Diamond trimmer and application thereof

Abstract

The invention relates to a diamond dresser and application thereof, and relates to the technical field of chip manufacturing. The diamond dresser comprises a base body, a substrate and a tower body, wherein the substrate is arranged on the base body; the tower body array is arranged on one side, far away from the base body, of the substrate; the tower body comprises a flat tower, a tip tower and a ridge tower; the top end of the flat tower is provided with a plane, the top end of the sharp tower is provided with a sharp corner, and the top end of the ridge tower is provided with ridges. A flat tower, a tip tower and a ridge tower which are different in shape are arranged in a tower body, the top end of the flat tower is provided with a plane, the pad roughness can be controlled through the height difference between the flat tower and the tip tower, the top end of the tip tower is provided with a sharp corner, the effect of a tool bit and the main force for grinding the pad can be achieved, and the top end of the ridge tower is provided with ridges which can serve as the tool bit and participate in the grinding process. And meanwhile, the ridge structure can clean pad scraps, the effect similar to a brush is achieved, the three parts are matched with one another, the PCR of the diamond dresser during pad grinding is remarkably improved, and the grinding and cleaning capacity of the diamond dresser is improved.

Description

Technical Field

[0001] The present application relates to the field of chip manufacturing technology, and in particular to a diamond dresser and its application. Background Art

[0002] In the manufacturing process of semiconductor wafers, chemical mechanical polishing (CMP) is an essential process. The flatter the CMP surface, the thinner the line width that can be manufactured. With the advent of the era of feature line widths below 10 nanometers, the CMP process requires higher stability and yield. This requires that in addition to the high quality of the manufacturing equipment itself, the three major consumables of the CMP process, namely, slurry, pad, and diamond dresser, must also continuously improve their quality stability to meet the ever-increasing quality requirements.

[0003] The main function of the diamond dresser is to grind the pad to prevent it from being "glazed". However, the removal rate (PCR) of the existing advanced process diamond dressers when grinding the pad is generally not high, and the grinding effect is not ideal. Summary of the invention

[0004] The present application provides a diamond dresser and application thereof, so as to solve the problem in the related art that the removal rate (PCR) of the diamond dresser when grinding the pad is generally low and the grinding effect is not ideal.

[0005] In a first aspect, the present application provides a diamond dresser, comprising:

[0006] matrix;

[0007] a substrate disposed on the base; and

[0008] A tower body, wherein the tower body array is arranged on a side of the substrate away from the base body;

[0009] Wherein, the tower body includes a flat tower, a spire and a prism tower;

[0010] The top of the flat tower has a plane, the top of the pointed tower has a sharp corner, and the top of the prism tower has an ridge line.

[0011] The present application arranges flat towers, pointed towers and prism towers of different shapes in a tower body, wherein the top of the flat tower has a plane which can control the pad roughness by the height difference with the pointed tower, the top of the pointed tower has a sharp corner which can act as a cutter head and is the main force for grinding the pad, and the top of the prism tower has an edge which can act as a cutter head and participate in the grinding process, and at the same time, its edge structure can clean pad debris and play a role similar to a brush. The three cooperate with each other to significantly increase the PCR of the diamond dresser when grinding the pad, thereby improving the grinding and cleaning capabilities of the diamond dresser.

[0012] It should be noted that the tower body can be made on the upper surface of the substrate by laser engraving. Non-contact processing with the substrate can reduce deformation and internal stress of the substrate. No mold pressing and sintering is required, which avoids the possibility of damage to the tower body structure during demolding. The parameters of the tower body can also be adjusted according to the actual use of the trimmer without re-opening the mold, thereby ensuring the uniformity and consistency of the tower body.

[0013] The substrate can be manufactured by a pressing process, and the pressing process is mainly achieved by pressureless sintering, wherein pressureless sintering refers to a method of sintering by heating a product under normal pressure.

[0014] The tower body can be formed by laser engraving on the upper surface of the substrate. After laser engraving, a group of regularly arranged diamond-shaped pyramids are formed on the upper surface of the substrate, which is the tower body. The tower body is a hexagonal pyramid. The laser power and engraving depth can be adjusted to ensure that the size of the processed tower body is within the tolerance range of the micron level. By changing the parameters such as the size and height difference of the tower body, the characteristics of the dresser in the CMP process can be adjusted, especially affecting the removal rate (PCR) and the surface roughness (Ra) of the polishing pad.

[0015] In the entire tower, the ratio of flat towers to spires is (2.5~3.5):1.

[0016] In some embodiments, the number of the prisms in the tower body accounts for 10% to 75%. The presence of prisms can significantly improve the PCR of the diamond dresser, because its proportion is the proportion of the flat towers replaced. With fewer flat towers and more prisms, the tower-shaped structures involved in pad grinding increase, and the grinding amount increases. When the number of prisms is within this range, the PCR improvement effect of the diamond dresser is better.

[0017] In some embodiments, the number of the prisms in the tower body accounts for 25% to 50%. When the number of prisms is within this range, the PCR of the diamond dresser is improved most significantly. On the other hand, as the number of prisms increases, it is easier to clean pad debris, playing a role similar to a brush. Therefore, the prism structure can also integrate the function of a blue brush or a black brush into the diamond dresser.

[0018] In some embodiments, the ridgeline length of the prism tower is 50 μm to 300 μm. The ridgeline length of the prism tower has a great influence on the performance of cleaning pad debris. Within this range, the cleaning ability of the diamond dresser can be improved.

[0019] In some embodiments, the tower body height of the prism tower is 100 μm to 150 μm. The tower body height of the prism tower has a great influence on the PCR of the diamond dresser. Within this range, the PCR of the diamond dresser can be improved.

[0020] In some embodiments, the prisms are spaced apart on the substrate. Since the diamond trimmer is constantly moving and rotating during use, the spaced apart distribution of the prisms on the substrate can make the PCR of the diamond trimmer in motion at different angles uniform, thereby improving the uniformity and yield rate of chip processing.

[0021] In some embodiments, the tower body further comprises a broken tower, which is arranged at the periphery of the tower body array, and the broken tower comprises a broken tower body. By arranging the broken tower at the periphery of the tower body array, the PCR of the diamond dresser can be improved by utilizing the different morphology of the broken tower from that of other tower bodies.

[0022] In some embodiments, the material of the substrate is consistent with that of the tower body. The substrate and the tower body can be integrally formed, and the tower body is formed on the substrate by laser engraving to improve the bonding ability between the substrate and the tower body.

[0023] In some embodiments, the material of the substrate includes ceramic or diamond. The ceramic powder is a mixture of one or more of silicon carbide, boron carbide, diamond and phenolic resin, the purpose of which is to enhance the sintering strength and increase the initial nucleation density of the CVD coating. When the ceramic powder is a mixture of silicon carbide, boron carbide, diamond and phenolic resin, the ceramic powder includes 90% to 95% silicon carbide, 0.5% to 2% boron carbide, 0.1 to 0.5% diamond powder, and 3% to 5% phenolic resin by weight percentage. Ceramic materials such as silicon carbide are selected, which have the characteristics of high hardness, good heat resistance, good toughness and strong acid and alkali resistance, and because silicon carbide and diamond are in the same main group (C, Si) of the periodic table, the thermal expansion coefficient is close, which can ensure the formation of a chemical bond between the two, strong bonding force, and not easy to fall off. Choose diamond materials such as single crystal diamond or polycrystalline diamond materials. Since the tower body after processing is made of diamond material, there is no need to use CVD diamond film in the later stage to avoid sharpness dulling caused by coating. At the same time, it fundamentally eliminates the problem of partial falling off of diamonds due to insufficient bonding between the diamond film and the substrate.

[0024] When ceramic materials are selected to prepare the substrate and the tower body, a micron diamond film protective layer can be deposited on the surface of the ceramic substrate to improve the stability and life of the dresser. The diamond film protective layer includes diamond particles with a particle size of 1 to 5 microns. The micron-level diamond film coating is prepared by microwave plasma chemical vapor deposition (MPCVD). The preparation process is: first, the ceramic substrate is ultrasonically cleaned with acetone alcohol, then ultrasonic nuclei are induced in a diamond micropowder suspension, the substrate is dried using a low-pressure, pure nitrogen flow, and then the ceramic substrate is placed in an MPCVD (Microwave Plasma Chemical Vapor Deposition) cavity. Finally, a high-purity mixed gas of 5N-level methane and hydrogen is introduced into the vacuum cavity with a high vacuum degree, and the microwave energy transmitted to the reaction cavity by waveguide and antenna is used to excite the gas in the cavity so that it is ionized into plasma, generating various neutral carbon-containing precursor active groups that can deposit diamond films, and at the same time heating the substrate, and finally depositing a diamond film on the substrate.

[0025] During the production of the diamond dresser, the lower surface of the substrate can be etched. Etching the back side of the substrate, i.e., the lower surface, can increase the surface roughness and surface area, increase the contact area between the substrate and the adhesive, and enhance the bonding strength between the substrate and the substrate. The substrate can be made of stainless steel, and the stainless steel substrate is passivated to reduce metal corrosion or rust. The substrate is a round 304 stainless steel with a diameter of 108 mm and a thickness of 6 mm. The back side is punched with holes to attach to the carrier arm of the CMP polisher.

[0026] The substrate can be cylindrical and assembled on a stainless steel substrate; the substrate is divided into five equal parts with the center as the origin, and multiple substrates are assembled on the substrate, at this time, the substrates are spaced equidistantly at 72°. The ceramic substrate can also be a fan-shaped ring structure, and multiple fan-shaped ring substrates are assembled in a ring shape around the center of the stainless steel substrate. The substrate can be one or more layers, presenting a "Bagua" structure. Under the condition of a certain substrate quality, compared with a cylindrical substrate, the fan-shaped ring structure has a larger substrate surface area, enhanced bonding strength with the stainless steel substrate, and increased contact area with the polishing pad, which can speed up the grinding efficiency; and the thickness is thinner, and the total thickness of the manufactured diamond dresser is closer to the thickness of the traditional dresser, which is convenient for the replacement and use of CMP equipment.

[0027] In a second aspect, the present application provides an application of the diamond dresser of the first aspect in chip manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 This is a schematic diagram of the structure of a diamond dresser according to an embodiment of the present application.

[0030] Figure 2 Schematic diagram of the structure of a diamond dresser according to an embodiment of the present application.

[0031] Figure 3 Schematic diagram of the structure of a diamond dresser according to an embodiment of the present application.

[0032] Figure 4 This is a schematic diagram of the tower structure of a diamond dresser according to an embodiment of the present application.

[0033] Figure 5 This is a schematic diagram of the prism structure of a diamond dresser according to an embodiment of the present application.

[0034] Figure 6 This is a front view of a prism of a diamond dresser according to an embodiment of the present application.

[0035] Figure 7 A side view of a prism of a diamond dresser according to an embodiment of the present application.

[0036] Figure 8 A top view of a prism of a diamond dresser according to an embodiment of the present application.

[0037] Description of the accompanying drawings:

[0038] 100 diamond dresser; 1 base body; 2 substrate; 3 tower body; 31 flat tower; 32 pointed tower; 33 prism tower; 34 broken tower. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0040] In the manufacturing process of semiconductor wafers, chemical mechanical polishing (CMP) is an essential process. The flatter the CMP surface, the thinner the line width that can be manufactured. With the advent of the era of feature line widths below 10 nanometers, the CMP process requires higher stability and yield. This requires that in addition to the high quality of the manufacturing equipment itself, the three major consumables of the CMP process, namely, slurry, pad, and diamond dresser, must also continuously improve their quality stability to meet the ever-increasing quality requirements.

[0041] The main function of the diamond dresser is to grind the pad to prevent it from being "glazed". However, the removal rate (PCR) of the existing diamond dressers when grinding the pad is generally not high, and the grinding effect is not ideal.

[0042] Currently, for laser engraving ceramics to form microstructures, if one wants to improve PCR, the main method is to increase the height of the microstructure, but this does not improve PCR ideally.

[0043] In view of this, the present application provides a diamond dresser and application thereof to solve the problem in the related art that the removal rate (PCR) of the diamond dresser when grinding the pad is generally low and the grinding effect is not ideal.

[0044] First, as Figures 1 to 8 As shown, the present application provides a diamond dresser 100, comprising:

[0045] Matrix 1;

[0046] a substrate 2, wherein the substrate 2 is disposed on the base 1; and

[0047] Tower bodies 3, wherein the tower bodies 3 are arranged in an array on a side of the substrate 2 away from the base body 1;

[0048] The tower body 3 includes a flat tower 31, a spire 32 and a prism tower 33;

[0049] The top of the flat tower 31 has a plane, the top of the pointed tower 32 has a sharp corner, and the top of the prism tower 33 has an ridgeline.

[0050] The present application arranges a flat tower 31, a pointed tower 32 and a prism tower 33 of different shapes in the tower body 3, wherein the top of the flat tower 31 has a plane which can control the pad roughness by the height difference with the pointed tower, the top of the pointed tower 32 has a sharp corner which can act as a cutter head and is the main force for grinding the pad, and the top of the prism tower 33 has an edge which can act as a cutter head and participate in the grinding process, and at the same time, its edge structure can clean the pad debris and play a role similar to a brush. The three cooperate with each other to significantly increase the PCR of the diamond dresser 100 when grinding the pad, thereby improving the grinding and cleaning capabilities of the diamond dresser 100.

[0051] It should be noted that the tower body 3 can be made on the upper surface of the substrate 2 by laser engraving. Non-contact processing with the substrate 2 can reduce deformation and internal stress of the substrate 2. No mold pressing and sintering is required, which avoids the possibility of structural damage to the tower body 3 during the demolding process. The parameters of the tower body 3 can also be adjusted according to the actual use of the trimmer without re-opening the mold, thereby ensuring the uniformity and consistency of the tower body 3.

[0052] The substrate 2 can be manufactured by a pressing process, and the pressing process is mainly achieved by pressureless sintering, wherein pressureless sintering refers to a method of sintering by heating a product under normal pressure.

[0053] The tower body 3 can be formed by laser engraving on the upper surface of the substrate 2. After laser engraving, the upper surface of the substrate 2 forms a group of regularly arranged diamond-shaped pyramids, that is, the tower body 3, which is a hexagonal pyramid. The laser power and engraving depth can be adjusted to ensure that the size of the processed tower body 3 is within the tolerance range of the micron level. By changing the parameters such as the size and height difference of the tower body 3, the characteristics of the dresser in the CMP process can be adjusted, especially affecting the removal rate (PCR) and the surface roughness (Ra) of the polishing pad.

[0054] In the entire tower body 3 , the ratio of the number of flat towers 31 to that of pointed towers 32 is (2.5-3.5):1.

[0055] In combination with the first aspect, in some embodiments provided in the present application, the number of the prisms 33 in the tower body 3 accounts for 10% to 75%. The presence of the prisms 33 can significantly improve the PCR of the diamond dresser 100, because its proportion is the proportion of the flat towers 32 replaced, the flat towers 32 are reduced, the prisms 33 are increased, the tower-shaped structures involved in pad grinding are increased, and the grinding amount is increased. When the number of prisms 33 is within this range, the PCR improvement effect of the diamond dresser 100 is better.

[0056] In combination with the first aspect, in some embodiments provided in the present application, the number of the prisms 33 accounts for 25% to 50% of the number of the prisms 33 in the turret body 3. When the number of prisms 33 is within this range, on the one hand, the improvement of the PCR of the diamond dresser 100 is most significant, and on the other hand, as the number of prisms 33 increases, it is easier to clean pad debris, playing a role similar to a brush, so the prism structure also integrates the function of a blue brush or a black brush into the diamond dresser.

[0057] In combination with the first aspect, in some embodiments provided in the present application, the ridge length of the prism 33 is 50 μm to 300 μm. The ridge length of the prism 33 has a great influence on the performance of cleaning pad debris. Within this range, the cleaning ability of the diamond dresser can be improved.

[0058] In combination with the first aspect, in some embodiments provided in the present application, the tower body 3 of the prism 33 has a height of 100 μm to 150 μm. The height of the tower body 3 of the prism 33 has a great influence on the PCR of the diamond dresser 100. Within this range, the PCR of the diamond dresser 100 can be improved.

[0059] In combination with the first aspect, in some embodiments provided in the present application, the prisms 33 are spaced apart on the substrate 2. Since the diamond dresser 100 is constantly moving and rotating during use, the prisms 33 are spaced apart on the substrate 2 so that the PCR of the diamond dresser 100 at different angles in the moving state is uniform, thereby improving the uniformity and yield rate of chip processing.

[0060] In combination with the first aspect, in some embodiments provided in the present application, the tower body 3 further comprises a broken tower 34, which is arranged at the periphery of the tower body 3 array, and the broken tower 34 comprises a broken tower body 3. By arranging the broken tower 34 at the periphery of the tower body 3 array, the morphology of the broken tower 34 can be different from that of other tower bodies 3, thereby improving the PCR of the diamond dresser 100.

[0061] In combination with the first aspect, in some embodiments provided in the present application, the material of the substrate 2 is consistent with the material of the tower body 3. The material of the substrate 2 is consistent with the material of the tower body 3 and can be integrally formed, and the tower body 3 is formed on the substrate 2 by laser engraving, thereby improving the bonding ability between the substrate 2 and the tower body 3.

[0062] In combination with the first aspect, in some embodiments provided in the present application, the material of the substrate 2 includes ceramic or diamond. The ceramic powder is a mixture of one or more of silicon carbide, boron carbide, diamond and phenolic resin, the purpose of which is to enhance the sintering strength and increase the initial nucleation density of the CVD coating. When the ceramic powder is a mixture of silicon carbide, boron carbide, diamond and phenolic resin, the ceramic powder includes 90% to 95% silicon carbide, 0.5% to 2% boron carbide, 0.1 to 0.5% diamond powder, and 3% to 5% phenolic resin by weight percentage. Ceramic materials such as silicon carbide are selected, which have the characteristics of high hardness, good heat resistance, good toughness and strong acid and alkali resistance, and because silicon carbide and diamond are in the same main group (C, Si) of the periodic table, the thermal expansion coefficient is close, which can ensure the formation of a chemical bond between the two, strong bonding force, and not easy to fall off. Diamond materials such as single crystal diamond or polycrystalline diamond are selected. Since the tower body 3 after processing is made of diamond material itself, there is no need to coat the diamond film with CVD in the later stage, thus avoiding the sharpness dulling caused by coating. At the same time, the problem of partial falling off of diamonds due to insufficient bonding between the diamond film and the substrate 2 is fundamentally eliminated.

[0063] When ceramic materials are selected to prepare the substrate 2 and the tower body 3, a micron diamond film protective layer can be deposited on the upper surface of the substrate 2 to improve the stability and life of the dresser. The diamond film protective layer includes diamond particles, the diamond particle size is 1 to 5 microns, and the micron-level diamond film coating is prepared by microwave plasma chemical vapor deposition (MPCVD). The preparation process is: first, the substrate 2 is ultrasonically cleaned with acetone alcohol, then ultrasonic nuclei are induced in a diamond micropowder suspension, and the substrate 2 is dried using a low-pressure, pure nitrogen flow. Then, the substrate 2 is placed in an MPCVD (Microwave Plasma Chemical Vapor Deposition) cavity, and finally, a high-purity mixed gas of 5N-level methane and hydrogen is introduced into the vacuum cavity with a high vacuum degree, and the microwave energy transmitted to the reaction cavity by waveguide and antenna is used to excite the gas in the cavity so that it is ionized into plasma, and various neutral carbon-containing precursor active groups that can deposit diamond films are generated, and the substrate 2 is heated at the same time, and finally a diamond film is deposited on the substrate.

[0064] During the manufacturing process of the diamond dresser 100, the lower surface of the substrate 2 can be etched. Etching the back side of the substrate 2, i.e., the lower surface, can increase the surface roughness and surface area, increase the contact area between the substrate 2 and the adhesive, and enhance the bonding strength between the substrate 2 and the base 1. The base 1 can be made of stainless steel, and the stainless steel base 1 is passivated to reduce metal corrosion or rust. The base 1 is a round 304 stainless steel with a diameter of 108 mm and a thickness of 6 mm. The back side is punched with holes to be attached to the carrier arm of the CMP polisher.

[0065] The substrate 2 can be cylindrical and assembled on the stainless steel substrate 1; the substrate 1 is divided into five equal parts with the center as the origin, and multiple substrates 2 are assembled on the substrate 1, and the substrates 2 are spaced equidistantly at 72°. The substrate 2 can also be in a fan-shaped ring structure, and multiple fan-shaped ring substrates 2 are assembled in a ring shape around the center of the stainless steel substrate 1. The substrate 2 can be one layer or more layers, presenting a "Bagua" structure. Under the condition that the quality of the substrate 2 is certain, compared with the cylindrical substrate 2, the surface area of ​​the substrate 2 with a fan-shaped ring structure is larger, the bonding strength with the stainless steel substrate 1 is enhanced, and the contact area with the grinding pad is increased, which can speed up the grinding efficiency; and the thickness is thinner, and the total thickness of the manufactured diamond dresser 100 is closer to the thickness of the traditional dresser, which is convenient for the replacement and use of CMP equipment.

[0066] In a second aspect, the present application provides an application of the diamond dresser 100 according to the first aspect in chip manufacturing.

[0067] The technical solution provided in this application is described in detail below in conjunction with embodiments.

[0068] Embodiment 1:

[0069] Embodiment 1 of the present application provides a diamond dresser, comprising:

[0070] The base body is made of 304 stainless steel;

[0071] Substrates, made of diamond, five in total, distributed on the base body in a cylindrical shape at intervals; and

[0072] A tower body, wherein the tower body array is arranged on a side of the substrate away from the base body, the tower body includes a flat tower (with a flat top), a pointed tower (with a sharp corner at the top) and a prism tower (with a ridge at the top), the number ratio of the flat tower to the pointed tower is 2.5:1, the number of the prism towers in the whole tower body accounts for 10%, and a circle of broken towers is arranged on the periphery of the tower body;

[0073] The prisms have an edge length of 50 μm, a tower body height of 100 μm, and the prisms are distributed at intervals on the substrate;

[0074] The height of the flat towers is 60 μm, the height of the steeple is 100 μm, and the flat towers and the steeple are distributed at intervals on the substrate.

[0075] Embodiment 2:

[0076] Embodiment 2 of the present application provides a diamond dresser, comprising:

[0077] The base body is made of 304 stainless steel;

[0078] Substrates, made of diamond, five in total, distributed on the base body in a cylindrical shape at intervals; and

[0079] A tower body, wherein the tower body array is arranged on a side of the substrate away from the base body, the tower body includes a flat tower (with a flat top), a pointed tower (with a sharp corner at the top) and a prism tower (with a ridge at the top), the number ratio of the flat tower to the pointed tower is 3.5:1, the number of the prism towers in the whole tower body accounts for 75%, and a circle of broken towers is arranged on the periphery of the tower body;

[0080] The prisms have an edge length of 300 μm, a tower body height of 150 μm, and the prisms are distributed at intervals on the substrate;

[0081] The height of the flat towers is 100 μm, the height of the steeple is 150 μm, and the flat towers and the steeple are distributed at intervals on the substrate.

[0082] Example 3

[0083] Embodiment 3 of the present application provides a diamond dresser, comprising:

[0084] The base body is made of 304 stainless steel;

[0085] Substrates, made of diamond, five in total, distributed on the base body in a cylindrical shape at intervals; and

[0086] A tower body, wherein the tower body array is arranged on a side of the substrate away from the base body, the tower body includes a flat tower (with a flat top), a pointed tower (with a sharp corner at the top) and a prism tower (with a ridge at the top), the number ratio of the flat tower to the pointed tower is 3:1, the number of the prism towers in the whole tower body accounts for 50%, and a circle of broken towers is arranged on the periphery of the tower body;

[0087] The prisms have an edge length of 200 μm, a tower body height of 120 μm, and the prisms are distributed at intervals on the substrate;

[0088] The height of the flat towers is 80 μm, the height of the steeple is 120 μm, and the flat towers and the steeple are distributed at intervals on the substrate.

[0089] Example 4

[0090] Embodiment 4 of the present application provides a diamond dresser, comprising:

[0091] The base body is made of 304 stainless steel;

[0092] Substrates, made of diamond, five in total, distributed on the base body in a cylindrical shape at intervals; and

[0093] A tower body, wherein the tower body array is arranged on a side of the substrate away from the base body, the tower body includes a flat tower (with a flat top), a pointed tower (with a sharp corner at the top) and a prism tower (with a ridge at the top), the number ratio of the flat tower to the pointed tower is 3:1, the number of the prism towers in the whole tower body accounts for 25%, and a circle of broken towers is arranged on the periphery of the tower body;

[0094] The prisms have an edge length of 150 μm, a tower body height of 120 μm, and the prisms are distributed at intervals on the substrate;

[0095] The height of the flat towers is 80 μm, the height of the steeple is 120 μm, and the flat towers and the steeple are distributed at intervals on the substrate.

[0096] Example 5

[0097] Embodiment 5 of the present application provides a diamond dresser, comprising:

[0098] The base body is made of 304 stainless steel;

[0099] Substrates, made of diamond, five in total, distributed on the base body in a cylindrical shape at intervals; and

[0100] A tower body, wherein the tower body array is arranged on a side of the substrate away from the base body, the tower body includes a flat tower (with a flat top), a pointed tower (with a sharp corner at the top) and a prism tower (with a ridge at the top), the number ratio of the flat tower to the pointed tower is 3:1, the number of the prism towers in the whole tower body accounts for 40%, and a circle of broken towers is arranged on the periphery of the tower body;

[0101] The prisms have an edge length of 150 μm, a tower body height of 120 μm, and the prisms are distributed at intervals on the substrate;

[0102] The height of the flat towers is 80 μm, the height of the steeple is 120 μm, and the flat towers and the steeple are distributed at intervals on the substrate.

[0103] Comparative Example 1

[0104] Comparative Example 1 of the present application provides a diamond dresser, which is similar to Example 1, except that it does not contain a prism.

[0105] Performance Test:

[0106] The diamond dressers of Examples 1 to 5 and Comparative Example 1 were used in a CMP process to test the pad removal rate (PCR) thereof using an abrasion tester. The specific test method was as follows:

[0107] (1) Bake the standard PAD for testing in an oven at 70°C for 30 minutes, take out the baked PAD and weigh it, and record the initial value for later use;

[0108] (2) Stick double-sided tape on the weighed PAD, scrape it flat with a rubber scraper, and avoid bubbles. Then stick it on the grinding carrier, pay attention to concentricity, and prevent the generation of bonding bubbles;

[0109] (3) Setting the parameters of the testing machine: grinding speed 250, peristaltic pump speed 70, and abrasion time 1 hour;

[0110] (4) After the abrasion tester stops at the set time, remove the PAD, remove the adhesive and bake it in an oven at 70°C for 30 minutes. Take out the baked PAD and weigh it, and record the weight after the grinding test;

[0111] (5) Subtract the weight after the test from the initial weight, and record the difference as the PCR value.

[0112] (6) Use a roughness tester to test the pad roughness Ra value and take the average value of the five points.

[0113] The test results are shown in Table 1.

[0114] Table 1 PCR of Examples 1 to 5 and Comparative Example 1

[0115] PCR(g / h) Ra(μm) Example 1 17.3g / h 4.593 Example 2 34.1g / h 6.006 Example 3 33.5g / h 5.834 Example 4 26.6g / h 5.248 Example 5 33.1g / h 5.592 Comparative Example 1 10.3g / h 3.902

[0116] As can be seen from Table 1, the diamond dressers of Examples 1 to 5 contain prisms, and their PCR is significantly improved compared with the comparative example 1 without prisms, which indicates that the addition of prisms can significantly improve the PCR of the diamond dresser.

[0117] In summary, by arranging flat towers 31, pointed towers 32 and prism towers 33 of different shapes in the tower body 3, the flat tower 31 has a plane at the top which can control the pad roughness by the height difference with the pointed tower, the pointed tower 32 has a sharp corner at the top which can play the role of a cutter head, the main force of grinding the pad, the prism tower 33 has an edge line at the top which can be used as a cutter head and participate in the grinding process, and at the same time, its edge line structure can clean the pad debris and play a role similar to a brush. The three cooperate with each other, which can significantly increase the PCR of the diamond dresser 100 when grinding the pad, and improve the grinding and cleaning capabilities of the diamond dresser 100.

[0118] In the description of this specification, the description with reference to the terms "one embodiment / method", "some embodiments / methods", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment / method or example are included in at least one embodiment / method or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment / method or example. Moreover, the specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments / methods or examples. In addition, those skilled in the art may combine and combine the different embodiments / methods or examples described in this specification and the features of the different embodiments / methods or examples, unless they are contradictory.

[0119] It should be noted that, in the present application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or equipment. In the absence of more restrictions, the elements defined by the sentence "comprise one..." do not exclude the existence of other identical elements in the process, method, article or equipment including the elements. In the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically stipulated.

[0120] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. A diamond dresser, characterized in that: include: matrix; A substrate, the substrate being disposed on the base; as well as A tower body, wherein the tower body array is arranged on a side of the substrate away from the base body; Wherein, the tower body includes a flat tower, a spire and a prism tower; The top of the flat tower has a plane, the top of the pointed tower has a sharp corner, and the top of the prism tower has an ridge line.

2. The diamond dresser according to claim 1, characterized in that: The number of the prisms accounts for 10% to 75% of the number of the tower body.

3. The diamond dresser according to claim 2, characterized in that: The number of the prism towers accounts for 25% to 50% of the tower body.

4. The diamond dresser according to claim 1, characterized in that: The ridge length of the prism tower is 50 μm to 300 μm.

5. The diamond dresser according to claim 1, characterized in that: The tower body height of the prism tower is 100 μm to 150 μm.

6. The diamond dresser according to claim 1, characterized in that: The prisms are distributed at intervals on the substrate.

7. The diamond dresser according to claim 1, characterized in that: The tower body also includes a broken tower, which is arranged at the periphery of the tower body array and includes a broken tower body.

8. The diamond dresser according to claim 1, characterized in that: The material of the substrate is consistent with that of the tower body.

9. The diamond dresser according to claim 8, characterized in that: The material of the substrate includes ceramic or diamond.

10. Use of the diamond dresser according to claim 1 in chip manufacturing.

Images