Conveying device for semiconductor device processing

Abstract

The invention discloses a conveying device for semiconductor device processing, and relates to the technical field of conveying. Comprising a base plate, a main frame is movably connected to the upper end of the base plate, a sleeve shell is fixedly connected to the surface of the main frame, and a conveying frame is rotationally connected to the surface of one end of the main frame. The main frame accessory structure can be matched with the conveying frame accessory structure to control lifting and overturning of the conveying belt, so that the semiconductor device can be lifted and conveyed to a specified height, defective products or residual products can be discharged, or residual garbage can be guided, the subsequent cleaning workload is reduced, and the working efficiency is improved. And in cooperation with a sleeve shell accessory structure, the surface of the conveying device can be further cleaned.

Description

Technical Field

[0001] The present invention relates to the field of conveying technology, and in particular to a conveying device for processing semiconductor devices. Background Art

[0002] Currently, semiconductor devices are mostly transported using conveyor belts. However, as the use time of the conveyor belt increases and impurities drop onto the surface of the conveyor belt after processing of the semiconductor devices, the conveyor belt will become dirty after a long time. In addition, hard impurities attached to the outer surface of the conveyor belt may damage the semiconductor devices, so it is often necessary to arrange for mechanical or manual cleaning.

[0003] The invention patent with public number CN115215066B discloses a self-cleaning conveying device for the production and processing of semiconductor devices. It uses a collection box. Cleaning scraper block 1 and cleaning scraper block 2 located in the right collection box will scrape off some impurities attached to the outer surface of the conveyor belt. The scraped impurities will fall downward into the collection box through the inclined surface of the top of cleaning scraper block 1 and cleaning scraper block 2.

[0004] The above-mentioned prior art parts have certain shortcomings in actual use. Although they can perform certain scraping operations on the impurities on the surface of the conveyor belt, they can only guide the impurities to fall into the collection box through the fixed inclined surfaces on the top of the cleaning scraper block 1 and the cleaning scraper block 2. This structure is inconvenient to adjust and cannot be changed according to user needs. Summary of the invention

[0005] The object of the present invention is to provide a conveying device for semiconductor device processing to solve the above-mentioned technical problems.

[0006] The purpose of the present invention can be achieved through the following technical solutions: A conveying device for processing semiconductor devices, comprising a pad, the upper end of the pad is movably connected to a main frame, the surface of the main frame is fixedly connected to a sleeve, and one end surface of the main frame is rotatably connected to a conveying frame; The bottom end surface of the main frame is symmetrically welded and fixed with connecting sleeves, one group of the connecting sleeves is rotatably connected to the surface of a long arm, and the other group of the connecting sleeves is rotatably connected to the surface of a short arm, one end of the long arm is rotatably connected to a sliding sleeve, the interior of the sliding sleeve is slidably connected to a sliding rail, and the inner surface of the main frame is symmetrically welded and fixed with supporting beams, two of the supporting beams are welded and fixed with sleeves on the surface, and the surface of the sleeves is rotatably connected to a cylinder.

[0007] As a further solution of the present invention: a positioning plate is welded and fixed to the top surface of the pad at a long side edge, a screw seat is welded and fixed to the top surface of the positioning plate, a first motor is fixedly installed on one end of the screw seat at the top surface of the positioning plate, and the slide rail is fixedly connected to the screw seat.

[0008] As a further solution of the present invention: the output end of the first motor is fixedly connected to the screw seat, the bottom end surface of the sliding sleeve is provided with a screw groove, and the screw groove is sleeve-connected to the screw seat.

[0009] As a further solution of the present invention: a connecting frame is welded and fixed to the side surface of the main frame, wherein two of the support beams are fixedly connected to the casing, and a second motor is fixedly connected to the surface of the support beam.

[0010] As a further solution of the present invention: the output end of the second motor is fixedly connected to a connecting shaft, the surface of the connecting shaft is sleeved and fixed with a gear, the surface of the gear is sleeved and connected with a belt, the surface of the belt is fixedly connected to a connecting frame, the bottom end of the connecting frame is fixedly connected to a storage box, the top surface of the storage box is fixedly installed with a third motor in the middle, the output end of the third motor is fixedly connected to a brush plate, and the top surface of the storage box is fixedly installed with a connecting pipe.

[0011] As a further solution of the present invention: a transmission wheel is equidistantly rotatably connected to the inner side of the conveying frame, one end of the transmission wheel is fixedly connected to a toothed disk, the top surface of the conveying frame is located at the edge of a long side and is rotatably connected to a docking block, a welding plate is symmetrically welded and fixed to the top surface of the conveying frame, the welding plate is rotatably connected to the cylinder, a storage box is fixedly connected to the surface of a long side of the conveying frame, the surface of the storage box is rotatably connected to a docking shaft, the surface of the docking shaft is fixedly connected to a cover shell, a reduction motor is fixedly installed on the surface of one of the welding plates, the output end of the reduction motor is sleeved with a chain, the chain is sleeved with the toothed disk, and the surface of the transmission wheel is sleeved with a conveyor belt.

[0012] Beneficial effects of the present invention: By setting up the main frame accessory structure, it can cooperate with the conveyor frame accessory structure to control the lifting and flipping of the conveyor belt, so that the semiconductor devices can be lifted and transported to a specified height, while defective or residual products can be unloaded, or residual garbage can be guided to reduce the subsequent cleaning workload, and in conjunction with the shell accessory structure, the surface of the conveying device can be further cleaned. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present invention will be further described below in conjunction with the accompanying drawings.

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the connection structure between the pad and the main frame accessories of the present invention; Figure 3 It is a schematic diagram of the connection structure of the casing accessories of the present invention; Figure 4 It is a schematic diagram of the structural connection of the conveyor frame accessories of the present invention; Figure 5 It is a schematic diagram of the disassembly of the conveyor frame accessories structure of the present invention.

[0015] In the figure: 1. pad; 2. positioning plate; 3. screw seat; 4. first motor; 5. slide rail; 6. sleeve; 7. long arm; 8. short arm; 9. main frame; 10. connecting sleeve; 11. supporting beam; 12. sleeve; 13. connecting frame; 14. sleeve shell; 15. second motor; 16. connecting shaft; 17. gear; 18. connecting frame; 19. storage box; 20. third motor; 21. connecting pipe; 22. brush plate; 23. conveyor frame; 24. transmission wheel; 25. gear plate; 26. docking block; 27. welding plate; 28. cylinder; 29. ​​storage box; 30. docking shaft; 31. cover shell; 32. reduction motor; 33. conveyor belt. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] See also Figure 1-Figure 5 As shown, the present invention is a conveying device for processing semiconductor devices, comprising a pad 1, the upper end of the pad 1 is movably connected to a main frame 9, the surface of the main frame 9 is fixedly connected to a sleeve 14, and one end surface of the main frame 9 is rotatably connected to a conveying frame 23; The bottom surface of the main frame 9 is symmetrically welded and fixed with connecting sleeves 10, one group of connecting sleeves 10 is rotatably connected to the surface of the long arm 7, and the other group of connecting sleeves 10 is rotatably connected to the surface of the short arm 8, one end of the long arm 7 is rotatably connected to the sliding sleeve 6, and the inside of the sliding sleeve 6 is slidably connected to the slide rail 5, and the inner surface of the main frame 9 is symmetrically welded and fixed with supporting beams 11, and the surfaces of the two supporting beams 11 are welded and fixed with sleeves 12, and the surface of the sleeves 12 is rotatably connected to the cylinder 28; A positioning plate 2 is welded and fixed to the top surface of the backing plate 1 at a long side edge, a screw seat 3 is welded and fixed to the top surface of the positioning plate 2, a first motor 4 is fixedly installed on the top surface of the positioning plate 2 at one end of the screw seat 3, and a slide rail 5 is fixedly connected to the screw seat 3; The output end of the first motor 4 is fixedly connected to the screw seat 3, and a screw groove is provided on the bottom surface of the sliding sleeve 6, which is sleeve-connected with the screw seat 3. In order to transport the semiconductor device from a low place to a high place, the user can start the operation by controlling the first motor 4 located on the positioning plate 2. The start of the first motor 4 will directly affect the action of its output end, and the output end will drive the screw on the surface of the screw seat 3 to rotate. The rotation of the screw drives the sliding sleeve 6 which is closely matched with it to start moving, and the sliding sleeve 6 will move forward or backward along the path on the surface of the screw seat 3. At the same time, under the restriction of the slide rail 5, the sliding sleeve 6 ensures the stability of its motion trajectory and will not deviate, thereby ensuring the accuracy and safety of the equipment operation. As the sleeve 6 moves, the entire long arm 7 will also begin to rotate slowly. The rotation process is very stable and controllable, avoiding mechanical damage or failure caused by too hasty operation. During this process, one end of the main frame 9 will be affected by the movement. As the long arm 7 rotates, one end of the main frame 9 will rotate around the short arm 8. This design can ensure the balance and stability of the entire conveying process. The other end of the main frame 9 will slowly rise under the action of force, gradually lifting the semiconductor device to the required height. During the entire conveying process, the coordinated work of all components ensures that the semiconductor device can be accurately and stably conveyed to the specified height, thereby meeting the height conveying requirements and ensuring the efficiency and safety of the equipment. A connecting frame 13 is welded and fixed to the side surface of the main frame 9, wherein two supporting beams 11 are fixedly connected to the casing 14, and a second motor 15 is fixedly connected to the surface of the supporting beam 11; The output end of the second motor 15 is fixedly connected to a coupling shaft 16, a gear 17 is sleeved and fixed on the surface of the coupling shaft 16, a sleeve belt is sleeved and connected on the surface of the gear 17, a connecting frame 18 is fixedly connected to the surface of the sleeve belt, a storage box 19 is fixedly connected to the bottom end of the connecting frame 18, a third motor 20 is fixedly installed on the top surface of the storage box 19 in the middle, a brush plate 22 is fixedly connected to the output end of the third motor 20, a connecting pipe 21 is fixedly installed on the top surface of the storage box 19. After the semiconductor devices have undergone a long period of transportation, impurities, dust and other substances carried by them may gradually accumulate and adhere to the surface of the conveyor belt 33, causing pollution of the surface of the conveyor belt 33, thereby affecting the transportation efficiency and the normal operation of the equipment. In order to cope with this situation, the user can start the operation of the second motor 15 by controlling the operation of the motor so that the operation of the motor directly drives the various components of the system to start working. Specifically, the two sets of gears 17 located at both ends of the casing 14 will start to rotate in linkage under the transmission action of the coupling shaft 16. This linkage rotation will transmit power, causing the connecting frame 18 connected to the surface of the sleeve belt to start to drag back and forth, connecting The reciprocating motion of the frame 18 drives the lower end of the brush disc 22 to gradually contact the lateral surface of the conveyor belt 33, ensuring that the brush disc 22 can cover the entire surface area of ​​the conveyor belt 33. After the user injects the cleaning agent into the pipe 21 in advance, when the brush disc 22 contacts the surface of the conveyor belt 33, the system can start to operate by controlling the third motor 20. As the third motor 20 is started, the brush disc 22 on the motor output end will start to rotate, and the cleaning agent in the storage box 19 will also be sprayed out, evenly covering the surface of the brush disc 22. The spraying amount and coverage of the cleaning agent will be regulated by the rotation of the brush disc 22, thereby ensuring that the cleaning agent can effectively act on the surface of the conveyor belt 33 to help clean impurities, dirt and other substances adhering thereto. During the cleaning process, the cleaning agent can not only dissolve the surface stains, but also effectively remove hard impurities, avoiding any potential damage to the semiconductor devices caused by these impurities, ensuring the stability of the conveying process, and at the same time, keeping the surface of the conveyor belt 33 clean is also to avoid the accumulation of impurities affecting the subsequent processing and transportation of semiconductor devices, thereby improving the working efficiency and accuracy of the equipment; The inner side of the conveying frame 23 is equidistantly connected to the transmission wheel 24, one end of the transmission wheel 24 is fixedly connected to the toothed disc 25, the top surface of the conveying frame 23 is located at the edge of a long side and is rotatably connected to the docking block 26, the top surface of the conveying frame 23 is symmetrically welded and fixed with a welding plate 27, the welding plate 27 is rotatably connected to the cylinder 28, a long side surface of the conveying frame 23 is fixedly connected to a storage box 29, the surface of the storage box 29 is rotatably connected to a docking shaft 30, the surface of the docking shaft 30 is fixedly connected to a cover shell 31, and the surface of one welding plate 27 is fixedly installed A reduction motor 32 is installed, and the output end of the reduction motor 32 is sleeved and connected with a chain, and the chain is sleeved and connected with the toothed disc 25. The surface of the transmission wheel 24 is sleeved and connected with a conveyor belt 33. Once a defective semiconductor device appears, or in order to assist in cleaning work, the user can control the operation of the cylinder 28 according to actual needs. The start of the cylinder 28 will directly affect the action of its output end, so that the whole system starts to operate. As the output end of the cylinder 28 is continuously retracted, the various components in the system will begin to undergo corresponding changes. Specifically, the entire conveyor rack 23 The conveyor frame 23 is rotated around the main frame 9 under the action of the cylinder 28. The start of this rotation action means that the inclination angle of the conveyor frame 23 is also gradually increasing. As the inclination angle increases, the defective products or residual impurities will gradually be affected by gravity, begin to slide slowly downward, and finally move to the slot above the storage box 29. In this process, all items will naturally slide into the slot by gravity, and there will be no jamming or blocking, ensuring the efficiency and smoothness of the entire cleaning process. When all the defective products or impurities have completely entered the storage box 29, the system's cleaning work can be completed and wait for the next step of operation. After the subsequent operation process is completely completed, the user can easily unlock and flip the cover shell 31 by controlling the operation of unlocking the cover shell 31. At this time, the user can easily collect materials, take out the stored impurities or defective products, and prepare to enter the next stage of production operations. The whole process is simple and efficient to operate, which can effectively help users solve the problem of handling defective products and impurities, improve the operation efficiency of the production line, and ensure the smooth progress of subsequent production links.

[0018] Working principle of the present invention: In order to enable semiconductor devices to be transported from a low place to a high place, the user can start the operation by controlling the first motor 4 located on the positioning plate 2. The start of the first motor 4 will directly affect the action of its output end, and the output end will drive the screw on the surface of the screw seat 3 to rotate. The rotation of the screw drives the sleeve 6 that fits closely with it to start moving, and the sleeve 6 will move forward or backward along the path on the surface of the screw seat 3. At the same time, under the restriction of the slide rail 5, the sleeve 6 ensures the stability of its motion trajectory and will not deviate, thereby ensuring the accuracy and safety of the equipment operation. With the movement of the sleeve 6, the entire long arm 7 will also begin to rotate slowly. The rotation process is very stable and controllable, avoiding the occurrence of accidents caused by operation. Mechanical damage or failure caused by too hasty During this process, one end of the main frame 9 will be affected by the movement. As the long arm 7 rotates, one end of the main frame 9 will rotate around the short arm 8. This design can ensure the balance and stability of the entire transportation process. The other end of the main frame 9 will slowly rise under the action of force, gradually lifting the semiconductor device to the required height. During the entire transportation process, the coordinated work of all components ensures that the semiconductor device can be accurately and stably transported to the specified height, thereby meeting the height transportation requirements and ensuring the efficiency and safety of the equipment. After the semiconductor device has undergone a long transportation process, impurities, dust and other substances it carries may gradually accumulate and stick to it. The surface of the conveyor belt 33 is contaminated, which in turn affects the conveying efficiency and the normal operation of the equipment. In order to deal with this situation, the user can control the second motor 15 to start operating, so that the operation of the motor directly drives the various components of the system to start working. Specifically, the two sets of gears 17 located at both ends of the casing 14 will start to rotate in conjunction with the transmission action of the connecting shaft 16. This coordinated rotation will transmit power, so that the connecting frame 18 connected to the surface of the belt starts to drag back and forth. The reciprocating motion of the connecting frame 18 drives the lower end of the brush plate 22 to gradually contact the lateral surface of the conveyor belt 33, ensuring that the brush plate 22 can cover the entire surface area of ​​the conveyor belt 33. The user injects cleaning agent into the connecting pipe 21 in advance. After that, when the brush plate 22 contacts the surface of the conveyor belt 33, the system can start operating by controlling the third motor 20. As the third motor 20 starts, the brush plate 22 on the motor output end will start to rotate, and at the same time, the cleaning agent in the storage box 19 will also be sprayed out to evenly cover the surface of the brush plate 22. The spraying amount and coverage of the cleaning agent will be regulated by the rotation of the brush plate 22, thereby ensuring that the cleaning agent can effectively act on the surface of the conveyor belt 33 to help clean impurities, dirt and other substances adhering thereto. During the cleaning process, the cleaning agent can not only dissolve surface stains, but also effectively remove hard impurities, thereby avoiding any potential damage to semiconductor devices caused by these impurities, thereby ensuring the stability of the conveying process, and at the same time,Keeping the surface of the conveyor belt 33 clean is also to prevent the accumulation of impurities from affecting the subsequent processing and transportation of semiconductor devices, and to improve the working efficiency and accuracy of the equipment. Once defective semiconductor devices appear, or to assist in cleaning work, the user can control the operation of the cylinder 28 according to actual needs. The start of the cylinder 28 will directly affect the action of its output end, so that the entire system starts to operate. As the output end of the cylinder 28 is continuously retracted, the various components in the system will begin to change accordingly. Specifically, the entire conveyor frame 23 will rotate around the main frame 9 under the action of the cylinder 28. The start of this rotation action means that the inclination angle of the conveyor frame 23 is also gradually increasing. As the inclination angle increases, defective products or residual impurities will gradually be affected by gravity, begin to slowly slide downward, and finally Move to the slot above the storage box 29. During this process, all items will naturally slide into the slot by gravity without getting stuck or blocked, ensuring the efficiency and smoothness of the entire cleaning process. When all defective products or impurities have completely entered the storage box 29, the system's cleaning work is completed and waiting for the next step of operation. After the subsequent operation process is completely completed, the user can easily unlock and flip the cover shell 31 by controlling the operation of unlocking the cover shell 31. At this time, the user can easily collect materials, take out the stored impurities or defective products, and prepare to enter the next stage of production operations. The whole process is simple and efficient, which can effectively help users solve the problem of handling defective products and impurities, improve the operating efficiency of the production line, and ensure the smooth progress of subsequent production links.

[0019] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A conveying device for semiconductor device processing, comprising a pad (1), characterized in that: The upper end of the pad (1) is movably connected to a main frame (9), a cover (14) is fixedly connected to the surface of the main frame (9), and one end surface of the main frame (9) is rotatably connected to a conveying frame (23); The bottom surface of the main frame (9) is symmetrically welded and fixed with a connecting sleeve (10), wherein one group of the connecting sleeves (10) is rotatably connected to the surface of a long arm (7), and the other group of the connecting sleeves (10) is rotatably connected to the surface of a short arm (8), one end of the long arm (7) is rotatably connected to a sliding sleeve (6), and the interior of the sliding sleeve (6) is slidably connected to a slide rail (5), and the inner surface of the main frame (9) is symmetrically welded and fixed with a supporting beam (11), wherein two of the supporting beams (11) are welded and fixed with sleeves (12), and the surface of the sleeve (12) is rotatably connected to a cylinder (28).

2. A conveying device for semiconductor device processing according to claim 1, characterized in that: A positioning plate (2) is welded and fixed to the top surface of the pad (1) at a long side edge, a screw seat (3) is welded and fixed to the top surface of the positioning plate (2), a first motor (4) is fixedly mounted on one end of the screw seat (3) at the top surface of the positioning plate (2), and the slide rail (5) is fixedly connected to the screw seat (3).

3. A conveying device for semiconductor device processing according to claim 2, characterized in that: The output end of the first motor (4) is fixedly connected to the screw seat (3); a screw groove is provided on the bottom surface of the sliding sleeve (6); and the screw groove is sleeve-connected to the screw seat (3).

4. A conveying device for semiconductor device processing according to claim 1, characterized in that: A connecting frame (13) is welded and fixed to the side surface of the main frame (9), wherein two of the supporting beams (11) are fixedly connected to the casing (14), and a second motor (15) is fixedly connected to the surface of the supporting beam (11).

5. A conveying device for semiconductor device processing according to claim 4, characterized in that: The output end of the second motor (15) is fixedly connected to a connecting shaft (16); a gear (17) is sleeved and fixedly mounted on the surface of the connecting shaft (16); a sleeve belt is sleeved and connected to the surface of the gear (17); a connecting frame (18) is fixedly connected to the surface of the sleeve belt; a storage box (19) is fixedly mounted to the bottom end of the connecting frame (18); a third motor (20) is fixedly mounted at the middle of the top surface of the storage box (19); a brush disc (22) is fixedly mounted to the output end of the third motor (20); and a connecting pipe (21) is fixedly mounted to the top surface of the storage box (19).

6. A conveying device for semiconductor device processing according to claim 1, characterized in that: The inner side of the conveying frame (23) is equidistantly connected to a transmission wheel (24) for rotation, one end of the transmission wheel (24) is fixedly connected to a toothed disc (25), the top surface of the conveying frame (23) is located at the edge of a long side and is rotationally connected to a docking block (26), the top surface of the conveying frame (23) is symmetrically welded and fixed to a welding plate (27), the welding plate (27) is rotationally connected to a cylinder (28), a long side surface of the conveying frame (23) is fixedly connected to a material storage box (29), the surface of the material storage box (29) is rotationally connected to a docking shaft (30), the surface of the docking shaft (30) is fixedly connected to a cover shell (31), a reduction motor (32) is fixedly mounted on the surface of one of the welding plates (27), the output end of the reduction motor (32) is sleeved and connected to a chain, the chain is sleeved and connected to the toothed disc (25), and the surface of the transmission wheel (24) is sleeved and connected to a conveyor belt (33).

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