Micro-LED micro display device microtube packaging method, device and equipment

Abstract

The invention relates to a Micro-LED micro display device microtube packaging method, device and equipment, and the method comprises the following steps: carrying out the hydrophilic and hydrophobic patterning processing of an arrayed microtube structure through a preset plasma surface activation technology, and obtaining a microtube array with selective infiltration; directionally transporting the target micro-display device into the micro-tube array with selective infiltration by utilizing a preset dielectrophoresis driving micro-fluidic technology to obtain a positioning array in the micro-tube; wherein the target micro display device is used as a Micro-LED micro display device; performing deep ultraviolet light induced self-assembly on the positioning array in the microtube to obtain a fixed microtube array; and constructing a packaging film layer on the fixed microtube array through an atomic layer deposition technology to obtain a packaged target micro-display device, thereby solving the technical problem that the performance of the Micro-LED micro-display device is reduced or failed due to the fact that the existing packaging material and packaging technology may not fully protect the Micro-LED micro-display device from being influenced by the change of environmental factors.

Description

Technical Field

[0001] The present invention relates to the technical field of micro display devices, and in particular to a method, device and equipment for packaging micro tubes of Micro-LED micro display devices. Background Art

[0002] With the continuous advancement of display technology, Micro-LED micro-display devices have attracted much attention due to their advantages such as high brightness, low power consumption, fast response time and long life, and have gradually become an important development direction of the next generation of display technology. However, when applying Micro-LED to actual products, traditional packaging methods face many challenges. Traditional pick-and-place technology is inefficient and prone to damage when handling extremely small Micro-LED chips, which not only increases production costs but also limits the feasibility of large-scale commercial production. In addition, existing packaging materials and technologies may not fully protect Micro-LEDs from environmental factors such as temperature changes, moisture and oxygen, resulting in performance degradation or failure. Therefore, it is particularly urgent to study and develop an efficient, reliable and economical packaging method for Micro-LED micro-display devices. Summary of the invention

[0003] The main purpose of the present invention is to provide a method, device and equipment for micro-tube packaging of Micro-LED micro-display devices, which solves the technical problem that existing packaging materials and packaging technologies may not be able to fully protect Micro-LED micro-display devices from changes in environmental factors, resulting in performance degradation or failure.

[0004] To achieve the above object, the present invention provides a method for packaging a micro-LED micro-display device micro-tube, comprising the following steps: The preset borosilicate glass substrate is subjected to femtosecond laser three-dimensional micromachining to obtain an arrayed microtube structure; The arrayed microtube structure is subjected to hydrophilic and hydrophobic patterning treatment by a preset plasma surface activation technology to obtain a microtube array with selective wetting; The target micro-display device is directionally transported into a micro-tube array with selective infiltration by using a preset dielectrophoresis-driven microfluidic technology to obtain an intra-micro-tube positioning array; wherein the target micro-display device is used as a Micro-LED micro-display device; Performing deep ultraviolet light-induced self-assembly on the microtubule internal positioning array to obtain a fixed microtubule array; The fixed microtube array is packaged by constructing a film layer through atomic layer deposition technology to obtain a packaged target micro display device.

[0005] Furthermore, the femtosecond laser three-dimensional micromachining of the preset borosilicate glass substrate to obtain the arrayed microtube structure includes: A preset femtosecond laser induced modification technology is used to selectively dope a preset borosilicate glass substrate to obtain a doped modified substrate, and the doped modified substrate is annealed to obtain a stress-released substrate; The stress release substrate is three-dimensionally micro-processed by femtosecond laser ablation technology to obtain an arrayed conical microtube structure, and the arrayed conical microtube structure is chemically etched to obtain an inverted conical microtube array; Based on femtosecond laser light field modulation technology, the photonic crystal structure in the inverted cone microtube array is periodically modulated to obtain an optical waveguide microtube array, and the optical waveguide microtube array is subjected to plasma enhanced chemical vapor deposition treatment to obtain a passivated optical waveguide microtube array; Performing dot solution deposition on the passivated optical waveguide microtube array by using electrospinning technology to obtain a dot-modified microtube array; The surface plasmon coupling structure of the point-modified microtube array is prepared by nanoimprint lithography technology to obtain an SPP-enhanced microtube array, and the SPP-enhanced microtube array is subjected to atomic layer deposition to obtain a protective SPP-enhanced microtube array; The protective SPP enhanced microtube array is subjected to microlens array construction based on two-photon polymerization technology to obtain an arrayed microtube structure.

[0006] Furthermore, the arrayed microtube structure is subjected to hydrophilic and hydrophobic patterning treatment by a preset plasma surface activation technology to obtain a microtube array with selective wetting, comprising: The arrayed microtubule structure is subjected to oxygen plasma gradient energy bombardment treatment to obtain a surface hydroxylated microtubule structure, and the surface hydroxylated microtubule structure is subjected to plasma enhanced atomic layer etching to obtain a surface micro-nano composite structure; The surface micro-nano composite structure is modified with hydrophilic groups by plasma-induced graft polymerization technology to obtain a surface gradient hydrophilic region, and the surface gradient hydrophilic region is selectively etched by fluorocarbon plasma to obtain an amphiphilic pattern structure; Based on plasma enhanced chemical vapor deposition technology, a multi-level wettability regulation layer is constructed on the amphiphilic pattern structure to obtain a wettability gradient microtube array, and plasma assisted atomic layer deposition is performed on the wettability gradient microtube array to obtain a surface energy modulation structure; The surface energy modulation structure is subjected to amphiphilic molecules orderly arranged by plasma induced self-assembly technology to obtain a surface micro-region structure, and the surface micro-region structure is subjected to plasma enhanced physical vapor deposition to obtain a molecular orientation control layer, wherein the molecular orientation control layer includes a molecular arrangement period, an orientation angle and a structural stability; The molecular orientation control layer is selectively patterned based on plasma-assisted photochemical etching technology to obtain a surface energy gradient structure, and the surface energy gradient structure is subjected to plasma-enhanced chemical vapor deposition to obtain a hydrophilic and hydrophobic pattern array. The hydrophilic and hydrophobic pattern array is subjected to plasma-induced surface modification treatment to obtain a microtube array with selective wetting.

[0007] Furthermore, the target micro-display device is directionally transported into a micro-tube array with selective infiltration by using a preset dielectrophoresis-driven microfluidic technology to obtain an intra-micro-tube positioning array; wherein the target micro-display device is used as a Micro-LED micro-display device, comprising: Pre-treating the microtube array with selective wetting based on multiphase flow microfluidics technology to obtain a pre-wetted microtube array, and dynamically regulating the wall shear force of the pre-wetted microtube array to obtain a flow field-stabilized microtube array; Applying a non-uniform alternating electric field to the flow field stabilizing microtube array through a microelectrode array to obtain a dielectrophoresis force field microtube array; Directly transporting the Micro-LED micro-display device toward the dielectrophoretic force field microtube array to obtain a dynamic capture microtube array; Based on a preset optical feedback control system, the dynamic capture microtube array is tracked and adjusted in real time to obtain a precisely guided microtube array; Based on the microfluidic inertial impact technology, the precision-guided microtube array is pushed toward the dielectrophoresis force field microtube array in the microtube to obtain the microtube positioning array.

[0008] Furthermore, the deep ultraviolet light-induced self-assembly of the microtube internal positioning array to obtain a fixed microtube array includes: Performing deep ultraviolet wavelength modulation spectroscopy on the microtube positioning array to obtain a spectral distribution parameter set, and performing surface photochemical activation on the microtube array based on the spectral distribution parameter set to obtain an activated microtube array; The activated microtubule array is regulated by molecular chain segments through deep ultraviolet light-induced surface grafting technology to obtain a molecular chain segment-modified microtubule array, and a photochemical cross-linking network is constructed based on the molecular chain segment-modified microtubule array to obtain a three-dimensional network structure microtubule array; Based on the preset deep ultraviolet light-induced molecular self-assembly technology, the three-dimensional network structure microtube array is subjected to supramolecular structure assembly to obtain a supramolecular assembled microtube array, and the supramolecular assembled microtube array is subjected to surface energy field regulation to obtain a surface energy gradient microtube array; Performing deep ultraviolet light-induced phase separation treatment on the surface energy gradient microtube array to obtain a phase-separated microtube array, and performing interface stress field regulation on the phase-separated microtube array to obtain an interface structure microtube array; The lattice orientation of the interface structure microtube array is regulated by deep ultraviolet light induced grain boundary reconstruction technology to obtain a grain boundary regulated microtube array, and the grain boundary regulated microtube array is photochemically bonded in situ to obtain a bonding-enhanced microtube array; The surface defects of the bonded reinforced microtube array are eliminated based on deep ultraviolet light induced surface passivation technology to obtain a fixed microtube array.

[0009] Furthermore, the three-dimensional network structure microtube array is subjected to supramolecular structure assembly based on the preset deep ultraviolet light-induced molecular self-assembly technology to obtain a supramolecular assembled microtube array, comprising: Performing light field modulation on the three-dimensional network structure microtube array through a preset deep ultraviolet light interference pattern to obtain a light field modulated microtube array; Using femtosecond laser pulses to induce multiphoton absorption on the light field modulated microtube array to obtain a multiphoton excited microtube array; Performing thermophoresis manipulation on the multi-photon excited microtube array through a preset temperature gradient field to obtain a thermophoresis manipulated microtube array; Based on micro-nanoscale van der Waals forces, the thermophoresis-controlled microtubule array is molecularly self-assembled and guided to obtain a self-assembled guided microtubule array; The self-assembled guided microtubule array is subjected to supramolecular structural stabilization treatment through deep ultraviolet light-induced cross-linking reaction to obtain a supramolecular assembled microtubule array, wherein the supramolecular assembled microtubule array includes cross-linking density and bonding energy.

[0010] Furthermore, the fixed microtube array is packaged by an atomic layer deposition technique to form a film layer to obtain a packaged target micro display device, including: Based on the in-situ plasma assisted atomic layer deposition technology, an aluminum oxide precursor pulse is injected into the fixed microtube array to obtain an aluminum oxide initial encapsulation layer, and the aluminum oxide initial encapsulation layer is subjected to plasma surface nitridation treatment to obtain a nitrided aluminum oxide barrier layer; Based on pulsed laser deposition technology, a high dielectric constant film layer is constructed on the aluminum oxide nitride barrier layer to obtain a high dielectric microtube array; Depositing a transparent conductive film layer on the high dielectric microtube array by radio frequency magnetron sputtering technology to obtain a conductive microtube array; Based on the atomic layer deposition technology, a flexible protective film layer is constructed on the conductive microtube array to obtain a flexible microtube array, and the flexible microtube array is subjected to ultraviolet ozone treatment to obtain a surface-activated flexible microtube array; A passivation film layer is deposited on the surface activated flexible microtube array based on atomic layer deposition technology to obtain a packaged target micro display device.

[0011] The present invention also provides a micro-LED micro-display device micro-tube packaging device, comprising: A processing module is used to perform femtosecond laser three-dimensional micro-machining on a preset borosilicate glass substrate to obtain an arrayed microtube structure; A patterning processing module, used for performing hydrophilic and hydrophobic patterning processing on the arrayed microtube structure by a preset plasma surface activation technology to obtain a microtube array with selective wetting; A transport module, used to use a preset dielectrophoresis driven microfluidic technology to directionally transport the target microdisplay device into a microtube array with selective infiltration to obtain an intra-microtube positioning array; wherein the target microdisplay device is used as a Micro-LED microdisplay device; An assembly module, used for performing deep ultraviolet light-induced self-assembly on the microtubule internal positioning array to obtain a fixed microtubule array; The construction module is used to construct a packaging film layer on the fixed microtube array by atomic layer deposition technology to obtain a packaged target micro display device.

[0012] The present invention also provides a computer device, comprising a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of any one of the above methods when executing the computer program.

[0013] The present invention also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the steps of any of the above-mentioned methods are implemented.

[0014] The micro-tube packaging method of a Micro-LED micro-display device provided by the present invention comprises the following steps: performing femtosecond laser three-dimensional micromachining on a preset borosilicate glass substrate to obtain an arrayed micro-tube structure; performing hydrophilic-hydrophobic patterning treatment on the arrayed micro-tube structure by a preset plasma surface activation technology to obtain a micro-tube array with selective infiltration; using a preset dielectrophoresis driven microfluidic technology to directionally transport a target micro-display device into the micro-tube array with selective infiltration to obtain an intra-micro-tube positioning array; wherein the target micro-display device is used as a Micro-LED micro-display device; The microtube internal positioning array is subjected to deep ultraviolet light-induced self-assembly to obtain a fixed microtube array; the fixed microtube array is packaged by atomic layer deposition technology to construct a film layer to obtain a packaged target micro display device, which solves the technical problem that the existing packaging materials and packaging technologies may not fully protect the Micro-LED micro display device from the influence of environmental factors, resulting in its performance degradation or failure, and realizes the use of atomic layer deposition (ALD) technology to construct a packaging film layer. This technology can form a very thin but dense and uniform protective layer, providing excellent physical and chemical protection for the Micro-LED micro display device. At the same time, the ALD film layer has good optical transparency and will not affect the luminous performance of the device, ensuring that the packaged product still has an excellent display effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Schematic diagram of the steps of a method for packaging a micro-LED micro-display device micro-tube in one embodiment of the present invention; Figure 2 This is a structural block diagram of a micro-tube packaging device for a Micro-LED micro-display device in one embodiment of the present invention; Figure 3 It is a schematic block diagram of the structure of a computer device according to an embodiment of the present invention.

[0016] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0018] like Figure 1 As shown, Figure 1 This is a schematic diagram of the steps of a micro-tube packaging method for a Micro-LED micro-display device in one embodiment of the present invention; In one embodiment of the present invention, a method for packaging a micro-LED micro-display device micro-tube is provided, comprising the following steps: Step S1, performing femtosecond laser three-dimensional micromachining on a preset borosilicate glass substrate to obtain an arrayed microtube structure.

[0019] Specifically, in the step of "performing femtosecond laser three-dimensional micromachining on the preset borosilicate glass substrate to obtain an arrayed microtube structure" mentioned above, it is first necessary to select an appropriate borosilicate glass material as the substrate. Borosilicate glass is an ideal substrate option due to its excellent thermal and chemical stability, and it can withstand various environmental conditions that may be encountered during subsequent processing. Next, the key is to use femtosecond laser technology for three-dimensional micromachining. The duration of this laser pulse is extremely short, usually at the level of 10^-15 seconds, so the target area can be finely cut and engraved without affecting the surrounding materials. In this process, by precisely controlling the energy, frequency and focus position of the laser beam, it is possible to create a microtube structure with a specific shape and size on a borosilicate glass substrate. For example, in the application scenario of Micro-LED micro-display devices, in order to ensure that each Micro-LED chip can be accurately embedded in the corresponding microtube, femtosecond laser three-dimensional micromachining technology must be used to create matching tiny holes or channels. These microtubes must not only form a regular arrangement on the plane, but their internal structure must also meet certain geometric parameter requirements, such as diameter size, depth, etc., to ensure the effective implementation of hydrophilic and hydrophobic patterning and dielectrophoresis-driven microfluidic technology in the subsequent steps. To further illustrate this point, we can imagine a practical application example: suppose we are developing a high-resolution display for a new type of smart watch, which requires a large number of Micro-LED micro-display devices. In this case, it is necessary to build an array of thousands of microtubes on a borosilicate glass substrate, each of which corresponds to a separate Micro-LED pixel. By carefully adjusting the various parameters of the femtosecond laser, engineers can successfully create a series of micro- or even sub-micron-level microtube structures on the surface of the substrate, laying a solid foundation for the next step of operation. As the laser beam moves along the predetermined path, the microtubes gradually take shape, and finally form a complete, highly ordered microtube array, which will serve as an important carrier in the subsequent process flow, carrying and fixing each Micro-LED micro-display device to ensure that they can perform at their best in the final product.

[0020] Step S2, performing hydrophilic and hydrophobic patterning treatment on the arrayed microtube structure by a preset plasma surface activation technology to obtain a microtube array with selective wetting.

[0021] Specifically, after femtosecond laser three-dimensional micromachining of a preset borosilicate glass substrate is achieved to obtain an arrayed microtube structure, the arrayed microtube structure is then subjected to hydrophilic and hydrophobic patterning by a preset plasma surface activation technology to obtain a microtube array with selective wetting. This process is to change the chemical properties of the microtube surface by using plasma surface activation technology to give it specific wetting characteristics. Specifically, plasma is a partially ionized gas composed of electrons, ions and neutral particles, which can react with the surface of the material under appropriate conditions. In order to achieve the above content, it is first necessary to place the arrayed microtube structure processed by femtosecond laser in a plasma processing device. Then, by adjusting the parameters of the plasma source, such as power, pressure, gas flow rate and processing time, oxygen-containing functional groups, such as hydroxyl (-OH) or carbonyl (=O), can be introduced on the microtube surface. These functional groups can significantly improve the hydrophilicity of the surface. At the same time, for those areas that do not require hydrophilic properties, they can be protected by masks or other means to avoid being affected by plasma, so that a patterned structure containing both hydrophilic and hydrophobic areas can be created on the same surface, that is, a microtube array with selective wetting properties is formed. For example, in the application scenario of Micro-LED micro-display devices, when the goal is to accurately position the Micro-LED chip inside each microtube, this selective wetting property is particularly important. For example, in the process of building a high-resolution display screen for a smart watch, we hope that the Micro-LED chip is only placed in a pre-designed position and will not drift randomly to other places. Therefore, the hydrophilic and hydrophobic patterning treatment created by plasma surface activation technology can make the inner wall of some microtubes very hydrophilic, attracting liquid fluids containing Micro-LEDs to enter and stay; while adjacent microtubes remain hydrophobic, preventing the fluid from further diffusing. In this way, when using dielectrophoresis-driven microfluidic technology to transport Micro-LEDs, they can be guided to the correct position as expected and stably fixed, ensuring the success rate of subsequent assembly processes and the performance consistency of the final product. In addition, since this surface treatment method is non-destructive and can be precisely controlled, it is very suitable for use in the field of precision manufacturing, especially in operations involving micro-sized components, and it provides a reliable technical guarantee for improving production efficiency and product quality.

[0022] Step S3, using a preset dielectrophoresis driven microfluidic technology to directionally transport the target microdisplay device into a microtube array with selective infiltration to obtain an intra-microtube positioning array; wherein the target microdisplay device is used as a Micro-LED microdisplay device.

[0023] Specifically, after completing the femtosecond laser three-dimensional micromachining of the preset borosilicate glass substrate and obtaining the arrayed microtube structure, and performing hydrophilic and hydrophobic patterning on these microtubes by plasma surface activation technology, the next key step is to use the preset dielectrophoresis-driven microfluidic technology to directional transport the target microdisplay device to the microtube array with selective infiltration to obtain the microtube positioning array. This process involves how to efficiently and accurately place the Micro-LED microdisplay device at the designated position in each microtube. Dielectrophoresis (DEP) is a physical phenomenon that when a non-uniform electric field acts on particles in a medium, the particles move due to the force. This technology is particularly suitable for manipulating small-sized objects, such as cells, nanoparticles, or the Micro-LED microdisplay devices mentioned here. For the above description, first, a suspension containing Micro-LED devices needs to be prepared and introduced into the microfluidic chip where the microtube array that has been surface-treated is located. Then, an AC electric field of a specific frequency and amplitude is applied to generate a non-uniform electric field in the medium around the microtube. At this time, due to the difference in dielectric constant between the internal materials of the Micro-LED devices and the surrounding liquid medium, they will begin to move under the influence of the DEP force under the action of the electric field. For example, in the process of building a high-resolution display screen for smart watches, we want to ensure that each Micro-LED can be accurately placed in the corresponding microtube. Therefore, when the Micro-LED in the suspension enters the microfluidic channel, by precisely controlling the electrode layout and electric field parameters, these devices can be guided to move along the predetermined path and finally dock in the hydrophilic area formed by the plasma surface activation technology. Because these areas show stronger attraction to the aqueous suspension, the Micro-LED devices will be naturally "pulled" into the corresponding microtubes. At the same time, other areas remain hydrophobic, preventing excess devices or liquids from diffusing out, thereby achieving a highly ordered microtube positioning array. This method not only improves assembly efficiency, but also greatly reduces the uncertainty caused by manual operation, ensuring the performance consistency of the final product. In addition, the application of dielectrophoresis-driven microfluidics makes the entire process more automated and controllable, providing strong support for large-scale production and the manufacture of complex structures. In this way, we can ensure that each Micro-LED microdisplay device can be accurately positioned in its proper position, laying a good foundation for the subsequent packaging steps.

[0024] Step S4, performing deep ultraviolet light-induced self-assembly on the microtube internal positioning array to obtain a fixed microtube array.

[0025] Specifically, after using the preset dielectrophoresis-driven microfluidics technology to directionally transport the target microdisplay device into the microtube array with selective infiltration to obtain the microtube positioning array, the next key step is to induce deep ultraviolet light self-assembly of the microtube positioning array to obtain a fixed microtube array. This process relies on the unique properties of deep ultraviolet light (DUV), which can activate specific chemical reactions on the surface or inside of the material, thereby promoting the formation of a stable connection between the Micro-LED microdisplay device and the microtube structure. For the above mentioned content, it is first necessary to ensure that the Micro-LED microdisplay devices in the microtubes have been accurately positioned in their respective microtubes through the previous steps. Next, the microtube array containing these devices is exposed to deep ultraviolet light of a specific wavelength and intensity. Deep ultraviolet light irradiation can trigger a series of physical and chemical changes, such as photocatalytic reactions, photocrosslinking reactions, etc. These changes enable the originally loosely arranged Micro-LED devices to self-assemble in the microtubes. Specifically, when deep ultraviolet light shines on the surface of the microtube, it excites the photosensitive molecules in the surface modification layer, causing the chemical bonds between them to break or recombine, forming new covalent bonds or other types of stable connections, thereby firmly fixing the Micro-LED device inside the microtube. For example, in the process of building a high-resolution display screen for a smart watch, the Micro-LED device, which has been precisely positioned by dielectrophoresis-driven microfluidics technology, now needs to be self-assembled by deep ultraviolet light to ensure that its position does not change. In this example, it is assumed that we use a special photosensitive polymer as the coating material on the surface of the microtube. When deep ultraviolet light shines on these microtubes, the photosensitive polymer undergoes a photocrosslinking reaction to generate a three-dimensional network structure, which not only enhances the mechanical strength of the coating itself, but also provides additional adhesion for the Micro-LED device. As a result, each Micro-LED is tightly "locked" in its corresponding microtube, forming a highly ordered and stable microtube array. This fixing method not only ensures that the device will not be easily displaced during subsequent use, but also greatly shortens the entire production cycle and improves manufacturing efficiency because deep ultraviolet light-induced self-assembly is a fast process. In addition, this method can also reduce the contamination problems that may be caused by traditional adhesives, ensuring that the optical transparency and electrical performance of the final product are not affected. Therefore, by performing deep ultraviolet light-induced self-assembly of the microtube positioning array, we not only achieved efficient fixation of Micro-LED micro-display devices, but also paved the way for subsequent packaging processes, further improving the quality and reliability of smart watch displays.

[0026] Step S5, constructing a packaging film layer on the fixed microtube array by atomic layer deposition technology to obtain a packaged target micro display device.

[0027] Specifically, after completing the deep ultraviolet light-induced self-assembly of the microtube internal positioning array to obtain a fixed microtube array, the next key step is to construct an encapsulation film layer for the fixed microtube array by atomic layer deposition (ALD) technology to obtain an encapsulated target micro display device. This process is intended to provide a highly dense and uniform protective film for the assembled Micro-LED micro display device to enhance its environmental tolerance and mechanical stability while ensuring that the optical transparency is not affected. For the above-described content, it is first necessary to place the fixed microtube array after deep ultraviolet light-induced self-assembly treatment in a specially designed ALD reaction chamber. ALD is a technology based on the principle of chemical vapor deposition, which uses the alternating introduction of two or more reaction gases to grow atomic-level thin films layer by layer on the surface of the material. In this case, it is crucial to select suitable precursor gases, such as metal organic compounds and oxidants, which can react at lower temperatures and form the required encapsulation film layer on the surface of the microtube. These precursor gases are introduced into the reaction chamber in a precisely controlled manner, and only a single atomic layer of new material is generated each time, and as the number of cycles increases, a complete encapsulation film layer is gradually accumulated. For example, in the application scenario of high-resolution display screens of smart watches, in order to ensure that each Micro-LED micro-display device can work stably for a long time, it must be effectively encapsulated. The encapsulation film layer constructed by ALD technology can not only prevent the invasion of harmful substances such as external moisture and oxygen, but also resist various physical shocks and temperature changes that may be encountered in daily use. For example, when we put the microtube array containing the fixed Micro-LED device into the ALD device, by adjusting the reaction conditions such as temperature, pressure and the ratio of precursor gas, a very thin but very strong aluminum oxide or silicon nitride film can be evenly deposited on the inner and outer surfaces of each microtube. This film has excellent barrier properties and effectively isolates the influence of the external environment. At the same time, due to its excellent optical transparency, it will not cause any obvious attenuation or scattering of the light emitted by the Micro-LED device, thereby maintaining the brightness and color quality of the screen. In addition, a major advantage of ALD technology is that it can achieve highly consistent coverage of complex three-dimensional structures, which is particularly important for microscopic structures such as microtube arrays. Because in traditional packaging methods, it is difficult to ensure that each micro-tube can obtain the same quality of protection layer, while ALD can overcome this problem and ensure that all Micro-LED devices in the entire micro-tube array are protected at the same level. Therefore, by using atomic layer deposition technology to construct the packaging film layer for the fixed micro-tube array, we not only achieve effective protection for Micro-LED micro-display devices, but also improve the overall reliability and service life of the product, providing solid technical support for high-end electronic products such as smart watch displays.In this way, the final packaged target micro-display device not only has excellent optical and electrical properties, but also has excellent durability, meeting the needs of modern electronic devices for high-performance display components.

[0028] In a specific embodiment, the femtosecond laser three-dimensional micromachining of a preset borosilicate glass substrate to obtain an arrayed microtube structure includes: A preset femtosecond laser induced modification technology is used to selectively dope a preset borosilicate glass substrate to obtain a doped modified substrate, and the doped modified substrate is annealed to obtain a stress-released substrate; The stress release substrate is three-dimensionally micro-processed by femtosecond laser ablation technology to obtain an arrayed conical microtube structure, and the arrayed conical microtube structure is chemically etched to obtain an inverted conical microtube array; Based on femtosecond laser light field modulation technology, the photonic crystal structure in the inverted cone microtube array is periodically modulated to obtain an optical waveguide microtube array, and the optical waveguide microtube array is subjected to plasma enhanced chemical vapor deposition treatment to obtain a passivated optical waveguide microtube array; Performing dot solution deposition on the passivated optical waveguide microtube array by using electrospinning technology to obtain a dot-modified microtube array; The surface plasmon coupling structure of the point-modified microtube array is prepared by nanoimprint lithography technology to obtain an SPP-enhanced microtube array, and the SPP-enhanced microtube array is subjected to atomic layer deposition to obtain a protective SPP-enhanced microtube array; The protective SPP enhanced microtube array is subjected to microlens array construction based on two-photon polymerization technology to obtain an arrayed microtube structure.

[0029] Specifically, in the process of realizing femtosecond laser three-dimensional micromachining of a preset borosilicate glass substrate to obtain an arrayed microtube structure, the entire process flow is subdivided into multiple continuous and interrelated steps, each of which is intended to give specific functions and characteristics to the arrayed microtube structure finally formed. First, the preset borosilicate glass substrate is selectively doped using a preset femtosecond laser induced modification technology. This is a critical starting stage. By precisely controlling the energy density and the position of the focal point of the femtosecond laser, specific elements can be introduced into the borosilicate glass substrate or its local chemical composition can be changed to obtain a doped modified substrate. For example, in the application scenario of a high-resolution display screen of a smart watch, if it is necessary to improve the electrical contact performance between the Micro-LED device and the microtube, metal ions such as silver (Ag) or gold (Au) can be doped to increase conductivity. After the doping modification is completed, the doped modified substrate is annealed immediately. This process is to release the internal stress generated during the doping process and ensure the stability of the internal structure of the substrate material. Annealing is usually carried out under controlled temperature and time conditions to optimize the physical properties of the substrate. The substrate after annealing is called a stress-release substrate, which not only has better mechanical strength, but also reduces the risk of cracks or other defects that may occur in subsequent processing. This step is crucial to ensure the reliability and durability of the final product. Subsequently, the stress-release substrate is three-dimensionally micro-processed by femtosecond laser ablation technology to obtain an arrayed conical microtube structure. Femtosecond laser ablation is a technology that uses extremely short pulse lasers to remove the surface layer of a material, which can achieve fine engraving without causing thermal damage to the surrounding material. In this example, the femtosecond laser ablates tiny conical holes one by one according to a predetermined design pattern, and these holes will serve as the accommodation space for subsequent Micro-LED devices. In order to further optimize the geometry of the microtubes, the arrayed conical microtube structure will be chemically etched to obtain an inverted conical microtube array. Chemical etching uses specific chemical reagents to dissolve and remove materials, so that the opening of the microtubes gradually expands, forming a structure that is more conducive to the operation of dielectrophoresis-driven microfluidic technology. Next, based on the femtosecond laser light field modulation technology, the photonic crystal structure within the inverted cone microtube array is periodically modulated in refractive index to obtain an optical waveguide microtube array. Here, light field modulation refers to affecting the optical properties inside the material by changing the spatial distribution or phase of the laser beam. In this way, a photonic crystal structure with a periodically changing refractive index can be created, which can effectively guide and limit the propagation path of light, similar to the role of optical fiber, but on a smaller scale. Such optical waveguide microtubes not only enhance the transmission efficiency of light emitted by Micro-LED devices, but also provide possibilities for future optical interconnection.In order to protect these newly constructed optical waveguide structures and enhance their long-term stability, the optical waveguide microtube array is treated with plasma enhanced chemical vapor deposition (PECVD) to obtain a passivated optical waveguide microtube array. PECVD is a technology for depositing thin films that can produce high-quality insulating films such as silicon dioxide (SiO2) at lower temperatures. This passivation film not only acts as a barrier to prevent the influence of external environmental factors, but also improves the smoothness of the microtube surface and reduces light loss. Then, the passivated optical waveguide microtube array is subjected to point solution deposition using electrospinning technology to obtain a point-modified microtube array. Electrospinning is a technology that can produce nanoscale fibers, which is used here to precisely deposit functional liquid materials at the specified position of each microtube. For example, a solution containing fluorescent substances or quantum dots can be deposited, which can absorb blue light from Micro-LEDs and emit light of different colors, thereby realizing color conversion functions and enriching display effects. Finally, the surface plasmon coupling (SPP) structure of the point-modified microtube array is prepared by nanoimprint lithography technology to obtain an SPP-enhanced microtube array, and the SPP-enhanced microtube array is treated with atomic layer deposition (ALD) to obtain a protective SPP-enhanced microtube array. Nanoimprint lithography is the process of replicating nanoscale patterns on the surface of a material using a template, and SPP refers to the coupling phenomenon between light and electronic oscillations on the metal surface. By manufacturing the SPP structure, light can interact more strongly with the microtube surface and improve the light extraction efficiency. ALD is again used to provide a dense protective film for the entire structure to ensure its performance and life in practical applications. Based on two-photon polymerization technology, a microlens array is constructed for the protective SPP-enhanced microtube array to obtain an arrayed microtube structure. Two-photon polymerization is a 3D printing technology that allows the creation of complex optical elements, such as microlenses, on a very small scale. These microlenses can concentrate or disperse light, and the optical path design can be adjusted according to specific needs to achieve the best display effect. For example, in the display of a smartwatch, microlenses can help direct more light to the viewer's eyes, thereby improving screen brightness and contrast, and maintaining clear visibility even in strong light environments. In summary, through a series of carefully designed and implemented femtosecond laser 3D micromachining steps on a preset borosilicate glass substrate, we have not only successfully manufactured a highly ordered arrayed microtube structure with multiple functional properties, but also provided an ideal placement environment for each Micro-LED microdisplay device, laying a solid foundation for the ultimate realization of high-performance, high-reliability miniaturized display devices.

[0030] In a specific embodiment, the arrayed microtube structure is subjected to hydrophilic and hydrophobic patterning treatment by a preset plasma surface activation technology to obtain a microtube array with selective wetting, comprising: The arrayed microtubule structure is subjected to oxygen plasma gradient energy bombardment treatment to obtain a surface hydroxylated microtubule structure, and the surface hydroxylated microtubule structure is subjected to plasma enhanced atomic layer etching to obtain a surface micro-nano composite structure; The surface micro-nano composite structure is modified with hydrophilic groups by plasma-induced graft polymerization technology to obtain a surface gradient hydrophilic region, and the surface gradient hydrophilic region is selectively etched by fluorocarbon plasma to obtain an amphiphilic pattern structure; Based on plasma enhanced chemical vapor deposition technology, a multi-level wettability regulation layer is constructed on the amphiphilic pattern structure to obtain a wettability gradient microtube array, and plasma assisted atomic layer deposition is performed on the wettability gradient microtube array to obtain a surface energy modulation structure; The surface energy modulation structure is subjected to amphiphilic molecules orderly arranged by plasma induced self-assembly technology to obtain a surface micro-region structure, and the surface micro-region structure is subjected to plasma enhanced physical vapor deposition to obtain a molecular orientation control layer, wherein the molecular orientation control layer includes a molecular arrangement period, an orientation angle and a structural stability; The molecular orientation control layer is selectively patterned based on plasma-assisted photochemical etching technology to obtain a surface energy gradient structure, and the surface energy gradient structure is subjected to plasma-enhanced chemical vapor deposition to obtain a hydrophilic and hydrophobic pattern array. The hydrophilic and hydrophobic pattern array is subjected to plasma-induced surface modification treatment to obtain a microtube array with selective wetting.

[0031] Specifically, after femtosecond laser three-dimensional micromachining is performed on the preset borosilicate glass substrate to obtain an arrayed microtubule structure, the arrayed microtubule structure is then subjected to hydrophilic and hydrophobic patterning by a preset plasma surface activation technology to obtain a microtubule array with selective wetting characteristics. This complex and delicate process involves multiple consecutive steps, each of which utilizes the unique properties of plasma to gradually change and optimize the surface properties of the microtubules, ultimately achieving precise control of the interaction between the liquid and solid interfaces. First, the arrayed microtubule structure is subjected to oxygen plasma gradient energy bombardment treatment, which is to introduce hydroxyl (-OH) functional groups to the microtubule surface, thereby obtaining a surface hydroxylated microtubule structure. The active oxygen species in the oxygen plasma can react with the microtubule surface to form a large number of hydroxyl groups, which not only increase the hydrophilicity of the surface, but also provide reaction sites for subsequent chemical modifications. For example, in the process of building a high-resolution display screen for a smart watch, such a hydroxylation treatment can ensure that various functional materials used in subsequent processes can be more firmly attached to the microtubule surface, laying the foundation for the precise positioning of Micro-LED devices. After the surface hydroxylation is completed, the next step is to perform plasma enhanced atomic layer etching on the surface hydroxylated microtubule structure to create a surface micro-nano composite structure. Plasma enhanced atomic layer etching is a technology that can accurately remove materials at the nanoscale. It combines the high reactivity of plasma with the layer-by-layer control characteristics of atomic layer deposition. By adjusting the energy density and exposure time of the plasma, micro-nano structures with specific morphologies can be manufactured on the surface of the microtubule. These structures further increase the surface roughness and surface area, which is conducive to improving the effect of subsequent hydrophilic modification. This micro-nano composite structure not only enhances the mechanical stability of the microtubule surface, but also provides an ideal platform for the next step of graft polymerization. Subsequently, the surface micro-nano composite structure is modified with hydrophilic groups by plasma induced graft polymerization technology to obtain a surface gradient hydrophilic region. Plasma induced graft polymerization is a method of directly connecting functional monomers to the surface of a substrate. It can make hydrophilic polymer chains grow on the surface of microtubules to form a continuous hydrophilic coating. In this example, polymers with good hydrophilicity, such as polyethylene glycol (PEG), can be selected and fixed on the surface of hydroxylated microtubules by covalent bonds or physical adsorption to create different areas from extremely hydrophilic to gradually hydrophobic. This step is crucial for guiding the droplet flow path in dielectrophoresis-driven microfluidics because it ensures that the suspension containing the Micro-LED devices is accurately delivered to the predetermined location. In order to further define these hydrophilic areas, the surface gradient hydrophilic areas need to be selectively etched by fluorocarbon plasma to obtain an amphiphilic pattern structure. The selective etching process of fluorocarbon plasma is designed to retain the hydrophilicity of some areas while making other areas hydrophobic.Fluorocarbons are known for their low surface energy. After plasma treatment, super-hydrophobic areas can be generated at designated locations, thus forming an amphiphilic pattern consisting of hydrophilic and hydrophobic areas. This pattern not only helps control the behavior of droplets, but also prevents contamination of non-target areas, ensuring high precision and efficiency of Micro-LED device assembly. Based on the above amphiphilic pattern structure, plasma-enhanced chemical vapor deposition (PECVD) technology is used to construct a multi-level wettability control layer to obtain a wettability gradient microtube array. PECVD is a technology used to deposit thin films that can produce high-quality insulating films at lower temperatures. Here, by adjusting the ratio of precursor gases and deposition parameters, multi-layer structures of different thicknesses and compositions can be deposited on the surface of the microtubes, and each layer helps to adjust its surface energy, thereby achieving a gradient change in wettability. For example, the outermost layer may be a highly hydrophobic fluoride, while the inner layer may be a hydrophilic oxide. This design allows the inside of the microtube to maintain good hydrophilicity, which is convenient for receiving and fixing Micro-LED devices, while the outside has excellent protective properties. In order to enhance the wetting gradient effect, the wetting gradient microtube array needs to be subjected to plasma-assisted atomic layer deposition (ALD) to obtain a surface energy modulation structure. ALD technology is known for its excellent uniformity and controllability. It can form a very thin but dense protective layer on a complex three-dimensional structure. In this case, ALD can be used to deposit one or more nano-scale films, which can not only provide additional barrier protection, but also fine-tune the surface energy to make it more suitable for the orderly arrangement of amphiphilic molecules. Amphiphilic molecules refer to those molecules that have both hydrophilic and hydrophobic ends. They can self-assemble into ordered structures such as micelles and liquid crystals under specific conditions. By plasma-induced self-assembly of the surface energy modulation structure, these amphiphilic molecules can be arranged in a predetermined direction and periodicity to form the so-called surface micro-domain structure. These micro-domain structures not only give the microtube surface unique optical and electrical properties, but also provide the possibility for subsequent functionalization. Further, the surface micro-domain structure is subjected to plasma-enhanced physical vapor deposition (PVD) to obtain a molecular orientation control layer, which contains key properties such as molecular arrangement period, orientation angle and structural stability. PVD is a technology that evaporates solid materials and deposits them into thin films on substrates. It can adjust the deposition conditions as needed to achieve precise control over the molecular arrangement. For example, by changing the position or angle of the evaporation source, the amphiphilic molecules can be arranged in a specific direction, thereby affecting the propagation path of light or the efficiency of charge transfer. In addition, PVD can also increase the periodicity and structural stability of the molecular arrangement, which is very important for maintaining long-term performance.Finally, the molecular orientation control layer is selectively patterned based on plasma-assisted photochemical etching technology to obtain a surface energy gradient structure, and the surface energy gradient structure is again subjected to plasma enhanced chemical vapor deposition to finally obtain a hydrophilic and hydrophobic pattern array. Photochemical etching uses light-induced chemical reactions to remove materials in selected areas. Combined with plasma technology, it can accurately carve the desired pattern at the micrometer or even nanometer level. In this way, the hydrophilic and hydrophobic patterns can be further refined and optimized to ensure that each Micro-LED device can find the best residence position in its corresponding microtube. Finally, the hydrophilic and hydrophobic pattern array is subjected to plasma-induced surface modification to obtain a microtube array with selective wetting characteristics. This surface modification treatment can further adjust the surface chemical properties to ensure its stability and reliability in practical applications. In summary, by performing a series of carefully designed plasma surface activation technologies and related treatments on the arrayed microtube structure, we not only achieve precise control of the hydrophilic and hydrophobic properties of the microtube surface, but also provide an ideal placement environment for each Micro-LED micro-display device. This series of steps works together to ensure that each Micro-LED device in the smartwatch's high-resolution display is accurately placed in the correct position, making an important contribution to the high performance and reliability of the final product.

[0032] In a specific embodiment, the target micro-display device is directionally transported into a micro-tube array with selective infiltration by using a preset dielectrophoresis driven microfluidic technology to obtain a micro-tube positioning array; wherein the target micro-display device is used as a Micro-LED micro-display device, comprising: Pre-treating the microtube array with selective wetting based on multiphase flow microfluidics technology to obtain a pre-wetted microtube array, and dynamically regulating the wall shear force of the pre-wetted microtube array to obtain a flow field-stabilized microtube array; Applying a non-uniform alternating electric field to the flow field stabilizing microtube array through a microelectrode array to obtain a dielectrophoresis force field microtube array; Directly transporting the Micro-LED micro-display device toward the dielectrophoretic force field microtube array to obtain a dynamic capture microtube array; Based on a preset optical feedback control system, the dynamic capture microtube array is tracked and adjusted in real time to obtain a precisely guided microtube array; Based on the microfluidic inertial impact technology, the precision-guided microtube array is pushed toward the dielectrophoresis force field microtube array in the microtube to obtain the microtube positioning array.

[0033] Specifically, after completing the femtosecond laser three-dimensional micromachining of the preset borosilicate glass substrate and obtaining the arrayed microtube structure, and performing the hydrophilic and hydrophobic patterning treatment on it by plasma surface activation technology, the next step is to use the preset dielectrophoresis driven microfluidic technology to directional transport the target microdisplay device to the microtube array with selective infiltration, and obtain the key step of the microtube positioning array. This process not only involves precise control of liquid flow and electric field distribution, but also combines a variety of advanced technologies to ensure that the Micro-LED microdisplay devices can be accurately placed inside their respective microtubes. First, the microtube array with selective infiltration is pretreated based on multiphase flow microfluidic technology, which is to create an environment conducive to subsequent operations. Multiphase flow microfluidic technology allows two or more fluids in different phases, such as oil and water, to be processed simultaneously at the microscale. In this example, by introducing a pre-wetting solution compatible with the hydrophilic area on the microtube surface, it can be ensured that each microtube is pre-filled with a certain amount of liquid, thereby forming a pre-wetted microtube array. This pre-wetting state helps to reduce the possible interference of bubbles in the subsequent transportation process, and due to the presence of the hydrophilic area, the liquid can maintain a stable contact angle inside the microtube, which provides a basis for the next step of dynamic wall shear force regulation. For example, when building a high-resolution display screen for a smart watch, the pre-wetting treatment can ensure that the suspension containing the Micro-LED device can smoothly enter each microtube without being stranded at the entrance due to interfacial tension problems. Next, by dynamically regulating the wall shear force of the pre-wetted microtube array, a flow field-stable microtube array can be obtained. Dynamic wall shear force refers to the friction between liquid layers and between liquid and solid walls when the fluid flows in a pipe or microtube. By adjusting the pressure difference, flow rate and other parameters in the microfluidic system, a uniform and stable shear force distribution can be generated inside the microtube, which not only helps to maintain the smooth flow of the fluid, but also prevents disturbances caused by local turbulence. Flow field stability is crucial to ensure the directional transport of Micro-LED devices because it ensures that each device can move along the predetermined path until it reaches the correct position. In addition, a stable flow field can also reduce unnecessary energy consumption and improve the efficiency of the entire system. Subsequently, a non-uniform alternating electric field is applied to the flow field stabilized microtube array through a microelectrode array, thereby obtaining a dielectrophoretic force field microtube array. Dielectrophoresis (DEP) is a physical phenomenon that uses a non-uniform electric field to act on particles in a medium, causing these particles to be subjected to forces with adjustable directionality and size. In this case, the microelectrode array is designed to generate electric field intensity gradients of varying strengths at specific locations, so that the required dielectrophoretic force can be customized according to the size and shape of the Micro-LED device. When the appropriate alternating electric field is applied, the Micro-LED devices will feel the force from the electric field, prompting them to move toward areas with higher electric field strengths.The application of this non-uniform alternating electric field enables each Micro-LED device to be accurately guided into the corresponding microtube, achieving efficient and controllable directional transport. With the establishment of the dielectrophoretic force field, the Micro-LED micro-display device is directed toward the dielectrophoretic force field microtube array to obtain a dynamic capture microtube array. At this time, each Micro-LED device has entered the corresponding microtube under the action of the dielectrophoretic force and began to move inside the microtube. However, in order to ensure that each device can accurately dock at its designated position, further precise positioning is required. Therefore, the dynamic capture microtube array is tracked and adjusted in real time based on a preset optical feedback control system to obtain a precisely guided microtube array. The optical feedback control system usually includes a high-resolution microscope, a camera, and an image processing algorithm, which can monitor the position changes of each Micro-LED device in real time and issue instructions to adjust the electric field or other parameters as needed. In this way, even within the micron range, highly precise control of the device position can be achieved to ensure that they can eventually stay in the optimal position. Finally, based on the microfluidic inertial impact technology, the precision-guided microtube array is pushed toward the dielectrophoretic force field microtube array in the microtube to obtain the microtube positioning array. Microfluidic inertial impact refers to the use of fluid dynamics principles to allow liquid with a certain speed to carry Micro-LED devices into the microtube. Due to inertia, these devices will stop moving after reaching the target position. This method is particularly suitable for devices that have been precisely positioned by an optical feedback control system because it can help them to be more firmly fixed inside the microtube without destroying their position. By reasonably setting the speed and flow rate of the fluid, it is possible to effectively avoid damage to the device caused by excessive impact, while also ensuring that each device can fit closely to the inner wall of the microtube, forming a highly ordered and stable microtube positioning array. In summary, through a series of carefully designed and technical means combined methods, we have not only successfully transported Micro-LED micro-display devices to a microtube array with selective wetting characteristics, but also achieved precise control of the position of each device. This series of steps work together to ensure that each Micro-LED device in the smart watch's high-resolution display can be accurately placed in the correct position, making an important contribution to the high performance and reliability of the final product. Through the above process, we can see the great potential of dielectrophoresis-driven microfluidics in the field of microdisplay device assembly. It not only improves production efficiency, but also significantly improves product quality, paving the way for the development of miniaturized and highly integrated electronic devices in the future.

[0034] In a specific embodiment, the deep ultraviolet light induced self-assembly of the microtube internal positioning array to obtain a fixed microtube array comprises: Performing deep ultraviolet wavelength modulation spectroscopy on the microtube positioning array to obtain a spectral distribution parameter set, and performing surface photochemical activation on the microtube array based on the spectral distribution parameter set to obtain an activated microtube array; The activated microtubule array is regulated by molecular chain segments through deep ultraviolet light-induced surface grafting technology to obtain a molecular chain segment-modified microtubule array, and a photochemical cross-linking network is constructed based on the molecular chain segment-modified microtubule array to obtain a three-dimensional network structure microtubule array; Based on the preset deep ultraviolet light-induced molecular self-assembly technology, the three-dimensional network structure microtube array is subjected to supramolecular structure assembly to obtain a supramolecular assembled microtube array, and the supramolecular assembled microtube array is subjected to surface energy field regulation to obtain a surface energy gradient microtube array; Performing deep ultraviolet light-induced phase separation treatment on the surface energy gradient microtube array to obtain a phase-separated microtube array, and performing interface stress field regulation on the phase-separated microtube array to obtain an interface structure microtube array; The lattice orientation of the interface structure microtube array is regulated by deep ultraviolet light induced grain boundary reconstruction technology to obtain a grain boundary regulated microtube array, and the grain boundary regulated microtube array is photochemically bonded in situ to obtain a bonding-enhanced microtube array; The surface defects of the bonded reinforced microtube array are eliminated based on deep ultraviolet light induced surface passivation technology to obtain a fixed microtube array.

[0035] Specifically, after using the preset dielectrophoresis-driven microfluidics technology to directionally transport the target microdisplay device into the microtube array with selective infiltration to obtain the microtube positioning array, the next key step is to perform deep ultraviolet light-induced self-assembly on the microtube positioning array to obtain a fixed microtube array. This process involves multiple consecutive and interrelated steps, each of which is designed to optimize and fix the Micro-LED microdisplay device structure in the microtube through the unique properties of deep ultraviolet light (DUV). First, the microtube positioning array is subjected to deep ultraviolet wavelength modulation spectroscopic treatment in order to obtain an accurate set of spectral distribution parameters, and based on these parameters, the microtube array is surface photochemically activated to obtain an activated microtube array. Deep ultraviolet wavelength modulation spectroscopic treatment involves the use of deep ultraviolet light sources in a specific wavelength range, such as 248nm or 193nm excimer lasers, which can excite electronic transitions on the surface of the material. For example, in the process of building a high-resolution display screen for smart watches, by adjusting the wavelength and intensity of the light source, the photosensitive molecules in the microtubule surface modification layer can be activated, causing the chemical bonds to break or recombine to form new active sites. This surface photochemical activation not only enhances the possibility of subsequent grafting polymerization reactions, but also provides the necessary chemical environment for subsequent steps. After the surface photochemical activation is completed, the molecular chain segment of the activated microtubule array is regulated by deep ultraviolet light-induced surface grafting technology to obtain a molecular chain segment modified microtubule array. Surface grafting is a method of connecting functional molecular chains to the surface of a substrate, which can be achieved through mechanisms such as photoinitiated free radical polymerization and atom transfer free radical polymerization. In this example, by selecting suitable monomers and initiators, one or more layers of polymer chain segments with specific lengths and functionalities can be grown on the surface of the microtubule. These molecular chain segments not only increase the surface roughness and surface area, but also help to construct the subsequent photochemical cross-linking network. For example, polyethylene glycol (PEG) or polyacrylic acid (PAA) can be selected as grafted polymers, which have good biocompatibility and hydrophilicity, and can undergo cross-linking reactions under appropriate conditions to form a three-dimensional network structure microtubule array. Based on the above-mentioned molecular segment-modified microtubule array, a photochemical cross-linking network is further constructed. This step is to create a stable and durable three-dimensional network structure. Photochemical cross-linking refers to the formation of covalent bonds between two or more molecules triggered by light, thereby permanently connecting them together. In this case, by controlling the irradiation time and intensity of deep ultraviolet light, a cross-linking reaction can be induced between the molecular segments on the surface of the microtubule to form a sponge-like three-dimensional network structure. Such a structure not only enhances the spatial stability inside the microtubule, but also provides an ideal platform for the next step of supramolecular structure assembly. Next, the three-dimensional network structure microtubule array is subjected to supramolecular structure assembly based on the preset deep ultraviolet light-induced molecular self-assembly technology to obtain a supramolecular assembled microtubule array.Supramolecular chemistry focuses on non-covalent interactions between molecules, such as hydrogen bonds, van der Waals forces, π-π stacking, etc. These forces enable molecules to spontaneously organize into ordered structures without covalent bonds. Through deep ultraviolet light induction, the molecular segments can be guided to arrange in a predetermined manner inside the microtubes to form a supramolecular structure. For example, if functionalized molecular segments containing aromatic compounds are introduced, they may form columnar or layered structures through π-π stacking under the action of deep ultraviolet light. In addition, the size and shape of the supramolecular structure can be regulated by adjusting the irradiation mode of deep ultraviolet light, and finally a surface energy gradient microtube array is obtained. The presence of a surface energy gradient helps to control the behavior of liquids and other substances on the surface of microtubes, which is very important for ensuring the stability and optical performance of Micro-LED devices. In order to further optimize the structural characteristics of the microtube array, the surface energy gradient microtube array is subjected to deep ultraviolet light-induced phase separation treatment to obtain a phase-separated microtube array. Phase separation refers to the formation of different regions in a multi-component system due to the incompatibility between components. In this case, deep ultraviolet light can trigger local dissolution or precipitation of certain materials, thereby producing different phases inside the microtubes. By regulating the interfacial stress field of the phase separation process, an interface structure microtube array can be obtained. For example, by changing the irradiation angle or power density of deep ultraviolet light, a series of micron-level protrusions and smooth areas can be created on the microtube wall. These structural changes not only affect the mechanical properties of the microtubes, but may also affect the light propagation path, thereby optimizing the display effect. Finally, the lattice orientation of the interface structure microtube array is regulated by deep ultraviolet light-induced grain boundary reconstruction technology to obtain a grain boundary-regulated microtube array, and the grain boundary-regulated microtube array is in-situ photochemically bonded to obtain a bond-strengthened microtube array. Grain boundary reconstruction refers to improving the physical and chemical properties of materials by changing the position or morphology of crystal boundaries. Here, deep ultraviolet light can be used as an energy source to cause the crystal structure on the microtube wall to rearrange and form a more regular lattice orientation. This orderly crystal arrangement not only improves the mechanical strength of the microtubes, but also reduces the effects of defects and impurities. At the same time, through in-situ photochemical bonding, strong chemical bonds can be formed inside the microtubes, further enhancing the stability of their overall structure. Finally, based on the deep ultraviolet light-induced surface passivation technology, the surface defects of the bond-enhanced microtube array are eliminated to obtain a fixed microtube array. Surface passivation is a technology used to reduce surface defects. It can effectively prevent the influence of external environmental factors on the internal structure of the microtubes and extend the service life of the product. In summary, by performing a series of deep ultraviolet light-induced self-assembly steps on the positioning array inside the microtube, we have not only successfully achieved efficient fixation of the Micro-LED microdisplay device, but also provided it with a highly stable and optimized environment.This series of steps work together to ensure that each Micro-LED device in the smartwatch's high-resolution display can work stably for a long time, making an important contribution to the high performance and reliability of the final product. Through the above method, we can see the great potential of deep ultraviolet light-induced self-assembly technology in the field of micro-display device packaging. It not only improves manufacturing accuracy, but also significantly improves product quality, paving the way for the development of miniaturized and highly integrated electronic devices in the future.

[0036] In a specific embodiment, the three-dimensional network structure microtube array is subjected to supramolecular structure assembly based on a preset deep ultraviolet light-induced molecular self-assembly technology to obtain a supramolecular assembled microtube array, comprising: Performing light field modulation on the three-dimensional network structure microtube array through a preset deep ultraviolet light interference pattern to obtain a light field modulated microtube array; Using femtosecond laser pulses to induce multiphoton absorption on the light field modulated microtube array to obtain a multiphoton excited microtube array; Performing thermophoresis manipulation on the multi-photon excited microtube array through a preset temperature gradient field to obtain a thermophoresis manipulated microtube array; Based on micro-nanoscale van der Waals forces, the thermophoresis-controlled microtubule array is molecularly self-assembled and guided to obtain a self-assembled guided microtubule array; The self-assembled guided microtubule array is subjected to supramolecular structural stabilization treatment through deep ultraviolet light-induced cross-linking reaction to obtain a supramolecular assembled microtubule array, wherein the supramolecular assembled microtubule array includes cross-linking density and bonding energy.

[0037] Specifically, in the process of deep ultraviolet light-induced molecular self-assembly of the three-dimensional network structure microtube array, we used a series of carefully designed technical means to realize supramolecular structure assembly, and finally obtained supramolecular assembled microtube array. This process not only involves complex optical and physical phenomena, but also combines the principles of chemical reactions to ensure that each step can accurately control the molecular arrangement and structural characteristics inside the microtube. First, the three-dimensional network structure microtube array is light-field modulated by a preset deep ultraviolet light interference pattern, which is to create a light intensity gradient environment with a specific spatial distribution, thereby obtaining a light field modulated microtube array. The deep ultraviolet light interference pattern uses the phase difference generated by two or more coherent light sources to form a striped structure with alternating light and dark in space. These stripes can produce periodic changes in light intensity on the surface of the microtube, so that some areas are exposed to stronger light, while other areas are relatively weak. For example, when building a high-resolution display screen for a smart watch, we can design a specific interference pattern that can generate a series of parallel arranged high light intensity areas inside the microtube. The effect of this light field modulation can not only activate the photosensitive molecules on the surface of the microtubes, but also provide the necessary conditions for subsequent multi-photon absorption, ensuring that the microenvironment around each Micro-LED device is treated uniformly and controllably. After completing the light field modulation, a femtosecond laser pulse is used to induce multi-photon absorption on the light field modulated microtube array to obtain a multi-photon excited microtube array. A femtosecond laser pulse is a high-intensity light pulse within an extremely short time scale (10^-15 seconds), which can simultaneously excite multiple electrons from the ground state to the excited state, the so-called multi-photon absorption process. In this example, selecting appropriate femtosecond laser parameters, such as wavelength, pulse width, and repetition frequency, can ensure that efficient multi-photon absorption events are triggered inside the microtubes. When multiple photons are absorbed almost simultaneously, their sum of energy is sufficient to overcome the band gap of the material, resulting in significant electronic excitation in the local area. Such multi-photon excitation can not only activate deeper molecular segments, but also trigger a series of subsequent chemical reactions, providing an energy basis for the next step of thermophoresis manipulation. Next, the multi-photon excited microtube array is thermophoretically manipulated by a preset temperature gradient field to obtain a thermophoretically manipulated microtube array. Temperature gradient refers to the phenomenon of temperature differences at different locations in space, which can be artificially created by heating elements or cooling devices. In this case, by establishing a finely regulated temperature gradient field around the microtubes, the excited molecules can be moved in the direction of lower temperature because the low temperature area can provide a lower energy state. For example, if we introduce a mild heat source on one side of the microtube and keep the temperature lower on the other side, the excited molecules will tend to migrate to the low temperature side. This thermophoresis phenomenon helps guide the molecules to move along a predetermined path, ensuring that they can self-assemble in the correct position.Based on the above-mentioned thermophoresis-controlled microtubule array, the micro-nanoscale van der Waals force is further used to guide the molecular self-assembly of the thermophoresis-controlled microtubule array to obtain a self-assembled guided microtubule array. Van der Waals force is a weak interaction force existing between all molecules. Although they are very weak individually, they can play an important role when accumulated at the micro-nanoscale. By rationally designing the shape and functional groups of the molecular segments, the van der Waals attraction between them can be enhanced, prompting the molecules to spontaneously arrange into an ordered structure. For example, functionalized molecular segments containing aromatic rings or polar functional groups can be selected, and these molecules are prone to form non-covalent interactions such as π-π stacking or hydrogen bonds, thereby guiding them to self-assemble according to a specific pattern. The self-assembled structure formed in this way not only has high order and stability, but also can provide a good foundation for the next step of supramolecular structure stabilization treatment. Finally, the self-assembled guided microtubule array is subjected to supramolecular structure stabilization treatment by deep ultraviolet light-induced cross-linking reaction to obtain a supramolecular assembly microtubule array. The cross-linking reaction here refers to the formation of covalent bonds between two or more molecules triggered by light, which permanently connects them together. As an efficient energy source, deep ultraviolet light can activate the active groups in the crosslinker molecules in a short time, so that they react quickly with the surrounding molecular segments. For example, crosslinkers containing double bonds or azide groups can be selected, which will undergo addition polymerization or click chemistry under the action of deep ultraviolet light to form a stable three-dimensional network structure. In this way, not only the mechanical strength of the entire microtube array can be improved, but also its chemical stability and durability can be enhanced. In addition, the crosslinking density and bonding energy can be adjusted by adjusting the irradiation time and intensity of deep ultraviolet light to ensure that the supramolecular assembled microtube array has the best performance characteristics. In summary, by applying deep ultraviolet light-induced molecular self-assembly technology to the three-dimensional network structure microtube array, we not only successfully realized the supramolecular structure assembly, but also provided it with a highly stable environment. This series of steps work together to ensure that each Micro-LED device in the high-resolution display of the smart watch can work stably for a long time, making an important contribution to the high performance and reliability of the final product. Through the above method, we can see the great potential of deep ultraviolet light-induced molecular self-assembly technology in the field of microdisplay device packaging. It not only improves manufacturing precision, but also significantly improves product quality, paving the way for the development of miniaturized and highly integrated electronic devices in the future.

[0038] In a specific embodiment, the encapsulation film layer is constructed on the fixed microtube array by atomic layer deposition technology to obtain an encapsulated target micro display device, including: Based on the in-situ plasma assisted atomic layer deposition technology, an aluminum oxide precursor pulse is injected into the fixed microtube array to obtain an aluminum oxide initial encapsulation layer, and the aluminum oxide initial encapsulation layer is subjected to plasma surface nitridation treatment to obtain a nitrided aluminum oxide barrier layer; Based on pulsed laser deposition technology, a high dielectric constant film layer is constructed on the aluminum oxide nitride barrier layer to obtain a high dielectric microtube array; Depositing a transparent conductive film layer on the high dielectric microtube array by radio frequency magnetron sputtering technology to obtain a conductive microtube array; Based on the atomic layer deposition technology, a flexible protective film layer is constructed on the conductive microtube array to obtain a flexible microtube array, and the flexible microtube array is subjected to ultraviolet ozone treatment to obtain a surface-activated flexible microtube array; A passivation film layer is deposited on the surface activated flexible microtube array based on atomic layer deposition technology to obtain a packaged target micro display device.

[0039] Specifically, in the process of constructing the encapsulation film layer of the fixed microtube array, we used a series of advanced deposition technologies to ensure that each step can accurately provide protection for the Micro-LED microdisplay device and optimize its performance. This complex process not only involves the deposition of multiple materials, but also combines technologies such as plasma-assisted, laser deposition and radio frequency magnetron sputtering. Finally, the entire encapsulation is completed by atomic layer deposition (ALD) technology to obtain the encapsulated target microdisplay device. First, the fixed microtube array is pulse-injected with an aluminum oxide precursor based on the in-situ plasma-assisted atomic layer deposition technology, which is to create an initial aluminum oxide encapsulation layer, that is, an aluminum oxide initial encapsulation layer. In-situ plasma-assisted atomic layer deposition (PE-ALD) is a technology that can generate high-quality thin films at low temperatures. It uses active species in plasma to accelerate the reaction process. In this example, an appropriate aluminum oxide precursor (such as trimethylaluminum or triethylaluminum) is selected, and a uniform and dense aluminum oxide layer is grown layer by layer on the surface of the microtube by precisely controlling its pulse injection time and flow rate. For example, when building a high-resolution display screen for a smart watch, such an aluminum oxide layer can not only serve as a basic protective layer, but also effectively block the intrusion of moisture and oxygen, thereby extending the service life of the Micro-LED device. After the initial encapsulation layer of aluminum oxide is completed, it is subjected to plasma surface nitridation treatment to obtain a nitrided aluminum oxide barrier layer. Nitriding treatment is to introduce nitrogen-containing gas (such as ammonia or nitrogen) to cause a nitridation reaction on part of the aluminum oxide surface in a plasma environment to form a layer of nitrided aluminum oxide (AlN). This step not only enhances the mechanical strength and chemical stability of the surface, but also improves its electrical insulation properties. As an excellent barrier material, aluminum oxide nitride can effectively prevent external harmful substances from penetrating into the microtube while maintaining good optical transparency, which is crucial to ensuring the luminous efficiency of Micro-LED devices. Next, the aluminum oxide nitride barrier layer is constructed with a high dielectric constant film layer based on pulsed laser deposition technology to obtain a high dielectric microtube array. Pulsed laser deposition (PLD) is a technology that evaporates a solid target material by laser and deposits a thin film on a substrate. It can generate high-quality multilayer structures at lower temperatures. Here, a material with a high dielectric constant (such as barium titanate BaTiO3 or hafnium oxide HfO2) is selected as a target material, and one or more layers of high dielectric constant films are deposited on the aluminum nitride oxide barrier layer by PLD technology. These high dielectric films can not only enhance the electrical isolation between microtubes and reduce leakage current, but also improve the electrical performance of the overall device. For example, for smart watch displays, such high dielectric films help improve the contrast and color saturation of the screen, providing clearer and more vivid picture quality. Subsequently, a transparent conductive film layer is deposited on the high dielectric microtube array by radio frequency magnetron sputtering technology to obtain a conductive microtube array.Radio frequency magnetron sputtering (RFsputtering) is a technology widely used in the preparation of transparent conductive oxide (TCO) films. It can achieve uniform and dense film deposition at low temperatures. In this example, indium tin oxide (ITO) or aluminum-doped zinc oxide (AZO) is selected as a sputtering target to deposit a transparent conductive film on the surface of the microtube. This conductive film not only has good conductivity, but also has excellent optical transparency, and can be used as an electrode material to drive the Micro-LED device to emit light. In addition, since RF magnetron sputtering technology allows uniform deposition over a large area, it is very suitable for manufacturing large-area displays, such as high-resolution displays required for smart watches. Furthermore, a flexible protective film layer is constructed on the conductive microtube array based on atomic layer deposition technology to obtain a flexible microtube array, and the flexible microtube array is treated with ultraviolet ozone to obtain a surface-activated flexible microtube array. Atomic layer deposition technology is known for its excellent uniformity and controllability, and is particularly suitable for the deposition of thin films with complex three-dimensional structures. Here, polyimide (PI) or other flexible polymers are selected as protective film materials, and a thin and flexible protective film is deposited on the conductive microtube array by ALD technology. This flexible protective film not only provides an additional physical barrier, but also gives the microtube array a certain degree of bendability and impact resistance. Subsequently, the surface of the flexible protective film is activated by ultraviolet ozone treatment to increase its surface energy and hydrophilicity, which is conducive to the subsequent deposition of the passivation film layer. Finally, the passivation film layer is deposited on the surface-activated flexible microtube array based on the atomic layer deposition technology to obtain the encapsulated target micro-display device. The role of the passivation film layer is to further protect the microtube array from environmental factors, especially to prevent the intrusion of moisture and oxygen. Select a suitable passivation material (such as silicon dioxide SiO2 or silicon nitride SiNx) and deposit a dense and uniform passivation film on the surface-activated flexible microtube array by ALD technology. Such a passivation film can not only improve the long-term stability and reliability of the entire device, but also maintain its optical transparency, ensuring that the luminescence performance of the Micro-LED device is not affected. In summary, by constructing a packaging film layer that combines a series of carefully designed and technical means for the fixed microtube array, we have not only successfully provided multiple protections for each Micro-LED micro-display device, but also significantly improved its electrical and optical performance. This series of steps work together to ensure that each Micro-LED device in the high-resolution display of the smart watch can work stably for a long time, making an important contribution to the high performance and reliability of the final product. Through the above methods, we can see the great potential of atomic layer deposition technology in the field of micro-display device packaging. It not only improves manufacturing accuracy, but also significantly improves product quality, paving the way for the development of miniaturized and highly integrated electronic devices in the future.

[0040] The above describes the micro-tube packaging method of the Micro-LED micro-display device in the embodiment of the present invention. The following describes the micro-tube packaging device of the Micro-LED micro-display device in the embodiment of the present invention. Figure 2 , an embodiment of the micro-LED micro-display device micro-tube packaging device in the embodiment of the present invention includes: A processing module 21 is used to perform femtosecond laser three-dimensional micro-machining on a preset borosilicate glass substrate to obtain an arrayed micro-tube structure; A patterning processing module 22, used for performing hydrophilic and hydrophobic patterning processing on the arrayed microtube structure by a preset plasma surface activation technology to obtain a microtube array with selective infiltration; The transport module 23 is used to use a preset dielectrophoresis driven microfluidic technology to directionally transport the target microdisplay device into the microtube array with selective infiltration to obtain a microtube positioning array; wherein the target microdisplay device is used as a Micro-LED microdisplay device; An assembly module 24 is used to perform deep ultraviolet light-induced self-assembly on the microtube internal positioning array to obtain a fixed microtube array; The construction module 25 is used to construct a packaging film layer on the fixed microtube array by atomic layer deposition technology to obtain a packaged target micro display device.

[0041] In this embodiment, for the specific implementation of each unit in the above device embodiment, please refer to the above method embodiment, which will not be repeated here.

[0042] Reference Figure 3 The present invention also provides a computer device in an embodiment, wherein the internal structure of the computer device can be as follows: Figure 3 As shown. The computer device includes a processor, a memory, a display screen, an input device, a network interface and a database connected through a system bus. Among them, the processor designed by the computer is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the computer device is used to store the corresponding data in this embodiment. The network interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, the above method is implemented.

[0043] Those skilled in the art will understand that Figure 3 The structure shown in the figure is merely a block diagram of a portion of the structure related to the solution of the present invention, and does not constitute a limitation on the computer device to which the solution of the present invention is applied.

[0044] An embodiment of the present invention further provides a computer-readable storage medium on which a computer program is stored, and when the computer program is executed by a processor, the above method is implemented. It can be understood that the computer-readable storage medium in this embodiment can be a volatile readable storage medium or a non-volatile readable storage medium.

[0045] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media provided by the present invention and used in the embodiments may include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM is available in a variety of forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double-speed data rate SDRAM (SSRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM.

[0046] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, device, article or method including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, device, article or method. In the absence of further restrictions, the elements defined by the sentence "including a packaged target microdisplay device" do not exclude the presence of other identical elements in the process, device, article or method including the element.

[0047] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A method for packaging a micro-LED micro-display device micro-tube, characterized in that: The following steps are involved: The preset borosilicate glass substrate is subjected to femtosecond laser three-dimensional micromachining to obtain an arrayed microtube structure; The arrayed microtube structure is subjected to hydrophilic and hydrophobic patterning treatment by a preset plasma surface activation technology to obtain a microtube array with selective wetting; The target micro-display device is directionally transported into a micro-tube array with selective infiltration by using a preset dielectrophoresis-driven microfluidic technology to obtain an intra-micro-tube positioning array; wherein the target micro-display device is used as a Micro-LED micro-display device; Performing deep ultraviolet light-induced self-assembly on the microtubule internal positioning array to obtain a fixed microtubule array; The fixed microtube array is packaged by constructing a film layer through atomic layer deposition technology to obtain a packaged target micro display device.

2. The micro-tube packaging method of the Micro-LED micro-display device according to claim 1, characterized in that: The method of performing femtosecond laser three-dimensional micromachining on a preset borosilicate glass substrate to obtain an arrayed microtube structure comprises: A preset femtosecond laser induced modification technology is used to selectively dope a preset borosilicate glass substrate to obtain a doped modified substrate, and the doped modified substrate is annealed to obtain a stress-released substrate; The stress release substrate is three-dimensionally micro-processed by femtosecond laser ablation technology to obtain an arrayed conical microtube structure, and the arrayed conical microtube structure is chemically etched to obtain an inverted conical microtube array; Based on femtosecond laser light field modulation technology, the photonic crystal structure in the inverted cone microtube array is periodically modulated to obtain an optical waveguide microtube array, and the optical waveguide microtube array is subjected to plasma enhanced chemical vapor deposition treatment to obtain a passivated optical waveguide microtube array; Performing dot solution deposition on the passivated optical waveguide microtube array by using electrospinning technology to obtain a dot-modified microtube array; The surface plasmon coupling structure of the point-modified microtube array is prepared by nanoimprint lithography technology to obtain an SPP-enhanced microtube array, and the SPP-enhanced microtube array is subjected to atomic layer deposition to obtain a protective SPP-enhanced microtube array; The protective SPP enhanced microtube array is subjected to microlens array construction based on two-photon polymerization technology to obtain an arrayed microtube structure.

3. The micro-tube packaging method of the Micro-LED micro-display device according to claim 1, characterized in that: The method of performing hydrophilic-hydrophobic patterning on the arrayed microtube structure by a preset plasma surface activation technology to obtain a microtube array with selective wetting comprises: The arrayed microtubule structure is subjected to oxygen plasma gradient energy bombardment treatment to obtain a surface hydroxylated microtubule structure, and the surface hydroxylated microtubule structure is subjected to plasma enhanced atomic layer etching to obtain a surface micro-nano composite structure; The surface micro-nano composite structure is modified with hydrophilic groups by plasma-induced graft polymerization technology to obtain a surface gradient hydrophilic region, and the surface gradient hydrophilic region is selectively etched by fluorocarbon plasma to obtain an amphiphilic pattern structure; Based on plasma enhanced chemical vapor deposition technology, a multi-level wettability regulation layer is constructed on the amphiphilic pattern structure to obtain a wettability gradient microtube array, and plasma assisted atomic layer deposition is performed on the wettability gradient microtube array to obtain a surface energy modulation structure; The surface energy modulation structure is subjected to amphiphilic molecules orderly arranged by plasma induced self-assembly technology to obtain a surface micro-region structure, and the surface micro-region structure is subjected to plasma enhanced physical vapor deposition to obtain a molecular orientation control layer, wherein the molecular orientation control layer includes a molecular arrangement period, an orientation angle and a structural stability; The molecular orientation control layer is selectively patterned based on plasma-assisted photochemical etching technology to obtain a surface energy gradient structure, and the surface energy gradient structure is subjected to plasma-enhanced chemical vapor deposition to obtain a hydrophilic and hydrophobic pattern array. The hydrophilic and hydrophobic pattern array is subjected to plasma-induced surface modification treatment to obtain a microtube array with selective wetting.

4. The micro-LED micro-display device micro-tube packaging method according to claim 1, characterized in that: The target micro-display device is directedly transported into a micro-tube array with selective infiltration by using a preset dielectrophoresis-driven microfluidic technology to obtain a micro-tube intra-positioning array; wherein the target micro-display device is used as a Micro-LED micro-display device, comprising: Pre-treating the microtube array with selective wetting based on multiphase flow microfluidics technology to obtain a pre-wetted microtube array, and dynamically regulating the wall shear force of the pre-wetted microtube array to obtain a flow field-stabilized microtube array; Applying a non-uniform alternating electric field to the flow field stabilizing microtube array through a microelectrode array to obtain a dielectrophoresis force field microtube array; Directly transporting the Micro-LED micro-display device toward the dielectrophoretic force field microtube array to obtain a dynamic capture microtube array; Based on a preset optical feedback control system, the dynamic capture microtube array is tracked and adjusted in real time to obtain a precisely guided microtube array; Based on the microfluidic inertial impact technology, the precision-guided microtube array is pushed toward the dielectrophoresis force field microtube array in the microtube to obtain the microtube positioning array.

5. The micro-LED micro-display device micro-tube packaging method according to claim 1, characterized in that: The method of performing deep ultraviolet light-induced self-assembly on the microtubule internal positioning array to obtain a fixed microtubule array comprises: Performing deep ultraviolet wavelength modulation spectroscopy on the microtube positioning array to obtain a spectral distribution parameter set, and performing surface photochemical activation on the microtube array based on the spectral distribution parameter set to obtain an activated microtube array; The activated microtubule array is regulated by molecular chain segments through deep ultraviolet light-induced surface grafting technology to obtain a molecular chain segment-modified microtubule array, and a photochemical cross-linking network is constructed based on the molecular chain segment-modified microtubule array to obtain a three-dimensional network structure microtubule array; Based on the preset deep ultraviolet light-induced molecular self-assembly technology, the three-dimensional network structure microtube array is subjected to supramolecular structure assembly to obtain a supramolecular assembled microtube array, and the supramolecular assembled microtube array is subjected to surface energy field regulation to obtain a surface energy gradient microtube array; Performing deep ultraviolet light-induced phase separation treatment on the surface energy gradient microtube array to obtain a phase-separated microtube array, and performing interface stress field regulation on the phase-separated microtube array to obtain an interface structure microtube array; The lattice orientation of the interface structure microtube array is regulated by deep ultraviolet light induced grain boundary reconstruction technology to obtain a grain boundary regulated microtube array, and the grain boundary regulated microtube array is subjected to in-situ photochemical bonding to obtain a bonding-enhanced microtube array; The surface defects of the bonded reinforced microtube array are eliminated based on deep ultraviolet light induced surface passivation technology to obtain a fixed microtube array.

6. The micro-tube packaging method of the Micro-LED micro-display device according to claim 5, characterized in that: The method of performing supramolecular structural assembly on the three-dimensional network structure microtube array based on the preset deep ultraviolet light-induced molecular self-assembly technology to obtain a supramolecular assembled microtube array comprises: Performing light field modulation on the three-dimensional network structure microtube array through a preset deep ultraviolet light interference pattern to obtain a light field modulated microtube array; Using femtosecond laser pulses to induce multiphoton absorption on the light field modulated microtube array to obtain a multiphoton excited microtube array; Performing thermophoresis manipulation on the multi-photon excited microtube array through a preset temperature gradient field to obtain a thermophoresis manipulated microtube array; Based on micro-nanoscale van der Waals forces, the thermophoresis-controlled microtubule array is molecularly self-assembled and guided to obtain a self-assembled guided microtubule array; The self-assembled guided microtubule array is subjected to supramolecular structural stabilization treatment through deep ultraviolet light-induced cross-linking reaction to obtain a supramolecular assembled microtubule array, wherein the supramolecular assembled microtubule array includes cross-linking density and bonding energy.

7. The micro-tube packaging method of the Micro-LED micro-display device according to claim 1, characterized in that: The method of constructing a packaging film layer on the fixed microtube array by atomic layer deposition technology to obtain a packaging target micro display device includes: Based on the in-situ plasma assisted atomic layer deposition technology, an aluminum oxide precursor pulse is injected into the fixed microtube array to obtain an aluminum oxide initial encapsulation layer, and the aluminum oxide initial encapsulation layer is subjected to plasma surface nitridation treatment to obtain a nitrided aluminum oxide barrier layer; Based on pulsed laser deposition technology, a high dielectric constant film layer is constructed on the aluminum oxide nitride barrier layer to obtain a high dielectric microtube array; Depositing a transparent conductive film layer on the high dielectric microtube array by radio frequency magnetron sputtering technology to obtain a conductive microtube array; Based on the atomic layer deposition technology, a flexible protective film layer is constructed on the conductive microtube array to obtain a flexible microtube array, and the flexible microtube array is subjected to ultraviolet ozone treatment to obtain a surface-activated flexible microtube array; A passivation film layer is deposited on the surface activated flexible microtube array based on atomic layer deposition technology to obtain a packaged target micro display device.

8. A micro-LED micro-display device micro-tube packaging device, characterized in that: include: A processing module is used to perform femtosecond laser three-dimensional micro-machining on a preset borosilicate glass substrate to obtain an arrayed microtube structure; A patterning processing module, used for performing hydrophilic and hydrophobic patterning processing on the arrayed microtube structure by a preset plasma surface activation technology to obtain a microtube array with selective wetting; A transport module is used to use a preset dielectrophoresis driven microfluidic technology to directionally transport the target microdisplay device into a microtube array with selective infiltration to obtain an intra-microtube positioning array; wherein the target microdisplay device is used as a Micro-LED microdisplay device; An assembly module, used for performing deep ultraviolet light-induced self-assembly on the microtubule internal positioning array to obtain a fixed microtubule array; The construction module is used to construct a packaging film layer on the fixed microtube array by atomic layer deposition technology to obtain a packaged target micro display device.

9. A computer device comprising a memory and a processor, wherein a computer program is stored in the memory, wherein: When the processor executes the computer program, the steps of the method according to any one of claims 1 to 7 are implemented.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 7 are implemented.

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