position of the target point in the target layout based on the moving distance to adjust the given target graphic segment.

[0060] Figure 7 A block diagram of an electronic device 700 is shown in which one or more embodiments of the present disclosure may be implemented. The electronic device 700 may be used, for example, to implement as Figure 1The electronic device 120 shown. It should be understood that Figure 7 The electronic device 700 shown is merely exemplary and should not constitute any limitation on the functionality and scope of the embodiments described herein.

[0061] As Figure 7 shown, the electronic device 700 is in the form of a general-purpose electronic device. The components of the electronic device 700 may include, but are not limited to, one or more processors 710 or processing units, a memory 720, a storage device 730, one or more communication units 740, one or more input devices 750, and one or more output devices 760. The processing unit may be an actual or virtual processor and be capable of performing various processes according to programs stored in the memory 720. In a multi-processor system, multiple processing units execute computer-executable instructions in parallel to enhance the parallel processing ability of the electronic device 700.

[0062] The electronic device 700 generally includes multiple computer storage media. Such media can be any available media accessible to the electronic device 700, including but not limited to volatile and non-volatile media, removable and non-removable media. The memory 720 may be a volatile memory (such as registers, caches, random access memory (RAM)), a non-volatile memory (such as read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory), or some combination thereof. The storage device 730 may be a removable or non-removable medium and may include a machine-readable medium, such as a flash drive, a magnetic disk, or any other medium that can be used to store information and / or data (such as training data for training) and can be accessed within the electronic device 700.

[0063] The electronic device 700 may further include additional removable / non-removable, volatile / non-volatile storage media. Although not shown in Figure 7 it, a disk drive for reading from or writing to a removable, non-volatile magnetic disk (such as a "floppy disk") and an optical disk drive for reading from or writing to a removable, non-volatile optical disk may be provided. In these cases, each drive may be connected to a bus (not shown) by one or more data media interfaces. The memory 720 may include a computer program product 725 having one or more program modules configured to perform various methods or actions of the various embodiments of the present disclosure.

[0064] The communication unit 740 enables communication with other electronic devices via a communication medium. Additionally, the functions of the components of the electronic device 700 can be implemented by a single computing cluster or multiple computing machines that are capable of communicating via a communication connection. Thus, the electronic device 700 can operate in a networked environment using a logical connection to one or more other servers, network personal computers (PCs), or another network node.

[0065] The input device 750 can be one or more input devices such as a mouse, keyboard, trackball, etc. The output device 760 can be one or more output devices such as a display, speaker, printer, etc. The electronic device 700 can also communicate with one or more external devices (not shown) as needed via the communication unit 740, the external devices such as a storage device, display device, etc., communicate with one or more devices that enable a user to interact with the electronic device 700, or communicate with any device that enables the electronic device 700 to communicate with one or more other electronic devices (e.g., a network card, modem, etc.). Such communication can be performed via an input / output (I / O) interface (not shown).

[0066] According to an exemplary implementation of the present disclosure, a computer-readable storage medium is provided, on which one or more computer instructions are stored, and wherein the one or more computer instructions are executed by a processor to implement the method described above.

[0067] Aspects of the present disclosure are described herein with reference to the flowcharts and / or block diagrams of methods, apparatuses (systems), and computer program products according to the present disclosure. It should be understood that each block of the flowcharts and / or block diagrams, and combinations of blocks in the flowcharts and / or block diagrams, can be implemented by computer-readable program instructions.

[0068] These computer-readable program instructions can be provided to a processing unit of a general-purpose computer, a special-purpose computer, or other programmable data processing apparatus to produce a machine such that the instructions, when executed by the processing unit of the computer or other programmable data processing apparatus, create a means for implementing the functions / acts specified in one or more blocks of the flowchart and / or block diagram. These computer-readable program instructions can also be stored in a computer-readable storage medium, which instructions cause a computer, a programmable data processing apparatus, and / or other devices to operate in a particular manner, so that the computer-readable medium storing the instructions comprises a manufacture, which includes instructions for implementing various aspects of the functions / acts specified in one or more blocks of the flowchart and / or block diagram.

[0069] Computer-readable program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other devices to cause a series of operational steps to be performed on the computer, other programmable data processing apparatus, or other devices to produce a computer-implemented process such that the instructions executed on the computer, other programmable data processing apparatus, or other devices implement the functions / acts specified in one or more boxes of the flowchart and / or block diagram.

[0070] The flowcharts and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various implementations of the present disclosure. In this regard, each block in the flowchart or block diagram may represent a module, a segment of code, or a portion of an instruction, which contains one or more executable instructions for implementing the specified logical function. In some alternative implementations, the functions noted in the blocks may occur out of the order noted in the figures. For example, two consecutive blocks may in fact be executed substantially in parallel, or they may sometimes be executed in the reverse order, depending upon the functionality involved. It should also be noted that each block of the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, can be implemented by special-purpose hardware-based systems that perform the specified functions or acts, or by combinations of special-purpose hardware and computer instructions.

[0071] The various implementations of the present disclosure have been described above. The above description is exemplary, not exhaustive, and is not limited to the disclosed implementations. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described implementations. The choice of terms used herein is intended to best explain the principles of the implementations, the practical application, or improvements made to the technology in the marketplace, or to enable other ordinary skill in the art to understand the implementations disclosed herein.

Claims

1. A method for layout processing, comprising: For a plurality of initial graphic segments corresponding to a target layout to be corrected, determining a signal change metric corresponding to each initial graphic segment, where the signal change metric indicates the degree of change in the simulated light intensity of the initial graphic segment; Based on the positional relationship between the plurality of initial graphic segments and the signal change metrics respectively determined for the plurality of initial graphic segments, determining at least one target graphic segment, where the target graphic segment in the at least one target graphic segment is obtained by merging at least two of the plurality of initial graphic segments; And Based on the at least one target graphic segment, determining a correction result for the target layout.

2. The method according to claim 1, wherein determining the signal change metric corresponding to the initial graphic segment comprises: Determining sampling points on the initial graphic segment based on a sampling rule; Based on the change in the simulated light intensity at the sampling points, determining the logarithmic light intensity change rate corresponding to the sampling points; And Based on the logarithmic light intensity change rate and the width of the initial graphic segment at the sampling points, determining the signal change metric.

3. The method according to claim 1, wherein determining the at least one target graphic segment comprises: Based on the positional relationship between the plurality of initial graphic segments and the signal change metrics respectively determined for the plurality of initial graphic segments, determining at least one segment group from the plurality of initial graphic segments, where the segment group in the at least one segment group includes the plurality of initial graphic segments that are adjacent to each other in pairs, and the difference between the signal change metrics respectively corresponding to the plurality of initial graphic segments is lower than a difference threshold; And By merging the corresponding initial graphic segments included in the at least one segment group, determining the at least one target graphic segment respectively corresponding to the at least one segment group.

4. The method according to claim 3, wherein determining the at least one segment group comprises: Based on the signal change metrics respectively determined for the plurality of initial graphic segments, generating a change trend graph, where the change trend graph presents the signal change metrics respectively determined for the plurality of initial graphic segments according to the positional relationship between the plurality of initial graphic segments; And Based on the change rate of the change trend graph, dividing the plurality of initial graphic segments into the at least one segment group.

5. The method according to claim 1, wherein the plurality of initial graphic segments are determined by: Based on the target layout and process parameters corresponding to the target layout, determining a segment division rule corresponding to the target layout; and Based on the segment division rule, dividing the target layout into the plurality of initial graphic segments.

6. The method according to claim 1, wherein the length of the plurality of initial graphic segments is one-half of the minimum design feature size of the target layout.

7. The method according to claim 1, wherein determining the correction result for the target layout comprises: Determine at least one measurement information respectively corresponding to the at least one target graphic segment in the target layout, where the measurement information in the at least one measurement information indicates the difference between the size of the corresponding target graphic segment and the design size of the target layout; And In response to detecting target measurement information in the at least one measurement information whose difference from the design size exceeds a first size threshold, adjust a given target graphic segment corresponding to the target measurement information based on the difference.

8. The method according to claim 7, further comprising: Based on at least one sampling point corresponding to the given target graphic segment, determine a target point for adjusting the given target graphic segment from the given target graphic segment, the at least one sampling point corresponding to at least one initial graphic segment included in the given target graphic segment respectively, and where adjusting the given target graphic segment based on the difference includes: In response to determining that the difference is lower than a second size threshold, determine a moving distance based on the difference; and Based on the moving distance, move the position of the target point in the target layout to adjust the given target graphic segment.

9. The method according to claim 3, wherein the difference threshold is determined based on an average value of the signal change metrics respectively determined for the plurality of initial graphic segments.

10. An electronic device, characterized in that, Comprising: At least one processing unit; And At least one memory, the at least one memory being coupled to the at least one processing unit and storing instructions for execution by the at least one processing unit, the instructions when executed by the at least one processing unit cause the electronic device to execute the method according to any one of claims 1 to 9.

11. A computer-readable storage medium, characterized in that, A computer program is stored thereon, characterized in that the computer program is executable by a processor to implement the method according to any one of claims 1 to 9.

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