Clamping device and cleaning equipment

Abstract

The invention relates to the technical field of quartz melting equipment, in particular to a clamping device and cleaning equipment. According to the clamping device provided by the invention, the fused quartz element can be clamped in a manner of suspending and not contacting the supporting members by utilizing the self weight of the fused quartz element and matching with the first supporting part, the second supporting part, the first positioning member and the second positioning member, so that when the fused quartz element is cleaned, the fused quartz element is not contacted with the supporting members; the outer surface of the fused quartz element is more exposed, and it is ensured that the fused quartz element can be cleaned more comprehensively.

Description

Technical Field

[0001] The present application relates to the technical field of fused quartz equipment, and in particular to a clamping device and a cleaning device. Background Art

[0002] As the core module of the special fused quartz component cleaning equipment, the clamping facilities of the fused quartz components have a direct impact on the efficiency, production capacity and product quality of the process equipment due to their ease of operation and stability. However, in the related art, conventional clamping facilities are integrated assemblies of positioning blocks of various shapes, which have a complex structure, are inconvenient to assemble, and have poor operability. Excessive shielding of the fused quartz components leads to poor cleaning process effects, and the cleaning process is prone to substandard conditions.

[0003] In addition, conventional clamping facilities are usually for one or two fused quartz components and do not have positioning compatibility for fused quartz components of various sizes, such as various thicknesses, which limits the applicability of the process equipment. Summary of the invention

[0004] In view of this, the present application provides a clamping device and a cleaning device, the purpose of which is to solve the above technical problems to a certain extent.

[0005] According to a first aspect of the present application, a clamping device is provided, the clamping device is used to clamp a fused quartz element, and the clamping device comprises:

[0006] A support member, the support member comprising a first support portion and a second support portion connected to each other, the first support portion extending along a first direction, the second support portion extending along a second direction, the first direction and the second direction forming a predetermined angle, the predetermined angle being less than or equal to the side angle of the fused quartz element;

[0007] A first positioning member and a second positioning member, wherein the first positioning member and the second positioning member are respectively arranged on the first supporting portion and the second supporting portion, the first supporting portion is supported on a first side surface of the fused quartz element forming the side angle, and the second supporting portion is supported on a second side surface of the fused quartz element forming the side angle.

[0008] On the basis of the above technical solution, optionally, the first positioning member and the second positioning member are in contact with the first side surface and the second side surface respectively in a line contact manner.

[0009] Based on any of the above technical solutions, optionally, there are multiple first positioning members, and the first positioning members are arranged on the first support portion along the first direction; there are multiple second positioning members, and the second positioning members are arranged on the second support portion along the second direction.

[0010] Based on any of the above technical solutions, optionally, each of the first positioning members can move along the first supporting portion relative to the first direction, and each of the second positioning members can move along the second supporting portion relative to the second direction.

[0011] Based on any of the above technical solutions, optionally, the first supporting portion and the second supporting portion are both formed as hollow frames to expose the side surfaces of the fused quartz element.

[0012] Based on any of the above technical solutions, optionally, the supporting member further includes a first connecting portion and a second connecting portion, the first connecting portion being connected to a side of the first supporting portion away from the second supporting portion, the second connecting portion being connected to a side of the second supporting portion away from the first supporting portion, and the first connecting portion and the second connecting portion being detachably connected to each other.

[0013] On the basis of any of the above technical solutions, optionally, the clamping device further includes a plurality of rod members, each of which is detachably inserted through the first connecting part and the second connecting part to detachably connect the first connecting part and the second connecting part.

[0014] Based on any of the above technical solutions, optionally, the intervals between adjacent rod members can be adjusted.

[0015] Based on any of the above technical solutions, optionally, the rod member has an inert layer forming an outer side of the rod member, and the support member has an inert layer forming an outer side of the support member.

[0016] According to a second aspect of the present application, a cleaning device is provided, the cleaning device comprising the clamping device as described above.

[0017] According to the clamping device provided by the present application, a predetermined angle is formed by utilizing the first supporting portion and the second supporting portion. Since the predetermined angle is less than or equal to the side angle of the fused quartz element, after the first positioning member and the second positioning member are respectively arranged on the first supporting portion and the second supporting portion, the first positioning member and the second positioning member can support the adjacent first side and second side of the fused quartz element, thereby enabling the fused quartz element to be effectively supported by the first positioning member and the second positioning member before the edge corresponding to the side angle reaches the connection position between the first supporting portion and the second supporting portion.

[0018] According to the clamping device provided in the present application, the dead weight of the fused quartz element can be utilized in cooperation with the first supporting portion and the second supporting portion as well as the first positioning member and the second positioning member, so that the fused quartz element can be clamped in a suspended manner without contacting the supporting member. In this way, when the fused quartz element is cleaned, since it does not contact the supporting member, the outer surface of the fused quartz element is more exposed, ensuring that the fused quartz element can be cleaned more comprehensively.

[0019] According to the clamping device provided in the present application, the clamping device can also adapt to fused quartz elements of different sizes, and the fused quartz element only needs to be placed between the first supporting part and the second supporting part from top to bottom.

[0020] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 A schematic diagram showing a three-dimensional view of the clamping device is shown.

[0023] Figure 2 A schematic diagram showing a plan view of a clamping device.

[0024] Figure 3 A schematic diagram showing yet another plan view of the clamping device.

[0025] Figure 4 A schematic diagram showing a partial structure of the clamping device.

[0026] Figure 5 A schematic diagram showing another part of the structure of the clamping device.

[0027] Figure 6 A schematic diagram showing another partial structure of the clamping device.

[0028] Figure 7 A schematic diagram of the clamping device in the state of picking up and placing a fused quartz component is shown.

[0029] Figure 8 A schematic diagram of the clamping device in a clamping state of a fused quartz element is shown.

[0030] Fig. 9 Schematic diagram showing the immersion depth of the clamping device in the fused silica element.

[0031] Fig.10 A schematic diagram showing another partial structure of the clamping device.

[0032] 100-support member; 110-first support portion; 120-second support portion; 130-first connecting portion; 140-second connecting portion; 150-connecting block; 200-first positioning member; 210-T-slot; 300-second positioning member; 400-rod member; 500-fused quartz element; 510-first side surface; 520-second side surface. DETAILED DESCRIPTION

[0033] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0034] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0035] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0036] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0037] According to a first aspect of an embodiment of the present application, a clamping device is provided, and the structure and working principle of the clamping device will be described in detail below.

[0038] According to the clamping device provided in the embodiment of the present application, the clamping device is used to clamp the fused quartz element 500 , and the clamping device includes a supporting member 100 , a first positioning member 200 , and a second positioning member 300 .

[0039] In an embodiment, the support member 100 includes a first support portion 110 and a second support portion 120 connected to each other, the first support portion 110 extends along a first direction, and the second support portion 120 extends along a second direction, and the first direction and the second direction form a predetermined angle, which is less than or equal to the side angle of the fused quartz element 500.

[0040] In the embodiment, the first positioning member 200 and the second positioning member 300 are respectively disposed on the first supporting portion 110 and the second supporting portion 120, the first supporting portion 110 is supported on the first side surface 510 of the fused quartz element 500 forming a side angle, and the second supporting portion 120 is supported on the second side surface 520 of the fused quartz element 500 forming a side angle.

[0041] In this way, according to the clamping device provided in the embodiment of the present application, a predetermined angle is formed by using the first support part 110 and the second support part 120. Since the predetermined angle is less than or equal to the side angle of the fused quartz element 500, after the first positioning member 200 and the second positioning member 300 are respectively set to the first support part 110 and the second support part 120, the first positioning member 200 and the second positioning member 300 can support the adjacent first side surface 510 and the second side surface 520 of the fused quartz element 500, so that the fused quartz element 500 is effectively supported by the first positioning member 200 and the second positioning member 300 before the edge corresponding to the side angle reaches the connection position between the first support part 110 and the second support part 120.

[0042] Therefore, according to the clamping device provided in the embodiment of the present application, the weight of the fused quartz element 500 can be utilized, in cooperation with the first support portion 110 and the second support portion 120 and the first positioning member 200 and the second positioning member 300, to clamp the fused quartz element 500 in a suspended manner without contacting the support member 100. In this way, when the fused quartz element 500 is cleaned, since it does not contact the support member 100, the outer surface of the fused quartz element 500 is more exposed, ensuring that the fused quartz element 500 can be cleaned more comprehensively.

[0043] In addition, according to the clamping device provided in the embodiment of the present application, the clamping device can also adapt to fused quartz elements 500 of different sizes, and the fused quartz element 500 only needs to be placed between the first support portion 110 and the second support portion 120 from top to bottom.

[0044] According to the clamping device provided in the embodiment of the present application, the first positioning member 200 and the second positioning member 300 can respectively contact the first side surface 510 and the second side surface 520 in a line contact manner. In this way, the first positioning member 200 and the second positioning member 300 can support the fused quartz element 500 in a non-surface contact manner, thereby further exposing the outer surface of the fused quartz element 500 to a greater extent, ensuring that the fused quartz element 500 can be cleaned more comprehensively.

[0045] In an embodiment, as an example, the first positioning member 200 and the second positioning member 300 may have the same structure. Taking the first positioning member 200 as an example, a T-shaped groove 210 may be provided on the side of the first positioning member 200 facing the first side surface 510, so that the inner side of the T-shaped groove 210 clamps the fused quartz element 500, and a gap is formed between the corresponding side surface of the fused quartz element 500 and the bottom of the groove for the cleaning liquid to flow through.

[0046] According to the clamping device provided in the embodiment of the present application, the number of the first positioning members 200 can be multiple, and the first positioning members 200 can be arranged on the first support portion 110 along the first direction to improve the stability of supporting the fused quartz element 500. Similarly, the number of the second positioning members 300 can also be multiple, and the second positioning members 300 can be arranged on the second support portion 120 along the second direction to improve the stability of supporting the fused quartz element 500.

[0047] According to the clamping device provided in the embodiment of the present application, each first positioning member 200 can move along the first supporting portion 110 relative to the first direction, so that the interval between adjacent first positioning members 200 can be adjusted, so as to adapt to the fused quartz elements 500 with different sizes on the side, ensuring that the fused quartz elements 500 with different sizes can be effectively supported. Similarly, each second positioning member 300 can also move along the second supporting portion 120 relative to the second direction, so that the interval between adjacent second positioning members 300 can be adjusted, so as to adapt to the fused quartz elements 500 with different sizes on the side, ensuring that the fused quartz elements 500 with different sizes can be effectively supported.

[0048] In the embodiment, the first positioning member 200 may, for example, have a groove disposed on the side facing the first support portion 110, and the groove may be covered on the outer side of the first support portion 110, so that the first positioning member 200 can slide along the first support portion 110, and when the fused quartz element 500 is supported by the first positioning member 200, the first positioning member 200 will be pressed on the first support portion 110 due to the pressure applied by the fused quartz element 500, and the position is relatively fixed. Similarly, the structure and positioning method of the second positioning member 300 may also be the same, and will not be described in detail here.

[0049] According to the clamping device provided in the embodiment of the present application, the first support portion 110 and the second support portion 120 can both be formed as hollow frames to expose the side surfaces of the fused quartz element 500. This hollow structure facilitates the cleaning liquid to pass through the first support portion 110 and the second support portion 120, thereby avoiding obstruction to the cleaning liquid.

[0050] According to the clamping device provided in the embodiment of the present application, the support member 100 may also include a first connection portion 130 and a second connection portion 140. The first connection portion 130 may be connected to a side of the first support portion 110 away from the second support portion 120, and the second connection portion 140 may be connected to a side of the second support portion 120 away from the first support portion 110. The first connection portion 130 and the second connection portion 140 may be detachably connected to each other.

[0051] In this way, according to the clamping device provided in the embodiment of the present application, after the fused quartz element 500 is placed between the first support part 110 and the second support part 120, the first connecting part 130 and the second connecting part 140 can be connected, thereby improving the overall stability of the clamping device. In the embodiment, as an example, the first connecting part 130 and the second connecting part 140 can be indirectly connected through a component, which will be explained in the subsequent description.

[0052] According to the clamping device provided in the embodiment of the present application, the clamping device further includes a plurality of rod members 400, each of which is detachably inserted into the first connection portion 130 and the second connection portion 140 to connect the first connection portion 130 and the second connection portion 140. In the embodiment, the connection between the first connection portion 130 and the second connection portion 140 is achieved by the aforementioned plurality of rod members 400. As an example, the first connection portion 130 and the second connection portion 140 may both include a vertical extension structure and a connection block 150 located at the top of the extension structure (the extension structure may also be hollow), and the connection block 150 may be provided with a plurality of holes arranged along the first horizontal direction. Here, the rod member 400, which is actually a supporting cross bar, may extend along the second horizontal direction, and the first horizontal direction may be perpendicular to the second horizontal direction.

[0053] According to the clamping device provided in the embodiment of the present application, the interval between adjacent rod members 400 can be adjusted. In the embodiment, the interval between adjacent rod members 400 can be adjusted by providing different numbers of holes between different rod members 400.

[0054] According to the clamping device provided in the embodiment of the present application, the rod member 400 may have an inert layer forming the outer side of the rod member 400, and the support member 100 may have an inert layer forming the outer side of the support member 100. In an embodiment, the interior of the rod member 400 may be a metal material, such as iron, copper and other metals, and the exterior may be coated with an inert layer with corrosion resistance, such as a Teflon layer (PTFE). As a result, the rod member 400 and the support member 100 have good structural strength and can resist corrosion from various chemical reagents. Similarly, the structures of the connecting block 150, the first positioning member 200 and the second positioning member 300 may also be arranged in this way, which will not be repeated here.

[0055] According to the clamping device provided in the embodiment of the present application, when the fused quartz element 500 is immersed below the solution, the fused quartz original, the first positioning member 200 and the second positioning member 300 are all in an inclined surface state, ensuring that the fused quartz element 500, the first positioning member 200 and the second positioning member 300 have no residue when the slow pull drying process comes out of the liquid surface.

[0056] According to the clamping device provided in the embodiment of the present application, the crossbar, the first connecting portion 130 and the second connecting portion 140 are at a certain distance from the fused quartz element 500, leaving installation space, which is convenient for taking and placing the fused quartz original and installing and fixing it. It can be convenient for manual installation and mechanical automatic installation.

[0057] According to the clamping device provided in the embodiment of the present application, the side end surface of the fused quartz element 500 is in non-contact with the first positioning member 200 and the second positioning member 300, ensuring that the side end surface of the fused quartz element 500 can also be cleaned, and the T-shaped structural positioning grooves of the first positioning member 200 and the second positioning member 300 are compatible with fused quartz elements 500 of various thicknesses.

[0058] According to the clamping device provided in the embodiment of the present application, the first connecting portion 130 and the second connecting portion 140 also play a role in enhancing the overall strength and stability of the clamping device.

[0059] The clamping device provided in the embodiment of the present application can be applied to the wet cleaning process, drying process, coating process and related equipment of the fused quartz element 500. The clamping device provided in the embodiment of the present application positions the fused quartz element 500 by utilizing the characteristics of the fused quartz element 500 itself, thereby solving the compatibility problem when cleaning fused quartz elements 500 of various specifications, and facilitating the positioning and identification of the fused quartz element 500, ensuring that the fused quartz element 500 is firmly placed. At the same time, the simple positioning method can greatly reduce the difficulty of the operator and improve the production efficiency. Secondly, the wider compatibility allows the equipment to have more process options and higher cost performance.

[0060] According to a second aspect of an embodiment of the present application, a cleaning device is provided, the cleaning device comprising the above clamping device.

[0061] The above are only preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. All equivalent structural changes made by using the contents of the present application specification and drawings under the innovative concept of the present application, or directly / indirectly applied in other related technical fields are included in the protection scope of the present application.

Claims

1. A clamping device, characterized in that: The clamping device is used to clamp the fused quartz element, and the clamping device comprises: A support member, the support member comprising a first support portion and a second support portion connected to each other, the first support portion extending along a first direction, the second support portion extending along a second direction, the first direction and the second direction forming a predetermined angle, the predetermined angle being less than or equal to the side angle of the fused quartz element; A first positioning member and a second positioning member, wherein the first positioning member and the second positioning member are respectively arranged on the first supporting portion and the second supporting portion, the first supporting portion is supported on a first side surface of the fused quartz element forming the side angle, and the second supporting portion is supported on a second side surface of the fused quartz element forming the side angle.

2. The clamping device according to claim 1, characterized in that: The first positioning member and the second positioning member are in line contact with the first side surface and the second side surface, respectively.

3. The clamping device according to claim 1, characterized in that: There are a plurality of first positioning members, and the first positioning members are arranged on the first supporting portion along the first direction. There are a plurality of second positioning members, and the second positioning members are arranged on the second supporting portion along the second direction.

4. The clamping device according to claim 1, characterized in that: Each of the first positioning members is movable along the first supporting portion relative to the first direction, and each of the second positioning members is movable along the second supporting portion relative to the second direction.

5. The clamping device according to claim 1, characterized in that: The first supporting portion and the second supporting portion are both formed as hollow frames to expose the side surfaces of the fused quartz element.

6. The clamping device according to claim 1, characterized in that: The supporting member further includes a first connecting portion and a second connecting portion, wherein the first connecting portion is connected to a side of the first supporting portion away from the second supporting portion, and the second connecting portion is connected to a side of the second supporting portion away from the first supporting portion, and the first connecting portion and the second connecting portion are detachably connected to each other.

7. The clamping device according to claim 6, characterized in that: The clamping device further includes a plurality of rod members, each of which is detachably inserted through the first connecting portion and the second connecting portion to detachably connect the first connecting portion and the second connecting portion.

8. The clamping device according to claim 7, characterized in that: The intervals between adjacent rod members can be adjusted.

9. The clamping device according to claim 8, characterized in that: The rod member has an inert layer forming an outer side of the rod member, and the support member has an inert layer forming an outer side of the support member.

10. A cleaning device, characterized in that: The cleaning equipment comprises the clamping device according to any one of claims 1 to 9.

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